Installation, Operating & Maintenance Instructions. UHV gate valve with pneumatic actuator. Series 108 DN mm (I. D. 2½ 8 )

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1 Installation, Operating & Maintenance Instructions UHV gate valve with pneumatic actuator Series 108 DN mm (I. D. 2½ 8 ) This manual is valid for the following product ordering numbers: E14 / 24 / 34 / 44 Sample picture EB Edition

2 Series 108 Imprint Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland Website: Phone: Fax: Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland Print VAT Vakuumventile AG, CH-9469 Haag, Switzerland Copyright VAT Vakuumventile AG 2017 No part of these instructions may be reproduced in any way (photocopies, microfilms or any other reproduction processes) nor may it be manipulated with electronic systems, duplicated or distributed without written permission from VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people. The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle third parties to consider these names to be unprotected and to use them freely. This is in accordance with the meaning of the laws and acts covering brand names and trademarks. 2/27 Edition EB

3 Series 108 Contents 1 Description of product Identification of product Use of product Related documents Important information Technical data Safety Compulsory reading material Danger levels Personnel qualifications Safety labels Design and Function Design Function Installation Unpacking Installation into the system Admissible forces and bending moments Compressed air connection Electrical connection Operation Normal operation Operation under increased temperature Behavior in case of compressed air pressure drop Behavior in case of power failure Manual emergency operation Trouble shooting Maintenance Maintenance intervals Required tools Replacement of valve gate / mechanism unit Repairs Dismounting and Storage Dismounting Storage Packaging and Transport Packaging Transport Disposal Spare parts EB Edition /27

4 DESCRIPTION OF PRODUCT Series Description of product 1.1 Identification of product The fabrication number and order number are fixed on the product directly or by means of an identification plate. made in Switzerland Fabrication No.: /.... A Fabrication number Order number 1.2 Use of product Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. 1.3 Related documents Product data sheet Dimensional drawing 1.4 Important information This symbol points to a very important statement that requires particular attention. Example: VAT disclaims any liability for damages resulting from inappropriate packaging. 1.5 Technical data See product data sheet and dimensional drawing. 4/27 Edition EB

5 Series 108 SAFETY 2 Safety 2.1 Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life. Lack of knowledge Failing to read this manual may result in property damage. Firstly, read manual. These Installation, Operating & Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system. They must be stored together with the other documentation and accessible for anybody who is authorized to work with the system at any time. 2.2 Danger levels High risk DANGER Indicates a hazardous situation which, if not avoided, will result in death or serious injury. Medium risk Indicates a hazardous situation which, if not avoided, could result in death or serious injury. Low risk CAUTION Indicates a hazardous situation which, if not avoided, may result in minor or moderate injury. Command Indicates a hazardous situation which, if not avoided, may result in property damage EB Edition /27

6 SAFETY Series Personnel qualifications Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 2.4 Safety labels Label Part No. Location on valve T Protective cover Table 2-1 6/27 Edition EB

7 Series 108 DESIGN AND FUNCTION 3 Design and Function 3.1 Design 1 Sealing surface 2 Valve body 3 Bonnet flange 4 Actuator Figure Function The valve features the VATLOCK sealing technology. This means, the valve is mechanically locked in the closed position. In the open position, the mechanism is not locked. Leaf springs hold gate and counter plate against the carriage with the ball retainers. The ball pairs are in the detents. For closing, the mechanism is moved forward into the closing position. The locking starts after the leaf spring stop touches the body. The ball retainers move the ball pairs out of the detents. Gate and counter plate are spread apart. The gate seal is pressed against the sealing surface without scuffing. The arrangement of the ball pairs ensures an increase of the sealing force with vacuum on either side of the gate. During opening the movements proceed in the reverse order. See «Figure 3-2». 1 Gate 2 Counter-plate 3 Leaf springs 4 Ball pairs 5 Ball detents 6 Gate seal 7 Spring stop Figure 3-2 Valve seat side EB Edition /27

8 INSTALLATION Series Installation Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 4.1 Unpacking Make sure that the supplied products are in accordance with your order. Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. Store the original packaging material. It may be useful if products must be returned to VAT. 4.2 Installation into the system Movable parts Human body parts may get jammed and severely injured. Do not connect or supply electrical power and compressed air before the product is completely mounted in the system. Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. Inappropriate tools Sealing surfaces may get damaged. Do not use sharp-edged tools. 8/27 Edition EB

9 Series 108 INSTALLATION Wrong tightening torque Valve body and screws may get damaged. Use tightening torque according the size of the screws. Too long screws Valve body may get deformed and / or malfunctions may occur. Use only screws recommended by VAT. 1. Identify flange type according the fabrication number on the identification plate; see chapter «1.1 Identification of product». Example: C... /... = Flange type CF-F, metric thread Valve Maximum screw-in depth «X» in mm x Nom. I.D. Flange types mm inch C U P J T 63 2½ X = X = X = X = Table 4-1 C = CF-F, metric thread U = CF-F, UNF thread P = ISO-F J = JIS T = ASA-LP 2. Remove protective covers from body flanges. 3. Clean sealing surfaces and seals of both flanges; see (1) and (2) according to «Figure 4-1» on page 10. The valve seat side is marked with the symbol on flange «A». 4. Put valve to the mounting position. 5. Mount the four screws (3) according to «Figure 4-1» on page 10, evenly in crosswise order until the seal touches the sealing surface EB Edition /27

10 INSTALLATION Series Tighten all screws with the torques appropriate for their property classes. 1 Flange A 2 Flange B 3 Screws Figure Admissible forces and bending moments Forces from evacuating the system, from the weight of other components or from baking can lead to deformation of the valve body and to malfunction of the valve. The stress has to be relieved by suitable means, e.g. bellows sections. The following forces or moments are admissible: DN (nom. I.D.) Axial tensile or compressive force «FA» Bending moment «M» mm inch N lbf Nm lbf ft 63 2½ If a combination of both forces («FA» and «M») occurs, the values mentioned above are invalid. Please contact VAT for more information. Table 4-2 FA M 10/27 Edition EB

11 Series 108 INSTALLATION 4.3 Compressed air connection Valve in open position Risk of injury when compressed air is connected to the valve. Connect compressed air only when: valve is installed in the vacuum system moving parts cannot be touched Use clean, dry or slightly oiled air only. Admissible air pressure range, see product data sheet. 1. Connect compressed air according to the product data sheet and dimensional drawing. 4.4 Electrical connection Electric shock DANGER Parts being under voltage will result in serious injury or death. Do not touch parts being under voltage. Wrong voltage Electrical components may get damaged. Supply electrical components with the correct voltage. 1. Connect solenoid valve according to the product data sheet and dimensional drawing. 2. Connect position indicator according to the product data sheet and dimensional drawing. 3. Connect heater (option) according to the product data sheet and dimensional drawing EB Edition /27

12 OPERATION Series Operation Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Movable parts Human body parts may get jammed and severely injured. Do not operate before product is installed completely into the vacuum system. 5.1 Normal operation Valve is opened and closed pneumatically. 5.2 Operation under increased temperature Maximum allowed temperature, see product data sheet. Note: After bake-out check and re-torque the bonnet screws. 5.3 Behavior in case of compressed air pressure drop See product data sheet. 5.4 Behavior in case of power failure See product data sheet Manual emergency operation Movable parts Human body parts may get jammed and severely injured. Keep human body parts away from movable parts. 12/27 Edition EB

13 Series 108 OPERATION Only valid for the ordering number /44 (with solenoid valve) In case of a power failure, the valve can be actuated manually if compressed air is available. Standard solenoid valve Solenoid valve for impulse actuation (option) Press push-button (1): valve opens Release push-button (1): valve closes Figure 5-1 Press push-button (1): valve opens Press push -button (2): valve closes 5.5 Trouble shooting Failure Check Action See Valve does not close / open Leak at gate Leak at body Table 5-1 Air pressure Operating pressure Voltage at solenoid valve Gate seal all right? Gate damaged or contaminated? Operating pressure Bonnet seal and sealing surface all right? Connect compressed air Adjust operating pressure Connect voltage Replace valve gate Replace valve gate Adjust operating pressure Clean sealing surface if necessary, replace bonnet seal «4.3 Compressed air connection» Product data sheet «4.4 Electrical connection» «6.3 Replacement of valve gate (O-ring) / mechanism unit» «6.3 Replacement of valve gate (O-ring) / mechanism unit» Product data sheet «6.3 Replacement of valve gate (O-ring) / mechanism unit», steps 1 to 6 Bellows all right? Contact VAT EB Edition /27

14 OPERATION Series 108 If you need any further information, please contact one of our service centers. You will find the addresses on our website 14/27 Edition EB

15 Series 108 MAINTENANCE 6 Maintenance Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Hazardous components Human body parts may get jammed and severely injured. Before starting maintenance: disconnect compressed air supply disconnect electrical power supply Movable parts Human body parts may get jammed and severely injured. Keep human body parts away from movable parts. 6.1 Maintenance intervals Under clean operating conditions the valve does not require any maintenance during cycles. After cycles, VAT recommends replacing the mechanism unit; see chapter «6.3 Replacement of valve gate (O-ring) / mechanism unit». For more information or a general overhaul please contact one of our service centers. You will find the addresses on our website Required tools Tool Ø6 Ø10mm; see chapter «11 Spare parts» Torque wrench 20 Nm / 45 Nm O-Ring removal tool for gates with O-ring (option); see chapter «11 Spare parts» Cleanroom wiper soaked with alcohol (2% methyl ethyl ketone) EB Edition /27

16 MAINTENANCE Series Replacement of valve gate (O-ring) / mechanism unit Loaded spring steel sheet Human body parts may get jammed and severely injured. Do not put human body parts between valve gate and spring steel sheet. Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. Inappropriate tools Sealing surfaces may get damaged. Do not use sharp-edged tools. 1. Vent chambers on either side to atmospheric pressure. 2. Open the valve. 3. Disconnect compressed air supply. 4. Disconnect electrical power supply. 5. Remove screws (1) according to «Figure 6-1» on page Withdraw actuator / mechanism unit carefully from body without touching the body wall; see «Figure 6-1» on page Standard vulcanized gate seal: continue with step 9 8. Option: Gate seal with O-ring (follow the below steps) Remove gate seal from groove, use O-ring removal tool Check and clean sealing surface of valve seat Install new gate seal Press O-ring uniformly in crosswise order (diagonal) into groove Insert actuator / mechanism unit in reverse order 9. Remove locking ring (5) according to «Figure 6-2» on page Withdraw bolt (4) by pulling it downwards according to «Figure 6-2» on page /27 Edition EB

17 Series 108 MAINTENANCE Figure Screw 2 Bonnet seal 3 Valve body Figure Bolt 5 Locking ring 11. Put valve gate and ball guidance to the horizontal position so that the locking balls cannot escape EB Edition /27

18 MAINTENANCE Series 108 For dismounting and mounting the valve gate always use tool (1) according to «Figure 6-3». The tool may be ordered from VAT. For details see chapter «11 Spare parts». 12. Lift valve gate (2) by hand and insert tool (1) between valve gate (2) and ball guidance (3); see «Figure 6-3» on page 18 and «Figure 6-4» on page Remove valve gate in direction of the arrow; see «Figure 6-3» on page 18. Figure Tool; see chapter «11 Spare parts» 2 Valve gate 3 Ball guidance 14. Insert new valve gate in reverse order. 18/27 Edition EB

19 Series 108 MAINTENANCE The markings and (2) according to «Figure 6-4» on page 19 on ball guidance and valve gate must face each other. Figure Tool; see chapter «11 Spare parts» 2 Markings EB Edition /27

20 MAINTENANCE Series Withdraw tool according to «Figure 6-3» on page Mount bolt (4) according to «Figure 6-2» on page Mount locking ring (5) according to «Figure 6-2» on page Clean sealing surface of bonnet flange, use cleanroom wiper. 19. Replace bonnet seal. 20. Insert actuator / mechanism unit into body without touching the body wall. 21. Mount screws (1) according to «Figure 6-1» on page 17. Tighten screws in crosswise order with the following torques: DN Nm / 15 lbf ft DN Nm / 33.5 lbf ft 22. Connect electrical power supply. 23. Connect compressed air supply. Valve is ready for use. 20/27 Edition EB

21 Series Series 108 REPAIRS 7 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website EB Edition /27

22 DISMOUNTING AND STORAGE Series Dismounting and Storage Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Hazardous components Human body parts may get jammed and severely injured. Before dismounting the product disconnect compressed air supply disconnect electrical power supply Movable parts Human body parts may get jammed and severely injured. Keep human body parts away from movable parts. Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. 8.1 Dismounting Valve in open position Valve mechanism may get damaged if valve is in open position. Close valve before dismounting the valve from the system. 1. Close valve. 2. Carry out the steps according to chapter «4 Installation» in reverse order. Pay attention to the safety instructions! 22/27 Edition EB

23 Series 108 DISMOUNTING AND STORAGE 8.2 Storage Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: relative humidity between 10% and 70% temperature between +10 C and +50 C non-condensing environment Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. 1. Clean / decontaminate valve. 2. Cover all valve openings with a protective foil. 3. Pack valve appropriately by using the original packaging material EB Edition /27

24 PACKAGING AND TRANSPORT Series Packaging and Transport Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Harmful substances Risk of injury in case of contact with harmful substances. Remove harmful substances (e. g. toxic, caustic or microbiological ones) from valve before you return the valve to VAT. Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. When returning products to VAT, please fill out the VAT form «Declaration of Chemical Contamination» and send it to VAT in advance. The form can be downloaded from our website If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. If products are sent to VAT in contaminated condition, VAT will carry out the decontamination procedure at the customer's expense. 24/27 Edition EB

25 Series 108 PACKAGING AND TRANSPORT 9.1 Packaging Valve in open position Valve mechanism may get damaged if valve is in open position. Make sure that the valve is closed. 1. Cover all valve openings with a protective foil. 2. Pack valve appropriately, by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging. 9.2 Transport Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging EB Edition /27

26 DISPOSAL Series Disposal Harmful substances Environmental pollution. Discard products and parts according to the local regulations. 26/27 Edition EB

27 11 Spare parts Non-original spare parts Non-original spare parts may cause damage to the product. Use original spare parts from VAT only. Please specify the fabrication number of the product when you place an order for spare parts; see chapter «1.1 Identification of product». This is to ensure that the appropriate spare parts are supplied. VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. «Table 11-1» only contains spare parts that may be replaced by the customer. If you need any other spare parts, please contact one of our service centers. You will find the addresses on our website Description Part No. Quantity per valve Maintenance procedure see chapter Bonnet seal (Item 2 as per «Figure 6-1», page 17 Gate with vulcanized seal Mechanism, completely On request 1 On request 1 On request 1 «6.3 Replacement of valve gate (O-ring) / mechanism unit» «6.3 Replacement of valve gate (O-ring) / mechanism unit» «6.3 Replacement of valve gate (O-ring) / mechanism unit» Optional: O-ring On request 1 «6.3 Replacement of valve gate (O-ring) / mechanism unit» Tool Ø6 mm DN Tool Ø8 mm DN 160 Tool Ø10 mm DN «6.3 Replacement of valve gate (O-ring) / mechanism unit» «6.3 Replacement of valve gate (O-ring) / mechanism unit» «6.3 Replacement of valve gate (O-ring) / mechanism unit» O-ring removal tool «6.3 Replacement of valve gate (O-ring) / mechanism unit» Table 11-1

Installation, Operating & Maintenance Instructions. HV gate valve with pneumatic actuator. Series 110 DN mm (I. D.

Installation, Operating & Maintenance Instructions HV gate valve with pneumatic actuator Series 110 DN 250 320 mm (I. D. 10" 12") This manual is valid for the following product ordering numbers: 11048-.