VALVES STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

Transcription

1 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES SUS series ( FOR SPECIALTY GAS ) SUS/SCR series ( FOR SPECIALTY GAS ) FS/FSC series ( FOR SPECIALTY GAS ) AD-M/AD-P series ( FOR SPECIALTY GAS - CORROSIVE etc. ) EGV/EGV2 series ( FOR SPECIALTY GAS - CORROSIVE etc. ) SOFIC series ( PNEUMATIC ACTUATOR ) VALVES

2 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-12 PRESSURE SEAL TYPE SUS-12 type Pressure seal type Stainless steel cylinder valve For high purity gases Double O-ring sealing structure is suitable for vacuuming. Valves suitable for high purity gas. Available to meet a wide range of international standards. MODEL No. SUS-12-0HK 2 GLAND NUT 4a PLUG 4b SEAT DISC 5 6 GLAND PACKING HANDWHEEL SPRING 9 SPRING CAP 10 HANDWHEEL NUT HANDWHEEL PACKING SAFETY NUT RUPTURE DISC SAFETY PACKING 15 FUSIBLE METAL SUSF04 orsus0 FPM A1100P FIBER C11 NNCP AgP

3 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-55L SCR-55L DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room) SUS-55L type Diaphragm seal type Stainless steel cylinder valve For high purity gases High leak tightness integrity through diaphragm sealing. Valve orifice is 4mm and Cv value is 0.. Seat disc materials. (,PVDF,PI,NYLON66)(Option) Adjustable seat plug type.(nozzle,flat type)(option) Available with optional restricted flow orifice threading in outlet. Connections available to meet a wide range of international standards (CGA, DISS, etc.). SCR-55L type (Cleaning and assembling in clean room) Diaphragm seal type Stainless steel cylinder valve For ultra high purity gases (for the semi-conductor industries) Inside surface of gas wetted area of polished body is less than Rmax 1μm. Ultra pure water cleaning and assembling in clean room. External leak tightness(gland nut area) checked by helium pressure method.(helium leak detector) Removable fusible metal for baking. (Maximum baking temperature 50 ) MODEL No. SUS-55L-50K MODEL No. SCR-55L-1HF NGO-LH (CGA No.50) 2 4 5a 5b GLAND NUT STEM HEAD DIAPHRAGM DIAPHRAGM SUSF16L Co ALLOY 6 PLUG SPRING SEAT DISC 9 SAFETY NUT 10 SAFETY PACKING 11 RUPTURE DISC -WPB AgP NNCP 12 FUSIBLE METAL 1 HANDWHEEL 14 SCREW 15 WASHER 16 NAME PLATE SWRM SWRH A1100P 1 SUS RUPTURE DISC FUSIBLE PLUG SAFETY SLEEVE SAFETY NUT NNCP

4 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS FS-55LN FSC-55LN DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room) FS-55LN type Diaphragm seal type Stainless steel cylinder valve For high purity gases High leak tightness integrity through diaphragm sealing. Manual operating mechanism designed to prevent loosening by vibration in transit. Valve orifice is 4mm and Cv value is 0.. Seat disc materials. (,PVDF,PI,NYLON66) (Option) Adjustable seat plug type.(nozzle,flat type)(option) Available with optional restricted flow orifice threading in outlet. Connections available to meet a wide range of international standards (CGA, DISS, etc.). FSC-55LN type (Cleaning and assembling in clean room) Diaphragm seal type Stainless steel cylinder valve For ultra high purity gases for the semi-conductor industries Inside surface of gas wetted area of polished body is less than Rmax 1μm. Ultra pure water cleaning and assembling in clean room. External leak tightness(gland nut area) checked by helium pressure method.(helium leak detector) Removable fusible metal for baking. (Maximum baking temperature 50 ) MODEL No. FS-55LN-50K MODEL No. FSC-55LN-640K NGO-LH (CGA No.50) 2 4 5a 5b 6 GLAND NUT STEM HEAD DIAPHRAGM DIAPHRAGM PLUG SUSF16L Co ALLOY SPRING SEAT DISC 9 SAFETY NUT 10 SAFETY PACKING 11 RUPTURE DISC 12 FUSIBLE METAL 1 HANDWHEEL -WPB AgP NNCP 14 SPRING 15 SPRING CAP 16 HANDWEEL NUT 1 STEM 1 STEM GUIDE 19 GLAND PACKING 20 HANDWHEEL PACKING A1100P-H1 FIBER 21 SUS RUPTURE DISC FUSIBLE PLUG SAFETY SLEEVE SAFETY NUT NNCP

5 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SUS-01L-N DIAPHRAGM SEAL TYPE SUS-01L-N type SUS-01L-N is designed and developed for specialty gases used in ion implantation systems in the semiconductor field. Diaphragm seal type Stainless steel cylinder valve For specialty gases (AsH/PH/11BF, etc.) used with ion implantation systems. High leak tightness integrity through diaphragm sealing. Selectable handwheel color. (Red,Gray) MODEL No. SUS-01L-N 2 PLUG SEAT DISC 4a DIAPHRAGM 4b DIAPHRAGM 5 STEM HEAD 6 GLAND NUT SPRING 9 HANDWHEEL 10 NAME PLATE SCREW WASHER RUPTURE DISC SAFETY NUT SAFETY PACKING PACKING NUT RING CHAIN / CLIP FUSIBLE METAL SUSF16L Co ALLOY -WPB A1100P-H1 SWRM12 SWRH5B NNCP AgP -WPB NYLON/BRASS

6 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS (CORROSIVE etc.) EGV TIED-DIAPHRAGM SEAL TYPE EGV type Tied-Diaphragm seal type Stainless steel cylinder valve For ultra high purity gases Tied-diaphragm design for minimal particle generation and dead space. Approximate 60% reduction in dead space improves purging performance. Valve orifice is 5.5mm and Cv value is 0.5. Maximum service pressure is 20MPa. Flat seat design prevents seat deformation. Protected safety device. Optional materials available for gas wetted area. Connections available to meet a wide range of international standards (CGA, DISS, etc.). OPTION Inside surface of gas wetted area polished. Cleaning and assembling in clean room. MODEL No. EGV-S SUSF16L 2 4 6W GLAND NUT STEM HEAD LOWER STEM ASSY DIAPHRAM LOWER STEM Co-Ni ALLOY SEAT DISC MELT RING NICKEL 9 UPPER STEM SET SCREW SPRING STEM RETAINER SPRING RETAINER STAINLESS STEEL -WPB SUS60 14 DIAPHRAGM RETAINER 15 PLUG STAINLESS STEEL 16 LEAK PORT PACKING POM 1 (S14) FKM 1 (S26) FKM 19 HANDWHEEL 20 SCREW SWRM 21 WASHER SWRH FUSIBLE METAL NAME PLATE SAFETY SLEEVE SAFETY PLUG A1100P-H RUPTURE DISC SAFETY PACKING NNCP AgP

7 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS (CORROSIVE etc.) EGV2 TIED-DIAPHRAGM SEAL TYPE EGV2 type Tied-Diaphragm seal type Stainless steel cylinder valve For ultra high purity gases Tied-diaphragm design for minimal particle generation and dead space. Approximate 60% reduction in dead space improves purging performance. Valve orifice is mm and Cv value is 0.6. Maximum service pressure is 4.5MPa. Flat seat design prevents seat deformation. Protected safety device. Optional materials available for gas wetted area. Connections available to meet a wide range of international standards (CGA, DISS, etc.). OPTION Inside surface of gas wetted area polished. Cleaning and assembling in clean room. Pneumatic type. MODEL No. EGV2-S SUSF16L 2 4 6W GLAND NUT STEM HEAD LOWER STEM ASSY DIAPHRAGM LOWER STEM Co-Ni ALLOY SEAT DISC MELT RING NICKEL 9 UPPER STEM SET SCREW SPRING STEM RETAINER SPRING RETAINER STAINLESS STEEL -WPB SUS60 14 DIAPHRAGM RETAINER 15 PLUG STAINLESS STEEL 16 LEAK PORT PACKING POM 1 (S14) FKM 1 (S26) FKM 19 HANDWHEEL 20 SCREW SWRM 21 WASHER SWRH FUSIBLE METAL NAME PLATE SAFETY SLEEVE SAFETY PLUG A1100P-H RUPTURE DISC SAFETY PACKING NNCP AgP

8 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS (CORROSIVE etc.) PAS-55L DIAPHRAGM SEAL TYPE PAS-55L type Pneumatic type Diaphragm seal type Stainless steel cylinder valve For high purity gases Actuator is miniaturized by single operated tandem dual piston technology. (Normally closed) In combination with other controlling equipment, the valve can be: 1) Shut off in emergency situations 2) Remotely controlled ) Auto closed-opened Actuator lock function to prevent accidental opening. Easy to connect and take off the piping for actuating pressure. OPTION Open and close indicator. MODEL No. PAS-55L-2000-P 2a 2b PLUG SEAT DISC SPRING DIAPHRAGM DIAPHRAGM SAFETY PACKING SUSF16L -WPB Co ALLOY NBR(Hs0) FKM(Hs0) AgP 9 BONNET 10 STEM 11 RUPTURE DISC 12 FUSIBLE METAL 1 SAFETY NUT 14 DIAPHRAM RETAINER 15 ACTUATOR ASSY 16 TUBE CONNECTOR 1 C6191 NNCP

9 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS (CORROSIVE etc.) AD-M AD-P DIRECT-DIAPHRAGM SEAL TYPE (Cleaning and assembling in clean room) AD-M type (MANUAL OPERATION) (Cleaning and assembling in clean room) Direct diaphragm seal type Stainless steel cylinder valve For ultra high purity gases for the semi-conductor industries Gas wetted area of body polished to less than Rmax1μm. Ultra pure water cleaning and assembling in clean room. External leak tightness(gland nut area) checked by helium pressure method.(helium leak detector) Purging performance and moisture removal improved by minimal dead space. AD-P type (PNEUMATIC ACTUATOR) (Cleaning and assembling in clean room) Actuator is miniaturized by single operated tandem dual piston technology. (Normally closed) In combination with other controlling equipment, the valve can be 1) Shut off in emergency situations 2) Remotely controlled ) Auto closed-opened Actuator lock function to prevent accidental opening. Easy to connect and take off the piping for actuating pressure OPTION Open and close indicator. MODEL No. AD-PS a b SEAT DISC DIAPHRAGM DIAPHRAGM DIAPHRAGM RETAINER SPRING SUSF16L Coi ALLOY -WPB NBR(Hs0) FKM BONNET STEM SAFETY PLUG FUSIBLE PLUG 1 RUPTURE DISC SAFETY SLEEVE 16 ACTUATOR ASSY 1 TUBE CONNECTOR C6191 NNCP SUS21

10 STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES FOR SPECIALTY GAS SOFIC PNEUMATIC ACTUATOR TYPE SOFIC SOFIC MODEL No. PAT-55L-2100 Safety Oil-Free Inhibit Compact Selectable in low-open valve. The slow-open movement is designed to suppress sharply rising pressure and temperature during opening to prevent adiabatic compression. (PNEUMATIC ACTUATOR) Actuator is miniaturized by single operated tandem dual piston technology. (Normally closed) In combination with other controlling equipment, the valve can be: 1) Shut off in emergency situations 2) Remotely controlled ) Auto closed-opened Actuator lock function to prevent accidental opening. Easy to connect and take off the piping for actuating pressure. OPTION Open and close indicator. MODEL No. EGV4 2 PLUG SEAT DISC 4 SPRING 5 DIAPHRAGM 6 DIAPHRAGM SAFETY NUT SUSF16L -WPB Co ALLOY FUSIBLE METAL RUPTURE DISC SAFETY PACKING GLAND NAT STEM ACTUATOR ASSY TUBE CONNECTOR NNCP C GLAND NAT STEM 4 (S) 5 DIAPHRAGM 6 LOWER STEM SEAT DISC MELT RING 9 UPPER STEM 10 SET SCREW 11 SPRING 12 (S26) SUSF16L C6191 FKM Co-Ni ALLOY NICKEL STAINLESS STEEL -WPB FKM 9 SPRING RETAINER 10 DIAPHRAGM RETAINER 11 PLUG STAINLESS STEEL 12 LEAK PORT PACKING POM 1 FUSIBLE METAL 14 SAFETY SLEEVE 15 SAFETY PLUG 16 RUPTURE DISC NNCP SAFETY PACKING Spacer ACTUATOR ASSY TUBE CONNECTOR AgP

11 VALVES FOR SPECIALTY GASES Hamai high quality stainless steel valves are designed for the demanding gas properties of specialty gases. Manufactured to the high pressure gas laws in Japan and JIS B246. Also ready for the increasing demand for valves with CGA standard (DISS) outlets. TYPE OF GAS JIS OUTLET DISS OUTLET No. INLET Standard Manual Type Pneumatic Valve AsH GeH4 SiH4 B2H6 Arsine Germane Silane Diborane STAINLESS STEEL PRESSURE SEAL TYPE H2Se Hydrogen Selenide 62 (FOR SPECIALTY GAS) Si2H6 PH Disilane Phosphine SUS-12 BCL Boron Trichloride 64 JIS B246 HBr Hydrogen Bromide 64 (V1) STAINLESS STEEL DIAPHRAGM SEAL TYPE CL2 Chlorine W26-14R 64 (V2) (FOR SPECIALTY GAS) HCL Hydrogen Chloride W26-14R 64 KHK SUS-55L SiH2CL2 Dichlorosilane 66 /4-14NGT SCR-55L PAS-55L PASC-55L WF6 Tungsten Hexafluoride W22-14R 6 KGS FS-55LN PAT-55L(SOFIC) NF Nitrogen Trifluoride 640 FSC-55LN SiF4 Silicon Tetrafluoride 642 GB BF Boron Trifluoride 642 BS 41 STAINLESS STEEL N2O Nitorous Oxide W22-14R 12 CGA DIRECT DIAPHRAGM SEAL TYPE (FOR SPECIALTY GAS) C2F6 Hexafluoroethane 16 AD-MS AD-PS CF Octafluoro Propane 16 DIN 4/ CF4 Tetrafluoromethane 16 ISO 25E CHF C4F Fluoroform Octafluorocyclobutane STAINLESS STEEL TIED-DIAPHRAGM SEAL TYPE (FOR SPECIALTY GAS) SF6 NH CO CH2F2 CL2 Sulfur Hexafluoride Ammonia Carbon monoxide Difluoromethane Chlorine W22-14R W22-14R W26-14R EGV EGV2 EGV4(SOFIC)

12 BRASS HIGH PRESSURE CYLINDER VALVES K series ( FOR INDUSTRIAL GAS ) YVRH series ( FOR MEDICAL CARE ) A-55-F series ( FOR ACETYLENE GAS ) G-00 series ( FOR HYDROGEN/HELIUM GAS ) G-12/G-55L series ( FOR HIGH PURITY GAS ) VALVES

13 BRASS HIGH PRESSURE CYLINDER VALVES FOR INDUSTRIAL GAS K-40 K-10 PRESSURE SEAL TYPE K-40 series (Handwheel or wrench operated/ Residual pressure valve option) K-10 series (For small gas cylinders with V1 inlet) Pressure seal type Brass cylinder valve For industrial gases Pressure seal type Brass cylinder valve For industrial gases For small gas cylinders with V1 inlet K-40 series available for 19.6 MPa gas cylinders. Residual pressure type with backflow prevention. K-10 series are designed with JIS V1 inlet threads for small sized gas cylinders for industrial gases. K-40 series handwheel type W22-14 K-10series wrench type wrench type with residual pressure valve W22-14 RPV BODY VALVING ELEMENT ATTACHMENT PIN X-RING SPRING 1 VALVE BODY SAFETY PACKING C1100P-0 1 VALVE BODY SPRING 2a PLUG 9 CSM 2a PLUG 9 SPRING CAP A1100P-H1 2b SEAT DISC 66-NYLON 10 HANDWHEEL PACKING FIBER 2b SEAT DISC 66-NYLON 10 HANDWHEEL NUT 11 HANDWHEEL 11 SAFETY NUT 4 GLAND NUT 12 SPRING 4 GLAND NUT 12 SAFETY PACKING C1100P-0 5 GLAND PACKING 1 SPRING CAP A1100P-H1 5 GLAND PACKING 1 RUPTURE DISC C SAFETY NUT RUPTURE DISC C HANDWHEEL NUT FUSIBLE METAL 6 HANDWHEEL PACKING HANDWHEEL FIBER FUSIBLE METAL CSM

14 BRASS HIGH PRESSURE CYLINDER VALVES FOR INDUSTRIAL GAS K-0 ( Female thread outlet type) PRESSURE SEAL TYPE K-0 series W22-14 Pressure seal type Brass cylinder valve For industrial gases Wrench operated with female outlet threads. MODEL No. K-0 2a 2b PLUG SEAT DISC SPRING GLAND NUT GLAND PACKING SAFETY NUT RUPTURE DISC SAFETY PACKING FUSIBLE METAL BAKELITE /0/XM -WPB C1220 C1100P-0 CSM

15 BRASS HIGH PRESSURE CYLINDER VALVES FOR INDUSTRIAL GAS K-44 (W-O-ring Type) PRESSURE SEAL TYPE K-44 series MODEL No. K-44 series Pressure seal type Brass cylinder valve For industrial gases W22-14 Double o-rings for superior vacuuming. Available with optional handwheel or wrench operated. 1 VALVE BODY 6 GLAND PACKING 2a PLUG SAFETY NUT 2b SEAT DISC BAKELITE RUPTURE DISC C SPRING or 0 -WPB 9 10 SAFETY PACKING C1100P-0 CSM 5 GLAND NUT 11 FUSIBLE METAL SAFETY PRO series Open - closed indicator full open Safety Pro series provides a safe and secure environment by protecting against incorrect operation. Polycarbonate handwheels are light and tough. Available for valves needing more than 60 degrees to open and close. half open closed K-44 series Model No. KX-44 Handle model No. KH-0

16 PIN-INDEX YOKE TYPE VALVE FOR MEDICAL CARE YVRH YOKE TYPE YVRH series YVRH-PX2 O-ring seal type Brass cylinder valve For medical care Available with round or butterfly shaped handles or wrench operated to meet various needs. With taper or parallel inlet threads. PINHOLE SIZE 2 PLUG SEAT DISC 4 5 GLAND NUT 6 GLAND PACKING PACKING 9 SPRING 10 SAFETY PLUG 66- NYLON FPM(Hs0) C1100 -WPB 11 RUPTURE DISC C SAFETY PACKING C HANDWHEEL PLASTIC 14 HANDWHEEL PACKING 15 NUT PLASTIC 16 1 CAP PLASTIC 1 SEAL 1 SYNTHETIC RESIN FILM SEAL 2 FUSIBLE METAL SYNTHETIC RESIN FILM D TWO PINHOLE ONE PINHOLE GAS NAME PINHOLE NUMBER O CO2/O2 Mix (CO2 Mix rate is less than or equal to %) 2 6 O2/He Mix (He Mix rate is less than or equal to 0%) H2C=CH N2O 5 CH6 6 GAS NAME He or He/O2 Mix (O2 Mix rate is under 20%) CO2 or CO2/O2 Mix (O2 Mix rate is over %) Air N 2 O2/N2O Mix (N2O Mix rate is 0% or 50%) PINHOLE NUMBER Quick connector WEH series MODEL No. WEH-C WEH-C for superior cost performance. WEH-C for increased safety in operation. MODEL No. WEH-C Type New ly Product Conventional Product Name Drawing No. Design Pressure Leakage Test Pressure WEH-C S-462-A 22MPa 22MPa WEH-C S-46-A 22MPa 22MPa Gas O2 O2 Connector Handle Type Note W22-14TPI Without swiveljoint Straight type Cam lever type Without lock function W22-14TPI With swiveljoint Angle type Rotating lever type With lock function Designed for gas tightness at low temperatures Quick connectors are imported from WEH GmbH in Germany

17 BRASS HIGH PRESSURE CYLINDER VALVES FOR ACETYLENE GAS A-55-F PRESSURE SEAL TYPE A-55-F Pressure seal type Brass cylinder valve For acetylene gas Brass valve for dissolved acetylene service. Available with optional fusible plug. MODEL No. A-55-F 2 GLAND NUT 4 PACKING SHEET 5a GLAND PACKING 5b GLAND PACKING 6 WIRE MESH FILTER SEAT PACKING 9 FUSIBLE METAL 10 SUS40 NYLON FLANNEL NBR EPR

18 BRASS HIGH PRESSURE CYLINDER VALVES FOR HYDROGEN / HELIUM G-00-K9 G-00-K1 PRESSURE SEAL TYPE G-00-K9/G-00-K1 Pressure seal type Brass cylinder valve For hydrogen / helium gas For use with high pressure tubes, cylinders with self-loader or manifolds. Available with pressure relief devices with tube connection for outside exhaust. MODEL No. G-00-K1 2 GLAND NUT 4a PLUG 4b 5 SEAT DISC FPM 6 GLAND PACKING SAFETY NUT RUPTURE DISC C SAFETY PACKING C1100P-0 10 FUSIBLE METAL 11 HANDWHEEL PACKING FIBER 12 HANDWHEEL 1 SPRING 14 SPRING CAP A1100P-H1 15 HANDWHEEL NUT

19 BRASS HIGH PRESSURE CYLINDER VALVES FOR HIGH PURITY GAS G-12 PRESSURE SEAL TYPE Pressure seal type Brass cylinder valve Double o-ring sealing design in gland nut with safety relief port W22-14 Hamai brass cylinder valves deliver safety to the specialty gas industry. Double O-ring sealing structure is suitable for vacuuming Available for gas cylinders with 19.6MPa/24.5MPa working pressure Valves suitable for high purity gas Available to meet a wide range of international standards MODEL No. G-12 2 GLAND NUT 4a PLUG 4b SEAT DISC 5 6 GLAND PACKING HANDWHEEL SPRING 9 SPRING CAP 10 HANDWHEEL NUT 11 HANDWHEEL PACKING 12 SAFETY NUT 1 RUPTURE DISC 14 SAFETY PACKING 15 FUSIBLE METAL FPM A1100P FIBER C1220 C1100P-0

20 BRASS HIGH PRESSURE CYLINDER VALVES FOR HIGH PURITY GAS G-55L DIAPHRAGM SEAL TYPE G-55L Diaphragm seal type Brass cylinder valve W22-14 For high purity gases This type has the identical structure as SUS-55L type of stainless steel cylinder valve. Hamai diaphragm seal type valves are designed to be grease-free through the use of highly polished lower diaphragms. Available with JIS V1 inlet threads for small size gas cylinders. MODEL No. G-55L 2 GLAND NUT 4 STEM HEAD 5a DIAPHR AGM 5b DIAPHR AGM 6 PLUG SPRING SEAT DISC 9 SAFETY NUT 10 SAFETY PACKING 11 RUPTURE DISC 12 HANDWHEEL 1 NAME PLATE 14 SCREW 15 WASHER 16 FUSIBLE METAL C6604 Co ALLOY -WPB C1100P-0 NNCP A1100P SWRM SWRH

21 VALVES FOR INDUSTRIAL GASES Hamai provides stable supplies of valves for industrial gases such as oxygen, nitrogen and argon to a wide range of industries. TYPE OF GAS JIS OUTLET CGA OUTLET No. BS OUTLET DIN OUTLET INLET Standard Manual Type (Air) Air W22-14R 46 No. No.1 Ar Argon W22-14R 50 No. AsH Arsine 50 BF Boron Trifluoride 0 No. CL2 Chlorine W26-14R 660 No. F2 Fluorine 60 No. HCL Hydrogen Chloride W26-14R 0 No. H2 Hydrogen 50 No.4 No.1 H2S Hydrogen sulfide 0 No.15 No.5 He Helium W21-14L 50 No. Kr NH NO N2 N2O Ne O2 Krypton Ammonia Nitric Oxide Nitrogen Nitrous Oxide Neon Oxygen W26-14R W22-14R W22-14R W22-14R W22-14R W22-14R No. No.10 No. No.1 No. No. No. No.10 No.11**1 No.9 JIS B246 (V1) (V2) /4-14NGT KHK KGS BRASS PRESSURE SEAL TYPE (FOR INDUSTRIAL GAS) K-40 K-0 K-44 PH SF6 SiH4 SO2 Xe CCL2F2 CHCLF2 Phosphine Sulfur Hexafluoride Monosilane Sulfur Dioxide Xenon Fluorocarbon-12 Fluorocarbon-22 W22-14R W22-14R W22-14R W26-14R W26-14R No.4 No. No.10 No. No.1 No.1 No. BS 41 DIN 4 /ISO 25E GB CGA BRASS (FOR HIGH PURITY GAS) G-12 G-55L CH4 Methane 50 No.4 No.1 CO Carbon monoxide 50 No.4 No.5 CO2 Carbon Dioxide W22-14R 20 No. C2H2 Acetylene YOKE GATT TYPE 510 No.2 No. C2H4 Ethylene 50 No.4 No.1 C2H4O Ethylene oxide 510 No. No.1 C2H6 Ethane 50 No.2 No.1 CH6 Propylene 510 No.2 No.1 CH Propane W L 510 No.4 No.1**2 C4H10 butane 510 No.9 No.1**2

22 STAINLESS STEEL HIGH PRESSURE LINE VALVES PS series ( FOR SPECIALTY GAS ) PS/GS-12 series ( FOR SPECIALTY GAS ) PS/GS-55L series ( FOR SPECIALTY GAS ) PAV/PAVS-55L series -PNEUMATIC ACTUATOR- ( FOR SPECIALTY GAS ) VALVES

23 STAINLESS STEEL HIGH PRESSURE LINE VALVES FOR SPECIALTY GAS EQUIPMENT PS-110-R PS-115-R PS-119-WB CONNECTION IN : W29-16TPI.RH OUT : W29-16TPI.RH PS-110-R Stainless steel high pressure line valve Compact sized line valve with 10 mm seat diameter. MODEL No. PS-110-R Design Pressure 1MPa/25MPa Cv Value GLAND NUT PLUG SUSF SEAT DISC GLAND PACKING FPM PACKING 9 HANDWHEEL 10 SPRING SPRING CAP HANDWHEEL NUT HANDWHEEL NUT A1100P FIBER CONNECTION IN : M6 OUT : M6 PS-115-R Stainless steel high pressure line valve MODEL No. PS-115-R Design Pressure Cv Value 1MPa/20MPa/25MPa.2 Large sized line valve with 15 mm seat diameter. Also available with a bearing type gland area for reduced friction at high pressure. 2 GLAND NUT 4a PLUG SUSF16 4b SEAT DISC 5 GLAND PACKING 6 PACKING NUT SPRING 9 SPRING RETAINER 10 HANDWHEEL 11 HANDWHEEL PACKING FC NAME PLATE SPLIT PIN C201P FPM CONNECTION IN : W44-12TPI.RH OUT : W44-12TPI.RH PS-119-WB Stainless steel high pressure line valve MODEL No. PS-110-R 2 SEAT DISC PLUG 4 PACKING FOR PLUG 5 VALVE GUIDE 6 SUSF16 Design Pressure 1MPa/25MPa Cv Value 5.5 MALE-ADAPTER 12 V PACKING TAP BOLT FOR V PACKING 9 FEMALE-ADAPTER 10 FPM 11 POLYURETHANE RUBBER Large sized line valve with 19 mm seat diameter. With a bearing type gland area for reduced friction at high pressure. A standard type without bearing is also available. (Model No. PS-119-R) 14 1 BEARING BEARING COVER NUT 15 BEARING RETAINER 16 HANDWHEEL PACKING 1 WASHER 1 HANDWHEEL or FC FLAT WASHER NAME PLATE 21 NUT 22 BACKUPRING 2 BACKUPRING 24 SPRING WASHER C201P

24 STAINLESS STEEL HIGH PRESSURE LINE VALVES FOR SPECIALTY GAS EQUIPMENT PS-12 GS-12 PRESSURE SEAL TYPE PS-12 GS-12 Pressure seal type Stainless steel high pressure line valve For high purity gases Available for maximum service pressure of 41.2 MPa (420Kgf/Cm2). Also available with panel mouted type. Model No. PS-12-PNL Pressure seal type Stainless steel high pressure line valve For high purity gases Angle type Available for maximum service pressure of MPa (6Kgf/Cm2). Available with nut to connect a pressure gauge. Model No. GS-12AS connection Inlet : W22-14TPI.RH Outlet : G1/2 Also available with panel mouted type. Model No. GS-12-PNL MODEL No. PS-12 Connection IN : W22-14TPI.RH OUT : W22-14TPI.RH MODEL No. GS-12 Connection IN : W22-14TPI.RH OUT : W22-14TPI.RH Design Pressure 1MPa/25MPa/41.2MPa Cv Value 0. Design Pressure 1MPa/25MPa/MPa Cv Value GLAND NUT 4 PLUG 5 SEAT DISC 6 GLAND PACKING SUSF16 FPM HANDWHEEL 9 SPRING 10 SPRING CAP 11 HANDWHEEL NUT 12 HANDWHEEL PACKING A1100P FIBER 2 GLAND NUT 4 PLUG 5 SEAT DISC 6 GLAND PACKING SUSF16 FPM HANDWHEEL 9 SPRING 10 SPRING CAP 11 HANDWHEEL NUT 12 HANDWHEEL PACKING 1 LOCK NUT A1100P FIBER

25 STAINLESS STEEL HIGH PRESSURE LINE VALVES FOR SPECIALTY GAS EQUIPMENT PS -55L GS-55L DIAPHRAGM TYPE PS-55L GS-55L Diaphragm seal type Stainless steel high pressure line valve For ultra high purity gases Standard version with 4mm diameter seat and Cv value of 0.5 Optional version with 6mm diameter seat and Cv value of Available with optional polish for gas wetted body. Available as panel mounted type. Diaphragm seal type Stainless steel high pressure line valve For ultra high purity gases Angle type Standard version with 4mm diameter seat and Cv value of Optional version with 6mm diameter seat and Cv value of Available with optional polish for gas wetted body. Available as panel mounted type. MODEL No. PS-55L Connection IN : W22-14TPI.RH OUT : W22-14TPI.RH MODEL No. GS-55L Connection IN : W22-14TPI.RH OUT : W22-14TPI.RH Design Pressure 1MPa/25MPa Cv Value 0.5 Design Pressure 1MPa/25MPa Cv Value GLAND NUT 4 STEM HEAD 5a DIAPHRAGM 5b DIAPHRAGM 6 PLUG SUSF16 CoALLOY SPRING SEAT DISC 9 HANDWHEEL 10 NAME PLATE 11 SCREW 12 WASHER -WPB A1100P SWRM SWRH 2 GLAND NUT 4 STEM HEAD 5a DIAPHRAGM 5b DIAPHRAGM 6 PLUG SUSF16 CoALLOY SPRING SEAT DISC 9 HANDWHEEL 10 NAME PLATE 11 SCREW 12 WASHER 1 LOCKNUT -WPB A1100P SWRM SWRH

26 STAINLESS STEEL HIGH PRESSURE LINE VALVES FOR SPECIALTY GAS EQUIPMENT PAV-55L PAVS-55L DIAPHRAGM TYPE MODEL No. PAV-55L PAV-55L Diaphragm seal type Stainless steel high pressure line valve For high purity gases Line valve with air operated actuator. Available with angle and straight shaped structure. A straight type called PAVS is also available. Model No. PAVS-55L MODEL No. PAV-55L 2 BONNET STEM 4 5a DIAPHRAGM 5b DIAPHRAGM 6 PLUG SPRING SEAT DISC 9 LOCKNUT 10 CYLINDER GLAND LOCKNUT CYLINDER LOWER PISTON UPPER PISTON DISC SPRING CYLINDER HEAD SUSF16 NBR CoALLOY -WPB POLYIMID S60CM NBR NBR NBR NBR

27 BRASS HIGH PRESSURE LINE VALVES G series ( FOR VARIOUS GAS ) P/G-12 series ( FOR VARIOUS GAS ) VALVES

28 BRASS HIGH PRESSURE LINE VALVES FOR VARIOUS GAS EQUIPMENT G-110-R G-115-R G-119-R Connetion IN : W29-16TPI.RH OUT : W29-16TPI.RH G-110-R Brass line valve 10 mm seat diameter. Available with angle shaped structure. MODEL No. G-110-R Design Pressure 1MPa/25MPa/0MPa Cv Value PLUG SEAT DISC 5 6 GLAND NUT GLAND PACKING HANDWHEEL PACKING HANDWHEEL FIBER FC20 9 SPRING HANDWHEEL NUT SPRING RETAINER SPRING GUIDE 1 NAME PLATE BACK UP RING 16 MOUNTING BOLT(OPTION) C201P FPM S25C G-115-R Connection IN : W2-12TPI.RH OUT : W2-12TPI.RH Brass line valve MODEL No. G-115-R Design Pressure Cv Value 1MPa/25MPa. Large sized 15 mm seat diameter. Available as G-115R panel-mounted flange type or G-115RB bolt-stationary type. 2 PLUG 4a PLUG SEAT or C6191 4b SEAT DISC 5 PACKING FOR PLUG C PACKING INDICATOR HARDWARE INDICATOR THREAD 9 NUT 10 LOCK NUT 12 SPRING 1 SPRING RETAINER 14 HANDLE HOOK 15 PACKING WASHER SPLIT PIN HANDWHEEL HARD VINYL PLASTIC FC20 19 MOUTING FLANGE 20 NAME PLATE 21 SS41 C201P FPM G-119-R Connection IN : W44-12TPI.RH OUT : W44-12TPI.RH Brass line valve Large sized 19 mm seat diameter. MODEL No. PS-110-R Design Pressure 1MPa/25MPa Cv Value PLUG 4a PLUG SEAT 4b SEAT DISC or C PACKING FOR PLUG C PACKING 9 INDICATOR HARDWARE INDICATOR THREAD NUT SPRING RETAINER HANDLE HOOK 10 LOCK NUT 11 NAME PLATE C201P 12 SPRING PACKING WASHER SPLIT PIN HANDWHEEL HARD VINYL PLASTIC FC20 FPM

29 BRASS HIGH PRESSURE LINE VALVES FOR VARIOUS GAS EQUIPMENT P-12 G-12 (MAIN VALVE FOR FILLING) PRESSURE SEAL TYPE P-12 series G-12 series (Main valve for filling) Pressure seal type Brass line valve Available with nut to connect a pressure gauge. Model No. P-12-0FM connection Inlet : W22-14TPI.RH Outlet : G1/2 Pressure seal type Brass line valve Angle type Also available with W22 LH outlet. Available with nut to connect a pressure gauge. Model No. G-12-AS connection Inlet : W22-14TPI.RH Outlet : G1/2 MODEL No. P-12 Connection IN : W22-14TPI.RH OUT : W22-14TPI.RH MODEL No. G-12 Conection IN : W22-14TPI.RH OUT : W22-14TPI.RH Design Pressure 1MPa/25MPa Cv Value 0. Design Pressure 1MPa/25MPa/2MPa Cv Value GLAND NUT 4a PLUG 4b SEAT DISC 5 FPM 6 GLAND PACKING HANDWHEEL SPRING 9 SPRING CAP 10 HANDWHEEL NUT 11 HANDWHEEL PACKING A1100P FIBER 2 GLAND NUT 4a PLUG 4b SEAT DISC 5 6 GLAND PACKING FPM HANDWHEEL SPRING 9 SPRING CAP 10 HANDWHEEL NUT 11 HANDWHEEL PACKING 12 ROCKNUT A1100P FIBER