Large Size Vacuum Module:

Transcription

1 arge Size acuum Module: Ejector System/acuum ump System arge suction flow rate, suitable when used with large size pads or multiple pads. Nozzle dia. ø., ø., ø.5, ø.8, ø2. acuum module suitable for handling workpieces of.5 to 5 kg. [Option] ZK2 Z Z 7

2 arge Size acuum Module: Ejector System/acuum ump System acuum module suitable for handling workpieces of.5 to 5 kg. Modular design/customized application function through selection of modular components. Modules for use with external vacuum supply (from pump or mainline) or as an air driven ejector system. Safe acuum self-holding function by means of double solenoid valves. Compact, ightweight Manifolding possible acuum ejector type complete unit Ejector unit With digital pressure switch for vacuum ressure switch for accum/ Suction filter unit With pressure switch for vacuum Without pressure switch for vacuum Function plate (Semi-standard) Double solenoid alve unit ir operated One pilot External vacuum supply type complete unit pplication Example Escorting printed matter bsorbing and transferring liquid crystal panels bsorbing and transferring thin plates bsorbing and transferring copper plates, utomatic labeling machine, bsorbing and transferring veneers, utomatic screw fastening machine 72

3 arge Size acuum Module: Modular Components Introduction System Ejector System acuum ump System Component equipment Characteristics. 74 to. 4 to Ejector unit -W alve unit - ressure switch for vacuum ZSE2-R-5/55 ZSE-- - Suction filter unit -F Nozzle dia. (mm) Maximum suction Type S flow rate (/min. [NR]) Type ir consumption (/min [NR]) Maximum vacuum pressure Exhaust release (Ejector exhaust) Component equipment Function Operation ower supply voltage Rated pressure range/set pressure range Hysteresis Operating voltage Operating pressure range Filtration degree Material S: -84 ka : -5 ka uilt-in silencer, Manifold exhaust Individual exhaust port Supply valve (ilot type)/release valve (ilot type) N.C./N.O. Solenoid valve (Double, Single)/ir operated valve, 5, 6, 2, 24 DC,, C (5/6Hz) to - ka % or less/variable 2 to 24 DC (Ripple ±% or less ) -. to.5ma F ZK2 Z Z Function plate -R Symbol R R2 / R / Common specifications Manifold Unit ir supply port acuum pad connection port ir supply port ilot valve connection port Release valve connection port Common exhaust port Rc 8 Rc 8 Rc 8 Rc 2 External vacuum supply port Rc 8 Refer to pages 8 to for further specifications of each unit. Single unit Single unit Manifold Manifold 7

4 arge Size acuum Module: Ejector System [Option] Note) CE-compliant: For DC only. Note for model selection Take function plates into consideration. (Refer to page 77.) Ejector unit Ejector unit Ejector unit Ejector unit Ejector module nozzle diameter Supply valve self-holding Supply valve N.C ressure switch for 2 S vacuum unit ressure switch for vacuum unit ressure switch for vacuum unit Filter unit ight/surge voltage suppressor Z S Components None With light/surge voltage suppressor With surge voltage suppressor Ejector unit nozzle dia. 2 2 S 2 Maximum vacuum pressure Ejector exhaust S 84 ka 5 ka Combination of supply Symbol Type alve Manifold valve and release valve uilt-in silencer Refer to Table () on Note ) 2 ort exhaust page 75 for details. Note 2) Common exhaust Note ) When port exhaust is applied to the manifold, pilot exhaust is done by common exhaust. Thus, the exhaust port on the manifold base should be open while operating. Note 2) When the product is used for the manifold specification and common exhaust, the exhaust air of the operating ejector releases may enter the vacuum () port of the non-operating ejector and be released if there are an operating and non-operating ejector. Select either the built-in silencer or port exhaust for the ejector exhaust method. Solenoid valve rated voltage Note) 5 6 S R D Note) ir operated 24 DC 2 DC 6 DC 5 DC DC C ( 5 6 Hz) CE-compliant D2 Note) C ( 5 6 Hz) Note) ir operated, C, and C type are not CE-compliant. N O M MN MO G H plug connector type M plug connector type Grommet type Maximum vacuum pressure Ejector exhaust Combination of supply valve and release valve Refer to Table (). K K2 Manual override Non-locking push type Slotted locking type How to Order 5 5 M M Electrical entry ir operated ead wire length. m Without lead wire Without connector ead wire length. m Without lead wire Without connector ead wire length. m (pplicable to only DC) ead wire length.6 m (pplicable to only DC) Refer to Table (2) on page 75 for part no. of lead wire with connector. S is not available for C. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. Combination of switch/filter 74 D E F None Digital pressure switch for vacuum (ZSE) + Filter ressure switch for vacuum (ZSE2) + Filter Filter Solenoid valve rated voltage Electrical entry ight/surge voltage suppressor Manual override Z Z Combination of switch/filter Output specifications Unit specifications ead wire specifications Release flow rate adjusting needle/ racket or Output specifications Digital pressure switch for vacuum (ZSE) specifications (D) N C D E F NN open collector output N open collector output NN open collector 2 outputs N open collector 2 outputs NN open collector output + nalog voltage output NN open collector output + nalog current output N open collector output + nalog voltage output N open collector output + nalog current output CEcompliant CE Q (DC only) Release flow rate adjusting needle/racket, ock nut racket or M N : ttached (racket or is shipped together.) : None ead wire specifications Digital pressure switch for vacuum (ZSE) specifications (D) Without lead wire ead wire with connector (ength 2 m) Refer to Table (4) on page 75 for part no. of lead wire with connector. ressure switch for vacuum (ZSE2) specifications (E) C C Grommet/ead wire (ength.6 m) Grommet/ead wire (ength m) ead wire with connector (ength.6 m) ead wire with connector (ength m) CN Without lead wire with connector Refer to Table () on page 75 for part no. of lead wire with connector. Filter specifications (F) No setting Unit specifications Digital pressure switch for vacuum (ZSE) specifications (D) With unit switching function M SI unit only With unit switching function (Initial value psi) Note ) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, ). Note 2) Fixed unit: ka ressure switch for vacuum (ZSE2) specifications (E) No setting Filter specifications (F) No setting ressure switch for vacuum (ZSE2) specifications (E) NN open collector output N open collector 55 output Filter specifications (F) No setting

5 arge Size acuum Module: Ejector System Table () Combination of Supply alve and Release alve alve unit function alve unit components Supply valve Release valve Solenoid valve ir operated Solenoid valve ir operated Operation acuum acuum Supply Release Symbol Double SO. Double SO. N.C Double SO. Double SO. N.C stop adsorption release valve valve (SYJ) (SYJ) (SYJ2-X26) (SYJ2-X27) (SYJ) (SYJ2-X26) (SYJ2-X27) (SYJ) Double SO. N.C. K (SYJ2-X26) (SYJ) N.C. N.C. K2 (SYJ) (SYJ) ir operated ir operated K (SYJ) (SYJ) N.C. Common with C (SYJ) supply valve ir operated Common with C2 (SYJ) supply valve N.O. Common with C (SYJ) supply valve Double SO. Common with C4 (SYJ2-X27) supply valve Without valve module ZK2 Z Z Table (2) How to Order alve lug Connector ssembly DC SY 4 Table () ressure Switch for acuum/ ead Wire with Connector ZS 5 For C For other voltages of C SY SY ead wire length 5.6 m m 5 m ead wire length mm (Standard) 6 mm mm 5 mm 2 mm 25 mm mm 5 5 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 6 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) 2S-K5M Z-EC(-Q)... pc. SY pcs. How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire connector and the 5 m lead wire connector separately. Example) - - CN(-Q)... pc. ZS pc. Table (4) Digital ressure Switch for acuum/ ead Wire with Connector ZS 4 8 ead wire core cores, output, 2 m (Output specifications: N, ) 4 cores, 2 outputs, 2 m (Output specifications:,, C, D, E, F) 75

6 Ejector System/Combination of Supply alve and Release alve Combination Symbol: K Feature: Double solenoid supply valve allows for self-holding. Combination Symbol: C Feature: dsorption of workpieces (when energized) and release of vacuum (when de-energized) are switched by single solenoid valve. How to Operate ilot valve Supply valve Release valve Note operation ilot valve ilot valve ilot valve for supply for supply stop for release ON OFF OFF OFF ON ON OFF ON OFF Operation. dsorption 2. acuum release. Operation stop Combination Symbol: K2 Feature: Single solenoid valve is provided for supply valve. How to Operate ilot valve operation Operation. dsorption 2. acuum release. Operation stop Supply valve Release valve ilot valve for supply ilot valve for release ON OFF OFF ON OFF OFF Combination Symbol: K Feature: Operation can be controlled by an external pilot valve. How to Operate ilot valve operation Operation. dsorption 2. acuum release. Operation stop ilot air ilot air Supply valve Release valve ir operated a ir operated b ON OFF OFF ON OFF OFF When power supply is cut off while the supply valve is ON, the operational state is held. v Note When power supply is stopped, all operations will be stopped. v Note The product is used under the environment in which solenoid valves cannot be used or when the centralized control is applied using external pilot air. How to Operate ilot valve operation Operation. dsorption 2. acuum release How to Operate How to Operate Supply valve/release valve ilot valve for supply/release ON OFF Combination Symbol: C2 Feature: dsorption of workpieces and release of vacuum are switched by external pilot valve. ilot air ilot valve operation Operation. dsorption 2. acuum release Combination Symbol: C Feature: dsorption of workpieces (when de-energized) and release of vacuum (when energized) are switched by single solenoid valve. ilot valve operation Operation. dsorption 2. acuum release ilot valve for supply/release OFF ON Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Supply valve/release valve Note ir operated a e careful for blowing off of workpieces or ON OFF displacement of adsorption position in case of small and/or lightweight workpieces. Supply valve/release valve Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Combination Symbol: C4 Feature: dsorption of workpieces and release of vacuum are switched by double solenoid valve. v v v Caution When pipe connection is made to one port connection () port only, use a function plate (-R). Refer to page 77 for further information. How to Operate ilot valve operation Operation. dsorption 2. acuum release Supply valve/release valve ilot valve for supply ilot valve for release ON OFF OFF ON Note When power supply is stopped, supply valve/ release valve will hold the operation. v 76

7 arge Size acuum Module: Ejector System Function late/-r function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to,, and ports respectively. Without Function late (Standard) pplicable system: Ejector system External vacum supply system Release pressure supply () port ilot pressure supply () port Since, and ports are made common via the function plate, pipe only to the port. ipe connection With Function late/pplicable to Ejector System Only When /R ( ) is Selected Release pressure supply () port (lugged) ilot pressure exhaust () port (Open) acuum pressure supply () port ilot pressure exhaust () port (Open) supply () port ilot pressure supply () port (lugged) ir pressure ipe connection -R Circuit diagram Circuit diagram -R ZK2 Z Z When /R2 ( /) is Selected Supply air for generating vacuum and releasing vacuum respectively. Circuit diagram Release pressure supply () port (lugged) ilot pressure exhaust () port (Open) supply () port ipe connection ilot pressure supply () port (lugged) ir pressure -R2 -R2 How to Order Function late Unit (For Ejector System) R iping specifications Symbol Indication port port port Common 2 / Common Individual How to order Indicate the model numbers of the vacuum module and the function plate. Example) 2S-K5MZ-EC... pc. -R... pc. Caution ength of assembling mounting threads varies when adding function plate. Order from the mounting thread parts list for unit combination on page 8. Order a plug (-M) separately in order to plug the and ports that are no longer used due to the addition of function plate. 77

8 Construction y q o!! t u!2 w Component arts No. 2 4 Note ) Description Manifold base Release flow rate adjusting needle Function plate Individual spacer Filter case ilot valve assembly alve body assembly Material luminum alloy Stainless steel T T olycarbonate e r i art Model -NNote 2) Refer to page 8. Refer to page 8. Refer to page 8. Refer to Table (5) on page 7. Refer to Table () on page 7. No. 8 2 Description Ejector assembly Silencer Filter element ressure switch for vacuum Filter switch unit for replacement Material F F art Model Refer to Table (2) on page 7. Refer to Table () on page 7. -FZ( µm) 5 ZSE2-OR- 55- ZSE-- - -Equivalent -F -D Note ) recautions on handling the filter case. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Note 2) Turning the release flow rate adjusting needle 2 full turns from the fully closed position renders the needle valve fully open. Do not turn more than two times since turning excessively may cause the needle fall off. In order to prevent the needle from loosening and falling out, the release flow rate adjusting (-ND-) lock nut is also available. How to Order Solenoid alves/ir Operated alves ir operated SYJ Solenoid valve N O M MN MO G H SYJ2 SYJ 5 6 S R plug connector type M plug connector type Grommet type rated voltage DC24 DC2 DC6 DC5 DC C(5/6Hz) C(5/6Hz) Electrical entry ead wire:. m Without lead wires Without connector ead wire:. m Without lead wires Without connector ead wire:. m(pplies only to DC) ead wire:.6 m(pplies only to DC) Z S D X26 X27 Manual override CE-compliant Q Non-locking push type Slotted locking type ight/surge voltage suppressor None With light and surge voltage suppressor With surge voltage suppressor (DC only) Standard CE-compliant (DC only) 78 Note) Mounting screw and pilot valve gasket are included.

9 arge Size acuum Module: Ejector System Construction () How to Order alve ody ssembly D K 5 M Z Combination of supply valve and release valve Solenoid valve rated voltage Refer to page 74 for detailed specifications of each code. Manual CE-compliant operation Release flow rate adjusting needle With light/surge voltage suppressor Electrical entry (2) How to Order Ejector ssembly WD S Nozzle diameter () How to Order Silencer Element SE S Nozzle diameter pplicable ejector 2 S For S For For S For For 5S For 5 For 8S For 8 For 2S For 2 Ejector exhaust 2 Silencer assembly (Case, Element, Mounting screw) uilt-in silencer ort exhaust Common exhaust Maximum vacuum pressure 84 ka 5 ka () How to Order Silencer Silencer case assembly for port exhaust (Case, Mounting screw) S S (4) ressure Switch for acuum + Suction Filter Unit F E D (5) How to Order ilot alves Combination Symbol K C4 K Components Supply valve Release valve Double solenoid Single solenoid valve N.C. valve N.C. (SYJ2) (SYJ) Double solenoid valve N.O. (SYJ2) ir operated N.C (SYJ) pplicable ejector 4 5 For S For For S For For 5S For 5 For 8S For 8 For 2S For 2 Silencer case assembly for centralized exhaust (Case, Element, Mounting screw) pplicable ejector 6 7 For S For For S For For 5S For 5 For 8S For 8 For 2S For 2 Option (Connector/lead wire specifications) Unit specifications Output specifications Combination of switch/filter Refer to page 8 for detailed specifications of each code. Double solenoid valve N.O. (SYJ2) ir operated N.O (SYJ) Model Refer to How to Order below. Supply: -SYJ2- -X26 Release: SYJ- Refer to How to Order below. -SYJ2- -X27 SYJ ZK2 Z Z 7

10 alve Unit : Specifications alve unit part no. Components Operating method Combination of supply valve and release valve port supply pressure port supply pressure port supply pressure Main valve effective area (mm 2 ) Main valve effective area (Cv) Maximum operating frequency Operating temperature range Standard accessory Supply valve Release valve ilot operated ilot operated Refer to the combination of supply valve and release valve below.. to.6 Ma.5 to.6 Ma.25 to.6 Ma Hz 5 to 5 C racket (-O).6.5 Solenoid alve/specifications Solenoid Rated voltage Electrical entry ight/surge voltage suppressor Manual operation 24, 2, 6, 5, DC,, C ( 5 6 Hz) /M plug connector, Grommet vailable, Not available (at grommet) Non-locking push type, ocking slotted type pplicable to plug connector; connector assembly with rectifier is attached. Combination of Supply alve and Release alve Combination symbol acuum switch valve Release valve Weight (kg) K Double SO. (SYJ2-X26) N.C. (SYJ).4 K2 K N.C. (SYJ) ir operated (SYJ) N.C. (SYJ) ir operated (SYJ).27.4 C C2 C C4 N.C. (SYJ) ir operated (SYJ) N.C. (SYJ) Double SO. (SYJ2-X27) Weight includes racket. (Solenoid valve: 24 DC, M plug connector type) How to Order Refer to page 74 for further part no. information. K Combination of vacuum valve and release valve Solenoid valve rated voltage SYJ-, SYJ2- -X26, SYJ2- -X27 Electrical entry 5 M Z CE-compliant Release flow rate adjusting needle/racket Manual override With light/surge voltage suppressor 8

11 arge Size acuum Module: Ejector System Ejector Unit/ Symbol Release pressure supply () port Model/Max. acuum ressure 84 ka (S: Standard type) Model -WS -WS -W5S -W8S -W2S Nozzle dia. (mm) Nozzle dia. (mm) Maximum suction flow rate (/min (NR)) Maximum suction flow rate (/min (NR)) ir consumption (/min (NR)) Model/Max. acuum ressure 5 ka (: arge flow type) Model -W -W -W5 -W8 -W2 Common Specifications Supply pressure range Standard supply pressure Operating temperature range Model (Ejector exhaust method) Standard accessory ir consumption (/min (NR)) Weight (With bracket) (kg) Weight (With bracket) (kg) to.55 Ma.45 Ma 5 to 5 C Code : uilt-in silencer For unit and manifold Code 2: Individual exhaust For unit and manifold racket (-O) How to Order: Code and 2 are the suffixes in the ordering number to indicate the exhaust method. Note) Operation outside of the specified supply pressure and operating temperature range may cause a serious accident or damage. ZK2 Z Z ir pressure supply () port acuum () port How to Order W 2 S Nozzle diameter Maximum vacuum pressure S 84 ka 5 ka racket N Ejector exhaust With racket Without racket uilt-in silencer 2 Individual exhaust ort size: RC /4 (Nozzle dia.. to.5) RC /8 (Nozzle dia..8, 2.) 8

12 Characteristics (Representative value) Ejector Unit/Standard Type (S): Max. acuum ressure 84 ka t.45 Ma -WS Exhaust characteristics Flow characteristics -W8S Exhaust characteristics Flow characteristics acuum pressure (ka) acuum pressure ir consumption Suction flow ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) acuum pressure (ka) acuum pressure 25 ir consumption Suction flow ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) Supply pressure (Ma) Suction flow (/min) Supply pressure (Ma) Suction flow (/min) -WS Exhaust characteristics Flow characteristics -W2S Exhaust characteristics Flow characteristics acuum pressure (ka) acuum pressure ir consumption Suction flow ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) acuum pressure (ka) ir consumption acuum pressure 25 Suction flow ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) Supply pressure (Ma) Suction flow (/min) Supply pressure (Ma) Suction flow (/min) -W5S Exhaust characteristics 2 Flow characteristics acuum pressure acuum pressure (ka) ir consumption Suction flow 5 5 ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) Supply pressure (Ma) Suction flow (/min) 82

13 arge Size acuum Module: Ejector System Ejector Unit/arge Flow Type (): Max. acuum ressure 5 ka t.45 Ma -W Exhaust characteristics Flow characteristics -W8 Exhaust characteristics Flow characteristics acuum pressure (ka) ir consumption 8 6 Suction flow Supply pressure (Ma) ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) Suction flow (/min) -W Exhaust characteristics Flow characteristics -W2 Exhaust characteristics Flow characteristics acuum pressure (ka) acuum pressure acuum pressure ir consumption Suction flow 4 2 ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) acuum pressure (ka) acuum pressure (ka) ir consumption Suction flow 5 ir consumption (/min (NR)) Suction flow (/min (NR)) Supply pressure (Ma) Suction flow (/min) ir consumption acuum pressure acuum pressure Suction flow 5 ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) acuum pressure (ka) ZK2 Z Z Supply pressure (Ma) Suction flow (/min) Supply pressure (Ma) 5 5 Suction flow (/min) -W5 Exhaust characteristics 2 Flow characteristics How to Read Flow Characteristics Graph acuum pressure (ka) ir consumption acuum pressure Suction flow Supply pressure (Ma) ir consumption (/min (NR)) Suction flow (/min (NR)) acuum pressure (ka) Suction flow (/min) acuum pressure Suction flow Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, the vacuum pressure will also be changed. Normally this relationship is expressed in ejector standard use. In graph, max is max. vacuum pressure and Qmax is maximum suction flow. The values are specified according to catalog use. Changes in vacuum pressure are expressed in the below order.. When ejector suction port is covered and made airtight, suction flow becomes and vacuum pressure is at maximum value (max). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition and Q). When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near (atmospheric pressure). ased on the above, when vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near. In the case when ventirative or leaky work should be adsorbed, please note that vacuum pressure will not rise. 8

14 Exhaust (EXH) port Ejector Unit Nozzle Dia./ø., ø., ø.5, ø.8, ø2. acuum () port ir pressure supply () port Nozzle dia./ø., ø., ø.5 mm -W 5 For port exhaust Circuit diagram EXH. Silencer EXH. ort exhaust Rc/4 Exhaust (EXH) port dapter 5 6 ir pressure supply () port Release pressure supply () port acuum () port Rc/8 ir pressure supply () port 27 Release pressure supply () port Remove the plug from port at external release. 8(in case of nozzle diameter.5) 7(in case of nozzle diameter.,.portexhaust) 2 x 4.6 (Mounting hole) 6 daptor E 7 8 Silencer 2 x.4 (Mounting hole) 5 84(in case of nozzle diameter.5) 74(in case of nozzle diameter., ø. port exhaust) 6 Rc/8 acuum () port racket 7 8 racket Nozzle dia./ø.8, ø2. mm 8 -W 2 For port exhaust Rc/8 Exhaust (EXH) port Ejector 4 dapter Note) Dimensions : For mounting bracket racket part number:- (Standard accessory) Circuit diagram EXH. Silencer EXH. ort exhaust 2 2 x 4.6 (Mounting hole) Silencer 6 8 ir pressure supply () port Release pressure supply () port acuum () port daptor E 2 x.4 (Mounting hole) Rc/8 ir pressure supply () port Release pressure supply() port Remove the plug from port at external release. 5 (port exhaust) (silencer exhaust) 7 5 (port exhaust) 4 (silencer exhaust) 6 Rc/8 acuum () port 84 racket 7 8 racket Ejector 5 4

15 arge Size acuum Module: Ejector System ressure Switch Unit for acuum/ressure Switch for acuum: ZSE2-R- Quick response: ms Compact size: H x 2W x 5D (except the connecting portion) Improved wiring: Connector style Uses a carrier diffusion semiconductor pressure sensor ressure detector ( carrier diffusion semiconductor pressure sensor is used.) Sensor chip Specifications ressure switch for vacuum part no. Fluid Rated pressure range/set pressure range roof pressure Hysteresis Temperature characteristics (ased on 25 C) Operating voltage Output Indicator light Current consumption roof pressure (Max. operating pressure) Operating temperature range ZSE2-R-5 ZSE2-R-55 ir to - ka 5 ka % F.S. or less (Fixed) ± % F.S. or less 2 to 24 DC (Ripple ±% or less) NN Open collector, 8 m N Open collector 8 m ights up when ON 7 m or less (when 24 DC is ON).5 Ma 5 to 5 C When using ejector system, instantaneous pressure up to.5 Ma will not damage the switch. Note ) Operation outside of the maximum operating pressure and operating temperature range may cause a serious accident or damage. Note 2) For details about wiring, refer to the Operation Manual that can be downloaded from our website ( How to Order ZSE2 R 5 Output specifications NN Open collector 5 8m N Open collector 55 8m iping specifications ead wire length.6 m Grommet type ead wire length m C C CN Connector type ead wire length.6 m ead wire length m W/o lead wire ZK2 Z Z With Connector/How to Order Without lead wire (housing and sockets)... ZS-- With lead wire... ZS--5- Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. ead wire length 5.6 m m 5 m Example) ZSE2-R-5CN... pc. ZS pc. Refer to est neumatics No. 6 for detailed specifications of pressure switches for vacuum. 85

16 ressure Switch Unit for acuum/ressure Switch for acuum: ZSE2-R- Guidelines for Use of ressure Switch Unit for acuum System circuit for work adsorption Ejector style When pads and switches are common to one vacuum source, sometimes there is a possibility, depending on the number of adsorption and non-adsorption applications at each point in time, that the switches will not work within the range of set pressures due to pressure variations from the vacuum source. In particular, when small diameter nozzles are used for adsorption, the switches are greatly influenced by pressure variations. In order to remedy this situation, the following circuit is recommended. acuum regulator acuum source Tank Throttle valve acuum pump style acuum line ad Work ressure switch for vacuum djust the throttle valve to reduce the pressure fluctuation between absorption and nonabsorption. Stabilize the source pressure by providing a tank and a vacuum regulator. If a vacuum switch valve is inserted into individual lines and false absorption occurs, each valve should be turned OFF to minimize the influences on other pads. ressure Switch for acuum: ZSE2-R- ZSE2-R- ressure setting trimmer SET H Indicator light (Red) ZSE2-R- C ZSE2-R- C ZSE2-R- CN 2 x M2.5 x 4 Mounting thread 25 2 x M2.5 x 4 Mounting thread () () ressure setting trimmer SET H Indicator light (Red) 86 acuum supply port. acuum supply port.

17 arge Size acuum Module: Ejector System How to Set acuum ressure ressure trimmer selects the ON pressure. Clockwise rotation increases high vacuum set point. ressure setting trimmer Indicator light How to Use Connector. ttaching and detaching connectors When assembling the connector to the switch housing, push the connector straight onto the pins until the level locks into the housing slot. When removing the connector from the switch housing, push the lever down to unlock it from the slot and then withdraw the connector straight off of the pins. Hook ead wire Socket Connector DC polarity indication ever in Slot Housing SET.2 to. mm 2 Max. covering dia. ø.7 mm High vacuum When using the switch to confirm correct absorption, the vacuum pressure is set to the minimum value to reliably absorb. If the value is set below the minimum, the switch will be turned ON even when adsorption has failed or is insufficient. If the pressure is set too high, the switch may not operate stably even though it may absorb correctly. Supply pressure Setting pressure tmospheric pressure Reliable adsorption Unstable adsorption No adsorption 2. Crimping of lead wires and sockets Strip.2 to.7 mm at the end of the lead wires, insert the ends of core wires evenly into the sockets, and then crimp with a crimping tool. When this is done, take care that the coverings of the lead wires do not enter the core wire crimping area. (Crimping tool: model no. DXT7-75-) Covering Core wire retainer Core wire crimping area Socket ead wire Hook Covering. ttaching and detaching of socket to connector with lead wire ttaching Insert the sockets into the square holes of the connector (with +,, 2, indication), and continue to push the sockets all the way end. (When they are pushed in their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. Detaching To detach a socket from a connector, pull out the lead wire while pressing the socket's hook with a stick having a thin tip (about mm). If the socket will be used again, first spread the hook outward. Connector ead wire Hysteresis Hysteresis is the actual pressure variance from set pressure occuring when the output signal turns from ON to OFF. The set pressure is the pressure selected to switch from OFF to ON mode. High vacuum Setting pressure tmospheric pressure Hysteresis recautions e sure to read before handling. Refer to front matter 5 for Safety Instructions and pages 8 to for acuum Equipment recautions. Mounting Warning. Do not give an excessive impact load. Do not drop, bump or apply excessive impact ( m/s 2 ) when handling. Even if the switch body is not damaged, the switch may suffer internal damage that will lead to malfunction. 2. Hold the product from the body side when handling. When raising and moving the product, do not raise it by holding the lead wire only, but hold the body. It may cause malfunction due to broken contacts. ZK2 Z Z Socket Hook 87

18 acuum ressure Switch Unit/Digital ressure Switch for acuum:-zse-- - How to Order Refer to est neumatics No.6 for details. ZSE N M Symbol N C D E F Output specifications Output nalog output Type oint oltage Current NN N NN N NN NN N N 2 2 Specifications Option (Connector/ead wire specifications) Without lead wire ead wire with connector (ength 2 m) Display unit With unit display switching function M Fixed SI unit With unit display switching function (Initial value psi) Note ) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, ). Note 2) Fixed unit: ka -step setting 2 ush djust to set-value with buttons. ush Finish setting ower-saving function ower consumption is reduced by turning off the monitor. (Reduce power consumption by up to 2%.) The vacuum pressure switch mounted on this product is equivalent to our SMC product, the ZSE series compact digital pressure switch. ressure switch correspondence table Digital pressure switch Series ZSE ZSE 88 arge size vacuum module acuum pressure switch (For ) Rated pressure range Set pressure range Withstand pressure Minimum unit setting pplicable fluid ower supply voltage Current consumption Switch output Maximum load current Maximum applied voltage Residual voltage Response time Short circuit protection Repeatability Hysteresis mode Window comparator mode Hysteresis nalog output Output voltage (Rated pressure range) inearity Output impedance Output current (Rated pressure range) inearity oad impedance Display Display accuracy Indicator light Environment resistance Note ) oltage output Note 2) Current output Enclosure Operating temperature range Operating humidity range Withstand voltage Insulation resistance Temperature characteristics D ZSE. to. ka. to 5. ka 5 ka. ka ir, Non-corrosive gas, Non-flammable gas 2 to 24 DC ±% (with power supply polarity protection) 4 m (at no load) NN or N open collector output NN or N open collector 2 outputs (selectable) 8 m 28 (at NN output) or less (with load current of 8 m) 2.5 ms or less (with anti-chattering function: 2,, 5,, 2 ms) Yes ±.2% F.S. ± digit ariable ( to variable) to 5 ±2.5% F.S. ±% F.S. or less pprox. kω 4 to 2 m ±2.5% F.S. ±% F.S. or less Maximum load impedance: ower supply voltage 2 : Ω, ower supply voltage 24 : 6 Ω Minimum load impedance: 5 Ω 4-digit, 7-segment, 2-color CD (Red/Green) Sampling cycle: 5 times/sec. ±2% F.S. ± digit (mbient temperature of 25 C) ights up when switch output is turned ON. (OUT: Green, OUT2: Red) I4 Operating: to 5 C, Stored: to 6 C (No freezing or condensation) Operating/Stored: 5 to 85% RH (No condensation) C for minute between terminals and housing 5 MΩ or more (5 DC measured via megohmmeter) between terminals and housing ±2% F.S. (ased on 25 C) Oilproof heavy-duty vinyl cable, cores ø.5, 2 m ead wire 4 cores Conductor area:.5 mm 2 (WG26) Insulator O.D.:. mm Standards CE Marking, U/CS, RoHS compliance Note ) When analog voltage output is selected, analog current output cannot be used together. Note 2) When analog current output is selected, analog voltage output cannot be used together. For details about vacuum pressure switch functions, refer to the Operation Manual for Series ZSE that can be downloaded from our website ( ead wire specifications Unit specifications Output specifications

19 arge Size acuum Module: Ejector System ressure Switch for acuum + Suction Filter Unit: -F - Combination unit of vacuum pressure switch for vacuum pressure detection and suction filter to protect the unit from dust and contamination. Filter case How to Replace Elements -FC-C-S Caution. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. When an element becomes clogged, adsorption performance and response times are degraded. Stop operation and replace element. (Element no. -FZ). lease ensure that gasket is in slot before re-installation. Filter gasket -FG- Filter block O-ring Filter case -FC-C Filter element -FZ acuum pressure switch Gasket groove Specification Suction filter Unit no. Rated pressure range/set pressure range roof pressure Operating temperature range -F - - to ka 5 ka 5 to 5 C µm F Refer to pages 85 and 88 regarding pressure switch for vacuum. racket (-O) Filtration degree Filtration material ressure switch for vacuum Standard option Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Combination of ressure Switch for acuum and Suction Filter Combination symbol Suction filter ressure switch for vacuum Weight (with bracket ) (kg) E ZSE2.5 D ZSE.2 F.5 How to Order ZS 5 5 ead wire length.6 m m 5 m F Combination of pressure switch/filter Digital pressure switch for vacuum D (ZSE) + Filter E ressure switch for vacuum (ZSE2) + Filter F Filter The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the built-in filter is likely to be clogged soon. The use with the ZF, ZF and ZFC series is recommended. Output specifications Digital pressure switch for vacuum (ZSE) specifications (D) N C D E F NN open collector output N open collector output NN open collector 2 outputs N open collector 2 outputs NN open collector output + nalog voltage output NN open collector output + nalog current output N open collector output + nalog voltage output N open collector output + nalog current output ressure switch for vacuum (ZSE2) specifications (E) 55 NN open collector output N open collector output Filter specifications (F) No setting How to order When requiring a switch with lead wire of 5 m, indicate separately the model numbers of a pressure switch unit for vacuum without a lead wire connector and the 5 m lead wire connector. Ex.) - - CN... pc. ZS pcs. () ead wire length for pressure switch for vacuum connector assembly (2) ead wire length for digital pressure switch for vacuum connector assembly ZS 8 racket N With racket Without racket ead wire specifications Digital pressure switch for vacuum (ZSE) specifications (D) Without lead wire ead wire with connector (ength 2 m) Refer to Table (2) for part numbers for lead wire with connector. ressure switch for vacuum (ZSE2) specifications (E) C C CN Grommet/ead wire (ength.6 m) Grommet/ead wire (ength m) ead wire with connector (ength.6 m) ead wire with connector (ength m) Without lead wire with connector Refer to Table () for part numbers for lead wire with connector. Filter specifications (F) No setting Unit specifications Digital pressure switch for vacuum (ZSE) specifications (D) M With unit switching function SI unit only With unit switching function (Initial value psi) Note ) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, ). Note 2) Fixed unit: ka ressure switch for vacuum (ZSE2) specifications (E) No setting Filter specifications (F) No setting ead wire core cores, output, 2 m (Output specifications: N, ) 4 cores, 2 outputs, 2 m 4 (Output specifications:,, C, D, E, F) 8 ZK2 Z Z

20 S ressure Switch for acuum + Suction Filter Unit: -F Dimensions: -F -FE Circuit diagram Indicator light(red) acuum pressure setting trimmer 2 x long hole (Mounting hole) Release pressure supply () port acuum pressure supply () port acuum () port 4.6 SET H x 4.6 (Mounting hole) (6) acuum pressure switch Suction filter Rc/8 acuum () port Rc/8 acuum pressure supply () port Release pressure supply () port Remove the plug from port at external release daptor F Filter block 2 x 4.2(Mounting hole) 6 racket FD 7.2 Circuit diagram ZSE (Without analog output) ZSE (With analog output) Suction filter Digital pressure switch for vacuum (76) Filter block D 7 (2) Note) Dimensions : For mounting bracket racket part number:-o(standard)

21 arge Size acuum Module: Ejector System Suction Filter: -FX- -FX is to be used alone and cannot be combined with other units. Specification Model Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Standard -FX- -. to.5 Ma 5 to 5 C µm F. kg racket C (-OC) ZK2 How to Order FX Z Filter case Caution. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. racket C N With racket C Without racket C Z Dimensions: -FX- Circuit diagram 26.5 Suction filter acuum Release pressure supply () port x.5 (Mounting hole) Suction filter Rc /8 Out port OUT Release pressure supply () port Remove the plug from port at external release. 7 7 Rc /8 IN port racket C IN 5 Note) Dimensions for mounting bracket C racket C part no. : -OC (Standard accessory)

22 -+ -+ SET H SET H Rc/4 Exhaust (EXH) port Indicator light (Red) acuum pressure setting trimmer 2 x long hole (Mounting hole) S S Ejector System Complete Unit Release pressure supply () port ilot pressure supply () port ilot pressure exhaust () port Nozzle dia./ø., ø., ø.5 -K M -E - 5 For port exhaust Exhaust (EXH) port ir pressure supply () por acuum () port <Components> Ejector + alve + ressure Switch for acuum + Filter Circuit diagram ressure switch for vacuum (E) Silencer port exhaust ZSE Manual x 4.6(Mounting hole) ilot pressure exhaust () port Release pressure supply () port ilot pressure supply () port ilot valve for release ilot valve for supply ilot valve for supply stop K M -D - 5 Rc/4 Exhaust (EXH.) port 2 For port exhaust Release flow adjusting needle (in case of DC) 7 (in case of C) Rc/8 acuum pressure supply () port () ight alve Unit Silencer daptor C 27 8 :Release flow adjusting needle with lock nut (Needle fully open) Ejector 2 (6) acuum pressure switch Suction filter 7 8 (in case of nozzle diameter.5) 7 (in case of nozzle diameter.,. port exhaust) 84 (in case of nozzle diameter.5) 74 (in case of nozzle diameter.,. port exhaust) 2 x 4.2(Mounting hole) 7.2 ZSE (Without analog output) racket Rc/8 acuum () port Circuit diagram Digital pressure switch for vacuum (D) ZSE (With analog output) Digital pressure switch for vacuum 6 85 (8) 2 4 (2)

23 SET H S S arge Size acuum Module: Ejector System Nozzle dia./ø.8, ø K M -E - For port exhaust Rc/8 Exhaust (EXH) port Note) Dimensions for mounting bracket 2 Dimensions for mounting spacer racket part no. : -O (Standard accessory) ZK2 :Release flow adjusting needle with lock nut 5 Z (Needle fully open) SET H (in case of silencer exhaust) 5 (in case of port exhaust) 4 (in case of silencer exhaust) (in case of port exhaust) Z Dimensions not indicated are identical to the drawing on page K M -D - Rc/8 Exhaust (EXH) port In case of ort exhaust :Release flow adjusting needle with lock nut (Needle fully open) 4 (in case of silencer exhaust) (in case of port exhaust) Digital pressure switch for vacuum (in case of silencer exhaust) 5 (in case of port exhaust) 46 (2)

24 Rc/4 Exhaust (EXH) port Exhaust (EXH) port Ejector System Release pressure supply () port ilot pressure supply () port ilot pressure exhaust () port ir pressure supply () port acuum () port with alve Circuit diagram Silencer ort exhaust Nozzle dia./ø., ø., ø.5 -K M - 5 For port exhaust Manual 2 x 4.6 (Mounting hole) 8 6 ilot pressure exhaust () port Release pressure supply () port ilot pressure supply () port Nozzle dia./ø.8, ø K M - For port exhaust Rc/8 Exhaust (EXH) port ilot valve for release ilot valve for supply ilot valve for supply stop () ( in case of DC) 7 (in case of C) ight 2 Release flow adjusting needle Rc/8 acuum pressure supply () port :Release flow adjusting needle with lock nut (Needle fully open) alve Unit Silencer Ejector x.4 (Mounting hole) 5 8(in case of nozzle diameter.5) 7(in case of nozzle diameter.,. ) 84(in case of nozzle diameter.5) 74(in case of nozzle diameter.,. ) Rc/8 acuum () port Note) Dimensions for mounting bracket racket part no. : -O (Standard accessory) 28 (in case of silencer exhaust) 5 (in case of port exhaust) 4 (in case of silencer exhaust) (in case of port exhaust) Dimensions not indicated are identical to the top drawing. 4 72

25 ZK2 Z Z 5

26 S S Ejector System Exhaust (EXH) port acuum () port without alve Nozzle dia./ø., ø., ø.5 5 For port exhaust Rc/4 Exhaust (EXH) port -E ir pressure supply () port Indicator light(red) acuum pressure setting trimmer Circuit diagram 2 x long hole(mounting hole) Silencer ort exhaust ressure switch for vacuum (E) ZSE2 SET H SET H x 4.6 (Mounting hole) Rc/8 acuum pressure supply () port racket D Release pressure supply () port Remove the plug from port at external release. 84 (in case of nozzle diameter.5) 74 (in case of nozzle diameter.,. port exhaust) 8 (in case of nozzle diameter.5) 7 (in case of nozzle diameter.,. port exhaust) 7 Silencer Ejector 8 acuum pressure switch Suction filter 2 x 4.2(Mounting hole) 8 (6) Rc/8 acuum () port For port exhaust Rc/4 Exhaust (EXH) port 7.2 Digital pressure switch for vacuum (D) ZSE (Without analog output) ZSE (With analog output) 7 Suction filter Digital pressure switch for vacuum ttachment D 84 (in case of nozzle diameter.5) 74 (in case of nozzle diameter.,. port exhaust) 8 (in case of nozzle diameter.5) 7 (in case of nozzle diameter.,. port exhaust) 56 (76) (2)

27 S S arge Size acuum Module: Ejector System Nozzle dia./ø.8, ø E Note) Dimensions for mounting bracket racket part no.: -O (Standard accessory) Rc /8 Exhaust (EXH) port For port exhaust ZK2 SET H SET H 5 Z 4 (in case of silencer exhaust) (in case of port exhaust) (in case of silencer exhaust) 5 (in case of port exhaust) Z For port exhaust Rc /8 Exhaust (EXH) port -D (in case of silencer exhaust) (in case of port exhaust) (in case of silencer exhaust) (in case of port exhaust) Digital pressure switch for vacuum 56 (76) (2) Dimensions not indicated are identical to the top drawing. 7

28 Ejector System/Manifold Specifications How to Order Manifold bout individual spacers In the right table, ports with the symbol mean that they are manifold supply, while others are individual supply from the valve unit. Symbols in the right table are printed on the surface of individual spacers. art no. -R R -R2 R2 -R R -R4 R4 -R5 R5 -R6 R6 -R7 R7 -R8 R8 Specifications Max. number of units ort Common air pressure supply () port Common pilot pressure supply () port Common release pressure supply () port Common exhaust (EXH.) port Weight (Manifold bases only) Manifold ir Supply Max. 6 stations ort size 8 (Rc, NTF, G) 2 (Rc, NTF, G) asic mass for one station is.28 kg. dditional mass per one station is.2 kg. Manifold eft Right ort Supply port location (eft side) R (Right side) (oth sides) ir supply to port NK plug attached to port Note) NK plug is attached on all ports of valve unit. Individual Spacer art no. -R to R6 ort Function ossible to set the air supply pressure individually ossible to set the pilot valve air supply pressure individually ossible to set the release valve supply pressure individually ossible to set the pilot valve exhaust individually Individual spacer is used when the connecting port of each unit is not common for the manifold connecting port. Mixed specifications of common and individual unit connecting ports for each unit is possible on manifolds with this individual spacer. <Manifold base> <Function plate> <Individual spacer> Z 6 Stations 6 6 Thread type Rc F G Note ) T NTF R ort location R Right side eft side oth sides iewed from the front side of valve unit, confirm the port location on the right and/or left side. Symbol 2 Note ) The thread ridge shape is compatible with the G thread standard (JIS 22), but other shapes are not conforming to ISO6 and ISO7. Example ) Z6-R... pc. (Manifold base only) 2S-K5MZ-EC... 5 pcs. (Unit) -M... pc. (lank plate) -R-... pc. (Individual spacer) Caution when ordering manifold () When using or more stations with 2 manifold, utilize port as supply port on both sides. (2) When using or more stations with 2 manifold, utilize EXH port as exhaust port on both sides. With reference from valve side, the third station from right side Symbol R iping specifications Symbol port port Common port Common Individual art no. -R R -R R -R R -R2 R2 -R R -R4 R4 -R5 R5 -R6 R6 rrangement (Right valve station which is looked from valve side is first station.) The asterisk denotes the symbol for assembly. refix it to the ejector part numbers to be mounted. When it is not added, the manifold base and ejector are shipped separately. 8 R R6 Refer to bout individual spacer.,, station only rrangement 6 6 stations only (Right valve ll stations station which is When the spacers are looked from valve attached to the specified side is first station.) locations, specify all spacers. station only 6 6 stations only ll stations When the spacers are attached to the specified locations, specify all spacers. Example 4) ttached to the first and third stations -R- -R- <lanking plate> Symbol M Refer to Example ). Example 2) ttached to the first and third stations -R- -R- Example ) ttached to all stations. -R-

29 arge Size acuum Module: Ejector System Manifold/System Circuit Example When not using individual spacer When using individual spacer ZK2 EXH. () EXH. () Z ody ported individual spacer -R- Z : ir pressure supply port : ilot pressure supply port : Release pressure supply port : ilot pressure exhaust port EXH.: Common exhaust port : acuum ort : ir pressure supply port : ilot pressure supply port : Release pressure supply port : ilot pressure exhaust port EXH.: Common exhaust port : acuum ort <System circuit example> <System circuit example> EXH EXH EXH -R- EXH

30 ody ported individual spacer Function plate 5 6 (2) Digital pressure switch for vacuum 4 x 5.7 (Mounting hole) Manual 2 itch = 2 4 S acuum () port acuum () port Common Exhaust (EXH.) port Common ir pressure supply () port Common ilot pressure supply () port Common Release pressure supply () port : Release flow adjusting needle with lock nut SET H (Needle fully open) ody ported individual spacer Suction filter acuum pressure switch pressure setting trimmer Exhaust (EXH.) port Rc/4 ilot valve for release ilot valve for supply ilot valve for supply stop () ilot pressure exhaust () port ejector (6) Release pressure supply () port (in case of DC) 8 (in case of C) EXH ilot presure supply () port ir pressure supply () port Rc/8 4 2 Release flow adjusting needle ir pressure supply () port Rc/8 Common Release pressure supply () port 2 x Release pressure supply () port Common Exhaust (EXH.) port /2(Rc,NTF,G) Common ilot presure supply () port 2 x Common ir pressure supply () port /8 (Rc,NTF,G) The common exhaust (EXH.) port is also used as the pilot pressure exhaust () port of the pilot valve. Use while the port is open to the atmosphere Stations Symbol (mm)

31 arge Size acuum Module: Ejector System Circuit diagram ZK2 ody ported individual spacer -R-4 Function plate -R-4 EXH Z Z ody ported individual spacer -R acuum () port Rc / itch = : ir pressure supply port : ilot pressure supply port : Release pressure supply port : ilot pressure exhaust port EXH.: Exhaust port : acuum ort

32 S acuum () port acuum () port Common Exhaust (EXH.) port Common ir pressure supply () port Common ilot presure supply () port Common Release pressure supply () port Function plate ody ported individual spacer Digital pressure switch for vacuum Manual 82 (2) x 5.7 (Mounting hole) 2 : Release flow adjusting needle with lock nut itch = Silencer case (uilt-in silencer) SET H (Needle fully open) Suction Filter acuum Switch ressure switch for vacuum pressure setting trimmer ody ported individual spacer ilot valve for release ilot valve for supply ilot valve for supply stop Exhaust (EXH.) port Rc/8 ilot exhaust () port Release pressure supply () port () Ejector (6) (in case of C) 8 (in case of DC) EXH ilot pressure supply () port 2 x ir pressure supply () port Rc/8 4 2 Release flow adjusting needle Common Release pressure supply () port 2 x Release pressure supply () port ir pressure supply () port Rc/ Common Exhaust (EXH.) port /2 (Rc, NTF, G) Common ilot pressure supply () port 2 x Common ir pressure supply () port /8 (Rc, NTF, G) Stations Symbol (mm) The common exhaust (EXH.) port is also used as the pilot pressure exhaust () port of the pilot valve. Use while the port is open to the atmosphere.

33 arge Size acuum Module: Ejector System Circuit diagram ZK2 ody ported individual spacer -R-4 Function plate -R-4 EXH Z Z ody ported individual spacer -R itch = acuum () port Rc /8 : ir pressure supply port : ilot pressure supply port : Release pressure supply port : ilot pressure exhaust port EXH.: Common exhaust port : acuum ort

34 arge Size acuum Module: acuum ump System [Option] Note) CE-compliant: For DC only. Note for model selection Take function plates into consideration. (Refer to page 7.) alve unit Components ressure switch for vacuum Suction filter How to Order Combination of supply switch valve and release valve Refer to Table (). Solenoid valve rated voltage Electrical entry ight/surge voltage suppressor Manual override K 5 M Z D Combination of switch/filter Output specifications Unit specifications ead wire specifications Release flow rate adjusting needle/ racket or CE-compliant CE-compliant Q (DC only) Z S Solenoid valve rated voltage CE-compliant Note) 5 ir operated 24 DC 6 2 DC 6 DC S 5 DC R DC D Note) D2 Note) C ( 5 6 Hz) C ( 5 6 Hz) Note) ir operated, C, and C type are not CE-compliant. ight/surge voltage suppressor None With light/surge voltage suppressor With surge voltage suppressor DC voltage: e much careful about polarity, because it is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. C voltage: S is not available for C. 4 Combination of vacuum valve and release valve Refer to Table () in page 5 for details. Electrical entry ir operated For 24, 2, 6, 5, DC N O M plug connector type M plug ead wire length. m Without lead wire Without connector ead wire length. m MN MO connector type Without lead wire Without connector G Grommet ead wire length. m (pplicable to only DC) H type ead wire length.6 m (pplicable to only DC) Refer to Table (2) on page 5 for part no. of lead wire with connector. D E F Manual override Non-locking push type Slotted locking type Combination of switch/filter Digital pressure switch for vacuum (ZSE) + Filter ressure switch for vacuum (ZSE2) + Filter Filter Refer to Table () on page 5 for part no. of lead wire with connector. Filter specifications (F) No setting Unit specifications Digital pressure switch for vacuum (ZSE) specifications (D) Note ) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, ). Note 2) Fixed unit: ka ressure switch for vacuum (ZSE2) specifications (E) No setting Filter specifications (F) No setting Output specifications Digital pressure switch for vacuum (ZSE) specifications (D) N C D E F M Release flow rate adjusting needle/racket, ock nut racket or M N : ttached (racket or is shipped together.) : None ead wire specifications Digital pressure switch for vacuum (ZSE) specifications (D) Without lead wire ead wire with connector (ength 2 m) Refer to Table (4) on page 5 for part no. of lead wire with connector. ressure switch for vacuum (ZSE2) specifications (E) C C CN Grommet/ead wire (ength.6 m) Grommet/ead wire (ength m) ead wire with connector (ength.6 m) ead wire with connector (ength m) With connector/without lead wire With unit switching function SI unit only With unit switching function (Initial value psi) NN open collector output N open collector output NN open collector 2 outputs N open collector 2 outputs NN open collector output + nalog voltage output NN open collector output + nalog current output N open collector output + nalog voltage output N open collector output + nalog current output ressure switch for vacuum (ZSE2) specifications (E) NN open collector output 55 N open collector output Filter specifications (F) No setting

35 arge Size acuum Module: acuum ump System Table () alve Unit/Combination of acuum Switch alve and Release alve alve unit function alve unit components Supply valve Release valve Solenoid valve ir operated Solenoid valve ir operated Operation acuum acuum Supply Release Symbol Double SO. Double SO. N.C Double SO. Double SO. N.C stop adsorption release valve valve (SYJ) (SYJ) (SYJ2-X26) (SYJ2-X27) (SYJ) (SYJ2-X26) (SYJ2-X27) (SYJ) Double SO. N.C. (SYJ2-X26) (SYJ) K N.C. N.C. (SYJ) (SYJ) K2 ir operated ir operated (SYJ) (SYJ) K N.C. Common with C (SYJ) supply valve ir operated Common with C2 (SYJ) supply valve N.O. Common with C (SYJ) supply valve Double SO. Common with C4 (SYJ2-X27) supply valve ZK2 Z Z Table (2) How to Order alve lug Connector ssembly DC SY 4 Table () ressure Switch for acuum/ ead Wire with Connector ZS 5 For C: For other voltages of C (with rectifier) SY SY ead wire length 5.6 m m 5 m How to order When requiring a vacuum unit equipped with valves with lead wires of 6 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) -K5M Z-EC (-Q)... pc. SY pcs. ead wire length mm (Standard) 6 mm mm 5 mm 2 mm 25 mm mm 5 5 mm How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire with connector and the 5 m lead wire connector separately. Example) - - CN (-Q)... pc. ZS pc. Table (4) Digital ressure Switch for acuum/ ead Wire with Connector ZS 4 8 ead wire core cores, output, 2 m (Output specifications: N, ) 4 cores, 2 outputs, 2 m (Output specifications:,, C, D, E, F) 5

36 acuum ump System / Combination of supply valve and release valve Combination Symbol : K Combination Symbol : C Feature : Double solenoid vacuum valve allows for self-holding. Feature: dsorption of workpieces (when energized) and release of vacuum (when de-energized) are switched by single solenoid valve. How to Operate ilot valve operation Supply valve Release valve Note ilot valve ilot valve ilot valve for supply for supply stop for release ON OFF OFF OFF ON ON OFF ON OFF Operation. dsorption 2. acuum release. Operation stop Combination Symbol : K2 Feature: Single solenoid valve is provided for vacuum valve. How to Operate ilot valve operation Operation. dsorption 2. acuum release. Operation stop Supply valve Release valve Note ilot valve for supply ilot valve for release ON OFF OFF OFF ON OFF Combination Symbol : K Feature: Operation can be controlled by an external pilot valve. How to Operate ilot valve operation Operation. dsorption 2. acuum release. Operation stop ilot air ilot air ir operated a ir operated b ON OFF OFF ON OFF OFF When power supply is cut off while the supply valve is ON, the operational state is held. Supply valve Release valve Note v When power supply is stopped, all operations will be stopped. v The product is used under the environment in which solenoid valves cannot be used or when the centralized control is applied using external pilot air. How to Operate ilot valve operation Operation. dsorption 2. acuum release Feature: dsorption of workpieces and release of vacuum are switched by an external pilot valve. ilot air Feature: dsorption of workpieces (when de-energized) and release of vacuum (when energized) are switched by the single solenoid valve. Feature: dsorption of workpieces and release of vacuum are switched by double solenoid valve. Supply valve/release valve ilot valve for supply/release ON OFF Combination Symbol : C2 How to Operate ilot valve Supply valve/release valve operation Note Operation ir operated a e careful for blowing off of workpieces or. dsorption 2. acuum release ON OFF displacement of adsorption position in case of small and/or lightweight workpieces. Combination Symbol : C How to Operate ilot valve operation Operation. dsorption 2. acuum release Supply valve/release valve ilot valve for supply/release OFF ON Combination Symbol : C4 Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. v v v Caution When pipe connection is made to two port connections () port, () port only, use a function plate (-R). Refer to page 7 for further information. How to Operate Operation. dsorption 2. acuum release ilot valve Supply valve/release valve operation ilot valve for supply ON OFF ilot valve for release OFF ON v Note When power supply is stopped vacuum valve/vacuum release valve will hold the operation. 6

37 arge Size acuum Module: acuum ump System Function late : -R function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to,, and ports respectively. Without Function late (Standard) pplicable system: Ejector system External vacuum supply system Release pressure supply () port ilot pressure supply () port ilot pressure exhaust () port (Open) With Function late/pplicable to acuum ump System Only When -R (/ ) is Selected Since compressed air is necessary to operate pilot valve in vacuum pump system, supply air to port (or port). acuum pressure supply () port ipe connection Example of circuit diagram Example of circuit diagram -R ZK2 Z Z Release pressure supply () port ilot pressure supply () port (lugged) ilot pressure exhaust () port (Open) acuum pressure supply () port -R ipe connection How to Order Function late Unit (For ump System) R iping specifications Symbol Symbol port / port / Individual Common How to order Indicate the model numbers of the vacuum module and the function plate. Example) -K5MZ-E -R Caution ength of assembling mounting threads varies when adding function plate later. Order from the mounting thread parts list for unit combination on page. Order a plug (l-m) separately in order to plug the and ports that are no longer used due to the addition of function plate. 7

38 alve Unit : Specifications alve unit part no. Components Operating method Combination of supply valve and release valve port supply pressure port supply pressure port supply pressure Main valve effective area (mm 2 ) Main valve effective area (Cv) Maximum operating frequency Operating temperature range Standard Supply valve Release valve ilot operated ilot operated Refer to the combination of supply valve and release valve below.. to.6 Ma.5 to.6 Ma.25 to.6 Ma Hz 5 to 5 C racket (-O).6.5 Solenoid alve/specifications Solenoid Rated voltage Electrical entry ight/surge voltage suppressor Manual operation SYJ-, SYJ2- -X26, SYJ2- -X27 24, 2, 6, 5, DC,, C ( 5 6 Hz) DC-/M plug connector, Grommet vailable, Not available (at grommet) Non-locking push type, ocking slotted type Combination of Supply alve and Release alve Combination symbol acuum switch valve Release valve Weight (kg) K Double SO. (SYJ2-X26) N.C. (SYJ).4 K2 K N.C. (SYJ) ir operated (SYJ) N.C. (SYJ) ir operated (SYJ).27.4 C C2 C C4 N.C. (SYJ) ir operated SYJ N.C. (SYJ) Double SO. (SYJ2-X27) Weight includes racket. (Solenoid valve: 24 DC, M plug connector type) How to Order Refer to page 4 for further part no. information. K Combination of vacuum valve and release valve acuum ressure Switch Unit/Digital ressure Switch for acuum : -ZSE Specifications Rated pressure range Set pressure range Withstand pressure pplicable fluid ower supply voltage Current consumption Switch output Hysteresis mode Window comparator mode Display Display accuracy Environment resistance Solenoid valve rated voltage Enclosure Operating temperature range Operating humidity range Withstand voltage Temperature characteristics Electrical entry 5 M Z Hysteresis CEcompliant Release flow rate adjusting needle/racket Manual override With light/surge voltage suppressor. to. ka. to 5. ka 5 ka ir, Non-corrosive gas, Non-flammable gas 2 to 24 DC ±% (with power supply polarity protection) 4 m (at no load) NN or N open collector output NN or N open collector 2 outputs (selectable) ariable ( to variable) 4-digit, 7-segment, 2-color CD (Red/Green) Sampling cycle: 5 times/sec. ±2% F.S. ± digit (mbient temperature of 25 C) I4 Operating: to 5 C, Stored: to 6 C (No freezing or condensation) Operating/Stored: 5 to 85% RH (No condensation) C for minute between terminals and housing ±2% F.S. (ased on 25 C) Note ) When analog voltage output is selected, analog current output cannot be used together. Note 2) When analog current output is selected, analog voltage output cannot be used together. Refer to page 88 for further specifications.

39 arge Size acuum Module: acuum ump System acuum ressure Switch : ZSE2-R- Refer to page 85 for further specifications. Specifications ressure switch for vacuum part no. Fluid Rated pressure range/set pressure range roof pressure Hysteresis Temperature characteristics (ased on 25 C) Operating voltage Output Indicator light Current consumption roof pressure (Max. operating pressure) Operating temperature range 5 to 5 C When using the ejector system, instantaneous pressure up to.5 Ma will not damage the switch. Note) Operation outside of the maximum operating pressure and operatingtemperature range may cause a serious accident or damage. ressure Switch for acuum/suction Filter Unit : -F - Specifications Suction filter Unit no. Rated pressure range/set pressure range Operating temperature range Filtration degree Filtration material ressure switch for vacuum Standard option ZSE2-R-5 ZSE2-R-55 ir to - ka 5 ka % F.S. or less (Fixed) ± % F.S. or less 2 to 24 DC (Ripple ±% or less) NN Open collector, 8 m N Open collector 8 m ights up when ON 7 m or less (when 24 DC is ON).5 Ma -F - - to.5 Ma 5 to 5 C µm F Refer to pages 85 and 88 regarding pressure switch for vacuum. racket (-O) Note) Operation outside of the operating pressure and operating temperature rangemay cause a serious accident or damage. ZK2 Z Z Refer to page 8 for further specifications. Filter case Caution The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. Do not expose it to direct sunlight. Suction Filter : -FX- Specifications Model Operating pressure range Operating temperature range Filtration efficiency Filter media Weight (with bracket) Standard option -FX- -. to.5 Ma F. kg racket C (-OC) Note) Operation outside of the operating pressure and operating temperature rangemay cause a serious accident or damage. Refer to page for further specifications. Filter case Caution The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. Do not expose it to direct sunlight.