FluoroLine Ultrapure PFA Tubing

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ADVANCED MATERIALS HANDLING FluoroLine Ultrapure PFA Tubing Excels in ultrapure, chemically corrosive applications Entegris offers a complete line of tubing to satisfy your need for an ultraclean,

1 ADVANCED MATERIALS HANDLING FluoroLine Ultrapure PFA Tubing Excels in ultrapure, chemically corrosive applications Entegris offers a complete line of tubing to satisfy your need for an ultraclean, leak-free fluid delivery network. Made from high purity PFA material, our tubing withstands your harshest, chemically corrosive applications. Sizes range from /6" /" and 4 mm, and many material options provide flexibility to meet any fluid system design. For extreme purity needs, we offer an ultraclean (UC) tube product that has the lowest total metal extractables and least amount of surface contamination. APPLICATIONS FEATURES & BENEFITS High-purity, corrosive chemical handling Excellent performance with low surface tension chemistries Semiconductor applications including photolithography, CMP, bulk chemical delivery, and wet etch and clean processes Made from high purity % PFA material Manufactured in an ISO certified, Class 7 clean environment Resistant to highly corrosive, high purity chemical environments Controls manufacturing process and maintains tubing cleanliness Meets SEMI F57-4 specifications Assures tubing cleanliness, maintaining process integrity in liquid chemical distribution systems Excellent optical clarity Allows visual inspection of chemical flowing in the system Optional ultraclean (UC) tubing available Provides the lowest metal extractable levels and the least amount of surface contamination, maintaining process purity

2 DIMENSIONS AND TOLERANCES Size Tube size OD Wall thickness Tube size ID Minimum bend radius Maximum toll length Maximum reel length Material options /6".57 mm (.6") ±.8 mm (±.") /8".8 mm (.5") ±.8 mm (±.") /6" 4.76 mm (.88") ±.8 mm (±.").8 mm (.5") ±.8 mm (±.").76 mm (.").76 mm (.").8 mm (.") mm (.4") ft NA Chemours mm (.65") mm (.5") 5 ft 5 ft Chemours 44, 45. mm (.7") 5 mm (.") 5 ft ft Chemours 44, 45 6 mm 6 mm ±. mm. mm ±. mm.6 mm 4 mm 5 ft 5 ft Chemours 44 /4" 6.5 mm (.5").76 mm (.") 4.8 mm (.9") 5 mm (.") 5 ft 5 ft Chemours 44, 45 /4" 6.5 mm (.5") /4" 6.5 mm (.5").9 mm (.47").57mm (.6").96 mm (.56") 8 mm (.5") 5 ft 5 ft Chemours 44, 45, 95,. mm (.6") 8 mm (.5") 5 ft 5 ft Chemours 44, 45 8 mm 8 mm ±. mm. mm ±. mm 5.6 mm 4 mm 5 ft ft Chemours 44 5/6" 7.9 mm (.").76 mm (.") 6.4 mm (.5") 56 mm (.") 5 ft ft Chemours 44, 45 /8" 9.5 mm (.75").76 mm (.") 8. mm (.5") 89 mm (.5") 5 ft 5 ft Chemours 44, 45 /8" 9.5 mm (.75") mm mm ±. mm.57 mm (.6").6 mm ±. mm 6.8 mm (.5") 5 mm (.") 5 ft 5 ft Chemours 44, 45, 95, 6.8 mm 5 mm 5 ft 5 ft Chemours 44 mm mm ±. mm.6 mm ±. mm 8.8 mm 7 mm 5 ft 4 ft Chemours 44 /".7 mm (.5").76 mm (.").8 mm (.44") 7 mm (5.") 5 ft ft Chemours 44, 45 /".7 mm (.5") /4" 9.5 mm (.75") " 5.4 mm (.") ¼".75 mm (.5") ±.8 mm (±.7").57 mm (.6").57 mm (.6").57 mm (.6").9 mm (.75") ±.8 mm (±.7") 9.55 mm (.76") 58 mm (.") 5 ft 4 ft Chemours 44, 45, 95, 5.9 mm (.66") 9 mm (9.") 5 ft 5 ft Chemours 44, 45, 95,.5 mm (.876") 79 mm (.") 5 ft 75 ft Chemours 44, 45, 95, 7.94 mm (.") 8 mm (.5") NA 5 ft Chemours 44, 45 ½" 8. mm (.5") ±.8 mm (±.7").8 mm (.86") ±.8 mm (±.7").7 mm (.8") 57 mm (.5") NA 5 ft 4 mm 4 mm ±.8 mm (±.7").8 mm (.86") ±.8 mm (±.7") 5.5 mm (.98") 57 mm (.5") NA 5 ft Chemours 45, Standard for PrimeLock and Flaretek fittings Sold in full reels only

3 PERFORMANCE DATA Pressure/Temperature Ratings We used ASTM D87 to establish FluoroLine PFA tubing pressure ratings. This test exposed the tubing to long-term, constant pressures at various temperature settings. Our test took months to complete. From the analysis, we multiplied a hydrostatic design bases (HDB) value by a safety design factor to obtain a hydrostatic design stress. We used the HDB value to determine the tubing operating parameters. FluoroLine PFA tubing completed this extensive testing. All FluoroLine tubing is fully characterized and all performance ratings were derived from quantifiable data. Our design and process expertise allows you to confidently design your fluid systems reliably and safely. Ratings for Standard Wall FluoroLine Tubing Pressure vs.temperature " 8" 74 Ratings for Standard Wall FluoroLine Tubing Metric Size AT6m-.m Pressure (psig) 5 " 4" " 4" Pressure (kpa) Pressure (psig) AT8m-.m ATm-.6m ATm-.6m Pressure (kpa) 5 " and 4 mm Ratings for Thin Wall FluoroLine PFA Tubing Vacuum Limitations on Thin (.") Wall FluoroLine PFA Tubing Pressure (psig) 8" 6" 6" 4" 5 6" Pressure (kpa) Vacuum (" Hg) 5 5 All sizes Vacuum (mbar) " " 4 4

4 PRESSURE LOSS VS. FLOW This data is for water (fluid with specific gravity =.). For pressure loss vs. flow capability outside of these calculations, please contact Entegris. Standard Wall Tubing 4", 6 mm, 5 6", 8 mm Standard Wall Tubing 8", mm, mm, " L/min L/min mm 4 4" Pressure Loss (psi/ft) 4" Pressure Loss (kpa/m) Pressure Loss (psi/ft)..5 8" mm Pressure Loss (kpa/m) "..6 8 mm.6.5 mm " Gallons Per Minutes (GPM) Flow Gallons Per Minutes (GPM) Flow Standard Wall Tubing 4", ", 4" L/min Pressure Loss (psi/ft) 45. Pressure Loss (kpa/m) 4" " 4".6 4 Gallons Per Minutes (GPM) Flow 4

5 MAXIMUM PRESSURE RATINGS Maximum pressure capabilities of various sizes are listed below. Use these ratings as a guide when designing your system. SIZE Temperature FluoroLine Ultrapure PFA tubing SIZE Temperature FluoroLine Ultrapure PFA tubing 4" 4 C (75 F) 88 kpa (7 psig) 4" 4 C (75 F) 78 kpa (7 psig) 9 C ( F) 98 kpa (6 psig) 9 C ( F) 65 kpa (5 psig) C (5 F) 586 kpa (85 psig) C (5 F) 8 kpa ( psig) 5 C ( F) 4 kpa (6 psig) 5 C ( F) 65 kpa (4 psig) 75 C (5 F) 48 kpa (6 psig) 75 C (5 F) 95.5 kpa (4 psig) C (4 F) N/R C (4 F) N/R 8" 4 C (75 F) 6 kpa (4 psig) " 4 C (75 F) 5 kpa (77 psig) 9 C ( F) 8 kpa (6 psig) 9 C ( F) 6 kpa (8 psig) C (5 F) 5 kpa (7 psig) C (5 F) 695 kpa (4 psig) 5 C ( F) 59 kpa (5 psig) 5 C ( F) 7 kpa (7 psig) 75 C (5 F) 4 kpa ( psig) 75 C (5 F) 68.9 kpa ( psig) C (4 F) N/R C (4 F) N/R " 4 C (75 F) 58 kpa (68 psig) ¼" 4 C (75 F) 55 kpa (8 psig) 9 C ( F) 57 kpa (8 psig) C (5 F) 59 kpa (5 psig) ½" and 4 mm 4 C (75 F) 476 kpa (69 psig) 5 C ( F) 55 kpa (7 psig) 75 C (5 F) 5 kpa ( psig) C (4 F) N/R N/R = not rated, contact Entegris 5

6 ORDERING INFORMATION Not all combinations are available. Please visit our web site for all valid combinations (products/fluid management/tubing and pipe). FluoroLine Ultrapure PFA Tubing: part number Tube material AT = Chemours 44 UAT = Chemours 45 XAT = Chemours 95 XKT = Outside tube diameter 5 = /6" = " 5 = /8" 5 = ¼" 87 = /6" 5 = ½" 5 = ¼" 6M = 6 mm = 5/6" 8M = 8 mm 75 = /8" M = mm 5 = ½" M = mm 75 = ¾" 57 = 4 mm * Ultraclean (UC) option is only available with (XKT) tube material. ** Quantities between roll and reel length maximums will be packaged on a roll. Options (blank) = Standard UC = Ultraclean* Package** X = ' straight (blank) = Roll/Reel Wall thickness 47 =.9 mm (.47").M =. mm (.47") 6 =.57 mm (.6").6M =.6 mm (.6") 75 =.9 mm (.75") 86 =.8 mm (.86") 5 =.8 mm (.5") =.76 mm (.") FOR MORE INFORMATION Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit entegris.com and select the Contact Us link to find the customer service center nearest you. TERMS AND CONDITIONS OF SALE All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit entegris.com and select the Terms & Conditions link in the footer. Corporate Headquarters 9 Concord Road Billerica, MA 8 USA Customer Service Tel Fax Toll Free Entegris, the Entegris Rings Design, Pure Advantage, and other product names are trademarks of Entegris, Inc. as listed on entegris.com/trademarks. All third-party product names, logos, and company names are trademarks or registered trademarks of their respective owners. Use of them does not imply any affiliation, sponsorship, or endorsement by the trademark owner. 7 Entegris, Inc. All rights reserved. Printed in the USA -847ENT-7

PrimeLock Fittings. A premium PFA fitting for high-purity and corrosive chemical applications FEATURES & BENEFITS APPLICATIONS

PrimeLock Fittings. A premium PFA fitting for high-purity and corrosive chemical applications FEATURES & BENEFITS APPLICATIONS ADVANCED MATERIALS HANDLING PrimeLock Fittings A premium PFA fitting for high-purity and corrosive chemical applications Entegris has supplied innovative connection technology into the high-purity chemical