Miniature and high-response

Transcription

1 Miniature and highresponse Three series of compact s to match various applications. An unprecedented compact size and highspeed response are realized with the platinum sensor chip incorporating silicon micro machining and the newly proposed rectifying mechanism. This thermal small can be used for a variety of applications such as confirmation of electronic part suction, leak inspections and various gas flow control., high speed, extremely small flow Indicator / FSMHD 3 x 32 Flow display section (3digit digital display) Switch output (alarm) light sensor Pressure Detect extremely small flow rates of m /min. or less at a high speed. Perfect for leak inspections and pinhole inspections. Flow range,,, m /min, quick response Select either an integrated or separated indicator to increase the range of applications. Flow range.,,,, 2,, /min Indicator / FSMAD 3 x 32 2 installation direction (side and bottom) Flow display section (3digit digital display) Switch output (alarm) light Compatible with argon (Ar) and carbon oxide (CO2). (Option) 2 installation direction (side and bottom)

2 Miniature, light weight Quick response Free installation position This sensor can be installed in small spaces or on moving sections thereby contributing to facility downsizing and weight reduction. Comparison of volume with conventional parts Highspeed response is realized by incorporating a platinum sensor chip processed with silicon micromachining. Use this sensor with devices with a short cycle time, such as to check the suction of the machine on which it is mounted. The sensor can be mounted in any direction top, bottom, left or right. Usable with vacuum Positive/negative pressure combination Use this sensor with vacuum applications such as confirming suction of the machine. (Argon and carbon dioxide are for positive pressure.) Control flow rates The output method includes the analog output type and the digital display & switch output type which detects errors visually and with switches. Select the type according to the application. Miniature, ultra highspeed response Inconceivable, extraordinary downsizing and a ms highspeed response have realized an unthinkable design. Flow range.,.,.,,, /min Wide variation Series Size / light / light Response time Quick response Quick response or less or less Comparison of response speed with conventional part Separate type Separate type Integrated type Integrated type A Cor p. B Cor p. Indicator / FSMVD 3 x 32 Body material Straight piping section unnecessary The newly proposed rectifying structure eliminates the need for a straight piping section on the upstream side or downstream side. Switch output Analog output Elbows OK Indicator Material Out put method Interactive detection Flow range Body material Switch output Analog output Extremely small flow type Large flow type sensor Pressure Separate indicator / light Instantaneous response Separate type Body material Technical data Switch output Analog output Interactive detection Low flow type Miniature inline dedicated for small size is available Maintain the sensor performance and prevent trouble. Refer to the next page for applications and series variation.

3 size applications Active in a wide variety of fields size is used for machines, automobiles, measuring instruments and precision devices, etc., in advanced fields such as semiconductors and biomechanics, and in applications for medical materials and foods. Working fluid sensor Pressure Amenity Industry Sensor applications Leakage inspection Pinhole inspection Confirmation of ionizer purge gas Welding gas control Purge gas flow control Contact confirmation confirmation Automobile, etc. Liquid crystal Confirmation of ionizer purge gas Compatible with a variety of flow ranges. The inline speed controller (special order) can be used as a simple. Semiconductor Purge gas flow control Control of purge gas is vital in maintaining performance. Miniature size makes this ideal for assembly into the device. Food/Medical Leakage inspection The inspection cycle time can be shortened. (Measurements can be made immediately after filling container.) Even when the pressure is extremely low, the output is made in proportion to the pinhole, so the acceptability can be judged and the status can be confirmed. Electric part confirmation () Highspeed response comparable to pressure sensor response is determined by the inner volume of piping and pressure. etc. (2) Flow detection eliminates adjustment and incorrect detections resulting from fluctuating pressure. (3) Nozzle and clogging is detected. () Control suction errors, such as inclined suction, by detection flow. Comparison with pressure sensor (Nozzle diameter: size (using FSMN) Pressure sensor (m /min) Flow difference : 83m /min Pressure difference : 2kPa 83 7 Very clear! Welding argon and carbon gas flow control Compatible with a variety of flow ranges. Machinery manufacturing Contact confirmation Even flows that cannot be determined with a pressure sensor because differential pressure is low are determined precisely..3, vacuum pressure: 7 kpa) Control of N2 gas for laser oscillator and semiconductor manufacturing equipment 2

4 size series variation Extremely small flow, quick response For air/nitrogen gas For argon/carbon gas (option) point analog output Separated indicator mountable (optional) point analog output Switch output 2 point NPN output point analog output Switch output 2 point PNP output Display separated type Display integrated type Analog output type Switch output type point analog output Separated indicator mountable (optional) 2 point NPN output 2 point PNP output Miniature, ultra highspeed response Note Body material Resin body Stainless steel body Aluminum body Port size fiber tube pushin pushin sensor Full scale flow Pressure 3% % Precision (linearity) % Negative Positive Negative Positive Negative pressure pressure pressure Positive pressure pressure Working pressure range pressure Positive pressure Negative pressure Positive pressure FS flow Analog output ( to V) Note : Only for AR type. 3

5 sensor Pressure Safety precautions Pneumatic components: Warning and Cautions Always read this section before starting use. Refer to Intro 67 for general precautions. size FSMH/FSM/FSMV Series. Working fluid DANGER Do not use this product with flammable fluids. When this product is used for liquefied gas, evaporate gas. This product could fail if processing liquefied gas. WARNING This product cannot be used as a business meter. This product does not conform to Measuring Laws, and thus cannot be used for commercial purposes. Use this sensor for factory applications. Do not use fluids other than the applicable fluid because accuracy cannot be guaranteed. Compressed air from the compressor contains drainage water, oil oxide, foreign substances, etc. so install a, air, and oil mist on the primary side (upper stream side) of the sensor. The sensor's meshing rectifies flow in the pipe. It does not out foreign substances, so provide a. Source pressure (Recommended circuit) When using a valve on the primary side of this product, use only an oilprohibit specification valve. This sensor could malfunction or fail if exposed to splattering grease, oil, etc. 2. Working Environment DANGER Filter Regulator Oil mist FSM Series (Micro alescer) Flammable environment Do not use this product in an explosive gas environment. The structure is not explosionproof, and explosions or fires could occur. WARNING Corrosive environment Do not use this product in an environment containing corrosive gases such as sulfurous acid. Design & Selection Ambient temperature, fluid temperature Use ambient temperature/fluid temperature in the to C within specified range. Do not use this product where temperature suddenly changes, even if ambient temperature is within specifications. Otherwise, dew could form. Maximum working pressure and specified flow rate range Applications exceeding the maximum working pressure and specified flow rate range may result in faults. Use this product only within the specified range. Dripproof environment This product's protective structure is IP or equivalent. Do not install it where it could be exposed to water, salt, dust, or cutting chips, or a compressed or decompressed environment. This product cannot be used where the temperature changes sharply or in a highly humid environment where internal damage could be caused by dew condensation. 3. Flow unit CAUTION This product's flow rate is measured at a mass flow unaffected by temperature or pressure. The unit is /min., but this is the display when the mass flow is converted to volumetric flow at 2 C barometric pressure ( kpa).. Withstand pressure CAUTION Withstanding pressure differs by each series. Selection time care must be taken.. Overflow CAUTION With each series, no problem will occur in the sensor, even in an overflow double the measurement range. If dynamic pressure is applied near the maximum working pressure (when a pressure difference exceeding the maximum working pressure is applied between primary and secondary sides), a problem could occur with the sensor. If dynamic pressure is applied, such as when a workpiece is filled for leakage inspection, provide a bypass circuit or restrictor so that dynamic pressure is not applied to the sensor.

6 FSMH/FSM/FSMV Series 6. Use for vacuum confirmation, etc. CAUTION When this product is used to confirm vacuum, etc., select the flow range based on the working vacuum pressure and vacuum nozzle. Refer to "Methods for calculating theoretic flow" on page 323 for details. When this product is used to confirm vacuum, etc., provide an air (filtration 3 m or less) upstream from suction to prevent the entry of foreign matter. (Use of a miniature dedicated inline is recommended for FSM or FSMV. Refer to page 3 for details.) When a fiber tube model with the FSMV Series is used in a flow range of /min or /min, pressure loss may increase because of working pressure and the required flow rate may not be reached. When this product is used to confirm vacuum, etc., consider the atmospheric dew point and this product's ambient temperature, and use under conditions in which dew does not condense in pipes. When this product is used to confirm vacuum, etc., response speed may be delayed by the capacity of the pipe between the vacuum nozzle and this product. In this case, take measures to reduce piping capacity. Wiring DANGER Use power voltage and output within the specified voltage. If voltage exceeding the specified voltage is applied, the sensor could malfunction or be damaged, or electrical shock or fire could occur. The load which exceeds the output rating do not use. Output damage and fire is caused. WARNING Check line color when wiring. Incorrect wiring connections could result in sensor damage, problems, and malfunctions, so check wire color against the instruction manual before wiring. Check wiring insulation. Check that wires do not contact other circuits and that there are no ground faults or insulation faults across terminals. Overcurrent could flow in and damage the sensor. Use a DC stabilized power supply, within the specified rating, insulated from the AC power supply. A noninsulated power supply could result in electrical shock. If power is not stabilized, the peak value could be exceeded. This could damage the product or impair accuracy. confirmation When this product is used for vacuum applications such as air supply, do not bend the tube near the push in joint. If stress is applied to the tube near the push in joint, insert an insert ring into the tube, and connect the tube to the push in joint. When the vacuum confirmation sensor is switched from a pressure sensor (switch) to a (switch), sensor output (switch output) logic will be reversed. See the drawing on right. Note that the PLC sequence program must be changed or revised. If source pressure or vacuum source is not supplied when device power is turned on, "flow " = "sensor output (switch output) on" status is set at the flow sensor (switch). Check that this is not a problem with the PLC sequence program, etc. Pressure sensor (switch) ON when higher than setting value Atmospheric pressure side Installation & Adjustment ON OFF High vacuum side (switch) ON when lower than setting value Flow side OFF Large flow rate side Stop the control device and machine devices, and turn the power off before wiring. Starting operation suddenly could result in unpredictable operation and hazards. Conduct an energized test with control devices and machine devices stopped, and set target switch data. Discharge electrostatic accumulated in personnel or tools before and during work. Connect and wire bendresistant material, such as robot wire material, for movable sections. Do not use this product at levels exceeding the power voltage range. If voltage exceeding this range is applied or if AC power is applied, the controller could rupture or burn. Install the product and wiring as far away as possible from sources of noise such as power distribution wires. Provide separate measures for surge applied to the power cable. Do not shortcircuit the load. This product could rupture or burn. ON sensor Pressure

7 FSMH/FSM/FSMV Series sensor Pressure CAUTION For metal body (stainless steel, aluminum) power supplies, use DCstabilized power separated from the AC primary side. Connect either the plus or minus side of the power supply to the F.G. A varistor (limit voltage V) is connected between the metal body internal power circuit and metal body to prevent dielectric breakdown of the sensor. Do not conduct a withstand voltage test or insulation resistance test between the internal power circuit and metal body. Disconnect wiring if this testing is required. An excessive potential difference between power and metal body will burn internal parts. After installation, connecting and wiring the metal body, electrical welding of the device or frame, or shortcircuit accidents, etc., could cause welding current, excessive high voltage caused by welding, or surge voltage, etc., to run through wiring or ground line connected between such devices, damaging lines or devices. Do any work such as electrical wiring after removing this device and disconnecting all electric wires connected to the F.G. Piping CAUTION When piping FSMH/FSM, check that the fluid's direction matches the direction indicated on the component. With the FSMV, check the direction of the arrow and pipe and install based on the fluid flow direction and switch operation. (Example of piping) Switch type Blow nozzle When installing the sensor on piping, see the torque below so that excessive screwin torque or load torque is not applied to the connection port. (Reference value) Port thread M Rc/8 (G/8) Rc/ + side: + side Blow side: side (Example of piping) Analog type Blow nozzle V V side: 3 to V Blow side: 3 to V Switch valve Switch valve Installation & Adjustment Flow direction Flow direction Flow direction Flow direction Tightening torque N m. to. 3 to 6 to 8 source source source source Attach a wrench to metal sections when tightening pipes so that pressure is not applied to the resin section. Check that sealing tape or adhesive does not get inside during piping. When winding fluorine resin sealing tape around threads, wind sealing tape once or twice, leaving two to three threads open at the end of the screw. Press tape with a nail tip to stick it onto threads.when using liquid sealing agent, leave one to two threads open from the end, and avoid applying too much. Check that the sealing agent does not get on device threads. (Well) Seal tape Solid/liquid sealant Solid liquid sealant (Poor) (Well) (Poor) Solid liquid sealant Connect a joint even when using the metal body type with the out side opened. The port could come off. When using a push in joint, accurately insert tube and confirm that it does not become dislocated even when pulled. Cut tube at a right angle with a dedicated cutter before use. Connect fiber tubing as follows (steps () to ()). () Set the collar to the very back. (2) Cut the end of fiber tubing at a right angle. Collar () Insert fiber tubing at the last position. () Pull the collar forward to lock it in place. out pipe with air blow to remove foreign substances, swarf, etc., before piping. The rectifier or sensor chip could be damaged if a large amount of foreign matter, swarf, etc., occurs. (3) Pass the collar through, and confirm that fiber tubing is correctly inserted during work. 6

8 FSMH/FSM/FSMV Series Adjustment CAUTION If switches are operated when flow is not stable, such as pulsating, operation may be unstable. In this case, provide sufficient margin between the two setting values and avoid setting switches in an unstable area. Confirm that switch operation is stable before use. When setting the FSMV Series switch output, use a flattip screwdriver fitting the trimmer groove (. wide,. long, and. deep) or a Phillips screwdriver for bits. The trimmer rotates 2 degrees and could break if turned more or forced when turned. Installation CAUTION This product can be installed in any direction; top, bottom, left, or right. FSMH/FSM Series Horizontal installation (through hole used) Bracket installation (*bracket used) Vertical installation (bottom side female thread used) * A dedicated bracket (option) is available. (Model no.: FSMLB) (Refer to page 28) FSMV Series For discrete miniature Install using the two penetration holes ( side. 3.2) on the Separate indicator FSMHD *, FSMAD * or FSMV D * common A mounting bracket and kit (option) are available for installing the separated display. Bracket model no.: PPD3KLD Bracket model no.: PPD3KDD 2nominal 3 P tight : One side installation foot (radial) 2nominal 3 P tight Installation hole machining dimensions 2M3 8 * : Both sides installation foot (parallel) Installation hole machining dimensions M3 Bracket model no.: PPD3KHSD : With panel mount bracket set and panel guard Installation hole machining dimensions Bracket model no.: PPD3KC : Operation protective cover Protective cover sensor Pressure Four M3 (length 6mm) setscrews for fixing included Protective cover holder 7

9 Input components Input components Input components FSMH/FSM/FSMV Series sensor Pressure WARNING Output accuracy is affected by temperature characteristics and heat generated when energized. Provide standby time of five minutes or more after turning power on when using. This product does not use flow control for four seconds after power is turned on to complete selfdiagnostics. Provide a control circuit and program that ignore signals for two seconds after power is turned on. CAUTION If a problem occurs during operation, immediately turn power off, stop use, and contact your dealer. Keep this product's flow within the rated flow range. Use this product within the working pressure range. If the output setting value is changed, control devices could operate unintentionally. Stop devices before changing settings. Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. Do not disassemble or modify this product. Doing so could result in faults. The case is made of resin. Do not use solvent, alcohol or any other detergent in cleaning to remove contamination, etc. The resin case could be corroded or damaged. Wipe off dirt with a rag soaked in a diluted neutral detergent solution and wrung out well. Pay attention to reverse currents caused by disconnected wires and wiring resistance. If other devices, including a, are connected to the same power sensor as the, and the switch output wire and power cable minus () side are shortcircuited to check the operation of the control panel s input device, or if the power cable s minus () side is disconnected, back current could flow to the flow sensor's switch output circuit and cause damage. During Use & Maintenance Take the following measures to prevent damage caused by reverse current: () Avoid centralizing current at the power cable, especially the minus side power cable, and use as thick wire as possible. (2) Limit the number of devices connected to the same power source as the. (3) Insert a diode parallel to the 's output line to prevent current backflow. () Insert a diode parallel to the power wire's minus () side to prevent current backflow. Pay attention to leading of surge current When power is shared with an inductive load that generates surges, such as a solenoid valve or relay, if the circuit is cut off while the inductive load is functioning, surge current could enter the output circuit and cause damage depending on where the surge absorption element is installed. Main circuit Circuit shutdown caused by disconnection or emergency stop Surge absorbing element (installed later) Relay Solenoid valve Surge current Surge absorbing element (integrated) PLC Output of PLC Take the following measures to prevent damage from surge current that is led in: () Separate the power supply for output including the inductive load, such as the solenoid valve and relay, and input, such as the. (2) If separate power supplies cannot be used, directly install a surge absorption element for all inductive loads. Remember that the surge absorption element connected to the PLC, etc., protects only that device. (3) Connect a surge absorption element to the following places on the power wiring as shown below as a measure against disconnections in unspecific areas. ON Diode to prevent reverse flow Control panel Other components Main circuit Current from other components Disconnection PLC input Test or short circuit When the devices are connected to a connector, the output circuit could be damaged by the above phenomenon if the connector is disconnected while the power is ON. Turn power OFF before connecting or disconnecting the connector. 8

10 FSMVFM Series Even if the flow range is exceeded, analog output will continue."hi" is displayed. Note that this is outside guaranteed precision. Analog output is also made when fluid flows in reverse. (This exceeds the guaranteed accuracy. Excluding the FSMV Series.) If the signal could be confused with the forward direction signal, check that there is no problem with the PLC sequence program. Miniature inline FSMVFM Series Do not use this product for vacuum circuits that could come in contact with acids, alkaline, carboxylic acid, other organic compounds, screwlock agent, solvent, or alcohol solutions, or air containing these substances. The body could be damaged, and cause a hazardous situation. Use designated tubing and plastic plugs. Tube outer diameter precision Polyamide tube: Within.mm Polyurethane tube (Up to 6): Within.mm ( 8 and over): Within +.. mm CKD recommended model Plastic plug Soft nylon tube Polyurethane rubber tube Urethane tube GWP*B Series F** Series U** Series NU/6 Series Read "Safety precaution on joint tube" for pushin joint. Regularly inspect the polyamide case for cracks, damage, and other deterioration. and replace as necessary. Filter element clogging will decrease vacuum source conductance. Regularly inspect, clean, and replace the element. During Use & Maintenance CAUTION Use a householdgrade neutral detergent to clean the body, then rinse with water. If small particles such as dust during suction enter the flow path, foreign matter will not be ed and may flow to the secondary side. Select a suiting the purpose. Replacing the element fixing pin 2 Element () Pull out the joint fixing pin using a blunt jig, etc. The joint fixing pin must reused, so do not lose it. (2) Pull out the joint. (3) Replace the element, and insert the joint. () Insert the joint fixing pin, and fix the joint. 3 sensor Pressure Return the container to atmospheric pressure before removing the body to clean or replace, etc., the element. The flow direction is oriented. Check the arrow on the body during reassembly. Check that the required vacuum degree is attained in the circuit after reassembly.

11 extremely small flow type Indicator type/analog output type FSMH Series (air/nitrogen gas) Flow rate range:.2 to,. to, 2. to, to m /min. sensor Pressure Indicator type specifications Indicator type Descriptions FSMHN/PML FSMHN/PML FSMHN/PML FSMHN/PML Flow rate range m /min. Note Precision Working conditions Indicator Installation Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature Linearity (display/analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Display min. unit Note 6 Output type Power voltage Current consumption Lead wire Functions Installation attitude Strait piping section Protective structure Protective circuit Note EMC directive Indicator type weight.2 to. to 2. to to air (JIS B to. 6. 2), compressed air (JIS B to. 6. 2) Note 2, N2 gas Note 3... to, %RH or less to (with no dew condensation) 3% F.S. or less (.MPa, 2, flow rate range to %F.S.) 3% F.S. or less (. to.mpa, where.mpa is reference).2%f.s./ or less ( to 3, where 2 is reference).%f.s. or less ms or less Note Flow display (3.digit 7segment display, orange), run and switch output display (orange).ml/min. Note.mL/min. Note Switch output 2 points (NPN or PNP open collector output, 3 VDC and ma or less, voltage drop of 2. V or less, PLC and relaycompatible) Analog output point ( to V voltage output, connected load impedance K and over) 2/2 VDC (.8 to 26.V) 6mA or less 3.7.2mm 2 x conductor m Flow display, flow display peak hold, switch output, analog output Horizontal or vertical Not required IEC standards IP Power supply reverse connection protection, switch output reverse connection protection, switch output load shortcircuit protection EN, EN662, EN2/3//6/8 Unit: g Model no. Port size (body material) FSMN/P FSMN/P FSMN/P FSMN/P 6A Rc/8 (stainless steel) 6G G/8 (stainless steel) Analog output type weight Model no. Port size (body material) 6A Rc/8 (stainless steel) 6G G/8 (stainless steel) FSMA FSMA FSMA FSMA Unit: g 28

12 Analog output type specifications (without display) Descriptions Flow rate range m /min. Note Precision Working conditions Installation Working fluid Max. working pressure Min. working pressure Withstanding pressure MPa MPa MPa Ambient temperature/humidity Working fluid temperature Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Output type Power voltage Current consumption Lead wire Functions Protective circuit Note Installation attitude Strait piping section Protective structure EMC directive Analog output type FSMH Series Specifications FSMHAML FSMHAML FSMHAML FSMHAML.2 to. to 2. to to air (JIS B to. 6. 2), compressed air (JIS B to. 6. 2) Note 2, N2 gas Note 3... to and %RH or less to (with no dew condensation) 3% F.S. or less (.MPa, 2, flow rate range to %F.S.) 3% F.S. or less (. to.mpa, where.mpa is reference).2%f.s./ or less ( to 3, where 2 is reference).%f.s. or less ms or less Note Power display (green) Analog output point ( to V voltage output, connected load impedance K 2/2 VDC (.8 to 26.V) ma or less 3.7.2mm 2 x 3 conductor m Analog output Power supply reverse connection protection Horizontal or vertical Not required IEC standards IP EN, EN662, EN2/3//6/8 and over) Note : Converted to volumetric flow at 2 barometric pressure (kpa) Note 2: When using compressed air, use clean air that complies to JIS B 832:23 Class.. to.6.2. Compressed air from the compressor contains drainage (water, oxidized oil, foreign matter, etc.). Install a (filtration: m), air (minimum pressure dew point: or less), and oil mist (maximum oil concentration:. mg/m 3 ) on the primary side of this product to maintain product functions. <Recommended circuit> Pneumatics pressure source Filter Regulator Oil mist (Micro alescer) FSM Series <Recommended component> : F Series Oil mist : M Series Note 3: Consult with CKD when using gas other than air or N2. Note : This product's protection circuit is effective only for specific misconnections and load shortcircuits. It does not provide protection for all misconnections. Note : Response time varies depending on the piping conditions. Note 6: This indicates the minimum display for the flow, and does not guarantee display accuracy. Separate indicator specifications (analog output type dedicated) Model no. Descriptions Available analog output type model no. Type of display Display min. unit Note 6 Indicator Output Power voltage Current consumption Lead wire Functions Ambient temperature/humidity Protective structure EMC directive Weight g FSMHD N/PML Separate indicator FSMHD N/PML FSMHD N/PML FSMHD N/PML FSMHAML FSMHAML FSMHAML FSMHAML Flow display (3.digit 7segment display, orange), run and switch output display (orange).ml/min. Note.mL/min. Note Switch output 2 points (NPN or PNP open collector output, 3 VDC and ma or less, voltage drop of 2. V or less, PLC and relaycompatible) Analog output point (V voltage output, connected load impedance K and over) 2/2 VDC (.8 to 26.V) ma or less (only indicator) 3.7.2mm 2 x conductor (m) Flow display, flow display peak hold, switch output, analog output to, 8%RH or less (no dew) IEC standards IP EN, EN662, EN2/3//6/8 Approx. 7 (including lead wire m) sensor Pressure Extremely small flow type 28

13 FSMH Series sensor Pressure How to order FSMH N ML A Output type 6A B Flow rate range <Example of model number> FSMHNML6AK Model: FSM indicator type A Switch output type : NPN output B Flow rate range :.2 to m /min. C Port size : Rc/8 (stainless steel body) D Option : With company certification FSM H D N ML K C Port size Separate indicator (analog output type dedicated) Model no. A Switch output type D Option B Flow rate range Symbol A Output type N P Symbol A Output type Descriptions A Analog output point N NPN output 2 points, analog output point P PNP output 2 points, analog output point B Flow rate range ML.2 to m /min. ML. to m /min. ML 2. to m /min. ML to m /min. C Port size 6A Rc/8 (stainless steel body) 6G G/8 (stainless steel body) * Refer to page 28 for model No. and dimensions of bracket (optional). D Option Blank K T (Note ) None With company certification With traceability certificate Note ) Proof of traceability, inspection results, and traceability diagram are included. Descriptions NPN output 2 points, analog output point PNP output 2 points, analog output point B Flow rate range ML.2 to m /min. ML. to m /min. ML 2. to m /min. ML to m /min. * Refer to pages 3 to 32 for the operation and dimensions, etc., Bracket for separate indicator PPD3 KLD A Bracket kit Symbol Descriptions A Bracket kit KLD Single foot bracket (L type) KDD Both sides foot bracket (parallel) KHSD Panel mount bracket set with cover KC Operation protective cover * Refer to pages 3 to 3 for dimensions and size of bracket. 282

14 Internal structure and parts list FSMHN/P** Indicator type stainless steel body 2 FSMH Series How to order / internal structure and parts list 3 No Parts name Front seat Case Lead wire with holder ( conductor) Module holder Sensor circuit board Stainless steel body 8 Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel No Parts name Sensor chip Rectifier Port Sensor gasket n circuit board Material Silicone Stainless steel Stainless steel Fluoro rubber FSMHA** Analog type stainless steel body 2 3 sensor Pressure No Parts name Front seat Case Lead wire with holder (3 conductor) Module holder Sensor circuit board Stainless steel body Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel No. 7 8 Parts name Sensor chip Rectifier Port Sensor gasket n circuit board Separate indicator FSMHD** Refer to Page 3 for internal structure of a separate indicator. Material Silicone Stainless steel Stainless steel Fluoro rubber Extremely small flow type 283

15 FSMH Series Dimensions (indicator type) Body material: Stainless steel FSMHN/P** 3.7 Lead wire length m penetrating 2M3 depth mm Rc/8. * G/8 is also available.. Dimensions (analog output type) Body material: Stainless steel FSMHA** 3.7 sensor Pressure Lead wire length m penetrating 2M3 depth mm Rc/8. * G/8 is also available.. * Refer to Page3 for dimensions of a separate indicator FSMHD**. 28

16 Dimensions (bracket) FSMH Series Dimensions Model no.: FSMLB 3 R.7 Analog output characteristics Analog output (V) FSMH** 8. Pressure loss characteristics Pressure loss (Pa) Pressure loss (Pa) F. S. flow Flow ( /min) FSMH*ML* FSMH*ML* Flow (m /min) 2 3 Flow (m /min) 6 3. Enclosed four M3 (length 6mm) setscrews for fixing (Note) If flow range is exceeded, maximum of 8V will be output..mpa.3mpa.mpa.3mpa For details on the display and operation section names, functions and operation methods, refer to page 36 for integrated display and page 38 for separated display. Pressure loss (Pa) Pressure loss (Pa) FSMH*ML* FSMH*ML* Flow (m /min) Flow (m /min).mpa.3mpa.mpa.3mpa 28 sensor Pressure Extremely small flow type

17 Indicator type/analog output type FSM Series, nitrogen gas (flow rate range:. to /min) Argon, carbon dioxide (flow rate range:. to /min) sensor Pressure FSM or N2 gas series Indicator type specifications Descriptions Flow rate range /min. Note Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature Indicator Precision Working conditions Installation Linearity (display/analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Display min. unit Note Output type Power voltage Current consumption Lead wire Functions Installation attitude Strait piping section Protective structure Protective circuit Note 3 EMC directive Indicator type weight (air, N2 gas) Discontinued Production of the FSM Series is scheduled to be discontinued on the end of March, 2. Indicator type The FSM2 Series is available as an alternative mode. FSMN/P FSMN/P FSMN/P FSMN/P Contact FSMN/P2 the CKD Sales FSMN/P Office for details. FSMN/P. to.. to. to to 2 to 2 to to air (JIS B to. 6. 2), compressed air (JIS B to. 6. 2) Note 2, N2 gas.7.7. to, %RH or less to (with no dew condensation) %F.S. or less (.MPa, 2, flow rate range to %F.S.) %F.S. or less (.7 to.7mpa,.mpa reference).2%f.s./ or less ( to 3, where 2 is reference) Unit: g Model no. Port size (body material) FSMN/P FSMN/P FSMN/P FSMN/P FSMN/P2 FSMN/P FSMN/P H H6 6A 6AA M 8A 8AA pushin (nylon) 6 pushin (nylon) Rc/8 (stainless steel) Rc/8 (aluminum) M (stainless steel) Rc/ (stainless steel) Rc/ (aluminum) Analog output type weight (air, N2 gas) Model no. Port size (body material) H pushin (nylon) H6 6 pushin (nylon) 6A Rc/8 (stainless steel) 6AA Rc/8 (aluminum) M M (stainless steel) 8A Rc/ (stainless steel) 8AA Rc/ (aluminum) FSMA 63 6 ms or less Note Flow display (3.digit 7segment display, orange), run and switch output display (orange) ml/min. Note.L/min. Note.L/min. Note FSMA FSMA FSMA FSMA2 FSMA FSMA %F.S. or less Switch output 2 points 6 8 Unit: g 3%F.S. or less ( 2%F.S. or less in flow %F.S. or less) (NPN or PNP open collector output, 3 VDC and ma or less, voltage drop of 2. V or less, PLC and relaycompatible) Analog output point ( to V voltage output and connected load impedance K and over) 2/2 VDC (.8 to 26.V) 6mA or less 3.7.2mm 2 x conductor m Flow display, flow display peak hold, switch output, analog output Horizontal or vertical Not required IEC standards IP Power supply reverse connection protection, switch output reverse connection protection, switch output load shortcircuit protection EN, EN662, EN2/3//6/8 room specifications (catalog No. CB33SA) Dust generation preventing structure for use in cleanrooms FSM FSM P7 P8 286

18 Analog output type specifications (air, N2 gas, without display) Descriptions Flow rate range /min. Note Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature Precision Working conditions Installation Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Output type Power voltage Current consumption Lead wire Functions Protective circuit Note 3 Installation attitude Strait piping section Protective structure EMC directive Pneumatics pressure source Analog output type FSMA FSMA FSMA FSMA FSMA2 FSMA Filter. to.. to. to to 2 to 2 to air (JIS B to. 6. 2), compressed air (JIS B to. 6. 2) Note 2, N2 gas.7.7. to, %RH or less to (with no dew condensation) %F.S. or less (.MPa, 2, flow rate range to %F.S.) %F.S. or less (.7 to.7mpa,.mpa reference).2%f.s./ or less ( to 3, where 2 is reference) Regulator %F.S. or less ms or less Note Power display (green) Analog output point ( to V voltage output, connected load impedance K 2/2 VDC (.8 to 26.V) ma or less 3.7.2mm 2 x 3 conductor m Analog output Power supply reverse connection protection Horizontal or vertical Not required IEC standards IP EN, EN662, EN2/3//6/8 Oil mist (Micro alescer) FSM Series <Recommended component> : F Series Oil mist : M Series FSM Series Specifications FSMA to 3%F.S. or less ( 2%F.S. or less in flow %F.S. or less) and over) Note : Converted to volumetric flow at 2 barometric pressure (kpa) Note 2: When using compressed air, use clean air that complies to JIS B 832:23 Class.. to.6.2. Compressed air from the compressor contains drainage (water, oxidized oil, foreign matter, etc.). Install a (filtration: m), air (minimum pressure dew point: or less), and oil mist (maximum oil concentration:. mg/m 3 ) on the primary side of this product to maintain product functions. <Recommended circuit> Note 3: This product's protection circuit is effective only for specific misconnections and load shortcircuits. It does not provide protection for all misconnections. Note : Response time varies depending on the piping conditions. Note : This indicates the minimum display for the flow, and does not guarantee display accuracy. Separate indicator specifications (analog output type dedicated) Model no. Separate indicator Descriptions FSMAD N/P FSMAD N/P FSMAD N/P FSMAD N/P FSMAD N/P2 FSMAD N/P FSMAD N/P Available analog output type model no. FSMA FSMA FSMA FSMA FSMA2 FSMA FSMA Type of display Flow display (3.digit 7segment display, orange), run and switch output display (orange) Display min. unit Note ml/min. Note.L/min. Note.L/min. Note Switch output 2 points Output (NPN or PNP open collector output, 3 VDC and ma or less, voltage drop of 2. V or less, PLC and relaycompatible) Analog output point (V voltage output, connected load impedance K and over) Power voltage Current consumption Lead wire Functions 2/2 VDC (.8 to 26.V) ma or less (only indicator) 3.7.2mm 2 x conductor (m) Flow display, flow display peak hold, switch output, analog output Ambient temperature/humidity Protective structure to, 8%RH or less (no dew) IEC standards IP EMC directive Weight g EN, EN662, EN2/3//6/8 Approx. 7 (including lead wire m) Indicator sensor Pressure 287

19 FSM Series sensor Pressure FSM for argon or carbon dioxide series Indicator type specifications Descriptions Flow rate range /min. Note Indicator Precision Working conditions Installation Working fluid Working pressure Withstanding pressure MPa MPa Ambient temperature / humidity Working fluid temperature Linearity (display/analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Display min. unit Note 6 Output type Power voltage Current consumption Lead wire Functions Installation attitude Strait piping section Protective structure Protective circuit Note EMC directive Model no. Port size (body material) 6A Rc/8 (stainless steel) 6AA Rc/8 (aluminum) M M (stainless steel) MA M (aluminum) Indicator type (argon, carbon dioxide) FSMN/P FSMN/P FSMN/P FSMN/P FSMN/P2 FSMN/P. to.. to. to to 2 to 2 to Argon, carbon dioxide Note 2 to. Note 3.7 to, %RH or less to (with no dew condensation) %F.S. or less (.MPa, 2, flow rate range to %F.S.) % F.S. or less ( to.mpa, where.mpa is reference).2%f.s./ or less ( to 3, where 2 is reference) Indicator type weight (argon, carbon dioxide) Model no. Port size (body material) 6A Rc/8 (stainless steel) 6AA Rc/8 (aluminum) M M (stainless steel) MA M (aluminum) ms or less Note Flow display (3.digit 7segment display, orange), run and switch output display (orange) ml/min. Note.L/min. Note.L/min. Note Switch output 2 points (NPN or PNP open collector output, 3 VDC and ma or less, voltage drop of 2. V or less, PLC and relaycompatible) Analog output point ( to V voltage output, connected load impedance K and over) 2/2 VDC (.8 to 26.V) 6mA or less 3.7.2mm 2 x conductor m Flow display, flow display peak hold, switch output, analog output Horizontal or vertical Not required IEC standards IP Power supply reverse connection protection, switch output reverse connection protection, switch output load shortcircuit protection FSMN/P FSMN/P FSMN/P FSMN/P FSMN/P2 FSMN/P Analog output type weight (argon, carbon dioxide) * All the pressure is gauge pressure. FSMA FSMA FSMA FSMA FSMA2 FSMA 7 7 %F.S. or less 7 7 EN, EN662, EN2/3//6/ %F.S. or less ( 2%F.S. or less in flow %F.S. or less) Unit: g Unit: g 288

20 Analog output type specifications (argon, carbon dioxide, without display) Descriptions Flow rate range /min. Note Precision Working conditions Installation Working fluid Working pressure Withstanding pressure FSM Series Specifications sensor Pressure MPa MPa Ambient temperature/humidity Working fluid temperature Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Output type Power voltage Current consumption Lead wire Functions Protective circuit Note Installation attitude Strait piping section Protective structure EMC directive Analog output type (argon and carbon dioxide) FSMA FSMA FSMA FSMA FSMA2 FSMA. to.. to. to to 2 to 2 to Argon, carbon dioxide Note 2 to. Note 3.7 to, %RH or less to (with no dew condensation) %F.S. or less (.MPa, 2, flow rate range to %F.S.) % F.S. or less ( to.mpa, where.mpa is reference).2%f.s./ or less ( to 3, where 2 is reference) %F.S. or less ms or less Note Power display (green) Analog output point ( to V voltage output, connected load impedance K 2/2 VDC (.8 to 26.V) ma or less 3.7.2mm 2 x 3 conductor m Analog output Power supply reverse connection protection Horizontal or vertical Not required IEC standards IP EN, EN662, EN2/3//6/8 * Refer to page 287 for the specifications of the separate indicator. 3%F.S. or less ( 2%F.S. or less in flow %F.S. or less) and over) * All the pressure is gauge pressure. Note : Converted to volumetric flow at 2 barometric pressure (kpa) Note 2: Dry gas (minimum pressure dew point or less) free of corrosive elements such as chlorine, sulfur, or acids. gas (solid particles. m or less, oil. mg/m 3 or less) free of dust or oil mist. Note 3: Argon and carbon gas models are used with positive pressure. If used with negative pressure (vacuum), accuracy may not satisfy specifications. When installing on a vacuum, be sure to restrict the secondary side of the product, or take other means so that the product does not achieve negative pressure. Note : Response time varies depending on the piping conditions. Note : This product's protection circuit is effective only for specific misconnections and load shortcircuits. It does not provide protection for all misconnections. Note 6: This indicates the minimum display for the flow, and does not guarantee display accuracy. 28

21 FSM Series sensor For air, N2 gas How to order FSM N A Output type H <Example of model number> FSMNH Model: FSM indicator type A Switch output type : NPN output B Flow rate range :. to. /min. C Port size : pushin joint (resin body) B Flow rate range C Port size A Symbol Output type A N P H H6 6A 6AA 8A 8AA M Descriptions Analog output point NPN output 2 points, analog output point PNP output 2 points, analog output point B Flow rate range. to. /min.. to /min.. to /min. to /min. 2 2 to 2 /min. to /min. to /min. C Port size pushin joint (resin body) * Excluding flow rate range, 6 pushin joint (resin body) * Excluding flow rate range, Rc/8 (stainless steel body) * Excluding flow rate range Rc/8 (aluminum body) * Subject to only flow rate range Rc/ (stainless steel body) * Subject to only flow rate range Rc/ (aluminum body) * Subject to only flow rate range M (stainless steel body) * Excluding flow rate range, * Refer to page 28 for model No. and dimensions of bracket (optional). Pressure Separated display: dedicated for analog output, common, nitrogen gas, argon, or carbon gas FSM A D N Model no. A Switch output type B Flow rate range Symbol A Output type N P Descriptions NPN output 2 points, analog output point PNP output 2 points, analog output point B Flow rate range. to. /min.. to /min.. to /min. to /min. 2 2 to 2 /min. to /min. to /min. * Refer to pages 3 to 32 for the operation dimensions, etc. 2

22 For argon, carbon dioxide How to order FSM N A Output type B 6A Flow rate range C AR Port size 6A 6AA Rc/8 (stainless steel body) Rc/8 (aluminum body) FSM Series How to order Symbol Descriptions A Output type A N P Analog output point NPN output 2 points, analog output point PNP output 2 points, analog output point B Flow rate range. to. /min.. to /min.. to /min. to /min. 2 2 to 2 /min. to /min. C Port size <Example of model number> FSMN6AAR Model: FSM indicator type A Switch output type : NPN output B Flow rate range : to /min. C Port size : Rc/8 (stainless steel body) D Working fluid : Argon D Working fluid M (stainless steel body) M * Excluding flow rate range (CO2), 2, M (aluminum body) MA * Excluding flow rate range (CO2), 2, D Working fluid AR Argon CO2 Carbon dioxide * Refer to page 28 for model No. and dimensions of bracket (optional). sensor Bracket for separate indicator PPD3 KLD A Bracket kit Symbol Descriptions A Bracket kit KLD Single foot bracket (L type) KDD Both sides foot bracket (parallel) KHSD Panel mount bracket set with cover KC Operation protective cover * Refer to pages 3 to 3 for dimensions and size of bracket. Pressure 2

23 FSM Series Internal structure and parts list FSMN/P*6A* Indicator type stainless steel body 2 3 No Parts name Front seat Case Lead wire with holder ( conductor) Module holder Sensor circuit board Stainless steel body 8 Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel No Parts name Sensor chip Rectifier Port Sensor gasket n circuit board Material Silicone Stainless steel Stainless steel Fluoro rubber FSMA*H6 Analog type resin body sensor Pressure No Parts name Front seat Case Lead wire with holder (3 conductor) Module holder Pushin cartridge joint 6 Sensor circuit board Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina No Parts name Resin body Sensor chip Rectifier Port Sensor gasket n circuit board Material Polyamide resin Silicone Stainless steel Stainless steel Fluoro rubber Separate indicator FSMAD** Refer to Page 3 for internal structure. 22

24 FSM Series Dimensions (indicator type) Body material: Polyamide resin, port size: FSM**H 3.7 Lead wire length m penetrating pushin joint sensor. Body material: Polyamide resin, port size: 6 FSM**H6 2M3 depth. 3.7 Pressure Lead wire length m 6 pushin joint penetrating. 2M3 depth. 2

25 Dimensions (indicator type) Body material: Stainless steel, aluminum FSM*** 3.7 FSM Series Dimensions Lead wire length m E A 7 C B 2 3. penetrating D. 2M3 depth., nitrogen gas Argon, carbon dioxide Model no. FSMN/P6A FSMN/PM FSMN/P6A FSMN/PM FSMN/P6A FSMN/PM FSMN/P6A FSMN/PM FSMN/P26A FSMN/P2M FSMN/P6A/6AA FSMN/P8A/8AA FSMN/P6A/6AAAR/CO2 FSMN/PM/MAAR/CO2 FSMN/P6A/6AAAR/CO2 FSMN/PM/MAAR/CO2 FSMN/P6A/6AAAR/CO2 FSMN/PM/MAAR/CO2 FSMN/P6A/6AAAR FSMN/PM/MAAR FSMN/P6A/6AACO2 FSMN/P26A/6AAAR/CO2 FSMN/P6A/6AAAR/CO2 Flow rate range /min. to.. to. to to 2 to 2 to to. to.. to. to to to 2 to 2 to A B C D E Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/ Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/8 Rc/8 sensor Pressure 2

26 FSM Series Dimensions (analog output type) Body material: Polyamide resin, port size: FSMA*H Body material: Polyamide resin, port size: 6 FSMA*H penetrating 2M3 depth M3 depth. Lead wire length m sensor Pressure Lead wire length m pushin joint 6 pushin joint 2 3. penetrating. 26

27 Dimensions (analog output type) Body material: Stainless steel, aluminum FSMA** 3.7 FSM Series Dimensions Lead wire length m C A 7 B 2 3. penetrating D E. 2M3 depth. Argon, carbon dioxide, nitrogen gas Model no. FSMA6A FSMAM FSMA6A FSMAM FSMA6A FSMAM FSMA6A FSMAM FSMA26A FSMA2M FSMA6A/6AA FSMA8A/8AA FSMA6A/6AAAR/CO2 FSMAM/MAAR/CO2 FSMA6A/6AAAR/CO2 FSMAM/MAAR/CO2 FSMA6A/6AAAR/CO2 FSMAM/MAAR/CO2 FSMA6A/6AAAR FSMAM/MAAR FSMA6A/6AACO2 FSMA26A/6AAAR/CO2 FSMA6A/6AAAR/CO2 Flow rate range /min. to.. to. to to 2 to 2 to to. to.. to. to to to 2 to 2 to A B C D E Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/ Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/8 Rc/8 sensor Pressure * Dimensions of separate indicator FSMAD** are same as FSMVD**. Refer to Page 3.

28 FSM Series Dimensions (bracket) Model no.: FSMLB 3 R.7 Analog output characteristics Analog output (V) FSM*** F.S. flow Flow ( /min) Enclosed four M3 (length 6mm) setscrews for fixing (Note) If flow range is exceeded, maximum of 8V will be output. For details on display and operation section names, functions, and operation methods, refer to page 36 for the integrated display and page 3 for the separated display. sensor Pressure 28