Systems Engineering Case Study: Wafer Handling for Solar Cell Production Equipment

Transcription

1 Systems Engineering Case Study: Wafer Handling for Solar Cell Production Equipment by Gerrit Muller University of South-Eastern Norway-NISE Abstract This presentation provides a case study of the application of Systems Engineering in cascade of companies. The case study is artificial to avoid confindetiality issues, where elements from multiple real case studies are combined. Distribution This article or presentation is written as part of the Gaudí project. The Gaudí project philosophy is to improve by obtaining frequent feedback. Frequent feedback is pursued by an open creation process. This document is published as intermediate or nearly mature version to get feedback. Further distribution is allowed as long as the document remains complete and unchanged. status: planned pre- and post-process retailers consumers solar energy system (panel+) solar cell manufacturer (fab) metallization cell (system integrator) metallization process parts, e.g.: engines, belts, sensors, controller, control software energy providers measurement stakeholders everyone with a stake in the system, e.g. decision makers,managers, sales, service, purchasing, engineers, operators, cleaners, regulation, standards, quality assurance,... stakeholders have needs and concerns

2 Solar Cell Wafer Fab logistics & automation solar cell fab advanced process control computing & networking infrastructure metrology empty doping power chemicals climate infrastructure expose expose stepper stepper metallization antireflection coating with solar cells power, chemicals consumables, waste 2 Gerrit Muller SCSEfab

3 Metallization Cell handler measure metallization preprocess postprocess s in transport s out metallization metallization cell measure 3 Gerrit Muller SCSEcell

4 Value Chain consumers retailers energy providers solar energy system (panel+) solar cell manufacturer (fab) metallization cell (system integrator) metallization process pre- and post-process measurement parts, e.g.: engines, belts, sensors, controller, control software 4 Gerrit Muller SCSEvalueChain

5 Trends of past Decades 2000< >2010 transportation manual semi-manual automated operation manual remote automated process control expert statistical advanced process complexity medium medium-high high contamination and climate strict stricter very strict microclimates technology disciplines number of people in development chemical, mechanical dominant tens much more electronical, software hundreds integration loosely tight; also at fab rate of change years months 5 Gerrit Muller SCSEtrends

6 Key Drivers and Parameters solar cell manufacturer (fab) yield productivity cost per metallization cell (system integrator) metallization process process quality throughput reliability cost of operation speed of operation avoid contamination reliability avoid damage 6 Gerrit Muller SCSEkeyDrivers

7 Suppliers involved in Wafer Handler metallization cell (system integrator) system project manager systems engineer service trouble shoot and maintenance segment leader manufacturing system assembly and test system design mechanical eng. assembly and test software eng. PCB manufacturing 7 Gerrit Muller SCSEsuppliersWH

8 From Engineering Disciplines to System Qualities Systems Engineering: responsible for customer key drivers and key performance parameters of system imaging overlay productivity mechanical engineering mechatronics electrical engineering optics measurements embedded control software engineering 8 Gerrit Muller ASMLsystemsEngineering

9 Multiple Life Cycles solar cell manufacturer (fab) operation metallization cell (system integrator) feasibility system definition system design integrate and test production sales service upgrades spec proto component volume request design production 9 Gerrit Muller SCSElifeCycles