Gas Delivery Components
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1 A DVA CED PREURE TECHOLOGY Gas Delivery Components Condensed Catalog DECEMBER Technology ay apa, CA (707) HMI17391/December2017 Pressure Regulators & Bellows Valves Check Valves Flow Devices
2 ingle tage Regulators eries PI / BAR PI / BAR Absolute TD / OPT Flow LPM TD / OPT ize / / /8, 1/ VAR, B 3500 / / / / / / T 3500 / / / T VAR VAR, B VAR, B VAR, B VAR / / 310 opt 2300 / / mm Hg to 10 psig / / / mm Hg to 30 psig , 1/2 150 / / / 1500, 1/2, 3/4 150 / , 1/2, 3/4 150 / /4, / /2, 3/4, / / /2, 3/4, 1 Mini Regulators eries PI / BAR PI / BAR Absolute TD / OPT Flow LPM TD / OPT ize 20 VAR 150 / / / /4, IG 500 VAR 150 / / / / 30, IG L 5200 VAR 150 / / / / 100, IG Two tage Regulators eries 1700 VAR, B PI / BAR 3500 / / 310 opt PI / BAR Absolute TD / OPT 100 / / 14 Flow LPM TD / OPT ize 0.05 / VAR 3500 / / Please review applicable data sheets prior to making final product selection. All specifications subject to change without notice. : Optional : tandard : elded : Threaded or Compression IG : urface mount (C & seal)
3 Pneumatically Actuated Regulators eries 10PA 15PA 14PA 12PA VAR, B VAR, B VAR, B VAR, B PI / BAR PI / BAR TD / OPT Flow LPM TD / OPT ize 3500 / / / / / / / / / 17 opt 1700 / / mm Hg to 30 psig , 1/2 150 / / , 1/2 90 PA 1700 / / /2, 3/4, 1 91 PA 800 / / /2, 3/4, 1 Crossover Manifolds eries M6 M6 VAR, B PI / BAR PI / BAR TD / OPT 3500 / / Gauge ize 1/4 M8, B 3500 / / /4 High Pressure Regulators eries PI / BAR PI / BAR Pneumatically Actuated TD / OPT ize KT8-316L 6000 / / 310* 1500 / /4 KT9-316L 6000 / / 310* 2500 / / /4 KT10-316L, C L B - Brass 10,000 / / 310* 6000/ ,000 / / / / /4 * KT12 C B - Brass 6000 / / / / 2.0 1/2, 3/4 Back Pressure Regulators eries Operating Pressure Max PI / BAR TD /OPT ize BP 1000 VAR, B 0.3 1/4 ** VAR : 316L VAR : 316L B : Brass *KT elded *BP1000 elded
4 Pneumatic Valves eries VAR VAR VAR VAR VAR VAR VAR VAR VAR VAR VAR VAR VAR VAR VAR VAR PI / BAR * TD / OPT ize 145 / 10 C / 9 C 0.29 C / 9 C / 17 O / 207 C 0.23 / / 207 O / 255 C / 310 C /4 125 / 9 C 0.5, 1/2 125 / 9 C 0.5 C 0.5, 1/2 125 / 9 C 0.5, 1/2 250 / 17 O 0.5, 1/ / 207 C 0.35, 1/2, IG, IG, IG 250 / 17 C 0.8 1/2 Two tep Metered and Full Flow LOTO continued *C = ormally closed, O = ormally open : Optional : tandard : elded : Threaded or Compression IG : urface mount (C seal) LOTO : Lockout / tagout
5 Pneumatic Valves continued eries PI / BAR * TD / OPT ize Two tep Metered and Full Flow LOTO 3113 VAR 1300 / 90 C 1.0 1/ VAR 3000 / 207 C 0.7 1/ VAR 250 / 17 C 2.8 3/8, 1/2, 3/ VAR 250 / 17 O 2.8 3/8, 1/2, 3/4 Manual Valves eries PI / BAR Open / Closed Indication TD / OPT ize LOTO 3600 VAR 3000 / 207 Knob, multi turn VAR 3700 / 255 Knob, multi turn VAR 3000 / 207 Lever, 1/4 turn 0.29, IG 3624 VAR 3700 / 255 Lever, 1/4 turn VAR 4500 / 310 T Handle, 1/4 turn / VAR 3000 / 207 Knob, 1/4 turn VAR 250 / 17 Knob, 1/4 turn VAR 3000 / 207 Knob, pull turn VAR Knob, multi turn 0.5, 1/ VAR Lever, 1/4 turn 0.5, 1/ VAR Knob, 1/4 turn 0.5, 1/2 continued *C = ormally closed, O = ormally open : Optional : tandard : elded : Threaded or Compression IG : urface mount (C seal) LOTO : Lockout / tagout
6 Manual Valves continued eries PI / BAR Open / Closed Indication TD / OPT ize LOTO 4652 VAR 250 / 17 Knob, 1/4 turn VAR Knob, pull turn 0.5, 1/ VAR 250 / 17 Knob, 1/4 turn 0.8 1/ VAR 250 / 17 Knob, pull turn 0.8 1/ VAR 3000 / 207 Knob, multi turn 0.7 / 1.3 1/ VAR 3000 / 207 Lever, 1/4 turn 1.0 1/ VAR 1300 / 90 Knob, 1/4 turn 1.0 1/ VAR 1300 / 90 Knob, pull turn 1.0 1/ VAR 250 / 17 Knob 2.8 3/8, 1/2, 3/ VAR 250 / 17 Knob, pull turn 2.8 3/8, 1/2, 3/ / 17 Knob 10 3/4, 1 BZ 91T 250 / 17 Knob, multi turn 20 3/4, 1, 1-1/2 BZ 91U 1700 / 117 Knob, multi turn 12 3/4, 1 ote: 9600 no open closed indicator. Metal eated Valves PI / BAR TD / OPT ize 3200 VAR 125 / / 34 opt Pneumatic, C VAR 125 / / 34 opt Knob, multi turn 0.27 Metering Valves PI / BAR TD / OPT ize 3672, 3675, 4675 VAR 145 / 10 Knob, multi turn 0.02 / 0.08 / 0.15 : Optional : tandard : elded : Threaded or Compression IG : urface mount (C seal) LOTO : Lockout / tagout
7 Check Valve Pressure Max PI / BAR Cracking Presure PI / BAR ize 64 VAR 3500 / max 3 / /4 Vacuum Generators Vacuum Efficiency In Hg / Torr Modules** ize VAR VAR VAR VAR **Monoblock vacuum generator, 2 supply valve and check valve 26 / / / / 100 Flow witches Pressure Max PI / BAR Trip Points 100 psi 2 ize 74 VAR 3500 / 267 2, 5, 10, 25, 50, 100 1/4 74B VAR 3500 / / / / , 350, 500, , 1650, , , /2 3/ /2 eries Features eries KT Cleanroom Assembly 2 Testing Helium Testing Face eal Tube tub PT Compression EP urface Finish TD / OPT in µ inches VAR, B, B 15 / 10, 7, 5 Ra max 10 Ra avg 63 Ra avg 63 Ra avg : Optional : tandard : elded : Threaded
8 A DVA CED PREURE TECHOLOGY Gas Delivery Components Condensed Catalog DECEMBER Technology ay apa, CA (707) HMI17391/December2017 Pressure Regulators & Bellows Valves Check Valves Flow Devices
Check Valve AP64 P.149. Vacuum Generator Vacuum Generator Module Vacuum Generator Module AP7 & 70 AP71 AP72. Flow Switch Flow Switch (For high flow)
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