Vacuum Unit Vacuum Ejector Vacuum Pump System RoHS Energy saving ejector Air consumption % reduction More efficient eject

Transcription

1 acuum Unit acuum Ejector acuum ump System New RoHS Energy saving ejector Digital pressure switch for vacuum with energy saving function cuts supply air when the pressure reached the desired vacuum. Air consumption 90 % reduction Based on SMC s measuring conditions ns More efficient ejector Suction flow 50 % increase Air consumption 30 % reduction (Compared to other SMC single stage ejectors) Two-stage ejector First ejector Second ejector Compact / Lightweight g olume 88 cm 3 Weight 81 g Q1 + Q2 = Suction flow 28 % reduction 59 % reduction Current product ZK2 New Reduced-wiring D-sub connector/flat ribbon cable/individual wiring High-noise reduction silencer added Low noise: 46 db 1 (A) Suction flow rate: Improved by up to approx. 20 % 2 1 Nozzle size: Ø Nozzle size: Ø 1.5 (Based on SMC s measuring conditions) High-noise reduction silencer Series ZK2 CAT.EUS C-UK

2 acuum Unit Series ZK2 Energy saving ejector Digital pressure switch with energy saving function reduces air consumption by 90 %. Energy saving ejector Air supply Air supply Current product Based on SMC s measuring conditions While the suction signal is ON, the ON/OFF operation of the supply valve is also performed automatically within the set value. Supply valve signal ON Current product OFF Energy saving ON control OFF Atmospheric pressure Digital pressure switch for vacuum with energy saving function Air is supplied and exhausted intermittently when the vacuum decreases. Exhaust acuum Energy saving efficiency Exhaust Workpiece Workpiece acuum Air is supplied and exhausted continuously during the adsorption of the workpiece. ower consumption cost per year reduced by 565 /year ZK2/With energy saving function Current product Exhaust acuum port pressure acuum pressure Energy saving ON/OFF operation Achievable vacuum pressure ower consumption cost per year /year /year Energising time per year 1875 h/year h/year Current ejector The energy saving function shortens the exhaust time, which reduces the annual power consumption cost. Ejector with energy saving switch Exhaust time 0.6 s Compressor s consumption per unit time 0.19 kwh 0.27 kwh Cost conditions Electric power charge: 0.12 /kwh, Operating hours: 10 hours/day, Operating days: 250 days/year, When 10 units are used ower consumption of the compressor is the theoretical value from the air consumption of each product at 0.35 Ma. 6 s With energy saving function Improved low noise and suction flow by adoption of a through-hole silencer Low noise 46 db (A) Nozzle size: Ø 0.7 Suction flow rate Through-hole silencer The exhaust is discharged directly to atmosphere, cutting off the unpleasant frequency while exhibiting the maximum possible vacuum performance. Improved by up to approx. 20 % 1 Nozzle size Ø 1.5 Noise level [db (A)] Exhaust type Through-hole silencer Built-in silencer ZK2A07 (Built-in silencer) ZK2G07 (Through-hole silencer) Reduces high frequency range from 2000 to Hz Frequency [Hz] Maximum suction flow rate [l/min (ANR)] Approx. 20 % 67 80

3 acuum Unit Series ZK2 All in One iping Wiring Installation time reduced!! Dual 2 port valve (/Supply valve) ressure sensor/switch Supply valve: Self-holding ariations Even if there is a power cut, the vacuum is maintained as long as there is supply air. q The vacuum is maintained during power failure as long as air is supplied. This can prevent the workpiece from being dropped. w The unit turns on by instantaneous energising (minimum 20 ms.). Continuous energising is not necessary. This can reduce the power consumption. Linked supply and release valves operation The self-holding type supply valve will be turned off by turning on the release valve. It is not necessary to send a signal to stop the vacuum, which simplifies the wiring and programming. (Conventional double solenoid and latching type require a signal to stop the vacuum.) ower saving ng pilot valve Supply and release valve are low power consumption type. With digital pressure switch for vacuum with energy saving function (0.35 W) One-touch fitting Digital pressure switch for vacuum Air supply acuum break flow adjusting needle acuum Suction filter ressure sensor Silencer exhaust Digital pressure switch for vacuum Easier maintenance Set value copy function: Reduction in setting work/revention of mistakes in setting Master sensor (source of copy) e q w Mounting 앬 Transparent filter case allows visual check of the contamination. Options Single unit bracket mounting Bracket w q Filter element 앬 w Sound absorbing material q Filter case Silencer cover Filter element and the sound absorbing material can be installed/ removed without using screws. 앬 If there is dirt inside the case, it is possible to remove the case and clean it. Single unit DIN rail mounting Stopper Cop y Slave side Set value can be copied up to 10 units. 1 unit 2 units 10 units Cannot be selected with the energy saving function. Manifold DIN rail mounting Mounting bracket 2

4 acuum acuum U Unit nit Se Series eries sz ZK2 K2 acuum Unit ariations Single Unit ariations acuum Ejector acuum ump System Nozzle size acuum switch acuum pressure supply () port Ø 0.7, Ø 1.0, Ø 1.2, Ø 1.5 s 0RESSURE SENSOR s ressure switch for vacuum s ressure switch for vacuum Ø 6, Ø 1/4" One-touch fittings Air pressure supply () port with energy saving function s Without vacuum switch Ø 6, Ø 1/4" One-touch fittings Combination of supply valve and release valve acuum break flow adjusting needle Supply valve Round lock nut type N.C N.C N.C None Self-holding release valve linked N.C None None (Option) Screwdriver operation type (Option) Supply valve/: Rated voltage ilot pressure supply (S) port 12, 24 DC acuum () port Ø 6, Ø 8 One-touch fittings Ø 1/4", Ø 5/16" One-touch fittings With individual release pressure supply (D) port Ø 4, Ø 5/16" One-touch fittings D port (M3) Ø 6, Ø 8 One-touch fittings Ø 1/4", Ø 5/16" One-touch fittings acuum () port Option Manifold stations 1 to 10 stations Wiring type s $ SUB CONNECTOR s &LAT RIBBON CABLE s )NDIIDUAL WIRING Manifold ariations Individual wiring s s Individual port exhaust s High-noise reduction silencer exhaust Complex exhaust Note) Air pressure supply () port acuum pressure () port Ø 8, Ø 5/16" Ø 8, Ø 5/16" s #OMMON SULY s )NDIIDUAL SULY /TION s #OMMON SULY Common pilot pressure supply (S) port D-sub connector Individual port exhaust Complex exhaust Note) Note) The complex exhaust is a combined exhaust method of the common exhaust from the end plate and the direct exhaust from each station. D-sub connector 3 Exhaust type Common air pressure supply () port Flat ribbon cable connector Individual air pressure supply () port (Option) High-noise reduction silencer exhaust Flat ribbon cable Common vacuum pressure supply () port Individual wiring

5 Series ZK2 acuum Unit INDEX How to Order How to Order Single Unit...5, 7 How to Order Manifold... 9 Specifications/Flow Rate Characteristics Specifications, Weight...12 Exhaust Characteristics, Flow Rate Characteristics...13 acuum ump System Flow Rate Characteristics, acuum Release Flow Rate Characteristics, How to Read Flow Rate Characteristics Graph...15 ressure Sensor/Digital ressure Switch for acuum Specifications...16 Digital ressure Switch for acuum Specifi cations, Description, Internal Circuit and Wiring Example...17 ort Layout Standard roducts...18 Option -D...20 Option -L...23 Construction Construction...25 Replacement arts/how to Order...26 Exploded iew of Manifold...27 Dimensions...29 Electrical Wiring Specifications, Optional Specifications/Functions/Applications...36 Cable Assembly...37 Specific roduct recautions Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order

6 With alve Without alve acuum Unit Series ZK2 Ejector System How to Order Single Unit ZK2 A 12 K 5 A L 08 ZK2 A 12 N 0 N N 08 q w e r t y u i RoHS Refer to page 9 for How to Order Manifold. Remains blank when no option is selected. q System/Body Type Symbol System Body type Exhaust type Note 4) Supply valve e Combination of Supply alve and Release alve Symbol Supply valve A Silencer exhaust Note 6) K N.C. N.C. J N.C. None B Single unit ort exhaust R Note 5) Self-holding release valve linked N.C. G C Ejector system High-noise reduction silencer exhaust Note 2) Complex exhaust N None None Note 4) Only non-locking type is available for the manual override for K, J, R. Note 5) Self-holding type maintains vacuum by instantaneous energisation (20 ms or more). Stopping the vacuum turns on the release valve. (signal to stop vacuum not needed) Note 6) When the digital pressure switch for vacuum with energy saving function is selected, select K for t ressure Sensor/Digital ressure Switch for acuum Specifications. F H For manifold Individual port exhaust High-noise reduction silencer exhaust Note 1) ort size of exhaust port: mm: Ø 8 inch: Ø 5/16" Note 2) The complex exhaust is a combined exhaust method of the common exhaust from the end plate and the direct exhaust from each station. w Nominal Nozzle Size Symbol System Nominal size 07 Ø Ø 1.0 Note 3) Ejector system 12 Ø Ø 1.5 Note 3) Standard supply pressure for nozzle size 07 to 12 is 0.35 Ma, 15 is 0.4 Ma Note 7) r Rated oltage Symbol oltage 5 24 DC 6 12 DC 0 When e is N Note 7) Rated voltage for the supply and release valve t ressure Sensor/Digital ressure Switch for acuum Specifications Symbol Type ressure range [ka] Specifications ressure 0 to -101 Analogue output 1 to 5 T sensor -100 to 100 Analogue output 1 to 5 A NN Unit selection function 2 outputs Note 8) B SI unit only 0 to -101 C Digital N Unit selection function pressure 2 outputs Note 8) D SI unit only switch E for NN Unit selection function vacuum 2 outputs Note 8) F SI unit only -100 to 100 H N Unit selection function J 2 outputs Note 8) SI unit only K Digital pressure NN Unit selection function switch for vacuum 1 output Note 8) Q SI unit only -100 to 100 R with energy saving N Unit selection function function S Note 10) 1 output Note 8) SI unit only N Without pressure sensor/ digital pressure switch for vacuum ressure sensor Digital pressure switch for vacuum Digital pressure switch for vacuum with energy saving function Note 8) Fixed unit: ka Note 9) When K, Q, R, S is selected, select K for e Combination of Supply alve and Release alve. Select W or L3 for y. 5

7 Ejector System acuum Unit Series ZK2 : Air pressure supply port/ort for vacuum source (acuum pump) S: ilot pressure supply port D: Individual release pressure supply port : acuum port : Exhaust port E: ilot pressure exhaust port For details age 24 y Supply alve/release alve/digital ressure Switch for acuum Connector Specifications Symbol efor supply valve/release valve Note 10) tlead wire with connector for pressure switch/ Connector type Lead wire with connector Note 13) sensor C Common wiring (lug-in) (For manifold) C1 L L-type plug L2 connector Note 11) Note 25) Single Unit and Options Note 14) Note 15) Note 11) Note 14) L1 Note 12) Note 14) Note 15) L3 Note 12) Note 15) W Y Y1 N q System/ Body type Non-valve (without supply/ release valve) When N is selected for e With lead wire for switch with energy saving function Note 14) When N is selected for both e (Combination of Supply alve and Release alve) and t (ressure Sensor/Digital ressure Switch for acuum Specifi cations) (without supply/release valve, without switch, pressure sensor) w Nominal nozzle size e Combination of supply valve and release valve r Rated voltage t ressure sensor/digital pressure switch for vacuum specifi cations y Supply valve/release valve/digital pressure switch for vacuum connector specifications u acuum () port i Optional specifications /T L/L1 K A/B/C/D/E/F/H/J L/L1/L2/L3 B/D/J/K/W N L2/L3 K/Q/R/S L3/W B/D/J/K 5 /T L/L1 R 6 A/B/C/D/E/F/H/J L/L1/L2/L3 B/D/J/K/W A/B/G N L2/L3 /T L/L1 J A/B/C/D/E/F/H/J L/L1/L2/L3 B/W N L2/L3 07 /T Y N 0 A/B/C/D/E/F/H/J Y/Y1 06 B/W 10 N N /T C/L/L A/B/C/D/E/F/H/J C/C1/L/L1/L2/L3 09 J/K/L//W K N C1/L2/L3 K/Q/R/S L3/W J/K/L/ 5 /T C/L/L1 R 6 A/B/C/D/E/F/H/J C/C1/L/L1/L2/L3 J/K/L//W C/F/H N C1/L2/L3 /T C/L/L1 J A/B/C/D/E/F/H/J C/C1/L/L1/L2/L3 L/W N C1/L2/L3 /T Y N 0 A/B/C/D/E/F/H/J Y/Y1 L/W N N Note 25) When J is selected for e Combination of Supply alve and Release alve, J or K cannot be selected for i Optional Specifications. For options not in the table, please contact SMC. Refer to page 42 when mounting a single unit onto the DIN rail. Note 16) u acuum () ort Symbol Type ort size 06 Metric 08 size Note 16) Supply port () size of single unit: Ø 6 (mm), Ø 1/4" (inch) Note 10) Solenoid valve with light/surge voltage suppressor Note 11) Standard lead wire length for solenoid valve is 300 mm. Note 12) For lead wire lengths other than standard, select L1 or L3, and order the connector assembly with desired length. (Refer to page 26.) Note 13) Standard lead wire length for pressure sensor is 3 m. Standard lead wire length with connector for pressure switch for vacuum and the lead wire length for switch with energy saving function is 2 m. Note 14) Select C, L, L1, Y when the pressure sensor (, T) is selected for t ressure Sensor/Digital ressure Switch for acuum Specifications. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected. Note 15) Select when no pressure switch for vacuum, pressure sensor, or pressure switch for vacuum with connector without lead wire is used. Note 17) i Optional Specifications Symbol Type Symbol Type Without option Manifold individual B D J K Inch size Ø 6 One-touch fi tting Ø 8 One-touch fi tting Ø 1/4" One-touch fi tting Ø 5/16" One-touch fi tting With one bracket for mounting a single unit (Mounting screw is attached.) Note 17) When more than one option is selected, list the option symbols in an alphabetical order. Example) -BJ Refer to page 36 for Function/Application. Note 18) Only M3 is available for D port size. Use One-touch fi tting (KQ2S23-M3G) or barb fi t- ting for piping. (O.D.: within Ø 8) Note 19) Select body for manifold. Select L for manifold type. When the common supply and individual supply are mixed, please contact SMC. Note 20) When -D is selected for manifold option, select - option for the single unit model number. Note 21) To prevent backfl ow of the manifold common exhaust, not for holding vacuum. This option does not completely stop the backfl ow of the exhaust air. Select port exhaust type depending on purpose. Note 22) When J is selected for e Combination of Supply alve and Release alve and W (with exhaust interference prevention valve) is selected for i Optional Specifications, install a release valve or vacuum breaker. Note 23) When K, Q, R, S is selected for t ressure Sensor/Digital ressure Switch for acuum Specifications, models with exhaust interference prevention valve is provided. So, it is not necessary to select W. Note 24) For high-noise reduction silencer exhaust, W (With exhaust interference prevention valve) cannot be selected. L With individual release pressure supply (D) port Note 18) W acuum break fl ow adjusting needle Round lock nut type acuum break fl ow adjusting needle Screwdriver operation type supply specification Note 19) Manifold common release pressure supply specification Note 20) With exhaust interference Note 21, 23, 24, 25) prevention valve 6 Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order

8 acuum Unit Series ZK2 acuum ump System How to Order Single Unit RoHS Refer to page 9 for How to Order Manifold. ZK2 acuum ump System K 5 A L q w e r t y u Remains blank when no option is selected. q System/Body Type Symbol System Body type Exhaust type acuum pump system Single unit Q For manifold Note 1) Note 2) Supply valve w Combination of Supply alve and Release alve Symbol Supply valve K N.C. N.C. J N.C. Note 3) None R Note 4) Self-holding release valve linked N.C. Note 1) S port size of pump system: mm: Ø 4 inch: Ø 5/32" Note 2) Only non-locking type is available for the manual override for K, J, R. Note 3) When J is selected for vacuum pump system, install a release valve or vacuum breaker. Note 4) Self-holding type maintains vacuum by instantaneous energisation (20 ms or more). Stopping the vacuum turns on the release valve. (signal to stop vacuum not needed) Note 5) e Rated oltage Symbol oltage 5 24 DC 6 12 DC Note 5) Rated voltage for the supply and release valve r ressure Sensor/Digital ressure Switch for acuum Specifications Symbol Type ressure range [ka] Specifications ressure 0 to -101 Analogue output 1 to 5 T sensor -100 to 100 Analogue output 1 to 5 A NN Unit selection function 2 outputs Note 6) B SI unit only 0 to -101 C Digital N Unit selection function pressure 2 outputs Note 6) D SI unit only switch E for NN Unit selection function vacuum 2 outputs Note 6) F SI unit only -100 to 100 H N Unit selection function J 2 outputs Note 6) SI unit only ressure sensor Digital pressure switch for vacuum N Without pressure sensor/ Digital pressure switch for vacuum Note 6) Fixed unit: ka 7

9 acuum ump System acuum Unit Series ZK2 : Air pressure supply port/ort for vacuum source (acuum pump) S: ilot pressure supply port D: Individual release pressure supply port : acuum port : Exhaust port E: ilot pressure exhaust port For details age 24 t Supply alve/release alve/digital ressure Switch for acuum Connector Specifications Note 7) wfor supply valve/release valve rlead wire with connector Symbol for pressure switch/ Connector type Lead wire with connector Note 10) sensor C Common wiring (lug-in) (For manifold) C1 L L-type plug connector Note 7) Solenoid valve with light/surge voltage suppressor Note 8) Standard lead wire length for solenoid valve is 300 mm. Note 9) For lead wire lengths other than standard, select L1 or L3, and order the connector assembly with desired length. (Refer to page 26.) Note 10) Standard lead wire length for pressure sensor is 3 m. Standard lead wire length with connector for switch for vacuum and the lead wire length for switch with energy saving function is 2 m. Note 11) Select C, L, L1 when the pressure sensor (, T) is selected for r ressure Sensor/Digital ressure Switch for acuum Specifi - cations. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected. Note 12) Select when no pressure switch for vacuum, pressure sensor, or pressure switch for vacuum with connector without lead wire is used. Note 18) Single Unit and Options Note 11) Note 12) Note 8) Note 11) L1 Note 9) Note 11) L2 Note 8) Note 12) L3 Note 9) Note 12) q System/ Body type Q acuum pump system part number 00 w Combination of supply valve and release valve K/R J K/R J e Rated voltage 5 6 r ressure sensor/digital pressure switch for vacuum specifi cations /T A/B/C/D/E/F/H/J N /T A/B/C/D/E/F/H/J N /T A/B/C/D/E/F/H/J N /T A/B/C/D/E/F/H/J N Note 13) y acuum () ort Symbol Type ort size 06 Metric 08 size Ø 6 One-touch fitting Ø 8 One-touch fitting Note 13) Supply port () size of single unit: Ø 6 (mm), Ø 1/4" (inch) Note 14, 17) u Optional Specifications Symbol Type Symbol Type Note 14) When more than one option is selected, list the option symbols in an alphabetical order. Example) -BJ Note 15) Only M3 is available for D port size. Use One-touch fi tting (KQ2S23-M3G) or barb fi tting for piping. (O.D.: within Ø 8) Note 16) When -D is selected for manifold option, select - option for the single unit model number. Note 17) Refer to page 36 for Function/Application. Note 18) When J is selected for w Combination of Supply alve and Release alve, J or K cannot be selected for u Optional Specifications. For options not in the table, please contact SMC. Refer to page 42 when mounting a single unit onto the DIN rail Inch size Without option With one bracket for mounting a single unit B (Mounting screw is attached.) C D ump system E port female thread specifi cation With individual release pressure supply Note 15) (D) port t Supply valve/release valve/digital pressure switch for vacuum connector specifications L/L1 L/L1/L2/L3 L2/L3 L/L1 L/L1/L2/L3 L2/L3 C/L/L1 C/C1/L/L1/L2/L3 C1/L2/L3 C/L/L1 C/C1/L/L1/L2/L3 C1/L2/L3 Ø 1/4" One-touch fitting Ø 5/16" One-touch fitting J K y acuum () port acuum break fl ow adjusting needle Round lock nut type acuum break fl ow adjusting needle Screwdriver operation type Manifold common release pressure supply specification Note 16) u Optional specifi cations B/C/D/J/K B/C C/J/K/ C 8 Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order

10 Series ZK2 How to Order Manifold ZZK2 04 q A 1 L w e r t y Remains blank when no option is selected. q Stations w System (ort combination) Note 1) Symbol Stations 1 station Symbol 10 stations Note 2) ort Standard Common port 2 stations 10 System Common S port Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter. (Refer to Maximum Number of Manifold Stations that Can Operate Simultaneously on page 12.) acuum pump Common : Ø 8, Note 3) system Common S: Ø 6 Metric size A Ejector system Common port Note 4) Common : Ø 8 Common S port N Note 2) Refer to pages 18 to 24 for the port layout of standard port combinations and options. Note 3) Common S port and common D port are connected inside. Connect One-touch fitting to one of ports so that piping becomes easian er. (Connected to S port initially) Note 4) Common = Common S = Common D. ressure is equal. Common : Ø acuum pump 5/16", Note 3) system Common S: Ø 1/4" Common port Inch size Ejector system Note 4) Common : Ø 5/16" Common port Individual wiring e Exhaust Symbol 2 r Wiring Exhaust type Note 8) Symbol Type L Individual wiring specification F D-sub connector (25 pins) acuum pump Without silencer system Note 9) Complex exhaust Note 7) 1 Note 5) Silencer (End plate on both sides) Ejector system 2 Individual exhaust (Individual port exhaust, High-noise reduction silencer exhaust) Note 6) Note 10) Individual port exhaust Note 5) Select C for q System/Body Type (page 5) for the single unit model number. Air is exhausted not only from the end plate, but also from the exhaust of each station. Note 6) Select F or H for q System/Body Type (page 5) for the single unit model number. Note 7) The complex exhaust is a combined exhaust method of the common exhaust from the end plate and the direct exhaust from each station. D-sub connector Note 10) Flat ribbon cable (26 pins) N No wiring (No valve) Flat ribbon cable connector Note 8) Common wiring is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors. Note 9) Select L, L쏔, or W for y Supply alve/release alve/ Digital ressure Switch for Connector Specifications for the single unit model number. Note 10) Select C, C1 for y Supply alve/release alve/digital ressure Switch for Connector Specifications for the single unit model number. 9

11 acuum Unit Series ZK2 Note 11) t Option Symbol Type Without option B D L Note 12) With DIN rail mounting bracket Note 13) With common release pressure supply (D) port Note 14) Manifold individual supply specifi cation Note 11) When more than one option is selected, list the option symbols in an alphabetical order. Example) -BD Note 12) DIN rail should be ordered separately. (Refer to page 27.) Note 13) When -D is selected for the manifold model number, select - for i Optional Specifications for the single unit model number. Refer to pages 18 to 24 for port layout. Note 14) When -L (individual supply) is selected for i Optional Specifications for the single unit model number, specify -L for manifold, too. How to Order alve Manifold Assembly Example ZK2C10R5NC1-08 ZZK204-A1-B DIN rail mounting bracket ZK2C10R5NL Stations D side U side ZZK204-A1-B 1 set (Manifold part number) ZK2C10R5NC sets (Common wiring specification) ZK2C10R5NL set (Individual wiring specification) The asterisk denotes the symbol for assembly. refix to the single unit part number. When the manifold is viewed from port, the fi rst station starts from the left (D side). After the manifold part number, specify the installed single unit from the fi rst station. Complex exhaust and individual port exhaust cannot be mixed in the ejector system manifold. DIN rail should be ordered separately. (age 27) Common D port Individual port y Manifold Assembly (Delivery condition) Symbol Type Individual units assembled delivered as a manifold Note 15) A Delivered as individual parts (not assembled) Note 15) Kit consists of end plates for both ends and tension bolts. Manifold parts when not assembled Tension bolt ZZK202-A1L-A 1 set (Manifold part number) ZK2C10K5BL set (Single unit part number) ZK2C10K5L set (Single unit part number) Do not add Manifold Type and Options q w e r t y B D L L ZZK2 01 N 2 F L 10 1 F AN 2 N Manifold parts A End plate A Ejector: Single unit 10 Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order

12 11

13 acuum Unit Series ZK2 Specifications General Specifications Operating temperature range Fluid Note 1) ibration resistance Note 2) Impact resistance Note 1) The characteristics are satisfi ed when tested for 2 hours in each of the X, Y and Z directions at 10 to 500 Hz without energisation. (Initial value) Note 2) The characteristics are satisfi ed when tested one time in each of the X, Y and Z directions without energisation. (Initial value) Weight alve Common Specifications alve model Note 3) ZK2-AR ZK2-AK ZK2-AJ Note 3) Refer to y alve assembly on page 26 for the valve model number. Note 4) ZK2-AR: After instantaneous energisation of the supply valve (20 ms or more), ON state is maintained without energisation. Supply valve turns off simultaneously when the release valve turns on. ZK2-AK: Supply valve turns off when it is not energised. Select this type when energy saving switch is used. Ejector Specifications Item Model ZK207 ZK210 ZK212 ZK215 Nozzle diameter [mm] Note 5) Max. suction flow Note 5) alues are based on standard of SMC measurements. They depend on atmospheric pressure (weather, altitude, etc.) and measurement method. Note 6) The value in ( ) is for without valve. For nozzle size 07 to 12, the value is common to the ejectors with valve and without valve. Note 7) Maximum Number of Manifold Stations that Can Operate Simultaneously Item Model (Nozzle size) ZK207 ZK210 ZK212 ZK215 Note 7) As long as the number of stations operated simultaneously is the value on the table or less, then the manifold is available up to 10 stations. Single Unit ressure Sensor/ressure Switch for acuum Manifold Base 5 to 50 C (with no condensation) Calculation of Weight for the Manifold Type (Single unit weight x Number of stations) + (ressure sensor/ressure switch for vacuum weight x Number of stations) + Manifold base Example) 5-station manifold with pressure sensors 85 g x 5 pcs. + 5 g 5 pcs g = 591 g Air 30 m/s 2 Without pressure sensor/switch for vacuum With pressure sensor 20 m/s 2 With switch for vacuum 150 m/s 2 Without pressure sensor/switch for vacuum With pressure sensor 100 m/s 2 With switch for vacuum Type of Self-holding Note 4) actuation supply valve N.C. (Linked) Supply valve N.C. N.C. Supply valve N.C. Without release valve alve configuration ilot operated dual 2 port ilot operated 2 port Operating pressure range alve construction Manual override Rated voltage ower consumption Lead wire (ZK2-L -A) 0.3 to 0.6 Ma oppet seal ush type 24 DC, 12 DC 0.35 W Cross section: 0.2 mm 2 (AWG24) Insulator O.D.: 1.4 mm ort exhaust [l/min (ANR)] Silencer exhaust/complex exhaust [l/min (ANR)] High-noise reduction silencer exhaust [l/min (ANR)] Air consumption Note 5) [l/min (ANR)] Maximum vacuum pressure Note 5) [ka] -91 Supply pressure range [Ma] 0.3 to 0.6 Standard supply pressure Note 6) [Ma] (0.37) Air pressure supply () port Ø 8, Ø 5/16" Complex exhaust Individual port exhaust, High-noise reduction silencer exhaust Supply from one side Supply from both sides Supply from one side Supply from both sides Single unit model Weight [g] ZK200K (acuum pump system, Single unit, Without pressure sensor/switch for vacuum) 83 ZK2AK (Ejector system, Single unit, Without pressure sensor/switch for vacuum) 81 ZK2AN0NN (Ejector system, Single unit, Without valve) 54 ZK2 (One station for manifold, Without pressure sensor/switch for vacuum) 85 ressure sensor/ressure switch for vacuum model Weight [g] ZK2-S-A (Except cable portion) 5 ZK2-ZS-A (Except lead wire assembly with connector) ZK2-ZS-A (Except special lead wire assembly with connector) 14 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Weight [g] Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order

14 Series ZK2 Ejector Exhaust Characteristics/Flow Rate Characteristics ZK207 Exhaust Characteristics Flow Rate Characteristics The fl ow rate characteristics correspond to the standard supply pressure acuum pressure [ka] acuum pressure Suction flow (Individual port exhaust) Air consumption Suction flow (High-noise reduction silencer exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Suction flow [l/min (ANR)] Air consumption [l/min (ANR)] acuum pressure [ka] Individual port exhaust Silencer exhaust/complex exhaust Suction flow [l/min (ANR)] Flow Rate Characteristics acuum pressure [ka] High-noise reduction silencer exhaust Supply pressure [Ma] Suction flow [l/min (ANR)] ZK210 Exhaust Characteristics Flow Rate Characteristics -100 acuum pressure [ka] acuum pressure Suction flow (Individual port exhaust) Suction flow (High-noise reduction silencer exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Suction flow [l/min (ANR)] Air consumption [l/min (ANR)] acuum pressure [ka] Individual port exhaust Silencer exhaust/complex exhaust Suction flow [l/min (ANR)] Flow Rate Characteristics Air consumption acuum pressure [ka] High-noise reduction silencer exhaust Supply pressure [Ma] Suction flow [l/min (ANR)] 13

15 acuum Unit Series ZK2 Ejector Exhaust Characteristics/Flow Rate Characteristics ZK212 Exhaust Characteristics acuum pressure [ka] Suction flow (Individual port exhaust) acuum pressure Supply pressure [Ma] Exhaust Characteristics acuum pressure [ka] Air consumption Suction flow (Individual port exhaust) acuum pressure Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (High-noise reduction silencer exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Air consumption Suction flow (High-noise reduction silencer exhaust) Supply pressure [Ma] Suction flow [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow [l/min (ANR)] Air consumption [l/min (ANR)] Flow Rate Characteristics acuum pressure [ka] Flow Rate Characteristics acuum pressure [ka] acuum pressure [ka] acuum pressure [ka] Individual port exhaust Silencer exhaust/complex exhaust Suction flow [l/min (ANR)] Suction flow [l/min (ANR)] Flow Rate Characteristics Flow Rate Characteristics The fl ow rate characteristics correspond to the standard supply pressure. High-noise reduction silencer exhaust ZK215 Note 8) The following graphs show the characteristics of the ejector with valve. (lease contact SMC for models without valve.) -20 Individual port exhaust Silencer exhaust/complex exhaust Suction flow [l/min (ANR)] High-noise reduction silencer exhaust Suction flow [l/min (ANR)] 14 Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order

16 Series ZK2 acuum ump System Flow Rate Characteristics/ZK200 The graph shows the suction fl ow rate characteristics of the vacuum pump system at different vacuum pressures. acuum pressure [ka] Suction flow [l/min (ANR)] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port. (The above graph shows the value when port is Ø 8.) acuum Release Flow Rate Characteristics The graph shows the fl ow rate characteristics at different supply pressures when the vacuum break fl ow adjusting needle is open from the fully closed state. ZK2(Ejector System) Release flow [l/min (ANR)] Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port. (The above graph shows the value of the ZK2B07.) ZK2(ump System) 0.2 Supply pressure [Ma] Release flow [l/min (ANR)] Supply pressure [Ma] Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port. acuum ump System Flow Rate Characteristics of Flow ath and acuum Release ort size Flow rate characteristics of (acuum side) Flow rate characteristics of S (acuum release side) ( ) port port C[dm 3 /(s bar)] b Cv C[dm 3 /(s bar)] b Cv Ø 6 Ø ( ) When needle is fully open How to Read Flow Rate Characteristics Graph acuum pressure max 1 0 Q1 Qmax Suction flow Flow rate characteristics are expressed in ejector vacuum pressure and suction fl ow. If suction fl ow changes, the vacuum pressure will also be changed. Normally this relationship is expressed in ejector standard operating pressure use. In graph, max is maximum vacuum pressure and Qmax is maximum suction flow. The values are specified according to catalogue use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction port is covered and made airtight, suction fl ow becomes zero and vacuum pressure is at maximum value (max). 2. When suction port is opened gradually, air can fl ow through, (air leakage), suction fl ow increases, but vacuum pressure decreases. (condition 1 and Q1) 3. When suction port is opened further and fully opened, suction fl ow moves to maximum value (Qmax), but vacuum pressure is near zero (atmospheric pressure). As described above, the vacuum pressure changes when the suction fl ow changes. In other words, when there is no leakage from the vacuum () port, the vacuum pressure can reach its maximum, but as the amount of leakage increases, the vacuum pressure decreases. When the amount of leakage and the maximum suction fl ow become equal, the vacuum pressure becomes almost zero. In the case when ventilative or leaky work should be adsorbed, take note that vacuum pressure will not rise. 15

17 acuum Unit Series ZK2 ressure Sensor/Digital ressure Switch for acuum Specifications ressure sensor Digital pressure switch for vacuum ressure Sensor/ZK2-S-A (For details, refer to the SE series in our website and the Operation Manual.) Model (Sensor unit: Standard model number) ZK2-S1-A (SE541) ZK2-S3-A (SE543) Rated pressure range 0 to -101 ka -100 to 100 ka roof pressure 500 ka Applicable fluid Air/Non-corrosive gas/incombustible gas Output voltage 1 to 5 DC Output impedance Approx. 1 kω ower supply voltage 10 to 24 DC ±10 %, Ripple (-) 10 % or less Current consumption 15 ma or less Accuracy ±2 % F.S. (Ambient temperature at 25 C) Linearity ±0.4 % F.S. or less Repeatability ±0.2 % F.S. or less Effect of power supply voltage ±0.8 % F.S. or less Temperature characteristics ±2 % F.S. or less (Ambient temperature: 25 C reference) Material Case Resin case ressure sensing section Sensor pressure receiving area: Silicon, O-ring: HNBR Lead wire Oilproof heavy-duty cable 2.7 x 3.2 mm (Elliptic), 0.15 mm 2 3 cores 3 m Digital ressure Switch for acuum/zk2-zs-a ( For details, refer to the ZSE/ISE10 series in our website and the Operation Manual.) Model (Switch unit: Standard model number) ZK2-ZSE-A (ZSE10) ZK2-ZSF-A (ZSE10F) Rated pressure range 0 to -101 ka -100 to 100 ka Set pressure range/ressure display range 10 to -105 ka -105 to 105 ka roof pressure 500 ka Smallest settable increment 0.1 ka Applicable fluid Air/Non-corrosive gas/incombustible gas ower supply voltage 12 to 24 DC ±10 %, Ripple (p-p) 10 % or less (rotected against reverse connection) Current consumption 40 ma or less Switch output NN or N open collector 2 outputs (selectable) Maximum load current 80 ma Maximum applied voltage 28 (with NN output) Residual voltage 2 or less (with load current at 80 ma) Response time 2.5 ms or less (Anti-chattering function working: 20, 100, 500, 1000 or 2000 ms selected) Short circuit protection Yes Repeatability ±0.2 % F.S. ±1 digit Hysteresis Hysteresis mode Window comparator mode ariable (0 or above) Note) Display 3 1/2 digit, 7-segment LED, 1-colour display (Red) Display accuracy ±2 % F.S. ±1 digit (Ambient temperature at 25 ±3 C) Indicator light Lights up when output is turned ON. OUT1: Green, OUT2: Red Enclosure I40 Operating temperature range Operating: -5 to 50 C, Storage: -10 to 60 C (with no freezing or condensation) Environmental Operating humidity range Operating/Storage: 35 to 85 % RH (with no condensation) resistance Withstand voltage 1000 AC for 1 minute between terminals and housing Insulation resistance 50 MΩ or more (500 DC measured via megohmmeter) between terminals and housing Temperature characteristics ±2 % F.S. (at 25 C in an operating temperature range of -5 and 50 C) Lead wire Standards Oilproof heavy-duty vinyl cable 5 cores, Cross section: 0.15 mm 2 (AWG26), Insulator O.D.: 1.0 mm Compliant with CE marking, RoHS Note) If the applied voltage fl uctuates around the set value, the hysteresis must be set to a value more than the fluctuating width, otherwise, chattering will occur. Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order 16

18 Series ZK2 Digital ressure Switch for acuum Specifications Digital pressure switch for vacuum with energy saving function Digital ressure Switch for acuum Ejector with Energy Saving Function Model Specifi cations Rated pressure range -100 to 100 ka Set pressure range -105 to 105 ka roof pressure 500 ka Smallest settable increment 0.1 ka Applicable fluid Air/Non-corrosive gas/incombustible gas ower supply voltage 12 to 24 DC ±10 % Ripple (-) 10 % or less (rotected against reverse connection) Current consumption 40 ma or less Switch output NN or N open collector OUT1: General purpose, OUT2: alve control Maximum load current 80 ma Maximum applied voltage 26.4 DC Residual voltage 2 or less (with load current at 80 ma) Response time 2.5 ms or less (Anti-chattering function working: 20, 100, 500, 1000 or 2000 ms selected) Short circuit protection Yes Repeatability ±0.2 % F.S. ±1 digit Hysteresis Hysteresis mode ariable (0 or above) Note) Display 3 1/2 digit, 7-segment LED, 1-colour display (Red) Display accuracy ±2 % F.S. ±1 digit (Ambient temperature at 25 ±3 C) Indicator light Lights up when output is turned ON. OUT1: Green, OUT2: Red Enclosure I40 Environmental resistance Temperature characteristics Lead wire Standards Operating humidity range 5 to 50 C Withstand voltage 1000 AC for 1 minute between terminals and housing Insulation resistance 50 MΩ or more (500 DC measured via megohmmeter) between terminals and housing ±2 % F.S. (at 25 C in an operating temperature range of 5 and 50 C) Cable: 5 cores Ø 3.5, 2 m Cross section: 0.15 mm 2 (AWG26) Insulator O.D.: 1.0 mm CE marking, RoHS Note) If the applied voltage fl uctuates around the set value, the hysteresis must be set to a value more than the fluctuating width, otherwise, chattering will occur. Description (ressure Switch for acuum) Output (OUT1) display (Green) Lights up when OUT1 is turned ON. Output (OUT2) display (Red) Lights up when OUT2 is turned ON. LED display Displays the current pressure, set mode and error code. button (U) Selects the mode or increases the ON/OFF set-value. Use for switching to the peak display mode. button (DOWN) Selects the mode or decreases the ON/OFF set-value. Use for switching to the bottom display mode. button (SET) Use for changing the mode or setting the set-value. Internal Circuit and Wiring Example Connector terminal Output (OUT1) display (Green) Output (OUT2) display (Red) button (SET) LED display button (U) Lead wire with connector button (DOWN) ressure Sensor ZK2-S-A Brown DC(+) Brown DC(+) Black OUT 1 Load 1 kω Black OUT + 12 DC Load (Analogue output) to 24 DC White OUT 2 + Load Blue DC( ) FUNC Blue DC( ) oltage output type: 1 to 5 Max. 28, 80 ma Output impedance: Approx. 1 kω Residual voltage: 2 or less Main circuit ressure Switch for acuum ZK2-ZSA-A NN (2 Outputs) Main circuit 12 DC to 24 DC ZK2-ZSB-A N (2 Outputs) Main circuit Brown DC(+) Black OUT 1 Load White OUT 2 FUNC Load Blue DC( ) Max. 80 ma Residual voltage: 2 or less + 12 DC to 24 DC The FUNC terminal is connected when using the copy function. (Refer to the Operation Manual.) ressure Switch for acuum with Energy Saving Function ZK2-ZSA-A NN (Output) Digital pressure switch 17 (NN Output) + OUT1 OUT2 FUNC Main circuit ilot valve A for supply C ilot valve B for release + Brown Black Grey Blue White Load 24 DC Connector cord assembly (ZK2-LWA20-A) ZK2-ZSB-A N (Output) Digital pressure switch (N Output) + Brown OUT1 Black OUT2 Load FUNC Grey Blue Main circuit ilot valve for supply ilot valve for release A C B + + White 24 DC Connector cord assembly (ZK2-LWB20-A)

19 acuum Unit Series ZK2 ort Layout System depends on vacuum source (vacuum pump/vacuum ejector). ort layout No. 1 Single unit: ZK200- Common S (= Common D) Common E System Body type Exhaust type Application and purpose ort layout No. 2 (including E) S (= D) (including E) acuum pump Single unit Without silencer acuum pressure Exhaust Release pressure Same pressure as S Single unit: ZK2Q00- Manifold: ZZK2-2 ort layout No. 3 Common S (= Common D) Common System acuum pump Body type Manifold Exhaust type Without silencer Application acuum pressure Common for each station and Exhaust purpose Release pressure Same pressure as common S Single unit: ZK2A- System Body type Exhaust type Application and purpose (= S = D) Note) Ejector Single unit Silencer exhaust acuum pressure Exhaust Released in operating environment Release pressure Same pressure as Common D Common S Common Standard roducts ort combination: S = D Supply valve E Supply valve: Self-holding type : N.C. (R type) Supply valve: Self-holding type : N.C. (R type) ort combination: Common Common S = Common D ort combination: = S = D E E Supply valve: N.C. : N.C. (K type) Supply valve: Self-holding type : N.C. (R type) Note) Nozzle size: 12, 15 S(= D) Exhaust port Note) Silencer exhaust Circuit example Circuit example Common D Common S Common Circuit example Refer to page 24 for the purpose of port and the operating pressure range. 18 Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout How to Order Specifications/ Flow Rate Characteristics

20 Series ZK2 ort Layout System depends on vacuum source (vacuum pump/vacuum ejector). ort layout No. 4 Single unit: ZK2B- (= S = D) (including E) Standard roducts ort combination: = S = D Circuit example System Body type Exhaust type Application and purpose ort layout No. 5 Ejector Single unit ort exhaust acuum pressure Exhaust After piping, individual exhaust is necessary. Release pressure Same pressure as Single unit: ZK2G- ort combination: ( = S = D) Supply valve: N.C. : Without release valve (J type) ort exhaust Circuit example (= S = D) (including E) High-noise reduction silencer exhaust ort layout No. 6 Common (= Common S = Common D) Common (including E) System Body type Exhaust type Application and purpose Ejector Single unit High-noise reduction silencer exhaust acuum pressure Exhaust Released in operating environment Release pressure Same pressure as Single unit: ZK2C- Manifold: ZZK2-A1 Common (= Common S = Common D) Common (including E) Common D Common S Common Supply valve: N.C. : N.C. (K type) ort combination: Common = Common S = Common D Circuit example Common D Common S Common 19 Note) The complex exhaust is a combined exhaust method of the common exhaust from the end plate and the direct exhaust from each station. System Ejector Body type Manifold Exhaust type Complex exhaust Note) Application acuum pressure Common for each station and Exhaust Released in operating environment purpose Release pressure Same pressure as common Supply valve: Self-holding type : N.C. (R type) Note) Individual exhaust port Supply valve: N.C. : N.C. (K type) Note) For complex exhaust type, individual exhaust port is provided to each station. Note) Individual exhaust port Refer to page 24 for the purpose of port and the operating pressure range.

21 acuum Unit Series ZK2 ort Layout ort layout No. 7 Single unit: ZK2F- Manifold: ZZK2-A2 Common (= Common S = Common D) ort layout No. 8 Single unit: ZK2H- Manifold: ZZK2-A2 Common (= Common S = Common D) ort layout No. 9 System Ejector Body type Manifold Exhaust type Individual port exhaust Application acuum pressure Common for each station and Exhaust After piping, individual exhaust is necessary. purpose Release pressure Same pressure as common System Ejector Body type Manifold Exhaust type High-noise reduction silencer exhaust Application acuum pressure Common for each station and Exhaust Released in operating environment purpose Release pressure Same pressure as common Single unit: ZK200--D E System Body type Exhaust type Application and purpose acuum pump Single unit Without silencer acuum pressure Exhaust Release pressure D S Common (= Common S = Common D) Individual (including E) Common (= Common S = Common D) Individual (including E) D pressure has to be supplied with S pressure. Standard roducts ort combination: Common = Common S = Common D Common D Common S Common Option -D ort combination: S D System depends on vacuum source (vacuum pump/vacuum ejector). 7 8 Supply valve: Self-holding type : N.C. (R type) ort exhaust Supply valve: N.C. : N.C. (K type) Circuit example Circuit example Refer to page 24 for the purpose of port and the operating pressure range. Supply valve: N.C. : N.C. (K type) E D S Common D Common S Common High-noise reduction silencer exhaust 20 Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order

22 Series ZK2 ort Layout System depends on vacuum source (vacuum pump/vacuum ejector). Option -D ort layout No. 10 ort combination: Common Common S Common D Circuit example Single unit: ZK2Q00- Manifold: ZZK2-2-D E E Common S Common Common D ( Common S) Common S Common Common D ( Common S) Common D Common S Common Common D Common S Common System acuum pump Body type Manifold Exhaust type Without silencer acuum pressure Common for each station Application Exhaust and purpose Common D pressure has to Release pressure be supplied with common S. Supply valve: Self-holding type : N.C. (R type) Supply valve: N.C. : N.C. (K type) ort layout No. 11 ort combination: = S D Circuit example Single unit: ZK2A--D (= S) D (including E) Note) (including E) D Exhaust port Note) Silencer exhaust System Body type Exhaust type Application and purpose Ejector Single unit Silencer exhaust acuum pressure Exhaust Released in operating environment Release pressure D pressure has to be supplied with pressure. Supply valve: Self-holding type : N.C. (R type) Note) Nozzle size: 12, 15 ort layout No. 12 Single unit: ZK2B--D (= S) D (including E) ort combination: = S D D ort exhaust Circuit example 21 System Body type Exhaust type Application and purpose Ejector Single unit ort exhaust acuum pressure Exhaust After piping, individual exhaust is necessary. Release pressure D pressure has to be supplied with pressure. Supply valve: N.C. : N.C. (K type) Refer to page 24 for the purpose of port and the operating pressure range.

23 acuum Unit Series ZK2 ort Layout ort layout No. 13 Single unit: ZK2G--D (= S) D System Body type Exhaust type Application and purpose ort layout No. 14 Single unit: ZK2C-- Manifold: ZZK2-A1-D Common Common (= Common S) Common D ( Common S) Common (including E) Note) The complex exhaust is a combined exhaust method of the common exhaust from the end plate and the direct exhaust from each station. System Ejector Body type Manifold Exhaust type Complex exhaust Note) acuum pressure Common for each station Application Exhaust Released in operating environment and purpose Common D pressure has to Release pressure be supplied with common. ort layout No. 15 Ejector Single unit High-noise reduction silencer exhaust acuum pressure Exhaust Released in operating environment Release pressure D pressure has to be supplied with pressure. (= Common S) Common D ( Common S) Common (including E) Single unit: ZK2F-- Manifold: ZZK2-A2-D Common (= Common S) Common D ( Common S) (including E) Common (= Common S) Common D ( Common S) Individual (including E) System Ejector Body type Manifold Exhaust type Individual port exhaust acuum pressure Common for each station Application Exhaust and After piping, individual exhaust is necessary. purpose Common D pressure has to Release pressure be supplied with common. Option -D ort combination: = S D ort combination: Common = Common S Common D Common D Common S Common ort combination: Common = Common S Common D Common D Common S Common System depends on vacuum source (vacuum pump/vacuum ejector). Supply valve: Self-holding type : N.C. (R type) Supply valve: Self-holding type : N.C. (R type) Note) For complex exhaust type, individual exhaust port is provided to each station Supply valve: Self-holding type : N.C. (R type) Circuit example Circuit example Circuit example Refer to page 24 for the purpose of port and the operating pressure range. D Note) Individual exhaust port Supply valve: N.C. : N.C. (K type) ort exhaust Supply valve: N.C. : N.C. (K type) High-noise reduction silencer exhaust Note) Individual exhaust port Common D Common S Common Common D Common S Common High-noise reduction silencer exhaust 22 Specifications/ Specific roduct recautions Dimensions Exploded iew of Manifold Construction ort Layout Flow Rate Characteristics How to Order