Linear Motor System 線性馬達系統. Linear Motor System. Technical Information. Technical Information 技術手冊

Transcription

1 inear Motor System 線性馬達系統 inear Motor System 技術手冊 Technical Information Technical Information

2 INDUSTRIE 4. Best Partner Multi Axis Robot Pick-and-place / Assembly / Grinding and Polishing / Semiconductor / ight Industry / Automotive industry / Food industry Articulated Robot Delta Robot Movable Delta Robot SCARA Robot Wafer Robot Electric Gripper Single Axis Robot Medical Equipment Precision / Semiconductor / Medical / FPD KK, SK KS, KA KU, KE, KC Hospital / Rehabilitation centers / Nursing homes Robotic Gait Training System Hygiene System Robotic Endoscope Holder Ballscrew inear Guideway Precision Ground / Rolled Super S series Super T series Mini Roller Ecological & Economical lubrication Module E2 Rotating Nut (R1) Energy-Saving & ThermalControlling (C1) Heavy oad Series (RD) Automation / Semiconductor / Medical Ball Type--HG, EG, WE, MG, CG Quiet Roller Type--QH, QE, QW, QR Other--RG, E2, PG, SE, RC Direct Drive Rotary Table Bearing Aerospace / Medical / Auto industry RAB Series RAS Series RCV Series RCH Series AC Servo Motor & Drive Semiconductor / Packaging machine / SMT / Food industry / CD Drives-D1, D1-N, D2 Motors-5W~2W Machine tools / Robot Crossed Roller Bearings Ball Screw Bearings inear Bearing Support Unit Torque Motor (Direct Drive Motor) Inspection / Testing equipment / Machine tools/ Robot Rotary Tables-TMS,TMY,TMN TMRW Series inear Motor System Technical Information Publication Date May 22, first edition Print Date January 217, 7th edition 1. HIWIN is the registered trademark of HIWIN Mikrosystem Corp.. Please avoid buying the counterfeit goods that are from unknown sources to protect your rights. 2. Actual products may be different from the specifications and photos in this catalog, and the differences in appearances or specifications may be caused by, among other things, product improvements. inear Motor Automated transport / AOI application / Precision / Semiconductor Motor type-ironcore motor, ironless motor, planar servo motor, shaft motor Air bearing stage X-Y stage Gantry stage Positioning Measurement System Cutting machines / Traditional gantry milling machines / Programmable drilling machines High Resolution Signal Translator High-precision Enclosed High Efficiency Counter 3. HIWIN will not sell or export those techniques and products restricted under the "Foreign Trade Act" and relevant regulations. Any export of restricted products should be approved by competent authorities in accordance with relevant laws, and shall not be used to manufacture or develop the nuclear, biochemical, missile and other military weapons. Copyright HIWIN Mikrosystem Corp.

3

4 Contents inear motor system 1.Technical Information 4 Brief Introduction to proper nouns. SA:low gravity center, high payload inear motor SA stages are equipped with ironcore motor(s) and well suited for applications that require point to point precision positioning and larger payload. 2.Standard linear motor stage 6 Standard single, X-Y, gantry and air bearing stages are constructed by ironcore or ironless motor. HIWIN can quickly provide the following products: 2.1 Positioning stage SA:low center of gravity, high payload MC:high-precision, high-speed stability MT:lightweight, high acceleration/deceleration X-Y stage Gantry stage Air bearing stage 62 MC:high-precision, high-speed stability inear motor MC stages are equipped with coreless motor(s) and well suited for applications that require precision positioning and constant velocity scanning motion. MT:middle precision, light payloads inear motor MT stages are equipped with a coreless shaft motor, which perfectly replace the combination of ball screw and AC servo motor, and improve max. speed greatly. 3.Customized positioning stage 66 A sampling of customized solutions is shown here. With various combinations of standard single axis stage, it may constitute a number of different linear stages. We can also provide customized products according to customer demand. 4.Drives 11 Brief introduction to HIWIN standard drive D1 and D1-N. Appendix 1 The inquiry form at the end of this catalogue helps us know customer s demand, so that we can make a preliminary design. A: Motor sizing 1 B: Optional regeneration resistors 118 C: Inquiry form (Mechanical system) 12 D: Inquiry form (Electronical control system) 121

5 4 MM99TE7-171 inear Motor System 5 1 Technical Information 1.1 Glossary Back emf constant (K v ) This is the ratio of the back emf voltage (rms) to the motor rotational speed or linear speed (rpm or m/s). The back emf is the electromagnetic force, which is created at the movement of the coil in the magnetic field of permanent magnets, e.g. in a servo motor. Acceleration This is the speed change per time unit, i.e., acceleration = speed / time or a = v / t. Acceleration time This is defined as the time a drive requires from start until achieving maximum speed. Vertical straightness The measure of straightness when moving in X-axis. If there is deviation in vertical straightness, there would be positioning error in Z-axis, as the system moves along X- axis. Torque This is a measurement of the rotational movement in a body and consequently a vectorial direction that can be expressed in the following cross product: The torque is expressed in the equation Nm = kg x m²/s². Repeatability Repeatability should not be confused with absolute accuracy. A linear axis can have medium accuracy, but have good repeatability. Uni-directional repeatability can be measured in a way, that a target position is approached multiple times from an appropriately distance and the same approaching direction. In this way, the backlash will not have any effect. For measurement of bi-directional repeatability, the target position is approached from different directions, in which case the backlash will take effect. Motor constant (K m ) This designates the ratio of generated force and dissipation power,represents the efficiency of the motor. Stiffness This corresponds to the mechnical resistance to deformation a part or an assembly can provide under external static payload. (static stiffness) Or, it is the elastic resistance to deformation a part or an assembly can provide under external dynamic payload. (dynamic stiffness) straightness The measure of straightness when moving in X-axis. If there is deviation in horizontal straightness, there would be positioning error in Y-axis, as the system moves along X-axis. Guide deviation This is the deviation from the axis of stroke. It depends on horizontal straightness (also straightness) and vertical straightness (also flatness). Force, torque Force (in linear movements) or torque (in rotational movements) is given for defined conditions, e.g., as continuous force or torque at: 2 C ambient temperature 8 C winding temperature 1% rate of loading(duty cycle) or as peak force or peak torque. Force constant (K f ) This is a coil specific constant. The motor output force can be calculated by multiplying the force constant of the motor by input current: F = I x K f Continuous torque, continuous force (F c ) Or also nominal torque, nominal force. This is the torque or force, that rotary or linear motors can produce in continuous operation when continuous current of 1% load rate(duty cycle) is applied to the motor coil. Continuous current (I c ) It is a current that flows over longer time into motor. The maximum allowed current into each coil is also called nominal current. It is characterized when the generated heat results in motor warming of up to 8 C. Resolution It is the smallest distance, that the position measuring system will detect. The reachable step size is, in principle, larger than resolution due to other additional factors. Eccentricity This is the deviation of the center point of rotation of rotary tables from their position during rotation. It is created by centering and bearing tolerances. Step size Also called resolution. It is the smallest possible movement of a system. It depends on encoder, amplifier, mechanical construction, backlash, etc. Accuracy This, or actually the better terminology, the inaccuracy, corresponds to the deviation between target and actual position. The accuracy along an axis is defined as the remaining difference of target and actual position, after other linear deviations are excluded. Such systematic or linear deviations can be caused by cosine error, angle deviation, ball screw error, thermal expansion, etc. For all target positions of interest in an application, it is calculated with the following formula: Maximum of sum of systematic target-actual-difference + 2 sigma (standard deviation) Please do not confuse accuracy with repeatablity. Attraction force (F a ) This is created between the primary and secondary parts of the ironcore linear motors which must be taken up by the guide. Winding resistance R 25 This is the coil-specific dimension of is the winding resistance at 25 C. At 8 C, the winding resistance increases to approximately 1.2 x R 25. Winding temperature (T) This is the permitted winding temperature. The actual motor temperature is dependent on the installation, cooling and operating conditions and consequently can only be determined in a concrete case and cannot be calculated. Wobbling It is a term for rotary motor. Wobble is the angular deviation of rotating axis from theoretical axis of rotation as the motor turns. The reason for it is possibly bearing tolerances. Peak current (I p ) This current is applied to coils for a short time to generate peak force.the maximum time for applying peak current is 1 second. After that, motor has to cool down to nominal operating temperature, before further peak current could be applied again. Peak torque, peak force (F p ) The peak torque (for rotary motion) or peak force (for linear motion) is the maximum force that a motor can generate for approximately one second with peak current I p. While applying I p into motor, it is operating near the non-linear range of motor. This is especially useful for acceleration and braking. Technical

6 6 MM99TE7-171 inear Motor System 7 2 Standard linear motor stage 2.1 Positioning stage HIWIN offers a variety of positioning stages, such as single axis, X-Y double axis, bridge, gantry and X-Y- Z-axis Cartesian robots, to meet a variety of automation application needs. All above positioning stages use self-made key components, such as linear motors, linear slide, ball screw, direct drive motors, servo motors and drives. Therefore, HIWIN positioning stages can achieve the best performance and the most effective cost, can significantly enhance the competitiveness of our customers. HIWIN s diversified positioning stages have been widely used in various technical fields, such as optical detection, laser processing, plastic material coating, metal processing and other automated production equipment. Industrial fields cover semiconductor industry, optical elements, panel displays, medical equipment, machine tools, electronic components, MEMS and so on. Rich specifications and quick customized ability to fully meet customers mass production, shorten product development process and strict application environment, high specification requirements Single axis positioning stage HIWIN single axis positioning stage provides fast, accurate positioning, linear direct drive motor and can reach long stroke applications, in addition to providing metal cover, dust jacket and other optional items to achieve dust protection requirements. Choose cable chain type, horizontal or vertical wiring that uses extension cords not to scatter outside, make the machine look tidy. Depend on different linear motors, those can be further divided into the following different types: SA:low gravity center, high payload inear motor SA stages are equipped with ironcore motor(s) and well suited for applications that require point to point precision positioning and larger payload. MC:high-precision, high-speed stability inear motor MC stages are equipped with coreless motor(s) and well suited for applications that require precision positioning and constant velocity scanning motion. Standard MT:middle precision, light payload inear motor MT stages are equipped with a coreless shaft motor, which perfectly replace the combination of ball screw and AC servo motor, and improve max. speed greatly.

7 8 MM99TE7-171 inear Motor System Measurement standards All the precision measurement data provided by HIWIN are measured at temperature at 23 ±1, humidity at 55%±5% environmental, and the position feedback system of positioning stages apply 1µm resolution optical scale SA MX1A MX1A SA G 1 E V1 3-C Cable chains: horizontal/vertical orientation Motor type SA11: MSA11 SA12: MSA12 SA13: MSA13 SA21: MSA21 SA22: MSA22 SA23: MSA23 SA31: MSA31 SA32: MSA32 SA33: MSA33 SA21: MSA21 SA22: MSA22 SA23: MSA23 SA31: MSA31 SA32: MSA32 SA33: MSA33 The number of slider 1: 1 Stroke inear Motor 動子規格標籤 inear Motor 動子規格標籤 1: 1mm 2: 2mm 3: 3mm 4: 4mm 5: 5mm 6: 6mm 7: 7mm 8: 8mm 9: 9mm 1: 1mm Cable chain horizontal orientation Cable chain vertical orientation Encoder type :None A:4µm analogical 1Vpp optical scale E:TT digital 1µm resolution magnetic scale G:TT digital 1µm resolution optical scale(standart) K:TT digital.1µm resolution optical scale Standard 2.2 SA low gravity center, high payload inear motor SA stages are equipped with ironcore motor(s) and well suited for applications that require point to point precision positioning and larger payload. imit switch 1:Inductive type,pnp,nc 2:Inductive type,npn,nc C:Customized imit switch connector type E:Connector is mounted on edge of stage S:Connector contains 3mm extension cord It offers larger continuous force, especially for larger force and fast applications Stroke range up to 4m Superior speed control characteristic ow cost, small size, high performance Suitable for clean rooms Cable chain N:None V1:Vertical, chain internal space is 21x25mm V2:Vertical, chain internal space is 21x38mm V3:Vertical, chain internal space is 21x5mm V4:Vertical, chain internal space is 21x68mm H1:, chain internal space is 21x25mm H2:, chain internal space is 21x38mm Extension cable :None 3:3m 5:5m 7:7m (Includes limit switch extension cable) Additional option None:Standard C:Customized request C:Centralized lubrication :Contact HIWIN for customized specification.

8 1 MM99TE7-171 inear Motor System SA series stage SA11,SA12,SA13 Acceleration 加速度 (m/s 2 ) ow profile SA series stage reduced maximum 38% stage height. High acceleration/deceleration Acceleration / deceleration up to 14 m/s2 (14G). Actual acceleration / deceleration might be limited by linear guideway life consideration linear motor stage linear motor stage linear motor stage linear motor stage linear motor stage linear motor stage 時間 Time (s) Position 位置誤差 error (µm) High force SA series stage offers maximum 2469N peak force. MSA33 MSA32 MSA31 MSA23 MSA22 MSA21 MSA13 MSA12 MSA11 High static stability Position stability is within ±.1µm (measured by laser interferometer, the result is depended on environment condition.) Instant 瞬間推力 thrust Continuous 連續推力 thrust Thrust 推力 (N) 時間 Time(s) (N) Acceleration 加速度 (m/s 2 ) Force 推力 (N) Force 推力 Table2-1 SA11,12,13 stage specification Specification SA11 SA12 SA13 Continuous force,f C (N) Peak force,f P (N) Stroke 1~1 Resolution.1µm / 1.µm / Analog 1Vpp Digital 1µm encoder / Analog encoder: ± 1 Repeatability (µm) *2 Digital.1µm encoder: ±.5 Digital 1µm encoder / Analog encoder: ± 2 Accuracy (µm) *2,3 Digital.1µm encoder: ± 1 straightness (µm) 1 / 5 mm Vertical straightness (µm) 2 / 5 mm Moving mass (kg) oading capacity (kg) Force-Velocity F-V 曲線 (DC bus Curve(DC = 325V) bus = 325V) * SA11 Fp SA11 Fc Velocity 速度 (m/s) SA11 Fp SA11 Fc Velocity 速度 (m/s) Force 推力 (N) Force-Velocity F-V 曲線 (DC bus Curve(DC =6V) bus = 6V) *4 A-oad Acceleration-Payload 曲線 Curve Force 推力 (N) SA12 Fp SA12 Fc Velocity 速度 (m/s) SA12 Fp SA12 Fc Velocity 速度 (m/s) (N) Force 推力 (N) Force 推力 SA13 Fp SA13 Fc Velocity 速度 (m/s) SA13 Fp SA13 Fc Velocity 速度 (m/s) SA11 SA12 SA Payload 負載 (kg) Payload 負載 (kg) Payload 負載 (kg) Acceleration 加速度 (m/s 2 ) Acceleration 加速度 (m/s 2 ) Standard *1:All values are measured on a granite table, all stage mounting holes are well fixed. *2:Values are measured according to HIWIN measuring standard. *3:After error compensation. *4:The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. Please refer to the Velocity-Stroke Curve or Appendix A:Motor Sizing. *5:All specifications above are standard, contact HIWIN for special request.

9 12 MM99TE7-171 inear Motor System 13 Velocity-Stroke Curve SA11 inear motor stage dimensions SA oad 1 kg oad 5 kg oad 1 kg Stroke SA oad 1 kg oad 1 kg oad 2 kg Stroke SA13 oad 1 kg oad kg oad 3 kg Stroke A 2xN-Ø6.5 THRU, Ø11x6DP T (N-1)x=B 6-M6x1Px12DP C D C 25 2x5=1 Cantilever oad Capability *2.3 Vertical Vertical (56) (3) imit 極限開關接頭 switches connector (option ( 選項 S) imit 極限開關接頭 switches connector (option ( 選項 E) E) Encoder 編碼器延長線 cable 馬達延長線 Motor Vertical cable Extension ( 延長線 cable ) 2 *2 T/2 ST/2+18 (-Stopper) 負硬體極限 ) ST/2+5 (-imit)( 負極限 ) ST/2(Home position) ST/2+18 (+Stopper) 正硬體極限 ) ST/2+5 (+imit)( 正極限 ) inear motor stage with horizontal chain Vertical (166) 編碼器延長線 Encoder cable Standard SA11: Velocity < 2 m/s SA12: Velocity < 2 m/s SA13: Velocity < 2 m/s *1 (65) 21 inear motor stage with vertical chain 馬達延長線 Motor cable Extension ( 延長線 cable ) 2 * Cantilever distance SA11: Velocity < 2 m/s Cantilever distance Cantilever distance SA12: Velocity < 2 m/s Cantilever distance *1:All values above are standard, contact HIWIN for special request. *2:Cantilever load capability due to different positioning stage, application rated life also vary. *3:The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog Cantilever distance SA13: Velocity < 2 m/s Cantilever distance (C) 186 *1 21 (13) 19 Table2-2 SA11 Encoder 編碼器延長線 cable 馬達延長線 Motor cable Extension ( 延長線 cable ) 2 *2 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 *

10 14 MM99TE7-171 inear Motor System SA12 inear motor stage dimensions SA13 inear motor stage dimensions 68 A 2xN-Ø6.5 THRU, Ø11x6DP T (N-1)x=B 8-M6x1Px12DP C D C x6=18 68 A 2xN-Ø6.5 THRU, Ø11x6DP 1-M6x1Px12DP T (N-1)x=B C D C x7= (56) (3) imit 極限開關接頭 switches connector (option( 選項 S) S) imit 極限開關接頭 switches connector (option( 選項 E) E) T/2 Encoder 編碼器延長線 cable Motor 馬達延長線 cable ( 延長線 Extension ) 2 cable *2 ST/2+18 (-Stopper) ( 負硬體極限 ) ST/2+5 ((-imit) 負極限 ) ST/2 (Home 原點位置 position) ) ST/2+18 (+Stopper) 正硬體極限 ) ST/2+5 (+imit)( 正極限 ) (56) inear motor stage with horizontal chain (3) imit 極限開關接頭 switches connector (option( 選項 S) S) imit 極限開關接頭 switches connector (option ( 選項 E) E) T/2 Encoder 編碼器延長線 cable Motor 馬達延長線 cable ( 延長線 Extension ) 2 cable *2 ST/2+18 (-Stopper) ( 負硬體極限 ) ST/2+18 (+Stopper) 正硬體極限 ) ST/2+5 (-imit) ( 負極限 ) ST/2+5 (+imit) 正極限 ) ST/2 ((Home 原點位置 position) ) inear motor stage with horizontal chain (166) Encoder 編碼器延長線 cable (166) Encoder 編碼器延長線 cable Standard *1 (65) 21 Motor 馬達延長線 cable ( 延長線 Extension ) 2cable *2 *1 (65) 21 Motor 馬達延長線 cable ( 延長線 Extension ) 2cable *2 inear motor stage with vertical chain inear motor stage with vertical chain 186 (C) *1 21 (13) 19 Encoder 編碼器延長線 cable Motor 馬達延長線 cable ( 延長線 Extension ) 2cable *2 (C) 186 *1 21 (13) 19 Encoder 編碼器延長線 cable 馬達延長線 Motor cable ( 延長線 Extension ) 2cable *2 Table2-3 SA12 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 * Table2-4 SA13 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 *

11 16 MM99TE7-171 inear Motor System 17 SA21,SA22,SA23 Table2-5 SA21,22,23 stage specification Specification SA21 SA21 SA22 SA22 SA23 SA23 Continuous force,f C (N) Peak force,f P (N) Stroke 1~1 Resolution.1µm / 1.µm / Analog 1Vpp Digital 1µm encoder / Analog encoder: ± 1 Repeatability (µm) *2 Digital.1µm encoder: ±.5 Digital 1µm encoder / Analog encoder: ± 2 Accuracy (µm) *2,3 Digital.1µm encoder: ±1 straightness (µm) 1 / 5 mm Vertical straightness (µm) 2 / 5 mm Moving mass (kg) oading capacity (kg) Force-Velocity Curve(DC bus = 325V) *4 Velocity-Stroke Curve SA21 5. oad 1 kg 4. oad kg oad 3 kg Stroke SA oad 1 kg 1. oad kg oad 3 kg Stroke SA22 oad 1 kg oad 2 kg oad 4 kg Stroke SA22 oad 1 kg oad 2 kg oad 4 kg Stroke SA23 oad 1 kg oad 25 kg oad 5 kg Stroke SA23 oad 1 kg oad 25 kg oad 5 kg Stroke Cantilever oad Capability *2.3 Vertical Force Force Force Standard Velocity Velocity Velocity Force-Velocity Curve(DC bus = 6V) *4 Vertical Force Velocity Acceleration-Payload Curve Force Velocity Force Velocity SA21/SA21: Velocity < 1.5 m/s SA21: Velocity < 2 m/s Cantilever distance SA22/SA22: Velocity < 1.5 m/s SA22: Velocity < 2 m/s Cantilever distance SA23/SA23: Velocity < 1.5 m/s SA23: Velocity < 2 m/s Cantilever distance Acceleration Acceleration Payload Payload Payload *1:All values are measured on a granite table, all stage mounting holes are well fixed. *2:Values are measured according to HIWIN measuring standard. *3:After error compensation. Acceleration *4:The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. Please refer to the Velocity-Stroke Curve or Appendix A:Motor Sizing. *5:All specifications above are standard, contact HIWIN for special request SA21/SA21: Velocity < 1.5 m/s SA21: Velocity < 2 m/s Cantilever distance SA22/SA22: Velocity < 1.5 m/s SA22: Velocity < 2 m/s Cantilever distance *1:All values above are standard, contact HIWIN for special request. *2:Cantilever load capability due to different positioning stage, application rated life also vary. *3:The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog SA23/SA23: Velocity < 1.5 m/s SA23: Velocity < 2 m/s Cantilever distance

12 18 MM99TE7-171 inear Motor System 19 SA21 inear motor stage dimensions 74 A 2xN-Ø6.5 THRU, Ø11x6DP T (N-1)x=B 6-M6x1Px12DP C D C 25 2x5=1 SA22 inear motor stage dimensions 74 A 2xN-Ø6.5 THRU,Ø11x6DP 8-M6x1Px12DP T (N-1)x=B C D C x6= (56) (3) imit 極限開關接頭 switches connector (option ( 選項 S) S) imit 極限開關接頭 switches connector (option ( 選項 E) E) 編碼器延長線 Encoder cable 馬達延長線 Motor cable ( 延長線 Extension ) 2 cable *2 T/2 ST/2+18 (-Stopper)( 負硬體極限 ) ST/2+5 (-imit) 負極限 ) ST/2 (Home( 原點位置 position) ) ST/2+18 ((+Stopper) 正硬體極限 ) ST/2+5 ((+imit) 正極限 (56) inear motor stage with horizontal chain (166) 編碼器延長線 Encoder cable Standard *1 (71) 21 馬達延長線 Motor cable ( 延長線 Extension ) 2 cable *2 inear motor stage with vertical chain (3) imit 極限開關接頭 switches connector (option ( 選項 S) S) imit 極限開關接頭 switches connector (option ( 選項 E) E) T/2 Encoder 編碼器延長線 cable 馬達延長線 Motor cable ( 延長線 Extension ) 2 cable *2 ST/2+18 (-Stopper)( 負硬體極限 ) ST/2+5 (-imit) 負極限 ) ST/2 ((Home 原點位置 position) ) ST/2+18 ((+Stopper) 正硬體極限 ) ST/2+5 (+imit) 正極限 ) inear motor stage with horizontal chain (166) 編碼器延長線 Encoder cable *1 (71) 21 Motor 馬達延長線 cable ( 延長線 Extension ) 2cable *2 inear motor stage with vertical chain 23 (C) * (13) Encoder 編碼器延長線 cable 馬達延長線 Motor cable ( 延長線 Extension ) 2 cable *2 (C) *1 21 (13) Encoder 編碼器延長線 cable Motor 馬達延長線 cable ( 延長線 Extension ) 2 cable *2 Table2-6 SA21 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 * Table2-7 SA22 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 *

13 2 MM99TE7-171 inear Motor System 21 SA23 inear motor stage dimensions (56) A (3) imit 極限開關接頭 switches connector (option ( 選項 S) S) imit 極限開關接頭 switches connector (option ( 選項 E) E) 2xN-Ø6.5 THRU, Ø11x6DP 1-M6x1Px12DP T (N-1)x=B C D C x7=28 T/2 Encoder 編碼器延長線 cable 馬達延長線 Motor cable ( 延長線 Extension ) 2 cable *2 ST/2+18 (-Stopper)( 負硬體極限 ) ST/2+5 (-imit) ( 負極限 ) ST/2 ((Home 原點位置 position) ) ST/2+18 ((+Stopper) 正硬體極限 ) ST/2+5 ((+imit) 正極限 ) SA31,SA32,SA33 Table2-9 SA31,32,33 stage specification Specification SA31 SA31 SA32 SA32 SA33 SA33 Continuous force,f C (N) Peak force,f P (N) Stroke 1~1 Resolution.1µm / 1.µm / Analog 1Vpp Digital 1µm encoder / Analog encoder: ± 1 Repeatability (µm) *2 Digital.1µm encoder: ±.5 Digital 1µm encoder / Analog encoder: ± 2 Accuracy (µm) *2,3 Digital.1µm encoder: ± 1 straightness (µm) 1 / 5 mm Vertical straightness (µm) 2 / 5 mm Moving mass (kg) oading capacity (kg) Force-Velocity Curve(DC bus = 325V) *4 inear motor stage with horizontal chain 23 (166) 編碼器延長線 Encoder cable Standard 21 馬達延長線 Motor cable *1 (71) ( 延長線 Extension ) 2cable *2 inear motor stage with vertical chain Force Force Force Force Force Force Velocity Velocity Velocity Force-Velocity Curve(DC bus = 6V) *4 (C) *1 21 (13) Encoder 編碼器延長線 cable 馬達延長線 Motor cable ( Extension 延長線 ) 2cable *2 Velocity Acceleration-Payload Curve Velocity Velocity Table2-8 SA23 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 * Acceleration Acceleration Payload Payload Payload *1:All values are measured on a granite table, all stage mounting holes are well fixed. *2:Values are measured according to HIWIN measuring standard. *3:After error compensation. Acceleration *4:The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. Please refer to the Velocity-Stroke Curve or Appendix A:Motor Sizing. *5:All specifications above are standard, contact HIWIN for special request.

14 22 MM99TE7-171 inear Motor System 23 Velocity-Stroke Curve SA oad 1 kg oad 2 kg oad 4 kg SA32 oad 1 kg oad 25 kg oad 5 kg SA33 oad 1 kg oad 3 kg oad 6 kg SA31 inear motor stage dimensions 8 A 2xN-Ø6.5 THRU,Ø11x6DP T (N-1)x=B 6-M8x1.25Px16DP C D C 25 2x5= Stroke Stroke Stroke SA31 3. SA32 3. SA oad 1 kg.5 oad 2 kg. oad 4 kg Stroke Cantilever oad Capability * oad 1 kg oad 25 kg oad 5 kg Stroke Vertical oad 1 kg oad 3 kg oad 6 kg Stroke Vertical (56) (3) 編碼器延長線 Encoder cable imit 極限開關接頭 switches connector (option ( 選項 S) 馬達延長線 Motor cable imit 極限開關接頭 switches connector ( Extension 延長線 ) 2cable *2 (option ( 選項 E) E) T/2 ST/2+18 (-Stopper) 負硬體極限 ) ST/2+5 (-imit)( 負極限 ) ST/2 ((Home 原點位置 position) ) inear motor stage with horizontal Vertical chain ST/2+18 (+Stopper) ( 正硬體極限 ) ST/2+5 (+imit) 正極限 (166) *1 (77) 21 編碼器延長線 Encoder cable 馬達延長線 Motor cable ( 延長線 Extension ) 2cable *2 Standard Vertical Cantilever distance SA31/SA31: Velocity < 1 m/s SA31: Velocity < 2 m/s SA31/SA31: Velocity < 1 m/s SA31: Velocity < 2 m/s Cantilever distance SA32/SA32: Velocity < 1 m/s SA32: Velocity < 2 m/s Cantilever distance SA32/SA32: Velocity < 1 m/s SA32: Velocity < 2 m/s Cantilever distance *1:All values above are standard, contact HIWIN for special request. *2:Cantilever load capability due to different positioning stage, application rated life also vary. *3:The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog SA33/SA33: Velocity < 1 m/s SA33: Velocity < 2 m/s Cantilever distance SA33/SA33: Velocity < 1 m/s SA33: Velocity < 2 m/s Cantilever distance inear motor stage with vertical chain 262 (C) *1 21 (13) Encoder 編碼器延長線 cable 馬達延長線 Motor cable ( 延長線 Extension ) 2cable *2 Table2-1 SA31 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 *

15 24 MM99TE7-171 inear Motor System 25 SA32 inear motor stage dimensions 2xN-Ø6.5 THRU,Ø11x6DP 8-M8x1.25Px16DP T A (N-1)x=B C D C x6=18 SA33 inear motor stage dimensions 2xN-Ø6.5 THRU, Ø11x6DP 1-M8x1.25Px16DP T A (N-1)x=B C D C x7= (56) (3) imit 極限開關接頭 switches connector (option ( 選項 S) S) imit 極限開關接頭 switches connector (option ( 選項 E) E) T/2 Encoder 編碼器延長線 cable Motor 馬達延長線 cable ( Extension 延長線 ) 2cable *2 ST/2+18 (-Stopper)( 負硬體極限 ) ST/2+5 (-imit) 負極限 ) ST/2 (Home 原點位置 position) ) ST/2+18 (+Stopper)( 正硬體極限 ) ST/2+5 ((+imit) 正極限 ) (56) inear motor stage with horizontal chain (166) 編碼器延長線 Encoder cable Standard *1 (77) 21 馬達延長線 Motor cable ( Extension 延長線 ) 2cable *2 inear motor stage with vertical chain (166) 編碼器延長線 Encoder cable *1 (77) 21 馬達延長線 Motor cable ( Extension 延長線 ) 2cable * (3) imit 極限開關接頭 switches connector (option ( 選項 S) imit 極限開關接頭 switches connector (option ( 選項 E) E) T/2 Encoder 編碼器延長線 cable Motor 馬達延長線 cable ( 延長線 Extension ) 2cable *2 ST/2+18 (-Stopper) ( 負硬體極限 ) ST/2+18 ((+Stopper) 正硬體極限 ) ST/2+5 (-imit)( 負極限 ) ST/2+5 (+imit)( 正極限 ) ST/2 (Home 原點位置 position) ) inear motor stage with horizontal chain inear motor stage with vertical chain (C) *1 21 (13) Encoder 編碼器延長線 cable 馬達延長線 Motor cable ( Extension 延長線 ) 2cable *2 (C) *1 21 (13) Encoder 編碼器延長線 cable 馬達延長線 Motor cable Extension ( 延長線 ) 2 cable *2 Table2-11 SA32 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 * Table2-12 SA33 Stroke N T A B C D *1:Cable chain interior width is selected from ordering information. *2:Extension cable length is selected from ordering information. *3:Dimension C is determined by cable chain interior width V1~V4 from ordering information. C(cable chain) V1,V2 *3 V3,V4 *

16 26 MM99TE7-171 inear Motor System MC high-precision, high-speed stability inear motor MC stages are equipped with coreless motor(s) and well suited for applications that require precision positioning and constant velocity scanning motion inear single axis M X1E CB5 1 3 G2 inear motor direct drive, enabling ultra-precise movement Stroke range up to 4m Superior speed control characteristic ow cost, small size, high performance Suitable for clean rooms MX1E Motor type CB5:MCB5 CB6:MCB6 CB7:MCB7 CB8:MCB8 The number of slider 1:1 Stroke 1:1mm 7:7mm 2:2mm 8:8mm 3:3mm 9:9mm 4:4mm 1:1mm 5:2mm 11:11mm 6:3mm 12:12mm Encoder type :None A:4µm analog 1Vpp optical scale B:2µm analog 1Vpp optical scale D:1mm analog 1Vpp magnetic scale E:TT digital 1µm resolution magnetic scale G:TT digital 1µm resolution optical scale (standard) H:TT digital.5µm resolution optical scale K:TT digital.1µm resolution optical scale M:TT digital 2nm resolution optical scale P:4µm analog glass optical scale X:Other (please remark desired specifications, product or model) Standard imit switch :None 1:Inductive type, PNP 2:Optical switch, NPN (standard) 3:Optical switch, PNP 4:Inductive type, NPN C:Customized Cover :None (standard) A:Metal cover B:Bellows C:Customized D:Non-woven Cable chain :None (standard) 1: direction (chain internal space x3mm) 2:Vertical direction (chain internal space x3mm) C:Customized :Contact HIWIN for customized specification.

17 28 MM99TE7-171 inear Motor System 29 Table2-13 MCB5,6,7,8 stage specification Specification CB5 CB6 CB7 CB8 Continuous force,f C (N) Peak force,f P (N) Stroke 1-12 Resolution 1.µm Stroke 1~1 mm: ±1 Repeatability (µm) *2 Stroke 11 / 12 mm: ±2 Stroke 1~1 mm: ±3 Accuracy (µm) *2,3 Stroke 11 / 12 mm: ±8 straightness (µm) 1 / 5 mm Vertical straightness (µm) 2 / 5 mm Moving mass (kg) No cover: 2.1 No cover: 3.1 With cover: 2.3 With cover: Force-Velocity Curve (DC bus = 325V) CB5 Fp CB5 Fc *4 CB6 Fp CB6 Fc CB7 Fp CB7 Fc CB8 Fp CB8 Fc Velocity-Stroke Curve CB oad 1 kg 1. oad 2 kg. oad 3 kg Stroke CB CB6 oad 1 kg oad 2 kg oad 3 kg Stroke CB8 Force (N) Force (N) Force (N) Force (N) oad 1 kg 1. oad 2 kg. oad 3 kg Stroke Cantilever oad Capability *2.3 oad 1 kg 1. oad 2 kg. oad 3 kg Stroke Vertical Acceleration-Payload Curve CB CB CB CB8 Vertical Standard Acceleration (m/s 2 ) Acceleration (m/s 2 ) Acceleration (m/s 2 ) Acceleration (m/s 2 ) Vertical 8 CB5: Velocity < 2 m/s 8 CB6: Velocity < 2 m/s 8 CB7: Velocity < 2 m/s 8 CB8: Velocity < 2 m/s *1:All values are measured on a granite table, all stage mounting holes are well fixed. *2:Values are measured according to HIWIN measuring standard. *3:After error compensation. *4:The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. Please refer to the Velocity-Stroke Curve or Appendix A:Motor Sizing. *5:All specifications above are standard, contact HIWIN for special request Cantilever distance Cantilever distance Cantilever distance Cantilever distance 8 CB5: Velocity < 2 m/s 8 CB6: Velocity < 2 m/s 8 CB7: Velocity < 2 m/s 8 CB8: Velocity < 2 m/s Cantilever distance Cantilever distance Cantilever distance Cantilever distance *1:All values above are standard, contact HIWIN for special request. *2:Cantilever load capability due to different positioning stage, application rated life also vary. *3:The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog.

18 3 MM99TE 方向 inear Motor System MC Series Stage Without cover MCB5 Table2-14 Without/with cover linear motor stage specifications Stroke 1 N Mass (kg) *1 18/ / / / / / / / / /55 95 H / /63 *1:When stroke is 1mm, the mounting holes spacing is 3mm. *2: Absolute accuracy is after error mapping(with HIWIN drive). With cover 有效行程 Direction + 方向 18 Effective 有效行程 stroke 4 - M6x1.Px12DP 4 - M6x1.Px12DP Nx ( 註 1) Nx (*1) 註 1) +Direction + 方向 -3-3 極限 2x2-Ø6H7 THRU 2x2-Ø6H7 THRU x(N+1)-Ø6.5 THRU, Ø11x8.5DP imit 極限 Connector 接頭 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP 8 (68) (89) (22) (89) 178 Standard Effective 有效行程 stroke H 36.5 (22) 8 (68) 36.5 (22) 22 接頭 M6x1.Px12DP imit 極限 22 (89) 178 Connector 接頭 (68) 2x2-Ø6H7 THRU 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP Nx ((*1) 註 1) -3

19 + 方向 32 MM99TE7-171 inear Motor System 有效行程 x7=14 8 (22) MCB6 Without cover Direction + 方向 Table2- Without/with cover linear motor stage specifications Stroke 1 N Mass (kg) H x7=14 21 Effective 有效行程 stroke 極限 (22) *1 19/ / / / / / / / / / / / M6x1.Px12DP 6-M6x1.Px12DP 2x2-Ø6H7 THRU imit 極限 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP 2x2-Ø6H7 THRU x(N+1)-Ø6.5 THRU, 1 Nx( 註 1) Ø11x8.5DP 接頭 Connector 接頭 (68) (68) 178 *1:When stroke is 1mm, the mounting holes spacing is 3mm. *2: Absolute accuracy is after error mapping(with HIWIN drive). With cover Nx( (*1) 註 1) -3 +Direction + 方向 Standard x7=14 21 Effective 有效行程 stroke H 22 (22) M6x1.Px12DP imit 極限 22 (89) 178 Connector 接頭 (68) 2x2-Ø6H7 THRU 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP Nx( (*1) 註 1) -3

20 34 MM99TE 方向 inear Motor System 35 MCB7 11 Without cover 6 24 有效行程 3x7=21 +Direction + 方向 (22) Table2-16 Without/with cover linear motor stage specifications Stroke 1 N Mass (kg) *1 2/ / / / / / / / / /57 95 H / / x7=21 24 Effective 有效行程 stroke 8-M6x1.Px12DP 8-M6x1.Px12DP Nx( 註 1) -3 極限 2x2-Ø6H7 THRU 2x2-Ø6H7 THRU 接頭 2x(N+1)-Ø6.5 THRU, imit 極限 Ø11x8.5DP Connector 接頭 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP 8 (68) (68) 36.5 (89) 178 (22) (89) 178 *1:When stroke is 1mm, the mounting holes spacing is 3mm. *2: Absolute accuracy is after error mapping(with HIWIN drive) Nx( (*1) 註 1) -3 Standard With cover +Direction + 方向 Effective 有效行程 stroke 3x7=21 H (22) M6x1.Px12DP imit 極限 22 (89) 178 Connector 接頭 2x2-Ø6H7 THRU (68) 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP Nx( (*1) 註 1) -3

21 36 MM99TE7-171 inear Motor System 37 + 方向 MCB8 6 Without cover 有效行程 35 3x7=21 8 (22) Table2-17 Without/with cover linear motor stage specifications Stroke *1 21/ / / / / / / / / / / /66 *1:When stroke is 1mm, the mounting holes spacing is 3mm. *2: Absolute accuracy is after error mapping(with HIWIN drive). N Mass (kg) H Direction + 方向 35 3x7=21 28 Effective 有效行程 stroke 8-M6x1.Px1DP Nx( (*1) 註 1) -3 8-M6x1.Px1DP Nx( 註 1) -3 極限 imit 極限 2x2-Ø6H7 THRU 2x2-Ø6H7 THRU 接頭 22 2x(N+1)-Ø6.5 Connector 接頭 THRU, Ø11x8.5DP 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP 8 (68) (68) 36.5 (22) 36.5 (89) (89) Standard With cover +Direction + 方向 6 28 Effective 有效行程 stroke 35 3x7=21 H 22 (22) M6x1.Px1DP imit 極限 22 Connector 接頭 (89) 178 2x2-Ø6H7 THRU (68) 2x(N+1)-Ø6.5 THRU, Ø11x8.5DP Nx( (*1) 註 1) -3

22 38 MM99TE7-171 inear Motor System MT light weight, high acceleration/deceleration Shaft motor series with MT ironless motors are suitable for inspection, scan and semiconductor industry. It can also be assembled into X-Y stage; position feedback apples incremental analog or digital optical scale and magnetic scale as position feedback are seletable. ightweight No cogging Max. acceleration 5m/s 2, max. velocity 5m/s High acceleration and deceleration characteristics inear single axis MX1E T A G2 MX1E Motor type TA2:MTA2 TB3:MTB3 TC4:MTC4 TA3:MTA3 TB4:MTB4 TA4:MTA4 TC2:MTC2 TB2:MTB2 TC3:MTC3 The number of slider 1:1 Stroke 388:388mm 516:516mm 644:644mm 722:722mm 9:9mm 16:16mm 1412:1412mm 1668:1668mm 1924:1924mm 218:218mm Encoder type :None A:4µm analog 1Vpp optical scale B:2µm analog 1Vpp optical scale D:1mm analog 1Vpp magnetic scale E:TT digital 1µm resolution magnetic scale G:TT digital 1µm resolution optical scale (standard) H:TT digital.5µm resolution optical scale K:TT digital.1µm resolution optical scale M:TT digital 2nm resolution optical scale P:4µm analog glass optical scale X:Other (please remark desired specifications, product or model) imit switch :None 1:Inductive type, PNP 2:Optical switch, NPN (standard) 3:Optical switch, PNP 4:Inductive type, NPN C:Customized MTA2 Shaft motor stage Table2-18 MTA2,3,4 stage specification Specification TA2 TA3 TA4 Continuous force,f C (N) Peak force,f P (N) Stroke 1-1 Resolution 1.µm Repeatability (µm) *2 ±1 Accuracy (µm) *2,3 ±3 straightness (µm) 1 / 5 mm Vertical straightness (µm) 2 / 5 mm Moving mass (kg) Force-Velocity Curve (DC bus = 325V) Force (N) Acceleration-Payload Curve Acceleration (m/s 2 ) TA2 Fp TA2 TA2 Fc Force (N) Acceleration (m/s 2 ) * TA3 Fp TA3 TA3 Fc Force (N) Acceleration (m/s 2 ) TA4 Fp TA4 TA4 Fc *1:All values are measured on a granite table, all stage mounting holes are well fixed. *2:Values are measured according to HIWIN measuring standard. *3:After error compensation. *4:The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. Please refer to the Velocity-Stroke Curve or Appendix A:Motor Sizing. *5:All specifications above are standard, contact HIWIN for special request. Standard Cover :None (standard) A:Metal cover B:Bellows C:Customized D:Non-woven Cable chain :None (standard) 1: direction (chain internal space x3mm) 2:Vertical direction (chain internal space x3mm) C:Customized :Contact HIWIN for customized specification.

23 4 MM99TE7-171 inear Motor System 41 Velocity-Stroke Curve TA TA3 6. TA oad 1 kg 1. oad 3 kg. oad 5 kg Stroke Cantilever oad Capability * oad 1 kg oad 3 kg oad 5 kg Stroke Vertical oad 1 kg oad 3 kg oad 5 kg Stroke Table2-19 MTA2 Shaft motor stage specifications Stroke N Mass (kg) * Absolute accuracy is after error mapping (with HIWIN drive). Dimension +Direction + 方向 Standard Vertical TA2: Velocity < 2 m/s TA3: Velocity < 2 m/s TA4: Velocity < 2 m/s Effective 有效行程 stroke 4-M5x.8Px1DP imit 極限 (92) 12 (21.5) Cantilever distance Cantilever distance Cantilever distance 2x(N+1)-M5x.8Px1DP Connector 接頭 (67.5) TA2: Velocity < 2 m/s TA3: Velocity < 2 m/s TA4: Velocity < 2 m/s 1 1 Nx Cantilever distance Cantilever distance Cantilever distance *1:All values above are standard, contact HIWIN for special request. *2:Cantilever load capability due to different positioning stage, application rated life also vary. *3:The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog.

24 42 MM99TE7-171 inear Motor System 43 Table2-2 MTA3 Shaft type linear motor stage specifications Table2-21 MTA4 Shaft type linear motor stage specifications Stroke 1 2 N Mass (kg) Stroke 1 2 N Mass (kg) * Absolute accuracy is after error mapping (with HIWIN drive). * Absolute accuracy is after error mapping (with HIWIN drive). Dimension 5 2 +Direction + 方向 13 Effective 有效行程 stroke 2x5=1 6-M5x.8Px1DP (21.5) Dimension 5 +Direction + 方向 x5= Effective 有效行程 stroke 2x4-M5x.8Px1DP Standard 1 (21.5) 8 12 imit 極限 2x(N+1)-M5x.8Px1DP Connector 接頭 (67.5) (92) imit 極限 2x(N+1)-M5x.8Px1DP Connector 接頭 (67.5) (92) 1 Nx Nx 1-2

25 44 MM99TE7-171 inear Motor System MTB2 Shaft motor stage Table2-22 MTB2,3,4 stage specification Specification TB2 TB3 TB4 Continuous force,f C (N) Peak force,f P (N) Stroke 1-1 Resolution 1.µm Repeatability (µm) *2 ±1 Accuracy (µm) *2,3 ±3 straightness (µm) 1 / 5 mm Vertical straightness (µm) 2 / 5 mm Moving mass (kg) *4 Force-Velocity Curve (DC bus = 325V) Vertical TB2 Fp TB2 Fc TB3 Fp TB3 Fc TB4 Fp TB4 Fc Vertical Velocity-Stroke Curve TB oad 5 kg 1. oad 1 kg. oad kg Stroke Cantilever oad Capability * TB3 5. oad 5 kg oad 1 kg oad kg Stroke Vertical TB4 oad 5 kg oad 1 kg oad kg Stroke Force (N) 3 2 Force (N) 3 2 Force (N) Acceleration-Payload Curve Acceleration (m/s 2 ) TB Acceleration (m/s 2 ) TB Acceleration (m/s 2 ) TB Vertical TB2: Velocity < 2 m/s TB3: Velocity < 2 m/s TB4: Velocity < 2 m/s Standard *1:All values are measured on a granite table, all stage mounting holes are well fixed. *2:Values are measured according to HIWIN measuring standard. *3:After error compensation. *4:The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. Please refer to the Velocity-Stroke Curve or Appendix A:Motor Sizing. *5:All specifications above are standard, contact HIWIN for special request Cantilever distance Cantilever distance Cantilever distance TB2: Velocity < 2 m/s TB3: Velocity < 2 m/s TB4: Velocity < 2 m/s Cantilever distance Cantilever distance Cantilever distance *1:All values above are standard, contact HIWIN for special request. *2:Cantilever load capability due to different positioning stage, application rated life also vary. *3:The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog.

26 46 MM99TE7-171 inear Motor System 47 Table2-23 MTB2 Shaft type linear motor stage specifications Table2-24 MTB3 Shaft type linear motor stage specifications Stroke 1 2 N Mass (kg) Stroke 1 2 N Mass (kg) * Absolute accuracy is after error mapping (with HIWIN drive). * Absolute accuracy is after error mapping (with HIWIN drive). Dimension 6.5 +Direction + 方向 M5x.8Px1DP Effective 有效行程 stroke 88 (21.5) Dimension 6.5 +Direction + 方向 x6=12 Effective 有效行程 stroke 6-M5x.8Px1DP Standard (21.5) imit 極限 (88) imit 極限 Connector 接頭 (88) 2x(N+1)-M6x1Px12DP Connector 接頭 (76.5) 2x(N+1)-M6x1Px12DP (76.5) 1 Nx Nx 1-2

27 48 MM99TE7-171 inear Motor System MTC2 Shaft motor stage Table2-25 MTB4 Shaft type linear motor stage specifications Stroke * Absolute accuracy is after error mapping (with HIWIN drive). N Mass (kg) Table2-26 MTC2,3,4 stage specification Specification TC2 TC3 TC4 Continuous force,f C (N) Peak force,f P (N) Stroke 1-1 Resolution 1.µm Repeatability (µm) *2 ±1 Accuracy (µm) *2,3 ±3 straightness (µm) 1 / 5 mm Vertical straightness (µm) 2 / 5 mm Moving mass (kg) Force-Velocity Curve (DC bus = 325V) Force (N) TC2 Fp TC2 Fc Force (N) * TC3 Fp TC3 Fc Force (N) TC4 Fp TC4 Fc Dimension Direction + 方向 x6=18 Effective 有效行程 stroke 8-M5x.8Px1DP (21.5) Acceleration (m/s 2 ) Acceleration-Payload Curve TC Acceleration (m/s 2 ) TC Acceleration (m/s 2 ) TC Standard imit 極限 (88) 2x(N+1)-M6x1Px12DP Connector 接頭 (76.5) *1:All values are measured on a granite table, all stage mounting holes are well fixed. *2:Values are measured according to HIWIN measuring standard. *3:After error compensation. *4:The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. Please refer to the Velocity-Stroke Curve or Appendix A:Motor Sizing. *5:All specifications above are standard, contact HIWIN for special request. 1 Nx 1-2

28 5 MM99TE7-171 inear Motor System 51 Velocity-Stroke Curve 5. TC2 5. TC3 5. TC4 oad 1 kg oad 1 kg oad 2 kg oad 3 kg oad 1 kg oad 2 kg oad 3 kg oad 2 kg oad 3 kg Table2-27 MTC2 Shaft type linear motor stage specifications Stroke N Mass (kg) Stroke Stroke Stroke Cantilever oad Capability * Vertical * Absolute accuracy is after error mapping (with HIWIN drive). Vertical TC2: Velocity < 2 m/s TC3: Velocity < 2 m/s TC4: Velocity < 2 m/s Dimension Direction + 方向 x7=14 Effective 有效行程 stroke 6-M6x1.Px12DP (21.5) Standard Cantilever distance Cantilever distance Cantilever distance imit 極限 (89) TC2: Velocity < 2 m/s TC3: Velocity < 2 m/s TC4: Velocity < 2 m/s 2x(N+1)-M8x1.25Px16DP Connector 接頭 (94) Cantilever distance Cantilever distance Cantilever distance 1 Nx 1-2 *1:All values above are standard, contact HIWIN for special request. *2:Cantilever load capability due to different positioning stage, application rated life also vary. *3:The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog.

29 52 MM99TE7-171 inear Motor System 53 Table2-28 MTC3 Shaft type linear motor stage specifications Stroke * Absolute accuracy is after error mapping (with HIWIN drive). N Mass (kg) Table2-29 MTC4 Shaft type linear motor stage specifications Stroke * Absolute accuracy is after error mapping (with HIWIN drive). N Mass (kg) Dimension Direction + 方向 x7=14 Effective 有效行程 stroke 6-M6x1.Px12DP (21.5) Dimension 8 +Direction + 方向 x7=21 Effective 有效行程 stroke 8-M6x1.Px12DP Standard (21.5) imit 極限 Connector 接頭 2x(N+1)-M8x1.25Px16DP (94) (89) imit 極限 2x(N+1)-M8x1.25Px16DP Connector 接頭 (94) (89) 1 Nx Nx 1-2

30 54 MM99TE7-171 inear Motor System X-Y stage MX1 series linear motor stages can be assembled into an X-Y stage and configured for a variety of different X and Y strokes X-Y stage MX2E CB5 CB8 2 3 G2 MX2E MX2E-CB5-CB8 X-Y stage High speed No cogging High precision Easy to assemble High stiffness aluminum structure Ironless linear motor Optical inspection Without cover Upper axis motor type CB5 ower axis motor model CB8 Upper axis stroke 1:1mm 2:2mm 3:3mm ower axis stroke 1:1mm 2:2mm 3:3mm 4:4mm Encoder type :none A:4µm analog 1Vpp optical scale B:2µm analog 1Vpp optical scale D:1mm analog 1Vpp magnetic scale E:TT digital 1µm resolution magnetic scale G:TT digital 1µm resolution optical scale (standard) H:TT digital.5µm resolution optical scale K:TT digital.1µm resolution optical scale M:TT digital 2nm resolution optical scale P:4µm glass optical analog scale X:Other (please remark desired specifications or product model) Standard With cover imit switch :None 1:Metal cover 2:Optical switch, NPN (standard) 3:Optical switch, PNP 4:Inductive type, NPN C:Customized Cover :None (standard) A:Metal cover B:Bellows B:Customized D:Non-woven Cable chain :None (standard) 1: direction (chain internal space x3mm) 2:Vertical direction (chain internal space x3mm) C:Customized :Contact HIWIN for customized specification.

31 56 MM99TE7-171 inear Motor System 57 Without cover Table2-3 Without cover X-Y stage product specifications X- Stroke Y- Stroke X Y 1 2 N Absolute accuracy (µm) *1 ±3 Resolution (µm) Repeatability Orthogonality X moving Y moving (µm) (arc-sec) unit mass unit mass ±3 1 ±1 ± (Kg) (Kg) Mass (kg) ±1 ± ±3 ±1 ± ±3 ±1 ± ±3 ±1 ± ±3 ±1 ± ±3 ±1 ± ±3 ±1 ± ±3 ±1 ± * 1: When the stroke is 1mm, the mounting holes spacing is 3mm. * 2: Absolute accuracy is after error mapping (with HIWIN drive). * 3: Except resolution magnetic scale. * 4: For higher resolution, please contact HIWIN MIKROSYSTEM MX2E-CB5CB8 X-Ystage-cover type Different stroke and function of dual axes stages consist of various standard single axes. This will shortens the development and mass production lead time. It can be applied in machine tool and semiconductor industry. High speed No cogging High precision Easy to assemble Optical detection application High rigid aluminum structure Ironless linear motor Y axis 軸 + 方向 +direction Y 軸拖鏈 axis cable chain 接頭 Connector Standard X 軸 axis + 方向 +direction X axis cable X 軸拖鏈 chain 4-M6x1.Px1DP imit 極限 X X/2 Effective 1/2 有效行程 stroke Effective 1/2 有效行程 stroke (148) Y/2 Effective 1/2 有效行程 stroke /2 Effective 有效行程 stroke X-axis X 軸拖鏈內部空間 cable chain internal space Y 軸拖鏈內部空間 Y-axis cable chain internal space Max. Max (*1) 1 Nx( 註 1) Y-3 (45.4) Y 2x2-Ø6H7 THRU 2x(N+1)-Ø6.5 THRU,Ø11x8.5DP inear Motor

32 58 MM99TE7-171 inear Motor System 59 X 軸 + 方向 Table2-31 With cover X-Y stage product specifications X- With cover type Y- X Y 1 2 N4-M6x1.Px1DP Absolute Resolution Repeatability Orthogonality X moving Y moving Stroke Stroke accuracy unit mass unit mass X 軸拖鏈 (µm) (µm) (µm) (arc-sec) (Kg) (Kg) (kg) *1 ±3 ±1 ± ±3 ±1 ± Y/ /2 有效行程 /2 有效行程 4 ±3 ±1 ± ±3 ±1 ± ±3 1 ±1 ± ±3 13 Max. ±1 ± ±3 ±1 ± ±3 ±1 ± Nx( 註 1) 2x(N+1)-Ø6.5 THRU * 1: When,Ø11x8.5DP the stroke is 1mm, the Y-3 mounting holes spacing is 3mm. * 2: (45.4) Absolute accuracy is after error Y mapping (with HIWIN drive). * 3: Except resolution magnetic scale. 2x2-Ø6H7 THRU * 4: For higher resolution, please contact HIWIN MIKROSYSTEM ±3 ±1 ± 極限 X 1/2 有效行程 X/2 1/2 有效行程 X 軸拖鏈內部空間 3 (148) Y 軸拖鏈內部空間 Max. 17 Mass 2.6 Gantry Stage MG2A series standardized gantry system is a unilateral drive system. MG2A-C applies to ironless linear motor, and MG2A-S applies to iron core linear motor Gantry stage MG2A-CB6-CC8 High acceleration No cogging ow inertia Easy to assemble High stiffness aluminum gantry structure Equipped with ironless linear motor Optical detection application Y axis 軸 + 方向 +direction Y axis 軸拖鏈 cable chain 接頭 Connector Standard X X axis 軸 + +direction 方向 4-M6x1.Px1DP 極限 imit X X/2 Effective 1/2 有效行程 stroke Effective 1/2 有效行程 stroke (148) 2 X axis cable X 軸拖鏈 chain Y/2 Effective 1/2 有效行程 stroke /2 Effective 有效行程 stroke 19 X 軸拖鏈內部空間 X-axis cable chain internal space 13 Max. 3 Y 軸拖鏈內部空間 Y-axis cable chain internal space Max /2 有效行程 極限 X 軸 + 方向 Y 軸 + 方向 max X 軸拖鏈內部空間 Y 軸拖鏈內部空間 Nx( (*1) 註 1) Y-3 (45.4) Y 2x2-Ø6H7 THRU 2x(N+1)-Ø6.5 THRU,Ø11x8.5DP 1/2 有效行程 59.5 極限 28 max /2 有效行程 18 1/2 有效行程

33 6 MM99TE7-171 inear Motor System Gantry stage MG2A CB6 CC8 3 4 G2 MG2A Upper axis motor type CB6 ower axis motor model CC8 Upper axis stroke 2:2mm 5:5mm 3:3mm 6:6mm 4:4mm Table2-31 Gantry stage MG2A product specifications X- Stroke Y- Stroke W W1 W2 W3 N 1 Absolute accuracy (µm) Resolution (µm) Repeatability (µm) Orthogonality (arc-sec) X moving unit mass (Kg) X moving unit mass (Kg) ±9 ±3 ± ±9 ±3 ± ±12 1µm ±4 ± ±12 ±4 ± ±12 ±4 ± * 1: Absolute accuracy is after error mapping (with HIWIN drive). * 2: Except resolution magnetic scale. * 3: For higher resolution, please contact HIWIN MIKROSYSTEM. Mass (kg) ower axis stroke 1:1mm 2:2mm 3:3mm 4:4mm 5:5mm 6:6mm Encoder type :none A:4µm analog 1Vpp optical scale B:2µm analog 1Vpp optical scale D:1mm analog 1Vpp magnetic scale E:TT digital 1µm resolution magnetic scale G:TT digital 1µm resolution optical scale (standard) H:TT digital.5µm resolution optical scale K:TT digital.1µm resolution optical scale M:TT digital 2nm resolution optical scale P:4µm glass optical analog scale X:Other (please remark desired specifications or product model) imit switch 1/2 有效行程 Effective stroke 1/2 有效行程 Effective stroke 28 imit 極限 59.5 X 軸 axis + 方向 +direction imit 極限 Y axis 軸 + 方向 +direction X-axis cable X 軸拖鏈內部空間 chain internal space max 63 Y-axis cable Y 軸拖鏈內部空間 chain internal space 28 max Standard :None 1:Metal cover 2:Optical switch, NPN (standard) 3:Optical switch, PNP 4:Inductive type, NPN C:Customized Effective 1/2 有效行程 stroke x7= /2 Effective 有效行程 stroke 6-M6x1Px12DP Connector 接頭 Cover :None (standard) A:Metal cover B:Bellows B:Customized D:Non-woven H7x1DP 427 Connector 接頭 Cable chain :None (standard) 1: direction (chain internal space x3mm) 2:Vertical direction (chain internal space x3mm) C:Customized :Contact HIWIN for customized specification W3 2xW3 14 W1 W (W2) 2x(N+1)- 11 THRU, 18x12DP (3) 3x(N+1)-M6x1Px12DP 1 2 Nx2 (1)

34 62 MM99TE7-171 inear Motor System Air bearing stage Non-contact air bearing stage MAS Non-contact air bearing provides better positioning accuracy Embedded magnetic preloading design, enhance stability Provide extremely smooth motion and rapid settling time Equipped with ironless linear motor, no cogging High resolution feedback with linear optical encoder Equipped with high flexible cable For clean room, no need to lubricate and easy to maintain ow velocity ripple Available for precision positioning, calibration systems, scanning applications, wafer inspection Dimensions x44=22 4x(N+1)-M8x1.5Px16DP (Mounting 安裝孔位 holes) ) 6 A B C D 3 12-M5x.8Px1DP (Mounting 安裝孔位 holes) ) (31) Table2-33 MAS product specifications Specifications Unit AS2 AS4 AS6 AS8 AS1 Stroke mm Motor type - MCB8 Bus voltage V Up to 325 VDC Instant current A(pk) 6 Continuous current A(rms) 2. Feedback system - Optical inear Encoder: Analog period 2µm Resolution *1 µm 4 Repeatability µm ±.3 ±.4 ±.4 ±.5 ±.5 Positioning accuracy *2 µm ±3. ±4. ±4. ±5. ±5. straightness *3 µm ±1. ±1. ±1.5 ±2. ±2.5 Vertical straightness *3 µm ±1. ±1. ±1.5 ±2. ±2.5 Pitch *3 arc-sec ±2. ±2.5 ±3 ±3.5 ±4 Yaw *3 arc-sec ±2. ±2.5 ±3 ±3.5 ±4 Roll *3 arc-sec TBD Allowable payload kg 1 Max. speed *4*5 m/s Max. acceleration *5 m/s Working pressure *6 N/m 2 4x1 5 N/m 2 ± 2x1 4 N/m 2 Moving unit mass *7 kg 8 Moving unit material - Aluminum (hardened anodized) Base - Granite *1: The maximum resolution is up to 496 times, resolution accuracy is about 4 nm *2: Absolute accuracy is after error mapping. *3: Required specification is restricted by load, this specification is based on empty load *4: Must comply with the resolution of encoder and the number of mass transfer rate *5: Based on the limitations of motor instantly force, only allow moving unit mass about 8Kg (center load) *6: It is recommended to link pressure switch on the emergency stop devices to protect air bearing from overloading *7: Free of load Type Stroke Dimensions A B C D N AS AS AS AS AS Standard

35 64 MM99TE7-171 inear Motor System Air bearing stage MAP series Dimensions ow profile, XY symmetric structure design, with high stiffness granite base magnetic preload designed to enhance stability, with excellent geometrical property; applies ironless linear motor, no cogging to parid setting time, that provides excellent smooth motion and positioning accuracy; strong beam design uses high stiffness lightweight aluminum, reduces weight of moving unit; gantry dual-drive structure and use of two sets of optical linear encoder for feedback compensation, offers dynamic control and error mapping; for clean room, no lubrication for easy maintenance and provides high flexible cable management. B A Applications 28 4x95=38 Wafer inspection system Micromachining system aser lithography Semiconductor inspection system Exposure system 4 2x11=22 C Tabke2-34 MAP series product specification 9 Basic model Unit AP25 AP45 AP65 Stroke mm 25x25 45x45 65x65 Motor specification - Beam axis: MCC8 Gantry axes: MCB8 x 2 Bus Voltage V Up to 325 VDC Instant current A(pk) 6. Continuous current A(rms) 2. Feedback system - Optical inear Encoder: Analog period 4µm glass scale Resolution *1 µm 1 Repeatability µm ±.5 ±.5 ±.5 Positioning accuracy *2 µm ±1.5 ±1.5 ±1.5 straightness *3 µm ±1.5 ±2 ±2.5 Vertical straightness *3 µm ±1.5 ±2 ±2.5 Orthogonality arc-sec ±2.5 ±2.5 ±3.5 Pitch *3 arc-sec ±6 ±8 ±12 Yaw *3 arc-sec ±1.5 ±2 ±2.5 Roll *3 arc-sec TBD Allowable load kg 3 Max. speed *4*5 m/s Max. acceleration *5 m/s M6x1P-12DP ((Mounting 安裝孔位 holes) ) Type Stroke Dimensions A B C AP25 25x AP45 45x AP65 65x (386) Standard Working pressure *6 N/m 2 4x1 5 N/m 2 ± 2x1 4 N/m 2 Moving unit Bridge kg 3 mass *7 Gantry kg Moving unit material - Aluminum (hardened anodized) Base - Granite *1: The maximum resolution is up to 496 times, resolution accuracy is about 4 nm *2: Error after compensation *3: Required specification is restricted by load, this specification is based on empty load *4: Must comply with the resolution of encoder and the number of mass transfer rate *5: Based on the limitations of motor instantly force, only allow moving unit mass about 8Kg (center load) *6: It is recommended to link pressure switch on the emergency stop devices to protect air bearing from overloading *7: Free of load

36 66 MM99TE7-171 inear Motor System 67 3 Customized Positioning Systems The standardized positioning axes presented in this catalogue make it possible to handle many kinds of positioning tasks.for positioning tasks, that cannot be solved using standard axes, HIWIN engineers are able to work out an optimized solution for customers. The inquiry form at the end of this catalogue serves to help our application engineers make a preliminary design. A sampling of customized solutions is shown here. In several examples, mechanics are not the only parts customized. For instance, with the planar motors, special software is developed in order to obtain optimal integration of the positioning system to the production process. 3.1 Examples Semiconductor inspection and exposure High precision cross stages with air-bearings are the prerequisites for surface monitoring and mask production, to find even the smallest errors, to produce precision masks, in wafer production for the electronics, chip and flat panel industries. Stroke 5 mm x 5 mm Vertical straightness Repeatability ±.5 μm Accuracy ±1.5 μm Economical Pick & Place and Inspection XY gantry systems are economical for many applications. Gantry axes are assembled from standard components. Standard axes of the MX1 series Repeatability ± 2 µm Delivery with base frame Microsystem Technology and Wafer Processing Absolute precision and suitability for clean room conditions are the prerequisites for every drive in microsystem technology and wafer processing. inear motor cross stages meet these requirements. Stroke 2 mm x 2 mm, optional 3 mm x 3 mm evelness ± 4 µm across the complete stroke Repeatability ± 1 µm across both axes Accuracy ± 4 µm across both axes Clean room suitability class 1; optional class 1 Microshapes and Macroshapes Milling of microstructures with cutting tools and lasers are application areas in which gantry systems excel. They are also very economical to implement. Ironless motors MC Repeatability ± 2 µm Technology proven through countless worldwide installations aser Scanners Extremely smooth motion and long operating life are a must for optical inspection systems such as laser scanners. inear motor stages with air bearings fulfill these requirements. Air bearing system without friction Ironless linear motors are not effected by cogging. Stroke up to 1,5 mm Customized Planar Motors Servo-planar motors provide an excellent technological stage for inspection tasks. During inspection of circuit boards, optical sensors are integrated to completely monitor the printed conductive tracks and SMD components. Virtually no wear due to an air bearing Guaranteed levelness for the complete stroke path (up to 1 mm x 1 mm) Repeatability ± 3 µm High-Speed Hot Weld Machine for Welding Synthetic Materials inear motor stages of the MX1 series with absolute position measurement offer: Rapid initialization phase material when removed from the heated plate Welding is controlled by time, force and path Rapid load/unload system

37 68 MM99TE7-171 inear Motor System General type positioning stage Water Jet Application MSA multi-forcer linear stage provides 2.5m stroke and carries two HIWIN KK stages on the Z-axis. The lower 2 axes are also equipped with MS high force liner motors and run under synchronization. No commutation required at power up ong stroke Delivered with base frame, cover and precision motion controller HIWIN offers a variety of customized positioning stages to satisfy customer requirements in a variety of technical fields, such as optical inspection, laser processing, plastic material coating, metal processing and other automated production equipment. Application industries include semiconductor industry, Optical elements, panel displays, medical equipment, machine tools, electronic components, MEMS and so on. Specifications diversification and the ability for rapid customization are combined to fully meet customer needs for mass production, a shorted product development process and strict environmental requirements. Model code description S A Total Solution for AOI Industry MC linear stage provides smooth motion for the special requirement in AOI applications. With the MS linear stage mounted to the upper axis, the ballscrew driven Z-axis integrated with a CCD camera can attain high speeds. Repeatability ±1 µm Velocity ripple below 1.5 % Delivery with base frame and cover Category S: single-axis D: dual-axis R: tri-axis G: Gantry M: multi-axis composite A: air bearing Transmission method : linear motors B: AC/DC servo motor Customized for Glass Working The linear motor stage is designed to carry a working head to move above the flat table. The customer's laser head is for cutting double layer glasses. Gantry structure linear motor positioning stage for Gen. 5 glass 13 mm x 145 mm stroke Smooth motion Sinusoidal commutation and no cogging MC series motors Repeatablility ±2 μm Rigid base structure Serial number A~Z 1:Contact HIWIN for customized specification. 2: Starting from April 216, users of MS series linear motor positioning stage products, will be fully converted to MSA series motors. Customized Provide motion plan for customer This is another AOI application, where customer needed cost performance ratio. high Stroke 534mm x 534mm MSA type gantry Special synchrnous control for gantry Steel base frame Integrating PCB conveyor, PC, IPC for customers Sub-micron repeatability Promising move and settle time 4mm within 2ms to ±1.5 μm

38 7 MM99TE7-171 inear Motor System SA series 3.3 SB series Max. velocity 5 m/s (no load). Max. stroke up to 6, mm or more. High stiffness structure. Suitable for point-to-point motion. Can be equipped with ironcore motor. With a special chain design, it can be installed upside down Industry applications High stiffness design of base. Milt-forcer design Industry applications arge-scale inkjet printer, glass substrate/pcb board testing equipment, glass substrate exposure equipment Automation equipment, glass substrate moving equipment Performance specifications Performance specifications Table3-2 MX1C-CB product specification Table3-1 MX1-S27-62-X22 product specification MX1-S27-62-X22 Motor specifications Ironcore motor (can select ironless motor) Stroke 62 Max. force (N)/Continuous force(n) 117/382 Repeatability (µm) ± (apply HIWIN measurements) Max. acceleration (m/s²) 1 (with Payload) Max. speed (m/s) 2 (with +Direction Payload) 5 Stage orientation Upside down :All specifications can be designed according to customer demand MX1C-CB Motor Type Ironless(/Ironcore) motor Stroke 29 Peak Force(N)/Continuous Force(N) 144/36 Repeatability(µm) ±1(with HIWIN solution) Accuracy(µm) ±3(after error mapping) Max. Acceleration(m/s 2 ).5(with payload) Max. Velocity(m/s).5(with payload) +Direction Payload(kg) 25 Stage orientation Side-Mount :All specifications can be designed according to customer demand Direction Customized (8.5) 663 +Direction (8.5)

39 72 MM99TE7-171 inear Motor System SC series 3.5 SD series Uses dust-proof design. Uses granite base, high stiffness. Not easily influenced by environmental temperature. Can be equipped with ironless or ironcore motor. straightness and vertical straightness up to ±3 μm/m. Design with hidden cable chain. Vertical Applications. Integrate adjustable pneumatic counterweight module. Equipped with ironless motor. In line with the smaller space requirements. High-speed, lightweight design Industry applications Automation equipment, laser cutting applications Performance specifications Industry applications Automation equipment, high-speed pick and place feeding equipment, electronic component assembly equipment Performance specifications Table3-3 MX1C-S product specification Motor Type Stroke 46 MX1C-S Ironcore(/Ironless) motor Peak Force(N)/Continuous Force(N) 117/382 Repeatability(µm) ±1(with HIWIN solution) Accuracy(µm) ±3(after error mapping) Max. Acceleration(m/s 2 ) 5(with payload) Max. Velocity(m/s) 1(with payload) Straightness(µm) ±3 Vertical Straightness(µm) ±3 Payload(kg) 3 Stage orientation :All specifications can be designed according +Direction to customer demand. Table3-4 MX1C-TA product specification MX1C-TA Motor Type Ironless motor Stroke 26 Peak Force(N)/Continuous Force(N) 18/27 Repeatability(µm) ±2(with HIWIN solution) Accuracy(µm) ±6(after error mapping) Max. Acceleration(m/s 2 ) 1(with payload) Max. Velocity(m/s) 1(with payload) Payload(kg).5 Stage orientation Vertical :All specifications can be designed according to customer demand. (58.2) +Direction (58.2) Customized +Direction 3 (183.4) (18.5) +Direction (18.5) (183.4)

40 74 MM99TE7-171 inear Motor System SE series 3.7 SBF series Integration of high-precision torque motor. Precision compensation and angular positioning. Simple structure, wide range of applications High stiffness extruded aluminum structure. High-speed, point-to-point motion. Can be equipped with ironless or ironcore motor Industry applications Vertical applications. High load capacity of up to 2 kg. inear feedback system can be applied,high positioning accuracy, zero backlash Industry applications Automation equipment, touch panel coating equipment, AOI testing, exposure apparatus. Automation equipment, touch panel coating equipment, AOI testing equipment Performance specifications Performance specifications Table3-6 BS-2-5 product specification Table3-5 MX1C-S TMS34 product specification BS-2-5 MX1C-S TMS34 Motor Type Ironcore(/Ironless) motor Stroke 7 Peak Force(N)/Continuous Force(N) 1953/733 Repeatability(µm) ±1(with HIWIN solution) Accuracy(µm) ±3(after error mapping) Max. Acceleration(m/s 2 ) 1(with payload) Max. Velocity(m/s) 1(with payload) Payload(kg) Stage orientation Torque Motor Type TMS34 Peak Torque(Nm)/Continuous Torque(Nm) +Direction 6/2 Max. Velocity(rpm) 5(22V) Repeatability(arc-sec) ±2.5 Accuracy(arc-sec) ±25 Inertia of rotation parts(kgm 2 ).2 :All specifications can be designed according to customer demand Motor Type Stroke 5 Ball screw lead 2 Repeatability(µm) Accuracy(µm) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Straightness(µm) ±2 Vertical Straightness(µm) ±1 Payload(kg) 2 Stage orientation HIWIN AC Servo motor ±1(with HIWIN solution) ±3(after error mapping) 2(with payload).5(with payload) Vertical :All specifications can be designed according to customer demand. 791 (876.5) (187) (187) +Direction Customized +Direction +Direction (876.5)

41 76 MM99TE7-171 inear Motor System SBH series High stiffness oblique wedge structure. Vertically precision positioning. High load capacity. arge installation area,can be equipped with large-size vacuum chuck Industry applications Exposure apparatus, the touch panel lamination equipment, laser cutting, AOI testing equipment Performance specifications 3.9 DA series Integration of high-precision torque motor. XY positioning with high precision angular compensation. Use dust-proof design. High stiffness extruded aluminum structure. Can be equipped with ironless or ironcore motor Industry applications 3D measuring equipment, glass substrate chamfering devices, glass substrate/pcb testing equipment Performance specifications Table3-7 BS-2-12 product specification Table3-8 MX2C-CB4CB7-5-5+TMS3 product specification BS-2-12 Motor Type HIWIN AC Servo motor Stroke 12 Ball screw lead 2 Repeatability(µm) ±2.5(uni-direction, with HIWIN solution) Accuracy(µm) ±1(uni-direction,after error mapping) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Payload(kg) 35 Stage orientation Vertical:.5, :.87(with payload) Vertical:.2, :.35(with payload) :All specifications can be designed according to customer demand. (212) 365 +Direction 418 MX2C-CB4CB7-5-5+TMS3 Motor Type Ironless(/Ironcore) motor Stroke 5 Peak Force(N)/Continuous Force(N) Repeatability(µm) Accuracy(µm) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Payload(kg) 5 Stage orientation Torque Motor Type X-Axis TMS3 +Direction X-axis:512/128, Y-axis:292/73 ±1(with HIWIN solution) ±5(after error mapping) X-axis:5, Y-axis:5(with payload) X-axis:.4, Y-axis:.2(with payload) Peak Torque(Nm)/Continuous Torque(Nm) 9.3/3.1 Max. Velocity(rpm) 5(22V) Repeatability(arc-sec) ±3 Accuracy(arc-sec) ± Inertia of rotation parts(kgm 2 ).3 :All specifications can be designed according to customer demand. 412 Customized (212) 365 +Direction

42 78 MM99TE7-171 inear Motor System DB series 3.11 DC series Upside down applications. Suitable for point-to-point motion. High stiffness extruded aluminum structure. Can be equipped with ironless or ironcore motor. Wide range of applications. Suitable for High-speed scanning and rapid positioning motion. Simple structure and wide range of applications Industry applications Automation equipment, AOI inspection applications, Wafer cutting applications.ations, Wafer cutting applications Performance specifications Table3-9 MX2C-S23S product specification Industry applications Biomedical testing equipment, electronic components plug-in equipment Performance specifications Table3-1 MX2C-CC8CFC--4 product specification MX2C-S23S Motor Type Ironcore (/Ironless) motor Stroke X-axis:362, Y-axis:39 Peak Force(N)/Continuous Force(N) X-axis:639/24, Y-axis:1953/733 Repeatability(µm) ±2(with HIWIN solution) Accuracy(µm) ±4(after error mapping) Max. Acceleration(m/s 2 ) 1(with payload) Max. Velocity(m/s) 1(with payload) Payload(kg) 1 Stage orientation Upside down :All specifications can be designed according to customer demand. 79 MX2C-CC8CFC--4 Motor Type Ironless(/Ironcore) motor Stroke X-axis:, Y-axis:4 Peak Force(N)/Continuous Force(N) X-axis:78/195, Y-axis:2736/684 Repeatability(µm) ±2(with HIWIN solution) Accuracy(µm) ±5(after error mapping) Max. Acceleration(m/s 2 ) X-axis:1, Y-axis:1(with payload) Max. Velocity(m/s) X-axis:1, Y-axis:1(with payload) Payload(kg) 1 Stage orientation :All specifications can be designed according to customer demand (627.5) Customized (627.5) 747

43 8 MM99TE7-171 inear Motor System DD series 3.13 DE series Suitable for point-to-point motion. Vertical straightness up to ±4 µm. Use dust-proof design. High load capacity. Simple structure and wide range of applications. Integration of high-precision torque motor. X-Y positioning with high precision angular compensation. High stiffness extruded aluminum structure. Best guideway supporting structure design Industry applications PCB/steel plate laser cutting applications, automation equipment, and 3D engraving machine applications Performance specifications Industry applications Automation equipment, AOI testing equipment, laser cutting applications, appearance grinding trimming equipment Performance specifications Table3-12 MX2C-S27S TMS12 product specification Table3-11 MX2C-S37S product specification MX2C-S27S TMS12 MX2C-S37S Motor Type Ironcore (/Ironless) motor Stroke X-axis:6, Y-axis:6 Peak Force(N)/Continuous Force(N) X-axis:1425/535, Y-axis:285/169 Repeatability(µm) ±2(with HIWIN solution) Accuracy(µm) ±3(after error mapping) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Vertical Straightness(µm) X-axis:1, Y-axis:7(with payload).7(with payload) X-axis:±4, Y-axis:±5 Orthogonality(arc-sec) ±5 Payload(kg) 35 Stage orientation :All specifications can be designed according to customer demand Motor Type Ironcore (/Ironless) motor Stroke X-axis:3, Y-axis:3 Peak Force(N)/Continuous Force(N) X-axis:1953/733, Y-axis:117/382 Repeatability(µm) ±.5(with HIWIN solution) Accuracy(µm) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) ±1(after error mapping) 5(with payload).8(with payload) Orthogonality(arc-sec) ±5 Payload(kg) 4 Stage orientation Torque Motor Type TMS12 Peak Torque(Nm)/Continuous Torque(Nm) /5 Max. Velocity(rpm) 7(22V) Repeatability(arc-sec) ±3 Accuracy(arc-sec) ±45 Inertia of rotation parts(kgm 2 ).6 :All specifications can be designed according to customer demand. 73 Customized

44 82 MM99TE7-171 inear Motor System DF series 3. DG series Stainless steel cover, can withstand Instantaneous high temperature. Maze dust-proof design. With short setting time. ow center of gravity design. Equipped with ironless motor. Sealed architecture. Suitable for the high dust environment. ow center of gravity design. With short setting time. Equipped with ironless motor Industry applications Automation equipment, laser cutting equipment Industry applications Automation equipment, laser cutting equipment, PCB drilling equipment Performance specifications 3..2 Performance specifications Table3-13 MX2C-CB7CC product specification Table3-14 MX2C-CE4CE product specification MX2C-CB7CC Motor Type Ironless motor Stroke X-axis:28, Y-axis:34 Peak Force(N)/Continuous Force(N) X-axis:512/128, Y-axis:684/171 Repeatability(µm) ±3(with HIWIN solution) Accuracy(µm) ±5(after error mapping) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Orthogonality(arc-sec) ±5 Payload(kg) 35 Stage orientation X-axis:1, Y-axis:5(with payload) X-axis:.7, Y-axis:.5(with payload) :All specifications can be designed according to customer demand. MX2C-CE4CE Motor Type Ironless motor Stroke X-axis:5, Y-axis:45 Peak Force(N)/Continuous Force(N) X-axis:114/276, Y-axis:736/184 Repeatability(µm) ±1(with HIWIN solution) Accuracy(µm) ±1.5(after error mapping) Max. Acceleration(m/s 2 ) 5(with payload) Max. Velocity(m/s).22(with payload) Payload(kg) 35 Stage orientation :All specifications can be designed according to customer demand Customized 149 (1171) (11) (1171) (11)

45 84 MM99TE7-171 inear Motor System DH series 3.17 DJ series Suitable for vacuum environment, 1x1-6 Torr. Vacuum flat cable. Integration of high-precision torque motor. X-Y positioning with high precision angular compensation. Can be equipped with ironless or ironcore motor Industry applications Automation equipment, plasma repair equipment, electron beam scanning applications. Integration of high-precision torque motor. XY positioning with high precision angular compensation. ow center of gravity design. With short setting time. Excellent servo stability. Use low dust flat cable(class 1). Can be equipped with ironless or ironcore motor Industry applications The semiconductor wafer inspection equipment, AOI equipment Performance specifications Performance specifications Table3- MX2C-S23S TMS32 product specification Table3-16 MX2C-SA11SA TMF42 product specification MX2C-S23S TMS32 Motor Type Ironcore (/Ironless) motor Stroke X-axis:24, Y-axis:36 Peak Force(N)/Continuous Force(N) X-axis:117/382, Y-axis:639/24 Repeatability(µm) X-axis:±2, Y-axis:±1(with HIWIN solution) Accuracy(µm) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Payload(kg) 5 Stage orientation Torque Motor Type TMS32 Peak Torque(Nm)/Continuous Torque(Nm) 3/1 Max. Velocity(rpm) 7(22V) Repeatability(arc-sec) ±3 Accuracy(arc-sec) ± Inertia of rotation parts(kgm 2 ).14 X-axis:±5, Y-axis:±3(after error mapping) X-axis:5, Y-axis:5(with payload) X-axis:.7, Y-axis:1(with payload) :All specifications can be designed according to customer demand. 326 MX2C-SA11SA TMF42 Motor Type Ironcore (/Ironless) motor Stroke X-axis:42, Y-axis:49 Peak Force(N)/Continuous Force(N) X-axis:254/9, Y-axis:462/149 Repeatability(µm) ±.5(with HIWIN solution) Accuracy(µm) ±2(after error mapping) Max. Acceleration(m/s 2 ) 6.5(with payload) Max. Velocity(m/s).5(with payload) Vertical Straightness(µm) ±1 Orthogonality(arc-sec) ±5 Payload(kg) 1 Stage orientation Torque Motor Type TMF42 Peak Torque(Nm)/Continuous Torque(Nm) 3.6/1.2 Max. Velocity(rpm) 12(22V) Repeatability(arc-sec) ±2.5 Accuracy(arc-sec) ±25 Inertia of rotation parts(kgm 2 ).5 Customized :All specifications can be designed according to customer demand

46 86 MM99TE7-171 inear Motor System DK series Multi-forcer simultaneously motion. Suitable for laterally applications. For high-speed reciprocating motion. Z-axis using a linear motor with a pneumatic counterweight design. With high speed and high accuracy. Can be equipped with ironless or ironcore motor Industry applications Solar automation equipment, high-speed pick and place feeding equipment, electronic components assembly equipment Performance specifications Table3-17 MX4C-S13S product specification MX4C-S13S Motor Type Ironcore (/Ironless) motor Stroke Z-axis:32, Y-axis:75 Peak Force(N)/Continuous Force(N) Z-axis:54/23, Y-axis:1425/535 Repeatability(µm) ±2(with HIWIN solution) Accuracy(µm) ±5(after error mapping) Max. Acceleration(m/s 2 ) Z-axis:1, Y-axis:1(with payload) Max. Velocity(m/s) Z-axis:.5, Y-axis:1.3(with payload) Payload(kg) 1 Stage orientation aterally :All specifications can be designed according to customer demand. Z-Axis +Direction 3.19 RA series Fully enclosed waterproof design. Using non-contact air bearing. XY cantilever structure. Space saving. ightweight and high-stiffness design. Can be equipped with ironless or ironcore motor Industry applications Waterjet equipment, laser cutting equipment, automation equipment Performance specifications Table3-18 MX2C-S13S product specification MX2C-S13S Motor Type Ironcore (/Ironless) motor Stroke X-axis:51, Y-axis:51 Peak Force(N)/Continuous Force(N) X-axis:54/23, Y-axis:69/228 Repeatability(µm) X-axis:±2, Y-axis:±2(with HIWIN solution) Accuracy(µm) X-axis:±5, Y-axis:±5(after error mapping) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Payload(kg) 1 Stage orientation X-axis:1, Y-axis:5(with payload) X-axis:.8, Y-axis:.5(with payload) :All specifications can be designed according to customer demand. Customized 462 Z-Axis +Direction 1714 (685) 462 (1116) (685) (1116)

47 88 MM99TE7-171 inear Motor System RB series Z-axis counterweight design. Excellent low speed velocity stability ±1 mm/s. Fully enclosed waterproof design. High positioning accuracy up to ±1 µm. Can be equipped with ironless or ironcore motor Industry applications Micromachining equipment, 3D measurement equipment, 3D engraving equipment RBC series Z-axis designed with KK series ballscrew driven stage module significantly reduces system cost. Use dust-proof design. Three-dimensional motion. Simple structure design Industry applications Mechanical component testing equipment, automation equipment, 3D engraving equipment Performance specifications Table3-19 MX3C-CB5CB5CB product specification MX3C-CB5CB5CB Motor Type Ironless(/Ironcore) motor Stroke X-axis:2, Y-axis:2, Z-axis:2 Peak Force(N)/Continuous Force(N) X-axis:58/145, Y-axis:364/91, Z-axis:364/91 Repeatability(µm) ±.5(with HIWIN solution) Accuracy(µm) ±1(after error mapping) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Orthogonality(arc-sec) Speed ripple Payload(kg) 5 Stage orientation X-axis:.5, Y-axis:.5, Z-axis:.5(with payload) X-axis:.2, Y-axis:.2, Z-axis:.5(with payload) X-Y:±4, Y-Z:±2, X-Z:±3 X-axis:1.35, Y-axis:.93, Z-axis:1.57(when V=5mm/s) :All specifications can be designed according to customer demand. Z-Axis +Direction Performance specifications Table3-2 KK61-KK61-KK65--- product specification KK61-KK61-KK65--- Motor Type HIWIN AC Servo motor Stroke X-axis:55, Y-axis:55, Z-axis:55 Ball screw lead X-axis:1, Y-axis:1, Z-axis:5 Repeatability(µm) Accuracy grade Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Payload(kg) 1 Stage orientation ±2(uni-direction, with HIWIN solution) C X-axis:5, Y-axis:5, Z-axis:5(HIWIN 1W, with payload) X-axis:.5, Y-axis:.5, Z-axis:.2(HIWIN 1W, with payload) :All specifications can be designed according to customer demand. Z-Axis +Direction 441 Customized Z-Axis +Direction Z-Axis +Direction

48 9 MM99TE7-171 inear Motor System GA series 3.23 GB series Micro gantry structure. Space saving. ightweight beam design. High dynamic response. Can be equipped with ironless or ironcore motor Industry applications Electronic components assembly equipment, biomedical equipment industries, AOI testing equipment Performance specifications Table3-21 MG2C-S11S KK45C-A1-F2M product specification MG2C-S11S KK45C-A1-F2M Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor Stroke X-axis:2, Y-axis:2, Z-axis:5 Peak Force(N)/Continuous Force(N) X-axis:254/92, Y-axis:254/92, Z-axis:HIWIN 5W(22V) Ball screw lead Z-axis:5 Repeatability(µm) X-axis:±2, Y-axis:±3, Z-axis:±2(uni-direction, with HIWIN solution) Accuracy(µm) X-axis:±5, Y-axis:±1, Z-axis:±1(uni-direction, after error mapping) Max. Acceleration(m/s 2 ) X-axis:5, Y-axis:5, Z-axis:5(with payload) Max. Velocity(m/s) X-axis:1, Y-axis:.5, Z-axis:.4(with payload) Payload(kg) 1 Stage orientation :All specifications can Y-Axis be designed +Direction according to customer demand. 572 Z-Axis +Direction Z-Axis +Direction 47 (419) (419) High stiffness aluminum gantry structure. Use dust-proof design. Z-axis designed with KK series ballscrew driven stage module. Unilateral or bilateral drive structure are seletable according to the precision requirement. Can be equipped with ironless or ironcore motor Industry applications Automation industrial equipment, laser cutting applications, spraying equipment Performance specifications Table3-22 MG2A-S13S KK65C-4A1-F2BS2M product specification MG2A-S13S KK65C-4A1-F2BS2M Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor Stroke X-axis:6, Y-axis:9, Z-axis:234 Peak Force(N)/Continuous Force(N) X-axis:54/23, Y-axis:639/24, Z-axis:HIWIN 1W(22V) Ball screw lead Z-axis:5 Repeatability(µm) X-axis:±5, Y-axis:±5, Z-axis:±2(uni-direction, with HIWIN solution) Accuracy(µm) X-axis:±, Y-axis:±, Z-axis:C(uni-direction, after error mapping) Max. Acceleration(m/s 2 ) 5(with payload) Max. Velocity(m/s).2(with payload) Payload(kg) 5 Stage orientation :All specifications can be designed according to customer demand Z-Axis +Direction Z-Axis +Direction (812.5) (812.5) Customized

49 92 MM99TE7-171 inear Motor System GD series 3.25 GE series High stiffness cast iron base. With excellent vibration suppression capability. Suitable for high acceleration and deceleration applications. With excellent positioning accuracy. Unilateral or bilateral drive structure are seletable according to the precision requirement Industry applications Automation equipment, PCB AOI inspection applications Performance specifications High stiffness aluminum gantry structure. Suitable for high acceleration and deceleration applications. Maximize the working area. Space saving. Can be equipped with ironless or ironcore motor Industry applications Automation equipment, electronic components plug-in assembly equipment, AOI equipment, automatic coating equipment Performance specifications Table3-23 MG2C-S13S product specification Table3-24 MG2C-SA11SA product specification MG2C-S13S MG2C-SA11SA Motor Type Ironcore (/Ironless) motor Stroke X-axis:5, Y-axis:54 Peak Force(N)/Continuous Force(N) X-axis:54/23, Y-axis:1425/535 Repeatability(µm) ±1(uni-direction, with HIWIN solution) Accuracy(µm) ±2(after error mapping) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) X-axis:, Y-axis:1(with payload) X-axis:1.5, Y-axis:1.5(with payload) Vertical Straightness(µm) 1 Straightness(µm) 1 Pitch(arc-sec) 25 Yaw(arc-sec) X-axis:2, Y-axis: Orthogonality(arc-sec) ±5 Payload(kg) 12 Stage orientation :All specifications can be designed according to customer demand. Motor Type Ironcore (/Ironless) motor Stroke X-axis:58, Y-axis:5 Peak Force(N)/Continuous Force(N) X-axis:289/121, Y-axis:123/426 Repeatability(µm) ±2.5(uni-direction, with HIWIN solution) Accuracy(µm) ±5(after error mapping) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) Vertical Straightness(µm) ±5 Straightness(µm) ±5 Payload(kg) 5 Stage orientation X-axis:1, Y-axis:1(with payload) X-axis:.5, Y-axis:.5(with payload) :All specifications can be designed according to customer demand. (619) Customized 649 (113.4) (619) (1238.5) 1 (1238.5) (113.4) 93

50 94 MM99TE7-171 inear Motor System GF series 3.27 GBC series Use dust-proof design. Granite base, Steel beams. Modular Z-axis with a high-precision torque motor. Can be equipped with ironless or ironcore motor Industry applications Ballscrew structure. High acceleration and deceleration motion. Can be equipped with linear scale to enhance the positioning accuracy and reproducibility. Simple structure. Optical detection applications, 3D measurement system Industry applications Performance specifications Automation equipment, AOI inspection applications. Table3-25 MG3C-S47S KK861P-34A1-FBS2M+TMN71EH product specification Performance specifications MG3C-S47S KK861P-34A1- FBS2M+TMN71EH Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor Stroke X-axis:75, Y-axis:55, Z-axis:17 Peak Force(N)/Continuous Force(N) X-axis:1953/733, Y-axis:1425/535, Z-axis:HIWIN 4W Repeatability(µm) X-axis:±1, Y-axis:±1, Z-axis:±2(with HIWIN solution) Accuracy(µm) ±3(after error mapping) Max. Acceleration(m/s 2 ) X-axis:2, Y-axis:4, Z-axis:2.5(with payload) Max. Velocity(m/s) X-axis:1, Y-axis:1, Z-axis:.5(with payload) Payload(kg) 5 Stage orientation Torque Motor Type TMN71EH Peak Torque(Nm)/Continuous Torque(Nm) 11.1/3.7 Max. Velocity(rpm) 6(22V) Repeatability(arc-sec) ±2.5 Accuracy(arc-sec) ±1 Inertia of rotation parts(kgm 2 ).8 :All specifications can be designed according to customer demand Z-Axis +Direction Customized (173.2) (173.2) Table3-26 BS-2-54+BS-2-5 product specification BS-2-54+BS-2-5 Motor Type Stroke Ball screw lead 2 Repeatability(µm) Accuracy(µm) Max. Acceleration(m/s 2 ) Max. Velocity(m/s) HIWIN AC Servo motor X-axis:5, Y-axis:54 ±2.5(uni-direction, with HIWIN solution) ±6(after error mapping) X-axis:12, Y-axis:17(with payload) X-axis:1, Y-axis:1(with payload) Vertical Straightness(µm) 2 Straightness(µm) 2 Pitch(arc-sec) 3 Yaw(arc-sec) X-axis:2, Y-axis:25 Orthogonality(arc-sec) ±1 Payload(kg) 9 Stage orientation :All specifications can be designed according to customer demand Z-Axis +Direction (1351) (1351)

51 96 MM99TE7-171 inear Motor System MA series 3.29 MB series Integration of high-precision TMN torque motor. With excellent flatness(x-y-theta.1 mm). Water cooling design, reduce thermal deformation. XY Stage low center of gravity design. Can be equipped with ironless or ironcore motor Industry applications Wafer cutting, the glass substrate testing equipment, wafer bonding. Multi-axis simultaneously motion. Good working efficiency. High stiffness honeycomb beam design. High acceleration and deceleration motion. With excellent settling time. Can be used with automated pick and place conveying mechanism. Can be equipped with ironless or ironcore motor Industry applications Performance specifications Table3-27 MX2C-F23F BS-5-17+TMN93EH product specification MX2C-F23F BS-5-17+TMN93EH Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor Stroke X-axis:362, Y-axis:39 Peak Force(N)/Continuous Force(N) X-axis:282/764, Y-axis:5496/2252 Repeatability(µm) ±.5(with HIWIN solution) Accuracy(µm) ±1(after error mapping) Max. Acceleration(m/s 2 ) 1(with payload) Max. Velocity(m/s) 1(with payload) Payload(kg) Stage orientation Torque Motor Type Z-axis:5, A-axis:3 TMN93EH Peak Torque(Nm)/Continuous Torque(Nm) 45/ Max. Velocity(rpm) X-Axis 3(22V) +Direction Repeatability(arc-sec) ±2.5 Accuracy(arc-sec) ±25 Inertia of rotation parts(kgm 2 ).52 :All specifications can be designed according to customer demand. Z-Axis +Direction Precision component assembly applications, electronic components plug-in equipment Performance specifications X1-Axis +Direction X2-Axis +Direction Table3-28 MX8C-SA11F product specification MX8C-SA11F Motor Type Ironcore (/Ironless) motor Stroke X-axis:264, Y-axis:632 Peak Force(N)/Continuous Force(N) X-axis:289/121, Y-axis:138/51 Repeatability(µm) X-axis:±1, Y-axis:±2(with HIWIN solution) Accuracy(µm) X-axis:±3, Y-axis:±5(after error mapping) Max. Acceleration(m/s 2 ) X-axis:2, Y-axis:3(with payload) Max. Velocity(m/s) X-axis:1, Y-axis:1(with payload) Straightness(µm) X3-Axis +Direction ±1 X4-Axis +Direction Customized Orthogonality(arc-sec) ±1 Payload(kg) 1 Stage orientation :All specifications can be designed according to customer demand. X1-Axis +Direction X2-Axis +Direction Z-Axis +Direction Y1-Axis +Direction Y2-Axis +Direction Y1-Axis +Direction Y2-Axis +Direction Y4-Axis +Direction X3-Axis +Direction X4-Axis +Direction 1388 Y3-Axis +Direction Y4-Axis +Direction Y3-Axis +Direction

52 MM99TE7-171 inear Motor System 3.3 AA series AB series Using non-contact air bearing. Without maintenance. High positioning accuracy. Not easily influenced by environmental temperature. With high-precision and large-size vacuum chuck. With passive vibration suppressing system. Integrated electronic control system. Equipped with ironless motor. Using non-contact air bearing. Without maintenance. High positioning accuracy. Not easily influenced by environmental temperature. With high-precision and large-size vacuum chuck. Z direction jitter 1 nm. Vertical straightness up to ±1 µm. Equipped with ironless motor Industry applications Industry applications Glass substrate exposure Application, white testing equipment, wafer defect detection equipment. Glass substrate exposure Application, white testing equipment, wafer defect detection equipment Performance specifications Performance specifications Table3-29 MAP-CC8CB8-7-8+BS-2-5 product specification MAP-CC8CB Ironless motor Motor Type Ironless motor Stroke X-axis 7, Y-axis 8, Z-axis 5 Stroke X-axis 25, Y-axis 25 Peak Force(N)/Continuous Force(N) X-axis 58/145, Y-axis 78/195, Z-axis HIWIN 1KW(22V) Repeatability(µm) X-axis ±.5, Y-axis ±.5, Z-axis ±2(with HIWIN solution) Peak Force(N)/Continuous Force(N) X-axis 78/195, Y-axis 58/145 Accuracy(µm) X-axis ±1.5, Y-axis ±1.5, Z-axis ±6(after error mapping) Repeatability(µm) ±.75(with HIWIN solution) Max. Acceleration(m/s2) X-axis 2.5, Y-axis 4(with payload 1 kg), Z-axis 2(with payload 2 kg) Accuracy(µm) Max. Velocity(m/s) X-axis.3, Y-axis.3(with payload 1 kg), Z-axis.5(with payload 2 kg) Max. Velocity(m/s).25(with payload) Vertical Straightness(µm) X-axis ±2, Y-axis ±2, Z-axis ±1 Vertical Straightness(µm) ±1 Straightness(µm) X-axis ±1, Y-axis ±1, Z-axis ±2 Straightness(µm) ±2 Orthogonality(arc-sec) XY-axis ±5 Orthogonality(arc-sec) ±3 Payload(kg) XY-axis 1, Z-axis 2 Payload(kg) Stage orientation Stage orientation (with payload) All specifications can be designed according to customer demand. Z-Axis +Direction ±1.5(after error mapping) Max. Acceleration(m/s2) All specifications can be designed according to customer demand. Motor Type Z-Axis +Direction MAP-CC8CB8-7-8+BS-2-5 Customized Table3-3 MAP-CC8CB product specification

53 1 MM99TE7-171 inear Motor System AC series Using non-contact air bearing. Without maintenance. High positioning accuracy. High load capacity of up to 68 kg. Vertical straightness up to ±3 µm. Equipped with ironless motor Industry applications arge-size glass substrate detection equipment 4 Drive 4.1 HIWIN D1 servo motor drive Digital drive Vector control ightening human, machine interface 1-24Vac power input Support various pulse wave formats Support analog or digital optical scales Performance specifications Table3-31 MAP-CFC product specification MAP-CFC Motor Type Ironless motor Stroke 232 Peak Force(N)/Continuous Force(N) 2736/684 Repeatability(µm) ±.5 (with HIWIN solution) Accuracy(µm) ±2(after error mapping) Max. Acceleration(m/s 2 ) 2(with payload) Max. Velocity(m/s).7(with payload) Vertical Straightness(µm) ±4 Straightness(µm) ±3 Payload(kg) +Direction 68 Stage orientation :All specifications can be designed according to customer demand DC24V Option 4 M STAGE Main Power 1 Drive CN3 +Direction CN1 CN3 CN2 CN4 2 3 CN imit signals Pulse signal etc. 5 PC Drives Mot ion Controller

54 12 MM99TE7-171 inear Motor System HIWIN D1-N servo motor drive 4.3 D1 related accessories Table4-1 Drive peripheral accessories Current vector control Best for driving linear motors, shaft motors and torque motors 1-24VAC power input Supports STP / DIR, CW / CCW, A / B pulse formats (differential / single ended interace) upports ±1V voltage or digital commands for velocity or force/ torque modes PD general motion language Supports analog and digital encoder and resolver 4 3 Name Specification Connector Description RS-232communication cable MACR21D D-sub connector and CN1 D-Sub9PIN to RJ-11 1 Regenerative resistor 5171 Rated power 1W, instant power 5W D1 Drive connector accessories kit bag D1-CK1 All connectors (not included CN3) All connectors (also included CN3) EMC accessories kit bag D1-EMC1 Single phase power D1-EMC2 Three phase power Heat sink D1-H1 D1-H2 Standard Small type MAHS Suitable for MS series, single-ended signal Digital Hall sensor MAHC Suitable for MCA,MCB and MCC series, single-ended signal MAHC2 Suitable for MCD and MCE series, single-ended signal Analog Hall sensor MAHSA-D MAHCA-D Suitable for MS series, differential signal Suitable for MCA,MCB and MCC series, differential signal :Please contact us for hall sensor. M STAGE DC24V Op tion 1 Main Power Drive 7 X3 X1 X9 X2 X4 CN3 CN2 CN4 X1/X11 8 X5 CN1 9 X6 12 imit signals 11 Pulse signal etc. PC Drives Motion Controller