Space Saving Vacuum Ejector/Vacuum Pump System

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Space Saving acuum Ejector/acuum ump System Series Current 21.6 mm mm Width mm [Option] Weight 9 g Single unit with vacuum pressure switch and suction filter ZK2 ZR Z Z ZM ZL -X267 ZU Ejector.2 ump System.118 QD- Easy-to-use vacuum pressure switch ush button type provides easy operation. acuum pressure switch with LED display NN open collector 1 output + analog voltage N open collector 1 output + analog voltage NN open collector 2 outputs N open collector 2 outputs With One-touch fittings Can copy to up to switches simultaneously. The settings of the master pressure switch (source of copy) can be copied to the slave pressure switches. Reduction in setting work revention of mistakes in setting Copy Master pressure switch (source of copy) Slave pressure switch 1 switch 2 switches switches 1

Space Saving acuum Ejector Series [Option] Note) CE-compliant: For DC only. How to Order Ejector Unit For Made to Order, refer to pages 11 and 116. 1 0 1U K1 L E G 3 3 q w e r t y u i o!0!1!2!3!4! q Nozzle nominal size 0 07 ø0. ø0.7 ø1.0 w Exhaust type 1U 3M With silencer for single unit With silencer for manifold e Solenoid valve combination (Refer to Table (1).) r ilot valve (Refer to Table (1).) t Solenoid valve rated voltage (Refer to Table (1).) Symbol K1 Note 1) K2 J1 Note 1) J2 Q1 Q2 N1 N2 Normally closed Normally open Normally closed Normally open Latching positive common Latching positive common Latching negative common Latching negative common acuum release valve Normally closed Normally closed None None Normally closed None Normally closed None Note 1) When using K2 or J2 (supply valve normally open), ensure that the energizing time does not become longer than the non-energizing time. If the energizing time becomes longer or if the valve is energized for minutes or longer, select the DC low wattage type in Made to Order. (Refer to page 116.) Y Note 2) Standard (DC: 1 W) Note 2) DC low wattage type (0. W) Note 2) void energizing the solenoid valve for long periods of time. (Refer to Design and Selection on Specific roduct recautions.) 1 2 3 4 6 Note 3) Note 3) Note 3) Note 3) CE-compliant 0 C (0/60 Hz) 200 C (0/60 Hz) 1 C (0/60 Hz) 220 C (0/60 Hz) 24 DC 12 DC Note 3) CE-compliant products are not available for 1, 2, 3 and 4. Table (1) Combination of Solenoid alve, ilot alve and ower Supply oltage Solenoid valve Combination ilot valve pplicable power supply voltage () combination no. symbol symbol 0 C 200 C 1 C 220 C 24 DC 12 DC q K1 w K1 Y e K2 r J1 t J1 Y y J2 u Q1 i Q2 o N1!0 N2 Combinations q to!0 in the above table are the only possible options. 2

Space Saving acuum Ejector Series y Electrical entry u Manual override Note 4) L LO G L-type plug connector, with 0.3 m lead wire, with light/surge voltage suppressor L-type plug connector, without connector, with light/surge voltage suppressor Grommet, with 0.3 m lead wire (Latching/C type: Not applicable) i acuum pressure switch suction filter Note ) Non-locking push type Latching type: ush-locking type Locking type (Q1/Q2/N1/N2: Not applicable) Note 4) Latching type supply valve: vailable in only. In this case, the supply valve and release valve come with a push-locking type. E 0 to 1 ka/nn open collector 2 outputs, with suction filter E 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 1 ka/n open collector 1 output + analog voltage, with suction filter F 0 to 0 ka/nn open collector 2 outputs, with suction filter F 0 to 0 ka/n open collector 2 outputs, with suction filter FC 0 to 0 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 0 ka/n open collector 1 output + analog voltage, with suction filter F only Note ) The filter included in this product is of an simple type, and will become clogged quickly in environments with high quantities of dust or particulates. lease make additional use of an air suction filter of the ZF, ZF or ZFC series. Warning The filter case of this suction filter is made of nylon. Contact with alcohol or similar chemicals may cause it to be damaged. lso, do not use the filter when these chemicals are present in the atmosphere. o acuum pressure switch unit specifications M!0 acuum pressure switch lead wire specifications G With unit switching function Note 6) Fixed SI unit Note 7) With unit switching function Note 6) (Initial value psi) Note 6) Under the New Measurement Law, sales of switches with the unit switching function are not allowed for use in Japan. Note 7) Fixed unit: ka Without connector Lead wire with connector (Lead wire length 2 m) With connector cover ZK2 ZR Z Z ZM ZL -X267 ZU QD-!1Check valve Note 8) Note 9)!2 Fitting ( port) Note ) None K With check valve Note 8) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used, but it cannot prevent overflow of the exhaust air completely. During usage, please inspect thoroughly with actual machine. lso, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejector s exhaust unit. Note 9) Only applicable to the exhaust type 3M and cannot be selected for solenoid valve combinations of J1, J2, Q2 and N2. Warning q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, a workpiece may not be released.) Symbol 0 1 2 3 4!3 Fitting ( port) pplicable tubing O.D. Without fitting (M x 0.8) ø3.2 (Straight) ø4 (Straight) ø6 (Straight) ø3.2 (Elbow) ø4 (Elbow) Note ) Symbol pplicable tubing O.D. Object spec. Without port Manifold 0 Without fitting (M x 0.8) 2 ø4 (Straight) Single unit 3 ø6 (Straight) ø4 (Elbow)!4 racket N With bracket Without bracket! CE-compliant Q CE-compliant Note) CE-compliant: For DC only. Note 11) Note ) For filter only (Without vacuum pressure switch) Single unit: When neither port fitting nor port fitting are needed, enter nothing or 00 in the dotted line How to Order. Manifold specifications: When the port fitting is not needed, enter nothing or 0 in the dotted line How to Order. Note 11) Only applicable to the exhaust type 1U. 3

Series How to Order Manifold Ordering Example Number of stations Note) 01 1 station 02 2 stations 08 Manifold 8 stations Z1 07 S C ir pressure supply () port position oth sides Exhaust S With silencers (oth sides) Note) Number of stations varies according to nozzle nominal size during simultaneous operation. acuum release pressure Maximum Number of Stations supply port (D port) in Simultaneous Operation None (Release pressure is Maximum number Nozzle supplied from the port.) of stations in nominal simultaneous rovided (ir can be size operation C alternatively supplied from the port.) ø0. ø0.7 ø1.0 8 stations 6 stations 4 stations Z8-S 1 pc. 3M-K1YL-EG (-Q) 4 pcs. (Stations 1 to 4) 13M-K1YL-EG (-Q) 4 pcs. (Stations to 8) Note) y viewing the front side of vacuum port (), stations are counted starting from station 1 on the left side. acuum () port 3M-K1YL-EG 13M-K1YL-EG1 2 3 4 6 7 8Left Right Flow/Exhaust Characteristics / Exhaust Characteristics Maximum vacuum pressure (ka) Maximum vacuum pressure (ka) Maximum vacuum pressure (ka) 80 60 40 20 80 60 40 20 80 60 40 20 Maximum vacuum pressure 0 0.1 0.2 0.3 0.4 0. Supply pressure (Ma) Maximum vacuum pressure 0 0.1 0.2 0.3 0.4 0. Supply pressure (Ma) 0 0.1 0.2 0.3 0.4 0. Supply pressure (Ma) 20 1 1 / Exhaust Characteristics Maximum vacuum pressure ir consumption ir consumption Maximum suction flow 7 / Exhaust Characteristics 4 ir consumption Maximum suction flow Maximum suction flow 30 20 60 0 40 30 20 Maximum suction flow (L/min(NR)) ir consumption (L/min(NR)) Maximum suction flow (L/min(NR)) ir consumption (L/min(NR)) Maximum suction flow (L/min(NR)) ir consumption (L/min(NR)) Supply pressure / Flow Rate Characteristics 0.3 Ma Maximum vacuum pressure (ka) 80 60 40 20 0 2 4 6 8 Suction flow (L/min(NR)) Supply pressure 7 / Flow Rate Characteristics 0.43 Ma Maximum vacuum pressure (ka) Supply pressure 0.43 Ma 1 / Flow Rate Characteristics Maximum vacuum pressure (ka) 80 60 40 20 80 60 40 20 0 1 Suction flow (L/min(NR)) 0 1 20 2 Suction flow (L/min(NR)) How to Read Flow Rate Characteristics acuum pressure max 1 Q1 Suction flow Qmax Flow rate characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, a change in vacuum pressure will also be expressed. Normally this relationship is expressed in ejector standard use. In the graph, max is max. vacuum pressure and Qmax is max. suction flow. The valves are specified according to catalog use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (max). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition 1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0. (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. When ventirative or leaky work must be adsorbed, please note that vacuum pressure will not be high. recautions e sure to read this before handling the products. Refer to back page 0 for Safety Instructions and pages 49 to 1 for acuum Equipment recautions. Caution Refer to the vacuum equipment model selection on pages 2 to 48 for the selecting and sizing of series.

Space Saving acuum Ejector Series Specifications Ejector Nozzle nominal diameter (mm) Maximum suction flow (L/min (NR)) ir consumption (L/min (NR)) Maximum vacuum pressure ir pressure supply port () Supply pressure range Note) Maximum suction flow can be obtained by standard supply pressure. Weight Single unit Model Supply pressure Note) Supply pressure port for vacuum release (D) Operating temperature range Fluid Note 1) With suction filter 9 With vacuum pressure switch and suction filter Note 2) End plate assembly for manifold g 9 g 122 g Note 1) Including a 0.3 m connector for supply valve and vacuum release valve. Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch. Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) acuum pressure switch + 8 stations with suction filter 9 g x 8 + 122 g = 994 g 0. Supply alve / acuum Release alve 14 7 0.7 23 80 ka 0.3 to 0. Ma (Normally open: 0.3 to 0.4 Ma) 0.3 to 0. Ma (Normally open: 0.3 to 0.4 Ma), and also D pressure pressure 0.3 Ma 0.43 Ma to 0 C ir 1 1.0 22 46 Normally closed Type Standard (1 W) Low wattage type (0. W) Latching type Normally open Model Refer to How to Order for Q1- Q1Y- Q1 ( solenoid valves on page 7. ) L - 1-Q120- Manual override Non-locking push type / Locking type (Tool type) ush-locking type Non-locking push type / Locking type (Tool type) Rated coil voltage 12, 24 DC, 0, 1, 200, 220 C 12, 24 DC 12, 24 DC, 0, 1, 200, 220 C 12, 24 DC DC 1 W 0. W 1 W ower consumption (current value) 0 C 1 C 200 C 220 C 0. ( m) 0. ( m) 1.0 ( m) 1.1 ( m) 0.6 (6 m) 0.6 (.9 m) 1.2 (6 m) 1.3 (.9 m) Electrical entry Grommet L-type plug connector Grommet L-type plug connector L-type plug connector with light/surge with light/surge (with light/surge voltage suppressor) ( voltage suppressor ) ( voltage suppressor ) ZK2 ZR Z Z ZM ZL -X267 ZU QD-

Series Specifications acuum ressure Switch Model 1-ZSE (ZSE) 1-ZSF (ZSEF) Rated pressure range Set pressure range/display pressure range 0 to 1 ka to ka 0 to 0 ka to ka Withstand pressure Minimum setting unit ower supply voltage Current consumption Switch output Maximum load current Maximum applied voltage Residual voltage Response time Short circuit protection Repeatability 00 ka 0.1 ka 12 to 24 DC ±%, Ripple (p-p) % or less (with power supply polarity protection) 40 m or less NN or N open collector: 2 outputs (selectable) 80 m 28 (with NN output) 2 or less (with load current of 80 m) 2. ms or less (Response time selections with anti-chattering function: 20, 0, 00, 00 and 2000 ms) With short-circuit protection ±0.2% F.S. ±1 digit Hysteresis mode Hysteresis ariable (0 or above) Note 1) Window comparator mode Display system Display accuracy Operation indicator light Enclosure nalog oltage output output Output voltage (rated pressure range) Linearity Output impedance 1 to ±2.% F.S. ±1% F.S. or less pprox. 1 kω 3 1/2-digit, 7 segment LED 1-color display (Red) ±2% F.S. ±1 digit (at ambient temperature of 2 ±3 C) Lights when ON, OUT1: Green, OUT2: Red I40 mbient humidity range Operating/Stored: 3 to 8% RH (with no condensation) Environmental Withstand voltage 00 C for 1 min. between terminals and housing resistance Insulation resistance 0 MΩ or more (00 DC measured via megohmmeter) between terminals and housing ibration resistance Impact resistance Temperature characteristics Lead wires to Hz at the smaller of amplitude 1. mm or acceleration 20 m/s 2 in X, Y, Z directions for 2 hrs. each (De-energized) 0 m/s 2 in X, Y, Z directions 3 times each (De-energized) ±2% F.S. (at 2 C of ambient temperature range between and 0 C) Oil-resistant cabtire cord Cross section: 0.1 mm 2 (WG26), cores, 2 m, Conductor O.D.: 1.0 mm Note 1) If the applied voltage fluctuates around the set-value, the hysteresis must be set to a value more than the fluctuating width, otherwise chattering will occur. Note 2) For others, refer to ejector specifications on page. Construction Single unit Manifold t e r y!0 w u q i o Component arts No. Description Material 1 2 3 4 oppet valve assembly Nozzle Diffuser acuum release flow adjustment needle Resin Resin Stainless steel 6 Replacement arts No. Description Material art no. Solenoid valve Refer to page 7. 6 Filter element sponge XT34--001-S 7 Sound absorbing material 1 (single unit) sponge -SE 8 9 acuum pressure switch Fitting Refer to page 7. Sound absorbing material 2 (manifold) sponge Z-SE

Space Saving acuum Ejector Series Solenoid alve ctuation 1 Normally closed Q1 1 0 1-Q1 2 0 ctuation 2 Normally open ilot valve Standard (1 W) Solenoid valve rated voltage 24 DC 6 12 DC How to Order ilot valve Standard (DC: 1 W) Low wattage type (0. W) Y C type: Not applicable L Latching positive common N Latching negative common L L Connector assembly part no. Solenoid valve rated voltage 1 0 C (0/60 Hz) 2 200 C (0/60 Hz) 3 1 C (0/60 Hz) 4 220 C (0/60 Hz) 24 DC 6 12 DC Manual override Note) Non-locking push type Latching type: ush-locking type Locking type Note) Latching type: vailable in only acuum ressure Switch 1-ZS acuum pressure switch specifications E E F F FC 0 to 1 ka/nn open collector 2 outputs, with suction filter 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 1 ka/n open collector 1 output + analog voltage, with suction filter 0 to 0 ka/nn open collector 2 outputs, with suction filter 0 to 0 ka/n open collector 2 outputs, with suction filter 0 to 0 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 0 ka/n open collector 1 output + analog voltage, with suction filter acuum pressure switch unit specifications M With unit switching function Note 1) Fixed SI unit Note 2) acuum pressure switch With unit switching function Note 1) lead wire specifications (Initial value psi) Note 1) Under the New Measurement Law, sales of switches with the unit switching function are not allowed for use in Japan. Note 2) Fixed unit: ka How to order connector assembly Single XT661-14- DC positive common Latching XT661-13- DC negative common Latching XT661-13N- 0 C Single XT661-31- Latching XT661-32- 200 C Single XT661-34- Latching XT661-3- Lead wire length 6 20 30 300 mm 600 mm 00 mm 2000 mm 3000 mm Connector, socket (3 pcs) only XT661-12 Lead wire length of the plug connector The lead wire length for a valve with a lead wire is 300 mm. When in need of a valve with a lead wire longer than 600 mm, place an order for a valve without a connector and connector assembly. The vacuum pressure switch mounted on this product is equivalent to our product, the ZSE series compact digital pressure switch. ressure switch acuum Ejector series 1 For details regarding vacuum pressure correspondence switches, refer to the ZSE series in table acuum ressure Switch for 1 ZS the est neumatics No.8. Digital ressure Switch ZSE series ZSE acuum pressure switch for 1-ZSE-- 1-ZSE-- 1-ZS-- 1-ZS-- 1-ZSF-- 1-ZSF-- 1-ZSFC-- 1-ZS-- G ZSE series ZSE--- ZSE--- ZSE--C- ZSE--E- ZSEF--- ZSEF--- ZSEF--C- ZSEF--E- Electrical entry Note) L-type plug connector, L with 0.3 m lead wire L-type plug connector, LO without connector Grommet, with 0.3 m lead wire G (Latching/C type: Not applicable) Note) Mounting screws are attached. Without connector Lead wire with connector (lead wire length 2 m) With connector cover Rated pressure range/output specifications (Refer to rated pressure range/output specifications correspondence table) Rated pressure range/output specifications correspondence table Check valve K Note 3) None With check valve Note 3) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used, but it is incapable of completely preventing overflow. During usage, please inspect thoroughly with actual machine. lso, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejector s exhaust unit. Warning q Cannot be used for vacuum retention. w Use a vacuum release valve. (Without a vacuum release valve, the workpiece may not be released.) Lead wire with connector part no. ZS-39-G Note Lead wire length 2 m (With connector cover) Specification 0 to 1 ka/nn open collector 2 outputs 0 to 1 ka/n open collector 2 outputs 0 to 1 ka/nn open collector 1 output + analog voltage 0 to 1 ka/n open collector 1 output + analog voltage 0 to 0 ka/nn open collector 2 outputs 0 to 0 ka/n open collector 2 outputs 0 to 0 ka/nn open collector 1 output + analog voltage 0 to 0 ka/n open collector 1 output + analog voltage Fitting ( port) Symbol pplicable tubing O.D. 0 Without fitting (M x 0.8) 1 ø3.2 (Straight) 2 ø4 (Straight) 3 ø6 (Straight) 4 ø3.2 (Elbow) ø4 (Elbow) acuum pressure switch lead wire specification acuum pressure switch unit specification 7 ZK2 ZR Z Z ZM ZL -X267 ZU QD-

Series Type K1 1 1U-K1 6 - - 13.1 17.6 32 23 4 x ø3. Mounting hole acuum release flow adjusting needle ilot pressure exhaust (E) port M3, tmospheric release Note 4) ir pressure supply () port M Note 4) 29.4 3 20.3 Circuit diagram E 1 E 0.8 30. 79.3 (300) (49.) E E 1U-K1 6- F - F (Grommet type) - Type J1 1 1U-J1 - - EXH FC (With L-type plug connector) 3 20.2 33 2 2 x ø3.2 through (ody mounting hole) (63.1) F - E E F F 62.8 17.7 22.8 K - FC racket (Standard) Release valve K - 7. Note 1) Exhaust part F K- acuum pressure switch 69.4 76.3 (3.7) acuum () port (M) Note 4) 8.4 Note 1) The above dimensions are for 1 1U-K1 L-E G -00. In case of 1 1U-K1 6 -F -00, the overall length is 87.2. Note 2) marked with are those after bracket is mounted. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of, and E ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. 6 ilot pressure exhaust (E) port M3, tmospheric release Note 4) ir pressure supply () port M Note 4) 29.4 20.3 E 0.8 (63.1) 3. (C type) (With L-type plug connector) 3 20.2 2 x ø3.2 through (ody mounting hole) (63.1) 62.8 17.7 22.8 racket (Standard) Exhaust part 7. Note 1) acuum pressure switch 69.4 76.3 (3.7) acuum () port (M) Note 4) 8.4 Circuit diagram 8 E E F 1 1U-J1- E - F EXH EF FC - F - Note 1) The above dimensions are for 1 1U-J1 6L-E G -00. In case of 1 1U-J1 -F -00, the overall length is 87.2. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of, and E ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used.

Space Saving acuum Ejector Series Type K2 1 1U-K2 - - acuum release flow adjusting needle Circuit diagram E 1 ilot exhaust port (E port) M3, tmospheric release Note 4) ir pressure supply () port M Note 4) 1U-K26-29.4 20.3 F - E E F F E EXH 0.8 - FC (With L-type plug connector) 2 x ø3.2 through (ody mounting hole Note 2) ) (68.4) 3 20.2 - E E F F 17.7 22.8 K - racket (Standard) 62.8 87.2 Note 1) FCK - Release valve Exhaust part 68.3 Note 1) The above dimensions are for 1 1U-K2 6 L-F -. In case of 1 1U-K2 - E -, the overall length is 7.. F Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of, and E ports are determined assuming the use of One-touch fittings. If used with other fittings, these may F K- cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. acuum () port (M) Note 4) 9.7 ZK2 ZR Z Z ZM ZL -X267 ZU QD- Type J2 1 1U-J2 - - (With L-type plug connector) racket (Standard) ilot exhaust port (E port) M3, tmospheric release Note 4) ir pressure supply () port M Note 4) (68.4) 2 x ø3.2 through (ody mounting hole Note 2) ) 29.4 20.3 E 0.8 3 20.2 17.7 22.8 Exhaust part acuum () port (M) Note 4) 9.7 87.2 Note 1) Circuit diagram E 1 EXH E E 1U-J26 - F - F - F FC - Note 1) The above dimensions are for 1 1U-J2 6 L-F. In case of 1 1U-J2 - E F -, the overall length is 7.. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of, and E ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. 9

0 0 0 Series Type Q1, N1 1 1U-Q16 - - 1 1U-N1 6 - - acuum release flow adjusting needle ilot pressure exhaust (E) port M3, tmospheric release Note 4) ir pressure supply () port M Note 4) 29.4 20.3 E 0.8 (63.1) 3 20.2 2 x ø3.2 through (ody mounting hole) 3. 62.8 17.7 22.8 racket (Standard) Release valve 7. Note 1) Exhaust part acuum pressure switch 69.4 76.3 (3.7) acuum () port (M) Note 4) 8.4 Circuit diagram E Q 1 1U- N1 6 - E E F F - Type Q2, N2 1 1U-Q2 - - 1 1U-N2 6 - - EXH FC - F - E E F F K - FC K - Q Note 1) The above dimensions are for 1 1U- N1 6 L-E G -00. Q In case of 1 1U- N1 6 -F -00, the overall length is 87.2. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of, and E ports are determined assuming the use of One-touch fittings. If used with F K- other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. ilot pressure exhaust (E) port M3, tmospheric release Note 4) ir pressure supply () port M Note 4) 29.4 20.3 E 0.8 (63.1) 2 x ø3.2 through (ody mounting hole) 3 20.2 17.7 racket (Standard) 62.8 Exhaust part 7. Note 1) acuum pressure switch 69.4 76.3 (3.7) acuum () port (M) Note 4) 8.4 Circuit diagram E 1 1 Q 1U- N2- E E F F EXH - FC - F - Note 1) The above dimensions are for 1 Q 1U- N2 6L-E G -00. In case of 1 Q 1U- N2 6 -F -00, the overall length is 87.2. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of, and E ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used.

0 0 Space Saving acuum Ejector Series Manifold type (without D port) Z1 -S 1 3M- - -. (ody mounting hole Note 4) ) Section 3. L2 L1 13 (itch) = 8 68.9 Note 2) 63.6 (With L-type plug connector) (60.1) ttached washer (R) 2 x ø3. (ody mounting 13.2 hole Note 4) ) 28.8 62.8 3 7 E E Common pilot pressure exhaust (E) port (One-touch fitting: pplicable tubing O.D. ø4), tmospheric release Common air pressure supply () port (One-touch fitting: pplicable tubing O.D. ø8) Release valve acuum pressure switch acuum release flow adjusting needle Exhaust part 76.8 ttached washer ZK2 ZR Z Z ZM ZL -X267 ZU QD- 81 7. Note 1) 111 Note 1) (mm) n 1 2 3 4 6 7 8 L1 26 36 46 6 66 76 86 96 L2 42 2 62 72 82 92 2 112 Circuit diagram EXH E 9 8. Note 1) The above dimensions are for Z4-S. 1 3M-K1 L-E G-0. 6 1 3M-K2 6L-E GK-0. 1 3M-J1 L-F-0. 6 1 3M-Q1 6L-E -0. In case of 1 3M- K J -F -0, the overall length is 87.2. In case of 1 3M- Q N -F -0, the overall length is 90.7. In case of 1 3M- K - E J F -0, the overall length is 7.. In case of 1 3M- Q N - E F -0, the overall length is 111. (3.7) 8.9.2 Left 21 K E Note 2) The above dimensions are for 1 3M- J 2 6 - F -. Right acuum () port (M) Note ) Note 3) marked with are those after the attached square bracket is mounted. Note 4) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note ) The pitches of ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. Note 6) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. EXH E 1 3M-K1 6- E E F - F 1 3M-K26- FCK - 1 3M-J1 -F- 1 3M-Q16 - FK- 111

0 0 Series Manifold type (with D port) Z1 -SC 1 3M- - - Common pilot pressure exhaust (E) port (One-touch fitting: pplicable tubing O.D. ø4) tmospheric release. Common air pressure supply () port (One-touch fitting: pplicable tubing O.D. ø8) Release valve Common release pressure supply (D) port (One-touch fitting: pplicable tubing O.D. ø4) L2 L1 13 (itch) = 8 4 x M through (for mounting). 12.2 13.6 13.6 79 acuum release flow adjusting needle Exhaust part acuum pressure switch 68.9 63.6 62.4 76.8 Note 2) (mm) n 1 2 3 4 6 7 8 L1 L2 26 42 36 2 46 62 6 72 66 82 76 92 86 2 96 112 Note 1) The above dimensions are for Z4-SC. 1 3M-K1 L-E G-0. 6 1 3M-K2 6L-E G-0. 1 3M-J1 L-F -0. 6 1 3M-Q1 6 L-E G-0. In case of 1 3M- -F -0, the overall length is 91.7. In case of 1 3M- -E G-0, the overall length is 112. 90 112 (3.7) 6 8.9.2 Left 21 Right acuum () port (M) Note 4) K Note 2) The above dimensions are for 1 3M- J 2 6 - -. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. Note ) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. Circuit diagram EXH E D E D EXH 1 3M-K1 6- E E F - F 1 3M-K26- FCK - 1 3M-J1 -F- 1 3M-Q16- FK- 112

Space Saving acuum Ejector Series Fittings / Fitting type filter dimensions after installation port <With vacuum pressure switch> pplicable thread size: M acuum () port (3.7) port < only> KQ2S23-MN1 Q00-0-M 14. KQ2L23-MN1 ø7.1 11.3 9. ø7 1.3 ø6.7 ø7.9 ø 9.2 6.7 9. pplicable tubing O.D.: ø3.2 acuum () port pplicable tubing O.D.: ø3.2 acuum () port pplicable tubing O.D.: ø4 acuum () port pplicable tubing O.D.: ø4 acuum () port pplicable tubing O.D.: ø6 acuum () port Q00-0-C3 Q00-0-C4 Q00-0-C6.9.9.8 Q00-F1-LC3 21.4 KQ2L04-MN1 KQ2S04-MN1 14.6 ø8.2 11.8 ø8 1.4 7.7 ø7.9 ø 9.2 Q00-F1-LC4 21.4 7.7 KQ2S06-MN 14.6 9.7 ZK2 ZR Z Z ZM ZL -X267 ZU QD- port 7.7 ø8 KQ2S04-MN1 KQ2S06-MN 9.7 14.6 14.6 7.7 11.8 ø8.2 1.4 KQ2L04-MN1 113

Series Manifold Exploded iew e y b r y y r y No. 1 2 3 a) part t Component arts Description a) part Hexagon socket head cap screw End block L End block R 4 Ejector assembly Ejector body gasket for manifold 6 Exhaust block gasket t a) part t art no. Refer to How to Order below. Refer to Table (1) (including 1 pc. of y). Refer to Table (1) (including 1 pc. of t). Note 1) Refer to pages 2 and 3 for detailed description of How to Order. Note 2) pcs. are included in one set. w Table (1) Note 1) 13M--- (-Q) (1 pc. each in t and y is included.) Description Note 2) -3-00-S End block L Note 2) -3-009-S End block R q b) view With D port 1L-2-S-S 1R-2-S-S Without D port 1L-1-S-S 1R-1-S-S Working rocedure Disassembly Loosen and remove the clamp rod q. ssembly 1. Install the ejector body gasket for manifold t into the gasket groove of each ejector assembly r. Install the exhaust block gasket y around the projected part. 2. Install the exhaust block gasket y around the projected part of the end block L w. 3. Install the ejector body gasket for manifold t into the gasket groove of the end block R e. 4. lign the ejector assemblies r, end block (L) w, and end block (R) e using positioning pins (at the two a positions) and fasten with clamp rods q (2 pcs.) (with a tightening torque of 0.6 N m ± 0.06 N m). Replacement of ort Fittings (With vacuum pressure switch) port fittings are cassette style for easy replacement. The fittings are blocked by a clip. Remove the clip with a flat blade screwdriver, etc. to replace the fittings. When mounting the fittings, after inserting the fitting assembly until it stops, then put the clip into the prescribed position completely. How to Order Hexagon Socket Head Cap Screw ST 0 Note) 2 pcs. are included in one set. Number of stations 01 1 station 02 2 stations 08 8 stations pplicable tubing O.D. pplicable tubing O.D. ø3.2 pplicable tubing O.D. ø4 pplicable tubing O.D. ø6 M female thread Clip (ZK1-C-) pcs. in one set Straight Q00-0-C3 Q00-0-C4 Q00-0-C6 Q00-0-M Fitting assembly Elbow Q00-F1-LC3 Q00-F1-LC4 114

Series Made to Order Specifications lease contact for detailed dimensions, specifications and lead times. 1 ort Exhaust Specifications Manifold Z1 Stations Manifold type (without D port) Z1-2-X12 1 3M- - - 8 2 X12 Exhaust port is changed for ort Exhaust Specifications. ort exhaust specifications (-Q) 2 x Rc1/4 EXH. port ZK2 ZR Z Z ZM ZL -X267 ZU 6.8 QD- 8 62 11

Series Made to Order Specifications lease contact for detailed dimensions, specifications and lead times. 2 ilot alve for Supply: Normally Open DC Low Wattage Specification ower consumption (W): 0.3 [Inrush 1., Holding 0.3] 1 3M K2 Y X18 K2 J2 Nozzle nominal size Solenoid valve combination Fitting ilot valve for supply Normally open DC low wattage specification : Normally open acuum release valve: Normally closed : Normally open acuum pressure switch suction filter acuum release valve: None Solenoid valve rated voltage 24 DC 6 12 DC Electrical entry L L-type plug G Grommet Manual override Non-locking push Locking type Normally open supply valve with low wattage type pilot valve mounted When the normally open specification is selected as a countermeasure for power failure, the temperature increase of the solenoid valve can be suppressed in the operation cycle where the vacuum suspension state (supply valve energizing) is longer than the vacuum generation state. : Same as standard type. 116

Space Saving acuum ump System Series [Option] Note) CE-compliant: For DC only. acuum ump Unit 00 U K1 How to Order L E G 3 3 q w e r t y u i o!0!1!2!3 q ody type U M For single unit For manifold w Solenoid valve combination (Refer to Table (1).) Symbol K1 Note 1) K2 J1 Note 1) J2 Q1 Q2 N1 N2 Normally closed Normally open Normally closed Normally open Latching positive common Latching positive common Latching negative common Latching negative common acuum release valve Normally closed Normally closed None None Normally closed None Normally closed None The air in the adsorption section of this product is not released to the atmosphere at the vacuum suspension state. s for K1, K2, Q1 and N1, use the vacuum release valve when a workpiece is detached. Concerning J1, J2, Q2 and N2, devise the circuit for the vacuum release additionally when a workpiece is detached. Note 1) In cases when K2 or J2 (supply valve normally open) is selected for the solenoid valve combination, when vacuum is stopped for long periods of time ( minutes or more), do not continue to energize the supply valve, and shut off the air supply. e ilot valve (Refer to Table (1).) Y Note 2) Standard (DC: 1 W) Note 2) DC low wattage type (0. W) Note 2) void energizing the solenoid valve for long periods of time. (Refer to Specific roduct recautions 1; Caution on Design and Selection.) r Solenoid valve rated voltage (Refer to Table (1).) 1 2 3 4 6 Note 3) Note 3) Note 3) Note 3) CE-compliant 0 C (0/60 Hz) 200 C (0/60 Hz) 1 C (0/60 Hz) 220 C (0/60 Hz) 24 DC 12 DC Note 3) CE-compliant products are not available for 1, 2, 3 and 4. Table (1) Combination of Solenoid alve, ilot alve and Rated oltage Solenoid valve Combination combination ilot valve pplicable power supply voltage () no. symbol symbol 0 C 200 C 1 C 220 C 24 DC 12 DC q w e r t y u i o!0 K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Y Y Combinations q to!0 in the above table are the only possible options. 118

Space Saving acuum ump System Series t Electrical entry y Manual override Note 4) L LO G L-type plug connector, with 0.3 m lead wire, with light/surge voltage suppressor L-type plug connector, without connector, with light/surge voltage suppressor Grommet, with 0.3 m lead wire (Latching/C type: Not applicable) u acuum pressure switch suction filter Note ) Non-locking push type Latching type: ush-locking type Locking type (Q1/Q2/N1/N2: Not applicable) Note 4) Latching type supply valve: vailable in only. In this case, the supply valve and release valve come with a push-locking type. E 0 to 1 ka/nn open collector 2 outputs, with suction filter E 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 1 ka/n open collector 1 output + analog voltage, with suction filter F 0 to 0 ka/nn open collector 2 outputs, with suction filter F 0 to 0 ka/n open collector 2 outputs, with suction filter FC 0 to 0 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 0 ka/n open collector 1 output + analog voltage, with suction filter F only Note ) The filter included in this product is of an simple type, and will become clogged quickly in environments with high quantities of dust or particulates. lease make additional use of an air suction filter of the ZF, ZF or ZFC series. Warning The filter case of this suction filter is made of nylon. Contact with alcohol or similar chemicals may cause it to be damaged. lso, do not use the filter when these chemicals are present in the atmosphere. i acuum pressure switch unit specifications M o acuum pressure switch lead wire specifications G With unit switching function Note 6) Fixed SI unit Note 7) With unit switching function Note 6) (Initial value psi) Note 6) Under the New Measurement Law, sales of switches with the unit switching function are not allowed for use in Japan. Note 7) Fixed unit: ka Without connector Lead wire with connector (Lead wire length 2 m) With connector cover ZK2 ZR Z Z ZM ZL -X267 ZU QD-!0 Fitting ( port) Note 8) Note 8)!1 Fitting (S / port) Symbol 0 1 2 3 4 pplicable tubing O.D. Without fitting (M x 0.8) ø3.2 (Straight) ø4 (Straight) ø6 (Straight) ø3.2 (Elbow) ø4 (Elbow) Symbol 0 2 3 pplicable tubing O.D. Without port Without fitting (M x 0.8) ø4 (Straight) ø6 (Straight) ø4 (Elbow) Object spec. Manifold Single unit!2 racket N With bracket Without bracket Note 9) Note 8) For filter only (Without vacuum pressure switch) Single unit: When neither port fitting nor S/ port fitting are needed, enter nothing or 00 in the dotted line How to Order. Manifold specifications: When the port fitting is not needed, enter nothing or -0 in the dotted line How to Order. Note 9) Only applicable to the body type U.!3 CE-compliant Q CE-compliant Note) CE-compliant: For DC only. 119

Series How to Order Manifold Ordering Example Manifold Number of stations 01 1 station 02 2 stations 08 8 stations 08 acuum pressure supply port ( port) ort location (Refer to Table (1).) L Left side R Right side O Table (1) ir ressure Supply ort Location on the Manifold Manifold D port ort location C L (Left side) R (Right side) L (Left side) R (Right side) S Note) Left D S Note) Right D Note) The position of each port is shown as right and left sides viewed from the front side of the vacuum port. Release pressure is commonly supplied from the S port. S: ilot presure supply port, : acuum pressure supply port, D: Release pressure supply port 67Z8-RO 1 pc. 213M-K1YL-EG134 00M-K1L-EG (-Q) 4 pcs. (Stations 1 to 4) 8Z1 00M-K1YL-EG (-Q) 4 pcs. (Stations to 8) Note) y viewing the front side of vacuum port (), stations are counted starting from station 1 on the left side. Left Right 3M-K1YL-EG acuum port C Release pressure supply port (D port) None (Release pressure is supplied from the S port.) rovided (ir can be alternatively supplied from the S port.) Specifications Common Switching method for vacuum/release valve Cv factor acuum pressure supply port () Supply pressure range ilot/ressure port (S) Supply pressure port for vacuum release (D) Operating temperature range Fluid Supply alve / acuum Release alve Electrical entry iloted 0.11 0 to 1.3 ka 0.3 to 0. Ma (Normally open: 0.3 to 0.4 Ma) 0.3 to 0. Ma (Normally open: 0.3 to 0.4 Ma), and also D pressure S pressure to 0 C ir Grommet L plug connector L-type plug connector (with light/surge voltage suppressor) Weight Single unit Note 1) With suction filter With vacuum pressure switch and suction filter Note 2) End plate assembly for manifold 9 g 9 g 122 g Note 1) Including a 0.3 m connector for supply valve and vacuum release valve. Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch. Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) acuum pressure switch + 8 stations with suction filter 9 g x 8 + 122 g = 994 g Type Normally closed Item Standard (1 W) Low wattage type (0. W) Latching type Normally open (Refer to How to Order for Model solenoid valves on page 122.) Q1- Q1Y- L Q1 N - 1-Q120- Manual override Non-locking push type / Locking type (Tool type) ush-locking type Non-locking push type / Locking type (Tool type) Rated coil voltage 12, 24 DC, 0, 1, 200, 220 C 12, 24 DC 12, 24 DC, 0, 1, 200, 220 C 12, 24 DC DC 1 W 0. W 1 W ower consumption (current value) 0 C 1 C 200 C 0. ( m) 0. ( m) 1.0 ( m) 0.6 (6 m) 0.6 (.9 m) 1.2 (6 m) 220 C 1.1 ( m) 1.3 (.9 m) L plug connector (with light/surge voltage suppressor) Grommet Light/Surge voltage suppressor (with light/surge voltage suppressor) 120

Space Saving acuum ump System Series Specifications acuum ressure Switch Model Rated pressure range Set pressure range/display pressure range Withstand pressure Minimum setting unit ower supply voltage Current consumption Switch output Maximum load current Maximum applied voltage Residual voltage Response time Short circuit protection Repeatability Hysteresis mode Hysteresis Window comparator mode nalog output Display system Display accuracy Operation indicator light Environmental resistance oltage output Enclosure mbient humidity range Withstand voltage Insulation resistance Temperature characteristics Lead wires Output voltage (rated pressure range) Linearity Output impedance 1-ZSE (ZSE) 0 to 1 ka to ka 1-ZSF (ZSEF) 0 to 0 ka to ka 00 ka 0.1 ka 12 to 24 DC ±%, Ripple (p-p) % or less (with power supply polarity protection) 40 m or less NN or N open collector: 2 outputs (selectable) 80 m 28 (with NN output) 2 or less (with load current of 80 m) 2. ms or less (Response time selections with anti-chattering function: 20, 0, 00, 00 and 2000 ms) With short-circuit protection ±0.2% F.S. ±1 digit ariable (0 or above) Note 1) 1 to ±2.% F.S. ±1% F.S. or less pprox. 1 kω 3 1/2-digit, 7 segment LED 1-color display (Red) ±2% F.S. ±1 digit (at ambient temperature of 2 ±3 C) Lights when ON, OUT1: Green, OUT2: Red I40 Operating/Stored: 3 to 8% RH (with no condensation) 00 C for 1 min. between terminals and housing 0 MΩ or more (00 DC measured via megohmmeter) between terminals and housing ±2% F.S. (at 2 C of ambient temperature range between and 0 C) Oil-resistant cabtire cord Cross section: 0.1 mm 2 (WG26), cores, Conductor O.D.: 1.0 mm Note 1) If the applied voltage fluctuates around the set-value, the hysteresis must be set to a value more than the fluctuating width, otherwise chattering will occur. Note 2) For others, refer to ejector specifications on page 120. Construction u r w q e t y i Component arts No. Description 1 oppet valve assembly for supply valve 2 oppet valve assembly for vacuum release valve 3 acuum release flow adjusting needle Replacement arts No. 4 6 7 8 Description Solenoid valve Filter element acuum pressure switch Fitting Fitting Material sponge art no. Refer to page 122. XT34--001-S Refer to page 122. Material Stainless steel ZK2 ZR Z Z ZM ZL -X267 ZU QD- 121

Series Solenoid alve ctuation 1 Normally closed Q1 1 0 1-Q1 2 0 E E F F FC ctuation 2 Normally open ilot valve Standard (1 W) Solenoid valve rated voltage 24 DC 6 12 DC acuum ressure Switch How to Order ilot valve Standard (DC: 1 W) Low wattage type (0. W) Y C type: Not applicable L Latching positive common N Latching negative common L L 1-ZS acuum pressure switch specifications 0 to 1 ka/nn open collector 2 outputs, with suction filter 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 1 ka/n open collector 1 output + analog voltage, with suction filter 0 to 0 ka/nn open collector 2 outputs, with suction filter 0 to 0 ka/n open collector 2 outputs, with suction filter 0 to 0 ka/nn open collector 1 output + analog voltage, with suction filter 0 to 0 ka/n open collector 1 output + analog voltage, with suction filter Note) Mounting screws are attached. Connector assembly part no. Solenoid valve rated voltage 1 0 C (0/60 Hz) 2 200 C (0/60 Hz) 3 1 C (0/60 Hz) 4 220 C (0/60 Hz) 24 DC 6 12 DC Manual override Note) Non-locking push type Latching type: ush-locking type Locking type Note) Latching type: vailable in only Electrical entry Note) L-type plug connector, L with 0.3 m lead wire L-type plug connector, LO without connector Grommet, with 0.3 m lead wire G (Latching/C type: Not applicable) acuum pressure switch unit specifications With unit switching function Note 1) M Fixed SI unit Note 2) acuum pressure switch With unit switching function Note 1) lead wire specifications (Initial value psi) Without connector Note 1) Under the New Measurement Law, sales Lead wire with connector of switches with the unit switching function G (lead wire length 2 m) are not allowed for use in Japan. With connector cover Note 2) Fixed unit: ka acuum pressure switch for 1-ZSE-- 1-ZSE-- 1-ZS-- 1-ZS-- 1-ZSF-- 1-ZSF-- 1-ZSFC-- 1-ZS-- ZSE series ZSE--- ZSE--- ZSE--C- ZSE--E- ZSEF--- ZSEF--- ZSEF--C- ZSEF--E- Check valve Warning q Cannot be used for vacuum retention. w Use a vacuum release valve. (Without a vacuum release valve, the workpiece may not be released.) Lead wire with connector part no. Note Lead wire length 2 m ZS-39-G (With connector cover) Specification 0 to 1 ka/nn open collector 2 outputs 0 to 1 ka/n open collector 2 outputs 0 to 1 ka/nn open collector 1 output + analog voltage 0 to 1 ka/n open collector 1 output + analog voltage 0 to 0 ka/nn open collector 2 outputs 0 to 0 ka/n open collector 2 outputs 0 to 0 ka/nn open collector 1 output + analog voltage 0 to 0 ka/n open collector 1 output + analog voltage How to order connector assembly Single XT661-14- DC positive common Latching XT661-13- DC negative common Latching XT661-13N- 0 C Single XT661-31- Latching XT661-32- 200 C Single XT661-34- Latching XT661-3- Connector, socket (3 pcs) only XT661-12 Lead wire length 300 mm 6 600 mm 00 mm 20 2000 mm 30 3000 mm Lead wire length of the plug connector The lead wire length for a valve with a lead wire is 300 mm. When in need of a valve with a lead wire longer than 600 mm, place an order for a valve without a connector and connector assembly. The vacuum pressure switch mounted on this product is equivalent to our product, the ZSE series compact digital pressure switch. ressure switch acuum ump System series 1 For details regarding vacuum pressure correspondence switches, refer to the ZSE series in table acuum ressure Switch for 1 ZS the est neumatics No.8. Digital ressure Switch ZSE series ZSE Rated pressure range/output specifications (Refer to rated pressure range/output specifications correspondence table) acuum pressure switch lead wire specification Rated pressure range/output specifications correspondence table acuum pressure switch unit specification K Note 3) None With check valve Note 3) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used, but it is incapable of completely preventing overflow. During usage, please inspect thoroughly with actual machine. lso, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejector s exhaust unit. Symbol 0 1 2 3 4 Fitting ( port) pplicable tubing O.D. Without fitting (M x 0.8) ø3.2 (Straight) ø4 (Straight) ø6 (Straight) ø3.2 (Elbow) ø4 (Elbow) 122

E Space Saving acuum ump System Series Type K1 00U-K1 6 - - 18.9 23.4 32 23 4 x ø3. Mounting hole acuum release flow adjusting needle ilot pressure exhaust (E) port M3, tmospheric release Note 4) ilot pressure supply (S) port M Note 4) 29.4 3 20.3 7 acuum pressure supply () port M Note 4) Circuit diagram S E S 30. 0.8 79.3 E 00U-K1 - E 6 F - F (300) (49.) (Grommet type) FC - (With L-type plug connector) (63.1) 33 2 3 20.2 2 x ø3.2 through (ody mounting hole) F - 23. 22.8 racket (Standard) Release valve Exhaust part acuum pressure switch 69.4 76.3 113.3 Note 1) (3.7) acuum () port (M) Note 4) Note 1) The above dimensions are for 00U-K1 6L-E G -00. In case of 00U-K1 6 -F -00, the overall length is 87.2. Note 2) marked with are those after bracket is mounted. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of S,, and E ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. 8.4 ZK2 ZR Z Z ZM ZL -X267 ZU QD- Type J1 00U-J1 - - ilot pressure exhaust (E) port M3, tmospheric release Note 4) ir pressure supply () port M Note 4) 29.4 20.3 acuum pressure supply () port M Note 4) Circuit diagram S E E S 0.8 (63.1) E E 00U-J1- F - F (C type) (With L-type plug connector) (63.1) 3 20.2 2 x ø3.2 through (ody mounting hole) 3. 23. FC - F - 22.8 racket (Standard) 113.3 Note 1) Exhaust part acuum pressure switch 69.4 76.3 (3.7) acuum () port (M) Note 4) Note 1) The above dimensions are for 00U-J1 6L-E G-00. In case of 00U-J1 -F -00, the overall length is 87.2. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of S,, and E ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. Note ) In order to release a workpiece, design the circuit for vacuum release separately. 8.4 123

Series Type K2 00U-K2 - - ilot pressure exhaust (E) port M3, tmospheric release Note 4) ilot pressure supply (S) port M Note 4) 29.4 20.3 acuum pressure supply () port M Note 4) 7 E S 0.8 (With L-type plug connector) (68.4) 3 20.2 2 x ø3.2 through (ody mounting hole Note 2) ) 23. 68.6 racket (Standard) 22.8 93 Note 1) Release valve acuum release flow adjusting needle 68.3 acuum () port (M) Note 4) 9.7 Circuit diagram S E 00U-K2 6- F - E E F - F FC - Note 1) The above dimensions are for 00U-J1 -F-00. E In case of 00U-K1 6 - F -00, the overall length is 113.3. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of S, E, and ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. Type J2 00U-J2 - - ilot pressure exhaust (E) port M3, tmospheric release Note 4) ilot pressure supply (S) port M Note 4) 29.4 20.3 acuum pressure supply () port M Note 4) Circuit diagram S E 124 E S 00U-J2 6- F - 0.8 E E F - F (With L-type plug connector) 2 x ø3.2 through (ody mounting hole Note 2) ) (68.4) 3 20.2 FC - 23. racket (Standard) 22.8 93 Note 1) acuum () port (M) Note 4) Note 1) The above dimensions are for 00U-J1 -F-00. E In case of 00U-K1 6 - F -00, the overall length is 113.3. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.6 ± 0.06 N m. Using excessive torque may cause damage to the body. Note 4) The pitches of S, E, and ports are determined assuming the use of One-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalog to confirm the sizes of the fittings to be used. Note ) In order to release a workpiece, design the circuit for vacuum release separately. 9.7