Series ITV. Electro-pneumatic Regulator Electronic Vacuum Regulator F.R.L. AV AU AF AR IR VEX AMR ITV IC VBA VE VY1 G PPA AL

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1 SMC REULATOR Electro-pneumatic Regulator Electronic Vacuum Regulator Series Series Series Model Regulating pressure range Port size With a simplified high-density circuit board design, an extremely compact size has been achieved. 5 9 to. MPa to MPa to.9 MPa to kpa Built-in One-touch fitting Metric size: ø4 Inch size: ø5/ Page 4-8- F.R.L. AV AU AF AR VEX Electro-pneumatic Regulator Series Controls air pressure steplessly in proportion to an electric signal. Series Controls air pressure steplessly in proportion to an electric signal to. MPa 5 to MPa 5 to.9 MPa 5 to. MPa 5 to MPa 5 to.9 MPa /8, /4 /4, / AMR IC VBA VE VY PPA AL Series Controls air pressure steplessly in proportion to an electric signal. 5 to. MPa 5 to MPa /4, /8, / to.9 MPa Electronic Vacuum Regulator Series 9 Controls vacuum pressure steplessly in proportion to an electric signal. 9. to 8 kpa /

2 Compact Electro-pneumatic Regulator Series Compact 5 mm With a simplified high-density circuit board design, an extremely compact size has been achieved. Compact electro-pneumatic regulator Series Lightweight g Realizes space-savings and reduction of weight for manifold use. Stations can easily be increased or decreased due to DIN rail mount design. Cable connectors Straight type and right angle type are available. Straight type Right angle type Built-in One-touch fitting With error indication LED Brackets Flat and L-brackets are available. Model 5 9 Pressure range. MPa MPa.9 MPa kpa Power supply voltage 4 VDC VDC Input signal 4 to ma to ma Output signal Analog output Option Cable connectors Straight type Right angle type to 5 VDC to 5 V Brackets Flat bracket to VDC L-bracket Flat bracket L-bracket Equivalent to IP65 Linearity within ±% (Full span) Hysteresis % (Full span) Repeatability ±% (Full span) High-speed response time.sec (Without load) High stability Stable pressure control is possible even when a metal cylinder is used. W (Electro-pneumatic regulator) Mist separator ( µm or less) (. µm or less) (Precision regulator) Air Filter (5 µm or less) 4-8-

3 ERR ERR ERR Compact Electro-pneumatic Regulator Series For single unit and single unit for manifold Pressure range 5 9 Option. MPa MPa.9 MPa kpa Option How to Order N Power supply voltage 4 VDC ±% to 5 VDC Option Input signal Current type 4 to m A DC Current type to m A DC Voltage type to 5 VDC Voltage type to VDC Built-in One-touch fittings type For single unit Nil Manifold I n Stations stations stations stations U Nil U Symbol Metric size (Light gray) Inch size (Orange) For manifold Symbol Metric size (Light gray) Inch size (Orange) SUP z OUTx (VAC) ø4 ø5/" SUP z OUTx (VAC) ø6 ø/4" ø4 ø5/" Option If a DIN rail longer than the specified stations is required, specify the appli cable stations in two digits. (Maximum stations) Example) I-5-7 Note) A DIN rail with the length specified by the number of stations is attached to the manifold. For dimensions of the DIN rail, refer to the external dimensions. EXH c (ATM) EXH c (ATM) ø6 ø/4" Nil M Cable connector (Option) N S L Without cable connector Straight type m Right angle type m Bracket/ Option for single unit only Nil Without bracket B C Base type Flat Bracket L-bracket For single unit For manifolds How to Order Manifold Assembly (Example) Indicate the part numbers of electro-pneumatic regulators and options to be mounted below the manifold part number. Example) Due to the common supply/exhaust feature, note that different pressure range combinations are not available. I- set (Manifold part no.) -MS sets (Electro-pneumatic regulator part no. (, stations)) -ML set (Electro-pneumatic regulator part no. ( stations)) Indicate part numbers in order starting from the first station on the D side. Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. The asterisk ( ) specifies mounting. Add an asterisk ( ) at the beginning of electro-pneumatic regulator part numbers to be mounted. PWR ERR PWR ERR F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL D side PWR PWR PWR DIN rail -MS -ML 4-8-

4 Series Specifications Model Min. supply pressure Max. supply pressure Regulating pressure range Maximum flow rate. MPa. MPa to. MPa to MPa to.9 MPa.5 l/min(anr) (Supply pressure:. MPa) Set pressure +. MPa 6 l/min(anr) (Supply pressure:.6 MPa) 5 6 l/min(anr) (Supply pressure:.6 MPa) 9 Set pressure kpa kpa to kpa l/min(anr) (Supply pressure: kpa) Option Bracket Flat bracket assembly P98 Voltage Power supply Current consumption Voltage type Input signal Current type Voltage type Input impedance Current type Analog Output signal output Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Operating temperature range Enclosure Connection type Connection size () For single unit Manifold Metric size Inch size Metric size Inch size 4 VDC ±%, to 5 VDC to 5 VDC, to VDC 4 to madc, to madc Approximately kω Approximately 5 Ω Within ±% (Full span) Within % (Full span) Within ±% (Full span) Within.% (Full span) Within ±.% (Full span)/ C to 5 C (With no condensation) IP65 equivalent Built-in One-touch fittings Weight g or less (without options) Note ) Indicates the weight of a single unit. For I-n Total weight (g) Stations (n) x + (Weight of end block A, B assembly) + Weight (g) of DIN rail Note ) Specifications other than the following are optional. Pressure range:. MPa, MPa,.9 MPa, Power supply voltage: 4 VDC, Input signal: to VDC Note ) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions. When using under the conditions equivalent to IP65, connect the fitting or tube to the breathing hole prior to use. (For details, refer to page 4-8- in Specific Product Precautions.) Cable connector Straight type M8-4DSXM4 Power supply voltage 4 VDC type:. A or less Power supply voltage to 5 VDC type:.8 A or less to 5 VDC (Load impedance: kω or more) Output accuracy: Within ±6% (Full span) z, x, c: ø4 z, x, c: ø5/" z, c: ø6, x: ø4 z, c: ø/4", x: ø5/" L-bracket assembly P98 Right angle type ELWIKA-KV448 PVC5 M Tighting torque when assembling is. N m

5 Compact Electro-pneumatic Regulator Series Working Principle When the input signal rises, the air supply soloenoid valve q turns ON. Due to this, part of the supply pressure passes through the air supply solenoid valve q and changes to output pressure. This product pressure feeds back to the control circuit r via the pressure sensor e. Here, pressure corrections continue until output pressure becomes proportional to the input signal, enabling output pressure that is proportional to the input signal. Diagram of working principle Power supply Input signal Power supply and error LED indication r Control circuit Output signal F.R.L. AV AU AF q Air supply solenoid valve w Exhaust solenoid valve AR VEX e Pressure sensor AMR SUP IC VBA EXH OUT VE VY Block diagram Supply pressure PPA AL Input signal + r Control circuit q Air supply solenoid valve w Exhaust solenoid valve Output pressure Discharged to atmosphere e Pressure sensor 4-8-5

6 Series Series Linearity, Hyteresis Output deviation factor (% F.S.) Return Out Repeatability Output deviation factor (% F.S.) 4 Count With 5% of signal input 5 Pressure Characteristics Set pressure: 5 MPa Flow Characteristics Supply pressure:. MPa Output deviation factor (% F.S.) Out Return Supply pressure (MPa). Set pressure (kpa) kpa 8 kpa 6 kpa 4 kpa kpa kpa 4 Series Linearity, Hyteresis Output deviation factor (% F.S.) Return Out Repeatability Output deviation factor (% F.S.) 4 Count With 5% of signal input 5 Pressure Characteristics Output deviation factor (% F.S.) Out Return Set pressure:.5 MPa Supply pressure (MPa). Flow Characteristics Set pressure (kpa) Supply pressure:.6 MPa kpa 4 kpa kpa kpa kpa 5 kpa

7 Compact Electro-pneumatic Regulator Series Series 5 Linearity, Hyteresis Output deviation factor (% F.S.) Pressure Characteristics Output deviation factor (% F.S.) Return Out Out Return Series 9 Linearity, Hyteresis Output deviation factor (% F.S.) Supply pressure (MPa) Return Out Set pressure:.45 MPa. Repeatability Output deviation factor (% F.S.) 4 Flow Characteristics Set pressure (kpa) With 5% of signal input Supply pressure:. MPa 9 9 kpa 8 kpa kpa 6 6 kpa 5 kpa kpa kpa kpa kpa 5 kpa Repeatability Output deviation factor (% F.S.) Count With 5% of signal input 5 F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Count 5 Pressure Characteristics Output deviation factor (% F.S.) Out Return Set pressure: kpa Flow Characteristics Set pressure (kpa) kpa kpa 4 kpa 4 6 kpa 6 8 kpa 8 kpa Supply pressure (kpa)

8 Series Dimensions For Single Unit 4-ø6 -ø6 L-bracket (Option) PWR ERR M8 x Cable connection thread Flat bracket (Option) No. SUP OUT EXH 5 9 VAC ATM Note) When useing under the conditions equivalent to IP65, connect the fitting or tube to the bleed hole prior to use. (For details, refer to page 4-8- in Specific Product Precautions.) Note) Breathing hole (M x ) OUT port (ø4, ø5/") OUTx SUPz VACz EXHc ATMc SUP, VAC port (ø4, ø5/") EXH, ATM port (ø4, ø5/") 9 L-bracket (Option) -M x thread depth.5 Bracket mounting hole 6-ø.5 Flat bracket (Option) ø (.9) 8 Minimium bending radius 8 4 Cable connector (4-wire) Straight type (Option) Cable connector (4-wire) Right angle type (Option) ø. Minimium bending radius PWR ERR Port Location z x c Body Body ø

9 Compact Electro-pneumatic Regulator Series Dimensions Single unit for manifold Note) Breathing hole (M x ) OUT port (ø4, ø5/") OUTx 5 Bushing assembly M8 x Cable connection thread Note) When useing under the conditions equivalent to IP65, connect the fitting or tube to the bleed hole prior to use. (For details, refer to page 4-8- in Specific Product Precautions.) PWR ERR F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Note) For dimensions of the cable connector, refer to single unit on page

10 Series Dimensions Manifold M x thread depth Mounting hole Port Location No. z x c SUP OUT EXH 5 9 VAC ATM Note) Stations are counted starting from the D side PWR ERR PWR L L ERR PWR ERR PWR ERR D side stations U side 9 (8) Dimensions in inch are noted in parentheses SUP, VACzport (ø6, ø/4") EXH, ATMcport (ø6, ø/4") OUTxport (ø4, ø5/").7 Note) For dimensions of the cable connector, refer to single unit on page Manifold stations n L L (mm) Note) Breathing hole (M x ) Note) When using under the conditions equivalent to IP65, connect the fittings or tubing to the bleed hole prior to use. (For details, refer to Specific Product Precautions on page 4-8-.) 4-8-

11 Compact Electro-pneumatic Regulator Series Precautions Be sure to read before handling. Refer to pages 4-- to 4--4 for Safety Instructions and Common Precautions. Caution. Install an air filter near this product on the supply side. Select a filtration degree of 5 µm or less.. Compressed air containing large amounts of drainage can cause malfunction of this product and other pneumatic equipment. As a countermeasure, install an aftercooler, air dryer or Drain Catch, etc.. If large amounts of carbon dust are generated by the compressor, it can accumulate inside this product and cause malfunction. For details on the above compressed air quality, refer to Connect the cable to the connector on the body with the wiring arranged as shown below. Proceed carefully, as incorrect wiring can cause damage. Further, use DC power with sufficient capacity and a low ripple. Terminal no. Lead wire color Wiring Caution : () 4: () : () Wiring diagram : () Current signal type Vs A Power supply 4 Signal COM Monitor Note) Vs : Power supply 4 VDC to 5 VDC A : Input signal 4 to ADC to ADC Monitor output wiring diagram Analog output, voltage type Air Supply Wiring Voltage signal type Vs Vin Vs : Power supply 4 VDC to 5 VDC Vin : Input signal to 5 VDC to VDC Body Note) A right angle type is also available. The entry directions for the right angle type connector is downward (OUT port side). Never turn the connector as it is not designed to turn. If forced, it will damage the connector port. Caution Handling. Do not use a lubricator on the supply side of this product, as this can cause a malfunction. When lubrication of terminal equipment is necessary, connect a lubricator on the output side of this regulator.. If electric power is shut off while pressure is being applied, output pressure will be maintained. However, this output pressure is held only temporarily and is not guaranteed. If exhausting of this pressure is desired, shut off the power after reducing the set pressure, and discharge the air using a residual pressure exhaust valve, etc.. If power supply to this regulator is cut off due to a power failure, etc., when it is in a regulated state, output pressure will be maintained temporarily. Handle carefully when operaing with output pressure released to the atmosphere, as air will continue to flow out until reaching atmospheric pressure. 4. If supply pressure to this regulator is interrupted while the power is still on, the internal solenoid valve will continue to operate and a humming noise may be generated. Since the life of the solenoid valve may be shortened by this, be sure to shut off the power supply when supply pressure is shut off. 5. This product is adjusted for each specification at the time of shipment from the factory. Avoid unnecessary disassembly or removal of parts, as this can lead to a malfunction. 6. The optional cable connector is a 4-wire type. When the monitor output (analog output) is not being used, keep the monitor output wire (black) from touching the other wires as this can cause a malfunction. 7. Use caution that the right angle cable does not rotate and is limited to only one entry direction. 8. Take the following steps to avoid malfunction caused by noise. ) Remove power supply noise during operation by installing a line filter, etc. in the AC power line. ) Install this product and its wiring as far as possible from strong electric fields such as those of motors and power lines, etc. ) Make sure to take protective measures against load surge for an induction load (solenoid valves, relays, etc.). 9. Characteristics are limited only to the static state, and when air is consumed on the output side, pressure may fluctuate.. For details on the handling of this product, refer to the instruction manual included with the product.. In locations where the body is exposed to water, dust, etc., there is a possibility that they can enter into the body throught the breathing hole. Use a fitting/tube (M-AU- fitting and TIU - tube are recommended), extend the piping to the location where there is no water, dust, etc.. When using in an enclosed environment, like an inspection box, etc., make sure to install a fan or other such device to prevent from overheating. F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Monitor output voltage Breathing hole M x 4-8-

12 4-8-

13 Electro-pneumatic Regulator Series // Stepless control of air pressure proportional to an electrical signal /min (ANR) /min type is newly introduced to the series. Oil-free specifications (wetted parts) 5 /min (ANR) 4 /min (ANR) F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Pressure range:.9 MPa, Supply pressure:. MPa Sensitivity: Linearity: Within ( kpa specifications) (F.S.) IP65 Hysteresis: Within (F.S.) 4-8-

14 For details about certified products conforming to international standards, visit us at Electro-pneumatic Regulator // Standard Specifications Straight type JIS Symbol Rated pressure Output pressure (MPa) Right angle type This range is outside 5 MPa of the control (output). raph () Input/output characteristics chart Model Minimum supply pressure Maximum supply pressure Set pressure range Note ) Voltage Power supply Current consumption Input signal Input impedance Note ) Output signal (monitor output) Analog output Switch output Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Output pressure Accuracy display Minimum unit Ambient and fluid temperature Enclosure Weight Note ) Note ) Note ) Note 4) Note 5) Note ) Current type Voltage type Preset input Current type Voltage type Preset input How to Order Set pressure +. MPa. MPa. MPa 5 to. MPa 5 to MPa 5 to.9 MPa 4 VDC ± %, to 5 VDC Power supply voltage 4 VDC type:. A or less Power supply voltage to 5 VDC type:.8 A or less 4 to ma, to ma (Sink type) to 5 VDC, to VDC 4 points 5 Ω or less Approx. 6.5 kω Approx..7 kω to 5 VDC (Load impedance: kω or more) 4 to ma (Sink type) (Load impedance: 5 Ω or less) NPN open collector output: Max. V, ma PNP open collector output: Max. ma Within ±% (full span) Within % (full span) Within ±% (full span) Within.% (full span) Within ±.% (full span)/ C ±% (full span) MPa:, kgf/cm Note 4) :, bar:, PSI:., kpa: to 5 C (with no condensation) IP65 Approx. 5 g (without options) Approx. 5 g (without options) Approx. 645 g (without options) Please refer to raph (), relation to the differences between the set pressure and input. Additionally, refer to page for the set pressure range by units of standard measured pressure. Additionally, refer to page as maximum set pressure differs on unit of standard measure. -wire type 4 to ma is not available. Power supply voltage (4 VDC or to 5 VDC) is required. Select either analog output or switch output. Further, when switch output is selected, select either NPN output or PNP output. The minimum unit for 5 is PSI. The above characteristics are confined to the static state. When air is consumed on the output side, the pressure may fluctuate. Power supply voltage Model 4 VDC to 5 VDC S Q Pressure range 4 5. MPa MPa.9 MPa Input signal Current 4 to ma (Sink type) Current to ma (Sink type) Voltage to 5 VDC Voltage to VDC Preset input Option Monitor output None (for preset input) Analog output to 5V DC Switch output/npn output Switch output/pnp output 4 Analog output 4 to ma (Sink type) Option Thread type Rc N NPT T NPTF F Option Port size 4 Pressure display unit 4 5 Option /8 ( type) /4 (,, type) /8 (, type) / ( type) MPa kgf/cm bar PSI kpa Note ) Cable connector type S Straight type m L Right angle type m N Without cable connector Option Bracket B C Option CE compliance Q CE compliant Please visit our SMC homepage: for the latest details on our CE compliant products. Without bracket Flat bracket L-bracket

15 Electro-pneumatic Regulator Series // Combinations Standard specifications Combination possible Combination not possible models are not applicable. Applicable model rspacer SMC REULATOR Specifications Approx. 89 Approx. 4 Approx. Approx. 7 Accessory (Option)/Part No. L-bracket Cable connector qaf qaf4 Description Flat bracket Straight type m Right angle type m 78 wafm 4 wafm4 Part no. el-bracket REULATOR INI (Mounting thread is not included.) TM-4DSXH4 TM-4DLXH4 P4 (Mounting thread is not included.) Accessories Set pressure max.. MPa Set pressure max. MPa Set pressure max..9 MPa Connection Rc /4 Connection Rc /8 Connection Rc / Bracket Bracket Connection NPT/4 Connection NPT/8 Connection NPT/ Connection /4 Connection /8 Connection / 5 4 B C N N N4 F F F4 Modular Products and Accessory Combinations Applicable products and accessories q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) Dimensions Flat bracket x ø7 models are not applicable. Applicable model AF AF4 AFM AFM4 BL B4L Y Y4 YL Y4L L-bracket x ø4.5 4 x ø x ø4.5 4 x ø5.5 7 Symbol Standard specifications Optional specifications x R.5 F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL 4-8-5

16 Series // Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF. Therefore, supply pressure passes through the air supply solenoid valve q and is applied to the pilot chamber e. The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u. Here, a correct operation functions until the output pressure is proportional to the input signal, making it possible to always obtain output pressure proportional to the input signal. Working Principle Diagram Pressure display Power supply Input signal q Air supply solenoid valve r Diaphragm Pressure display i Control circuit Output signal w Exhaust solenoid valve EXH u Pressure sensor e Pilot chamber t Supply valve Power supply Input signal q Air supply solenoid valve r Diaphragm y Exhaust valve t Supply valve i Control circuit Output signal w Exhaust solenoid valve u Pressure sensor e Pilot chamber EXH EXH SUP OUT SUP OUT EXH, Block diagram Supply pressure Input signal i Control circuit q Air supply solenoid valve r Diaphragm Pilot valve Output pressure w Exhaust solenoid valve u Pressure sensor 4-8-6

17 Series Electro-pneumatic Regulator Series // Linearity Pressure Characteristics Series Linearity Hysteresis Supply pressure (MPa) Set pressure:. Hysteresis. 5 MPa Flow Characteristics. MPa Relief Flow Characteristics Set point.5 5. Out Out Return Return Supply pressure: Repeatability Repeatability Repetition Repetition Supply pressure:. MPa F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Pressure Characteristics.... Supply pressure (MPa) Set pressure: 5 MPa Flow Characteristics. MPa Relief Flow Characteristics Set point..5 5 Supply pressure: Supply pressure:. MPa

18 Series // Series Linearity Hysteresis. Out Return Repeatability Repetition Pressure Characteristics.... Supply pressure (MPa) Set pressure: Set point 5 MPa Flow Characteristics. MPa Relief Flow Characteristics..5 5 Supply pressure: Supply pressure:. MPa

19 Series Electro-pneumatic Regulator Series // Linearity Pressure Characteristics Series Linearity Supply pressure (MPa) Set pressure:. MPa Set point.8 Hysteresis Flow Characteristics Hysteresis Out Return Supply pressure:.7 MPa Out Return Repeatability Repeatability Repetition Relief Flow Characteristics Repetition Supply pressure:.7 MPa 5 5 F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Pressure Characteristics Supply pressure (MPa) Set pressure:. MPa Flow Characteristics.7 MPa Relief Flow Characteristics Set point Supply pressure: Supply pressure:.7 MPa

20 Series // Series Linearity.6 Hysteresis. Repeatability Out Return Repetition Pressure Characteristics Supply pressure (MPa) Set pressure:. MPa Flow Characteristics.7 MPa Relief Flow Characteristics Set point Supply pressure: Supply pressure:.7 MPa

21 Series 5 Electro-pneumatic Regulator Series // Linearity Pressure Characteristics Series 5 Linearity Supply pressure (MPa) Set pressure:.4 MPa Set point Hysteresis Flow Characteristics Hysteresis Supply pressure:. MPa Out Return Out Return Repeatability Repeatability Repetition Relief Flow Characteristics Repetition Supply pressure:. MPa F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Pressure Characteristics. Set point Set pressure: Supply pressure (MPa).4 MPa Flow Characteristics. MPa Relief Flow Characteristics Supply pressure: Supply pressure:. MPa

22 Series // Series 5 Linearity Hysteresis. Out Return Repeatability Repetition Pressure Characteristics. Set point Set pressure: Supply pressure (MPa).4 MPa Flow Characteristics. MPa Relief Flow Characteristics Supply pressure: Supply pressure:. MPa

23 Electro-pneumatic Regulator Series // Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. Cable connector (4-wire) Cable connector (4-wire) Right angle type Straight type 5 4 x ø7 Mounting hole () F.R.L. AV RESET 4 5 SMCE P REULATOR SMC E P REULATOR AU UNLOCK SET LOCK AF AR Setting part 84.5 M x Cable connection threads VEX AMR () SMCE P REULATOR IC MPa VBA M x Solenoid valve EXH INPUT OUTPUT ~VDC 5~MPa MADE IN JAPAN Y 7 Solenoid valve EXH OUT Rc/8 Exhaust port VE VY SUP () OUT () 9.5 EXH () PPA 4 Flat bracket P4 (Optional) x Rc/8, /4 Port size AL 4 x M4 x.7 thread depth 6 mm through Mounting hole L-bracket OUT 5 R () 45 (7) 6 L-bracket INI (Optional) x Rc/8, /4 SUP port, OUT port 4-8-

24 Series // Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 5 4 x ø7 Mounting hole () SMC REULATOR SMC REULATOR RESET UNLOCK SET LOCK M x Cable connection threads () SMC REULATOR M5 x.8 Solenoid valve EXH 9 Solenoid valve EXH Rc/4 Exhaust port OUT SUP () OUT () 9.5 EXH () 6 Flat bracket P4 (Optional) 4 x M5 x.8 thread depth 6 mm through Mounting hole x Rc/4, /8 Port size L-bracket OUT 5 9 R () (7) 6 L-bracket INI (Optional) x Rc/4, /8 SUP port, OUT port

25 Electro-pneumatic Regulator Series // Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn x ø7 Mounting hole Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type () F.R.L. SMC REULATOR SMC REULATOR AV AU UNLOCK RESET SET LOCK AF AR.5 M x Cable connection threads VEX AMR () SMC E PREULATOR IC M5 x.8 Solenoid valve EXH Solenoid valve EXH VBA VE SUP () SUP () L-bracket OUT R OUT Rc/ Exhaust port EXH () VY PPA AL Flat bracket P4 (Optional) x Rc/4, /8, / Port size 6 4 x M5 x.8 thread depth 6 mm through Mounting hole () (7) 6 L-bracket INI (Optional) 6 x Rc/4, /8, / SUP port, OUT port

26 Series // Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications and delivery times. Ozone Resistant Fluoro rubber is used for the rubber parts of seals. 8 Standard model number Ozone resistant 4 Digital Input Type Parallel input type with digital bit. 4 X9 4 X9 4 X9 -X9 Reverse Type In compliance with input, inverse proportional pressure is displayed. X X X Rated pressure Output pressure (MPa) This range is outside of the control (output). 5 MPa -X Reverse type Note ) in part number is the same model no. for the standard products. 5 DeviceNet Compliant It is conforming to DeviceNet Note ) in part number is the same model no. for the standard products. Note ) The pressure is not indicated. Digital input type X8 X8 X8 DeviceNet compliant -X8 Input/output characteristics chart Note ) in part number is the same model no. for the standard products. Note ) Except for preset input type. 6 Points Preset Input Type -X8 Able to control 6-point-pressure by 4 bit switching input 4 X8 4 X8 4 X8 Note ) in part number is the same model no. for the standard products. Note ) Monitor output is switch output type only. 6 points preset type 4-8-6

27 Series // Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications and delivery times. 6 7 High-Speed Response Time Specifications Pressure response with no load is approx.. sec. 4 Manifold Specifications (Except Series ) through 8 station manifold. How to Order Manifold Power supply voltage / Model type type 4 VDC to 5 VDC I 5 Pressure range 5 Monitor output Analog output to 5V DC Switch output/npn output Switch output/pnp output Analog output 4 to ma (Sink type) OUT port size Valve stations stations /4 /8 Connection thread type PT N NPT F PF 8. MPa MPa.9 MPa Input signal Current 4 to ma (Sink type) Current to ma (Sink type) Voltage to 5 VDC Voltage to VDC Thread type N T F 8 stations I-- set ( station manifold base part no.) -S-X6 set (Electro-pneumatic regulator part no.) Note ) P98- set (Blanking plate assembly part no.) 5-S-X6 set (Electro-pneumatic regulator part no.) Note ) The is the symbol for mounting. Add the symbol at the beginning of part numbers for electro-pneumatic regulators, etc. to be mounted on the base. Note) Refer to the table below for possible mixed combination. Model Rc NPT NPTF How to Order Manifold Assembly Example Port size Electro-pneumatic regulator -S-X6 Manifold base ( stations) I-- UNLOCK SMC REULATOR /8 ( type) /4 (, type) /8 ( type) E P MPa SET RESET LOCK S OUT X88 High-speed response time specifications Pressure display unit 4 5 MPa kgf/cm bar PSI kpa Cable connector type S L N Blanking plate assembly P98- E UNLOCK SMC REULATOR P MPa Straight type m Right angle type m Without cable connector Bracket B C SET RESET LOCK Electro-pneumatic regulator 5-S-X6 SUP Stations Note ) Note ) Electro-pneumatic regulators are counted starting from station on the left side with the OUT ports in front. Note ) The port size for mounted electro-pneumatic regulators is Rc/8 (), Rc/4 () only. Note ) When there is a large number of stations, use piping with the largest possible inside diameter for the supply side, such as steel piping. Note 4) The use of the straight type cable connector is recommended. To mount right angle type, be certain to check that no possible interference occurs. Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Without bracket Flat bracket L-bracket -X F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL

28 Series // Specific Product Precautions Be sure to read before handling. Warning Caution Air Supply. Install an air filter near this product on the supply side. Select a filtration degree of 5 µm or less.. Compressed air containing large amounts of drainage can cause malfunction of this product and other pneumatic equipment. As a countermeasure, install an aftercooler, air dryer or Drain Catch, etc.. If large amounts of carbon dust are generated by the compressor, it can accumulate inside this product and cause malfunction. For details on the above compressed air quality, refer to Best Pneumatics Vol. 6. Caution Operating Environment. Employ suitable protective measures in locations where there is contact with water droplets, oil or welding spatter, etc.. Consult SMC when used in power plants, or if instrumentation related. Handling. Do not use a lubricator on the supply side of this product, as this can cause malfunction. When lubrication of terminal equipment is necessary, connect a lubricator on the output side of this equipment.. If electric power is shut off while pressure is being applied, pressure will be retained on the output side. However, this output pressure is held only temporarily and is not guaranteed. If exhausting of this pressure is desired, shut off the power after reducing the set pressure, and discharge the air using a residual pressure exhaust valve, etc.. If power to this product is cut off due to a power failure, etc. when it is in a controlled state, output pressure will be retained temporarily. Handle carefully when operating with output pressure released to the atmosphere, as air will continue to flow out. Caution Handling 4. If supply pressure to this product is interrupted while the power is still on, the internal solenoid valve will continue to operate and a humming noise may be generated. Since the life of the product may be shortened, shut off the power supply also when supply pressure is shut off. 5. In this product, the output side pressure cannot be completely relieved within the range of 5 MPa or less. If it is desired to reduce the pressure completely to MPa, install a way valve or other device on the output side to exhaust the pressure. 6. This product is adjusted for each specification at the time of shipment from the factory. Avoid careless disassembly or removal of parts, as this can lead to malfunction. 7. The optional cable connector is a 4 wire type. When the monitor output (analog output or switch output) is not being used, keep it from touching the other wires as this can cause malfunction. 8. Please note that the right angle cable does not rotate and is limited to only one entry direction. 9. Take the following steps to avoid malfunction due to noise. ) Remove power supply noise during operation by installing a line filter, etc. in the AC power line. ) For avoiding the influence of noise install this product and its wiring as far as possible from strong electric fields such as those of motors and power lines, etc. ) Be sure to implement protective measures against load surge for induction loads (solenoid valves, relays, etc.). 4) Install or remove the connector after shutting off the power supply to avoid the influence of chattering of the power supply.. Due to the large volume of the output side, a loud exhaust noise will be produced when being used for the purpose of a relief function. Therefore, install a silencer (SMC Series AN or AN4) on the exhaust port (EXH port). The port sizes are Rc/8, Rc/4 and Rc/.. Specifications on page is in case of static environment. Pressure may fluctuate when air is consumed at the output side.. For details on the handling of this product, refer to the instruction manual which is included with the product

29 Series // Specific Product Precautions Be sure to read before handling. Caution Connect the cable to the connector on the body with the wiring arranged as shown below. Proceed carefully, as incorrect wiring can cause damage. Further, use DC power with sufficient capacity and a low ripple. 4 Body Note) Current signal type Voltage signal type : () : () 4: () : () Note) A right angle type cable is also available. The entry direction for the right angle type connector is to the left (SUP port side). Never turn the connector as it is not designed to turn. Wiring diagram Current signal type Vs A Power supply Input signal ND (COMMON) Monitor output Vs: Power supply 4 VDC to 5 VDC A : Input signal 4 to madc to madc Voltage signal type Vs Vin RESET Preset input type 4 Power supply Input signal ND (COMMON) Monitor output Vs : Power supply 4 VDC to 5 VDC Vin: Input signal to 5 VDC to VDC Wiring Monitor output wiring diagram Analog output, voltage type Monitor output current Switch output, NPN type Load Switch output, PNP type Load Analog output, current type (sink type) Monitor output current F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Preset input type Vs S When ma DC or more is applied, detecting device for overcurrent starts activating and then emits an error signal. (Error number 5 ) S Vs: Power supply 4 VDC to 5 VDC One of the preset pressures P through P4 is selected by the ON/OFF combination of S and S. S S Preset pressure OFF OFF P ON OFF P OFF ON P ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to MPa. Regulating pressure range, by unit of standard measured pressure Unit MPa kgf/cm bar PSI kpa Set Pressure Range The regulating pressure range, by unit of standard measured pressure, is shown in the table below. Regulating pressure range 5 5 to. 5 to 5 to.9 5 to 5 to 5 5 to 9 5 to 5 to 5 5 to 9.7 to 5.7 to 7.7 to 5 to 5 to 5 5 to

30 Electronic Vacuum Regulator Series 9/9 Stepless control of vacuum pressure in proportion to an electric signal Straight type Piping/Wiring Diagram Input signal (VDC, madc) VAC Vacuum pump, Ejector 9 Right angle type OUT Tank Set pressure (Vacuum) Standard Specifications Model Voltage Power supply Current consumption Minimum supply vacuum pressure () Maximum supply vacuum pressure Regulating pressure range Input signal Input impedance Output signal () (Monitor output) Current type () Voltage type Preset input Current type Voltage type Preset input Analog output Switch output Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Accuracy Output pressure display Units Ambient and fluid temperature Enclosure Weight VDC ±% to 5 VDC Power supply voltage 4 VDC type:. A or less Power supply voltage to 5 VDC type:.8 A or less Set pressure. kpa kpa. to 8 kpa 4 to ma, to ma to 5 VDC, to VDC 4 points 5 Ω or less Approximately 6.5 kω Approximately.7 kω to 5 VDC (Load impedance: kω or more) 4 to ma (Sink type) (Load impedance: 5 Ω or less) NPN open collector output: Max. V, ma PNP open collector output: Max. ma Within ±% (Full span) Within % (Full span) Within ±% (Full span) Within.% (Full span) Within ±.% (Full span)/ C ±% (Full span) kpa (4) Minimum display: to 5 C (With no condensation) IP65 equivalent 5 g Note ) The minimum supply vacuum pressure should be. kpa less than the maximum vacuum pressure setting value. Note ) 4 to ma is not possible with the -wire type. Power supply voltage (4 VDC or to 5 VDC) is required. Note ) Either analog output or switch output must be selected. Furthermore, when switch output is selected, either NPN output or PNP output must also be selected. Use caution that the preset input type is not equipped with an output signal function. Note 4) Please contact SMC regarding indication with other units of pressure. Power supply voltage 4 Option 4 VDC to 5 VDC Input signal Current type 4 to madc Current type to madc Voltage type to 5 VDC Voltage type to VDC Preset input How to Order 9 S 5 Pressure range 9. to 8 kpa 4 Option Monitor output None (For preset input) Analog output to 5 VDC Switch output/npn output Switch output/pnp output Analog output 4 to madc Thread type Nil N T F Option Rc NPT NPTF Pressure display unit 5 kpa Cable connector type Port size /4 S L N Option Option (Bracket) Nil B C Option Straight type m Right angle type m Without cable connector Without bracket Flat bracket L-bracket 4-8-

31 Working Principle Power supply Input signal q Vacuum pressure solenoid valve r Diaphragm VAC (Vacuum pump, etc.) ATM (Atmospheric pressure) Series 9 Pressure display i Control circuit Output signal w Atmospheric pressure solenoid valve Atmospheric pressure u Pressure sensor e Pilot chamber t Vacuum pressure valve OUT. (Set pressure) y Atmospheric pressure valve Working Principle When the input signal increases, the vacuum pressure solenoid valve q turns ON, and the atmospheric pressure solenoid valve w turns OFF. Because of this, VAC and the pilot chamber e are connected, the pressure in the pilot chamber e becomes negative and acts on the top of the diaphragm. As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC and OUT are connected, and the set pressure becomes negative. This negative pressure feeds back to the control circuit i via the pressure sensor u. Then, a correct operation works until a vacuum pressure proportional to the input signal is reached, and a vacuum pressure is obtained which is always proportional to the input signal. Input signal + t Control circuit Block Diagram q Vacuum pressure solenoid valve w Atmospheric pressure solenoid valve u Pressure sensor VAC. r Diaphragm Pilot valve Set pressure F.R.L. AV AU AF AR VEX AMR IC VBA Linearity Hysteresis Repeatability. VE VY Output pressure (kpa) 4 6 Output deviation factor (% F.S.) Return Out Output deviation factor (% F.S.) PPA AL Input signal (% F.S.) Pressure Characteristics Output deviation factor (% F.S.). Set point VAC side pressure (Supply pressure) (kpa) Input signal (% F.S.) Flow Set pressure: kpa Characteristics Supply pressure: kpa Flow characteristics measurement conditions Set pressure (kpa) Flow rate (l /min(anr)) Count Exhaust flow rate of the vacuum pump used for measurement: 5 l/min (ANR) Inlet vacuum pressure: kpa (When outlet flow rate is l/min (ANR)) Maximum flow rate: l/min (ANR) (With inlet vacuum pressure at 9 kpa) 4-8-

32 Dimensions 9 Note) Do not attempt to rotate the cable connector, as it does not turn. Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 5 4-ø7 Mounting hole SMC E PREULATOR SMC E PREULATOR RESET SET UNLOCK LOCK 84.5 M x Cable connection thread (99) () 9 ATM (Atmospheric pressure) SMC E PREULATOR 9 OUT (Set pressure) OUT Rc /4 VAC port VAC (Vacuum pressure).6 6 Flat bracket P4 (Option) 4-M5 x.8 thread depth 6 mm through Mounting hole -Rc /4 ATM port, OUT port OUT 5 9 R () (7) 6 L-bracket INI (Option) -Rc /4 ATM port, OUT port

33 Accessory (Option)/Part No. Description Flat bracket L-bracket Cable Straight type connector Right angle type Caution Part no. P4 INI TM-4DSXH4 TM-4DLXH4 Dimensions Flat bracket 4 - ø ø7 84. Connect the vacuum pump to the port, which is labeled VAC.. Pressure adjustment changes from atmospheric pressure to vacuum pressure when the input signal is increased, and from vacuum pressure to atmospheric pressure when the input signal is decreased.. When adjusting the vacuum pressure, be careful not to block the atmospheric pressure inlet port labeled ATM. 4. Since this product is designed exclusively for use with negative pressure, be careful not to apply positive pressure in error. 5. In cases where the vacuum pump being used has a relatively small capacity, or the piping has a small inside diameter, etc., large variations in the set pressure (the range of pressure variation when changing from no flow to flow state) may appear. In this situation, the vacuum pump or the piping, etc. should be changed. In cases where it is not practical to change the vacuum pump, install a capacity tank (volume depending on the operating conditions) on the VAC side. 6. The vacuum pressure response time after a change in the input signal is influenced by the internal volume on the setting side (including piping). Since the capacity of the vacuum pump also influences the response time, give careful consideration to these points before operation. 7. If the electric power is shut off when in a control state, the pressure on the setting side will go into a holding condition. However, this setting side pressure will be held only temporarily and is not guaranteed. In addition, when atmospheric pressure is desired, shut off the power after reducing the set pressure, and then introduce atmospheric pressure by using a vacuum release valve, etc. 8. If the power for this product is cut off by a power failure, etc. when it is in a controlled state, the setting side pressure will be held temporarily. Further, if operated without sealing the setting side so that atmospheric air is sucked in, handle with care as air will continue to be sucked in Precautions L-bracket Be sure to read before handling. Refer to pages 4-- to 4--4 for Safety Instructions and Common Precautions. Handling 5 5 () (7) R ø If the VAC side pressure to this product is interrupted while the power is still on, the internal solenoid valve will continue to operate and may cause a humming noise. Since this may shorten the life of the product, be sure to shut off the power when the VAC side pressure is shut off.. The setting side pressure cannot be completely released from this product in the range below. kpa. In cases where the pressure needs to be reduced completely to kpa, install a port valve, etc. on the setting side to discharge the residual pressure.. This product is adjusted for each specification at the factory before shipment. Avoid careless disassembly or removal of parts, as this can cause failure.. The optional cable connector is a 4-wire type. When the monitor output (analog output, switch output) is not being used, keep it from touching the other wires, as this can cause malfunction.. Use caution that the right angle cable does not rotate and is limited to only one entry direction. 4. Take the following steps to avoid malfunction due to noise. ) Eliminate power supply noise during operation by installing a line filter, etc. in the AC power line. ) Install this product so that it will not be effected by noise, keeping the product and its wiring away from strong electric field sources such as motors and power lines. ) Make sure to take protective measures against load surge for an induction load (solenoid valves, relays, etc.). 5. Refer to the instruction manual included with the product for details on its handling.. F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL 4-8-

34 Caution Connect the cable to the connector on the body with the wiring arranged as shown below. Proceed carefully, as incorrect wiring can cause damage. Further, use DC power with sufficient capacity and a low ripple. Note) : () : () 4: () : () Precautions Be sure to read before handling. Refer to pages 4-- to 4--4 for Safety Instructions and Common Precautions. Wiring Monitor output wiring diagram Analog output: Voltage type Monitor output voltage Body RESET Current Signal Type Voltage Signal Type 4 Power supply Input signal ND (COMMON) Monitor output Preset Input Type 4 Power supply Input signal ND (COMMON) Input signal Note) A right angle type cable is also available. The entry direction for the right angle type connector is to the left (SUP port side). Never rotate it, since it's not designed to turn. Switch output: NPN type Load Wiring diagram Current signal type Vs A Voltage signal type Vs Vin Switch output: PNP type Load Vs : Power supply 4 VDC to 5 VDC A : Input signal 4 to madc tomadc Preset input type Vs S S Vs : Power supply 4 VDC to 5 VDC Vin: Input signal to 5 VDC to VDC Analog output: Current type Monitor output current Vs : Power supply 4 VDC to 5 VDC One of the preset pressures P through P4 is selected by the ON/OFF combination of S and S. S S Preset pressure OFF OFF P ON OFF P OFF ON P ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to MPa. When madc or more is applied, detecting device for overcurrent starts activating and then emits an error signal. (Error number 5 ) 4-8-4

35 PWR ERR PWR ERR PWR ERR Controller for Electro-pneumatic Regulator Series IC Converts digital input signal into analog output signal bit parallel input signal (maximum) Pressure can be set with = 4 steps. Analog output 4- ma - VDC Digital input data Power supply Series IC External pressure sensor Set pressure Note) Feedback control function is not available. Step Step Step P4 P P P Controller Step 4 Step 5 Time Power is supplied to the controller alone. Electro-pneumatic regulator Series 4 point preset output pressure Applicable in the programming function with up to steps Step F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL PLC Digital signal Controller Analog signal Electro-pneumatic regulator Actuator Controller Analog signal Electro-pneumatic regulator Actuator bit bit. bit Series IC VDC 4 ma Series Series IC VDC 4 ma Series 4 point pressure switch function Switch output is enabled by setting the upper and lower limits of pressure. Pressure Switch output Maximum Minimum OFF ON Power voltage and output signals Output power voltage and output signal to the electro-pneumatic regulator can be set with keys on the front panel. 4 Power supply voltage VDC VDC 4 VDC 4 VDC Output signal 4 to ma to VDC 4 to ma to VDC Power supply for controller Controller Series IC Power supply voltage Output signal Electro-pneumatic regulator Series No need of power supply for Power supply for electro-pneumatic regulator 4-8-5

36 Controller for Electro-pneumatic Regulator Series IC How to Order IC A Pressure range. MPa MPa 5.9 MPa 9 kpa Output specifications NPN open collector output PNP open collector output Sensor Built-in sensor type External sensor type Protective cover (option) Nil B Without With protective cover Display protective cover Mounting Nil Without Panel Mounting Panel mount adapter Option When only optional parts are required, order using the part numbers listed below. A asket A Panel SW round head Phillips screws M x 8 Description Part no. Note Panel mount adapter set P985- asket, Screw pcs. Display protective cover P

37 Controller for Electro-pneumatic Regulator Series IC Specifications Pressure range Proof pressure Fluid Dimensions Power supply Input Power supply output Command output Switch output Switch response Display Display accuracy Note ) Display sampling rate Temperature characteristics Error indication Operating temperature range Storage temperature range Operating humidity range Resistance Vibration resistance Impact resistance Water resistance Sensor type Set value retention Port size Material Weight. MPa 5 kpa MPa.9 MPa. MPa.5 MPa 5 kpa Air/Non-corrosive gas 48 x 48 x to 4 VDC (5 W or more), Ripple (p-p) % or less qno. of inputs: Up to bit input from sequencer (parallel) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 5 msec winput method: 4 point input with keys (Interval time can be set by programming.) VDC (Max. ma) with accuracy of to 4.4 VDC Note ) 4 VDC (Max. ma) with accuracy of. to 6.8 VDC q to VDC (Output resistance: 6.5 kω or more with accuracy of %F.S. or less) w4 to ma (Output resistance: 8 Ω or less with accuracy of %F.S. or less) Output: 4 points Output type: NPN, PNP open collector output Withstand voltage: Max. V Current: Max. ma Internal voltage drop: V or less Switching between N.O. and N.C. modes is possible. 5 to 64 ms Power indication: /-digit LED indicator (red) Output power supply voltage and current signal indication: -digit LED indicator (red) LED lights for RUN, CH, SW (red and green) ±%F.S. ±dig (at 5 C) Approx. 4 times/s ±.%F.S./ C Displayed on pressure indication LED to 5 C to 6 C to 85%R.H. to 55 Hz at whichever is smailer of.5 mm amplitude X, Y, Z directions for hrs. each m/s (approx. ) X, Y, Z direction Only display unit with cover is equivalent to IP65. It is equivalent IP4 without cover. Built-in sensor type, External sensor type Note ) years when deenergized (EEPROM) M5 female (built-in sensor type) Enclosure: POM Display: PC asket: NBR Panel mount adapter: POM Display protective cover: PC Approx. g (Built-in sensor type) Approx. 45g (External sensor type) F.R.L. AV AU AF AR VEX AMR IC VBA VE VY PPA AL Note ) The display accuracy is the accuracy of the LED indication when the sensor port of the built-in sensor type is pressurized. Note ) The external sensor type has the same output power supply voltage specifications. Note ) The sensor for the external sensor type is not attached and must be ordered separately. Any pressure sensor that transmits analog output signals can be connected. Recommended sensor: Series PSE5 (For more information, please refer to SMC catalog CAT.ES-4(A) for Series PSE/5.) 4-8-7

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