ABL8000 Series. Air Bearing, Linear Motor Stage. Active air preload on all air-bearing surfaces. Travel to 1 meter

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1 Linear Stages Air earing, Linear Motor Stage Active air preload on all airbearing surfaces Travel to 1 meter Linear encoder or laser interferometer feedback High stiffness for heavy loads and excellent geometrical performance Integrated XY subsystems including granite Leadingedge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ballscrew and mechanicalbearing positioning systems. The AL8000, with its fully active preload, exceptionally high stiffness, and excellent geometric characteristics was designed specifically to meet those demands. Airearing Design The AL8000 incorporates an active preload on both the vertical and horizontal surfaces. The opposing thinfilm pressure maintains the bearing nominal gap tolerance. This design, in addition to the large airbearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading. Proprietary manufacturing techniques result in a stage with unsurpassed geometrical characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications. Linear Motor Drive The driving force behind this stage is Aerotech s LM series brushless linear servomotor. Aerotech s long history and experience as a motor manufacturer is reflected in this design. The LM utilizes an ironless forcer, which means there is zero cogging and no attractive forces resulting in unsurpassed smoothness of motion. apable of generating high force and velocity, the LM represents the ultimate combination of power and performance. Zero Maintenance Our totally noncontact air bearing, noncontact linear motor drive, and noncontact feedback device ensure years of maintenancefree operation at the high performance levels that are expected of Aerotech equipment. ecause there is no mechanical contact between moving elements, the AL8000 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication only clean, dry gas air bearings are ideal for clean room and medical applications. able Management We carefully optimize the cable bend radius to ensure years of troublefree operation. In the unlikely event of failure, Aerotech s modular design makes cable replacement quick and easy with minimal downtime. To facilitate integration into the final system, we include all customerrequired cables, air hoses, etc. in our MS bundle. oth ends are fully connectorized for simple integration into the customer s machine. WORLD HEADQUARTERS: Aerotech, Inc., 1 Zeta Drive, Pittsburgh, PA 15238, USA Fax: Aerotech Ltd., Jupiter House, alleva Park, Aldermaston, erkshire RG7 8NN, UK Fax: Aerotech GmbH, Südwestpark 90, Nürnberg, Germany Fax:

2 SPEIFIATIONS asic Model AL80020 AL80030 AL80040 AL80050 AL80075 AL800 1) T otal Travel Drive System us Voltage ontinuous urrent Feedback Resolution ( 00 mm (8 in ) mm (12 in) 400 mm (1 in) 500 mm (20 in) 750 mm (30 in) 00 mm (40 in) Linear rushless Servomotor [LM142A (S) or LM24A (L)] Up to 320 VD A p k 5.3 A (S); 8.7 A (L) A r ms 3.8 A (S);.2 A (L) LN LT Laser Interferometer 2) M aximum Travel Speed Maximum Linear Acceleration 3) M aximum Load ontinuous Stall Force 4,5) (5) P eak Force Overall Accuracy Repeatability Straightness and Flatness Pitch/Roll/Yaw Noncontact Linear Encoder (LN or LT) or Laser Interferometer µm 0.2 µm (0.04 µin 8 µin) µm 1.0 µm (0.2 µin 40 µin) 0.3 nm 79 nm (0.012 µin 3.2 µin) ( 2 m/s (80 in/s ) 2 g m/ s (78 in/s ) (noload) ( 70 kg (S); 120 kg (L ) Air (20 psi) ( LN LT No Air ) H ALAR ( 0.5 µm (±20 µin ) LM142A [18.0 N (37.9 lb)]; LM24A [27.0 N (2.0 lb)] LM142A [9.0 N (24. lb)]; LM24A [207.0 N (4.4 lb)] LM142A [73.0 N (151.0 lb)]; LM24A [1.0 N (248.0 lb)] ± ± 0.75 µm (±30 µin) ±1.0 µm (±40 µin) S tandard ±5.0 µm (±200 µin) ) H ALAR Standard Laser Interferometer ( 0.5 µm (±20 µin ) ±8.0 µm (±320 µin) ± ± 0.75 µm (±30 µin) ±1.0 µm (±40 µin) ±12.0 µm (±480 µin) ±1.0 µm (±40 µin) ±24.0 µm (±90 µin) (7) S tandard ± ppm; ompensated ±1.5 ppm ±30.0 µm (±1200 µin) L N ± 0.2 µm (±8 µin) ± 0.3 µm (±12 µin) ±0.4 µm (±1 µin) L T ± 0.2 µm (±8 µin) ± 0.3 µm (±12 µin) ±0.4 µm (±1 µin) D ifferential 0.25 µm/25 mm ( µin/in) 0.50 µm/25 mm (20 µin/in) Maximum Deviation 8) O perating Pressure (9) A ir onsumption Nominal Stage Weight Moving Mass Material Finish ±0.4 µm (±1 µin) ±0.75 µm (±30 µin) ±1.5 µm (±0 µin) ±2.0 µm (±80 µin) ±3.0 µm (±120 µin) ±40.0 µm (±0 µin) ±4.0 µm (± µin) 2 arc sec 3 arc sec 4 arc sec 5 arc sec 7.5 arc sec arc sec ( 80 psi ±5 ps i 70.0 kg (154.3 lb) 77.0 kg (19.8 lb) 1. SFM (L Single Axis); 1.0 SFM (S Single Axis) 85.5 kg (188.5 lb) 93.5 kg (20.1 lb) kg (S); 1 kg (L) Aluminum Hard oating (2 Rockwell Hardness) kg (249.1 lb) kg (289.9 lb) Notes: 1. When mounting the AL8000 in an XY configuration, the maximum upper axis length is 400 mm. 2. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution. 3. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements. 4. Thermal limitations of positioning stage with respect to performance may limit continuous force output. 5. Force may be limited by amplifier output.. Available with Aerotech controllers. 7. Requires environmental compensation. 8. To protect air bearing against underpressure, an inline pressure switch tied to the motion controller/amplifier Estop input is recommended. 9. Air supply must be clean, dry to 0 F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.. Specifications are for singleaxis systems, measured 50 mm above the tabletop. Performance of multiaxis systems is payload and workpoint dependent. onsult factory for multiaxis or nonstandard applications. Linear Stages WORLD HEADQUARTERS: Aerotech, Inc., 1 Zeta Drive, Pittsburgh, PA 15238, USA Fax: Aerotech Ltd., Jupiter House, alleva Park, Aldermaston, erkshire RG7 8NN, UK Fax: Aerotech GmbH, Südwestpark 90, Nürnberg, Germany Fax:

3 SPEIFIATIONS Linear Stages Acceleration vs. Mass (AL8000S with LM142A motor) Acceleration vs. Mass (AL8000L with LM24A motor) enterline enterline Lsc antilevered Load apability (AL8000S with LM 142A motor) Lsc antilevered Load apability (AL8000L with LM 24A motor) WORLD HEADQUARTERS: Aerotech, Inc., 1 Zeta Drive, Pittsburgh, PA 15238, USA Fax: Aerotech Ltd., Jupiter House, alleva Park, Aldermaston, erkshire RG7 8NN, UK Fax: Aerotech GmbH, Südwestpark 90, Nürnberg, Germany Fax:

4 DIMENSIONS AL8000S Stage Air Line onnection 40.4 [1.00] M81.25 Thru [.3751] Thru Stage Mtg. Holes (D) 3.1 [2.49] [8.03] 3.1 [2.49] [.00] [9.13] M1.0 Thd [.25020] Thd Top Mtg. Holes (8) Linear Stages Stage Motor onnection Stage Feedback onnection ustomer able onnection 1/2 Travel L Of Travel & Mtg. Holes 1/2 Travel [4.48] 31.2 [1.23] 355. [14.00] 80.0 [3.15] A 48.4 [19.15] asic Model Total Travel Dimensions Millimeters [Inches] A D AL80020S [8.00] [21.00] AL80030S [12.00] 35.0 [25.00] AL80040S [1.00] 73. [29.00] AL80050S [20.00] [33.00] AL80075S [30.00] 92.2 [43.00] AL800S 00.0 [40.00] [53.00] The AL8000 is typically provided as a complete XY assembly with integrated cable management for customer cabling, as well as a granite mounting base. WORLD HEADQUARTERS: Aerotech, Inc., 1 Zeta Drive, Pittsburgh, PA 15238, USA Fax: Aerotech Ltd., Jupiter House, alleva Park, Aldermaston, erkshire RG7 8NN, UK Fax: Aerotech GmbH, Südwestpark 90, Nürnberg, Germany Fax:

5 DIMENSIONS Linear Stages AL8000L M81.25 Thru [.3751] Thru 40.4 [1.00] Stage Mtg. Holes (D) 355. [14.00] M81.25 Thd [.3751] Thd Top Mtg. Holes () Stage Air Line onnection Stage Motor onnection Stage Feedback onnection 40.4 [1.00] ustomer able onnection 1/2 Travel L Of Travel & Mtg. Holes 1/2 Travel [4.48] 31.2 [1.23] 355. [14.00] 80.0 [3.15] A 48.4 [19.15] asic Model Total Travel Dimensions Millimeters [Inches] A D AL80020L [8.00] 85.8 [27.00] AL80030L [12.00] [31.00] AL80040L [1.00] [35.00] AL80050L [20.00] 990. [39.00] AL80075L [30.00] [49.00] AL800L 00.0 [40.00] [59.00] WORLD HEADQUARTERS: Aerotech, Inc., 1 Zeta Drive, Pittsburgh, PA 15238, USA Fax: Aerotech Ltd., Jupiter House, alleva Park, Aldermaston, erkshire RG7 8NN, UK Fax: Aerotech GmbH, Südwestpark 90, Nürnberg, Germany Fax:

6 ORDERING INFORMATION Ordering Example AL S M 5 N LN30AS SINGLEMS Series Travel 020 = 200 mm 030 = 300 mm 040 = 400 mm 050 = 500 mm 075 = 750 mm 0 = 00 mm arriage S L Linear Airearing Stage AL80020 AL80030 AL80040 AL80050 AL80075 AL800 Mounting and Grid Pattern M U Motor P S Limit Switch N NO Encoder Resolution LNxxAS 200 mm (8 in) travel linear airbearing stage with linear motor and limits 300 mm (12 in) travel linear airbearing stage with linear motor and limits 400 mm (1 in) travel linear airbearing stage with linear motor and limits 500 mm (20 in) travel linear airbearing stage with linear motor and limits 750 mm (30 in) travel linear airbearing stage with linear motor and limits 00 mm (40 in) travel linear airbearing stage with linear motor and limits Options SINGLEMS SINGLEUST. HOSE SINGLEUST. ALE SINGLEUST. ALE & HOSE XYMS XYUST. HOSE XYUST. ALE XYUST. ALE & HOSE Linear Stages arriage S 250 mm ( in) length carriage (singleaxis or yaxis use only; requires 5 motor) L 400 mm (1 in) length carriage (required for xaxis in XY configuration; requires motor) Note: When mounting the AL8000 in an XY configuration, the maximum upper axis length is 400 mm. Mounting and Grid Pattern M Metric dimension mounting pattern and holes U English dimension mounting pattern and holes Motor P MTP magnet track S MTS magnet track Limits N NO HighAccuracy Linear Encoders LN20AS LN30AS LN40AS LN50AS LN75AS LN0AS Options SINGLEMS SINGLEUST. HOSE SINGLUST. ALE SINGLEUST. ALE & HOSE XYMS XYUST. HOSE XYUST. ALE XYUST. ALE & HOSE Normallyclosed end of travel limit switches (standard) Normallyopen end of travel limit switches Highaccuracy linear encoder for AL80020; amplified sine output Highaccuracy linear encoder for AL80030; amplified sine output Highaccuracy linear encoder for AL80040; amplified sine output Highaccuracy linear encoder for AL80050; amplified sine output Highaccuracy linear encoder for AL80075; amplified sine output Highaccuracy linear encoder for AL800; amplified sine output able management system for singleaxis applications Single MS; 0.25 inch customer hose Single MS; one customer cable Single MS; once customer cable and 0.25 inch hose able management system for XY assembly; order with each axis XY MS; customer hose XY MS; customer cable XY MS; customer cable & hose WORLD HEADQUARTERS: Aerotech, Inc., 1 Zeta Drive, Pittsburgh, PA 15238, USA Fax: Aerotech Ltd., Jupiter House, alleva Park, Aldermaston, erkshire RG7 8NN, UK Fax: Aerotech GmbH, Südwestpark 90, Nürnberg, Germany Fax:

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