High Temperature Ferric Chloride Etching
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1 High Temperature Ferric Chloride Etching An Evaluation of the Process Randy Markle Chemcut
2 Materials Steel %C, 0.45%Mn, 0.25%Si 301 Stainless Steel 17%Cr, 7%Ni, 0.15%C 304 Stainless Steel 18.5%Cr, 9.5%Ni, 0.08%C 316 Stainless Steel 17%Cr, 12%Ni, 2.25%Mo, 0.08%C 410 Stainless Steel 12%Cr, 0.15%C 430 Stainless Steel 17%Cr, 0.12%C Kovar 29%Ni, 17%Co Brass Alloy 260 (Cartridge Brass) 70%Cu, 30%Zn Copper Alloy %Cu (min)
3 Test Image
4 Process Steps Shear to size 15.2 x 15.2 cm (6 x 6 ) Degrease Solvent clean Clean Hand scrubbed & chemical dip Laminate Hot roll laminator, FX930 Expose Tamarack 161B Develop Chemcut CC8000 Etch Chemcut Model 2315 Strip Chemcut CC8000 Cross section Buehler equipment Measure Video-scope Calculations Graph & Analyze
5 Developing Chemcut CC8000 Developing System Atotech Imagine DS 1.5% v/v Temperature 29.4 C (85 F) Spray Pressure 2.1 bars (30psi) Conveyor Speed 1.8 m/min (72ipm) Dwell Time 35 seconds
6 Model 2315
7 Etching Parameters Etching Solution RCE Solution Specific Gravity 1.41 (42 Be) Free Acid - ~ 0.6% ORP - ~580mv Spray Pressure 2.8 bars (40psi) Oscillation Rate 30spm Conveyor Speed 12.7 cm/min (5.0ipm) Etch Time 4.0 minutes
8 Stripping Chemcut CC8000 Stripping System RD-56 from RD Chemicals 10% solution Temperature 54.4 C (130 F) Spray Pressure 2.1 bars (30psi) Conveyor Speed 45.7 cm/min (18ipm) Stripping Time 2.0 minutes
9
10
11
12 127µ (5.0-mil) line 410 Stainless Steel
13 Calculations from Measurements
14 Top Etch Rate ºC (130ºF) 90.0 Etch Rate ( u/m in) Steel 301SST 304SST 316SST 410SST 430SST Kovar Brass Copper Opening Size (µ)
15 Top Etch Rate ºC (160ºF) Etch Rate ( u/m in) Opening Size (µ) Steel 301SST 304SST 316SST 410SST 430SST Kovar Brass Copper
16 Bottom Etch Rate ºC (130ºF) Etch rate (u/min) Opening Size (µ) Steel 301SST 304SST 316SST 410SST 430SST Kovar Copper Brass
17 Bottom Etch Rate ºC (160ºF) Etch Rate (u/min) Opening Size (µ) Steel 301SST 304SST 316SST 410SST 430SST Kovar Copper Brass
18 Copper - Bottom Etch Rate Etch Rate (u/min) ºC Opening Size (u) ºC 54.4ºC 65.6ºC Etch Temperature
19 Steel Etch Rates Increase %, 0.55µ/1ºC Top % Increase Etch R ate (u/m in) Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
20 Top % Increase 301 SST Etch Rates Increase %, 0.35µ/1ºC Etch R ate (u/m in) Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
21 Etch R ate (u/m in) SST Etch Rates Increase %, 0.3µ/1ºC Top % Increase 21.4 Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
22 316 SST Etch Rates Increase %, 0.5µ/1ºC Top % Increase Etch R ate (u/m in) Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
23 Etch R ate (u/m in) SST Etch Rates Increase %, 0.45µ/1ºC Top % Increase Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
24 40 35 Top % Increase 430 SST Etch Rates Increase %, 0.5µ/1ºC Etch R ate (u/m in) Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
25 Kovar Etch Rates Increase %, 0.5µ/1ºC 40.0 Etch R ate (u/m in) Top % Increase Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
26 80.0 Brass Etch Rate Increase %, 0.85µ/1ºC Top % Increase Etch R ate (u/m in) Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
27 Etch R ate (u/m in) Top % Increase Copper Etch Rates Increase %, 0.95µ/1ºC Bottom % Increase Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
28 Top Spray Top - Etch Rate Increase from 54.4ºC to 71.1ºC Opening Size in Microns Material 127u 190.5u 254u 317.5u 381u Increase 301 SST 38.1% 26.7% 20.0% 16.5% 11.4% 22.5% 304 SST 51.8% 29.3% 29.9% 30.3% 27.6% 33.8% 316 SST 22.3% 35.7% 43.2% 39.6% 41.1% 36.4% Bottom Spray Bottom - Etch Rate Increase from 54.4ºC to 71.1ºC Opening Size in Microns Material 127u 190.5u 254u 317.5u 381u Increase 301SST 48.2% 58.1% 49.3% 45.6% 37.3% 47.7% 304SST 19.4% 30.1% 32.1% 25.8% 28.1% 27.1% 316SST 39.9% 34.5% 31.9% 40.0% 44.8% 38.2%
29 Top Spray Top - Etch Rate Increase from 54.4ºC to 71.1ºC Opening Size in Microns Material 127u 190.5u 254u 317.5u 381u Increase 410 SST 22.3% 28.7% 32.0% 28.7% 28.1% 28.0% 430 SST 33.5% 35.3% 35.4% 37.2% 40.5% 36.4% Steel 33.1% 30.2% 39.9% 47.3% 46.7% 39.4% Kovar 38.7% 36.4% 45.1% 46.4% 41.9% 41.7% Bottom Spray Bottom - Etch Rate Increase from 54.4ºC to 71.1ºC Opening Size in Microns Material 127u 190.5u 254u 317.5u 381u Increase 410SST 34.6% 40.1% 38.1% 37.1% 29.3% 35.8% 430SST 43.4% 35.8% 34.4% 34.2% 30.7% 35.7% Steel 27.5% 27.7% 45.0% 29.4% 31.9% 32.3% Kovar 35.8% 34.1% 35.9% 33.2% 35.1% 34.8%
30 Top Spray Top - Etch Rate Increase from 54.4ºC to 71.1ºC Opening Size in Microns Material 127u 190.5u 254u 317.5u 381u Increase Brass 31.7% 25.0% 28.4% 31.2% 31.3% 29.5% Copper 32.4% 30.4% 33.3% 29.9% 32.6% 31.7% Bottom Spray Bottom - Etch Rate Increase from 54.4ºC to 71.1ºC Opening Size in Microns Material 127u 190.5u 254u 317.5u 381u Increase Brass 34.1% 31.0% 32.6% 32.3% 30.5% 32.1% Copper 47.8% 42.1% 44.7% 45.1% 44.5% 44.8%
31 Steel Undercut Ratios Undercut Ratios Top Spray Bottom Spray 1.0 St. Dev C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
32 301 SST Undercut Ratios Undercut Ratios Top Spray St. Dev Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
33 304 SST Undercut Ratios 3.5 Undercut Ratios Top Spray Bottom Spray 0.5 St. Dev C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
34 316 SST Undercut Ratios 3.0 Undercut Ratios Top Spray Bottom Spray St. Dev C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
35 410 SST Undercut Ratios 4.0 Undercut Ratios St. Dev Top Spray Bottom Spray Avergae C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
36 430 SST Undercut Ratios Undercut Ratios St. Dev Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
37 Kovar Undercut Ratios 3.0 Undercut Ratios St. Dev Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch temperature
38 Brass Undercut Ratios 4.0 Undercut Ratios St. Dev Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
39 Copper Undercut Ratios Undercut Ratios St. Dev Top Spray Bottom Spray C (130F) 60.0C (140F) 65.6C (150F) 71.1C (160F) Etch Temperature
40 Undercut Ratios Top Spray Top Spray Pre-etch Undercut Comparison as a Ratio of the Vertical Etch Etch Temp Opening (µ) Steel 301 SST 304 SST 316 SST 410 SST 430 SST Kovar Brass Copper ºC (130ºF) Undercut Ratio ºC (160ºF) Undercut Ratio
41 Undercut Ratios Bottom Spray Bottom Spray Pre-Etch Undercut Comparison as a Ratio of the Vertical Etch Etch Temp Opening (µ) Steel 301SST 304SST 316SST 410SST 430SST Kovar Copper Brass ºC (130ºF) Undercut Ratio ºC (160ºF) Undercut Ratio
42 Findings Etch rate increases with temperature increase Steel alloys 34.0% to 36.0% ~ 0.5µ for each 1º C Copper alloys 30.6% to 38.5% ~ 0.9µ for each 1º C No appreciable effect on undercut ratio Steel alloys 2.3 average Copper alloys 2.6 average
43 Discussion Footprint Equal Throughput 30% to 40% more Performance Equal to PVC equipment Cost More than PVC equipment Life expectancy Could be less
44 High Temperature Ferric Chloride Etching An Evaluation of the Process Randy Markle Chemcut
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