Parts List. As of 1-January-2010

Transcription

1 As of 1-January-2010 Beta Squared Lithography, Inc. 940 Federal Road Brookfield, CT USA Fax

2 A1 PCB Ass'y / A10 & A11 Set (12.x Comp.) PCB Ass'y A10 (14.x Comp.) PCB Ass'y A101 PCB Ass y (Carriage Counter) A102 PCB Ass'y A103 PCB Ass'y A104 PCB Ass'y A105 PCB Ass'y A106 PCB Ass'y A108 PCB Ass'y A109 PCB Ass'y A110 PCB Ass'y A12 PCB Ass'y A13 PCB Ass'y / A14 Computer Interface PCB, OS2000 Ass'y A14 PCB Ass'y A1403 Interface OS2000 PCB Ass'y A15 PCB Ass'y A16 Uniformity & Intensity PCB.NON-HT Ass'y A16 Uniformity & Intensity PCB 1% Ass'y A16 Uniformity & Intensity PCB HT Ass'y A17 PCB Ass'y A18 PCB Ass'y A19 Carriage Drive Interface PCB OS2000 Ass y A19 PCB Ass y A20 PCB Ass y A1000 Tracker I/F PCB Ass y A1100 Tracker Elevator PCB Ass y A201 PCB Ass'y

3 A202/A209 Mask/Wafer Drive PCB Ass'y A204 PCB Ass'y A205 PCB Ass'y A206 Signal Tower PCB Ass'y x A207 PCB Ass'y / A208 PCB Ass'y A209 AUDIT PCB Ass'y A21 PCB VtoP Interface Ass'y A226 PCB Ass'y A23 PCB Ass'y A24 PCB Ass'y A25 PCB Ass'y A26 12-bit A/D PCB Ass'y A301 Mask Stages PCB Ass'y A302 Wafer Stages PCB Ass'y A303 Manifold PCB Ass'y / A303 Manifold PCB Ass'y (New SMC Style) / A310 PCB Ass'y A4 PCB Ass'y A400 PCB Ass'y A401 PCB Uniformity/Aperture Ass'y A5 PC Ass'y A6 PCB Ass'y A600 Mask Cassette Loader Detector PCB Ass'y A650 PCB V to P Backplane Ass'y A651 PCB V to P Board Ass'y A654 PCB I/A Ass'y A688 (AFA Camera Power Supply) PCB Ass'y, USED A699 Interconnect PCB, OS2000 Ass'y

4 A700 PCB Ass'y A701/702 PCB Ass'y R-005 A703 PCB Centerframe Ass'y (M600 only) A703-CPU (M700) Ass'y (M700 only) X A703-I/O (M700) Ass'y (M700 only) X A8 (12.x Comp.) PCB Ass'y A8 (14.x Comp.) PCB Ass'y A801 PCB Relay Bd Ass'y A875 PCB Ass'y A876 PCB Ass'y A900 Manifold, New Style Ass'y A900 PCB Ass'y A901Transducer PCB Ass'y A901Transducer PCB Ass'y (New Style) Adjustable Slit Ass'y Adjustable Slit Blade, Plate Adjustable Slit Flexible Cable Lg. (Position -11) XX Adjustable Slit Flexible Cable Lg. (Position -22) XX Adjustable Slit Flexible Cable Lg (Position -33) XX Adjustable Slit Flexible Cable 6.00 Lg. (Position +22 & +23) Adjustable Slit Flexible Cable 7.12 Lg.. (Position +11) XX Adjustable Slit Flexible Cable 8.75 Lg. (Position 0) XX Adjustable Slit Hex Adjuster (Knob) Adjustable Slit, Brass Screw & Plunger Ass'y AIM Computer AIM Display Ass'y AIM Display Ass y (New Style) AIM EL Monitor AIM Panel Switching PCB Ass'y, R/B

5 AIM Power Supply Ass'y Air Flow Switch (Only without connectors) Model 2B Type Air Flow Switch Ass'y (Used on Heater) Air Flow Switch Ass'y (Used on HPC Exhaust & L-Duct) Air Gauge Electronics Package Ass'y Air Gauge Filter (Per Nozzle) Kit Air Gauge Fitting, Hose Adapter 90 Degree Plastic Elbow Air Gauge Pilot Valve Ass'y Air Gauge Regulator, Air Pressure 0-60 psi (23 psi) Air Gauge Ross Valve Assembly Air Gauge Supply Assembly (Nupro) Air Gauge, Nupro Replacement Valve Only Airpot, 70x Lens Airpot, Actinic Filter Airpot, AFA Flip Mirror Airpot, Aperture Wheel Lock Airpot, Butterfly Baffle/Wide Field Viewing Airpot, Carousel Flipper Airpot, Condenser Shutter Airpot, Do-Nothings Airpot, Fiber Optic Shutter Airpot, Input Wand Stop (Dashpot) Airpot, Load Arm Stop (Dashpot) Airpot, Load/Unload Arm Airpot, Mask Latch, 4/5" Airpot, Mask Latch, 6" Airpot, Mask Push Off Airpot, Mask Push Off, 6" Ass'y Airpot, Mask Push On

6 Airpot, Mask Safety Latch Airpot, Mask Safety Latch, 6"..Old Style Mask Loader Jaws Airpot, Mask Transport, 4/5" Airpot, Mask Transport, 6" Airpot, Off Mask Illuminator/Wide Field Viewing Airpot, Relay Filter Stop (Dashpot) Airpot, Spinner Lift Airpot, Unload Arm Lift Air Safety Latch HPC Cover Ass y Bearing Air Wafer 4", 5", & 6" Ass'y Bearing, Flanged Plain.125 ID x.250 OD Binocular Eyepiece, 10X Binocular Eyepiece, 10X w/ Reticle Binocular Head, Aperture Slide Actinic Filter Binocular Head, Slide Aperture Binocular Head, Olympus Tilting (With out Eyepieces) Binocular Head, Olympus Tilting w/ Eyepieces & Reticles Ass'y Binocular Head, Old Style Sliding Eyepieces Binocular Head, Old Style Rotating Eyepieces Binocular, Barlow Lens Cell Ass'y Brake Cup, Mask Ass'y Brake & Microstage Mask Ass'y Brake Cup, Wafer Ass'y Brake Pad Wafer Plate (Lollipop) Brake, Wafer Stage (Front) w/flexure & Cup, Ass'y Brake, & Microstage Wafer Rear Ass'y Cable Ass'y, & Sensor LVDT (Mask/Wafer) Cable Ass'y, Sensor Pressure Switch Cooling Tower Cable Ass'y, Monitor Male To Male OS

7 Cable Ass'y, OS2000 Camera Cable Ass'y, OS2000 NB5 Ribbon Cable, 0.5 m for NI Board Caging Kit, Hardware 5" Kit Caging Kit, Hardware 6" Kit Caging Kit, Mask Plug 6" Caging Kit, Wafer Plug 6" Camera, Optical Linear Array Ass'y Carousel, Arm 4" Ass'y Carousel Arm 5" Ass'y Carousel Arm 6" Ass'y, Intel Style Carousel Arm 6 Ass y, Intel Style, Thick Substrate Carousel, 6" SVG Old Style Ass'y Carousel, Air Motor Sub Ass'y Carousel, Motor Flexible Coupling Carrier, Photomask 6 x 6 x Carrier, Photomask 6 x 6 x Carrier, Photomask 7.25 x Carrier, Photomask 7.25 x Cassette, Pellicle Protection 6 x 6 x Cassette, Pellicle Protection 6 x 6 x Cassette, Pellicle Protection 7.25 X Cassette, Pellicle Protection 7.25 x Chuck, 4" Ass'y Chuck, 5" Ass'y Chuck, 5" Dual Position Ass'y Chuck 5" w/ 3 mm Edge Relief Ass'y Chuck, 5" Extended Bellows Ass'y Chuck, 6" Intel Style Ass'y, R/B (repairs only) Chuck, 6" Intel Style Ass'y (Philips)

8 Chuck, 6" SVG Style Ass'y Chuck, 6" Extended Bellows Ass'y, R/B Chuck, 6 Extended Bellows Ass y (Philips) Chuck, 6" Dual Position Ass'y Condenser (For Relay) Ass'y Using an Enhanced Aluminum Secondary Condenser (For Relay) Ass'y Using a Narrow Band Dichroic Secondary Crate, Camera OS2000 (10"x26"x8") Crate, Chuck (16.5"x16.5"x12") Crate, Machine Accessories (53" Dp. x 60" W x 49" H) Crate, Machine Micralign (77"x62"x72") Crate, OS2000 (46"x46"x60") Crate, Relay Package Micralign (17"x26"x16") Crate, Scan Package Micralign (26"x26"x19") Crate, Strong Shell Micralign (21"x21"x12") Dual Counterforce, Regulator Kit Elevator, Bellows (round) Elevator, Cassette Present Flag Elevator, Cassette Present Sensor w/retractable Cord Cable Ass'y Elevator, Single Pitch Ass'y ( w/ Exchange) Elevator, Dual Pitch Ass'y ( w/ Exchange) Elevator, Bellows (O-Ring) Elevator, Dual Pitch Gear Timing Belt Elevator, Dual Pitch Index Flag Stop Wheel (Small) Elevator, Dual Pitch, Index Flag Stop Wheel (Large) Elevator, Single Pitch 28 Tooth Drive Sprocket (Small Special Modified) Elevator, Single Pitch 30 Tooth Drive Sprocket (Large Special Modified)

9 Elevator, Single Pitch Belt (O-Ring) Elevator, Single Pitch Index Flag Stop Wheel Elevator, Single Pitch Sprocket Timing Belt Elevator, Wafer Sensor Capacitive Ass'y Encoder, Glass Scale w/bracket Ass'y Encoder, Head (Linear Drive) Fan, Muffin 220v 50/60Hz RH Card Cage (99XW ) Filter, Actinic Relay Package 4mm / Filter, Compensator, Relay Assy, 6mm..(Used w/ UV4 filter) Filter, Heat Relay 4mm / Filter, HEPA 12 x 12 x 5-7/ Filter, UV Relay 4mm Filter, UV2 Relay 8mm Filter, UV3 Relay Package, 8mm Filter, UV4 Relay Package 75mm Dia x 2mm Thk.WG320 glass(turns on at 320nm) Fitting, Barb To Stem Straight Connect..1/4 X 1/4.. Qty Fitting, Hose Coupling 1/16" (SBF-1616) Qty Fitting, Hose Coupling 1/8" (22-4) Qty Flexure, Mask "X" Ass'y (New Design) (replaces ) Flexure, Wafer "X" Ass'y (New Design) (replaces ) Flexure, Mask YL and YR (music wire) Flexure, Wafer Y1 Front (music wire) Flexure, Wafer Y2 Front (music wire) Flexure, Wafer Y1 Rear (flat blade long) Flexure, Wafer Y2 Rear (flat blade short) Flexure, Center PAL Ass'y Flexure, Prealigner Anchor Ass'y Flexure Gauge Head, Kit (New Style)

10 Focus Motor & Cable Ass y Front Panel & PAL Button Cover Kit, Front Panel Kit, Button Cover A103 Board Front Panel Kit, Button Cover A104 Board Front Panel Kit, Button Cover A105 Board Front Panel Kit, Button Cover A106 Board Front Panel Kit, Button Cover PAL Front Panel, Cover Button Green for Honeywell Switch (for GO Button) Front Panel, Cover Keypad Blank (OS2000) Front Panel, Handle, Toggle Switch (Carriage, D-O Lens) Front Panel, Hinge (Invisible Tamper Proof) All Front Panel, Momentary Switch Focus (7205) Front Panel, Switch Pushbutton Lighted DLST-Mom Coarse/Fine & GO Switch Front Panel, Toggle Switch Carriage/Microscope Gasket, Input & Output Wand Arm (4 pieces) Gasket, PAL Air Bar (4 pieces) Gasket, Projection Optics Feed Thru..Kaman Gauge Only Gauge Head, Bellows Ass'y Gearbox,.380 tool (home tool) Gearbox, Mask Side "Y1" w/ LVDT Ass'y Gearbox, Mask Side "Y2" w/ LVDT Ass'y Gearbox, Mask Side, "X" w/ LVDT Ass'y Gearbox, Wafer Side "X" w/ LVDT Ass'y Gearbox, Wafer Side "Y1" w/ LVDT Ass'y Gearbox, Wafer Side," Y2" w/ LVDT Ass'y Gearbox Wafer Stage Plate Ass'y Global Alignment Scan Package & Cover Center Kick Ass y

11 Helium Regulator SVG Original Type Helium Regulator New Design, 110V Kit Helium Regulator New Design, 220V Kit Helium Regulator Box (Only) 110V Ass'y Helium Regulator, Box (Only) 220V Ass'y Hose, 1/4"OD x 1/8"ID Black, 500 ft roll Hose, 1/8"OD x 1/16"ID Black, 500 ft roll Hose, 3/32"OD x 1/32"ID Clear (B-44-4X), 50 ft roll Hose, 5/16"OD x 3/16"ID Black, 500 ft roll Hose, Carriage M300 Kit Hose, Chuck & O-Ring Kit Hose, Guide Carriage Loom (5 Position Separator) Hose, Multi Bore 1/8"OD x 1/16"ID Black, 100 ft Hose, Multi Bore 1/8"OD x 1/16"ID White/Gray ft Hose, Multi Bore 3/32"OD x 1/32"ID Clear (C-210-A) 8-tube roll... HV Insulator Block HPC Illuminator, (Fiber Optic Shutter) Light Shield Ass'y Illuminator, (Fiber Optic Shutter) Light Shield Illuminator, (Fiber Optic Shutter) Light Shield Retaining Spring Illuminator, (Fiber Optic Shutter) Cell Ass'y With Glass Illuminator, (Fiber Optic Shutter) Filter Actinic Illuminator, (Fiber Optic Shutter) Lens Plano Convex Illuminator, (Fiber Optic Shutter) w/ Airpot & Cell & Shield Ass'y X Illuminator, Fiber Optic, Split (for Scan Package) Illuminator, Fiber Optic Light Guide, Off Mask Intensity Monitor Cable, 3 Channel Ass'y Intensity Monitor, Single Band UV3 Kit Intensity Monitor, Single Band UV4 Kit

12 Intermediate Alignment, Detector (Only) Used also on A/B Prealigner Intermediate Alignment, Detector Harness Ass'y Intermediate Alignment, Source Ass'y 4" Ass'y Intermediate Alignment, Source Ass'y 5" Ass'y Intermediate Alignment, Source Ass'y 6" Joystick X & YR Cable Ass'y Joystick YL Cable Ass'y Lamp, Hg Arc Ht (Model 300) Lamp, Incandescent 28V Lamp, Pig Tail Cable Ass'y Lamp, Secondary Retaining Ring, Screw & Spring Kit Lamp, Shutter Condenser w/ PCB & Casting Ass'y Line Voltage Regulator, Auto Line Voltage Regulator (220V) Repair Kit (carbon brush) Load Arm, 5" Ass'y Load Arm, 6" Ass'y x/ x Mask Latch Magnet,.250 Dia. x.250 LG. (set of 5) Mask Loader, 5" (Old Style) Jaws Ass'y Mask Loader, 5" (Old Style) Jaws w/bar Code Reader Ass'y Mask Loader, 5" Ass'y New Style (with Pellicle Mounting to PO Bracket) Mask Loader, 6" Ass'y (with Pellicle Mounting to PO Bracket) Mask Loader, Latch 4" & 5" Ass'y Mask Loader, Latch 6" Ass'y Mask Safety Latch, Ass'y Mask Transport Latch Hall Effect Switches, Cable Ass'y (5F) Mask Transport, 4" & 5" Ass'y Mask Transport, 6" Ass'y Mask Transport, 6" Locking Head x

13 Mask Transport, Sensor Harness Ass'y (6F) Mask Transport, Weldment Pellicle Mtg to PO, Mask Push, Off, Front, 5" Ass'y Mask Push, Off, Rear, 5" Ass'y Mask Push, On Front 6" w/airpot Ass'y Mask Theta Plate, 5" Ass'y Mask Theta Plate, 6" Ass'y Microscope Scan, Package Microscope Scan, Focus motor w/cable Ass'y (R/B ) Microscope Scan, Gear Worm Section Scan Package.688 Bore Microscope Scan, Gear Worm Section Scan Package.938 Bore Microscope Scan, Linkage Arms & Bearings Kit Microscope Scan, Octoport Connector Ass'y Microscope Scan, Octoport Plate Ass'y Mirror Mount, AFA Ass'y used on binocular head (Recoat) Mirror, Relay L-Fold for M Mirror, Relay Vertical Mirror, Toroid Condenser Mirror/Lens, Secondary Condenser Mirror/Lens, Secondary, Narrow Band Dichroic Motor, DC Brush w/ Gearbox & Encoder..(Electric Carousel) Nut, Adjust "A", "B", or "C" Compensator OS2000, Camera 1/2" CCD OS2000, Camera Ass'y OS2000, Computer Ass'y OS2000, Display 15.1" TILT Screen touchscreen OS2000, I/O Board OS2000, Kit With Load & Go OS2000, Monitor, Touch Screen Desktop

14 OS2000, Motion Controller Galil DMC-2180 ethernet version, 8 axis OS2000, Motor Control Unit Ass'y OS2000, Prism Block Ass'y OS2000, Stage, 3-axis translation OS2000, Strongarm, Vertica 15.1" Tilt Screen custom w/ Trackball OS2000, Vision Board Photo Mask, 45 deg Astigmatism 6"x6" for 100/125mm wafer Photo Mask, 45/90 deg Astigmatism 7.25" round x 0.150" for 150mm wafer Photo Mask, 90 deg Astigmatism 6"x6" for 100/125mm wafer Kit, Overlay Mask/Wafer 150mm Photo Mask, Banding/Striping 7.25" round x 0.150" Photo Mask, Fine Focus (Flat) 7.25 round x Photo Mask, Focus Matrix 7.25 round x.150 Thk Photo Mask, Full Field 90 Degree Astigmatism, round x Photo Mask, Overlay Multi-Target 7.25 round x.150 Thk Photo Mask, Stage Alignment 7.25 round x 150 mm Thk Plate, Floor Pad, 2" x 2" x.25 THK Plate, Floor Pad, 6" x 6" x.62 THK Power Supply, Ass'y (Power One) +5V, ±15V, +24V(Plug-compatible) / X Power Supply, (Power One) +5VDC, ±15V, +24V Power Supply, +24VDC (while they last) Power Supply, +5V, +-15V DC (while they last) Power Supply, +5/12V AIM Power Supply, AC Lamp Controller Prealigner, "A, B, D" Emitters & Cable Ass'y Prealigner, "C" Emitter & Cable Ass'y Prealigner, Detector Head Mount, 6" Ass'y Prealigner, Detector Head, 4" Ass'y

15 Prealigner, Detector Head, 5" Ass'y Prealigner, Detector Head, 6" Ass'y / Prealigner, Head Stabilizer 5" Ass'y (New Design) Prealigner, Input Buffer Ass'y Prealigner, Input Track Cover, 6" Ass'y Prealigner, Input Wand Bumper Stop Airbar Ass'y Prealigner, Input Wand 4" Ass'y X Prealigner, Input Wand 5" Ass'y Prealigner, Input Wand 6" Ass'y Prealigner, Output Wand 4" Ass'y X Prealigner, Output Wand 5" Ass'y Prealigner, Output Wand 6" Ass'y Prealigner, Output Buffer Ass'y (with plastic mount, sensor & wire) Prealigner, Output Buffer Detector Ass'y Prealigner, Output Buffer LED & Mount Ass'y Prealigner, Output Track Cover, 6" Ass'y Prealigner, Input Linear Air Bar Bearing Prealigner, Input Airbar Ass'y Prealigner, Output Linear Air Bar Bearing Prealigner, Output Airbar Ass'y Prealigner, Pick & Place Kit (PAL) Upgrade from Airtrack Prealigner, X/Y Motor Kit Ass'y / Prealigner, Spinner Motor Ass'y Prealigner, Spinner Chuck Model 5/600 Pick & Place Prealigner, Booster Valve Assy (Input/Output Wand Direction) Prealigner, Booster Valve Assy (Spinner Vacuum M700) Prealigner, Spinner Chuck Model Prealigner, Spinner Chuck Model 700 (O-Ring 5 pieces) Prealigner, Spinner Motor Ass'y Model

16 Prealigner, Spinner Air Bearing Kit Model Regulator Ass'y, Cooling Tower Regulator, 900 Manifold (Fairchild) 10&31 PSI Regulator, Counterforce Reg. (Bellofram) Relay Ass'y Aperture Drive Belt (O-Ring) Relay Light Shield, Inner Black Relay, Ass'y Restrictor Kit Assortment (For ) Screw, Adjust "A" & "B" Compensator Screw, Adjust, "C" Compensator Screw Kit, Micralign Sensor, Hall Effect 513SS Sensor, Hall Effect 5SS16 Scan Package Sensor, Transducer LVDT Shim, Carousel Arm Hub Kit Shim, Cooling Tower Kit Shim, Front Panel Hinge Shim, Mask Stage Brake Kit Shim, Mask Stage Shaft "Y1" Arm.010 thk Shim, PAL air bar.024 thk Shim, PAL air bar.036 thk Shim, PAL air bar.060 thk Shim, PAL Bottom Input Track Cover Pellicle.023 thk Shim, PAL Top Input Track Cover Pellicle.023 thk Shim, Shutter Plate Ass'y Kit Shim, Wafer Brake Pad Shutter Condenser Ass'y Skinner Valve Solenoid, & Base 3-port NC 24VDC (SMC, SYJ314-5LOU)

17 Solenoid, & Base 3-port NC 24VDC (SMC, VQ110-5MO) Solenoid, & Base 3-port NO 24VDC (SMC, VQ120-5MO) Solenoid, 100 psi 24VDC/ Model Solenoid, 300 Manifold Latching Ass'y Obsolete R/B / Solenoid, 300 Manifold Non-Latching Ass'y / Solenoid, 800 Manifold Latching Ass'y Obsolete R/B / Solenoid, 800 Manifold Non-Latching Ass'y Obsolete R/B / Solenoid, 900 Manifold & PAL 3 Way Ass'y (Solenoid Only) Solenoid, 900 Manifold 2 Way Ass'y / Solenoid, 900 Manifold 3 Way Ass'y / Solenoid, Emergency & View Stop Brake 3 Way Ass'y Temperature Control Cooler, Portable Air Conditioner, 24,000 BTU, V Temperature Controller (Model 72A) Temperature Sensor PCB, 6" (or 4/5") Ass'y Tool, Auto Focus Calibration Plate 6" Tool, Cooling Tower Align Tool, Floor Jack Kit Tool, Floor Jack, Miniature Leveling Tool, Level Bulls eye 1" Dia Tool, Sickle Lamp To Slit Transformer, Hg Lamp, 60 Hz Transformer, Hg Lamp, 50 Hz Uniformity Head 1%, Detector & Cable Ass'y Uniformity Head Standard, Detector & Cable Ass'y / Uniformity Tester Ass'y / Uniformity Tester, Motor Ass'y x Vacuum Cup, 1/2" Dia NONthreaded, clear silicone Vacuum Cup, 1/2" Dia threaded, clear silicone

18 Vacuum Cup, 3/8" Dia NONthreaded, clear silicone Vacuum Cup, 3/8" Dia threaded, clear silicone Vacuum Pump, Dry 110V w/motor View Stop Brake Ass'y Wafer Theta Plate, 4" & 5" Ass'y Wafer Theta Plate, 6" Ass'y Wafer, 6" Stage Alignment Whisker Valve, (NEW STYLE) Ass'y Window, Explosion, Model Ass y, Repaired A1 (Model 300) PCB r Ass y, Repaired A2 (Model 300) PCB r Ass y, Repaired A6 (Model 300) PCB r Ass y, Repaired A10 (Model 300) PCB r Ass y, Repaired A3 (Model 300) PCB r Ass y, Repaired A4 (Model 300) PCB r Ass y, Repaired A5 (Model 300) PCB r Ass y, Repaired A7 (Model 300) PCB r Ass y. Repaired A8 (Model 300) PCB r Ass y, Repaired A9 (Model 300) PCB r