SAM Speedy Accurate Maintainable

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1 SAM Speedy Accurate Maintainable Instruction Manual for Digital Mass Flow Controller SFC2480F Series Hitachi Metals, Ltd. Kuwana Create Co., Ltd. SAM RESEARCH

2 Z2R Table of contents 1. Preface Features Items to check before use Flow volume calibration standard Specifications Dimensional drawings Alarm functions Connector specifications How to use the MFC Maintenance and check Digital commands protocpl Warranty and after service...14

3 1. Preface Thank you for purchasing our SAM mass flow controllers from the SFC2480F ( Fantas R Z2R ) series. In order to make the most of this mass flow controller, check the name plate of MFC as to whether the specifications of this MFC match with your requirements, and then read this manual thoroughly before using it. The SFC2480F series MFC has both analog and digital interfaces. This manual only describes the use of the analog interface. For details about using the digital interface, see the separate instruction manual for it. 2. Features The SFC2480F series of MFCs provide the following useful features for ULSI manufacturing processes: 1. Quick response, high accuracy You set quick response and high accuracy thanks to the synergistic effect of the MFC's layered piezo element actuator, simple valve structure, high speed and high accuracy AD converter, high performance micro computer, and large capacity non-volatile memory. 2. Clean construction 1) Does not generate particle The MFC has a simple valve structure that does not use any moving parts, such as stems, springs, etc., in gas wetted area. 2) All metal seals There are no plastic or rubber parts in the valve seat. All of the external seals are metal (except for elastomer seal models). 3) Super fine finish The surfaces of gas wetted area are finished with a special electropolishing. The surface roughness level, Rmax., is 0.4 µm. 3. Equipped with a two mode alarm output and a status LED. 4. Preset ramping function 5. Integration function 6. SMV mode (piezo valve mode), ECV mode (controlled by external analog signal) 7. Equipped with a general purpose digital interface (RS-232C standard) (RS-485 is also optionally available) 8. Stores calibration data for up to 6 types of gas (optional) 1

4 2 Z2R Items to check before use 1) Do not operate the MFC where it may be exposed to high temperature, high humidity, or vibration. Use the MFC within the specified temperature range. Operating temperature: 5 to 50 degree C Storage temperature: Up to 80 degree C 2) Make sure that the gas being measured and its flow rate are within the specifications for this device. Use of a gas other than the name plate gas may cause a significant deviation in the flow rate. The MFC may be unable to control the flow of certain gases. 3) Make sure that the installation direction (gas flow direction) is correct. A reverse connection may cause leaks or loss of control. When you connect the MFC to a vertical tube, generally, it can be positioned in any orientation. However, for some gases, there may be a restriction on the orientation. 4) Make sure that there are no leaks in the gas pipes. Even a tiny leakage of a high reaction gas may cause clogging. We recommend checking for leaks using a Helium leak detector or similar device. 5) Make sure that the control gas pressure is appropriate. When the MFC is used beyond the rated working pressure, the control function may fail to work. If a pressure higher then the withstand pressure is used, the MFC may be damaged. 6) Check the purity of the gas used. Make sure that it has no particulate contamination. If contaminated gas is used in the MFC, it may clog or otherwise malfunction. In this case, make sure to install a filter at the inlet to the MFC. 7) Before using a high reaction gas, make sure to thoroughly purge inside of the equipment and pipes. If oxygen or moisture remain inside, a formation may be generated and may cause a malfunction. 8) Make sure that a shut off valve is installed The MFC can t shut off the gas by itself. If a complete shut off is required, install a separate valve for shut off. 9) Please note that the flow volume standard of this MFC is 1 atmospheric pressure at 0 degree C (SCCM, SLM). 10) Make sure that the voltage, polarity, and current capacity of the power supply (+/-15VDC) are appropriate. Simultaneously (within one second) Apply both the positive and negative voltage. The power supply voltage rise time must be less than 0.1 s. Wait at least 5 seconds after turning OFF the power before turning it ON again. The cycles of power ON/OFF shall be less than 100, ) Make sure that the analog input is within +/- 15 VDC. The maximum withstand voltage of the MFC input is +/- 15VDC. 12) When the flow volume output signal is used, make sure that the withstand voltage of the unit to which this output is connected is at least +/- 15 VDC. The MFC outputs a flow volume signal within the range of +/-15 VDC. 13) Allow enough time for warm up After turning ON the power, the internal CPU will be initialized within approximately 0.2 s. However, the mechanical sections of the MFC take at least 30 minutes at ambient temperature to stabilize. 4. Flow volume calibration standard The calibration standard for mass flow volume in this MFC is 1 atmospheric pressure at 0 degree C (SCCM, SLM). If you need a device whose calibration standard is 1 atmospheric pressure at 25 degree C, please contact us.

5 5. Specifications Z2R MFC Type IGS Digital Mass Flow Controller Model SFC2480FA##-4S*** SFC2481FA##-4S*** SFC2482FA##-4S***N ##:MC,MO,RC,RO M : Metal Seal C : Normally Close R : Rubber Seal O : Normally Open Flow Rate Max. 5 SLM Max. 10 SLM Max. 30 SLM Temperature Range * degree C Accuracy Guaranteed Temperature * degree C Baking Temperature Max. 80 degree C Control Range %F.S. Speed of Response Within 1.5 sec. to +/-2% of each Set Point Accuracy +/-0.5% of F.S. Linearity +/-0.3% of F.S. Repeatability +/-0.2% of F.S. Pressure Inlet MPa (Gauge) MPa (Gauge) Outlet Vacuum - 0.1MPa (abs) Proof Pressure 1.0 MPa (Gauge) He-Leak Metal Seal Less than 1 x Pa*m 3 /s (He) Integrity Rubber Seas Less than 1 x 10-8 Pa*m 3 /s (He) Power Supply +15VDC +/-4% 100mA -15VDC +/-4% 100mA Flow Set-point Signal (Analog) 0.1-5VDC (Absolute Standard; within +/-15VDC) Flow Output Signal (Analog) 0-5VDC (max. : +15VDC, min. : -15VDC) Flow Set-point, Output signal (Digital) Prime Seat Materials Diaphragm Hitachi-Metals Protocol or L Protocol (RS-232c or RS-485) SUS316L YET-101 (Ni-Co Alloy) Sensor SUS316L, Ni solding SUS316L, Ni tube External Seals Metal Seals Gas Wetted Materials Finished by Electropolishing Auto Close Function Valves Closing Function Valves Opening Function Standard Equipment Please refer to Connector Specifications *1 Please avoid using the device outside the specified temperature range as it may lead to device malfunction. *2 Using the MFC outside the accuracy guaranteed temperature range may cause the accuracy to drop below +/-1% of F.S. 3

6 Z2R Dimensional drawings 6-1. Analog Connector TYPE L or Q 4

7 6-2. Analog Connector TYPE T Z2R

8 6 Z2R Alarm functions The SFC2480F series MFC has two alarm functions: alarm A and alarm B. The factory settings for these alarm functions enables the alarm when an alarm condition continues for more than 10 seconds. The range for deciding alarms should be given using digital commands. When an alarm occurs, the LED on the top of the case will change. Therefore, you can monitor the occurrence of alarms even if you do not connect the digital interface. With some alarms, the MFC will keep the alarm output latched after the cause of the alarm has been removed. With other alarms, the MFC will reset the alarm output when the cause of the alarm has been removed Alarm A Alarm A monitors the following five causes of an alarm. This alarm usually means that a fatal errors has occurred. 1) Power voltage error (latched) When the +15 VDC supply power voltage drops, this alarm will occur. The alarm output will remain latched even if the alarm cause is removed, such as a recovery from an instantaneous voltage drop. 2) Communication error When the MFC digital interface receives commands that are not presented in the preset communication format or at the current transfer speed (baud rate), or when a parity or check sum error occurs, or if it receives a command of the wrong length, this alarm will occur. When this alarm occurs for any reason, the alarm signal will be latched. To reset this alarm output, you have to shut OFF the power to the MFC or input the correct command from the digital interface. For details, see the instruction manual for the digital interface. 3) EEPROM error This error occurs when the software switches are not set correctly, or if an EEPROM (non-volatile memory) read or write error occurs. The alarm output is latched. 4) Mismatch between the set-point and the output flow rate output This alarm occurs when the set-point flow rate value and output flow rate value do not match. This alarm will be disabled when the valve is forcibly open or closed. 5) Integrated level 2 exceeded When the integrated value exceeds the preset integration level 2, this alarm will occur. For details, see the instruction manual for the digital interface Alarm B Alarm B monitors three types of errors and seven alarm causes. 1) Excessive zero offset This error occurs when the zero point correction value becomes larger than 10% of the full scale, starting from the initial condition. 2) Integrated level 1 exceeded This error occurs when the integrated value exceeds integration level 1. For details, see the instruction manual for the digital interface. 3) Variation in sensor current, valve voltage, sensor bridge voltage, analog setting value, and sensor output These alarms monitor variations in the internal status. When these values deviate from their respective preset values, the MFC will output alarm B. When delivered, the standard MFC's references values for these items must be set by the user before use. When alarm B preset signals are input, the MFC will store the values for these alarm items as fixed values. After these settings are made, the MFC will output alarm B when any of these

9 Z2R values deviates from the reference values by the specified range. When the MFC is connected to a computer through the analog connector, you cannot use any other mode except the "reference point setting mode" described above. If you use the digital interface, you can use the other mode: the "set values slide mode." For details about this mode, see the digital interface instruction manual. The Alarm timer, Alarm B window, and Alarm B window 2 can be set to work with these alarm functions. Further, you can specify whether to monitor only increases or decreases from the analog preset values using the "reference point setting mode." 7-3. Alarm LED display LED turns ON when an alarms occurs: Status LED state Normal Green lamp flashes at one second intervals Alarm A condition Goes OFF (power supply voltage drop) Alarm A condition Red lamp lights (other than the power supply voltage drop) Alarm B condition Red lamp flashes at 0.5 second intervals 7

10 Z2R Connector specifications 8-1. Analog Interface 1) Connector type D-subminiature 9 contact pin connector 2) Applicable plug 17JE (D8B) (DDK) 3) Connector 3-1) L Type Pin No. Signal Name 1 Valve open/close input signal ( +15VDC : open, -15VDC : close ) 2 Output voltage signal (0-5VDC) 3 +15VDC 4 Common (+/-15VDC) 5-15VDC 6 Set-point voltage signal (0.1-5VDC) 7 Common (Output voltage signal) 8 Common (Setting voltage signal) 9 Valve voltage monitor signal (0-5VDC) Note 1 : All the common lines are connected to each other inside the MFC. Note 2 : Valve open/close input signal 1)The internal valve fully opens (forced open)when +15VDC is applied to pin1. This is useful for line purge etc. 2)The internal valve fully closes (forced close)when -15VDC is applied to pin1. However, the internal valve of the MFC cannot completely shut off the gas flow. In order to completely shut off gas line, provide a stop valve separately. 3-2) Q Type Pin No. Signal Name 1 Valve open input signal 2 Output voltage signal (0-5VDC) 3 +15VDC 4 Common (+/-15VDC) 5-15VDC 6 Set-point voltage signal (0.1-5VDC) 7 Common (Output voltage signal) 8 Common (Setting voltage signal) 9 Valve close input signal Note 1 : All the common lines are connected to each other inside the MFC. Note 2 : Valve open/close input signal 1)The internal valve fully opens (forced open)when pin1 connects to common. This is useful for line purge etc. 2)The internal valve fully closes (forced close) when pin9 connects to common. However, the internal valve of the MFC cannot completely shut off the gas flow. In order to completely shut off gas line, provide a stop valve separately. 8

11 3-3) T Type Pin No. Signal Name 1 No Connection 2 No Connection 3 +15VDC 4 Common (+/-15VDC) 5-15VDC 6 No Connection 7 Signal Common 8 RS RS Note 1 : All the common lines are connected to each other inside the MFC. Z2R Digital Interface 1) Standard Connector ( Molex ) ( RJ-12 * 2 ) 2) Connector Pin Layout Pin No. Signal Name RS-232C RS Signal Common 2 No Connection 3 Rxd RS- 4 Txd RS+ 5 No Connection 6 No Connection Note 1 : All COM lines of Digital connector are connected to COM of Analog connector Description of the terminals 1) The following include terminals found only on the analog connector, and terminals found on both the analog and digital interface connector. Terminal name Function + 15 VDC - 15 VDC Common (+/-15VDC) Output voltage signal Common (Output voltage signal) Set-point voltage signal Common (Set-point voltage signal) Power supply line for the MFC. Apply both the positive and negative voltages simultaneously (within one second). * When the power is turned ON, the rise time must be less than 0.1 s. Flow rate output signal from the MFC. The default value is 0 VDC for 0% and 5 VDC for 100 %. It can be changed so that the range is 1 to 5 VDC by adjustment. Output impedance: 10 ohm max. * Normally, the output voltage range is approximately - 1 VDC (- 20 %) to approximately 7 VDC (140 %). However, a voltage surge anywhere between +/-15 VDC may be output when the power is turned ON or a reset is performed. Check the withstand voltage of any equipment that is connected. Analog voltage input to the MFC. Normally, the flow rate set-point signal is input through this terminal. The default value is 0 VDC for 0% and 5 VDC for 100 %. It can be changed so that the range is 1 to 5 VDC by adjustment. Input impedance: 1 M ohm min. * Input withstand voltage is +/-15 VDC. 9

12 Z2R Terminal name Function Valve open/close Input used to forcibly open and close the valve inside the MFC. (L type) Fully open when + 15 VDC (+ 12 VDC min.) is placed on this and common (+/- 15VDC) terminal. Fully close when - 15 VDC (- 12 VDC min.) is placed on this and common (+/- 15VDC) terminals. If the MFC receives a signal with a voltage in between these voltages, it may malfunction. Input impedance: 100 k ohm min. * Input withstand voltage is +/-15 VDC. Valve open Input used to forcibly open and close the valve inside the MFC. Valve close Fully open when the common terminal and OPEN terminal are (Q type) shorted together. Fully closed when the common terminal and CLOSE terminal are shorted together. Controlled when neither OPEN nor CLOSE are connected to common. This input has priority over the command input. If both the OPEN and CLOSE terminals are simultaneously shorted to the common terminal, the MFC may be damaged. * Neither OPEN nor CLOSE terminals should have any voltage not applied to them. If they are used in any way other than shortening them to the common terminal, the MFC may be damaged. * The OPEN terminal will read approximately + 15VDC when it is open. * The CLOSE terminal will read approximately + 0.7VDC when it is open. * Approximately 1.5mA of current flows through the OPEN terminal when it is shorted to the common terminal. A 100ohm resistor should be used to short it to the common terminal. * Approximately 0.1mA of current flows through the CLOSE terminal when it is shorted to the common terminal. A 100ohm resistor should be used to short it to the common terminal. Valve voltage monitor Voltage output used to monitor the valve drive voltage inside the MFC. Outputs 0 to 5 VDC relative to the common terminal. Output impedance: 10 ohm max. Txd Input and output terminals for the RS-232C interface. Rxd * Only used for RS-232C communication. + RS Input and output terminals for the RS-485 interface. - RS * Only used for RS-485 communication. Note: Both analog and digital interface terminals are connected inside the MFC. A sequence program is available for connecting any two terminals that have the same name. However, in this sequence, you must make sure that the total current of the two more terminals is within the allowable current level. 10

13 Z2R How to use the MFC 9-1. Gas line connection The MFC can be installed vertically or horizontally. However, in a vertical installation, the zero position may deviate with some gas (accordingly the indicated flow volume will also deviate). In this case, adjust the zero point by referring to section 9-6 in this manual. The gas flow direction is marked on the side and top of the cover. Also, be very careful not to contaminate the inside of the MFC with foreign material Checks after connecting the pipes Make sure that there are no leaks in any of the connections and no connection faults such as from loosen connectors. Faulty connections are likely to cause malfunctions. Use a Helium leak detector or a standard pressurizing method to check for gas leaks. When using the pressurized method, use an inert gas and be careful not to charge the system with too much pressure. See the rated withstand pressure specification Warming up After turning ON the power, let the MFC warm up for 20 to 30 minutes while the gas flow is shut off. The MFC may start to operate soon after the power is turned ON. However, precision reading cannot be obtained until it has warmed up Stopping the gas flow If a highly reactive gas is used and the operation is stopped, some gas may remain inside the MFC and it may cause problem such as clogging. If you use this kind of gas, make sure to purge the inside of these device after you stop the operation using vacuum discharge. Or, you can charge the system with an inert gas in order to discharge any residual gas. Forcing the valve open is useful for purging operations Conversion factor The MFC is already calibrated and adjusted at our factory for the gas you intend to use and the flow volume of your system. The setting details are listed on the label of the side of the case. When using a gas other than that listed, flow rate must be reset by calibrating the unit using conversion factor. Be careful about the following point when determining the conversion factor. 1) Conversion factors are determined by using N 2 as "1.000". However, a simple conversion may not provide satisfactorily precise data. Therefore, only use the converted data as reference information. 2) To achieve a flow volume of gas other than the calibration gas (the gas listed on the label), calculate the volume using the following formula. Conversion factor of the new gas New gas flow rate = Calibration gas flow rate * Conversion factor of the calibration gas 3) If you use a gas with a specific gravity that is much different than the calibration gas, the MFC cannot measure the flow rate accurately or maintain stable control. In this case, adjust the differential operating pressure so that the device can resume normal operation. 4) Table 1 shows the flow volume conversion when using other gases for the MFC. This information is provided for your reference only. 11

14 Table 1. Conversion factor Gas name Symbol Conversion factor Acetylene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Carbon Dioxide Carbon Monoxide Chlorine Diborane Dichlorosilane Ethane Ethylene Freon-12 Freon-14 Helium Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Fluoride Hydrogen Selenide Hydrogen Sulfide Methane Nitric Oxide Nitrogen Nitrous Oxide Oxygen Phosphine Propane Propylene Silane Silicon. Tetrachloride Sulfur Dioxide Sulfur Hexafluoride Trichlorosilane Carbon Tetrachloride Silicon Tetrafluoride Chlorine Trifluoride C 2 H 2 NH 3 Ar AsH 3 BCl 3 BF 3 CO 2 CO Cl 2 B 2 H 6 SiH 2 Cl 2 C 2 H 6 C 2 H 4 CCl 2 F 2 CF 4 He H 2 HBr HCl HF H 2 Se H 2 S CH 4 NO N 2 N 2 O O 2 PH 3 C 3 H 8 C 3 H 6 SiH 4 SiCl 4 SO 2 SF 6 SiHCl 3 CCl 4 SiF 4 ClF Z2R

15 Z2R Zero compensation 1) Shut off the gas flow (1) Completely shut off the gas flow by closing the internal stop valves, and the valves before and after the MFC. (2) Open the internal valve all the way in order to eliminate the differential pressure between inlet and exhaust sides of the MFC. 2) Press the zero point reset button (1) Position of the reset button (2) By pressing the reset button, the zero point will be reset. Be careful because if it is pressed continuously for more than 30 seconds, all of the settings in the MFC will be reset to their default values. 13

16 10. Maintenance and check When the MFC is not operating normally, check the following items again before requesting repairs. Z2R Gas does not flow. 1) Wrong connection. 2) The gas source shut off valve is not open. 3) The forced valve closed function is not working Gas flow volume fluctuates. 1) Too much pressure variation in the supply gas. 2) The differential pressure is larger than specified Zero flow does not read "000." The "000" reading will not appear until the thermal sensor is hot enough after the power is turned ON. Allow the unit to warm up for 20 to 30 minutes. If the zero position is not correct after warming up, adjust the zero position by referring to item Gas does not flow at a sufficiently high flow rate, or the flow rate is too high. 1) The forced valve open function is not working. 2) The gas pressure is not high enough. 11. Digital commands protocol Hitachi-Metals Protocol This is a Digital communication protocol of Hitacih-Metals original commands to communicate personal computer and so on. Please see another document Z2R This documents express about Hitacih-Metals Protocol L Protocol This is a Digital communication protocol of another commands to communicate personal computer and so on. Please see another document Z2R This documents express about L Protocol. 12. Warranty and after service Warranty period The warranty period for the equipment is one year after our delivery from our factory. We will repair problems free of charge during this period when the device is returned to our factory Warranty coverage The warranty is limited to the repair of the equipment itself. Any incidental or consequential damage or loss caused by the equipment, directly or indirectly, is not covered. Within the warranty period, problems due to inappropriate or reckless handling, caused by fire, or natural disaster, or any other act of god or problems, due to repairs or modifications made by the users or other unauthorized personnel, the use of corrosive gas, highly reactive gas, problems from use or storage in inappropriate circumstances, or problems from causes clearly beyond the responsibility of Hitachi Metals, and cases where the cause of the problem is not clear, are up to Hitachi Metals to decide whether the repairs will be performed without charge After service If any questions arise during operation, contact your Hitachi Metals agent. 14

VALVES STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES

VALVES STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES STAINLESS STEEL HIGH PRESSURE CYLINDER VALVES SUS series ( FOR SPECIALTY GAS ) SUS/SCR series ( FOR SPECIALTY GAS ) FS/FSC series ( FOR SPECIALTY GAS ) AD-M/AD-P series ( FOR SPECIALTY GAS - CORROSIVE