Industries Served Thin film / Etching / Semiconductor / Laboratory Research Synchrotron Radiation / Photonic / Solar
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1 Vacuum System Components Seeking Advanced Solutions Industries Served Thin film / Etching / Semiconductor / Laboratory Research Synchrotron Radiation / Photonic / Solar Vacuum Cham ber Application: HV / UHV sealed components for both industrial and R&D grade Material: SS 304 / SS 304L / SS 316L / Aluminum alloy Surgace treatment: AP / Passivation / MP / EP / Bead blast Vacuum Weldment UHV Fitting Gas Line Weldment Vacuum Transfer Valve Vacuum Gate Valves Bubbl ers HV Fitting Vacuum Isolation Poppet Valve Viewpor ts T E L : FAX: info@kingl ai.com.tw Website: ai.com KING LAI HYGIENIC MATERI ALS CO., LTD ISO 9001:2008 C E R T I F I E D ISO 14001:2004 C E R T I F I E D More APP Selection King Lai Web
2 Vacuum Chambers Applications : High Vacuum / Ultra High Vacuum Material : SS 304 / SS 316L / Aluminum Max. Dimension 尺寸 : 6mx2.4mx1.7m Industry Served : Semiconductor Coating / Etching Laboratory Research Synchrotron Radiation Energy (Solar)
3 Vacuum Weldments Application : Vacuum Foreline & Pumping Line Material : SS304 / SS304L / SS316 / SS316L Vacuum Range : 760 Torr~1x10 Torr Surface for : EP / MP / Bead blast -12 High Purity Weldments Application : CDA / Bulk Gas / UHP Gas / Special Gas Material : SS316L Welding Environment : Class 100 Cleanroom Inspection : Helium Leak Test / Borescope Surface for : EP/BA/MP
4 Vacuum : HV grade Vacuum Transfer Valve Leak rate : 1E mbar l/s, He -9 Reliability : 2 million cycles(depend on process) Both Aluminum alloy or SUS valve bodies are available. Bellows sealed and bellows-less are available. Application for Vac to Vac transfer substrate ARM LOCK Auto- Mechanism - Stay in closed position against larger pressure Relocation difference. - Keep closed position losing the air power. Feature - Patented mechanism - Low maintenance cost - No gears, no need relocation - More reliable - Particle free seal ARM Lock System Open Utility Patent Closed
5 SMART Vacuum Gate Valves Product Introduction Vacuum gate valves are used most in protection of high vacuum pumps.it can also been used as transfer application in-between tubular vacuum chambers. New generation of gate valves- S.M.A.R.T is latest mechanism design for better Performance in vibration reduction. S.M.A.R.T Soft-shut Mechanism with Auto-Rail Transportation Technology. SMART Gate Valves are generate lowest particle and vibration, it will reduce any risks For any vacuum system required clean or precious environment. SMART series also provide the different version of actuator orientation, In- Axis. For different application in considering of small footprint, SMART is Small footprint design. All valves' position are lock by SMART lock system. Product Features S.M.A.R.T - Soft shut Mechanism Lowest vibration than other gate valve s mechanism, no spring, no expansion. * Lowest particle generation. - Minimize the friction of seal plate. * Optional welded bellows feedthrogh for better service life and cleanliness. SMART mechanism Seal plate moves with no vibration Normally seal plate closing by Spring or other mechanism s Expansion to close the gate. SMART lock system Position locked when the valve in open or close. Valve Lock Mechanism O-Ring Bearing Auto- Rail Transportation
6 Vacuum Isolation Poppet Valve Vacuum : HV grade Leak rate : 1E mbar l/s, He -9 Reliability : 1 million cycles 1 year Available for welded bellows sealed and Bellows-less Application for 1. Pumping line isolation 2. Foreline isolation Vacuum Ball Valve Technical Data Specification External leak rate Internal leak rate Operating pressure range Operating temperature Baking temperature Electronic component temperature Life cycling -9 1x 10 mbar I/s, He (CNC) -8 1x 10 mbar I/s, He (Casting) -6 1x 10 mbar I/s, He -6 1x 10 mbar~6 bar 0~200 C 150 C 0~90 C <30,000/year /(ATM)
7 Viewports Shutters & Quick Access Door Vacuum Quick Access Doors Vacuum : UHV grade Leak rate : 1E mbar l/s, He -9 Optional : 1. View Glass & 2. Blanker for both clear holes and tap holes Vacuum Viewport Shutters Vacuum : UHV grade Leak rate : 1E -10 mbar l/s, He Actuator : Manual, pneumatic & motorize Application for UHV viewport protection Vacuum Viewports Vacuum : UHV grade Leak rate : 1E -10 mbar l/s, He Glass material option : Kodial Application for UHV chamber observation
8 Instrument Fittings Two- Ferrules are Applicable in : Process Control Systems / Bulk Gas Systems / Semiconductor Tools / Petrochemical Suitable For : High Pressure / Shock Resistance / Vacuum / Thermal Shock Bubblers Make : HP grade Leak rate : 1E -10 mbar l/s, He Material : Body- SUS316L Fittings & Valves- Swagelok (or equlvalent) Application for Consumable liquid form materials For PECVD, MOCVD...Processing.
9 Vacuum L-Motion Transfer Valve Vacuum : HV grade Leak rate : 1E mbar l/s, He -9 Reliability : 1 million cycles(depend on process) Both Aluminum alloy or SUS valve bodies are available. Bellows sealed and bellows-less are available. Application for Vac to Vac transfer substrate Feature - L-Motion, valve in special motion for open/close different to single axis slit valve. L-Motion Lock mechaisn make sure valve lock in close position. - Easy for installation and mainteinace. - Low cost for replace gate seal plate. Closed position Open position 前擋板 後擋板 Utility Patent 閥體 Technical Data for Gate L-Valve Valve size 32x222 Acuator Air open Air close Open/Close time 1.5s Air compressor pressure 2 kgf/cm2 46x236 Air open Air close 1.5s 2 kgf/cm2 50x336 Air open Air close 1.5s 2~3 kgf/cm2 70x500 Air open Air close 1.5s 3~4 kgf/cm2
10 Vacuum Aluminum Gate Valve Vacuum : Mid Vacuum grade Leak rate : 1x mbar l/s, He 10-9 Reliability : 200,000 cycles(depend on process) Aluminum Alloy valve body with FKM O-ring sealed shaft. Application for Low/Mid Vacuum pumps. Feature - Low first initial and maintenance cost. - Easy to installation and maintenance. SIZE: ISO 63, 100, 160, 200, 250, 320 Utility Patent
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12 Business Scope Semiconductor Display Solar cell LED lighting Government R&D 2015/06
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