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2 - Technology technology is acquiring major importance in industrial automation and in most manipulation tasks. SMC can also claim a great deal of experience in this sometimes very complicated product area. The solutions found together with our business partners have led to the development of a vacuum program that offers a unique service to the supplier of whole pneumatic solutions. Our wide range of products, the quality of those products, and the comprehensive, professional consultancy service offered by the SMC staff ensure that vacuum circuits are optimally designed and thus mean that you will get optimal usage from your equipment. However, we are not resting on our laurels, and are continuously developing new and enhanced solutions. You can judge this for yourself in this section. The sheer number of products that are labelled «New» speaks for itself, and there are of course numerous other products that cannot be shown in this catalogue summary. Valves Suitable for Valves Suitable for One-stage Ejectors Series EZH,ZL Compressor Modular Ejectors Series ZX,ZM,ZR gauge Series GZ46 switch Series ZSE1,ZSE, PS00-00 Exhaust valve Flow switch Series PFM Flow switch Series PFM Suction valve Filter Series ZFB Pressure Gauge for Vaccum Series GZ46 switch Filter Series ZPT Suction pad Series ZCUK Work piece 192

3 Adsorption Transfer System for Pump Equipment (vacuum switching valve, vacuum release valve, throttle valve, vacuum pressure switch, and fi lter) that is needed for controlling the vacuum pressure has been integrated to achieve effi cient assembly work and a compact design. Compressor pump Refrigerated air dryer Series IDF Air fi lter Series AF Mist separator Series AM Regulator Series AR regulator / Series IRV Direct operated vacuum regulator that regulates vacuum pressure Electro-pneumatic regulator / Series ITV209 Controls vacuum pressure by external electric signal. Control unit / ZX0 ZR0 ZQ00 VQD00-V For the ZX, ZR, ZQ and VQD, the combination of single units at right can be integrated into a unit gauge Series GZ46 Flow switch Series PFM Series ZPT Series ZCUK Work piece 193

4 ejector Inline Series ZU Nozzle Ø 0,5 0,7 0,5 0,7 ZU05S ZU07S ZU05L ZU07L Suction cap Port Max. vacuum pressure -84KPa -48KPa Circuit Symbol P V Plug connection Ø 6 mm. Superior suction capacity (L type). Can be mounted directly to the suction pad. Light, compact design. Nozzle diameter Ø 0.5 or 0.7 mm. ejector Series ZH Nozzle Ø 0,5 1,0 1,3 0,5 1,0 1,3 0,5 1,0 1,0 1,3 ZH05DS ZHDS ZH13DS-08-- ZH05BS ZHBS ZH13BS-08- ZH05BS-06-F01 ZHBS-06-F01 ZHBS-F01-F01 ZH13BS-08-F02 Air Ø8 Ø8 G1/8 Ø8 Port Ø Ø G1/8 G1/8 G1/8 G1/4 Suction cap Max. Pressure -88 kpa -88 kpa -88 kpa Model Model D, tube type without silencer Model B, case type with silencer 2 models: tube or case type. Light, compact design. Nozzle diameter Ø 0.5, 1, 1.3 mm. With built-in one-touch fi ttings or female thread. Case type has built-in silencer. Model B Model D ejector Series ZM Ejector with control valves, fi lter and vacuum switch *Nozzle Ø 1,3 1,3 ZM131HF-K5LOZ-E55L ZM131HF-K5LOZ-E15L Switch output NPN * Nozzle diameters 0.5/0.7/1.0 upon request Suction cap Max. vacuum pressure -84 kpa -84 kpa 24 V DC: Solenoid Valves 12~24 V DC: switches Connection cable for solenoid valves Valve Connection Assembly Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m VJ-20-4A-6 VJ-20-4A- VJ-20-4A-20 VJ-20-4A-30 2 mini control valves. Integral vacuum switch. Integral vacuum fi lter. % more suction capacity (2-stage ejector nozzle). Can be stacked to a max. of stations. Flat design (15.5mm) with metal body. 194

5 Ejector, modular, stackable Series ZX Ejector System Ejector with control valves *Nozzle Ø Suction capacity Max. Pressure 1,0 ZX01-K15LOZ kpa 24 V DC: Solenoid Valve Ejector with vacuum switch and fi lter *Nozzle Ø 1,0 1,0 ZX01-E55CN ZX01-E15CN Switch Output NPN Suction cap Max. Pressure -84 kpa -84 kpa V DC: switch Compact and light. Allows both manifold mounting and mounting as an individual device. Modular design. Ejector with control valves, fi lter and vacuum switch *Nozzle Ø 1,0 1,0 ZX01-K15LOZ-E55CN ZX01-K15LOZ-E15CN Switch Output NPN * Nozzle diameters 0.5 and 0.7 upon request Suction cap Max. Pressure -84 kpa -84 kpa V DC: switch Valve Connection Assembly Connection cable for vacuum switch 1 m VJ-20-4A- 2 m VJ-20-4A-20 3 m VJ-20-4A-30 3 m ZS--5A-30 Ejector with control valves Ejector with vacuum switch and fi lter Ejector with control valves, fi lter and vacuum switch Pump System Valve unit with vacuum switch ZX0-K15LOZ-E55CN ZX0-K15LOZ-E15CN Switch output NPN V DC: switch V DC: switch Valve unit with filter ZX0-K15LOZ-F V DC: Valve Valve Connection Assembly 1m 2m 3m VJ-20-4A- VJ-20-4A-20 VJ-20-4A-30 Connection cable for vacuum switch 3m ZS-5A-30 PD Circuit (The circuits with other than vacuum switch are shown as bellow.) PD Circuit (The circuits with other than vacuum switch are shown as bellow.) PE PS PV switch (E) ZSE2 PE PS PV Filter Unit (F) ZX1-F V V Valve unit with vacuum switch Valve unit with fi lter 195

6 Ejector System Stackable Ejector Series ZR Ejector System Ejector unit, standard Nozzle Ø Switch output Suction cap. Max. Pressure /Solenoid Valve 1,5 2,0 ZR5S1-K15LOZ-E55CN ZR5S1-K25LOZ-E55CN ZR120S1-K15LOZ-E55CN ZR120S1-K25LOZ-E55CN kpa -84 kpa 24V DC Double Single Double Single unit specially for heavy work pieces of up to 5kg. Allows both manifold mounting and mounting as an individual device. Modular design. Compact and light (plastic body). Ejector unit, superior suction capacity Nozzle Ø Switch output Suction cap. Max. vacuum pressure 2,0 ZR120L1-K15LOZ-E55CN 5-53 kpa ZR120L1-K25LOZ-E55CN Valve Connection Assembly Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m VJ-20-4A-6 VJ-20-4A- VJ-20-4A-20 VJ-20-4A-30 /Solenoid Valve 24V DC Double Single PS PE PD PV Silencer Ejector switch Connection cable for vacuum switch 3m ZS--5A-30 Filter V Pump System Valve unit with vacuum switch Switch output /Solenoid valve ZR0-K15LOZ-E55CN ZR0-K25LOZ-E55CN 24 V DC Double Single Valve Connection Assembly Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m VJ-20-4A-6 VJ-20-4A- VJ-20-4A-20 VJ-20-4A-30 PS PE SOL.a PD PV valves SOL.b Release valve SOL.c switch V Connection cable for vacuum switch 3m ZS--5A-30 Suction fi lter 196

7 Ejector Series ZL Compact design. 3 different types: Ejector + vacuum switch. Ejector + vacuum gauge. Only ejector built by 3 stage ejector therefore less air consumption, by the nozzle. Nozzle diameter 1.2 mm. Suction capacity 0 l/min or 200 l/min with ZL212. Different ways of fi xing to body. Nozzle Ø 1,2 2 x 1.2 ZL2 ZL2-G ZL2-E65L ZL2-E25L ZL2-E26L ZL2-K15LOU-E65L ZL2-K15LOU-E25L ZL2-K15LOU-E26L ZL212 ZL212-G ZL212-E65L ZL212-E25L ZL212-E26L Valve Connector Assembly Cable L= 0.6 m Without casing SY0-30-4A-6 ZL2 Type Standard Standard with vacuum pressure gauge Standard with vacuum switch Standard with vacuum switch and control valves Standard Standard with vacuum pressure gauge Standard with vacuum switch ZL2-G Switch output NPN Analogue NPN Analogue NPN Analogue Suction cap. 0 Max. Pressure -84 kpa kPa Cable L= 1 m Cable L= 2 m Cable L= 3 m SY0-30-4A- SY0-30-4A-20 SY0-30-4A-30 ZL2- ZL2-K15LOZ-E* 3 stage function ZL % increase in suction capacity Suction capacity 197

8 Filter Series ZFA EZFA0-F01 EZFA200-F02 Port G1/8 G1/4 Flow Proof pressure 0,5MPa Filtration degree 30 µm Circuit Symbol Accessories Replacement fi lter Mounting bracket ZFA0 EJ001H-030N BP-1H-1A ZFA200 EJ1H-030N BP-1H-2A Filters intake air before the vacuum ejector. Large fi lter element increases service life. Light, compact design. Stackable. Filter element replaced quickly and easily. Application with vakuum pump Air ZFA vacuum filter 2 port valve ZFA vacuum filter switch switch Filter Series ZFB ZFB0-04 ZFB0-06 ZFB ZFB ZFB ZFB300- Port ø Flow Proof pressure 0.5MPa Filtration degree 30 µm Circuit Symbol 360 rotation. Prevents soiling in the vacuum ejector. Integrated one-touch fi ttings for simple mounting. Filter element quickly replaced. Transparent polycarbonate permits visual checking of soiling level. Replacement fi lter element Model ZFB0 ZFB200 ZFB300 I-34S-A I-35S-A I-36S-A Applicationwith vacuum ejector Air 2 port valve Ejector ZFB vacuum fi lter switch 198

9 Filter Series ZFC Port number ZFC050-02B ZFC050-23B ZFC050-04B ZFC0-04B ZFC0-06B ZFC200-06B ZFC200-08B Port ø Flow Filtration degree µm Circuit Symbol Compact, lightweight, resin design. Filter element simply replaced using bayonet socket. Easily mounted with one-touch fittings. Transparent polycarbonate permits visual checking of soiling level. Accessory-Filter element Model ZFC050 I-68S-A ZFC0 I-62S-A ZFC200 I-63S-A Water Separator for Series AMJ AMJ3000-F02 AMJ3000-F03 Port G 1/4 G 3/8 Flow 200 Operating pressure min max. Circuit Symbol AMJ00-F03 AMJ00-F04 G 3/8 G 1/ MPa 1.0MPa AMJ5000-F06 AMJ5000-F G 3/4 G At least 90% of the water that is sucked in is removed. Manual discharge mechanism. Bayonet socket simplifi es fi lter element replacement. Bowl protection standard. Pads, Ball Joint Type Series ZPT/ZPR*F Suction pads with ball joint - ideal for use on slanted or round surfaces Ball joint makes it ideal for slanted surfaces or round components. Ø mm to Ø 50 mm. Interchangeable with standard pad types. Large range of adapter parts with or without buffer. entry either radial or axial. Choose from 6 different pad materials. Standard versions Part no. ZPT * F ** -B5-A8 ZPT * F ** -B5-A ZPT * F ** -B5-A14 ZPT * F ** -B5 ZPT * F ** -B5 ZPT * F ** -B8 ZPT * F ** -B8 ZPT * F ** -B01 * Pad Ø ** Pad materials: N NBR Pad ø, 13,16 20,25, 32, 50, 13, 16 20, 25, 32, 50 connection port M5 M5 M5 M8 M8 Rc 1/8 S U F GN GS Silicon urethane Fluoro Rubber Conductive NBR Conductive Silicon Versiones de telescópico, entrada de vacío lateral (ZPR) bajo pedido. Mounting threads Male Female M8 x 1 M x 1 M14 x 1 M5 M5 M8 M8 Rc 1/8 199

10 Pads, Series ZPT...H Flat style with ribs Part no. ZPTHN-A14 ZPT50HN-A14 ZPT63HN-A16 ZPT80HN-A16 ZPT0HN-A16 ZPT125HN-A16 Pad Ø Suction pad/ Port Size Rc1/8 Mounting thread M14x1 M16x1.5 M16x1.5 Other models, materials, diameters, etc. upon request. Material NBR Detail drawing Heavy duty. Large diameter. Ø mm. CRT handling Pads, Series ZPT...HB With rod boot ZPTHBN-A14 ZPT50HBN-A14 ZPT63HBN-A16 ZPT80HBN-A16 ZPT0HBN-A16 ZPT125HBN-A16 Pad Ø Port size/ Suction pad Rc1/8 Mounting thread M14x1 M16x1.5 M16x1.5 Other models, materials, diameters, etc. upon request. Material NBR Detail drawing Heavy duty. Large diameter. Ø mm. 200

11 Pads Series ZP pads, fl atstyle, with retaining ring from Ø mm NBR Silicon Urethane rubber Viton Retaining Ring Detail drawing Broad range of different materials: NBR, silicon, fl uoro rubber, urethane,... 4 round pad designs with fl at, fl at with ribs, deep and bellows shaped suction pad. Pad Ø from 2 to 125 mm. Large selection of adapter parts pad with or without buffer (with or without positioning key). Radial or axial vacuum connection ZP02UN ZP04UN ZP06UN ZP08UN ZPUN ZP13UN ZP16UN ZP20UN ZP25UN ZP32UN ZPUN ZP50UN NBR ZPCN ZP13CN ZP16CN ZP20CN ZP25CN ZP32CN ZPCN ZP50CN ZP02US ZP04US ZP06US ZP08US ZPUS ZP13US ZP16US ZP20US ZP25US ZP32US ZPUS ZP50US Silicon ZPCS ZP13CS ZP16CS ZP20CS ZP25CS ZP32CS ZPCS ZP50CS ZP02UU ZP04UU ZP06UU ZP08UU ZPUU ZP13UU ZP16UU ZP20UU ZP25UU ZP32UU ZPUU ZP50UU pads, model with ribs, with retaining ring from Ø mm Urethane rubber ZPCU ZP13CU ZP16CU ZP20CU ZP25CU ZP32CU ZPCU ZP50CU ZP02UF ZP04UF ZP06UF ZP08UF ZPUF ZP13UF ZP16UF ZP20UF ZP25UF ZP32UF ZPUF ZP50UF Viton ZPCF ZP13CF ZP16CF ZP20CF ZP25CF ZP32CF ZPCF ZP50CF None ZPL1 ZPL2 ZPL3 Retaining Ring ZPL1 ZPL2 ZPL3 Detail drawing pads, deep model, with retaining ring from Ø mm NBR Silicon Urethane rubber Viton Retaining Ring Detail drawing ZPDN ZP16DN ZP25DN ZPDN ZPDS ZP16DS ZP25DS ZPDS ZPDU ZP16DU ZP25DU ZPDU ZPDF ZP16DF ZP25DF ZPDF ZPL1 ZPL2 ZPL3 suction pads, bellows model, with retaining ring from Ø mm NBR Silicon Urethane rubber Viton Retaining Ring Detail drawing Assembly process in the automotive industry ZP06BN ZP08BN ZPBN ZP13BN ZP16BN ZP20BN ZP25BN ZP32BN ZPBN ZP50BN ZP06BS ZP08BS ZPBS ZP13BS ZP16BS ZP20BS ZP25BS ZP32BS ZPBS ZP50BS ZP06BU ZP08BU ZPBU ZP13BU ZP16BU ZP20BU ZP25BU ZP32BU ZPBU ZP50BU ZP06BF ZP08BF ZPBF ZP13BF ZP16BF ZP20BF ZP25BF ZP32BF ZPBF ZP50BF without ZPL1 ZPL2 ZPL3 201

12 Suction Pad Adapter, Buffers Series ZP Series ZPT Series ZPR Mounting nut Buffer without connection port Adapter Type 2 Retaining Ring Mounting nut Buffer with connection port Inline Adapter Type 2 Retaining Ring Adapter Type 3 The pad s modular design permits the required style to be simply combined. Suction pad Suction pad Adapter For pad Without vacuum port With vacuum port Type 1 Type 2 Type 3 Male thread ZPT1-A5 ZPT1-A6 ZPT2-A5 ZPT2-A6 ZPT3-A6 ZPT3-A8 ZPT4-A6 ZPT4-A8 Female thread ZPT1-B4 ZPT1-B5 ZPT2-B5 ZPT2-B6 ZPT2-B01 ZPT3-B5 ZPT3-B6 ZPT3-B08 ZPT3-B01 ZPT4-B6 ZPT4-B08 ZPT4-B01 Radial with 4 mm one-touch fitting ZPRS-04-A5 ZPRS-04-A6 ZPRS-04-B4 ZPRS-04-B5 ZPRS-04-A5 ZPRS-04-A6 ZPRS-04-B5 ZPRS-04-B6 ZPRL-04-A6 ZPRL-04-A8 ZPRL-04-B5 ZPRL-04-B6 ZPRL-04-B8 Radial with 6 mm one-touch fitting ZPRS-06-A5 ZPRS-06-A6 ZPRS-06-B4 ZPRS-06-B5 ZPRS-06-A5 ZPRS-06-A6 ZPRS-06-B5 ZPRS-06-B6 ZPRL-06-A6 ZPRL-06-A8 ZPRL-06-B5 ZPRL-06-B6 ZPRL-06-B8 ZPRL-06-A6 ZPRL-06-A8 ZPRL-06-B6 ZPRL-06-B8 Radial with 8 mm one-touch fitting ZPRL-08-A6 ZPRL-08-A8 ZPRL-08-B5 ZPRL-08-B6 ZPRL-08-B8 ZPRL-08-A6 ZPRL-08-A8 ZPRL-08-B6 ZPRL-08-B8 Conection Symbol Thread diameter Conection Symbol Thread diameter Male Thread A5 A6 A8 M5x0.8 M6x1 M8x1 Female Thread B4 B5 B6 B8 B01 M4x0.7 M5x0.8 M6x1 M8x1.25 Rc1/8 Buffers Stroke 6 20 Without vacuum port Non-rotating for ZPR With in-line vacuum port Non-rotating for ZPT No Yes No Yes ZPB1J6 ZPB2J ZPB3J ZPB3J20 ZPB1K6 ZPB2K ZPB3K ZPB3K20 ZPB1J6-B3 ZPB1J6-B5 ZPB1J-B5 ZPB2J-B5 ZPB3J-B5 ZPB3J-B01 ZPB3J20-B01 ZPB1K6-B3 ZPB1K6-B5 ZPB1K-B5 ZPB2K-B5 ZPB3K-B5 ZPB3K-B01 ZPB3K20-B01 Mounting nuts For pad , 50 Part no. SNJ-0A SNJ-015A SN-015A 202

13 2- Color Display Digital Flow Switch Series PFM PFM7-C4-F PFM725-C6-F PFM750-C6-F PFM7-C8-F Rated fl ow range [l/min] 0,2 to 0,5 to 25 1 to 50 2 to 0 Port Size (One touch fi tting) ø4 ø8 Output 1 x + 1 x Analogue (4-20mA) For air, N 2, Ar and CO 2 A digital flow switch that uses MEMS sensor for detecting the flow Compact size Improved visibility with two colour display indication Two piping directions are possible Integrated flow adjustment valve Multiple mounting combinations * Flow adjustment valve - Without fl ow adjustment valve S With fl ow adjustment valve ** Port size (straight piping) Symbol Description Flow rate range Integrated type PFM7 * - ** -*** PFM725 * - ** -*** PFM750 * - ** -*** PFM7 * - ** -*** Remote type PFM5 * - ** - 2 PFM525 * - ** - 2 PFM550 * - ** - 2 PFM5 * - ** - 2 Flow rate Dry air, N 2, Ar 0.2 to l/min 0.5 to 25 l/min 1 to 50 l/min 2 to 0 l/min Flow rate Dry air, N 2, Ar 0.2 to l/min 0.5 to 25 l/min 1 to 50 l/min 2 to 0 l/min Flow rate CO to 5 l/min 0.5 to 12.5 l/min 1 to 25 l/min 2 to 50 l/min Flow rate CO to 5 l/min 0.5 to 12.5 l/min 1 to 25 l/min 2 to 50 l/min Supply voltage 24 V DC Output Analogue (4-20mA) Operating Pressure Range -0 kpa to 750 kpa Supply voltage 24 V DC Operating Pressure Range -0 kpa to 750 kpa F01 F02 C4 C6 C8 G1/8 G1/4 ø4 one-touch fi tting one-touch fi tting ø8 one-touch fi tting *** PFM7 - Output specifi cation B E F 2 outputs 1 output + Analogue (1 to 5 V) 1 output + Analogue (4 to 20 ma) Flow sensor monitor Input specifi cation Output specifi cation Note PFM313-LF PFM314-LF Current input to 5 V outputs to 20 ma outputs With power and sensor connectors included Electric Switch Series ZSE1 Model number ZSE L ZSE L ZSE LN Thread connection R1/8 R1/8 R1/8 Switch point KPa Switch output NPN, 3 m cable, 3 m cable, with plug* Hysteresis ~1 - % adjustable 12~24 V DC Plug with cable ZS--5A-30 Minimal switching times, ms. LED switch point display. Option of grommet style or plug connection. Adjustable hysteresis. Repeatability ± 3% F.S. 203

14 Adjustable Pressure and Switch with Display Series ZSE () * ZSEF ZSEF-01-22L ZSEF ZSEF-01-62L Switch point & pressure: -1.3 ~ +0.0 KPa * ZSE* for vacuum on request Port R1/8 (ø4, on request) Switch output 1-5 V 1-5 V analogue + 2 x NPN analogue + 2 x 12~24 V DC Mounting accessories High foot Short foot Panel adapter Panel adapter with cover ZS-24-A ZS-24-B ZS-22-B ZS-22-C 2 styles: ZSE: ZSEF: & pressure combination. Wide range of programs and accessories. Large, easy-to-read display. Enclosure IP65. Simple, menu-driven adjustments. Output terminals: analogue & 2x NPN or. Repeatability ± 2% F.S. Response time 2.5 ms or less. ZSEF application ISE Work piece location monitoring Adjustable and Positive Pressure Switch with Display Series ZSE30A Switch point ZSE30A-01-P-L ZSE30A-01-E-L ZSE30A-01-F-L ZSE30AF-01-P-L ZSE30AF-01-E-L ZSE30AF-01-F-L NPN options available upon request. Pressure 0 ~ 1 KPa + Low Pressure 0 ~ +0 KPa Connection port male: R 1/8 female: M5 ( also available with Ø 4 or 6 mm push-in fitting) Switch output + (1-5 V) + (4-20 ma) + (1-5 V) + (4-20 ma) 12~24 V DC 2 styles: ZSE30A: vacuum pressure. ZSE30AF: compound pressure. Enclosure IP. Large, easy-to-read display. 2 colour (green/red) display. Easy operation: 3-step setting and copy display. Analogue output: 4-20 ma or 1-5 V. Switch output: 2 /NPN or 1 /NPN. With straight and elbow one-touch fi ttings. Mounting accessories Bracket A Bracket B Panel mount adapter Lead wire with connector cover (3 cores, for 1 output, 2 m) Lead wire with connector cover (4 cores, for 2 outputs, 2 m) ZS-38-A1 ZS-38-A2 ZS-27-C ZS-38-3G ZS-38-4G 204

15 and Pressure Sensor with Controller Unit Series PSE530/200 Measuring sensor for compressed air Connection thread PSE531-M5 PSE533-M5 M5 Pressure range 0 ~ -1 KPa -1 ~ 1 KPa Output signal Analogue 1~ 5 V Controller Unit Switch output Mounting Response time Note PSE201-4C 80 ma Panel mounting 50 ms With 4 sensor connectors Sensor and controller separate. PSE530: - IP. - Simple electr. connection using plug. - Minimal response times. PSE200: - Controller for 4 sensor inputs. - Autom. sensor recognition. - Auto shift function. Accessories Sensor cable with plug Protective cover for PSE201 Panel mounting adapter for PSE201 Plug set (4 pieces) ZS-26-G ZS ZS-26-B ZS-26-E Micro and Pressure Sensor with Controller Unit Series PSE5/300 PSE5 Micro design, e.g. 9.6 x 20.8 x 18 mm. Minimal weight, e.g. 3.2 g. 7 different connection types PSE ms response time. 2 colour display determined by switching status. 2 switch outputs and analogue output. Compressed Air Micro Sensor Connection type Pressure range Output signal PSE541-M3 PSE541-M5 PSE PSE541-R04 PSE541-R06 PSE541-IM5 PSE541-IM5H PSE543-M3 PSE543-M5 PSE PSE543-R04 PSE543-R06 PSE543-IM5 PSE543-IM5H M3 male M5 male male R1/8, female M5 Ø 4 mm one-touch fi tting Ø 6 mm one-touch fi tting M5 female thread M5 female, with mounting holes M3 male M5 male male R1/8, female M5 Ø 4 mm one-touch fi tting Ø 6 mm one-touch fi tting M5 female thread M5 female, with mounting holes Controller Unit. Switch output Response time Note PSE303-LAC 2 x + analogue Low Pressure and : 0 ~ -1 KPa Low Pressure and : -0 ~ +0 KPa 1ms Analogue 1 ~ 5 V incl. supply cable, bracket, sensor plug 205

16 Pressure or Switch Series PS00 00 PS00-R06L PS00-R06L With 3m cable Operating pressure range -0,1-1,0 Mpa Operating position MPa -0,1-0,45-0,1-0, Contact point Pressure switch point: ON Pressure switch point: ON 12~24 V DC Suction monitoring LED switch point display. Miniature design. Mounted directly to one-touch fi ttings. Piezo sensor gives long service life. Pluggable directly into plug connections of Ø 6 mm. Pressure monitoring FRL Sensor pressure control on the actuator Sensor FRL Sensor Pressure Gauge for Series GZ46 Part no. GZ46-K-01 GZ46-K-01-C GZ46-K-02 GZ46-K-02-C Mounting Direct Panel mounting Direct Panel mounting Display -0 KPa ~ 0 KPa Port Size R1/8 R1/4 Diameter 42 mm 1/8 or 1/4 port on rear side. Also available for panel mounting. Regulator Series IRV IRV00-F01 IRV2000-F02 IRV3000-F02 IRV3000-F03 IRV3000-F04 regulation range -0 ~ -1.3 KPa Port Size G 1/8 G 1/4 G 1/4 G 3/8 G 1/2 Operation temperature range +5 ~ +60 C For Installation behind a vacuum pump, regulates the desired vacuum pressure. Can be integrated into a modular air preparation unit. Can be panel mounted. Accessory: Mounting bracket Pressure Gauge IRV00 IRV2000 IRV3000 P GZ33-K-01 P P GZ43-K

17 Electro-pneumatic Proportional Converter for Series ITV2090 ITV F2N5-Q ITV F2N5-Q ITV F2N5-Q ITV F2N5-Q Control signal 4 ~ 20 ma/dc 0 ~ V DC Output signal Analogue 1-5 V DC, 30 ma Analogue 1-5 V DC, 30 ma Operation voltage 24V DC Port thread G1/4 Pressure range KPa -1.3~80 Flow l/min Max.130 Accessory Connection cable with plug Straight Elbow part number P P Mini E/P Converter Series ITV0090 Conversion table 0 Torr = -760 mmhg 760 Torr = 0 mmhg 1 mmhg = mbar 1 KPa = 00 Pa = mbar Easily operated using key pad and LED display. can be steplessly regulated. Zero point and range setting possible. Repeatability: ±0.5% F.S. Linearity: ±1% F.S. Enclosure IP65. Compact Cylinder for Applications Series ZCDUKC ZCDUKC- * D ZCDUKC16- * D ZCDUKC20- * D ZCDUKC25- * D ZCDUKC32- * D * Stroke length Piston Ø Standard stroke lengths 5,, 15, 20, 25, 30 5,, 15, 20, 25, 30,, 50 Piston rod thread M4 M5 M6 M8 M Port Size M5 G1/8 Auto switch Reed: D-A93L, D-90L, D-97L 3 wire solid state: NPN: D-M9NL, : D-M9PL 2 wire solid state: D-M9BL Sizes Ø - 32 mm. Suction pads mounted directly to the hollow double piston rod. Non rotating piston rod is standard. pads from Ø 2 to 50 mm. Auto switch for end position detection with LED in 2 wire type, can be mounted on 2 sides. Check Valve/Check Valve with one-touch fi ttings Series AK Type Check valve In-line type Straight type Male connector type Bushing type Series AK2000/00/6000 AKH AKB AK Superior fl ow capacity. Low cracking pressure : 0.02MPa. Port size from 1/8 to 1. AKH/AKB Select from 3 designs. One-touch fi tting both sides. Male thread/female thread. Male thread/one-touch fi tting. Low cracking pressure. Port size 1/8 to /8 to 1/2 Applicable tubing O.D. Metric Size Inch Size - ø4 to ø 12 ø4 to ø ø5/32 to ø 12 ø5/32 to ø

18 Related Products Release Unit VQD00-V 3 Port V0 3 Port/Direct Operated Poppet VKF300 Model Suction flow rate VQD00-V 16 use -1,2 KPa Model Standard Large flow Nl/min Power (W) use 0.1-0kPa Model Standard Low Nl/min Power (W) use -1,2 KPa 3 Port/Direct Operated/Poppet 3 Port/Pilot Poppet 3 Port/Pilot Poppet VT307/317/325 VP300/500/700 VG342 Body ported Base mounted Model VT307 VT317 VT325 Nl/min Power (W) use -1,2 KPa Model VP300 VP500 VP700 Nl/min Power (W) 1.8 use -1,2 KPa Model Nl/min Power (W) VG use -1,2 KPa Direct Operated 2 Port Valve VX21/22/23 Air, Gas,, Water, Steam, Oil Direct Operated 3 Port Valve VX31/32/33 Air, Gas,, Water, Steam, Oil Actuation Port size Orifice dia. (mmø) 1/8" to 1/2" N.C./N.O. 2 to 32A to 50A use Up to 0.1 Pa abs Actuation Port size Orifice dia. (mmø) N.C./N.O./C.O. 1/8" to 3/8" 1.5 to 4 use Up to 0.1 Pa abs 208

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