CryoVac Engineering providing exclusive sales and service for. HANBELL Dry Screw Vacuum Pumps

Transcription

1 CryoVac Engineering providing exclusive sales and service for HANBELL Dry Screw Vacuum Pumps

2 Introduction Products of HANBELL Dry Screw VacuumPumps Advantages of HANBELL Dry Pump Accreditation

3 HANBELL Introduc=on

4 Milano HANBELL, Italy Since 2004 Taoyuan HANBELL Taiwan Headquarters since ,800 m2 10,000 m2 Shanghai HANBELL, China Since 2000 IPO since ,000 m2 Zhejiang HANSON, China, Cast Iron Factory, since 2009 Vietnam HANBELL Since 2010 Taichung HANBELL Taiwan Since ,666 m2 27,300 m2 11,000 m2

5 Shanghai HANBELL IPO in China 2007

6 30 Capital Taiwan USD (Million)

7 Staff Employed

8 World Wide Sales Turnover USD (Million)

9 Products

10 Taoyuan HANBELL Headquarters R-Series since 1994 Vietnam HANBELL South-east Asia Base Shanghai HANBELL Largest Factory A-Series since 2000 L-Series since 2003 Taichung HANBELL R&D Center P-Series since 2006 RT-Series since 2008

11 Advantages and Strengths Design Machining Quality Control Quantity Quality pairs of rotors/year

12 Screw Technology Vs Products Centrifugal Compressor Refrigerator Compressor Low Temperature Compressor Screw Tech. Used in All HANBELL Products Air Compressor Dry Screw Vacuum Pump

13 Dry Screw Vacuum Pumps

14 Dry Pump Development History 1998 A pre-study of dry screw vacuum pump 2000 Developing 1st prototype 2002~2003 Commercial Development Strategy 2004~2005 Beta-site testing 2006 PA series launch 2008 PS series launch 2011 PD Series Double Stage Rotor launch 2012 PSE/PDE Series Industrial Series launch

15 HANBELL Screw Rotors Rotors of PS series Rotors of PD series

16 PS Series Dry Pump PS 80 96m 3 /hr PS m 3 /hr PS m 3 /hr PS m 3 /hr PS m 3 /hr PS m 3 /hr PS m 3 /hr

17 PS Series Dry Pump Dry Pump Booster Pump Model Pump PS80 PR600 PS602 PS160 PR900 PS902 PS180 PR1300 PR1800 PS1302 PS1802

18 PD Series Dry Pump Energy Efficient PD120, PD300, PD400 & PD800 PD2602

19 PD Series Dry Pump Dry Pump Booster Pump Model Pump PD120 PR600 PD702 PR900 PD902 PR1300 PD1402 PD300 PR1800 PD1902 PR3000 PD2202 PR1300 PD1502 PD400 PR1800 PD2012 PR3000 PD2602 PD800 PR3000 PD3012

20 PSE/PDE Series Dry Pump Air Cooled Model Feature:Self- Circulation Cooling System Electrical Control Box Cooler Fan PDE 120 PDE 300 PDE 400 PDE 650 PDE 800 PSE80 PSE160 PSE180 PSE602 PSE902 PSE1302 Air Cooled Motor Water Pump

21 PSC/PDC Series Dry Pump Feature:Air-Cooled Motor Industry: Chemical, Pharmaceutical Benefits: Cost-Efficiency, Explosion-Proof to meet Local legislations Locally Purchased PDC 120 PDC 300 PDC 400 PDC 650 PDC 800 PSC80 PSC160 PSC180 PSC602 PSC902 PSC1302

22 Advantages of HANBELL Dry Pump

23 The Advantages of HANBELL 1. Screw Rotors Advantages - Shorter Gas Passage à Lower Deposition = Lower Corrosion 0.3 Hanbell Screw 1.7 Roots+Claw Multi Roots Unit:Meter

24 Screw Rotor Advantages Less Turns à Lower Clogging Issues à Longer Life Rotor Type HANBELL Screw Turns 2 (Less deposition) Roots + Claw 8 Multi Roots 12

25 2. Indirect Cooling System Water jacket is an indirect water cooled manifold Uniformed pump casing temp = longer life-time Adjustable casing temp can improve deposition No contamination issues with cooling water line

26 Cooling water Line Cooling Plate (heat exchanger) Casing Advantage: -uniform temp. -no contamination Coolant

27 3. Excellent Water Cooled Motor In-House Produced Canned motor Lower motor temp. Excellent sealing design Lower noise level

28 4. User-Friendly Control System Portable control panel easy to operate Motor temp, Motor Current, Cooling water flow, N 2 Flow and Pump Temperature can all be monitored. English Language Selectable

29 5.Central Monitoring System - Easy To Monitor Pump Status From Your Office - Supports up to 255 pumps with a single licence

30 6. Voltage Endurance Test - No shutdown during wide range testingà High Reliability 60 Hz 220V Voltage Drop and Pump Current Diagram V 240 V 230 V 220 V 210 V 200 V 190 V 180 V 170 V 50 Hz 380V Voltage Drop and Pump Current Diagram V 390 V 380 V 370 V 360 V 350 V 340 V 330 V 320 V 310 V 300 V 290 V 280 V

31 PS Series Specification

32 PD Series Specification

33 PD Vs PS Power Consumption

34 Edwards Pump Mapping (Edwards) Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) HANBELL Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) il70 1, iq80 1, PS80 1, ih80 MKV 1, ih160 MKV 2, PS160 2, PS180 3, GXS250 4, PD400 6, GXS450 7, PD600 9, GXS750 12, PD800 13, iq80/500 7, GX6/100N 10, PS602 10, ih600 MKV 10, PS902 15, ih1000 MKV 16, PS ih1800 MKV 30, ih1800htx PS , , MKV GXS , PD GXS , PD

35 Pump Mapping (Ebara) Ebara Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) HANBELL Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) ESR20N 2, PS80 1, EST25N 2, PS160 2, PS180 3, ESR80WN 8, PS602 10, EST100WN 10, PS902 15, ESR200WN 20, EST200WN 20, PS , ESR300N 30, EST300WN 30, PS , EST500WN 50, PD ,

36 Pump Mapping (Kashiyama) Kashiyama Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) HANBELL Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) SDE PS80 1, SDE PS160 2, PS180 3, SDE PS602 10, SDE PS SDE PS , SDL40K PD SDL60K PD

37 Pump Mapping (ULVAC) LR/HR60 Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) HANBELL Pumping Speed(L/min) Ultimate Pressure(Pa) Weight (kg) LR/HR PS LR/HR PS160 2, LR PS180 3, LR/HR LR/HR PD400 6, LR/HR PD600 10, LR/HR PS , LR/HR PS , LR/HR PD ,

38 Pump Mapping (Pfeiffer) Alcatel Pumping Speed(L/ min) Ultimate Pressure(Pa ) Weight (kg) Motor (KW) HANBELL Pumping Speed(L/ min) Ultimate Pressure(Pa ) Weight (kg) Motor (KW) A100L PS80-A 1, ADP PS160-A 2, PS180-A 3, ADP PS602-A 10, ADS PS1302-A ADS PS1802-A 30,

39 Pump Mapping (BUSCH) BUSCH Pumping Speed(L/ min) Ultimate Pressure(Pa ) Weight (kg) Motor (KW) HANBELL Pumping Speed(L/ min) Ultimate Pressure(Pa ) Weight (kg) Motor (KW) DS PS80-A 1, DS PS160-A 2, PS180-A 3, DS PS602-A 10, DS PS902-A 15,

40 Installation Fields and Applications (1/6) Field Process PVD LPCVD PECVD CVD Solar Cell ETCH Mono-Crystal Pulling Furnace Poly-Crystal Casting Furnace Module Laminator Solar grade Poly-Silicon

41 Installation Fields and Applications (2/6) Field Process LPCVD CVD Plasma Cleaning LED PVD PECVD PECVD / ICP ETCH SPUTTERING

42 Installation Fields and Applications (3/6) Field Process DRY ETCH / PECVD ICP/RIE ETCH Etching SEMI Plasma Cleaning PECVD LPCVD Molding

43 Installation Fields and Applications (4/6) Field Process Metal Etch / Oxide Etch TFT-LCD PVD Oven Cell Color Filter Stripper

44 Installation Fields and Applications (5/6) Field Process HF Generation Chemical Methanol de-press Distillation Esterification Pharmaceutical Vacuum Extract

45 Installation Fields and Applications (6/6) Field Thermal Treatment Electronic Computer Components Process Vacuum Furnace PVD Heatpipe PVD

46 Equipment Vendor List ICP ETCH PECVD Inline SpuQer CVD Plasma Cleaning

47 Poly- Crystal CasTng Furnace In-House Tool used for testing products

48 Accreditations Semi S2 CE ISO 9001 UL Will be completed around end of 2015

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52 Thank You