Vacuum Compatible Stages

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Baldric Copeland
5 years ago
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1 Vacuum Compatible Stages

Understanding Vacuum Compatible Stage Specifications Introduction 'Kohzu vacuum-compatible stages' are precise and durable positioning instruments ideally suited for the extreme requirements imposed

2 Understanding Vacuum Compatible Stage Specifications Introduction 'Kohzu vacuum-compatible stages' are precise and durable positioning instruments ideally suited for the extreme requirements imposed by high-vacuum environments. With few exceptions, our vacuum-compatible stages exhibit performance characteristics comparable to those of Kohzu standard motion products. Kohzu vacuum-compatible stages are manufactured, assembled, inspected and packaged under highly controlled conditions. Since proper material selection is at the core of vacuum-compatibility, Kohzu engineers only specify low outgas metals, plastics, lubricants and components... construction materials are limited to aluminum, stainless steel, and phosphor bronze. Kohzu's years of developing customized vacuum-compatible solutions for synchrotron radiation research, semiconductor lithography and space development applications have yielded a vacuum-compatible motion instruments product line of unsurpassed quality, reliability and performance. Ultrahigh vacuum oil-free lubrication as well as high-precision linear and angular encoders can be provided on request. Please feel free to contact us for all your high and ultrahigh vacuum needs. Vacuum Test Results Ultimate System Pressure Residual Gas Analysis Outgas Rate A small chamber was prepared to conduct these three vacuum tests Vacuum chamber is first tested empty and then after introducing Kohzu's MVSA07A- RT vacuum-compatible swivel stage. 1Ultimate System Pressure 2Residual Gas Analysis Quadrupole mass spectrometer detects mass to charge ratio (m/z), where most elements detected are hydrogen, water, carbon and nitrogen compounds. Additionally trace amounts of hydrocarbon and carbonate fluorine are detected and directly attributed to the vacuum grease used to lubricate our stages. The partial pressures of trace contaminants represent a small contribution to overall system pressure. However, outgassed contaminants will increase as stage temperature rises. If ultrahigh vacuum conditions are required, we offer customized oil-free stages fitted with materials and lubricants suitable for baking. Kohzu can address all of your vacuum requirements, including those for UHV motion applications. Fig. 1 Pressure vs. Time Fig. 2 After introducing stage (no baking) and After baking chamber for 10hrs. at 150C (without stage) 234

3 3Gas Emission Velocity (Orifice method) Test sample chamber Quadrupole mass spectrometer Ionization vacuum gauge A partition is installed between the test sample chamber P1 and base chamber P2 that is connected to the exhaust system. The partition has fine holes that generate a pressure difference between P1 and P2. By measuring the pressure of P1 and P2 and examining the pressure difference, the gas emission velocity from the sample can be obtained. Since emission and adsorption occur also on the surface of the vacuum equipment, first perform measurements with empty chambers for control data. Calculate the net gas emission velocity from the sample by subtracting the control data. Base chamber Partition with orifice holes Ionization vacuum gauge Turbo-molecular pump Q = C(P1-P2) - P(Pam 3 /s) QGas emission velocity C: Conductance P: Differential pressure with empty chambers Important Design / Usage Considerations Vacuum Chamber Consideration must be given to vacuum vessel content, content outgas rate and the system's pumping conductance. Vacuum Handling Minimize exposure of vacuum-compatible stages to atmospheric conditions. After unpacking, install vacuum-compatible stages into a vacuum vessel as soon as possible. Motor Heating Heat conductivity and dissipation are significantly reduced in a vacuum environment. This will lead to over-heating of in-vacuum stepper motors if operated continuously for long periods of time. Motor overheating will lead to a rise in system pressure caused by the evaporation of motor-bearing lubricants. Evaporation of motor-bearing lubricants can in turn lead to premature bearing failure. Furthermore, dimensional instabilities produced by thermal gradients and different coefficients of thermal expansion will occur within positioning mechanics. Pressure saturation Stasrt flow the current Rotaing motor(30 see.) The left graph depicts pressure change over time as a vacuumcompatible stepper motor is powered 'On' and 'Off' inside a vacuum chamber. According to the data collected, after starting a current flow to an in-vacuum motor, system pressure will increase until reaching a saturation point. Subsequent 30 second power-cycles produce temporary, but noticeable pressure bursts that, almost immediately, return to original pressure levels. Repeated cycling of the motor over a period of 25 hours gradually improves system pressure to pre-cycling levels. Fig. 3 Pressure vs. Time (while cycling motor) To improve or maintain minimum system pressure... Cycle in-vacuum motors as previously described Maintain lowest possible motor holding currents To improve or maintain maximum positional accuracy... Reduce motor heating by minimizing power 'On' cycles and holding current Introduce thermal insulation between motor and motion mechanics Add optional, vacuum-compatible, linear or angular encoders with feedback control 1 1. Some Kohzu stages can not be fitted with insulating spacers or encoders. Please contact sales for more information on stage options and functionality. CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 235

Vacuum Compatible X Linear Stages MVXA05A-R1 50mm Straightness 1m / 20mm Cross-Roller Bearing 1m 7.

570g Accumulated lead error Repeatability 6m / 20mm 0.

screw, Pitch 0.5mm 0.5m / step (Half step) 2.5mm / sec. 10m / 20mm 0.

4 Vacuum Compatible X Linear Stages MVXA05A-R1 50mm Straightness 1m / 20mm Cross-Roller Bearing 1m 7.5mm 3 arcsec / kgf-cm, Roll direction Ground screw, Pitch 0.5mm 5kg 0.5m / step (Half step) 2.5mm / sec. 570g Accumulated lead error Repeatability 6m / 20mm 0.5mm Five (5) phase stepper motor (Vacuum compatible) 1m MVXA07A-R1 Accumulated lead error Repeatability 70mm Cross-Roller Bearing 10mm Ground screw, Pitch 0.5mm 0.5m / step (Half step) 2.5mm / sec. 10m / 20mm 0.5mm Straightness 1m / 20mm 1m 1 arcsec / kgf-cm, Roll direction 10kg 750g Five (5) phase stepper motor (Vacuum compatible) 1m MVXA10A-L2 100mm Straightness 3m / 100mm Linear guide 2m 50mm 0.5 arcsec / kgf-cm, Roll direction Ball screw, Pitch 2.0mm 20kg 2m / step (Half step) 10mm / sec. 3.5kg Accumulated lead error Repeatability 15m / 100mm 0.5mm Five (5) phase stepper motor (Vacuum compatible) 2m 236

5 Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bake-able stages. Specifications may be changed without prior notice. CONTACT TEL: FAX: [ ] [URL] 237

1kg Five (5) phase stepper motor (Vacuum compatible) MVRA07A-W 68mm 0.005 Bearing Eccentricity 0.01mm 135 Surface runout 0.

6 Vacuum Compatible Vertical Linear / Rotation Stages MVZA07A-X1 70mm Cross-Roller Bearing 10mm Ground screw, Pitch 0.5mm 0.5m / step (Half step) 2.5mm / sec. Repeatability 0.5mm Straightness 2m / 20mm 1.5m 5kg 1.1kg Five (5) phase stepper motor (Vacuum compatible) MVRA07A-W 68mm Bearing Eccentricity 0.01mm 135 Surface runout 0.02mm / 360 Worm & worm wheel 7 arcsec / kgf-cm 0.004/ step (Half step) 6kg 20/ sec. Accumulated lead error 0.015/ kg Repeatability Five (5) phase stepper motor (Vacuum compatible) Pitch Error 0.01/ 4 238

7 Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bake-able stages. Specifications may be changed without prior notice. CONTACT TEL: FAX: [ ] [URL] 239

Vacuum Compatible Swivel Stages (Goniometers) MVSA05B-RT 50mm 0.

00156/ step (Half step) 7.75/ sec. 50mm0.2mm 0.05mm / 10 0.006 Phosphor bronze 670g Five (5) phase stepper motor (Vacuum compatible) 70mm 0.

8 Vacuum Compatible Swivel Stages (Goniometers) MVSA05B-RT 50mm Cross-Roller Bearing 3 arcsec / kgf-cm, Roll direction 10 3kg Rotation center Rotation center deviation MVSA07A-RT Worm & worm wheel / step (Half step) 7.75/ sec. 50mm0.2mm 0.05mm / Phosphor bronze 670g Five (5) phase stepper motor (Vacuum compatible) 70mm Cross-Roller Bearing 0.9arcsec / kgf-cm, Roll direction 10 3kg Worm & worm wheel / step (Half step) 860g Rotation center 7.65/ sec. 70mm0.2mm Five (5) phase stepper motor (Vacuum compatible) Rotation center deviation 0.05mm /

9 Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bake-able stages. Specifications may be changed without prior notice. CONTACT TEL: FAX: [ ] [URL] 241

Motor Controller General Information Kohzu offers 2, 4 and 8 axis high-speed controllers SC-200, SC-400 and SC-800 respectively.

For full functionality, SC- 800 controllers must be purchased together with SD-800 driver boxes. For more information on these and other custom motion controller solutions, feel free to contact us.

] SC-200 SC-400 Motion controller (built-in motor drivers) SC-200 (FS) SC-400 (FS) Bipolar pentagon, Microstep 16 steps (Max 250 division) Synchronized, non-synchronized point-to-point, 2D and 3D

10 Motor Controller General Information Kohzu offers 2, 4 and 8 axis high-speed controllers SC-200, SC-400 and SC-800 respectively. Due to space limitations, the 8 axis SC-800 controller houses its driver units in a separate box identified as SD-800. For full functionality, SC- 800 controllers must be purchased together with SD-800 driver boxes. For more information on these and other custom motion controller solutions, feel free to contact us. See also page 206 Model Product type Control axis number Motor drive method Microstep division number Motion Velocity profile Preset motion amount[pls.] SC-200 SC-400 Motion controller (built-in motor drivers) SC-200 (FS) SC-400 (FS) Bipolar pentagon, Microstep 16 steps (Max 250 division) Synchronized, non-synchronized point-to-point, 2D and 3D linear interpolation Symmetric and asymmetric trapezoidal, Symmetric and asymmetric S-curve 1 to 16,777,215 (=2 24-1) [pls] Drive frequency[pps] 1-500k[pps] SC-200 (FS) Home position return Feedback Position indication 14 types Encoder closed loop Motor and encoder pulse, Converted motor and encoder pulse System parameter Drive current 40 types Maximum 1.4A / phase Display LCD 4lines I/O interface RS-232C / GP-IB conversion SC-400 (FS) Motor Controller Features Power requirement Control command Usege enviroment Dimension[mm](WxHxD) *without any projections [kg] Accessories AC100V 10%, 50 / 60Hz (FS:AC90240V) 41types 44 types Temperature 0 to 40, Humidity 0 to 85% kg 8.6kg Power supply cable, CD-ROM (manual, software) Note: Type FS includes DC input driver and adapts to international power supply. Drive System Control Modes I/O Interface Kohzu Five (5) phase stepper motor controllers use micro step drivers for smoothest possible motion control. Our drivers can be configured to divide basic motor step up to 250 times. Microstep (10division) Kohzu Five (5) phase stepper motor controllers offer synchronized and nonsynchronizedpoint-to-point, 2D and 3D linear interpolation modes, as well as trapezoidal and S-curve velocity profile control modes. Kohzu Five (5) phase stepper motor controllers are fitted with both RS-232C and GPIB input / output interfaces. The RS-232C interface is convenient for quick hookup with most PC's and simple to control with third-party control software. The GPIB interface is ideal for highspeed communication and easily integrated with NI (National Instruments) hardware and software. High-speed S-curve Trapezoidal Fullstep Low-speed Instruction for use of motor controller Give sufficient attention to the application environment when considering a controller, such as temperature, humidity, gases present, high magnetic fields, etc. The controller is not designed or manufactured for applications related to nuclear power, medical care and other applications that may cause direct harm to life. Controller mounting, connection and inspection should be performed by a trained technician only. Should defects or problems occur, contact Kohzu immediately. Inspection and repairs must be performed by a trained technician only. Select a motor controller suitable for your application. Do not exceed the specifications limits. 242

Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bake-able stages. Specifications may be changed without prior notice.

vacuum-compatible stages and SC controllers are: Stage-to-feedthrough cable Electrical feedthrough (Hermetically sealed) Feedthrough-to-controller cable Stage-to-feedthrough cable detail D-Sub

They are fitted with PEEK (Polyether Ether Ketone) D-Sub female connectors at both ends to mate with stage and feedthrough male D-Sub interfaces.

In addition to the above mentioned connectivity accessories, Kohzu can also provide vacuum compatible flying-lead cables (up to 2m in length) and various wiring-block terminals.

11 Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bake-able stages. Specifications may be changed without prior notice. Connectivity Accessories Stage Feedthrough Motion controller Vacuum compatible cable Cable Female / Female Female / Male Vacuum-side Air-side The components required to connect Kohzu vacuum-compatible stages and SC controllers are: Stage-to-feedthrough cable Electrical feedthrough (Hermetically sealed) Feedthrough-to-controller cable Stage-to-feedthrough cable detail D-Sub Female at both ends Flange mounted electrical feedthrough D-sub female Vacuum-side male Air-side male Vacuum-compatible cables are Kapton insulated and approximately 50cm in length. They are fitted with PEEK (Polyether Ether Ketone) D-Sub female connectors at both ends to mate with stage and feedthrough male D-Sub interfaces. Flange mounted electrical feedthroughs are fitted with D-Sub male interface on both vacuum and air sides. Note that pins are straight-through design, so typical pin assignment will be mirrored. In addition to the above mentioned connectivity accessories, Kohzu can also provide vacuum compatible flying-lead cables (up to 2m in length) and various wiring-block terminals. Contact your local sales representative for more information. Stage wiring D-Sub Vacuum compatible 5-phase stepper moter Blue Orange Red Black Green Sensor Red White Black Kapton Black CWL.S CCWL.S COM CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 243

Motorized Vertical Linear Stages

Motorized Vertical Linear Stages 50~160mm Table 50mm Table Timing Belt, Ground Screw, Aluminum Body, Cross-Roller Bearing 166 Ground Screw, Aluminum Body, Cross-Roller Bearing 17 70mm Table Timing Belt, Ball Screw, Aluminum Body, Cross-Roller