Rotary Tables. Z Theta system

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2 Rotary Tables High force Air bearings Roller bearings XY tables Z Theta system Cartesian systems

3 Linear stepping motors and systems Linear brushless motors and systems Linear measurement systems

4 Semiconductor/Electronics manufacturing wire bonders die bonders wafer prober wafer handling IC laser trimmers material handling Medical Instrumentation dispensing Machine Tools Robotics turn tables high speed pick and place robots automatic assembly cartesian robots analyzers engraving machines dispensing PCB assembly vision inspection

5 IntelLiDrives technology in semiconductor assembly OEM equipment Samsung Muhlbauer RD Automation/Laurier ESC International ASM Veeco Bourns

6 300 mm wafer inspection Wire bonder XY table PCB inspection Wire/die bonder MHS 300 mm wafer presentation system

7 Features: built-in roller bearings no air gap adjustment magnetic preload top/side small profile multiple forcers on the platen force 5, 8, 12, 15 lbs accuracy in/12 in

8 Features: air/ball or complete air bearing system high stiffness air bearings small profile multiple forcers on the platen force range 20 to 100 lbs repeatability in multiple forcers on the platen high force motors can operate upside down

9 Features: high torque motors 15 lb*ft axial/radial air bearings unlimited rotation small profile 1.4 in multiple limit sensors dia 4, 6, 8, 12 in center hole repeatability 10 arc-sec

10 Technology for 12 wafer applications RotoLinear TM motor technology direct drive planar air bearings unlimited rotation small profile 2.0 center hole 8, 10, 14 dia repeatability 1 arc-sec resolution 1 arc-sec

11 Features: air bearings on all surfaces can be combined with rotary table (as shown) stroke 0.5 to 2.0 in. force 20 to 40 lbs

12 Features: large travel area up to 80 squared multiple forcers on the platen overlapping trajectories lightweight platen (1/3 of the competitive designs) X Y Theta control possible speed 80 in/sec acceleration 3G

13 Shown upside down direct drive cartesian XY system theta correction possible large travel area 40in x 60in high acceleration 3G high speed 80 in/sec air bearing with magnetic preload repeatability in multiple forcers on single platen mounted face up or inverted lightweight construction (1/3 of competitive design)

14 Features: direct drive cartesian system integrated XY table/motor air bearings 3-DOF controls stroke 3 in x 3 in acceleration 3 G resolution 0.1 mm accuracy 5 mm orthogonality 5 mm unique 3-DOF contactless encoding system (0.1 mkm resolution)

15 Features: Position Feedback Readhead senses lost steps converts open loop stepper to closed loop servo encoder scale not required can be used with single axis and planar motors incremental digital or analog quadrature output resolution up to 0.5 microns

16 Closed loop servo performance at open loop prices: Real time closed position loop Sub-micron resolution Linear motor performance High speed moves Fast settling time Linear or S-curve acceleration Standalone Indexer or Smart Drive

17 InteLiGlide - 3 phase linear brushless motor with air bearings and high resolution encoder InteLiSlide - 3 phase linear brushless motor with recirculating bearings and high resolution encoder

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19 (comparative analysis) Linear Drives Direct Drive Transmission Drive Linear Brushless Motor with linear encoder with built-in magnetic resolver Linear Stepping Motor Belt Drive Lead Screw Drive Ball Screw Drive Commercial grade Precision grade

20 Linear Motion Drives (comparative analysis) Linear Motion Drive is a linear positioning system consisting of the electromagnetic actuator (rotary or linear), linear guide (bearing) and transmission mechanism (if applicable). In the following analysis Linear Drives are compared on the basis of their inherent linear open loop accuracy. Even though a linear resolver may be employed in the motor, linear open loop accuracy will still be determined by the manufacturing and installation tolerances. Linear brushless motors with magnetic resolvers like NSK Megatrust and THK Servo Guide Type HRS are used for comparison. For improved linear accuracy a linear position transducer (glass or metal encoder) can be used with any above linear technologies.

21 Conditions for Comparison IntelIiDrives pitch error /12 cyclic error (2 phase) (4 phase, with cyclic error correction) Precision ballscrew lead accuracy /1 - does not include accuracy of the rotary motors/encoders Commercial ballscrew lead accuracy /1 Acme lead screw - does not include accuracy of the rotary motors/encoders lead accuracy /1 - does not include accuracy of the rotary motors/encoders Belt Drive accuracy /1 Linear brushless motor / (50 mkm/1m mkm) - does not include accuracy of the rotary motors/encoders

22 $$$ Relative Cost Comparison $$$ IntelLiDrives Belt Drive Leadscrew Drive Commercial Ballscrew Precision Ballscrew Linear Brushless Motors

23 Repeatability Linear Brushless Motors IntelLiDrives Precision Ballscrew Commercial Ballscrew Leadscrew Drive Belt Drive mils

24 Accuracy (travel 12 ) IntelLiDrives (4 phase) Linear Brushless Motors Precision Ballscrew IntelLiDrives (2 phase) Commercial Ballscrew Leadscrew Drive Belt Drive mils

25 Accuracy (travel 36 ) IntelLiDrives (error correction) IntelLiDrive (2 phase) Linear Brushless Motors Precision Ballscrew Commercial Ballscrew Leadscrew Drive Belt Drive mils

26 IntelLiDrives and Super High Lead Ball Screws IntelLiDrive parameter 2 phase 4 phase or with cyclic parameter error correction cumulative pitch /12 (10 mkm/300mm) accumulated ref. lead error error Ec cyclic error (30 mkm) (12 mkm) variation e c variation e2π SHL Ball screw 40 mm lead 25 mkm/300mm 20 mkm 8 mkm motor full step error 6 mkm (3% full step) motor microstep error 10 mkm (5% full step) total accuracy 40 mkm 22 mkm total accuracy 55 mkm hysteresis (10 mkm) axial play 10 mkm

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