Pressure Control Equipment

Transcription

1 Control High-pressure Precision General Purpose Special Fluid/Deionized Water (Pure Water) Detection Control Control (General purpose, high-pressure, precision, vacuum, special fluid, deionized water (pure water)) Characteristics of Control Specifications and Options P. P. 0 P. General Specifications Fluid Ambient and fluid temperature Proof pressure Air 5 to 60 C (No freezing).5 MPa.0 MPa MPa Construction Relieving type Each of the above values represents a typical value of general pressure control equipment, and does not apply to all pressure control equipment. For more details, check the specifications of each pressure control equipment because the values vary depending on the model. Construction Relieving type (Standard) When the outlet pressure exceeds the set value, the excess pressure is discharged to the outside to reduce the pressure to the set value. Non-relieving type Since there is no discharge port, the outlet pressure cannot be decreased if there is no air consumption on the outlet side. In general, air discharge using a solenoid valve on the outlet side is often employed. Bleed type A small amount of air is always discharged by providing a port for continuous air discharge, so that the pressure can be promptly adjusted. 3

2 Control General purpose Classification Features Model Miniature [ characteristics (Supply air pressure characteristics): to 7%] ARJ00F ARJ0/30 range [MPa] 0. to 0.7 ARJ 5 P. 5 AR 5 P. 35 AW 5 P. 365 AWM 5 P. 378 ARP 5 P. 537 (Representative value) Supply air characteristics Maximum flow rate [l /min (ANR)] 00 to 500 Exhaust air characteristics Maximum flow rate [l /min (ANR)] 5 to 60 Piping ( ): Tubing size M5, /8 (ø, ø6) Standard AR0 to 60 0 to 8, to 0 M5,/8 to High-pressure.0 MPa compliant ARX /8,/ Relieving type AR5 to to ,000 to 35, to 380 / to High-flow exhaust type IR 0.0 to 0.7, / to / Compact manifold type ARM5 ARM (ø, ø6, ø8) (ø, ø6, ø8, ø0) Manifold type ARM000 to to,00 0 to 80 /8 to / With air filter Nominal filtration rating for instrumentation 5 µm IW / to 30 to / Nominal filtration rating 5 µm AW0 to 60 0 to, to 0 M5, /8 to Nominal filtration rating 0.3 µm AWM0 to 0 AMR3000 to to to 6, to 0 55 to 50 /8 to / / to Nominal filtration rating 0.0 µm AWD0 to 0 90 to to 0 /8 to / ) The flow rate on the atmospheric release with inlet pressure at 0.7 MPa, set pressure at MPa. ) The exhaust flow rate with set pressure at MPa, outlet pressure at.0 MPa. ) The exhaust flow rate when keeping the set pressure at MPa. Classification Features Direct operated regulator (Relieving type) High-pressure 6.0 MPa compliant Model VCHR30 VCHR0 range [MPa] to 5.0 to 5.0 Supply air characteristics Maximum flow rate [l /min(anr)] 50,000 50,000 Piping G3/, G G, G / )The flow rate on the atmospheric release with inlet pressure at 6.0 MPa, set pressure at 5.0 MPa.

3 ARX 5 P. 65 AR5 to 95 5 P. 6 ARM 5 P. 69 IW 5 Back page Back page 6 AMR 5 P. 65 AWD 5 P. 378 VCHR 5 P. 630 IR 5 P. 59 VEX 5 P. 57 ITV 5 P. 639 IRV 5 P. 563 SRP 5 P. 60 SRH 5 P. 587 SRF 5 P. 609 Precision [ characteristics (Supply air pressure characteristics): % or less] (Representative value) Piping Supply air Exhaust air characteristics characteristics Classification Features Model range Maximum flow rate Maximum flow rate ( ): Tubing size [MPa] [l /min (ANR)] [l /min (ANR)] Electronic Air-operated High-relief nozzle-flapper type Precision direct-operated regulator With built-in pressure sensor High-relief nozzle-flapper type to 0. IR000 to to to 0.8 VEXA33/B33 VEX33 to 933 ARP0 to 0 ITV0000 to 3000 IR0/ to to to to, to 60, to to, to, to 3, to 30,000 5 to 00 6 to 3, to 3,000 /8 to / M5,/8 to /8 to / /8 to / (ø, ø5/3'') / to / Control Detection ) 0.0 to 0. MPa for IR3000. ) The flow rate on the atmospheric release with inlet pressure at 0.7 MPa, set pressure at MPa. ) The exhaust flow rate when keeping the set pressure at MPa. ) The exhaust flow rate with set pressure at 0. MPa, outlet pressure at MPa. 5) This varies depending on each model. Classification Features Model Supply air characteristics range Maximum flow rate [kpa] [l /min (ANR)] Piping ( ): Tubing size Manual IRV000 to to to 50 /8 to / Electronic (Built-in pressure sensor) ITV0090/090.0 to 00 to 30 / (ø, ø5/3'') ) The maximum flow rate varies depending on the conditions. ) This varies depending on each model. Special fluid/deionized water (Pure water) (For pressure controls other than general pneumatics) Classification Features Model (Representative value) range [MPa] Supply air characteristics Maximum flow rate [l /min (ANR)] Piping ( ): Tubing size Manual SRP SRH3000/ to 0. 0 to to 500 M5,/8 /8 to / Air-operated SRF0 to to 0. to 50 (ø/, ø3/8, ø3/) 5

4 Control General purpose Widely used for pressure control in factory lines. AR 5 P. 35 ARJ 5 P. 5 ARX 5 P. 65 IW 5 Back page 6 ARM 5 P. 69 AMR 5 P Back page 6 VHS 5 P. 33 Relieving type Knob Non-relieving type Application example Model: AR, ARJ, ARX, ARM, AMR, IW, 30 adjusting spring Exhaust Diaphragm Knob Relief valve Stem Valve Features When the outlet pressure exceeds the set value, the excess pressure is discharged to the outside to reduce the pressure to the set value. How to use This is used when the load fluctuation of the outlet side is large, when adjusting frequently and filling the container (including a cylinder) of the outlet side, etc. Specifications (representative value) characteristics (Supply air pressure characteristics) Model: AR, ARJ, ARX, ARM, AMR adjusting spring Diaphragm Relief valve Stem Valve Features How to use Specifications (representative value) characteristics (Supply air pressure characteristics).0 MPa MPa to 5% ±0.0 MPa The outlet pressure cannot be decreased if there is no air consumption on the outlet side. This is applicable if the air is always used at the outlet side (e.g., air discharge using a solenoid valve)..0 MPa MPa to 5% ±0.0 MPa High-flow exhaust type Relief port Model: IR Residual pressure exhaust valve 3 port valve for residual pressure exhaust Pilot pressure This pilot type regulator has excellent relief characteristics and its structure maintains a constant pressure even if relief is required. This regulator is remotely controlled. Suitable for pressure control for the balance of air cylinder Piston speed when used as a balancer Cylinder size [mm] Load [kg] Piston speed [mm/sec] 3 35,03 0 5,330 Refer to page for circuits and conditions, etc Specifications /8 Exhaust flow rate: Maximum 600 [l/min (ANR)] Features JIS symbol (A) 3 (P) (R) Model: VHS The outlet pressure can be easily discharged. How to use Features How to use Specifications characteristics (Supply air pressure characteristics) This is a manual switching valve for safety measures to prevent accidents caused by residual pressure..0 MPa 0.0 to 0.7 MPa % ±0.00 MPa Model VHS0 VHS30 Cv factor, EXH. / /8 / / / 3/ VHS0 VHS0-06 / 3/8 / 3/ 3/8 / VHS50 3/..85 / Note) Use an air filter on the inlet side for proper operation. Control Detection 6 7

5 Control High-pressure 6.0 MPa compliant Durable up 6.0 MPa pressure. Model: VCHR Valve spool Working principle Direct-operated type with a piston valve. Valve Application example Manufacturing of PET bottle Medium pressure Piston Spring EXH. Exhaust Filling Maximum 6.0 MPa Specifications 6.0 MPa to 5.0 MPa Air blow and filling/exhaust to a container (blow molding machine etc.) Precision Possible to set within 0.% of the sensitivity full span. Model: IR, ITV, VEX Application example Knob Balance and actuation Accurate balance pressure setting adjusting spring Diaphragm (A) Flapper BLEED Nozzle Diaphragm (B) In case of IR Path A Specifications (representative value) characteristics (Supply air pressure characteristics) Working principle Exhaust Diaphragm (C) Path B Main valve.0 MPa 0.0 to 0.8 MPa (0.005 to 0.9 MPa) % ±0.00 MPa (±0.005 MPa) ( ): In case of electronic type This type has an internal pilot structure that causes the valve to be opened through the diaphragm by the air pressure controlled by a nozzle-flapper mechanism. changes during cylinder actuation are suppressed, balancing the cylinder in both static and dynamic conditions. Contact pressure control Winding roller Drive roller Low friction cylinder is kept steady, responding rapidly to the position change of a piston in the cylinder. 8

6 VCHR 5 P. 630 IR 5 P. 59 ITV 5 P. 639 VEX 5 P. 57 ARP 5 P.537 IRV 5 P. 563 SRP 5 P. 60 SRH 5 P. 587 SRF 5 P.609 Model: IRV, ITV Knob Atmospheric air intake valve Main valve VAC In case of IRV Specifications (representative value) characteristics (Supply air pressure characteristics) Working principle For vacuum settings adjusting spring chamber Diaphragm Atmosphere Feedback path SET 0 kpa.3 to 00 kpa ( to 00 kpa/itv0090,.3 to 80 kpa/itv090) % (%) ±5 kpa (± kpa) ( ): In case of electronic type The compression force of an adjusting spring opens the main valve through a diaphragm, causing the degree of vacuum to rise. At this moment, the pressure of the SET side is led to the vacuum chamber through a feedback path and is set with a balance of the generated force of a spring. Application example Adsorption of workpiece In case of one pressure Solenoid valve IRV pump Tank Air filter Adsorption pad In case of two or more pressures. Solenoid valve IRV pump Tank Workpiece Air filter Adsorption pad Workpiece Control Special fluid/deionized water (Pure water) For pressure controls other than general pneumatics Manual Model: SRP, SRH Knob adjusting spring Application example Feding of chemicals Clean air Precision clean regulator Detection Specifications (representative value) characteristics (Supply air pressure characteristics) Working principle Like the general type, this type has a direct-operated structure that causes the valve to be directly opened by adjusting spring load. Air-operated SRH.0 MPa MPa 6 to 9% 0.05 MPa or less SRP.0 MPa 0.0 to 0.MPa % 0.00 MPa or less Model: SRF Pilot air Diaphragm Stem Valve Valve N blow Wetted parts material Stainless steel, Fluororesin, Fluororubber Diaphragm N gas Super mist separator Working principle Odor removal filter Precision clean regulator Clean gas filter Clean gas filter Fluid Air, N, CO, Ar, Clean air, Deionized water (Pure water), Water Specifications (representative value) characteristics (Supply air pressure characteristics).0 MPa 0.0 to 0. MPa to % ±0.0 MPa This air-operated structure causes the pressure to be controlled by the pressure of the pilot air from outside. A valve is opened and closed reacting the force of pilot pressure. Wetted parts material Fluororesin Fluid N, Deionized water (Pure water) 9

7 Characteristics of Control Shown below is the basic characteristics of pressure control equipment. Use the values as guidelines. For more details, check the catalog of each pressure control equipment. Available set pressure for the inlet pressure Product type General purpose Representative model no. AR With air filter Representative model no. AW Representative model no. IR Precision Electronic Representative model no. ITV Available set pressure for the inlet pressure [MPa] Inlet pressure Inlet pressure Inlet pressure Inlet pressure High-pressure (6.0 MPa compliant) Product type Representative model no. VCHR Available set pressure for the inlet pressure [MPa] Inlet pressure Ambient and fluid temperature Standard spec. 5 Fluid temperature 60 Lowtemperature spec. Hightemperature spec. 30 Ambient temperature Fluid temperature Ambient 5 Fluid temperature temperature Ambient and fluid temperature ( C) 60 Note) The above indicates the temperature specification of a basic regulator for general purposes and a precision basic regulator. The standard temperature specification of an electronic regulator is ranging from 0 to 50 C. 0

8 AR 5 P. 35 AW 5 P. 365 IR 5 P. 59 ITV 5 P. 639 VCHR 5 P Service life The number of service life is based on our test results and no guarantee is assured for everything. Use these values as guidelines. The following table shows the service life of a typical general type, high-pressure type and precision type. General purpose High-pressure Precision Product type (Model: AR) With air filter (Model: AW) (Model: VCHR) (Model: IR) Electronic (Model: ITV) Service life 5 million cycles 5 million cycles 0 million cycles 3 million cycles million cycles Test equipment and condition Shown below are the circuit diagram of service life test equipment of general pressure control equipment and the test condition. They conform to JIS B837: 99. Test equipment Test condition (A) Inlet pressure Outlet pressure Operating frequency 0.63 MPa MPa cycle/sec Testing method While the solenoid valve () on the inlet side is in the ON state, and the solenoid valve (3) on the outlet side is in the OFF state, set the pressure of the regulator () on the inlet side and the outlet side to the test condition value (as given in test condition A). Set the switching time of the solenoid valve to sec for both ON and OFF, so that solenoid valves () and (3) located in front of and behind a regulator () can repeat fullyopening or fully-closing alternatively. Check the regulator periodically for the service life by measuring its leakage and performance, etc. Guideline of service life Phenomenon Cause Reference time of service life Leakage Damage of diaphragm Wearing and cracks of rubber () () (3) The amount of leakage exceeds 0 cm 3 /mm (ANR) per minute. Control Detection Inferior adjustment Damage of spring Biting of foreign materials Neither the flow characteristics value nor the pressure characteristics value satisfy the specifications. AF0-0B Example of manual balancer circuit AM50-0B Prevention of air omission when supply pressure decreases IL0-0 AN00-0 AN IR-0BG VNA0A-5A Operation Set the balance pressure with the rising button. When the load starts moving upward, adjust the load to be stayed in the middle of the stroke by pressing the rising and falling button alternately. Then, the load can be easily moved up and down manually. To remove the load, press the falling button until the hook can be removed. Rising XT3--79 Selected the balance pressure as MPa Cylinder size [mm] Load [kg] Piston speed [mm/sec] 3 35,03 0 5, Falling These loads include those of a piston and a rod. This shows the falling speed. The rising speed is faster than this. Please consult with SMC if you use this actually. Note) A cylinder with fixed throttle is not applicable.

9 Characteristics of Control 5 Selection ) Select the regulator depending on the application. Direct-operated AR0 to 60 ARJ ARX0 ARM5 ARM0 ARM000 to 3000 AW0 to 60 AWM0 to 0 AWD0 to 0 AMR3000 to 6000 IW, 30 0 General purpose Pilot-operated AR5 AR65 AR85 AR95 XT3-53 XT3-07 XT3-0 XT3-83 High-pressure 0.08 MPa Direct-operated VCHR30/0 Direct-operated ARP0 to 0 Precision IR000 IR000 IR3000 VEXA33 VEXB33 VEX33 VEX33 VEX333 VEX533 VEX733 VEX933 Pilot-operated IR0 IR30 IR Regulators Relieving (Standard) Non-relieving Manual Air-operated Non-relieving Bleed Manual Air-operated Electronic When the outlet pressure exceeds the set value, the excess pressure is discharged to the outside in order to reduce the pressure to the set value. Regulators incorporating a pilot mechanism for adjusting the pressure accurately better than a direct-operated regulator. Flow characteristics Generally, the outlet pressure is adjusted with no flow status. When the outlet side is gradually opened after setting the pressure and the flow rate is increased, the set pressure decreases accordingly. The smaller the degree of this pressure reduction, the better the flow characteristic of the regulator. Ideally, a constant pressure should always be maintained even if the flow rate changes. Use the pilot type to suppress fluctuations, even if only slightly. The pressure drop is generally within 0.08 MPa for the set pressure. Regulator s flow characteristics High at flow rate 0 Ideal characteristics Direct-operated type Pilot-operated type Flow rate Large Maximum flow rate Durable up to 6.0 MPa highpressure. A small amount of air is always discharged by providing a port for continuous air discharge, so that the pressure can be promptly adjusted. ITV0000 ITV000 ITV000 ITV3000 High-precision type incorporating a nozzle-flapper mechanism. The air flowing from the nozzle on the side always escapes a little from the bleed hole to the atmosphere, so sensitive pressure adjustment is possible (except an electronic type). Terminological explanation characteristics The regulator has the characteristics that, as the inlet pressure varies, the set pressure varies accordingly. This is called the pressure characteristics, and a general example is given as shown below. Regulator s pressure characteristics High AR 5 P. 35 IW 5 Back page 6 Ideal characteristics Set value First value Inlet pressure High ARJ 5 P Back page 6 Maximum flow rate When the inlet pressure is constantly maintained and the outlet pressure is set to the prescribed value, the air flow rate is represented when the outlet side is released to the atmosphere. The maximum flow rate in this catalog is represented when the inlet pressure is 0.7 MPa and the outlet pressure is MPa. ARX 5 P. 65 AR5 to 95 5 P. 6 ITV 5 P. 639 Internal pilot IRV000 IRV000 IRV3000 ITV0090 ITV090 Special fluid/deionized water (Pure water) Direct-operated Manual Electronic Manual Air-operated Possible to set the vacuum pressure. AR0K SRP SRH3000 SRH000 High-relieving type (Quick exhaust valve) This regulator is used when a rapid discharge is necessary in case the outlet pressure is higher than the set pressure. In general, the pressure control valve has a good relief sensitivity. By enlarging the cross-sectional area of the relief valve, rapid air discharge is obtained. This type of regulator has a rapid discharging function such that the discharge speed is high at the outlet side and is used mainly for adjusting pressure rapidly and Inlet precisely when the outlet pressure such as an air balancer increases. SRF0 SRF30 SRF50 Used for pressure control other than general air pressure and mainly used for semiconductormanufacturing equipment, etc. means the degree of fluctuation of a set value on the repeated actuation at comparatively short intervals. Regulator with back flow mechanism The regulator is equipped with a check valve as a reverse flow mechanism in which the air pressure of the outlet side is discharged precisely and quickly to the inlet side. In general, it is installed between a solenoid valve and an actuator and used for dual-pressure control. Example. Circuit diagram When the pressure in the head side or the rod side of a cylinder is different. ARM 5 P. 69 AW 5 P. 365 AWM,AWD 5 P. 378 VCHR 5 P. 630 ARP 5 P. 537 IR 5 P. 59 IRV 5 P. 563 SRP 5 P. 60 SRF 5 P. 609 Screw for locking knob Bleed port Relief port Outlet Example. When stopping supplying the air and releasing the inlet side air to the atmosphere, the residual pressure of the air in the outlet side can be exhausted surely in the light of safety measure. Circuit diagram ) Select the body size suitable for the operating conditions from the flow rate and flow characteristics. Example) How to read of the AR30 flow characteristics AR MPa pressure drop Outlet pressure [MPa] ,000,500 Flow rate [l/min(anr)] Conditions: Inlet pressure 0.7 MPa Rc 3/8 When the flow rate is,000 l/min (ANR) with the outlet pressure set to 0. MPa, the outlet pressure goes down (pressure drop) to 0.35 MPa due to the flow characteristics. The guideline of pressure drop should be set to less than 0.08 MPa against the set pressure; thus in this case the pressure drop is 0.05 MPa, which is within 0.08 MPa, so 0.35 MPa is within the tolerance. Air-operated type The regulator controls the pressure of a main line by the pressure of pilot air from the outside. When the pilot air is introduced into the top part of the diaphragm, a valve is pushed downward and the inlet pressure is flown out to the outlet side. This pressure acts under the diaphragm, generates an upward force, against the force by the pilot pressure, and controls the opening of the valve. The valve is closed when the pilot pressure force is almost identical to the outlet pressure. This type of regulator enables remote operation, and is used at locations where humans cannot easily access or centralized control is desired. Exhaust Pilot air AMR 5 P. 65 VEX 5 P. 57 SRH 5 P Control Detection

10 Classification Features Model With air filter Built-in pressure gauge Built-in pressure gauge With air filter Air-operated Miniature Standard High-pressure.0 MPa Relieving type Compact manifold type Manifold type Nominal filtration rating for instrumentation 5 µm Nominal filtration rating 5 µm Nominal filtration rating 0.3 µm Nominal filtration rating 0.0 µm Nominal filtration rating 5 µm General purpose Specifications and options Modular High-flow type ARJ00F ARJ0 ARJ30 AR0 AR0(K) AR5(K) AR30(K) AR0(K) AR50(K) AR60(K) ARX0 AR5 AR65 AR85 AR95 IR ARM5 ARM0 ARM0F ARM ARM000 ARM000 ARM500 ARM IW AW0 AW0(K) AW30(K) AW0(K) AW60(K) AWM0 AWM30 AWM0 AMR3000 AMR000 AMR5000 AMR6000 AWD0 AWD30 AWD0 ARG0(K) ARG30(K) ARG0(K) AWG0(K) AWG30(K) AWG0(K) XT3-53 XT3-07 XT3-0 XT3-83 (Representative value) range [MPa] 0. to to to to to to to to to 0.0 to 0.0 to to to to 0.83 Maximum flow rate [l /min(anr)] ,000,700,300 8,00 6,700 8, ,000 6,000 8,000 35,000, ,900, ,700,300 5,00, ,500 3,500 6, ,000,300 8,00,700,300 5,00 6,000 6,000 8,000 35,000 characteristics (Supply air pressure characteristics) [%] ARJ 5 P Back page 6 ( ): Tubing size M5 (ø,ø6) M5, /8 M5, /8 (ø,ø6) M5 /8, / /, 3/8 /,3/8 /, 3/8, /,3/ 3/, /8, / /, 3/8, / 3/, /, / /, 3/8, / (ø, ø6, ø8) (ø, ø6) (ø, ø6) (ø, ø6, ø8, ø0) /8 /8, / /, 3/8 3/8, / / / M5 /8, / /, 3/8 /, 3/8, /, 3/ 3/, /8, / /, 3/8 /, 3/8, / /, 3/8 /, 3/8, / /, 3/ 3/, /8, / /, 3/8 /, 3/8, / /8,/ /,3/8 /, 3/8, / /8, / /, 3/8 /, 3/8, / /, 3/8, / 3/, /, / ) The maximum flow rate depends on the condition. ) Available from 5 C to 00 C. However, available up to 80 C with a pressure gauge mounted on the product. ) Parts made of resin are used. Consult with SMC separately for the temperature range. AR 5 P. 35 ARX 5 P. 65 AR5 to 95 5 P. 6 IR 5 P. 59 ARM 5 P. 69 IW 5 Back page 6 AW 5 P. 365 AWM,AWD 5 P. 378 AMR 5 P. 65 A G 5 P. 39 Piping Option Semi-standard Made to Order Body ported Tubing Modular Manifold connection gauge Bracket Clean room Copper-free, Fluorine-free Nonrelieving Hightemperature ( 5 to 80 C) Lowtemperature ( 30 to 60 C) : Available with a standard model, : This is technically possible, but consult with SMC for dimensions, costs and delivery. : Not available, :Special order 5 Control Detection

11 IR 5 P. 59 VEX 5 P. 57 ARP 5 P. 537 ITV 5 P. 639 VCHR 5 P. 630 Electronic Air-operated Classification Features Model Refer to the electric spec. table on page 8. High-relief nozzle-flapper type Precision directoperated regulator Built-in pressure sensor High-relief nozzle-flapper type Precision Specifications and options IR000 IR000 IR3000 VEXA33 VEXB33 VEX33 VEX33 VEX333 VEX533 VEX733 VEX933 ARP0 ARP30 ARP0 ITV0000 ITV000 ITV000 ITV3000 IR0 IR30 (Representative value) range [MPa] to to to to to to to to to to to to to to 0.8 Maximum flow characteristics rate (Supply air pressure [l/min(anr)] characteristics) [%] 350,000 5, ,00,00 6,300 6,000 9,000 60, ,00,500,000 5, ( ): Tubing size /8 / /, 3/8, / M5, /8 M5, /8 /8, / /8, / /, 3/8, / /, 3/,, / /, /8, / /, 3/8 /, 3/8, / (ø, ø5/3") /8, / /, 3/8 /, 3/8, / / /, 3/8, / Piping Option Semi-standard Made to Order Body ported Base piping Tube piping Modular Manifold connection gauge Bracket Clean room Copper-free, Fluorine-free Nonrelieving Hightemperature ( 5 to 80 C) Lowtemperature ( 30 to 60 C) Control Detection : Available with a standard model, : This is technically possible, but consult with SMC for dimensions, costs and delivery. : Not available ) 0.0 to 0. MPa for IR3000. ) The maximum flow rate depends on the condition. 3) Available from 5 C to 00 C. However, available up to 80 C with the pressure gauge mounted on the product. High-pressure 6.0 MPa compliant Specifications and options Piping Option Semi-standard Made to Order Classification Features Model range [MPa] Maximum flow rate [l/min(anr)] Body ported Base piping Tube piping Modular Manifold connection gauge Bracket Clean room Copper-free, Fluorine-free Nonrelieving Hightemperature Lowtemperature Direct-operated regulator (Relieving type) VCHR30 VCHR0 to ,000 G3/, G G, G / ) The maximum flow rate depends on the condition. : Available with a standard model, : Not available 6 7

12 IRV 5 P. 563 ITV 5 P. 639 SRP 5 P. 60 SRH 5 P. 587 SRF 5 P. 609 Classification Manual Electronic Refer to the electric specifications to the table below. Classification Manual Air-operated Model IRV000 IRV000 IRV3000 ITV0090 ITV090 SRP SRH3000 SRH000 SRF0 SRF30 SRF50 range [kpa].3 to 00.3 to 00.3 to 00.0 to 00.3 to to to to to 0. Maximum flow rate [l /min(anr)] characteristics (Supply air pressure characteristics) [%] 3.. M5, /8 /8, / /, 3/8, / (ø/) (ø3/8) (ø3/) ( ): Tubing size /8 / /, 3/8, / (ø, ø5/3) / (Representative value) Piping Model characteristics Body range [MPa] (Supply air pressure ( ): Tubing size ported characteristics) [%] Electronic type / ITV Electrical specifications Specifications and options Special fluid/deionized water (Pure water) Specifications and options Piping Option Semi-standard Made to Order Body ported Tube piping Manifold gauge Bracket Clean room Nonrelieving Hightemperature ( 5 to 80 C) Lowtemperature ( 30 to 60 C) : Available with a standard model, : This is technically possible, but consult with SMC for dimensions, costs and delivery. : Not available ) The maximum flow rate depends on the condition. ) Available from 5 C to 00 C. However, available up to 80 C with the pressure gauge mounted on the product. Tube piping gauge Option Semi-standard Made to Order Bracket Clean room Nonrelieving Hightemperature ( 5 to 80 C) Lowtemperature ( 30 to 60 C) : Available with a standard model, : This is technically possible, but consult with SMC for dimensions, costs and delivery. : Not available ) This is not compatible with the relieving type. ) Clean room specifications are available as standard. Copper-free, Fluorine-free Copper-free, Fluorine-free Control Detection Model Power supply voltage V DC ±0% to 5 VDC to 0 ma DC 0 to 0 ma DC Analog 0 to 5 VDC 0 to 0 VDC Other voltage and current Input specifications Parallel points preset ( bit) 6 points preset ( bit) 0 bit DeviceNet TM Serial transmission CC-Link RS-3C Others or serial transmission to 5 V DC Output specifications to 0 ma DC (sink) to 0 ma DC (source) NPN output PNP output M8 straight union type 3 m M straight union type 3 m Cable connector M8 right angle type m M right angle type 3 m Shielding cable Special length Reverse type CE marking Positive pressure ITV0000 ITV000 ITV000 ITV3000 ITV0090 ITV090 : Available with a standard model, : Special order, : Not available ) Select either one. Not possible to use them together. Refer to the output specifications of each equipment in detail. ) Prepare a serial transmission cable separately. ) Specifications that reverse the input-output characteristics. 8 9