Small size flow controller

Transcription

1 size FCM Sensors / CONTENTS Product introduction 1366 Applications 1368 Series variation 1369 Safety precautions 1370 FCM 1376 Technical data 1385 Functional explanation, operation 1387 Custom 1403 sensor size 1365

2 FCM Series, high-speed, multifunction solution sensor Microcomputer attains high accuracies and multi-functions Stainless steel body Applicable fluids/flow rates to 50R/min to 50R/min to 10R/min to 20R/min. Weight/approx. 480g Rectifier mechanism improves low pressure loss and repeatability High-speed response micro machined sensor chip incorporated Resin body Applicable fluids/flow rates to 100R/min. Weight/approx. 200g Ultimate ideal multi-functions size FCM Series 1366

3 FCM Series Merging the small size FSM and small solenoid valve technologies. The small size FCM Series is equipped with sensor functions, proportional control functions and valve functions, all which have a high performance and cost feasibility. This series supports various applications. Compatible with various fluid types This series supports various gases including air, nitrogen, argon, oxygen, methane and propane. The new series is compatible with hydrogen and helium, allowing use with a variety of applications. New low differential pressure model The flow of combustion gas with low supply pressure, such as burner thermal power control, can now be controlled. and light weight The size is just 70H70D 30W. Install in a confined place or on a moving space to downsize and lighten a. Volume Compared to conventional approx. Weight Compared to conventional approx. 0.5 second high-speed control The platinum sensor chip using silicone micro machining achieves 0.5 second high-speed control, enabling use in various applications. Input signal Analog output (%FS) Dedicated power supply not required A 24VDC power voltage allows operation with generalpurpose single supplies. CKD s original rectifier control enhances the repeatability affecting flow controllability. Time (sec) Highly reliable flow control Repeatability Precision RoHS Directive compliant All substances, such as lead and hexavalent chrome, which could adversely affect the global environment, have been completely eliminated from the materials used in this controller. Digital display shows the control state at a glance The flow value is displayed digitally with three digits. The output state (switch output ON-OFF) is displayed in addition to the error display. A top/bottom reversed display can be selected according to the installation direction (option) Output display Parallel input type available as a standard 3-digit LED display Control with parallel input (PLC, etc., ON/OFF signal, 10- bit resolution 1024) is possible. An analog input/output device, such as a D/A converter, is no longer needed. Realize multi functions with microcomputer Error display function Errors are displayed and notified with electrical signals. Zero/span adjustment function Zero and span can be adjusted according to the usage methods. Preset input function Set up to four random flow rate points, and control the flow with 2-bit signal inputs from an external source (signals from PLC, etc.). Direct memory function Freely adjust the control flow with the production s operation keys even without input signals from an external source. Switch output function A switch output function using the flow rate s upper/lower limit settings is incorporated. (Built-in overcurrent protection) Flow rate integrating function Integral display of the flow rate (max. 6 digits) and pulse outputs for integration are possible. Automatic shutoff function The valves are automatically shutoff in an emergency, such as when an error occurs. sensor size 1367

4 FCM Series Useful in different fields This small size is used for different applications including machinery, automobile, precision device fields, and advanced fields such as semiconductors and biotechnology, medicine and food. Applicable fluids Dry air Flow (R/min.) Semiconductor 0.1 Wire bonding Ideal for wire bonding tension control requiring high accuracy Liquid crystal Glass floating transfer N2 Liquid crystal Ionizer purge gas flow control Compatibility with different flow rate ranges enables air flow rates to be controlled. Ideal for floating (non-contact) transfer of large FPD glass, etc. sensor Foods Filling package N2 gas control for laser oscillator and semiconductor manufacturing equipment Ideal for adding inert gas for food packages, etc. Semiconductor Purge gas flow control Ar Compatibility with different flow rate ranges enables flow rates of purge gas, etc., to be controlled. Automobile, etc. Control of argon gas flow for welding Compatibility with different flow rate ranges enables to control argon gas flow for welding. O2 Combustion gas H2 Glass processing Burner flame control The low-pressure gas supply enables burner flame, etc., to be controlled. 1368

5 FCM Series Series variation type Gas type Gas type Gas type Applicable fluids / flow control ranges Model no. FCM-9500 AI FCM-0001 AI FCM-0002 AI FCM-0005 AI FCM-0010 AI FCM-0020 AI FCM-0050 AI FCM-0100 AI (only resin) FCM-9500 AR FCM-0001 AR FCM-0002 AR FCM-0005 AR FCM-0010 AR FCM-0020 AR FCM-0050 AR FCM-9500 O2/LN/C1/C3 FCM-0001 O2/LN/C1/C3 FCM-0002 O2/LN/C1/C3 FCM-0005 O2/LN/C1/C3 FCM-0010 O2/LN/C1/C3 FCM-0002 H2/HE FCM-0005 H2/HE FCM-0010 H2/HE FCM-0020 H2/HE I/O specifications Applicable fluids AIR N2 Nitrogen Ar Argon O2 Oxygen 13A City gas CH4 Methane C3H8 Propane Hydrogen Helium Input Input signal: specifications bit bit bit bit Analog: 0-10V Preset: 4 points (2 bit) (Note) Analog: 0-5V Preset: 4 points (2 bit) (Note) Analog: 4-20mA Preset: 4 points (2 bit) (Note) Parallel: 10bit Flow control range (R/min.) to to to to to to to 50 3 to to to to to to to to to to to to to to to to to 20 Model no. FCM-*-*0AN FCM-*-*0AP FCM-*-*0SN FCM-*-*0SP FCM-*-*1AN FCM-*-*1AP FCM-*-*1SN FCM-*-*1SP FCM-*-*2AN FCM-*-*2AP FCM-*-*2SN FCM-*-*2SP FCM-*-*PAN FCM-*-*PAP FCM-*-*PSN FCM-*-*PSP Output method Body material (Note) Preset 8-point (3-bit) input is used customized. (The external integration reset signal input cannot be used.) Contact our CKD Sales Office for details. NPN PNP NPN PNP NPN PNP NPN PNP Analog Switch Analog Switch Analog Switch Resin SUS SUS SUS SUS Output Specifications Analog 1-5V Switch NPN PNP 1-5V NPN PNP 1-5V NPN PNP 1-5V NPN PNP Port size Resin ø6 push-in ø8 push-in SUS Rc1/4 9/16-18 UNF Rc1/4 9/16-18 UNF Rc1/4 9/16-18 UNF Rc1/4 9/16-18 UNF 1/4 inch Double barbed joint 1/4 inch JXR male joint Error output NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP NPN PNP sensor size 1369

6 sensor Flow controller Safety precautions Always read this section before starting use. Refer to Intro 67 for general precautions. size FCM Series 1. Working fluid DANGER Do not feed gas at the explosion limit. There is a risk of explosion. Before using hydrogen, be sure to purge piping with inert gas such as nitrogen or argon. Otherwise explosions could occur. Do not feed oxygen gas to wetted sections that are not oil-treated. There is a risk of fire. Even if the product has oil treatment, if gas other than oxygen gas has passed even once, do not use the product for oxygen gas. WARNING This product cannot be used as a business meter. This product does not comply with Measurement Laws, and cannot be used for commercial business. This product is for use with gases indicated on the model. Use of noncompatible fluids lowers product accuracy and controllability. If hydrogen or helium gas is passed to a series not designated for these, the sensor safety circuit may prevent operation. (If the safety circuit operates, the flow cannot be measured or controlled until power is turned off.) When mixing hydrogen or helium with another gas, be sure to note reverse gas flow. If hydrogen or helium is passed to a series not designated for these, the sensor safety circuit may prevent operation. (If the safety circuit operates, the flow cannot be measured or controlled until power is turned off.) When shutting off gas, provide shutoff valves and shut off each gas separately as shown below to prevent gas from flowing in reverse. Design & Selection Prevent entry of foreign matter into this product. If foreign matter gets into this product (dirt, water, or oil mist into pipes), accuracy and controllability could drop or the product could fail. If foreign matter could enter the product, install a, dryer, or oil mist upstream from the product. The mesh provided in this product is used to rectify the flow in pipes. It is not a for removing foreign matter. Compressed air from the compressor contains drainage (water, oxidized oil, foreign matter, etc.), so install a, air dryer, and oil mist (microalescer) upstream from the product. When using compressed air, use clean air that complies to JIS B :2003 Class to <Recommended circuit> Pneumatics pressure source dryer Filter Regulator Oil mist FCM Series When using a valve on the primary side of this product, only use an oil-prohibit specification valve. This controller could malfunction or fail if subject to splattering grease or oil, etc. Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. Depending on the fluid, retaining the fluid for a long time could adversely affect the performance. Do not seal the fluid in the pipe for long periods of time. When using this controller for liquefied gas such as propane gas, evaporate the gas. This controller could fail if liquefied gas is fed. When using this product to control burner air-fuel ratio, take measures in the design stages to prevent backfire, and to prevent adverse effect to this product even if a backfire should occur. A rise in the pipe's internal pressure and flame caused by a burner's backfire could damage this product. Gas supply source Gas supply source FCM Series (Hydrogen/helium) FCM Series (Other than hydrogen/helium) Shut off valve Shut off valve Confirm that the fluid supply line's pressure is within the working differential pressure range before starting use. If the main pressure is low, or the secondary pressure is high, the differential pressure will be lost and the fluid will not flow. 1370

7 2. Working environment WARNING Corrosive environment Do not use this product in an environment containing corrosive gases such as sulfurous acid. Ambient temperature, fluid temperature Keep the ambient temperature and fluid temperature within 0 to 50 C. Even if the temperature is within the specified range, do not use this product if the ambient temperature and fluid temperature could suddenly change and cause dew to condense. Guaranteed withstanding pressure and operating pressure difference range Using this product at a level exceeding the guaranteed withstanding pressure and operating pressure difference could cause damage. Follow the specified range. The differential pressure will be lost and the fluid will not flow if the main pressure is low or if the secondary pressure is high. Drip-proof environment This product's protective structure is IP40 or equivalent. Do not install it where it could be subject to water, salt, dust, or cutting chips, or a compressed or decompressed environment. This product cannot be used where the temperature changes sharply or in a highly humid environment as dew condensation in the product could cause damage. This product's solenoid proportional valve does not have a complete close-stop. If a complete close-stop is required, provide a separate external shutoff valve. When the external shutoff valve is closed, wait with this product's valve fully closed (set flow rate: zero). If this product is left in normal control while this external shutoff valve is closed, an instant overflow could occur when the external shutoff valve is opened. When using for applications that turn ON/ OFF at a high frequency, the life of the proportional valve may be shortened depending on use. Contact CKD when using for applications that turn ON/ OFF at a high frequency. Do not install this product at a place that moves or vibrates. Vibration or impact could cause this controller to malfunction. CAUTION Check the leakage current to prevent malfunction caused by current leaking from other controllers. When using a PLC, etc., this product could malfunction because of leakage currents. Design & Selection FCM Series Individual Precautions Due to wiring, the current input power ground and signal common are the same. When driving several of these products with one PLC and D/A unit, depending on the D/A unit's circuit, the correct signal may not be input because of wiring problems. Consult with the PLC maker before using. Current input is used with input signal 1-5 V, but unlike other voltage input, the input impedance is small at 250Ω, so a signal generator that matches this impedance must be used. Monitor the pipe's pressure loss When piping this product, check that the differential pressure between the upstream side and downstream side is within the operating pressure difference range (refer to pages 1377, 1379). Controller may not operate properly if used outside of the operating pressure difference range. Operation may not be as expected if there is an orifice or restriction on the secondary side (downstream) of the product. Care must be taken. If the primary or secondary pressure of this product repeatedly fluctuates, the ability to track the product's control may be lost, and the flow control may become unstable. 3. Flow unit CAUTION This controller's flow rate is measured with mass flow not affected by pressure. The unit isr/min., that is the mass flow converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). sensor size 1371

8 FCM Series Installation & Adjustment 1. Wiring DANGER Use power voltage and output within the specified voltage. If voltage exceeding the specified voltage is applied, the sensor could malfunction or be damaged, or electrical shock or fire could occur. Do not use a load exceeding the output rating. Failure to observe this could result in output damage or fire. WARNING Check the connector pin and cable conductor wire color when wiring. Incorrect connections could result in sensor damage, problems, and malfunctions, so check the wire color against the instruction manual before wiring. Check wiring insulation. Check that wires do not contact other circuits, that there is no ground fault, and that the insulator between terminals is not defective. An overload could flow to the product, and result in damage. Use stabilized DC power completely separated from the AC primary side for stainless steel construction. Connect either the plus or minus side of the power supply to the FG. A varistor (limit voltage. 40 V) is connected between the stainless steel internal power circuit and stainless steel device to prevent dielectric breakdown of the sensor. Do not conduct a withstand voltage test or insulation resistance test between the internal power circuit and stainless steel device. Disconnect wiring if this testing is required. An excessive potential difference between the power and stainless steel device will cause the internal parts to burn. After installing, connecting, and wiring the stainless steel device, electrical welding of the device or frame or short-circuit accidents, etc., could cause the welding current, the excessive high voltage caused by welding, or a surge voltage, etc., to run through wiring or ground wire connected between the above devices. This could result in damage to wires or devices. Conduct any work such as electrical welding after removing this device and disconnecting all electric wires connected to the FG. sensor Use a DC stabilized power supply, within the specified rating, insulated from the AC power supply. Failure to insulate the power supply could result in electric shock. If power is not stabilized, the peak could be exceeded during the summer. This could damage this product or cause accuracy to drop. Stop controller and devices, and turn power OFF before wiring. Starting operation suddenly could result in unpredictable operation and hazards. Conduct an energized test with controllers and devices stopped, and set target switch data. Discharge any static electricity accumulated by personnel or tools before and during work. Connect and wire bending resistant material, such as robot wire material, for movable sections. Do not use this controller at levels exceeding the power voltage range. If voltage exceeding the specified range is applied, or if an AC power (100 VAC) is applied, the controller could break or burn. Separate this product and its wiring as far away from sources of noise such as power distribution wires. Provide separate measures for surge applied to the power cable. Do not short-circuit the load. This product could break or burn. CAUTION The option shield cable connector is a shielded wire. Insulate wires that are not being used so that they do not contact other wires, including shielded wires. If inadvertently connected to the ground, etc., the controller could malfunction or break. Check the direction and fit the D-sub connector into the back. Lock the D-sub connector so that it does not dislocate. Before loosening the lock, fix the fixing block with a tool, etc. DIGITAL MASS FLOW CONTROLLER Extending the cable When extending the cable longer than 3m, the wiring resistance could cause the analog output and analog input signal error to increase and the control to become unstable. Using with a length within 3m is recommended. MADE IN JAPAN 1372

9 FCM Series Installation & Adjustment 2. Piping CAUTION Pipe based on the fluid direction and the direction indicated on the device. Tightening the 4S or 4RM port size (hydrogen, helium model) joint (1) Tightening the joint 4RM (1/4 inch JXR male joint) When gasket material is nickel or SUS316 Tighten the nut by hand until the gasket contacts the bead, then tighten 1/8 of a turn using a tool. Nut 4S (double-barbed joint) Confirm that the front ferrule, back ferrule, and nut are correctly attached, and insert tubing until it contacts the back of the main body. Tighten the nut by hand as far as possible, then tighten 1 1/4 of a turn using a tool. Front ferrule Before piping, clean pipes with compressed air to remove any foreign matter of cutting chips, etc. The rectifying unit or platinum sensor could be damaged if foreign matter or cutting chips get in. When attaching piping to this product, use the following torques as reference so that excessive screwing torque or load torque is not applied to the connection port. Port thread Rc1/4 9/16-18UNF Gasket Back ferrule Holder Bead When piping, put a wrench, etc., on the stainless steel device so that force is not applied to the resin section. Nut Tightening torque N m 6 to 8 6 to 8 Tube Check that sealing tape or adhesive does not get inside when piping. When connecting pipes, wrap sealing tape in the opposite direction from threads starting 2 mm inside from the end of piping threads. If sealing tape protrudes from pipe threads, it could be cut when screwed in. This could cause the tape to enter the solenoid valve and lead to faults. When using a liquid sealing agent, check that it does not get on resin parts. Otherwise resin could be damaged. Otherwise resin could be damaged. Sealant may stick to threads when piping is removed. Be sure to remove sealant before repiping. Connect a joint even when using the stainless steel device with the OUT side opened. The port could come off. When using resin construction, do not bend the tube near the push-in joint. If strain could be applied to the tube near the push-in joint, attach an insert ring onto the tube and insert into the push-in joint. When using resin construction, accurately insert the tube and confirm that it does not dislocate even when pulled. Cut the tube at a right angle with a dedicated cutter before using. After piping, confirm that no gas is leaking. When using this product for oxygen gas, monitor the following points. Piping work must be completed by personnel with expertise on handling oxygen gas. Use oil-treated pipes. Remove any dirt or burrs from piping before attaching to this product. Attach a to the primary side of this product. sensor size 1373

10 FCM Series During Use & Maintenance sensor WARNING Output accuracy is affected by the temperature characteristics and heat self-generated when energized. Provide a standby time (10 minutes or more after turning power ON) when using. CAUTION This product uses a micro-sensor chip, and must be installed where it will not be subject to dropping, impact or vibration. Handle this product as a precision device during installation and transportation. If a failure occurs during operation, turn power OFF immediately and stop use. Contact your dealer. This product does not control the flow for two seconds after power is turned ON so it completes self-diagnosis. Provide a control circuit and program that ignore signals for two seconds after power is turned ON. Keep this product's flow within the rated flow range. Use this product within the operating differential pressure range. When the setting is changed, control devices could operate unintentionally. Stop devices before changing settings. Do not disassemble or modify this product. Doing so could result in faults. This case is made of resin. Do not use solvent, alcohol or any other cleaning agent to remove contamination, etc., or the resin case could be corroded or damaged. Wipe off any dirt with a rag soaked in a diluted neutral detergent solution and wrung out well. Monitor leading of the surge current When controller power is shared with an inductive load that generates a surge, such as a solenoid valve or relay, if the circuit is cut off while the inductive load is functioning, the surge current could enter the output circuit and cause damage depending on where the surge absorption element is installed. This product Diode to prevent reverse flow Control panel (2) Limit the number of devices connected to the same power as this product. (3) Insert a diode in serial with the 's output cable to prevent reversal of current. (4) Insert a diode in serially with this product's power cable to prevent reverse flow of the current. Monitor leading of the surge current When controller power is shared with an inductive load that generates a surge, such as a solenoid valve or relay, if the circuit is cut off while the inductive load is functioning, the surge current could enter the output circuit and cause damage depending on where the surge absorption element is installed. Flow controller Main circuit Surge absorbing element (To be installed later) Relay Take countermeasures as followings to prevent damage caused by surge current leading. (1) Separate the power supply for output comprising the inductive load, such as the solenoid valve and relay, and input, such as the. (2) If separate power supplies cannot be used, directly install a surge absorption element for all inductive loads. Remember that the surge absorption element connected to the PLC, etc., protects only that device. (3) Connect a surge absorption element to the following places on the power wiring as shown below as a measure against disconnections in unspecific areas: Input components Input components Circuit cutoff with disconnection or emergency stop Solenoid valve Surge current Input components ON Surge absorbing element (Integrated) PLC PLC output Current from other device Main circuit Other device Disconnection PLC input Test or short circuit When components are connected with connectors, if a connector is dislocated during energizing, the output device could be damaged because of the reason above. Turn off the power before dislocating a connector. Take countermeasures as followings to prevent damages caused by reverse current. (1) Avoid centralizing current at the power cable, especially the minus side power cable, and use as thick cable as possible. Inspect the sensor at least once a year and confirm that it operates correctly. The sensor chip will degrade when used for a long time and cause the detected flow to vary. Periodically inspect the sensor chip. 1374

11 MEMO sensor size 1375

12 size FCM Series, nitrogen, argon, oxygen, city gas, methane, propane (flow rate range: 0.5 to 100R/min.) Hydrogen, helium (flow rate range: 0 to 20R/min.) sensor 1376 FCM Series, nitrogen, argon, oxygen, city gas, methane, propane Specifications Descriptions FCM- (*1) (*2) - (*3) (*4) (*5) Valve drive method Proportional solenoid valve When not energized: Closed O2 (oxygen) LN (city gas) Full scale flow Note 1 Applicable fluids Note 2 Port size/ Body material Control *3 Control range Responsiveness *1 Flow range 0 to 500mR/min. 0 to 1R/min. 0 to 2R/min. 0 to 5R/min. 0 to 10R/min. 0 to 20R/min. 0 to 50R/min. 0 to 100R/min. (only resin) 0 to 500mR/min. 0 to 1R/min. 0 to 2R/min. 0 to 5R/min. 0 to 10R/min. Compressed air, nitrogen Argon Oxygen (oil-prohibited specifications) City gas (13A) Note 3 Methane (CH4 100%) Propane (C3H8 100%) ø6 push-in, resin (excluding 50, 100 R/min.) ø8 push-in, resin Rc1/4, stainless steel 9/16-18UNF, stainless steel 9500 to 0020, L9500 to L to 0100 Precision Repeatability Temperature characteristics Pressure characteristics Standard differential pressure Note 4 Operating differential pressure range Note 5 Pressure Withstanding H6/H8 (resin body) *3 pressure 8A/UF (SUS body) Ambient temperature/humidity Input 0 signal/ 1 *4 pre-set 2 input P I/O *1 Output signal Standard model Low pressure differential model (Only stainless steel) *2 * L9500 L0001 L0002 L0005 L0010 AI AR O2 LN C1 C3 H6 H8 8A UF AN AP SN SP Flow display Display method Display range, display resolution Integrating functions Power supply Power voltage Current consumption Installation attitude Wet area material Weight *3 *3 H6/H8 (resin body) 8A/UF (SUS body) H6/H8 (resin body) 8A/UF (SUS body) Protective structure Protective circuit Note 6 EMC directive AI (air, nitrogen) AR (argon) C1 (methane) C3 (propane) 3 to 100%F.S. Within 0.5sec. at setting ±5%F.S. (TYP) Within 1sec. at setting ±5%F.S. (TYP) ±3%F.S. or less ±1%F.S. or less ±0.1%F.S./ C or less (25 C reference) ±1%F.S. or less per 98kPa (standard differential pressure reference) Refer to the separate table Refer to the separate table 490kPa 980kPa 0 to 50 C, 90%RH or less (no dew) 0 to 10 VDC (6.7kΩ) / 4 points (2 bit) 0 to 5 VDC (10kΩ) / 4 points (2 bit) 4 to 20 madc (250Ω) / 4 points (2 bit) Parallel 10bit / None Analog output: 1-5V (connected load impedance 500kΩ and over) Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less Analog output: 1-5V (connected load impedance 500kΩ and over) Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Switch output: NPN open collector output, 50mA or less, voltage drop 2.4V or less Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less 3-digit 7-segment LED, Display precision: control precision 1 digit Refer to the separate table Refer to the separate table 24 VDC ±10% (safety power supply with ripple ratio 2% or less) 250mA or less Free Polyamide resin, fluoro rubber, stainless steel, alumina, semiconductor silicone, solder Stainless steel, fluoro rubber, alumin.a, semiconductor silicone, solder Approx. 200g Approx. 480g IEC standards IP40 Power supply reverse connection prevention, switch output reverse connection prevention, switch output load short-circuit protection EN55011, EN , EN /3/4/6/8

13 FCM Series Specifications Pressure Standard differential pressure / operating differential pressure Note 4, 5 (Standard model) Applicable fluids *2 AI AR O2 LN/C1 C3 Standard differential pressure (kpa) Operating differential pressure (kpa) Standard differential pressure (kpa) Operating differential pressure (kpa) Standard differential pressure (kpa) Operating differential pressure (kpa) Standard differential pressure (kpa) Operating differential pressure (kpa) Standard differential pressure (kpa) Operating differential pressure (kpa) (Low pressure differential model) Applicable fluids *2 AI/O2 LN/C1 C3 Note 7 Display / integration Flow display Integrating functions Standard differential pressure (kpa) Operating differential pressure (kpa) Display range Display resolution Display range Display resolution Pulse output rate Flow rate range * to to to to to to to to to to to to to to to to to to to to to to to to to to to to to to L9500 Flow rate range *1 L9500 L0001 L0002 L0005 L to L to L to 50 Flow rate range * L L to to Note 1: Converted to volumetric flow at 20 C 1 barometric pressure (101kPa) Note 2: Use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist. When using compressed air, use clean air that complies to JIS B :2003 Class to Compressed air from the compressor contains drainage (water, oxidized oil, foreign matter, etc.). Install a, air dryer (minimum pressure dew point: 10 C or less), and oil mist (maximum oil concentration: 0.1 mg/m 3 ) on the primary side of this product to maintain product functions. <Recommended circuit> Filter 0 to 500mR/min to 1.00R/min to 2.00R/min to 5.00R/min. 0.0 to 10.0R/min. 0.0 to 20.0R/min. 0.0 to 50.0R/min. 1mR/min mR 1mR 5mR Oil mist (Micro alescer) 0.01R/min R 0.01R 0.01R 0.01R/min R 0.01R 0.02R 0.01R/min R 0.01R 0.05R 0.1R/min R 0.1R 0.1R 0.1R/min R 0.1R 0.2R 0.1R/min R 0.1R 0.5R 0 to 100R/min. 1R/min R 1R 1R sensor Pneumatics pressure source dryer <Recommended component> : F Series Oil mist : M Series Regulator FCM Series Note 3: City gas 13 A is for methane (CH4) 88% gas generated from LNG. Note 4: The standard differential pressure is the differential pressure when this product is calibrated. Note 5: The operating differential pressure is the differential pressure required to operate this product normally. Note that this will differ according to the flow range and applicable fluid. Note 6: This product's protective circuit is effective only for specific incorrect connections and load short-circuits. It does not necessarily provide protection for all incorrect connections. Note 7: For the city gas low pressure line (1 to 2.5kPa), this is outside of the working differential pressure range. Note 8: This product cannot be used as a stop value which requires the internal valve leakage to be zero. Slight leakage is permitted for the specifications. Note 9: The analog output voltage's output impedance is approx. 1KΩ. The error with the output value will increase when the connected load's impedance is low. Check the error with the connected load's impedance before starting use. size 1377

14 FCM Series sensor FCM Series for hydrogen, helium Specifications Descriptions Valve drive method Full scale flow Note 1 Applicable fluids Note 2 Port size Control Pressure *3 Control range Responsiveness Precision Repeatability Temperature characteristics Pressure characteristics Standard differential pressure Note 3 Operating differential pressure range Note 4 Withstanding pressure Ambient temperature / humidity External leakage 0 Input signal/ 1 *4 pre-set input 2 P AN I/O *1 *2 Output signal H2 HE 8A UF 4S 4RM *5 Flow range 0 to 2R/min. 0 to 5R/min. 0 to 10R/min. 0 to 20R/min. Hydrogen Helium Rc1/4 9/16-18UNF 1/4 inch double barbed joint 1/4 inch JXR male joint AP SN SP Flow display Display method Display range, display resolution Integrating functions Power supply Power voltage Current consumption Installation attitude Wet area material Weight *3 8A/UF 4S/4RM Protective structure Protective circuit Note 5 EMC directive Proportional solenoid valve When not energized: Closed H2 (hydrogen) *1 FCM- (*1) (*2) - (*3) (*4) (*5) HE (helium) 3 to 100%F.S. Within 0.5sec. at setting ±5%F.S. (TYP) ±3%F.S. or less ±1%F.S. or less ±0.2%F.S./ C or less (25 C reference) ±1%F.S. or less per 98kPa (standard differential pressure reference) Refer to the separate table Refer to the separate table 980kPa 0 to 50 C, 90%RH or less (no dew) 1 x 10-6 Pa/m 3 /s or less (helium leak rate) 0 to 10 VDC (6.7kΩ) / 4 points (2 bit) 0 to 5 VDC (10kΩ) / 4 points (2 bit) 4 to 20 VDC (250Ω) / 4 points (2 bit) Parallel 10bit / None Analog output: 1-5V (connected load impedance 500kΩ and over) Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less Analog output: 1-5V (connected load impedance 500kΩ and over) Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Switch output: NPN open collector output, 50mA or less, voltage drop 2.4V or less Error output: PNP open collector output, 50mA or less voltage drop 2.4V or less Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less 3-digit 7-segment LED, display : control precision ±1 digit Refer to the separate table Refer to the separate table 24 VDC ±10% (safety power supply with ripple ratio 1% or less) 270mA or less Free Stainless steel, fluoro rubber, alumin.a, silicone, solder Approx. 480g Approx. 560g IEC standards IP40 Power supply reverse connection prevention, switch output reverse connection prevention, switch output load short-circuit protection EN55011, EN , EN /3/4/6/8 1378

15 Pressure Standard differential pressure / operating differential pressure H2 HE Display / integration Flow display Integrating functions Standard differential pressure (kpa) Operating differential pressure (kpa) Standard differential pressure (kpa) Operating differential pressure (kpa) Display range Display resolution Display range Display resolution Pulse output rate Flow rate range * to to to to to to to to 150 Flow rate range * to 2.00R/min. 0.01R/min R 0.01R 0.02R 0.00 to 5.00R/min. 0.01R/min R 0.01R 0.05R 0.0 to 10.0R/min. 0.1R/min R 0.1R 0.1R FCM Series Specifications Note 1: Converted to volumetric flow at 20 C 1 barometric pressure (101kPa) Note 2: Use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist. Note 3: The standard differential pressure is the differential pressure when this product is calibrated. Note 4: The operating differential pressure is the differential pressure required to operate this product normally. Note that this will differ according to the flow range and applicable fluid. Note 5: This product's protection circuit is effective only for specific misconnections and load short-circuits. It does not provide protection for all misconnections. Note 6: This product cannot be used as a stop value which requires the internal valve leakage to be zero. Slight leakage is permitted for the specifications. Note 7: The analog output voltage's output impedance is approx. 1KΩ. The error with the output value will increase when the connected load's impedance is low. Check the error with the connected load's impedance before starting use. sensor size Applicable fluids *2 0.0 to 20.0R/min. 0.1R/min R 0.1R 0.2R/ 1379

16 FCM Series sensor FCM Series, nitrogen, argon, oxygen, city gas, methane, propane How to order FCM 9500 AI H6 0 AN R 1 B T Model no. FCM AC1 A Flow rate range <Example of model number> FCM-0001AI-H81ANR1BK Discrete option model no. B Working fluid C Port, body material Model: size FCM A Flow rate range : 0 to 1R/min. B Working fluid : Compressed air, nitrogen C Port/body material : Push-in (ø8), resin body D Input specifications : Analog 0-5 VDC E Output specifications : 1-5V analog, error (NPN) F Display direction : Reverse direction G Cable : 1m H Bracket : With bracket I Traceability : With inspection results Note on model no. selection Note 1: Refer to the dimensions on page 1382 for the 9/16-18UNF screw shape. Symbol Descriptions AC1 Analog 9-conductor, cable 1m AC3 Analog 9-conductor, cable 3m PC1 Parallel 15-conductor, cable 1m PC3 Parallel 15-conductor, cable 3m LB1 Bracket D Input specifications E Output specifications F Display direction I Traceability H Bracket G Cable Symbol A Flow rate range Working fluid L9500 L0001 L0002 L0005 L0010 B AI AR O2 LN C1 C3 Standard model Low pressure differential model (Only stainless steel) Working fluid AN AP SN SP F Blank R Cable G Blank 1 3 Traceability I Blank T K 0 to 0.5R/min. 0 to 1R/min. 0 to 2R/min. 0 to 5R/min. 0 to 10R/min. 0 to 20R/min. 0 to 50R/min. 0 to 100R/min. (only resin body) 0 to 0.5R/min. 0 to 1R/min. 0 to 2R/min. 0 to 5R/min. 0 to 10R/min. Display direction Bracket H Blank B Descriptions AI AI AR AR O2 Compressed air, nitrogen gas Argon Oxygen (oil-prohibited specifications) City gas (13A) Methane (CH4) Propane (C3H8) C Port, body material Working fluid H6 Push-in (ø6), resin body (Excluding flow rate range; 0050, 0100) H8 Push-in (ø8), resin body 8A Rc1/4, stainless steel body UF Note 1 9/16-18 UNF, stainless steel body D Input specifications 0 Analog 0-10 VDC 1 Analog 0-5 VDC 2 Analog 4-20mA DC P Parallel 10bit E Output specifications 1-5V analog error (NPN) 1-5V analog error (PNP) Switch (NPN), error (NPN) Switch (PNP), error (PNP) Positive direction Reverse direction None 1m 3m None With bracket O2 LN LN C1 C1 C3 C3 None Traceability Certificate, diagram, inspection results included Inspection results included 1380

17 For hydrogen, helium How to order FCM 0002 H2 8A 0 AN R 1 B T Model no. FCM AC1 A Flow rate range <Example of model number> FCM-0002H2-8A1ANR1BK Discrete option model no. B Working fluid C Port A Flow rate range : 0 to 2R/min. B Working fluid : Hydrogen C Port : Rc1/4 D Input specifications : Analog 0-5 VDC E Output specifications : 1-5V analog, error (NPN) F Display direction : Reverse direction G Cable : 1m H Bracket : With bracket I Traceability : With inspection results Symbol AC1 AC3 PC1 PC3 LB1 D Input specifications Descriptions Analog 9-conductor, cable 1m Analog 9-conductor, cable 3m Parallel 15-conductor, cable 1m Parallel 15-conductor, cable 3m Bracket E Output specifications F Display direction I Traceability H Bracket G Cable Symbol A Flow rate range Working fluid to 2R/min to 5R/min to 10R/min to 20R/min. B Working fluid C H2 HE Port 8A UF 4S 4RM D E Input specifications 0 Analog 0-10 VDC 1 Analog 0-5 VDC 2 Analog 4-20mA DC P Parallel 10bit Output specifications AN AP SN SP Display direction F Blank R Cable G Blank 1 3 Bracket H Blank B I Blank T K Hydrogen Helium Working fluid Rc1/4 9/16-18UNF 1/4 inch double barbed joint 1/4 inch JXR male joint Descriptions 1-5V analog error (NPN) 1-5V analog error (PNP) Switch (NPN), error (NPN) Switch (PNP), error (PNP) Positive direction Reverse direction None 1m 3m None With bracket Traceability H2 H2 FCM Series How to order HE HE None Traceability Certificate, diagram, inspection results included Inspection results included sensor size 1381

18 FCM Series Dimensions Body material: Resin, port size: ø6, ø8 FCM-*-H8/H6* The display direction is reverse for the FCM-*-*R* #4-40UNC D sub-connector 15 pin/plug Port size ø6 push-in joint or ø8 push-in joint M3 depth 5 sensor Body material: Stainless steel, port size: Rc1/4, 9/16-18UNF FCM-*-8A/UF The display direction is reverse for the FCM-*-*R* #4-40UNC D sub-connector 15 pin/plug Port size Rc1/4 or 9/16-18UNF 9/16-18UNF 2.5 ø15.6 Mesh Sealant plane M3 depth /16-18UNF Effective length of threaded part

19 Dimensions Port size: 1/4 inch double barbed joint FCM-*-4S FCM Series Dimensions 16 2-#4-40UNC D sub-connector 15 pin/plug The display direction is reverse for the FCM-*-*R* Port size (121.4) 1/4 inch Double barbed joint M3 depth 5 Port size: 1/4 inch JXR male joint FCM-*-4RM sensor 16 2-#4-40UNC D sub-connector 15 pin/plug The display direction is reverse for the FCM-*-*R* (117.8) Port size 1/4 inch JXR male joint size 2-M3 depth

20 FCM Series Bracket (floor installation type) Discrete model no.: FCM-LB1 4-R Cable optional dimensions 9-conductor cable for analog input type Discrete option model no.: FCM-AC1, AC ø R Shield wire * Connect the shield cable to the "- power supply" (0V). sensor D-sub socket pin No Isolator color Brown Orange Yellow - Red Gray White - Name Type of input Pre-set input signal Bit 1 Bit 2 Integration reset signal conductor cable for parallel input type Discrete option model no.: FCM-PC1, PC3 Power supply + Vacant Vacant Vacant Vacant Vacant Common +24 VDC 0-10 VDC Input signal 0-5 VDC Note: The No. 1 pin common is common for the preset input and integration reset signal (No. 1 to 3 pins) (ø10) (ø6) (ø10) (ø6.5) AWG26 15-AWG Vacant Analog output Vacant 1-5 VDC ma DC Green Switch output NPN or PNP output Shield wire * Connect the shield cable to the "- power supply" (0V). 14 Blue Error output NPN or PNP output 15 Black Power supply - (0V) D-sub socket pin No. Isolator color Name Type of input Brown Orange Yellow Parallel input signal 4 Purple 5 Red Power supply + 6 Light blue 7 Pink 8 White (with black line) Parallel input signal 9 Red (with black line) 10 Gray Common 11 White Bit 1 Bit 2 Bit 3 Bit VDC Bit 5 Bit 6 Bit 7 Bit 8 Bit Green (with black line) Parallel input signal Bit 10 Analog output 1-5 VDC Green Switch output NPN or PNP output Blue Error output NPN or PNP output 15 Black Power supply - (0V) 1384 Note: The No. 10 pin common is common for the parallel input signals (No. 1 to 4, 6 to 9, 11, 12 pins).

21 Wiring methods FCM-*-*0/1/2 AN* (Analog input, analog output + error output type NPN output) Main circuit Examples of internal circuit and load connection Parallel input type Caution: Care must be taken for incorrect wiring. 5 pin (power supply +) 11 pin (analog input) 1 pin (pre-set bit 1) 2 pin (pre-set bit 2) 3 pin (integration reset) 10 pin (common) Signal generator + FCM-*-*0/1/2 AP* (Analog input, analog output + error output type PNP output) Main circuit Output short circuit protection 5 pin (power supply +) 13 pin (monitor output) 14 pin (error output) 11 pin (analog input) 1 pin (pre-set bit 1) FCM Series Wiring methods max50ma Signal generator + 13 pin (monitor output) 2 pin (pre-set bit 2) Load Load Output short circuit protection 14 pin (error output) Load 15 pin (power supply-) max50ma Load 3 pin (integration reset) 10 pin (common) 15 pin (power supply-) FCM-*-*0/1/2 SN* (Analog input, switch output + error output type NPN output) FCM-*-*0/1/2 SP* (Analog input, switch output + error output type PNP output) Main circuit 5 pin (power supply +) 11 pin (analog input) 1 pin (pre-set bit 1) 2 pin (pre-set bit 2) 3 pin (integration reset) 10 pin (common) Signal generator + Main circuit Output short circuit protection 5 pin (power supply +) 13 pin (switch output) 14 pin (error output) 11 pin (analog input) 1 pin (pre-set bit 1) max50ma max50ma Signal generator + sensor Output short circuit protection 13 pin (switch output) 14 pin (error output) Load 15 pin (power supply-) max50ma Load max50ma 2 pin (pre-set bit 2) 3 pin (integration reset) 10 pin (common) 15 pin (power supply -) Load Load Connector pin arrangement (product side) (Analog input type) (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) (14) (15) The analog input type does not have the (4,) (6), (7), (8), (9) or (12) pins. size 1385

22 FCM Series sensor FCM-*-*PAN* (Parallel input, analog output + error output type NPN output) Main circuit 5 pin (power supply +) 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) 10 pin (common) 13 pin (monitor output) 14 pin (error output) 15 pin (power supply-) max50ma FCM-*-*PSN* (Parallel input, switch output + error output type NPN output) Main circuit Caution: Care must be taken for incorrect wiring. Output short circuit protection Output short circuit protection Examples of internal circuit and load connection Parallel input type 5 pin (power supply +) 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) 10 pin (common) 13 pin (switch output) 14 pin (error output) 15 pin (power supply-) Load Load max50ma Load Load max50ma + + FCM-*-*PAP* (Parallel input, analog output + error output type PNP output) Main circuit 5 pin (power supply +) 13 pin (monitor output) 14 pin (error output) 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) 10 pin (common) 15 pin (power supply-) max50ma FCM-*-*PSP* (Parallel input, switch output + error output type PNP output) Main circuit Output short circuit protection Output short circuit protection 5 pin (power supply +) 13 pin (switch output) 14 pin (error output) 12 pin (MSB bit 10) 11 pin (bit 9) 9 pin (bit 8) 8 pin (bit 7) 7 pin (bit 6) 6 pin (bit 5) 4 pin (bit 4) 3 pin (bit 3) 2 pin (bit 2) 1 pin (LSB bit 1) 10 pin (common) 15 pin (power supply-) max50ma max50ma Load Load Load Load + + Connector pin arrangement (product side) (Parallel input type) (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) (14) (15) 1386

23 FCM Series Functional explanation size FCM Series function Functional explanation Function Direct memory function Pre-set input function Analog input function Parallel input function Function of integration Descriptions The target is input with keys. Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys. When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source (signals from PLC, etc.). The flow can be controlled with an analog input signal. The flow rate is controlled with a parallel 10-bit (signal from PLC, etc.). Expensive input/output devices, such as a D/A converter, are not required. The flow is integrated. The following functions are used in addition to the integrated flow display. The solenoid valve is closed and stopped at the set integrated flow. Integrating pulse function (only switch output) Note 1 Switch ON at set integrated flow (only switch output) Note 1 How to reset integration Analog input type: External input, button operation Parallel input type: Only button operation Compatible models Analog input Parallel input Analog output Switch output Analog output Switch output (Note 1) (Note 1) Operation P1389, 1390 P1400 P1391 P1400 P1393 P1400 P1394 P1400 P1395 P1396 P1399 P1401 P1402 Switch output The following switch can be selected. (1) Tolerance mode: The switch turns ON when the level is within the tolerance (randomly set) of control target. (2) Range designation mode: The switch turns ON when the level is not within the designated flow rate range. (3) Integrating pulse: The integrated pulse is output during integration. (4) ON when higher than set integration: The switch turns ON at the set integrated flow. (Mode 1: Tolerance mode) (Mode 2: Range designation mode) H (+ tolerance) Input signal set value L (- tolerance) Output ON OFF (Mode 3: Integrating pulse) Approx. 50msec ON H (upper limit side) L (lower limit side) Output ON OFF (Mode 4: ON when set integration value and over) ON P1396 P1397 P1398 P1401 sensor OFF Refer to pages 1343 and 1345 for pulse output rate. OFF Set integration The input signal's zero point and span point is changed. (When invalid) (When valid) Input signal zero/span adjustment function Control flow 100% 100% Zero point (L) setting range 0 to 50% Span point (H) setting range 10 to 100% P1401 Zero point adjustment Automatic power off Error display function Error automatic shutoff 0% 1% Input signal The flow output zero point is adjusted. 0% 1% Input signal The flow rate display turns OFF if there are no operations for one minute. (Control does not stop when the auto power OFF function activates.) The error state is displayed. The following functions are used for the error display. Error output is turned ON if an error occurs Control stops automatically an error occurs If an error occurs, control is stopped, the valve is fully opened, and error output is turned ON. P1402 P1401 P1388 P1402 P1402 size Key lock Setting reset Setting changes are disabled to prevent incorrect operations. Settings are returned to defaults. Only input signal selection, switch output, input ( ) signal zero/span adjustment or auto power off P1399 P

24 FCM Series sensor Names and functions of display and operation section Output display (red) "F" is displayed when confirming the function setting. " " is displayed when switch output is ON. (Only switch output) * Blinks when overcurrent is detected. * The display does not blink with integrated pulse output. E is displayed when error output is ON. * Blinks when overcurrent is detected. * If an upper/lower limit applies when setting the function, or when displaying both the high-order digit and low-order digit of the integrated flow display, or is displayed. + Key Press to set the setting mode. Press to set the setting item. Press to change to the display of integration. Key (ENT key) Press to set the value. Press to unlock the key lock. Press to execute integration reset. Error code table Error display Cause + 3-digit LED display (green) The instantaneous flow rate display and function setting details are displayed in the RUN mode (instantaneous flow rate display). * The setting mode No. and setting details are displayed when displaying details of function settings. Values, etc., are displayed when setting each data. The error code No. is displayed when the error is displayed. Key (DOWN key) Press to count down the value, etc. Press to lock keys. The supplied power voltage is not within the rating. (Detected at 19.5VDC or less, detection accuracy ±10%F.S.) The input signal exceeds the rating range. (Detected at input 110% F.S. or more, detection accuracy ±1%F.S.) An error occurred during EEPROM reading or writing. An error occurred during memory reading or writing. The flow rate did not reach the setting for five or more consecutive seconds. (If the setting value and control value difference is ±20% or more, the detection accuracy is ±6%F.S.) (Instantaneous flow rate display) (Setting details display) (Error output) (Invalid display) Setting details Setting mode no. Shift key (OFF key) Countermeasures Code No. UP key (MODE key) Setting details Setting mode no. Press to count up the value, etc. Press to change the setting mode. Press to change the setting item. Press to select the digit for a number, etc. Press to restore operation from the forced OFF state, when forced OFF (control stop) is executed. + Key Press to initialize values. Check controller power specifications, set power voltage within the rating range, and turn power ON again. Check the controller input signal type, set the input signal within the rating range, and turn power ON again. Contact your nearest CKD Sales Office or dealer. Contact your nearest CKD Sales Office or dealer. Check the primary pressure, supply pressure within the rated operating differential pressure range, and turn power ON again. Check that there are no leaks from piping, joints, or other devices, correct connect pipes, and turn power ON again. Contact your nearest CKD Sales Office or dealer. Errors subject to error automatic shutoff (Note 1) An output error is occurring in the sensor. Switch output overcurrent protection circuit is activated. Stop the supply of fluids to the controller, set the flow rate to zero, and turn the controller power ON again. If this error occurs again, contact your nearest CKD Sales Office or dealer. Check whether load current exceeds the rating, correctly connect the controller, and turn power ON again. (Note 2) 1388 Errors are basically automatically reset. However, if the error is not reset, turn power OFF, check the cause and correct the error. Then, turn power ON again. Note 1: The default is error automatic shutoff set to OFF (valve fully closed if an error occurs). Refer to page 1402 for details. Note 2: OFF (valve fully closed at error) regardless of the error automatic shutoff setting.

25 FCM Series Operation Controlling the flow rate (1) Controlling the flow rate with direct memory The target is input with keys. Even if input signals from an external source are not used, control flow rate is freely adjusted with controller operation keys. Direct memory has two operation modes. Direct memory (1): Settings are applied when the value is changed. (Even if the value is not set, the flow rate is adjusted by changing the value. This is handy for finely adjusting the flow rate. Set the setting value once the flow rate is determin.ed. ) Direct memory (2): Changes are applied when the value is set. (The flow rate does not change unless the value is set.) <How to operate direct memory (1)> <Instantaneous flow display> (1) Turn power ON. The instantaneous flow rate is displayed. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) "F1.dr" blinks when the key is held down for 2 seconds. (4) Hold down the key for 2 seconds and open the <Direct Memory 1 Setting screen>. (5) The flow rate changes when the value is change. The flow rate is adjusted by changing the value even if the value is not set. < Flow setting range > Zero flow Setting flow (6) Hold down the and keys simultaneously for 2 seconds, and set the value. The <F1: input signal confirmation> screen is displayed. (7) The instantaneous flow rate display is redisplayed after 3 seconds. Forced OFF (flow rate zero) Full scale flow Valve fully open The controller is forcibly stopped (flow rate zero) by holding down the key for 2 seconds in the flow control state (instantaneous flow rate display). The flow control state is entered again by holding down the key for 2 seconds in the flow control stopped state (forced OFF). <F1: input signal confirmation> Alternate Hold down for 2 secs. Hold down for 2 secs. <F1: input signal confirmation> Alternate <Instantaneous flow display> <Instantaneous flow display> Flow control state The instantaneous flow rate display is redisplayed after 3 secs. <Target setting> Key : Move the digit Key : Count up the value Hold down for 2 secs. Hold down for 2 secs. <Input display> <Input signal type> Direct memory input Analog input 0-10V Analog input 0-5V Analog input 4-20mA Parallel input Pre-set input Key : Count down the value <Input display> <Forced OFF display> Flow control stop state The solenoid valve forced OFF state is displayed. Control is forcibly stopped even when the input signal is input. : dr : A0 : A1 : A2 : PA : P1 sensor size 1389

26 FCM Series Controlling the flow rate <How to operate direct memory (2)> (1) Turn power ON. The instantaneous flow rate is displayed. <Instantaneous flow display> (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) "F1.dr" blinks when the key is held down for 2 seconds. (4) Hold down the key for 2 seconds and open the <Direct Memory 2 Setting screen>. (5) Change the value. (The flow rate does not change unless the value is set.) <F1: input signal confirmation> Alternate Hold down for 2 secs. Hold down for 2 secs. The instantaneous flow rate display is redisplayed after 3 secs. <Input display> <Input signal type> Direct memory input Analog input 0-10V Analog input 0-5V Analog input 4-20mA Parallel input Pre-set input <Target setting> Key : Move the digit Key : Count up the value Key : Count down the value : dr : A0 : A1 : A2 : PA : P1 sensor (6) Hold down the and keys simultaneously for 2 seconds, and set the value. The <F1: input signal confirmation> screen is displayed. (7) The instantaneous flow rate display is redisplayed after 3 seconds. <F1: input signal confirmation> Alternate <Instantaneous flow display> Hold down for 2 secs. <Input display> Forced OFF (flow rate zero) The controller is forcibly stopped (flow rate zero) by holding down the key for 2 seconds in the flow control state (instantaneous flow rate display). The flow control state is entered again by holding down the key for 2 seconds in the flow control stopped state (forced OFF). <Instantaneous flow display> Flow control state Hold down for 2 secs. <Forced OFF display> Flow control stop state The solenoid valve forced OFF state is displayed. Control is forcibly stopped even when the input signal is input. CAUTION Control does not stop while setting direct memory. Take safety into consideration, and stop control (forced stop) if necessary. The flow control/forced OFF state (setting) is held even if power is turned OFF. 1390

27 FCM Series Operation Controlling the flow rate (2) Controlling the flow rate with preset input (only analog input) When four random flow rate points are set, the flow rate is controlled by inputting a 2-bit signal from an external source <Controlling with the preset input signal> (1) Turn power ON. The instantaneous flow rate is displayed. (8) E.g.) To control 0, 1, 2, and 5R/min. with preset input, select Preset Input for the input setting mode, and set each of the following: P1: 0R/min. P2: 1R/min. P3: 2 R/min. P4: 5R/min. When signals are input from a PLC, etc., as indicated in the table at right, the flow rate is controlled to each preset flow rate. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) "F1.dr" blinks when the key is held down for 2 seconds. (4) When the (5) Hold down the key for 2 seconds, and open the P1 setting confirmation screen. (6) Hold down the key for 2 seconds, and open the target input screen. Input the target. (7) key is pressed twice, "F1.P1" will blink. When the and key are held down for 2 seconds, the target is set in memory, and the P2 setting confirmation screen is displayed. Set all of the targets up to P4 with this. The instantaneous flow rate display is redisplayed after 3 seconds. The flow is controlled with preset input. D-sub-socket pin No. 2 1 Cable option Isolator color Type of input Input signal <Instantaneous flow display> <F1: input signal confirmation> Hold down for 2 secs. Alternate Hold down for 2 secs. Orange Bit 2 <Input display> <Input signal type> Direct memory input Analog input 0-10V Analog input 0-5V Analog input 4-20mA Parallel input Pre-set input <P1 setting confirmation> <Input display> Alternate Hold down for 2 secs. Brown Bit 1 Pre-set memory No. OFF OFF P1 OFF ON P2 ON OFF P3 ON ON P4 Hold down <P2 setting confirmation> <Input display> for 2 secs. Alternate The instantaneous flow rate display is redisplayed after 3 sec. Repeat to P4 <Target setting> Key : Move the digit <Instantaneous flow display> Key : Count up the value : dr : A0 : A1 : A2 : PA : P1 Key : Count down the value sensor size 1391

28 FCM Series Controlling the flow rate (3) Changing settings with shortcut keys (only when using direct memory and preset input) When controlling the flow using direct memory or preset input, the setting change screen is opened with a single key operation. Note: The input signal setting change screen opens the instant that the shortcut key is pressed. (Example: The P2 setting change screen opens when controlling the flow with the preset input P2.) This cannot be used when controlling the flow with analog input or parallel input. <Changing the setting with a shortcut> (1) Turn power ON. The instantaneous flow rate is displayed. (This is used only when controlling with direct memory or preset input.) (2) When the key is held down for 3 seconds, and the key is pressed, the input signal setting change screen is displayed. <Instantaneous flow display> Control when flowing with preset memory P2 Hold down for 3 secs. <F1: input signal confirmation> and <input display> are alternately displayed during this time. <Target setting> Key : Move the digit Key : Count up the value (3) The flow rate changes when the value is change. The flow rate is adjusted by changing the value even if the value is not set. Hold down for 2 secs. Key : Count down the value sensor (4) Hold down the and keys simultaneously for 2 seconds, and set the value. The <F1: input signal confirmation> screen is displayed. (5) The instantaneous flow rate display is redisplayed after 3 seconds. <F1: input signal confirmation> Alternate <Instantaneous flow display> <Input display> Note: Do not change the preset external input while changing the setting with the shortcut key. The setting could be set into an incorrect preset No. Data is not saved in memory if power is turned OFF before setting the value. Set the value before turning power OFF. 1392

29 FCM Series Operation Controlling the flow rate (4) Controlling the flow rate with analog input (Only analog input) The flow rate is controlled with analog input signals. <Controlling with analog input signals> (1) Turn power ON. The instantaneous flow rate is displayed. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) "F1.dr" blinks when the 2 seconds. (4) (5) (6) key is held down for When the key is pressed once, "F1.A 0 " will blink. (The number shown with differs based on the model.) <Instantaneous flow display> <Input signal type> Direct memory input Analog input 0-10V Analog input 0-5V Analog input 4-20mA Parallel input Pre-set input <F1: input signal confirmation> <Input display> Hold down the key for 2 seconds and set the value. Alternate The <F1: input signal confirmation> screen is displayed. The instantaneous flow rate display is redisplayed after 3 seconds. The flow rate is controlled with analog input. Note: Fully open (FUL) cannot be set with analog input. <F1: input signal confirmation> Hold down for 2 secs. Alternate Hold down for 2 secs. <Instantaneous flow display> The instantaneous flow rate display is redisplayed after 3 secs. <Input display> : dr : A0 : A1 : A2 : PA : P1 sensor size 1393

30 FCM Series sensor Controlling the flow rate (5) Controlling the flow rate with parallel input (Only parallel input) The flow rate is controlled with a parallel 10-bit (signal from PLC, etc.). Expensive input/output devices, such as a D/A converter, are not required. The parallel input signal is a 10-point signal so when converted to a decimal, it becomes A 0.1% resolution is attained. D-sub-socket pin No. <Controlling with parallel input signals> (1) Turn power ON. The instantaneous flow rate is displayed. (2) When the key is pressed, the <F1: Input signal confirmation> screen is displayed. The current input signal setting state is displayed. The current input signal type and input are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) "F1.dr" blinks when the 2 seconds. (4) When the Input signal = setting flow / full scale flow1023 Example) To set 300 mr/min. with a full-scale flow rate 500 mr/min. 300 (mr/min.) / 500 (mr/min.)1023= When 614 (decimal) is converted to binary, it becomes sets the input signal ON, and 0 sets the input signal OFF. (Refer to the below table) Cable option Isolator color Type of input Binary (For 614 [decimal]) Input signal 12 Green (with black line) Bit 10 MSB 1 ON Red (with black line) key is held down for key is pressed once, "F1.PA" will blink. White (with black line) (5) Hold down the key for 2 seconds and set the value. The <F1: input signal confirmation> screen is displayed. 11 White Bit 9 0 OFF 9 Bit 8 0 OFF 8 Bit 7 1 ON 7 Pink Bit 6 1 ON 6 Light blue Bit 5 0 OFF <Instantaneous flow display> <F1: input signal confirmation> Hold down for 2 secs. Alternate 4 Purple Bit 4 0 OFF 3 Yellow Bit 3 1 ON <Input display> Hold down for 2 secs. <F1: input signal confirmation> <Input display> Alternate 2 Orange Bit 2 1 ON The instantaneous flow rate display is redisplayed after 3 sec. <Input signal type> Direct memory input Analog input 0-10V Analog input 0-5V Analog input 4-20mA Parallel input Pre-set input : dr : A0 : A1 : A2 : PA : P1 1 Brown Bit 1 LSB 0 OFF (6) The instantaneous flow rate display is redisplayed after 3 seconds. The flow rate is controlled with parallel input. <Instantaneous flow display> Note: Fully open (FUL) cannot be set with parallel input. <References> If a high resolution is not required, the number of input points is reduced. E.g.) If 2% resolution is acceptable, operate with a 6-point input (0-63 when converted to decimal). Bits 5 to 1 in the above table are shorted in a bundle. When turned ON and OFF as one bit (LSB), control is executed with 6 points. 1394

31 Integrating the flow rate (1) Displaying the integrated flow The flow rate is integrated and displayed. The display range is shown below. Model no. FCM- Flow display Function of integration < Display of integration> (1) Instantaneous flow rate display Integration starts when power is turned ON. (The integrated value is reset when power is turned OFF.) (2) (3) Display range Display range Display resolution Pulse output rate 9500 L to 500 mr/min mr 1mR 5mR 0001 L to 1.00 R/min R 0.01R 0.01R 0002 L to 2.00 R/min R 0.01R 0.02R The display of integration screen opens when the key is held down for 2 seconds. Press the key for 2 seconds to return to the instantaneous flow rate display. The display digit changes when the key is pressed. Integration is reset when the and keys are held down for 2 seconds. With analog input type, integration is reset with the external input (No. 3 pin). Integration is also reset when power is turned OFF. (2) Closing and stopping the solenoid valve with set integrated flow After setting, the <F5 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. After setting, the <F5 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. (3) When the key is held down for 2 seconds, "F5.--" blinks. When not using integration automatic shutoff, hold down the key for 2 seconds. The <F5 screen> (When using integrated flow automatic shutoff). is redisplayed, and after 3 seconds, the instantaneous <Setting high-order digit> flow rate screen is displayed. (4) To use integration automatic shutoff, press the key so that "F5.on" blinks. Then, hold down the key for 2 seconds. After setting the high-order digit, hold down the and key for 2 seconds. After setting the low-order digit, hold down the key and key for 2 seconds. The <F5 screen> is displayed, and after 3 seconds, the instantaneous flow rate screen is displayed L to 5.00 R/min R FCM Series Operation The instantaneous flow rate display is redisplayed after 3 seconds. * Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff) * The solenoid valve is automatically shut off, and this operates a switch when the set integrated flow is reached. * If the display for automatic shutoff is "OFF", the switch output lamp does not turn ON. The flow rate display is redisplayed when the integrated value is reset (button operation or external input). * Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset. * The integrated value is reset when automatic shutoff is set to "on" and the value is set. 0.01R 0.05R 0010 L to 10.0 R/min R 0.1R 0.1R <Instantaneous flow display> <Integrated flow display> High-order 3-digit display Integration reset Hold down for 2 secs to 20.0 R/min R 0.1R 0.2R Hold down for 2 secs. The solenoid valve is closed and stopped when the set integrated flow is attained. <Instantaneous flow display> This is suitable for processes in which a set amount is supplied, etc. <Operation> (1) Instantaneous flow rate display Press five times <F5: integration automatic shutoff setting screen> (2) Press the key five times and open the <F5: integration automatic shutoff setting screen>. If integration automatic shutoff is valid, "F5.on" and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 Hold down for 2 secs. <When not using instantaneous automatic shutoff> seconds pass without a button being pressed.) Hold down for 2 secs. Hold down for 2 secs to 50.0 R/min R 0.1R 0.5R Hold down for 2 secs. Low-order 3-digit display <Target setting> Key : Move the digit to 100 R/min R 1R 1R Key : Count up the value Key : Count down the value Hold down for 2 secs. <Setting low-order digit> 1395 sensor size

32 FCM Series sensor Integrating the flow rate (3) Outputting the integrated pulse (only switch output) The integrated pulse is output. Refer to the table on page 1395 for the pulse rate. Refer to the connection method (page 1384), examples of internal circuit and load connection (pages 1385 and 1386) for details on connecting switch output. <Operation> (1) Instantaneous flow rate display (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4." and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) Hold down the key for 2 seconds, and enter switch output setting mode. Press three (4) When the key is pressed three times, "F4.3" blinks. times <Integrating pulse setting screen> When the key is held down for 2 seconds, the integrated pulse output is set. The <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. Hold down for 2 secs. (4) Turning the set integrated flow ON with a switch (only switch output) After setting, the <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. Switch output is turned ON at the set integrated flow. Refer to the connection method (page 1384), examples of internal circuit and load connection (pages 1385 and 1386) for details on connecting switch output. <Operation> <Instantaneous flow display> (1) Instantaneous flow rate display (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4. " and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) Hold down the key for 2 seconds, and enter switch output setting mode. (4) When the key is pressed four times, "F4.4" blinks. Hold down the key for 2 seconds, and open the target setting screen. After setting the high-order 3 digits of the target, hold <Setting high-order digit> down the and keys for 2 seconds. After setting the low-order 3 digits of the target, hold down the and keys for 2 seconds. The integrated value is reset after the target is set. <Setting low-order digit> (5) The <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. <Instantaneous flow display> Press four times <F4: switch output setting screen> Hold down for 2 secs. Press four times <F4: switch output setting screen> Hold down for 2 secs. Press four times The instantaneous flow rate display is redisplayed after 3 seconds. The instantaneous flow rate display is redisplayed after 3 seconds. <Target setting> Hold down for 2 secs. Key : Move the digit Hold down for 2 secs. Hold down for 2 secs. Key : Count up the value Key : Count down the value After setting, the <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. 1396

33 FCM Series Operation Using switch output (only switch output) (1) Using the tolerance mode Switch output turns ON when the level is within the tolerance of the input signal setting. The tolerance is set for both the plus side and min.us side as a %FS (full-scale). Refer to the connection method (page 1384), examples of internal circuit and load connection (pages 1385 and 1386) for details on connecting switch output. <Operation> (1) Instantaneous flow rate display. (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4." and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) Hold down the key for 2 seconds, and enter switch output setting mode. H (+ tolerance) Input signal set value L (- tolerance) Output <Instantaneous flow display> ON OFF Press four times <F4: switch output setting screen> Hold down for 2 secs. The instantaneous flow rate display is redisplayed after 3 seconds. (4) When the key is pressed once, "F4.1" blinks. Hold down the key for 2 seconds, and open the target setting screen. (5) After setting the tolerance (minus side), hold down the and keys for 2 seconds. Minus side setting range: -50 to 0%FS <- tolerance setting (%)> Press once Hold down for 2 secs. <Target setting> Key : Move the digit Key : Count up the value Key : Count down the value sensor (6) After setting the tolerance (plus side), hold down the and keys for 2 seconds. Plus side setting range: 0 to 50%FS <+ tolerance setting (%)> Hold down for 2 secs. (7) The <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. After setting, the <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. Hold down for 2 secs. size 1397

34 FCM Series Using switch output (only switch output) (2) Using the range designation mode The switch turns ON when the level is not within the designated flow rate H (upper limit side) range. The upper and lower limit values are set regardless of the input signal setting (control target). Both the upper limit and lower limit are set as % FS (full-scale). L (lower limit side) Refer to the connection method (page 1384), examples of internal circuit and load connection (pages 1385 and 1386) for details on connecting switch output. <Operation> (1) Instantaneous flow rate display (2) Press the key four times and open the <F4: switch output setting screen>. If switch output setting is valid, "F4." and the current setting are alternately displayed. (The instantaneous flow rate display is displayed if 3 seconds pass without a button being pressed.) (3) Hold down the key for 2 seconds, and enter switch output setting mode. (4) When the key is pressed twice, "F4.2" blinks. Hold down the key for 2 seconds, and open the target setting screen. (5) After setting the lower limit value, hold down the and keys for 2 seconds. Lower limit setting range: 0 to 90%FS <Instantaneous flow display> ON Output OFF Press four times <F4: switch output setting screen> <Lower limit setting (%)> Hold down for 2 secs. Press twice Hold down for 2 secs. The instantaneous flow rate display is redisplayed after 3 seconds. <Target setting> Key : Move the digit Key : Count up the value Key : Count down the value sensor (6) After setting the upper limit value, hold down the and keys for 2 seconds. Plus side setting range: 10 to 100%FS Note that the gap between the upper and lower limits must be 10% FS or more. <Upper limit setting (%)> Hold down for 2 secs. Hold down for 2 secs. (7) The <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. After setting, the <F4 screen> is redisplayed, and after 3 seconds, the instantaneous flow rate screen is displayed. 1398

35 FCM Series Operation Operation (List) CAUTION: Keys are unlocked when the controller is shipped. Lock keys if necessary. The key lock/unlock state is held even if power is turned OFF. Control does not stop during the F1: input signal selection or F2: input signal zero/span setting. Take safety into consideration and stop control (forced stop) if necessary. The flow control/forced OFF state is held even if power is turned OFF. <Normal display> <Instantaneous flow display> Flow control state The current instantaneous flow rate is displayed Hold down together for 2 secs. <Key lock> The instantaneous flow rate display is displayed after 2 seconds. <Key unlock> Hold down for 2 secs. <Forced OFF display> Flow control stop state The solenoid valve forced OFF state is displayed. Control is forcibly stopped even when the input signal is input. Hold down together for 5 secs. Hold down together for 3 secs. The instantaneous flow rate display is displayed after 2 seconds. <Initialization> The instantaneous flow rate display is displayed after 2 seconds. The following function settings are returned to their defaults. Input signal selection Switch output Input signal zero/span adjustment Auto power off <Automatic shutoff display> Flow control stop state Hold down for 2 secs. Note: The flow control/forced OFF state is held even if power is turned OFF. sensor The integration automatic shutoff state is display. <Integrated flow display> Low-order 3-digit display High-order 3-digit display Integration reset Hold down together for 2 secs. <F1: input signal selection> The current integrated flow is displayed. Integration starts when power is turned ON. Integration is reset when the and keys are held down. With analog input type, integration is reset with the external input. Integration is also reset when power is turned OFF. size 1399

36 FCM Series Operation (List) sensor After 3 seconds <Instantaneous flow rate display> <F1 screen> Alternate display Input display Input signal type <F1: input signal selection> Select which input style to use for control. Hold down for 2 secs. <Setting direct memory input> Hold down together for 2 secs. Hold down for 2 secs. <Analog input (parallel input) setting> Hold down for 2 secs. <Pre-set input setting> (Not used for parallel input) Hold down for 2 secs. Direct memory (1): The setting is applied when the value is changed. Direct memory (2): The setting is applied after it is set. After setting, the setting mode is exited, and the <F1 screen> is displayed. Hold down together for 2 secs. <Target setting> After setting to the analog input (parallel input) mode, the <F1 screen> is displayed. Alternate display Hold down together for 2 secs. P1 target display P2 target display After setting, the setting mode is exited, and the <F1 screen> is displayed. Key : Move the digit Key : Count up the value <Input signal type> Direct memory input Analog input 0-10V Analog input 0-5V Analog input 4-20mA Parallel input Pre-set input Key : Count down the value Hold down for 2 secs. : dr : A0 : A1 : A2 : PA : P1 Setting target Hold down together for 2 secs. Setting target Setting mode is exited, and the <F1 screen> is displayed. <Flow setting range> Full scale flow Alternate display Set P3 target in same manner Alternate display P4 target display Hold down for 2 secs. Hold down together for 2 secs. Setting target Hold down for 2 secs. Hold down together for 2 secs. Zero flow Setting flow Valve fully open Setting mode is exited, and the <F1 screen> is displayed. Note: Integration automatic shutdown (F5.on) does not function while the input signal is set. However, once the setting is set, the integrated automatic shutdown is applied. If the integrated flow is higher than the set value at this time, automatic shutdown will occur. <F2: input signal zero/span adjustment> 1400

37 FCM Series Operation Operation (List) After 3 seconds <Instantaneous flow rate display> After 3 seconds <Instantaneous flow rate display> After 3 seconds <Instantaneous flow rate display> <F2 screen> <F3 screen> <F4 screen> <F2: input signal zero/span adjustment> When using with full-scale After setting, the setting mode is exited, and the <F2 screen> Hold down for 2 secs. Hold down for 2 secs. is displayed. When using with zero and panel adjusted <Zero point adjustment (%)> <Span point adjustment (%)> Hold down for 2 secs. Hold down together for 2 secs. <Target setting> Key : Move the digit Key : Count up the value Key : Count down the value Hold down together for 2 secs. After setting, the setting mode is exited, and the <F2 screen> is displayed. Note: If the preset memory input or direct memory input is selected with F1 (input signal selection function), this function cannot be used. Full-scale applies. If the zero point is changed, the integration automatic shutoff cannot be reset (reset by zero input signal). <F3: Automatic power off setting > When not using auto power OFF function After setting, the setting * If any key is pressed during auto power OFF, mode is exited, and the the display turns ON Hold down for 2 secs. Hold down for 2 secs. <F3 screen> is displayed. * The auto power OFF setting time is one minute. This time cannot be changed. * Control does not stop during auto power OFF. When using auto power OFF function <Setting F4: Switch output> When not using switch output Hold down for 2 secs. Hold down for 2 secs. Hold down for 2 secs. After setting, the setting mode is exited, and the <F3 screen> is displayed. After setting, the setting mode is exited, and the <F4 screen> is displayed. <Target setting> Key : Move the digit Key : Count up the value Key : Count down the value When using mode 1 (tolerance mode) <- tolerance setting (%)> <+ tolerance setting (%)> After setting, the setting mode is exited, and the <F4 screen> is displayed. Hold down for 2 secs. When using mode 2 (range designation mode) <Lower limit setting (%)> <Upper limit setting (%)> Hold down for 2 secs. When using mode 3 (integrating pulse) Hold down for 2 secs. Hold down together for 2 secs. - tolerance setting range: -50 to 0%FS + tolerance setting range: 0 to 50%FS After setting, the setting mode is exited, and the <F4 screen> is displayed. Lower limit setting range: 0 to 90%FS Upper limit setting range: 10 to 100%FS Note that the gap between the upper and lower limits must be 10% FS or more. After setting, the setting mode is exited, and the <F4 screen> is displayed. When using mode 4 (ON when above integration) <Setting high-order digit> <Setting low-order digit> Hold down for 2 secs. Hold down together for 2 secs. Hold down together for 2 secs. Note: Switch output setting mode cannot be entered with the analog output. <F5: Integrated automatic shutoff setting screen> Hold down together for 2 secs. Hold down together for 2 secs. * Refer to 1.1 Specifications for details on the integrating pulse rate. * If reset is executed with external input, the integration is reset, so pulses are not output. * The OUT Lamp does not turn ON while integrated pulses are output. Hold down together for 2 secs. After setting, the setting mode is exited, and the <F4 screen> is displayed. * The integrated value is cleared immediately after mode 4 is set. sensor size 1401

38 FCM Series Operation (List) After 3 seconds <Instantaneous flow rate display> After 3 seconds <Instantaneous flow rate display> <F5 screen> <F6 screen> <F5: Integrated automatic shutoff setting screen> When not using integrated flow automatic shutoff Hold down for 2 secs. After setting, the setting mode is exited, and the <F5 screen> is displayed. After setting, the setting mode is exited, and the <F5 screen> is displayed. * Only in this mode, the integrated value is reset when the input signal reaches zero. (Valid only after automatic shutoff) * The solenoid valve is automatically shut off, and this operates a switch when the set integrated flow is reached. * If the display for automatic shutoff is "OFF", the switch output lamp does not turn ON. The flow rate display is redisplayed when the integrated value is reset (button operation or external input). * Even if automatic shutoff is invalidated during automatic shutoff, it does not function until the integrated value is reset. * The integrated value is reset when automatic shutoff is set to "on" and the value is set. <F6: Error automatic shutoff setting> When not using error automatic shutoff Hold down for 2 secs. Hold down for 2 secs. When using integrated flow automatic shutoff <Setting low-order digit> <Setting high-order digit> Hold down for 2 secs. Hold down for 2 secs. After setting, the setting mode is exited, and the <F6 screen> is displayed. When using error automatic shutoff (Valve fully closed at error) Hold down for 2 secs. Hold down together for 2 secs. After setting, the setting mode is exited, and the <F6 screen> is displayed. Hold down together for 2 secs. * Errors causing automatic shutoff Sensor error: State when sensor signal error or input signal error has occurred, or when power voltage is not within range. Control error: State when flow cannot be controlled to set value. sensor When using error automatic shutoff (Valve fully opened at error) Hold down for 2 secs. After setting, the setting mode is exited, and the <F6 screen> is displayed. After 3 seconds <Instantaneous flow rate display> <F7 screen> Alternate display Current adjust value <F7: Zero adjust (flow output)> Hold down for 2 secs. New adjust value 2 s. after new adjust value is displayed, <F7 screen> is displayed. Note: Execute forced OFF (stop control) before adjusting the zero point. To prevent malfunctions, the zero point cannot be adjusted unless forced OFF is executed. is displayed when forced OFF is not executed. Purge to working gas before adjusting the zero point. <Instantaneous flow display> 1402

39 FCM Series Operation / FCM glossary / Custom FCM glossary These terms apply to the small size FCM. Term Control range Precision Repeatability (repeated accuracy) Explanation Range in which accuracy is guaranteed. Calibration error from CDK standard. Calculated from the variation (D=max. - min.) when the 0%F.S. and 50%F.S. flow control is repeated 20 times in succession in the cycle where control is sufficiently settled. (Repeatability) = ±D/2/FS control flow x 100 [%] Temperature characteristics Variation in the flow rate (reference temperature 25 C) caused by changes in the ambient temperature of fluid temperature is calculated per 1 C and indicated. During calibration, is calculated at 25 C. Pressure characteristics Indicates the fluctuations in the flow value caused by changes in the working pressure. During calibration, the standard differential pressure is used. Standard differential pressure Differential pressure when calibrating this product. (Secondary side is released to atmosphere.) Operating differential pressure Differential pressure required for this product to function correctly. Withstanding pressure Pressure at which this product will not break. Display resolution Minimum step at which display changes. (Cumulative) pulse output rage Cumulative flow per pulse when outputting cumulative pulse. LSB Indicates the minimum digit of the parallel input. MSB Indicates the maximum digit of the parallel input. digit Digit. Minimum value of digital display when decimal point is ignored. AWG Abbreviation of American Wire Gauge. Standard for cables. Custom Custom-order parts with the following function are used. Contact the CKD Sales Office for details. 8-point preset input This type is compatible with eight preset points (3 bit). (The external integration reset signal input cannot be used.) Oil-prohibited specifications (only stainless steel body) Oil-prohibited specifications are available for the stailess steel type, excluding the oxygen model. sensor size 1403

40 size FSM2 Sensors / CONTENTS Product introduction 1268 Applications 1270 Safety precautions 1272 Display integrated type/display separate type 1278 FSM series dedicated inline FSM2 technical data 1307 sensor 1267

41 Line-up to match your every need New models for small FSM2 Series Needle valve integrated type The needle valve, which can adjust the flow, has been integrated with the sensor to simplify piping and realize space saving. Stainless steel bodies also available Separate indicator When connected to a sensor, the separate indicator automatically recognizes the flow range, so settings with the display are not required.* Complete wiring easily with the connector connection method. Stainless steel body Resin body 1268 * Only in the default state or when settings are reset. Refer to Explanation of Functions on page 1315 for details.

42 Functions which pursue the operability of the small provide the best selections for various scenes and applications. specifications, Twin display/bi-color display function The P70 (particle prevention) and P80 (oil prohibited) specifications are available as a standard. These models are perfect for semiconductor and liquid crystal manufacturing applications. A main screen and sub screen can be provided with the display integrated type, allowing operability to be improved. The errors can be seen in a glance with the bi-color display. Flow rate unit Panel mounting possible A panel mounting bracket is available. The separate indicator, sensor unit (up to display integrated 200L/min. type), and needle valve integrated type can be mounted onto a panel. Close mounting with one panel opening is possible, allowing man-hours and space to be reduced when using multiple units. Main screen (instantaneous flow rate display) Bi-color display Sub screen (flow direction, etc.) Close mounting possible Bar display function On the separate indicator type, the reference flow rate can be seen in a glance with the flow bar display. even with large flow rate With the 500 and 1000L/min types, the body size has been reduced by 30% compared to conventional models, attaining the highest downsizing in the industry. Downsize and lighten your equipment with this model. 30% compared to conventional unit (for 1000L/min. type) Increased precision Flow bar display or less A precision of ±3%F.S. allows a more accurate flow measurement. High speed response or less The platinum sensor chip manufactured with silicone micromachining realizes a high speed response, and contributes to reducing the tact time. Free mounting position Bidirectional fluid measurement The sensor can be mounted in any direction, top, bottom, left or right. The flow direction can be randomly set for measurement with the display integrated bidirectional type. This increases the freedom of piping installation, and can be used as for detecting reverse flows. Straight piping not required Forward direction Bidirectional Reverse direction The newly proposed rectifying mechanism eliminates the need for straight piping at either the upstream or downstream side. Elbows are OK 1269

43 Diverse lineup to match your needs Flow range, port size, body material Body material Port size Full scale flow Resin Stainless steel ø4 push-in ø6 push-in ø8 push-in ø10 push-in Aluminum Note 1: Excluding carbon oxide models. Note 2: Excluding argon models and carbon gas models. Compatible fluid Compatible fluid, nitrogen Argon Carbon oxide Body material Resin Stainless steel Aluminum Stainless steel Stainless steel Full scale flow Output formats Type Display integrated type Output Analog output 1 point (1-5V or 4-20mA) Switch output 2 points (NPN or PNP) Needle valve integrated type (option) Up to full scale 200 l/min. supported (only display integrated type) Resin body Stainless steel body Separate indicator type Analog output 1 point (1-5V or 4-20mA) Separated display can be connected Flow direction Bidirectional type Single-direction type specifications (option) P70 specifications: particle prevention P80 specifications: oil prohibited Flow direction can be selected with button operations (display integrated type) 1270

44 Applications consumption flow control The air consumed by the isolated facility can be seen by monitoring the cumulative pulse output or analog output. Painting air flow control P80 (oil prohibited specifications) are perfect for controlling the flow of painting air. FSM2 is free of siloxane (organic silicone), so the paint quality is stable. Cumulative flow rate Switch output Time Approx. 40ms. (fixed value) The pulse is output at the specified cumulative value. Semiconductor manufacturing purge gas flow control Control of the purge gas is indispensable for maintaining the performance of a semiconductor manufacturing. The stainless steel body type is suitable for applications which are susceptible to discharged gases. Errors can be detected by using the switch output. Wind operation This mode turns the switch output ON or OFF at the flow within the set range. Hysteresis operation In this mode, the switch output hysteresis is randomly set to control the ON and OFF settings. Flow Flow Switch output Switch output Switch output Switch output Ionizer flow control The flow rate can be easily adjusted with the needle valve integrated type. The P80 (oil prohibited specifications) are suitable for clean applications. Errors can be detected by using the switch output. confirmation Since the flow is detected, there s no need to make adjustments according to pressure fluctuations and incorrect detections are eliminated. Detect clogging of the nozzle or, and control pickup mistakes during inclined pickup, etc. Comparison with pressure sensor (at nozzle diameter ø0.3, vacuum pressure 70kPa) Flow difference: 830ml/min Flow rate is clear! Pressures sensor Pressure difference: 2kPa 1271

45 Safety precautions Pneumatic components: Warning and Cautions Always read this section before starting use. Design & Selection Working fluid DANGER n Do not use this product for flammable fluids. WARNING n This product cannot be used as a business meter. This product does not comply with Measurement Laws, and cannot be used for commercial business. Use this as an industrial sensor. n Do not use fluids other than the applicable fluid because accuracy cannot be guaranteed. n When using compressed air, use clean air that complies to JIS B :2003 Class to Compressed air from the compressor contains drainage - water, oil oxide, foreign substances, etc. - so install a, air dryer, and oil mist on the primary side (upper stream side) of the sensor. The sensor's meshing rectifies flow in the pipe. It does not out foreign substances, so provide a. <Recommended circuit> WARNING n Corrosive environment Do not use this product in an environment containing corrosive gases such as sulfurous acid. n Ambient temperature, fluid temperature Use ambient temperature/fluid temperature from O to 50 C within specified range. Even if the temperature is within the specified range, do not use this product if the ambient temperature and fluid temperature could suddenly change and cause dew to condense. n Maximum working pressure and specified flow rate range Applications exceeding the maximum working pressure and specified flow rate range may result in faults. Use this product only within the specified range. n Drip-proof environment This product's protective structure is IP40 or equivalent. Do not install it where it could be exposed to water, salt, dust, or cutting chips, or a compressed or decompressed environment. This product cannot be used where the temperature changes sharply or in a highly humid environment where internal damage could be caused by dew condensation Source pressure dryer Filter Regulator Oil mist (Micro alescer) n When using a valve on the primary side of this product, use only an oil-prohibit specification valve. This sensor could malfunction or fail if exposed to splattering grease, oil, etc. Friction powder could be generated depending on the valve so mount a to prevent the powder from entering the sensor. n When using the valve with liquified gases such as carbon dioxide, always vaporize the gas. Faults could result if the liquified gas enters this product. n Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. n Depending on the fluid, retaining the fluid for a long time could adversely affect the performance. Do not seal the fluid in the pipe for long periods of time. Working environment FSM Series DANGER n Flammable environment Do not use this product in an explosive gas environment. The structure is not explosionproof, and explosions or fires could occur. Flow unit CAUTION n This product's flow rate is measured at a mass flow unaffected by temperature or pressure. The unit is /min., but this is the display when the mass flow is converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). Withstand pressure CAUTION n Withstanding pressure differs by each series. Selection time care must be taken. Overflow CAUTION n With each series, no problem will occur in the sensor, even in an overflow double the measurement range. If dynamic pressure is applied near the maximum working pressure (when a pressure difference exceeding the maximum working pressure is applied between primary and secondary sides), a problem could occur with the sensor. If dynamic pressure is applied, such as when a workpiece is filled for leakage inspection, provide a bypass circuit or restrictor so that dynamic pressure is not applied to the sensor.

46 FSM2 Series Use for vacuum confirmation, etc. CAUTION n When this product is used to confirm vacuum, etc., select the flow range based on the working vacuum pressure and vacuum nozzle. Refer to "Methods for calculating theoretic flow" on page 1358 for details. n When this product is used to confirm vacuum, etc., provide an air upstream from suction to prevent the entry of foreign matter. n When this product is used to confirm vacuum, etc., consider the atmospheric dew point and this product's ambient temperature, and use under conditions in which dew does not condense in pipes. n When this product is used to confirm vacuum, etc., response speed may be delayed by the capacity of the pipe between the vacuum nozzle and this product. In this case, take measures to reduce piping capacity. n When this product is used for vacuum applications such as air supply, do not bend the tube near the push in joint. If stress is applied to the tube near the push in joint, insert an insert ring into the tube, and connect the tube to the push in joint. Using for leakage inspections n The working pressure range of this product is to 1.00MPa. If it is energized in a vacuum state less than -0.09Mpa, the sensor s heat dissipation performance will drop and could degrade the sensor. n When the vacuum confirmation sensor is switched from a pressure sensor (switch) to a (switch), sensor output (switch output) logic will be reversed. See the drawing below. Note that the PLC sequence program must be changed or revised. If source pressure or vacuum source is not supplied when device power is turned on, "flow 0" = "sensor output (switch output) on" status is set at the (switch). Check that this is not a problem with the PLC sequence program, etc. confirmation Pressure sensor (switch) (switch) ON when higher than setting value ON when lower than setting value Atmospheric pressure side ON ON OFF OFF High vacuum side Flow O side Large flow rate side Installation & Adjustment Piping CAUTION n Always attach the pipes before starting wiring. n Align the fluid flow direction to the direction indicated on the pipe when connecting the pipes. n When installing the sensor on piping, see the torque below so that excessive screw-in torque or load torque is not applied to the connection port. (Reference value) n Check that sealing tape or adhesive does not get inside during piping. * When using for clean specifications, make sure that the sealing material matches the being used. When winding fluorine resin sealing tape around threads, wind sealing tape once or twice, leaving two to three threads open at the end of the screw. Press tape with a nail tip to stick it onto threads.when using liquid sealing agent, leave one to two threads open from the end, and avoid applying too much. Check that the sealing agent does not get on device threads. Port thread Tightening torque N m M5 1.0 to 1.5 Rc1/8 (G1/8) 3 to 5 Rc1/4 6 to 8 Rc1/2 16 to 18 n out pipe with air blow to remove foreign substances, swarf, etc., before piping. The rectifier or sensor chip could be damaged if a large amount of foreign matter, swarf, etc., occurs. n Attach a wrench to metal sections when tightening pipes so that pressure is not applied to the resin section. n Connect a joint even when using the metal body type with the out side opened. The port could come off. n When using a push in joint, accurately insert tube and confirm that it does not become dislocated even when pulled. Cut tube at a right angle with a dedicated cutter before use. n Make sure that the monge solution does not enter the case when inspecting the pipe for leaks. Installation CAUTION n The display integrated type s flow meter uses a liquid crystal display which may be difficult to read depending on the angle. 1273

47 FSM2 Series n This product can be installed in any direction; top, bottom, left, or right. Horizontal installation (through hole used) Set screw Tighten the set screw with a torque of 0.5 N.m. Bracket installation (bracket used) Port size : Push-in joint ø4ø6ø8ø10 Rc1/8, Rc1/4, M5 Discrete bracket model no. : FSM2-LB1 Tighten the set screw with a torque of 0.5 N.m. Panel mounting (Panel mount) Tighten the set screw with a torque of 0.06N. m. Complete the piping before assembly. If the pipes are connected after assembly, excessive strain will be applied and may damage the product. When using the panel mounting method, make sure that vibration is not applied on the product. When using on a stainless steel body, the vibration will be amplified and could damage the product. Wiring Set screw DANGER Set screw Vertical installation (bottom side female thread used) Set screw n Use power voltage and output within the specified voltage. If voltage exceeding the specified voltage is applied, the sensor could malfunction or be damaged, or electrical shock or fire could occur. Do not use a load exceeding the output rating. Failure to observe this could result in output damage or fire. Installation & Adjustment Set screw Set screw Port size : Rc1/2 Discrete bracket model no. : FSM2-LB2 n Check that stress is not directly applied to cable lead outs or connectors. n Stop the control device and machine devices, and turn the power off before wiring. Starting operation suddenly could result in unpredictable operation and hazards. Conduct an energized test with control devices and machine devices stopped, and set target switch data. Discharge electrostatic accumulated in personnel or tools before and during work. Connect and wire bend-resistant material, such as robot wire material, for movable sections. n Do not use this product at levels exceeding the power voltage range. If voltage exceeding this range is applied or if AC power is applied, the controller could rupture or burn. n Install the product and wiring as far away as possible from sources of noise such as power distribution wires. Provide separate measures for surge applied to the power cable. The display or output could fluctuate. n Do not short-circuit the load. Failure to observe this could result in rupture or burning. n For metal body (stainless steel, aluminum) power supplies, use DC-stabilized power separated from the AC primary side. Connect either the plus or minus side of the power supply to the F.G. A varistor (limit voltage 40 V) is connected between the metal body internal power circuit and metal body to prevent dielectric breakdown of the sensor. Do not conduct a withstand voltage test or insulation resistance test between the internal power circuit and metal body. Disconnect wiring if this testing is required. An excessive potential difference between power and metal body will burn internal parts. After installation, connecting and wiring the metal body, electrical welding of the device or frame, or short-circuit accidents, etc., could cause welding current, excessive high voltage caused by welding, or surge voltage, etc., to run through wiring or ground line connected between such devices, damaging lines or devices. Do any work such as electrical wiring after removing this device and disconnecting all electric wires connected to the F.G. n Connecting load The output impedance of the analog output section is 1KΩ. If the impedance of the connected load is small, output error increases. Check the error of the connected load impedance before using. (The analog output current output type is excluded.) WARNING n Check line color when wiring. Incorrect wiring connections could result in sensor damage, problems, and malfunctions, so check wire color against the instruction manual before wiring. n Check wiring insulation. Check that wires do not contact other circuits and that there are no ground faults or insulation faults across terminals. Overcurrent could flow in and damage the sensor. n Use a DC stabilized power supply, within the specified rating, insulated from the AC power supply. A noninsulated power supply could result in electrical shock. If power is not stabilized, the peak value could be exceeded. This could damage the product or impair accuracy. n Always attach the connector bar after connecting the connector Example of calculation FSM2-*V output impedance Ro1KΩ Internal impedance of the load Rx1MΩ Ro Output1 100 RoRx Output error 1KΩ Approx KΩ1MΩ Adjustment CAUTION n If switches are operated when flow is not stable, such as pulsating, operation may be unstable. In this case, provide sufficient margin between the two setting values and avoid setting switches in an unstable area. Confirm that switch operation is stable before use.

48 FSM2 Series During Use & Maintenance WARNING n Output accuracy is affected by temperature characteristics and heat generated when energized. Provide standby time of five minutes or more after turning power on when using. n This product does not use flow control for four seconds after power is turned ON to complete selfdiagnostics. Provide a control circuit and program that ignore signals for 4 seconds after power is turned ON. CAUTION n This product uses a micro-sensor chip, and must be installed where it will not be subject to dropping, impact or vibration. Handle this product as a precision device during installation and transportation. n If a problem occurs during operation, immediately turn power off, stop use, and contact your dealer. n Keep this product's flow within the rated flow range. n Use this product within the working pressure range. n If the output setting value is changed, control devices could operate unintentionally. Stop devices before changing settings. n Do not disassemble or modify this product. Doing so could result in faults. n The case is made of resin. Do not use solvent, alcohol or any other cleaning agent to remove contamination, etc., or the resin case could be corroded or damaged. Wipe contaminations with a well wrung rag, etc., after soaked in weakened neutral detergent. n Pay attention to reverse currents caused by disconnected wires and wiring resistance. If other devices, including a, are connected to the same power sensor as the, and the switch output wire and power cable minus (-) side are short-circuited to check the operation of the control panel s input device, or if the power cable s minus (-) side is disconnected, back current could flow to the 's switch output circuit and cause damage. Other components Diode to prevent reverse flow Control panel Main circuit Current from other components Disconnection PLC input Test or short circuit n Take the following measures to prevent damage caused by reverse current: (1) Avoid centralizing current at the power cable, especially the minus side power cable, and use as thick wire as possible. (2) Limit the number of devices connected to the same power source as the. (3) Insert a diode parallel to the 's output line to prevent current backflow. (4) Insert a diode parallel to the power wire's minus (-) side to prevent current backflow. n Pay attention to leading of surge current. When power is shared with an inductive load that generates surges, such as a solenoid valve or relay, if the circuit is cut off while the inductive load is functioning, surge current could enter the output circuit and cause damage depending on where the surge absorption element is installed. Main circuit Relay Surge absorbing element (installed later) Surge current Circuit shutdown caused by disconnection or emergency stop Solenoid valve Surge absorbing element (integrated) ON PLC Output of PLC Take countermeasures as followings to prevent damage caused by surge current leading. (1) Separate the power supply for output including the inductive load, such as the solenoid valve and relay, and input, such as the. (2) If separate power supplies cannot be used, directly install a surge absorption element for all inductive loads. Remember that the surge absorption element connected to the PLC, etc., protects only that device. (3) Connect a surge absorption element to the following places on the power wiring as shown below as a measure against disconnections in unspecific areas. Input components Input components Input components When the devices are connected to a connector, the output circuit could be damaged by the above phenomenon if the connector is disconnected while the power is ON. Turn power OFF before connecting or disconnecting the connector. n Analog output continues even if the flow range is exceeded. With the display integrated type, Hi or Lo will display. With the display separated type, the bar display will flicker. Note that this is outside guaranteed precision. n When using the display integrated type, do not press down on the display section. It could break. n Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. n The sensor chip will degrade when used for a long time and cause the detected flow to vary. Periodically inspect the sensor chip. 1275

49 FSM2 Series Needle valve integrated type FSM2-*N Series Design & Selection CAUTION n This valve can not be used as a stop valve that has no leakage. Slight leakage is allowed in product specifications. n The flow path in the needle valve is not completely free of dust generation. A final clean should be used in circuits where dust generation could be a problem. Installation & Adjustment CAUTION n Do not turn the dial with force when fully opening or closing the dial (0.05N. m or less). Do not hold the lock nut when adjusting the needle as the needle could score or break. CAUTION n Vibration could cause the needle to turn and the flow to change. During Use & Maintenance 1276

50 FSM2 Series Separated display FSM2-D Series CAUTION CAUTION Design & Selection n The voltage output (1-5V) type sensor is supported. If the current output type or other voltage output type is connected, it will not operate properly. Use the FSM2-AV* when using the FSM2. Installation & Adjustment n Cut the half stop section at the end of the e-con connector wiring before using. Insert the wire to the back of the connector, and securely crimp with pliers, etc. The wire sheath does not need to be removed. Check that the pin No. and wire color are correct before crimping. Incorrect wiring can lead to sensor or separated display damage, faults or malfunction. Insert wire to the back. Crimp with pliers, etc Blue White Black Brown Blue White Black Brown 4-conductor cable (FSM2-C4*) e-con connector Refer to page 1307 for model no. Do not mistake the color order. 1-brown, 2-black, 3-white, 4-blue Match this number to the color. n When attaching or removing the cable, hold the connector instead of the cable. Holding the cable could result in a contact fault, broken wire or short-circuit, etc., could damage the sensor or separated display, or cause malfunctions. n Do not apply a load of 15N or more onto the cable. * The e-con connector is enclosed with the separated display. 1277

51 Display integrated type / display separated type FSM2 Series Resin body type (flow range: 500ml/min. to 200l/min.) Aluminum body type (flow range: 500l/min., 1000l/min.) Stainless steel body type (flow range: 500ml/min. to 200l/min.) Display integrated type (resin/aluminum body type) specifications Descriptions Display integrated type (resin/aluminum body) FSM2-[*1][*2][*3][*4]-[*5][*6]-[*7] Full scale flow ml/min l/min l/min l/min l/min. Flow range * l/min. Note l/min l/min l/min l/min l/min. H04 ø4 push-in / resin H06 ø6 push-in / resin Port size / * 5 H08 ø8 push-in / resin body material H10 ø10 push-in / resin A15 Rc1/2 / aluminum Needle valve integrated type Note 11 * 6 N Type of display 4 digits + 4 digits Bi-color LCD Flow display Note 1, Note 2 Integrating functions Note 3 Working conditions Display range * 3 F R 0 to 500 ml/min to 500 ml/min. 0 to 1000 ml/min to 1000 ml/min. 0 to 2.00 l/min to 2.00 l/min. 0 to 5.00 l/min to 5.00 l/min. 0 to l/min to l/min. 0 to 20.0 l/min to 20.0 l/min. 0 to 50.0 l/min to 50.0 l/min. 0 to l/min to l/min. 0 to 200 l/min to 200 l/min. 0 to 500 l/min to 500 l/min. 0 to 1000 l/min to 1000 l/min. Display resolution 1ml/min. 0.01l/min. 0.1l/min. 1l/min. Display range ml l l l Display resolution 1ml 0.01l 0.1l 1l Cumulative pulse output rate 5ml 10ml 0.02l 0.05l 0.1l 0.2l 0.5l 1l 2l 5l 10l Working fluid Note 4 air (JIS B to ), compressed air (JIS B to ), nitrogen gas Max. working pressure 0.7MPa Min. working pressure -0.09MPa Withstanding pressure 1MPa Ambient temperature/humidity 0 to 50 C, 90%RH or less Working fluid temperature 0 to 50 C (with no dew condensation) Guaranteed accuracy range 3 to 100%F.S. Linearity (display/analog output) ±3%F.S. or less (secondary side released to atmosphere, 25 C) Note 12 Pressure characteristics ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) Temperature characteristics ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) Repeatability ±1%F.S. or less Response time Note 5 50ms or less N Output 2 points (NPN open collector output, 50mA or less, voltage drop 2.4V or less) Switch output * 1 P Output 2 points (PNP open collector output, 50mA or less, voltage drop 2.4V or less) V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Analog output * 2 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 6 * 2 A 24VDC (21.6 to 26.4V) Current consumption Note 7 50mA or less Lead wire ø3.7, AWG26 or equivalent 5-conductors (connector connection), insulator outer diameter ø1.0 Functions Flow display, flow display peak hold, switch output, analog output, etc. Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 8 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection EMC directive EN55011, EN , EN /3/4/6/8 H04 Approx. 50g (approx. 80g with needle valve) H06 Approx. 50g (approx. 80g with needle valve) Weight (main body only) * 5 H08 Approx. 70g (approx. 110g with needle valve) H10 Approx. 75g (approx. 115g with needle valve) A15 Approx. 155g room specifications * 7 P70 Dust generation preventing Note 9 P80 Oil-prohibited Note 10 Precision Output Installation 1278

52 Display integrated type (stainless steel body type) specifications FSM2 Series Specifications Descriptions Flow range Note 1 Port size / body material * 4 * 5 Display integrated type (stainless steel body) FSM2-[*1][*2][*3][*4]-[*5][*6][*7]-[*8] Full scale flow ml/min l/min l/min l/min l/min l/min l/min l/min l/min. S06 Rc1/8 stainless steel (Not for carbon dioxide) S08 Rc1/4 stainless steel Only air and nitrogen gas M5 stainless steel SM5 (custom order) (Not for carbon dioxide) * 7 Type of display 4 digits + 4 digits Bi-color LCD Needle valve integrated type Note 11 N Flow display Note 1, Note 2 Display range * 3 F R 0 to 500 ml/min to 500 ml/min. 0 to 1000 ml/min to 1000 ml/min. 0 to 2.00 l/min to 2.00 l/min. 0 to 5.00 l/min to 5.00 l/min. 0 to l/min to l/min. 0 to 20.0 l/min to 20.0 l/min. 0 to 50.0 l/min to 50.0 l/min. 0 to l/min to l/min. 0 to 200 l/min to 200 l/min. Display resolution 1ml/min. 0.01l/min. 0.1l/min. 1l/min. Display range ml l l l Integrating functions Display resolution 1ml 0.01l 0.1l 1l Note 3 Cumulative pulse output rate 5ml 10ml 0.02l 0.05l 0.1l 0.2l 0.5l 1l 2l Blank air (JIS B to ), compressed air (JIS B to ), nitrogen gas Working fluid * 6 AR Argon Note 4 C2 Carbon dioxide Max. working pressure 1.0MPa Min. working pressure -0.09MPa Withstanding pressure 1.5MPa Ambient temperature/humidity 0 to 50 C, 90%RH or less Working fluid temperature 0 to 50 C (with no dew condensation) Guaranteed accuracy range 3 to 100%F.S. Linearity (display/analog output) ±3%F.S. or less (secondary side released to atmosphere, 25 C) Pressure characteristics ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) Temperature characteristics ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) Repeatability ±1%F.S. or less Response time Note 5 50ms or less N Output 2 points (NPN open collector output, 50mA or less, voltage drop 2.4V or less) Switch output * 1 P Output 2 points (PNP open collector output, 50mA or less, voltage drop 2.4V or less) V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 12 Analog output * 2 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 6 * 2 A 24 VDC (21.6 to 26.4V) Current consumption Note 7 50mA or less Lead wire ø3.7, AWG26 or equivalent 5-conductors (connector connection), insulator outer diameter ø1.0 Functions Flow display, flow display peak hold, switch output, analog output, etc. Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 8 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection EMC directive EN55011, EN , EN /3/4/6/8 S06 Approx. 95g (approx. 160g with needle valve) Weight (main body only) * 5 S08 Approx. 115g (approx. 200g with needle valve) SM5 Approx. 140g room specifications * 8 P70 Dust generation preventing Note 9 P80 Oil-prohibited Note 10 Working conditions Precision Output Installation Note 1: Converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). Note 2: The flow display is rounded off at approx. ±1%F.S. or less(forced zero). Note 3: The cumulative flow is a calculated (reference value). It is reset when the power is turned OFF. Note 4: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. When using compressed air, use clean air that complies to JIS B : 2003 Class to Compressed air fed from a compressor contains drainage (water, oxidized oil, debris, etc.). To maintain the functions of this product, attach a to the primary side (upstream) of the product, an air dryer (minimum pressure dew point 10 C or less), and an oil mist (maximum coil concentration 0.1mg/m 3 ). <Recommended circuit> Oil mist Filter (Micro alescer) <Recommended component> : F Series Oil mist : M Series Pneumatics pressure source dryer Regulator FSM2 Series Note 5: Response time can be set in seven steps from 50ms. or less to approx. 1.5s. Note 6: The power voltage specifications differ for the voltage output type and current output type. Note 7: Current for when 24VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected. Note 8: This product s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various mis-connections. Note 9: <P70> Particle prevention (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class 1000 or more). Note 10: <P80> Oil-prohibited (In addition to P70 specifications, wetted sections are degreased and washed. Refer to the Internal structure drawing and parts list for details on the wetted section members.) Note 11: Do not use this product as a stop valve which requires zero leakage. The product specifications are designed to tolerate a slight leak. Note 12: The output impedance of the analog output section is 1KΩ. If the impedance of the connected load is small, output error increases. Check error with the impedance of the connected load before using. 1279

53 FSM2 Series Display separate type (resin/aluminum body type) specifications Descriptions Display separate type(resin/aluminum body) FSM2-A[*1][*2][*3]-[*4]-[*5] Full scale flow ml/min l/min l/min l/min l/min. Flow range * l/min. Note /min l/min l/min l/min l/min. H04 ø4 push-in / resin H06 ø6 push-in / resin Port size / * 4 H08 ø8 push-in / resin body material H10 ø10 push-in / resin A15 Rc1/2 / aluminum F Single-direction Flow direction * 2 R Bi-directional Working fluid Note 2 air (JIS B to ), compressed air (JIS B to ), nitrogen gas Max. working pressure 0.7MPa Min. working pressure -0.09MPa Withstanding pressure 1MPa Ambient temperature/humidity 0 to 50 C, 90%RH or less Working fluid temperature 0 to 50 C (with no dew condensation) Guaranteed accuracy range 3 to 100%F.S. Linearity (analog output) ±3%F.S. or less (secondary side released to atmosphere, 25 C) Pressure characteristics ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) Temperature characteristics ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) Repeatability ±1%F.S. or less Response time 50ms or less Type of display Flow bar display V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 2 Analog output * 1 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 3 * 1 A 24VDC (21.6 to 26.4V) Current consumption Note 4 50mA or less Lead wire ø3.7, AWG26 or equivalent 4-conductors (connector connection), insulator outer diameter ø1.0 Functions Analog output, flow bar display, error display Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 5 Power supply reverse connection protection EMC directive EN55011, EN , EN /3/4/6/8 H04 Approx. 40g H06 Approx. 40g Weight (main body only) * 4 H08 Approx. 60g H10 Approx. 65g A15 Approx. 145g P70 Dust generation preventing Note 6 room specifications * 5 P80 Oil-prohibited Note 7 Working conditions Precision Output Installation 1280

54 Display separate type (stainless steel body type) specifications FSM2 Series Specifications Descriptions Flow range Note 1 Port size / body material * 3 * 4 Display separate type(stainless steel body) FSM2-A[*1][*2][*3]-[*4][*5]-[*6] Full scale flow ml/min l/min l/min l/min l/min l/min l/min l/min l/min. S06 Rc1/8 stainless steel (Not for carbon dioxide) S08 Rc1/4 stainless steel Only air and nitrogen gas M5 stainless steel SM5 (custom order) F Flow direction * 2 R Working conditions Precision Output Installation (Not for carbon dioxide) Single-direction Bi-directional air (JIS B to ), compressed air (JIS B to ), nitrogen gas Argon Carbon dioxide 1.0MPa -0.09MPa 1.5MPa 0 to 50 C, 90%RH or less 0 to 50 C (with no dew condensation) 3 to 100%F.S. ±3%F.S. or less (secondary side released to atmosphere, 25 C) ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) ±1%F.S. or less 50ms or less Flow bar display Blank Working fluid * 5 AR Note 2 C2 Max. working pressure Min. working pressure Withstanding pressure Ambient temperature/humidity Working fluid temperature Guaranteed accuracy range Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Response time Type of display V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 8 Analog output * 1 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 3 * 1 A 24 VDC (21.6 to 26.4V) Current consumption Note 4 50mA or less Lead wire ø3.7, AWG26 or equivalent 4-conductors (connector connection), insulator outer diameter ø1.0 Functions Analog output, flow bar display, error display Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 5 Power supply reverse connection protection EMC directive EN55011, EN , EN /3/4/6/8 S06 Approx. 85g Weight (main body only) * 4 S08 Approx. 105g SM5 Approx. 130g room specifications * 6 P70 Dust generation preventing Note 6 P80 Oil-prohibited Note 7 Note 1: Converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). Note 2: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. When using compressed air, use clean air that complies to JIS B : 2003 Class to Compressed air fed from a compressor contains drainage (water, oxidized oil, debris, etc.). To maintain the functions of this product, attach a to the primary side (upstream) of the product, an air dryer (minimum pressure dew point 10 C or less), and an oil mist (maximum coil concentration 0.1mg/m 3 ). <Recommended circuit> Oil mist Filter (Micro alescer) <Recommended component> Pneumatics pressure source dryer Regulator FSM2 Series : F Series Oil mist : M Series Note 3: The power voltage specifications differ for the voltage output type and current output type. Note 4: Current for when 24 VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected. Note 5: This product s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various mis-connections. Note 6: <P70> Particle prevention (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class 1000 or more). Note 7: <P80> Oil-prohibited (In addition to P70 specifications, wetted sections are degreased and washed. Refer to the Internal structure drawing and parts list for details on the wetted section members.) Note 8: The output impedance of the analog putput section is 1 kω. If the impedance of the connected load is small, output error increases. Check error with the impedance of the connected load before using. 1281

55 FSM2 Series Separate indicator specifications Descriptions Separate indicator FSM2-D-[*1][*2]-*-[*3] ml 5,10,50,100,500 Settable flow range Note 1 1,2,4,5,10,12,20,25,32,50,100, l 200, 500, 1000, 1500 Ambient temperature/humidity 0 to 50 C Type of display 4 digits + 4 digits Bi-color LCD Input voltage 1 to 5V N Output 2 points (NPNopen collector output, 50mA or less, voltage drop 2.4V or less) Switch output * 1 P Output 2 points (PNPopen collector output, 50mA or less, voltage drop 2.4V or less) V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 6 Analog output * 2 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power voltage * 2 A 24 VDC (21.6 to 26.4V) Current consumption Note 2 40mA or less (at 24VDC, with no load connected) Lead wire ø3.7, AWG26 or equivalent 5-conductors (connector connection), insulator outer diameter ø1.0 Functions Flow display, flow display peak hold, switch output, analog output, etc. Protective structure IEC standards IP40 Protective circuit Note 3 Power supply reverse connection protection EMC directive EN55011, EN , EN /3/4/6/8 Accessory One sensor connection connector (e-con), applicable cable AWG24 to 26, insulator outer diameter ø1.0 to 1.2 Weight (main body only) Approx. 40g room specifications Note 4 * 3 P70 Dust generation preventing Output Note 1: The flow range, flow direction and gas type are automatically recognized only when the FSM2 display separated type is connected. (Default state) The FSM-H Series, SFM-V Series and WFK3000 Series flow ranges are supported in addition to the FSM2 Series, but automatic recognition is supported only with the FSM2 Series. Always set the product s flow range, flow direction and gas type before starting use. The connectable flow ranges are shown in Display for each flow range below. When the sensor section is changed, the previous flow range settings, etc., will still be recorded. Always reset the settings before using. Note 2: Current for when 24 VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected. Note 3: This product s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various mis-connections. Note 4: <P70> Particle prevention (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class 1000 or more). Note 5: When connecting to the FSM-V Series or WFK3000 Series, the cable size is different so the separate compatible sensor connection connector (e-con) will be required. Contact the CKD Sales Office or dealer for more information. The enclosed sensor connection connector (e-con) can be used with the FSM Series and FSM-H Series. Note 6: The output impedance of the analog output section is 1KΩ. If the impedance of the connected load is small, output error increases. Check error with the impedance of the connected load before using. Display for each flow range Flow display Display range Singledirection Bidirectional 0 to 500 ml/min to 500 ml/min. 0 to 1000 ml/min to 1000 ml/min. 0 to 2.00 l/min. -2 to 2.00 l/min. 0 to 4.00 l/min. - 0 to 5.00 l/min. -5 to 5.00 l/min. 0 to l/min. -10 to l/min. 0 to 12.0 l/min. - 0 to 20.0 l/min. -20 to 20.0 l/min. 0 to 25.0 l/min. 0 to 32.0 l/min to 50.0 l/min. -50 to 50.0 l/min. 0 to l/min to l/min. 0 to 200 l/min to 200 l/min. 0 to 500 l/min to 500 l/min. 0 to 1000 l/min to 1000 l/min. 0 to 1.50 m 3 /min to 1.50 m 3 /min. 0 to 5.00 ml/min to 5.00 ml/min. 0 to ml/min. -10 to ml/min. 0 to 50.0 ml/min. -50 to 50.0 ml/min. 0 to ml/min to ml/min. Display resolution 1ml/min. 0.01l/min. 0.1l/min. 1l/min. 0.01m 3 /min. 0.01ml/min. 0.1ml/min. Display range ml l l l m ml ml Display resolution 1ml 0.01l 0.1l 1l 0.01m ml 0.1ml Cumulative pulse output rate 5ml 10ml 0.02l 0.04l 0.05l 0.1l 0.12l 0.2l 0.25l 0.32l 0.5l 1l 2l 5l 10l 15l 0.05ml 0.1ml 0.5ml 1ml * The voltage output (1-5V) type sensor is supported. If the current output type or other voltage output type is connected, it will not operate properly. Integrating functions 1282

56 MEMO 1283

57 FSM2 Series How to order Display integrated type, display separated type, needle valve integrated type FSM2 A V R 005 S06 AR 1 B K N P70 A Output type B Analog output type Note 2 C Flow direction D Flow range * Refer to the table on the next page for the flow range, port size (body material), and gas type combinations. E Port size (Body material) Note 3 <Example of model number> F Gas type FSM2-NVF005-S06AR1BKN-P70 Model: small size FSM2 A Output type : Display integrated type (NPN) B Analog output type : Voltage output (1-5V) G Cable C Flow direction : Single-direction D Flow range : 500ml/min. E Port size (body material) : Rc1/8(stainless steel) F Gas type G Cable : Argon : 1m H Bracket H Bracket : With bracket I Traceability : With company certification J With needle valve : With needle valve I Traceability K room specifications : Dust generation preventing Note on model no. selection Note 1: For the item "A" output type A, the H panel mounting option P cannot be selected. The separated display is not enclosed with the item "A"output type A. Note 2: When using the FSM2-D for the separated display with the display separated type, select V. Note 3: When the item "E" port size A15, the H panel mounting option P cannot be selected. J With needle valve K room specifications Symbol Descriptions A Output type A Note 1 Display separated type (one analog output point only) (Setting not valid for type with needle valve) N Display integrated type (switch output (NPN)2 points, analog output 1 point) P Display integrated type (switch output (PNP)2 points, analog output 1 point) B Analog output type V Voltage output (1-5V) A Current output (4-20mA) C Flow direction F Single-direction R Bi-directional (Setting not valid for type with needle valve) D Flow range (Full scale flow) ml/min l/min l/min l/min l/min l/min l/min l/min l/min l/min. (Setting not valid for type with needle valve) l/min. (Setting not valid for type with needle valve) E Port size (body material) H04 Push-in ø4 (resin) H06 Push-in ø6(resin) H08 Push-in ø8 (resin) H10 Push-in ø10 (resin) S06 Rc1/8 (stainless steel) S08 Rc1/4 (stainless steel) A15 Rc1/2(aluminum) (Setting not valid for type with needle valve) SM5 M5 (stainless steel) (custom order) (Setting not valid for type with needle valve) F Gas type Blank and nitrogen gas AR Argon C2 Carbon dioxide G Cable Blank None 1 1m 3 3m H Bracket Blank None B With bracket P Note 1 With panel mounting option I Traceability Blank None T K With company certification With treaceability certificate, diagram and inspection results J With needle valve Blank None N Needle valve integrated type K room specifications Blank None P70 Dust generation preventing P80 Oil-prohibited 1284

58 Flow range, port size (body material), and gas type combinations D Flow range Port size and clean specification combinations J room specifications E Port ;size (body material) H04 H06 H08 H10 S06 S08 A15 SM E Port size (body material) H04 H06 H08 H10 S06 S08 A15 SM5 P70 P80 FSM2 Series How to order F Gas type : and nitrogen gas : Argon : Carbon dioxide : Not available J With needle valve : Needle valve integrated type : Available : Not available Discrete option model no. FSM2 LB1 P70 Symbol Descriptions Symbol Descriptions A Option B room specifications A Option LB1 Bracket (ø4,ø6,ø8,ø10,rc1/8,rc1/4,m5) Blank None B room specifications LB2 Bracket (Rc 1/2) P70 Dust generation preventing KHS Panel mounting kit (for display integrated type, for separated display) KHS-N Panel mounting kit set (for needle valve integrated type) C51 5-core cable 1m (for display integrated type, for separated display) C53 5-core cable 3m (for display integrated type, for separated display) C41 4-core cable 1m (for display separated type) C43 4-core cable 3m (for display separated type) * The panel mounting kit cannot be mounted on the FSM2-*-A15* type. Separate indicator FSM2 D N V 3 P P70 A Output type B Analog output type C Cable D Bracket E room specifications Discrete option model no. FSM2 KHS P70 A Option B room specifications Symbol Descriptions A Output type N Switch output (NPN)2 points, analog output 1 point P Switch output (PNP)2 points, analog output 1 point B Analog output type V Voltage output (1-5V) A Current output (4-20mA) C Cable Blank None 1 1m 3 3m D Bracket Blank None P With panel mounting option Symbol Descriptions A Option KHS Panel mounting kit set C51 5-core cable 1m (for display integrated type, for separated display) C53 5-core cable 3m (for display integrated type, for separated display) EC Sensor connection connector (e-con) 5 pc. set B room specifications Blank None P70 Dust generation preventing E room specifications Blank None P70 Dust generation preventing The voltage output (1-5V) type sensor is supported. If the current output type or other voltage output type is connected, it will CAUTION not operate properly. Use the FSM2-AV* when using the FSM

59 FSM2 Series Internal structure and parts list Display integrated type resin body port size ø6 push-in Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Liquid crystal cover Acryl resin 8 Resin body ( ) Polyamide resin 2 Liquid crystal - 9 Sensor chip ( ) Semiconductor chip 3 Switch EPDM 10 Rectification ( ) Stainless steel 4 Substrate spacer Polycarbonate resin 11 Port ( ) Stainless steel 5 Module holder Polyamide resin 12 Sensor circuit board ( ) Alumina 6 Push-in joint - 13 n circuit board - 7 Sensor gasket ( ) Fluoro rubber 14 Case ABS resin ( ) P80 specification washed part Display separate type stainless steel body port size Rc1/ Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Front seat PET film 8 Spacer( ) Stainless steel 2 Case ABS resin 9 Port ( ) Stainless steel 3 n circuit board - 10 Rectification ( ) Stainless steel 4 Module holder Polyamide resin 11 Sensor chip ( ) Semiconductor chip 5 C ring Stainless steel( ) 12 Stainless steel body( ) Stainless steel 6 O-ring holder Stainless steel( ) 13 Sensor gasket ( ) Fluoro rubber 7 O ring Fluoro rubber ( ) 14 Sensor circuit board ( ) Alumina 1286 ( ) P80 specification washed part

60 Internal structure and parts list FSM2 Series Internal structure and parts list Display separate type aluminum body port size Rc1/ Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Front seat PET film 8 Spacer( ) Aluminum 2 Case ABS resin 9 Port ( ) Stainless steel 3 n circuit board - 10 Rectification ( ) Stainless steel 4 Module holder Polyamide resin 11 Sensor chip ( ) Semiconductor chip 5 C ring ( ) Stainless steel 12 Aluminum body( ) Aluminum 6 O-ring holder Stainless steel 13 Sensor gasket ( ) Fluoro rubber 7 O ring( ) Fluoro rubber 14 Sensor circuit board ( ) Alumina ( ) P80 specification washed part 1287

61 FSM2 Series Internal structure and parts list Sensor with needle valve (resin body) FSM2-*-H*N Sensor section Note Main parts list No. Parts name Material No. Parts name Material 1 Knob PBT 9 fixing pin Stainless steel 2 lock nut Brass/nickeling 10 Needle valve body Polyamide resin 3 Needle guide Brass/nickeling 11 Port Stainless steel 4 Needle Brass/nickeling Note 2 12 O ring Fluoro rubber 5 Fixing pin Stainless steel 13 Orifice Brass/nickeling Note 3 6 O ring Fluorine rubber (fluorine resin coating) 14 fixing pin Stainless steel 7 O ring Fluorine rubber (fluorine resin coating) 15 O ring Fluorine rubber (fluorine resin coating) 8 Cartridge joint - Note 1: Refer to page 1286 for details on the sensor s main components. Note 2: The needle is stainless steel for FSM2-*005/010/020. Note 3: The orifice is PTFE for the FSM2-*005/010/020. * The part materials are subject to change without notice. Sensor with needle valve (stainless steel body) FSM2-*-S*N Sensor section Note Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Knob PBT 8 Needle valve body Stainless steel 2 lock nut Brass/nickeling 9 Port Stainless steel 3 Needle guide Stainless steel 10 O ring Fluoro rubber 4 Needle Stainless steel 11 Orifice PTFE 5 Fixing pin Stainless steel 12 Spring pin Stainless steel 6 O ring Fluorine rubber (fluorine resin coating) 13 O ring Fluorine rubber (fluorine resin coating) 7 O ring Fluorine rubber (fluorine resin coating) Note 1: Refer to page 1286 for details on the sensor s main components. 1288

62 Internal structure and parts list FSM2 Series Internal structure and parts list Separate indicator FSM2-D-* Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Liquid crystal cover Acryl resin 5 Rear side guard Polyamide resin 2 Liquid crystal - 6 n circuit board - 3 Switch EPDM 7 Case ABS resin 4 Substrate spacer Polycarbonate resin 1289

63 FSM2 Series Dimensions (display integrated type) Display integrated type, port size: push-in ø4, ø6 FSM2-N/P*-H04/H06* (full scale flow: 0.5, 1, 2, 5, 10, 20, 50 l/min.) ø4 or ø6 Push-in joint 2-ø3.4 penetrating 27 (A) 9.5 (24.2) 2-M3 depth Model no. (A) dimensions FSM2-N/P*-H04* Push-in ø4 64 FSM2-N/P*-H06* Push-in ø6 65 Display integrated type, port size: push-in ø8, ø10 FSM2-N/P*-H08/H10* (full scale flow: 50, 100, 200 l/min.) (30.2) ø8 or ø10 Push-in joint 2-ø3.4 penetrating 27 (A) 2-M3 depth Model no. (A) dimensions FSM2-N/P*-H08* Push-in ø FSM2-N/P*-H10* Push-in ø

64 Dimensions (display integrated type) Display integrated type, port size: Rc1/8, M5 FSM2-N/P*-S06/SM5*(full scale flow: 0.5, 1, 2, 5, 10, 20, 50 l/min.) FSM2 Series Dimensions (24.2) ø3.4 penetrating 27 Rc1/8 or M M3 depth Display integrated type, port size: Rc1/4 FSM2-N/P*-S08*(full scale flow: 50, 100, 200 l/min.) 2-ø3.4 penetrating Rc1/ (30.2) M3 depth

65 FSM2 Series Dimensions (display integrated type) Display integrated type, port size: Rc1/2 FSM2-N/P*-A15*(full scale flow: 500, 1000 l/min.) 80 2-M3 depth (37) Rc1/

66 Dimensions (display separate type) Display separate type, port size: push-in ø4, ø6 FSM2-A*-H04/H06*(full scale flow: 0.5, 1, 2, 5, 10, 20, 50 l/min.) FSM2 Series Dimensions 8.5 (24.2) ø4 or ø6 Push-in joint 2-ø3.4 penetrating 27 (A) 2-M3 depth Model no. (A) dimensions FSM2-A*-H04* Push-in ø4 64 FSM2-A*-H06* Push-in ø6 65 Display separate type, port size: push-in ø8, ø10 FSM2-A*-H08/H10*(full scale flow: 50, 100, 200 l/min.) 13 (30.2) ø8 or ø10 Push-in joint 2-ø3.4 penetrating 27 (A) 2-M3 depth Model no. (A) dimensions FSM2-A*-H08* Push-in ø FSM2-A*-H10* Push-in ø

67 FSM2 Series Dimensions (display separate type) Display separate type, port size: Rc1/8, M5 FSM2-A*-S06/SM5*(full scale flow: 0.5, 1, 2, 5, 10, 20, 50l/min.) (24.2) ø3.4 penetrating 27 Rc1/8 or M5 2-M3 depth Display separate type, port size: Rc1/4 FSM2-A*-S08*(full scale flow: 50, 100, 200 l/min.) Rc1/ (30.2) ø3.4 penetrating 27 2-M3 depth

68 Dimensions (display separate type) Display separate type, port size: Rc1/2 FSM2-A*-A15*(full scale flow: 500, 1000l/min.) FSM2 Series Dimensions Rc1/2 (37) 15 2-M3 depth

69 FSM2 Series Dimensions (display integrated type, needle valve integrated type) Display integrated type, port size: push-in ø4, ø6 FSM2-N/P*-H04/H06*N (full scale flow: 0.5, 1, 2, 5, 10, 20, 50l/min.) (24.2) (10.5 to 19) ø4 or ø6 Push-in joint 2-ø3.4 penetrating (A) 2-M3 depth Model no. (A) dimensions FSM2-N/P*-H04* Push-in ø4 89 FSM2-N/P*-H06* Push-in ø6 90 Display integrated type, port size: push-in ø8, ø10 FSM2-N/P*-H08/H10*N (full scale flow: 50, 100, 200l/min.) (30.2) (10.5 to 19) ø8 or ø10 Push-in joint 2-ø3.4 penetrating (A) 2-M3 depth Model no. (A) dimensions FSM2-N/P*-H08* Push-in ø FSM2-N/P*-H10* Push-in ø

70 Dimensions (display integrated type, needle valve integrated type) FSM2 Series Dimensions Display integrated type, port size: Rc1/8 FSM2-N/P*-S06*N (full scale flow: 0.5, 1, 2, 5, 10, 20, 50l/min.) Rc1/8 2-ø3.4 penetrating 9.5 (24.2) (10.5 to 19) M3 depth Display integrated type, port size: Rc1/4 FSM2-N/P*-S08/*N (full scale flow: 50, 100, 200l/min.) 2-ø3.4 penetrating (30.2) (10.5 to 19) Rc1/ M3 depth

71 FSM2 Series Dimensions with options (B: with bracket) Display integrated type, port size: push-in ø4, ø6, Rc1/8, M5 FSM2-N/P*-H04/H06/S06/SM5*B (full scale flow: 0.5, 1, 2, 5, 10, 20, 50l/min.) 30 R (29.2) Display integrated type, port size: push-in ø8, ø10, Rc1/4 FSM2-N/P*-H08/H10/S08*B (full scale flow: 50, 100, 200l/min.) 30 R (35.2)

72 Dimensions with options (B: with bracket) Display integrated type, port size: Rc1/2 FSM2-N/P*-A15*B (full scale flow: 500, 1000l/min.) FSM2 Series Dimensions with options 65 R (42) Display separate type, port size: push-in ø4,ø6, Rc1/8, M5 FSM2-A*-H04/H06/S06/SM5*B (full scale flow: 0.5, 1, 2, 5, 10, 20, 50l/min.) 30 R (29.2)

73 FSM2 Series Dimensions with options (B: with bracket) Display separate type, port size: push-in ø8, ø10, Rc1/4 FSM2-A*-H08/H10/S08*B (full scale flow: 50, 100, 200l/min.) 30 R (35.2) Display separate type, port size: Rc1/2 FSM2-A*-A15*B (full scale flow: 500, 1000l/min.) 65 R (42)

74 Dimensions with options (B: with bracket) FSM2 Series Dimensions with options Needle valve integrated type, port size: push-in ø4, ø6. Rc1/8 FSM2-N/P*-H04/H06/S06*BN (full scale flow: 0.5, 1, 2, 5, 10, 20, 50l/min.) R (29.2) Needle valve integrated type, port size: push-in ø8, ø10, Rc1/4 FSM2-N/P*-H08/H10/S08*BN (full scale flow: 50, 100, 200l/min.) R (35.2)

75 FSM2 Series Outline dimensions with options mounted (P: with panel mounting kit option) Display integrated type (Panel cut dimensions) 61 For single part mounting 4-R 57.5±0.5 r le ss 22.5± Panel vessel Panel vessel retainer 2- fixing screw Tightening torque 0.06N m o For seated mounting 57.5±0.5 1o r le ss A B R Model no. FSM2-N/P*-H04/H06/S06/SM5* FSM2-N/P*-H08/H10/S08* A B Panel holder (n-1) * Cannot be mounted on FSM-N/P*-A15*. Panel thickness 6mm or less Needle valve integrated type 95 (Panel cut dimensions) 88 For single part mounting 4-R 1o 74.5±0.5 r le ss 22.5± Panel vessel 1.4 Panel vessel retainer 2- fixing screw Tightening torque 0.06N m For seated mounting 4-R B 4 1o ss 22.5±0.5 A ±0.5 r le B (n-1) A Model no. FSM2-N/P*-H04/H06/S06*N FSM2-N/P*-H08/H10/S08*N 28 Panel holder Panel thickness 6mm or less 1302

76 Option external dimensions Bracket Model no.: FSM2-LB1 (Full scale flow: 0.5, 1, 2, 5, 10, 20, 50, 100, 200 l/min.) Model no.: FSM2-LB2 (Full scale flow: 500, 1000 l/min.) FSM2 Series Dimensions with options R ø ø3.5 5 * Enclosed two M3 (length 6mm) setscrews for fixing R * Enclosed two M3 (length 6mm) setscrews for fixing Cable option Model no.: FSM2-C51,C53 5-conductor cable (display integrated type FSM2-N/P*-*, separate indicator FSM2-D) 30 or less 5-AWG26 L Connector guard Material: EPDM 25 Half stop Terminal No. Cable color 1 Brown 2 Black 3 White 4 Gray 5 Blue Housing: JST GHR-05V-S Contact: JST 5-SSHL-002T-P0.2 (3.7) Halogen-free wire 5 Model no. (L) dimensions FSM2-C ±20 FSM2-C ±20 Model no.: FSM2-C41,C43 4-conductor cable (display separate type FSM2-A*-*) 30 or less 4-AWG26 L Connector guard Material: EPDM 25 Half stop Terminal No. Cable color 1 Brown 2 Black 3 White 4 Blue Housing: JST GHR-04V-S Contact: JST 4-SSHL-002T-P0.2 (3.7) Halogen-free wire 5 Model no. (L) dimensions FSM2-C ±20 FSM2-C ±

77 FSM2 Series Separate indicator dimensions FSM2-D ー * ø2.6 depth 7 Outline dimensions with panel mounting kit option mounted (Panel cut dimensions) For single part mounting 4-R1 or less 57.5± ±0.5 Opening width 22.5 Panel vessel retainer 2- fixing screw Tightening torque 0.06N m Panel vessel For seated mounting 4-R1 or less 57.5± Panel holder (n-1) 4 With sensor side connector (e-con) connected Panel thickness 6mm or less 1304

78 MEMO 1305

79 FSM2 Series Example of internal circuit and load connection FSM2-N* ー *(display integrated type NPN output) FSM2-D-N* ー *(separate indicator NPN output) <CH2 is used as output> <CH2 is used as external input> (Brown) power supply + 1 (Black) CH1 Load output 1 2 (Brown) power supply + 1 (Black) CH1 Load output 1 2 Main circuit (White) CH2 output 2 3 Load Main circuit 3 (White) CH2 External input R* (Gray) analog output 4 (Blue) power supply - 5 Load R* (Gray) analog output 4 (Blue) power supply - 5 Load *Analog output voltage output type Analog output current output type R: approx. 1KΩ R: approx. 100Ω Terminal No. Option cable color Name Brown Power supply + (voltage output: 12 to 24V, Current output: 24V) Black CH1(switch output 1: max50ma) White CH2(switch output 2: max50ma, or external input) (FSM2 side) Gray Analog output Voltage output: 1-5V load impedance 50kΩ and over Current output: 4-20mA load impedance 300Ω or less Blue Power supply -(GND) FSM2-P* ー *(display integrated type PNP output) FSM2-D-P* ー *(separate indicator PNP output) <CH2 is used as output> <CH2 is used as external input> (Brown) power supply (Brown) power supply + Main circuit 2 3 (Black) CH1 output 1 (White) CH2 output 2 Load Main circuit 2 3 (Black) CH1 output 1 (White) CH2 External input Load (FSM2 side) Load R* (Gray) analog output R* 4 (Blue) power Load supply - 5 Terminal No. *Analog output voltage output type R: approx. 1KΩ Analog output current output type R: approx. 100Ω Option cable color Name Brown Power supply + (voltage output: 12 to 24V, Current output: 24V) Black CH1(switch output 1: max50ma) White CH2(switch output 2: max50ma, or external input) Gray Analog output Voltage output: 1-5V load impedance 50kΩ and over Current output: 4-20mA load impedance 300Ω or less Blue Power supply -(GND) 4 5 (Gray) analog output (Blue) power supply - Load 1306

80 Example of internal circuit and load connection FSM2 Series Technical data FSM2-A* ー *(display separate type) Main circuit (Brown) power supply + (Black) analog output (White) N.C. (model identification signal) Load Terminal No. Option cable Name color Brown Power supply + (voltage output: 12 to 24V, Current output: 24V) Analog output Voltage output: 1-5V Load impedance 50kΩ and over Black Current output: 4-20mA Load impedance 300Ω or less (Blue) power supply - *Analog output voltage output type R: approx. 1KΩ Analog output current output type R: approx. 100Ω White Blue N.C. (model identification signal; do not connect when using as single part) Power supply -(GND) (FSM2 side) Connecting the separated display and FSM2 display separated type e-con Sumitomo 3M wire mount plug FL Connecting the separated display and FSM2 display separated type e-con Sumitomo 3M wire mount plug FL Separate indicator (FSM2-D-*) (Brown) power supply + (Black) sensor (White) N.C. (model identification signal) (Blue) power supply - FSM2 display separated type Voltage output type (FSM2-AV*) (Current output type cannot be connected) Separate indicator (FSM2-D-*) (Brown) power supply + (Black) sensor Not connected (Blue) power supply - FSM display separated type (FSM-A-*-* / FSM-H-A-*-*) e-con Sumitomo 3M mini plug board mount socket Straight, signal-row type B3-004 PL Analog output characteristics e-con Sumitomo 3Mmini plug board mount socket Straight, signal-row type b3-004 PL When connecting to the FSM-V Series or WFK3000 Series, the cable size is different so the separate compatible sensor connection connector (e-con) will be required. Voltage output type uni-direction flow Current output type uni-direction flow 5 20 Analog output (V) F.S. flow Flow /min. Voltage output type bi-direction flow Current output type bi-direction flow Analog output (V) 5 3 Analog output (ma) Analog output (ma) Flow /min F.S. flow F.S. flow 0 F.S. flow - F.S. flow Flow /min. 0 Flow /min. With the display integrated bi-directional type, output can be changed to a uni-direction output with the button settings. Refer to page 1318 for details. F.S. flow 1307

81 FSM2 Series Pressure loss characteristics (air, nitrogen gas) FSM2-*005-* FSM2-*010-* Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*020-* FSM2-*050-* Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*100-* FSM2-*200-* Pressure loss (kpa) Flow (/min.) Pressure loss (kpa) Flow (/min.) 1308

82 Pressure loss characteristics (air, nitrogen gas) FSM2-*500-* FSM2-*101-* FSM2 Series Technical data Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*201-* FSM2-*501-* Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*102-* Pressure loss (kpa) Flow (/min.) 1309

83 FSM2 Series Pressure loss characteristics (argon) FSM2-*005-*AR FSM2-*010-*AR Pressure loss (kpa) Pressure loss (kpa) FSM2-*020-*AR Flow (/min.) FSM2-*050-*AR Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*100-*AR FSM2-*200-*AR Pressure loss (kpa) Pressure loss (kpa) FSM2-*500-*AR Flow (/min.) FSM2-*101-*AR Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) 1310

84 Pressure loss characteristics (carbon dioxide) FSM2-*005-*C2 FSM2-*010-*C2 FSM2 Series Technical data Pressure loss (kpa) Pressure loss (kpa) FSM2-*020-*C2 Flow (/min.) FSM2-*050-*C2 Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) FSM2-*100-*C2 Flow (/min.) FSM2-*200-*C2 Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) FSM2-*500-*C2 Flow (/min.) FSM2-*101-*C2 Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) 1311

85 FSM2 Series Flow charasteristics with needle valve (air, nitrogen gas) FSM2-*005/010/020 (resin body) FSM2-*050/100 (resin body) Flow [/min.(anr)] Number of needle turn Flow [/min.(anr)] Number of needle turn FSM2-*200/500-H04/H06 (resin body) FSM2-*500/101/201-H08/H10 (resin body) Flow [/min.(anr)] Number of needle turn FSM2-*005/010/020 (Stainless steel body) Flow [/min.(anr)] Number of needle turn FSM2-*050/100 (Stainless steel body) Flow [/min.(anr)] Flow [/min.(anr)] Number of needle turn Number of needle turn FSM2-*200/500-S06 (Stainless steel body) FSM2-*500/101/201-S08 (Stainless steel body) Flow [/min.(anr)] Flow [/min.(anr)] Number of needle turn Number of needle turn 1312 CAUTION: This characteristic value is a typical value and is not a guaranteed value.

86 MEMO 1313

87 FSM2 Series Names and functions of display and operation section Display integrated type Main display area (green/red) Flow rate unit display (green) Output (OUT1) display (green) Output (OUT2) display (green) Displays flow rate and setting values. Selectable display color. Only the first 3 digits display for cumulative flow rate displays. Displays the flow rate unit. Turns on when CH1 output is on. Blinks when overcurrent is detected. Turns on when CH2 output is on. Blinks when overcurrent is detected. (UP) key Sequentially displays CH1 data when the flow rate is displayed. Displays maximum during peak hold operation. Sets the mode when the mode is selected. Used to increment values, etc., when data is set. MODE key Use to enter setting mode. Use to return to the flow display. Use to release the peak hold operation. Sub-display area (green/red) Displays the flow direction and the operation status, etc. Selectable display color. The last 4 digits display for cumulative flow rate displays. (DOWN) key Sequentially displays CH2 data when the flow rate is displayed. Displays the minimum during peak hold operation. Used to decrement the value, etc., when data is set. <Display example> For FSM2-NVR100-* model Display Liquid crystal display Instantaneous flow display : Reverse direction 10L/min(ANR) Hi is displayed at an overflow. (Hi is displayed at -10%F.S. or more.) * Applies for a bi-directional setting (Note: At uni-directional types, "Lo" displays.) Integrated flow display For L * When the display range of " " is exceed, the display resets to "0.00". * With the uni-directional type, Lo is displayed at -10%F.S. (Ex., With the 10l type, Lo is displayed if -10l flows to the reverse side.) With the bi-directional type, Hi is displayed at ±10%F.S. or more. 1314

88 FSM2 Series Operation Display separated type Flow rate bar display Lights in accordance with the present flow rate. Blinks when an excessive flow rate condition occurs. <Display example> For FSM2-A*F101-* 0%F.S. Flow Single-direction type Bidirectional type +60%F.S. (Forward direction) +120%F.S. (Forward direction) Flashes at overflow. * Flashes at +10%F.S. or less. Blinking -60%F.S. (Reverse direction) -120%F.S. (Reverse direction) Flashes at overflow. * Flashes at -10%F.S. or less. Blinking 1315

89 FSM2 Series Explanation of functions (display integrated type) The functions and various settings are made during the normal flow display and during the setting mode. The setting mode is divided into the standard setting mode and detailed setting mode according to the frequency of use. Normal operations Descriptions Explanation Default settings Instantaneous flow display The instantaneous flow rate is displayed. - Cumulative flow display The cumulative flow can be displayed. The switch output function includes a function to turn the switch ON/OFF at a level higher than the Instantaneous flow display prescribed cumulative value, and a cumulative pulse function to output the pulse at a set cumulative value. The settings are reset at power OFF, and can also be reset with button operations or external inputs. Peak hold function Maximum and minimum values for the flow rate within a set interval is displayed. Peak hold OFF Key lock The key operations can be invalidated to prevent inadvertent operations. Key lock invalid Error display function The error status is displayed when a fault or error occurs. - Standard setting mode Descriptions Explanation Default settings Switch output function Forced output function This product has 2-point switch output, and uses seven operation modes and stopping. Use this function to forcibly turn the switch output ON and confirm the wiring connection of initial operation of the input unit. Switch is set to OFF for both CH1 and CH2 - Zero adjustment The zero point deviation is compensated. (Range: 0±10%F.S.) Adjust value: 0 Detailed setting mode Descriptions Explanation Default settings Flow direction selection (Selectable only for display integrated bi-directional type) Selection of CH2 operation Automatic reference function Response time setting Display speed setting Sub-display setting Display color setting Setting hysteresis Setting the flow direction. Setting available for Bi-directional, one-side forward direction or one-side reverse direction. Select the CH2 setting. Select whether to use CH2 as a switch output, or to use as an external input (cumulative value reset/auto reference). When CH2 is selected as auto reference, the switch output s threshold can be imported with external inputs or button operations. The threshold can be changed automatically if the switch threshold value changes, such as when the workpiece is changed. Set the response time. The response can be set in seven steps from 50ms to approx. 1.5s. Chattering and mis-operation caused by sudden flow changes or noise are prevented. The digital display refresh cycle can be set in three stages from 250ms to 1s. If the display flickers, it may be improved by setting a longer display refresh cycle. Set the sub-display section's display method. The display can be changed to flow direction, flow unit or gas type display. Set the display color. The color for a normal display and for switch output ON can be set. Set the switch setting value hysteresis. Use this if the flow pulsates or if the switch chatters near the threshold, etc. Bi-directional setting Switch output Auto reference function OFF Response time: 50ms Display speed: 250ms Flow direction display When both main and sub are normal display: Green When switch is ON: Red Hysteresis: 1%FS Setting flow unit Select the display unit from the standard state or reference state. Flow unit: ANR Standard state (ANR): Converted into volumetric flow at 20 C, 1 barometric pressure Reference state (NOR): Converted into volumetric flow at 0 C, 1 barometric pressure (Note 1) Setting ECO MODE An eco mode can be set. ECO MODE OFF If the buttons are not operated for approx. one minute, the eco mode will activate and turn off the display s backlight. Current consumption can be reduced with this mode. Initialization Returns the settings to the default settings. With the separated display, if the settings - are reset and then the power is turned ON again with the FSM2 display separated type (sensor section) connected, the flow range will be automatically recognized. Model selection (only separated display) Select the flow range, flow direction and gas type. Not set (Note 2) Note 1: The reference state display is a calculated (reference) value. Note 2: The default setting is Not set. If Not set is selected during use, the operation will start from the model selection mode after the power is turned ON. Always set the model before starting use. The model is automatically recognized in the Not set state (default state) only when the FSM2 display separated type (sensor) is connected. 1316

90 Switch output function FSM2 Series Operation The output function can be selected from seven types of switch operations according to the required application. The functions are compatible with both CH1 and CH2. Operation pattern name Explanation Operation waveform LCD display Window operation (1) (ON out of specified range) The switch turns ON when the level is within the designated flow rate range. Sub-display section ON set point OFF set point Flow Window operation (2) (ON out of specified range) The switch turns ON when the level is not within the designated flow rate range. OFF set point ON set point Flow Hysteresis operation (1) (Flow small side ON) The hysteresis is randomly set, and the switch output turns OFF at the designated flow and higher. ON set point OFF set point Flow Hysteresis operation (2) (Flow large side ON) The hysteresis is randomly set, and the switch output turns ON at the designated flow and higher. (The output is held even during the Hi display. ) OFF set point ON set point Flow Cumulative output (1) (ON at cumulative flow or higher) Switch output turns ON at set cumulative value and higher. Cumulative output (2) (OFF at cumulative flow or higher) Switch output turns OFF at set cumulative value and higher. Integrated pulse output The cumulative pulse is output at the preset cumulative value. Refer to the Cumulative function in the specifications for details on the preset cumulative value. (Pages 1278, 1279) Switch operation OFF The switch operation is turned OFF. 1317

91 FSM2 Series Automatic reference function When CH2 is selected as auto reference, the switch output s threshold can be imported with external inputs or button operations. The threshold can be changed automatically if the switch threshold value changes, such as when the workpiece is changed. The flow value at the point where the external input is turned ON is read for the input value. The CH2 switch settings are invalid during auto referencing. Input no. Operation pattern name Explanation Operation waveform LCD display ON at input value or higher ON when higher than imported value. (Threshold: input value) <Main display> <Sub-display section> 1 point OFF at input value or higher OFF when higher than imported value. (Threshold: input value) ON at middle value of 2 points or higher ON when higher than middle value of two imported points. (Threshold: (input (1)+input (2))/2) OFF at middle value of 2 points or higher OFF when higher than middle value of two imported points. (Threshold: (input (1)+input (2))/2) 2 points ON between two points ON during two imported points. (Threshold (1): input value (1)) (Threshold (2): input value (2)) OFF between two points OFF during two imported points. (Threshold (1): input value (1)) (Threshold (2): input value (2)) 1318

92 Selecting the flow direction (Only display integrated, bi-directional type) FSM2 Series Operation The flow rate for the display integrated, bi-directional type can be set with the buttons. Flow direction LCD display Analog output characteristics <Bi-directional> Main display (V) (ma) 5 20 A minus mark (-) displays during reverse-direction flows Sub-display section The arrow-mark display changes in accordance withe the flow direction Analog output F.S. flow 0 F.S. flow reverse direction /min. forword direction <Uni-directional (forward direction)> Main display (V) (ma) 5 20 Sub-display section Analog output F.S. flow /min. forword direction <Uni-directional (reverse direction)> Main display (V) (ma) 5 20 Sub-display section Analog output F.S. flow /min. reverse direction 1319

93 FSM2 Series FSM2 Series Measurement Principle The FSM2 Series incorporates a platinum sensor chip (3mmx3.5mm) machined with silicon micro-machining. The sensor is thermally insulated from the silicon substrate. The heating capacity is extremely low, enabling high sensitivity with a high-speed response. At the sensor, two temperature sensor are arranged with a heater in between. Platinum, which has a resistance that changes based on temperature, is used for the temperature sensor. When the heater is turned on and heated, the temperature distribution is symmetrical to the center of the heater if there is not flow. When flow is received, the symmetrical property of the temperature distribution is lost, and temperature upstream from the heater drops, and that downstream rises. This temperature difference appears as the difference in temperature sensor resistance, and varies with the flow rate. If flow is reversed, the temperature difference (resistance value difference) is reversed. A bidirectional flow is thus detected. This is suitable for detecting relatively small flows. (without flow) Thermo sensor (1) Thermo sensor (2) Heater FLOW (with flow) R1 Rh R2 R1 Rh R2 Temperature resistance Temperature distribution symmetry Temperature resistance Symmetry of temperature distribution are lost R1 R2 R1 R2 5V Voltage 5V Voltage R1 R1 V out 2.5V V out 2.5V R2 R2 V out V out 1320

94 FSM Sensors / CONTENTS Product introduction 1322 Applications 1323 Safety precautions 1324 Extremely small flow type indicator type / analog output type 1330 (FSM-H) Miniature analog output type / switch output type 1340 (FSM-V) FSM series dedicated inline 1362 FSM-H, FSM-V technical data 1351 FSM all series common technical data 1351 Custom 1357 sensor 1321

95 Miniature and high-response Three series of compact s supporting various applications An unprecedented compact size and high-speed response are realized with the platinum sensor chip incorporating silicone micro machining and the newly proposed rectifying mechanism. This thermal can be used for a variety of applications such as confirmation of electronic part suction, leak inspections and various gas flow control., high-speed, extremely small flow Display/FSM-H-D 3032 Flow display section (3-digit digital display) Switch output (alarm) lamp sensor Detect extremely small flow rates of 1mR/min. or less at a high speed. Perfect for inspecting for leaks and pinholes. Flow range 5, 10, 50, 100 mr/min. Miniature, ultra high-speed response Display/FSM-V-D installation direction (side and bottom) The unbelievably small size and 5ms high speed response support unconventional designs. Flow range 0.05, 0.1, 0.5, 1, 5, 10R/min. Ample variations Series Size Response speed Display Materials Output Interactive detection Flow range, light weight Quick response Separated type Integrated type Body material Switch output Analog output Extremely small flow type 1322 Miniature, Instantaneous light weight response Separate type Body material Separated indicator Technical data Miniature inline s dedicated for available Maintain sensor performance and prevent trouble. See the next page for applications and series variation. Switch output Analog output Interactive detection Low flow type

96 size series variations Extremely small flow Miniature, ultra high-speed response Analog output 1 point Separated display mountable (optional) Analog output 1 point Switch output NPN output 2 points Display separated type Analog output type Analog output 1 point Separated display mountable (optional) NPN output 2 points Analog output 1 point Switch output PNP output 2 points Display integrated type Switch output type PNP output 2 points Body material Resin body Stainless steel body Aluminum body Port size ø1.8 air fiber ø4 push-in ø6 push-in M5 Rc 1/8 Rc 1/4 G 1/8 sensor Full scale flow rate mr/min R/min. ±3% Precision (linearity) % F.S. ±5% Negative pressure Positive pressure Working pressure range Negative pressure Positive pressure MPa Negative pressure Positive pressure V 5V Analog output (1 to 5V) 3V 1V 0 FS flow 1V FULL 0 +FULL Note 1: Only AR type is supported. 1323

97 sensor Safety precautions Pneumatic components: Warning and Cautions Always read this section before starting use. Refer to Intro 67 for general precautions. size FSM-H/FSM-V series 1. Working fluid DANGER Do not use this product for flammable fluids. When this product is used for liquified gas, evaporate gas. This product could fail if processing liquified gas. WARNING This product cannot be used as a business meter. This product does not comply with Measurement Laws, and cannot be used for commercial business. Use this as an industrial sensor. Do not use fluids other than the applicable fluid because accuracy cannot be guaranteed. Compressed air from the compressor contains drainage - water, oil oxide, foreign substances, etc. - so install a, air dryer, and oil mist on the primary side (upper stream side) of the sensor. The sensor's meshing rectifies flow in the pipe. It does not out foreign substances, so provide a. Source pressure (Recommended circuit) dryer Filter Regulator Oil mist (Micro alescer) When using a valve on the primary side of this product, use only an oil-prohibit specification valve. This sensor could malfunction or fail if exposed to splattering grease, oil, etc. Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. Depending on the fluid, retaining the fluid for a long time could adversely affect the performance. Do not seal the fluid in the pipe for long periods of time. Design & Selection FSM Series WARNING Corrosive environment Do not use this product in an environment containing corrosive gases such as sulfurous acid. Ambient temperature, fluid temperature Use ambient temperature/fluid temperature from 0 to 50 C within specified range. (Even if the temperature is within the specified range, do not use this product if the ambient temperature and fluid temperature could suddenly change and cause dew to condense.) Maximum working pressure and specified flow rate range Applications exceeding the maximum working pressure and specified flow rate range may result in faults. Use this product only within the specified range. Drip-proof environment This product's protective structure is IP40 or equivalent. Do not install it where it could be exposed to water, salt, dust, or cutting chips, or a compressed or decompressed environment. This product cannot be used where the temperature changes sharply or in a highly humid environment where internal damage could be caused by dew condensation. 3. Flow unit CAUTION This product's flow rate is measured at a mass flow unaffected by temperature or pressure. The unit is R/min., but this is the display when the mass flow is converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). 4. Withstand pressure CAUTION Withstanding pressure differs by each series. Selection time care must be taken Working Environment DANGER Flammable environment Do not use this product in an explosive gas environment. The structure is not explosion-proof, and explosions or fires could occur. 5. Overflow CAUTION With each series, no problem will occur in the sensor, even in an overflow double the measurement range. If dynamic pressure is applied near the maximum working pressure (when a pressure difference exceeding the maximum working pressure is applied between primary and secondary sides), a problem could occur with the sensor. If dynamic pressure is applied, such as when a workpiece is filled for leakage inspection, provide a bypass circuit or restrictor so that dynamic pressure is not applied to the sensor.

98 6. Use for vacuum confirmation, etc. CAUTION When this product is used to confirm vacuum, etc., select the flow range based on the working vacuum pressure and vacuum nozzle. Refer to "Methods for calculating theoretic flow" on page 1358 for details. When this product is used to confirm vacuum, etc., provide an air (ation 30 μ m or less) upstream from suction to prevent the entry of foreign matter. (Use of a miniature dedicated inline is recommended for FSM or FSM-V. Refer to page 1362 for details.) When a fiber tube model with the FSM-V Series is used in a flow range of ±5R/min. or ±10R/min., pressure loss may increase beacause of working pressure and the required flow rate may not be reached. When this product is used to confirm vacuum, etc., consider the atmospheric dew point and this product's ambient temperature, and use under conditions in which dew does not condense in pipes. When this product is used to confirm vacuum, etc., response speed may be delayed by the capacity of the pipe between the vacuum nozzle and this product. In this case, take measures to reduce piping capacity. Using for leakage inspections The working pressure range of this product FSM-H: 0.09 to 1.0MPa FSM-V: 0.09 to 0.2MPa Wiring DANGER Use power voltage and output within the specified voltage. If voltage exceeding the specified voltage is applied, the sensor could malfunction or be damaged, or electrical shock or fire could occur. Do not use a load exceeding the output rating. Failure to observe this could result in output damage or fire. WARNING Check line color when wiring. Incorrect wiring connections could result in sensor damage, problems, and malfunctions, so check wire color against the instruction manual before wiring. Check wiring insulation. Check that wires do not contact other circuits and that there are no ground faults or insulation faults across terminals. Overcurrent could flow in and damage the sensor. Use a DC stabilized power supply, within the specified rating, insulated from the AC power supply. Failure to confirmation Pressure sensor (switch) Setting and over ON Atmospheric pressure side Installation & Adjustment FSM-H/FSM-V Series Individual Precautions If it is energized in a vacuum state less than -0.09Mpa, the sensor s heat dissipation performance will drop and could degrade the sensor. When this product is used for vacuum applications such as air supply, do not bend the tube near the push-in joint. If stress is applied to the tube near the push-in joint, insert an insert ring into the tube, and connect the tube to the push-in joint. When the vacuum confirmation sensor is switched from a pressure sensor (switch) to a (switch), sensor output (switch output) logic will be reversed (See the drawing below). Note that the PLC sequence program must be changed or revised. If source pressure or vacuum source is not supplied when device power is turned on, "flow 0" = "sensor output (switch output) on" status is set at the flow sensor (switch). Check that this is not a problem with the PLC sequence program, etc. ON OFF High vacuum side (switch) Setting or less ON Flow rate 0 side OFF Large flow rate side insulate the power supply could result in electric shock. If power is not stabilized, the peak could be exceeded during the summer. This could damage this product or cause accuracy to drop. Stop the control device and machine devices, and turn the power off before wiring. Starting operation suddenly could result in unpredictable operation and hazards. Conduct an energized test with control devices and machine devices stopped, and set target switch data. Discharge electrostatic accumulated in personnel or tools before and during work. Connect and wire bend-resistant material, such as robot wire material, for movable sections. Do not use this product at levels exceeding the power voltage range. If voltage exceeding this range is applied or if AC power is applied, the controller could rupture or burn. Install the product and wiring as far away as possible from sources of noise such as power distribution wires. Provide separate measures for surge applied to the power cable. Do not short-circuit the load. Failure to observe this could result in rupture or burning ON sensor

99 FSM-H/FSM-V Series sensor CAUTION For metal body (stainless steel, aluminum) power supplies, use DC-stabilized power separated from the AC primary side. Connect either the plus or minus side of the power supply to the F.G. A varistor (limit voltage 40 V) is connected between the metal body internal power circuit and metal body to prevent dielectric breakdown of the sensor. Do not conduct a withstand voltage test or insulation resistance test between the internal power circuit and metal body. Disconnect wiring if this testing is required. An excessive potential difference between power and metal body will burn internal parts. After installation, connecting and wiring the metal body, electrical welding of the device or frame, or short-circuit accidents, etc., could cause welding current, excessive high voltage caused by welding, or surge voltage, etc., to run through wiring or ground line connected between such devices, damaging lines or devices. Do any work such as electrical wiring after removing this device and disconnecting all electric wires connected to the F.G. Piping CAUTION When piping FSM-H/FSM, check that the fluid's direction matches the direction indicated on the component. With the FSM-V, check the direction of the arrow and pipe and install based on the fluid flow direction and switch operation. (Example of piping) Switch type Blow nozzle (Example of piping) Analog type Blow nozzle + side: + side Blow side: side 1V 5V side: 3 to 5V Blow side: 3 to 1V When installing the sensor on piping, see the torque below so that excessive screw-in torque or load torque is not applied to the connection port. Switch valve Switch valve Installation & Adjustment Flow direction Flow direction Flow direction Flow direction source source source source Attach a wrench to metal sections when tightening pipes so that pressure is not applied to the resin section. Check that sealing tape or adhesive does not get inside when piping. When winding fluorine resin sealing tape around threads, wind sealing tape once or twice, leaving two to three threads open at the end of the screw. Press tape with a nail tip to stick it onto threads.when using liquid sealing agent, leave one to two threads open from the end, and avoid applying too much. Check that the sealing agent does not get on device threads. (Well) Seal tape Solid/liquid sealant Solid liquid sealant (Poor) (Well) (Poor) Solid liquid sealant Connect a joint even when using the metal body type with the out side opened. The port could come off. When using a push in joint, accurately insert tube and confirm that it does not become dislocated even when pulled. Cut tube at a right angle with a dedicated cutter before use. Connect fiber tubing as follows (step (1) to (5)). (1) Set the collar to the very back. Collar (2) Cut the end of fiber tubing at a right angle. (4) Insert fiber tubing at the last position (5) Pull the collar forward to lock it in place. (Reference value) Port thread M5 Rc1/8(G1/8) Rc1/4 Tightening torque N m 0.5 to to 5 6 to 8 out pipe with air blow to remove foreign substances, swarf, etc., before piping. The rectifier or sensor chip could be damaged if a large amount of foreign matter, swarf, etc., occurs. (3) Pass the collar through, and confirm that fiber tubing is correctly inserted during work. 1326

100 Adjustment CAUTION If switches are operated when flow is not stable, such as pulsating, operation may be unstable. In this case, provide sufficient margin between the two setting values and avoid setting switches in an unstable area. Confirm that switch operation is stable before use. When setting the FSM-V Series switch output, use a flat-tip screwdriver fitting the trimmer groove (0.5 wide, 1.9 long, and 0.45 deep) or a Phillips screwdriver for 0 bits. The trimmer rotates 240 degrees and could break if turned more or forced when turned. Installation CAUTION This product can be installed in any direction; top, bottom, left, or right. FSM-H Series Horizontal installation (through hole used) Vertical installation (bottom side female thread used) FSM-V Series For discrete miniature Install using the two penetration holes (ø3.2) on the side. Separate indicator FSM-H-D*, FSM-V-D* common A mounting bracket and kit (option) are available for installing the separated display. Bracket model no.: PPD3-KL-D 2-Nominal 3 P tight : One side installation foot (radial) 2-Nominal 3 P tight 50 2-M3 Bracket model no.: PPD3-KD-D :Both sides installation foot (parallel) Bracket model no.: PPD3-KHS-D FSM-H/FSM-V Series Individual Precautions Installation hole machining dimensions Installation hole machining dimensions 4-M3 : With panel mount bracket set and panel guard sensor Bracket installation (*bracket used) *A dedicated bracket (option) is available. (Model no.: FSM-LB1) (Refer to page 1335.) Bracket model no.: PPD3-KC : Operation protective cover Protective cover Protective cover holder Installation hole machining dimensions *33.5±0.3 Enclosed four M3 (length 6mm) setscrews for fixing 1327

101 FSM-H/FSM-V Series During Use & Maintenance sensor WARNING Output accuracy is affected by temperature characteristics and heat generated when energized. Provide standby time of five minutes or more after turning power on when using. This product does not use flow control for two seconds after power is turned ON to complete self-diagnostics. Provide a control circuit and program that ignore signals for two seconds after power is turned ON. CAUTION If a problem occurs during operation, immediately turn power off, stop use, and contact your dealer. Keep this product's flow within the rated flow range. Use this product within the working pressure range. If the output setting value is changed, control devices could operate unintentionally. Stop devices before changing settings. Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. Do not disassemble or modify this product. Doing so could result in faults. The case is made of resin. Do not use solvent, alcohol, or detergent in cleaning, or resin could absorb it. Wipe contaminations with a well wrung rag, etc., after soaked in weakened neutral detergent. Pay attention to reverse currents caused by disconnected wires and wiring resistance. If other devices, including a, are connected to the same power sensor as the, and the switch output wire and power cable minus ( ) side are short-circuited to check the operation of the control panel s input device, or if the power cable s minus ( ) side is disconnected, back current could flow to the 's switch output circuit and cause damage. Diode to prevent reverse flow Control panel Take countermeasures as followings to prevent damages caused by reverse current. (1) Avoid centralizing current at the power cable, especially the minus side power cable, and use as thick wire as possible. (2) Limit the number of devices connected to the same power source as the. (3) Insert a diode in serial with the 's output cable to prevent reversal of current. (4) Insert a diode in serial with the pressure switch's power cable minus side to prevent reversal of current. Care must be taken for surge current leading. When power is shared with an inductive load that generates surges, such as a solenoid valve or relay, if the circuit is cut off while the inductive load is functioning, surge current could enter the output circuit and cause damage depending on where the surge absorption element is installed. Circuit cutoff with disconnection or emergency stop or emergency stop Surge absorbing element (installed later) Surge current Surge absorbing element (Integrated) PLC PLC output Take countermeasures as followings to prevent damage caused by surge current leading. (1) Separate the power supply for the output comprising the inductive load, such as the solenoid valve and relay, and the input, such as the pressure switch. (2) If separate power supplies cannot be used, directly install a surge absorption element for all inductive loads. Remember that the surge absorption element connected to the PLC, etc., protects only that device. (3) Connect a surge absorption element to the following places on the power wiring as shown below as a measure against disconnections in unspecific areas: ON Other components Main circuit PLC input Main circuit Relay Solenoid valve Input components Input components Input components Current from other device Disconnection Test or short circuit When components are connected with connectors, if a connector is dislocated during energizing, the output device could be damaged because of the reason above. Turn off the power before dislocating a connector. 1328

102 FSM-VFM Series Even if the flow range is exceeded, analog outpuu will continue. "Hi" is displayed. Note that this is outside guaranteed precision. Alalog output is also made when fluid flows in reverse. (This exceeds the guaranteed accuracy. Excluding the FSM-V Series.) If the signal could be confused with the forward direction signal, check that there is no problem with the PLC sequence program. Miniature inline FSM-VFM series CAUTION Do not use this product for vacuum circuits that could come in contact with acids, alkaline, carboxylic acid, other organic compounds, screw-lock agent, solvent, or alcohol solutions, or air containing these substances. The body coud be damaged, and cause a hazardous situation. Use the designated tube and plastic plug. Tube outer diameter precision Polyamide tube : Within ±0.1mm Polyurethane tube (Up to ø6) : Within ±0.1mm (ø8 and over) : Within mm CKD recommended model Plastic tube Soft nylon tube Polyurethane rubber tube Urethane tube GWP*-B series F15** series U95** series NU-04/06 Series Read "Safety precaution on joint tube" for push-in joint. Regularly inspect the polyamide case for cracks, damage, and other deterioration., and replace as necessary. Filter element clogging will decrease vacuum source conductance. Regularly inspect, clean, and replace the element. Return the container to atmospheric pressure before removing the body to clean ro replace, etc., the element. The flow direction is oriented. Check the arrow on the body during reassembly. Check that the required vacuum degree is attained in the circuit after reassembly. During Use & Maintenance Use a household-grade neutral detergent to clean the body, then rinse with water. If small particles such as dust during suction enter the flow path, foreign matter will not be ed and may flow to the secondary side. Select a suiting the purpose. Replacing the element fixing pin (1) (2) Element (1) Pull out the joint fixing pin using a blunt jig, etc. The joint fixing pin must reused, so do not loose it. (2) Pull the joint out. (3) Replace the element, and insert the joint. (4) Inset the joint fixing pin, and fix the joint. (4) (3) sensor 1329

103 extremely small flow type Indicator type/analog output type FSM-H Series (air/nitrogen gas) Flow rate range: 0.25 to 5, 0.5 to 10, 2.5 to 50, 50 to 100m R/min. sensor Indicator type specifications Descriptions Flow rate range mr/min. Note 1 Precision Working conditions Indicator Installation Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Linearity (display/analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Display min. unit Note 6 Output type Power voltage Current consumption Lead wire Functions Installation attitude Straight piping section Protective structure Protective circuit Note 4 EMC directive Indicator type Weight Model no. Port size (body material) 6A Rc1/8 (Stainless steel) 6G G1/8 (Stainless steel) Indicator type FSM-H-N/P-005ML FSM-H-N/P-010ML FSM-H-N/P-050ML FSM-H-N/P-100ML 0.25 to to to 50 5 to 100 air (JIS B to ), compressed air (JIS B to ) Note 2, nitrogen gas Note to 50 C, 90%RH or less 0 to 50 (with no dew condensation) ±3%F.S. or less (0.1MPa, 25 C, flow rate range 5 to 100%F.S.) ±3%F.S. or less (-0.09 to 1.0MPa, where 0.1MPa is reference) ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) ±0.5%F.S. or less 50ms or less Note 5 Flow display (3.5-digit 7-segment display, orange), run and switch output display (orange) 0.01mL/min. Note 1 0.1mL/min. Note 1 Switch output 2 points (NPN or PNP open collector output, 30 VDC and 50 ma or less, voltage drop of 2.4 V or less, PLC- and relay-compatible) Analog output 1 point (1 to 5V voltage output, connected load impedance 50KΩ and over) 12/24 VDC (10.8 to 26.4V) 60mA or less ø mm 2 5-conductor 1m Flow display, flow display peak hold, switch output, analog output Horizontal or vertical Not required IEC standards IP40 Power supply reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection EN55011, EN , EN /3/4/6/8 FSM-N/P-005 FSM-N/P-010 FSM-N/P-050 FSM-N/P Unit: g Analog output type weight Model no. Port size (body material) 6A Rc1/8 (Stainless steel) 6G G1/8 (Stainless steel) FSM-A-005 FSM-A-010 FSM-A-050 FSM-A Unit: g 1330

104 Analog output type specifications (without display) Descriptions Flow rate range mr/min. Note 1 Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Precision Working conditions Installation Linearity (display/analog output) Pressure characteristics Temperature characteristics Repeatability Responsiveness Type of display Output type Power voltage Current consumption Lead wire Functions Protective circuit Note 4 Installation attitude Straight piping section Protective structure EMC directive Analog output type FSM-H Series Specifications FSM-H-A-005ML FSM-H-A-010ML FSM-H-A-050ML FSM-H-A-100ML 0.25 to to to 50 5 to 100 air (JIS B to ), compressed air (JIS B to ) Note 2, nitrogen gas Note to 50 C, 90%RH or less 0 to 50 (with no dew condensation) ±3%F.S. or less (0.1MPa, 25 C, Flow rate range 5 to 100%F.S.) ±3%F.S. or less (-0.09 to 1.0MPa, where 0.1MPa is reference) ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) ±0.5%F.S. or less 50ms or less Note 5 Power display (green) Analog output 1 point (1 to 5V voltage output, connected load impedance 50KΩ and over) 12/24 VDC (10.8 to 26.4V) 50mA or less ø mm 2 3-conductor 1m Analog output Power supply reverse connection protection Horizontal or vertical Not required IEC standards IP40 EN55011, EN , EN /3/4/6/8 Note 1: Converted to volumetric flow at 20 C 1 barometric pressure (101kPa) Note 2: When using compressed air, use clean air that complies to JIS B :2003 Class to Compressed air from the compressor contains drainage (water, oxidized oil, foreign matter, etc.). Install a (filtration: 5 μm), air dryer (minimum pressure dew point: 10 C or less), and oil mist (maximum oil concentration: 0.1 mg/m3) on the primary side of this product to maintain product functions. (Recommended circuit) Pneumatics pressure source dryer Filter Regulator Oil mist (Micro alescer) FSM Series Note 3: Consult with CKD when using gas other than air or N2. Note 4: This product's protection circuit is effective only for specific misconnections and load short-circuits. It does not provide protection for all misconnections. Note 5: Response time varies depending on the piping conditions. Note 6: This indicates the minimum display for the flow, and does not guarantee display accuracy. Separate indicator specifications (analog output type dedicated) Model no. Descriptions Available analog output type model no. Indicator Type of display Display min. unit Note 6 Output Power voltage Current consumption Lead wire Functions Ambient temperature/humidity Protective structure EMC directive Weight g (Recommended component) : F Series Oil mist : M Series Separate indicator FSM-H-D N/P -005ML FSM-H-D N/P -010ML FSM-H-D N/P -050ML FSM-H-D N/P -100ML FSM-H-A-005ML FSM-H-A-010ML FSM-H-A-050ML FSM-H-A-100ML Flow display (3.5-digit 7-segment display, orange), run and switch output display (orange) 0.01mL/min. Note 1 0.1mL/min. Note 1 Switch output 2 points (NPN or PNP open collector output, 30 VDC and 50 ma or less, voltage drop of 2.4 V or less, PLC- and relay-compatible) Analog output 1 point (1-5V voltage output, connected load impedance 50KΩ and over) 12/24 VDC (10.8 to 26.4V) 50mA or less (only indicator) ø mm 2 5-conductor (1m) Flow display, flow display Peak hold function, switch output, analog output 0 to 50 C, 85%RH or less (with no dew condensation) IEC standards IP40 EN55011, EN , EN /3/4/6/8 Approx. 70 (including lead wire 1m) sensor Extremely small flow type 1331

105 FSM-H Series sensor How to order FSM-H N A 005ML Output type 6A <Example of model number> FSM-H-N-005ML-6A-K Model: FSM indicator type A Switch output type : NPN output B Flow rate range : 0.25 to 5mR/min. C Port size : Rc1/8 (Stainless steel body) D Option : With company certification FSM B H D N A Flow rate range C 010ML K Port size Separate indicator (analog output type dedicated) Model no. Bracket for separate indicator Switch output type B D Flow rate range Option A Symbol Descriptions Output type A Analog output 1 point N NPN output 2 points, Analog output 1 point P PNP output 2 points, Analog output 1 point B Flow rate range 005ML 0.25 to 5mR/min. 010ML 0.5 to 10mR/min. 050ML 2.5 to 50mR/min. 100ML 5 to 100mR/min. C Port size 6A Rc1/8 (Stainless steel body) 6G G1/8 (Stainless steel body) * Refer to page 1285 for model No. and dimensions of bracket (optional). D Option Blank K T (Note 1) None With company certification With traceability certificate Note 1) Treacebility certificate, inspection results, and traceability diagram are included. Symbol Descriptions A Output type N NPN output 2 points, Analog output 1 point P PNP output 2 points, Analog output 1 point B Flow rate range 005ML 0.25 to 5mR/min. 010ML 0.5 to 10mR/min. 050ML 2.5 to 50mR/min. 100ML 5 to 100mR/min. * Refer to pages 1348 to 1355 for the operation and dimensions, etc. PPD3 KL-D A Bracket kit Symbol Descriptions A Bracket kit KL-D Single foot bracket (L type) KD-D Both sides foot bracket (parallel) KHS-D Panel mount bracket set with cover KC Operation protective cover * Refer to pages 1348 to 1349 for dimensions and size of bracket. 1332

106 Internal structure and parts list FSM-H-N/P-*-* Indicator type stainless steel body FSM-H Series How to order / Internal structure and parts list No. 1 Parts name Front seat 9 Material Polyester film 8 No. 7 7 Parts name Sensor chip 6 Material Silicone Case Lead wire with holder (5-conductor) Module holder Sensor circuit board Stainless steel body ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel Rectifier Port Sensor gasket n circuit board Stainless steel Stainless steel Fluoro rubber FSM-H-A-*-* Analog type stainless steel body sensor No Parts name Front seat Case Lead wire with holder (3-conductor) Module holder Sensor circuit board Stainless steel body Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel No Parts name Sensor chip Rectifier Port Sensor gasket n circuit board Separate indicator FSM-H-D*-* Refer to page 1348 for internal structure of a separate indicator. Material Silicone Stainless steel Stainless steel Fluoro rubber Extremely small flow type 1333

107 FSM-H Series Dimensions (indicator type) Body material: Stainless steel FSM-H-N/P-*-* ø Lead wire length 1m ø3.4 penetrating 2-M3 depth 5mm Rc1/8 9.5 * G1/8 is also available Dimensions (analog output type) Body material: Stainless steel FSM-H-A-*-* ø3.7 sensor 55 Lead wire length 1m ø3.4 penetrating 2-M3 depth 5mm Rc1/8 9.5 * G1/8 is also available * Refer to page 1348 for dimensions of a separate indicator FSM-H-D*-*. 1334

108 FSM-H Series Dimensions Dimensions (bracket) Model no.: FSM-LB R Analog output characteristics FSM-H-*-* Analog output(v) F.S.Flow Flow (R/min.) Pressure loss characteristics FSM-H-*-005ML-* Enclosed four M3 (length 6mm) setscrews for fixing FSM-H-*-010ML-* MPa 6 0.1MPa Pressure loss (Pa) MPa Pressure loss (Pa) MPa sensor Flow (mr/min.) Flow (mr/min.) 10 FSM-H-*-050ML-* MPa FSM-H-*-100ML-* MPa Pressure loss (Pa) Flow (mr/min.) MPa Flow (mr/min.) For details on the display and operation section names, functions and operation methods, refer to page 1340 for integrated display and page 1352 for separated display. Pressure loss (Pa) MPa 1335 Extremely small flow type

109 FSM-H Series sensor Names and functions of display and operation section Display integrated type (FSM-H Series common) Overflow display RUN display Lights and displays when the 3-digit display is exceeded. (At /min., this turns on, and 0.00 is displayed on the 3-digit LED.) MODE key Use to enter each setting mode. Use to return to the flow display. Use to release the peak hold function operation. Minus display (Excluding FSM (air, nitrogen use)) Lights when gas flows in reverse. Turns on when displaying flow. Blinks during peak hold function operation. Turns off during various setting modes. 3-digit LED display Displays the flow rate and switch settings, etc. is displayed for an overflow. (Hi display at approx. 10% or more of F.S.) is displayed for overcurrent in reverse. (Lo display at approx. -10% or more of F.S.) (Excluding FSM (air, nitrogen use)) 1 (UP) Key Sequentially displays CH1 data when the flow rate is displayed. Displays maximum during peak hold function operation. Sets the mode when the mode is selected. Used to increment values, etc., when data is set. Output (OUT1) display Turns on when CH1 output is on. Blinks when overcurrent is detected. Output (OUT2) display Turns on when CH2 output is on. Blinks when overcurrent is detected. 2 (DOWN) Key Sequentially displays CH2 data when the flow rate is displayed. Displays the minimum during peak hold function operation. Used to decrement the value, etc., when data is set. * The design of the front sheet differs for the FSM-H Series, but display and operation section names and functions are the same. Separate indicator type Refer to pages 1352 to 1355 for details on the display and operation section names, functions, and operation methods. 1336

110 Operation Switch output function Switch operation mode FSM-H Series Operation Operation pattern name LED display Operation waveform 3%F.S. and over Window operation 1 ON 1%F.S. (ON within specified range) OFF Flow + ON set point OFF set point Window operation 2 (ON out of specified range) Hysteresis operation 1 (Flow small side ON) Hysteresis operation 2 (Flow large side ON) (Note 6) Switch output OFF Set point confirmation method CH1 data display Hold down CH2 data display When a key is pressed while the flow is displayed, the switch data ON setting, OFF setting, operation waveform, zero adjustment, and model are displayed and confirmed. Switch operation is not affected during the following operations: ON side blinking ON OFF OFF set point ON OFF ON set point ON OFF OFF set point Operation waveform display 3%F.S. and over 1%F.S. 1%F.S. and over 1%F.S. and over Flow + ON set point Flow + OFF set point Flow + ON set point ON Output is turned off regardless of ON or OFF setting. OFF Flow + Note 1. When used for a winding operation, leave an interval of 3% F.S. or more between the two settings. 1%F.S. hysteresis is automatically added to the ON side and OFF side. Note 2. When used for hysteresis operation, leave an interval of 1% F.S. or more between the two settings. If there is no difference between the two settings, operation may not take place or may be unstable. Note 3. If switches are operated when flow is not stable, such as pulsating, operation may be unstable. In this case, provide sufficient margin between the two setting values. Confirm that switch operation is stable before use. Note 4. The left side of the operation waveform indicates negative pressure, and the right side indicates positive pressure. Note 5. The magnitude relationship of the ON and OFF settings is determined when the waveform is set, and a reverse magnitude relationship cannot be attained. With this product, however, operation of the designated operation pattern is the priority. When the two settings are input, the magnitude relationship is automatically determined, and each is judged and processed at the appropriate ON and OFF settings. In other words, even if ON and OFF settings are input reversed, input is recognized correctly as ON and OFF and operation occurs with the designated operation mode. Note 6. The output is held even during the Hi display. ON set point display OFF side blinking sensor Hold down OFF set point display Operation waveform display Zero point adjustment value, model number display (FSM (air and nitrogen) is excluded.) 0 point adjustment value and model number display are alternately shown. Switch operation is not affected even during operation. "AdJ" display Zero point adjustment value display Model number display Press simultaneously 1337

111 FSM-H Series How to operate each function Peak hold function Maximum and minimum values for the flow rate within a set interval is displayed. Use for such as are the instantaneous flow change confirmation. The peak hold operation does not affect this product's basic functions such as switch operations or pressure display. Displaying the peak value Flow display state "460" is displayed Peak hold function operation starts (RUN light blinking) Hold down Blinking Peak value "475" Displaying the bottom value Blinking Bottom value "453" Press simultaneously Hold down Switch output function Refer to page 1339 for operation methods. This product has 2-point switch output, and uses four operation modes and stopping. The switch function is started by setting the required operation pattern and by setting two settings (ON and OFF) that specify the operation point. Determine the required operation mode and on and off before setting. Select and set the following data to operate the switch: CH1: operation pattern CH1: ON set point CH1: OFF set point CH2: operation pattern CH2: ON set point CH2: OFF set point sensor Forced output Refer to page 1339 for operation methods. Use this function to forcibly turn the switch output ON and confirm the wiring connection of initial operation of the input unit. (Note) Use this test for operation checking of wiring and input unit. Do not use this function instead of actual signals when executing the sequence program while the machine or device is operating. Refer to page 1339 for operation methods. Zero point adjustment function (FSM [, nitrogen] is not equipped with the zero point adjustment function.) Deviation of the display from zero is compensated for in the state with no flow rate. If set incorrectly, readjust when no gas is flowing. (Note) The above settings and testing greatly affect the output signal and display. Be sure to stop the machine and devices using this product, and confirm that safety can be ensured even if problems or an incorrect display occurs before operating. Using this function while the machine or device is operating could cause unforeseen problems or incorrect displays. "Operation" To return to the flow display during operations in any setting mode, turn power off and on. The flow display is redisplayed. 1338

112 FSM-H Series Operation Switch output, forced output, 0 point adjustment operation (flow display) For safety, if the key is not operated for two seconds or more before the mode is set, the pressure display is redisplayed. Basic key operation These key operations are valid in the switch operation pattern setting, ON/OFF set value setting, and zero point adjustment mode. Data return Count Up Count Down Data reading Hold down Blinking When the key is held down, the pressure display is redisplayed. Press simultaneously Setting data of switch output Press simultaneously Blinking Switch CH1 Operation mode change Channel 1 display Switch CH1 Setting ON and OFF data ON point waveform display OFF point waveform display Release Determination Alternate display Press once Alternate display Press once Alternate display Blinking Press once Operation mode display Set point display Set point display Change the mode with the UP/DOWN keys Switch CH2 Operation mode change Press once Change the value with UP/DOWN keys Press once Switch CH2 Setting ON and OFF data To flow display sensor Press once Set the same as switch CH1 Press once Press once Blinking Determination CH1 output ON Switch output forced ON mode CH2 output ON To flow display Press once Press once FSM (/nitrogen) To flow display Determination Hold down Hold down Press once Zero point adjustment mode (FSM (air and nitrogen) is excluded.) "AdJ" display Adjusted value reading To flow display Blinking Alternate display Press once Zero point adjustment value display Press simultaneously Press once CAUTION Be sure no gas is flowing when adjusting zero. 1339

113 Miniature size Analog output type/switch output type FSM-V Series (air/nitrogen gas) Flow rate range: ±0.05, ±0.1, ±0.5, ±1, ±5, ±10 R/min. sensor Sensor specifications Working conditions Analog output precision Note 4 Installation Model no. Descriptions Flow rate range (R/min.) Note 7 Ref.: Applicable nozzle for suction/ release applications Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Ambient temperature/humidity C Working fluid temperature C Display Output Linearity Pressure characteristics Temperature characteristics Repeatability Responsiveness Power voltage Current consumption Lead wire Installation attitude Strait piping section Protective structure Vibration resistance EMC directive Weight g FSM-V-A -R0005 FSM-V-A -R0010 Analog output type FSM-V-A -R0050 FSM-V-A -R0100 FSM-V-A -R0500 FSM-V-A -R1000 FSM-V- -R0005 FSM-V- -R0010 Switch output type FSM-V- -R0050 FSM-V- -R0100 FSM-V- -R0500 FSM-V- -R1000 N/P N/P N/P N/P N/P N/P to to to to +1-5 to to to to to to +1-5 to to +10 ø0.1 Nozzle ø0.2 Nozzle ø0.3 Nozzle Collet Nozzle ø0.1 Nozzle ø0.2 Nozzle ø0.3 Nozzle Collet nozzle air (JIS B to ), compressed air (JIS B to ) Note 1, nitrogen gas to 50, 90%RH or less (with no dew condensation) 0 to 50 Power display (green) Power display (green), switch output display (yellow) Analog output 1 point Note 2 Switch output 2 points Note 3 (NPN or PNP open collector output, 30 VDC 50mA or less, (1-5V voltage output, connected load impedance 50KΩ and over) PLC/reraly compatible) ±5%F.S. or less (0.1MPa, 25 C, Flow rate range±100%f.s.) ±5%F.S. or less (-0.09 to 0.2MPa, where 0.1MPa is reference) ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) ±1%F.S. or less ±2%F.S. or less ±2%F.S. or less 5ms or less (when discrete sensor is reaching 90% of ultimate output voltage) Note 5 12/24 VDC (10.8 to 26.4V) 30mA or less ø mm 2 3-conductor (3m) ø mm 2 4-conductor (3m) Free Not required IEC standards IP40 10 to 150 Hz, double amplitude 1.5 mm, maximum 10 G, two hours each in X, Y, Z directions EN55011, EN , EN /3/4/6/8 Approx. 8 (excluding leads, joints) Note 1: Refer to the Compressed air quality classes according to JIS B :2003 on page Note 2: Analog output indicate 3 V when the flow is 0, and changes to the 5 V side when the lead when gas flows to the right looking at the unit with leads on the right. Analog output changes to the 1 V side when the flow is reversed. Note 3: The Fixed hysteresis 1 boundary value judgment type switch output is used. The Output can be set within the full flow range by turning the trimmer. OUT1 and OUT2 operation modes are opposite. Note 4: F.S. (full scale) in these specifications indicates the flow range. For example, F.S. for flow rate -10 to +10R/min. is 20R/min.. Note 5: Response time varies depending on the piping conditions. Note 6: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. When using compressed air, use clean air that complies to JIS B : 2003 Class to Compressed air fed from a compressor contains drainage (water, oxidized oil, debris, etc.). To maintain the functions of this product, attach a to the primary side (upstream) of the product, an air dryer (minimum pressure dew point 10 C or less), and an oil mist (maximum coil concentration 0.1mg/m 3 ). When using this product to confirm a pickup, always insert an air between the vacuum nozzle and this product. Note 7: Converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). 1340

114 Separated display specifications (analog output dedicated) Note 8 Note 8: The separate display is dedicated to analog output type. It must not be connected to switch output. Note 9: This indicates the minimum display for the flow, and does not guarantee display accuracy. FSM-V Series Specifications Model no. Separate indicator Descriptions FSM-V-D N/P -R0005 FSM-V-D N/P -R0010 FSM-V-D N/P -R0050 FSM-V-D N/P -R0100 FSM-V-D N/P -R0500 FSM-V-D N/P -R1000 Available analog output type model no. FSM-V-A-R0005 FSM-V-A-R0010 FSM-V-A-R0050 FSM-V-A-R0100 FSM-V-A-R0500 FSM-V-A-R1000 Type of display Flow display (7-segment 3-digit, orange), run and switch output display (orange) Display min. unit Note 9 0.1mL/min. Note 7 1mL/min. Note L/min. Note 7 0.1L/min. Note 7 Switch output 2 points Output (NPN or PNP open collector output, 30 VDC and 50 ma or less, voltage drop of 2.4 V or less, PLC- and relay-compatible) Analog output 1 point (1-5V voltage output, connected load impedance 50KΩ and over) Power voltage Current consumption Lead wire Functions Ambient temperature/humidity Protective structure EMC directive 12/24 VDC (10.8 to 26.4V) 50mA or less (only indicator) ø mm 2 5-conductor (1m) Flow display, flow display peak hold, switch output, analog output 0 to 50 C, 85%RH or less (with no dew condensation) IEC standards IP40 EN55011, EN , EN /3/4/6/8 Weight g Approx. 70 (including lead wire 1m) Indicator sensor Miniature 1341

115 FSM-V Series sensor How to order Sensor FSM Model no. V A H 3 A Output type B A Lead wire direction C R0005 Lead wire length Separate indicator (analog output type dedicated) FSM Model no. V D A N Bracket for separate indicator PPD3 KL-D Bracket kit R0050 B D Switch output type H2 Flow rate range E Flow rate range type Symbol Descriptions A Output type A Analog output N Switch output (NPN) P Switch output (PNP) B Lead wire direction H Axial V Radial C Lead wire length 3 3m D Flow rate range R0005 ±0.05R/min. R0010 ±0.1R/min. R0050 ±0.5R/min. R0100 ±1R/min. R0500 ±5R/min. R1000 ±10R/min. E type H2 Straight type ø1.8 air fiber ( D R1000 type cannot be selected) H4 Straight ø4 push-in HL4 L type ø4 push-in M5 Port size M5 Symbol A Switch output type N NPN output P PNP output Descriptions B Flow rate range R0005 ±0.05R/min. R0010 ±0.1R/min. R0050 ±0.5R/min. R0100 ±1R/min. R0500 ±5R/min. R1000 ±10R/min. * Refer to pages 1348 to 1355 for the operation dimensions, etc. Symbol Descriptions A Bracket kit KL-D Single foot bracket (L type) KD-D Both sides foot bracket (parallel) KHS-D Panel mount bracket set with cover KC Operation protective cover * Refer to page 1348 and 1349 for dimensions and mounting size of bracket. 1342

116 Internal structure and parts list For FSM-V-**3-R*-M5/analog output type (The switch output type internal structure is also the same.) FSM-V Series How to order / Internal structure and parts list No Parts name Body Case Lead wire holder Bush Bush holder Sensor gasket Sensor chip P tight screw Material PBT PBT PBT Nitrile rubber Aluminum alloy Fluoro rubber Silicone Iron steel (zinc plating) No Parts name n circuit board Lead wire Rectifier Filter Cartridge joint (M5) O ring fixing pin Front seat Note 1: Appearances of a front seat section differ in an analog output type/switch output type. Separate indicator FSM-V-D*-R * Material Glass epoxy resin Halogen-free polyethylene resin blended one Stainless steel Stainless steel Aluminum alloy Nitrile rubber Stainless steel Polyester film sensor Refer to page 1348 for internal structure. Miniature 1343

117 FSM-V Series Dimensions (analog output type, switch output type common) FSM-V-*V3-R*-H2 (Radial lead wire, straight ø1.8 fiber tube) FSM-V-*H3-R*-H2 (Axial lead wire, straight ø1.8 fiber tube) 2-ø3.2 penetrating 2.3 ø ø3.2 penetrating 7 ø sensor (45.8) FSM-V-*V3-R*-H4 (Radial lead wire, straight ø4 push-in) (45.8) FSM-V-*H3-R*-H4 (Axial lead wire, straight ø4 push-in) 2-ø3.2 penetrating 2.3 ø ø3.2 penetrating 7 ø (51.8) (51.8) * Appearances of a front seat section differ in an analog output type/switch output type. 1344

118 Dimensions FSM-V-*V3-R*-HL4 (Radial lead wire, L type ø4 push-in) FSM-V-*H3-R*-HL4 (Axial lead wire, L type ø4 push-in) FSM-V Series Dimensions (21.5) 2-ø3.2 penetrating (21.5) 2-ø3.2 penetrating 7 ø (58.6) (58.6) FSM-V-*V3-R*-M5 (Radial lead wire, port size M5) FSM-V-*H3-R*-M5 (Axial lead wire, port size M5) sensor 2-ø3.2 penetrating ø2.6 2-ø3.2 penetrating ø (45) (45) 10 Miniature * Appearances of a front seat section differ in an analog output type/switch output type. 1345

119 FSM-V Series sensor Analog output characteristics FSM-V-A-R0100 Output (V) Response speed (Example for suction/release applications) Pressure loss characteristics FSM-V-*-R0005-H4 Pressure loss (kpa) FSM-V-*-R0050-H4 Pressure loss (kpa) FSM-V-*-R0500-H4 Pressure loss (kpa) Flow (R/min.) Flow (R/min.) Nozzle diameter ø0.3 Nozzle diameter ø0.25 Nozzle diameter ø0.2 Piping diameter: ø4 Pipe length (nozzle to vacuum source): 0.3m Time (ms) MPa 0.1MPa 0.2MPa -0.05MPa 0.1MPa 0.2MPa -0.05MPa 0.1MPa 0.2MPa Voltage level when not sucked Voltage level when sucked Analog output(v) FSM-V-*-R0010-H4 Pressure loss (kpa) FSM-V-*-R0100-H4 Pressure loss (kpa) FSM-V-*-R1000-H4 Pressure loss (kpa) Analog output data (example) 0 ' Flow (R/min.) Flow (R/min.) Flow (R/min.) MPa 0.1MPa 0.2MPa -0.05MPa 0.1MPa 0.2MPa -0.05MPa 0.1MPa 0.2MPa Flow (R/min.) Flow (R/min.) * When using the fiber tube, the pressure loss may increase depending on the piping conditions

120 Operation section names / Functions and setting Switch output type POWER display Power supply ON lighting Output (OUT1) display Turns ON when OUT1 output ON. FSM-V Series Operation section names / Functions and setting Output (OUT2) display Turns ON when OUT2 output ON. SET1 trimmer Set switch output operating point of OUT1. How to set switch (switch operation and fluid flow directions) Turn SET1 and SET2 trimmers to turn the two switch output points (OUT1 and OUT2) on or off. 2-point output has different switch operations as shown at right. Use 0 bit (+) driver. POWER OUT1 OUT2 SET1 SET Flow direction FSM-V SET2 trimmer Set switch output operating point of OUT2. OUT1 switch operation Flow direction+ ON Setting trimmer SET1 Separate indicator OFF ( FS) Large flow rate Flow 0 Large flow rate(+fs) OUT2 switch operation OFF ( FS) Large flow rate Flow 0 Large flow rate(+fs) (Cautions) Switch output hysteresis is fixed (10%F.S. or less). Do not press the trimmer forcibly with a screwdriver. The trimmer could break. Refer to page 1352 for details on the separated display's display and operation section names, functions, and operation. ON SET2 sensor Miniature 1347

121 Separate indicator FSM-H-D * Series (FSM-H) FSM-V-D * Series (FSM-V) Internal structure and parts list FSM-H-D*-* FSM-V-D*-* (separate indicator) No Parts name Case top Display circuit board CPU circuit board Sensor circuit board Lead wire (1m) Screw Rear side guard Inner case Terminal box Shield seat Surface seat Material PBT Glass epoxy resin Glass epoxy resin Glass epoxy resin Polyvinyl chloride Brass/nickeling PBT PBT Polyamide/copper alloy (plating) Aluminum Polyester film Dimensions FSM-H-D*-* FSM-V-D*-* *30 FSM RUN OUT1 OUT ø2.7 depth 7 22 V S G sensor Bracket Dimensions MODE 1 2 L/min Cable length 1 m ø3.7 5-conductor Sensor terminal box With single foot bracket (PPD3-KL-D) * L type bracket, set screw 2 pieces Installation hole machining drawing 15 2-nominal 3 (P tight) M3 18 This installation bracket can be placed at 90 increments on the switch. Determine the installation direction based on where the display is installed. 1348

122 Bracket Dimensions H FSM- V -D* Series Dimensions With both sides foot bracket (PPD3-KD-D) * D type bracket, set screw 2 pieces Installation hole machining drawing 4-M3 Lead wire hole 18 2-nominal 3 (P tight) This installation bracket is installed 90 increments. Determine the installation direction based on where the display is installed. Panel mount bracket set with cover (PPD3-KHS-D) * Panel vessel, panel holder, panel key, panel guard 32 Plate thickness t0.8 to (Mounting pitch 53 and over) Panel hole machining fig. *33.5±0.3 Guard 39 (Mounting pitch 40 and over) sensor 5 Panel holder Panel vessel A panel holder changes 90 installation attitude. With operation protective cover (PPD3-KC) * Protective cover, protective cover holder *37.5 (-2.5) Protective cover Protective cover holder Separate indicator Note: Combinations of PPD3-KHS-D can not be made. 1349

123 FSM-H/FSM Series common Wiring methods (FSM-H Series) Internal circuit and examples of load connection FSM-H-N (indicator type NPN output) FSM-H-P (indicator type PNP output) Main circuit Output short-circuit protecting circuit Brown line (power supply +) Gray line (analog output) Load Black line (switch output) White line (switch output) max50ma Blue line (power supply ) max50ma Load Load + Main circuit Output short-circuit protecting circuit Brown line (power supply +) Black line (switch output) White line (switch output) Gray line (analog output) Blue line (power supply ) Load max50ma max50ma Load Load + Line color Descriptions Line color Descriptions Brown Blue Gray Black white Power supply 12 to 24 VDC 0V (GND) Analog output (1 to 5V) OUT1 (max50ma) OUT2 (max50ma) Brown Blue Gray Black white Power supply 12 to 24 VDC 0V (GND) Analog output (1 to 5V) OUT1 (max50ma) OUT2 (max50ma) FSM-H-A (analog output type) Main circuit Brown line (power supply +) Black line (analog output) Load Blue line (power supply-) + Connection methods of analog output type and separate indicator Separate indicator (FSM-A-D*-* /FSM-H-D*-*) Brown (power supply +) V Black (signal line) S Blue (power supply ) G Analog output type (FSM-A-*-* /FSM-H-A-*-*) Line color Brown Blue Black Descriptions Power supply 12 to 24 VDC 0V (GND) Analog output (1 to 5V) sensor Note: When using a metal body (stainless steel body, aluminum body) type, connect the F.G. of the device connected to the plus or minus side of the power supply to the body. Do not conduct withstand voltage testing or insulation resistance testing when the F.G. is connected. These tests could cause damage or burning. 1350

124 (FSM-V Series) FSM-V-A* (analog output type) Main circuit Power supply LED (green) Internal circuit and examples of load connection Brown Black Blue Load Line color Descriptions Brown Power supply 12 to 24 VDC Blue 0V (GND) Black Analog output (1 to 5V) FSM-V-N * (switch output type NPN output) Main circuit Power supply Output 1 LED LED (green) (yellow) Output 2 LED (yellow) Line color Descriptions Brown Power supply 12 to 24 VDC Blue 0V (GND) Black OUT1 (max50ma) white OUT2 (max50ma) (Separate indicator) Brown Blue Brown Blue + Load Black (OUT1) White (OUT2) Load Black (OUT1) White (OUT2) Gray (analog output) Load Load To cancel short-circuit protection, turn power off once, correct wiring mistakes, etc., then turn power on again. F.G. Load Connection methods of analog output type and separate indicator Note: Note: Switch output cannot be used with the separated display. FSM-V-P * (switch output type PNP output ) Main circuit Power supply Output 1 LED LED (green) (yellow) Output 2 LED (yellow) Line color Descriptions Brown Power supply 12 to 24 VDC Blue 0V (GND) Black OUT1 (max50ma) white OUT2 (max50ma) Brown Brown Black (OUT1) White (OUT2) FSM-*-DN-* (separate indicator NPN output ) FSM-*-DP-* (separate indicator PNP output ) Main circuit Output shortcircuit protecting circuit Output shortcircuit protecting circuit Line color Descriptions Brown Power supply 12 to 24 VDC Blue 0V (GND) Gray Analog output (1 to 5V) Black OUT1 (max50ma) white OUT2 (max50ma) FSM-H/FSM-V Series common Separate indicator (FSM-V-D*-*) Main circuit Output shortcircuit protecting circuit Output shortcircuit protecting circuit Brown (power supply +) V Black (signal line) S Blue (power supply ) G Blue Black (OUT1) White (OUT2) Gray (analog output) Line color Descriptions Brown Power supply 12 to 24 VDC Blue 0V (GND) Gray Analog output (1 to 5V) Black OUT1 (max50ma) white OUT2 (max50ma) Load Load Load Load Blue To cancel short-circuit protection, turn power off once, correct wiring mistakes, etc., then turn power on again. Analog output type (FSM-V-A*-*) F.G. Technical data Load + + sensor 1351

125 FSM-H/FSM-V Series common sensor Names and functions of display and operation section Separate indicator type(fsm-h-d/fsm-v-d common) MODE key RUN display Turns on when displaying flow. Blinks during peak hold function operation. Overflow display (FSM-V-D* excluded.) Lights and displays when the 3-digit display is exceeded. (At 10.00R/min., this turns on, and 0.00 is displayed on the 3-digit LED.) Minus display Lights when gas flows in reverse. Use to enter each setting mode. Press to advance setting mode. Use to return to the flow display. Use to release the peak hold function operation. 1 (UP) Key Sequentially displays CH1 data when the flow rate is displayed. Displays maximum during peak hold function operation. Sets the mode when the mode is selected. Used to increment values, etc., when data is set. FSM 1 RUN* MODE OUT1* OUT2* * The design of the front sheet differs for the FSM-H Series, but display and operation section names and functions are the same. 1 2 /min Output (OUT1) display Turns on when CH1 output is on. Blinks when overcurrent is detected. Output (OUT2) display Turns on when CH2 output is on. Blinks when overcurrent is detected. 3-digit LED display Displays the flow rate and switch settings, etc. is displayed for an overflow. (Hi display at approx. 10% or more of F.S.) is displayed for overcurrent in reverse. (Lo display at approx. -10% or more of F.S.) 2 (DOWN) Key Sequentially displays CH2 data when the flow rate is displayed. Displays the minimum during peak hold function operation. Sets the mode when the mode is selecte Used to decrement the value, etc., when data is set. 1352

126 Operation Switch output function Switch operation mode FSM-H/FSM-V Series common Operation Operation pattern name LED display Operation waveform 3%F.S. and over Window operation 1 ON 1%F.S. (ON within specified range) OFF Flow + ON set point OFF set point Window operation 2 (ON out of specified range) Hysteresis operation 1 (Flow small side ON) Hysteresis operation 2 (Flow large side ON) (Note 6) Switch output OFF Set point confirmation method CH1 data display Hold down CH2 data display When a key is pressed while the flow is displayed, the switch data ON setting, OFF setting, operation waveform, zero adjustment, and model are displayed and confirmed. Switch operation is not affected during the following operations: ON side blinking ON OFF OFF set point ON OFF ON set point ON OFF OFF set point Operation waveform display 3%F.S. and over 1%F.S. 1%F.S. and over 1%F.S. and over Flow + ON set point Flow + OFF set point Flow + ON set point ON Output is turned off regardless of ON or OFF setting. OFF Flow + Note 1. When used for a winding operation, leave an interval of 3% F.S. or more between the two settings. 1%F.S. hysteresis is automatically added to the ON side and OFF side. Note 2. When used for hysteresis operation, leave an interval of 1% F.S. or more between the two settings. If there is no difference between the two settings, operation may not take place or may be unstable. Note 3. If switches are operated when flow is not stable, such as pulsating, operation may be unstable. In this case, provide sufficient margin between the two setting values. Confirm that switch operation is stable before use. Note 4. The left side of the operation waveform indicates negative pressure, and the right side indicates positive pressure. Note 5. The magnitude relationship of the ON and OFF settings is determined when the waveform is set, and a reverse magnitude relationship cannot be attained. With this product, however, operation of the designated operation pattern is the priority. When the two settings are input, the magnitude relationship is automatically determined, and each is judged and processed at the appropriate ON and OFF settings. In other words, even if ON and OFF settings are input reversed, input is recognized correctly as ON and OFF and operation occurs with the designated operation mode. Note 6. The output is held even during the Hi display. ON set point display OFF side blinking sensor Hold down OFF set point display Operation waveform display Zero point adjustment value, model number display 0 point adjustment value and model number display are alternately shown. Switch operation is not affected even during operation. "AdJ" display Zero point adjustment value display Model number display Press simultaneously 1353

127 FSM-H/FSM-V Series common sensor How to operate each function Peak hold function Maximum and minimum values for the flow rate within a set interval is displayed. Use for such as are the instantaneous flow change confirmation. The peak hold operation does not affect this product's basic functions such as switch operations or pressure display. Flow display state "460" is displayed Press simultaneously Switch output function Refer to page 1355 for operation methods. This product has 2-point switch output, and uses four operation modes and stopping. The switch function is started by setting the required operation pattern and by setting two settings (ON and OFF) that specify the operation point. Determine the required operation mode and on and off before setting. Select and set the following data to operate the switch: Forced output Peak hold function operation starts (RUN light blinking) Refer to page 1355 for operation methods. Use this function to forcibly turn the switch output ON and confirm the wiring connection of initial operation of the input unit. (Note) Use this test for operation checking of wiring and input unit. Do not use this function instead of actual signals when executing the sequence program while the machine or device is operating. Zero point adjustment function Displaying the peak value Hold down Displaying the bottom value Hold down CH1: operation pattern CH1: ON set point CH1: OFF set point CH2: operation pattern CH2: ON set point CH2: OFF set point Refer to page 1355 for operation methods. Deviation of the display from zero is compensated for in the state with no flow rate. If set incorrectly, readjust when no gas is flowing. Blinking Blinking Peak value "475" Bottom value "453" (Note) The above settings and testing greatly affect the output signal and display. Be sure to stop the machine and devices using this product, and confirm that safety can be ensured even if problems or an incorrect display occurs before operating. Using this function while the machine or device is operating could cause unforeseen problems or incorrect displays. "Operation" To return to the flow display during operations in any setting mode, turn power off and on. The flow display is redisplayed. 1354

128 FSM-H/FSM-V Series common Operation Switch output, forced output, 0 point adjustment operation (flow display) For safety, if the key is not operated for two seconds or more before the mode is set, the pressure display is redisplayed. Basic key operation These key operations are valid in the switch operation pattern setting, ON/OFF set value setting, and zero point adjustment mode. Data return Count Up Count Down Data reading Hold down Blinking When the key is held down, the pressure display is redisplayed. Press simultaneously Setting data of switch output Press simultaneously Blinking Switch CH1 Operation mode change Channel 1 display Switch CH1 Setting ON and OFF data ON point waveform display OFF point waveform display Release Determination Alternate display Press once Alternate display Press once Alternate display Blinking Press once Operation mode display Set point display Set point display Change the mode with the UP/DOWN keys Switch CH2 Operation mode change Press once Change the value with UP/DOWN keys Press once Switch CH2 Setting ON and OFF data To flow display sensor Press once Set the same as switch CH1 Press once Press once Blinking Determination CH1 output ON Switch output forced ON mode CH2 output ON To flow display Press once Press once Hold down Hold down Zero point adjustment mode Press once Blinking Determination "AdJ" display Adjusted value reading To flow display Alternate display Press once Zero point adjustment value display Press simultaneously Press once CAUTION Be sure no gas is flowing when adjusting zero. 1355

129 FSM-H/FSM-V Series common FSM-H, FSM-V Series Measurement Principle FSM-H, FSM (argon and carbon dioxide) FSM-V Series incorporates a platinum sensor chip (3 mm x 3.5 mm) machined with silicon micromachining. The sensor is thermally insulated from the silicon substrate. The heating capacity is extremely low, enabling high sensitivity with a high-speed response. At the sensor, two temperature sensors are arranged with a heater in between. Platinum, which has a resistance that changes based on temperature, is used for the temperature sensor. When the heater is turned on and heated, the temperature distribution is symmetrical to the center of the heater if there is no flow. When flow is received, the symmetrical property of temperature distribution is lost, and temperature upstream from the heater drops, and that downstream rises. This temperature difference appears as the difference in temperature sensor resistance, and varies with the flow rate. If flow is reversed, the temperature difference (resistance value difference) is reversed. A bidirectional flow is thus detected. This is suitable for detecting relatively small flows. Thermo sensor (1) Temperature resistance (without flow) R1 Heater Rh Thermo sensor (2) R2 Temperature distribution symmetry FLOW Temperature resistance R1 (with flow) Rh R2 Symmetry of temperature distribution are lost R1 R2 R1 R2 R1 5V V out Voltage 2.5V R1 5V V out Voltage 2.5V R2 R2 V out V out sensor 1356

130 Custom The following parts are available as custom order parts. Contact your CKD Sales representative for details. Type with Optimum for suction confirmation. Compatible with FSM-V Series FSM-V One way detection type The standard uses bi-directional detection, but unidirectional detection is also possible. (Example: Flow rate range±10r/min. 0 to 10R/min.) FSM Series Custom Analog output (V) F.S.Flow rate Flow (R/min.) sensor 1357

131 FSM all series common 1 How to select Use this as a guide to selecting the flow range when using a to confirm suction and release with a suction nozzle or for leakage tests, etc. The flow is calculated by the effective nozzle (pin hole) sectional area, and the pressure difference inside and outside the nozzle. P2 : P1 : Pressurization When P1 1.89P2 (sonic) Q=113.2SP1 When P1 < 1.89P2 (subsonic) Q=226.4S P2 (P1-P2) Q : Flow rate R/min. P1 : Primary absolute pressure MPa P2 : Secondary absolute pressure MPa S : Effective sectional area of nozzle (pin hole) mm 2 P1 : Atmospheric pressure nozzle P1 : Pressurization P2 : Atmospheric pressure Example of calculation P2 : Atmospheric pressure The following table gives the flow calculation values when using ø0.1 to 2 nozzle diameter and variable P2. Pin hole sensor P1 (MPa) Absolute pressure P1 (MPa) Gauge pressure P2 (MPa) Absolute pressure P2 (MPa) Gauge pressure Sonic/ subsonic Sonic Sonic Sonic Subsonic Subsonic Subsonic Subsonic Subsonic ø ø ø Calculated flow rate value (R/min.) ø0.4 ø0.5 ø0.7 ø ø ø Blow (leakage inspection) Subsonic Subsonic Subsonic Subsonic Sonic Sonic Sonic Sonic Sonic (CAUTION) If there is leakage in piping, etc., the actual flow exceeds the calculated flow. Take pipe leakage into account when selecting the flow. If a piping section is thinner in diameter than the suction nozzle, the flow is restricted, and may be less than the calculated value. It may also not be possible to check suction, etc. The effective sectional area is a guideline. If the nozzle is long and thin, the effective sectional area is smaller than the nozzle opening. Response speed is determined by piping volume between the and suction nozzle (pin hole). During high-speed detection, set the near the suction nozzle, or reduce the volume when possible. 1358

132 confirmation 1 Response time Response time during suction confirmation is determined by the piping's volume and the vacuum pump's exhaust capacity, etc. When using piping as shown at right, for example, response time depends on piping as shown below. Based on this, to shorten the response time, piping volume should be made as small as possible. Analog voltage output (V) (R/min.) 2 Using a collet nozzle Gas flows to piping B. 0 (R/min.) The collet nozzle is often used when the workpiece to be picked up should not be directly seated against the nozzle. The collet nozzle is triangular, so when the workpiece is picked up, a gap is created at the four corners. This causes leakage during pickup. If the effective area of piping, including valves and joints, etc., is too small compared to the collet nozzle and workpiece gap (effective sectional area), the flow is determined by the piping's effective sectional area, and the difference in flow during suction and without suction is small. In this case, suction is accurately confirmed by keeping the effective sectional area of the piping larger than the effective sectional area of the gap between the collet nozzle and workpiece. FSM all series common Pressure sensor 3 way valve Pressurization source (20kPa) source (-70kPa) Release (blow) Gas is released from piping B (R/min.) Time (msec.) Dependency of response on piping A Examination piping A FSM-V B 0.5 (R/min.) A-A cross section Nozzle (ø0.25) A: ø440 B: ø440 A: ø440 B: ø41000 A: ø41000 B: ø A Technical data Nozzle Workpiece sensor Collet nozzle 1359

133 FSM all series common sensor Leakage inspection (Note 1) 1 How to calculate leakage amount When changing from the pressure gauge, use the following formula to calculate leakage: Q = V Q: Leakage amount (mr/min.), P: Differential pressure (Pa), V: Workpiece inner volume (mr) T: Detection time (s) Example: When the workpiece has an inner volume of 500 mr, leakage when a 20 Pa difference in pressure occurs at 5-second detection time is: 2 Percent of leakage amount of gas and liquid Use this as a reference when inspecting leaks in a workpiece for gas by using air. This formula is based on the Hagen Poiseuille formula, and as a condition, the pinhole must be smooth-surfaced round tubing. Pinholes caused by welding faults, etc., may not fit the logical formula. QI Qa Qa Ql a nl Pa Pl P a = l 60 T Q= (mr/min.) : leakage (mr/s) : Liquid leakage (mr/s) : viscosity (Pa s) : Liquid viscosity (Pa s) : test pressure (kpa) : Liquid test pressure (kpa) 101.3Pl (101.3+Pa/2)Pa Viscosity coefficient(pa s10-3) Temperature ( a) Water ( l) Brake oil ( l) 20 C 50 C 70 C Ratio of air (20 C) and gas leak rate Liquid Water 20 C Brake oil 50 C Brake oil 50 C l, Pa s Pneumatics Pa Liquid pressure Pl Ql/Qa MPa 0.4MPa 0.4MPa 0.4MPa 0.4MPa 15MPa Example: When inspecting a workpiece with water leakage of 0.1 mr/min. (test pressure of 0.4 MPa) with air (test pressure 0.4 MPa), leakage Qa is as follows: QR 0.1 = Qa = 16.7 (mr/min.) Qa

134 MEMO sensor 1361

135 sensor Features FSM, FSM-V dedicated series Miniature inline FSM-VFM Series This is an inline for the small FSM and FSM-V Series. The content volume is small so high-speed response is not obstructed when suction is confirmed. Miniature, space-saving body does not get in the way Easy-to-replace element Polyamide resin with outstanding chemical resistance used for the case Transparent case enables element contamination to be checked from outside Specifications Descriptions FSM-VFM-H22 FSM-VFM-H44 FSM-VFM-M55 Working fluid air (JIS B to ), compressed air (JIS B to ) Note 1 Applicable tube outer ø1.8 ø4 diameter (Fiber tube) (Push-in ) Port size M5 Withstanding pressure MPa Working pressure range MPa to 0.5 Ambient temperature range C 0 to 50 Material Case Polyamide Element Polypropylene, polyethylene Filtration rating μm 10 Product weight g Recommended flow rate R/min. 10 Note 2 Note 1: Refer to a compressed air quality grade JIS B : 2000 on page Note 2: Pressure loss increases when flow exceeds 10R/min., so use at 10R/min. or less. How to order FSM VFM H44 B Model no. A Tube outer diameter B Attached Symbol Descriptions A Tube outer diameter H22 ø1.8 (fiber tube) H44 ø4 (push-in ) M55 Port size M5 B Attached Blank Without bracket B Bracket attached Bracket part model no. FSM VFM B (Cross-headed flat tapping screw M2.56: 1pc.) Model no. FSM VFM E (Element: 5 pcs., joint fixing pin: 1 pc.) room specifications (catalog No. CB-033SA) Heat sealed into anti-static bag in clean bench (Class 1000 or more). FSM-VFM P