Small flow sensor FSM series

Transcription

1 High speed response and miniature size Small flow sensor FSM series CC687A 7

2 Miniature size and highresponse Three series of compact flow sensors to match different applications Unprecedentedly compact size and highspeed response are realized using a platinum sensor chip incorporating silicon micromachining and a newly proposed rectifying mechanism. The thermal flow sensor is used for applications such as confirmation of electronic part suction, leakage inspection, and gas flow control. Indicator/FSMHD X Flow display section (digit digital display) Switch output (alarm lamp) Compact, highspeed, extremely small flow rate Detects extremely small flow rates of mr/min or less at high speed. Perfect for leakage and pinhole inspections. Flow range Twodirectional mounting (side, base) Indicator/FSMAD X Compact, highspeed response Flow display section (digit digital display) Switch output (alarm lamp) Select either an integrated or separated indicator to increase the range of applications. Flow range Compatible with argon (Ar) and carbon dioxide (CO). (Option) Twodirectional mounting (side, base)

3 Miniaturized, lightweight Highspeed response Free installation position This sensor can be installed in small spaces or on moving sections, facilitating downsizing and weight reduction. Comparison of volume with conventional parts Usable with vacuums Positive/negative pressure combination Use this sensor even for vacuum applications, such as confirming the suction of the machine on which it is mounted. The argon and carbon dioxide types are for positive pressure. Control flow rates Output includes analog output and digital display and switch output to detect errors visually and with switches. Select the type suited to the application. Miniaturized, ultrahighspeed response Highspeed response is realized by incorporating a platinum sensor chip processed with silicon micromachining. Use this sensor with devices having a short cycle time, such as to check the suction of the machine on which it is mounted. or less Comparison of response speed with conventional part Company A or less Company B Indicator/FSMVD X The sensor can be mounted in any direction top, bottom, left, or right. No straight piping section needed The newly proposed rectifying structure eliminates the need for a straight piping section upstream or downstream. Elbow can be used. Dramatic downsizing and a ms highspeed response have realized a novel design. Flow range Ample variations Series Size Response speed Indicator Interactive Material Output detection Flow range Page Compact, lightweight Highspeed response Separated Integrated Material Switch Analog output output Extremely small flow Compact, lightweight Highspeed response Separated Integrated Material Switch Analog output output Large flow Miniaturized, lightweight Instantaneous response Separated Material Switch Analog output output Interactive direction Low flow Separated indicator Technical data A miniaturized inline filter for small flow sensor is available. Maintain sensor performance and prevent problems. See the next page for examples of applications and series variations.

4 Examples of small flow sensor application Active in different applications This small flow sensor is used in fields such as machinery, automobiles, measuring instruments, and precision equipment; advanced fields such as semiconductors and biotechnology; and medicine and foodstuffs. Applicable fluid Life Sensor applications Leakage inspection Pinhole inspection Ionizer purge gas confirmation Welding gas control Purge gas flow control Contact detection Suction detection Foodstuff/medicine Leakage inspection The inspection cycle time can be shortened. Measurements can be made immediately after filling containers. Even when pressure is extremely low, output is made in proportion to the pinhole, so acceptability is judged and status confirmed. Liquid crystals Ionizer purge gas confirmation Compatible with different flow ranges. Easily execute flow control with the inline flow controller (customized order). Automobiles, etc. Welding argon and carbon dioxide flow control Compatible with different flow ranges. Easily execute flow control with the inline flow controller (customized order). N gas control for laser oscillators and semiconductor manufacturing equipment. Semiconductors Semiconductors Purge gas flow control Control of purge gas is indispensable for maintaining device performance. This miniature sensor is easily incorporated into devices. Machine manufacturing Contact confirmation Even judgments not completed with a pressure sensor because of the small differential pressure are accurately made based on flow rate. Electronic parts Suction confirmation Highspeed response comparable to pressure sensor. The response differs with pipe inner volume and pressure, etc. Flow detection eliminates the need for adjustment based on pressure fluctuation and erroneous detection. Clogging of the nozzle and filter are detected. Suction errors such as inclined suction are controlled with flow detection. Industry Comparison with pressure sensor (For nozzle diameter: ø., vacuum pressure: 7 kpa) Small flow sensor (using FSMN) Pressure sensor Flow difference Very clear! Pressure difference Suction Suction

5 Small flow sensor series variation Extremely small flow Compact, highresponse Miniaturized, ultrahighspeed response Air, nitrogen gas Argon, carbon dioxide (option) Singlepoint analog output Separated indicator (optional) Singlepoint analog output Switch output point NPN output Singlepoint analog output Switch output point PNP output Integrated indicator Separated indicator Switch output Analog output Singlepoint analog output Separated indicator (optional) point NPN output point PIP output Material Resin Stainless steel Aluminum Port size ø fiber tube ø Pushin joint ø Pushin joint Fullscale flow Accuracy (linearity) Negative pressure pressure Positive Negative pressure pressure Positive Positive pressure Working pressure range Negative pressure Positive pressure Negative pressure pressure Positive Analog output FS flow

6 Safety precautions Always read this section before starting use. When designing and/or manufacturing equipment using CKD products, the manufacturer is obligated to check that the device safety mechanism, pneumatic or hydraulic control circuits and electric controls that control these pieces of equipment be secured. It is important to select, use, handle or maintain the product appropriately to ensure that CKD products be used safely. Observe warning and cautions to ensure the safety of equipment. Check that the safety of equipment be ensured, then manufacture safe equipment. Warning These products on this catalog are designed and manufactured as parts for general industrial machines. Therefore, the person that has sufficient knowledge and experience must handle them. Use the products in accordance of specifications. Contact CKD when using the product outside the unique specifications range, when using it outdoors, and when using it under the conditions and environment below. Do not attempt to modify or additionally machine the product. Use for special applications requiring safety including nuclear energy, railroad, aviation, ship, vehicle, medical equipment, equipment or components directly contacting to beverage, food, etc., amusement equipment, emergency shutoff circuits, press machines, brake circuits, safeguard etc. Use for applications where life or assets could be adversely affected, and special safety measure are required. For the safety on equipment design/control, etc., corporate standards and regulations, etc., must be observed. ISO and JIS B 87 (pneumatic system rules), JIS B 868 (pneumatic cylinder) JPAS (principles for use and selections of pneumatic cylinder) High Pressure Gas Maintenance Law, Occupational Safety and Sanitation Laws, other safety regulations and corporate standards, etc. Do not handle the products, pipe, nor remove components before confirming safety. Inspect and service the machines and devices after confirming safety of the entire system related this product. Care must be taken even after operation is stopped since there may be hot or charged section. When inspecting or servicing the device, turn off the energy source (pneumatic or hydraulic source), and turn off power to the facility. Discharge the residual pressure and pay special attention to possible leakages of water and electricity. When starting and restarting a machine or device using pneumatic components, make sure the system safety, such as poppingout prevention measures, etc. are secured. Warning and cautions on the pages below must be observed to prevent accidents. Safety cautions are ranked by the safety cautions as [danger] [warning] [caution] in this section. Danger: When a dangerous situation may occur, or when there is high urgency to a warning leading to fatal or serious injuries, if handling is mistaken. Warning: Caution: When a dangerous situation may occur if handling is mistaken, leading to fatal or serious injuries. When a dangerous situation may occur if handling is mistaken, leading to minor injuries or physical damages. Note that some items described as [CAUTION] may lead to serious results depending on the situation. In any case, the important description that must be observed is listed. INTRO

7 Pneumatic components: warning/cautions to secure safety Always read this section before starting use. Small flow sensor FSMH/FSM/FSMV series Danger Working fluid A flammable fluid must not be used. Design & selection Working environment Flammable environment Do not use the product in flammable gas environment. Since explosionprotection is not taken, explosion or fire may be caused. Air source Warning Working fluid The product can not be used as a business mater. Not conformed to the Measurement Law, do not use the product for the commercial purpose. Use the product as an industrial sensor. Do not use the product with other than applicable working fluids, or the accuracy can not be guaranteed. Install a filter, an air dryer and an oil mist filter (micro alescer) onto the primary side (upstream) of the sensor since the compressed air from the compressor contains drain (water, oil oxide and foreign material, etc.) Mesh (wire net) in a sensor is used to rectify the flow in the pipe. Always install a filter since this mesh is not a filter to remove foreign materials, etc. <Recommended circuit> Prefilter Air dryer Regulator Oil mist filter (Micro alescer) Caution Small flow sensor FSM series Flow rate unit The flow rate of this product is measured by mass flow not depended with temperature and pressure. Unit is R/ min where mass flow is converted to volumetric flow at C and atmospheric pressure (kpa). Withstanding pressure Withstanding pressure may vary per series. Care must be taken to select the product. Overflow Even if twice as much overflow as each series measuring range is applied to the sensor, it is no problem, however, if dynamic pressure is applied near to the maximum working pressure, (when the pressure applied to the primary side with the secondary side released.), the sensor may fail. When feeding workpieces during leakage inspection, if dynamic pressure is applied, always provide a bypass circuit or a needle valve to avoid dynamic pressure applying to the sensor. Design & selection When a valve is used in the primary side of the sensor, an oilprohibited valve must be used. The sensor may malfunction or be destroyed by splash of grease and oil, etc. Working environment Corrosive environment Do not use the product in an environment containing corrosive gas such as salphur dioxide, etc. Ambient temperature/fluid temperature Use the product within the ambient and fluid temperature ranges to C. Even in the specified temperature range, do not use the product where ambient and fluid temperatures will change suddenly, and form dew condensations. Maximum working pressure/usage flow range Use the product in accordance with specifications. If used out of the maximum working pressure and working flow range, the product may result in failures. Drip proof environment The protective structure of this product is equivalent to IP. Do not install the product where moisture, salt, dust or swarf is contained, or where pressurized, or depressurized, neither. The product can not be used where the temperature changes suddenly or has high humidity since a failure by dew condensation may be produced in the body. Design & selection When using this product with adsorption verification, etc., always install an air filter (filtration rating µm or less) onto the upstream of suction side to prevent suction of foreign materials. (Use of miniature inline filter for FSM, FSMV is recommended. Refer to Page 6 for details). In FSMV series, if fiber tube model is used within flow rate range of ±R/min or ±R/min, pressure loss increases per working pressure, the required flow may not be reached. Care must be taken. When using this product with adsorption verification, etc., considering atmospheric dew point and ambient temperature of this product, use the product under the conditions that dew condensations will not be formed in the inside of pipe. When using this product with adsorption verification, etc., response time may delay per pipe volume between this product from adsorption nozzle. In that case, take countermeasures such as, reducing piping volume, etc. When using the product with vacuum applications such as air absorption, etc., do not bend the tube near the pushin joint section. If stress is applied to the tube near the push in joint, insert the tube into the pushin joint after inserting the insert ring. Adsorption verification, etc. When using this product with adsorption verification, etc., select the flow rate range according to vacuum range and adsorption nozzle diameter. Refer to Page on the attached sheet for [flow rate theory calculation method]. INTRO

8 Pneumatic components: warning/cautions to secure safety Always read this section before starting use. Small flow sensor FSMH/FSM/FSMV series Caution Adsorption verification, etc. When the sensor for adsorption verification is replaced from the pressure sensor (switch) to the flow sensor (switch), in the image (refer to right Fig.), the theory of sensor output (switch output) is reversed. Care must be taken since change and modification of sequence program of PLC are required. If source pressure/vacuum is not supplied especially when equipment power turned on, problems must not be created in sequence program, etc., of PLC since flow sensor (switch) maintains [flow rate ]=[sensor output (switch output) ON]. Design & selection Adsorption verification Pressure sensor (switch) Setpoint and over ON Atmospheric pressure side ON OFF High vacuum side Flow rate side Flow sensor (switch) Setpoint or less ON ON OFF Flow rate large side Example of internal circuit and load connection [FSMH/FSM series] FSMHN/FSMN (indicator type NPN output) FSMHP/FSMP (indicator type PNP output) Main circuit Output shortcircuit protection Brown line (power supply+) Gray line (analog output) Load Load Black line (switch output) White line (switch output) maxma Blue line (power supply) maxma Load + Main circuit Output shortcircuit protection Brown wire (power supply+) maxma Black line (switch output) maxma White line (switch output) Load Gray line (analog output) Load Blue line (power supply) Load + Line color Brown Blue Gray Black White Content Power supply DC to V V(GND) Analog output ( to V) OUT(maxmA) OUT(maxmA) Line color Brown Blue Gray Black White Content Power supply DC to V V(GND) Analog output ( to V) OUT(maxmA) OUT(maxmA) FSMHA/FSMA (analog output type) Main circuit Brown wire (power supply +) Black line (analog output) Blue line (power supply ) Load + How to connect analog output type to separate indicator Separate indicator (FSMAD * * /FSMHD * * ) Brown (power supply+) V Black (signal conductor) S Blue (power supply) G Analog output type (FSMA * * /FSMHA * * ) Line color Brown Blue Black Content Power supply DC to V V(GND) Analog output ( to V) (Note) In metal body (stainless steel body and aluminum body) types, connect F.G. of equipment connected to or + power supply to the body. Do not attempt insulation resistance and pressure tests while F.G. is connected, or may result in damage or burn. INTRO

9 Caution Design & selection Internal circuit and load example of connection [FSMV series] FSMVA * (analog output type) How to connect analog output type to separate indicator Main circuit Power supply LED (green) Brown Black Load Blue + Separate indicator (FSMVD * * ) Brown (power supply +) V Black (signal conductor) S Blue (power supply ) G Analog output type (FSMVA * * ) Line color Brown Blue Black Content Power supply DC to V V(GND) Analog output ( to V) Note: For switch output type, the combination with a separate indicator is not available. FSMVN * (switch output type NPN) Brown FSMVP * (switch output type PNP) Brown Main circuit Power supply LED (green) Output short circuit Protective circuit Output LED (yellow) Output LED (yellow) Load Black (OUT) White (OUT) Blue Load + Main circuit Power supply LED (green) Output short circuit Protective circuit Output LED (yellow) Output LED (yellow) Black (OUT) White (OUT) Load Blue Load + Line color Brown Blue Black White Content Power supply DC to V V(GND) OUT(maxmA) OUT(maxmA) Line color Brown Blue Black White Content Power supply DC to V V(GND) OUT(maxmA) OUT(maxmA) [Separate indicator] FSM * DN * (separate indicator NPN output) Brown FSM * DP * (separate indicator PNP output) Brown Main circuit Output short circuit Protective circuit Load Load Black(OUT) White(OUT) Gray (analog output) + Main circuit Output short circuit Protective circuit Black(OUT) White(OUT) Gray (analog output) + Blue Load Load Blue Load Load F.G. F.G. Line color Brown Blue Gray Black White Content Power supply DC to V V(GND) Analog output ( to V) OUT(maxmA) OUT(maxmA) Line color Brown Blue Gray Black White Content Power supply DC to V V(GND) Analog output ( to V) OUT(maxmA) OUT(maxmA) Turn off power supply to release phase fault protection at first, and restart after correcting incorrect wiring, etc. Turn off power supply to release phase fault protection at first, and restart after correcting incorrect wiring, etc. INTRO 6

10 Pneumatic components: warning/cautions to secure safety Always read this section before starting use. Small flow sensor FSMH/FSM/FSMV series Danger Wiring Power supply voltage and outputs must be used with the specified voltage. Applying the voltage more than specified voltage may cause malfunction, damage of sensor, electric shock or fire. Installation & adjustment Do not apply load more than the rated output. Damage or fire of the output may be caused. Warning Installation & adjustment Wiring Line color must be checked when wiring. Check the wiring color with handling precaution, since improper wire connection may result in damage, failure or malfunction of the sensor. Insulation of wiring must be checked. Eliminate contact, ground fault and terminal insulation defective with other circuits, or overcurrent will be admitted into the sensor to damage. For the power supply to be used, use DC safety power supply insulated form alternating current power supply and in rated range. If power supply is not insulated, electric shock may be created. If power supply is not stabilized, the peak magnitude in summer may exceed the rated value, causing damage of this product, or reducing the accuracy. For wiring, stop control unit/machinery and equipment, and turn off the power supply.sudden operation may create not anticipated motions, causing a danger. First, attempt energizing test, then set the desired switch data while control unit, machinery and equipment are stopped. Discharge static electricity built in body, tool and equipment before and during work. Use a wire with elasticity as wire for robot connection in the movable part. Do not use the product out of power supply voltage range. If voltage more than usage range is applied, or if alternating current power (ACV) applied, causing damage or burn. This product and wiring must be installed as far away as possible from noise source such as strong electric line, etc. Take other countermeasures for a surge on the power supply line. Do not shortcircuit a load, or causing damage or burn. Use DC safety power supply thoroughly insulated from the AC primary side for a power supply for the metal body (stainless steel and aluminum bodies) type, while connecting either + or side on the power supply to F.G. Variable resistor (clamping voltage approximate V) is connected between the inside power circuit of metal body type and the metal body to prevent breakdown of the sensor. High potential and insulation resistance tests between the inside power circuit of metal body type and the metal body must not be done. If required, attempt these tests after wiring is disconnected. The excessive electric potential difference between power supply and metals body makes inside parts burn. When electric welding equipment or frame and when creating a shortcircuit accident after metal body type installed, connected or wired, transient high and surge voltages may run in ground line or fluid path connected to the components above when welding current runs or when welding, causing a damage. Remove all F.G. connections of the product and electric wiring before work such as electric welding, etc. INTRO 7

11 Piping FSMH/FSM must be piped, while matching the flow direction and direction specified on the body. For FSMV, the direction of arrow on the body must be checked, considering the flows direction and switching operation, then install and pipe the product. Adsorption Adsorption Blow Caution [Example of piping] switch type Adsorption nozzle Adsorption nozzle Vacuum filter Blow Adsorption side: + Blow side: [Example of piping] analog type Vacuum filter When piping a sensor, refer to the torques below not to apply excessive screwin and load torques to the port. [Reference value] Set screw M Rc/8(G/8) Rc/ V + V Adsorption side: to V Blow side: to V Tightening torque N m. to. to 6 to 8 Flash the pipe to remove foreign substances and swarf, etc., in inside of pipe before piping. If many foreign materials and swarf, etc. entrain into the inside, the rectifier and the sensor tip could be damaged. When piping, apply a spanner on the metal section not to apply forces onto the resin section. Switch valve Switch valve Flow direction Flow direction Flow direction When using the metal body with OUT side released, always connect a joint, or the port filter may be removed. If a pushin joint is used, the tube must be inserted certainly. Pulls the tube to check that the tube not be come out. Cut the tube at the right angle with the dedicating knife. Connect fiber tube as the following steps ( to ). Collar is set in the most deep position. Insert air fiber until the end will reach wall. Collar Cut the end of fiber tube at the right angle. Connect while checking if fiber tube is properly inserted through the collar. Pull the collar in the front to lock. When piping, care must be taken that sealing tape and adhesive must not enter into the inside. When wrapping fluoro resin sealing tape on the screw section, wrap the tape once or twice while leaving to threads from the end, then hold down the tape with your nail top to contact the tape on the thread closely. When using liquid sealant, leave to threads from the screw end to apply the sealant, while watching too much sealant must not be applied. Do not apply sealant on the thread section of component. Adjustment If a switch is activated in unstable flow rate state such as a fluid pulsation, etc., unstable operation may be provided. In this case, maintain a sufficient difference between two setpoints, or avoid switch setting in the unstable area, then use the product after checking that switching operation be stabilized. When setting FSMV series; switch output type setting, use a minus headed screw driver matching trimmer slit (.W X.L X.D) or a crosspoint screwdriver for bit. Also, revolution range of trimmer is degrees. Further rotation or rotation while strongly held may result in damage. Sealing tape Solid/fluid sealant agent Solid or liquid sealant agent Solid or liquid sealant agent Flow direction Vacuum source Air source Vacuum source Air source Installation & adjustment (Good) (Not good) (Good) (Not good) INTRO 8

12 Pneumatic components: warning/cautions to secure safety Always read this section before starting use. Small flow sensor FSMH/FSM/FSMV series Caution Installation This product can be installed with any attitude; vertical, horizontal, right or left. FSMH/FSM series Horizontal (through hole) Vertical (female thread on the bottom) Installation & adjustment FSMV series For miniature flow sensor discrete Using through holes on the side (ø.), install the product. Bracket installation (*bracket use) *Bracket (separate sales) is provided. (Model no.: FSMLB) (Refer to page 8) Separate indicator FSMHD *, FSMAD * and FSMVD * common Bracket/kit (optional) are provided to install a separate indicator. Bracket model no.: PPDKLD : Single foot bracket (radial installation) nominal P tight Mounting hole machining dimensions M 8 Bracket model no.: PPDKDD : Both sides foot brackets (parallel) M (length 6mm) set screw for fixing pieces attached nominal P tight Mounting hole machining dimensions M 8 Bracket model no.: PPDKHSD : Panel mount bracket set with panel cover Mounting hole machining dimensions. ±. Bracket model no.: PPDKC : Operation protective cover Protective cover Protective cover holder INTRO

13 Caution Output accuracy is affected by self exoergics caused by energizing other than temperature characteristics. When using, standby time ( minutes and over after energizing) must be provided. When an error occurs during operation, turn off power supply immediately, and terminate the operation, and contact to the sales office. Use the product within range of rated flow. Use the product within range of working pressure. For selfdiagnosis, this product does not conduct flow rate detecting switch operation for proximate seconds immediately after energized. Make a control circuit and programs to ignore signals for approximate seconds after energized. When changing setpoints of the output, stop the equipment, then change the setpoints, or an accident may occur. A periodic inspection should be done at least once a year, then make sure that the product be operated properly. Disassembly and modification must not be done or causing a failure. The material of case is resin. Solvent/alcohol/cleaner, etc., must not be used to remove contamination, etc., or causing a resin to be corroded. Wipe weakened neutral detergent with tightly squeezed waste cloth, etc. Be careful of reverse current by disconnection/wiring resistance. If other components including another flow sensor are connected to the same power source of the sensor, when switch output line and side of power line are shortcircuited to check operation of input device in the control panel, or if side of power line is disconnected, reverse flow in switch circuit may cause damage. Flow sensor Diode for reverse prevention Control panel Usage & maintenance Be careful of leading of surge current. If the flow sensor shares the power source with inductive load forming surge of a solenoid valve or a relay, etc., when a circuit is disconnected with the inductive load activated, depended with surge absorbing element, surge current may lead to the switch output circuit, causing a damage. Flow sensor Main circuit emergency stop Surge absorbing element (Later installation) Relay Circuit shutdown by disconnection or Solenoid valve Surge current Surge absorbing element (Integrated) Take the following countermeasures to prevent damage by surge current leading. () Separate output system; inductive load such as solenoid valve and relay, and input system; flow sensor. () If the power source can not be separated, provide surge suppressor elements to all inductive loads directly. Surge absorbing element connected PLC, etc., merely protect a single component connected. () Furthermore, connect surge suppressor element per power line to protect the product from disconnection. ON PLC PLC output Another component Main circuit PLC input Current from another component Disconnection Test SW or short circuit Input component Input component Input component Preventing damage by reverse current, take the following countermeasures. () Avoid concentration to side power line, and use the wire as fat as possible. () Narrow the number of components to connect to the same power source of the sensor. () Provide a diode on the flow sensor output line in serial to prevent reverse current. () Provide a diode on side of flow sensor power line to prevent reverse current. If components are connected with connectors, when the connector is removed while energized, the output circuit may be damaged. So, always mount or dismount the connector after the power is turned off. When out of flow rate range, analog output will be provided. [Hi] will be displayed. However, accuracy is not guaranteed. INTRO

14 Pneumatic components: warning/cautions to secure safety Always read this section before starting use. Miniature inline filter FSMVFM series Caution Do not use the product where acid, alkaline, carboxylic acid, other organic compound, screw locking adhesive, solvent or alcohol liquid will adhere on the product nor in the vacuum circuit absorbing an air containing these subsistence, or the body may be damaged. Use the specified tube and plastic plugs. Tube outside diameter accuracy Polyamide tube Within ±.mm Polyurethane rubber tube (~ø6) Within ±.mm (ø8~) +..mm or less CKD recommended model no. Plastic plug Soft nylon tube Polyurethane rubber tube Urethane tube GWP*B series F**series U**series NU, 6 series Usage & maintenance How to replace element Joint Joint fixing pin Element Refer to cautions on joint/tube in [pneumatic/vacuum/ auxiliary components] No.CBS for cautions on pushin joint. Periodical inspection, cleaning and replacement must be done to check cracks on the polyamide case, flaw and other deterioration. Periodical inspection, cleaning and replacement of the element must be done, or clogged filter element may cause degradation of vacuum source. When removing the body to clean or change the filter element, always reduce the pressure in the vessel until atmospheric pressure before starting work. Also, check the arrow on the body before reassembling since the flow direction is specified. Make sure that the required degree of vacuum in the circuit is achieved after reassembling. Cleaning the body, use household neutral detergent then rinse them. Dislocate the joint fixing pin with a tool having shaped edge, etc. (Be careful that the fixing pin not be lost, since the pin will be reused.) Pull out the joint. Replace the element, then insert the joint. Insert the joint fixing pin, then fix the joint. INTRO

15 MEMO INTRO

16 Small flow sensor microflow type Indicator type/analog output FSMH Series (Air/nitrogen gas) Flow rate range:.~,.~,.~,~mr/min Indicator type specifications Descriptions Flow rate range mr/min Note Installation Accuracy Working conditions Working fluid Maximum working pressure MPa Minimum working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Linearity (display/analog output) Pressure characteristics Temperature characteristics Repeatability Response time Type of display Type of output Power supply voltage Current consumption Lead wire Functions Installation attitude Strait piping section Protective structure Protective circuit Note EMC directive FSMHN/PML FSMHN/PML Indicator type. to. to. to to Clean air (JIS B 8.. to.6.), compressed air (JIS B 8.. to.6.) Note and nitrogen gas Note... to C and %RH or less to (to be no dew condensation.) ±%F.S. or less (.MPa, C and flow rate range to %F.S.) ±%F.S. or less (. to.mpa,.mpa criteria) ±.%F.S./ C or less ( to C, C criteria) ±.%F.S. or less ms or less Note FSMHN/PML FSMHN/PML Flow rate display (7 segments / digits orange) and operation and switch output display (orange) Switch output points (NPN or PNP open collector output, ma or less, voltage drop.v and PLC/relays) Analog output point ( to V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) 6mA or less ø.7.mm X conductor m Flow rate display, flow rate display peak hold, switch output and analog output Both vertical and horizontal Not required IEC standards IP Power supply and switch output reverse connection protections, and switch output load shortcircuit protection EN, EN66, EN6///6/8 Indicator type mass Model no. Port size (body material) 6A Rc/8 (stainless steel) 6G G/8 (stainless steel) FSMN/P FSMN/P FSMN/P FSMN/P Unit: g Analog output type mass Model no. Port size (body material) 6A Rc/8 (stainless steel) 6G G/8 (stainless steel) FSMA FSMA FSMA FSMA Unit: g

17 Analog output type specifications (without display) Descriptions Flow rate range mr/min Note Installation Accuracy Working conditions Working fluid Maximum working pressure MPa Minimum working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Response time Type of display Type of output Power supply voltage Current consumption Lead wire Functions Protective circuit Note Installation attitude Installation strait piping section Protective structure EMC directive FSMHAML FSMHAML Analog output type ±.%F.S. or less FSMHAML FSMH Series Specifications FSMHAML. to. to. to to Clean air (JIS B 8.. to.6.) compressed air (JIS B 8.. to.6.) Note and N gas Note... to C and %RH or less to (to be no dew condensation.) ±%F.S. or less (.MPa, C and flow rate range to %F.S.) ±%F.S. or less (. to.mpa,.mpa criteria) ±.%F.S./ C or less ( to C, C criteria) ms or less Note Power display (green) Analog output point ( to V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) ma or less ø.7.mm X conductor m Analog output Power supply reverse connection protection Both vertical and horizontal Not required IEC standards IP EN, EN66, EN6///6/8 Note : Converted to volumetric flow at C and atmospheric pressure (kpa) Note : Compressed air quality grade according to JIS B 8: Class Maximum particle diameter (µm) Minimum pressure dew point ( C) Maximum oil content concentration (mg/m ) Note : Consult with CKD for usage with a gas other than air and N. Note : The protective circuit of this product is effective for the specified incorrect wiring and load short circuits, but can not protect the product from all wrong connections. Note : The response time may change depended with piping condition. Model no. Descriptions Available analog output type model no. Display Output Power supply voltage Current consumption Lead wire Functions Ambient temperature/humidity Protective structure EMC directive Mass g FSMHAML FSMHD / ML FSMHAML... Separate indicator specifications (analog output type only) FSMHD / ML Separate indicator FSMHD / ML FSMHAML For example, [Class..] shows the grade of... Solid particle.µm Pressure dew point C Oil content concentration.mg/m FSMHD / ML N P N P N P N P FSMHAML Flow rate display (7 segments digits / and orange), operation and switch output (orange) Switch output points (NPN or PNP open collector output, load current ma or less voltage drop.v and PLC/relays) Analog output point (V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) ma or less (indicator only) ø.7.mm X conductor (m) Flow rate display, flow rate peak hold, switch output and analog output to C and 8%RH or less (to be no dew condensation.) IEC standards IP EN, EN66, EN6///6/8 Approximate 7 (including lead wire m)

18 FSMH Series How to order FSMH N ML 6A K A Output type B Flow rate range C Port size Symbol A A N P B Content Output type Analog output point NPN output points and analog output point PNP output points and analog output point Flow rate range ML ML ML ML. to mr/min. to mr/min. to mr/min to mr/min C Port size 6A Rc/8 (stainless steel body) 6G G/8 (stainless steel body) *Refer to Page 6 for model no. and dimensions of bracket (separate sales). [Example of model number] FSMHNML6AK Model: FSM indicator type A Switch output type : NPN output B Flow rate range :. to mr/min C Port size : Rc/8 (stainless steel body) D Option : company certification attached D Option D Option Blank None K Company Certification attached T (Note ) Traceability attestation attached Note ) pieces; traceability attestation, company certification and traceability system configuration are attached. Separate indicator (analog output type only) FSM H D N ML Symbol Content Model no. A Output type A Switch output type N NPN output points and analog output point P PNP output points and analog output point B Flow rate range B Flow rate range ML. to mr/min ML. to mr/min ML. to mr/min ML to mr/min *Refer to Page to for the operation and dimensions, etc. Bracket for separate indicator PPD KLD A Bracket kit Symbol Content A Bracket kit KLD Single foot bracket (radial) KDD Both sides foot brackets (parallel) KHSD Panel mount bracket set with cover KC Operation protective cover *Refer to Page and 6 for bracket dimensions and installation dimensions.

19 Internal structure and parts list FSMH Series How to order/internal structure and parts list FSMH * ML6A Indicator type stainless steel body No. 6 Parts name Front sheet Case Lead wire with holder (conductor) Module holder Sensor circuit board Stainless steel body Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel No. 7 8 Parts name Sensor tip Rectifier Port filter Sensor gasket Electron circuit board Material Silicon Stainless steel Stainless steel Fluoro rubber FSMHAML6GA Analog type stainless steel body No. 6 Parts name Front sheet Case Lead wire with holder (conductor) Module holder Sensor circuit board Stainless steel body Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel No. 7 8 Parts name Sensor tip Rectifier Port filter Sensor gasket Electron circuit board Material Silicon Stainless steel Stainless steel Fluoro rubber Separate indicator FSMHD * * Refer to Page for internal structure drawing of a separate indicator.

20 FSMH Series Dimensions (indicator type) Body material: stainless steel FSMH * * * ø.7 Lead wire length m 7 ø. penetrating Rc/8 Dimensions (analog output type) Body material: stainless steel FSMHA * * ø.7 Lead wire length m ø. penetrating G/8 M depth mm M depth mm.. *Refer to Page for dimensions of a separate indicator FSMHD * *.

21 Dimensions (bracket) FSMH Series Dimensions Model no.: FSMLB R With M (length 6mm) set screws for fixing Analog output properties FSMH * * Analog output (V) F.S. flow rate Flow rate (R/min) (Note) If flow rate range is exceeded, output will reach up to max8v. Pressure loss properties FSMH * ML * FSMH * ML * 7 Pressure loss (Pa)....MPa.MPa Pressure loss (Pa) 6.MPa.MPa. 6 8 Flow rate (mr/min) Flow rate (mr/min) FSMH * ML * 8.MPa FSMH * ML * 6.MPa Pressure loss (Pa) 7 6.MPa Pressure loss (Pa) 8 6.MPa Flow rate (mr/min) 6 Flow rate (mr/min) 8 For name, functions and operation of display/controls, refer to Page for display integrated type, while to Page 7 for a separate indicator. 6

22 Small flow sensor Indicator type/analog output FSM Series Air and nitrogen gas (Flow rate range:.~r/min) Argon and carbon oxide (Flow rate range:.~r/min) FSM series for air and nitrogen gas Indicator type specifications Descriptions Flow rate range R/min Note Working fluid Maximum working pressure MPa Minimum working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Linearity (display/analog output) Pressure characteristics Temperature characteristics Installation Accuracy Working conditions Indicator type mass (air and nitrogen gas) Model no. Port size (body material) H ø pushin (nylon) H6 ø6 pushin (nylon) 6A Rc/8 (stainless steel) 6AA Rc/8 (aluminum) M M (stainless steel) 8A Rc/ (stainless steel) 8AA Rc/ (aluminum) Analog output type mass (air and nitrogen gas) Model no. Port size (body material) H ø pushin (nylon) H6 ø6 pushin (nylon) 6A Rc/8 (stainless steel) 6AA Rc/8 (aluminum) M M (stainless steel) 8A Rc/ (stainless steel) 8AA Rc/ (aluminum) 7 Repeatability Response time Type of display Type of output Power supply voltage Current consumption Lead wire Functions Installation attitude Strait piping section Protective structure Protective circuit Note EMC directive FSMN/P. to.. to. to to to to to Clean air (JIS B 8.. to.6.), compressed air (JIS B 8.. to.6.) Note and nitrogen gas.7.7. to C and %RH or less to (to be no dew condensation.) ±%F.S. or less (.MPa, C and flow rate range to %F.S.) ±%F.S. or less (.7 to.mpa,.mpa criteria) ±.%F.S./ C or less ( to C, C criteria) FSMN/P FSMA 6 6 FSMN/P FSMN/P FSMA 6 6 ±%F.S. or less FSMN/P FSMN/P FSMA 6 6 Indicator type FSMN/P ms or less Note Flow rate display (7 segments / digits orange) and operation and switch output display (orange) Switch output points (NPN or PNP open collector output, ma or less, voltage drop.v or less, PLC/relays) Analog output point ( to V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) 6mA or less ø.7.mm X conductor m Flow rate display, flow rate displaypeak hold, switch output and analog output Both vertical and horizontal Not required IEC standards IP Power supply and switch output reverse connection protections, and switch output load shortcircuit protection EN, EN66, EN6///6/8 FSMN/P FSMA 6 6 FSMN/P FSMN/P FSMA 6 6 FSMN/P FSMN/P 7 FSMA 6 8 FSMN/P ±%F.S. or less (If flow rate %F.S. or less, ±%F.S. or less) Unit: g FSMN/P Unit: g FSMA

23 Analog output type specifications (for air or nitrogen gas, without display) Descriptions Flow rate range R/min Note Installation Accuracy Working conditions Working fluid Maximum working pressure MPa Minimum working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Response time Type of display Type of output Power supply voltage Current consumption Lead wire Functions Protective circuit Note Installation attitude Installation strait piping section Protective structure EMC directive FSMA FSMA ±%F.S. or less FSMA Analog output type FSMA FSMA FSMA FSM Series Specifications FSMA. to.. to. to to to to to Clean air (JIS B 8.. to.6.), compressed air (JIS B 8.. to.6.) Note and nitrogen gas.7.7. to C and %RH or less to (to be no dew condensation.) ±%F.S. or less (.MPa, C and flow rate range to %F.S.) ±%F.S. or less (.7 to.mpa,.mpa criteria) ±.%F.S./ C or less ( to C, C criteria) ms or less Note ±%F.S. or less (If flow rate %F.S. or less, ±%F.S. or less) Power display (green) Analog output point ( to V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) ma or less ø.7.mm X conductor m Analog output Power supply reverse connection protection Both vertical and horizontal Not required IEC standards IP EN, EN66, EN6///6/8 Note : Converted to volumetric flow at C and atmospheric pressure (kpa) Note : Compressed air quality grade according to JIS B 8: Class Maximum particle diameter (µm) Minimum pressure dew point ( C) Maximum oil content concentration (mg/m ) Note : The protective circuit of this product is effective for the specified wrong connection and load short circuit, but can not protect from all wrong connection. Note : The response time may change depended with piping condition.... For example, [Class..] shows the grade of... Solid particle.µm Pressure dew point C Oil content concentration.mg/m Separate indicator specifications (analog output type only) Model no. Descriptions Available analog output type model no. Display Output Power supply voltage Current consumption Lead wire Functions Ambient temperature/humidity Protective structure EMC directive Mass g FSMAD / FSMA FSMAD / FSMA FSMAD / FSMA Separate indicator FSMAD / FSMA FSMAD / FSMA FSMAD / FSMA Flow rate display (7 segments digits / and orange) and operation switch output (orange) Switch output points (NPN or PNP open collector output, load current ma or less voltage drop.v and PLC/relays) Analog output point (V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) ma or less (indicator only) ø.7.mm X conductor (m) Flow rate display, flow rate displaypeak hold, switch output and analog output to C and 8%RH or less (to be no dew condensation.) IEC standards IP EN, EN66, EN6///6/8 Approximate 7 (including lead wire m) FSMAD / N P N P N P N P N P N P N P FSMA 8

24 FSM Series FSM series for argon and carbon dioxide Indicator type specifications Descriptions Flow rate range R/min Note Working fluid Working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Linearity (display/analog output) Pressure characteristics Temperature characteristics Installation Accuracy Working conditions Repeatability Response time Type of display Type of output Power supply voltage Current consumption Lead wire Functions Installation attitude Strait piping section Protective structure Protective circuit Note EMC directive Indicator type mass (argon and carbon oxide) Model no. Port size (body material) 6A Rc/8 (stainless steel) 6AA Rc/8 (aluminum) M M (stainless steel) MA M (aluminum) FSMN/P. to. FSMN/P FSMN/P. to. to to to Argon and carbon dioxide Note to. Note.7 to C and %RH or less to (to be no dew condensation.) ±%F.S. or less (.MPa, C and flow rate range to %F.S.) ±%F.S. or less ( to.mpa,.mpa criteria) ±.%F.S./ C or less ( to C, C criteria) ±%F.S. or less FSMN/P Indicator type (argon and carbon oxide) FSMN/P ms or less Note FSMN/P FSMN/P FSMN/P FSMN/P *All pressures are gauge pressure. FSMN/P 7 FSMN/P 7 to ±%F.S. or less (If flow rate %F.S. or less, ±%F.S. or less) Flow rate display (7 segments / digits orange) and operation and switch output display (orange) Switch output points (NPN or PNP open collector output, ma or less, voltage drop.v, PLC/relays) Analog output point ( to V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) 6mA or less ø.7.mm X conductor m Flow rate display, peak hold, switch output and analog output Both vertical and horizontal Not required IEC standards IP Power supply and switch output reverse connection protections, and switch output load shortcircuit protection EN, EN66, EN6///6/8 Unit: g FSMN/P Analog output type mass (argon and carbon oxide) Model no. Port size (body material) FSMA FSMA FSMA 6A 6AA M MA Rc/8 (stainless steel) Rc/8 (aluminum) M (stainless steel) M (aluminum) FSMA 7 7 FSMA 6 8 Unit: g FSMA 6 8

25 Analog output type specifications (for argon or carbon dioxide, without display) Descriptions Flow rate range R/min Note Installation Accuracy Working conditions Working fluid Working pressure MPa Withstanding pressure MPa Ambient temperature/humidity Working fluid temperature C Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Response time Type of display Type of output Power supply voltage Current consumption Lead wire Functions Protective circuit Note Installation attitude Installation strait piping section Protective structure EMC directive FSMA. to. FSMA Analog output type (argon and carbon oxide). to. to to to Argon and carbon dioxide Note to. Note.7 to C and %RH or less to (to be no dew condensation.) ±%F.S. or less (.MPa, C and flow rate range to %F.S.) ±%F.S. or less ( to.mpa,.mpa criteria) ±.%F.S./ C or less ( to C, C criteria) ±%F.S. or less FSMA ms or less Note FSMA FSMA Power display (green) Analog output point ( to V voltage output and connected load impedance KΩ and over) DC/V (.8 to 6.V) ma or less ø.7.mm X conductor m Analog output Power supply reverse connection protection Both vertical and horizontal Not required IEC standards IP EN, EN66, EN6///6/8 FSM Series Specifications FSMA *All pressures are gauge pressure. Note : Converted to volumetric flow at C and atmospheric pressure (kpa) Note : It is to be dry gas (minimum pressure dew point C or less) without corrosion components (chlorine, sulphur and acid, etc.) Also, it is to be purity gas (solid particle. µ m or less and oil content concentration.mg/m or less) without dust and oil mist. Note : Argon and carbon oxide model is used for positive pressure. If used with negative pressure (vacuum), care must be taken since the specified accuracy may not be satisfied. If used with vacuum equipment, etc., always install a needle valve onto the secondary side of this product to avoid a situation as this product is under negative pressure. Note : The response time may change depended with piping condition. Note : The protective circuit of this product is effective for the specified wrong connection and load short circuit, can not protect the product from all wrong connections. to ±%F.S. or less (If flow rate %F.S. or less, ±%F.S. or less) *Refer to Page 8 for the specifications of a separate indicator.

26 FSM Series Air and nitrogen gas How to order FSM N H [Example of model number] FSMNH A Output type Flow rate range Port size Model: FSM indicator type A Switch output type : NPN B Flow rate range :. to.r/min C Port size : ø pushin joint (resin body) B C A B C Symbol Output type A Analog output point N NPN output points and analog output point P PNP output points and analog output point Flow rate range Port size H H6 6A 6AA 8A 8AA M. to.r/min. to R/min. to R/min to R/min to R/min to R/min to R/min Content ø pushin joint (resin body) *Excluding flow rate range and ø6 pushin joint (resin body) *Excluding flow rate range and Rc/8 (stainless steel body) *Excluding flow rate range Rc/8 (aluminum body) *Only for flow rate range Rc/ (stainless steel body) *Only for flow rate range Rc/ (aluminum body) *Only for flow rate range M (stainless steel body) *Excluding flow rate range and *Refer to Page for model no. and dimensions of bracket (separate sales). Separate indicator (only for analog output type, common for air, nitrogen gas, argon and carbon oxide) FSM Model no. A D N A Switch output type B Flow rate range Symbol Content A N P B Output type NPN output points and analog output PNP output points and analog output Flow rate range. to.r/min. to R/min. to R/min to R/min to R/min to R/min to R/min *Refer to Page to for the operation dimensions, etc.

27 Argon and carbon dioxide How to order FSM N 6A A Output type B Flow rate range C AR Port size A B C Symbol Content FSM Series How to order Output type A Analog output point N NPN output points and analog output point P PNP output points and analog output point Flow rate range. to.r/min. to R/min. to R/min to R/min to R/min to R/min Port size 6A Rc/8 (stainless steel body) 6AA Rc/8 (aluminum body) M MA M (stainless steel body) *Excluding flow rate range (CO) and M (aluminum body) *Excluding flow rate range (CO) and [Example of model number] FSMN6AAR Model: FSM indicator type A Switch output type : NPN B Flow rate range : to R/min C Port size : Rc/8 (stainless steel body) D Working fluid : argon D Working fluid D Working fluid AR Argon CO Carbon oxide *Refer to Page for model no. and dimensions of bracket (separate sales). Bracket for separate indicator PPD KLD A Bracket kit Symbol Content A Bracket kit KLD Single foot bracket (radial) KDD Both sides foot brackets (parallel) KHSD Panel mount bracket set with cover KC Operation protective cover *Refer to Page and 6 for bracket and installation dimensions.

28 FSM Series Internal structure and parts list FSM * 6A * Indicator type stainless steel body No. 6 Parts name Front sheet Case Lead wire with holder (conductor) Module holder Sensor circuit board Stainless steel body Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina Stainless steel No. 7 8 Parts name Sensor tip Rectifier Port filter Sensor gasket Electron circuit board Material Silicon Stainless steel Stainless steel Fluoro rubber Internal structure and parts list FSMAH6 Analog type resin body No. 6 Parts name Front sheet Case Lead wire with holder (conductor) Module holder Push in cartridge joint ø6 Sensor circuit board Material Polyester film ABS resin ABS resin/polyvinyl chloride Polyamide resin Alumina No. 7 8 Parts name Resin body Sensor tip Rectifier Port filter Sensor gasket Electron circuit board Material Polyamide resin Silicon Stainless steel Stainless steel Fluoro rubber Separate indicator FSMAD * * Refer to Page for internal structure drawing.

29 MEMO

30 FSM Series Dimensions (indicator type) Body material: polyamide resin and port size: ø FSM * * H ø.7 Lead wire length m ø pushin joint Body material: polyamide resin and port size: ø6 FSM * * H6 ø. penetrating M depth. Lead wire length m ø6 pushin joint ø ø. penetrating. M depth.

31 Dimensions (indicator type) FSM Series Dimensions Body material: stainless steel and aluminum FSM * * * Lead wire length m E D A B ø.7 C 7 7 ø. penetrating. M depth. Argon and carbon dioxide Air and nitrogen gas Model no. FSMN/P6A FSMN/PM FSMN/P6A FSMN/PM FSMN/P6A FSMN/PM FSMN/P6A FSMN/PM FSMN/P6A FSMN/PM FSMN/P6A/6AA FSMN/P8A/8AA FSMN/P6A/6AAAR/CO FSMN/PM/MAAR/CO FSMN/P6A/6AAAR/CO FSMN/PM/MAAR/CO FSMN/P6A/6AAAR/CO FSMN/PM/MAAR/CO FSMN/P6A/6AAAR FSMN/PM/MAAR FSMN/P6A/6AACO FSMN/P6A/6AAAR/CO FSMN/P6A/6AAAR/CO Flow rate range R/min. to.. to. to to to to to. to.. to. to to to to to A B C D E Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/ Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/8 Rc/8 6

32 FSM Series Dimensions (analog output type) Body material: polyamide resin and port size: ø FSMA * H ø.7 Lead wire length m ø pushin joint ø. penetrating ø.7 Lead wire length m ø6 pushin joint M depth. Body material: polyamide resin and port size: ø6 FSMA * H6 7 7 ø. penetrating. M depth. 7

33 Dimensions (analog output type) FSM Series Dimensions Body material: stainless steel and aluminum FSMA * * ø.7 Lead wire length m D A C B 7 7 ø. penetrating E. M depth. Argon and carbon dioxide Air and nitrogen gas Model no. FSMA6A FSMAM FSMA6A FSMAM FSMA6A FSMAM FSMA6A FSMAM FSMA6A FSMAM FSMA6A/6AA FSMA8A/8AA FSMA6A/6AAAR/CO FSMAM/MAAR/CO FSMA6A/6AAAR/CO FSMAM/MAAR/CO FSMA6A/6AAAR/CO FSMAM/MAAR/CO FSMA6A/6AAAR FSMAM/MAAR FSMA6A/6AACO FSMA6A/6AAAR/CO FSMA6A/6AAAR/CO Flow rate range R/min. to.. to. to to to to to. to.. to. to to to to to A.... B C D E Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/ Rc/8 M Rc/8 M Rc/8 M Rc/8 M Rc/8 Rc/8 Rc/8 *Dimensions of a separate indicator FSMAD * * are same as FSMVD * *. Refer to Page. 8

34 FSM Series Dimensions (bracket) Model no.: FSMLB R With M (length 6mm) set screws for fixing Analog output characteristics FSM * * * Analog output (V) F.S. flow rate Flow rate (R/min) (Note) If out of flow rate range, the output will reach up to max8v. For name, functions and operation of display/controls, refer to Page for display integrated type, while to Page for a separate indicator type.

35 FSM Series Pressure loss properties (air and nitrogen gas) Technical data FSM * * FSM * * MPa..7MPa Pressure loss (kpa).... Pressure loss (kpa) mpa.mpa mpa.mpa Flow rate (R/min) Flow rate (R/min) FSM * * FSM * *..7MPa..7MPa Pressure loss (kpa)... Pressure loss (kpa)....mpa..mpa.mpa. 6 8.MPa Flow rate (R/min) Flow rate (R/min) FSM * * FSM * * 8..MPa 6.MPa Pressure loss (kpa)....mpa Pressure loss (kpa) 8 6.MPa. 8 6 Flow rate (R/min) Flow rate (R/min) FSM * *.MPa Pressure loss (kpa).mpa 6 8 Flow rate (R/min)

36 FSM Series Pressure loss characteristics (argon) FSM * * AR. FSM * * AR....MPa.8.7.MPa Pressure loss (kpa)....mpa Pressure loss (kpa).6....mpa Flow rate (R/min) Flow rate (R/min) FSM * * AR FSM * * AR MPa.MPa Pressure loss (kpa)....mpa Pressure loss (kpa)..mpa Flow rate (R/min) Flow rate (R/min) FSM * * AR FSM * * AR MPa.MPa Pressure loss (kpa).mpa Pressure loss (kpa).mpa 8 Flow rate (R/min) 6 Flow rate (R/min)

37 FSM Series Pressure loss characteristics (carbon dioxide) How to operate FSM * * CO FSM * * CO...MPa..MPa.. Pressure loss (kpa)...mpa Pressure loss (kpa).....mpa Flow rate (R/min) Flow rate (R/min) FSM * * CO FSM * * CO.7.6.MPa..MPa Pressure loss (kpa).....mpa Pressure loss (kpa)..mpa Flow rate (R/min) Flow rate (R/min) FSM * * CO FSM * * CO 6.MPa 8.MPa Pressure loss (kpa) 7 6.MPa Pressure loss (kpa).mpa 8 Flow rate (R/min) 6 Flow rate (R/min)

38 FSMH FSM Series Name and functions of display/controls Display integrated type (common for FSMH/FSM series) Overflow indication RUN display If the limit of digit display is reached, the display will be lighted to show " ". (This " " will be lighted when.r/min, then digit LED show..) MODE key Used when entering various setting modes. Used when returning to flow rate display. Used when releasing peak hold operation. Light turned on when displaying flow rate. Flash when peak hold operation. Light turned off depending on setting mode. Output (OUT) display Light turned on when CH output turned on Flash when overcurrent detected Output (OUT) display Light turned on when CH output turned on Flash when overcurrent detected Minus display [excluding FSM (for compressed air or nitrogen)] Light turned on when flowing reversely digit LED display The flow rate/various switches' setpoints, etc., are displayed. If of overflow, is displayed. If of the reverse direction overflow, is displayed. (FSM [for compressed air or nitrogen] excluded) (UP) key Data of CH is displayed in turn when displaying flow rate. The maximum value is displayed during peak hold operation. A mode is determined when selecting the mode. Used for countup when setting each data. (DOWN) key Data of CH is displayed in turn when displaying flow rate. The minimum value is displayed during peak hold operation. Used for count down when setting each data. *In FSMH series, the design of front sheet differs. Same names and functions of display/controls are used. Separate indicator type Refer to Page 7 to for names, functions and operations of display/controls.

39 Operation FSMH FSM Series How to operate Switch output function Switching mode Operation pattern name Window operation (Range inside ON) Window operation (Range out ON) Hysteresis operation (Flow rate small side ON) LED display ON OFF Flow rate + ON setpoint OFF setpoint ON OFF Flow rate + OFF setpoint ON setpoint ON Operation waveform %F.S. and over %F.S. %F.S. and over %F.S. %F.S. and over OFF Flow rate + ON setpoint OFF setpoint Note.Maintain intervals more than %F.S. between two setpoints during window operation. Hysteresis of %F.S. is provided on both ON and OFF sides automatically. Note.Maintain intervals more than %F.S. between two setpoints when hysteresis operation. If the differential between setpoints above is not maintained, it may result in not operated or unstable operation. Note.If a switch is activated in unstable flow rate state such as a fluid pulsation, etc., unstable operation may be provided. In this case, maintain the difference between two setpoints satisfactorily, use the product after checking that switching is stabilized. Note.In operation waveform, left shows the minus side, while, right shows the plus side. Hysteresis operation (Flow rate large side ON) Switch output OFF ON OFF Flow rate + OFF setpoint ON setpoint ON %F.S. and over The output is turned off not depending on ON or OFF setpoint. OFF Flow rate + Note.If waveform pattern is decided, magnitude of ON and OFF setpoints is decided, and the reverse magnitude is not allowed. However, in this product, operation with the specified operation pattern has precedence over all things. When the two setpoints are inputted, the magnitude is identified automatically, processing each identification properly as ON or OFF setpoint. As result, even if ON or OFF setpoint is inputted reversely, rerecognized as correct ON or OFF setpoint, always operating with the specified operation pattern. Setpoint verification method CH data display If each key is pressed down with flow rate displayed, switch data ON or OFF setpoint/operation waveform, zero adjust value and the model are displayed to check. Switching is not affected during this operation. Being held down. CH data display ON side Flash Operation waveform display ON setpoint display OFF side Flash Being held down. OFF setpoint display Operation waveform display Zero point adjustment value/model number display (FSM [for compressed air or nitrogen] excluded) Zero point adjustment value and model number display are displayed alternately. Switching is not affected even during operation. [AdJ] display Zero point adjustment value display Model number display Press simultaneously.

40 FSMH FSM Series How to operate each function Peak hold function Maximum and minimum flow rate values during the specified period can be read. Use this setpoint when checking instantaneous flow rate change. Also, peak hold operation never affects the basic function of this product such as switching and flow rate display, etc. Peak magnitude displayed Flow rate display state [6] displayed Being held down. Flash Peak magnitude [7] Peak hold operation start (RUN light flash) Bottom value displayed Flash Bottom value [] Press simultaneously. Being held down. Switch output function Refer to Page 6 for the operation. Having pieces of switch output, operation patterns and stop of operation can be set. Setting the required operation pattern and the two setpoints (ON and OFF setpoints) defining operating points allows the switch function to start. First determine operation pattern and ON and OFF setpoints to be used before setting work. Select and set next data to operate a switch. CH: operation pattern CH: ON setpoint CH: OFF setpoint CH: operation pattern CH: ON setpoint CH: OFF setpoint Forcible output function Refer to Page 6 for the operation. Switch output is turned on forcibly to check wiring connection and initial operation of input unit. (Note) This test function is to be used to check wiring and operation of input unit. Avoid using this function to run sequence program instead of actual signals, while machinery and equipment are being operated. point adjustment function Refer to Page 6 for the operation (FSM [for compressed air or nitrogen] excluded). Deviation of the display from is corrected without flow. (Note) Above setting and tests affect output signals and indicated values seriously. Always stop machinery and equipment using this product, then check that the safety is secured, even if malfunction or wrong display is occurred, before starting operation. Handling during operation may produce an accident, malfunction and wrong display, causing a danger.

41 Switch output function/forcible output function/ point adjustment operation FSMH FSM Series How to operate [Flow rate display] If the key is not operated longer than two seconds before confirming mode, the display will be returned to the flow rate display for safety. Basic key operation It is effective in the switching pattern setting/on/off setpoint/ adjustment mode. Data return Countdown Countup Data reading Being held down. key is further Flash pushed, the display will return to flow rate display. Press simultaneously. Press simultaneously. Data setting of switch output function Flash Switch CH Operation mode change Switch CH ON/OFF data setting Channel display ON point waveform display OFF point waveform display Separate. Determination Alternate display Press once. Alternate display Press once. Alternate display Flash Press once. Operation mode display Setpoint display Setpoint display Operation mode change by up/down key Switch CH Operation mode change Press once. Number change by up/down key Press once. Switch CH ON/OFF data setting To flow rate display Press once. Set same as switch CH. Press once. Pressed once. Switch output forcible ON mode Flash Determination CH output ON CH output ON To flow rate display Press once. Being held down. Being held down. Press once. Press once. Flash FSM (Air/nitrogen) To flow rate display Determination point adjustment mode (FSM [air and nitrogen] excluded) [AdJ] display Alternate display Adjusted value reading To flow rate display Press once. point adjustment value display Press simultaneously. Press once. Caution Always adjust point without flow. 6

42 Miniature flow sensor Analog output type/switch output FSMV Series (Air/nitrogen gas) Flow rate range:±., ±., ±., ±, ±, ±R/min Sensor body specifications Model no. Descriptions Installation Analog output accuracy Note Working conditions Separate indicator specifications (analog output type only) Note 7 Model no. Descriptions Available analog output type model no. Display Output Power supply voltage Current consumption Lead wire Functions Ambient temperature/humidity Protective structure EMC directive Mass g 7 FSMVA R FSMVA R FSMVD / R FSMVAR Analog output type FSMVA R FSMVA R FSMVD / R FSMVAR FSMVA R FSMVA R Separate indicator FSMVD / R FSMVAR FSMV / R FSMV / R Flow rate range (R/min). to +.. to +.. to +. to + to + to +. to +.. to +.. to +. to + to + to + (References) Applicable nozzle of suctionseparation application ø. nozzle ø. nozzle ø. nozzle Collet nozzle ø. nozzle ø. nozzle ø. nozzle Collet nozzle Working fluid Clean air (JIS B 8.. to.6.), compressed air (JIS B 8.. to.6.) Note and nitrogen gas Maximum working pressure MPa. Minimum working pressure MPa. Withstanding pressure MPa. Ambient temperature/humidity C to and %RH or less (to be no dew condensation.) Working fluid temperature C to Display Power display (green) Power display (green) and switch output (yellow) Output Linearity Pressure characteristics Temperature characteristics ±%F.S. or less (.MPa, C and flow rate range ±%F.S.) ±%F.S. or less (. to.mpa,.mpa criteria) ±.%F.S./ C or less ( to C, C criteria) Analog output point Note Switch output points Note (V voltage output and connected load impedance K Ω and over) (NPN or PNP open collector output and PLC/relay) Repeatability ±%F.S. or less ±%F.S. or less ±%F.S. or less Response time ms or less (when sensor discrete/final arrival output voltage reaches %.) Note Power supply voltage DC/V (.8 to 6.V) Current consumption ma or less Lead wire ø.6.mm X conductor (m) ø.6.mm X conductor (m) Installation attitude Both vertical and horizontal Installation strait piping section Not required Protective structure IEC standards IP Vibration resistance to Hz, compound amplitude.mm, maximum G and each XYZ directions hours EMC directive EN, EN66, EN6///6/8 Mass g Approximate 8 (excluding lead wire and joint) Note : Refer to Page for compressed air quality class in accordance with JIS B 8:. Note : Analog output shows V when flow, while viewing the body with lead wire on the right side, the output will shift to V sides. If of reverse flow, the output shift to V side. Note : Switch output is boundary value identification method with fixed hysteresis, and can be set by turning trimmer within the total flow rate range. Also, operation modes of OUT and OUT are reverse. Note : The specified F.S. (full scale) shows flow rate range. For example, F.S. with flow rate range: to +R/min, shows R/min. Note : The response time may change depended with piping condition. Note 6: When using this product for adsorption verification, always install an air filter (filtration rating µ m or less) to prevent suction of foreign materials between adsorption nozzle and this product. Also, when compressed air is used, always install a filter (for drain removing) on the primary side (upstream). FSMVD / R FSMVAR FSMVD / R FSMVAR Flow rate display (7 segments digit orange) and operation switch output (orange) DC/V (.8 to 6.V) ma or less (indicator only) ø.7.mm X conductor (m) Flow rate display, flow rate display peak hold, switch output and analog output to C and 8%RH or less (to be no dew condensation.) IEC standards IP EN, EN66, EN6///6/8 Approximate 7 (including lead wire m) Note 7: A separate indicator is analog output type only. Care must be taken since switch output type can not be connected. Switch output type FSMV / R FSMV / R FSMV / R FSMV / R N P N P N P N P N P N P FSMVD / R N P N P N P N P N P N P Switch output points (NPN or PNP open collector output, load current ma or less voltage drop.v and PLC/relays) Analog output point (V voltage output and connected load impedance KΩ and over) FSMVAR

43 FSMV Series How to order How to order Sensor body FSM V A H R H Model no. A Output type Symbol A Output type A Analog output N Switch output (NPN) P Switch output (PNP) Content B Lead wire outlet direction B Lead wire outlet direction H Axial V Radial C Lead wire length C Lead wire length m D Flow rate range D Flow rate range R ±.R/min R ±.R/min R ±.R/min R ±R/min R ±R/min R ±R/min E Joint type E Joint type H Axial ø.8 fiber tube H Axial ø push in HL Radial ø push in M Port size M Separate indicator (analog output type only) FSM V D N R Model no. A Switch output type Symbol A Switch output type N NPN output P PNP output Content B Flow rate range B Flow rate range R R R R R R ±.R/min ±.R/min ±.R/min ±R/min ±R/min ±R/min Bracket for separate indicator PPD KLD *Refer to Page to for the operation dimensions, etc. A Bracket kit Symbol A Bracket kit KLD KDD KHSD KC Content Single foot bracket (radial installation) Both sides foot brackets (parallel) Panel mount bracket set cover attached Operation protective cover *Refer to Page and 6 for bracket dimensions and installation dimensions. 8

44 FSMV Series Internal structure and parts list FSMV**R*M/analog output type (Switch output type uses same internal structure.) No Parts name Body Case Lead wire holder Bush Bush holder Sensor gasket Sensor tip P tight screw Material PBT (glass fiber %) PBT (glass fiber %) PBT (glass fiber %) Nitrile rubber Aluminum alloy Nitrile rubber Silicon Iron steel (galvanization) No. 6 Parts name Electron circuit board Lead wire Rectifier Filter Cartridge joint (M) O ring Joint fixing pin Front sheet Material Glass epoxy resin Halogenfree polyethylene resin mixture Stainless steel Stainless steel Aluminum alloy Nitrile rubber Stainless steel Polyester film Separate indicator FSMVD * R * Refer to Page for internal structure drawing.

45 MEMO

46 FSMV Series Dimensions (common for analog and switch output types) FSMV * VR * H (Radial lead wire and axial ø.8 fiber tube) FSMV * HR * H (Axial lead wire and axial ø.8 fiber tube) ø. penetrating ø.6 ø. penetrating 7 ø. penetrating ø.6 ø. penetrating ø ø (.8) (.8) FSMV * VR * H (Radial lead wire and axial ø push in) FSMV * HR * H (Axial lead wire and axial ø push in) 7 7 (.8) (.8)

47 Dimensions FSMV * VR * HL (Radial lead wire and radial ø push in) FSMV * HR * HL (Axial lead wire and radial ø push in) FSMV Series Dimensions ø. penetrating ø.6 ø. penetrating 7 ø. penetrating ø.6 ø. penetrating ø.6 (.). 7 (.). 7 7 ø (8.6) (8.6) FSMV * VR * M (Radial lead wire and port size M) FSMV * HR * M (Axial lead wire and port size M) 7 7 () ()

48 FSMV Series Analog output characteristics FSMVAR. Response time (example of suction and separation) Nozzle diameter ø. Pipe diameter: ø [ Pipe length (nozzle to vacuum source):.m ] 6 Analog output data (e.g.). Output (V) Nozzle diameter ø. Nozzle diameter ø. When not sucked Voltage level Analog output (V). Adsorption time Voltage level.8 Time (ms) Flow rate ( /min)..6.8 Pressure loss characteristics FSMV * RH. FSMV * RH...MPa..MPa..8 Pressure loss (kpa) mpa.mpa Pressure loss (kpa) mpa.mpa... Flow rate (R/min) Flow rate (R/min).8. FSMV * RH.8.6.MPa FSMV * RH...MPa.. Pressure loss (kpa) mpa.mpa Pressure loss (kpa) mpa.mpa... Flow rate (R/min) Flow rate (R/min).8 FSMV * RH 6.MPa FSMV * RH 6.MPa Pressure loss (kpa) Pressure loss (kpa) 8 6.MPa.MPa.MPa.MPa Flow rate (R/min) 6 Flow rate (R/min) 8 *If fiber tube is used, pressure loss may increase depending on piping condition.

49 FSMV Series Name/function and setting methods of controls Switch output type POWER display Light turned on when power supply turned on Output (OUT) display Light turned on when OUT output turned on POWER OUT OUT SET SET Output (OUT) display Light turned on when OUT output turned on SET trimmer + Switch output operating point of OUT is set up. + FSMV SET trimmer Switch output operating point of OUT is set up. Switch setting method (switching and fluid flow direction) Turn trimmer of SET and SET to set ON/OFF of two switch outputs (OUT/OUT). Care must be taken since different switching operations as shown right are applied to points output. Flow direction OUT switching Flow direction + Trimmer setting Use (+) screwdriver for bit. ON SET (FS) large flow rate Flow rate OFF Flow rate large (+FS) OUT switching ON SET (FS) large flow rate Flow rate OFF Large flow rate (+FS) (Cautions) Hysteresis of switch output is fixing value (%FS or less). Do not hold down the trimmer by a screwdriver strongly, or trimmer may be damaged. Separate indicator Refer to Page 7 for the name and functions operation of display controls of a separate indicator.

50 Separate indicator FSMHD * Series(FSMH) FSMAD * Series(FSMA) FSMVD * Series(FSMV) Internal structure and parts list FSMHD * * FSMAD * * FSMVD * * (separate indicator) No Parts name Case top Display circuit board CPU circuit board Sensor circuit board Lead wire (m) Screw Rear side cover Case medium Gland Shield sheet Surface sheet Material PBT (glass fiber %) Glass epoxy resin Glass epoxy resin Glass epoxy resin Polyvinyl chloride Brass/nickeling PBT (glass fiber %) PBT (glass fiber %) Polyamide/copper alloy (plating) Aluminum Polyester film Dimensions FSMHD * * FSMAD * * FSMVD * * FSM RUN OUT OUT ø.7 depth 7 V S G MODE L/min Cable length m ø.7 conductor Sensor gland Bracket dimensions Single foot bracket attached (PPDKLD) *L type bracket and setscrews 7. Tapped mounting hole machining drawing 8 M 8 nominal (P tight) This bracket can be installed per deg. increment against the switch body. Determine the installation attitude according to the location.

51 Bracket dimensions H A FSM V D * Series Dimensions Both sides foot brackets attached (PPDKDD) *D type bracket and setscrews 8 8 Tapped mounting hole machining drawing M Lead wire through hole 8 nominal (P tight) 6 This bracket can be installed per deg. increment. Determine the installation attitude according to the location. Panel mount bracket set with cover (PPDKHSD) *Panel vessel, holder, key and cover.. Plate thickness t.8 to 6 (Mounting pitch and over) Panel hole machining Fig.. ±. Cover (Mounting pitch and over) V S G Panel holder Panel vessel For panel holder, the installation attitude can be changed per deg. increment. Operation protective cover attached (PPDKC) *Protective cover and its holder 7. (.) Protective cover Protective cover holder Note: A combination with PPDKHSD is not available. 6

52 Common for all FSM series Name and functions of display/controls Separate indicator type (FSMHD/FSMAD/FSMVD common) Overflow indication (excluding FSMVD * ) If the limit of digit display is reached, light will be turned on and be shown. (In.R/min, this is turned on to display. with digit LED.) Minus display Light turned on when flowing reversely (UP) key RUN display Light turned on when displaying flow rate. Flash when peak hold operation. Data of CH is displayed in turn when displaying flow rate. The maximum value is displayed during peak hold operation. Determine the mode when selecting the mode. Used for countup when setting each data FSM RUN MODE key MODE Used when entering various setting modes. Used when advancing setting mode. Used when returning to flow rate display. Used when releasing peak hold operation. R/min OUT OUT Output (OUT) display Light turned on when CH output turned on Flash when overcurrent detected (DOWN) key Output (OUT) display Light turned on when CH output turned on Flash when overcurrent detected digit LED display Flow rate, various switches setpoints, etc or status are displayed. If of overflow, will be displayed. If of the reverse direction overflow, will be displayed. Data of CH is displayed in turn when displaying flow rate. The minimum value is displayed during peak hold operation. Determine a mode when selecting the mode. Used for countdown when setting each data *In FSMH series, the design of front sheet differs. Name and functions of same display/controls are used. 7

53 Operation Common for all FSM series How to operate Switch output function Switching mode Operation pattern name LED display Operation waveform Window operation (Range inside ON) Window operation (Range out ON) Hysteresis operation (Flow rate small side ON) Hysteresis operation (Flow rate large side ON) Switch output OFF ON OFF Flow rate + ON setpoint OFF setpoint ON OFF Flow rate + OFF setpoint ON setpoint ON OFF Flow rate + ON setpoint OFF setpoint ON OFF Flow rate + OFF setpoint ON setpoint ON %F.S. and over %F.S. and over %F.S. %F.S. and over %F.S. and over %F.S. The output is turned off not depending on ON and OFF setpoints. OFF Flow rate + Note.Maintain intervals more than %F.S. between two setpoints during window operation. Hysteresis of %F.S. is provided on each ON and OFF sides automatically. Note.Maintain intervals more than %F.S. between two setpoints when hysteresis operation. Note.If the differential between above setpoints is not satisfied, it may result in not operated or unstable operation. If a switch is activated in unstable flow rate state such as a fluid pulsation, etc., unstable operation may be provided. In this case, maintain the difference between two setpoints satisfactorily, use the product after checking that switching is stabilized. Note.In operation waveform, left side shows minus side, while, right shows plus side. Note.If waveform pattern is decided, magnitude of ON and OFF setpoints is decided, and the reverse magnitude is not allowed. However, in this product, operation with the specified operation pattern has precedence over all things. When the two setpoints are inputted, the magnitude is identified automatically, processing the proper identification as ON and OFF setpoints. As result, even if ON and OFF setpoints are inputted reversely, rerecognized as correct ON and OFF setpoints, always operating with the specified operation pattern. Setpoint verification method CH data display If each key in flow rate display state is pressed down, switch data ON and OFF setpoints, operation waveform, zero adjust value and models are displayed to check. Switching is not affected during this operation. Being held down. CH data display ON side Flash Operation waveform display ON setpoint display OFF side Flash Being held down. OFF setpoint display Operation waveform display point adjustment value/model number display Zero point adjustment value and model number display are displayed alternately. Switching is not affected even during operation. [AdJ] display point adjustment value display Model number display Press simultaneously. 8

54 Common for all FSM series Operation of each function Peak hold function Maximum and minimum values indicated with flow rate value can be read during the specified period. Use this function when checking instantaneous flow rate change. Also, peak hold operation never affects the basic function of this product such as switching and flow rate display, etc. Peak magnitude displayed Flow rate display condition [6] displayed Peak hold operation start (RUN light flash) Being held down. Flash Peak magnitude [7] Bottom value displayed Flash Bottom value [] Press simultaneously. Being held down. Switch output function Refer to Page for the operation. Having pieces of switch output, operation patterns and stop of operation can be set. Setting the required operation pattern and two setpoints (ON and OFF setpoints) that defines operating points allows the switch function to start. First determine operation pattern and ON and OFF setpoints to be used before setting work. Select and set next data to operate a switch. CH: Operation pattern CH: ON setpoint CH: OFF setpoint CH: Operation pattern CH: ON setpoint CH: OFF setpoint Forcible output function Refer to Page for the operation. Switch output ON forcibly, used for initial operation checking of wiring and input unit. (Note) Use this test function for confirming wiring and action of input unit. Avoid using this function instead of actual signals to run sequence program, while machinery and equipment are operated. point adjustment function Refer to Page for the operation. Deviation of the display from is corrected without flow. (Note) Above setting and tests affect output signal and indicated value seriously. Always stop machinery and equipment using this product, and check that the safety is secured, even if malfunction/wrong display could be produced, then start the operation. Handling during operation may produce an accident, malfunction and wrong display, causing a danger.

55 Switch output function/forcible output function/ point adjustment operation Common for all FSM series How to operate [Flow rate display] If the key operation is not done more than seconds before confirming mode, the display will be returned to flow rate display for safety. Basic key operation It is effective in the switching pattern setting/on/off setpoint/ adjustment mode. Data return Countdown Countup Data reading Being held down. If key is further pushed, the display will be returned Flash to flow rate display. Press simultaneously. Press simultaneously. Data setting of switch output function Flash Switch CH Operation mode change Channel display ON point waveform display Switch CH ON/OFF data setting OFF point waveform display Separate. Determination Alternate Display Press once. Alternate display Press once. Alternate display Flash Press once. Operation mode display Setpoint display Setpoint display An operation mode change by an up/down key Switch CH Operation mode change Press once. Number change by up/down key Press once. Switch CH ON/OFF data setting To flow rate display Press once. Set same as a switch CH. Press once. Press once. Switch output forcible ON mode Determination CH output ON CH output ON To flow rate display Flash Press once. Being held down. Being held down. Press once. point adjustment mode Flash Determination [AdJ] display Adjusted value reading To flow rate display Alternate display Press once. point adjustment value display Press simultaneously. Press once. Caution Always adjust point without flow.

56 Common for all FSM series Technical data Measurement principle of FSM (air and nitrogen gas) series In FSM (air and nitrogen gas) series, applying silicon micro machining technology, platinum sensor tip (mm X 7mm) is used. Heater section is insulated from the silicon substrate thermally to achieve quick response and high sensitive since heat capacity is very small. Building the bridge that includes heater and ambient temperature sensors as figures, the temperature is controlled as the temperature difference between ambient temperature sensor and heater is constant. Platinum is used as a material of heater, changing value of resistance in proportion to temperature change. If an gas flows, output of bridge circuit increases in proportion to flow rate to compensate the heat lost from the heater (to maintain the constant temperature difference). Using this control method, the detection not affected with temperature or pressure change is possible. This control method is appropriate for the detection of relatively large flow rate. FLOW Ambient temperature sensor + Vout Electrode 7mm Sensor tip Heater Heater Ambient temperature sensor Bridge circuit mm Platinum sensor tip Measurement principle of FSMH, FSM (argon and carbon dioxide) and FSMV series In FSMH, FSM (argon and carbon dioxide) and FSMV series, applying silicon micro machining technology, platinum sensor tip (mm X.mm) is used. Sensor section is insulated from the silicon substrate thermally, and quick response and high sensitivity are achieved since heat capacity is very small. In sensor section, two thermo sensors are located over the heater. Platinum is used as the material of thermo sensor, changing value of resistance in accordance with temperature. Energizing the heater, if there is no flow, temperature distribution will be spreaded as symmetry from the center of the heater. If there is flow, the symmetry will be lost and the temperature of upstream will decrease, and the temperature of downstream will increase. This difference of temperature will be converted as difference of resistance of the thermo sensor, changing per flow rate. If of reverse flow, the difference of temperature (the difference of resistance) will be reverse. If this method is used, the flow rate in both directions can be detected. This method is appropriate for detection of relatively small flow rate. [Without flow] [With flow] Thermo sensor Thermo sensor FLOW Heater R Rh R R Rh R Temperature Value of resistance Temperature distribution symmetry Temperature Value of resistance Symmetry of temperature distribution is lost. R R R R V Voltage V Voltage R R V out.v V out.v R R V out V out

57 How to select flow sensor Common for all FSM series Technical data This is a guide of flow rate range when using a flow sensor as the adsorption/separation verification with adsorption nozzle and leakage inspection, etc. The flow rate can be calculated according to effective sectional area of a nozzle (pinhole) and differential pressure between inside and outside of nozzle. For P>.8P = (acoustic velocity) P: vacuum P: pressurization Q=. X S X P For P <.8P (subsonic) Q=6. X S X P (PP) Q : flow rate R/min P : primary side absolute pressure MPa P : secondary side absolute pressure MPa S : Ef. sec. area mm of nozzle (pinhole) P: atmospheric pressure Adsorption nozzle P: pressurization P: atmospheric pressure P: atmospheric pressure Pinhole Example of calculation When diameter of a nozzle is between. to and P is variable, the calculated flow rate values are shown as followings. P(MPa) Absolute pressure. P(MPa) Gauge pressure P(MPa) P(MPa) Acoustic/subsonic Absolute pressure Gauge pressure..7 velocity Acoustic ø.. ø..6 Calculated flow rate value (R/min) ø. ø. ø. ø.7 ø ø.. ø Acoustic Blow (leakage inspection) Suction Acoustic Subsonic Subsonic Subsonic Subsonic Subsonic Subsonic Subsonic Subsonic Subsonic Acoustic Acoustic Acoustic Acoustic Acoustic (Caution) If piping has a leakage, the actual flow will be larger than the calculated value. Please consider the leakage when selecting flow rate. If there is a narrower section than adsorption nozzle diameter in the midway of piping, flow rate will be restricted, so the value will be smaller than the calculated value. Also, adsorption verification, etc., could not be done. The effective sectional area is just reference. If the nozzle is elongated, the effective sectional area will be smaller than opening area of the nozzle. Response time is decided by capacity of pipe from adsorption nozzle (pinhole) to flow sensor. When detecting with high speed, reduce capacity in pipe as placing a flow sensor near the adsorption nozzle.

58 Common for all FSM series Adsorption verification Response time The response time of adsorption verification time is decided by capacity of pipe and exhaust performance of vacuum pump, etc. For example, if of piping as right, pipe dependence of response time is as the following. As the result, to reduce the response time, it is effective that the inner pipe volume from adsorption nozzle to the sensor is reduced as small as possible. Pressurization source (kpa) Vacuum source (7kPa) Pressure sensor way valve FSMV A Test pipe B Nozzle (ø.) Suction Adsorption Release (blow) Suction. Analog voltage output (V).....(R/min) (R/min) A gas is filled in pipe B. A gas is released from pipe B inside..(r/min).(r/min) A: ø X B: ø X A: ø X B: ø X A: ø X B: ø X Time (msec) Pipe dependence of response If collet nozzle is used. Collet nozzle is widely used to avoid direct contact of an absorbed workpiece to the nozzle. The inside of collet nozzle is as a pyramid. When absorbing a workpiece, as structure, some clearances are created in four corners, creating a leakage. If the effective sectional area of pipe (including valve and joint, etc.) is smaller than the gap (effective sectional area) between collet nozzle and workpiece, the flow rate is decided according to effective sectional area of pipe, so flow rate differential when adsorption or nonadsorption will be reduced. In this case, if the effective sectional area of pipe is increased as large as possible than the effective sectional area of gap between collet nozzle and workpiece, the adsorption verification is done certainly. A AA cross section A Nozzle Workpiece Collet nozzle

59 Leakage inspection How to calculate leakage Common for all FSM series Technical data When converted form a pressure gauge method, use the equation below to calculate leakage. Q=V X P X. X 6 T Q: leakage (mr/min) P: differential pressure (Pa) V: capacity of workpiece (mr) T: detecting time (s) E.g.) Where capacity of workpiece is mr, detecting time is sec., Pa of differential pressure is created, the leakage is... Q= X 6 X. X.8 (mr/min) Comparing to gas and liquid leakage Use this ratio as reference when the leakage inspection is done with air to a workpiece for liquid. However, this equation is led from the Hagen Poiseuille's equation where the pinhole is a round tube, and the surface is smooth. Pinholes such as welding defective, etc., are not always applied to a logic equitation. QI Qa = X. X Pl (.+Pa/) X Pa Qa : air leakage (mr/s) Ql : liquid leakage (mr/s) : air viscosity (Pa s) : liquid viscosity (Pa s) Pa : air applied pressure (kpa) Pl : liquid applied pressure (kpa) Coefficient of viscosity (Pa s X ) Temperature Air ( ) Water ( ) Brake oil ( ) C.8. 6 C.. 7 C.. 7 Comparing to leakage of air ( C) and liquids Liquid, Pa s Air pressure Pa Water C..MPa Brake oil C..MPa Brake oil C..MPa Liquid pressure Pl.MPa.MPa MPa Ql/Qa.6.6. E.g.) When workpiece of water leakage.mr/min (applied pressure.mpa) is tested with compressed air (applied pressure.mpa), the leakage Qa is... QR Qa =.6 Qa= (mr/min)

60 Common for all FSM series Filling time of workpiece If the content volume of a workpiece is large, time is consumed to fill air until test pressure (TP) of the leakage inspection is reached. In this case, filling time can be reduced by bypass circuit using way or check valve, etc., as shown right. When a way valve is used, a way valve can be open and closed according to the flow rate of flow sensor. Filling is started, and workpiece internal pressure is approaching to test pressure (TP), causing flow rate to decrease. Closing a way valve for bypass with this flow signal, measurement of a leakage is started. When check valve is used, using a check valve with low cracking pressure, the check valve opens until near test pressure (TP), reducing filling time. [Example of system configuration] Flow sensor way valve way valve (Bypass) Measuring sample way valve (Exhaust) Flow sensor Measuring sample way valve Check valve (Bypass) way valve (Exhaust)

61 FSM and FSMV series only Miniature inline filter FSMVFM Series Features This is the inline filter for small flow sensor FSM,FSMV series. Small capacity does not prevent high speed response when adsorption verification. Miniature and space saving size Easy element replacement Case materials using polyamide resin with excellent chemical resistance. Due to transparent case, contamination of element can be checked from outside Specifications Descriptions FSMVFMH FSMVFMH FSMVFMM Working fluid Clean air (JIS B 8.. to.6.) and compressed air (JIS B 8.. to.6.) Note Applicable tube outer diameter ø.8 ø (Fiber tube) (Push in) Port size M Withstanding pressure MPa.7 Working pressure range MPa. to. Ambient temperature range C to Material Case Polyamide Element Polypropylene and polyethylene Filtration rating micron µm Product mass g... Recommended flow rate R/min Note Note : Refer to Page for compressed air quality class in accordance with JIS B 8:. Note : If the flow rate reaches R/min, pressure loss increases, so use the product below R/min. How to order FSM VFM H B Model no. A Tube outside diameter Symbol Content A Tube outside diameter H ø.8 (fiber tube) H ø (push in) M Port size M B Attached B Attached Blank No brackets B Bracket attached Bracket part model no. FSM (Cross headed bowl tapping screw M. X 6: piece) Maintenance part model no. FSM VFM VFM B (Element: pieces and joint fixing pin: piece) E 6

62 FSMVFM Series Dimensions FSMVFMH FSMVFMH FSMVFMM FSMVFMB [bracket] Mounting hole ø Pressure loss (kpa) ø ø ø Filter body Holding section Flow characteristics (FSMVFMH)...MPa.MPa Flow rate (R/min) If fiber tube is used, pressure loss may increase depended with piping condition. Care must be taken. Cautions In this filter, the flow direction is already decided. When used as adsorption verification, etc., a check valve is used to prevent spill of foreign matter. (Example of circuit) Switching valve Vacuum source FSM FSM Filter Nozzle Pressurization source Refer to Intro for the other cautions and how to replace element. 7

63 Custom order This is available as custom order. Contact to our sales office for details. Type with flow control valve SCLN with needle valve integrated Available for FSM and FSMV series A needle valve can be selected according to working flow range. Type with filter Optimum with filter for adsorption verification Available for FSM and FSMV series Related products Inline clean filter FCS/FCS series Catalog no. CC7 Appropriate for final filter of various clean applications High precision filtration. µ m and removal efficiency.% Using hollow fiber membrane element, filtration. µ m and removal efficiency.% are realized. Long service life Service life is improved dramatically; fold increased comparing to flat membrane type. Small/light weight/large flow rate Large flow rate and low pressure loss since filtration area is to folds larger than flat membrane type in the same volume. If flow rate is same, downsizing is possible. Oilprohibition specifications Degreasing and cleaning are done for all parts. Furthermore, assembling to packing are done in the clean room. Easy maintenance Using transparent case for resin type, contamination of element can be checked visually. Wide variation series of flow rate and, materials of resin and stainless, furthermore, pushin joint, male and female threads are available. FCS series Model no. Resin type FCS Stainless steel type FCSP* Port size ø, ø6, ø8, R/8, R/ Rc/8,Rc/ Ambient temperature range to deg. to deg. Working pressure range. to.mpa. to.mpa (compressed air). to.mpa (N) Filtration rating. micron m (Removal efficiency.%) FCS series Model no. Port size Ambient temperature range Working pressure range Filtration rating Resin type FCS Stainless steel type FCSP* ø8, ø, ø, R/, R/8, Rc/, Rc/8 Rc/, Rc/8 to deg.. to.mpa. to.mpa (compressed air). to.mpa (N). micron m (Removal efficiency.%) 8