Pirani Vacuum Gauges. Digital and Analog Vacuum Gauge Systems. Features and Benefits. HPS Products (800) (303)

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1 Pirani Vacuum Gauges Digital and Analog Vacuum Gauge Systems Features and Benefits Ideal vacuum gauge for foreline loadlocks Rugged filament design for high reliability Designed for use in harsh process environments Rapid response to pump down Repeatable measurements and independent relay set points for improved process control 10-4 Torr to atmosphere measurement range for rough to medium vacuum applications Choice of two Pirani sensors: Series 345, shielded for RF immunity; or the traditional Series 315 Sensor may be mounted in any position, increasing flexibility during installation Gas-type sensitivity allows sensors to be used for rough leak detection Two controller models: Series 945, CE marked with a digital LED display; or the Series 917, lower cost analog meter display LED set point status indicators Series 945 is fully CE compliant with EMC directive 89/336/EEC and Low Voltage Directive 72/23/EEC Models available that indicate pressure in Torr, millibar, Pascal, or microns HPS Products (800) (303)

2 Application The HPS line of Pirani controllers and sensors are ideal for applications in the rough to medium vacuum range. These include measurement of base pressures of mechanical vacuum pumps or start-up of system processes. The HPS Pirani controllers and Pirani sensors are used in industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and food processing. The UHV compatible materials used in the sensor and the ability to bakeout the sensors make them useful in high energy physics applications such as accelerators and laser fusion projects. Description Pirani Controllers HPS Pirani controllers are single-channel, designed to be economical and user-friendly and provide fast reliable pressure measurement. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Two standard independent relay set points allow you to control your process. The relays can be set to trip anywhere within the controller s set point range. Adjust the set points from the front panel while viewing the large, easy-to-read display. Red LED s indicate set point activation status. You can check the set point at any time with no break in process control. An analog output signal is standard and is accessible from the rear of the controller. Choose a Pirani controller in one of four models that measures either in Torr, millibar, Pascal, or microns. The controller can be easily installed in a standard ¼ DIN panel cutout with the optional mounting kit. Included with the Pirani controller is a power cord, an accessory connector kit, and an instruction manual. The Pirani sensor and its cable are ordered separately. Series 917 Controller The Series 917 controller is a lower cost option for atmosphere to medium vacuum measurement. It displays pressure from 10-3 Torr to atmosphere using a large analog meter, making it easy to see pressure trends. The 917 provides a buffered analog output for fast remote system monitoring through a 15 pin accessory connector in the back. Pirani Sensor The HPS Pirani sensors are robust, dependable sensors with fast and stable pressure measurement. A thermal conductivity sensor, the Pirani sensor measures absolute pressure by measuring heat loss from a fine heated wire. Special temperature compensation circuitry provides for greater sensor stability over the operating range. The sensors are factory calibrated so that controller calibration is typically unnecessary when interchanging or replacing a sensor. A platinum filament ensures compatibility with a wide array of process gases. Only UHV compatible materials are exposed to vacuum. More accurate than a thermocouple sensor, the Pirani sensor measures over a wider pressure range and responds more rapidly to your process pressure changes. Like all thermal conductivity sensors, the Pirani sensor is innately gas-type sensitive. This feature makes it a simple solution for locating medium to fine leaks in vacuum systems. It complements a mass spectrometer leak detector, which is more efficient in finding smaller leaks. HPS Products manufactures two Pirani models: the 345 and the 315 sensor. The 345 sensor is shielded for use where CE marking is a requirement and has a standard 9-pin D-sub connector. The 315 sensor uses a durable plastic enclosure and an octal connector. HPS Pirani gauges are manufactured by the HPS Products MKS Instruments, Inc. in Boulder, Colorado. For more information call (303) or (800) Series 945 Controller The Series 945 displays pressure from 10-4 to 100 Torr on a highly-visible red LED readout. A buffered analog signal is available through the 9 pin accessory connector at the rear of the controller. For quick controller calibration, atmosphere and zero adjustment potentiometers are located on the front panel. The 945, when used in conjunction with the 345 sensor, has passed the requirements of the European Directives and is CE marked.

3 Series 945 Specifications Measuring Range Set Point Range Power Requirements and Consumption Resolution Set Point Relays Set Point Response Output Voltage Front Panel 1.0 x 10-4 to 100 Torr 1.0 x 10-4 to 130 mbar 1.0 x 10-2 to 1.3 x Pascal 1.0 x 10-1 to 1.0 x microns 2.0 x 10-3 to 99 Torr 2.7 x 10-3 to 130 mbar 2.7 x 10-1 to 1.3 x Pascal 2.0 to 9.9 x microns 90 to 130 VAC, 50/60 Hz, 9 W 210 to 250 VAC, 50/60 Hz, 9 W 1% of indicated decade, 10% of decade for pressures less than 10-3 Torr 2 independently set, SPDT contacts, resistive load; 1 24 VAC/DC 150 msec maximum 0.20 to 3.25 VDC, buffered analog, 1kΩ maximum output impedance Two LED s, push buttons, and potentiometers for use with setpoints; power switch; zero adjustment; atmospheric adjustment Display Red LED display; 0.6"-high readout of 2 digits and 1 exponent; units shown in either Torr, mbar, Pascal, or microns CE Certification 89/336/EEC EMC Directive 73/23/EEC Low Voltage Directive 2.2 lb (1.0 kg) Dimensions in./(mm) Series 917 Specifications Measurement and Set Point Range Power Requirements and Consumption Set Point Relays Set Point Response Output Voltage Front Panel Display 1.0 x 10-3 Torr to atmosphere 1.0 x 10-3 mbar to atmosphere 1.0 x 10-1 Pascal to atmosphere 1.0 x 10-1 microns to atmosphere 90 to 130 VAC, 50/60 Hz, 7 W 210 to 250 VAC, 50/60 Hz, 7 W 2 independently set, SPDT contacts, resistive load; 2 A max. operating current at 28VDC/AC 15 to 150 msec Analog: V, 1kΩ maximum output impedance Power on/off; set point view buttons, LED set point indicators, set point adjust potentiometers 3½" 95 deflection analog meter 2.2 lbs. (1.0 kg) Pirani Controllers Specifications Operating Temperature 5 to 40 C (41 to 104 F) Storage Temperature -10 to 55 C (14 to 104 F) Relative Humidity Altitude Insulation Coordination 80% maximum for temperatures less than 31 C, decreasing linearly to 50% maximum at 40 C 2000 m maximum Overvoltage Category II Pollution Degree 2

4 315 Sensor Specifications Measurement Range (Controller Dependent) Materials Exposed to Vacuum Reproducibility 1.0 x 10-4 Torr to atmosphere 1.0 x 10-4 mbar to atmosphere 1.0 x 10-2 Pascal to atmosphere 1.0 x 10-1 microns to atmosphere Stainless steel, nickel 200, alumina ceramic, platinum, silver brazing alloy 5% of reading at constant temperature Cables and Connectors 9-pin D-sub (from 945) or 15-pin D-sub (from 917) to octal connectors, multiconductor shielded cable, maximum length is 500 feet Bakeout Temperature 50 C (122 F) Operating Temperature 0 to 50 C (32 to 122 F) Calibration Gas Installation Orientation Internal Volume Air/nitrogen Any 0.5 lb (0.2 kg) 0.5 in. 3 (8.0 cm 3 ) maximum 345 Sensor Specifications Measurement Range (Controller Dependent) Materials Exposed to Vacuum Reproducibility 1.0 x 10-4 Torr to atmosphere 1.0 x 10-4 mbar to atmosphere 1.0 x 10-2 Pascal to atmosphere 1.0 x 10-1 microns to atmosphere Stainless steel, nickel 200, alumina ceramic, platinum, silver brazing alloy 5% of reading at constant temperature Cables and Connectors 9-pin D-sub (from 945) or 15-pin D-sub (from 917) to 9-pin D-sub connectors, multiconductor shielded cable, maximum length is 500 feet Bakeout Temperature 50 C (122 F) Operating Temperature 0 to 50 C (32 to 122 F) Calibration Gas Installation Orientation Internal Volume Air/nitrogen Any 0.5 lb (0.2 kg) 0.5 in. 3 (8.0 cm 3 ) maximum 315 Sensor Dimensions in./(mm) 345 Sensor Dimensions in./(mm) SIZE A NW 16 KF 5.37/(136) 1 1/3" CF 6.63/(169) 2 3/4" CF 6.55/(167) 8 VCR -F 6.60/(168) 1/8" NPT-M 6.20/(157) 15 mm. tube 5.83/(148) 18 mm. tube 5.83/(148) SIZE A NW 16 KF 4.83/(123) NW 25 KF 4.34/(110) 1 1/3" CF 5.87/(149) 2 3/4" CF 5.87/(149) 8 VCR -F 5.83/(148) 1/8" NPT-M 5.65/(144) 15 mm. tube 5.78/(147) 18 mm. tube 5.78/(147)

5 Ordering Information Description Part Number Price Series 945 Digital Pirani Controller* 120 volts, Torr readout 945-A-120-TR $ volts, Torr readout 945-A-220-TR $ volts, micron readout 945-A-120-MC $ volts, micron readout 945-A-220-MC $ volts, Pascal readout 945-A-120-PA $ volts, Pascal readout 945-A-220-PA $ volts, mbar readout 945-A-120-MB $ volts, mbar readout 945-A-220-MB $395 Series 917 Analog Pirani Controller* volts/50-60 Hz, Torr readout $ volts/50-60 Hz, Torr readout $ volts/50-60 Hz, Pascal readout $ volts/50-60 Hz, Pascal readout $ volts/50-60 Hz, mtorr/microns readout $ volts/50-60 Hz, mtorr/microns readout $ volts/50-60 Hz, mbar readout $ volts/50-60 Hz, mbar readout $335 Series 315 Pirani Sensor NW 16 KF $ /3" CF $ /4" CF $150 8 VCR -F $135 1/8" NPT-M $ mm tube $ mm tube $150 Series 345 Shielded Pirani Sensor - for CE Compliance NW 16 KF $125 NW 25 KF $ /3" CF $ /4" CF $150 8 VCR -F $150 1/8" NPT-M $ mm tube $ mm tube $150 * Includes controller, power cord, manual, and output connector. For additional technical information and installation hardware go to

6 Ordering Information Description Part Number Price Cable, Series 315 Sensor to Series 945 Controller 10 ft (3.0 m) $50 25 ft (7.6 m) $80 50 ft (15.2 m) $ ft (30.5 m) $ $150 + Cable, Series 345 Shielded Sensor to Series 945 Controller 10 ft (3.0 m) SH $50 25 ft (7.6 m) SH $80 50 ft (15.2 m) SH $ SH $150 + Cable, Series 315 Sensor to Series 917 Controller 10 ft (3.0 m) $50 25 ft (7.6 m) $80 50 ft (15.2 m) $ ft (30.5 m) $ $150 + Cable, Series 345 Shielded Sensor to Series 917 Controller 10 ft (3.0 m) $50 25 ft (7.6 m) $80 50 ft (15.2 m) $ $150 + Accessories Power cord, 115 VAC $11 Series 945 output connector kit $14 Series 917 output connector kit $14 Mounting hardware $20 Series 945 user s manual $25 Series 917 user s manual $25 Octal to 9 pin adapter $40 Rack panel, 19", 3U 1/4 DIN, blank $25 Rack panel, 19", 3U 1/4 DIN, 1 cutout $30 Rack panel, 19", 3U 1/4 DIN, 2 cutouts $35 Rack panel, 19", 3U 1/4 DIN, 3 cutouts $40 Rack panel, 19", 3U 1/4 DIN, 4 cutouts $45 For additional technical information and installation hardware go to Bulletin 01/01 Pirani Gauges Due to continuous development, specifications and prices are subject to change without notice. Copyright 2000 by HPS Products MKS Instruments, Inc. All rights reserved. HPS is a registered trademark of MKS Instruments, Inc. VCR is a registered trademark of Swagelok Company. HPS Products 5330 Sterling Drive Boulder, CO (800) or (303) FAX (303)