PRODUCTS OVERVIEW. Linear Motion in its Simplest Form

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1 Linear Motion in its Simplest Form

2 Simplicity of Design - IntelLiDrives TM produce direct linear motion, eliminating stretching belts, slipping pulleys, hysteresis and wear of the leadscrews. Cost Effective - IntelLiDrives TM offer lowest cost linear motion system solution due to their compatibility with standard stepping motor indexers and drivers. Reliability - IntelLiDrives TM built-in roller ball bearing system feature constant gap design and do not require any adjustments or preloads. Air bearing linear drives produce frictionless design, resulting in a long, maintenance-free operation. High Throughput - IntelLiDrives TM are capable of velocities in excess of 100 ips and low mass forcer design allows high acceleration and response. Flexibility - IntelLiDrives TM motions can be performed in any plane. Multiple forcers can move on a single platen with overlapping trajectories. XY gantry and direct Cartesian positioning systems can be implemented with multiple forcers. High Performance - IntelLiDrives TM can approach closed loop performance with the advantages of the open loop design. Repeatability of " and displacement accuracy of " can be achieved without the expense of feedback devices. For ultimate performance IntelLiDrives TM can be supplied with linear encoders and controlled in closed loop servo mode as two-phase brushless motors. Proven Technology - IntelLiDrives TM are used in numerous applications - ranging from from all phases of semiconductors manufacturing to automotive parts assembly.

3 Performance: Resolution Repeatability Force Travel length Velocity Acceleration Bearing system Configurations: Single Axis Motor Dual Axes Motor XY Gantry System Rotary Tables Z/Theta Positioners Multiple Forcers on the Platen Multihead Cartesian Planar System in in 3 to 100 lbs 160 in 100 in/sec 3 G s ball bearing rollers air bearings Advantages: Direct Linear Drive Simplicity of Design Reliability Compact Packaging High Throughput Flexibility Compatible with Standard Stepper Drives Applications: Semiconductor/Electronics manufacturing Medical Instrumentation Machine Tools Robotics High speed pick and place robots Automatic assembly Cartesian robots Engraving machines Vision inspection Dispensing Material handling Wire bonders Die bonders Wafer prober Wafer handling IC laser trimmers PCB assembly PCB hole drilling

4 LINEAR STEPPING MOTORS LINEAR STEPPING MOTORS SERIES BB Small profile Short moving part Built-in mechanical roller bearings No air gap adjustment required No servo tuning required Multiple forcers on single platen Lowest cost linear motion solution SERIES AB Small profile Short moving part High stiffness top air bearings Multiple forcers on single platen Magnetically preloaded side roller bearing LINEAR STEPPING MOTORS SERIES AA High force motors High stiffness air bearings Air bearings on all surfaces Multiple forcers on single platen ROTOLINEAR TABLES SERIES RT Direct drive rotary tables Low profile Built-in limit sensor Axial and radial air bearings Unlimited rotation Operate in any position Can operate in open loop (stepping mode) and closed loop (servo mode)

5 CARTESIAN PLANAR SYSTEM SERIES XY Mounted face up or inverted High stiffness air bearings Large travel area Overlapping trajectories with multiple forcers XY Theta control is possible Lightweight platen construction LIFT Z SERIES Z (ZT) Lift motor Air bearings on all surfaces Can be combined with rotary table (as shown) AIR BEARING XY TABLE IntelLiStage 3-DOF controls ( X, Y, Theta ) Direct Drive Cartesian system High stiffness air bearings Sub micron position feedback system for closed loop controls LINEAR SERVO MOTORS IntelLiGlide Air bearings Three phase brushless servo motor Integral sub micron linear encoder Velocity up to 10 m/sec Acceleration up to 10 G Clean room compatible

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