How to Order. 0.5 mmø 0.7 mmø mmø mmø mmø mmø mmø. Maximum vacuum pressure S L. 88 kpa 48 kpa. SUP.

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1 Vacuum Ejector How to Order Note Refer to Table (1) and (2) for the combination available for SUP, VAC and EXH port connection. ZH 07 B S ZH 07 D S Nozzle diameter mmø 0.7 mmø mmø mmø mmø mmø mmø Maximum vacuum pressure S L 88 kpa 48 kpa SUP. port size Note) Symbol Size Style ø6 ø8 ø10 ø Rc 1 8 Rc 1 4 Rc 3 8 EXH. port size Note) Symbol Size Style 06 ø6 08 ø8 10 ø10 ø ø 01 Rc Rc Rc Rc 1 2 VAC. port size Note) Symbol Size Style ø6 ø10 ø ø Rc 1 8 Rc 1 4 Rc 3 8 Rc 1 2 Table (1) Combination of Connection Body type SUP VAC EXH Table (2) Port Size Connection (/) SUP VAC EXH ZH05B ZH07B ZH10B ZH13B ø8/rc 1 8 ø10/rc 1 4 ZH05D ZH07D ZH10D ø8/rc 1 8 ZH13D ø8/rc 1 8 ø10/rc 1 4 ø10/rc 1 4 ZH15D ø10/rc 1 4 ZH18D ø/rc 3 8 ø/rc 3 8 ø/rc 3 8 ZH20D ø/rc 3 8 ø/rc 1 2 ø/rc

2 Vacuum Ejector: Ejector JIS Symbol : Type B Nozzle diameter (mm) ZH05B ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D Construction Seal Cassette Body type : Type D Max. vacuum pressure Maximum suction flow rate Connection (kpa) (l/min (ANR)) (l/min (ANR)) (/) Type S Type L Type S Type L Type S/Type L SUP VAC EXH ø8/rc 1 8 ø10/rc Cover B Body Diffuser Sound absorbing material Cover A Body ported Body Weight (g) ø8/rc 1 8 ø10/rc 1 4 ø8/rc 1 8 ø10/rc ø10/rc ø/rc 3 8 ø/rc 3 8 ø/rc ø/rc ø/rc 1 2 ø/rc Supply pressure: 0.45 MPa. Diffuser Adapter ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Cassette Seal Caution Mounting Make sure that an excessive amount of load or moment is not applied to the ejector body due to pipe connections or installation. Precautions Be sure to read before handling. Refer to pages to for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page for Precautions on every series. Exhaust piping On the ZH B models, keep exhaust ports open on at least one side. Make sure that the back pressure of the exhaust pipe on the ZH D models is MPa or less. (Reference: Using tubing with an applicable diameter, its length must be 0.5 m or less.) (Port indication: P: supply port; V: vacuum port; E: exhaust port.) Matching the ejector to the vacuum circuit Refer to technical data on page to 19 for precautions on the vacuum circuit

3 / ZH05 S The flow characteristics correspond to a supply pressure of 0.45 MPa. ZH05 L Max. vacuum pressure: 48 kpa ZH07 S ZH07 L Max. vacuum pressure: 48 kpa ZH10 S ZH10 L Max. vacuum pressure: 48 kpa ZH13 S ZH13 L Max. vacuum pressure: 48 kpa

4 Vacuum Ejector: / ZH15 S The flow characteristics correspond to a supply pressure of 0.45 MPa. ZH15 L Max. vacuum pressure: 53 kpa ZX ZR ZM ZH18 S ZH18 L Max. vacuum pressure: 53 kpa ZH ZU ZL ZY ZQ ZF ZP ZCU ZH20 S ZH20 L Max. vacuum pressure: 53 kpa AMJ Misc. How to Read Graph Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, a change in vacuum pressure will also be expressed. Normally this relationship is expressed in ejector standard use. In graph, Pmax is max. vacuum pressure and Qmax is max. suction flow. The valves are specified according to catalog use. Changes in vacuum pressure are expressed in the order below. 1. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition P1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0. (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. When ventirative or leaky work must be adsorbed, please note that vacuum pressure will not be high

5 S Box Type : ZH B L - - connection diameter øb diameter øm and screw-in connection diameter øb ZH05BS ZH05BL ZH07BS ZH07BL ZH10BS ZH10BL ZH13BS ZH13BL ZH05BS ZH05BL ZH07BS ZH07BL ZH10BS ZH10BL ZH13BS ZH13BL A 60 øb 6 C 22 D E.8 F G 5 H I J øk L øm øn O P connection ZH05BS ZH05BL ZH07BS ZH07BL ZH10BS ZH10BL ZH13BS ZH13BL ZH05BS ZH05BL ZH07BS ZH07BL ZH10BS ZH10BL ZH13BS ZH13BL A 60 øb 6 C 29.5 D E.8 F G 5 H I J øk L M øn O P Rc Rc Rc Rc Rc Rc Rc Rc ZH05BS A 67.5 B Rc 1 8 C 29.5 D E F G 5 H 47 ZH05BL Rc ZH07BS Rc ZH07BL Rc ZH10BS Rc ZH10BL Rc ZH13BS Rc ZH13BL Rc ZH05BS ZH05BL ZH07BS ZH07BL ZH10BS ZH10BL ZH13BS ZH13BL I J øk L M øn O P Rc Rc Rc Rc Rc Rc Rc Rc

6 Vacuum Ejector: S S Body Ported Type : ZH05D L to ZH15D L connection diameter øe and screw-in connection diameter øe connection diameter øn diameter øj diameter øn A B C D øe F øg H ZH05DS ZH05DL ZH07DS ZH07DL ZH10DS ZH10DL ZH13DS ZH13DL ZH15DS ZH15DL I øj K L M øn O P ZH05DS ZH05DL ZH07DS ZH07DL ZH10DS ZH10DL ZH13DS ZH13DL ZH15DS ZH15DL A B C D øe F øg H ZH05DS ZH05DL ZH07DS ZH07DL ZH10DS ZH10DL ZH13DS ZH13DL ZH15DS ZH15DL I J K L M øn O P ZH05DS Rc ZH05DL Rc ZH07DS Rc ZH07DL Rc ZH10DS Rc ZH10DL Rc ZH13DS Rc ZH13DL Rc ZH15DS Rc ZH15DL Rc ZH05DS A 73.5 B 14.2 C 41.5 D 29.5 E Rc 1 8 F øg 3.2 H ZH05DL Rc ZH07DS Rc ZH07DL Rc ZH10DS Rc ZH10DL Rc ZH13DS Rc ZH13DL Rc ZH15DS Rc ZH15DL Rc ZH05DS ZH05DL ZH07DS ZH07DL ZH10DS ZH10DL ZH13DS ZH13DL ZH15DS ZH15DL I J K L M N O P Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc Rc ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc

7 S S Body Ported Type : ZH18D L - - -, ZH20D L connection diameter øe diameter øn and screw-in connection diameter øe diameter øj diameter øn A B C D øe F øg H ZH18DS ø 15.8 ø ZH18DL ø 15.8 ø ZH20DS ø 15.8 ø ZH20DL ø 15.8 ø ZH18DS--- ZH18DL--- ZH20DS--- ZH20DL--- I øj K L M øn O 15.8 ø ø ø ø ø ø 17.2 ø ø A B C D øe F øg H ZH18DS ø 15.8 ø ZH18DL ø 15.8 ø ZH20DS ø 15.8 ø ZH20DL ø 15.8 ø connection ZH18DS--03- ZH18DL--03- ZH20DS--04- ZH20DL--04- I J K L M øn O 15.8 Rc ø Rc ø Rc ø 17.2 Rc ø A B C D E F øg H ZH18DS Rc ø ZH18DL Rc ø ZH20DS Rc ø ZH20DL Rc ø ZH18DS ZH18DL ZH20DS ZH20DL I J K L M N O 19 Rc Rc Rc Rc Rc Rc Rc Rc

8 Vacuum Ejector: Example of Application Circuit Basic Type (a) Full system (b) 3 port valve selection (c) Switching on the vacuum side (d) Centralized exhaust type Exhaust pipe with enough capability EXH Diagrams (a) to (d) show the combination with peripherals. Caution Handling of application circuits 1. Countermeasures for power outages Select a supply valve for the ejector that is normally open or one that is equipped with a self-holding function. 2. Using a small-diameter picking nozzle For picking electronic parts or small precision parts, if the picking nozzle is approximately ø1 mm in diameter, the vacuum remains high by being restricted by the nozzle. As a result, it will not be possible to verify it with the vacuum switch. In such a case, it is necessary to use an ejector that is suited to the nozzle and to select a vacuum switch with a favorable hysteresis and precision. 3. Considerable leakage from the suction surface If a workpiece is made of porous material or if there is air leakage from the area between the pad and the workpiece, use a nozzle with a large diameter and a large suction flow volume. If the amount of leakage is known based on the effective sectional area of the side with the leakage, the vacuum pressure can be estimated in accordance with the ejector s flow volume characteristics. 4. Suction filter To protect the ejectors and valves from dust, the use of a suction filter (Series ZFA, ZFB) is recommended. 5. Use of a vacuum switch It is recommended that verification be made with a vacuum switch as much as possible. 6. Vacuum release valve To serve as a vacuum release valve, use a 2 port or 3 port valve. As for the performance of the valve, select a valve for a low vacuum. In addition, add a needle valve that can regulate the flow volume of the vacuum releasing air. Use the atmospheric pressure or a positive pressure for the vacuum releasing pressure. ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc