CRITICAL MATERIALS HANDLING FLUOROGARD RS RESIST STRIPPING FILTERS

Transcription

1 CRITICAL MATERIALS HANDLING FLUOROGARD RS RESIST STRIPPING FILTERS Optimized for removal of films, gels and hard particles from photoresist strippers and residue removers

2 superior protection from films, gels and hard particle contamination Overview Designed for filtration of photoresist stripping and residue removal chemistries, Fluorogard RS filters and prefilters deliver superior protection from films, gels and hard particle contamination. Utilizing an optimized, multi-layer, pleated membrane, Fluorogard RS filters enable high-capacity removal of photoresist contaminants in both singlepass applications and recirculation systems, even at elevated temperatures. Fluorogard RS filters achieve times longer life than traditional filters to increase system uptime. Fluorogard RS filters are available in cartridge and disposable formats. The cartridge membrane s high surface area maximizes contaminant removal capabilities in a compact design without sacrificing flow rate performance. The fully encapsulated, molded disposable housing provides reliable, leak-free integrity and added safety. Selection Guide Fluorogard P-RS Fluorogard RS-M Fluorogard RS-T PTFE prefilter used in series with Fluorogard RS-T in non-ashing photoresist stripping PTFE prefilter/membrane filter combination for non-ashing photoresist stripping PTFE membrane filter for photoresist stripping and residue removal after ashing Features and Benefits Features High-capacity, multi-layer membrane technology High-flow design with optimized pleated membrane and large surface area Retention ratings of.5 μm,. μm and. μm Benefits Enables high-capacity removal of photoresist contamination (films, gels and hard particles) in both single-pass and recirculation applications Achieves times longer life than traditional membrane filters to increase system uptime Maximizes contaminant removal in a compact design without sacrificing flow rate performance Provides excellent gel and small particle retention ENTEGRIS, INC.

3 Specifications Fluorogard RS-T and RS-M Cartridge and Disposable Filters RS-T Materials: Filtration media Optimized PTFE membrane Disposable shell Supports, sleeve, end cap, core Cartridge o-ring PFA PFA RS-M PTFE pre-filtration media and optimized PTFE membrane TEE (Teflon fluoropolymer encapsulated ethylene-propylene rubber) Retention ratings:. µm,. µm and.5 µm Maximum operating Maximum inlet pressure. MPa (. bar, 5 5 C (77 F) conditions: Maximum forward differential pressure. MPa (. bar, 6 5 C (77 F).5 MPa (.5 bar, C ( F) Maximum reverse pressure. MPa (. bar, 5 5 C (77 F) Maximum operating temperature 8 C (56 F) Surface area:, cm ( ft ) 6,5 cm (7 ft ) Fluorogard P-RS Cartridge Prefilters Materials: Filtration media PTFE non-woven membrane Supports, sleeve, end cap, core PFA Cartridge o-ring TEE Retention rating: µm Maximum operating Maximum inlet pressure. MPa (. bar, 5 5 C (77 F) conditions: Maximum forward differential pressure. MPa (. bar, 6 5 C (77 F).5 MPa (.5 bar, C ( F) Maximum reverse pressure. MPa (. bar, 5 5 C (77 F) Maximum operating temperature 8 C (56 F) Surface area:, cm (5. ft ) ENTEGRIS, INC.

4 Fluorogard RS Cartridge Filters and Prefilters Dimensions These dimensions apply to Fluorogard RS-T and RS-M cartridge filters and P-RS cartridge prefilter " length. Ø95. mm (.7 ) REF Ø5. mm (.76 ) Ø8. mm (. ) Performance Data Key adds 5. mm (.97 ) to length 5. mm (8.86 ) 7. mm (8.9 ). mm (9.6 ). mm (.8 ) REF Fluorogard RS-T Cartridge Filters 6 8 Fluorogard P-RS Cartridge Prefilters µm. µm. µm µm Fluorogard RS-M Cartridge Filters µm. µm. µm 5 ENTEGRIS, INC.

5 Ordering Information Fluorogard RS-T and RS-M Cartridge Filters Part Number CT P Filter Type T = RS-T P = RS-M Retention Rating Z =.5 µm V =. µm G =. µm Fluorogard P-RS Cartridge Filters Part Number CTPRP Key K = Optional Chemlock key attached to cartridge for use with Chemlock Housing ONLY. N =.5 μm membrane Retention Rating R = µm Key K = Optional Chemlock key attached to cartridge for use with Chemlock Housing ONLY. ENTEGRIS, INC. 5

6 Fluorogard RS Chem-Line I and Chem-Line II Disposable Filters Dimensions These drawings represent the range of Chem-Line I disposable filters. Refer to the accompanying tables for specific dimensional information. CHEM-LINE I DISPOSABLE FILTERS WITH STANDARD VENT 6 mm (.6 ) T-line with Standard Vent (TH) C 6 mm (. ) mm (.55 ) mm (.55 ) L-line with Standard Vent (LH) C 7 mm (.6 ) 6 mm (.6 ) 9 mm (.5 ) T-tube with Standard Vent (TP, TT, T, TW) 6 mm (. ) C mm (.55 ) 6 mm (.6 ) M8 P.5 Depth 5 mm 5 mm (.98 ) 6 mm (.6 ) mm (.57 ) mm (.57 ) M8 P.5 Depth 7.5 mm 5 mm (.98 ) Ø6 mm (.97 ) Ø6 mm (.97 ) Ø6 mm (.97 ) A 6 mm (. ) B Ø8 mm (.5 ) Ø mm (.8 ) A B 6 mm (. ) Ø8 mm (.5 ) Ø mm (.8 ) A B 6 mm (. ) Ø8 mm (.5 ) Ø mm (.8 ) 6 ENTEGRIS, INC.

7 Nominal Dimensions for Chem-Line I with Standard Vent T-Line Disposable Type Inlet/ Outlet Vent/ Drain Length A (Overall Height) Length B (Bottom Fitting to Centerline Inlet Fitting) Length C (Inlet to Outlet) TH: Super Type Pillar fittings 96 mm (5.58 ) 5 mm (.9 ) 8 mm (7.9 ) Nominal Dimensions for Chem-Line I with Standard Vent L-Line* Disposable Type Length A (Overall Height) Length B (Bottom Fitting to Centerline Inlet Fitting) Length C (Inlet to Outlet) LH: Super Type Pillar fittings 95 mm (5.56 ) mm (.5 ) 9 mm (.5 ) * L-line inlet to outlet length is inlet to centerline of outlet fitting. Nominal Dimensions for Chem-Line I with Standard Vent T-Tube Disposable Type Inlet/ Outlet Vent/ Drain Length A (Overall Height) Length B (Bottom Fitting to Centerline Inlet Fitting) Length C (Inlet to Outlet) TT: T-tube fittings 6 mm (7.7 ) TP: Super Type Pillar fittings T: Super Type Pillar fittings TW: Flowell series fittings 5 mm (7.7 ) 7 mm (.57 ) 7 mm (.69 ) 9 mm (7.69 ) 69 mm (.5 ) 68 mm (.55 ) 6 mm (7.7 ) 6 mm (.9 ) 5 mm (9.9 ) ENTEGRIS, INC. 7

8 CHEM-LINE I DISPOSABLE FILTERS WITH ROTATED VENT T-line Rotated Vent (S, S) 6 mm (.6 ) M8.5 Depth mm 6 mm (.6 ) 6 mm (. ) C 58 mm (.8 ) mm (. ) Ø6 mm (.97 ) A B 6 mm (. ) Ø8 mm (.5 ) Ø mm (.8 ) Ø7 mm (5. ) Nominal Dimensions for Chem-Line I with Rotated Vent T-Line Disposable Type Inlet/ Outlet Vent/ Drain Length A (Overall Height) Length B (Bottom Fitting to Centerline Inlet Fitting) Length C (Inlet to Outlet) S: Super Type Pillar fittings 99 mm (5.7 ) mm (. ) 7 mm (6.77 ) S: Super Type Pillar fittings 99 mm (5.7 ) mm (. ) 8 mm (7.7 ) 8 ENTEGRIS, INC.

9 CHEM-LINE II DISPOSABLE FILTERS 7 mm (.6") Nominal Dimensions for Chem-Line II Disposable Filters Super Type Pillar Fittings A Inlet/ Vent/ Outlet Drain A 5 mm (.76") 8 mm (5.7 ) Ø mm (. ) mm (. ) ENTEGRIS, INC. 9

10 Performance Data Fluorogard RS-T Chem-Line I T-Line Disposable Filters 6 8 Fluorogard RS-T Chem-Line I T-Tube Disposable Filters µm. µm. µm.5 µm. µm. µm Fluorogard RS-M Chem-Line I T-Line Disposable Filters 6 8 Fluorogard RS-M Chem-Line I T-Tube Disposable Filters µm. µm. µm.5 µm. µm. µm Fluorogard P-RS Chem-Line I Disposable Prefilters ( µm) 6 8 T-tube T-line ENTEGRIS, INC.

11 Fluorogard RS-T Chem-Line II Disposable Filters 6 8 Fluorogard RS-T Chem-Line II Disposable Filters µm. µm. µm.5 µm. µm. µm Fluorogard RS-M Chem-Line II Disposable Filters 6 8 Fluorogard RS-M Chem-Line II Disposable Filters µm. µm. µm.5 µm. µm. µm Fluorogard P-RS Chem-Line II Disposable Prefilters ( µm) ENTEGRIS, INC.

12 Ordering Information Fluorogard RS-T and RS-M Chem-Line I Disposable Filters Part Number CD P Filter Type T = RS-T P = RS-M Retention Rating Z =.5 µm V =. µm G =. µm Fluorogard P-RS Chem-Line I Disposable Filters Part Number CDPR P Fittings TT = inlet/outlet, T-tube vent/drain, tube fittings LH = inlet/outlet, L-line vent/drain, Super Type Pillar fittings TH = inlet/outlet, T-line vent/drain, Super Type Pillar fittings TP = inlet/outlet, T-tube vent/drain, Super Type Pillar fittings T = inlet/outlet, T-tube vent/drain, Super Type Pillar fittings TW = inlet/outlet, T-tube vent/drain, Flowell series fittings Filter Type PR = RS-M Retention Rating = µm Fittings TT = inlet/outlet, T-tube vent/drain, tube fittings LH = inlet/outlet, L-line vent/drain, Super Type Pillar fittings TH = inlet/outlet, T-line vent/drain, Super Type Pillar fittings TP = inlet/outlet, T-tube vent/drain, Super Type Pillar fittings T = inlet/outlet, T-tube vent/drain, Super Type Pillar fittings TW = inlet/outlet, T-tube vent/drain, Flowell series fittings S = inlet/outlet, T-line vent/drain, Super Type Pillar fittings S = inlet/outlet, T-line vent/drain, Super Type Pillar fittings Fluorogard RS-T and RS-M Chem-Line II Disposable Filters Part Number CD P Filter Type T = RS-T P = RS-M Fluorogard P-RS Chem-Line II Disposable Filters Part Number CDPR P Filter Type PR = RS-M Retention Rating Z =.5 µm V =. µm G =. µm Retention Rating = µm Fittings OF = inlet/outlet, vent/drain, Flaretek compatible fittings F = inlet/outlet, vent/drain, Flaretek compatible fittings Fittings OF = inlet/outlet, vent/drain, Flaretek compatible fittings F = inlet/outlet, vent/drain, Flaretek compatible fittings ENTEGRIS, INC.

13 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Creating a Material Advantage, Fluorogard, Flaretek, Chemlock and Chem-Line are trademarks of Entegris, Inc. Flowell is a trademark of Flowell Corporation. Pillar is a registered trademark of Nippon Pillar Packaging Company, Ltd. Teflon is a registered trademark of E.I. du Pont de Nemours and Company. ENTEGRIS, INC. Corporate Headquarters 9 Concord Road Billerica, MA 8 USA Customer Service Tel Customer Service Fax In North America Entegris, Inc. All rights reserved Printed in USA -77ENT-65