Feature Advantage Benefit. Excellent chemical compatibility Better particle removal performance than polypropylene media

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SVN PTFE FILTERS CRITICL MTERILS HNDLING SVN PTFE FILTERS Constructed with PTFE membrane and PP supports for enhanced durability and cleanliness Overview Savana PTFE filters are constructed of PTFE

1 SVN PTFE FILTERS CRITICL MTERILS HNDLING SVN PTFE FILTERS Constructed with PTFE membrane and PP supports for enhanced durability and cleanliness Overview Savana PTFE filters are constructed of PTFE pleated membranes with polypropylene supports to provide unmatched durability and cleanliness for filtration of process fluids used in the electronics industry. pplications The hydrophobic version can be used in air filtration, stripper and IP or solvent applications in flat panel display or hard disk industries The hydrophilic version can be used in DI water and water-based acid/alkaline solutions for developer, etching and cleaning applications Features and Benefits Feature dvantage Benefit PTFE pleated membrane with polypropylene support and molded parts Hydrophobic and hydrophilic membranes.,.,.,,, pore ratings vailable in to Ø7 mm and Ø8 mm cartridge sizes Specifications Excellent chemical compatibility Better particle removal performance than polypropylene media Hydrophilic membranes do not require prewetting in water-based chemicals, while hydrophobic membranes do not require prewetting in solvent-based chemicals vailable for wide range of applications Suitable for various formats and flow requirements Can be used in a wide variety of chemical applications Provide reliable filtration of defectcausing particles Low cost of ownership Flexibility to choose hydrophobic or hydrophilic membrane to suit application Saves time and lowers operational cost Flexibility to choose cartridge format that suits POU (point-of-use) or bulk filtration Material: Membrane Hydrophobic and hydrophilic PTFE Support Polypropylene Sleeve/caps/core Polypropylene O-ring EPDM, FKM, E-FKM Gasket (Code-F) EPDM, FKM Retention rating:.,.,.,,, Maximum operating Maximum forward differential pressure. MPa (. bar, 8 C (77 F) conditions: Maximum reverse differential pressure. MPa (. bar, C (77 F) Maximum operating temperature 9 C (for 7 mm diameter cartridge, in water) 8 C (for 8 mm diameter cartridge, in water) Note: Savana PTFE can be sterilized by autoclaving up to cycles at C or sterilized by steam-in-place up to cycles at C for minutes at less than. bar differential pressure.

2 SVN PTFE FILTERS Savana PTFE Filter (Ø7 mm) Performance Data WTER FLOW RTE Savana PTFE Cartridges µm. µm µm 6 Savana PTFE-HP Cartridges µm. µm µm 6 IR FLOW RTE Savana PTFE. µm (. µm for gas) Code Cartridges SCFM SCFM MPa inlet pressure 6. MPa inlet pressure.6 MPa inlet pressure.6 MPa inlet pressure ir Flow Rate (SLPM) ir Flow Rate (SLPM) Savana PTFE. µm (. µm for gas) Code F Cartridges ENTEGRIS, INC.

3 SVN PTFE CRTRIDGE FILTERS Dimensions Ø7 MM CODE FILTER Ø7 MM CODE F FILTER Ø7 mm (.76 ) Ø7 mm (.76 ) Ø7 MM CODE FILTER Ø7 MM CODE 7 FILTER Ø7 mm (.76 ) Ø7 mm (.76 ) Ordering Information SVE = Hydrophobic SV = Hydrophilic (-HP) Pore Rating (µm) Code O-ring Quantity V =. = Code = E = EPDM = /pack G =. F = Code F = V = FKM H =. = Code = T = E-FKM* = 7 = Code 7 = S = C = *Code, and 7 only Example: SVEVE Hydrophobic Pore rating =. Code = Code = O-ring = EPDM Example: SVVE Hydrophilic (-HP) Pore rating =. Code = Code = O-ring = EPDM ENTEGRIS, INC.

4 SVN PTFE FILTERS Savana PTFE-X/-HPX Filter (Ø8 mm Code ) Performance Data WTER FLOW RTE Savana PTFE-X Cartridges Savana PTFE-HPX Cartridges µm.. µm. µm. µm µm µm 6 6 Dimensions Ø8 MM CODE FILTER. ± mm (9.6 ±.8 ) 7. mm (8.9 ) Ø8 mm (.7 ) Ordering Information SVE = Hydrophobic (-X) SV = Hydrophilic (-HPX) Pore Rating (µm) Code O-ring Quantity V =. = Code P = large = E-FKM = /pack G =. size (for large size) H =. E = EPDM = V = FKM S = C = Example: SVEVP Hydrophobic (-X) Pore rating =. Code = Code = Example: SVVP Hydrophilic (-HPX) Pore rating =. Code = Code = ENTEGRIS, INC.

5 SVN PTFE CRTRIDGE FILTERS Savana PTFE 6 THF/THP Filter (Ø8 mm Code 6) Performance Data WTER FLOW RTE Savana PTFE 6 THF Cartridges µm. µm µm/ 8 6 Savana PTFE 6 THP Cartridges µm 8. µm 6 µm/ Dimensions Ø8 MM CODE 6 FILTER 9 ± mm (9.8 ±.8 ) 6. mm (8.9 ) Ø8 mm (.7 ) Ordering Information SVE = Hydrophobic (THF) SV = Hydrophilic (THP) Pore Rating (µm) Code O-ring Quantity V =. 6 = Code 6 P = large = E-FKM = /pack G =. (=6) size (for large size) H =. E = EPDM = V = FKM S = C = Example: SVEV6P Hydrophobic (THF) Pore rating =. Code = Code 6 = Example: SVV6P Hydrophilic (THP) Pore rating =. Code = Code 6 = ENTEGRIS, INC.

6 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale ll purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Creating a Material dvantage and Savana are registered trademarks of Entegris, Inc. ENTEGRIS, INC. Corporate Headquarters 9 Concord Road Billerica, M 8 US Customer Service Tel Customer Service Fax In North merica Entegris, Inc. ll rights reserved Printed in US 6-77ENT-8

CRITICAL MATERIALS HANDLING PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS

CRITICAL MATERIALS HANDLING PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS CRITICL MTERILS HNDLING PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS PES filters for weak acids, bases and DI water filtration PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS for high particle loading applications