Pendulum control & isolation valve with RS485 interface with valve cluster functionality

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1 Pendulum control & isolation valve with RS485 interface with valve cluster functionality This manual is valid for the valve ordering number(s): TJ (Master / 1 sensor input) TK (Master / 2 sensor inputs) VJ (Master / 1 sensor input / ±15V SPS) VK (Master / 2 sensor inputs / ±15V SPS) UJ (Master / 1 sensor input / PFO) UK (Master / 2 sensor inputs / PFO) WJ (Master / 1 sensor input / ±15V SPS / PFO) WK (Master / 2 sensor inputs / ±15V SPS / PFO) GS (Slave) HS (Slave / PFO) SPS = Sensor Power Supply PFO = Power Failure Option Master configured with firmware 650C.1E.06 Slave configured with firmware 650C.1E.06 The fabrication number is indicated on each product as per the label below (or similar): sample picture made in Switzerland Fabrication No.:.. patented /.... A Fabrication number Explanation of symbols: Read declaration carefully before you start any other action! Keep body parts and objects away from the valve opening! Attention! Hot surfaces; do not touch! Product is in conformity with EC guidelines! Disconnect electrical power and compressed air lines. Do not touch parts under voltage! Loaded springs and/or air cushions are potential hazards! Wear gloves! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! 1/77

2 Contents: 1 Use of product Technical data Installation Unpacking Installation into the system Tightening torque Mounting with centering rings Mounting with O-ring in grooves Admissible forces Requirements to sensor connection Electrical connection Sensor supply concepts Power and sensor connection (+24 VDC sensors) Power and sensor connection (±15 VDC sensors) without optional SPS module Power and sensor connection (±15 VDC sensors) with optional SPS module Power connection for Slave valve only RS485 interface connection Service port connection Valve cluster connection Operation Introduction Individual valve control Individual valve status Freeze mode Position offset Local operation Remote operation Safety mode Operation under increased temperature Behavior during power up Behavior in case of power failure Display information Setup procedure Cluster address configuration Interface configuration Valve and sensor configuration ZERO LEARN Close valve Open valve Position control Pressure control Operation with 2 sensors Tuning of control performance RS485 interface Settings Schematics Connection cable drawing Digital inputs Command syntax Addressed communication Control commands Inquiry commands Setup commands Error messages Trouble shooting /77

3 5 Maintenance & repairs Maintenance procedures Option board Durability of power fail battery Retrofit / replacement procedure Drawing Spare parts Control unit Valve unit Accessories Centering ring with Viton o-ring Warranty /77

4 1 Use of product This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. 1.1 Technical data Control and actuating unit Power input 1) (α) +24 VDC 0.5 V pk-pk max. [connector: POWER] [ G / T / V ] 50 W max. (operation of valve with max. load) without PFO 4) [ H / U / W ] 50 W plus 10 W for PFO 4) Sensor power supply 2) (β) [ V / W ] Input Output +24 VDC / 1500 ma max. ±15 VDC (±5%) / 1000 ma max. [connector: POWER] [connector: SENSOR] Sensor power supply 2) (β) [ T / U ] Input Output + 24 VDC resp. ± 15 VDC same as input but: 2.0 A max. at ± 15 VDC 1.5 A max. at + 24 VDC [connector: POWER] [connector: SENSOR] Calculation of complete power consumption: P tot = α + β whereas β depends on sensor supply concept and sensor power consumption. 4/77

5 Control and actuating unit (continuation) Sensor input Signal input ADC resolution Sampling time 0-10 VDC / Ri>100 kω 0.23 mv 10 ms [connector: SENSOR] Digital inputs 3) ±24 VDC max. [connector: INTERFACE] Digital outputs 3) Input voltage Input current Breaking capacity 70 VDC or 70 V peak max. 0.5 ADC or 0.5 A peak max. 10 W max. [connector: INTERFACE] Analog outputs 3) 0-10 VDC / 1 ma max. [connector: INTERFACE] PFO 4) battery pack [ H / U / W ] Charging time Durability 2 minutes max. up to C ambient; refer to «Durability of power fail battery» for details Compressed air supply 4-7 bar / psi (above ATM) Ambient temperature Pressure control accuracy 0 C to +50 C max. (<35 C recommended) 0.1% of sensor full scale DN 100 4" ( ) DN 160 6" ( ) DN 200 8" ( ) DN " ( ) Position resolution / position control capability 9155 steps (full stroke) steps (full stroke) steps (full stroke) steps (full stroke) Closing time throttling only 0.7 s typ. (full stroke) 0.8 s typ. (full stroke) 0.9 s typ. (full stroke) 0.9 s typ. (full stroke) Opening time throttling only 0.7 s typ. (full stroke) 0.8 s typ. (full stroke) 0.9 s typ. (full stroke) 0.9 s typ. (full stroke) Closing time throttling & isolation 3 s typ. (full stroke) 3 s typ. (full stroke) 3 s typ. (full stroke) 3 s typ. (full stroke) Opening time throttling & isolation 4 s typ. (full stroke) 4 s typ. (full stroke) 4 s typ. (full stroke) 4 s typ. (full stroke) 1) Internal overcurrent protection by a PTC device. 2) Refer to chapter «Sensor supply concepts» for details. 3) Refer to chapter «Schematics» for details. 4) PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. 5/77

6 Valve unit Pressure range at 20 C - Aluminum ( A ) 1 x 10E-8 mbar to 1.2 bar (abs) - Aluminum hard anodized ( H ) 1 x 10E-6 mbar to 1.2 bar (abs) - Aluminum nickel coated ( I ) 1 x 10E-8 mbar to 1.2 bar (abs) Leak rate to outside at 20 C - Aluminum ( A ) 1 x 10E-9 mbar l/s - Aluminum hard anodized ( H ) 1 x 10E-5 mbar l/s - Aluminum nickel coated ( I ) 1 x 10E-9 mbar l/s Leak rate valve seat at 20 C - Aluminum ( A ) 1 x 10E-9 mbar l/s - Aluminum hard anodized ( H ) 1 x 10E-4 mbar l/s - Aluminum nickel coated ( I ) 1 x 10E-9 mbar l/s Cycles until first service - Isolation cycles (open - closed - open) - Throttling cycles (open - max. throttle - open) Admissible operating temperature (unheated and under clean conditions) (unheated and under clean conditions) 10 C to +150 C Mounting position any (valve seat on chamber side is recommended) (valve seat to face chamber is recommended) Wetted materials - Body ( A ) Aluminum (AA6082) - Body ( H ) Aluminum (AA6082) hard anodized - Body ( I ) Aluminum (AA6082) nickel coated - Pendulum plate ( A ) Aluminum (AA6082) - Pendulum plate ( H ) Aluminum (AA6082) hard anodized - Pendulum plate ( I ) Aluminum (AA6082) nickel coated - Sealing ring ( A ) Aluminum (AA6082), (304L) - Sealing ring ( H ) Aluminum (AA6082) hard anodized, (304L) - Sealing ring ( I ) Aluminum (AA6082) nickel coated, (304L) - Other parts Stainless steel (316L), (316L), , (301), (304), , A2 (304) - Seals Viton (standard). Other materials available. Seal materials are declared on dimensional drawing of specific valve ordering number. Max. differential pressure on plate during isolation Max. differential pressure on plate during opening and throttling Min. controllable conductance (N 2 molecular flow) Dimensions DN 100 4" ( ) 1200 mbar in either direction DN 160 6" ( ) 1200 mbar in either direction DN 200 8" ( ) 1200 mbar in either direction DN " ( ) 1200 mbar in either direction 30 mbar 10 mbar 5 mbar 5 mbar 3 l/s 5 l/s 10 l/s 15 l/s Refer to dimensional drawing of specific valve ordering number (available on request) 6/77

7 2 Installation 2.1 Unpacking As this valve is a heavy component you should lift it with adequate equipment to prevent any injury to humans. Valves DN200 (8 ) and larger are equipped with attachment points (tapped holes). Add eyebolts to these attachment points for lifting. The attachment points are indicated on the dimensional drawing of the specific valve part number (available on request). Never lay the valve down with control and actuating unit downwards as it may be damaged. 2.2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts. The valve plate may start to move just after power is supplied. Do not connect or disconnect sensor cable when device is under power. Slave Master [6] Link to next Slave [6] Link cable 1. Install valves [1] into the vacuum system. Valve seat side should face process chamber. The valve seat side is indicated by the symbol " " on the valve flange. Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque». Caution: Do not admit higher forces to the valve than indicated under «Admissible forces». Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated on the dimensional drawing. 7/77

8 2. Connect compressed air supply to connection labeled IN located at actuator. Connect compressed air return line connection labeled OUT located at actuator. Caution: Compressed air pressure must be in the range of: 4-7 bar / psi (above ATM). Note: Use only clean, dry or slightly oiled air. IN / OUT connections are 1/8 ISO/NPT internal threads. 3. Install pressure sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given under «Requirements to sensor connection». 4. Connect sensor cable [3] to sensor(s) and then to Master valve (connector: SENSOR). Refer to chapter «Electrical connection» for correct wiring. 5. Connect Master valve to RS485 [4] (connector: INTERFACE). Refer to «RS485 schematics» for correct wiring. 6. Enable terminating resistor in link adapter of first and last valve in the system. Refer to «Valve cluster connection» for details. 7. Connect link cable [6] between Slave valve(s) and Master valve (link adapter). Refer to «Valve cluster connection» for correct wiring. 8. Connect power supply [5] to each valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring. Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». 9. These valves have a double sealed rotary feedthrough with intermediate pumping port for the actuator shaft. This port (1/8 ISO/NPT) may optionally be connected to the vacuum line. 10. These valves may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device. 11. Perform «Setup procedure» to prepare valve cluster for operation. Note: Without performing the setup procedure the valve cluster will not be able to do pressure control. 8/77

9 2.3 Tightening torque Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of the valve Mounting with centering rings Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) ISO-F max. tightening torque (Nm) ISO-F max. tightening torque (lbs. ft) hole depth (mm) hole depth (inch) Caution: Make sure that screws are not too long otherwise the valve body may be damaged. Note: Use slightly lubricated screws. Refer to «Spare parts and accessories» for centering rings ordering numbers. 9/77

10 2.3.2 Mounting with O-ring in grooves Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) ISO-F JIS ASA-LP ISO-F JIS ASA-LP max. tightening torque (Nm) max. tightening torque (lbs. ft) hole depth (mm) hole depth (inch) Caution: Make sure that screws are not too long otherwise the valve body may be damaged. Note: These torques are valid if depth of the mounting screws is min. 1 x thread diameter. Make sure that screws in use are capable to withstand applied torques. Lubricate screws slightly. 2.4 Admissible forces Forces from evacuating the system, from the weight of other components, and from baking can lead to deformation and malfunctioning of the valve. Stress has to be relieved by suitable means, e.g. bellows sections. Axial tensile or Valve size compressive force «F A» Bending moment «M» N lb. Nm lbf. DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) For a combination of both forces (F A and M) the values are invalid. Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. M F A 10/77

11 2.5 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: Inner diameter of connection pipe: Length of connection pipe: > = 10 mm < = 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present. Make also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. 11/77

12 2.6 Electrical connection Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC. Concepts: External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC sensors. Refer to chapter «2.6.2 Power and sensor connection (+24 VDC sensors)» for schematic and correct wiring. External ±15 VDC supplied to POWER connector is feed through to SENSOR connector to supply ±15 VDC sensors. Refer to chapter «2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module» for schematic and correct wiring. External + 24 VDC supplied to POWER connector is converted into ±15 VDC by the valve internal SPS and supplied to SENSOR connector to supply ±15 VDC sensors. Refer to chapter «2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module» for schematic and correct wiring. Valve versions: T / U SPS module not included V / W SPS module included S slave valve, no sensor connection Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. 12/77

13 2.6.2 Power and sensor connection (+24 VDC sensors) [ T / U versions recommended] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 13/77

14 2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module [ T / U versions only Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 14/77

15 2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module [ V / W versions only] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 15/77

16 2.6.5 Power connection for Slave valve only [ S or valves configured as slave] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Note: Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! RS485 interface connection Refer to «Schematics» for wiring information Service port connection The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and a software from VAT. You can either use our freeware 'Control View', which can be downloaded from or purchase our 'Control Performance Analyzer'. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control. Refer also to «Local Operation» for details and to «Spare parts / Accessories» for ordering numbers of service cable and software. Connector: Use only screws with 4-40UNC thread for fastening the service port connector! 16/77

17 2.6.8 Valve cluster connection The valve cluster uses a two wire bus for the inter communication between the Master and the Slave valves. The valves are connected in a daisy chain and the bus must be terminated on both sides by a 120Ω resistor that can be set in the link adapter of the valve (refer to chapter « Link adapter»). 120Ω terminator category 5 link cable 120Ω terminator valve cluster daisy chain 17/77

18 Link adapter Link adapter 2x RJ45 jack (female) 1x Service port Inside view with terminating resistor Factory default setting Terminating resistor OFF 18/77

19 Setting for first and last valve in the chain Terminating resistor ON Link cable RJ45 pinning: active pins 4 and 5 Pin Description 1 not used 2 not used 3 not used 4 Data 5 Data 6 not used 7 not used 8 not used VAT recommends a cable with the following specification: Standard patch cable Category 5 or higher Double ended with shielded RJ45 connector Straight through connection 1:1 19/77

20 3 Operation Operation is allowed after completion of the installation procedure only. 3.1 Introduction The valve cluster solution is designed to operate multiple valves (exhaust lines) installed on a single process chamber in parallel. The system consists of one Master valve and a number of Slave valves. A valve cluster can have up to 255 valves. Each valve in the Cluster has a unique cluster address (see chapter «Cluster address configuration (setup step 2)» for details). A digital field bus system is used for the inter communication between the Master and the Slave valves. The Master valve is taking care of the pressure control, while the Slave valves are following the Master valves plate position. It can be operated in pressure control mode or in position control mode. In both cases local or remote operation is possible. Therefore the host system mainly communicates with the Master valve. The Master valve then takes care of controlling the Slave valves. All status information about the condition of each individual valve in the Cluster can be requested from the Master valve. For basic operation of the valve cluster the known standard command set is used. In addition there are special commands available for getting status information of each valve connected to the Cluster. Further it is possible to control individual Slave valves independently. For example, it is possible to close a single valve, while the valve cluster is still operational. There is also a parameter (Position offset) for fine tuning single exhaust lines. 120Ω terminator category 5 cables 120Ω terminator valve cluster daisy chain 20/77

21 3.1.1 Individual valve control This function is available on the Master valve only. It is possible to individually control any valve in the valve cluster. When commanding an individual valve to a certain position, make sure the target valve is set to Freeze mode previously (refer to chapter «3.1.3 Freeze mode»), so it will listen to individually addressed commands and execute them. Once set to Freeze Mode the valve will execute any command addressed directly to it, until it is released from Freeze Mode. Refer to chapter «Control commands» > «INDIVIDUAL VALVE CONTROL» for details Individual valve status This function is available on the Master valve only. The Master valve holds a record of information about the status of the complete valve cluster. Therefore status information about all valves (Master and Slave(s)) connected to the valve cluster is available from the Master valve. Refer to chapter «Inquiry commands» > «CLUSTER VALVE STATUS» for details Freeze mode This mode enables an individual valve to be controlled independent of the valve cluster. As soon as a valve is set to Freeze mode (freeze), it will remain in the last position it received from the Master valve before it was frozen. Now it is listening to commands addressed directly to it. Refer to chapter «Setup commands» > «FREEZE MODE» and «Inquiry commands» > «FREEZE MODE» for details. Note: The Freeze mode status is stored in a power save memory of each individual valve. In case valve was in freeze mode before power cycle (power off, power on), valve will stay in freeze mode after power up. Attention: As soon as a valve is unfrozen, the valve starts to follow the Master valves plate position, meaning the plate might move immediately Position offset The position offset can be used to add or subtract a certain offset value from the current position that is received from the Master valve. It might be helpful to compensate variations in pumping speed of the individual exhaust lines. Refer to chapter «Setup commands» > «CLUSTER POSITION OFFSET» for details. Note: The position offset value will be stored in a power save memory of each individual valve. 21/77

22 3.1.5 Local operation Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'. These software are beneficial especially for setup, testing and maintenance. How to start: Connect service cable, start software and push button LOCAL to enable for operation. Then enter menu Setup/Sensor and do sensor configuration according to your application to make sure that you get the correct pressure displayed. Control view supports: - parameter setup - manual control - numeric monitoring - basic diagnostic 'Control Performance Analyzer' supports: - parameter setup - manual control - sequence control - numeric and graphical monitoring - data recording - data analysis - advanced diagnostic When communication to service port is interrupted the valve will change to remote operation. So when service cable will be disconnected or software will be shut down, the valve returns automatically to remote operation. This may result in an immediate movement of the valve depending on remote control. Refer to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box Remote operation This product is equipped with a RS485 interface to allow for remote operation. See section «RS485 Interface» for details. Control View software, 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. Note: In case Control View or Control Performance Analyzer software is connected to valve make sure REMOTE button is pushed to enable for remote operation. In case Service Box 2 is connected to valve make sure the LED on button LOCAL is OFF for remote operation. 22/77

23 3.1.7 Safety mode By means of an external switch (see connection diagrams «Electrical connection») the motor power supply can be interrupted. In this case the valve enters the safety mode. This motor interlock prevents the valve from moving (e.g. maintenance work). Data reading from the control unit remains possible. When motor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize. Display shows D C or D999. In this case synchronization cycle will be done when motor interlock is deactivated. Then Display shows INIT for a moment followed by SYNC. When safety mode is entered from operation (i.e. pressure control mode), the unit will automatically switch to position control mode and remain at current position. Once motor interlock is deactivated the unit remains in position control mode. 3.2 Operation under increased temperature This valve may be operated in the temperature range mentioned in chapter «Technical data». 3.3 Behavior during power up Valve position before power up: Closed (isolated) All other than closed (not isolated) Refer also to chapter «Display information». Reaction of valve: Valve power up configuration = closed Valve power up configuration = open (default) Valve remains closed. Valve runs to max. throttle position to Display shows alternately C C and detect the limit stops to synchronize. INIT. Display shows configuration of product Synchronization will be done when first resp. SYNC until synchronization is movement command is received. done. Valve position after power up is open. Valve runs to max. throttle position to detect limit stop for synchronization. Display shows configuration of product resp. SYNC until synchronization is done. Valve position after power up is closed Valve position after power up is open 3.4 Behavior in case of power failure Valve position before Reaction of valve: power failure: Without Power Failure Option (PFO) G A T With Power Failure Option (PFO) H C U V W Closed (isolated) Valve remains closed. Valve will close or open depending Valve open or in any intermediate position Sealing ring moves down and blocks the pendulum plate at the current position. on valve configuration *). Default is Close. Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. 23/77

24 3.5 Display information There is a 4 digit display located on the panel. It displays configuration, status and position information. For details refer to following tables Display Power up: Description Digit 1 Digit 2 Digit 3 Digit 4 At first all dots are illuminated then configuration is displayed: 1 C 0 6 Firmware version [e.g. 1C06] (1 st information for about 2s) Controller configuration (2 nd information for about 2s) 0 = basic In case D C or D999 is displayed, motor interlock is active. Refer to «Safety mode» for details. 8 = RS485 interface 1 = with SPS 1) 1 = 1 sensor version If valve is closed (isolated) display shows alternately C C and INIT. If a cluster address is configured, the display shows alternately C C, INIT and MA 0 or SL xy. Synchronization will be done when first movement command is received. SYNC indicates that synchronization is running. 9 = RS485 interface with analog outputs 2 = with PFO 2) 3 = with SPS 1) and PFO 2) 2 = 2 sensor version S Y N C 1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = optional Power Failure Option 24/77

25 Operation: Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 PRESSURE CONTROL mode P POSITION CONTROL mode Valve closed Valve open Closed / open interlock (Valve closed / open by digital input) HOLD (position frozen) activated ZERO running LEARN running Safety mode established. Refer to «Safety mode» for details. V C O I H Z L D = valve position (%, 0 = closed / 100 = open) Power failure F Service request 1) S R Cluster address information Freeze mode MA = Master SL = Slave 1) SR is blinking alternatively with the actual mode display (e.g. C SR) FROZ = valve frozen 0... FE hex = cluster address Note: RxD / TxD activity of RS485 communication is displayed by 2 blinking dots in digit 2. The lower dot indicates RxD activity where the upper dot indicates TxD activity. The indication is not real time. Errors: Description Digit 1 Digit 2 Digit 3 Digit 4 Compressed air failure (< 4 bar / 55 psi) A I R f Compressed air on exhaust A I R x Fatal error occurred E Error code. Refer to «Trouble shooting» for details 25/77

26 3.6 Setup procedure To enable the valve cluster for pressure control setup steps 1 to 6 must be performed. In case position control is required only it s sufficient to perform steps 1 to 4. Setup step Description Valve 1 Power up 2 Cluster address configuration 3 Interface configuration 4 Valve and sensor configuration 5 ZERO 6 LEARN Turn on external + 24VDC power supply for all valves (and external ±15 VDC for sensor power supply on master valve if required). Refer to chapter «Behavior during power up» for details. Set the cluster address for each individual valve (Master and Slave(s)). This must be done via the service port on each valve. Refer to chapter «Cluster address configuration» for details RS485 parameters and digital inputs for valve may be changed from the default values. Refer to chapter «RS485 interface» for details. Basic configurations of the Master valve must be adapted according to application needs. Refer to chapter «Valve and sensor configuration» for details. Compensation of the sensor offset voltage. Refer to chapter «ZERO» for details. Determination of the vacuum system characteristic to accommodate the PID controller. Refer to chapter «LEARN» for details. Note: Without LEARN the valve is not able to run pressure control Master & Slave Master & Slave Master Master & Slave (valve configuration only) Master Master Cluster address configuration When setting up the valve cluster solution, each valve needs a unique cluster address. This address must be configured on each valve prior to operation via the service port by using the graphical interface (SETUP > CLUSTER) or the Terminal function of the Control View software or Control Performance Analyzer software. The used addresses must be in a consecutive order. Further the Master valve needs the information about the total number of valves (including itself) connected to the valve cluster. Note: Prior to sending the address command, set the valve to LOCAL operation. 26/77

27 Address setting via graphical interface (SETUP -> CLUSTER) Master valve Slave valve 27/77

28 Address setting via Terminal function Command: s : 1 0 a b c d CR LF code description data range s:10 Command header none a Cluster address high byte in hexadecimal code 0 F b Cluster address low byte in hexadecimal code 0 F c Number of valves high byte in hexadecimal code (Master only) 0 F d Number of valves low byte in hexadecimal code (Master only) 0 F Command examples: for Master valve Command: s: <cr><lf> Answer: x:10aaaaaabbbbbbbbccccccccddddefghhiiiikl<cr><lf> Description: Address allocation to Master valve (cluster address #0) and definition of number of valves (Master valve included!). In this case the valve cluster consists of 18 valves (12 hex). Screenshot: 28/77

29 for Slave valve Command: Answer: Description: Screenshot: s: <cr><lf> s:10<cr><lf> Address allocation for Slave valve #18 (12 hex). Address allocation: Each valve connected to the valve cluster system must have its unique cluster address. It is possible to address 255 cluster valves. The address allocation is as follows: Master valve: 00 Slave valves: 01 FE hex Note: The device address information must be configured when setting up the valve cluster. It is stored in a power save memory and therefore will be kept even the valve is disconnected from power. 29/77

30 3.6.2 Interface configuration Interface configuration must be adapted according to application needs. The factory default setting of the interface is shown in the tables below. Baud rate Data bits Stop bits Parity even Address Duplex Digital input OPEN Digital input CLOSE 10 half duplex Not inverted Not inverted Functionality of digital interlock inputs CLOSE VALVE and OPEN VALVE. These may be configured as not inverted, inverted or disabled. Default is not inverted. Refer also to «Digital inputs». Pressure and position range for RS485 communication must be selected. Default for pressure is Default for position is Local operation: ( Control View or Control Performance Analyzer ) Do configuration in menu Tools / Terminal. to change the configuration: [s:22][abbbcxxx][cr][lf] to read the configuration: [i:22][cr][lf] a 1 = RS485, 2 = RS485 / Point to Point bbb RS485 address c 0 = full duplex, 1 = half duplex xxx 000 (reserved, do not change) Note: Each element is separated with square brackets for clarity. Square brackets are not part of command syntax. All elements are ASCII characters. There are no spaces between the elements necessary. Command is case sensitive. Remote operation: (Refer to chapter «setup commands» for details) 1. Send INTERFACE CONFIGURATION 2. Send RANGE CONFIGURATION This function defines the RS485 interface configuration for the valve. Setup example Description: RS485 selected, half duplex operation, device address #015. Command: s: <cr><lf> Answer: s:22<cr><lf> 30/77

31 3.6.3 Valve and sensor configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position (CLOSE or OPEN) after power up sequence. Default is Close. Definition of valve plate position (CLOSE or OPEN) in case of a power failure. Default is Close. Only for versions that have Power Fail Option equipped [ U ; W ]. Note: This definition must be set on Master and Slave valves. ZERO function (Master only). This may be disabled or enabled. Default is enabled. Refer also to «ZERO». Sensor configuration for 2 sensor version [ K -....] (Master only). Refer also to «Pressure control operation with 2 sensors». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) 1. Do power up configuration in menu Setup / Valve. 2. Do power fail configuration in menu Setup / Valve. 3. Enable or disable ZERO function in menu Setup / Sensor. 4. Do sensor configuration in menu Setup / Sensor. Remote operation: (Refer to chapter «setup commands» for details) 1. Send VALVE CONFIGURATION 2. Send SENSOR CONFIGURATION ZERO This function is available on the Master valve only. ZERO allows for the compensation of the sensor offset voltage. When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2 sensor system both sensor inputs will be adjusted. A max. offset voltage of +/- 1.4 V can be compensated. The offset value can be read via local and remote operation. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to menu Zero / ZERO and follow instructions. Remote operation: (Refer to chapter «control commands» resp. «setup commands» for details) 1. Send OPEN VALVE 2. Wait until process chamber is evacuated and sensor signal is not shifting anymore. 3. Send ZERO Note: Do not perform ZERO as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result. Refer to manual of sensor manufacturer for warm up time. Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1 of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. 31/77

32 3.6.5 LEARN This function is available on the Master valve only. LEARN adapts the PID controller of the Master valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles. This characteristic depends on various parameters such as chamber volume, conductance and flow regime. Therefore it must be performed with a specific gas flow according to instruction below. The result of LEARN is a pressure versus valve position data table. This table is used to adapt the PID parameters. The data table is stored in the device memory which is power fail save. The data table can be up-/downloaded via Control Performance Analyzer software or remote interface. Due to encoding the data may not be interpreted directly. By an OPEN VALVE, CLOSE VALVE, POSITION CONTROL or PRESSURE CONTROL command the routine may be interrupted. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Learn / LEARN menu and follow instructions. Note: Gasflow calculation according to recommendation below is done automatically based on inputs. Remote operation: (Refer to chapter «control commands» resp. «setup commands» for details) 1. Send OPEN VALVE 2. Set specific gas flow according to calculation below and wait until flow is stable. LEARN does not need to be performed with the process gas. Instead N 2 or Ar may be used. 3. Send LEARN (with pressure limit set to full scale) Note: Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. 32/77

33 Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Choose the applicable formula depending on units you are familiar with. q L = q L = p SFS C min n 2000 p SFS C min n 2 q L gasflow for learn [Pa m 3 /s] p SFS sensor full scale pressure [Pa] C min min. controllable conductance of valve [l/s], (refer to «Technical data») n number of valves in valve cluster q L gasflow for learn [mbar l/s] p SFS sensor full scale pressure [mbar] C min min. controllable conductance of valve [l/s], (refer to «Technical data») n number of valves in valve cluster q L = 39.4 p SFS C min n q L gasflow for learn [sccm] p SFS sensor full scale pressure [Torr] C min min. controllable conductance of valve [l/s], (refer to «Technical data») n number of valves in valve cluster 3.7 Close valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push CLOSE button Remote operation: (Refer to chapter «RS485 control commands» for details) Send CLOSE VALVE 3.8 Open valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push OPEN button Remote operation: (Refer to chapter «RS485 control commands» for details) Send OPEN VALVE 3.9 Position control The valve position is directly controlled according to the position setpoint. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Select or enter position setpoint Remote operation: (Refer to chapter «RS485 control commands» for details) Send POSITION CONTROL 33/77

34 3.10 Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow, gas type). Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Select or enter pressure setpoint Remote operation: (Refer to chapter «RS485 control commands» for details) Send PRESSURE CONTROL Operation with 2 sensors [applicable for K version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 10:1 between the pressure gauges. Max. ratio is 100:1. It is required that the high range pressure gauge is connected to sensor 1 input and the low range pressure gauge to the sensor 2 input. Between 90 and 100% of the low range sensor full scale, the low range sensor is phased out while high range sensor is phased in. This maintains a functional response behavior in case of small calibration errors between the two sensors. The pressure output in this range is a blend between both sensors. For monitoring purpose each sensor signal may be read out individually. Note: Make sure that both sensors are calibrated. Note: Do not close optional gauge isolation valves during the transition phase between the sensors. 34/77

35 Tuning of control performance Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the procedure order. Start Set all paramters to default Pressure control ok? No Reset gain factor to 1.0 Gain factor adjustment Sensor delay adjustment Setpoint ramp adjustment Valve speed adjustment Gain factor adjustment Pressure control ok? No Pressure control ok? No Pressure control ok? No Pressure control ok? No End Contact VAT Required information for support: Go to Tools / Create Diagnostic File in Control View resp. Control Performance Analyzer and save file Pressure / flow / gas conditions to be controlled Chamber volume Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 35/77

36 Gain factor adjustment The gain factor effects: Stability Response time Default value is 1. Adjustment range is from to 7.5. Higher gain results in: faster response higher over- / undershoot of pressure Lower gain results in: slower response lower over- / undershoot of pressure Adjustment procedure: 1. Start with gain factor Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with lower (higher) gain factors until optimal pressure response is achieved and stability is ok. Note: Normally adjustments down to gain factors of 0.42 should lead to good results. Otherwise you may need to improve sensor connection. Refer to «Requirements to sensor connection». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Set gain factor in menu Setup / Control Parameter Sensor delay adjustment Sensor delay adjustment effects: Stability Default value is 0. Adjustment range is from 0 to 1.0s. Remote operation: (Refer to chapter «setup commands» for details) Send PID CONTROLLER CONFIGURATION Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure. Note: Whenever possible sensors should be attached to the chamber according to «Requirements to sensor connection». This is the most effective measure against stability issues. If your gauge attachment fulfills these criteria do not use this parameter. Adjustment procedure: 1. Start with gain factor 1.0 and sensor delay 0s. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with higher sensor delays until best possible stability is achieved. 5. Adjustment gain factor again. Refer to «Gain factor adjustment». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select sensor delay. Remote operation: (Refer to chapter «setup commands» for details) Send PID CONTROLLER CONFIGURATION 36/77

37 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure Response time Default value for Setpoint Ramp is 1. Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time. Pressure chart Without setpoint ramp optimizing With setpoint ramp optimizing P SFS P START P END t Choose the applicable formula depending on units you are familiar with. t = Setpoint Ramp Adjustment procedure: 1. Start with optimal gain factor and sensor delay time according to preceding tuning steps. 2. Control a typical pressure / flow situation. 3. Control a lower pressure. 4. Repeat from step 2 with longer setpoint ramps until best response is achieved. 5. Verify pressure control response for a setpoint raise situation. Note: In case a long ramp time is required to get optimal performance for pressure decrease situations it may be of advantage to apply different settings for decrease / raise control situations. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Remote operation: (Refer to chapter «setup commands» for details) Go to Setup / Control Parameter menu. Select setpoint ramp. Send PID CONTROLLER CONFIGURATION 37/77

38 Valve speed adjustment Valve speed effects: Response time Default value is Adjustment range is from 1 to This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Note: Normally best pressure control response is achieved with max. valve speed. In particular applications it may be of advantage to have a slower valve response. Note: OPEN and CLOSE are always done with max. speed. Adjustment procedure: 1. Use optimal gain factor, sensor delay time and setpoint ramp according to preceding tuning steps. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with slower valve speed until required response is achieved. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select valve speed. Remote operation: (Refer to chapter «setup commands» for details) Send VALVE SPEED 3.11 RS485 interface Settings The factory default setting of the RS485 interface might be changed to fit the application by using the Control View software, the Control Performance Analyzer software or the Service Box Schematics This interface allows for remote operation by means of a command set based on the RS485 protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources. 38/77

39 Active digital inputs have higher priority than RS485 commands. a) Configuration with switches for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! 39/77

40 b) Configuration with voltage source for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! 40/77

41 Connection cable drawing Half duplex T+ T- 120Ω 120 Ω T+ T- R+ 12 R+ R- HOST 13 R- Valve Full duplex T+ T- 120Ω R+ R- R+ R- 120 Ω T+ T- HOST Valve 41/77

42 Digital inputs Pin Function Signal type Description Priority 15 CLOSE VALVE 17 OPEN VALVE 23 DIGITAL GROUND 25 DIGITAL COMMON Digital input 1) Digital input 1) Digital ground Digital common This function will close the valve. Valve will be in interlock mode as long as function is activated. After deactivation of function it will remain effective until - OPEN valve digital input is active - converse RS485 control command have been received The function is activated when optocoupler is on in non inverted configuration. The function is activated when optocoupler is off in inverted configuration. Configuration can be done in local operation via service port or in remote operation. This function will open the valve. Valve will be in interlock mode as long as function is activated. After deactivation of function it will remain effective until converse RS485 control command have been received. The function is activated when optocoupler is on in non inverted configuration. The function is activated when optocoupler is off in inverted configuration. Configuration can be done in local operation via service port or in remote operation. Ground for all digital inputs. Ground is used when digital inputs are operated by switches. Connect switches to ground. See also « Schematics» configuration a). Common for all digital inputs. Common is used when digital inputs are driven by voltage sources. Connect + or terminal of source with common (optocoupler inputs are capable of bidirectional operation). See also « Schematics» configuration b). 1 2) 2 2) 1) All digital inputs are digitally filtered. Filter delay is 50ms. This means that digital signals must be applied for at least 50ms to be effective. Refer to « Schematics» for details about input circuit. 2) Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. These digital inputs have higher priority than all RS485 commands. RS485 commands will not be accepted while digital inputs are active. 42/77

43 Command syntax [function][value][cr][lf] Each element is separated with square brackets for clarity. Square brackets are not part of command syntax. Unless otherwise specified all elements are ASCII characters. There are no spaces between the elements necessary. Commands and values are case sensitive. Data length of value depends on command. Number of characters is specified in the description. Some commands do not require the value element. [CR] is Carriage Return (0D hexadecimal). [LF] is Linefeed Addressed communication Applicable for addressed RS485 communication only. In case of RS485 Point-to-Point setup, addressing is not necessary. Command n+3 n+4 # a a a c c CR LF Description code description data range # identification sign (ascii 35) aaa device address c command refer to standard command set Example Description: Send Close command to valve with RS485 device address 015 Command: #015C:[CR][LF] Answer: #015C:[CR][LF] Control commands Control function INDIVIDUAL VALVE CONTROL Command Description Set [G:][abc][CR][LF] [G:][abd][CR][LF] Acknowledgement (within 10ms after reception of command) data length depending on command c a high byte of cluster valve address in hexadecimal notation (0 hex to F hex) b low byte of cluster valve address in hexadecimal notation (0 hex to F hex) c command to be executed by valve with address ab Use this command to individually control any valve in the valve cluster. Note: When trying to operate an individual valve independently, make sure it is in Freeze mode (refer to «RS485 setup commands FREEZE MODE») Example: [G:03c:7501] [CR][LF] Puts valve with address 3 in Freeze mode (it will immediately stop following the master valves plate position and wait for commands addressed directly to it). Answer: [G:03c:75] [CR][LF] [G:03C:] [CR][LF] Closes valve with address 3 Answer: [G:03C:] [CR][LF] 43/77

44 Control function POSITION CONTROL CLOSE VALVE OPEN VALVE PRESSURE CONTROL Command Set [R:][xxxxxx][CR][LF] [R:][CR][LF] Acknowledgement (within 10ms after reception of command) Description Get [i:38][cr][lf] [i:38][00xxxxxx][cr][lf] data length 6 characters for writing 8 characters starting with double zero for reading xxxxxx position SETPOINT, value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details Change to POSITION CONTROL mode and transfer of position SETPOINT value resp. reading of position SETPOINT. Note: Reading returns position setpoint only in case pressure control is not selected. Set [C:][CR][LF] [C:][CR][LF] Valve will close. Set [O:][CR][LF] [O:][CR][LF] Valve will open. Set [S:][0xxxxxxx][CR][LF] [S:][CR][LF] Get [i:38][cr][lf] [i:38][0xxxxxxx][cr][lf] data length 8 characters starting with a zero xxxxxxx pressure SETPOINT, value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details Change to PRESSURE CONTROL mode and transfer of pressure SETPOINT resp. reading of pressure SETPOINT. Note: Reading returns pressure setpoint only in case pressure control is selected, otherwise position setpoint is returned. 44/77

45 Inquiry commands Inquiry function ASSEMBLY POSITION PRESSURE Command Description Acknowledgement (within 10ms after reception of command) Get [i:76][cr][lf] [i:76][xxxxxxsyyyyyyyabc][cr][lf] data length 17 characters xxxxxx position, return value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details s sign, 0 for positive pressure readings, - for negative pressure readings yyyyyyy pressure, return value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details a 0 = local operation, 1 = remote operation, 2 = locked remote operation b 1 = synchronization, 2 = POSITION CONTROL, 3 = CLOSED 4 = OPEN, 5 = PRESSURE CONTROL, 6 = HOLD, 7 = LEARN 8 = INTERLOCK (OPEN by digital input) 9 = INTERLOCK (CLOSED by digital input) C = power failure, D = safety mode E = fatal error (read «FATAL ERROR STATUS» for details) c 0 = no warning, 1 = warning present (read «WARNINGS» and «ERROR STATUS» for details) This function returns an assembly consisting of POSITION, PRESSURE and main status information for the valve. Get [A:][CR][LF] [A:][xxxxxx][CR][LF] data length 6 characters xxxxxx position, return value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details This function returns the current valve position. Note: When motor interlock is active during power up the valve enters the safety mode and is not able to recognize position. In this case position is returned. Get [P:][CR][LF] [P:][sxxxxxxx][CR][LF] data length 8 characters s sign, 0 for positive readings, - for negative readings xxxxxxx pressure, return value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details This function returns the actual pressure. 45/77

46 Inquiry function SENSOR 1 READING SENSOR 2 READING PRESSURE CONTROL STATUS Command Acknowledgement (within 10ms after reception of command) Description Get [i:64][cr][lf] [i:64][sxxxxxxx][cr][lf] data length 8 characters s sign, 0 for positive readings, - for negative readings xxxxxxx sensor 1 reading, return value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details This function returns direct reading from sensor 1 input. Get [i:65][cr][lf] [i:65][sxxxxxxx][cr][lf] data length 8 characters s sign, 0 for positive readings, - for negative readings xxxxxxx sensor 2 reading, return value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details This function returns direct reading from sensor 2 input. Get [i:36][cr][lf] [i:36][abcdefgh][cr][lf] data length 8 characters a 0 = no pressure control (e.g. if position control is selected) 1 = wide range control (PD control) 2 = close up control (PID control) cdefgh reserved, do not use The controller distinguishes 2 control ranges and acts accordingly. DEVICE STATUS Get [i:30][cr][lf] [i:30][abcdefgh][cr][lf] data length 8 characters a 0 = local operation, 1 = remote operation, 2 = locked remote operation b 1 = synchronization, 2 = POSITION CONTROL, 3 = CLOSED 4 = OPEN, 5 = PRESSURE CONTROL, 6 = HOLD, 7 = LEARN 8 = INTERLOCK (OPEN by digital input) 9 = INTERLOCK (CLOSED by digital input) C = power failure, D = safety mode E = fatal error (read «FATAL ERROR STATUS» for details) c 0 = Power Failure Option (PFO) disabled 1 = Power Failure Option (PFO) enabled d 0 = no warning, 1 = warning present (read «WARNINGS» and «ERROR STATUS» for details) efg reserved, do not use h 0 = normal operation, 1 = simulation running This function returns status information about the valve. Note: In simulation mode the valve can demonstrate pressure control capability independent of other equipment such as vacuum chamber, flow controller and gauge. Normal operation is not possible when simulation is running. 46/77

47 Inquiry function WARNINGS SENSOR OFFSET SENSOR 1 OFFSET SENSOR 2 OFFSET Command Acknowledgement (within 10ms after reception of command) Description Get [i:51][cr][lf] [i:51][abcdefgh][cr][lf] data length 8 characters a 0 = no service required 1 = service request, it is indicated when the control unit detects that motor steps are apparently not effective. This may happen when the valve is heavily contaminated or the gate seal is heavily sticking. These lost steps are recognized and will be repeated to attempt target position in the short term. But in the medium term the valve requires cleaning or inspection. b 0 = LEARN data set present, 1 = LEARN data set not present c 0 = power failure battery ready 1 = power failure battery not ready d 0 = compressed air supply ok (only series 65) 1 = compressed air supply not ok (only series 65) efgh reserved, do not use This function returns warning information about the valve. If a warning is present countermeasure should be taken. Use RESET command to delete service request bit. Note: Without LEARN the valve is not able to run pressure control Set [i:62][cr][lf] [i:62][aaaabbbb][cr][lf] data length 8 characters aaaa offset sensor 1 ( = -1.40V V) bbbb offset sensor 2 ( = -1.40V V) This function returns the sensor offset voltages for both sensors (adjusted by ZERO). Set [i:60][cr][lf] [i:60][xxxxxxxx][cr][lf] data length 8 characters xxxxxxxx offset sensor 1 ( = V V) This function returns the sensor 1 offset voltage (adjusted by ZERO). Set [i:61][cr][lf] [i:61][xxxxxxxx][cr][lf] data length: 8 characters xxxxxxxx offset sensor 2 ( = V V) This function returns the sensor 2 offset voltage (adjusted by ZERO). 47/77

48 Inquiry function LEARN STATUS LEARN PRESSURE LIMIT ERROR STATUS FATAL ERROR STATUS Command Acknowledgement (within 10ms after reception of command) Description Get [i:32][cr][lf] [i:32][abcdefgh][cr][lf] data length 8 characters a 0 = LEARN not running, 1 = LEARN running b 0 = LEARN data set present, 1 = LEARN data set not present c 0 = ok 1 = last LEARN interrupted by user (control command) 2 = last LEARN interrupted by control unit (valve open pressure > sensor full scale) d e f g h 0 = ok 1 = valve open pressure > 50% sensor full scale (gasflow too high) 2 = valve open pressure < 0 (sensor offset present) 0 = ok 1 = valve max. throttle pressure < 10% sensor full scale (gasflow too low) 0 = ok 1 = pressure not raising during LEARN (gasflow missing) 0 = ok 1 = sensor unstability during LEARN reserved, do not use This function checks the status of LEARN and indicates if the conditions during LEARN were ok. Get [i:34][cr][lf] [i:34][0xxxxxxx][cr][lf] data length 8 characters starting with a zero xxxxxxx pressure limit for LEARN, return value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details This function returns the pressure limit applied for LEARN. Get [i:52][cr][lf] [i:52][abcdefgh][cr][lf] data length 8 characters a reserved, do not use b 1 = sensor 1 signal converter failure c reserved, do not use d 1 = firmware memory failure efgh reserved, do not use This function returns an error code in case of any malfunction of the device otherwise 0 is returned. Get [i:50][cr][lf] [i:50][abc][cr][lf] data length 3 characters abc error code, see «Trouble shooting» for details. This function returns an error code in case of any malfunction of the device. 48/77

49 Inquiry function THROTTLE CYCLE COUNTER ISOLATION CYCLE COUNTER POWER UP COUNTER Command Acknowledgement (within 10ms after reception of command) Description Get [i:70][cr][lf] [i:70][xxxxxxxxxx][cr][lf] data length 10 characters xxxxxxxxxx number of throttle cycles This function returns the number of throttle cycles. A movement from max. throttle position to open back to max. throttle position counts as one cycle. Partial movements will be added up until equivalent movement is achieved. Get [i:71][cr][lf] [i:71][xxxxxxxxxx][cr][lf] data length 10 characters xxxxxxxxxx number of isolation cycles (only series 65 and 61.5) This function returns the number of isolation cycles. Each closing of the sealing ring counts as one cycle. Get [i:72][cr][lf] [i:72][xxxxxxxxxx][cr][lf] data length 10 characters xxxxxxxxxx number of power ups This function returns the number of control unit power ups. HARDWARE CONFIGURATION FIRMWARE CONFIGURATION IDENTIFICATION Get [i:80][cr][lf] [i:80][abcdefgh][cr][lf] data length 8 characters a 0 = Power Failure Option (PFO) not equipped 1 = Power Failure Option (PFO) equipped b 0 = ±15V sensor power supply (SPS) not equipped 1 = ±15V sensor power supply (SPS) equipped c 8 = RS485 Interface without analog outputs 9 = RS485 Interface with analog outputs d 1 = 1 sensor version, 2 = 2 sensor version efgh reserved, do not use This function returns the hardware configuration of the device. Get [i:82][cr][lf] [i:82][xxxxxxxx][cr][lf] data length 8 characters xxxxxxxx firmware version, e.g. 650P1D00 This function returns firmware version of the device. Get [i:83][cr][lf] [i:83][xxxxxxxxxxxxxxxxxxxx][cr][lf] data length 20 characters xxx...xxx identification code, e.g. /0001/, unused digits are filled up with spaces (20 hexadecimal) This function returns an identification code. This code is unique for each valve and allows tracing. 49/77

50 Inquiry function FREEZE MODE CLUSTER VALVE STATUS Command Acknowledgement (within 10ms after reception of command) Description Get [i:75][cr][lf] [i:75][xx][cr][lf] data length 2 characters xx 00 = disabled (valve not frozen) 01 = enabled (valve frozen) This function returns the actual freeze mode of a valve. It is normally used in combination with the INDIVIDUAL VALVE CONTROL command (refer to «Control commands»). Get [i:93][ab][cr][lf] [i:93][ab][cdefghij][cr][lf] data length 42 characters a high byte of cluster valve address in hexadecimal notation (0 hex to F hex) b low byte of cluster valve address in hexadecimal notation (0 hex to F hex) cccccc actual plate position (notation depending on communication range) dddddd position offset (min , max ) eeee valve speed (min. 0, max. 1000) f freeze mode (0 = disabled (not frozen), 1 = enabled (frozen)) g access mode (0 = local, 1 = remote, 2 = locked remote) h control mode (1 = synchronization, 2 = POSITION CONTROL, 3 = CLOSED 4 = OPEN, 5 = PRESSURE CONTROL, 6 = HOLD, 7 = LEARN 8 = INTERLOCK OPEN by digital input 9 = INTERLOCK CLOSED by digital input,c = power failure, D = safety mode, E = fatal error iiiiiiiiiiiiiiii warnings (0 = no warning, 1 = warning present), i0 = service request, i1 = parameter error, i2 = PFO not ready, i3 = compressed air failure, i4 = sensor factor warning, i5 = reserved, i6 = offline, i7 = reserved, i8 = ROM error, i9 = no interface found, i10 = no ADC, i11 = no ADC signal on logic interface, i12, i13, i14, i15 reserved jjjjjj compressed air value in 0.1 mbar steps (min. 0, max ) This function returns the status information of an individual valve in the cluster. This command is implemented on the master valve only and must not be used in combination with the INDIVIDUAL VALVE CONTROL. Example: [i:9303] [CR][LF] Status inquiry of valve with address 3. Answer: [i: ] [CR][LF] valve address 03 actual position (range 0 to ) position offset valve speed 1000 freeze mode 1 (enabled = frozen) access mode 1 (remote) control mode 2 (position control) warnings (PFO not ready) compressed air ( bar) 50/77

51 Setup commands Setup function ACCESS MODE INTERFACE CONFIGURATION 1 Command Description Set [c:01][xx][cr][lf] [c:01][cr][lf] Acknowledgement (within 10ms after reception of command) data length: 2 characters xx 00 = local operation (service port) 01 = remote operation, change to local enabled 02 = locked remote operation, change to local not possible via service port This function selects the access authorization to the valve. To read access mode use inquiry command DEVICE STATUS. Note: Local operation is only possible when either Control View or Control Performance Analyzer software is running. When communication to service port is interrupted the valve will automatically change to remote operation. Set [s:20][abcdefgh][cr][lf] [s:20][cr][lf] Get [i:20][cr][lf] [i:20][abcdefgh][cr][lf] data length 8 characters a baud rate: 0 = 600, 1 = 1200k, 2 = 2400, 3 = 4800, 4 = = 19.2k, 6 = 38.4k, 7 = 57.6k, 8 = 115.2k b parity bit: 0 = even, 1 = odd, 2 = mark, 3 = space, 4 = no c data length: 0 = 7 bit, 1 = 8 bit d number of stop bits: 0 = 1, 1 = 2 e 0 (reserved, do not change) f digital input OPEN VALVE: 0 = not inverted, 1 = inverted, 2 = disabled g digital input CLOSE VALVE: 0 = not inverted, 1 = inverted, 2 = disabled h 0 (reserved, do not change) This function does the RS485 and digital input configuration. Note: Digital outputs are always enabled. Set [s:22][abbbcxxx][cr][lf] [s:22][cr][lf] Get [i:22][cr][lf] [i:22][abbbcxxx][cr][lf] data length 8 characters INTERFACE CONFIGURATION 2 a 1 = RS485, 2 = RS485 / Point to Point bbb RS485 address c 0 = full duplex, 1 = half duplex xxx 000 (reserved, do not change) This function defines the interface configuration for the valve. 51/77

52 Setup function VALVE CONFIGURATION SENSOR CONFIGURATION Command Set [s:04][abcdefgh][cr][lf] [s:04][cr][lf] Acknowledgement (within 10ms after reception of command) Description Get [i:04][cr][lf] [i:04][abcdefgh][cr][lf] data length 3 characters a valve position after power up: 0 = closed, 1 = open b valve position after power failure: 0 = closed, 1 = open c 0 (reserved, do not change) d 0 (reserved, do not change) e 0 (reserved, do not change) f 0 (reserved, do not change) g 0 (reserved, do not change) h 0 (reserved, do not change) This function does the valve configuration. Set [s:01][abcdefgh][cr][lf] [s:01][cr][lf] Get [i:01][cr][lf] [i:01][abcdefgh][cr][lf] data length 8 characters a 0 = no sensor 1 = 1 sensor operation (sensor 1 input) 2 = 2 sensor operation with automatic changeover (low range = sensor 2 input, high range = sensor 1 input) 3= 1 sensor operation (sensor 2 input) 4= 2 sensor operation with automatic changeover (low range = sensor 1 input, high range = sensor 2 input) Note: Sensor operation modes 2, 3 and 4 are possible with 2 sensor hardware ( K -....) only. Note: For applications where the high range sensor is used for for monitoring purpose only, select sensor operation modes 1 or 3 for pressure control with low range sensor and read high range sensor from «SENSOR 2 READING» resp. «SENSOR 1 READING». b 1 = ZERO enabled, 0 = ZERO disabled cdefgh High range / Low range sensor full scale ratio * ( ). In case of a 1 sensor valve use any value within the valid range. This function does the sensor configuration for pressure control. 52/77

53 Setup function RANGE CONFIGURATION Command Set [s:21][abcdefgh][cr][lf] [s:21][cr][lf] Acknowledgement (within 10ms after reception of command) Description Get [i:21][cr][lf] [i:21][abcdefgh][cr][lf] data length 8 characters a range for POSITION: 0 = , 1 = , 2 = bcdefgh upper value for PRESSURE and SENSOR READING: e.g > pressure range This function defines the communication range between the valve and the host computer for POSITION, PRESSURE and SENSOR READING. Note: In case ZERO has been performed, gauge offset for PRESSURE and SENSOR READING is compensated. Note: In case 2 sensor operation for pressure control is selected, PRESSURE covers high range gauge because switchover between sensors is done automatically. SENSOR 1 READING and SENSOR 2 READING always return full scale values according to selected range. High range sensor 1 Torr PRESSURE V SENSOR 1 READING V Low range sensor 100 mtorr 0 mtorr SENSOR 2 READING Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mtorr) and sensor 1 covers high range (1 Torr). RANGE CONFIGURATION for PRESSURE resp. SENSOR READING is set to Switchover between sensors is done automatically. 53/77

54 Setup function ZERO PRESSURE ALIGNMENT LEARN DOWNLOAD LEARN DATA UPLOAD LEARN DATA Command Set [Z:][CR][LF] [Z:][CR][LF] Acknowledgement (within 10ms after reception of command) Description This command initiates ZERO to compensate for offset of gauge(s). Note: Refer to «ZERO» for correct zero procedure. Set [c:6002][xxxxxxxx][cr][lf] [c:60][cr][lf] data length: 8 characters xxxxxxxx System base pressure, value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details. Alignment range is equivalent to max. +/-1.4V sensor signal. This command aligns PRESSURE to a certain value. Also SENSOR READING will be aligned accordingly. It might be used instead of ZERO in case base pressure is not low enough. Set [L:][0xxxxxxx][CR][LF] [L:][CR][LF] data length 8 characters starting with a zero xxxxxxx Pressure limit for LEARN, value depends on configuration, refer to «RS485 setup commands, RANGE CONFIGURATION» for details This command starts LEARN. By OPEN VALVE, CLOSE VALVE or POSITION CONTROL commands the routine may be interrupted. Note: Without LEARN the PID controller is not able to perform pressure control. Refer to «LEARN» for correct learn gas flow and procedure. Set [d:][pppdddddddd][cr][lf] [d:][ppp][cr][lf] data length characters ppp pointer, dddddddd single data set This command downloads the LEARN data sets from the host computer to the valve. There are a total number of 104 data sets. Each data set consists of 8 data bytes and needs to be uploaded separately. Note: Make sure that all 104 data sets will be downloaded. Get [u:][ppp][cr][lf] [u:][pppdddddddd][cr][lf] data length characters ppp pointer, dddddddd single data set This command uploads the LEARN data sets from the valve up to the host. There are a total number of 104 data sets. Each data set consists of 8 data bytes and needs to be uploaded separately. Note: Make sure that all 104 data sets will be uploaded. 54/77

55 Setup function PID CONTROLLER CONFIGURATION VALVE SPEED RESET Command Set [s:02][abcdefgh][cr][lf] [s:02][cr][lf] Acknowledgement (within 10ms after reception of command) Description Get [i:02][cr][lf] [i:02][abcdefgh][cr][lf] data length 8 characters a 0 (reserved, do not change) b gain factor: 0 = 0.10, 1 = 0.13, 2 = 0.18, 3 = 0.23, 4 = 0.32, 5 = 0.42, 6 = = 0.75, 8 = 1.00, 9 = 1.33, A = 1.78, B = 2.37, C = 3.16, D = 4.22 E = 5.62, F = 7.50, G = , H = , I = 0.001, J = 0.003, K = 0.01, L = 0.02, M = 0.05 c sensor delay: 0 = 0.00, 1 = 0.02, 2 = 0.04, 3 = 0.06, 4 = 0.08, 5 = 0.10, 6 = 0.15, 7 = 0.20, 8 = 0.25, 9 = 0.30, A = 0.35, B = 0.4, C = 0.50, D = 0.60, E = 0.80, F = 1.00 d setpoint ramp: 0 = 0.0, 1 = 0.5, 2 = 1.0, 3 = 1.5, 4 = 2.0, 5 = 2.5, 6 = 3.0, 7 = 3.5, 8 = 4.0, 9 = 4.5, A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J = 9.5, K = 10.0 efgh 0000 (reserved, do not change) This command selects gain factor, sensor response time and setpoint ramp for the PID controller. Note: Refer to «Tuning of control performance» for details. Set [V:][00xxxx][CR][LF] [V:][CR][LF] Get [i:68][cr][lf] [i:68][0000xxxx][cr][lf] data length 6 characters starting with double zero for writing 8 characters starting with quadruple zero for reading xxxx valve speed, (1 = min. speed, 1000 = max. speed) This command allows changing the actuating speed of the valve plate. Speed selection is effective for pressure control and position control. Open valve and close valve are always done with max. speed. Note: Refer to «Valve speed adjustment» for details. Set [c:82][xx][cr][lf] [c:82][cr][lf] data length 2 characters xx 00 = reset service request bit from WARNINGS 01 = reset FATAL ERROR (restart control unit) This function resets warnings and errors. 55/77

56 Setup function FREEZE MODE CLUSTER POSITION OFFSET Command Set [c:75][xx][cr][lf] [c:75][cr][lf] Get [i:75][cr][lf] [i:75][xx][cr][lf] Acknowledgement (within 10ms after reception of command) Description data length 2 characters xx 00 = disable freeze mode (valve will follow master valves plate position) 01 = enable freeze mode (valve will stop moving) 02 = enable freeze mode and move to close position 03 = enable freeze mode and move to open position This function can be used to independently control an individual valve in the cluster. The command must be used in combination with the INDIVIDUAL VALVE CONTROL command only. Example: [G:03c:7502] [CR][LF] Enables freeze mode and closes valve with address 3 Answer: [G:03c:75] [CR][LF] Set [c:74][abbbbb][cr][lf] [c:74][cr][lf] Get [i:74][cr][lf] [i:74][abbbbb][cr][lf] data length 6 characters a sign (+ or -), 0 has equal function as + bbbbb offset value, (0 to 30% of full stroke) This function adds or subtracts the offset value from the actual plate position that is received from the master valve. It is available on slave valves only. 56/77

57 Error messages Description Protocol Parity error Framing error (data length, number of stop bits) Input buffer overflow (to many characters) Error message [E:][000001][CR][LF] [E:][000003][CR][LF] [E:][000002][CR][LF] <CR> or <LF> missing Commands [E:][000010][CR][LF] : missing [E:][000011][CR][LF] Unknown command Invalid value Value out of range Invalid number of characters (between : and [CR][LF]) [E:][000020][CR][LF] [E:][000021][CR][LF] [E:][000022][CR][LF] [E:][000023][CR][LF] [E:][000030][CR][LF] [E:][000012][CR][LF] ZERO disabled Setup [E:][000060][CR][LF] Device Status Command not accepted due to local operation Command not accepted due to synchronization, CLOSED or OPEN by digital input, safety mode or fatal error [E:][000080][CR][LF] [E:][000082][CR][LF] Hardware Command not applicable for hardware configuration Valve Cluster Checksum failure (communication failure on cluster bus system) Timeout expired (slave offline, no feedback from slave) Control command rejected (slave valve not frozen) Illegal slave command (e.g. sensor setup command) Address out of range (slave address not in configured range) Command not implemented on master valve (slave valve command only) Command not implemented on slave valve (master valve command only) Address information missing (G:xx prefix missing) [E:][000041][CR][LF] [E:][000005][CR][LF] [E:][000006][CR][LF] [E:][000083][CR][LF] [E:][000084][CR][LF] [E:][000085][CR][LF] [E:][000086][CR][LF] [E:][000087][CR][LF] [E:][000088][CR][LF] 57/77

58 4 Trouble shooting Failure Check Action No dots lighted on display - 24 V power supply ok? - Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Remote operation does not work - Local operation via service port active - Switch to remote operation. Display shows «E 20» (fatal error - limit stop of valve unit not detected) Display shows «E 22» (fatal error - rotation angle of valve plate limited during operation) Display shows «E 40» (fatal error - motor driver failure detected) Display shows «D C» or «D999» Motor Interlock is open Display shows «SR» (Service Request) CLOSE VALVE does not work OPEN VALVE does not work Display shows «M C» Maintenance mode active Display shows «M100» Maintenance mode active POSITION CONTROL does not work COMPRESSED AIR FAILURE - Safety mode active, check for D on display? - Valve plate mechanically obstructed? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Replace actuator according to «Maintenance procedures». - Resolve obstruction. - Replace control unit according to «Maintenance procedures». - Motor power supplied? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Valve unit heavy contaminated or gate seal heavyly sticking? - Safety mode active, check for D on display? - Maintenance mode active - Safety mode active, check for D on display? - Maintenance mode active - Safety mode active, check for D on display? - POSITION CONTROL selected, check for V on display? - No or too less air pressure on air input of valve - Clean valve and/or replace gate seal according to «Maintenance procedures». - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Refer to Display shows «M C» in this table - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Refer to Display shows «M100» in this table - Pin 14 of service connector is connected to ground. Plate will close. Further movement of plate is blocked. 1) - Pin 13 of service connector is connected to ground. Plate will open. Further movement of plate is blocked. 1) - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select POSITION CONTROL mode. Refer to «Position control» for details. - Connect air or increase air pressure. Make sure that the air pressure is more than 4 bar (55 psi). 1)Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8. 58/77

59 Failure Check Action Pressure reading is wrong - Sensor(s) connected? - Refer to «Electrical connection». or pressure reading is negative - 2 sensor version present at valve controller? ZERO does not work Pressure is not 0 after ZERO PRESSURE CONTROL does not work PRESSURE CONTROL not optimal - Check valve version on page 1. Verify configuration. Refer to «Setup procedure». - ZERO done? - Perform ZERO when base pressure is reached. Refer to «ZERO» for details. - Does sensor power supply provide enough power for sensor(s)? - Valve in open position, check for O on display? - Verify sensor supply voltage. - OPEN VALVE and bring chamber to base pressure before performing ZERO. - ZERO disabled? - Enable ZERO. Refer to «Valve and sensor configuration» for details. - Sensor voltage shifting? - Wait until sensor does not shift any more before performing ZERO. - System pumped to base pressure? - Sensor offset voltage exceeds ±1.4V - Safety mode active, check for D on display? - PRESSURE CONTROL selected, check for P on display? - OPEN VALVE and bring chamber to base pressure before performing ZERO. - Replace pressure gauge. - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select PRESSURE CONTROL mode. Refer to «Pressure control» for details. - LEARN done? - Perform LEARN. Refer to «Setup procedure» for details. - Setup done completely? - Perform «Setup procedure» completely. - LEARN done? - Perform LEARN. Refer to «LEARN» for details. - ZERO performed before LEARN? - Perform ZERO then repeat LEARN. Refer to «Setup procedure» for details. - LEARN interrupted? - Repeat LEARN. Refer to «LEARN» for details. - Was gas flow stable during LEARN? - Repeat LEARN with stable gas flow. Refer to «LEARN» for details. - Tuning done? - Tune valve for application. - Refer to «Tuning of control performance» for details. - Is sensor range suited for application? - Use a sensor with suitable range (controlled pressure should be >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. If you need any further information, please contact one of our service centers. You can find the addresses on our website: 59/77

60 5 Maintenance & repairs Under clean operating conditions, the valve does not require any maintenance during the specified cycle life. Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:.. patented /.... A Fabrication number has always to be specified. All supplies (e. g. compressed air, electrical power) must be disconnected for removal/installation of the valve from/into the system. Even with disconnected supply, loaded springs and/or air cushions in cylinders can be potential hazards. Keep fingers and objects away from the valve opening! Products returned to VAT must be free of harmful substances such as e.g. toxical, caustic or micro-biological ones. If products are radioactively contaminated, fill in the VAT form «Contamination and Radiation Report» and send it with the product. The form is available at VAT. The maximum values indicated in the form must not be exceeded. 60/77

61 5.1 Maintenance procedures Keep fingers out of the valve during maintenance work. Use cleanroom gloves during maintenance work. Two preventive maintenance procedures are defined for this valve. These are: Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning Replacement of actuator and actuator shaft seals Required frequency of cleaning and replacement of seals is depending on process conditions. A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: unheated *) heated 80 C *) heated > 80 C *) isolation seals (gate and body seal of sealing ring) cycles 6 months but max cycles 3 months but max cycles actuator shaft seals cycles 6 months 3 months *) This figures are reference values for clean conditions under various temperatures. These values do not include any impact of the process. Therefore preventive maintenance schedule has finally to be checked for the actual process conditions. Prevent gap between body and sealing ring from air gun cleaning. Otherwise vacuum grease may be distributed and contaminate the valve. valve body gap sealing ring pendulum plate Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning Replacement of actuator and actuator shaft seals 61/77

62 Note: Electrical power and compressed air is required to perform steps 2 to 9 during disassembly respectively 9 to 2 during assembly. D e s c r i p t i o n Required tool 1. Vent both valve chambers. 2. Open the 4 bonnet screws and remove valve bonnet. Allen wrench 5mm 3. Open valve Caution: Stand away from valve pendulum plate moves out of the valve body. 4. Unfasten mounting screw for pendulum plate. (For reinstall the pendulum plate, tighten the mounting screw to block.) 5. Remove pendulum plate. mounting screw for pendulum plate open end wrench 13mm 6. With one hand press the MAINTENANCE BUTTON to lower the sealing ring, with your second hand unlock the sealing ring by pressing the handle. 7. Release MAINTENANCE BUTTON. 8. Remove sealing ring. 9. To prevent the shaft and retaining pins from moving during work, switch the valve to safety mode. Refer to «Safety mode» for details. Note: Retaining pins will move up. unlock lock maintenance button 62/77

63 D e s c r i p t i o n 10. Remove gate and body seal from sealing ring carefully with a soft tool. 11. Remove grease residues at sealing ring with lint-and dust-free towel a little soaked with isopropyl alcohol. Clean sealing ring and pendulum plate with lint-and dust-free towel little soaked with isopropyl alcohol or in an ultrasonic bath. 12. Clean out valve body with alcohol. Use an appropriate non metal tool with a cloth to enter valve body. Do not enter valve body with hands! Then blow out valve body with clean air. Do not directly expose seals (actuator and retaining pin feedthroughs) to air stream! 13. Clean or replace gate seal if necessary. Install gate seal to sealing ring without grease. 14. Clean or replace body seal if necessary. Lubricate body with the quantity of vacuum grease listed in the table to the right. 15. Install body seal into sealing ring. 16. Deposit vacuum grease on the bottom side of the body seal according to drawing below. Pay attention that the quantity of vacuum grease listed in the table to the right is distributed constantly over the whole circumference. Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) Valve size DN100 / 4 ( ) DN160 / 6 ( ) DN200 / 8 ( ) DN250 / 10 ( ) gate seal body seal Quantity of grease [ml] Quantity of grease [ml] Required tool Soft tool (o-ring remover) VAT cleaning tool for valve body (Part No. see chapter spare parts / accessories) Soft tool (o-ring remover) Vacuum grease Vacuum grease Apply grease deposit on this side Vacuum grease 63/77

64 D e s c r i p t i o n Note: For Replacement of actuator or actuator shaft seals, proceed with step 19 otherwise go to step Reassembly the valve in reverse order, step Close the valve bonnet, see steps Required tool CV software 19. Release the valve from safety mode. Refer to «Safety mode» for details 20. Move the valve to position 50% (half opened) This is necessary, in order to dismount the actuator. See step Disable PFO option feature via 'Power Fail Status' in menu 'System' of CV or CPA software, and turn off the power CPA software or Service Box Disconnect 24VDC power. Wait for 60s, then disconnect cables and compressed air from valve actuator. 23. Unfasten all 4 controller screws and lift controller carefully from actuator. Allen Wrench 4 mm 64/77

65 D e s c r i p t i o n Required tool 24. Unfasten all 3 actuator screws and remove actuator. Allen Wrench 5 mm 25. Remove actuator shaft seals carefully with a soft tool. 26. Clean actuator feedthrough with alcohol. 27. Lubricate each o-ring groove with 0.1 ml vacuum grease. Pay attention that grease is distributed constantly over the whole circumference. Soft tool (o-ring remover) Vacuum grease 28. Clean or replace seals if necessary. Lubricate each o-ring with 0.05 ml vacuum grease. 29. Install o-rings. 30. Deposit 0.1 ml vacuum grease on each o-ring. Pay attention that grease is distributed constantly over the whole circumference. 31. Remove fixation kit and mounting screw for pendulum plate. 32. Clean screw and slightly lubricate thread. Then reinstall fixation kit. 33. Clean actuator shaft and lubricate it with 0.1 ml vacuum grease. Vacuum grease Vacuum grease 65/77

66 D e s c r i p t i o n Required tool 34. Install actuator Tighten actuator screws with 6 Nm. Remove vacuum grease from actuator shaft face after installation. Allen Wrench 5mm 35. Install controller Tighten the controller screws with 1 Nm. Connect cables at controller Connect compressed air at actuator Allen Wrench 4mm 36. Turn on power of controller. Note: valve moves to close position. 37. Open valve and install sealing ring and pendulum plate in reverse order as they had been disassembled (steps 8 to 3). If actuator was replaced, proceed with step 38, otherwise go to step Close valve and check if pendulum plate is in center of flange. Check can be done either visual or by measurement. When the valve is mounted to a tool, the bonnet has to be removed and the center position can be measured by a depth gauge (see picture). If the centering (or distance D) is not correct, proceed with step 39. D DN open end wrench 13mm Distance D [mm] between bonnet flange surface and pendulum plate ± ± ± ±0.5 66/77

67 39. If necessary adjust pendulum plate: a. Move pendulum plate a little towards open (e.g. position 1% of full stroke) b. Use adjustment screw at flange side of actuator (1 turn clockwise adjusts pendulum plate by about 3mm towards open). c. Restart valve in menu System/Recovery d. Check pendulum plate position according step 38 and redo adjustment procedure if necessary. D e s c r i p t i o n Adjusting screw mounted either in actuator position «B1 standard» or «B2 option» Required tool Allen wrench 2mm 40. Clean the valve sealing surface Lint-and dustfree towel a little soaked with isopropyl alcohol 41. Clean the valve bonnet o-ring Lint-and dustfree towel 42. Mount valve bonnet. Tightening torques for bonnet screws, see in table to the right. Max. torque 6 Nm Allen wrench 5mm 67/77

68 5.2 Option board The option board may or may not be equipped in your valve depending on the order. Refer to page 1 of this manual to check valve version. This board includes the optional modules for the valve which are: ±15VDC sensor power supply (SPS) Power failure option (PFO) It is available in 3 versions. These are: SPS module only PFO module only SPS and PFO module The modules may be retrofitted or replaced easily. The battery lifetime of the PFO module depends on the ambient temperature (see below). To assure PFO function the option board must be replaced after battery life has expired. For ordering number of the modules refer to «Spare parts and accessories» Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 degree C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 degree C, the corresponding life time curve will be somewhere in between the upper and the lower curve. Therefore please determine the equivalent maintenance period for replacing the UltraCap battery (Option board) Durability [months] w/o SPS module, valve unheated with SPS module, valve unheated w/o SPS module, valve heated with SPS module, valve heated Ambient temperature [ C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. 68/77

69 5.2.2 Retrofit / replacement procedure ESD Precaution! All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage! Top view on control and actuating unit with panel removed: Master board Option board Interface board Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! 69/77

70 Description Required tool 1. Remove female screw locks from POWER, SENSOR and INTERFACE connectors. Open end wrench 4.5 mm 2. Remove the panel screws. Pozidriv screw driver size 1 3. Lift the panel carefully. 4. Push the connector release (1) a little down and disconnect fan cable (2) from option board /77

71 Description Required tool 5. Remove or replace interface board. 6. Remove or replace master board. 7. Remove or replace option board. 8. Insert master board and interface board in reverse order as disassembled at correct positions (seesteps 6 to 5). 9. Reconnect fan cable to option board (see step 4). 10. Insert option board (see step 7). 11. Place the panel and tighten panel screws with 1.1 Nm (see steps 3 to 2). 12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with 1.1 Nm (see step 1). Pozidriv screw driver size 1 Open end wrench 4.5 mm 71/77

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