TEL UNITY85DD EQUIPMENT DATASHEET
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1 TEL UNITY85DD Tool ID RO77 OEM/Model TEL UNITY85DD Serial Number U00815 Process OXIDE ETCH Vintage NOVEMBER, 1997 Wafer Size 200 mm AG Semiconductor Services 1
2 SYSTEM CONFIGURATION CHAMBER TYPE SOFTWARE VERSION FUNCTION TEST MODULE DRM Ver3.85-Rev202 CONFIGURATION REMARK CHAMBER 2-CHAMBER ROBOT TYPE TWIN ARM ROBOT DRIVE YASKAWA / VS2B TC ROBOT DRIVE YASKAWA / VOSH OC GATE VALVE VAT / A / PA24 APC V/V VAT / A / PH52-AAM1 ISOLATION V/V VAT / A / 2634-KA TC PRESSURE GAUGE LEYBOLD / PS113 / 16014D9712 CASSETTE GAP MOTOR TMP1 EBARA ET600WS PC1 TMP2 EBARA ET600WS PC2 TMP CONT'R-1 EBARA 606W-TF PC1 TMP CONT'R-2 EBARA 606W-TF PC2 PUMP PC1,2 EBARA A30W-N PUMP TC EBARA A07V-S TMP TC ET300WS TMP CONT'R TC 306W-TF PUMP CC EBARA A07V-S GENERATOR-1 OEM-25B GENERATOR-2 OEM-25B MATCHER-1 MWD-25LD-02 MATCHER-2 MWD-25LD-02 CHILLER SHINWA / CH1-CP-D0 GAS MFC 7-LINE / STEC B.HE(CNT) MKS / 622A12TBE B.HE(EDGE) MKS / 622A12TBE AG Semiconductor Services sales@agsemiconductor.com 2
3 2. Board List ECC Controller 2-1. Main Cotroller Slot No. Description / Not ISA SLOT1 NE2000 PLUS3N-2 ISA SLOT2 IBX4101 ISA SLOT3 EMPTY ISA SLOT4 AT-BCN/A HDD(SYSTEM) HDD(DATA) VME slot 1 SVA 004a VME slot 2 SVA603 VME slot 3 MVME612 VME slot 4 GST-M-SET-312 VME slot 5 TVB0002 VME slot 6 TVB VME slot 7 TEB102-1 VME slot 8 EMPTY VME slot 9 TVB0008 VME slot 10 TEB TYB221-1/PUMP TYB415-1/RF TYB212-1/RF TYB416-1/PUMP TYB414-1/CONT TYB425-1/INT not present not present not present not present AG Semiconductor Services sales@agsemiconductor.com 3
4 2-2. P/C-1 Cotroller Slot No. Description / Not Slot 1 APC(PB-2) Slot 2 TYB112-1/DIO Slot 3 TYB111/MAIO Slot 4 TYB121/COM Slot 5 TYB121/COM Slot 6 TEMP Slot 7 EMPTY 2-3. P/C-2 Cotroller Slot No. Description / Not Slot 1 APC(PB-2) Slot 2 TYB112-1/DIO Slot 3 TYB111/MAIO Slot 4 TYB121/COM Slot 5 TYB121/COM Slot 6 TEMP Slot 7 EMPTY AG Semiconductor Services sales@agsemiconductor.com 4
5 Mult Power Supply Regulated Power Supply 2-4. T/C Cotroller Slot No. Description / Not Slot 1 COM Slot 2 TYB112-1/DIO1 Slot 3 TYB112-1/DIO2 Slot 4 EMPTY Slot 5 MAIO Slot 6 TYB131-1/ILK 2-5. Gas Box Module Slot No. Description / Not TYB 211-A/GAS(1) TYB 211-A/GAS(2) AG Semiconductor Services sales@agsemiconductor.com 5
6 3. GAS Unit P/C1 MFC No Gas Name Maker Model Full Scale GAS 1 C4F8 STEC SEC-7330M 50 GAS 2 CO STEC SEC-7330MC-UC GAS 3 O2 STEC SEC-7330MC-UC GAS 4 AR STEC SEC-Z512MGX C SUC 500 GAS 5 CHF3 STEC SEC-7330MC-UC GAS 6 CH2F2 STEC SEC-7330MC 50 GAS 7 CH4 STEC SEC-7330MC-UC GAS 8 GAS 9 GAS 10 GAS 11 GAS 12 B.H CENTER HE STEC SEC-7330MC B.H EDGE HE STEC SEC-Z512MG 20 B.HE PRESS(CENTER) SV-P1203 B.HE PRESS(EDGE) SV-P1203 B.HE C/M CENTER MKS 622A12TBE / 100TORR B.HE C/M EDGE MKS 622A12TBE / 100TORR P/C2 GAS 1 C4F8 STEC SEC-7330MC-UC GAS 2 CO STEC SEC-7330MC-UC GAS 3 O2 STEC SEC-7330M 50 GAS 4 AR STEC SEC-7330M 500 GAS 5 CHF3 STEC SEC-7330MC-UC GAS 6 CH2F2 STEC SEC-7330M 50 GAS 7 CH4 STEC SEC-7330MC-UC GAS 8 GAS 9 GAS 10 GAS 11 GAS 12 B.H CENTER HE STEC SEC-7330MC B.H EDGE HE STEC SEC-7330MC B.HE PRESS(CENTER) STEC SV-P1203 B.HE PRESS(EDGE) STEC SV-P1203 B.HE C/M CENTER MKS 622A12TBE / 100TORR B.HE C/M EDGE MKS 622A12TBE / 100TORR AG Semiconductor Services sales@agsemiconductor.com 6
7 4. Parts List 4-1. P/C1 Chamber Unit Description /Not UPPER ELECTRODE BAFFLE A FOCUS RING BOTTOM ELECTRODE RING INSULATOR A7 RING INSULATOR B2 RING SHIELD B3 BAFFLE PLATE C MANOMETER (CHAMBER) MKS / 627A S / /.25TORR MANOMETER (SELF) MKS / 627A S / /.25PA/ GATE VALVE VAT / A / PA / 0856 APC VALVE VAT / A / PH52-AAM1 / 0301 ESC POWER SUPPLY KYOSAN EPD H10VIS / 4085 MAGNET MOTOR VEXTA / 5GD20K GAP MOTOR B-A GAUGE CONVECTRON GAUGE GRANVILLE-PHILLIPS 4-2. P/C2 Chamber Unit Description /Not UPPER ELECTRODE BAFFLE A FOCUS RING BOTTOM ELECTRODE RING INSULATOR A7 RING INSULATOR B2 RING SHIELD B3 BAFFLE PLATE C MANOMETER (CHAMBER) MKS / 627A S / A / 250mTORR MANOMETER (SELF) MKS / 627A S / /.25PA/ GATE VALVE VAT / A / PA / 0836 APC VALVE VAT / A / PH52-AAM1 / 1046 ESC POWER SUPPLY KYOSAN EPD H10VIS / 4233 MAGNET MOTOR VEXTA / 5GD20K GAP MOTOR B-A GAUGE CONVECTRON GAUGE GRANVILLE-PHILLIPS AG Semiconductor Services sales@agsemiconductor.com 7
8 4-3. T/C Unit Description /Not ROBOT DRIVE YASKAWA / VS2B / S7J ROBOT CONTROLLER ARM FORK TWIN ARM MANOMETER MKS CONVECTRON GAUGE WAFER SENSOR ISOLATION VALVE VAT / A / 2634-KA / 579 SLOW VACUUM VALVE VAT / A / KA / 602 N2 MFC STEC / SV-P Cassette Chamber Unit Description /Not MAPPING SENSOR CASSETTE SENSOR CASSETTE STAGE Z AXIS MOTOR, ELV TRANSFER MOTOR DOOR CYLINDER&PANNEL CONVECTRON&PRESSURE S/W (L)LEYBOLD / PS113 / 16014D9712 / (R)LEYBOLD / PS113 / 16014D9712 / Oriental Chamber Unit Description /Not DRIVE YASKAWA / VOSH / S5J LIFTER CYLINDER SMC / CDQA32-15DC ROBOT CONTROLLER AG Semiconductor Services sales@agsemiconductor.com 8
9 5.Sub-Module 5-1. P/C1 Pump Description Maker Model Q'ty Dry Pump EBARA A30W-N 1 Booster Pump Turbo Pump EBARA ET600WS 1 Trubo Pump Cont EBARA 606W-TF P/C2 Pump Description Maker Model Q'ty Dry Pump Booster Pump Turbo Pump EBARA ET600WS 1 Turbo Pump Cont EBARA 606W-TF T/C Pump Description Maker Model Q'ty Dry Pump EBARA A07V-S 1 TURBO PUMP EBARA ET300WS 1 Turbo Pump Cont EBARA 306W-TF C/C Pump Description Maker Model Q'ty Dry Pump EBARA A07V-S 1 Booster Pump 5-5. P/C1 Chiller Description Maker Model Q'ty Chiller SHINWA CH1-CP-D0 1 Cooling Line 5-6. P/C2 Chiller Description Maker Model Q'ty Chiller Cooling Line 5-7. P/C1 Generator Description Maker Model Q'ty Generator(Lower) ENI OEM-25B 1 Matcher(Lower) ENI MWD-25LD-02 1 RF Cable P/C2 Generator Description Maker Model Q'ty Generator(Lower) ENI OEM-25B 1 Matcher(Lower) ENI MWD-25LD-02 1 RF Cable 1 C70625N 7A056C4 1T205 M70095S ZW C1 M70082S 0001A C AG Semiconductor Services sales@agsemiconductor.com 9
10 6.PERFORMANCE TEST 6-1. CASSETTE CHAMBER C/C1 C/C2 DOOR OPEN CLOSE STAGE UP DOWN GATE OPEN CLOSE MAPPING STAGE ROTATION 6-2. TRANSFER CHAMBER C/C1 C/C2 P/C1 EXTENSION ROTATION 6-3. PROCESS CHAMBER P/C2 O/C SLIT DOOR LIFTER GAP MAGNET OPEN CLOSE UP DOWN UP DOWN MOVEMENT P/C1 P/C PUMPING ABILITY TEST BASE PRESSURE Leak Rate C/C T/C P/C1 P/C2 3.50E E E PUMP RUNNING STATE C/C T/C P/C1 P/C2 DRY PUMP TURBO PUMP 6-6. CHILLER TEST RUN STATE CH1(UPPER) CH2(LOWER) PC1 20 / 19.9 PC2 420 / 40 CH3(WALL) PC1.2 PUMP COMMON USE 2. PC1.2 CHILLER COMMON USE AG Semiconductor Services sales@agsemiconductor.com 10
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