King Lai Hygienic Materials Co., Ltd. CDA/ Bulk Gas / UHP Gas Delivery System

Save this PDF as:
 WORD  PNG  TXT  JPG

Size: px
Start display at page:

Download "King Lai Hygienic Materials Co., Ltd. CDA/ Bulk Gas / UHP Gas Delivery System"

Transcription

1 King Lai Hygienic Materials Co., Ltd. CDA/ Bulk Gas / UHP Gas Delivery System

2 Introduction 1 King Lai Standard and Specifications 2 Cleaning & Packaging Process Tube & Pipe TUBE PIPE ASTM PIPE JIS PIPE LARGE DIAMETER High Purity Fittings Inch Type ELBOW 45 ELBOW EQUAL TEE REDUCING TEE CONCENTRIC REDUCER High Purity Fittings JIS Type ELBOW 45 ELBOW EQUAL TEE REDUCING TEE CONCENTRIC REDUCER Manual Weld Fitting 1520 ELBOW EQUAL TEE / REDUCING TEE CONCENTRIC / ECENTRIC REDUCERS Micro Fittings & VCR Components 2125 MICRO ELBOW MICRO REDUCING ELBOW MICRO TEE MICRO REDUCING TEE MICRO EXTENDED ELBOW MICRO TRIELBOW MICRO CROSS MICRO REDUCER GLAND FEMALE NUT / MALE NUT / GASKET Reference 26

3 Gas Delivery With years of experience in manufacturing high purity tubing and fittings, King Lai has a complete line of precision equipment and techniques to fulfill all strict regulations required for semiconductor industry. Our excellent product s inner surface finish, ovality, and perpendicularity are suitable for automatic orbital welding. King Lai tubing and fittings are designed and manufactured to provide the broadest range of semiconductor grade ultraclean application for ultra high purity systems. To achieve the maximum corrosion resistance, King Lai provides a wide range of electropolished tubing and fittings with extremely low oxidation while maximizing surface passivation. ln addition, King Lai s stateoftheart class 10 clean room furnishes all the essential purging and packaging required by the high purity semiconductor application. King Lai is ISO9001 certified and an active member of ASME BPE. Our profound knowledge in Biopharmaceutical industry is the basis in developing semiconductor grade tubing and fittings and becoming a SEMI member. King Lai supplies to America, Europe, and other major industrial countries worldwide. As a mature manufacturer, we persist in research and development as well as quality management in lowering production cost while generating the highest efficiency. We feature quick delivery, best quality, competitive pricing and excellent service for each and every fitting. If you need further information, please feel free to contact us. We appreciate your continuous interests in King Lai products. 1 Introduction

4 KING LAI Standard Specification INCH Tubes 1/8 OD ~ 6 OD (~152.4mm) Fittings 1/4 OD ~ 32 OD (~812.8mm) JIS Pipes 8A ~ 300A Fittings 8A ~ 300A DN Fitting DN20~DN800 Material 316L stock available 304L, VOD/VAR, VIM/VAR and other materials are available upon request Surface Finish Grading Based on the characteristic of finished products Electropolished (EP) F1 < 10 μin Ra (0.25 μm) Mechanical Polished (MP/BA) D2 < 15 μin Ra (0.38 μm) Mill Finished (AP) A0 < 40 μin Ra (1.00 μm) King Lai Standard and Specifications 2

5 Cleaning & Packaging Process Pressurized room Class 10,000 clean room Degreasing DI water rinsing Borescope inspection Appearance & size check Surface roughness measurement Interior surfaces are measured according to ASME B.1 Cleaning Inspection Cleaning Flushed with Heated DI water Cleaned with Nitrogen CDA Drying Nitrogen Drying Inspection Packaging Moisture content Oil density Particle count Capped Single bag nitrogen filled package Packaging Capped Bagged 3 Cleaning & Packaging Process

6 Class 100 clean room Class 10 clean room Flushed with Heated DI water Double bag package Inner bag filled with nitrogen Cleaning Drying Inspection Packaging UHP (EP) Nitrogen Moisture content Particle count CFOS (BA/MP) General Application (AP) Cleaning & Packaging Process 4

7 TUBE & PIPE TUBE PIPE ASTM PIPE JIS PIPE LARGE DIAMETER 5

8 TUBE * Spec: ASTM A269 / A632 / A270 * Material: 304L or 316L * Surface Finish: AP, BA, MP, EP OD (mm) T (mm) TYPE A3P A3P A3P A3P A3P A3P A3P A3P A3P A3P A3P A3P /8 (3.18) 1/4 () 3/8 () 1 /2 (12.7) 3/4 (19.1) 1.0 (25.4) 1.5 (38.1) 2.0 (50.8) 2.5 (63.5) 3.0 (76.2) 4.0 (101.6) 6.0 (152.4) (0.70) () () () () () () () () () (1) () Seamless Seamless Seamless Seamless Seamless/ Seamless/ Seamless/ PIPE ASTM * Spec: ASTM A312 * Material: 304L or 316L * Surface Finish: AP, BA, MP, EP PIPE JIS * Spec: JIS G3459 * Material: 304L or 316L * Surface Finish: AP, BA, MP, EP Nominal Pipe Size 8A 10A 15A 20A 25A 32A 40A 50A 65A 80A 90A 100A 125A 150A 200A 250A 300A OD (mm) Wall Thickness (mm) SCH 5S SCH 10S SCH 40S TYPE Seamless Seamless Seamless Seamless/ Seamless/ Seamless/ Seamless/ Seamless/ Nominal Pipe Size 8A1/4 10A3/8 15A1 /2 20A3/4 25A1 32A1 1/4 40A1 1 /2 50A2 65A2 1 /2 80A3 90A3 1 /2 100A4 125A5 150A6 200A8 250A10 300A12 OD (mm) Wall Thickness (mm) SCH 5S SCH 10S SCH 20S SCH 40S TYPE Seamless Seamless Seamless Seamless/ Seamless/ Seamless/ Seamless/ Seamless/ PIPE LARGE DIAMETER * Spec: JIS G3459/ASTM A312 * Material: 304L or 316L * Surface Finish: AP, BA, MP, EP Nominal Pipe Size 350A14 400A16 450A18 500A20 550A22 600A24 650A26 700A28 750A30 800A32 OD (mm) SCH 5S Wall Thickness (mm) SCH 10S SCH 20S SCH 40S TYPE Tube & Pipe TUBE, PIPE ASTM, PIPE JIS, PIPE LARGE DIAMETER 6

9 High Purity Fittings Inch Type 90 ELBOW 45 ELBOW EQUAL TEE REDUCING TEE CONCENTRIC REDUCER 7

10 45 ELBOW /4 3/8 1 /2 3/ EQUAL TEE /4 3/8 1 /2 3/ ELBOW /4 3/8 1 /2 3/ High Purity Fittings Inch Type 90 ELBOW, 45 ELBOW, EQUAL TEE

11 REDUCING TEE /8 x1/ /2 x1/ /2 x3/ /4 x1/ /4 x3/ /4 x1/ x1/ x3/ x1/ x3/ x1/ x3/ x1/ x3/ x x1/ x3/ x1/ x3/ x x x1/ x3/ x1/ x3/ x x x x1/ x3/ x1/ x3/ x x x x High Purity Fittings Inch Type REDUCING TEE

12 CONCENTRIC REDUCER /8 x1/4 1 /2 x1/4 1 /2 x3/8 3/4 x1/4 3/4 x3/8 3/4 x1/2 1.0 x1/4 1.0 x3/8 1.0 x1/2 1.0 x3/4 1.5 x1/4 1.5 x3/8 1.5 x1/2 1.5 x3/4 1.5 x x1/4 2.0 x3/8 2.0 x1/2 2.0 x3/4 2.0 x x x1/2 3.0 x3/4 3.0 x x x x3/4 4.0 x x x x High Purity Fittings Inch Type CONCENTRIC REDUCER 10

13 High Purity Fittings JIS Pipe Type 90 ELBOW 45 ELBOW EQUAL TEE REDUCING TEE CONCENTRIC REDUCER 11

14 90 ELBOW A 10A 15A 20A 25A 32A 40A 50A 65A 80A 100A ELBOW A 10A 15A 20A 25A 32A 40A 50A 65A 80A 100A EQUAL TEE A 10A 15A 20A 25A 32A 40A 50A 65A 80A 100A High Purity Fittings JIS Pipe Type 90 ELBOW, 45 ELBOW, EQUAL TEE

15 REDUCING TEE Ax8A 15Ax8A 15Ax10A 20Ax8A 20Ax10A 20Ax15A 25Ax8A 25Ax10A 25Ax15A 25Ax20A 32Ax8A 32Ax10A 32Ax15A 32Ax20A 32Ax25A 40Ax8A 40Ax10A 40Ax15A 40Ax20A 40Ax25A 40Ax32A 50Ax8A 50Ax10A 50Ax15A 50Ax20A 50Ax25A 50Ax32A 50Ax40A 65Ax15A 65Ax20A 65Ax25A 65Ax32A 65Ax40A 65Ax50A 80Ax15A 80Ax20A 80Ax25A 80Ax32A 80Ax40A 80Ax50A 80Ax65A 100Ax15A 100Ax20A 100Ax25A 100Ax32A 100Ax40A 100Ax50A 100Ax65A 100Ax80A Aø Aø Aø Aø Aø Aø Aø Aø80 13 REDUCING TEE High Purity Fittings JIS Pipe Type

16 CONCENTRIC REDUCER Ax8A 15Ax8A 15Ax10A 20Ax8A 20Ax10A 20Ax15A 25Ax8A 25Ax10A 25Ax15A 25Ax20A 32Ax8A 32Ax10A 32Ax15A 32Ax20A 32Ax25A 40Ax8A 40Ax10A 40Ax15A 40Ax20A 40Ax25A 40Ax32A 50Ax8A 50Ax10A 50Ax15A 50Ax20A 50Ax25A 50Ax32A 50Ax40A 65Ax15A 65Ax20A 65Ax25A 65Ax32A 65Ax40A 65Ax50A 80Ax15A 80Ax20A 80Ax25A 80Ax32A 80Ax40A 80Ax50A 80Ax65A 100Ax15A 100Ax20A 100Ax25A 100Ax32A 100Ax40A 100Ax50A 100Ax65A 100Ax80A A A A A A A A A High Purity Fittings JIS Pipe Type CONCENTRIC REDUCER

17 Manual Weld Fitting ELBOW EQUAL TEE REDUC ING TEE CONCENTRIC / ECENTRIC REDUCERS 15

18 Center to End (mm) C M Nominal Pipe Size D1xD2 Wall Thickness ( T1xT2 ) JIS (mm) ASTM (mm) SCH 5S SCH 10S SCH 40S SCH 5S SCH 10S SCH 20S ELBOW Center to End (mm) F B ½ ¾ 1 1 ¼ 1 ½ 2 2 ½ 3 3 ½ Wall Thickness ( T ) Manual Weld Fitting ELBOW, EQUAL TEE Nominal Pipe Size DN INCH JIS ASTM JIS (mm) ASTM (mm) SCH 5S SCH 10S SCH 20S SCH 40S SCH 5S SCH 10S SCH 20S SCH 40S OD F T 90 OD T B B 45 EQUAL TEE / / / / 0/0 0/0 0/0 0/0 2.80/ / / / / / / / / / / / / /6.50 / 3.4/ / / / / / / / / /6.5 DN 20x20 32x32 40x40 50x50 65x65 80x80 90x90 100x x x x x x x x x x x x x x x x800 INCH ¾ ¾ 1 ¼"x1 ¼ 1 ½"x1 ½" 2"x2" 2 ½"x2 ½" 3"x3" 3 ½"x3 ½ 4"x4" 5"x5" 6"x6" 8"x8" 10"x10" 12"x12" 14"x14" 16"x16" 18"x18" 20"x20" 22"x22" 24"x24" 26"x26" 28"x28" 30"x30" 32"x32" "x " ASTM 26.67x26.67 x 48.26x x x x88.90 x 0x x x x x x x x x x x x x x x x JIS x x x x x x 101.6x101.6 x 139.8x x x x x x x x4.2.0x x x x x x x / / / / / / / / / /9.3 / / / / 1/1 1/1 1/1 1/1 3.40/ / / / / / / / / / /6.50 1/1 3.40/ / / / / / / / / / / / / / /8.00 M D1 T1 C C D2 T2 SCH 20S OD 10.3/ / / / /15.9

19 Center to End (mm) C M Nominal Pipe Size D1xD2 Wall Thickness ( T1xT2 ) JIS (mm) ASTM (mm) SCH 5S SCH 10S SCH 40S SCH 5S SCH 10S SCH 20S DN INCH ASTM JIS SCH 20S REDUCING TEE 17 REDUCING TEE Manual Weld Fitting D2 T2 M D1 T1 C C ¾ ½ 1"x1" 1"x¾" 1"x½" 1 ¼"x1" 1 ¼"x¾" 1 ¼"x½" 1 ½"x1 ¼" 1 ½"x1" 1 ½"x¾" 2"x1 ½" 2"x1 ¼" 2"x1" 2"x¾" 2 ½"x2" 2 ½"x1 ½" 2 ½"x1 ¼" 2 ½"x1" 3"x2 ½" 3"x2" 3"x1 ½" 3"x1 ¼" 3 ½"x3" 3 ½"x2 ½" 3 ½"x3" 3 ½"x1 ½" 4"x3 ½" 4"x3" 4"x2 ½" 4"x2" 4"x1 ½" 5"x4" 5"x3 ½" 5"x3" 5"x3 ½" 5"x2" 6"x5" 6"x4" 6"x3 ½" 6"x3" 6"x2 ½" 8"x6" 8"x5" 8"x4" 8"x3 ½" 10"x8" 10"x6" 10"x5" 10"x4" "x " 26.67x x x x21.34 x33.40 x26.67 x x 48.26x x x x 60.33x x x x x 73.03x x x x x x88.90 x73.03 x60.33 x x 0x x x x x x x x x x x x x x x x x x x x x x0 x x x x x x x x x x x x x x x x x x x x x x 101.6x 101.6x 101.6x 101.6x x101.6 x x x x 139.8x 139.8x x 139.8x 139.8x 165.2x x 165.2x x 165.2x 216.3x x x 216.3x x x x x / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 3.4/ / / / / 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 2.8/ 3.4/ / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / /6.0 / / / / / / / / / / / / / / 1/ 1/ 1/ 1/ 1/1 1/ 1/ 1/ 1/1 1/1 1/ 1/ 1/1 1/1 1/1 1/ 1/ /1 /1 /1 /1 / /1 /1 /1 /1 /1 /1 3.40/ 3.40/ 3.40/ 3.40/1 1/1 /1 /1 /1 /1 /1 /1 3.06/ 3.06/ 3.06/ 3.40/ 3.40/ / / / / / / / / x15 25x25 25x20 25x15 32x25 32x20 32x15 40x32 40x25 40x20 50x40 50x32 50x25 50x20 65x50 65x40 65x32 65x25 80x65 80x50 80x40 80x32 90x80 90x65 90x50 90x40 100x90 100x80 100x65 100x50 100x40 125x x90 125x80 125x65 125x50 150x x x90 150x80 150x65 200x x x x90 250x x x x100

20 Center to End (mm) C M Nominal Pipe Size D1xD2 Wall Thickness ( T1xT2 ) JIS (mm) ASTM (mm) SCH 5S SCH 10S SCH 40S SCH 5S SCH 10S SCH 20S SCH 20S INCH 12"x10" 12"x8" 12"x65" 12"x5" 14"x12" 14"x10" 14"x8" 14"x6" 16"x14" 16"x12" 16"x10" 16"x8" 16"x6" 18"x16" 18"x14" 18"x12" 18"x10" 18"x8" 20"x18" 20"x16" 20"x14" 20"x12" 20"x10" 20"x8" 22"x20" 22"x18" 22"x16" 22"x14" 22"x12" 22"x10" 24"x22" 24"x20" 24"x18" 24"x16" 24"x14" 24"x12" 24"x10" 26"x24" 26"x22" 26"x20" 26"x18" 26"x16" 26"x14" 26"x12" 28"x26" 28"x24" 28"x22" 28"x20" 28"x18" 28"x16" 28"x14" 28"x12" 30"x28" 30"x26" 30"x24" 30"x22" 30"x20" 30"x18" 30"x16" 30"x14" 30"x12" 30"x10" 32"x30" 32"x28" 32"x26" 32"x24" 32"x22" 32"x20" 32"x18" 32"x16" 32"x14" ASTM x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x.00 71x x x x x x x x x x x x x x x x x x x x x x x JIS 318.5x x x x x x x x x x x x x x x x x x x4.2.0x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / 3.96/ 3.96/ 4.0/ / / 4.0/ 4.5/ / / 4.5/ 4.5/ / / / 5.0/ / / 5.0/ / / / / / / / / / / / / / / / / / / / / / / / / / / / / /4. 6.5/ /4. 8.0/4. 8.0/4. 8.0/4.19 DN 300x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x Manual Weld Fitting REDUCING TEE

21 T2 D2 T2 D2 H H T1 D1 T1 D1 CONCENTRIC / ECENTRIC REDUCERS DN 20x15 Nominal Pipe Size D1xD2 INCH ¾"x½" ASTM 26.67x21.34 JIS x Center to End (mm) H 38 SCH 5S / ASTM (mm) SCH 10S SCH 20S 1/1 Wall Thickness ( T1xT2 ) SCH 40S SCH 5S 2.87/ / SCH 10S / JIS (mm) SCH 20S 2.5/2.5 SCH 40S 2.9/2.8 25x20 1"x¾" 33.4x26.67 x / /1 3.38/2.87 / 2.8/ 3.0/ /2.9 25x15 1"x½" 33.4x21.34 x / /1 3.38/ / 2.8/ 3.0/ /2.8 32x25 1 ¼"x1" x33.4 x / 3.56/3.38 / 3.6/3.4 32x20 1 ¼"x¾" x26.67 x / /1 3.56/2.87 / 2.8/ 3.0/ /2.9 32x15 1 ¼"x½" x21.34 x / /1 3.56/ / 2.8/ 3.0/ /2.8 40x32 1 ½"x1 ¼" 48.26x x 64 / 3.68/3.56 / 3.7/3.6 40x25 1 ½"x1" 48.26x33.4 x 64 / 3.68/3.38 / 3.7/3.4 40x20 1 ½"x¾ 48.26x26.67 x 64 / /1 3.68/2.87 / 2.8/ 3.0/ /2.9 40x15 1 ½"x½" 48.26x21.34 x 64 / /1 3.68/ / 2.8/ 3.0/ /2.8 50x40 2"x1 ½" 60.33x48.26 x 76 / 3.91/3.68 / 3.5/ /3.7 50x32 2"x1 ¼" 60.33x x 76 / 3.91/3.56 / 3.5/ /3.6 50x25 2"x1" 60.33x33.4 x 76 / 3.91/3.38 / 3.5/ /3.4 65x50 2 ½"x2" 73.03x60.33 x 89 1/ 5.16/3.91 / 3.5/ /3.9 65x40 2 ½"x1 ½" 73.03x48.26 x 89 1/ 5.16/3.68 / 3.5/ /3.7 65x32 2 ½"x1 ¼" 73.03x x 89 1/ 5.16/3.56 / 3.5/ /3.6 65x25 2 ½"x1" 73.03x33.4 x 89 1/ 5.16/3.38 / 3.5/ /3.4 80x65 3"x2 ½" 88.9x73.03 x 89 1/1 5.49/5.16 / 4.0/ /5.2 80x50 3"x2" 88.9x60.33 x 89 1/ 5.49/3.91 / 4.0/ /3.9 80x40 3"x1 ½" 88.9x48.26 x 89 1/ 5.49/3.68 / 4.0/ /3.7 90x80 3 ½"x3" 101.6x x 102 1/1 5.74/5.49 / 5.7/5.5 90x65 3 ½"x2 ½" 101.6x x 102 1/1 5.74/5.16 / 4.0/ /5.2 90x50 3 ½"x2" 101.6x x 102 1/ 5.74/3.91 / 4.0/ /3.9 90x40 3 ½"x1 ½" 101.6x x 102 1/ 5.74/3.68 / 4.0/ / x90 4"x3 ½" x101.6 x /1 6.02/5.74 / 6.0/ x80 4"x3" x88.9 x 102 1/1 6.02/5.49 / 6.0/ x65 4"x2 ½" x73.03 x 102 1/1 6.02/5.16 / 4.0/ / x50 4"x2" x60.33 x 102 1/ 6.02/3.91 / 4.0/ / x100 5"x4" 141.3x 139.8x 127 /1 6.55/ / 6.6/ x90 5"x3 ½" 141.3x x /1 6.55/ / 6.6/ x80 5"x3" 141.3x x 127 /1 6.55/ / 6.6/ x65 5"x2 ½" 141.3x x 127 /1 6.55/ / 5.0/ / x125 6"x5" x x / / / / x100 6"x4" x 165.2x 140 /1 7.11/ / 7.1/ x90 6"x3 ½" x x /1 7.11/ / 7.1/ x80 6"x3" x x 140 /1 7.11/ / 7.1/ x150 8"x6" x x / / / / x125 8"x5" x x / / / / x100 8"x4" x 216.3x 152 /1 3.76/ / / 4.0/ / / Manual Weld Fitting CONCENTRIC / ECENTRIC REDUCERS

22 Center to End (mm) H Nominal Pipe Size D1xD2 DN INCH JIS ASTM Wall Thickness ( T1xT2 ) JIS (mm) ASTM (mm) SCH 5S SCH 10S SCH 20S SCH 40S SCH 5S SCH 10S SCH 20S SCH 40S 20 Manual Weld Fitting CONCENTRIC / ECENTRIC REDUCERS 250x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x600 10"x8" 10"x6" 10"x5" 12"x10" 12"x8" 12"x6" 14"x12" 14"x10" 14"x8" 14"x6" 16"x14" 16"x12" 16"x10" 16"x8" 16"x6" 18"x16" 18"x14" 18"x12" 18"x10" 18"x8" 20"x18" 20"x16" 20"x14" 20"x12" 20"x10" 20"x8" 22"x20" 22"x18" 22"x16" 24"x14" 24"x22" 24"x20" 24"x18" 24"x16" 26"x24" 26"x22" 26"x20" 26"x18" 28"x26" 28"x24" 28"x22" 30"x28" 30"x26" 30"x24" 30"x22" 32"x30" 32"x28" 32"x26" 32"x24" x x x x x x x x x x x x x x x x x x x x x4.2.0x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x x4.2.0x x x x x x x x x x x x x x x x x x x x x x x x x x x x / 3.40/ 3.40/ 3.96/ / 3.96/ 4.0/ / / 4.0/ 4.5/ / / 4.5/ 4.5/ / / / 5.0/ / / 4.19/ / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / /15.9

23 MicroFittings & VCR Components 21 MICRO ELBOW MICRO REDUCING ELBOW MICRO TEE MICRO REDUCING TEE MICRO EXTENDED ELBOW MICRO TRI ELBOW MICRO CROSS MICRO REDUCER GLAND FEMALE NUT MALE NUT GASKET

24 MICRO ELBOW / / / / / / MICRO REDUCING ELBOW /8 x1/ / /2 x1/ / /2 x3/ / MICRO TEE / / / / / / MICRO REDUCING TEE /8 x1/ / /2 x1/ / /2 x3/ / Micro Fittings MICRO ELBOW, MICRO REDUCING ELBOW, MICRO TEE, MICRO REDUCING TEE 22

25 MICRO TRIELBOW A / / B / / / / F flat L MICRO CROSS / / / / / / MICRO REDUCER /8 x1/ /2 x1/ /2 x3/ Micro Fittings MICRO EXTENDED ELBOW, MICRO TRIELBOW, MICRO CROSS, MICRO REDUCER

26 GLAND Short Tube Butt Weld T / / / / / / T GLAND Long Tube Butt Weld T / / / / / / GLAND Male Weld T / / /2 VCR Components GLAND 24

27 FEMALE NUT / /8,1 / MALE NUT / /8,1/ GASKET / /8,1 / VCR Components FEMALE NUT, MALE NUT, GASKET

28 Reference ASTM Specifications ASTM A269 Standard specification for seamless and welded austenitic stainless steel tubing for general service ASTM A632 Standard specification for seamless and welded austenitic stainless steel tubing (smalldiameter) for general service ASTM A479 Standard specification for stainless steel bars and shapes for use in boilers and other Pressure vessels ASTM A312 Standard specification for seamless, welded, and heavily cold worked austenitic stainless steel pipes ASTM A270 Standard specification for seamless and welded austenitic stainless steel sanitary JIS Standards JIS G3459 Standard steel pipes SEMA Specifications No BSTD Test method and helium leak rate No BSTD Analysis of surface composition and chemistry of electropolished stainless steel tubing Federal Standards No.209 Clean room, workstation and environment requirement ISO Standards ISO 9001:2000 certified ISO 14001:2004 certified ANSI Standards ANSI / ASME B.1 Surface construction ANSI Y14.5M Dimension and tolerance ANSI / ASQC Z1.4 Sampling inspection procedures and chart EN Specifications tubing SEMI Specifications SEMI F60 Test method for ESCA evaluation of surface composition of wetted surfaces of passivated 316L stainless steel components SEMI F72 Test method for Auger Electron Spectroscopy (AES) evaluation of oxide layer of wetted surfaces of passivated 316L stainless steel components SEMI F19 Specification for the surface condition of the wetted surfaces of stainless steel components EN Inspection documents Reference 26