NeoDry Series. NeoDry 15E 250 NW25. Available (N2 or Air) 250g/h ( 12%)

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Edmund McLaughlin
5 years ago
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1 NeoDry New New Product Product Air Cooled Dry Pump NeoDry Series e-catalog NeoDry-e Ver4.0/11.12 Air-Cooled, Reduced Foot Print, Dry Vacuum Pump, The Lowest CoO, Competitively Priced - Improved in Noise and weight. - Adopted "Air Tight" design to improve reliability. - Decreased power consumption by 20%.(Compare to former "C" model) - Simple Hookup - Does not require Water or N2 - Lowest CoO Among Comparable Pumps - Maintenance Free - Non Contact Internal Components - Applicable for Water Vapor Pumping Air Cooled Dry Pump Specification Table Items Model Max. Pumping Speed (l/min) Ultimate Vacuum (Pa) Max. Inlet Pressure Connection Size Intake Exhaust Rated Motor Output (kw) Power Source(50/60Hz) *1 Gas Ballast *2 Max. Moisture Pumping *3 Noise (db (A)) Weight (kg) *4 Others NeoDry 15E 250 NW25 NW40 NW Single Phase: -115V / Single Phase: V / 3 Phase: V Available (N2 or Air) 23 ( 12%) 250g/h 56 NeoDry 30E Atmospheric 25 ( 14%) Adopted "Air Tight" design *1 Please consult us when utilize other power source. *2 Gas Ballast is required when pumping Moisture and Condensable Gases. *3 This value is measured when gas ballast valve is fully opened. *4 ( ) shows improved ratio to former "C" Models. KASHIYAMA INDUSTRIES, LTD. NeoDry 36E g/h ( 7%) Optional Note With Inlet Closed

2 NeoDry e-catalog NeoDry-e Ver4.0/11.12 Pumping Curve Pumping Speed [L/min] NeoDry36E NeoDry30E NeoDry15E Inlet Pressure [Pa] Pump Schematics (NeoDry 15E,NeoDry 30E) NeoDry15E NeoDry30E NW25 NW Pump Schematics (NeoDry 36E) Air Cooled Dry Pump Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System KASHIYAMA URL: mail address for inquiries: sales@kashiyama.co.jp

MU e-catalog MU-e Ver2.1 08.06 Micro Dry Pump MU Series / For Tool Mount / The world smallest and least power consumption. The pump can be integrated into any equipment easily.

3 MU e-catalog MU-e Ver Micro Dry Pump MU Series / For Tool Mount / The world smallest and least power consumption. The pump can be integrated into any equipment easily. MICRO DRY PUMP MU SERIES - Kashiyama ultimate space save design has realized the pumping speed of 1660l/min with the small foot print 230 mm x 450 mm. - The MU series are perfect for load locks, clean exhaust for transfer rooms and light process application of semiconductor manufacturing. Specification Table Model Specification Maximum Pumping Speed (L/min) Ultimate Pressure (Pa) Maximum Inlet Pressure (Pa) Electric Power Capacity(kW) Power in normal operation (kw) Inlet Flange Outlet Flange Weight(Approx.) (kg) MU MU300 1,660 5, Atmospheric pressure NW50 NW25 60 KASHIYAMA INDUSTRIES, LTD.

4 MU e-catalog MU-e Ver Pump Schematic (MU) Power input connector(cn1) Remote control connector(cn2) 76 Inlet NW50 N2 pressure gauge (attached to MUN) N2 Gas inlet (with Tube Fitting 1/4 straight) (attached to MUN) 22 Lifting Bracket(*2) (R emoving the brackets is possible after installing the pump) 450 Handheld controller connector(cn3) Handheld controller Cable PowerSupply LED(LED1/green) RunLED(LED2/green) E rror Warning LE D(LE D3/orange) Error Alarm LED(LED4/red) Main switch 185 (29) M M (115) Adjuster (OD24*4) Outlet NW25 Cooling water inlet Rc1/4 () C ooling water outlet R c1/4 () RigidCaster(OD40*4) MICRO DRY PUMP MU SERIES Pump Schematic (MU300) M8 2-M8 42 Box Duct(OD50) Inlet NW50 Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department Lifting Bolt (M8*4) N2 Control Valve (for case purge) Adjuster(OD24*4) Outlet NW RigidCaster (OD40*4) N2 (2) 89 (99) Power input connector (CN1) Remote control connector(cn2) Handheld controller connector(cn3) Main switch Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System 26 Handheld controller Cable Power Supply LED(LED1/green) RunLED(LED2/green) E rror Warning LE D(LE D3/orange) Error Alarm LED(LED4/red) 14 N2 pressure gauge Cooling water inletrc3/8 () Cooling water outlet R c3/8 () N2 Gas inlet (with Tube Fitting 1/4 straight) KASHIYAMA URL: mail address for inquiries: sales@kashiyama.co.jp

SDE e-catalog SDE-e Ver2.1 08.06 Dry Screw Pump SDE Series Dry pumps reliable for all applications. Energy-saving feature combined with the reliability, SDE Series achieved lower running cost.

5 SDE e-catalog SDE-e Ver Dry Screw Pump SDE Series Dry pumps reliable for all applications. Energy-saving feature combined with the reliability, SDE Series achieved lower running cost. DRY SCREW PUMP SDE SERIES - Advanced screw technology allows longer life operation under hard applications. - Anti-corrosion material construction allows pumping of corrosive gasses. - The unique screw design and driving system realized 40% reduction in energy consumption, compared to conventional models. Specification Table Specification Model SDE90 SDE120 SDE303 SDE603 SDE1203 SDE2003 Maximum Pumping Speed (L/min) 1,300 2,000 5,000,000 20,000 30,000 Ultimate Pressure (Pa) Maximum Inlet Pressure (Pa) Inlet Flange NW40 NW50 NW80 NW NW160 Outlet Flange NW40 Weight(Approx.) (kg) Electric Power Supply Power in normal operation (kw)* Electric Power Capacity (kva) Cooling Water Supply Purge N2 Gas Supply Atmospheric pressure 3 phase AC V 50/60Hz 4L/min and over 0-60SLM KASHIYAMA INDUSTRIES, LTD. * Power at ultimate pressure.

6 f SDE e-catalog SDE-e Ver Pumping Curve(SP) 00 0 Pumping Speed(L/ SDE90 SDE120 SDE303 SDE603 SDE1203 SDE Pressure(Pa) Pump Schematics (SDE90,SDE120) Pressure (Torr) Controlpanel 170 * 80 * 30 Communication cable (L=2000mm) DRY SCREW PUMP SDE SERIES Dimension:mm Model H SDE SDE Inlet NW40 NW50 H(Inlet) Outlet NW (Outlet) Pump Schematics (SDE303,SDE603,SDE1203,SDE2003) Check valve (OPTION) S ilencer (OPTION) Outlet NW40 A(Inlet) B(Outlet) C(Outlet) (163) Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department Caster (89) a Duct OD Inlet 60 b Duct (50) N2 control valve N2 pressure gauge Cooling water outlet Rc3/8 N2 control valve N2 pressure gauge Outlet NW40 (28) Caster D (8) g 42 Cooling water outlet Rc3/8 Model Inlet Duct D W H A B C a b c d e f g S DE 303 NW50 OD S DE 603 NW80 S DE 1203 NW OD S DE 2003 NW160 OD Inlet (c) (90) H Controlpanel 170 * 80 * Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System d R emote control connector P ower connector with PIPE-FITTING 1/4 straight Cooling water inlet Rc3/8 W e R emote control connector P ower connector with PIPE-FITTING 1/4 straight Cooling water inlet Rc3/8 KASHIYAMA URL: mail address for inquiries: sales@kashiyama.co.jp

SDL e-catalog SDL-e Ver2.1 08.06 High Throughput Dry Pump SDL Series HIGH THROUGHPUT DRY PUMP SDL SERIES Higher pumping speed.

7 SDL e-catalog SDL-e Ver High Throughput Dry Pump SDL Series HIGH THROUGHPUT DRY PUMP SDL SERIES Higher pumping speed. Support larger dilameter wafer, larger FPD substrate and Solar applications. Higher pumping speed minimizes the tact time for large load lock chamber. - Maximized the pumping speed in the atmospheric side to achieve higher throughput. - The combination with large booster pump allows higher pumping speed up to 55,000L/min. - Applicable for clean processes. Specification Table Specification Model Maximum Pumping Speed (L/min) (Upper 50Hz / Lower 60Hz) Ultimate Pressure (Pa) 50/60Hz Maximum Inlet Pressure (Pa) Inlet Flange Outlet Flange Weight(Approx.) (kg) Electric Power Supply Power in normal operation (kw) Electric Power Capacity (kva) Cooling Water Supply Purge N2 Gas Supply SD220L SDL25K SDL40K SDL60K 3, 3,700 25,000 40,000 55,000 4/3 0.5 Atmospheric pressure NW50 NW NW160 NW40 NW phase AC V 50/60Hz L/min and over 6L/min and over 0-50SLM 3 phase AC200 50/60Hz AC220V 60Hz KASHIYAMA INDUSTRIES, LTD.

8 e d f SDL e-catalog SDL-e Ver Pumping Curve(SP) 00 0 Pumping Speed(L/min SD220L(50Hz) SD220L(60Hz) SDL25K SDL40K SDL60K Pressure(Pa) Pump Schematics SD220L W Pressure (Torr) SDL25K W1 W4 W3 L2 Duct OD50 H2 Outlet NW40 L3 L1 Inlet NW50 (46) Control panel 170*80*30 Communication cable (L=2000mm) Remote control connector Power connector Outlet NW Duct port OD Inlet NW Control panel 170*80* Power connector Remote control connector H3 (Inlet) H4 (Outlet) 85 H1 Cooling water outlet Rc3/8 *1 N2 pressure gauge Outlet Inlet 11 Cooling water Inlet Rc1/2 Cooling water OutletRc1/ N2 control valve N2 pressuregauge 182 Caster Cooling water inlet Rc3/8 a b c with PIPE-FITTING 1/4 straight 27 (44) Dimension:mm Pipe fitting 1/4 Model H1 H2 H3 H4 L1 L2 L3 W1 W2 W3 W4 a b c d e f Caster SD220L SDL40K SDL60K Duct port OD Duct port OD Inlet NW Inlet NW Control panel 170*80*30 Remote control connector Control panel 170*80*30 Outlet NW Inlet 1315 N2 controlvalve N2 pressuregauge N2 supplyport Pipe fitting 1/4 Outlet NW Inlet 1720 N2 pressuregauge N2 controlvalve Power connector Remote control connector Outlet Power connector Cooling water Inlet Rc1/2 207 Outlet Caster (72) Cooling water Inlet Rc1/2 Cooling water Outlet Rc1/2 70 Caster Cooling water Outlet Rc1/ Pipe fitting 1/4 Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System KASHIYAMA URL: mail address for inquiries: sales@kashiyama.co.jp

KMB e-catalog KMB-e Ver2.1 08.06 Booster Pump KMB Series Can be used in combination with the dry pumps to enhance pumping capacity.

9 KMB e-catalog KMB-e Ver Booster Pump KMB Series Can be used in combination with the dry pumps to enhance pumping capacity. Rotational speed control enables operation from atmospheric pressure. BOOSTER PUMP KMB SERIES - High efficiency motor and driving system realized significant downsize compare to conventional models. - Canned motor is adapted to improve reliability. - Improvements of the driving system and mechanical efficiency allow minimizing the power. - Rotation speed control achieves continuous operation under the atmospheric pressure. - Synchronous motor enables consistent pumping performance at any power supply frequency. (03 series) Specification Table Specification Model KMB603 KMB1203 KMB2003 Maximum Pumping Speed (L/min)*,000 20,000 30,000 Ultimate Pressure (Pa)* Maximum Inlet Pressure (Pa) Inlet Flange VG Atmospheric pressure VG VG150 Outlet Flange VF65 VF VF150 Weight(Approx.) (kg) Electric Power Supply Power in normal operation (kw)** phase AC V 50/60Hz Electric Power Capacity (kva) Cooling Water Supply 3L/min and over Purge N2 Gas Supply 0 or 20SCCM *The values shown here represent operation in combination with the dry pump as recommended by Kashiyama. **Power at ultimate pressure. KASHIYAMA INDUSTRIES, LTD.

10 KMB e-catalog KMB-e Ver Pumping Curve(SP) 00 0 Pumping Speed(L/mi KMB603 (DP:SDE90) KMB1203(DP : SDE120) KMB2003(DP : SDE120) Pressure(Pa Pressure (Torr) Pump Schematics (KMB603,KMB1203) Inlet Oil supply plug L3 with PIPE-FITTING 1/4 Cooling water Outlet with PIPE -FITTING 3/8 BOOSTER PUMP KMB SERIES Dimension:mm Model Inlet KMB603 VG80 KMB1203 VG 32 Oil drain plug Outlet VF65 L1 L VF Pump Schematics (KMB2003) Oil level check (Inlet) 165(Outlet) Oil level gauge Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. L Cooling water drain outlet FINELOK3/ (Inlet) 113 (Outlet) Fller neck Outlet 329 L2 L1 229 Inlet VG Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System Cooling water inlet with PIPE-FITTING 3/8 Outlet VF150 Cooling water feed water FINELOK3/8 KASHIYAMA URL: mail address for inquiries: sales@kashiyama.co.jp

Mechanical Booster Pump PRC-A Series, PMB-B, C (M) Series

(Mechanical Booster Pump) Components Division, ULVAC, Inc. Mechanical Booster Pump PRC-A Series, PMB-B, C (M) Series Booster pumps can be used with roughing pumps, such as oil rotary pumps, dry vacuum