Linear Stage Systems. Nippon Pulse Your Partner in Motion Control

Transcription

1 N I P P O N P U S E. C O M inear Stage Systems Nippon Pulse Your Partner in Motion Control N I P P O N P U S E. C O M

2 inear Stages SCR The SCR Nanopositioning Series offers the accuracy of piezo driven stages with the speed and performance of servo stages. SCR series stages produce extremely accurate results with no loss in stability, regardless of the complexity of the motion profile. As in all inear Shaft Motor applications, a non-critical air gap allows for a system that does not have any variation of force generated. The SCR stage also includes an integrated cross-roller guide. With a simple, lightweight, compact shaft-type linear motor comprised of only a magnet and a coil, large drive force is gained with an efficient and short coil length, allowing for high speed and high precision applications. Because there is no friction, there is no sound or dust, making the motor maintenance-free. NANOPOSITIONING SERIES High Precision Single-Axis inear Stage Moving Stage NPM Cross-Roller Guide Forcer Shaft Four SCR stage models allow for design flexibility in high-precision applications: SCR SCR7 SCR SCR SP Slider Coil Unit Shaft ACCUINE SERIES High Performance Single-Axis inear Stage inear Encoder A high-precision stage for industrial applications, the SP Acculine Series stage offers superior technology unmatched by any other linear stage system. All-inclusive SP series stages provide integrated shaft support within the housing, simplifying the transition from conventional linear motion systems such as ball-screws and pneumatic actuators. Because it features an integrated, lightweight, compact inear Shaft Motor, the SP is a low-profile, high-precision stage. The inear Shaft Motor is designed for the ultra high-precision market (see page 9 of this booklet for more information). The SP series features the smallest deadzone of any stage system available on the market. In addition, no competing stage matches the SP series' force-to-volume ratio, making it an outstanding solution for projects and applications with space limitations. inear Guide There are three SP models to meet your high-performance needs: SP SP SP N i p p o n P u l s e

3 SCR Stages inear Stages SCR The SCR stage utilizes a S inear Shaft Motor, making it a compact, precise solution for small-scale stage applications. The encoder and motor cables are built into the stationary base and are designed so there is no need for them to bend and flex. All SCR stages utilize a moving magnet design. With a built-in optical linear encoder that provides sub-nanometer resolution, the SCR is a complete compact stage solution for small-scale precision movement. Stage Specifications Stage Specifications Units SCR- SCR- Travel/ mm Accuracy μm Encoder Resolution nm,,,, Bi-Directional Repeatability ± count Maximum Acceleration m/s 7 Maximum Velocity m/s.. oad Capacity kg Moving Mass kg.9.98 Total Mass g 6 7 Straightness & Flatness μm./mm Index & imit Sensor Standard imit Switch Over Travel mm Hard Stop Over Travel mm Bearing inear Shaft Motor Dimensions Cross-roller Bearing SQ Repeatability +/- counts at sub. μm resolutions For nm (.μm) resolution, max velocity of encoder is limited to mm/ sec; for nm (.μm), the limit is 67mm/sec; and for nm (.μm), the limit is mm/sec Please contact our Applications Engineers for loads exceeding kg Motor Cable U AWG 8 U red V white W black ength: mm (.m) Encoder Cable ength: min. mm Acceleration (m/s ) Acceleration (m/s ) Acceleration/Velocity Curves SCR- inear Shaft Motor Specifications (kg) Acceleration Max Velocity SCR Acceleration (kg) Max Velocity 6 Motor Specifications SQ (Units) MODE TRAVE mm A SCR- 7 SCR (.6) All units are listed as mm (in) Fund. Motor Constant.N/ W Motor Force Constant.N/Arms Back-EMF Constant.7V/m/s Coil C.Ω Coil Inductance mh Cont. C.Arms Acceleration Current.Arms Cont. C.8N Acceleration Force.N Cont. Power Rating.6W Thermal Resistance 6.6 C/W Y o u r P a r t n e r I n M o t i o n C o n t r o l

4 inear Stages SCR Stages SCR7 The SCR7 stage is a complete single-axis stage with an integrated slide guide, encoder and inear Shaft Motor. It offers a wide range of advantages for applications requiring high performance and accuracy. The inear Shaft Motor allows for higher resolution, speed, and continuous force than standard stepper or piezo servomotors. The SCR7 uses a standard S8Q inear Shaft Motor; however, the coil windings are customizable to a double or triple winding. The SCR7 features a moving magnet design, a precision ground cross roller, and a built-in encoder. Stage Specifications Stage Specifications Units SCR7- SCR7- SCR7- Travel/ mm Stage Width (B) mm 9 Accuracy μm 7 Encoder Resolution nm,,,, Bi-Directional Repeatability ± count Maximum Acceleration m/s 8 Maximum Velocity m/s... oad Capacity kg. Moving Mass kg Total Mass kg..7 Straightness & Flatness μm./mm Standard stage specifications are based on the S8Q inear Shaft Motor Repeatability +/- counts at sub.μm resolutions For nm (.μm) resolution, max velocity of encoder is limited to mm/sec; for nm (.μm), the limit is 67mm/sec; and for nm (.μm), the limit is mm/sec Please contact our Applications Engineers for loads exceeding.kg Index & imit Sensor Standard imit Switch Over Travel mm Hard Stop Over Travel mm Bearing inear Shaft Motor Cross-roller Bearing S8Q Note: All Nippon Pulse SCR and SP stages require a servo driver to operate the stage. Two SCR stages will bolt directly together to form a very stiff, compact X-Y assembly, without the need for adaptor plates (provided they are part of the same series). Two SCR stages can be supplied as an X-Y stage to ensure true orthogonal orientation between the two axes. N i p p o n P u l s e

5 SCR Stages inear Stages SCR7 inear Shaft Motor Specifications Acceleration/Velocity Curves SCR7- Acceleration (m/s ) inear Shaft Motor Force Specifications Units S8Q Fundamental Motor Constant N/W.6 Motor Force Constant (Kf) N/A rms. Back-EMF Constant V/m/s. Coil C Ω 9. Coil Inductance mh. Continuous C A.8 Acceleration Current A. Continuous C N. Acceleration Force N Continuous Power Rating W.76 Thermal Resistance C/W 7. Note: Curves apply only to the stage s standard inear Shaft Motor, the S8Q. Please contact our application engineers to learn more about using S8D or S8T coils in your stage. Acceleration (m/s ) Acceleration (m/s ) (kg) ACC D coil ACC T coil ACC Q coil Max VE D coil Max VE T coil Max VE Q coil SCR ACC D coil ACC T coil ACC Q coil Max VE D coil Max VE T coil Max VE Q coil SCR Dimensions ACC D coil ACC T coil ACC Q coil Max VE D coil Max VE T coil Max VE Q coil X.6[.].7[9.] MX.8-6H.8[7] TOOING HOES A 6.9 B C [.].[6] MX.8-6H.8[.] Motor Cable app Unitronic 9-68 AWG 8 U red V white W black ength: mm Encoder cable length: minimum mm 8X.7[.] THRU A.9[].[.] MOUNTING HOES FAR SIDE MODE TRAVE mm A B C SCR7- N/A N/A SCR7-9 SCR All units are listed in mm Y o u r P a r t n e r I n M o t i o n C o n t r o l

6 inear Stages SCR Stages SCR ike its relatives, the SCR integrates a slide guide, encoder and a inear Shaft Motor. A wide range of options allows for a better match for stage applications that require sub-nanometer resolution that is free from motion errors. ike the SCR and SCR7, the encoder and motor cables are built into the stationary base and are designed so there is no need for them to bend and flex. Stage Specifications Specifications Units SCR- SCR- SCR- SCR- SCR- SCR- Travel/ mm Stage Width (B) mm Accuracy μm 7 9 Encoder Resolution nm,,,, Bi-Directional Repeatability ± count Maximum Acceleration m/s Maximum Velocity m/s oad Capacity kg. Moving Mass kg Total Mass kg Straightness & Flatness μm /mm Index & imit Sensor imit Switch Over Travel mm Hard Stop Over Travel mm Bearing inear Shaft Motor Standard stage specifications are based on the S8Q inear Shaft Motor Repeatability +/- counts at sub.μm resolutions For nm (.μm) resolution, max velocity of encoder is limited to mm/sec; for nm (.μm), the limit is 67mm/sec; and for nm (.μm), the limit is mm/sec Please contact our applications engineers for loads exceeding.kg Standard Cross-roller bearing S8Q 6 N i p p o n P u l s e

7 SCR Stages inear Stages SCR inear Shaft Motor Specifications inear Shaft Motor Force Specifications Units S8Q Fundamental Motor Constant N/W.9 Motor Force Constant (Kf) N/A rms. Back-EMF Constant V/m/s. Coil C Ω 9 Coil Inductance mh. Continuous C A.8 Acceleration Current A. Continuous C N. Acceleration Force N Continuous Power Rating W.7 Thermal Resistance C/W 7. Note: Curves apply only to the stage s standard motor, the S8Q. Please contact our application engineers to learn more about using S8D or S8T coils in your stage. Dimensions A. Motor Cable app Unitronic 9-68 AWG 8 U red V white W black ength: mm Encoder cable length: minimum mm X.7[.] THRU A.9[].[.] MOUNTING HOES FAR SIDE MODE TRAVE mm A B C SCR- N/A N/A SCR- 9 SCR- 6 6 SCR- 9 SCR- 6 6 SCR- 9 B..7 8X.6[.].9[] MX.8-6H.[8] TOOING HOES 7 C All units are listed in mm.6[.].9[7.] MX.8-6H.[] Acceleration/Velocity Curves Acceleration (m/s ) Acceleration (m/s ) Acceleration (m/s ) Acceleration (m/s ) Acceleration (m/s ) Acceleration (m/s ) SCR SCR Acceleration Q coil SCR- Max Velocity Q coil Acceleration Q coil SCR- Max Velocity Q coil Acceleration Q coil SCR- Max Velocity Q coil Acceleration Q coil Acceleration Q coil SCR- Max Velocity Q coil Acceleration Q coil Max Velocity Q coil Max Velocity Q coil Y o u r P a r t n e r I n M o t i o n C o n t r o l 7

8 inear Stages SCR Stages SCR The largest of the SCR stages, the SCR stage has stroke lengths up to mm while maintaining the high performance and accuracy of the smaller SCR stages. ike the other three stages, the SCR is a complete single-axis stage with an integrated slide guide, encoder and a inear Shaft Motor. It offers a wide range of advantages for applications requiring high performance and accuracy. Stage Specifications Specifications Units SCR- SCR- SCR- SCR- SCR- Travel/ mm Stage Width (B) mm 8 8 mm Accuracy μm 7 9 Encoder Resolution nm,,,, Bi-Directional Repeatability ± count Maximum Acceleration m/s Maximum Velocity m/s..... oad Capacity kg. Moving Mass kg Total Mass kg Straightness & Flatness μm /mm Home & imit Sensor imit Switch Over Travel mm Hard Stop Over Travel mm Bearing inear Shaft Motor Standard stage specifications based on the S6D inear Shaft Motor Travel/ with S6D coil; when using S6T, stroke is mm shorter; when using S6Q, stroke is 6mm shorter Repeatability +/- counts sub.μm resolutions For nm (.μm) resolution, max velocity of encoder is limited to mm/sec; for nm (.μm), the limit is 67mm/sec; for nm (.μm), the limit is mm/sec Please contact our applications engineers for loads exceeding.kg Standard Cross-roller bearing S6D 8 N i p p o n P u l s e

9 SCR Stages inear Stages SCR inear Shaft Motor Specifications inear Shaft Motor Force Specifications Units S6D Fundamental Motor Constant N/W. Motor Force Constant (Kf) N/A rms 6 Back-EMF Constant V/m/s. Coil C Ω Coil Inductance mh 8. Continuous C A.6 Acceleration Current A. Continuous C N Acceleration Force N Continuous Power Rating W 6. Thermal Resistance C/W. Note: Curves apply only to the stage s standard motor, the S6D inear Shaft Motor. Please contact our application engineers to learn more about using S6T or S6Q coils in your stage. Dimensions [] [].7[9.] M6X. - 6H.[] TOOING HOES Acceleration/Velocity Curves Acceleration (m/s ) Acceleration (m/s ) Acceleration (m/s ) SCR Acceleration D coil Max Velocity D coil SCR Acceleration D coil SCR Acceleration D coil Max Velocity D coil Max Velocity D coil A.9 B C Acceleration (m/s )... SCR- Motor Cable U6 AWG U orange V white W gray ength: mm Encoder cable length: minimum mm 8X.6[6.6] THRU A.[].6[6.6] MOUNTING HOES FAR SIDE MODE TRAVE mm[in] A B C SCR-.97 [] NA 9. [] NA SCR-.96 [] 6.89 [7]. [8] 6.89 [7] SCR [] 8.88 [].99 [] 8.88 [] SCR- 9.8 [].87 [7].96 [8].87 [7] SCR-.8 [].79 [] 6.99 [].79 [] MODE TRAVE mm A B C X.97[].9[] M6X. - 6H.7[] Acceleration (m/s ) Acceleration D coil Max Velocity D coil SCR-... SCR- N/A N/A SCR SCR- Acceleration D coil Max Velocity D coil SCR SCR- All units are listed in mm Y o u r P a r t n e r I n M o t i o n C o n t r o l 9

10 inear Stages SP Stages SP High Thrust, High Speed, High Responsiveness, High Precision, ong Simple Design and Easy Installation Non-Contact Drive means ow Noise, ong ifespan, and Maintenance-Free Stage Specifications Rated Spec Unit Specification Encoder Resolution µm (HEIDENHAIN IDA79) Continuous Force N 7 Acceleration Force N 9 Continuous Current A. Acceleration Current A.7 Force Constant (Kf) N/A rms Back-EMF Constant V/m/s Resistance ohm 6 Inductance mh Magnetic Pitch (N-N) mm 6 Maximum Acceleration G. Maximum Velocity, m/s. Bi-Directional Repeatability mm ±. Max oad, Horizontal kg. oad Capacity kg., Single Forcer 6 mm ~ ( interval), Double Forcer 6 mm ~8 ( interval) Operating Temperature C ~+ Operating Humidity % ~8 (no condensation) Storage Temperature C ~+6 Moving Mass kg. Acceleration Force given is based on the output with the use of the SP driver ([] Hitachi Production Machine System ADA-) The effective amperage when the temperature increase of the coil front becomes K An average value of U-V, U-W, and V-W Overhanging Weight Tolerance (in mm) 9 Horizontal Wall There are instances when this is not achieved due to load or operation specifications There are instances when this is not achieved due to the length of the stroke 6 Contact Nippon Pulse for longer stroke lengths oad 9 kg 8 kg 7 kg 6 9 kg kg kg 9 kg 6 8 kg 8 7 F-V Curve Max. Acceleration vs. oad Max Acceleration (G) Error (µm) F V F-V Curve GHR SP Acc. Force Cont. Force Velocity, (m/s) m/s j 駆動 hラco* にDriven X 日立 Y@VXe by ADA- ム ADA driver をgpした場合の with f[^ AC です input. B Force, N Force (N) A- Curve SP oad (kg) * Driven by ADA- driver with AC input. Position Repeatability Repeatability SP 6 7 Count N i p p o n P u l s e

11 SP Stages inear Stages SP Single Slider Dimensions.8 Encoder Cable 8.6 Motor Power Supply Cable. Detail For P&Q (8) (8) Double Slider Dimensions 8 88 P Q 6 6 (Including Mechanical Stop) -M Depth -φh7 Depth 8 For Frame Ground Travel FG abel 6 -M Depth Opposite side is the same x N-M Depth Pitch x (N-) x N - φ. Drill φ6 Countersink Depth (From Rear) (Including Mechanical Stop) All units are listed in mm Motor Cable Specifications Hitachi Cable U6 AWG U-red; V-white; W-black Outer Diameter ø.mm JST XM Connector (Male) N Weight (Kg) N = sets of holes on stage Available stroke mm-mm Encoder Cable Specifications Heidenhain Outer Diameter ø. mm Dsub Pin Connector (Male) 88 For Frame Ground Travel FG abel -M Depth Opposite side is the same N Weight (Kg) P Q 6 x N-M Depth Pitch x (N-) Detail For P&Q (Including Mechanical Stop) -M Depth -φh7 Depth x N - φ. Drill φ6 Countersink Depth (From Rear) (Including Mechanical Stop) (Mechanical Stop) (Mechanical Stop) N = sets of holes on stage Available stroke mm-8mm (8) (8) Encoder Cable Motor Power Supply Cable (8) (8) All units are listed in mm Motor Cable Specifications Hitachi Cable U6 AWG U-red; V-white; W-black Outer Diameter ø.mm JST XM Connector (Male) Encoder Cable Specifications Heidenhain Outer Diameter ø. mm Dsub Pin Connector (Male) Y o u r P a r t n e r I n M o t i o n C o n t r o l

12 inear Stages SP Stages SP High Thrust, High Speed, High Responsiveness, High Precision, ong Simple Design and Easy Installation Non-Contact Drive means ow Noise, ong ifespan, and Maintenance-Free Stage Specifications Rated Spec Unit Specification Encoder Resolution µm (HEIDENHAIN IDA79) Continuous Force N 8 Acceleration Force N Continuous Current A. Acceleration Current A. Force Constant (Kf) N/A rms 66 Back-EMF Constant V/m/s Resistance ohm Inductance mh Magnetic Pitch (N-N) mm 9 Maximum Acceleration G. Maximum Velocity, m/s. Bi-Directional Repeatability mm ±. Max oad, Horizontal kg oad Capacity kg, Single Forcer 6 mm - ( interval), Double Forcer 6 mm -8 ( interval) Operating Temperature C ~+ Operating Humidity % ~8 (no condensation) Storage Temperature C ~+6 Moving Mass kg.7 Acceleration Force given is based on the output with the use of the SP driver ([] Hitachi Production Machine System ADA-) The effective amperage when the temperature increase of the coil front becomes K An average value of U-V, U-W, and V-W Overhanging Weight Tolerance (in mm) 9 Horizontal Wall There are instances when this is not achieved due to load or operation specifications There are instances when this is not achieved due to the length of the stroke 6 Contact Nippon Pulse for longer stroke lengths oad 9 kg kg 8 kg 8 6 kg 7 8 kg kg kg 8 6kg 8 9kg 67 kg 8 kg F-V Curve Force (N) Max Acceleration (G) F V F-V Curve GHR SP Acc. Force Cont. Force Velocity, (m/s) * Driven by ADA- driver with AC input. Max. Acceleration vs. oad Error (µm) A- Curve SP oad (kg) * Driven by ADA- driver with AC input. Position Repeatability Repeatability SP 6 7 Count N i p p o n P u l s e

13 SP Stages inear Stages SP Single Slider Dimensions 8. Encoder Cable 79. Encoder Motor Cable. Detail For P&Q () () For frame ground terminal 6 FG label 7 P Q 66. (Including mechanical stop) ø6h7 Depth xn-m6 Depth -M6 Depth Pitch x (N-) xn-ø6. Drill φ6 Countersink Depth (From rear) 7. (Including mechanical stop) All units are listed in mm N Weight (Kg) N = sets of holes on stage Available stroke mm-mm Motor Cable Specifications Hitachi Cable U7 AWG 8 U-red; V-white; W-black Outer Diameter ø 6. JST H Connector (male) Encoder Cable Specifications Heidenhain Outer Diameter ø. Dsub Pin Connector (Male) Double Slider Dimensions For frame ground terminal FG label 6 For frame ground terminal FG label N Weight (Kg) P Q xn-m6 Depth Pitch x (N-) Encoder Cable Motor Cable Detail For P&Q () (). (Including mechanical stop) 6 6 -M6 Depth -ø6h7 Depth xn-ø6. Drill φ Countersink Depth 6. (From rear) (mechanical stop) (mechanical stop) () () 7. (Including mechanical stop) All units are listed in mm N = sets of holes on stage Available stroke mm-8mm Motor Cable Specifications Hitachi: Power Supply Co. U7 AWG 8 U-red; V-white; W-black Outer Diameter ø 6. JST H Connector (male) Encoder Cable Specifications Heidenhain Outer Diameter ø. Dsub Pin Connector (Male) Y o u r P a r t n e r I n M o t i o n C o n t r o l

14 inear Stages SP Stages SP High Thrust, High Speed, High Responsiveness, High Precision, ong Simple Design and Easy Installation Non-Contact Drive means ow Noise, ong ifespan, and Maintenance-Free Stage Specifications Rated Spec Unit Specification Encoder Resolution µm (HEIDENHAIN IDA79) Continuous Force N 8 Acceleration Force N 97 Continuous Current A.7 Acceleration Current A. Force Constant (Kf) N/A rms 68 Back-EMF Constant V/m/s Resistance ohm 7. Inductance mh Magnetic Pitch (N-N) mm Maximum Acceleration G. Maximum Velocity, m/s. Bi-Directional Repeatability mm ±. Max oad, Horizontal kg 6 oad Capacity kg, Single Forcer 6 mm - ( interval), Double Forcer 6 mm -7 ( interval) Operating Temperature C ~+ Operating Humidity % ~8 (no condensation) Storage Temperature C ~+6 Moving Mass kg. Acceleration Force given is based on the output with the use of the SP driver ([] Hitachi Production Machine System ADA-) The effective amperage when the temperature increase of the coil front becomes K. An average value of U-V, U-W, and V-W. Overhanging Weight Tolerance (in mm) 9 Horizontal There are instances when this is not achieved due to load or operation specifications. There are instances when this is not achieved due to the length of the stroke. 6 Contact Nippon Pulse for longer stroke lengths. oad 9 kg kg 9 kg 9 78 kg 8 66 kg F-V Curve Force (N) 8 6 F V F-V Curve GHR SP Acc. Force Cont. Force Velocity, (m/s) m/s * Driven by ADA- driver with AC input. Max. Acceleration vs. oad Max Acceleration (G) A- Curve SP oad (kg) * Driven by ADA- driver with AC input. Position Repeatability Error (µm) Repeatability SP 6 7 Count 6kg 68 9 kg 7 kg 9 6 Wall kg 8 kg 7 kg 98 6 kg 89 N i p p o n P u l s e

15 SP Stages inear Stages SP Single Slider Dimensions For frame ground terminal FG label 8 6 Detail For P&Q P 8 Q 6 (Including mechanical stop) ø6h7 Depth xn-m6 Depth -M8 Depth Pitch x (N-) xn-ø6. Drill φ Countersink Depth 6. (From rear) (Including mechanical stop) N Weight (Kg) N = sets of holes on stage Available stroke mm-mm Encoder Cable 7 Motor Cable Specifications Hitachi Cable U7 AWG 8 U-red; V-white; W-black Outer Diameter ø 6. JST H Connector (male) Power Supply Cable () () All units are listed in mm Encoder Cable Specifications Heidenhain Outer Diameter ø. Dsub Pin Connector (Male) Double Slider Dimensions For frame ground terminal FG label M Depth For frame ground terminal FG label N Weight (Kg) P Q 6 xn-m6 Depth Pitch x (N-) Detail For P&Q (Including mechanical stop) -M8 Depth -ø6h7 Depth xn-ø6. Drill φ6. Countersink Depth 6. (From rear) (mechanical stop) (mechanical stop) (Including mechanical stop) 8 N = sets of holes on stage Available stroke mm-7mm Motor Cable Specifications Hitachi Cable U7 AWG 8 U-red; V-white; W-black Outer Diameter ø 6. JST H Connector (male) Encoder Cable 7 Encoder Cable Specifications Heindenhain Outer Diameter ø. Dsub Pin Connector (Male) () () Power Supply Cable () () All units are listed in mm Y o u r P a r t n e r I n M o t i o n C o n t r o l

16 inear Stages Pinouts and Applications SCR Standard Pinout Pin Signal Function V Ground Z- Reference Mark B- Incremental Signal 6 A- Incremental Signal 7 V Power 8 V Power 9 V Ground Q imit P imit Z+ Reference Mark B+ Incremental Signal A+ Incremental Signal shield Note: imits-open collector output, asynchronous pulse imit Outputs SP Pinout Pin Signal Wire Color Function A+ White Incremental Signal V Black/Red Ground B+ Green Incremental Signal V Red Power 7 Z- Black/Yellow Reference Mark 9 A- Black/White Incremental Signal B- Black/Green Incremental Signal Z+ Yellow Reference Mark SP Cable Options Nippon Pulse SMART Nippon Pulse provides the inear Shaft Motor Application Resource Tool (SMART) sizing resource for your convenience. You must be running Microsoft Excel 98 or a later version. SMART is available at /support/manuals (Requires Microsoft Excel 98 or newer.) - V R* Option A - Use pin number V p V q P Q *select R for I max < ma Alternatively, use a suitable relay or opto-isolator Application Examples Option B - Use wire color OADER/UNOADER Multiple sliders move independently with accuracy. Multi-sliders save space and cut costs. STANDARD X-Y ARRANGEMENT Due to the many ways the high-speed SP, SP and SP can be used together, a wide range of movement is possible. SCR X-Y ARRANGEMENT Each SCR and SP stage requires a servo driver to operate the stage. Any two SCR stages will bolt directly together to form a very stiff, compact X-Y assembly, without the need for adaptor plates (provided they are in the same series). SUBSTRATE CONVEYANCE DEVICE By placing the lower shafts in a parallel position, it is possible to place the work in the central space. The shaft motors can be driven with one driver or in parallel motion. Orthogonal Jig Plate for use with SP X-Y table When constructing a multiple-axis table that utilizes several SP series stages, installation is exceptionally easy with the placement of the jig plate between the axes. It is possible to easily gain orthogonal precision between the lower axis and the upper axis by positioning the two attached positioning pins to the precision holes on the face of the stage s slider installation. (Because there is a limit to the possible combinations for certain models, please use the models suitable for multiple axes.) Z-axis jig plates are also available for three-dimensional motion. Jig plates are not needed for SCR stage multi-axis arrangements. Jig Plate A - ower axis SP, Upper axis SP Jig Plate B - ower axis SP/, Upper axis SP // Z-axis Jig Plate - Z-axis SP, X-axis SP 6 N i p p o n P u l s e

17 Part Numbering Guide inear Stages SCR Stage Part Numbering Guide Example model number: SCR---8Q Stage Width Encoder* Motor Size Hall Effects SCR XXX XXX XXX XX 7 Blank = No Hall Effects HA = Hall Effects XXD = Motor Size with double winding XXT = Motor Size with triple winding XXQ = Motor Size with quadruple winding = nm = nm = nm = nm = nm mm (.97 in) mm (.9 in) mm (.9 in) mm (7.88 in) mm (9.8 in) mm (.8 in) XX Stage Width in mm Stage Main Body Model *SCR Encoder Upgrade Notice As of September,, all Nippon Pulse SCR Nanopositioning stages are available with a upgraded encoder. Any stage built after Sept.,, and beginning with unit SN#8-, comes standard with the Renishaw Tonic Encoder. The previous encoder was the Renishaw RGH, which used optional and separate read switch end-of-travel limits. The Tonic Encoder includes limit switches as a part of the new read head and makes end limits standard at no additional cost. This change optimizes performance and eliminates extra wiring needed with the optional limit switches. Other benefits of using the new encoder include improving interpolation feedback by four times, achieving nm resolution without the use of a large RGB interpolator, and increased resolution and speed options. SP Stage Part Numbering Guide Example model number: SP--S-SH Frame Motor Encoder Cable Size Slide Cable* Cable* Carrier Jig Plate* Blank = No Orthogonal Jig Plate SP XXXX X XX XX XX XXXX XYPA = Orthogonal Jig Plate A XYPB = Orthogonal Jig Plate B XZP = Z-Axis Jig Plate See explanation at left. (When ordering a jig plate, you get one jig plate per slider). Blank = No Cable Carrier SH = S-Type Horizontal Mount SW = S-Type Wall Mount MH = M-Type Horizontal Mount MW = M-Type Wall Mount A: Double-end D-sub m A: Double-end D-sub m A6: Double-end D-sub 6m A9: Double-end D-sub 9m B: Single-end D-sub m B: Single-end D-sub m B6: Single-end D-sub 6m B9: Single-end D-sub 9m M: m motor cable M: m motor cable M6: 6m motor cable M9: 9m motor cable S = slide D = slides ength - (mm increments),, = Frame Size Stage Main Body Model *Motor cables, encoder cables, and jig plates can be ordered separately. When ordering, add 'S-' in front of the part number. Example: S-A9 for a single-end D-sub 9m encoder cable or S-XYPA for an orthogonal jig plate A. Y o u r P a r t n e r I n M o t i o n C o n t r o l 7

18 inear Stages Cable Carriers SP Cable Carrier Dimensions SP S-Type Cable Carrier Wall 8 SP M-Type Cable Carrier Wall 8 8 Horizontal Horizontal SP S-Type Cable Carrier Wall 79 SP M-Type Cable Carrier Wall Horizontal Horizontal SP S-Type Cable Carrier Wall 9 SP M-Type Cable Carrier Wall Horizontal Horizontal Custom Stages In addition to the two standard stage series, Nippon Pulse has the ability to build custom stages to fit your applications. Please contact Nippon Pulse to speak to a local representative for more information and pricing of a custom stage unit. To provide better support, a custom stage worksheet is available on our web site. Complete the form and return it to Nippon Pulse to make custom staging more efficient. /support/custom-worksheets 8 N i p p o n P u l s e

19 inear Shaft Motor The Next Generation In inear Motion inear Stages What is a inear Shaft Motor? Nippon Pulse's inear Shaft Motor is the first linear motor designed and built for the ultrahigh-precision market. The design of the inear Shaft Motor maximizes use of magnetic flux, provides stiffness times greater than that of other coreless linear motors, and minimizes heat production and the impact of generated heat, allowing it to complete movements with sub-micron resolutions. The inear Shaft Motor is a simple design, made of only two parts: a shaft and forcer. Because of its simple design, the inear Shaft Motor is far more efficient than competing linear motors, using percent less power than U-shaped motors. This is in large part because all magnetic flux created by the coils cuts the magnetic shaft at 9 degrees. The inear Shaft Motor is also designed to reduce the amount of heat that is dumped into the work surface, further maximizing the motor's efficiency. The inear Shaft Motor is the only linear motor on the market that does not use an added heat sink while evaluating and documenting motor ratings. Unlike platen linear motors, the inear Shaft Motor does not produce Eddy currents and, because it is an ironless design, has no cogging. Unlike U-shaped linear motors, the inear Shaft Motor does not have inherent air flow restrictions, which lead to increased heat production. Basic Structure of a inear Shaft Motor The magnetic structure of the shaft is built in such a manner that there is no space between each magnet. The magnet structure is fully supported within itself. The magnetic structure is then inserted into a protective stainless steel tube. (This process is protected by numerous patents.) The process used to construct the inear Shaft Motor produces a very strong magnetic field, twice that of other linear motors. Shaft Magnetic Flux Force Gap U W V U W V N S S N N S S N N S S N U W V Motor Coil (Forcer) U W V Stainless Steel Shaft High Energy Magnet Shaft Magnet Forcer Coil Gap Forcer Construction The coils of the inear Shaft Motor are of a cylindrical design, providing a number of key advantages over other linear motors. The cylindrical design makes coil assembly very stiff without the use of external stiffening materials, such as the iron used by platen style-linear motors. The coils surround the magnets, allowing for the optimal use of all the magnetic flux. This makes the air gap (.~.mm) non-critical. (As long as the forcer does not come in contact with the shaft there is no variation in the linear force.) The magnetic flux cuts motor windings at right angles for maximum efficiency. All sides of the coil are positioned to allow for maximum dissipation of heat. The inear Shaft Motor requires less current and less mass, to produce a similar force, and is more efficient than any other linear motor on the market. Magnetic Flux Y o u r P a r t n e r I n M o t i o n C o n t r o l

20 inear Stages The Nippon Pulse Advantage For more than 6 years, Nippon Pulse has built state-of-of-the-art products based on a solid foundation of advancing technology and thorough product research. Nippon Pulse faithfully provides these high-quality products to a wide range of industries in North and South America and Europe. We have established ourselves as a leader in stepper motor, driver and controller technology while introducing innovative products, such as the inear Shaft Motor. At Nippon Pulse, we believe that by bringing products to market that meet the customers requirements and exceed expectations, we contribute to the progression of technology and its positive impact on our society. We have representatives throughout North and South America and Europe to assist customers directly. imited quantities of stock on standard motors and electronics are available to allow faster response to customer needs. In addition, Nippon Pulse has a model shop in its North American headquarters for quick turnaround on custom prototypes and special orders. Our mission is to faithfully create the new products sought by our customers and to contribute to the development of society from a global viewpoint. When you choose a Nippon Pulse motor, driver, controller, network or stage, you re doing more than just buying a quality product: you re benefitting from what we call the Nippon Pulse Advantage. This includes superior prototyping, complete system engineering, proper compliance and certification according to international guidelines, exceptional tailoring to your needs, and unmatched support. A wholly owned subsidiary of Nippon Pulse Motor Co., td., Nippon Pulse America is headquartered in Radford, Va. Nippon Pulse Representative Information Corporate Drive Radford, Va. USA Tel: Fax: info@ FS 68 EMS 67 N i p p o n P u l s e inear Stage Catalog 9 Copyright 9 Nippon Pulse All Rights Reserved