INTEGRATED SOLUTIONS FOR THE SEMICONDUCTOR INDUSTRY

Transcription

1 INTEGRATED SOLUTIONS FOR THE SEMICONDUCTOR INDUSTRY BOC Edwards has been involved with the semiconductor industry from the beginning of vacuum processes. In partnership with customers, BOC Edwards has developed products and services to meet their specific process requirements. This partnership is strengthening continually as BOC Edwards pursues its goal of supplying customers with truly integrated solutions to vacuum needs. 5 BOC Edwards il6 dry pump Networks for intelligent monitoring and control in fabs BOC Edwards has pioneered the supply and use of facility wide networking of pumping systems to allow remote monitoring and system diagnostics. Multiple devices, including pumps and exhaust treatment systems can be monitored from one or more PC workstations, using user friendly Microsoft Windows TM compatible software. Each network is individually designed to meet the unique fab requirements. BOC Edwards iq dry pumps in use at Plessey Roborough in Plymouth UK. (Photograph courtesy of Plessey). The iq, ih and il dry pumps Customer-driven improvements have resulted in the development of our iq, ih and il pumps. Proven performance and high reliability in the most demanding applications Intelligent monitoring and control Patented rotor arrangement gives high volumetric efficiency with low power input Short, simple gas path maximizes internal conductance and minimizes dead space No intercoolers needed Low operating costs - consumables eliminated Safer gas handling Clean vacuum - no backstreaming Designed for low maintenance Intrinsically non polluting These features make Drystar pumps ideal for: Semiconductor processing Sputtering Clean applications in freeze drying, vacuum deposition and special R & D Load lock chambers Vacuum furnaces Chemical processes Operator using the FabWorks Plant Monitor software For North American orders shop online: or call:

2 In April, BOC Edwards acquired the turbomolecular pump business of Seiko Instruments, Inc. Distributed and supported globally by BOC Edwards for nearly twenty years Designed by continuous improvement on existing proven reliable technology Advanced materials and designs provide: - Class leading performance - Low vibration - Guaranteed reliability - Low cost of ownership The broad product range covers all potential turbo pump applications. Qualified by all major semiconductor OEM s Used in all major semiconductor fabrication plants Installed base of over 7, units, 85% in the semiconductor industry Exhaust gas management system design 5 Key features Multi-axis magnetic bearing system High Throughput versions for high flow processes Low vibration characteristics Advanced controller technology Full interfacing capability Features and benefits Improved pumping performance - Optimized for semiconductor process pressures - Maximized gas throughput for each flange size - Applications specific models New generation controllers Compact (/ rack) controller - Auto tune enabling mix and match pumps - Integrated TMS control - Improved diagnostics High power dc motor drive - Fast ramp-up time - Self regeneration upon power failure, eliminating the need for batteries TPU units on a CVD application exhaust (Photograph courtesy of TI, Dallas, USA) BOC Edwards are unique in offering the broadest range of exhaust management technologies, demonstrated in a series of products and systems designed to meet all customer requirements, from low-cost facility management to full environmental protection. The cartridge change cart for the Gas Reactor Column range simplifies the routine maintenance of these state-of-the-art exhaust management units. SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT For North American orders shop online: or call:

3 FABMAX - service for the life of your fab XPert 5 BOC Edwards is one of the world's largest suppliers of gases, vacuum & exhaust management equipment and chemical management systems to the semiconductor device, flat panel display and process tool manufacturing industries. Our global network of manufacturing facilities and service support centers is dedicated to the delivery of the highest level of quality, safety and customer service. BOC Edwards continues strengthen our substantial infrastructure built over more than two decades of service to the semiconductor industry. We operate in every major semiconductor region in the world - ensuring you have local support wherever you are. Building on our product and application expertise and our widening base of strategic alliances, we have developed the FABMAX support program. Equipment and component management Know how services Diagnostic and Analytical Training Web services SemiServe.com: EHS (environmental, health & safety) training and technical resources XpertFabServices.com- Design resources for gas, chemical and vacuum systems (See section for contact information) Semiconductor chamber component cleaning BOC Edwards Kachina offers full service semiconductor chamber parts cleaning, surface enhancements and component management services. Selective chemical stripping capabilities With controlled chemistries and over 75 deposition-to-substrate recipes, stock loss is reduced, component life is extended, replacement costs reduced. Dedicated process lines, segregated copper strip, end-point detection and mm capability. Carbon dioxide cleaning Combined with aqueous techniques, significantly reduces mobile ions, outgassing levels, resulting in faster chamber requalification. Surface enhancement Five-axis, robotically controlled twin wire arc spray optimizes surface roughness, resulting in extended and predictable times between preventive maintenance. Full critical dimensional inspection and metrology capability Component management services Assembled pre-conditioned chamber-ready component sets transported in our patented Quick Kit TM cleanroom compatible transport container. Increases tool uptime, reduces time to perform preventative maintenance, eliminates need for customer to manage spares inventory. Global capabilities There are three U.S. full service facilities (Phoenix, Austin, Hillsboro), and the newest full service facility in Corbeil, France. We also offer in-fab operations in Israel, China and the UK. Global network of facilities providing: Equipment and Systems Repair and Upgrade BOC Edwards Kachina process tool parts cleaning and management X Site Arizona 95 E. Watkins Phoenix, AZ 85 +() 6 Productivity support On-site management of critical materials and systems including Bulk and special gases Chemicals Vacuum Exhaust management Project and design Texas 7 Commercial Center Dr. Austin, TX 787 +() 5 6 Oregon 6 W. Cornelius Pass Road Hillsboro, OR 97 +() Turnkey project management for gas, chemical, vacuum, abatement and other utility systems ISinc D design Process tool hook-up services France Boulevard John Kennedy 95 Corbeil Essonnes Cedex +() For North American orders shop online: or call:

4 ih, if, il, L, IPX AND EPX DRY PUMPS AND ACCESSORIES These are a new range of dry pumps for the semiconductor industry. ih DRY PUMPS if8 DRY PUMP The if8 is the optimal solution for the demanding load lock pump down requirements of flat panel display process tools. Building on the proven quality and reliability of BOC Edwards products, the if8 delivers improved pumping performance, the capability to achieve shorter load lock cycle times and increased tool throughput. Features and benefits: Rapid loadlock pump down saves vital seconds High reliability on high frequency cycling applications Interfaces available for all process tools 9 The ih pumps provide high reliability coupled with low cost of ownership for difficult processes such as etch, PECVD and LPCVD used for silicon wafer and flat panel display manufacturing. Features and benefits: Robust, heavy duty pump mechanism optimized for particulate and by-product High operating temperature prevents condensation Compact, efficient design with small footprint and high pumping speed Low cost of ownership Comply with CE, SEMI S, UL and Korean S Mark ih8 and ih6 The ih8 and ih6 have been added to the range of ih Dry Pumps to meet the high flow rate pumping requirements of mm Semiconductor and Flat Panel Display processes, offering peak pumping speeds of 8 m h - and 6 m h - respectively. As with other ih pumps in the product range, these new additions offer proven high reliability and low cost of ownership for difficult processes such as etch, PECVD and LPCVD where particulate, condensable and corrosive by-products are present. il DRY PUMPS The il is specifically designed for clean processes to give very low cost of ownership and exceptional reliability, requiring zero periodic maintenance between rebuilds. With their quiet operation, small footprint and high pump speeds, they are ideally suited to loadlock, transfer chamber, PVD, SEM and similar duties. The iln variants include shaft seal nitrogen purging and are designed for light duty applications such as dielectric etch. Features and benefits: Low cost of ownership, with no nitrogen (il), low power and low consumption of cooling water Compact, efficient design, with small footprint and high pumping speeds High reliability, so low service costs Comply with CE, SEMI S, UL and Korean S Mark SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT For North American orders shop online: or call:

5 L7 DRY PUMP The L7 is a simple low cost dry pump specifically designed for clean loadlocks and similar applications. Features and benefits: Low cost of ownership, with no nitrogen, low power and low consumption of cooling water Simple control Complementary to the ih range of pumps is the new il range of pumps specifically engineered for lowest cost of ownership on clean, light duties. The il pumps share many of the design features of the ih range (specifically long service life) coupled with a design which optimizes clean performance with minimized utility consumption. A novel seal and shaft design allows operation without nitrogen for these duties. Refer to the information in this table to select either the ih or the il pumps for your application. The table also shows recommendations for the exhaust management options to use. 9 ih AND il PUMPS: APPLICATIONS INFORMATION PROCESS ih iln il EXHAUST MANAGEMENT LPCVD nitride Water Cooled Trap and TMS and GRC LPCVD others GRC or TPU PECVD nitride TMS, and GRC or TPU PECVD Others TMS, and GRC or TPU Etchers Metal TMS and GRC Other GRC Ion implant Strippers and ashers Transfer chambers (dirty) Transfer chambers (clean) Load lock PVD Sputtering SEM First choice Second choice TMS = Temperature Management System GRC = Gas Reactor Column TPU = Thermal Processing Unit The above shows the Zenith integrated pump and abatement system featuring two ih pumps. The new range of BOC Edwards ih dry pumps are specifically designed for the harshest of semiconductor processes. For these applications, pumps like the ih that operate at high temperature are an advantage. In addition, the ih pumps have specially enhanced particulate handling capability. ih pumps are designed for long service life and highly efficient use of utilities like cooling water, nitrogen and power. With very small footprint and pumping speeds enhanced for the latest processes, they form the optimum choice for low cost of ownership in demanding service. For North American orders shop online: or call:

6 ih8 AND ih6 DRY PUMPS - ft min 6 Hz ih6 5 Hz ih6 ih Peak speed m h - ft min Ultimate vacuum Typical shaft-seal nitrogen flow (slm) Typical cooling-water flow l h - With shaft-seal purge only At 5 psi pressure drop ih8 ih6 5 Hz 6 Hz 5 Hz 6 Hz x - x - x - 7 x -. x x -.5 x - 5. x - l min - Power input at vacuum..7.. (kw) Rated motor power (kw) Oil capacity (l) Inlet connection ISO6 ISO Outlet connection NW NW Weight (kg) 5 m h - ft min Hz ih8 5 Hz ih8 6 Hz ih8 5 Hz ih Pa ih8 ih SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT m h ih Pa 6 Hz ih6 5 Hz ih6 For North American orders shop online: or call:

7 ih6 (8.7) 66 (6.) 6 (.8) ih6 dry pump /8 V 5/6 Hz A V 6 Hz A /5 V 5 Hz A V 6 Hz A (.8) 89 (.) For information about ih accessories, see page. 9 9 (5.5) 95 (7.68) 68 (.68) 9 (.66) 66 (6.) 79 (.8) 95 (6.) (.) 8 (.89) (.6) Inlet Outlet Air-extraction port ih8 (5.55) 7 (8.7) 9 (5.5) 95 (7.68) 95 (.7) 59 (.8) 68 (.68) (.) 56 (.7) 8 66 (6.) (.) 78 (.75) 96 (6.6) (5.8) Inlet Outlet Air-extraction port The ih dry pumps consist of: fully enclosed 5 stage dry pump with water-cooled motor, electrics and sensor control, gas system, facility for communication and control links for accessories and process tools, and pump display terminal. In addition, the ih6 has a direct-drive mechanical booster pump. ih8 dry pump /8 V 5/6 Hz A V 6 Hz A /5 V 5 Hz A V 6 Hz A For North American orders shop online: or call:

8 ih DRY PUMP min - ft Hz 5 Hz ih Typical shaft-seal nitrogen flow slm Inlet connection ISO Outlet connection NW Typical cooling-water flow l h - l min - Oil capacity.65 l Weight kg Peak speed m h - 95 ft min - 56 Ultimate vacuum. x - At 5 psi pressure drop With shaft-seal purge only 5 Hz 6 Hz x x - 6 x - Power input at vacuum (kw).5.8 Rated motor power (kw) m h 8 (.8) 9 (5.5) 68 (.68) 95 (7.68) (8.7) (.6) 66 (6.) 6 (.8) 599 (.58) 9 66 (6.) (.66) 79 (.8) 95 (6.) Inlet Outlet Air-extraction port Inverter The ih dry pump consists of: fully enclosed 5 stage dry pump with water-cooled motor, direct-drive mechanical booster pump, electrics and sensor control, gas system, facility for communication and control links for accessories and process tools, and pump display terminal. 5 (8.7) (.) 8 (.89) 89 (.) 99 (9.6) 95 SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT Hz 5 Hz ih 5 Pa For information about ih accessories, see page. ih dry pump /8 V 5/6 Hz A V 6 Hz A /5 V 5 Hz A V 6 Hz A For North American orders shop online: or call:

9 ih8 AND ih6 DRY PUMP min - ft ih8, 6Hz (5.75) (.9) 67 (6.5) 6 (5.) 85 (5.6) 5 The ih8 has been designed specifically for high throughput applications in the mm and flat panel display markets. This pump combines quality and reliability based on years dry pumping experience. The ih8 provides low power consumption minimizing environmental impact and running costs. Features & benefits Low power consumption Small footprint Proven reliability from years of experience Conforms to international standards Typical shaft-seal nitrogen flow slm Inlet connection ISO6 Outlet connection NW Typical cooling-water flow l h - l min - Oil capacity.6 l Weight 5 kg Peak speed m h - 8 ft min - 6 l min -, Ultimate vacuum x x - Pa. x - Power input at vacuum (kw). Rated motor power (kw) 7. With shaft-seal purge only - m h 878 (.57) 7 (8.5) 5 (9.5) Inlet Outlet Alternative outlet Air-extraction port 5 Inverter For details of ih6 please contact BOC Edwards. 66 (6.) 67 (.) (.5) 5 (5.9) ih8 dry pump /8 V, 5/6 Hz A V, 6 Hz A /5, 5/6 Hz A V, 6 Hz A (.5) 885 (.8) (8.) ih8, 5Hz Pa For North American orders shop online: or call:

10 NEW if8 DRY PUMP m h - if Hz 5 Hz 5 Pa 97 The if8 is the optimal solution for the demanding load lock pump down requirements of flat panel display process tools. Building on the proven quality and reliability of BOC Edwards products, the if8 delivers improved pumping performance, the capability to achieve shorter load lock cycle times and increased tool throughput. Features & benefits Rapid loadlock pump down saves vital seconds High reliability on high frequency cycling applications Interfaces available for all process tools Typical gas ballast flow 59 slm Inlet connection ISO6 Outlet connection NW Typical cooling-water flow 6 l h - / 6 l min - Weight 585 kg Peak speed m h - ft min - l min - Ultimate vacuum Pa At psi pressure drop With shaft-seal purge only 5 Hz 6 Hz x - 6 x x -.75 x -.5 Power input at ultimate (kw) ft min - 9 (5.55) (.57) 7 (8.5) 6 Hz 5 Hz 5 (.5) (9.5) 6 (.7) 87 (9.7) 7 (6.8) 9 (6.69) 9 (5.87) 7 (5.6) if8 (.5) 889 (5.) SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT Inlet Outlet Alternative outlet Air-extraction port if8 dry pump /8 V 5/6 Hz A5--95 V 6 Hz A For North American orders shop online: or call:

11 L7 DRY PUMP - ft min Hz 5 Hz L (8.7) (.85) Peak speed m h - ft min - l min - Ultimate vacuum Pa 5 Hz 6 Hz x -.8 x x -. x - Typical shaft-seal nitrogen flow slm Inlet connection ISO6 ISO6 Outlet connection NW NW Typical cooling water flow at psi pressure drop l min -.5 l h Power input at ultimate (kw)..5 Rated motor power (kw).8. Oil capacity (l) Weight (kg) 55 (.69) 77 (.8) 5 (7.7) 89 (7.) (.8) 69 (.76) 67 (6.) 65 (6.5) Inlet Outlet Extractor Fan Port The L7 system includes as standard: optimally designed 5 stage dry pump for clean applications with enclosed, water cooled motors. 6 (9.9) m h - L7 dry pump /V, 5/6 Hz A L Hz 5 Hz Pa For North American orders shop online: or call:

12 il7, il7n, il6, il6n DRY PUMPS min - ft il7/il7n Hz il7/il7n 5 Hz il7/il7n 99 Peak speed m h - 7 ft min - Ultimate vacuum With shaft-seal purge only At 5 psi pressure drop il7/il7n il6/il6n 5 Hz 6 Hz 5 Hz 6 Hz x - x - x - x -.8 x -. x -. x -.5 x - Typical shaft seal nitrogen flow (slm) / / Typical cooling-water flow l h - l min Power input at vacuum (kw) Rated motor power (kw) Oil capacity (l).75.5 Inlet connection ISO6 ISO Outlet connection NW NW Weight (kg) 5 m h il7/il7n m h - ft min - - il7/7n Hz il6/il6n 5 Hz il6/il6n 6 Hz il6/il6n 5 Hz il6/il6n il6/il6n il6/il6n (.8) 68 (.68) (5.55) 7 (8.7) 8 66 (6.) (.) 78 (.75) Pa SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT Pa 6 Hz il7/il7n 5 Hz il7/il7n 9 (5.5) 95 (7.68) 95 (.7) 96 (6.6) (.) 56 (.7) (5.8) Inlet Outlet Air-extraction port For North American orders shop online: or call:

13 il6/6n 95 (6.) 66 (6.) (8.6) 6 (.8) 89 (.) 8 (.8) (.) 9 (.66) 66 (6.) 79 (.8) 9 (5.5) 95 (7.68) Inlet Outlet Air-extraction port The il dry pumps consist of: fully enclosed 5 stage dry pump with water-cooled motor, electrics and sensor control, gas system, facility for communication and control links for accessories and process tools. In addition, the il6 has a direct-drive mechanical booster pump. For information about il accessories, see page. il7 dry pump /8 V 5/6 Hz A V 6 Hz A /5 V 5 Hz A V 6 Hz A il7n dry pump /8 V 5/6 Hz A V 6 Hz A /5 V 5 Hz A V 6 Hz A il6 dry pump /8 V 5/6 Hz A V 6 Hz A /5 V 5 Hz A V 6 Hz A il6n dry pump /8 V 5/6 Hz A V 6 Hz A /5 V 5 Hz A V 6 Hz A For North American orders shop online: or call:

14 ih AND il ACCESSORIES ih ACTIVE GAUGE KIT il PUMP DISPLAY TERMINAL Use the Pump Display Terminal to operate the il system manually and to display the status of the il system Allows the ih system to monitor the pump inlet pressure with a BOC Edwards Active gauge. Active gauge and cables not included, see page 75. Pump Display Terminal D7-7-8 ih Active gauge kit D7-- ih/il COMMUNICATIONS MODULE Allows your process tool or PC-based software to control and monitor the ih or il system through a serial or parallel port. ih/il communications module Serial communication only Serial and parallel communications/control Parallel control only TOOL INTERFACE MODULE The Tool Interface Module allows enhanced control of the ih or il system through your OEM process tool. FABWORKS D7-- D7-5- D7-6- We have a range of tool interface modules available. Please contact BOC Edwards for more information. Extension cable m D7-7-6 m D m D EMO m D m D m D m D m D7-7-6 Allows you to network together all the intelligent dry pumps and exhaust gas management systems in your installation. SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT Each FabWorks central monitoring system is specified and built for your particular installation. Please contact BOC Edwards for more information. For North American orders shop online: or call:

15 IPX DRYPUMPS The IPX series of drypumps were specifically designed to meet the demanding requirements placed on advanced semiconductor process tool vacuum systems. In times when space is at a premium the IPX range of drypumps replaces conventional multiple pump systems with a single pump that can be mounted on the tool to minimize footprint. Features and benefits Unique pumping mechanism - the IPX can pump down from atmosphere to TMP base pressure and can operate continuously at all inlet pressures. Clean bearing system - conventional high vacuum bearings use grease lubrication which can be a source of contamination in process tools. IPX pumps have no high vacuum bearings and present no other source of contamination. Extremely reliable - field proven reliability with MTBFp = years (SEMI E) with service periods of around 5 years. Flexible mounting options - the IPX range can be integrated into the tool which saves space or they can be installed remotely wherever is most convenient. Network compatible - all IPX pumps can be ordered with Cnet which enables them to be connected to a Fab-Wide network. For North American orders shop online: or call:

16 IPX DRY PUMP Typical cooling-water l h - Power at ultimate (kw) <. Rated motor power (kw).8 Oil capacity (l). Weight (kg) 55 Gas module available on request - h m - IPX is an innovative concept in next generation pumping. As the first point of use pump to be integrated onto process tool platforms, it has established a proven track record for extremely high performance and reliability. It is in widespread use for pumping Load Locks on the advanced mm process tools offering rapid pump down from atmosphere to less than x -. Features and benefits Innovative pumping mechanism Robust design Extremely clean vacuum No high vacuum bearings Low noise and vibration Compact construction Cleanroom compatible Lightweight Small footprint Low cost of ownership Sub-fab space saving No vacuum foreline No nitrogen Low power and cooling water High reliability MTBFp = years (SEMI E) Zero periodic maintenance Low service costs (.) 75 (6.89) 8 x Ø. (.) (8.66) 6 (8.5) 8 (.) 7 (6.8) 7 (.66) IPX (.) 5 (.55) (7.87) Pa SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT Peak speed m h - ft min - l min - Ultimate vacuum Pa IPX <5 x - < x - <.5 Typical shaft seal nitrogen flow (slm) Inlet connection NW Outlet connection NW5 Noise db(a) 56 Pump inlet Cooling water outlet Cooling water inlet Pump outlet 5 Fixing hole: Ø. 6 (.5) 8 (.8) (5.59) IPX /8 V, 5/6 Hz A V, 5/6 Hz A9--97 For North American orders shop online: or call:

17 IPXA DRY PUMP Typical cooling-water l h - Power at ultimate (kw) <. Rated motor power (kw).8 Oil capacity (l). Weight (kg) 55 Gas module available on request - h m IPXA Pa IPXA is an innovative concept in next generation pumping. Integrated onto process tool platforms it has established a proven track record for extremely high performance and reliability. It is in widespread use for pumping Load Locks on the advanced mm process tools offering rapid pump down from atmosphere to less than x -. IPXA differs from IPX in the orientation of the electrical boxes. Features and benefits Innovative pumping mechanism Robust design Extremely clean vacuum No high vacuum bearings Low noise and vibration Compact construction Cleanroom compatible Lightweight Small footprint Low cost of ownership Sub-fab space saving No vacuum foreline No nitrogen Low power and cooling water High reliability MTBFp = years (SEMI E) Zero periodic maintenance Low service costs (.) (.) 5 (.97) (8.) 8 (.).6 (.85) 5 (.) (5.59) 75 (6.89) 7 (.66) 6.5 (.) 5 (.55) (5.67) (7.87) 8 x Ø. (.) 5 (.) Peak speed m h - ft min - l min - Ultimate vacuum Pa IPXA <5 x - < x - <.5 Typical shaft seal nitrogen flow (slm) Inlet connection NW Outlet connection NW5 Noise db(a) 56 Pump inlet Cooling water outlet Cooling water inlet Pump outlet 5 Fixing hole: Ø. 8 (.8) IPXA /8 V, 5/6 Hz A V, 5/6 Hz A9--97 For North American orders shop online: or call:

18 IPX8A DRY PUMP Typical cooling-water l h - Power at ultimate (kw) <. Rated motor power (kw).8 Oil capacity (l). Weight (kg) 55 Gas module available on request 8 6 IPX8A - m h IPX8A is a new vacuum pump designed for use on low pressure load lock and transfer chamber applications. Its innovative pumping mechanism is unique in pumping from atmospheric pressure and achieve inlet pressures of less than 7 x -5. The pump can operate continuously at any inlet pressure and exhausts to atmospheric pressure. Cleanroom compatibility means the pump can be located close to the process tool. Features and benefits Innovative pumping mechanism Robust design Extremely clean vacuum No high vacuum bearings Low noise and vibration Compact construction Cleanroom compatible Lightweight Small footprint Low cost of ownership Sub-fab space saving No vacuum foreline No nitrogen Low power and cooling water High reliability MTBFp = years (SEMI E) Zero periodic maintenance Low service costs Pa (.) (.) (.97) 5 (.) (8.) 8 (.).6 (.85) 8 (.8) (5.59) 75 (6.89) (5.67) 5 (.) 7 (.66) 6.5 (.) (7.87) 5 (.55) 8 x Ø. (.) SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT Peak speed m h - ft min - l min - Ultimate vacuum Pa IPX8A 8 6 < x - <7 x -5 < x - Typical shaft seal nitrogen flow (slm) Inlet connection ISO6 Outlet connection NW5 Noise db(a) 56 Pump inlet Cooling water outlet Cooling water inlet Pump outlet 5 Fixing hole: Ø. IPX8A /8 V, 5/6 Hz A V, 5/6 Hz A9--97 For North American orders shop online: or call:

19 IPX5A DRY PUMP Inlet connection ISO6 Outlet connection NW5 Noise db(a) 56 Typical cooling-water l h - Power at ultimate (kw) <. Rated motor power (kw).8 Oil capacity (l). Weight (kg) 58 Gas module available on request m h IPX5A IPX5A is a new vacuum pump designed for use on low pressure load lock, transfer and light process chamber applications. IPX5A provides the same performance as a small turbomolecular and backing pump combination in a single package. Its innovative pumping mechanism is unique in pumping from atmospheric pressure and achieve inlet pressures of less than 7 x -7. The pump can operate continuously at any inlet pressure and exhausts to atmospheric pressure. Cleanroom compatibility means the pump can be located close to the process tool. Features & benefits Innovative pumping mechanism Robust design Extremely clean vacuum No high vacuum bearings Low noise and vibration Compact construction Cleanroom compatible Lightweight Small footprint Low cost of ownership Eliminates secondary pumps Sub-fab space saving No vacuum foreline No nitrogen Low power and cooling water High reliability MTBFp = years (SEMI E) Zero periodic maintenance Low service costs (.) (.) (.97) 5 (.) (8.) 8 (.).6 (.85) 8 (.8) (5.59) 75 (6.89) (5.67) 5 (.) 7 (.66) 6.5 (.) (7.87) 5 (.55) 8 x Ø. (.) 5 Pa Peak speed m h - ft min - l min - Ultimate vacuum Pa IPX5A < x -6 <7 x -7 < x - Typical shaft seal nitrogen flow (slm) Pump inlet Cooling water outlet Cooling water inlet Pump outlet 5 Fixing hole: Ø. IPX5A /8 V, 5/6 Hz A V, 5/6 Hz A9--97 For North American orders shop online: or call:

20 EPX HIGH VACUUM DRYPUMPS The new compact EPX8 High Vacuum Drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX8 is capable of pumping from atmosphere to ultimate pressures of <7 x -5. Based on the successful award winning IPX range, the modular EPX8 offers outstanding performance in a package that is % lighter, % smaller and requires % less power than the IPX. EPX APPLICATIONS SUMMARY NEW The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX L Series has been designed for use in clean applications in which a non-corrosive and non-particulate forming environment is used. The EPX N Series include a gas module that provides Nitrogen purge extending the application range to medium processes in which low levels of corrosive vapors and particulates are expected. A summary of the recommended process range of EPX is shown below. IPX is also shown for reference. 7 Features & benefits: Compact footprint - as one of the smallest on-tool pumps available the EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely if preferred. Low cost of ownership - EPX requires only. kw of power and incorporating idle mode to maximize power efficiency. Unique patent protected pumping mechanism - the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. Ultra clean mechanism - conventional high vacuum bearings use grease lubrication which can be a source of contamination in process tools. EPX pumps have no high vacuum bearings and present no other source of potential contamination. Extremely reliable - based on field proven IPX technology the EPX has a MTBFp = years (SEMI E) with service periods of around every 5 years to maximize the life of the pump. Network compatible - available with End User Control the EPX series can be connected to a Fab-Wide network for diagnostic monitoring and control. If the process you are interested in is not shown on the above summary please contact your nearest BOC Edwards sales office for further information. SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT For North American orders shop online: or call:

21 NEW EPX8L HIGH VACUUM DRYPUMP EPX5L HIGH VACUUM DRYPUMP 8 The EPX8L is designed for clean duty load lock and transfer applications. Features and benefits Patent protected mechanism Low ultimate pressure Low vibration High reliability Low service costs Zero periodic maintenance Choice of L and N versions EPX8L for clean duty EPX8N for light duty Low cost of ownership Low power only. kw Sub fab space savings Idle mode Compact unit Point of use or remote installation Lightweight Small footprint The EPX5L is designed for clean duty load lock and transfer applications. Features and benefits Patent protected mechanism Low ultimate pressure Low vibration High reliability Low service costs Zero periodic maintenance Choice of L and N versions EPX5L for clean duty EPX5N for light duty Low cost of ownership Low power only. kw Sub fab space savings Idle mode Compact unit Point of use or remote installation Lightweight Small footprint Peak speed m h - ft min - l min - Ultimate vacuum Pa IPX8L 8 85 < x - <7.5 x -5 < x - Typical shaft seal nitrogen flow (slm) Inlet connection ISO6 Outlet connection NW5 Noise db(a) 55 Typical cooling-water l h - 5 Power at ultimate (kw). Rated motor power (kw). Weight (kg).5 For EPX8L - Use EPX5N for light to medium duty applications. See Page 9 for summary. For information about how to order a EPX8L High Vacuum Drypump, see page 9. Peak speed m h - ft min - l min - Ultimate vacuum Pa EPX5L < x -6 <7.5 x -7 < x - Typical shaft seal nitrogen flow (slm) Inlet connection ISO Outlet connection NW5 Noise db(a) 55 Typical cooling-water l h - 5 Power at ultimate (kw). Rated motor power (kw). Weight (kg).5 For EPX5L - Use EPX N series for light to medium duty applications. See page 9 for summary. For information about how to order a EPX5L High Vacuum Drypump, see page 9. For North American orders shop online: or call:

22 NEW EPX HIGH VACUUM DRYPUMPS ORDER MATRIX EPX is a configured product. Use the matrix below to choose the correct part number for the configuration you require. Speed Application L N LE TIM None C SPI E7 TEL 5 LAM 6 Hitachi 7 MCM Water None /8" Quick /" Quick 9/6" JIC Voltage 8 V V A9 If you are unsure of the correct configuration of EPX you require for your application, please contact your nearest BOC Edwards sales office for help. 9 SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT For North American orders shop online: or call:

23 iqdp AND iqdp8 DRY PUMPS A B Maximum continuous inlet pressure Typical shaft-seal nitrogen flow Warm-up time Outlet connection Oil capacity Peak speed m h - ft min - 6 Displacement m h - 5 ft min -.6 Ultimate vacuum Inlet connection x 7 slm 5 min NW. l With shaft-seal purge only For lower exhaust gas temperatures, increased flow is required. Exhaust gas temperature 5 ºC Exhaust gas temperature 5 ºC iqdp iqdp8 5 Hz 6 Hz 5 Hz 6 Hz x - x - x - x -.8 x -. x -. x x - ISO bolted Typical cooling-water flow l h - 5 US gal min -.6 ISO6 bolted 5.55 Power input at vacuum (kw)...6. Rated motor power (kw).. Weight (kg) 86 6 m h (.5) 9 (5.5) 95 9 (7.68) (.5) A B C D E F iqdp iqdp The pumps listed below are standard configurations, recommended for the types of applications listed. To order other pump configurations, use the iq ordering matrix: see page (.75) 9 (.7) iq 8H for semiconductor processes 8 V 6 Hz iq-- 5 V 5 Hz iq--7 iq C for clean processes 8 V 6 Hz iq-- 5 V 5 Hz iq--7 iq 8C for clean processes 8 V 6 Hz iq-- 5 V 5 Hz iq--7 iq 8H is recommended for semiconductor processes like CVD and etch. The configuration consists of: iqdp8, -ph, harsh duty gas module and pump display module. iq C and iq8c are recommended for clean processes like load lock, transfer chambers and PVD. The configuration consists of: iqdp or iqdp8 pump, -ph, clean duty gas module and pump display module. C E D F iqdp, 5Hz - - Pa 5 Pump speed with shaft-seal purge only. 5 Hz iqdp8 5 Hz iqdp iqdp8 ft min - iqdp iqdp, 6Hz - - For North American orders shop online: or call:

24 iqdp/iqmb5f AND iqdp8/iqmb5f DRY PUMP SYSTEMS iqdp8/iqmb5 Maximum continuous inlet pressure Typical shaft-seal nitrogen flow Warm-up time Inlet connection Outlet connection Oil capacity iqdp pump iqmb5f, coupling cover iqmb5f, shaft-seal reservoir Peak speed m h - 5 ft min - 9 Displacement m h - ft min - 8 Ultimate vacuum Typical cooling-water flow l h - 5 US gal min -.99 Power input at vacuum (kw) iqdp pump iqmb5f Rated motor power (kw) iqdp pump iqmb5f Weight (kg) Direct mounted Frame mounted 7 slm 5 min ISO6 bolted NW. l.5 l. l iqdp/iqmb5f iqdp8/iqmb5f 5 Hz 6 Hz 5 Hz 6 Hz With shaft-seal purge only Exhaust gas temperature 5 C. For lower exhaust gas temperatures, increased flow is required. m h Pump speed with shaft-seal purge only. 5 Hz iqdp8/iqmb5 5 Hz iqdp/iqmb x - x - x - 7 x -.9 x -.5 x -.5 x - 5. x iqmb5, 5Hz Pa ft min Direct mounted A A B C D E iqdp/iqmb5f iqdp8/iqmb5f Electrics module mounted horizontally. With the electrics module mounted vertically, this height is 78 mm. Frame mounted (.57) (9.9) iqdp/iqmb5 6 6 (.) (.) 95 (7.68) - A B C D E F iqdp/iqmb5f iqdp8/iqmb5f iqmb5, 6Hz 8.5 C 7 (.) (5.9) B 99 (8.98) (.6) D E B E A F D 967 (8.7) C SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT For North American orders shop online: or call:

25 The systems listed below are standard configurations, recommended for the types of applications listed. To order other systems, use the iq ordering matrix: see page 9.. iq 5H for semiconductor processes 8 V 6 Hz iq V 5 Hz iq5-5-7 iq 5C for clean processes 8 V 6 Hz iq V 5 Hz iq5-5-7 iq 5H is recommended for semiconductor processes like CVD and etch. The system consists of: iqdp8 and iqmb5f pumps, -ph, fully enclosed, harsh duty gas module and pump display module. iq 5C is recommended for clean processes like load lock, transfer chambers and PVD. The system consists of: iqdp8 and iqmb5f pumps, -ph, fully enclosed, clean duty gas module and pump display module. For North American orders shop online: or call:

26 iqdp/iqmb5f AND iqdp8/iqmb5f DRY PUMP SYSTEMS Maximum continuous inlet pressure Typical shaft-seal nitrogen flow Warm-up time Inlet connection Outlet connection Oil capacity iqdp pump iqmb5f, coupling cover iqmb5f, shaft-seal reservoir Peak speed m h - 5 ft min - 7 Displacement m h - 55 ft min - 99 Ultimate vacuum Typical cooling-water flow l h - 5 US gal min -.99 Power input at vacuum (kw) iqdp pump iqmb5f Rated motor power (kw) iqdp pump iqmb5f Weight (kg) Direct mounted Frame mounted 7 slm 5 min ISO bolted NW. l.5 l. l iqdp/iqmb5f iqdp8/iqmb5f 5 Hz 6 Hz 5 Hz 6 Hz With shaft-seal purge only Exhaust gas temperature 5 ºC. For lower exhaust gas temperatures, increased flow is required. m h Pump speed with shaft-seal purge only. 5 Hz iqdp8/iqmb5f 5 Hz iqdp/iqmb x - x - x - 7 x -.9 x -.5 x -.5 x - 5. x iqmb5f, 5Hz.. 5 Pa ft min - - Direct mounted 95 (7.68) A B C D iqdp/iqmb5f iqdp8/iqmb5f For this pump combination, the center of the check-valve extends 7 mm beyond the end of the iqmb pump-motor. Frame mounted (.57) (9.9) 6 6 (.) (.) - A B C D E iqdp/iqmb5f * iqdp8/iqmb5f For this pump combination, the center of the check-valve extends 6.5 mm beyond the end of the iqmb pump-motor. iqdp/iqmb5f iqdp8/iqmb5f iqmb5f, 6Hz 8.5 D 79 C (.) (7.5) 99 (8.98) A (.6) C D 89 (5.) A E B 98 (7.) B Tor SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT For North American orders shop online: or call:

27 The systems listed below are standard configurations, recommended for the types of applications listed. To order other systems, use the iq ordering matrix: see page 9. iq 5H for semiconductor processes 8 V 6 Hz iq V 5 Hz iq6-5-7 iq 5C for clean processes 8 V 6 Hz iq V 5 Hz iq6-5-7 iq 5H is recommended for semiconductor processes like CVD and etch. The system consists of: iqdp8 and iqmb5f pumps, -ph, fully enclosed, harsh duty gas module and pump display module. iq 5C is recommended for clean processes like load lock, transfer chambers and PVD. The system consists of: iqdp8 and iqmb5f pumps, -ph, fully enclosed, clean duty gas module and pump display module. For North American orders shop online: or call:

28 iqdp8/iqmbf DRY PUMP SYSTEM (.9) 8.5 (.57) (9.9) (.5) 8 (8.58) Maximum continuous inlet pressure Typical shaft-seal nitrogen flow 7 slm Warm-up time 5 min Inlet connection ISO6 bolted Outlet connection NW Oil capacity iqdp pump. l iqmbf, coupling cover. l iqmbf, shaft-seal reservoir. l iqmbf, gear case.5 l Typical cooling-water flow l h -,.9 US gal min - Rated motor power iqdp pump. kw iqmbf. kw Weight 5 kg Peak speed m h - 85 ft min - 8 Displacement m h - 95 ft min - 7 Ultimate vacuum Power input at vacuum (kw) iqdp pump iqmbf With shaft-seal purge only Exhaust gas temperature 5 C. For lower exhaust gas temperatures, increased flow is required. m h Pump speed with shaft-seal purge only. 5 Hz IQDP8/IQMBF 5 Hz 6 Hz x - 7 x -.5 x - 5. x iqmbf, 5Hz - 5 Pa 6 6 (.) (.) The center of the check valve is 69.5mm inside the end of the iqmb booster frame. The systems listed below are standard configurations, recommended for the types of applications listed. To order other systems, use the iq ordering matrix: see page 9. 5 (.) (.6) (.) iq H for semiconductor processes 8 V 6 Hz iq V 5 Hz iq7-5-7 iq H is recommended for semiconductor processes like CVD and etch. The system consists of iqdp8 and iqmbf pumps, -ph, fully enclosed, harsh duty gas module and pump display module. 8 (.8) 5 SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT iqdp8/iqmbf ft min * (.) (.7) iqmbf, 6Hz For North American orders shop online: or call:

29 QMB5F MECHANICAL BOOSTER PUMP m h Hz iqdp8/iqmb5 iqdp/iqmb5 iqmb5, 5Hz - 5 Pa 7 (7.56) Displacement (swept volume) 5 Hz supply m h -, 85 ft min - 6 Hz supply 75 m h -, ft min - Effective pumping speed at 5 Hz iqdp 5 m h -, 8 ft min - iqdp8 6 m h -, 5 ft min - Rotational speed 5 Hz supply - 9 rpm 6 Hz supply - 5 rpm Ultimate pressure with iqdp backing pump and shaft seals purge only 7 x - Continuous inlet pressure range (with suitable backing pump) - Maximum outlet pressure Pressure differential across pump - 8 Recommended backing pumps iqdp, iqdp8 Inlet connection ISO6 Outlet connection ISO Electrical supply voltage, -phase 5Hz - 8 V, 8-5 V 6 Hz - V, 6 V Motor power. kw Ambient temperature range 5 - ºC Maximum operating humidity 9% RH Minimum cooling water flow (with inlet pressure and ºC) 75 l h - Cooling water connections Inlet Hansen quick connect /8 inch BSP male Outlet Hansen quick connect /8 inch BSP male Recommended oil Fomblin YVAC!^/6 or Krytox 5 Oil capacity Coupling cover.5 l Shaft seal reservoir. l Weight 65 kg Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pump flange. QMB5F 5 Hz A Hz A Supplied with one Co-Seal and one trapped O ring. ACCESSORIES x M x 5 (.59) iqmb5 and 5 motor ancillaries kit Use this kit to convert a QMB5 to an iqmb5. SPARES Clean and overhaul kit Module kit Shim kit ISO (7.8) 8 (5.) ISO 98 (.86) (5.5) 5 (.9) 9 (.5) (9.) 7 (.6) A5-5- A-5-85 A-5-8 A-5-85 Effective pumping speed for air at. with 5 Hz supply. Effective pumping speed with 6 Hz supply will be at least % higher than operation with 5 Hz supply. Depends on pressure. Determined by the hydrokinetic drive. Exact cooling water requirements depend on required gas temperature, TCV setting and inlet pressure. For North American orders shop online: or call:

30 QMB5F MECHANICAL BOOSTER PUMP 788 (.) Displacement (swept volume) 5 Hz supply 55 m h -, ft min - 6 Hz supply 65 m h -, 55 ft min - Effective pumping speed at 5 Hz QDP 5 m h -, 6 ft min - QDP8 9 m h -, ft min - Rotational speed 5 Hz supply - 9 rpm 6 Hz supply - 5 rpm Ultimate pressure with iqdp backing pump and shaft seals purge only 7 x - Continuous inlet pressure range (with suitable backing pump) - Maximum outlet pressure Pressure differential across pump - Recommended backing pumps QDP / iqdp QDP8 / iqdp8 Inlet connection ISO Outlet connection ISO6 Electrical supply voltage, -phase 5 Hz - 8 V, 8-5 V 6 Hz - V, 6 V Motor power. kw Ambient temperature range 5 - ºC Maximum operating humidity 9% RH Minimum cooling water flow (with inlet pressure and ºC) 75 l h - Cooling water connections Inlet Hansen quick connect /8 inch BSP male Outlet Hansen quick connect /8 inch BSP male Recommended oil Fomblin YVAC 6/6 or Krytox 5 Oil capacity Coupling cover.5 l Shaft seal reservoir. l Weight 78 kg Effective pumping speed for air at. with 5 Hz supply. Effective pumping speed with 6 Hz supply will be at least % higher than operation with 5 Hz supply. Depends on pressure. Determined by the hydrokinetic drive. Exact cooling water requirements depend on required gas temperature, TCV setting and inlet pressure. m h - Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pump flange. QMB5F 5 Hz A Hz A Supplied with two trapped O rings. ACCESSORIES iqmb5 and 5 motor ancillaries kit Use this kit to convert a QMB5 to an iqmb5. SPARES M x 5 (.59) Clean and overhaul kit Module kit Shim kit ISO ISO6 (8.7) 79 (7.5) 98 (.86) 96 (7.7) 5 (.5) 6 (.7) 9 (.5) (8.5) x M8 x 6 5 (9.88) A5-5- A-5-85 A-5-8 A SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT iqmb5f, 5Hz Pa 5 Hz iqdp8/iqmb5f 5 Hz iqdp/iqmb5 For North American orders shop online: or call:

31 QMBF MECHANICAL BOOSTER PUMP 958 (7.7) 8 Displacement (swept volume) 5 Hz supply 95 m h -, 75 ft min - 6 Hz supply 5 m h -, 85 ft min - Effective pumping speed (iqdp8) at 5 Hz 85 m h -, 98 ft min - Rotational speed 5 Hz supply - 9 rpm 6 Hz supply - 5 rpm Ultimate pressure with iqdp backing pump and shaft seals purge only 7 x - Continuous inlet pressure range (with suitable backing pump) - Maximum outlet pressure Pressure differential across pump - 9 Recommended backing pumps QDP8 / iqdp8 Inlet connection ISO6 Outlet connection ISO Electrical supply voltage, -phase 5Hz - 8 V / 8-5 V 6 Hz - V / 6 V Motor power kw Ambient temperature range 5 - ºC Maximum operating humidity 9% RH Minimum cooling water flow (with inlet pressure and ºC) 75 l h - Cooling water connections Inlet Hansen quick connect /8 inch BSP male Outlet Hansen quick connect /8 inch BSP female Recommended oil Fomblin YVAC 6/6 or Krytox 5 Oil capacity Gear capacity.5 l Coupling cover. l Shaft seal reservoir. l Weight 57 kg Effective pumping speed for air at. with 5 Hz supply. Effective pumping speed with 6 Hz supply will be at least % higher than operation with 5 Hz supply. Depends on pressure. Determined by the hydrokinetic drive. Exact cooling water requirements depend on required gas temperature, TCV setting and inlet pressure. Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pump flange. QMBF 5 Hz A Hz A Supplied with one Co-Seal and one trapped O ring. ACCESSORIES iqmb motor ancillaries kit Use this kit to convert a QMB to an iqmb. SPARES M x 5 Clean and overhaul kit Module kit Shim kit ISO6 x Ø8 (.7) (.) (9.6) (8.66) 77 (.9) ISO 6 (.) 8 (.89) 8 (7.9) A5-- A-5-85 A-5-8 A-5-85 m h - 8 (.96) 6 (.) 68 (.9) iqmbf, 5Hz Pa For North American orders shop online: or call:

32 iq PUMPING SYSTEM ORDER MATRIX Refer to the table below for information about which gas module to select for your application. For more information, contact BOC Edwards or your local supplier. iq GAS MODULE APPLICATION LIGHT DUTY MEDIUM DUTY HARSH DUTY Load lock Ashers, strippers Sputterers, evaporators Ion implanters Plasma etch Metal Poly/ oxide Others PECVD MOCVD LPCVD Oxide Nitride PSG, BPSG Tungsten, silicides Others For beam line and target only. LTO, HTO, TEOS, Nitrox. To order your iq dry pumping system, choose from the options listed below: Pumps iqdp iqdp8 iqdp and iqmb5f (vertical mount electrics box) iqdp and iqmb5f 5 iqdp8 and iqmb5f 6 iqdp8 and iqmb5f 7 iqdp8 and iqmbf 8 iqdp/iqmb5f (horizontal mount electrics box) Gas module Harsh process Medium process Clean process iqmb booster mounting and enclosures iqdp with no enclosures iqdp with enclosure iqmb direct mounted to iqdp, no enclosures (not available for iqmb) iqmb direct mounted to iqdp, iqdp enclosure (not available for iqmb) iqmb frame mounted to iqdp, no enclosures 5 iqmb frame mounted to iqdp, iqdp and iqmb enclosed Control No Pump Display Module Pump Display Module iq Optional sensors None Oil level monitor(s) Water flow switch Exhaust gas temperature sensor Electrical supply V 5Hz phase V 6Hz phase 8V 5Hz phase 8V 6Hz phase V 6Hz phase 5 8V 5Hz phase 6 5V 6Hz phase 7 6V 6Hz phase 8 Example: iq556 is an enclosed iqdp8 with a frame mounted iqmb55f (8V, 5Hz, -phase), a medium process gas module, a pump display module and an exhaust gas temperature sensor. 9 SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT For North American orders shop online: or call:

33 INTERFACES AND NETWORKS BOC Edwards can provide a range of interface and network options for its semiconductor dry pump and exhaust management products. Communication with individual pump systems is achieved through parallel and serial interfaces or through a PC interface and our special software. Systems of more than one item of vacuum equipment can be connected into a network and monitored with the BOC Edwards FabWorks software. Interfaces and networks are tailored to suit each application and are manufactured to order. Contact BOC Edwards or your local supplier to discuss your specific requirements. INTERFACES AND COMMUNICATIONS Communications interfaces Multiple communications interfaces can be added to BOC Edwards semiconductor dry pump systems, allowing them to communicate through RS, RS85 and optical fiber communication systems. In addition, various Sensorbus interfaces are also available. PC interface kit A single pump system can be connected and controlled by a PC, through the PC Interface Kit. The kit includes a communication module, cables and the BOC Edwards Single Pumpset Monitor software. Used with a portable PC, it is an invaluable tool for service staff to configure and trouble-shoot the pump system. The software allows the user to: Display specific pump parameters on graphs Log data to disc Modify parameter set-points Start and stop the pump The data stored with the pump system (including events, measurements, serial number, and user pump identification) can be uploaded to a PC. The data can then be used by BOC Edwards service and applications staff for continuous product improvement. Contact BOC Edwards or your supplier for information about ordering Interface Kits. PC Interface Kit Desktop configuration D7-8- Laptop configuration (UK) D7-8- Laptop configuration (Europe) D7-8- Laptop configuration (USA) D7-8-5 Laptop configuration (Japan) D7-8- Extension Cables m D7-7-6 m D m D OEM interfaces Working closely with OEMs, BOC Edwards has developed the Tool Interface Module to connect semiconductor dry pump systems to all existing and new semiconductor tools. Advantages of the Tool Interface Module (TIM) include: Application specific configuration checks. When a pump system is switched on or changed, a configuration check is made to ensure that the pump(s), gas module and sensors are connected, as specified for the process. Record of pump change and service history. This facility can be used to analyze how pumps operate on particular processes, and allows electronic tracking of pumps throughout a semiconductor fab. Automatic download of settings. The sensor settings for each process tool are automatically downloaded to the pump when it is switched on. This allows easy pump change, without reconfiguration or the need for manual set-up. Interfacing to other vacuum components. An auxiliary circuit card can be added to operate other vacuum system equipment, such as a gate valve in the foreline. For North American orders shop online: or call:

34 FABWORKS VACUUM AND ABATEMENT NETWORKING The FabWorks system allows multiple vacuum and abatement systems to be viewed remotely via a PC screen. The key features and benefits include: Real time monitoring of pump and abatement systems, increasing efficiency of servicing and maintenance activities Alert notification and alert status monitoring, for rapid response Serial number tracking Down loading of process parameter set-ups to equipment Comprehensive data logging and historical trend production, for equipment optimization Multilingual platform allowing the same network to be viewed in different languages Remote alert notification via pager, mobile phone or , again optimizing response time to issues Flexible viewing via server, Local Area Network (LAN) or Internet Network design The BOC Edwards network uses the reliable LON Works protocol and communicates through special isolated screen twisted pair cable, which provides excellent noise immunity over long distances at high communication rates. The core database now uses a SQL server database for improved data manipulation and handling. The network is made up of segments that are 'daisy chained' together. Network segments of up to m long can be linked together through simple routers to form a single large network of equipment. Up to devices per network can be monitored and several networks can be linked into one server, providing opportunities for + device networks! Viewing the network The FabWorks system is a true web server. The network server links to the LON network and to the LAN as shown. Any client terminal connected to the LAN using Microsoft Internet Explorer 5.5 browser or better can therefore view the network. In addition, FabWorks has the capability to be viewed securely across the Internet, in provision for true E-Diagnostic remote monitoring. Network software The core software comprises of several modules; Fab Explorer - equipment monitoring mechanism, the core of FabWorks User Manager - which configures user security and defines user access privileges Equipment Manager - which maps the network blue print, providing clear indication of equipment / tool relationships Data Logger/Viewer - sets up parameter logging and provides viewing mechanism Service - serial number tracking Configuration Manager - Editing, uploading and downloading equipment recipe's Autopager - Remote alert utility for configuration of pager, mobile phone SMS texting and notification. Network monitoring There are two different ways of monitoring the network. The first mimics the previous FabWork6 viewing system, showing Plant View (over view of all equipment), Group View (showing specific details about a group) or Single Equipment View (showing detail on a single piece of equipment). The second uses the look and feel of a windows explorer to view the equipment. Icons represent, processes, tools, chambers and equipment. These icons change color with a change of state. SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT Browser Lan/Dedicated Ethernet Server LON 5 Interface Module For North American orders shop online: or call: