Easier maintenance. ZHP Series. Mounting with the lock plate reduces the pad replacement work steps! Uses an isolated structure. Application Examples

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1 Vacuum ad with Ejector Series ad Diameter: ø63, ø8 Ejector and pad are integrated. Space saving and reduced piping labor! Two-stage ejector More efficient ejector Suction flow rate 1) Compared with SMC single stage ejector With One-touch fitting Metric: ø4, ø6 Inch: ø5/32", ø1/4" Strainer 5% increased 1 Two-stage ejector First ejector revents entry of foreign matter at the pad suction port. Improved ease of removal 2 Second ejector With groove Dents and bumps on the adsorption surface prevent the workpiece from sticking to it. This facilitates easy removal. SU ir consumption Q1 + Q2 = Suction flow rate 3% reduced 1 EXH Silencer Ejector silencer RoHS Bellows type with groove Flat type with groove By dispersing the exhaust in all directions, undesired exhaust noise can be silenced while still exhibiting maximum vacuum performance. Structure designed to minimize clogging ZK2 ZQ ZR ZB Z ZX ZM ZL -X267 ZU VQD-V ort/for Vacuum release, ressure sensor, Daisy-chain piping Daisy-chain vacuum piping is possible. <Daisy-chain piping example> Shot-blasted Micro-dents and bumps are formed on the adsorption surface. Workpieces can be removed easily. 2 Compared with current Z series With ejector Without ejector Daisy-chain piping 253 B

2 Series Easier maintenance Mounting with the lock plate reduces the pad replacement work steps! Uses an isolated structure. Lock screw Lock plate q Remove the lock screw and slide the lock plate. lock plate is used to facilitate separation. Rubber and metal parts can be disposed of separately. Holder Holder late ad Stud w Remove the stud from the bottom of the pad. ad diameter ad form ad material Mounting ø63, ø8 Bellows type with groove Flat type with groove NBR (Black) *1 Silicone rubber (White) Urethane rubber (Brown) FKM (Black) *1 Metric size (Male thread/female thread) M8 M1 Inch size (Male thread/female thread) 5/16-18UNC 3/8-16UNC pplication Examples Nozzle nominal size *2 [mm] ø.7 ø1. ø1.2 ø1.5 *1 Refer to page 26 for identification method. *2 With ejector Robot handling alletizing utomobile Case packer 254

3 Vacuum ad with Ejector Series ø63, ø8 RoHS Without ejector With ejector ad material N NBR (Black) S Silicone rubber (White) U Urethane rubber (Brown) F FKM (Black) Refer to page 26 for identification method. Ejector Specifications ad diameter 63 ø63 8 ø8 8 8 BM BM ad form BM Bellows type with groove UM Flat type with groove How to Order N N Mounting Symbol Type Thread Size Male M8 B Metric thread M1 C size Female M8 D thread M1 E Male 5/16-18UNC F Inch thread 3/8-16UNC G size Female 5/16-18UNC H thread 3/8-16UNC B B 1-7l Nozzle nominal size [mm] Max. suction flow rate [L/min (NR)] ir consumption [L/min (NR)] Vacuum pressure reached [ka] 91 Standard supply pressure [Ma].35 Standard supply pressure Response Time [ms] ad dia. Nozzle size BM -7 BM -1 BM -12 BM -15 ø ø Response time means a period of time that the vacuum pressure reaches 57 ka after the externally installed valve has been turned ON when the bellows type pad is used and the supply pressure is.35 Ma. C6 S Exhaust release S Silencer exhaust Supply () port Symbol Type ort size C4 ø4 One-touch fitting Metric C6 ø6 One-touch fitting N3 ø5/32" One-touch fitting Inch N7 ø1/4" One-touch fitting Ejector/ Nozzle nominal size [mm] 7 Nozzle: ø.7 1 Nozzle: ø1. 12 Nozzle: ø Nozzle: ø1.5 Recommended Work Load [N] 63 8 Horizontal lifting Vertical lifting Use this product with the recommended work load or less. The transfer work over the recommended work load may cause the vacuum pressure to decrease by the air leak. The work load shown above is the value when the vacuum pressure reaches 85 ka, and that is calculated by multiplying the theoretical value by a safety factor of 1/4 for the horizontal lifting or 1/8 for the vertical lifting. For details, refer to pages 25 to 48 for the Vacuum Equipment Model Selection. The vacuum pressure reached may vary depending on the workpiece (permeability, etc.) Calculate the actual work load in accordance with the vacuum pressure reached. ZK2 ZQ ZR ZB Z ZX ZM ZL -X267 ZU VQD-V Weight Material: NBR, Mounting: [g] 63BMN- C6S 184 8BMN- C6S UMN- C6S 167 8UMN- C6S 175 For the - (without ejector), weight shown above 12 g. When the mounting symbol is other than, add the weight q shown in the table on the right to the weight described in the table above. When the material is other than NBR, add the weight w shown in the table on the right to the weight described in the table above. This weight includes the accessory weight. q Weight Difference by Mounting Style [g] B C D E F G H w Weight Difference by Material [g] ad diameter/form Silicone rubber Urethane rubber FKM 63BM BM UM UM

4 Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Exhaust Characteristics Vacuum pressure Suction flow ir consumption Supply pressure [Ma] Vacuum pressure 7 Suction flow ir consumption Supply pressure [Ma] Vacuum pressure Suction flow 4 3 ir consumption Supply pressure [Ma] Suction flow [L/min(NR)] ir consumption [L/min(NR)] Suction flow [L/min(NR)] ir consumption [L/min(NR)] Suction flow [L/min(NR)] ir consumption [L/min(NR)] Flow Rate Characteristics (Supply pressure:.35 Ma) Suction flow [L/min(NR)] Suction flow [L/min(NR)] (Supply pressure:.35 Ma) (Supply pressure:.35 Ma) Suction flow [L/min(NR)] Vacuum pressure Suction flow Supply pressure [Ma] ir consumption Suction flow [L/min(NR)] ir consumption [L/min(NR)] -15 (Supply pressure:.35 Ma) Suction flow [L/min(NR)]

5 Vacuum ad with Ejector Series Construction!1!5!2 t!3 -!4 y Component arts No. Description Note 1 Stud 2 Strainer 3 Mounting bracket 4 Lock nut 5 Lock pin 6 Check valve 7 Lock plate 2 pcs. included for male thread mounting (Not included for female thread mounting) ZK2 ZQ ZR ZB! o i r e w u q Replacement arts No. Description art no. Note 8 ad Z3E-mmm Flat/Bellows type with groove 9 late 1-Lm- 1 Holder 11 lug 12 One-touch fitting KJHm-C2 13 Ejector assembly ZK2-EJmW- 14 Silencer assembly 1-S1-15 Lock screw C284 Included 3 pieces are included in one product. (The part numbers are for 1 piece.) TB148 Included for metric size TB55 Included for inch size Z ZX ZM ZL -X267 ZU VQD-V Replacement arts/how to Order i ad Z3E 8 BM N o!late assembly 1 L 1 ad material N NBR S Silicone rubber U Urethane rubber F FKM Size (pplicable pad dia./form) 1 ø63/ø8: Flat type, ø63: Bellows type 2 ø8: Bellows type art number for a set of plate and holder Holder late ad form BM Bellows type with groove UM Flat type with groove ad diameter 63 ø63 8 ø8 When changing the pad diameter, replace also the plate together.!2 One-touch fitting (The order lot is 1 pieces.) KJH 6 C2 pplicable tubing O.D. 4 ø4 6 ø6 3 ø5/32" 7 ø1/4" Bellows type with groove Flat type with groove!3 Ejector assembly ZK2 EJ 1 W Nozzle nominal size 7 ø.7 1 ø1. 12 ø ø

6 Series Dimensions N In the case of Flat type Silencer EXH. F ø C D E K D port port D port 1 Unlocked: 32.2 Locked Unlocked F 6.2 G H 1 J M Male thread mounting D port 2 L M Female thread mounting E Lock screw ø14.4 B C D D port size Metric size: Rc1/8 Inch size: NT1/8 Dimensions [mm] B C D E F 63BM ø26 ø45.8 ø63 ø BM ø28 ø57 ø8 ø UM ø26 ø63 ø UM ø26 ø8 ø Supply ort Dimensions N C4 4.7 C6 4.7 N3 4.7 N7 7.3 [mm] dapter Dimensions (by Mounting Style) [mm] G H J K L M mmm-mms M8 mmmb-mms M1 mmmc-mms M8 depth 1 mmmd-mms M1 depth 1 mmme-mms /16-18UNC mmmf-mms /8-16UNC mmmg-mms /16-18UNC depth 11 mmmh-mms /8-16UNC depth 11 For symbols G and H (inch-type female thread), the dimension K becomes the width across flats. 258 Circuit D1 D2 V EXH. D3

7 Series Specific roduct recautions 1 Be sure to read this before handling the products. Refer to back page 5 for Safety Instructions and pages 49 to 51 for Vacuum Equipment recautions. 1. Use the product while strictly observing the precautions on vacuum equipment and taking the safety into consideration. dditionally, select a pad size and material suitable for the workpiece to be adsorbed and the atmosphere. Take safety measures so that any accident, such as workpiece drop does not occur during adsorption transfer. For details, refer to pages 25 to fter the pad has been replaced, lock the lock plate completely before use. (Refer to q shown in the figure below.) If the lock plate is not locked completely, the pad may drop due to the vibration or load during operation. 3. To ensure the safety, be sure to mount the lock screw on the lock plate before use. (Refer to w shown in the figure below.) If the lock plate comes off during operation, this may cause a serious accident, such as pad drop or workpiece drop. Unlocked q Lock plate Locking status: cceptable Stud Locking status: Not acceptable w Lock screw dhesion Gap 4. If the adsorption time delay or incorrect adsorption occurs, the vacuum leak due to worn out pad or strainer clogging may be the cause. erform the periodic maintenance so that any trouble such as workpiece drop does not occur. 5. When connecting multiple pads to one ejector through the vacuum communication, other pads also cannot adsorb if incorrect adsorption occurs in one pad. Take safety measures so that the workpiece does not drop during transfer. 6. Replace the pad while referring to the figure below. Lock plate Lever on ejector side dapter plate ad assembly e w t y r Lock plate Lock screw q Holder Non-rotating hole late ad Stud assembly q Remove the lock screw. w ush the lever (on the ejector side) of the lock plate to slide it to a position where it stops completely. e ull out the pad assembly. r ull out the stud assembly from the pad assembly. t Remove the holder. y Remove the plate from the pad. u Mount the pad in the reverse order of steps above. Cautions on pad mounting When mounting the pad assembly on the adapter plate, adjust the position so that the non-rotating convex part on the bottom of the adapter plate enters the non-rotating hole in the holder. dapter plate Non-rotating convex part When locking the lock plate, push in the stud assembly from the lower portion. If the stud assembly is not pushed into the adapter plate Stud completely, the lock plate slides insufficiently, causing pad drop or vacuum leak. 7. Recommended One-touch fitting to be mounted at the D port is the KQ2S6-1lS or KQ2S7-34lS. One-touch fitting may interfere with the top surface of the pad depending on the fitting dimensions. This may cause the One-touch fitting not to be mounted. 259 ZK2 ZQ ZR ZB Z ZX ZM ZL -X267 ZU VQD-V

8 Series Specific roduct recautions 2 Be sure to read this before handling the products. Refer to back page 5 for Safety Instructions and pages 49 to 51 for Vacuum Equipment recautions. 8. When supplying the vacuum release air to the D port, select an appropriate product suitable for the specifications so that the R port of the 2 port or 3 port valve to be used is blocked not to leak the vacuum in the closed state. 9. When using the male thread mounting type product, do not loosen the bottom nut shown in the figure below. (The bottom nut is intended to secure the connection between the bracket for the adapter connection and the male thread.) Do not loosen this nut. Male thread dapter connection bracket 11. Circuit examples ir filter D3 Regulator Supply valve Circuit without release valve (Usage example of vacuum connection) (With ejector) EXH. V Supply valve D3 D1 D3 D2 (Without ejector) V EXH. D1 D1 D2 ressure sensor dapter plate Circuit with release valve (Usage example of pressure sensor) Release valve Restrictor V D2 12. ad material and appearance color The appearance color of the pad may vary depending on the material. 1. Ejector exhaust may be directly released from the ejector silencer in the direction of workpieces. lease contact SMC if this affects adsorption. Material NBR Silicone rubber ppearance color Black White Urethane rubber Brown FKM Black * * FKM and NBR have the same color. But, F mark is indicated on the inside of the pad when the plate is removed. 26