Pendulum control & isolation valve with CC-Link interface

Transcription

1 Pendulum control & isolation valve with CC-Link interface This manual is valid for the valve ordering number(s): GL (1 sensor input) GN (2 sensor inputs) AL (1 sensor input / 15V SPS) AN (2 sensor inputs / 15V SPS) HL (1 sensor input / PFO) HN (2 sensor inputs / PFO) CL (1 sensor input / 15V SPS / PFO) CN (2 sensor inputs / 15V SPS / PFO) SPS = Sensor Power Supply configured with firmware 650C.1E.15 PFO = Power Failure Option The fabrication number is indicated on each product as per the label below (or similar): sample picture made in Switzerland Fabrication No.:.. patented /.... A Fabrication number Explanation of symbols: Read declaration carefully before you start any other action! Keep body parts and objects away from the valve opening! Attention! Hot surfaces; do not touch! Product is in conformity with EC guidelines, if applicable! Loaded springs and/or air cushions are potential hazards! Disconnect electrical power and compressed air lines. Do not touch parts under voltage! Wear gloves! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! 1/84

2 Imprint Manufacturer Website Phone Fax Publisher Editor Print Copyright VAT Vakuumventile AG 2009 No part of these Instructions may be reproduced in any way (photocopies, microfilms or any other reproduction processes) nor may it be manipulated with electronic systems, duplicated or distributed without written permission from VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people. The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle third parties to consider these names to be unprotected and to use them freely. This is in accordance with the meaning of the laws and acts covering brand names and trademarks. 2/84

3 Contents: 1 Use of product Technical data Installation Unpacking Installation into the system Tightening torque Mounting with centering rings Mounting with O-ring in grooves Admissible forces Requirements to sensor connection Electrical connection Ground connection Sensor supply concepts Power and sensor connection (+24 VDC sensors) Power and sensor connection ( 15 VDC sensors) without optional SPS module Power and sensor connection ( 15 VDC sensors) with optional SPS module CC-Link interface connection LOGIC I/O Digital input Digital output Service port connection Operation Introduction Local operation Remote operation Safety mode Operation under increased temperature Behavior during power up Behavior in case of power failure Display information CC-Link LEDs Setup procedure CC-Link configuration LOGIC I/O configuration Valve and sensor configuration ZERO LEARN Close valve Open valve Position control Pressure control Pressure control operation with 2 sensors Tuning of control performance CC-Link interface connection setup CC-Link Handshaking Location of the handshaking bits Example of the handshaking by a PLC-program CC-Link interface (Process data cyclic communication) OUTPUT Buffer (Master PLC) INPUT Buffer (Master PLC) Communication and timing control between Master (PLC) and Station (Valve) PRESSURE and SENSOR READING allocation Trouble shooting Additional CC-Link warning Maintenance & repairs Maintenance procedures /84

4 5.2 Option board Durability of power fail battery Retrofit / replacement procedure Drawing Spare parts Control unit Valve unit Accessories Centering ring with Viton o-ring Warranty /84

5 1 Use of product This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. 1.1 Technical data Control and actuating unit Power input 1) (α) +24 VDC 0.5 V pk-pk max. [connector: POWER] [ A / G ] [ C / H ] 50 W max. (operation of valve with max. load) without PFO 4) 50 W plus 10 W for PFO 4) Sensor power supply 2) (β) [ A / C ] Input Output +24 VDC / 1500 ma max. ±15 VDC (±5%) / 1000 ma max. [connector: POWER] [connector: SENSOR] Sensor power supply 2) (β) [ G / H ] Input Output + 24 VDC resp. ± 15 VDC same as input but: 2.0 A max. at ± 15 VDC 1.5 A max. at + 24 VDC [connector: POWER] [connector: SENSOR] Calculation of complete power consumption: P tot = α + β whereas β depends on sensor supply concept and sensor power consumption. 5/84

6 Control and actuating unit (continuation) Sensor input Signal input ADC resolution Sampling time 0-10 VDC / Ri>100 kω 0.23 mv 10 ms [connector: SENSOR] Digital outputs 3) Input voltage Input current 70 VDC or 70 V peak max. 0.1 ADC or 0.1 A peak max. [connector: LOGIC I/O] PFO 4) battery pack [ C / H ] Charging time Durability 2 minutes max. up to C ambient; refer to «Durability of power fail battery» for details Compressed air supply 4-7 bar / psi (above ATM) Ambient temperature Pressure control accuracy 0 C to +50 C max. (<35 C recommended) 0.1% of sensor full scale DN 100 4" ( ) DN 160 6" ( ) DN 200 8" ( ) DN " ( ) Position resolution / position control capability 9155 steps steps steps steps (full stroke) (full stroke) (full stroke) (full stroke) Closing time throttling only 0.7 s typ. (full stroke) 0.8 s typ. (full stroke) 0.9 s typ. (full stroke) 0.9 s typ. (full stroke) Opening time throttling only 0.7 s typ. (full stroke) 0.8 s typ. (full stroke) 0.9 s typ. (full stroke) 0.9 s typ. (full stroke) Closing time throttling & isolation 3 s typ. (full stroke) 3 s typ. (full stroke) 3 s typ. (full stroke) 3 s typ. (full stroke) Opening time throttling & isolation 4 s typ. (full stroke) 4 s typ. (full stroke) 4 s typ. (full stroke) 4 s typ. (full stroke) 1) Internal overcurrent protection by a PTC device. 2) Refer to chapter «Sensor supply concepts» for details. 3) Refer to chapter «Schematics» for details. 4) PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. 6/84

7 Valve unit Pressure range at 20 C - Aluminum ( A ) 1 x 10E-8 mbar to 1.2 bar (abs) - Aluminum hard anodized ( H ) 1 x 10E-6 mbar to 1.2 bar (abs) - Aluminum nickel coated ( I ) 1 x 10E-8 mbar to 1.2 bar (abs) Leak rate to outside at 20 C - Aluminum ( A ) 1 x 10E-9 mbar l/s - Aluminum hard anodized ( H ) 1 x 10E-5 mbar l/s - Aluminum nickel coated ( I ) 1 x 10E-9 mbar l/s Leak rate valve seat at 20 C - Aluminum ( A ) 1 x 10E-9 mbar l/s - Aluminum hard anodized ( H ) 1 x 10E-4 mbar l/s - Aluminum nickel coated ( I ) 1 x 10E-9 mbar l/s Cycles until first service - Isolation cycles (open - closed - open) - Throttling cycles (open - max. throttle - open) Admissible operating temperature (unheated and under clean conditions) (unheated and under clean conditions) 10 C to +150 C Mounting position any (valve seat on chamber side is recommended) (valve seat to face chamber is recommended) Wetted materials - Body ( A ) Aluminum (AA6082) - Body ( H ) Aluminum (AA6082) hard anodized - Body ( I ) Aluminum (AA6082) nickel coated - Pendulum plate ( A ) Aluminum (AA6082) - Pendulum plate ( H ) Aluminum (AA6082) hard anodized - Pendulum plate ( I ) Aluminum (AA6082) nickel coated - Sealing ring ( A ) Aluminum (AA6082), (304L) - Sealing ring ( H ) Aluminum (AA6082) hard anodized, (304L) - Sealing ring ( I ) Aluminum (AA6082) nickel coated, (304L) - Other parts Stainless steel 316L ( or ), , (301), (304), , A2 (304) - Seals Viton (standard). Other materials available. Seal materials are declared on dimensional drawing of specific valve ordering number. Max. differential pressure on plate during isolation Max. differential pressure on plate during opening and throttling Min. controllable conductance (N 2 molecular flow) Dimensions DN 100 4" ( ) 1200 mbar in either direction DN 160 6" ( ) 1200 mbar in either direction DN 200 8" ( ) 1200 mbar in either direction DN " ( ) 1200 mbar in either direction 30 mbar 10 mbar 5 mbar 5 mbar 3 l/s 5 l/s 10 l/s 15 l/s Refer to dimensional drawing of specific valve ordering number (available on request) 7/84

8 2 Installation 2.1 Unpacking As this valve is a heavy component you should lift it with adequate equipment to prevent any injury to humans. Valves DN200 (8 ) and larger are equipped with attachment points (tapped holes). Add eyebolts to these attachment points for lifting. The attachment points are indicated on the dimensional drawing of the specific valve part number (available on request). Never lay the valve down with control and actuating unit downwards as it may be damaged. 2.2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts. The valve plate starts to move just after power is supplied. Do not connect or disconnect sensor cable when device is under power. Do not disconnect air supply when device is under power. Compressed air pressure must be in the range of: 4-7 bar / psi (above ATM). Use only clean, dry or slightly oiled air. Connection overview: Connectors at controller panel: 8/84

9 1. Install valve [1] into the vacuum system. Valve seat side should face process chamber. The valve seat side is indicated by the symbol " " on the valve flange. Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque». Caution: Do not admit higher forces to the valve than indicated under «Admissible forces». Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated on the dimensional drawing. 2. Connect compressed air supply to connection labeled IN located at actuator, see Figure 1 below. Connect compressed air return line connection labeled OUT located at actuator, see Figure 1 below. Caution: Compressed air pressure must be in the range of: 4-7 bar / psi (above ATM). Note: Use only clean, dry or slightly oiled air. IN / OUT connections are 1/8 ISO/NPT internal threads. 3. Install the ground connection cable at controller. Refer to «Electrical connection» 4. Install pressure sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given under «Requirements to sensor connection». 5. Connect sensor cable [3] to sensor(s) and then to valve (connector: SENSOR). Refer to chapter «Electrical connection» for correct wiring. Note: Input for second sensor is available on N version only. 6. Connect valve to remote control unit [4] (connector: CC-LINK V2 and LOGIC I/O). Refer to «CC-Link schematics» for correct wiring. 7. Connect power supply [5] to valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring. Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». 8. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft. This port (1/8 ISO/NPT) could be connected to the vacuum line, see Figure 2 below. 9. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device. 10. Perform «Setup procedure» to prepare valve for operation. Note: Without performing the setup procedure the valve will not be able to do pressure control. OUT IN intermediate pumping port Fig. 1 Fig. 2 9/84

10 2.3 Tightening torque Note: The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment, and lubrication. The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min. 1d), and the friction coefficient of the screw-flange connection ( total = ( screw thread-helicoil + under screw head)/2) is bigger than Lower friction coefficients may damage the valve, as the resulting preload force gets too high. Therefore for other friction coefficients the torque needs to be adapted. Please review design guidelines for Helicoil-Screw connections and make sure that screws in use are capable to withstand applied torques, are appropriate for the application and are not too long. Too long screws may damage the valve, the immersion depth should not exceed (hole depth 1 mm). Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following tables Mounting with centering rings Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) ISO-F max. tightening torque (Nm) ISO-F max. tightening torque (lbs. ft) hole depth (mm) hole depth (inch) Refer to «Spare parts and accessories» for centering rings ordering numbers. 10/84

11 2.3.2 Mounting with O-ring in grooves Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) ISO-F JIS ASA-LP ISO-F JIS ASA-LP max. tightening torque (Nm) max. tightening torque (lbs. ft) hole depth (mm) hole depth (inch) Admissible forces Forces from evacuating the system, from the weight of other components, and from baking can lead to deformation and malfunctioning of the valve. Stress has to be relieved by suitable means, e.g. bellows sections. Valve size Axial tensile or compressive force «F A» Bending moment «M» N lb. Nm lbf. DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) For a combination of both forces (F A and M) the values are invalid. Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. M F A 11/84

12 2.5 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: Inner diameter of connection pipe: Length of connection pipe: > = 10 mm < = 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present. Make also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. 12/84

13 2.6 Electrical connection Ground connection Recommendation for ground strap between controller and system (chassis) Material L (Length max.) B1 (min.) B2 (min.) d1 ( ) d2 ( ) copper tinned 200 mm 25 mm 25 mm 4.5 mm customized L B2 Ground strap System PE B1 d1 d2 Chassis (PE) (Protective Earth) Note: Connection plates of ground strap must be total plane for a good electrical contact! Note: The connection point at chassis (PE) must be blank metal (not coated). It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) 13/84

14 2.6.2 Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts 15 VDC from the 24 VDC. Concepts: External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC sensors. Refer to chapter «2.6.3 Power and sensor connection (+24 VDC sensors)» for schematic and correct wiring. External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supply 15 VDC sensors. Refer to chapter «2.6.4 Power and sensor connection ( 15 VDC sensors) without optional SPS module» for schematic and correct wiring. External + 24 VDC supplied to POWER connector is converted into 15 VDC by the valve internal SPS and supplied to SENSOR connector to supply 15 VDC sensors. Refer to chapter «2.6.5 Power and sensor connection ( 15 VDC sensors) with optional SPS module» for schematic and correct wiring. Valve versions: G / H SPS module not included A / C SPS module included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. 14/84

15 2.6.3 Power and sensor connection (+24 VDC sensors) [ G / H versions recommended] Sensor power wiring via controller Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the +24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 15/84

16 Sensor power wiring external Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the +24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 16/84

17 2.6.4 Power and sensor connection ( 15 VDC sensors) without optional SPS module [ G / H versions only] Sensor power wiring via controller Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Fuse 1A Fuse 1A Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 17/84

18 Sensor power wiring external Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 18/84

19 2.6.5 Power and sensor connection ( 15 VDC sensors) with optional SPS module [ A / C versions only] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 19/84

20 2.6.6 CC-Link interface connection CC-Link cable installation (example) first station stations last station PE = Protective Earth PE PE = Connector housing = Internal connection between «SLD and FG» TR = Terminal resister (Must be compatible to used CC-Link cable version!) Note: The valve can be defined as «first station», «stations» between first and last, or «last station». If the valve at first or last station, «TR» must be installed between 1 (DA) and 2 (DB). Note: The station type for VAT valves are: Version 2 Remote Device Station. 20/84

21 Preparing CC-Link connector Description Required tool 1. Remove «COMBICOM» connector (A) at valve controller sample picture 2. Prepare all parts of connector for installation Note: All parts of connector are supplemented in a plastic bag (407612), except «COMBICOM» connector from valve controller CC-Link connector overview D A A B C D E F E C A COMBICON D Strain-relief screw for shield mesh and cable B CC-Link wires E Connector housing VAT C Shield mesh F CC-Link cable 21/84

22 Install CC-Link cable at valve controller Description Required tool 3. Remove the cable coat carefully Cable Pos. A, x about 30mm Cable Pos. B, x about 40mm Note: Pos. see step 8 x Knife 4. Cut off the shield wire Side-cutting pliers 5. Cut off the aluminum shield and remove it Side-cutting pliers 6. Cut off the plastic and remove it Note: Take care to the wires. Do not damage the isolation of wires! Side-cutting pliers 15mm 7. Cut off the shield wires about 15mm 8. Separate the shield wires in two equal quantum and place them 180 opposite Side-cutting pliers 22/84

23 Description Required tool 9. Remove the wire coat carefully about 5mm Wire strippers 5mm Shield 10. Insert the cable(s) at connector hosing as shown in the pictures, see also chapter CC- Link connector Note: If valve in CC-Link network is at «first or last station» install the CC-Link cable at position A and close B with blind plug C. If valve in CC-Link network at «stations» install the CC-Link cables at position A and B. Pos. A Pos. B C 11. Fasten the strain-relief screw until the cable can not pulled out by manual force Screw driver size 4 23/84

24 12. Install the CC-Link wires, see also «Connector type» table below Description Required tool Note: If cable at pos. A (first or last station) install «TR» between 1 and 2 1 x blue to 1 1 x white to 2 1 x yellow to 3 Screw driver size 1 If cables at pos. A + B ( stations ) install 2 x blue to 1 2 x white to 2 2x yellow to 3 A 13. Close the cover of connector and fasten the screws a little Pozidriv screw driver size Connect the connector and fasten it with the screws at controller (sample picture) Allen Wrench 2.5 mm 15. Push the cover down to controller and fasten the cover screws (sample picture) Pozidriv screw driver size 2 24/84

25 Connector type: COMBICON 2.5 / 5 - ST 5, 08 with special VAT housing PIN interface connector Signal Color of isolator (CC-Link wires) Comment 1 DA Blue Positive RS485 RxD/TxD 2 DB White Negative RS485 RxD/TxD 3 DG Yellow Signal Ground 4 SLD - Cable Shield 5 FG - Functional Ground The CC-Link interface is galvanic isolated from control unit CC-Link network and cable Note: For detail information about «CC-Link cable, wiring and TR» refer to CC-Link homepage: > «CC-Link Cable Wiring Manual» 25/84

26 2.6.7 LOGIC I/O This interface allows for remote operation by means of a command set based on the CC-Link protocol. In addition there is a digital input and a digital output. Digital input may only be operated by a switch. Active digital input has: higher priority than CC-Link commands higher priority than Local commands Configuration with switch for digital input: Note: Do not connect other pins than indicated in the schematics above! Connector type: Binder M8 ( ). 26/84

27 2.6.8 Digital input Pin Function Signal type Description Priority This function will close the valve. Valve will be in interlock mode as long as function is activated. After deactivation of function it will remain effective until - converse CC-Link control command have been received 3 CLOSE VALVE Digital input 1) The function is activated when optocoupler is on in non inverted configuration. The function is activated when optocoupler is off in inverted configuration. 1 2) Configuration can be adjusted in local operation via service port with CV, CPA or Hyper terminal. Refer to chapter: «LOGIC I/O configuration». 1 DIGITAL GROUND Digital ground Ground for digital input. Connect switch to ground. See also «2.6.7 LOGIC I/OFehler! Verweisquelle konnte nicht gefunden werden.». 1) The digital input is digitally filtered. Filter delay is 50ms. This means that digital signal must be applied for at least 50ms to be effective. Refer to «2.6.7 LOGIC I/O» for details about input circuit. 2) Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. The digital input has higher priority than all CC-Link and Local commands Digital output Pin Function Signal type Description Priority 2 VALVE CLOSED 4 DIGITAL COMMON Digital output Digital common This function will indicate that the valve is closed. Common for all digital output. Connect + or terminal of source with common. See also «2.6.7 LOGIC I/O» Service port connection The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from or purchase our 'Control Performance Analyzer'. Alternatively the VAT Service Box 2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control. Refer also to «Local Operation» for details and to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2. Connector: Use only screws with 4-40UNC thread for fastening the service port connector! 27/84

28 3 Operation Operation is allowed after completion of the installation procedure only. 3.1 Introduction This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible Local operation Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'. These software are beneficial especially for setup, testing and maintenance. How to start: Connect service cable, start software and push button LOCAL to enable for operation. Then enter menu Setup/Sensor and do sensor configuration according to your application to make sure that you get the correct pressure displayed. Control view supports: - parameter setup - manual control - numeric monitoring - basic diagnostic 'Control Performance Analyzer' supports: - parameter setup - manual control - sequence control - numeric and graphical monitoring - data recording - data analysis - advanced diagnostic When communication to service port is interrupted the valve will change to remote operation. So when service cable will be disconnected or software will be shut down, the valve returns automatically to remote operation. This may result in an immediate movement of the valve depending on remote control. Refer to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2. 28/84

29 3.1.2 Remote operation This product is equipped with a CC-Link interface to allow for remote operation. See section «CC-Link Interface» for details. Control View software, 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. Note: In case Control View or Control Performance Analyzer software is connected to valve make sure REMOTE button is pushed to enable for remote operation. In case Service Box 2 is connected to valve make sure the LED on button LOCAL is OFF for remote operation Safety mode By means of an external switch (see connection diagrams «Electrical connection») the motor power supply can be interrupted. In this case the valve enters the safety mode. This motor interlock prevents the valve from moving (e.g. maintenance work). Data reading from the control unit remains possible. When motor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize. Display shows D C or D999. In this case synchronization cycle will be done when motor interlock is deactivated. Then Display shows INIT for a moment followed by SYNC. When safety mode is entered from operation (i.e. pressure control mode), the unit will automatically switch to position control mode and remain at current position. Once motor interlock is deactivated the unit remains in position control mode. 3.2 Operation under increased temperature This valve may be operated in the temperature range mentioned in chapter «Technical data». 3.3 Behavior during power up Valve position before power up: Closed (isolated) All other than closed (not isolated) Refer also to chapter «Display information». Reaction of valve: Valve power up configuration = closed (default) Valve remains closed. Display shows alternately C C and INIT. Synchronization will be done when first movement command is received. Valve power up configuration = open Valve runs to max. throttle position to detect the limit stops to synchronize. Display shows configuration of product resp. SYNC until synchronization is done. Valve position after power up is open. Valve runs to max. throttle position to detect limit stop for synchronization. Display shows configuration of product resp. SYNC until synchronization is done. Valve position after power up is closed Valve position after power up is open 29/84

30 3.4 Behavior in case of power failure Valve position before power failure: Reaction of valve: Without Power Failure Option (PFO) G A T V With Power Failure Option (PFO) H C U W Closed (isolated) Valve open or in any intermediate position Valve remains closed. Sealing ring moves down and blocks the pendulum plate at the current position. Valve will close or open depending on valve configuration *). Default is not defined. Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. 30/84

31 3.5 Display information There is a 4 digit display located on the panel. It displays configuration, status and position information. For details refer to following tables Display Power up: Description Digit 1 Digit 2 Digit 3 Digit 4 At first all dots are illuminated then configuration is displayed: Firmware version [e.g. 1E00] (1 st information for about 2s) Controller configuration (2 nd information for about 2s) In case D C or D999 is displayed, motor interlock is active. Refer to «Safety mode» for details. If valve is closed (isolated) display shows alternately C C and INIT. Synchronization will be done when first movement command is received. SYNC indicates that synchronization is running. 1 E 0 0 A = No or unknown busmodule detected I = CC-Link interface 0 = basic 1 = with SPS 1) 2 = with PFO 2) 3 = with SPS 1) and PFO 2) 1 = 1 sensor version 2 = 2 sensor version S Y N C 1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = optional Power Failure Option 31/84

32 Operation: Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 PRESSURE CONTROL mode POSITION CONTROL mode Valve closed Valve open Closed / open interlock (Valve closed / open by digital input) HOLD (position frozen) activated ZERO running LEARN running Safety mode established. Refer to «Safety mode» for details. Power failure P V C O I H Z L D F = valve position (%, 0 = closed / 100 = open) Errors: Description Digit 1 Digit 2 Digit 3 Digit 4 Compressed air failure (< 4 bar / 55 psi) A I R f Compressed air on exhaust A I R x Fatal error occurred E Error code. Refer to «Trouble shooting» for details 32/84

33 3.5.1 CC-Link LEDs # Item 1 Error LED 2 CC-Link Interface connector Run LED Run LED (3) State Off Green Red Meaning No network participation, timeout status (no power) Participating, normal operation Major fault (FATAL error) Error LED (1) State Off Red Red, flickering Red, flashing Meaning No error detected (no power) Major fault (Exception or FATAL event) CRC error (temporary flickering) Station Number or Baud rate has changed since startup (flashing) 33/84

34 3.6 Setup procedure To enable this valve for pressure control setup steps 1 to 5 must be performed. In case position control is required only it s sufficient to perform steps 1 to 3. Setup step 1 Power up Description Turn on external + 24VDC power supply (and external 15 VDC for sensor power supply if required). Refer to chapter «Behavior during power up» for details. 2 3 CC-Link configuration Valve and sensor configuration 1. Station Number 2. Transmission rate 3. Operational settings mode Refer to chapter «CC-Link configuration» for details. Basic configurations of the valve must be adapted according to application needs. Refer to chapter «Valve and sensor configuration» for details. 4 ZERO 5 LEARN Compensation of the sensor offset voltage. Refer to chapter «ZERO» for details. Determination of the vacuum system characteristic to accommodate the PID controller. Refer to chapter «LEARN» for details. Note: Without LEARN the valve is not able to run pressure control 34/84

35 3.6.1 CC-Link configuration Note: The station type for VAT valves are: Version 2 Remote Device Station. 1. Station Number The «station number» is used to distinguish between stations on the CC-Link network. Unique station numbers in consecutive order without duplication must be used, when assigning stations to the CC-Link network. The «station number» can be configured by Control View, Control Performance Analyzer, Universal Hyper Terminal or Service Box 2. The «set-command» is: «s:25xxx00000». The xxx value is the «station number». Valid range is 001 to 064. The «get-command» is: «i:25». The answer returns the node address «i:25xxx00000». The xxx value is the current «station number». Consider that the controller must be in local mode to accept the commands! After a «s:25» command is sent the module is reseted and starts up again. «c:0100» change into local mode «c:0101» change into remote mode Example «get-command» with Terminal: 35/84

36 2. Transmission rate Use the same «transmission rate» for all stations in the bus and also for master station. If any of the settings for at least one station is different, data link cannot be established normally. The «transmission rate» can select from 156 kbps / 625 kbps / 2.5 Mbps / 5 Mbps / 10 Mbps The «transmission rate» can be configured by Control View, Control Performance Analyzer, Universal Hyper Terminal or Service Box 2. The «set-command» is: «s:21xxx00000». The xxx value is the «transmission rate» shown in the table below The «get-command» is: «i:21». The answer returns the «transmission rate» «i:21xxx00000». The xxx value is the current «transmission rate». Consider that the controller must be in local mode to accept the commands! After a s:21 command is sent the module is reseted and starts up again. «c:0100» change into local mode «c:0101» change into remote mode Value Transmission rate kbps kbps Mbps Mbps Mbps 3. Operational settings mode The «operational settings mode» defines the following CC-Link parameters: CC-Link version Number of occupied stations: The number of stations (occupying one stations worth of memory area) used by a single slave station in a network. Extended cyclic settings: In the extended cyclic transmission (only Ver.2), the extended cyclic points can be set as 2 times, 4 times or 8 times of the normal cyclic transmission points. The VAT slave supports two combinations of the CC-Link parameter settings. Value Operational settings 001 CC-Link Ver.2 / Occupies 1 station / Octuple expanded cyclic 004 CC-Link Ver.2 / Occupies 4 stations / Double expanded cyclic The «operational settings mode» can be configured by Control View, Control Performance Analyzer, Universal Hyper Terminal or Service Box 2. The «set-command» is: «s:22xxx00000». The xxx value is the operational settings mode! The «get-command» is: «i:22». The answer returns the «operational settings mode» «i:22xxx00000». The xxx value is the current operational settings mode. Consider that the controller must be in local mode to accept the commands! After a s:22 command is sent the module is reseted and starts up again. «c:0100» change into local mode «c:0101» change into remote mode 36/84

37 4. Data type of pressure and position values (optional) The «data type of pressure and position» can be configured by Control View, Control Performance Analyzer, Universal Hyper Terminal or Service Box 2. The «set-command» is: «s:23xxy00000». The xxy value is the data type of a pressure and position signal. y: 0 = signed integer(32 bit), 1 = floating point (32 bit, IEEE-754 standard), default = 0 xx: signal number in the buffer xx Value 00 Pressure 01 Pressure sensor 1 02 Pressure sensor 2 (optional, only in case of 2 sensor version) 03 Position 04 Not used reserved 05 Not used reserved 06 Pressure setpoint 07 Position setpoint 08 Not used reserved 09 Not used reserved 10 Not used reserved 11 Not used reserved The «get-command» is: «i:23xx». The answer returns the data type of a pressure and position signal «i:23xxy00000». The y value is the current data type of buffer value xx. Example «get-command» with Terminal: Get the data Type of Position setpoint: Note: If at start up the data type value in the memory is out of range the default value is taken. In this case the data type is set to default value (0 = singed integer) and the get command i:23 add a string False : 37/84

38 5. Range of pressure and position values (optional) The «range of pressure and position values» can be adjusted. That means: For position values, the value for valve position CLOSE and the valve position OPEN can be set to a other ones then the default is. For pressure values, the value for physical 0 Volt and 10 Volt of the sensor output can be set to other values then the default is. The range of pressure and position values can be configured by Control View, Control Performance Analyzer or Universal Hyper Terminal. The «set-command» is: «s:24xxytoz». y: lower scale value, floating point, entry with a point. and - for negative values possible z: upper scale value, floating point, entry with a point. and - for negative values possible xx: signal number in the buffer xx Value Default lower scale value Default range Default upper scale value Min lower scale vlaue Min/Max range Max upper scale value 00 Pressure 0 1' ' ' Not used reserved Not used reserved Position 0 100'000-1' ' Not used reserved Not used reserved Pressure setpoint 0 1' ' ' Position setpoint 0 100'000-1' ' Not used reserved Not used reserved Not used reserved Not used reserved The «get-command» is: «i:24xx». The answer returns the range «i:24xxytoz». The xx is the value number, y value is the current lower scale value of buffer and value z the upper scale value. The format of y and z has following syntax:. _ Examples: i: to i: to i: to Example «get-command» with Terminal: Get the range of Pressure Sensor 1: 38/84

39 The «range of pressure and position values» is independent of the data type, equal for «signed integer» and «floating point». Note: The internal accuracy of valve is for all positions steps and for all pressures steps. If the range of pressure and position values is rising, the accuracy of pressure and position will not rise. There is only the gain factor between the VAT valve and the CC-Link Master which will be adapted. Note: (upper scale value - lower scale value) 1 Note: If at startup the scale values in the memory are out of range or the rule above is broken the default values are taken. In this case the get command i:24 add a string False : Example: s: to7890 set the range of position from (= closed position) to 7890 (= opened position) Example: s:24000to set the range of pressure from 0 (= 0 V) to (= 10 V) Example: s: to20.5 set the range of cluster valve freeze position from (=closed position) to 20.5 (=opened position) LOGIC I/O configuration The «logic digital input close valve» can adjusted. See also chapter «LOGIC I/O». The «logic digital input close valve» can be configured by Control View, Control Performance Analyzer, Universal Hyper Terminal or Service Box 2. The «set-command» is: «s: a0». The «get-command» is: «i:20». The answer returns the «operational settings mode» «i: a0». Description: code description data range s:20 command header a mode selection 0 = non inverted 1 = inverted 2 = disabled 39/84

40 3.6.3 Valve and sensor configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position in case of: o After power up, default is close. o Power failure, default is not defined. Only for versions that have Power Fail Option equipped [ C or H ]. o Network failure, default setting refer to individual product data sheet. ZERO function. This may be disabled or enabled. Default is enabled. Refer also to «ZERO». Sensor configuration for 2 sensor version [ F -....]. Refer also to «Pressure control operation with 2 sensors». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) 1. Do power up configuration in menu Setup / Valve. 2. Do power fail configuration in menu Setup / Valve. 3. Do network failure configuration Remote operation: Go to Tools / Terminal menu and use the following commands to change the configuration: s:04abcdefgh[cr] to read the configuration: i:04[cr] Note: Each element is separated with square brackets for clarity. Square brackets are not part of command syntax. All elements are ASCII characters. There are no spaces between the elements necessary. Command is case sensitive. Note: It s not possible to do Valve and sensor configuration via CC-Link. abcd e fgh reserved; do not change 0 = valve will close 1 = valve will open 2 = valve no change reserved; do not change 4. Enable or disable ZERO function in menu Setup / Sensor. 5. Do 2 sensor configuration in menu Setup / Sensor. Note: Read first current configuration and do not change reserved bits when sending new configuration. 40/84

41 3.6.4 ZERO ZERO allows for the compensation of the sensor offset voltage. When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2 sensor system both sensor inputs will be adjusted. A max. offset voltage of +/- 1.4 V can be compensated. The offset value can be read via local and remote operation. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Remote operation: (Refer to chapter «OUTPUT Buffer» > «GENERAL CONTROL SETPOINT» for details) 1. Wait until process chamber is evacuated and sensor signal is not shifting anymore. Go to menu Zero / ZERO and follow instructions. 2. In «OUTPUT Buffer» > «GENERAL CONTROL SETPOINT» set [ZERO] (value = 1) only short impulse ca. 1sec. 3. Wait until «ZERO EXECUTED» (value = 1) (see INPUT Buffer). Note: Do not perform ZERO as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result. Refer to manual of sensor manufacturer for warm up time. Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1 of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. 41/84

42 3.6.5 LEARN LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles. This characteristic depends on various parameters such as chamber volume, conductance and flow regime. Therefore it must be performed with a specific gas flow according to instruction below. The result of LEARN is a pressure versus valve position data table. This table is used to adapt the PID parameters. The data table is stored in the device memory which is power fail save. The data table can be up-/downloaded via Control Performance Analyzer software or remote interface. Due to encoding the data may not be interpreted directly. By an OPEN VALVE, CLOSE VALVE, POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Learn / LEARN menu and follow instructions. Note: Gasflow calculation according to recommendation below is done automatically based on inputs. Remote operation: (Refer to chapter: «OUTPUT Buffer» respective «INPUT Buffer» for details) 1. Set specific gas flow according to calculation below and wait until flow is stable. Autolearn does not need to be performed with the process gas. Instead N 2 or Ar may be used. 2. Go to «OUTPUT Buffer» > «CONTROL MODE SETPOINT» 3. Set «Learn» (value = 7) Note: No pressure limit is settable. Learn is always done up to the maximum sensor value which equals to 10V sensor input signal. 4. Wait until «LEARN PROCEDURE SUCCESSFULLY FINISHED» (value = 1) at «INPUT Buffer» Note: Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. If learn finished the valve goes to position mode. 42/84

43 Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Choose the applicable formula depending on units you are familiar with. q L = p SFS C min 2000 q L gasflow for learn [Pa m 3 /s] p SFS sensor full scale pressure [Pa] C min min. controllable conductance of valve [l/s], (refer to «Technical data») q L = p SFS C min 2 q L gasflow for learn [mbar l/s] p SFS sensor full scale pressure [mbar] C min min. controllable conductance of valve [l/s], (refer to «Technical data») q L gasflow for learn [sccm] q L = 39.4 p SFS C min p SFS sensor full scale pressure [Torr] min. controllable conductance of valve [l/s], (refer to «Technical data») C min 3.7 Close valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push CLOSE button Remote operation: (Refer to chapter «OUTPUT Buffer» > «CONTROL MODE SETPOINT» for details) 1. In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» 2. Select [Close] (value = 3) 3.8 Open valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push OPEN button Remote operation: (Refer to chapter «OUTPUT Buffer» > «CONTROL MODE SETPOINT» for details) 1. In «OUTUT Buffer» > «CONTROL MODE SETPOINT» 2. Select [Open] (value = 4) 43/84

44 3.9 Position control The valve position is directly controlled according to the position setpoint. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Remote operation: (Refer to chapter «OUTPUT Buffer» for details) 1. In «OUTPUT Buffer» > «POSITION SETPOINT» 2. Select a valid value Select or enter position setpoint 3. In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» 4. Select [Position] (value = 2) 3.10 Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow, gas type). Local operation: ( Control View resp. Control Performance Analyzer ) Select or enter pressure setpoint Remote operation: (Refer to chapter «OUTPUT Buffer» for details) 1. In «OUTPUT Buffer» > «PRESSURE SETPOINT» 2. Select valid value 3. In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» 4. Select [Pressure] (value = 5) 44/84

45 Pressure control operation with 2 sensors [applicable with N-.... version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 10:1 between the pressure gauges. Max. ratio is 100:1. High range respectively low range pressure gauge may be either connected to sensor 1 or sensor 2 input. It s required to do correct sensor configuration. Between 90 and 100% of the low range sensor full scale, the low range sensor is phased out while high range sensor is phased in during pressure rise. During pressure decrease the high range sensor is phased out while low range sensor is phased in. This maintains a functional response behavior in case of small calibration errors between the two sensors. The PRESSURE output in this range is a blend between both sensors. Note: Make sure that both sensors are calibrated. Note: Do not close optional gauge isolation valves during the transition phase between the sensors. 45/84

46 Tuning of control performance Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the procedure order. Start Set all paramters to default Pressure control ok? No Reset gain factor to 1.0 Gain factor adjustment Sensor delay adjustment Setpoint ramp adjustment Valve speed adjustment Gain factor adjustment Pressure control ok? No Pressure control ok? No Pressure control ok? No Pressure control ok? No End Contact VAT Required information for support: Go to Tools / Create Diagnostic File in Control View resp. Control Performance Analyzer and save file Pressure / flow / gas conditions to be controlled Chamber volume Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 46/84

47 Gain factor adjustment The gain factor effects: Stability Response time Default value is 1. Adjustment range is from to 7.5. Higher gain results in: faster response higher over- / undershoot of pressure Lower gain results in: slower response lower over- / undershoot of pressure Adjustment procedure: 1. Start with gain factor Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with lower (higher) gain factors until optimal pressure response is achieved and stability is ok. Note: Normally adjustments down to gain factors of 0.42 should lead to good results. Otherwise you may need to improve sensor connection. Refer to «Requirements to sensor connection». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Set gain factor in menu Setup / Control Parameter Remote operation: Note: It s not possible to do Gain factor adjustment via CC-Link Sensor delay adjustment Sensor delay adjustment effects: Stability Default value is 0. Adjustment range is from 0 to 1.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure. Note: Whenever possible sensors should be attached to the chamber according to «Requirements to sensor connection». This is the most effective measure against stability issues. If your gauge attachment fulfills these criteria do not use this parameter. Adjustment procedure: 1. Start with gain factor 1.0 and sensor delay 0s. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with higher sensor delays until best possible stability is achieved. 5. Adjustment gain factor again. Refer to «Gain factor adjustment». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select sensor delay. Remote operation: Note: It s not possible to do Sensor delay adjustment via CC-Link. 47/84

48 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure Response time Default value for Setpoint Ramp is 1. Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time. Pressure chart Without setpoint ramp optimizing With setpoint ramp optimizing P SFS P START P END t Choose the applicable formula depending on units you are familiar with. t = Setpoint Ramp Adjustment procedure: 1. Start with optimal gain factor and sensor delay time according to preceding tuning steps. 2. Control a typical pressure / flow situation. 3. Control a lower pressure. 4. Repeat from step 2 with longer setpoint ramps until best response is achieved. 5. Verify pressure control response for a setpoint raise situation. Note: In case a long ramp time is required to get optimal performance for pressure decrease situations it may be of advantage to apply different settings for decrease / raise control situations. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select setpoint ramp. Remote operation: Note: It s not possible to do Setpoint ramp adjustment via CC-Link. 48/84

49 Valve speed adjustment Valve speed effects: Response time Default value is Adjustment range is from 1 to This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Note: Normally best pressure control response is achieved with max. valve speed. In particular applications it may be of advantage to have a slower valve response. Note: OPEN and CLOSE are always done with max. speed. Adjustment procedure: 1. Use optimal gain factor, sensor delay time and setpoint ramp according to preceding tuning steps. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with slower valve speed until required response is achieved. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select valve speed. Remote operation: Note: It s not possible to do Valve speed adjustment via CC-Link. 49/84

50 3.11 CC-Link interface connection setup CC-Link Handshaking Before the CC-Link slave station (VAT valve) can be operated by the CC-Link Master (PLC), handshaking is necessary. If the handshake is not done, no data from the master will be transmitted to station. An indication of a successful handshaking is the bit «FIELDBUS DATA VALID» (= 1) in the INPUT buffer > GENERAL STATUS. The CC-Link Network failure is independent of the CC-Link handshaking. That means the Network failure is inactive if the handshaking is not done yet. Procedure: 1. If the network parameter are correct the slave station will set the bit Initial data processing request flag. 2. The master have to answer the request with the bit Initial data processing complete flag. Master PLC InitialDataProcessingRequest flag InitialDataProcessingComplete flag Slave Station VAT Valve 3. Now the station sets the bit Remote READY. That means the normal operation mode. Master PLC Slave station Remote READY flag VAT Valve Note: The Flag Remote READY from slave station must be set for normal operation. 50/84

51 Location of the handshaking bits Slave Master Master Slave Device Signal name Device No. Signal name RX m0 RY m0 RX m1 RY m1 RX m2 RY n2 RX m3 RY m3 RX m4 RY m4 RX m5 RY m5 RX m6 RY m6 RX m7 RY m7 RX m8 Not used RY m8 Not used RX m9 RY m9 RX ma RY ma RX mb RY mb RX mc RY mc RX md RY md RX me RY me RX mf RY mf to to RX(m+n)0 RY(m+n)0 RX(m+n)1 RY(m+n)1 RX(m+n)2 RY(m+n)2 RX(m+n)3 RY(m+n)3 Reserved RX(m+n)4 RY(m+n)4 Reserved RX(m+n)5 RY(m+n)5 RX(m+n)6 RY(m+n)6 RX(m+n)7 RY(m+n)7 RX(m+n)8 Initial data processing request flag RY(m+n)8 Initial data processing complete flag RX(m+n)9 Initial data setting complete flag RY(m+n)9 Initial data setting request flag RX(m+n)A Error status flag RY(m+n)A Error reset request flag RX(m+n)B Remote READY RY(m+n)B RX(m+n)C RY(m+n)C RX(m+n)D RY(m+n)D Reserved Reserved RX(m+n)E RY(m+n)E RX(m+n)F RY(m+n)F Table 1: Bit Memory Map Profile of VAT CC-Link slave m : Address assigned to the master module by the station number setting. This means that the address range for this slave begins at address m of the master. n : Dependent on the VAT Operational settings mode (number of occupied stations and number of extension cycles) Operational settings mode = 1 n = 0x7 (hex) Operational settings mode = 4 n = 0xD (hex) Example see chapter: Example of the handshaking by a PLC-program. 51/84

52 Example of the handshaking by a PLC-program The following program sends an answer to the VAT CC-Link station which return a Remote READY flag. It is important to correct register address is used. In this example the address for this slave station (valve) starts at 1000 (hex). So m = 100 (see capture Location of the handshaking bits). The Operational setting mode of the slave is 4 therefore n = D. Table 1 said RX(m+n)8 for the location of the Initial data processing request flag. So the address X10D8 is used. For the Remote Ready flag the address RX(m+n)B = X10DB is used. 52/84

53 3.12 CC-Link interface (Process data cyclic communication) The buffer naming is in view from customer (master) PLC. Data format: All signals are transmitted and received in intel format (low byte first). All one-byte signals use the least significant byte (LSB) OUTPUT Buffer (Master PLC) Overview Data model 16 bit (Word) Buffer Index Contents (MSB) Contents (LSB) 0 Pressure setpoint 1 2 Position setpoint Not used reserved Not used reserved Control mode setpoint 11 General control setpoint Not used reserved Not used reserved Not used reserved Not used reserved 19 Not used reserved 20 Not used reserved Not used reserved Note: For data consistency make sure your master PLC is supporting block guarantee of cyclic data per station. 53/84

54 Details Signal Type Name Start Word Byte Length Signal PRESSURE SETPOINT 0 4 Data Type signed integer (default) or floating point Valid Range (default), adjustable 1) Description In case of the valve is is pressure mode (CONTROL MODE = Pressure (5)), the signal is used as setpoint value. In case of the valve is is position mode (CONTROL MODE = Position (2)), the signal is used as setpoint value. Signal POSITION SETPOINT 2 4 signed integer (default) or floating point (default), adjustable 1) min signal value (default 0) = valve is closed max signal value (default 100'000) = valve is opened Note: If you want to close the valve completely, set bit CONTROL MODE SETPOINT = 3 (Close) (only 650) Signal Bitmap CONTROL MODE SETPOINT GENERAL CONTROL SETPOINT 10 1 unsigned integer = Position: Position control mode 3 = Close: The valve is closed 4 = Open: The valve is opened 5 = Pressure: Pressure control mode 6 = Hold: Valve is kept in current position; only valid in CONTROL MODE position and pressure 7 = Learn: Valve starts the internal learn procedure 11 2 boolean array - See bitmap table below - NOT USED (reserved) NOT USED (reserved) NOT USED (reserved) NOT USED (reserved) ) To adjust range refer to chapter: «Range of pressure and position values» 54/84

55 GENERAL CONTROL SETPOINT bitmap table: Bit 0 ZERO Description 0 = No Operation 1 = ZERO adjust, the actual pressure signal is set to internal pressure 0. The valid range for adjustment is limited to -1.4V +1.4! Otherwise the sensor must be adjusted! 1 NOT USED (reserved) - 2 PING PONG TX BIT PING PONG TX BIT transmitted from the master (PLC), is used to check the loop "master PLC - VAT station". See chapter: Communication and timing control between Master (PLC) and Station (Valve) 3 NOT USED (reserved) - Start mode Access mode locked bit End mode local Set bit: 0 1 locked locked Reset bit: 1 0 remote remote Set bit: 0 1 locked Example: 1. from local to locked 1st step : set bit (0 1) 4 ACCESS MODE LOCKED 2. from local to remote 1st step : set bit (0 1) 2nd step: reset bit (1 0) 3. from remote to locked 1st step : set bit (0 1) 4. from locked to remote 1st step : reset bit (1 0) 5-15 NOT USED (reserved) - 55/84

56 INPUT Buffer (Master PLC) Overview Data model Index Contents (MSB) Buffer Contents (LSB) 0 1 Pressure Pressure Sensor 1 Pressure Sensor 2 (optional, only in case of 2 sensor version) Position Not used reserved 10 Not used reserved Control mode 16-Bit (Word) 11 Fatal error Not used reserved General status 17 General warnings 18 Extended warnings 19 Not used reserved Not used reserved 20 Not used reserved Not used reserved Not used reserved 23 Not used reserved 24 Not used reserved 56/84

57 Details Signal Type Name Start Word Byte Length Data Type Valid Range Description Signal PRESSURE 0 4 signed integer (default) or floating point (default) (-2.7V..12.3V sensor signal), adjustable 1) In case of default valid range: Physical full scale value of the sensor (10 Volt) equals to (In case of 2 sensor operation the full scale of high range sensor equals to ) Signal PRESSURE SENSOR signed integer (default) or floating point (default) (-2.7V..12.3V sensor signal), adjustable 1) In case of default valid range: Physical full scale value of the sensor (10 Volt) equals to Signal PRESSURE SENSOR signed integer (default) or floating point (default) (-2.7V..12.3V sensor signal), adjustable 1) Optional, only in case of 2 sensor version. In case of default valid range: Physical full scale value of the sensor (10 Volt) equals to Signal POSITION 6 4 signed integer (default) or floating point (default), adjustable 1) min signal value = valve is closed max signal value = valve is opened The position (or for floating point) show an unknown valve position e.g. during synchronization at startup Signal CONTROL MODE 10 1 unsigned integer = init 1 = synch 2 = position 3 = close 4 = open 5 = pressure 6 = hold 7 = learn 8 = interlock open 9 = interlock close 10 = maintenance open 11 = maintenance close 12 = power failure 13 = safety 14 = fatal error Signal FATAL ERROR 11 2 unsigned integer 20,21,22,25,40 20 = no stop detected during synch mode 21 = valve blocked during synch mode 22 = valve blocked 25 = step loss during synch mode 40 = motor driver fault 57/84

58 Signal Type Name Start Word Byte Length Data Type Valid Range Description Bitmap GENERAL STATUS 16 2 Bitmap GENERAL WARNING 17 2 Bitmap EXTENDED WARNING 18 2 boolean array boolean array boolean array See bitmap table below See bitmap table below See bitmap table below - NOT USED (reserved) NOT USED (reserved) ) To adjust range refer to chapter: «Range of pressure and position values» GENERAL STATUS bitmap table: Bit 0 FIELDBUS DATA VALID Description 0 = Valve is not ready for communication (has not received the rising edge of "Initial Data Processing Complete") 1 = Valve is ready for communication (has received the rising edge of "Initial Data Processing Complete") 1 ZERO EXECUTED ZERO successful executed, active for 2 seconds 2 PING PONG RX-BIT 3 PRESSURE SIMULATION PING PONG RX BIT, is inverted and transmitted back to the fieldbus master (PLC), See chapter: Communication and timing control between Master (PLC) and Station (Valve) 0 = off 1 = on 4 PRESSURE SETPOINT REACHED 0 = The actual pressure is not within 2% of the pressure setpoint 1 = The actual pressure is within 2% of the pressure setpoint 5-6 NOT USED (reserved) ACCESS MODE 9 WARNINGS ACTIVE bit 8 bit = LOCAL 0 1 = REMOTE 1 0 = LOCKED 0 = No WARNINGS 1 = At least one WARNING of the warning bitmaps is active (GENERAL WARNING bitmap and EXTENDED WARNING bitmap) NOT USED (reserved) - 58/84

59 GENERAL WARNING bitmap table: Bit Description 0 SERVICE REQUEST Valve movement tight 1 LEARN DATA SET Learn data not present. Learn required for adaptive pressure control. 2 COMPRESSED AIR compressed air pressure < 4 bar (only for valves with compressed air) 3 POWER FAILURE BATTERY Not ready, voltage too low 4 SENSOR OVERLAPPING Sensor deviation between sensor 1 and sensor 2 >= ±10% 5 NOT USED (reserved) - 6 NOT USED (reserved) NOT USED (reserved) - 10 SENSOR MEASUREMENT UNIT FAULTY AD-converter of Sensor input 1 and/or 2 (optional, only in case of 2 sensor version) on the master board is faulty NOT USED (reserved) - 59/84

60 EXTENDED WARNING bitmap table: 0 1 Bit REMOTE CONTROL NOT POSSIBLE ACTUAL CONTROL MODE SETPOINT NOT ALLOWED Description Remote control not possible, access mode local is active, change to acces mode remote or access mode locked Not possible to switch the actual control mode to CONTROL MODE SETPOINT (for example control mode is interlock or fatal error) 2 ZERO DISABLED Using zero function not possible 3 PFO DEACTIVATED Power Failure Option is deactivated 4 NOT USED (reserved) OUT OF RANGE: PRESSURE SETPOINT OUT OF RANGE: POSITION SETPOINT Value of PRESSURE SETPOINT is out of range Value of POSITION SETPOINT is out of range 7-9 NOT USED (reserved) OUT OF RANGE: CONTROL MODE SETPOINT OUT OF RANGE: GENERAL CONTROL SETPOINT PROCESS DATA SETTING(S) NOT VALID Value of CONTROL MODE SETPOINT is out of range Value of GENERAL CONTROL SETPOINT is out of range Value of PROCESS DATA SETTING(S) not valid (DATA TYPE or RANGE of pressure and position signals) NOT USED (reserved) - 60/84

61 Station intern CC-Link Master intern Installation, Operating & Maintenance Instructions 3.13 Communication and timing control between Master (PLC) and Station (Valve) See chapter: «OUTPUT Buffer» > «PING PONG TX-BIT» and «INPUT Buffer» > «PING PONG RX-BIT». For visual overview see the diagram below. MASTER Station = PLC PLC Check if Ping pong Rx = Ping Pong Tx inverted Ping Pong Rx-bit Ping PongTx-bit CC-Link buffer input output Ping Pong Rx-bit Ping PongTx-bit Slave Station = Valve output input CC-Link buffer Ping Pong Rx-bit Ping PongTx-bit Microcontroller Ping Pong Rx = Ping Pong Tx inverted 61/84

62 0-10V 0-10V Installation, Operating & Maintenance Instructions 3.14 PRESSURE and SENSOR READING allocation Example of PRESSURE and SENSOR READING allocation: High range sensor 1 Torr PRESSURE '000 SENSOR 1 Low range sensor 100 mtorr 0 mtorr SENSOR 2 Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mtorr) and sensor 1 covers high range (1 Torr). Switchover between sensors is done automatically according to «Pressure control operation with 2 sensors». 62/84

63 4 Trouble shooting Failure Check Action No dots lighted on display 24 V power supply ok? Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Remote operation does not work - Local operation via service port active - Switch to remote operation. Display shows «E 20» (fatal error - limit stop of valve unit not detected) Display shows «E 21» (fatal error - rotation angle of valve plate limited during power up) Display shows «E 22» (fatal error - rotation angle of valve plate limited during operation) Display shows «E 40» (fatal error - motor driver failure detected) Display shows «D C» or «D999» Motor Interlock is open Display shows «SR» (Service Request) CLOSE VALVE does not work OPEN VALVE does not work Display shows «M C» Maintenance mode active Display shows «M100» Maintenance mode active POSITION CONTROL does not work COMPRESSED AIR FAILURE «AIRf» COMPRESSED AIR FAILURE at Exhaust «AIRx» - Safety mode active, check for D on display? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Replace actuator according to «Maintenance procedures». - Valve plate mechanically obstructed? - Resolve obstruction. - Valve plate mechanically obstructed? - Resolve obstruction. - Replace control unit according to «Maintenance procedures». - Motor power supplied? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Valve unit heavy contaminated or gate seal heavily sticking? - Safety mode active, check for D on display? - Maintenance mode active - Safety mode active, check for D on display? - Maintenance mode active - Safety mode active, check for D on display? - POSITION CONTROL selected, check for V on display? - No or too less air pressure on air input of valve - Wrong connection of compressed air input and output - No compressed air at output exhaust - Clean valve and/or replace gate seal according to «Maintenance procedures». - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Refer to Display shows «M C» in this table - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Refer to Display shows «M100» in this table - Pin 14 of service connector is connected to ground. Plate will close. Further movement of plate is blocked. 1) - Pin 13 of service connector is connected to ground. Plate will open. Further movement of plate is blocked. 1) - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select POSITION CONTROL mode. Refer to «Position control» for details. - Connect air or increase air pressure. Make sure that the air pressure is more than 4 bar (55 psi). - Connect compressed air in accordance chapter installation. - Contact your local VAT service centre for support. 1) Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8. 63/84

64 Failure Check Action Pressure reading is wrong or pressure reading is negative - Sensor(s) connected? - Refer to «Electrical connection». - 2 sensor version present at valve controller? - Check valve version on page 1. Verify configuration. Refer to «Setup procedure». - Refer to «Pressure control operation with 2 sensors». - ZERO done? - Perform ZERO when base pressure is reached. Refer to «ZERO» for details. ZERO does not work - Does sensor power supply provide enough power for sensor(s)? - Valve in open position, check for O on display? - Verify sensor supply voltage. - OPEN VALVE and bring chamber to base pressure before performing ZERO. - ZERO disabled? - Enable ZERO. Refer to «Valve and sensor configuration» for details. Pressure is not 0 after ZERO - Sensor voltage shifting? - Wait until sensor does not shift any more before performing ZERO. PRESSURE CONTROL does not work - System pumped to base pressure? - Sensor offset voltage exceeds ±1.4V - Safety mode active, check for D on display? - PRESSURE CONTROL selected, check for P on display? - OPEN VALVE and bring chamber to base pressure before performing ZERO. - Replace pressure gauge. - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select PRESSURE CONTROL mode. Refer to «Pressure control» for details. - LEARN done? - Perform LEARN. Refer to «Setup procedure» for details. PRESSURE CONTROL not optimal - Setup done completely? - Perform «Setup procedure» completely. - LEARN done? - Perform LEARN. Refer to «LEARN» for details. - ZERO performed before LEARN? - Perform ZERO then repeat LEARN. Refer to «Setup procedure» for details. - LEARN interrupted? - Repeat LEARN. Refer to «LEARN» for details. - Was gas flow stable during LEARN? - Repeat LEARN with stable gas flow. Refer to «LEARN» for details. - Tuning done? - Tune valve for application. - Refer to «Tuning of control performance» for details. - Is sensor range suited for application? - Use a sensor with suitable range (controlled pressure should be >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. 64/84

65 4.1 Additional CC-Link warning Failure detection with CPA or CV software Network failure: No CC-Link communication is active (warning 8) Check - CC-Link cable ok? - Connection to master ok? Action - Check CC-Link cable. - Check the CC-Link connection to master. If you need any further information, please contact one of our service centers. You can find the addresses on our website: 65/84

66 5 Maintenance & repairs Under clean operating conditions, the valve does not require any maintenance during the specified cycle life. Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:.. patented /.... A Fabrication number has always to be specified. All supplies (e. g. compressed air, electrical power) must be disconnected for removal/installation of the valve from/into the system. Even with disconnected supply, loaded springs and/or air cushions in cylinders can be potential hazards. Keep fingers and objects away from the valve opening! Products returned to VAT must be free of harmful substances such as e.g. toxical, caustic or micro-biological ones. If products are radioactively contaminated, fill in the VAT form «Contamination and Radiation Report» and send it with the product. The form is available at VAT. The maximum values indicated in the form must not be exceeded. 66/84

67 5.1 Maintenance procedures Keep fingers out of the valve during maintenance work. Use cleanroom gloves during maintenance work. Two preventive maintenance procedures are defined for this valve. These are: Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning Replacement of actuator and actuator shaft seals Required frequency of cleaning and replacement of seals is depending on process conditions. A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: unheated *) heated 80 C *) heated > 80 C *) isolation seals (gate and body seal of sealing ring) cycles 6 months but max cycles 3 months but max cycles actuator shaft seals cycles 6 months 3 months *) This figures are reference values for clean conditions under various temperatures. These values do not include any impact of the process. Therefore preventive maintenance schedule has finally to be checked for the actual process conditions. Prevent gap between body and sealing ring from air gun cleaning. Otherwise vacuum grease may be distributed and contaminate the valve. valve body gap sealing ring pendulum plate Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning Replacement of actuator and actuator shaft seals 67/84

68 Note: Electrical power and compressed air is required to perform steps 2 to 9 during disassembly respectively 9 to 2 during assembly. D e s c r i p t i o n Required tool 1. Vent both valve chambers. 2. Open the 4 bonnet screws and remove valve bonnet. Allen wrench 5mm 3. Open valve Caution: Stand away from valve pendulum plate moves out of the valve body. 4. Unfasten mounting screw for pendulum plate. (For reinstall the pendulum plate, tighten the mounting screw to block.) 5. Remove pendulum plate. mounting screw for pendulum plate open end wrench 13mm 6. With one hand press the MAINTENANCE BUTTON to lower the sealing ring, with your second hand unlock the sealing ring by pressing the handle. 7. Release MAINTENANCE BUTTON. 8. Remove sealing ring. 9. To prevent the shaft and retaining pins from moving during work, switch the valve to safety mode. Refer to «Safety mode» for details. Note: Retaining pins will move up. unlock lock maintenance button 68/84

69 10. Remove gate and body seal from sealing ring carefully with a soft tool. 11. Remove grease residues at sealing ring with lint-and dust-free towel a little soaked with isopropyl alcohol. Clean sealing ring and pendulum plate with lint-and dust-free towel little soaked with isopropyl alcohol or in an ultrasonic bath. 12. Clean out valve body with alcohol. Use an appropriate non metal tool with a cloth to enter valve body. Do not enter valve body with hands! Then blow out valve body with clean air. Do not directly expose seals (actuator and retaining pin feedthroughs) to air stream! 13. Clean or replace gate seal if necessary. Install gate seal to sealing ring without grease. 14. Clean or replace body seal if necessary. Lubricate body with the quantity of vacuum grease listed in the table to the right. 15. Install body seal into sealing ring. 16. Deposit vacuum grease on the bottom side of the body seal according to drawing below. Pay attention that the quantity of vacuum grease listed in the table to the right is distributed constantly over the whole circumference. D e s c r i p t i o n Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) gate seal body seal Quantity of grease [ml] Quantity of grease [ml] Required tool Soft tool (o-ring remover) VAT cleaning tool for valve body (Part No. see chapter spare parts / accessories) Soft tool (o-ring remover) Vacuum grease Vacuum grease Apply grease deposit on this side Vacuum grease 69/84

70 Note: For Replacement of actuator or actuator shaft seals, proceed with step 19 otherwise go to step Reassembly the valve in reverse order, step Close the valve bonnet, see steps D e s c r i p t i o n Required tool CV software 19. Release the valve from safety mode. Refer to «Safety mode» for details 20. Move the valve to position 50% (half opened) This is necessary, in order to dismount the actuator. See step Disable PFO option feature via 'Power Fail Status' in menu 'System' of CV or CPA software, and turn off the power or CPA software Service Box Disconnect 24VDC power. Wait for 60s, then disconnect cables and compressed air from valve actuator. 23. Unfasten all 4 controller screws and lift controller carefully from actuator. Allen Wrench 4 mm 70/84

71 D e s c r i p t i o n Required tool 24. Unfasten all 3 actuator screws and remove actuator. Allen Wrench 5 mm 25. Remove actuator shaft seals carefully with a soft tool. 26. Clean actuator feedthrough with alcohol. 27. Lubricate each o-ring groove with 0.1 ml vacuum grease. Pay attention that grease is distributed constantly over the whole circumference. Soft tool (o-ring remover) Vacuum grease 28. Clean or replace seals if necessary. Lubricate each o-ring with 0.05 ml vacuum grease. 29. Install o-rings. 30. Deposit 0.1 ml vacuum grease on each o-ring. Pay attention that grease is distributed constantly over the whole circumference. 31. Remove fixation kit and mounting screw for pendulum plate. 32. Clean screw and slightly lubricate thread. Then reinstall fixation kit. 33. Clean actuator shaft and lubricate it with 0.1 ml vacuum grease. Vacuum grease Vacuum grease 71/84

72 D e s c r i p t i o n Required tool 34. Install actuator Tighten actuator screws with 6 Nm. Remove vacuum grease from actuator shaft face after installation. Allen Wrench 5mm 35. Install controller Tighten the controller screws with 1 Nm. Connect cables at controller Connect compressed air at actuator Allen Wrench 4mm 36. Turn on power of controller. Note: valve moves to close position. 37. Open valve and install sealing ring and pendulum plate in reverse order as they had been disassembled (steps 8 to 3). If actuator was replaced, proceed with step 38, otherwise go to step Close valve and check if pendulum plate is in center of flange. Check can be done either visual or by measurement. When the valve is mounted to a tool, the bonnet has to be removed and the center position can be measured by a depth gauge (see picture). If the centering (or distance D) is not correct, proceed with step 39. D DN open end wrench 13mm Distance D [mm] between bonnet flange surface and pendulum plate ± ± ± ±0.5 72/84

73 39. If necessary adjust pendulum plate: a. Move pendulum plate a little towards open (e.g. position 1% of full stroke) b. Use adjustment screw at flange side of actuator (1 turn clockwise adjusts pendulum plate by about 3mm towards open). c. Restart valve in menu System/Recovery d. Check pendulum plate position according step 38 and redo adjustment procedure if necessary. D e s c r i p t i o n Adjusting screw mounted either in actuator position «B1 standard» or «B2 option» Required tool Allen wrench 2mm 40. Clean the valve sealing surface Lint-and dustfree towel a little soaked with isopropyl alcohol 41. Clean the valve bonnet o-ring Lint-and dustfree towel 42. Mount valve bonnet. Tightening torques for bonnet screws, see in table to the right. Max. torque 6 Nm Allen wrench 5mm 73/84

74 Durability [months] Installation, Operating & Maintenance Instructions 5.2 Option board The option board may or may not be equipped in your valve depending on the order. Refer to page 1 of this manual to check valve version. This board includes the optional modules for the valve which are: ±15VDC sensor power supply (SPS) Power failure option (PFO) It is available in 3 versions. These are: SPS module only PFO module only SPS and PFO module The modules may be retrofitted or replaced easily. The battery lifetime of the PFO module depends on the ambient temperature (see below). To assure PFO function the option board must be replaced after battery life has expired. For ordering number of the modules refer to «Spare parts and accessories» Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 degree C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 degree C, the corresponding life time curve will be somewhere in between the upper and the lower curve. Therefore please determine the equivalent maintenance period for replacing the UltraCap battery (Option board) w/o SPS module, valve unheated with SPS module, valve unheated w/o SPS module, valve heated with SPS module, valve heated Ambient temperature [ C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. 74/84

75 5.2.2 Retrofit / replacement procedure ESD Precaution! All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage! Top view on control and actuating unit with panel removed: Master board Option board Interface board Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! 75/84

76 Description Required tool 1. Remove the panel screws Pozidriv screw driver size 1 2. Remove female screw locks from POWER and SENSOR connectors Open end wrench 4.5 mm 3. Loosen and remove the LOCIC connector screw Open end wrench 10mm 4. Lift the panel carefully 76/84

77 Description Required tool 5. Pull out the option board a little 6. Push the connector release (1) a little down and disconnect fan cable (2) from option board Remove the interface board or replace it, if existing master board is defect 8. Remove the master board or replace it, if existing interface board is defect 9. Remove the option board or replace it, if existing option board is defect 10. Insert all boards in reverse order as they disassembled at correct positions (see steps 9 7) 77/84

78 Description Required tool 1. Reassemble the controller panel (see steps 6 3). 2. Tighten female screw locks from POWER and SENSOR connectors with 1.1 Nm (see step 2) 3. Tighten panel screws with 1.1 Nm (see step 1) Open end wrench 10mm Open end wrench 4.5 mm Pozidriv screw driver size 1 78/84

79 6 Drawing Bonnet seal 2 Body seal 3 Plate seal 4 Rotary feedthrough seals 5 Shaft feedthrough seals 6 Pendulum plate 7 Sealing ring 8 Actuator 9 Control unit 79/84