CRITICAL MATERIALS HANDLING PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS

Transcription

1 CRITICL MTERILS HNDLING PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS PES filters for weak acids, bases and DI water filtration

2 PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS for high particle loading applications Overview ProcessGard PES cartridge and disposable filters are high-flow, longer-lifetime filters that are ideally suited for filtration of weak acids, bases and ultrapure DI water for the electronics industry. pplications Flat panel display; all rinsing application after wet etching and stripping Facility system ultrapure DI water that requires high retention and longer lifetime Features and Benefits symmetric PES structure provides longer lifetime and high flow rate Hydrophilic PES media eliminates prewetting treatment, reduces filter changeout time and increases equipment uptime Various retention ratings, fitting sizes and types to meet various requirements ProcessGard PES Cartridge Filters Specifications Materials: Membrane Hydrophilic polyethersulfone Supports, core, sleeve O-rings (S ) Polypropylene EPDM, fluoroelastomer, E-FKM (encapsulated fluoroelastomer) Dimensions: (nominal) 263 mm (1.35 ) Diameter 7 mm (2.75 ) Operating conditions: Maximum forward differential pressure.5 MPa (5. bar, 73 2 C (68 F).25 MPa (2.5 bar, 36 5 C (122 F).2 MPa (2. bar, 29 9 C (194 F) Maximum reverse differential pressure.3 MPa (3. bar, 44 2 C (68 F) Maximum operating temperature 9 C (194 F) Retention rating:.4,.5,.1,.2,.45 and 1. μm Note: ProcessGard PES cartridge filters can be sterilized by autoclaving up to 25 cycles at 125 C or sterilized by steam-in-place up to 1 cycles at 135 C for 3 minutes at less than.3 bar differential pressure. 2 ENTEGRIS, INC.

3 PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS Dimensions Ø7 MM CODE FILTER Ø7 MM CODE F FILTER Ø7 mm Ø7 mm mm (5.63 ) mm (1.35 ) 2 59 mm (2.4 ) mm (29.76 ) 4 12 mm (39.45 ) mm (5.2 ) mm (9.96 ) mm (19.57 ) mm (29.33 ) mm (38.9 ) Ø7 MM CODE 5 FILTER Ø7 MM CODE 7 FILTER Ø7 mm Ø7 mm mm (7.72 ) mm (12.44 ) mm (22.13 ) 3 89 mm (31.85 ) mm (41.54 ) 5 2 mm (7.87 ) mm (12.52 ) mm (22.28 ) mm (32.9 ) 4 16 mm (41.73 ) Ø83 MM CODE 6 FILTER ±2 mm (9.63 ±.8 ) 227. mm (8.94 ) Ø7 MM CODE 8 FILTER ±2 mm (1.53 ±.8 ) 245 mm ±2 mm (9.65 ±.8 ) Ø83 mm (3.27 ) Ø51.2 mm ±1. mm (2.2 ±.4 ) Ø56.2 mm ±1. mm (2.21 ±.4 ) ENTEGRIS, INC. 3

4 PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS Performance Data ProcessGard PES Cartridge Filters GPM µm.5 µm.2 µm.45 µm.1 µm Differential Pressure (psi) 1. µm Flow Rate (L/min) 1 2 C (68 F) Ordering Information ProcessGard PES Cartridge Filters Part Number PS 1 Code = Code F = Code F 5 = Code 5 6 = Code 6* 7 = Code 7 8 = Code 8** Retention Rating P4 =.4 µm P5 =.5 µm 1 =.1 µm 2 =.2 µm 45 =.45 µm 1 = 1. µm 5 = 5 1 = 1 2 = 2 3 = 3 4 = 4 Quantity 1/pack O-ring E = EPDM V = FKM T = E-FKM * 222 with 83 mm/247 mm ** 226 with 7 mm/263 mm 4 ENTEGRIS, INC.

5 PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS ProcessGard PES Disposable Filters Specifications Materials: Membrane Hydrophilic polyethersulfone Supports, core, sleeve Fitting connections Polypropylene Flare, MNPT, FNPT, compression Operating conditions: Maximum forward differential pressure.4 MPa (4. bar, 58 2 C (68 F) Maximum reverse differential pressure Maximum operating temperature.2 MPa (2. bar, 29 2 C (68 F) 6 C (14 F) Retention rating:.5,.1,.2,.45 and 1.2 μm Note: ProcessGard PES disposable filters can be sterilized by autoclaving up to 25 cycles at 125 C for 3 minutes. It cannot be in-situ steam sterilized. Performance Data ProcessGard PES (1 1 2 ) Disposable Filters 1 4 Compression ProcessGard PES (5 ) Disposable Filters 3 8 Compression µm.1 µm.2 µm.45 µm 1.2 µm µm.1 µm.2 µm 1.2 µm.45 µm Flow Rate 22 C Flow Rate 22 C 1. ProcessGard PES (2 1 2 ) Disposable Filters 1 4 Compression µm.1 µm 1.2 µm.2 µm.45 µm Flow Rate 22 C 8 1 ENTEGRIS, INC. 5

6 PROCESSGRD PES CRTRIDGE ND DISPOSBLE FILTERS Dimensions ProcessGard SKP-H (11 2 ) ProcessGard SKP-S (21 2 ) ProcessGard SKP-L (5 ) Ø73.2 mm Ø73.2 mm Ø73.2 mm (2.88 ) Ø68.2 mm (2.88 ) Ø68.2 mm (2.88 ) Ø68.2 mm (2.68 ) (2.68 ) (2.68 ) Vent 26 mm (1.2 ) Outlet Vent 26 mm (1.2 ) Outlet Vent 26 mm (1.2 ) Outlet B B B Inlet Drain Inlet Drain Inlet Drain Fitting Connection SKP-H (1 1 2 ) SKP-S (2 1 2 ) SKP-L (5 ) Inlet/Outlet Vent/Drain B B B 1 4 compression 1 4 compression 95 mm (3.74") 125 mm (4.92") (7.5") 3 8 compression 1 4 compression 95 mm (3.74") 125 mm (4.92") (7.5") 1 2 compression 1 4 compression 11 mm (3.98") 131 mm (5.16") 185 mm (7.28") 1 4 MNPT 1 8 MNPT 128 mm (5.4") 182 mm (7.17") 3 8 FNPT Female Luer Lok 94 mm (3.7") 124 mm (4.88") (7.5") 1 4 flare 1 8 MNPT 123 mm (4.84") 28 mm (8.19") 3 8 flare 1 4 flare (no caps) 95 mm (3.74") 125 mm (4.92") (7.5") Tri-clamp Female Luer Lok 126 mm (4.96") 156 mm (6.14) 21 mm (8.27") 6 ENTEGRIS, INC.

7 Ordering Information ProcessGard PES Disposable Filters Part Number SKPS I/O Fitting H = S = L = 5 Retention Rating 5 =.5 µm 1 =.1 µm 2 =.2 µm 5 =.45 µm 12 = 1.2 µm For More Information 2C = 1 4 compression seal 3C = 3 8 compression seal 4C = 1 2 compression seal 2N = 1 4 MNPT 3NF = 3 8 FNPT 2F = 1 4 flare 3F = 3 8 flare 5TC = Tri-clamp Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale ll purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Creating a Material dvantage and ProcessGard are registered trademarks of Entegris, Inc. ENTEGRIS, INC. Corporate Headquarters 129 Concord Road Billerica, M 1821 US Customer Service Tel Customer Service Fax In North merica Entegris, Inc. ll rights reserved Printed in US ENT-515