WGL Series. Wide Guide Linear Motor Stage. Zero backlash ironless linear motor. Choice of linear encoder resolutions of up to 1um

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1 GL Series ide Guide Linear Motor Stage Direct drive Zero cogging Zero backlash ironless linear motor Choice of linear encoder resolutions of up to 1um Simple design with fewer parts Corrosion resistant wide guide recirculating linear guide 78

2 GL138 Series AUM3 Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, and 0.1μm Size 15 (wide) linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM3-S2 AUM3-S3 AUM3-S4 Performance Parameters Unit Series Parallel Series Parallel Series Parallel Continuous Force, C N Peak Force N Motor Constant N/SqRt() Continuous Power Peak Power Electrical Cycle Max Bus Voltage V Max Coil Temperature C Thermal Dissipation Constant / C Continuous Current Arms Peak Current Arms Force Constant N/Arms Back EMF Constant Vpeak/(m/s) Inductance mh Terminal C Ohms Electrical Time Constant ms Mechanical Parameters Coil Coil Track (per 120 ) 1.00 Magnetic Attraction N (lb) 0 79

3 Dimensional Drawing Model GL138 AUM3 Coil Effective Stroke (Z) Overall (X) (A) Height Moving () () Hard Stopper Position (Y) Mounting Hole (B) S S S

4 Bearing Parameters Specifications Unit S2 S3 S4 Maximum bearing load N Recoended row moment Nm Recoended pitch moment Nm Recoended yaw moment Nm Performance Parameter Acceleration G 10 Velocity(1μm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity(0.5μm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity(0.1μm resolution) Velocity(Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 3 Straightness ±3µm/25, NTE±10µm/300 3 Flatness ±3µm/25, NTE±10µm/300 Repeatability(1μm resolution) Repeatability(0.5μm resolution) Repeatability(0.1μm resolution) Repeatability(Analogue) Part Numbering (Rapid Delivery Series) μm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts GL 138 Hall Option Cable Coil Version Effective Stroke Encoder Resolution Motor Connection Sensor Encoder Option Rail Motor Size (type) (m) (type) (micron, μ) (type) AUM3 P,S S2,S3,S4 J,K H9D 3.0 V R22, R41, 4 R10 0.1, 1.0, T 1. For customized stroke length (up to 2.7m), please contact us. 2. For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3. All measurement taken when module is mounted on a 5micron flat granite table. 4. Available for 1um only. Example: GL138-AUM3-S-S2-J-H9D-3.0-V3-300-R T 81

5 GL138 Series AUM4 Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, and 0.1μm Size 15 (wide) linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM4-S2 AUM4-S3 AUM4-S4 Performance Parameters Unit Series Parallel Series Parallel Series Parallel Continuous Force, C N Peak Force N Motor Constant N/SqRt() Continuous Power Peak Power Electrical Cycle Max Bus Voltage V Max Coil Temperature C Thermal Dissipation Constant / C Continuous Current Arms Peak Current Arms Force Constant N/Arms Back EMF Constant Vpeak/(m/s) Inductance mh Terminal C Ohms Electrical Time Constant ms Mechanical Parameters Coil Coil Track (per 120 ) 1.77 Magnetic Attraction N (lb) 0 82

6 Dimensional Drawing Model GL138 AUM4 Coil Effective Stroke (Z) Overall (X) (A) Height Moving () () S Hard Stopper Position (Y) Mounting Hole (B) S S

7 Bearing Parameters Specifications Unit S2 S3 S4 Maximum bearing load N Recoended row moment Nm Recoended pitch moment Nm Recoended yaw moment Nm Performance Parameter Acceleration G 10 Velocity(1μm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity(0.5μm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity(0.1μm resolution) Velocity(Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 3 Straightness ±3µm/25, NTE±10µm/300 3 Flatness ±3µm/25, NTE±10µm/300 Repeatability(1μm resolution) Repeatability(0.5μm resolution) Repeatability(0.1μm resolution) Repeatability(Analogue) Part Numbering (Rapid Delivery Series) μm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts GL 138 Hall Option Cable Coil Version Effective Stroke Encoder Option Encoder Resolution Motor Connection Sensor Rail Motor Size (type) (m) (type) (micron, μ) (type) AUM4 P,S S2,S3,S4 J,K H9D 3.0 V R22, R41, 4 R10 0.1, 1.0, T 1. For customized stroke length (up to 2.7m), please contact us. 2. For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3. All measurement taken when module is mounted on a 5micron flat granite table. 4. Available for 1um only. Example: GL138-AUM4-S-S2-J-H9D-3.0-V4-300-R T 84