TURBOMOLECULAR PUMPS ATP SERIES

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1 TURBOMOLECULAR PUMPS ATP SERIES

2 TURBOMOLECULAR PUMPS ATP SERIES Introduction The ATP conventional turbomolecular pumps have a proven track record of reliability. Rotors made exclusively from carefully selected, machined aluminium, with an uncompromising design, and low rotational speed, are designed to resist heavy duty applications. With pumping speeds from 80 to 900 l/s, ATP pumps are often used in industrial applications, analytical instruments and R&D labs where reliability, performance and cost effectiveness are essential. PROVEN RELIABILITY DESIGN BENEFITS ON-SITE MAINTENANCE C11.02

A complete range of ceramic ball bearing turbomolecular pumps for demanding applications Three versions: Standard Corrosive C High pressure corrosive HPC ATP Series: focus on reliability and

3 A complete range of ceramic ball bearing turbomolecular pumps for demanding applications Three versions: Standard Corrosive C High pressure corrosive HPC ATP Series: focus on reliability and robustness ATP pumps with machined rotors and stators and low rotational speed, provide increased resistance to air inrush, minimal gyroscopic effect and low ball bearings stress. In addition to achieving low ultimate vacuum, a large internal conductance provides faster pumpdown time from atmospheric pressure. The ATP series are field maintainable providing low cost of ownership and increased uptime. C11.03

TURBOMOLECULAR PUMPS ATP SERIES The ATP standard version: a clean vacuum from 10-1 to 10-10 mbar. The ATP turbomolecular pump design is focused on reliability.

4 TURBOMOLECULAR PUMPS ATP SERIES The ATP standard version: a clean vacuum from 10-1 to mbar. The ATP turbomolecular pump design is focused on reliability. The standard version: Five models ranging from 80 to 900 l/s: ATP 80 ATP 100 ATP 150 ATP 400 ATP 900 Grease lubricated ceramic ball bearings allow the pumps to be mounted in any orientation. Pumping Pumping speed versus inlet pressure speed (l/s) Inlet pressure (Pa) Gas : N 2 ATP 900 ATP 400 ATP 150 ATP 100 ATP 80 Upper limits for continuous operation ( cooled pump) Ceramic ball bearings Natural-Air- ISO-K/CF-F/ASA Any orientation Inlet pressure (mbar) C11.04

5 ATP standard versions: Technical data Characteristics Inlet flange N2 l/s Pumping speed He l/s H2 N2 Compression ratio He H2 Ultimate pressure (1)(2) Maximum continuous inlet pressure (2) Maximum exhaust pressure (2) Minimum recommended fore pump Mounting orientation Rotational speed Start-up time l/s mbar mbar mbar rpm min Maximum ambient temperature C Maximum bake out temperature on flange C Exhaust flange Weight ambient cooled kg (lb) Weight air cooled kg (lb) Weight water cooled kg (lb) Controller Controller weight Controller size Power supply (3) Maximum power consumption ISO-K CF-F ISO-K CF-F ISO-K CF-F kg (lb) VA ATP 80 ATP 100 ATP 150 ATP 400 ATP 900 DN63 ISO-K DN100 ISO-K DN100 ISO-K DN160 ISO-K DN200 ISO-K DN63 CF-F DN100 CF-F DN100 CF-F DN160 CF-F DN200 CF-F x10 7 8x10 7 7x10 8 7x10 8 1x x x10 4 2x x10 3 1x10 3 2x10 3 5x10-9 5x10-9 5x x x x10-1 1x10-1 1x10-1 2x10-2 2x10-2 2x10-1 3x10-1 4x10-1 2x10-1 3x10-1 Pascal 2005 Pascal 2005 Pascal 2005 Pascal 2015 (4) Pascal 2021(4) Any min 45s 1 min 45s 2 min 3 min 3 min Pump 50 C / Controller 40 C DN 25 DN 25 DN 25 DN 40 DN 40 3 (6.6) 3 (6.6) 4.3 (9.5) 4.3 (9.5) (8.8) 4 (8.8) 17.5 (38.5) 6.5 (14.3) 9 (19.8) 5.3 (11.7) 5.3 (11.7) 18.5 (40.8) 3.4 (7.5) 3.5 (7.7) 17 (37.5) 6.5 (14.3) 9 (19.8) 4.4 (9.7) 4.7 (10.3) 18 (39.7) ACT 200T ACT 200T ACT 600T ACT 600T ACT 1000T ACT 100 ACT 100 ACT 250 ACT (5.7) 2.6 (5.7) 4 (8.84) 4 (8.84) 8.5 (18.8) 2.6 (5.7) 2.6 (5.7) 1.8 (3.96) 1.8 (3.96) 1/4 Rack 1/4 Rack 1/2 Rack 1/2 Rack 1/2 Rack 100 to 240 V - 50/60 Hz - Single phase (1) Measured to Pneurop standards (CPF flange, after 48 hours of baking with an exhaust pressure below to 10-2 mbar) (2) cooled model with CF-F inlet flange (3) For ACT 200T, ACT 250, ACT 600T, ACT 1000T only ATP standard version cross section (4) Note: a flange reducer 40/25 is necessary (see page C26.09). Inlet Applications Space simulation Thin film deposition Ion pump evacuation UHV system Particles accelerator Ion source Surface analysis Mass spectrometer Scanning electron microscope Leak detection Ceramic ball bearings Rotor blades Stator blades Exhaust Motor C11.05

TURBOMOLECULAR PUMPS ATP SERIES ATP C version: protection for corrosive gas pumping The inverted dynamic seal: corrosion protection The inverted dynamic seal provides a high compression ratio between

6 TURBOMOLECULAR PUMPS ATP SERIES ATP C version: protection for corrosive gas pumping The inverted dynamic seal: corrosion protection The inverted dynamic seal provides a high compression ratio between the bearings and the pump exhaust, minimizing the amount of corrosive gas reaching the bearings. This new anti-corrosive protection is a built-in mechanical system based on the molecular drag pump principle. Additional protection against corrosion: The ATP "C" version pumps are well adapted to corrosive gas pumping. The gas purge added to the inverted dynamic seal results in enhanced protection against corrosion. Pumping Pumping speed versus inlet pressure speed (l/s) Inlet pressure (Pa) Gas : N 2 ATP 900 C ATP 400 C ATP 150 C ATP 100 C ATP 80 C Upper limits for continuous operation ( cooled pump). Ceramic ball bearings Natural-Air- ISO-K/CF-F/ASA Inlet pressure (mbar) Any orientation IDS C11.06

7 ATP C versions: Technical data Characteristics ATP 80 C ATP 100 C ATP 150 C ATP 400 C ATP 900 C Inlet flange N2 l/s Pumping speed He l/s H2 N2 Compression ratio He H2 Ultimate pressure without purge (1)(2) Ultimate pressure with purge (2) Purging nitrogen flow rate Maximum continuous inlet pressure (2) Maximum exhaust pressure (2) Minimum recommended fore pump Mounting orientation Rotational speed Start-up time l/s mbar mbar sccm mbar mbar rpm min Maximum ambient temperature C Maximum bake out temperature on flange C Exhaust flange N2 purge flange Weight air cooled kg (lb) Weight water cooled kg (lb) Controller Controller weight Controller size Power supply (3) Maximum power consumption ISO-K CF-F ISO-K CF-F kg (lb) VA DN63 ISO-K DN100 ISO-K DN100 ISO-K DN160 ISO-K DN200 ISO-K DN63 CF-F DN100 CF-F DN100 CF-F DN160 CF-F DN200 CF-F x10 7 8x10 7 7x10 8 7x10 8 1x x x10 4 2x x10 3 1x10 3 2x10 3 5x10-9 5x10-9 5x x x x10-8 5x10-8 1x10-7 1x10-7 1x x10-1 1x10-1 1x10-1 2x10-2 2x10-2 2x10-1 3x10-1 4x10-1 2x10-1 3x10-1 Pascal 2005 C2 Pascal 2005 C2 Pascal 2021 C C C2 Any min 45s 1 min 45s 2 min 3 min 3 min (pump) DN 25 DN 25 DN 25 DN 40 DN 40 DN 16 4 (8.8) 4 (8.8) 5.3 (11.7) 5.3 (11.7) 6.5 (14.3) 9.1 (20) 17.7 (39) 3.4 (7.5) 3.5 (7.7) 4.4 (9.7) 4.7 (10.3) 6.5 (14.3) 9.2 (20.2) 17.2 (37.9) ACT 200T ACT 200T ACT 600T ACT 600T ACT 1000T ACT 100 ACT 100 ACT 250 ACT (5.7) 2.6 (5.7) 4 (8.84) 4 (8.84) 8.5 (18.8) 2.6 (5.7) 2.6 (5.7) 1.8 (3.96) 1.8 (3.96) 1/4 Rack 1/4 Rack 1/2 Rack 1/2 Rack 1/2 Rack 100 to 240 V - 50/60 Hz - Single phase (1) Measured to Pneurop standards (CFF flange, after 48 hours of baking with an exhaust pressure below 10-2 mbar) (2) cooled model with CF-F inlet flange (3) For ACT 200T, ACT 250, ACT 600T, ACT 1000T only Ceramic ball bearings ATP C version cross section Inlet Inverted dynamic seal ATP C applications Corrosive gas processes Rotor blades Stator blades Motor Exhaust Gas purge C11.07

TURBOMOLECULAR PUMPS ATP SERIES ATP HPC versions: high pressure, high throughput corrosive gas pumping Two models designed for semiconductor processes The ATP 400 HPC and ATP 900 HPC are dedicated to

8 TURBOMOLECULAR PUMPS ATP SERIES ATP HPC versions: high pressure, high throughput corrosive gas pumping Two models designed for semiconductor processes The ATP 400 HPC and ATP 900 HPC are dedicated to corrosive applications, such as those found in the semiconductor industry. These pumps are designed to pump corrosive gases at high pressure with high throughput conditions. Ceramic ball bearings Natural-Air- ISO-K/CF-F/ASA Pumping Pumping speed versus inlet pressure speed (l/s) Inlet pressure (Pa) Ar/SF N 2 ATP 900 HPC ATP 400 HPC Upper limits for continuous operation Any orientation 65 C IDS Ar/SF6 N Inlet pressure (mbar) Flow rate Flow rate versus inlet pressure sccm Inlet pressure (Pa) ATP 900 HPC ATP 400 HPC Gas : N Upper limits for continuous operation Inlet pressure (mbar) C11.08

9 ATP HPC versions: Technical data Characteristics ATP 400 HPC ATP 900 HPC Inlet flange N2 l/s Pumping speed Argon l/s SF6 l/s N2 Compression ratio Argon Ultimate pressure without purge (1) mbar Ultimate pressure with purge (1) mbar Purging nitrogen flow rate sccm Maximum continuous inlet pressure mbar Maximum exhaust pressure mbar Recommended fore pump Maximum N2 flow rate sccm Mounting orientation Rotational speed rpm Start-up time min coil temperature C Maximum ambient temperature C Exhaust flange N2 purge flange Weight kg (lb) Controller Controller weight kg (lb) Controller size Power supply Maximum power consumption VA H2 DN100 ISO-K DN160 ISO-K DN200 ISO-K DN260 CF-F x10 6 1x x x10-8 8x10-6 5x x10-1 1x10-2 6x10-1 4x C Any min 65 Pump 50 C / Controller 40 C DN 40 DN 16 9 (19.8) 8.5 (18.7) 17.7 (39) ACT 600T ACT 1000T ACT (10.7) 8.5 (22.8) 1.8 (3.96) 1/2 Rack 100 to 240 V - 50/60 Hz - Single phase (1) Measured to Pneurop standards ATP HPC version cross section ATP HPC applications Three corrosion proof features: The pump may be water cooled to 65 C, preventing any build-up from process condensation. The inverted dynamic seal protects the bearings, even if the gas purge is shut off during process calibration. heating device Inverted dynamic seal Motor Inlet Ceramic ball bearings Rotor blades Stator blades Exhaust Inert gas purge. Gas purge C11.09

10 TURBOMOLECULAR PUMPS ATP SERIES Controller options ACT 100 T, ACT 250 designed with logical I/O interface ACT 100 T ACT 250 Controller ACT 100 T (*) ACT 250 Pump ATP 80/100 ATP 150/400 (*) when used with air coded pump, please consult us. 1/4 Rack 3U format 4 leds : - power - pump starting - pump at speed - fault Hour counter Remote control: ON/OFF pump Available in voltage V, V (50/60 Hz) ACT 200 T, ACT 600 T, ACT 1000 T designed with a high level communication interface 1/4 Rack 3U format Pump start - stop switches 4 leds : - power - pump starting - pump at speed - fault Hour counter Remote control: start, stop, standby, external safety, mode select Outputs: Pump starting Pump at speed Fault Automatic power supply detection: V (50/60 Hz) PC/PLC controlled processes via RS 232/485 Features Multiple interfaces Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation PC/PLC controlled processes via RS 232/485 (configurable) Remote control Inputs: Controller ACT 200 T ACT 600 T ACT 1000 T Pump ATP 80/100 ATP 150/400 ATP 900 Sophisticated pump monitoring Display of: Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Remote start/stop Remote stand-by Remote interlock Outputs: Pump starting Pump at speed Stand-by on Venting valve on/off Power supply of air cooling fan Selectable 0-10 volts output (speed/pump current/temperature) OEM controller: Various OEM electronics are available. Please consult us. C11.10

Controller dimensions mm (inches) 106.3 (4.19) 220 (8.66) 91.4 (3.60) ACT 200 T 128.4 (5.06) 122.4 (4.82) ACT 200T 106 3 (4 19) 220 (8 66) 106.3 (4.19) 220 (8.66) 91.4 (3.60) ACT 100T or ACT 250 128.

11 Controller dimensions mm (inches) (4.19) 220 (8.66) 91.4 (3.60) ACT 200 T (5.06) (4.82) ACT 200T (4 19) 220 (8 66) (4.19) 220 (8.66) 91.4 (3.60) ACT 100T or ACT (5.06) (4.82) ACT (8.39) (7.80) 245 (9.65) ACT 600 T (5.06) (4.82) ACT 600T 219 (8.62) (4.31) 453 (17.85) ACT 1000 T (5.22) (4.82) (4.43) C11.11

12 TURBOMOLECULAR PUMPS ATP SERIES Pump dimensions mm (inches) ATP 80 ATP 100 ATP 150 DN 63 ISO-K DN 100 ISO-K DN 100 ISO-K (5.96) DN (4.9) DN (8.30) DN 25 ATP 400 Ø (5.10) ATP 400 HPC Ø (5.10) Ø (5.89) Ø (7.46) Ø (7.46) DN 160 ISO-K DN 160 ISO-K (8.54) DN (9.15) DN 40 DN 16 ATP 900 ATP 900 HPC Ø 240 (9.45) DN 200 Ø 260 (10.24) DN 200 ISO-K (8.72) DN (8.94) DN 40 DN 16 C11.12

13 Ordering information Pump only (order controller, inlet screen and interconnecting cable separately) ATP Standard Version Model Inlet flange DN Cooling method ATP 80 ATP 100 ATP 150 ATP 400 ATP ISO-K 63 CF-F 100 ISO-K 100 CF-F 100 ISO-K 100 CF-F 100 ISO-K 160 ISO-K 100 CF-F 160 CF-F 200 ISO-K 200 CF-F NATURAL AIR* NATURAL AIR* NATURAL AIR* NATURAL AIR* AIR AIR AIR AIR AIR AIR AIR AIR F F F F F F G G G G G G H H H H I I I I I I I I K K K K * Not compatible with ACT 100T. Please, consult us. C11.13

14 TURBOMOLECULAR PUMPS ATP SERIES Ordering information Pump only (order controller, inlet screen and interconnecting cable separately) ATP C Version for corrosive applications Model Inlet flange DN Cooling method ATP 80 C ATP 100 C ATP 150 C ATP 400 C ATP 900 C 63 ISO-K 63 CF-F 100 ISO-K 100 CF-F 100 ISO-K 100 CF-F 100 ISO-K 160 ISO-K 100 CF-F 160 CF-F 200 ISO-K 200 CF-F Air* Air* Air* Air* Air Air Air Air Air Air Air Air F F F F G G G G H H H H I I I I I I I I K K K K * Not compatible with ACT 100T. Please, consult us. ATP HPC Version for high pressure and high throughput corrosive applications Model Inlet flange DN Cooling method ATP 400 HPC ATP 900 HPC 100 ISO-K 160 ISO-K 100 CF-F 160 CF-F 200 ISO-K 200 CF-F J J J J L L C11.14

15 Ordering information ACT controllers for ATP pumps Model Dimensions For pumps Voltage P/N ACT 100 T ACT 200 T 1/4 Rack 1/4 Rack ATP 80/80 C ATP 100/100 C ATP 80/80 C ATP 100/100 C 100 V 50/60 Hz 115 V 50/60 Hz 200 V 50/60 Hz 230 V 50/60 Hz 85 to 264 V 50/60 Hz Power cords ACT 200 T, ACT 600 T and ACT 1000 T controllers are supplied with one European power cord and one US low voltage power cord. For ACT 100 T and ACT 250 controllers please order the convenient P/N below. ACT 250 ACT 600 T 1/4 Rack 1/2 Rack ATP 150/150 C ATP 400/400 C ATP 400 HPC ATP 150/150 C ATP 400/400 C ATP 400 HPC 85 to 264 V 50/60 Hz 85 to 264 V 50/60 Hz Designation A E J USA low voltage USA high voltage Europe Japan low voltage Japan high voltage P/N ACT 1000 T 1/2 Rack ATP 900/900 C ATP 900 HPC 85 to 264 V 50/60 Hz K S United Kingdom Switzerland A ATP/ACT interconnecting cables ACT 100 T ACT 250, ACT 600 T, ACT 1000 T Cable for pumps Length Cable for pumps Length ATP 80/80 C ATP 100/100 C 1.0 m 1.5 m 3.5 m 5 m 10 m 20 m A A A A A A ATP 150/150 C ATP 400/400 C/400 HPC ATP 900/900 C/900 HPC 1.5 m 3.5 m 5 m 10 m 20 m A A A A A ACT 200 T Cable for pumps Length ATP 80/80 C ATP 100/100 C 1.0 m 1.5 m 3.5 m 5 m 10 m 20 m A A A A A A C11.15

16 TURBOMOLECULAR PUMPS ATP SERIES Accessories Inlet screens and dense mesh dust filters For pumps Inlet flange Mesh size 2.5 mm 20 µ PART NUMBER ATP 80 ATP 100 ATP 150 ATP 400 ATP 400 ATP 900 DN 63 ISO-K DN 63 ISO-K DN 63 CF-F DN 100 ISO-K DN 100 ISO-K DN 100 CF-F DN 160 ISO-K DN 160 ISO-K DN 160 CF-F DN 200 ISO-K DN 200 ISO-K DN 200 CF-F Bake-out collars (elevated bake-out temperatures accelerates degassing and improves pressure descent) Single phase voltage For pumps 200 V/240 V - 50/60 HZ 100 V/115 V - 50/60 HZ ATP 80/80 C - ATP 100/100 C ATP 150/150 C ATP 400/400 C - ATP 400 HPC ATP 900/900 C - ATP 900 HPC Electrical venting valves (controlled by the ACT controller) Power supply from the main network For pumps Flange DN 100 V 50/60 Hz 115 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz 240 V 50/60 Hz 24 VDC ATP 80/80 C ATP 100/100 C ATP 150/150 C ATP 400/400 C ATP 400 HPC ATP 900/900 C ATP 900 HPC 40 Powered by the ACT 1000 T controller in 12V.DC C11.16

17 Inlet adapter flanges (reducer/adapter) Flanges DN 1 / DN 2 Material Alu* S.S.** 63 ISO-K / ISO-K / ISO-K / ISO-K / 63 CF-F 100 ISO-K / ISO-K / ISO-K / ISO-K / ISO-K / 63 ISO-K 160 ISO-K / ISO--K / 63 ISO-K 160 ISO-K / 100 ISO-K 160 CF-F / 100 CF-F 200 ISO-K / 63 ISO-K 200 ISO-K / 100 ISO-K 200 ISO-K / 100 ISO-K 200 ISO-K / 160 ISO-K 200 ISO-K / 160 ISO-K 200 ISO-K / 250 ISO-K 200 CF-F / 250 CF-F * ALU: Aluminium ** S.S.: Stainless Steel Maintenance items for pumps For pumps Seal kit Grease syringe Tool kit ATP 80/80 C ATP 100/100 C ATP 150/150 CP ATP 400/400 CP ATP 400 HPC ATP 900/900 C ATP 900 HPC Ceramic bearing replacement kits For pumps Suffix number includes ceramic bearing and inner pre-lubricated retainer race. These part numbers refer to the inner shaft diameter which must correspond to the pump serial number suffix number. ATP 80/80 C ATP 100/100 C ATP 150/150 C ATP 400/400 C - ATP 400 HPC ATP 900/900 C - ATP 900 HPC C11.17

CHINA Alcatel Vacuum Technology Shanghai Tel: (86) 21 5027 0628 Fax: (86) 21 3895 3815 FRANCE Alcatel Vacuum Technology France Tel: 33 (0) 4 50 65 77 77 Fax: 33 (0) 4 50 65 77 89 GERMANY Alcatel

uum Technik GmbH Tel: (49) 9342 96 10 0 Fax

18 CHINA Alcatel Vacuum Technology Shanghai Tel: (86) Fax: (86) FRANCE Alcatel Vacuum Technology France Tel: 33 (0) Fax: 33 (0) GERMANY Alcatel Hochvakuum Technik GmbH Tel: (49) Fax: (49) ITALY Alcatel Vacuum Systems S.p.a. Tel: (39) Fax: (39) JAPAN Alcatel Japan Tel: (81) Fax: (81) KOREA Alcatel Vacuum Technology Korea Tel: (82) Fax: (82) NETHERLANDS Alcatel Vacuum Technology Netherlands Tel: (31) Fax: (31) SINGAPORE Alcatel Singapore Pte Ltd Tel: (65) Fax: (65) TAIWAN Alcatel Vacuum Technology Taiwan Tel: (886) Fax: (886) UNITED KINGDOM Alcatel Vacuum Technology (U.K.) Tel: (44) Fax: (44) USA Alcatel Vacuum Products Tel: (1) Fax: (1) Alcatel Vacuum Technology 98 Avenue de Brogny - BP Annecy Cedex - France - Tel.: 33 (0) Fax: 33 (0) Part Number: April All information can be modified without prior notice - Realization:

HYBRID TURBOMOLECULAR PUMPS ATH SERIES

HYBRID TURBOMOLECULAR PUMPS ATH SERIES HYBRID TURBOMOLECULAR PUMPS ATH SERIES Introduction Adixen offers the ATH series of hybrid turbomolecular pumps with pumping speeds at 200 and 300 l/s. These models