WJ 1500 AUDIT. Audit Notes. Audited Systems WJ-1500T F Model 1.0 S/ N 5802 and 5781

Transcription

1 WJ 1500 AUDIT Customer Location Fabrication Date 04/ 18 / 2006 Field Service Engineer Contact Office Phone Acceptance Date Address System Type Serial Number Primary Process WNJ-1500TF Model PMD 2 pass System Passwords Operator Maintenance Engineering Original 1500 or Field retrofit : Original 1500TF Model 1.0 Audit Notes System had been installed at ATMEL Fab 8 since delivery in September This system was installed to a second WJ-1500TF S/N The system was installed and has run process. Logs were not available; however, the system is well maintained and clean. The following fixtures were shipped with the system and should be returned with the system 1 each P/N Free Floating Shield Assembly Fixture The following option was shipped with the system and has been removed from the system 3 each 200MM SMIF modules The second set MonoBlok Vent Assemblies (placed on the cart adjacent to the tool) were missing Nitrogen Shields 3 each P/N Audited Systems WJ-1500T F Model 1.0 S/ N 5802 and 5781 WJ-1500TF Model 1.0 S/N 5802 and 5781 WJ-1500TF Model 1.0 S/N 5802 and 5781 Page 1 of 10 Rev A

2 System Photographs S/ N 5781 WJ-1500TF Model 1.0 ATMEL SVG-WJ-01 WJ-1500TF Model 1.0 ATMEL SVG-WJ-01 Process Notification HF / TEOS / TEB / TEPO WJ-1500TF Model 1.0 Logo Bubbler Cabinet Bubbler Cabinet Page 2 of 10 Rev A

3 Electrical Enclosure center Electrical Enclosure end Power Distribution HF Cabinet Gas Cabinet Gas Cabinet Page 3 of 10 Rev A

4 Gas Cabinet Second MVA set missing niteogen shields P/N Handler Load Station electronics enclosure Return Shuttle enclosure 1 Return Shuttle enclosure 2 Return Shuttle enclosure 3 Page 4 of 10 Rev A

5 Return Shuttle enclosure 4 Sorbios Ozone Generator / WJ-TEOS 958 CRS Monitor / UPS Page 5 of 10 Rev A

6 Original System Configurator 1500T/TF Manufacturing Configurator Customer: Atmel Fab 8 Project Number: S/N: 5781 Location: Texas Handler Project #: P.O. #: S.O. #: Inside Sales Contact: Outside Sales Contact: Requested On Dock Date: Ship Date: 9/7/00 Configurator Release Dates: 1) 5/24/00 2) 8/2/00 3) 4) 5) 6) Model: o CE Process Specifications: Film Type Chamber Standard/ Layer/ WT% Dopants Sandwich B P Deposition Temp. C Thickness Å Wafer Dia. mm PMD 1,2,3,4 2 Passes Belt Speed in/min Injector Requirements: Standard quantity of 8 Monoblok injectors included with the system. Indicate any additional quantity required in the open blank below: 8 Monobloks P/N: Number of holes in the Chemical Manifold: 41 (43 without 11,21) for PMD Shield Type: - TR - VR-TR - Free Floating (P9y) must use Spacers with these injectors (Note: Vapor Etch requires standard Monoblok vents.) Spacers: for FF Shields (default for SiO2) P/N: for FF Shields (default for BPSG) P/N: None for VR-TR Shields -.06 for VR-TR Shields P/N: for VR-TR Shields P/N: for VR-TR Shields P/N: MVA Start Up Kits (1 of each): P/N: & Page 6 of 10 Rev A

7 Injector Qualification Requirements: Primary Process: STI Temperature: 500 C Thickness Measurements: - 9 Point - 49 Point - Other: Passes: - 1 Pass - 2 Pass Customer Applications Engineer s Comments: Chemical Delivery Plumbing: - Standard Gas Cabinet: Model 1.0 Standard Process Plumbing, P/N: , with: - Bubbler Cabinet Top Mount CRS Lines P/N: o - Bubbler Cabinet Side Mount CRS Lines P/N: $$ o - Other: Ozone Generator: - Sorbios P/N: $$ o - Other: Mass Flow Controllers: o - Aera Model: FC-260J/261J/780 (O 2 ) 261R (O 2 ) $$ o - Aera Model: FC-780/781 $$ o - Tylan General Model: FC-2960/ R $$ o - Aera Model: FC-980/981 $$ o - Other: Gas Cabinet Plumbing Kit: Gas Cabinet MFCs Type Chamber Flow Rate (SLM) MFC Type D1N 2 O 2 Sep N slm FC slm FC slm FC Tylan General Model: FC-260/261/ slm FC slm FC-2960M- 261R slm FC-2960M- 261R slm FC-2960M- 261R slm FC-2960M- 261R slm FC slm FC slm FC slm FC Page 7 of 10 Rev A

8 Bubbler Cabinet Plumbing Kit: Bubbler Cabinet MFCs Type Chamber Flow Rate (SLM) MFC Type N 2 Si 1 3 slm FC slm FC slm FC N 2 B 1 1 slm FC slm FC slm FC N 2 P 1 3 slm FC slm FC slm FC N 2 Dil 1 6 slm FC slm FC slm FC Facility Requirements: Cable Length Requirements (Select the distance from the tool for each category): UPS Cables: - 10 ft - 20 ft - 30 ft - 40 ft - 50 ft - 60 ft - 70 ft Communication Power Power #2 N/A Ozone Cables: - 40 ft - 50 ft - 60 ft - 70 ft Power Control CRS Cables: - 40 ft - 50 ft - 60 ft - 70 ft Power Control Facility Cable: - 40 ft - 50 ft - 60 ft Voltage: - 208V : 50/60 : 3 $$ - Other : 50/60 : 3 Other requires Step Down Transformer: - 380V - 400V - 415V Page 8 of 10 Rev A

9 Wafer Transport System: Wafer Handling: - Standard $$ - AGV Please Provide Customer Specification $$ - SMIF Please Provide Customer Specification Wafer Size: mm mm Wafer Cassette Type: o - Fluoroware Cassette Model: - Other Model: TBD Handler Vacuum: - House Air - Vacuum Signal Tower Light Option: $$ - Yes Please Provide Customer Specification & check a box below: o - Three (3) Color Wall Mount P/N: - Three (3) Color Tool Mount P/N: Green, Yellow, Red Red, Yellow, Green o - Four (4) Color Tool Mount P/N: Software Requirements: Manual Quantity Requirements: - Latest Revision at time of Final Test. o - Other, please specify: - Cleanroom (Standard Qty: 1) $$ - Additional Quantity: Manual on CDROM - Regular (Standard Qty: 2) $$ o - Additional Quantity: Training: (1 Credit = 1 Week) - 6 No Charge $$ o - Additional $ /Credit Other Options: SECS II Software Option: $$ - Yes HF Bulkfill: P/N: P/N: Liquid Muffle Etch Kit: $$ - Yes TEOS Bulkfill: P/N: P/N: CRS Weight Scale Upgrade Kit: $$ o - Yes SVG Spare Parts Kit (TBD): P/N: $$ o - Yes $$ o - Yes $$ o - Yes Page 9 of 10 Rev A

10 Customer Options/Specials: Description: Design Release Date: Part Number OP#: Test Instructions: 1) FF Shield Baffles Qty = 8 Baffle Retrieval Tool Qty = ) NiAl Belt Delete: standard belt, ) Blower,CFC, ) Free Floating Shield Assembly Fixture 5) SMIF Primary Power Box: (Using these parts, modify Std. PPB to make it a ) A) RAIL,MOUNTING, COMPONENT,2"L B) CIRCUIT BREAKER,2POLE, 12A,240V 6) 1000 SMIF 120VAC Harness Delete: standard 120VAC harness, A) B) Special Instructions: 1) 2) 3) 4) 5) Page 10 of 10 Rev A

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