9 mm shortened. 11 mm shortened. Vacuum Pad. ZP3 Series. ø1.5 ø2 ø3.5 ø4 ø6 ø8 ø10 ø13 ø16. Overall length is shortened. Space-saving.

Transcription

1 Vacuum Pad Series ø1., ø, ø., ø,, ø, ø, ø1, ø16 RoHS Overall length is shortened. In the case of Flat type (Pad diameter: ø) Pad unit Max. 9 mm shortened With adapter Max. 11 mm shortened ctual size ctual size 1 mm 19. mm mm. mm (Current model) (Current model) Space-saving ø ø x 7 pcs. rea 7% reduced ø piping reduces working space! ø ø x 7 pcs. rea rea.6 mm 11.0 mm Vertical Male thread Female thread arb fitting (pplicable tubing: ø) One-touch fitting (pplicable tubing: ø) Lateral Female thread arb fitting (pplicable tubing: ø) One-touch fitting (pplicable tubing: ø) E V arb fitting One-touch fitting arb fitting One-touch fitting Variations Pad diameter ø1. added! T R Type Pad diameter ø1. ø ø. ø ø ø ø1 ø16 Flat Flat with groove ellows 97

2 Excellent functions Excellent functions Construction to prevent pad from coming off dsorption surface is shot-blasted Micro-dents and bumps on the surface facilitate easy removal. With groove Less contact surface with the workpiece makes it easy to remove. New shape for connecting with the adapter prevents the pad from coming off. Pad diameter from ø1. Easier identification SMC logo mark Fixing boss allows easy mounting and repeatability. Fixing boss Compact buffer body Overall length is shortened. Max. Lateral vacuum inlet Short stroke type: mm added. mm shortened mm 6 mm mm 1 mm 0 mm Pad diameter ø, Flat, With one-touch fitting uffer stroke ( With bushing) Stroke Overall length (mm) Stroke Overall length (mm) Pad diameter ø1., ø, ø. ø,, ø ø, ø1, ø16 Stroke (mm) uffer specifications Rotating, Non-rotating Rotating Rotating, With bushing Non-rotating Wide selection of piping Male thread Female thread arb fitting For ø piping! One-touch fitting 9

3 Series Variations Type Flat For adsorption of general workpieces For adsorption of work pieces with flat and not deformed surface Flat with groove For a workpiece which is likely to deform For releasing a workpiece certainly ellows For adsorption of work pieces with inclined surface Pad diameter ø1. ø ø. ø ø ø ø1 ø16 Material NR Silicone rubber Urethane rubber FKM Conductive NR Conductive silicone rubber Page P. Vertical Vacuum inlet direction uffer attachment Vacuum inlet Male thread M, M Page Without buffer (with adapter) Female thread arb fitting M, M Polyurethane tubing ø Soft nylon/ Polyurethane tubing ø, P.6 Vertical Lateral Lateral -T - Construction P.6 dapter pplicable Pad List P.6 uffer pplicable Pad List P.66 J J K -T - - -Y - - J -Y - J K - Stroke with buffer mm 6 mm mm 1 mm 0 mm Without buffer (with adapter) Stroke with buffer mm 6 mm mm 1 mm 0 mm One-touch fitting Female thread arb fitting One-touch fitting Female thread arb fitting One-touch fitting Female thread arb fitting One-touch fitting Mounting dapter Part No. P.70 uffer ssembly Part No. P.7 ø, ø, M, M Polyurethane tubing ø Soft nylon/ Polyurethane tubing ø, ø, ø, M, M Polyurethane tubing ø Soft nylon/ Polyurethane tubing be ø, ø, ø, M, M Polyurethane tubing ø Soft nylon/ Polyurethane tubing ø, ø, ø, P. P. P. E V T R 99

4 00 Vacuum Equipment Model Selection CONTENTS 1 Features and Precautions for Vacuum dsorption P.01 Vacuum Pad Selection P.01 Vacuum Pad Selection Procedures Points for Selecting Vacuum Pads. Theoretical Lifting Force. Shear Force and Moment pplied to Vacuum Pad Lifting Force and Vacuum Pad iameter 1. Theoretical Lifting Force Vacuum Pad Type Vacuum Pad Material Rubber Material and Properties Color and Identification uffer ttachment Pad Selection by Workpiece Type Vacuum Pad urability Selection of Vacuum Ejector and Vacuum Switching Valve P.0 Calculating Vacuum Ejector and Switching Valve Size with the Formula Leakage Volume during Workpiece dsorption P.0 Leakage Volume from Conductance of Workpiece Leakage Volume from dsorption Test dsorption Response Time P.09 Relationship between Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated Calculating dsorption Response Time with the Formula dsorption Response Time from the Selection Graph 6 Precautions on Vacuum Equipment Selection and SMC s Proposal P.11 Safety Measures Precautions on Vacuum Equipment Selection Vacuum Ejector or Pump and Number of Vacuum Pads Vacuum Ejector Selection and Handling Precautions Supply Pressure of Vacuum Ejector Timing for Vacuum Generation and Suction Verification. Timing for Vacuum Generation. Suction Verification C. Set Pressure for Vacuum Pressure Switch ust Handling of Vacuum Equipment 7 Vacuum Equipment Selection Example P.1 Transfer of Semiconductor Chips ata P.16 Selection Graph Glossary of Terms Countermeasures for Vacuum dsorption System Problems (Troubleshooting) Non-conformance Examples Time of Replacement of Vacuum Pad

5 Model Selection 1 Features and Precautions for Vacuum dsorption Vacuum adsorption system as a method to hold a workpiece has the following features. Easy construction Compatible with any place where adsorption is possible. However, special care is required in the following conditions. No need for accurate positioning Compatible with soft and easily-deformed work pieces Workpiece may drop under certain conditions since it is transferred being adsorbed. Liquid or foreign matter around the workpiece may be sucked into the equipment. Large adsorption area is necessary to get large gripping force. Vacuum pad (rubber) may deteriorate. Fully understand the features above and select the equipment that suits your operating conditions. Vacuum Pad Selection efore selecting the product model, read How to Order, Vacuum Equipment Precautions, and Safety Instructions. The operating range and performance data and values shown in this catalog are the guidelines for selecting a model. In actual operation, there is a possibility that a general specification is not applicable due to unexpected factors or conditions. efore using the product, determine whether or not the values shown in this catalog are applicable to expected usage, and accept all danger and responsibility caused thereby. SMC cannot take any responsibility for any items which are not shown in this catalog. Vacuum Pad Selection Procedures 1) Fully taking into account the balance of a workpiece, identify the suction position, number of pads and applicable pad diameter (or pad area). When selecting the model based on product weight, there is a possibility that the workpiece cannot be adsorbed or it is dropped depending on the operating conditions (workpiece balance, transfer acceleration, pressure or friction force applied to the workpiece during transfer etc.). ) Find the theoretical lifting force from the identified adsorption area (pad area x number of pads) and vacuum pressure, and then find the lifting force considering actual lifting and safety factor of transfer condition. Use the calculated values as a guideline (reference value) and check the actual values by performing a suction test as necessary. ) etermine the necessary pad diameter (pad area) and suction position (workpiece balance) so that the lift force is larger than weight of the workpiece. ) etermine the pad form and materials, and the necessity of buffer based on the operating environment, and the workpiece shape and materials. ) This product is not designed to hold a vacuum. 6) Perform a suction test with actual equipment to determine whether or not the product can be used. The above shows selection procedures for general vacuum pads; thus, they will not be applicable for all pads. Customers are required to conduct a test on their own and to select applicable suction conditions and pads based on the test results. Points for Selecting Vacuum Pads. Theoretical Lifting Force The theoretical lifting force is determined by vacuum pressure and adsorption area of the vacuum pad. Since the theoretical lifting force is the value measured at the static state, the safety factor responding to the actual operating conditions must be estimated in the actual operation. It is not necessarily true that higher vacuum pressure is better. Extremely high vacuum pressure may cause problems. When the vacuum pressure is unnecessarily high, pads are likely to be worn out earlier or cracked, causing shorter pad service life. oubling the vacuum pressure makes the theoretical lifting force double, while to doubling the pad diameter makes the theoretical lifting force quadruple. When the vacuum pressure (set pressure) is high, it makes not only response time longer, but also the necessary energy to generate a vacuum larger. times Example) Theoretical lifting force = Pressure x rea rea (cm Vacuum pressure ) Pad diameter [-0 kpa] ø0 ø Theoretical lifting force 1 N Theoretical lifting force 0 N Vacuum pressure [-0 kpa] Theoretical lifting force N Theoretical lifting force 0 N times 01 E V T R

6 Model Selection. Shear Force and Moment pplied to Vacuum Pad Vacuum pads are not resistant to shear force (parallel force with adsorption surface) and moment. Minimize the moment applied to the vacuum pad with the position of the workpiece center of gravity in mind. The acceleration rate of the movement must be as small as possible, and make sure to take into consideration the wind pressure and impact. If measures to slow down the acceleration rate are introduced, safety to prevent the workpiece from dropping will improve. void lifting the workpiece by adsorbing the vertical side with a vacuum pad (vertical lifting) if possible. When it is unavoidable, a sufficient safety factor must be secured. Lifting Force, Moment, Horizontal Force To lift a workpiece vertically, make sure to take into consideration the acceleration rate, wind pressure, impact, etc., in addition to the mass of the workpiece. (Refer to Fig. 1) ecause the pads are susceptible to moments, mount the pad so as not to allow the workpiece to create a moment. (Refer to Fig. ) When a workpiece that is suspended horizontally is moved laterally, the workpiece could shift depending on the extent of the acceleration rate or the size of the friction coefficient between the pad and the workpiece. Therefore, the acceleration rate of the lateral movement must be minimized. (Refer to Fig. ) Loading by acceleration and wind pressure lifting Lifting direction Pad positioning Caution for friction force between pad and workpiece Fig. 1 Pad Fig. Pad Pad Fig. Pad alance of Pad and Workpiece Make sure that the pad's suction surface is not larger than the surface of the workpiece to prevent vacuum leakage and unstable picking. Pad Caution Guide for drop prevention If multiple pads are used for transferring a flat object with a large surface area, properly allocate the pads to maintain balance. lso make sure that the pads are aligned properly to prevent them from becoming disengaged along the edges. Pad Caution Guide for drop prevention Provide an auxiliary device (example: a guide for preventing the workpieces from dropping) as necessary. Mounting Position s a rule, the unit must be installed horizontally. lthough a diagonal or a vertical installation should be avoided whenever possible, if the unit must be installed in such a manner, be certain to guarantee guide and absolute safety. Pad 0 Horizontal lifting Vertical lifting Guide

7 Model Selection Lifting Force and Vacuum Pad iameter 1. Theoretical Lifting Force Set the vacuum pressure below the pressure that has been stabilized after adsorption. However, when a workpiece is permeable or has a rough surface, note that the vacuum pressure drops since the workpiece takes air in. In such a case, carry out an adsorption test for confirmation. The vacuum pressure when using an ejector is approximately 60 kpa as a guide. The theoretical lifting force of a pad can be found by calculation or from the theoretical lifting force table. Calculation Pad W = P x S x 0.1 x 1 t W : Lifting force (N) P : Vacuum pressure (kpa) S : Pad area (cm ) t : Safety factor Horizontal lifting: or more Vertical lifting: or more Horizontal lifting Theoretical Lifting Force The theoretical lifting force (not including the safety factor) is found from the pad diameter and vacuum pressure. The required lifting force is then found by dividing the theoretical lifting force by the safety factor t. Vertical lifting This type of application should basically be avoided. Lifting force = Theoretical lifting force t (1) Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1) Pad iameter (ø1. to ø0) Pad diameter (mm) Pad area S (cm ) ø Vacuum pressure (kpa) ø ø (N) ø ø ø ø1 ø16 ø0 ø ø ø0 ø Pad iameter ( to ø0) (N) Pad diameter (mm) ø0 ø0 ø1 ø10 ø00 ø0 ø00 ø0 Pad area S (cm ) Vacuum pressure (kpa) Oval Pad ( x to x 0, 0 x 0) (N) Pad diameter (mm) x. x 7 x x 6 x x 0 x 0 6 x 0 x 0 x 0 x 0 6 x 0 x 0 0 x 0 Pad area S (cm ) Vacuum pressure (kpa) E V T R

8 Model Selection Vacuum Pad Type Vacuum pads are available in flat, deep, bellows, thin flat, with rib, and oval types, etc. Select the optimal shape in accordance with the workpiece and operating environment. Please contact SMC for shapes not included in this catalog. Pad Type Pad shape pplication Pad shape pplication Flat To be used when adsorption surface of work is flat and not deformed. all joint To be used when adsorption surface of work is not horizontal. Flat with rib To be used when work is likely to deform or in the case of releasing work certainly. eep To be used when work is curved shape. Long stroke buffer To be used when work height is not even or cushioning toward work is required. ellows To be used when there is not enough space to install buffer or adsorption surface of work is slanted. Large To be used when work is heavy weight. Oval To be used when work has limited adsorption surface or long in length and work is required to locate precisely. Conductive s one of the countermeasures against the static electricity, rubber material with reduced resistance is used. For antistatic measures Vacuum Pad Material It is necessary to determine vacuum pad materials carefully taking into account the workpiece shape, adaptability in the operating environment, effect after being adsorbed, electrical conductivity, etc. ased on the workpiece transfer example for each material, select after confirming the characteristics (adaptability) of rubber. Vacuum Pad/Example of Workpiece Transfer Material Material NR Silicone rubber Urethane rubber FKM Conductive NR Conductive silicone rubber pplication Transfer of general workpieces, Corrugated board, Veneer plate, Iron plate and others Semiconductor, Removing from die-casting, Thin workpieces, Food processor Corrugated board, Iron plate, Veneer plate Chemical workpieces General workpieces of semiconductor (Static electricity resistance) Semiconductor (Static electricity) 0

9 Model Selection Rubber Material and Properties Pure gum property (specific gravity) Physical properties of blended gum Chemical resistance Oil resistance lkaline resistance cid resistance Main features Impact resilience brasion resistance Tear resistance Flex crack resistance Maximum operation temperature C Minimum operation temperature C Volume resistivity (Ωcm) Heat aging Weather resistance Ozone resistance Gas permeability resistance Gasoline/Gas oil enzene/toluene lcohol Ether Ketone (MEK) Ethyl acetate Water Organic acid Organic acid of high concentration Organic acid of low concentration Strong alkali Weak alkali to to to to to to to to 00 0 to to to to to to to to to to to to to to to to to to to 00 0 or less or less to to to to to to to to 0.g/cm to 0. x 0.161g/cm to 0. x The indicated physical properties, chemical resistance and other numerical values are only approximate values used for reference. They are not guaranteed values. The above general characteristics may change according to the working conditions and the working environment. When determining the material, carry out adequate confirmation and verification in advance. SMC will not bear responsibility concerning the accuracy of data or any damage arising from this data. Color and Identification (/) General name Color of rubber Identification (ot or stamp) Rubber hardness HS (± ) General name NR (Nitrile rubber) NR (Nitrile rubber) Good oil resistance, abrasion resistance, and aging resistance Silicone rubber Excellent heat resistance, and cold resistance Silicone rubber Urethane rubber Excellent mechanical strength Urethane rubber FKM (Fluoro rubber) est heat resistance, and chemical resistance FKM (Fluororubber) CR (Chloroprene rubber) Well balanced weather resistance, ozone resistance, and chemical resistance CR (Chloroprene rubber) EPR (Ethylenepropylene rubber) Good aging resistance, ozone resistance, and electrical properties EPR (Ethylenepropylene rubber) = Excellent --- Not affected at all, or almost no effect = Good --- ffected a little, but adequate resistance depending on conditions = etter not to use if possible = Unsuitable for usage. Severely affected. Conductive NR (Nitrile rubber) Good oil resistance, abrasion resistance, and aging resistance. Conductive Conductive NR (Nitrile rubber) Conductive silicone rubber Very excellent heat resistance, and cold resistance. Conductive Conductive silicone rubber Conductive silicone sponge Excellent heat insulation, and impact resilience Conductive silicone sponge Conductive CR sponge (Chloroprene sponge) Excellent impact resilience, and sound insulation. Flame retardance Conductive CR sponge (Chloroprene sponge) lack White rown lack lack lack lack lack lack lack Green 1 dot Red 1 dot Silver 1 dot Silver dots Other than Heavy duty 0/S 0/S Heavy duty 0/S 60/S 60/S 0/S 0/S 0/S 0/S 0 1 E V T R Color and Identification () General name NR (Nitrile rubber) Silicone rubber Urethane rubber FKM (Fluororubber) Conductive NR (Nitrile rubber) Conductive silicone rubber Color of rubber lack White rown lack lack lack Identification (ot) Green 1 dot Silver 1 dot Pink 1 dot Rubber hardness HS (± ) 60/S Note) The hardness of rubber shall conform to JIS K 6. The hardness of sponge shall conform to SRIS 01. 0

10 Model Selection uffer ttachment Choose buffer type when the workpieces are of varying heights, the workpieces are fragile, or you need to reduce the impact to the pad. If rotation needs to be limited, use non-rotating buffer. Unsteady istance between Pad and Workpiece When the workpieces are of varying heights, use the buffer type pad with built-in spring. The spring creates a cushion effect between the pad and the workpieces. If rotation needs to be limited further, use non-rotating buffer type. Notes for ttachment The buffer is manufactured for the purpose of protecting the pad from impact when the pad is applied to a workpiece. n eccentric load applied to the buffer caused by piping (tubing) or the position of the attachment, or an improper tightening torque used when the buffer is attached may lead to poor sliding or a shortened product life. lso, minimize the load in the lateral direction. Tube Piping Reference Prevent eccentric loads caused by piping (tubing) from being applied to the buffer. Route the tube piping with some degree of freedom, and ensure that it extends in the direction of the fitting. lso, make adjustments as required as the long piping, piping bundles, piping material, etc., may become a load. Use the buffer within the stroke. Pad Selection by Workpiece Type Carefully select a pad for the following workpieces. 1. Porous Workpiece. Flat Plate Workpiece To pick a permeable workpiece such as paper, select a pad with a small diameter that is sufficient to lift the workpiece. ecause a large amount of air leakage could reduce the pad s suction force, it may be necessary to increase the capacity of an ejector or vacuum pump or enlarge the conductance area of the piping passage. Porous work When a workpiece with a large surface area such as sheet glass or PC is suspended, the workpiece could move in a wavelike motion if a large force is applied by wind pressure or by an impact. Therefore, it is necessary to ensure the proper allocation and size of pads. Plate glass, circuit board, etc.. Soft Workpiece. Impact to Pad If a soft workpiece such as vinyl, paper, or thin sheet is picked up, the vacuum pressure could cause the workpiece to deform or wrinkle. In such a case, it will be necessary to use a small pad or a ribbed pad and reduce the vacuum pressure. Vinyl, paper, etc. Pad When pushing a pad to a workpiece, make sure not to apply an impact or a large force which would lead to premature deformation, cracking, or wearing of the pad. The pad should be pushed against the workpiece to the extent that its skirt portion deforms or that its ribbed portion comes into slight contact with the workpiece. Especially, when using a smaller diameter pad, make sure to locate it correctly. ecide the position not to strike 06

11 Model Selection. dsorption Mark The main adsorption marks are as follows: P Mark due to deformed (lined) workpiece efore suction fter suction Countermeasure 1) Reduce the vacuum pressure. If lifting force is inadequate, increase the number of pads. ) Select a pad with a smaller center area. P Mark due to components contained in the rubber pad (material) moving to the workpiece. P mark which remains on the r o u g h s u r f a c e o f t h e workpiece due to wear-out of the rubber (pad material). Suction conditions Suction conditions Workpiece: Vinyl Vacuum pad: 0CS Vacuum pressure: 0 kpa Workpiece: Glass Vacuum pad: 0CS Vacuum pressure: 0 kpa Use the following products. 1) Mark-free NR pad ) series Stuck fluororesin pad Resin attachment Use the following products. 1) series Stuck fluororesin pad Resin attachment Suction conditions Workpiece: Resin plate (Surface roughness. m) Vacuum pad: 0CS Vacuum pressure: 0 kpa Vacuum Pad urability Need to be careful of the vacuum pad (rubber) deterioration. When the vacuum pad is used continuously, the following problems may occur. 1) Wear-out of the adsorption surface. Shrinkage of the pad dimensions, sticking of the part where the rubber materials come into contact with each other (bellows pad) ) Weakening of the rubber parts (skirt of the adsorption surface, bending parts, etc.) * It may occur at an early stage depending on the operating conditions (high vacuum pressure, suction time [vacuum holding], etc.). ecide when to replace the pads, referring to the signs of deterioration, such as changes in the appearance due to wear, reduction in the vacuum pressure or delay in the transport cycle time. E V T R 07

12 Model Selection Selection of Vacuum Ejector and Vacuum Switching Valve Calculating Vacuum Ejector and Switching Valve Size with the Formula verage suction flow rate for achieving adsorption response time V x 60 Q = + QL T1 T1 : rrival time to stable Pv 6% after adsorption (sec) T = x T1 T : rrival time to stable Pv 9% after adsorption (sec) QL : Leakage volume during workpiece adsorption L/min (NR) Note 1) Max. suction flow rate Qmax = ( to ) x Q L/min (NR) <Selection Procedure> Q : verage suction flow rate L/min (NR) V : Piping capacity (L) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above. irect operation valve Qmax Conductance C = [dm /(s bar)]. Select a valve (solenoid valve) having a conductance that is greater than that of the conductance C formula given above from the related equipment (page 79). Note 1) QL: 0 when no leakage occurs during adsorbing a workpiece. If there is leakage during adsorbing a workpiece, find the leakage volume based on. Leakage Volume during Workpiece dsorption. Note ) Tube piping capacity can be found in. ata: Piping Capacity by Tube I.. (Selection Graph ()). Leakage Volume during Workpiece dsorption ir could be drawn in depending on the type of workpiece. s a result, the vacuum pressure in the pad becomes reduced and the amount of vacuum that is necessary for adsorption cannot be attained. When this type of workpiece must be handled, it is necessary to select the proper size of the ejector and the vacuum switching valve by taking into consideration the amount of air that could leak through the workpiece. Pad Ventilation workpiece Pad Rough workpiece surface Leakage Volume from Conductance of Workpiece Leakage volume QL =. x CL QL: Leakage volume L/min (NR) CL: Conductance between workpiece and pad, and workpiece opening area [dm /(s bar)] Leakage Volume from dsorption Test s described in the illustration below, pick up the workpiece with the ejector, using an ejector, pad and a vacuum gauge. t this time, read vacuum pressure P1, obtain the suction flow rate from the flow rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece. Vacuum pressure: P1 Pad ZH07S, ZH07S Exhaust Characteristics Flow rate Characteristics Supply pressure {0. MPa} Workpiece Exercise: Using a supply pressure of 0. MPa, when the ejector (ZH07S) picks up a workpiece that leaks air, the vacuum gauge indicated a pressure of kpa. Calculate the leakage volume from the workpiece. <Selection Procedure> When obtaining the suction flow rate at a vacuum pressure of kpa from the ZH07S flow rate characteristics graph, the suction flow rate is L/min (NR). Leakage volume Suction flow rate L/min (NR) 0 Vacuum pressure (kpa) Vacuum pressure ir consumption Suction flow rate Supply pressure (MPa) Suction flow rate (L/min (NR)) ir consumption (L/min (NR)) Vacuum pressure (kpa) Suction flow rate (L/min (NR))

13 Model Selection dsorption Response Time When a vacuum pad is used for the adsorption transfer of a workpiece, the approximate adsorption response time can be obtained (the length of time it takes for the pad s internal vacuum pressure to reach the pressure that is required for adsorption after the supply valve {vacuum switching valve} has been operated). n approximate adsorption response time can be obtained through formulas and selection graphs. Relationship between Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated The relationship between vacuum pressure and response time after the supply valve (switching valve) is operated as shown below. Vacuum System Circuit Switching valve Switching valve Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated Supply valve (Switching valve) operation P P Work Pad Work Pad Vacuum pressure (P) rrival time (sec) Pv: Final vacuum pressure T1 : rrival time to 6% of final vacuum pressure Pv T : rrival time to 9% of final vacuum pressure Pv Calculating dsorption Response Time with the Formula dsorption response times T1 and T can be obtained through the formulas given below. dsorption response time T1 = V x 60 T1 : rrival time to 6% of final vacuum pressure Pv (sec) Q T dsorption response time : rrival time to 9% of final vacuum pressure Pv (sec) T = x T1 Q1 : verage suction flow rate L/min [NR] Piping capacity Calculation of average suction flow rate V =.1 Ejector x L x 1 (L) 00 Q1 = (1/ to 1/) x Ejector max. suction flow rate L/min [NR] Vacuum pump Q1 = (1/ to 1/) x. x Conductance of vacuum pump [dm /(s bar)] : Piping diameter (mm) L : Length from ejector and switch valve to pad (m) V : Piping capacity from ejector and switching valve to pad (L) Q : Max. flow from ejector and switching valve to pad by piping system Q = C x. L/min [NR] Q : Smaller one between the Q1 and Q L/min [NR] C : Conductance of piping [dm /(s bar)] E V T R For the conductance, the equivalent conductance can be found in. ata: Conductance by Tube I.. (Selection Graph ()). 09

14 Model Selection dsorption Response Time from the Selection Graph 1. Tube Piping Capacity Piping capacity from the ejector and switching valve at vacuum pump to the pad can be found in. ata: Piping Capacity by Tube I.. (Selection Graph ()).. Obtain the adsorption response times. y operating the supply valve (switching valve) that controls the ejector (vacuum pump), the adsorption response times T1 and T that elapsed before the prescribed vacuum pressure is reached can be obtained from the Selection Graph (1). Selection Graph (1) dsorption Response Time Valve conductance = Q. [dm /(s bar)] Max. suction flow rate Q (L/min (NR)) Piping capacity rrival time of vacuum pressure (6%) T1 (sec) rrival time of vacuum pressure (9%) T (sec) Conversely, the size of the ejector or the size of the switching valve of the vacuum pump system can be obtained from the adsorption response time. How to read the graph Example 1: For obtaining the adsorption response time until the pressure in the piping system with a piping capacity of 0.0 L is discharged to 6% (T1) of the final vacuum pressure through the use of the vacuum ejector ZH07S with a maximum suction flow rate of 1 L/min (NR). <Selection Procedure> From the point at which the vacuum ejector s maximum vacuum suction flow rate of 1 L/min (NR) and the piping capacity of 0.0 L intersect, the adsorption response time T1 that elapses until 6% of the maximum vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T1 0. seconds. Example : For obtaining the discharge response time until the internal pressure in the L tank is discharged to 9% (T) of the final vacuum pressure through the use of a valve with a conductance of.6 [dm /(s bar)]. <Selection Procedure> From the point at which the valve s conductance of.6 [dm /(s bar)] and the piping capacity of L intersect, the discharge response time (T) that elapses until 9% of the final vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T 1 seconds.

15 Model Selection 6 Precautions on Vacuum Equipment Selection and SMC s Proposal Safety Measures Make sure to provide a safe design for a vacuum pressure drop due to a disruption of power supply, or a lack of supply air. rop prevention measures must be taken in particular when dropping a workpiece presents some degree of danger. Precautions on Vacuum Equipment Selection s a countermeasure for power outages, select a supply valve that is normally open or one that is equipped with a self-holding function. e aware that the composite conductance consisting of the areas from the pad to the ejector of a vacuum switching valve does not decrease. P P For the release valve, select a / port valve with a low vacuum specification. lso, use a needle valve to regulate the release flow rate. uring the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item. Install a filter (ZF, ZF, ZFC series) before the pressure switch if the ambient air is of low quality. Use a suction filter (ZF, ZF, ZFC series) to protect the switching valve and to prevent the ejector from becoming clogged. lso, a suction filter must be used in a dusty environment. If only the unit's filter is used, it will become clogged quickly. P Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line E V Tank T R P P P P P P P P P Ideally, one pad should be used for each ejector. When more than one pad is attached to a single ejector, if one of the workpieces becomes detached, the vacuum pressure will drop, causing other workpieces to become detached. Therefore, the countermeasures listed below must be taken. djust the needle valve to minimize the pressure fluctuation between adsorption and non-adsorption operations. Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs. Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below. djust the needle valve to minimize the pressure fluctuation between adsorption and non-adsorption operation. Include a tank and a vacuum pressure reduction valve (vacuum pressure regulator valve) to stabilize the source pressure. Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs. 11

16 Model Selection Vacuum Ejector Selection and Handling Precautions Ejector Selection Ejector Nozzle iameter Selection There are types of ejector flow rate characteristics: the high vacuum type (S type) and the high flow type (L type). uring the selection, pay particular attention to the vacuum pressure when adsorbing workpieces that leak. High Vacuum Type Flow Rate Characteristics/ ZH1S High Flow Type Flow Rate Characteristics/ ZH1L Vacuum pressure P Leakage If a considerable amount of leakage occurs between the workpiece and the pad, resulting in incomplete adsorption, or to shorten the adsorption and transfer time, select an ejector nozzle with a larger diameter from the ZH, ZR, or ZL series. Vacuum pressure (kpa) Vacuum pressure (kpa) Manifold Use Individual exhaust Centralized exhaust Suction flow rate (L/min (NR)) Suction flow rate (L/min (NR)) The vacuum pressure varies in accordance with the leakage volumes indicated in the above diagrams. If the leakage volume is 0 L/min (NR), the vacuum pressure of the S type is 0 kpa q w e, and for the L type it is kpa q' w' e'. If the leakage volume is L/min (NR), the vacuum pressure of the S type is 0 kpa r t y, and for the L type it is 7 kpa r' t' y'. Thus, if the leakage volume is 0 L/min (NR) the L type can attain a higher vacuum pressure, and if the leakage volume is L/min (NR), the S type can attain a higher vacuum pressure. Thus, during the selection process, make sure to take the flow rate characteristics of the high vacuum type (S type) and the high flow type (L type) into consideration in order to select the type that is optimal for your application. If there are a large number of ejectors that are linked on a manifold and operate simultaneously, use the built-in silencer type or the port exhaust type. If there are a large number of ejectors that are linked on a manifold, which exhaust collectively, install a silencer at both ends. If the exhaust must be discharged outdoors through piping, make the diameter of the piping larger to control its back pressure to kpa or less so that the back pressure will not affect the operation of the ejectors. If the vacuum ejector makes an intermittent noise (abnormal noise) from exhaust at a certain supply pressure, the vacuum pressure will not be stable. It will not be any problem if the vacuum ejector is used under this condition. However, if the noise is disturbing or might affect the operation of the vacuum pressure switch, lower or raise supply pressure a little at a time, and use in an air pressure range that does not produce the intermittent noise. Supply Pressure of Vacuum Ejector It is recommended to use the vacuum ejector at the standard supply pressure. The maximum vacuum pressure and suction flow rate can be obtained when the vacuum ejector is used at the standard supply pressure, and as a result, adsorption response time also improves. From the viewpoint of energy-saving, it is the most effective to use the ejector at the standard supply pressure. Since using it at an excessive supply pressure may cause the ejector performance to lower, it is recommended to use at the standard supply pressure. 1

17 Model Selection Timing for Vacuum Generation and Suction Verification. Timing for Vacuum Generation The time for opening/closing the valve will be counted if a vacuum is generated after the adsorption pad descends to adsorb a workpiece. lso, there is a timing delay risk for the generating vacuum since the operational pattern for the verification switch, which is used for detecting the descending vacuum pad, is not even. To solve this issue, we recommend that vacuum be generated in advance, before the vacuum pad begins to descend to the workpiece. dopt this method after confirming that there will be no misalignment resulting from the workpiece s light mass.. Suction Verification When lifting the vacuum pad after absorbing a workpiece, confirm that there is a suction verification signal from the vacuum pressure switch, before the vacuum pad is lifted. If the vacuum pad is lifted, based on the timing of a timer, etc., there is a risk that the workpiece may be left behind. In general adsorption transfer, the time for adsorbing a workpiece is slightly different since the position of the vacuum pad and the workpiece are different after every operation. Therefore, program a sequence in which the suction completion is verified by a vacuum pressure switch, etc. before moving to the next operation. C. Set Pressure for Vacuum Pressure Switch Set the optimum value after calculating the required vacuum pressure for lifting a workpiece. If a higher pressure than required is set, there is a possibility of being unable to confirm the suction even though the workpiece is adsorbed. This will result in a suction error. When setting vacuum pressure switch set values, you should set using a lower pressure, with which a workpiece can be adsorbed, only after considering the acceleration or vibration when a workpiece is transferred. The set value of the vacuum pressure switch shortens the time to lift a workpiece. Since the switch detects whether the workpiece is lifted or not, the pressure must be set high enough to detect it. Vacuum Pressure Switch (ZSE Series), Flow Sensor (PFMV Series), Vacuum Pressure Gauge (GZ Series) When adsorbing and transferring a workpiece, verify at the vacuum pressure switch as much as possible (In addition, visually verify the vacuum gauge, especially when handling a heavy or a hazardous item.). pprox. ø1 adsorption nozzle The difference in pressure between ON and OFF becomes small depending on the capacity of the ejector and vacuum pump. In such a case, it is necessary to use the digital pressure switch ZSE or ZSE0 with a fine smallest settable increment or a flow switch for flow rate detection. Note) vacuum generator with a large suction capacity will not be detected properly, so an ejector with an appropriate capacity must be selected. Since the hysteresis is small, vacuum pressure must be stabilized. Vacuum pressure switch ZSE, ZSE0 Flow sensor PFMV Refer to the est Pneumatics No. for details. Vacuum pressure gauge GZ6 Timing Chart Example Cylinder UP Cylinder OWN Cylinder switch Supply valve Release valve V port vacuum pressure Vacuum pressure switch set value Vacuum pressure switch uring adsorption y lowering the setting of the vacuum switch, the takt time can be shortened. uring vacuum release tmospheric pressure Vacuum pressure at operation E V T R 1

18 Model Selection ust Handling of Vacuum Equipment When the vacuum equipment is used, not only the workpiece, but also dust in the surrounding environment is taken in the equipment. Preventing the intrusion of dust is required more than for any other pneumatic equipment. Some of SMC s vacuum equipment comes with a filter, but when there is a large amount of dust, an additional filter must be installed. When vaporized materials such as oil or adhesive are sucked into the equipment, they accumulate inside, which may cause problems. It is important to prevent dust from entering the vacuum equipment as much as possible. (1) Make sure to keep the working environment and surrounding area of the workpiece clean so that dust will not be sucked in the equipment. () Check the amount and types of dust before using the equipment and install a filter, etc., in the piping when necessary. () Conduct a test and make sure that operating conditions are cleared before using the equipment. () Perform filter maintenance depending on the amount of dirt. () Filter clogging generates a pressure difference between the adsorption and ejector parts. This requires attention, since clogging can prevent proper adsorption from being achieved. ir Suction Filter (ZF, ZF, ZFC Series) To protect the switching valve and the ejector from becoming clogged, a suction filter in the vacuum circuit is recommended. When using an ejector in a dusty environment, the unit s filter will become clogged quickly, so it is recommended that the ZF, ZF or ZFC series be used concurrently. Vacuum Line Equipment Selection etermine the volume of the suction filter and the conductance of the switching valve in accordance with the maximum suction flow rate of the ejector and the vacuum pump. Make sure that the conductance is greater than the value that has been obtained through the formula given below. (If the devices are connected in series in the vacuum line, their conductances must be combined.) Qmax C =. C: Conductance [dm /(s bar)] Qmax: Max. suction flow rate L/min (NR) 1

19 Model Selection 7 Vacuum Equipment Selection Example Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips imensions: mm x mm x 1 mm, Mass: 1 g () Vacuum piping length: 1 m () dsorption response time: 00 msec or less 1. Vacuum Pad Selection (1) ased on the workpiece size, the pad diameter is mm (1 pc.). () Using the formula on page 0, confirm the lifting force. W = P x S x 0.1 x 1/t W = 1 g = N = P x 0.1 x 0.1 x 1/ S = π/ x (0.) = 0.1 cm P =.0 kpa t = (Horizontal lifting) ccording to the calculation,.0 kpa or more of vacuum pressure can adsorb the workpiece. () ased on the workpiece shape and type, select: Pad type: Flat with groove Pad material: Silicone rubber () ccording to the results above, select a vacuum pad part number -0UMS.. Vacuum Ejector Selection (1) Find the vacuum piping capacity. ssuming that the tube I.. is mm, the piping capacity is as follows: V = π/ x x L x 1/00 = π/ x x 1 x 1/00 = L () ssuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response time using the formula on page 0. Q = (V x 60) /T1 + QL = (0.001 x 60) / = 0.6 L From the formula on page 0, the maximum suction flow rate Qmax is Qmax = ( to ) x Q = ( to ) x 0.6 = 1. to 1.6 L/min (NR) ccording to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0. diameter can be used. If the vacuum ejector ZX series is used, representative model ZX can be selected. (ased on the operating conditions, specify the complete part number for the vacuum ejector used.). dsorption Response Time Confirmation Confirm the adsorption response time based on the characteristics of the vacuum ejector selected. (1) The maximum suction flow rate of the vacuum ejector ZX is L/min (NR). From the formula on page 09, the average suction flow rate Q1 is as follows: Q1 = (1/ to 1/) x Ejector max. suction flow rate = (1/ to 1/) x =. to 1.7 L/min (NR) () Next, find the maximum flow rate Q of the piping. The conductance C is 0. from the Selection Graph (). From the formula on page 09, the maximum flow rate is as follows: Q = C x. = 0. x. = 1. L/min (NR) () Since Q is smaller than Q1, Q = Q1. Thus, from the formula on page 09, the adsorption response time is as follows: T = (V x 60)/Q = (0.001 x 60)/1.7 = 0.9 seconds = 9 msec It is possible to confirm that the calculation result satisfies the required specification of 00 msec. E V T R 1

20 Model Selection ata Selection Graph Selection Graph () Piping Capacity by Tube I.. Piping capacity V (L) Tube I.. Tube length L (m) How to read the graph Example: For obtaining the capacity of tube I.. ø and 1 meter length <Selection Procedure> y extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.. ø, the piping capacity approximately equvalent to 0.0 L can be obtained on the vertical axis. Piping capacity 0.0 L Selection Graph () Conductance by Tube I.. Equivalent conductance [dm (s bar)] Tube I.. ø Tube length (m) How to read the graph Example: Tube size ø/ and 1 meter length <Selection Procedure> y extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.., the equivalent conductance approximately.6 [dm /(s bar)] can be obtained on the vertical axis. Equivalent conductance.6 [dm /(s bar)] 16

21 Model Selection Glossary of Terms Terms (Max.) suction flow rate Maximum vacuum pressure ir consumption Standard supply pressure Exhaust characteristics Flow rate characteristics Vacuum pressure switch (ir) supply valve (Vacuum) release valve Flow adjustment valve Pilot pressure External release Vacuum port Exhaust port Supply port ack pressure Leakage Response time verage suction flow rate Conductive pad Vacuum pressure Ejector ir suction filter escription Volume of air taken in by the ejector. The maximum value is the volume of air taken in without having anything connected to the vacuum port. The maximum value of the vacuum pressure generated by the ejector The compressed volume of air consumed by the ejector The optimal supply pressure for operating the ejector The relationship between the vacuum pressure and the suction flow rate when the supply pressure to the ejector has been changed. The relationship between the vacuum pressure and the suction flow rate with the standard supply pressure supplied to the ejector. Pressure switch for verifying the adsorption of a workpiece Valve for supplying compressed air to the ejector Valve for supplying positive pressure or air for breaking the vacuum state of the adsorption pad Valve for adjusting the volume of air for breaking the vacuum Pressure for operating the ejector valve The action of breaking the vacuum using externally supplied air instead of using the ejector unit Port for generating vacuum Port for exhausting air consumed by the ejector, and air taken in from the vacuum port. Port for supplying air to the ejector Pressure inside the exhaust port The entry of air into the vacuum passage, such as from an area between a workpiece and a pad, or between a fitting and a tube. The vacuum pressure decreases when leakage occurs. The time from the application of the rated voltage to the supply valve or release valve,until V port pressure reaches the specified pressure. The suction flow rate by the ejector or pump for calculating the response speed. It is 1/ to 1/ of the maximum suction flow rate. low electrical resistance pad for electrostatic prevention measure ny pressure below the atmospheric pressure. When the atmospheric pressure is used as a reference, the pressure is presented by kpa (G), and when the absolute pressure is used as a reference, the pressure is represented by kpa (abs). When referencing a piece of vacuum equipment such as an ejector, the pressure is generally represented by kpa. unit for generating vacuum by discharging the compressed air from a nozzle at a high speed, based on the phenomenon in which the pressure is reduced when the air around the nozzle is sucked. Vacuum filter provided in the vacuum passage for preventing the dust intrusion into the ejector, vacuum pump, or peripheral equipment E V T R 17

22 Model Selection P Countermeasures for Vacuum dsorption System Problems (Troubleshooting) Condition & escription of improvement Initial adsorption problem (uring trial operation) Late vacuum achieving time (Shortening of response time) Fluctuation in vacuum pressure Occurrence of abnormal noise (intermittent noise) from exhaust of vacuum ejector ir leakage from vacuum port of manifold type vacuum ejector Contributing factor dsorption area is small. (Lifting force is lower than the workpiece mass.) Vacuum pressure is low. (Leakage from adsorption surface) (ir permeable workpiece) Vacuum pressure is low. (Leakage from vacuum piping) Internal volume of vacuum circuit is large. Pressure drop of vacuum piping is large. Inadequate supply pressure of vacuum ejector Clogging of nozzle or diffuser (Infiltration of foreign matter during piping) Supply valve (switching valve) is not being activated. Workpiece deforms during adsorption. Internal volume of vacuum circuit is large. Pressure drop of vacuum piping is large. Using the product as close to the highest vacuum power in the specifications. Setting of vacuum pressure switch is too high. Fluctuation in supply pressure Vacuum pressure may fluctuate under certain conditions due to ejector characteristics. Intermittent noise may occur under certain conditions due to ejector characteristics. Exhaust air from the ejector enters the vacuum port of another ejector that is stopped. Countermeasure Recheck the relationship between workpiece mass and lifting force. Use a vacuum pad with a large adsorption area. Increase the quantity of vacuum pads. Eliminate (reduce) leakage from adsorption surface. Reconsider the shape of a vacuum pad. Check the relationship between suction flow rate and arrival pressure of vacuum ejector. Use a vacuum ejector with a high suction flow rate. Increase adsorption area. Repair leakage point. Check the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector. Reduce internal volume of the vacuum circuit. Use a vacuum ejector with a high suction flow rate. Reconsider vacuum piping. Use a shorter or larger tube (with appropriate diameter). Measure supply pressure in vacuum generation state. Use standard supply pressure. Reconsider compressed air circuit (line). Remove foreign matter. Measure supply voltage at the solenoid valve with a tester. Reconsider electric circuits, wiring and connectors. Use in the rated voltage range. Since a workpiece is thin, it deforms and leakage occurs. Use a pad for adsorption of thin objects. Check the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector. Reduce internal volume of the vacuum circuit. Use a vacuum ejector with a high suction flow rate. Reconsider vacuum piping. Use a shorter or larger tube (with appropriate diameter). Set vacuum pressure to minimum necessary value by optimizing the pad diameter etc. s the vacuum power of an ejector (venturi) rises, the vacuum flow actually lowers. When an ejector is used at its highest possible vacuum value, the vacuum flow will lower. ue to this, the amount of time needed to achieve adsorption is lengthened. One should consider an increase in the diameter of the ejector nozzle or an increase the size of the vacuum pad utilized in order to lower the required vacuum pressure, maximum the vacuum flow, and speed up the adsorption process. Set to suitable setting pressure. Reconsider compressed air circuit (line). (ddition of a tank etc.) Lower or raise supply pressure a little at a time, and use in a supply pressure range where vacuum pressure does not fluctuate. Lower or raise supply pressure a little at a time, and use in a supply pressure range where the intermittent noise does not occur. Use a vacuum ejector with a check valve. (Please contact SMC for the part number of an ejector with a check valve.) 1

23 Model Selection Condition & escription of improvement dsorption problem over time (dsorption is normal during trial operation.) Workpiece is not released. Contributing factor Clogging of suction filter Clogging of sound absorbing material Clogging of nozzle or diffuser Vacuum pad (rubber) deterioration, cracking, etc. Inadequate release flow rate Vacuum pressure is high. Excessive force (adhesiveness of the rubber + vacuum pressure) is applied to the pad (rubber part). Effects due to static electricity dhesiveness of the rubber increases due to the operating environment or wearing of the pad. dhesiveness of the rubber material is high. dhesiveness increases due to wearing of the vacuum pad (rubber). Countermeasure Replace filters. Improve installation environment. Replace sound absorbing materials. dd a filter to supply (compressed) air circuit. Install an additional suction filter. Remove foreign matter. dd a filter to supply (compressed) air circuit. Install an additional suction filter. Replace vacuum pads. Check the compatibility of vacuum pad material and workpiece. Open release flow adjustment needle. Reduce the vacuum pressure. If inadequate lifting force causes a problem in transferring the workpieces, increase the number of pads. Use a conductive pad. Replace pads. Reconsider the pad material and check the compatibility of pad material and workpiece. Reconsider the pad form. (Changes to rib, groove, blast options) Reconsider the pad diameter and quantity of pads. E V T R 19

24 Model Selection P Non-conformance Examples Phenomenon Possible causes Countermeasure No problem occurs during the test, but adsorption becomes unstable after starting operation. dsorption becomes unstable after replacing the pad. Identical pads are used to adsorb identical workpieces, but some of the pads cannot adsorb the workpieces. Generation of sticking of bellows of the bellows pad and/or recovery delays. (It may occur at an early stage.) The product life is shortened after replacement of the product (pad, buffer, etc.). Pad comes out from the adapter during operation. Cracks are generated on the pad. 0 Setting of the vacuum switch is not appropriate. Supply pressure is unstable. Vacuum pressure does not reach the set pressure. There is leakage between the workpiece and the vacuum pad. Initial setting conditions (vacuum pressure, vacuum switch setting, height of the pad) have changed. Settings have changed because the pad was worn out or had permanent setting due to the operating environment. When the pad was replaced, leakage was generated from the screw connection part, or the engagement between the pad and the adapter. There is leakage between the workpiece and the vacuum pad. The supply circuit for the cylinder, the solenoid valve and the ejector is in the same pneumatic circuit system. The supply pressure decreases when they are used simultaneously. (Vacuum pressure does not increase.) There is leakage from the screw connection part or the engagement between the pad and the adapter. When the vacuum pad (bellows type) reaches the end of its life, weakening of bent parts, wearing, or sticking of rubber parts occurs. Vacuum pressure is higher than necessary, so excessive force (adhesiveness of the rubber + vacuum pressure) is applied to the pad (rubber part). Load is applied to the bellows due to the following operations, leading to sticking of rubber parts or reduction of the pad recovery performance. Pushing exceeding pad displacement (operating range), external load. Workpiece holding/waiting Waiting seconds or more while the workpiece is being held * Even when under seconds, pads sticking or a recovery delay issues may occur earlier depending on the operating environment and operating method. Longer workpiece holding times lead to longer recovery times and a shorter life. The settings of the product changed. Tube had been pulled. Unbalanced load in clockwise direction increased. The transfer speed increased. The workpiece to be transferred was changed. (Shape, center of gravity, weight, etc.) The mounting orientation was at an angle. The operating environment changed. The buffer (mounting nut) was not tightened with the appropriate torque. Load is applied to the pad (rubber part) due to the following factors. Inadequate lifting force Incorrect suction balance Loads due to transfer acceleration are not considered when selecting the product model. 1) Set the pressure for the vacuum equipment (supply pressure, if using an ejector) to the necessary vacuum pressure during the adsorption of the workpieces. nd set the set pressure for the vacuum switch to the necessary vacuum pressure for adsorption. ) It is presumed that there was leakage during the test, but it was not serious enough to prevent adsorption. Reconsider the vacuum ejector and the shape, diameter, and material of the vacuum pad. Reconsider the vacuum pad. 1) Reconsider the operating conditions including vacuum pressure, the set pressure of the vacuum switch, and the height of the pad. ) Reconsider the engagement. 1) Reconsider the pad diameter, shape, material, vacuum ejector (suction flow rate), etc. ) Reconsider the pneumatic circuit. ) Reconsider the engagement. The operating conditions will determine the product life. Inspect it sufficiently and determine the replacement time. Replace pads. Reconsider the diameter, form, and material of vacuum pads. Reconsider the quantity of vacuum pads. Reduce the vacuum pressure. If inadequate lifting force causes a problem in transferring the workpieces due to the reduction of vacuum pressure, increase the number of pads. Reduce the load applied to the pad. Review the equipment so that an external load exceeding the pad displacement (operating range) is not applied. void workpiece holding and waiting. The operating conditions will determine the product life. Inspect it and determine the replacement time. If the problem (cannot adsorb) does not occur when starting operation, the product may reach the end of its life due to the customer's specification conditions. Reconsider the piping and operation (specifications). The selected model may not be appropriate for the current workpiece to be transferred or the specifications. Select the product model again by reconsidering the pad shape, diameter, quantity, and suction balance. The selected model may not be appropriate for the current workpiece to be transferred or the specifications. Select the product model again by reconsidering the pad shape, diameter, quantity, and suction balance.

25 Model Selection Phenomenon Possible causes Countermeasure Cracks are generated on the rubber (NR, conductive NR). The product is operated in an ozone environment. n ionizer is used. * This phenomenon occurs earlier if pushing or the high vacuum pressure is used. Reconsider the operating environment. Reconsider the materials to be used. Even when a mark-free pad is used, the pad end wears out quickly. (Suction marks are generated.) Even when a mark-free pad is used, suction marks are generated. If the pad adsorbs a highly clean workpiece, slippage is minimized, and a load (impact) is applied to the pad end. Incorrect application (The mark was generated due to a deformation.) Contamination (insufficient cleaning) on the pad when installing the equipment, dust in the operating environment etc. Use the following products. Stuck fluororesin pad Clean attachment Check the mark generated on the workpiece. 1) Mark due to deformed (lined) workpiece Reconsider the pad diameter, form, material, vacuum ejector (suction flow rate), etc. ) Mark due to worn rubber Reconsider the pad diameter, form, material, vacuum ejector (suction flow rate), etc. ) Mark generated by moving components If the suction mark disappears or becomes smaller after wiping with cloth or waste cloth (without using solutions), clean the pad as it may have been contaminated. Refer to "Cleaning method (Mark-free NR pad)" on page 9 of this catalog. E V T R 1

26 Model Selection When mounted with the nut, sometimes the buffer operation is not smooth, or the buffer does not slide. [Possible causes] The tightening torque of the nut for mounting the buffer is too high. Particles stuck to the sliding surface, or it is scratched. Lateral load applied to the piston rod, causing eccentric wearing. [Remedy] Tighten the nut to the recommended tightening torque. The nut may become loose depending on the operating conditions and environment. e sure to perform regular maintenance. / Pad diameter ø to ø16 00 to 0 ø to ø ø0 to ø0 Pad diameter ø1. to ø. How to Replace the Pad Remove bolts with a hex. key wrench from the pad underside. Tighten new pad with the bolts ensuring there is no gap between the adapter plate and the pad. dapter plate dapter plate Mark Pad Product specifications Product part no. (0 to 0) U, ( to 16) UT, C (00 to 0) U ( to ) U, C,, ( to 16) F (0, 0) U, C,, (0 to 0) F Product specifications Product part no. - (01 to 0) U - (0 to 16) UM, ø to ø16 - ( to 16) UM, Heavy-duty Pad Mounting thread size M x 1 M x 1 M1 x 1 Mounting thread size M6 x 0.7 M x 0.7 M x 0.7 Nut tightening torque 1. to.0 N m. to. N m 6. to 7. N m Nut tightening torque 1. to 1. N m.0 to. N m.0 to. N m Product specifications Pad diameter Product part no. Mounting thread size uffer body material ø0, ø0, ø0 ø0, ø1 (0/0) H (0/0) H (6/0) H (6/0) H (0/1) H (0/1) H J J JF J J JF J J JF M1 x 1. M1 x 1. M x 1. luminum alloy rass Steel luminum alloy rass Steel luminum alloy rass Steel Heavy-duty all Joint Pad Product specifications Pad diameter Product part no. Mounting thread size uffer body material ø0, ø0, ø0 ø0, ø1 -F (0/0) H J rass M1 x 1. -F (0/0) H JF Steel -F (6/0) H J rass M x 1. -F (6/0) H JF Steel -F (0/1) H J rass M x 1. -F (0/1) H JF Steel Nut tightening torque 9. to. N m to N m to N m 9. to. N m to N m to N m 9. to. N m to 0 N m 7 to 0 N m Nut tightening torque to N m to N m to 0 N m 7 to 0 N m to 0 N m 7 to 0 N m Hexagon socket head cap screw Gap

27 Model Selection Time of Replacement of Vacuum Pad The vacuum pad is disposable. Replace it on a regular basis. Continued use of the vacuum pad will cause wear and tear on the adsorption surface, and the exterior dimensions will gradually get smaller and smaller. s the pad diameter gets smaller, lifting force will decrease, though adsorption is possible. It is extremely difficult to provide advice on the frequency of vacuum pad exchange. This is because there are numerous factors at work, including surface roughness, operating environment (temperature, humidity, ozone, solvents, etc.), and operating conditions (vacuum pressure, workpiece weight, pressing force of the vacuum pad on the workpiece, presence or absence of a buffer, etc.). (Weakening of bent parts, wear, or sticking of rubber parts may occur with the bellows type pad.) Thus, the customer should decide when the vacuum pad should be exchanged, based on its condition at time of initial use. The bolt may become loose depending on the operating conditions and environment. e sure to perform regular maintenance. Recommended Tightening Torque for Replacement of Heavy-duty Pad Product specifications olt tightening Pad diameter Product part no. olt torque ø0, ø0, ø0 ø0, ø1 (0/0) H (0/0) H (6/0) H (6/0) H (0/1) H (0/1) H M x M x M x 0.7 to 0.9 N m 0.9 to 1.1 N m. to.7 N m Tighten the nut to the recommended tightening torque. E V T R

28 Compact Pad Pad diameter ø1., ø, ø., ø,, ø, ø, ø1, ø16 Symbol/Type U: Flat UM: Flat with groove : ellows How to Order Pad unit 01 U N Pad diameter Symbol Pad diameter 01 ø1. 0 ø 0 ø. 0 ø 06 0 ø ø 1 ø1 16 ø16 Pad material Symbol Material N NR S Silicone rubber U Urethane rubber F FKM GN Conductive NR GS Conductive silicone rubber Pad typepad diameter Pad diameter (Symbol) 01 Pad type 0 U (Flat) UM (Flat with groove) (ellows) Sales unit ø1. to ø : pcs. ø to ø16 : pcs imensions: Pad Unit Flat -01U [Weight: 0.1 g] -0U [Weight: 0.1 g] -0U [Weight: 0.1 g] ø0. ø1. ø ø ø1. ø ø0. ø ø ø1. ø ø ø ø ø1. ø0. ø. ø Flat with groove -0UM [Weight: 0. g] -06UM [Weight: 0. g] -0UM [Weight: 0. g] ø ø ø ø ø ø ø1. ø ø ø ø ø.. ø.

29 Pad Unit Series imensions: Pad Unit Flat with groove -UM [Weight: 0.6 g] -1UM [Weight: 0.7 g] -16UM [Weight: 0. g] ø9 ø ø9 ø ø9 ø ø ø ø11 1 ø ø1 ø1 1. ø ø16 ø17 1. ellows -0 [Weight: 0. g] -06 [Weight: 0. g] -0 [Weight: 0. g] ø ø ø ø ø ø. 1. ø ø. ø9 ø 1. ø ø. ø ø. ø ø [Weight: 0. g] -1 [Weight: 1.0 g] -16 [Weight: 1.1 g] ø9 ø ø9 ø ø ø ø11 pplicable pad 01U/0U/0U ø ø. ø1 ø1 Pad Mounting imensions If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 0UM/06UM/0UM/0/06/0 ø ø11. ø16 ø17 pplicable pad UM/1UM/16UM//1/16 E V T R R R R R R R R ø0. ø1. ø R R. 1. ø ø R R 1. ø R R Note) R part has to be smooth with no corners. *Refer to pages 70 and 71 for applicable adapter.

30 Series Vertical vacuum inlet/ With adapter Pad diameter (Symbol) Pad type U (Flat) UM (Flat with groove) (ellows) Pad diameter (Symbol) Pad type U (Flat) UM (Flat with groove) (ellows) -T01U- [Weight: 0.6 g] T 01 U N 6 Vacuum inlet direction Symbol irection T Vertical Pad diameter Symbol Pad diameter Symbol Pad diameter ø1. ø ø. ø ø ø ø1 ø16 Pad typepad diameter Replacement Part No. M x Pad material () Material Symbol N S U F GN GS Pad diameter: ø1. to ø. Model Pad unit part no. dapter part no. -T (01/0/0) U- -T1- -T (01/0/0) U- -(01/0/0)U -T1- -T (01/0/0) U-6- -T1-6- Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X 0: KJH0-M,0: KJH0-M-X Pad diameter: ø to ø Model Pad unit part no. dapter part no. -T (0/06/0) UM- - (0/06/0) UM -T- -T (0/06/0) - - (0/06/0) -T (0/06/0) UM- -T- -T-- -T--0 Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X, 0: KJH0-M -T (0/06/0) - - (0/06/0) - (0/06/0) UM - (0/06/0) -T (0/06/0) UM-- - (0/06/0) UM -T (0/06/0) UM--0 - (0/06/0) UM -T (0/06/0) -- -T (0/06/0) (0/06/0) How to Order Symbol U U U Nil NR Silicone rubber Urethane rubber FKM Conductive NR Conductive silicone rubber imensions/with dapter: Vacuum Inlet Vertical flat -T0U- [Weight: 0.6 g] Vacuum inlet () Vacuum inlet M x 0. female thread female thread ø tubing/barb fitting 1 ø tubing/barb fitting tubing/barb fitting ø tubing ø tubing tubing 1 Polyurethane tube piping Soft nylon/polyurethane tube piping Mounting thread size Mounting Symbol ø1. Thread size to ø. M x 0. Male thread 6 M6 x 0.7 M x 1 1 M1 x 1 Female M x 0. thread indicates vacuum inlet symbol is "Nil". M x 0. flat flat Mounting thread size 6 1 /// ø to ø -T0U- [Weight: 0.6 g] M x 0. ø to ø16 Pad diameter: ø to ø16 Model Pad unit part no. dapter part no. -T (/1/16) UM- - (/1/16) UM -T- -T (/1/16) - - (/1/16) -T (/1/16) UM- - (/1/16) UM -T- -T (/1/16) - - (/1/16) -T (/1/16) UM-1- - (/1/16) UM -T-1- -T (/1/16) (/1/16) -T-1-0 -T-1-06 Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X U6: M-U-6-X,0: KJH0-M -T (/1/16) UM-1-0 -T (/1/16) (/1/16) UM - (/1/16) -T (/1/16) UM (/1/16) UM -T (/1/16) (/1/16) Pad diameter ø1. to ø. Pad type Flat ø0. ø1. ø 0. ø0. ø0. ø ø. 0. ø. ø 0.

31 With dapter: Vacuum Inlet Vertical Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter ø1. to ø. Pad type Flat -T01U- -T0U- -T0U- [Weight: 0.9 g] [Weight: 0.9 g] [Weight: 0.9 g] M x 0. M x 0. M x 0. flat flat flat ø0. ø1. ø ø0. ø ø. ø0. ø. ø 0. -T01U-6- [Weight:. g] M6 x 0.7 M x 0. -T0U-6- [Weight:. g] M6 x 0.7 M x 0. -T0U-6- [Weight:. g] M6 x 0.7 M x 0. flat. flat. flat. 1 1 flat 1 1 flat 1 1 flat ø0. ø1. ø 0. ø0. ø ø. 0. ø0. ø. ø 0. Vacuum Inlet imensions arb fitting -T01U-6-U -T0U-6-U -T0U-6-U flat. (6.) ø0.9 (7.) -T01U-6-U -T0U-6-U -T0U-6-U ø1. flat One-touch fitting () -T01U-6-0 -T0U-6-0 -T0U-6-0 flat. (1.7) -T01U-6-0 -T0U-6-0 -T0U-6-0 flat E V T R M-U- [Weight: 0.7 g] M-U--X [Weight: 0.7 g] KJH0-M [Weight: 1.1 g] 1 Refer to "-TU-6-" for dimensions. When calculating the weight, add the weight of the fitting to "-TU-6-". KJH0-M-X [Weight: 1.9 g] 7

32 Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter ø to ø Pad type Flat with groove -T0UM- [Weight: 1.7 g] -T06UM- [Weight: 1.7 g] -T0UM- [Weight: 1.7 g] ø1. ø ø ø ø. 0. -T0UM- [Weight:. g] -T06UM- [Weight:. g] -T0UM- [Weight:. g] ø1. 0. ø ø ø.. ø

33 With dapter: Vacuum Inlet Vertical Series imensions/with dapter: Vacuum Inlet flat 1 -T0UM-- [Weight: 11.0 g] M x 1 flat 1 Vertical -T06UM-- [Weight: 11.0 g] Pad diameter ø to ø Pad type Flat with groove -T0UM-- [Weight: 11.0 g] M x 1 M x 1 flat ø1. ø ø ø ø. 0. Vacuum Inlet imensions arb fitting -T0UM--U -T06UM--U -T0UM--U (6.) ø0.9 -T0UM--U -T06UM--U -T0UM--U (.) One-touch fitting -T0UM--0 -T06UM--0 -T0UM--0 (.7) M-U- [Weight: 1. g] -T0UM--0 [Weight:. g] M x 1 ø 17 6 M-U--X [Weight: 1.6 g] 1 Refer to "-TUM--" for dimensions. When calculating the weight, add the weight of the fitting to "-TUM--". flat 1 pplicable tubing: ø flat 1 1 -T06UM--0 [Weight:. g] pplicable tubing: ø M x 1 ø flat KJH0-M [Weight: 1.9 g] -T0UM--0 [Weight:. g] pplicable tubing: ø M x 1 ø E V T R ø1. ø ø ø ø. 0. 9

34 1. 7 Series imensions/with adapter: Vacuum inlet Vertical Pad diameter ø to ø16 Pad type Flat with groove flat -TUM- [Weight:.0 g] -T1UM- [Weight:.1 g] flat -T16UM- [Weight:. g] flat ø ø11 1 ø1 ø1 ø16 ø TUM- [Weight:.7 g] -T1UM- [Weight:. g] -T16UM- [Weight:.9 g] flat flat flat ø ø ø1 ø1 ø16 ø

35 With dapter: Vacuum Inlet Vertical Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter ø to ø16 Pad type Flat with groove -TUM-1- [Weight: 1. g] -T1UM-1- [Weight: 1.9 g] -T16UM-1- [Weight: 19.0 g] flat 1 flat 1 flat 1 M1 x 1 flat 1 M1 x 1 flat M1 x 1 flat 1 ø ø11 1 ø1 ø1 1. ø16 ø17 1. Vacuum Inlet imensions -TUM-1-U -T1UM-1-U -T16UM-1-U -TUM-1-U -T1UM-1-U -T16UM-1-U -TUM-1-U6 -T1UM-1-U6 -T16UM-1-U6 arb fitting (6.) ø0.9 (.) ø. (.) E V M-U- [Weight: 1. g] M-U--X [Weight: 1.6 g] M-U-6-X [Weight: 1. g] One-touch fitting (.7) -TUM-1-0 -T1UM-1-0 -T16UM-1-0 T R KJH0-M [Weight: 1.9 g] 1 Refer to "-TUM-1-" for dimensions. When calculating the weight, add the weight of the fitting to "-TUM-1-". 1

36 Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter ø to ø16 Pad type Flat with groove flat 1 -TUM-1-0 [Weight: 0. g] pplicable tubing: ø flat 1 -T1UM-1-0 [Weight: 0. g] pplicable tubing: ø flat 1 -T16UM-1-0 [Weight: 0. g] pplicable tubing: ø 1 1 M1 x 1 flat 1 M1 x 1 flat 1 7 M1 x 1 flat ø ø11 1 ø1 ø1 1. ø16 ø TUM-1-06 [Weight: 1.1 g] -T1UM-1-06 [Weight: 1. g] pplicable tubing: pplicable tubing: pplicable tubing: -T16UM-1-06 [Weight: 1. g] flat 1 flat 1 flat M1 x 1 flat M1 x 1 flat M1 x 1 flat 1 7 ø ø11 1 ø1 ø1 1. ø16 ø17 1.

37 With dapter: Vacuum Inlet Vertical Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter Pad type ø to ø ellows -T0- [Weight: 1.7 g] -T06- [Weight: 1.7 g] -T0- [Weight: 1. g] ø ø. ø. ø. ø ø9 -T0- [Weight:. g] -T06- [Weight:. g] -T0- [Weight:. g] ø ø. ø. ø. ø ø9 E V T R

38 Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter Pad type ø to ø ellows flat 1 -T0-- [Weight: 11.0 g] M x 1 flat 1 -T06-- [Weight: 11.0 g] M x 1 flat 1 -T0-- [Weight: 11.1 g] M x ø ø.. ø. ø. ø ø9 Vacuum Inlet imensions -T0--U -T06--U -T0--U -T0--U -T06--U -T0--U -T0--0 -T T0--0 arb fitting (6.) ø0.9 (.) One-touch fitting (.7) M-U- [Weight: 1. g] M-U--X [Weight: 1.6 g] 1 Refer to "-T--" for dimensions. When calculating the weight, add the weight of the fitting to "-T--". KJH0-M [Weight: 1. g] flat 1 -T0--0 [Weight:. g] pplicable tubing: ø flat 1 -T06--0 [Weight:. g] pplicable tubing: ø -T0--0 [Weight:. g] 17 1 M x 1 M x 1 ø ø 17 1 M x 1 ø 17 1 flat 1 pplicable tubing: ø ø ø.. ø. ø. ø ø9

39 With dapter: Vacuum Inlet Vertical Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter Pad type ø to ø16 ellows flat -T- [Weight:. g] flat -T1- [Weight:. g] flat -T16- [Weight:. g] ø ø11 ø. ø1 ø1 ø11. ø16 ø17 flat -T- [Weight:.9 g] flat -T1- [Weight: 6.1 g] flat -T16- [Weight: 6. g] E V ø ø11 ø. ø1 ø1 ø11. ø16 ø17 T R

40 Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter Pad type ø to ø16 ellows -T-1- [Weight: 19.0 g] -T1-1- [Weight: 19. g] -T16-1- [Weight: 19. g] flat 1 flat 1 flat arb fitting 1 M1 x 1 flat 1 ø ø11 Vacuum Inlet imensions -T-1-U -T1-1-U -T16-1-U (6.) ø0.9 1 M1 x 1 flat 1 (.) ø. ø1 ø1 -T-1-U -T1-1-U -T16-1-U 1 M1 x 1 flat 1 (.) ø11. ø16 ø17 -T-1-U6 -T1-1-U6 -T16-1-U6 ø. M-U- [Weight: 1. g] M-U--X [Weight: 1.6 g] M-U-6-X [Weight: 1. g] One-touch fitting (.7) -T-1-0 -T T KJH0-M [Weight: 1.9 g] 1 Refer to "-T-1-" for dimensions. When calculating the weight, add the weight of the fitting to "-T-1-". 6

41 With dapter: Vacuum Inlet Vertical Series imensions/with dapter: Vacuum Inlet Vertical Pad diameter Pad type ø to ø16 ellows flat 1 -T-1-0 [Weight: 0. g] pplicable tubing: ø flat 1 -T1-1-0 [Weight: 0.6 g] pplicable tubing: ø flat 1 -T [Weight: 0.7 g] pplicable tubing: ø M1 x 1 flat M1 x 1 flat M1 x 1 flat ø ø11 ø. ø1 ø1 ø11. ø16 ø17 -T-1-06 [Weight: 1. g] -T [Weight: 1. g] pplicable tubing: pplicable tubing: pplicable tubing: -T [Weight: 1.6 g] flat 1 flat 1 flat M1 x 1 flat M1 x 1 M1 x 1 flat 1 flat E V ø ø11 ø. ø1 ø1 ø11. ø16 ø17 T R 7

42 Series Vertical vacuum inlet/ With buffer Pad diameter (Symbol) Pad type U (Flat) UM (Flat with groove) (ellows) T 01 U N J Vacuum inlet direction Symbol irection T Vertical Pad diameter (Symbol) Pad type U (Flat) UM (Flat with groove) (ellows) Specifications Pad diameter Symbol Pad diameter 01 ø1. 0 ø 0 ø. 0 ø 06 0 ø ø 1 ø1 16 ø16 Pad typepad diameter Pad material () Symbol Material N NR S Silicone rubber U Urethane rubber F FKM GN Conductive NR GS Conductive silicone rubber How to Order Vacuum inlet () Female thread arb fitting One-touch fitting Symbol U U U uffer specifications () J Rotating J Rotating, With bushing K Non-rotating Connection M x 0. ø tubing 1 ø tubing tubing ø tubing ø tubing tubing ø1. to ø. 1 Polyurethane tube piping Soft nylon/polyurethane tube piping Stroke ()uffer specifications Stroke ø1. to ø. ø to ø16 J K J J K Refer to the "Specifications" below, for applicable stroke. ø to ø ø to ø16 uffer Pad diameter specifications J ø1. to ø. K J ø to ø16 J K Stroke (mm), 6, 6, 1, 0, 6,, 1, 0 Replacement Part No. Pad diameter: ø1. to ø. Model -T(01/0/0)U(J/K)- -T(01/0/0)U(J/K)6- Tightening torque (N m) Mounting 1. to 1. M6 x to. -(01/0/0)U M x 0.7 Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X 0: KJH0-M,0: KJH0-M-X Pad diameter: ø to ø Model Pad unit part no. uffer assembly part no. Note ) -T(0/06/0)UM(J/K)- -T(0/06/0)(J/K)- -T(0/06/0)UM(J/K)6- -T(0/06/0)(J/K)6- -T(0/06/0)UM(J/K)- -T(0/06/0)(J/K)- -T(0/06/0)UM(J/K)1- -T(0/06/0)(J/K)1- -T(0/06/0)UM(J/K)0- -T(0/06/0)(J/K)0- Pad unit part no. -(0/06/0)UM -(0/06/0) -(0/06/0)UM -(0/06/0) -(0/06/0)UM -(0/06/0) -(0/06/0)UM -(0/06/0) -(0/06/0)UM -(0/06/0) Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X 0: KJH0-M,0: KJH0-M uffer assembly part no. Note ) -T1(J/K)- -T1(J/K)6- -T(J/K)- -T(J/K)6- -T(J/K)- -T(J/K)1- -T(J/K)0- Spring reactive force t 0 stroke (N) t full stroke (N) Pad diameter: ø to ø16 Model Pad unit part no. uffer assembly part no. Note ) -T(/1/16)UM(J/K)- -(/1/16)UM -T(/1/16)(J/K)- -(/1/16) -T(J/K)- -T(/1/16)UM(J/K)6- -(/1/16)UM -T(/1/16)(J/K)6- -(/1/16) -T(J/K)6- -T(/1/16)UM(J/K)- -(/1/16)UM -T(/1/16)(J/K)- -(/1/16) -T(J/K)- -T(/1/16)UM(J/K)1- -(/1/16)UM -T(/1/16)(J/K)1- -(/1/16) -T(J/K)1- -T(/1/16)UM(J/K)0- -(/1/16)UM -T(/1/16)(J/K)0- -(/1/16) -T(J/K)0- Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X U6: M-U-6-X,0: KJH0-M 0: KJH0-M, 06: KJH06-M

43 imensions/with uffer: Vacuum Inlet With uffer: Vacuum Inlet Vertical Vertical ø ø M x 0. M x 0. M x 0. M x 0. Series Pad diameter ø1. to ø. Pad type Flat Stroke, 6 mm -T01UJ- -T01UK- -T0UJ- -T0UK- flat flat flat 6 flat flat flat flat 6 flat M6 x 0.7 M x 0.7 M6 x 0.7 M x 0.7 ø ø1. flat. ø0. ø flat. ø0. ø ø1. ø. ø ø ø. Model Model Model Model -T01UJ- -T01UK- -T0UJ- -T0UK- -T01UJ6- -T01UK6- -T0UJ6- -T0UK6- Note) in the table indicates the pad material "N, S, U, F, GN, GS." Note) in the table indicates the pad material "N, S, U, F, GN, GS." ø Note) in the table indicates the pad material "N, S, U, F, GN, GS." Note) in the table indicates the pad material "N, S, U, F, GN, GS." -T0UJ- flat flat M6 x 0.7 ø0. ø M x 0. ø. ø 0. Model -T0UJ- -T0UJ Note) in the table indicates the pad material "N, S, U, F, GN, GS." -T0UK- flat 6 flat M x 0.7 flat. M x 0. ø0. ø ø Model -T0UK- -T0UK6-6.. Note) in the table indicates the pad material "N, S, U, F, GN, GS." Vacuum Inlet imensions (7.) (6.) arb fitting -T01U-U -T0U-U -T0U-U ø0.9 flat. M-U- [Weight: 0.7 g] -T01U-U -T0U-U -T0U-U ø1. (1.7) () One-touch fitting -T01U-0 -T0U-0 -T0U-0 flat. KJH0-M [Weight: 1.1 g] -T01U-0 -T0U-0 -T0U-0 flat Width across flat M-U--X [Weight: 0.7 g] KJH0-M-X [Weight: 1.9 g] 1 Refer to "-TU-" for dimensions. When calculating the weight, add the weight of the fitting to "-TU-". 9 E V T R

44 6 6 Series imensions/with uffer: Vacuum Inlet Vertical Pad diameter ø to ø Pad type Flat with groove Stroke, 6, mm -T0UMJ- -T0UMK- -T06UMJ- -T06UMK- flat 6 flat flat 6 flat M x 0.7 M x 0.7 ø1. ø ø Model -T0UM- -T0UM6- -T0UM Non-rotating Rotating (J) 7..6 (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". Model -T06UM- -T06UM6- -T06UM Non-rotating Rotating (J) (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -T0UMJ- flat 6 flat M x 0.7 -T0UMK- Vacuum Inlet imensions 6 (6.) arb fitting -T0UM-U -T06UM-U -T0UM-U ø0.9 (.7) One-touch fitting -T0UM-0 -T06UM-0 -T0UM-0 ø ø. 0. M-U- [Weight: 1. g] -T0UM-U -T06UM-U -T0UM-U KJH0-M [Weight: 1.9 g] -T0UM-0 -T06UM-0 -T0UM-0 Model -T0UM- -T0UM6- -T0UM Non-rotating Rotating (J) (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". 0 (.) M-U--X [Weight: 1.6 g] KJH0-M [Weight:. g] 1 Refer to "-TUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-TUM-". (1.9) flat

45 6 1 imensions/with uffer: Vacuum Inlet With uffer: Vacuum Inlet Vertical Vertical Series Pad diameter ø to ø Pad type Flat with groove Stroke 1, 0 mm -T0UMJ- -T0UMK- -T06UMJ- -T06UMK- flat 6 flat ushing flat 6 flat ushing ushing M x 0.7 ushing M x ø1. flat 6 flat ø ø. 0. -T0UMJ- Model Rotating Non-rotating (J) (K) -T0UM1-6. -T0UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ushing ushing M x 0.7 -T0UMK- (6.). ø Vacuum Inlet imensions arb fitting -T0UM-U -T06UM-U -T0UM-U M-U- [Weight: 1. g] -T0UM-U -T06UM-U -T0UM-U Model Rotating Non-rotating (J) (K) -T06UM1-6. -T06UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". (.7) One-touch fitting -T0UM-0 -T06UM-0 -T0UM-0 KJH0-M [Weight: 1.9 g] -T0UM-0 -T06UM-0 -T0UM-0 E V T R 6 ø ø. 0. Model Rotating Non-rotating (J) (K) -T0UM1-6. -T0UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". (.) M-U--X [Weight: 1.6 g] 1 Refer to "-TUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-TUM-". (1.9) flat KJH0-M [Weight:. g] 1

46 7 Series imensions/with uffer: Vacuum Inlet Vertical Pad diameter ø to ø16 Pad type Flat with groove Stroke, 6, mm -TUMJ- -TUMK- -T1UMJ- -T1UMK- flat 6 flat flat 6 flat M x M x 0.7 flat ø ø11 1 Model -TUM- -TUM6- -TUM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K" Rotating Non-rotating (J) flat (K) ø1 ø1 1. Model -T1UM- -T1UM6- -T1UM Rotating Non-rotating (J) (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -T16UMJ- 7 flat 6 flat flat ø16 ø Model -T16UM- -T16UM6- -T16UM- M x (J) (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -T16UMK- Rotating Non-rotating Vacuum Inlet imensions -TUM-U -T1UM-U -T16UM-U (6.) (.) (.) arb fitting ø0.9 M-U- [Weight: 1. g] -TUM-U -T1UM-U -T16UM-U M-U--X [Weight: 1.6 g] -TUM-U6 -T1UM-U6 -T16UM-U6 ø. (.7) (1.7) (1.9) One-touch fitting -TUM-0 -T1UM-0 -T16UM-0 KJH0-M [Weight: 1.9 g] -TUM-0 -T1UM-0 -T16UM-0 flat KJH0-M [Weight:. g] -TUM-06 -T1UM-06 -T16UM-06 flat M-U-6-X [Weight: 1. g] KJH06-M [Weight:. g] 1 Refer to "-TUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-TUM-".

47 imensions/with uffer: Vacuum Inlet With uffer: Vacuum Inlet Vertical Vertical Series Pad diameter ø to ø16 Pad type Flat with groove Stroke 1, 0 mm -TUMJ- -TUMK- -T1UMJ- -T1UMK- flat 6 flat ushing flat 6 flat ushing ushing ushing M x 0.7 M x flat flat ø ø11 1 -T16UMJ- flat 6 flat Model Rotating Non-rotating (J) (K) -TUM1- -TUM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ushing ushing -T16UMK- (6.) ø1 ø1 1. Vacuum Inlet imensions arb fitting -TUM-U -T1UM-U -T16UM-U ø0.9 Model Rotating Non-rotating (J) (K) -T1UM1- -T1UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". One-touch fitting -TUM-0 -T1UM-0 -T16UM-0 (.7) flat M x 0.7 M-U- [Weight: 1. g] -TUM-U -T1UM-U -T16UM-U KJH0-M [Weight: 1.9 g] -TUM-0 -T1UM-0 -T16UM-0 E 1 7 (.) (1.9) V ø16 ø17 1. M-U--X [Weight: 1.6 g] -TUM-U6 -T1UM-U6 -T16UM-U6 flat KJH0-M [Weight:. g] -TUM-06 -T1UM-06 -T16UM-06 T R ø. Model Rotating Non-rotating (J) (K) -T16UM1- -T16UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". (.) flat M-U-6-X [Weight: 1. g] KJH06-M [Weight:. g] 1 Refer to "-TUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-TUM-". (1.7)

48 Series imensions/with uffer: Vacuum Inlet Vertical Pad diameter Pad type Stroke ø to ø ellows, 6, mm -T0J- -T0K- -T06J- -T06K- flat 6 flat flat 6 flat M x 0.7 M x 0.7 ø ø.. ø. Model Rotating (J) Non-rotating (K) -T T T Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". Model -T06- -T066- -T Rotating (J) Non-rotating (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -T0J- flat 6 -T0K- Vacuum Inlet imensions arb fitting -T0-U -T06-U -T0-U One-touch fitting -T0-0 -T06-0 -T0-0 flat ø0.9 (6.) (.7) Model -T0- -T06- -T0- ø. ø ø M x Rotating (J) Non-rotating (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". M-U- [Weight: 1. g] -T0-U -T06-U -T0-U (.) M-U--X [Weight: 1.6 g] KJH0-M [Weight: 1.9 g] -T0-0 -T06-0 -T0-0 1 Refer to "-T-" for dimensions. When calculating the weight, add the weight of the fitting to "-T-". (1.9) flat KJH0-M [Weight:. g]

49 imensions/with uffer: Vacuum Inlet 1 ø ø.. ushing ushing M x 0.7 M x 0.7 Vertical Model Rotating Non-rotating (J) (K) -T01- -T Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". 1 ø. (6.) ø0.9 M x 0.7 Model Rotating Non-rotating (J) (K) -T061- -T Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". Pad diameter Pad type Stroke (.7) ø to ø ellows 1, 0 mm -T0J- -T0K- -T06J- -T06K- flat 6 flat -T0J- flat 6 flat ushing ushing -T0K- With uffer: Vacuum Inlet Vertical flat 6 flat ushing ushing Vacuum Inlet imensions arb fitting -T0-U -T06-U -T0-U M-U- [Weight: 1. g] -T0-U -T06-U -T0-U Series One-touch fitting 1 -T0-0 -T06-0 -T0-0 KJH0-M [Weight: 1.9 g] -T0-0 -T06-0 -T0-0 E V T R ø. ø ø9 Model Rotating Non-rotating (J) (K) -T01- -T Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". (.) M-U--X [Weight: 1.6 g] 1 Refer to "-T-" for dimensions. When calculating the weight, add the weight of the fitting to "-T-". (1.9) flat KJH0-M [Weight:. g]

50 Series imensions/with uffer: Vacuum Inlet Vertical Pad diameter ø to ø16 Pad type Stroke ellows, 6, mm -TJ- -TK- -T1J- -T1K- flat 6 flat 6 flat flat M x 0.7 ø ø11 ø. ø1 ø1 M x 0.7 flat flat Model -T- -T6- -T Rotating Non-rotating (J) (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". Model -T1- -T16- -T Rotating Non-rotating (J) (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -T16J- flat 6 flat flat ø11. ø16 ø17 -T T T16-1 M x (J) (K) Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". 6 Model Rotating Non-rotating -T16K- Vacuum Inlet imensions -T-U -T1-U -T16-U (6.) (.) (.) arb fitting ø0.9 M-U- [Weight: 1. g] -T-U -T1-U -T16-U M-U--X [Weight: 1.6 g] -T-U6 -T1-U6 -T16-U6 ø. M-U-6-X [Weight: 1. g] One-touch fitting -T-0 -T1-0 -T16-0 (1.7) (1.9) (.7) KJH0-M [Weight: 1.9 g] -T-0 -T1-0 -T16-0 flat KJH0-M [Weight:. g] -T-06 -T1-06 -T16-06 flat KJH06-M [Weight:. g] 1 Refer to "-T-" for dimensions. When calculating the weight, add the weight of the fitting to "-T-".

51 imensions/with uffer: Vacuum Inlet With uffer: Vacuum Inlet Vertical Vertical Series Pad diameter ø to ø16 Pad type ellows Stroke 1, 0 mm -TJ- -TK- -T1J- -T1K- flat 6 flat 6 flat ushing flat ushing M x M x ushing ushing flat flat 16 ø ø11 ø11. ø16 ø17 -T16J- flat 6 flat flat Model Rotating Non-rotating (J) (K) -T1- -T Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ushing ushing M x 0.7 -T16K- Model Rotating Non-rotating (J) (K) -T161- -T Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". (6.) ø. ø1 (.) (.) ø1 ø0.9 Vacuum Inlet imensions arb fitting -T-U -T1-U -T16-U M-U- [Weight: 1. g] -T-U -T1-U -T16-U M-U--X [Weight: 1.6 g] -T-U6 -T1-U6 -T16-U6 Model Rotating Non-rotating (J) (K) -T11- -T Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ø. M-U-6-X [Weight: 1. g] (.7) (1.9) (1.7) One-touch fitting -T-0 -T1-0 -T16-0 KJH0-M [Weight: 1.9 g] -T-0 -T1-0 -T16-0 flat KJH0-M [Weight:. g] -T-06 -T1-06 -T16-06 flat KJH06-M [Weight:. g] 1 Refer to "-T-" for dimensions. When calculating the weight, add the weight of the fitting to "-T-". 7 E V T R

52 Series Lateral vacuum inlet/ With adapter Vacuum inlet direction Symbol irection Y Lateral Y 01 U N Pad diameter Symbol Pad diameter 01 ø1. 0 ø 0 ø. 0 ø 06 0 ø ø 1 ø1 16 ø16 How to Order Pad material () Material Symbol N S U F GN GS Vacuum inlet () Connection Female thread arb fitting One-touch fitting NR Silicone rubber Urethane rubber FKM Conductive NR Conductive silicone rubber Symbol U U U M x 0. ø tubing 1 ø tubing tubing ø ø 1 Polyurethane tube piping Soft nylon/polyurethane tube piping Mounting thread size ø1. Symbol Thread size to ø. Female thread M x 0. ø1. to ø. ø to ø16 ø to ø ø to ø16 Pad typepad diameter Pad diameter (Symbol) Pad type U (Flat) UM (Flat with groove) (ellows) Specifications Pad diameter: ø1. to ø. Model Pad unit part no. dapter part no. -Y(01/0/0)U-- -(01/0/0)U -Y1- Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X 0: KJH0-M,0: KJH0-M-X Pad diameter: ø to ø Model Pad unit part no. dapter part no. -Y(0/06/0)UM-- -(0/06/0)UM -Y(0/06/0)-- -(0/06/0) -Y- Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X 0: KJH0-M,0: KJH0-M Pad diameter: ø to ø16 Model Pad unit part no. dapter part no. -Y (/1/16)UM-- -(/1/16)UM -Y (/1/16)-- -(/1/16) -Y- Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X U6: M-U-6-X,0: KJH0-M 0: KJH0-M, 06: KJH06-M

53 1 With dapter: Vacuum Inlet Lateral Series imensions/with dapter: Vacuum Inlet Lateral Pad diameter ø1. to ø. Pad type Flat -Y01U-- [Weight: 1.9 g] ø M x 0. -Y0U-- [Weight: 1.9 g] ø M x 0. -Y0U-- [Weight: 1.9 g] ø M x 0. M x ø0. ø1. ø M x M x ø0. ø ø. 0. ø0. ø. ø 0. Vacuum Inlet imensions -Y01U--U -Y0U--U -Y0U--U -Y01U--U -Y0U--U -Y0U--U flat arb fitting ø0.9 flat. (9) (9.9) ø1. E M-U- [Weight: 0.7 g] M-U--X [Weight: 0.7 g] One-touch fitting -Y01U--0 -Y0U--0 -Y0U--0 flat. -Y01U--0 -Y0U--0 -Y0U--0 flat V T R (1.) (16.) KJH0-M [Weight: 1.1 g] 1 Refer to "-YU--" for dimensions. When calculating the weight, add the weight of the fitting to "-YU--". KJH0-M-X [Weight: 1.9 g] 9

54 Series imensions/with dapter: Vacuum Inlet Lateral Pad diameter ø to ø Pad type Flat with groove -Y0UM-- [Weight: 7.0 g] ø -Y06UM-- [Weight: 7.0 g] ø -Y0UM-- [Weight: 7.0 g] ø 11 ø1. ø ø ø ø. 0. Vacuum Inlet imensions -Y0UM--U -Y06UM--U -Y0UM--U -Y0UM--U -Y06UM--U -Y0UM--U arb fitting ø0.9 (.) (1.) M-U- [Weight: 1. g] -Y0UM--0 -Y06UM--0 -Y0UM--0 M-U--X [Weight: 1.6 g] -Y0UM--0 -Y06UM--0 -Y0UM--0 One-touch fitting flat (1.6) (17.) KJH0-M [Weight: 1.9 g] 1 Refer to "-YUM--" for dimensions. When calculating the weight, add the weight of the fitting to "-YUM--". 0 KJH0-M [Weight:. g]

55 7 1 With dapter: Vacuum Inlet Lateral Series imensions/with dapter: Vacuum Inlet Lateral Pad diameter ø to ø16 Pad type Flat with groove -YUM-- [Weight: 7.7 g] ø -Y1UM-- [Weight: 7. g] ø -Y16UM-- [Weight: 7.9 g] ø Square Square 7 Square ø 1 ø1 1. ø16 1. ø11 ø1 ø17 Vacuum Inlet imensions -YUM--U -Y1UM--U -Y16UM--U -YUM--U -Y1UM--U -Y16UM--U -YUM--U6 -Y1UM--U6 -Y16UM--U6 arb fitting (.) ø0.9 (1.) (1.) ø. E One-touch fitting M-U- [Weight: 1. g] -YUM--0 -Y1UM--0 -Y16UM--0 M-U--X [Weight: 1.6 g] -YUM--0 -Y1UM--0 -Y16UM--0 flat M-U-6-X [Weight: 1. g] -YUM--06 -Y1UM--06 -Y16UM--06 flat V T R (1.6) (17.) (1.6) KJH0-M [Weight: 1.9 g] KJH0-M [Weight:. g] 1 Refer to "-YUM--" for dimensions. When calculating the weight, add the weight of the fitting to "-YUM--". KJH06-M [Weight:. g] 1

56 Series imensions/with dapter: Vacuum Inlet Lateral Pad diameter Pad type ø to ø ellows -Y0-- [Weight: 7.0 g] ø -Y06-- [Weight: 7.0 g] ø -Y0-- [Weight: 7.1 g] ø 1 1 ø ø.. ø. 1 ø. ø ø9 Vacuum Inlet imensions -Y0--U -Y06--U -Y0--U -Y0--U -Y06--U -Y0--U arb fitting ø0.9 (.) M-U- [Weight: 0.7 g] -Y0--0 -Y Y0--0 (1.) M-U--X [Weight: 0.7 g] -Y0--0 -Y Y0--0 One-touch fitting flat (1.6) (17.) KJH0-M [Weight: 1.1 g] 1 Refer to "-Y--" for dimensions. When calculating the weight, add the weight of the fitting to "-Y--". KJH0-M [Weight: 1.9 g]

57 1 With dapter: Vacuum Inlet Lateral Series imensions/with dapter: Vacuum Inlet Lateral Pad diameter ø to ø16 Pad type ellows -Y-- [Weight: 7.9 g] ø -Y1-- [Weight:.1 g] ø -Y16-- [Weight:. g] ø 6 Square 6 Square Square ø ø11 ø. ø1 ø1 ø11. ø16 ø17 Vacuum Inlet imensions -Y--U -Y1--U -Y16--U -Y--U -Y1--U -Y16--U -Y--U6 -Y1--U6 -Y16--U6 arb fitting ø0.9 ø. One-touch fitting (.) M-U- [Weight: 1. g] -Y--0 -Y1--0 -Y16--0 (1.) M-U--X [Weight: 1.6 g] -Y--0 -Y1--0 -Y16--0 flat (1.) M-U-6-X [Weight: 1. g] -Y--06 -Y Y flat E V T R (1.6) (17.) (1.6) KJH0-M [Weight: 1.9 g] KJH0-M [Weight:. g] KJH06-M [Weight:. g] 1 Refer to "-Y--" for dimensions. When calculating the weight, add the weight of the fitting to "-Y--".

58 Series How to Order Lateral vacuum inlet/ With buffer Y 01 U N J Vacuum inlet direction Symbol irection Y Lateral Pad diameter Symbol Pad diameter 01 ø1. 0 ø 0 ø. 0 ø 06 0 ø ø 1 ø1 16 ø16 Pad diameter (Symbol) Pad type U (Flat) UM (Flat with groove) (ellows) Pad diameter (Symbol) Pad type U (Flat) UM (Flat with groove) (ellows) Specifications Pad typepad diameter Pad material () Material Symbol N S U F GN GS Vacuum inlet () Female thread arb fitting One-touch fitting Symbol U U U NR Silicone rubber Urethane rubber FKM Conductive NR Conductive silicone rubber Connection M x 0. ø tubing 1 ø tubing tubing ø tubing ø tubing tubing 1 Polyurethane tube piping Soft nylon/polyurethane tube piping ø1. to ø. ø to ø ø to ø16 Stroke ()uffer specifications Stroke ø1. to ø. ø to ø16 J K J J K uffer specifications () J Rotating J Rotating, With bushing K Non-rotating Pad diameter ø1. to ø. ø to ø16 uffer specifications J K J J K Stroke (mm), 6, 6, 1, 0, 6,, 1, 0 Tightening torque Mounting (N m) 1. to 1..0 to. M6 x 0.7 M x to. M x 0.7 Spring reactive force t 0 stroke (N) t full stroke (N) Replacement Part No. Pad diameter: ø1. to ø. Model Pad unit part no. uffer assembly part no. Note ) -Y(01/0/0)U(J/K)- -Y1(J/K)- -(01/0/0)U -Y(01/0/0)U(J/K)6- -Y1(J/K)6- Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X 0: KJH0-M,0: KJH0-M-X Pad diameter: ø to ø Model Pad unit part no. uffer assembly part no. Note ) -Y(0/06/0)UM(J/K)- -Y(0/06/0)(J/K)- -Y(0/06/0)UM(J/K)6- -Y(0/06/0)(J/K)6- -Y(0/06/0)UM(J/K)- -Y(0/06/0)(J/K)- -(0/06/0)UM -(0/06/0) -(0/06/0)UM -(0/06/0) -(0/06/0)UM -(0/06/0) -Y(J/K)- -Y(J/K)6- -Y(J/K)- -Y(0/06/0)UM(J/K)1- -(0/06/0)UM -Y(J/K)1- -Y(0/06/0)(J/K)1- -(0/06/0) -Y(0/06/0)UM(J/K)0- -(0/06/0)UM -Y(J/K)0- -Y(0/06/0)(J/K)0- -(0/06/0) Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X 0: KJH0-M,0: KJH0-M Pad diameter: ø to ø16 Model Pad unit part no. uffer assembly part no. Note ) -Y(/1/16)UM(J/K)1- -(/1/16)UM -Y(/1/16)(J/K)1- -(/1/16) -Y(/1/16)UM(J/K)0- -(/1/16)UM -Y(/1/16)(J/K)0- -(/1/16) -Y(/1/16)UM(J/K)- -Y(/1/16)UM(J/K)6- -Y(/1/16)UM(J/K)- -(/1/16)UM -(/1/16)UM -(/1/16)UM -Y(/1/16)(J/K)- -Y(/1/16)(J/K)6- -Y(/1/16)(J/K)- -(/1/16) -(/1/16) -(/1/16) -Y(J/K)- -Y(J/K)6- -Y(J/K)- -Y(J/K)1- -Y(J/K)0- Note 1) in the table indicates the pad material. Note ) in the table indicates the vacuum inlet. Note ) Fitting is ordered separately. Suffix of how to order () U: M-U-,U: M-U--X U6: M-U-6-X,0: KJH0-M 0: KJH0-M, 06: KJH06-M

59 With uffer: Vacuum Inlet Lateral Series Pad diameter ø1. to ø. Pad type Flat imensions/with uffer: Vacuum Inlet Lateral Stroke, 6 mm -Y01UJ- -Y01UK- -Y0UJ- -Y0UK- flat ø flat 6 flat ø flat 6 flat flat flat flat 1 M6 x 0.7 ø0. ø1. ø M x M x 0.7 ø0. ø1. ø M x M6 x 0.7 ø0. ø ø. M x ø0. ø ø. M x M x Model -Y01UJ Y01UJ Note) in the table indicates the pad material "N, S, U, F, GN, GS." Model -Y01UK Y01UK Note) in the table indicates the pad material "N, S, U, F, GN, GS." Model -Y0UJ Y0UJ Note) in the table indicates the pad material "N, S, U, F, GN, GS." Model -Y0UK Y0UK Note) in the table indicates the pad material "N, S, U, F, GN, GS." -Y0UJ- -Y0UK- flat flat 1 M6 x 0.7 ø ø0. ø. ø M x flat 6 flat 1 M x 0.7 ø0. ø. ø M x Vacuum Inlet imensions arb fitting -Y01UJ-U -Y0UJ-U -Y0UJ-U (.) ø0.9 flat. M-U- [Weight: 0.7 g] -Y01UJ-U -Y0UJ-U -Y0UJ-U One-touch fitting -Y01UJ-0 -Y0UJ-0 -Y0UJ-0 flat. (1.9) KJH0-M [Weight: 1.1 g] -Y01UJ-0 -Y0UJ-0 -Y0UJ-0 E V T R flat flat Model -Y0UJ Y0UJ Note) in the table indicates the pad material "N, S, U, F, GN, GS." Model -Y0UK Y0UK Note) in the table indicates the pad material "N, S, U, F, GN, GS." (11.) ø1. M-U--X [Weight: 0.7 g] (17.7) KJH0-M-X [Weight: 1.9 g] 1 Refer to "-YU-" for dimensions. When calculating the weight, add the weight of the fitting to "-YU -".

60 Series imensions/with uffer: Vacuum Inlet Lateral Pad diameter Pad type Stroke ø to ø Flat with groove, 6, mm -Y0UMJ- -Y0UMK- -Y06UMJ- -Y06UMK- flat 6 flat flat 6 flat M x ø1. ø ø Model Rotating Non-rotating (J) (K) -Y0UM Y0UM Y0UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". M x Model Rotating Non-rotating (J) (K) -Y06UM Y06UM6- -Y06UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y0UMJ- flat 6 flat -Y0UMK- Vacuum Inlet imensions arb fitting -Y0UM-U -Y06UM-U -Y0UM-U One-touch fitting -Y0UM-0 -Y06UM-0 -Y0UM-0 M x 0.7 ø (.) M-U- [Weight: 1. g] (1.6) KJH0-M [Weight: 1.9 g] 6 ø ø. 0. Model Rotating Non-rotating (J) (K) -Y0UM Y0UM Y0UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y0UM-U -Y06UM-U -Y0UM-U (1.) M-U--X [Weight: 1.6 g] -Y0UM-0 -Y06UM-0 -Y0UM-0 (17.) flat KJH0-M [Weight:. g] 6 1 Refer to "-YUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-YUM-".

61 With uffer: Vacuum Inlet Lateral Series Pad diameter ø to ø Pad type Flat with groove imensions/with uffer: Vacuum Inlet Lateral Stroke 1, 0 mm -Y0UMJ- flat 6 -Y0UMK- -Y06UMJ- flat 6 -Y06UMK- flat flat ushing ushing M x 0.7 M x ø1. ø ø. 0. Model Rotating Non-rotating (J) (K) -Y0UM Y0UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K".. 0. Model Rotating Non-rotating (J) (K) -Y06UM Y06UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y0UMJ- flat 6 flat 1 6 ø ø. 0. ushing M x Y0UMK- Model Rotating Non-rotating (J) (K) -Y0UM Y0UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". Vacuum Inlet imensions arb fitting -Y0UM-U -Y06UM-U -Y0UM-U (.) (1.) ø0.9 M-U- [Weight: 1. g] -Y0UM-U -Y06UM-U -Y0UM-U M-U--X [Weight: 1.6 g] One-touch fitting -Y0UM-0 -Y06UM-0 -Y0UM-0 (1.6) KJH0-M [Weight: 1.9 g] -Y0UM-0 -Y06UM-0 -Y0UM-0 (17.) flat KJH0-M [Weight:. g] 1 Refer to "-YUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-YUM -". 7 E V T R

62 Series imensions/with uffer: Vacuum Inlet Lateral Pad diameter ø to ø16 Pad type Stroke Flat with groove, 6, mm -YUMJ- -YUMK- -Y1UMJ- -Y1UMK- flat 6 flat flat 6 flat M x 0.7 M x 0.7 ø ø11 ø1 ø1 ø Square Square Model Rotating Non-rotating (J) (K) -YUM YUM YUM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". 1. Model Rotating Non-rotating (J) (K) -Y1UM Y1UM6- -Y1UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y16UMJ- flat 6 flat -Y16UMK- Vacuum Inlet imensions arb fitting -YUM-U -Y1UM-U -Y16UM-U One-touch fitting -YUM-0 -Y1UM-0 -Y16UM-0 M x (.) (1.6) 7 Square 1 M-U- [Weight: 1. g] -YUM-U -Y1UM-U -Y16UM-U KJH0-M [Weight: 1.9 g] -YUM-0 -Y1UM-0 -Y16UM-0 flat ø16 ø17 1. Model Rotating Non-rotating (J) (K) -Y16UM Y16UM6 - -Y16UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". (1.) (1.) ø. M-U--X [Weight: 1.6 g] -YUM-U6 -Y1UM-U6 -Y16UM-U6 M-U-6-X [Weight: 1. g] (17.) KJH0-M [Weight:. g] -YUM-06 -Y1UM-06 -Y16UM-06 flat (1.6) KJH06-M [Weight:. g] 1 Refer to "-YUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-YUM-".

63 imensions/with uffer: Vacuum Inlet Lateral With uffer: Vacuum Inlet Lateral Series Pad diameter ø to ø16 Pad type Flat with groove Stroke 1, 0 mm -YUMJ- -YUMK- -Y1UMJ- -Y1UMK- flat 6 flat flat 6 flat ushing ushing M x 0.7 M x Square Square ø ø11 1 Model Rotating Non-rotating (J) (K) -YUM YUM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ø1 ø1 1. Model Rotating Non-rotating (J) (K) -Y1UM Y1UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y16UMJ- flat 6 flat ushing -Y16UMK- Vacuum Inlet imensions arb fitting -YUM-U -Y1UM-U -Y16UM-U One-touch fitting -YUM-0 -Y1UM-0 -Y16UM Square ø16 ø17 M x Model Rotating Non-rotating (J) (K) -Y16UM Y16UM Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". (.) (1.) (1.) ø0.9 M-U- [Weight: 1. g] -YUM-U -Y1UM-U -Y16UM-U M-U--X [Weight: 1.6 g] -YUM-U6 -Y1UM-U6 -Y16UM-U6 ø. M-U-6-X [Weight: 1. g] (1.6) KJH0-M [Weight: 1.9 g] -YUM-0 -Y1UM-0 -Y16UM-0 flat (17.) KJH0-M [Weight:. g] -YUM-06 -Y1UM-06 -Y16UM-06 flat (1.6) KJH06-M [Weight:. g] 1 Refer to "-YUM-" for dimensions. When calculating the weight, add the weight of the fitting to "-YUM -". 9 E V T R

64 Series imensions/with uffer: Vacuum Inlet Lateral Pad diameter Pad type Stroke ø to ø ellows, 6, mm -Y0J- -Y0K- -Y06J- -Y06K- flat 6 flat flat 6 flat M x 0.7 M x ø ø.. Model Rotating Non-rotating (J) (K) -Y Y06- -Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ø. Model Rotating Non-rotating (J) (K) -Y Y066- -Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y0J- flat 6 flat -Y0K- Vacuum Inlet imensions arb fitting -Y0-U -Y06-U -Y0-U One-touch fitting -Y0-0 -Y06-0 -Y0-0 M x 0.7 ø0.9 (.) (1.6) 0 1 ø. ø ø9 Model Rotating Non-rotating (J) (K) -Y Y06- -Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". M-U- [Weight: 1. g] -Y0-U -Y06-U -Y0-U (1.) M-U--X [Weight: 1.6 g] KJH0-M [Weight: 1.9 g] -Y0-0 -Y06-0 -Y0-0 (17.) flat KJH0-M [Weight:. g] 60 1 Refer to "-Y-" for dimensions. When calculating the weight, add the weight of the fitting to "-Y-".

65 imensions/with uffer: Vacuum Inlet Lateral flat 6 With uffer: Vacuum Inlet Lateral Series flat 6 Pad diameter Pad type Stroke ø to ø ellows 1, 0 mm -Y0J- -Y0K- -Y06J- -Y06K- flat flat ushing ushing M x 0.7 M x ø ø.. Model Rotating Non-rotating (J) (K) -Y Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ø.. Model Rotating Non-rotating (J) (K) -Y Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y0J- flat 6 flat 0 ø. ø ø9 ushing M x Y0K- Model Rotating Non-rotating (J) (K) -Y Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". Vacuum Inlet imensions arb fitting -Y0-U -Y06-U -Y0-U (.) (1.) ø0.9 M-U- [Weight: 1. g] -Y0-U -Y06-U -Y0-U M-U--X [Weight: 1.6 g] One-touch fitting -Y0-0 -Y06-0 -Y0-0 (1.6) KJH0-M [Weight: 1.9 g] -Y0-0 -Y06-0 -Y0-0 flat (17.) KJH0-M [Weight:. g] 1 Refer to "-Y-" for dimensions. When calculating the weight, add the weight of the fitting to "-Y-". 61 E V T R

66 Series imensions/with uffer: Vacuum Inlet Lateral Pad diameter ø to ø16 Pad type Stroke ellows, 6, mm -YJ- -YK- -Y1J- -Y1K- flat 6 flat flat 6 flat M x Square M x 0.7 Square ø ø11 Model Rotating Non-rotating (J) (K) -Y Y6- -Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ø. ø1 ø1 Model Rotating Non-rotating (J) (K) -Y Y16- -Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y16J- flat 6 flat -Y16K- Vacuum Inlet imensions arb fitting -Y-U -Y1-U -Y16-U One-touch fitting -Y-0 -Y1-0 -Y16-0 M x 0.7 Square ø0.9 (.) (1.6) 1 M-U- [Weight: 1. g] -Y-U -Y1-U -Y16-U KJH0-M [Weight: 1.9 g] -Y-0 -Y1-0 -Y16-0 ø11. ø16 ø17 flat (1.) (17.) 6 Model Rotating Non-rotating (J) (K) -Y Y166- -Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". M-U--X [Weight: 1.6 g] -Y-U6 -Y1-U6 -Y16-U6 flat ø. (1.) (1.6) M-U-6-X [Weight: 1. g] KJH0-M [Weight:. g] -Y-06 -Y1-06 -Y16-06 KJH06-M [Weight:. g] 1 Refer to "-Y-" for dimensions. When calculating the weight, add the weight of the fitting to "-Y-".

67 With uffer: Vacuum Inlet Lateral Series Pad diameter ø to ø16 Pad type ellows imensions/with uffer: Vacuum Inlet Lateral Stroke 1, 0 mm -YJ- flat 6 flat -YK- -Y1J- flat 6 flat -Y1K- ushing ushing M x 0.7 M x Square Square 1 ø ø11 Model Rotating Non-rotating (J) (K) -Y Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". ø. ø1 ø1 Model Rotating Non-rotating (J) (K) -Y Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". -Y16J- flat 6 flat Square ø11. ø16 ø17 ushing M x Y16K- Model Rotating Non-rotating (J) (K) -Y Y Note 1) in the table indicates the pad material "N, S, U, F, GN, GS." Note ) The symbol "" indicates buffer type "J" or "K". Vacuum Inlet imensions arb fitting -Y-U -Y1-U -Y16-U ø0.9 (.) M-U- [Weight: 1. g] -Y-U -Y1-U -Y16-U ø. (1.6) flat (1.) (17.) M-U--X [Weight: 1.6 g] -Y-U6 -Y1-U6 -Y16-U6 (1.) M-U-6-X [Weight: 1. g] One-touch fitting -Y-0 -Y1-0 -Y16-0 KJH0-M [Weight: 1.9 g] -Y-0 -Y1-0 -Y16-0 KJH0-M [Weight:. g] -Y-06 -Y1-06 -Y16-06 flat (1.6) KJH06-M [Weight:. g] E V T R 1 Refer to "-Y-" for dimensions. When calculating the weight, add the weight of the fitting to "-Y-". 6

68 Component Parts List Pad with adapter Series Construction t w e q w q w r q w q t Component Parts No. escription 1 Pad dapter Gasket Nut Fitting Material (Surface treatment) NR/Silicone rubber Urethane rubber/fkm Conductive NR/Conductive silicone rubber rass(electroless nickel plated) Stainless steel 0/NR Structural steel(trivalent chromated) rass(nickel plated) Note M6 x 0.7 M x 0.7 M1 x 1 M x 1 Pad with buffer i y y t i y t u r e w q y t u r e w q i o t u e r w q u e r w q i Component Parts No. escription Pad dapter Piston rod Return spring uffer body uffer adapter Nut Fitting ushing Material (Surface treatment) NR/Silicone rubber Urethane rubber/fkm Conductive NR/Conductive silicone rubber rass(electroless nickel plated) Stainless steel Stainless steel rass(electroless nickel plated) rass(electroless nickel plated) Structural steel(trivalent chromated) Note

69 Series dapter pplicable Pad List Series Mounting dapter Part No. -T1- -T1- dapter part no. pplicable pad part no. Page Series -01U -0U -0U -01U -0U -0U P.70 P.70 -T-1- dapter part no. pplicable pad part no. Page Series -UM -1UM -16UM P.71 -T1-6- -T- -01U -0U -0U -0UM -06UM -0UM P.70 P.70 -T-1-0 -UM -1UM -16UM P.71 -T- -0UM -06UM -0UM P.70 -T UM -1UM -16UM P.71 -T-- -T--0 -T- -T- -0UM -06UM -0UM UM -06UM -0UM UM -1UM -16UM UM -1UM -16UM P.70 P.70 P.70 P.71 -Y1- -Y- -Y- -01U -0U -0U -0UM -06UM -0UM UM -1UM -16UM P.71 P.71 P.71 E V T R 6

70 Series uffer pplicable Pad List uffer ssembly Part No. uffer assembly part no. pplicable pad part no. Page Series uffer assembly part no. pplicable pad part no. Series Page -T1J- -01U -0U -0U P.7 -TK- -0UM -06UM -0UM P.7 -T1J6- -01U -0U -0U P.7 -TK6- -0UM -06UM -0UM P.7 -T1K- -01U -0U -0U P.7 -TK- -0UM -06UM -0UM P.7 -T1K6- -01U -0U -0U P.7 -TJ1- -0UM -06UM -0UM P.7 -TJ- -0UM -06UM -0UM P.7 -TJ0- -0UM -06UM -0UM P.7 -TJ6- -0UM -06UM -0UM P.7 -TK1- -0UM -06UM -0UM P.7 -TJ- -0UM -06UM -0UM P.7 -TK0- -0UM -06UM -0UM P.7 66

71 uffer pplicable Pad List Series uffer ssembly Part No. uffer assembly part no. pplicable pad part no. Page Series uffer assembly part no. pplicable pad part no. Series Page -TJ- -TJ6- -TJ- -UM -1UM -16UM UM -1UM -16UM UM -1UM -16UM P.7 P.7 P.7 -TK1- -TK0- -UM -1UM -16UM UM -1UM -16UM P.7 P.7 -TK- -UM -1UM -16UM P.7 -Y1J- -01U -0U -0U P.7 -TK6- -TK- -TJ1- -UM -1UM -16UM UM -1UM -16UM UM -1UM -16UM P.7 P.7 P.7 -Y1J6- -Y1K- -01U -0U -0U -01U -0U -0U P.7 P.7 E V T R -TJ0- -UM -1UM -16UM P.7 -Y1K6- -01U -0U -0U P.7 67

72 Series uffer ssembly Part No. uffer assembly part no. pplicable pad part no. Page Series uffer assembly part no. pplicable pad part no. Series Page -YJ- -YJ6- -0UM -06UM -0UM UM -06UM -0UM P.7 P.7 -YJ1- -0UM -06UM -0UM P.7 -YJ- -YK- -0UM -06UM -0UM UM -06UM -0UM P.7 P.7 -YJ0- -0UM -06UM -0UM P.7 -YK6- -YK- -0UM -06UM -0UM UM -06UM -0UM P.7 P.7 -YK1- -0UM -06UM -0UM P.7 -YK0- -0UM -06UM -0UM P.7 6

73 uffer pplicable Pad List Series uffer ssembly Part No. uffer assembly part no. pplicable pad part no. Page Series uffer assembly part no. pplicable pad part no. Series Page -YJ- -UM -1UM -16UM P.7 -YJ1- -UM -1UM -16UM P.7 -YJ6- -UM -1UM -16UM P.7 -YJ- -UM -1UM -16UM P.7 -YJ0- -UM -1UM -16UM P.7 -YK- -YK6- -UM -1UM -16UM UM -1UM -16UM P.7 P.7 -YK1- -UM -1UM -16UM P.7 E V T R -YK- -UM -1UM -16UM P.7 -YK0- -UM -1UM -16UM P.7 69