Trends in Automotive MEMS. Dr. Jan Peter Stadler Senior Vice President Engineering, Robert Bosch GmbH

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1 Dr. Jan Peter Stadler Senior Vice President Engineering, Robert Bosch GmbH

2 Agenda Market Overview Trends Higher Penetration Rates Miniaturization CE goes Automotive New Applications Summary 3

3 Market Size (mio USD) Trends in Automotive MEMS Automotive MEMS Market CAGR 2016/ % p.a. Others Humidity Bolometer µmirror Massflow Gyroscope Accel 500 Pressure Source: IHS Automotive MEMS Market Tracker H Market is dominated by pressure sensors, accelerometers and gyroscopes 4

4 Main Automotive Applications Pressure Sensors Acceleration Sensors Gyroscopes Engine Management Vehicle Dynamics Control Vehicle Dynamics Control Side Airbag Airbag Airbag 5

5 Main Automotive MEMS Sensors Acceleration sensors Angular rate sensors Inertial sensors Pressure sensors Mass flow sensors Central/peripheral acceleration sensor for occupant protection Rollover sensor for occupant protection Combined inertial sensor (3-axis) (yaw rate and acceleration sensor) for VDC and RoSe Low pressure sensor for engine control Mass flow sensor for engine management Low-g acceleration sensors for VDC, RoSe and active suspension Yaw rate sensor for VDC Mid-pressure sensor for transmission control Low-g acceleration sensor (3-axis) for navigation and non-safety applications Angular rate sensor (3-axis) for navigation and non-safety applications Combined inertial sensor (6-axis) (yaw rate and acceleration sensor) for navigation and non-safety applications Pressure sensor for occupant protection High pressure sensor for engine and brake systems 6

6 Bosch Sensata NXP (Freescale) Denso ADI Panasonic Infineon Murata Delphi STM Revenue (Mio USD) Trends in Automotive MEMS TOP10 Automotive MEMS Suppliers Bosch is clear #1 for automotive MEMS sensors Source: IHS Automotive MEMS Market Tracker H

7 Bosch the MEMS Pioneer Start of MEMS production in 1995 More than 7 billion MEMS sensors produced More than 1,000 MEMS patents 100% in-house from MEMS design to manufacturing Bosch is #1 MEMS sensor supplier worldwide 8

8 Agenda Market Overview Trends Higher Penetration Rates Miniaturization CE goes Automotive More than Moore New Applications Summary 9

9 Trend 1: Higher Penetration Rates The automotive MEMS success story started nearly 25 years ago Today a modern car is equipped with more than 50 MEMS sensors Automotive MEMS market bn USD 1.4bn sensors On average 15.3 MEMS sensors per car MEMS sensors will gain even more importance Higher penetration rates of current safety systems (ESP, airbag) and comfort systems (automatic transmission, A/C, active suspension, ) Tighter exhaust gas standards New applications MEMS Sensors per vehicle

10 17 Sensors 10 Sensors 27 Sensors Trends in Automotive MEMS Today: More than 50 MEMS sensors in 1 car 11 Engine Management e.g. Diesel 1 Mass flow sensor 1 Pressure sensor [Barometric air pressure] 2 Pressure sensors [Manifold air pressure, oil] 1 High pressure sensor [Common Rail] 1 Pressure sensor [Tank pressure] 1 Pressure sensor [Start/stop function] 2 Acceleration sensors [Active engine mounting] 1 Pressure sensor [Diesel particulate filter] Comfort 2 Pressure sensors [Automatic transmission] 5 Acceleration sensors [Active suspension] 1 Pressure sensor, 1 Humidity sensor, 2 Gas sensors [Air conditioning, air quality] 1 Angular rate sensor, 1 Acceleration sensor [Navigation] 3 Microphones [Telephone] 1 Bolometer Array [Night vision] 1 Acceleration sensor [Car alarm] (Seldom: 16 Pressure sensors (up to 8 pressure sensors per seat) Safety 2 High-g acceleration sensors [Airbag] 1 Angular rate sensor, 1 Low-g acceleration sensor [Roll-over sensing], 1 Acceleration sensor (Structure-borne sound sensor) [Airbag] 4 Acceleration sensors, 2 Pressure sensors [Peripheral airbag sensors] 2 Pressure sensors [Pedestrian safety] 1 Angular rate sensor, 1 Low-g acceleration sensor, 1 High pressure sensor [ESP (incl. ACC)] 1 Angular rate sensor [Active steering] 1 Acceleration sensor [ecall] 4 Pressure sensors, 4 acceleration sensors [TPMS] 1 Pressure sensor [Occupant detection] Standard equipment

11 Trend 2: Miniaturization SMI700 Combined inertial sensor Angular rate (Ωz) and 2 axis acceleration (ax, ay) sensor in 7 x 7 x 1.5 mm³ Ball grid array (BGA) package Footprint reduction of -70% to its predecessor Designed for premium active safety systems (ESP, driver assistance functions, etc.) High vibration robustness High offset stability Broad temperature range Designed for systems with ASIL level D Sensor is fit for the future well suited for automated driving SOP mm SOP 2010 Accelerometer 14.2 mm MM3R 11.2 mm Yaw rate sensor 13.5 mm footprint -54% SMI mm footprint -70% SMI mm SOP mm 7 mm 12

12 Trend 3: CE goes Automotive CE sensors are interesting due to their low price and small size They have drawbacks concerning temperature range ( 85 C), safety features, bindingness of parameters ( typical ), quality level, For non-safety automotive applications (navigation, car alarm, ) a transfer and upgrade of CE sensors is possible Example SMI130: 6-axis (3-axis gyroscope, 3-axis accelerometer) Inertial Measurement Unit in ultra-small LGA package (3.0x4.5 mm²) AEC-Q100 environmental testing Improved wafer and final testing Increased product availability (>10 years) Thus a footprint reduction of 72% compared to a 3-axis ESP safety sensor can be achieved ESP Safety Sensor SMI700 Ω z a xy 7 mm 7 mm 3 mm footprint -72% SMI130 Ω xyz a xyz 4.5 mm Non-Safety Sensor 13

13 Trend 4: New Applications (1/3) Wake-up sensor for Smart Car Keys Keyless go systems are based on smart car keys The keys can be equipped with low-cost acceleration sensors to detect a movement of the key to enable a sleep mode for the electronics while the key is at a rest prolongation of the battery s lifetime to double-check whether the key is in movement before the door will be opened theft protection against attempts to open the car s door with an extended radio signal ( relay station attack (RSA) ) 14

14 Trend 4: New Applications (2/3) New automotive head-light concept MEMS micro-mirror enables a new high-beam headlight A blue laser beam is deflected via an oscillating MEMS micro-mirror onto a phosphor element Thus a bright, very dynamic light pattern is excited This pattern is projected on the road This technology allows a very smooth control of the light distribution, e.g. to illuminate or shade specific sections Bosch is working together with Audi, Osram and Karlsruhe Institute of Technology (KIT) in a public funded project called ilas 15 Schematics of basic setup for laser scanning headlights based on a phosphor converter

15 Trend 4: New Applications (3/3) Automated Driving Sensor fusion of surround sensors (Radar, Lidar, Video) with inertial sensors necessary The performance level of the inertial sensors ( standard ESP performance vs. high performance) and the number of axes are still under discussion emobility New drive concepts will lead to a change in the MEMS sensor landscape decrease of pressure sensors for battery powered vehicles new hydrogen gas sensors for fuel cell powered vehicles 16

16 Agenda Market Overview Trends Higher Penetration Rates Miniaturization CE goes Automotive More than Moore New Applications Summary 17

17 Summary Automotive MEMS sensors: a growing market with ~3 bn USD size Today 15 MEMS sensors on average are used per vehicle Trends Higher penetration rates Miniaturization CE goes Automotive New applications 18