Compact direct acting precision regulator

Transcription

1 direct acting precision Components preparation and pressure adjustment / unit CONTENTS Product introduction 68 Safety precautions 6 Discrete (RJB5) 6 Block manifold (MNRJB5) 66 Block configurations 6 Technical data 67 Manifold specification sheet 68 nic sensor direct acting precision unit 67

2 nic sensor control starting from achieved with a miniature size. This miniature direct-acting precision realizes a minimum setting pressure of. MPa and sensitivity of. MPa even with compact 5 mm spacing. Resin base providing light weight and high corrosion resistance. Discrete Lightweight, highly corrosion-resistant resin body Grease free push-in joint 5 mm Freely increase and decrease manifolds ( to ). Ideal for semiconductor manufacturing post processes, IT applications, and compact assembly, etc., requiring space saving, precision, and grease-free products High-sensitivity control in low pressure ranges Pressure can be set from. to. MPa for low pressure and from. to.5 MPa for standard pressures. Sensitivity is. MPa for both applications. Highly sensitivity adjustment is realized in low-pressure ranges with a special diaphragm. Setting pressure (MPa).5.. Low Grease-free specifications Standard grease-free specifications are used for fluid passage areas and push-in joints, making this device ideal for applications susceptible to grease. Energy saving A variable constant-bleed mechanism is used. minimum air consumption can be set to match the working pressure. General RB5 Direct acting precise Medium The push-in joint, mounting bracket, and pressure gauge are integrated, saving space and keeping things compact. Improved workability RP Large RP One-touch joints are standard. The piping direction can be selected for straight or elbow. Flow Energy is conserved with a variable constant-bleed mechanism Conventional products Fluid passage section Fluid passage section grease free RJB5 Series RJB5 nic sensor DIN rail type Block manifold type direct acting precision Direct mount Applications Liquid discharge control Low pressure blow Pilot pressure control Tension control Tank direct acting precision unit 68 69

3 MEMO nic sensor 6

4 Pneumatic components Safety precautions Always read this section before starting use. Refer to Intro 67 for general precautions for components. direct operating precision RJB5 Series CAUTION Avoid using this product where strong pulsation of pressure or vibration is applied. Please consult with CKD for frequent operation. Set a 5 μm or smaller air on the primary side of the. Differential pressure between primary and secondary sides is to be. to.7 MPa. Design & Selection Installation & Adjustment Even if primary and secondary pressure differ.7 MPa or less, secondary pressure may vibrate or make noise. In this case, lower primary pressure. If vibration or noise continues, contact CKD. On/Off using the direction switch valve on the s primary side can cause set pressure to change greatly. The direction switch valve should be installed on the s secondary side. When the set output pressure of is exceeded, if damage and malfunction of devices at the secondary side could be caused, always provide a safety device. CAUTION When transporting or installing the product, do not apply impact such as falling, etc, or failure of indicator accuracy may be caused. Do not install the product where it is high temperature or humidity, or may cause a failure. When installing a pressure gauge, screw the gauge into using a wrench on across floats of square section. If another section is used on, air leakage or damage may be caused. When installing a block manifold with DIN rail, fix the DIN rail, while pinching the bracket by end blocks of manifold. Recommended tightening torque of DIN rail bracket is. to. N m. Fix DIN rail bracket, while making no gaps between end blocks. Care must be taken when expanding, maintaining or disassembling blocks. nic sensor When installing or piping, observe following matters. Check the IN arrow showing air inlet before connecting. If connected reversely, malfunction may be caused. Do not move and swing products with gripping adjustment knob. When installing a compact, use M plain washer attached screws, and fix them with tightening torque. to. N m or less. Avoid installation where vibration or impact is applied. Flash the pipe carefully before installation. When assembling a pressure gauge or extending joint to a pressure gauge port, fix the part with tightening torque.5n m or less. direct acting precision unit 6

5 RJB5 Series Installation & Adjustment nic sensor CAUTION When installing the product directly without using DIN rail (direct mount), fix end blocks on both sides with M set screws. Recommended tightening torque is. to. N m. Install the product on fully flat plane.if the sheet plane is small, an external pressure from top may result in damaging manifold connection section. If flat sheet plane is not secured, use DIN rail mount type. When using in parallel as below, out side of circuit must not be closed. If closed circuit is required, install a check valve on each OUT side. When installing to a panel, loosening the mount nut, the nut function as a jack, so the knob is removed easily. Fix the product on a panel with a mount nut. Connecting a, push-in joint is used. Tube coming off or air leakage could occur depending with outer diameter precision, wall thickness or hardness of piping tube. Use CKD specified tube. When mounting or dismounting a joint, press the release ring equally, while not twisting, then pull out the tube. When using a tube once used, cut the section having mark of chuck jaw. Tube Soft nylon F-5 series Urethane U-95 series Urethane NU series O.D. (mm) ø Tolerance of outer diameter (mm) Bore size (mm) ø.5 Min. bending range (mm) ø6 ø8 ø ø6 ø8 ø ø6 ø8 ± ±. ø ø5.7 ø ø ø5 ø.5 ø.5 ø6 8 5 Insert piping tube into push-in joint certainly and check that tube does not dislocate before starting use. For tube used with push in joint, cut the tube to right angle by the dedicating tool. Adjusting constant bleed Constant bleed is adjusted by turning the set screw in the constant bleed port, increasing it in proportion to the set pressure but if set pressure is. MPa or more to decrease it. In low pressure ranges, constant bleed should be increased to improve sensitivity. Constant bleed is set to.5r/min (ANR) before the product is shipped from CKD. Insert a hexagon wrench into the constant bleed port and adjust the rate. After adjustment, confirm that set pressure does not increase. When adjusting constant bleed, do not turn the hexagon wrench fully closed. It will not be possible to adjust pressure and damage could occur. Hexagonal wrench.5mm Pressure adjustment knob Mount nut Bleed port Bleed plug Push-in joint Release ring 6

6 RJB5 Series During Use & Maintenance CAUTION Working air quality Use clean compressed air ed with 5 μm of air. Do not use the product with other than compressed air. containing corrosive gas, liquid and chemical may result in pressure adjustment failure, damage to body or rubber swelling. Working environment Avoid using the products in following environment. When ambient temperature exceeds range of 5 to 6 C. Where water drip and cutting lubricant contact to the product. Where it is humid, temperature fluctuates and dew condensates. Where splash of salt air or sea water contacts to the product. If there is atmosphere of corrosive gas and liquid and chemical material. Where the product is exposed to direct sun lay. Pressure management Confirm primary pressure before setting. Pressure higher than the primary pressure can not be set. If pressure adjustment knob is rotated clockwise, the secondary pressure increases, while counterclockwise, the pressure decreases. When adjusting pressure pull up the knob to check that lock is not applied. Pressure is set in the depressurizing direction (high pressure low pressure), so a highly precise setting can be made. Lock the pressure adjustment knob after setting pressure. constantly leaks from the breed hole. This is necessary for precise pressure control, so do not plug the hole. When setting pressure, turn the secondary direction switch valve several times and confirm set pressure. Failure to confirm pressure could cause set pressure to change greatly. nic sensor direct acting precision unit 6

7 direct operating precision RJB5 Series Grease free specification, compact, space saving type. Port size: Push-in joint ø, ø6 JIS symbol nic sensor 6 Specifications Descriptions Working fluid Max. working pressure MPa Withstanding pressure MPa Ambient temperature range C Set pressure range MPa Sensitivity MPa consumption /min. Port size IN-OUT GAUGE Product weight g RJB5 Compressed air..5 5 to 6. to.5 (. to.) (Note ). (lock sensitivity.) (Note ).5 (Note ) Push-in joint: ø, ø6 Rc/8 9 Note : Values in parentheses are for low pressure. Note : Set pressure sensitivity for the pressure adjustment knob block's minimum spacing. Note : Value for secondary side setting pressure. MPa. Flow characteristics RJB5-**C Primary pressure.7mpa.5 Secondary pressure (MPa) RJB5-**C6 Pressure characteristics RJB5-**C-L RJB5-**C6-L Relief characteristics Secondary pressure (MPa) How to order 6 8 flow rate ( /min. ANR) Primary pressure.5mpa 6 8 flow rate ( /min. ANR) RJB5 Model no. SSC Note on model no. selection Note : A to. MPa pressure gauge is assembled. Note : A to. MPa pressure gauge is assembled. Note : For panel installation, indicate option symbol "P". A Secondary pressure (MPa) Secondary pressure (MPa) P Connection B Option Primary pressure.7mpa 6 8 flow rate ( /min. ANR) Primary pressure.5mpa 6 8 flow rate ( /min. ANR) Symbol A Connection IN S L OUT S L Port size C C6 B Option Panel Blank mount P Pressure Blank range L Pressure Blank gauge T Direction Secondary pressure (MPa) Back pressure (MPa) Secondary usage rate /min. Set point..5.6 Primary pressure (MPa) Primary pressure.5mpa, secondary pressure.mpa Straight Elbow Straight Elbow ø ø6 Relief ( /min. ANR) Descriptions.7 Without nut With nut. to.5 MPa Note. to. MPa Note With pressure gauge Without pressure gauge (gauge port Rc/8)

8 Internal structure and parts list Dimensions RJB5 straight piping RJB5 elbow piping Note : A mounting nut is optional. Nut is attached only for option symbol "P". 9 5 At adjusting pressure.8 5 At adjusting pressure.8 [5] ø 5 ø ø.5 ø.5 Note Mounting nut (Only for option symbol "P") Hexagon head width across flats Mounting nut (Only for option symbol "P") 5 9 [] Dimensions shown in parentheses are for push-in joint ø No. Parts name Material ø7 Knob Guard Diaphragm assembly Valve guide assembly O ring Valve O ring Spring Body Mounting nut Bleeding plug Hexagon socket head set screw O ring Piping block assembly Body packing seal Packing seal Stop pin Cartridge joint Gauge plug Pressure gauge Max. (57) IN-OUT port size push-in joint ø, ø6 7.5 RJB5 Series Internal structure / Dimensions Polyacetal resin Polyamide resin Polyacetal resin, nitrile rubber, cloroplane rubber Polyacetal resin, brass, stainless steel Fluoro rubber Stainless steel Fluoro rubber Stainless steel Polyamide resin Polyacetal resin Polyamide resin Stainless steel Nitrile rubber Polyamide resin, steel Hydrogen nitrile rubber Nitrile rubber Stainless steel Polyamide resin Panel installation hole ø9 5 [6.5] Dimensions shown in parentheses are for push-in joint ø6. ø7 Max. (57) IN-OUT port size push-in joint ø, ø Panel installation hole ø nic sensor direct acting precision unit

9 Block manifold compact direct operating precision MNRJB5 Series Mix manifold of RJB5/RB5 Series Port size: Push-in joint ø, ø6, ø8 nic sensor JIS symbol Common supply type IN OUT OUT Flow characteristics MNRJB5A-**C6 MNRJB5B-**C Secondary pressure (MPa) MNRJB5A-**C6-L MNRJB5B-**C-L Secondary pressure (MPa) Individual supply type 6 8 flow rate ( /min. ANR) IN IN Primary pressure.7mpa 6 8 flow rate ( /min. ANR) Primary pressure.5mpa OUT OUT Specifications Descriptions Working fluid Max. working pressure MPa Withstanding pressure MPa Ambient temperature range C Set pressure range MPa Sensitivity MPa consumption /min. IN Port size OUT GAUGE MNRJB5A-**C86 MNRJB5B-**C6 Secondary pressure (MPa) MNRJB5A MNRJB5B Compressed air.8. 5 to 6. to.5 (. to.) (Note ). (lock sensitivity.) (Note ).5 (Note ) Push-in joint ø6, ø8 Push-in joint ø, ø6 Push-in joint: ø, ø6 Rc/8 Note : Values in parentheses are for low pressure. Note : Set pressure sensitivity for the pressure adjustment knob block's minimum spacing. Note : Value for secondary side setting pressure. MPa Primary pressure.7mpa 6 8 flow rate ( /min. ANR) MNRJB5A-**C86-L MNRJB5B-**C6-L Secondary pressure (MPa) Primary pressure.5mpa 6 8 flow rate ( /min. ANR) Pressure characteristics Secondary pressure (MPa)...9. Secondary usage rate /min. Set point..5.6 Primary pressure (MPa) Relief characteristics Back pressure (MPa) Primary pressure.5mpa, secondary pressure.mpa Relief ( /min. ANR).7 Note : With common exhaust, primary pressure is insufficient when using multiple manifolds simultaneously. So, install air supply block per three stations. Use an air supply port larger than OUT port size. 66

10 MNRJB5 Series How to order How to order MNRJB5A SSC6 5 L D A Model no. Note B type C Port size Note on model no. selection D Station number Note E Option Note Note : supply block is to be station. When using three or more stations simultaneously with the common supply, increase one supply block station for every three stations. In this case, indicate specifications in the mix manifold specification sheet. Note : Maximum installation number of direct mount type is 5 stations. Note : Same options and pressure gauge apply for each block. Note : A to. MPa pressure gauge is assembled. Note 5: A to. MPa pressure gauge is assembled. Note 6: When other than basic model specifications, issue the mix manifold specification sheet on page 69. F Installation method Symbol A Model no. MNRJB5A MNRJB5B B type IN direction S L OUT direction S L C D E F Port size IN-OUT C6 C66 C8 C86 C C6 Station number station to to stations Option Pressure range Pressure gauge Flow direction Installation method Blank DIN rail installation D Direct mount Descriptions Common supply type Individual supply type Straight Elbow Straight Elbow IN; ø6, OUT; ø IN; ø6, OUT; ø6 IN; ø8, OUT; ø IN; ø8, OUT; ø6 IN / OUT; ø IN / OUT; ø6 Blank. to.5 MPa Note L. to. MPa Note 5 Blank With pressure gauge T Without pressure gauge (gauge port Rc/8) Blank Standard flow (left right) X Reverse flow (right left) MNRJB5A MNRJB5B MNRJB5A MNRJB5B nic sensor direct acting precision block manifold unit 67

11 MNRJB5 Series Dimensions Common supply type DIN rail mount type MNRJB5A-**C**-* L.5 6 L-.5 L=(8n) (69) supplying port size push-in joint ø6, ø ø OUT port size push-in joint ø, ø Station number L dimension nic sensor Common supply type direct mount type MNRJB5A-**C**-*-D L=(8n)+8 n: number of blocks (6.5) 87.5 ø7 supplying port size push-in joint ø6, ø8 OUT port size push-in joint ø, ø L

12 Dimensions Individual supply type DIN rail mount type MNRJB5B-**C*-* Individual supply type direct mount type MNRJB5B-**C*-*-D ø7 9 L-.5.5 L=(8n)+6 n: number of blocks L L=(8n)+8 n: number of blocks L IN port size push-in joint ø, ø6 OUT port size push-in joint ø, ø (69) 5.5 (6.5) MNRJB5 Series Dimensions 7 7 Station number L dimension nic sensor 5D P 5D P 6 ø7 9 IN port size push-in joint ø, ø6 OUT port size push-in joint ø, ø6 9 direct acting precision block manifold unit 69

13 MNRJB5 Series Pressure switch / push-in joint elbow type dimensions supply block with pressure gauge NRB5-APS-*C* Pressure switch APS is integrated into air supply block to control primary pressure. 6 supply block Push-in joint elbow type NRB5-NP-LC* Front or rear piping is enabled with air supply port with elbow joint (5.5) 8 () Dimension in ( ) is for C8 Regulator block Push-in joint elbow type NRJB5*-**C* Front or rear piping is enabled with IN and OUT ports with elbow joint. nic sensor 7(8) (6) Individual supply type IN port () Dimension in ( ) is for C6 6

14 MEMO nic sensor direct acting precision block manifold unit 6

15 MNRJB5 Series Regulator block How to order NRJB5B SSC L nic sensor A Model no. Note on model no. selection Note : For common supply, IN port connection type is not required. Note : A to. MPa pressure gauge is assembled. Note : A to. MPa pressure gauge is assembled. Common supply straight type Downward piping in enabled with OUT port with straight joint. B Connection C Option Common supply elbow type Front or rear piping is enabled with OUT port with elbow joint. Symbol Descriptions A Model no. NRJB5A Common supply type NRJB5B Individual supply type B Connection Note S Straight IN L Elbow S Straight OUT L Elbow IN- C ø OUT C6 ø6 C Option Pressure Blank. to.5mpa Note range L. to.mpa Note Pressure Blank With pressure gauge gauge T Without pressure gauge (gauge port Rc/8) Port size Direction Individual supply straight type Front or rear piping is enables with IN and OUT ports with straight joint. Individual supply elbow type Front or rear piping is enabled with IN and OUT ports with elbow joint. 6

16 How to order Sub base NRJB5B NS A Model no. Note on model no. selection SSC Note : For common supply, IN port connection type is not required. B MP Connection C Option MNRJB5 Series Block configurations Symbol Descriptions A Model no. NRJB5A Common supply NRJB5B Individual supply B Connection Note S Straight IN L Elbow S Straight OUT L Elbow IN- C ø OUT C6 ø6 C Option Blank Without masking MP Note With masking Port size Direction Common supply straight type OUT port with straight joint Regulator body How to order Note on model no. selection Note : A to. MPa pressure gauge is assembled. Note : A to. MPa pressure gauge is assembled. Regulator body RJB5 S L Common supply elbow type OUT port with elbow joint A Connection B Option Individual supply straight type IN, OUT ports with straight joint Individual supply elbow type IN, OUT ports with elbow joint Symbol Descriptions A Connection S M Discrete (RJB5) Manifold (MNRJB5A.B) B Option Panel mount Pressure range Blank P Blank L Without nut With nut. to.5 MPa. to. MPa Note Note Pressure gauge Blank T With pressure gauge Without pressure gauge (gauge port Rc/8) nic sensor direct acting precision block manifold unit 6

17 Q MNRJB5 Series nic sensor Common supply block How to order NRJB5 NP SC6 Straight type supply port with straight joint A Connection Elbow type supply port with elbow joint Common supply block with pressure switch How to order NRB5 APS Note Straight type supply port with straight joint SC6 A Connection Note on model no. selection B Lead wire length Note : Grease is applied to the APS before assembly. This part is not compatible with grease-free specifications. Symbol A Connection S Straight L Elbow C6 ø6 C8 ø8 Direction Port size Elbow type supply port with elbow joint Symbol A Connection S Straight L Elbow C6 ø6 C8 ø8 B Lead wire length Blank m m 5 5m Direction Port size Descriptions Descriptions 6

18 End block How to order NRJB5 NE D A Connection Symbol Descriptions A Connection Blank End block R for DIN rail (right) L End block L for DIN rail (left) D Direct end block R DL Direct end block L MNRJB5 Series Block configurations End block R for DIN rail End block L for DIN rail Direct end block R Direct end block L End blocks R and L are required for manifold configuration. For DIN rail, use end blocks R and L with DIN rail bracket. DIN rail How to order NRB5 BAA 5 A DIN rail dimension Note Note on model no. selection Note : Refer to "How to fill out mix manifold specifications" and DIN rail length and manifold dimension for determin.ing DIN dimension, and indicate the dimension on the sheet with mm unit. How to order NRJB5 Push-in cartridge joint ( block) JOINT CL A Type Symbol Descriptions A DIN rail dimension 5 5mm 5 5mm Symbol A Type C C6 CL CL6 CLL CLL6 DIN rail Straight ø Straight ø6 Elbow ø (discrete) Elbow ø6 (discrete) Long elbow ø (manifold) Long elbow ø6 (manifold) Descriptions nic sensor direct acting precision block manifold unit 65

19 MNRJB5 Series Cartridge joint (common air supply block) How to order NRJB5 Q JOINT L6 Pressure gauge How to order G9D 6 P A A Type A A Pressure display Symbol Type 6 Straight ø6 8 Straight ø8 L6 Elbow ø6 L8 Elbow ø8 Symbol Pressure display P to. MPa P to. MPa Descriptions Descriptions Dimensions G9D Width R/8 nic M5 sensor ø How to order Blanking plug GWP B Dimensions L A Connection A Symbol Descriptions Connection ø 6 ø6 8 ø8 ø6 Note on model no. selection Note : Sales unit is pieces per unit. Model no. GWP -B GWP 6-B GWP 8-B port size ø 6 8 L d

20 MNRJB5 Series Technical data CAUTION Disassembling and assembling the block manifold, and replacing the cartridge joint To change the block when the body or block specifications change or when life has been reached, or when adding an air supply block, use the following procedures to expand, disassemble, and assemble parts. Refer to the separate instruction manual for details. Stop the air pressure source supply and release residual pressure before starting disassembly work. After assembling parts, confirm that the lock pin is accurately inserted in the coupling groove between blocks before use. When using DIN rail installing, confirm that the DIN rail bracket is securely fixed ontothe end block with no gaps. When directly installing without a DIN rail, check that the end block is fixed with screw before starting use. could leak between blocks if the end block is not securely fixed. Replacing the block and air supply block () When using the DIN rail installing, loosen the DIN rail bracket set screw. When directly installing without a DIN rail, remove the end block fixing screw. End block DIN rail bracket End block () Using a tip thin screwdriver, pull out the manifold lock pin coupling the block and air supply block to be replaced. Manifold lock pin () Slide the block toward the end block, and make an approximately mm opening at both ends of the block to be replaced. When installed directly, pull out blocks on both sides. mm clearance () Remove the pressure gauge up by pulling it up and toward the pressure adjustment knob. When DIN rail brackets on both sides are slid mm or more from the end block, the entire manifold block can be removed. (5) Replace with a new block. (6) Check that there is no gap between blocks, and then insert the manifold lock pin until it contacts the bottom of the groove. (7) Refer to the safety precautions and installation methods, and fix the manifold block. Increasing the and air supply block rows () If blocks may be increased, order the DIN rail with a length providing for the increase. If the DIN rail is too short when blocks are increased, replace with a DIN rail that accommodates the increase. () When installing with DIN rails, fix DIN rail brackets. When directly installing without a DIN rail, fix the end block. Replacing the cartridge joint Replacing the compact () Loosen the screw on the body, and disassemble the piping block. () Using a minus screwdriver, etc., remove the lock pin inserted onto the top of the sub base. Replace the cartridge joint. Confirm that there is no dirt, etc., on the joint's O-ring, and then assemble it in the original position. Tighten the body tightening screw with a torque of.5 to.8 N m. Stop pin Stop pin Replacing the block manifold () Disassemble the block following the block and air supply block replacement procedures. () To replace the block's cartridge joint, loosen the screw on the body, and disassemble the sub base. Using a minus screwdriver, etc., remove the lock pin inserted onto the top of the sub-base. Replace the cartridge. Confirm that there is no dirt, etc., on the joint's O-ring, and then assemble it in the original position. Tighten the body tightening screw with a torque of.5 to.8 N m. Regulator Sub-base To replace the air supply block cartridge joint, remove the lock pin inserted on the air supply block side with a minus driver, etc. Then, replace the cartridge joint. Stop pin () Check that the cartridge joint is fixed with the lock pin and will not move. 67 nic sensor direct acting precision block manifold unit

21 MNRJB5 Series nic sensor Mix manifold model No. How to fill out mix manifold specifications A mixed manifold consisting of the compact direct acting precision type (RJB5 Series) and general-purpose type (RB5 Series) is available. Refer to page 6 to 66 for model No. per component. DIN rail length and manifold dimensions Manifold length L: Refer to the table on the right. L=(8n)+(m)+8 n: Regulator block number m: supply block number.5 supply block End block L 5.5 MNRB5A Note on model no. selection Note : Station number of direct mount block is tobe within 6 blocks including regular and air supply blocks. However, a regular block is to be 5 stations or less. Note : Grease-free specifications are not available when the NRB5* and common exhaust block with APS are used. Grease is applied before these are assembled. Note : Consult with CKD if the common supply and the individual supply types are combined. Installation position No. 6 A Model no. End block L Common air supply block Common air supply block with APS Regulator block Sub-base with masking End block R DIN rail Configurations m MX L L+8 L L-: fixing hole pitch 8n Regulator block 5 6 B L-.5: DIN rail fixing hole pitch number of blocks C Installation method Serial number of all blocks Symbol Descriptions A Model no. MNRJB5A Common supply type (only compact direct acting precision selected) MNRB5A Common supply type (compact direct acting precision, general mixed) MNRJB5B Individual supply type (only compact direct acting precision selected) MNRB5B Individual supply type (compact direct acting precision, general mixed) B Number of blocks station stations C Installation method Blank DIN rail D Note Direct mount End block R Common supply type Manifold L dimensions Station number Installation position Model no N RB 5-NE N RB 5-NP- NRB5-APS- SC6 - N RB 5 A - SC6 - N RJB 5 A - SC6 - N N N N N N N 5 -NS- -MP N RB 5-NE L = 75 mm Accessories GWP-B Piece GWP8-B Piece Blanking plug GWP6-B Piece Dimension of m = Dimension of m = Dimension of m = Individual supply type Manifold L dimensions Station number L dimension Quantity 68 8

22 MNRJB5 mix manifold specifications Contact Slip No. Quantity Set Delivery / Mix manifold model No. A MX Model no. Note on model no. selection Mix manifold specifications Issue date / / Your company name Contact Order No. Symbol Descriptions A Model no. MNRJB5A Common supply type (only compact direct acting precision selected) MNRB5A Common supply type (compact direct acting precision, general mixed) MNRJB5B Individual supply type (only compact direct acting precision selected) MNRB5B Individual supply type (compact direct acting precision, general mixed) B Number of blocks station stations Note : Station number of direct mount block is tobe within 6 blocks including regular and air supply blocks. However, a regular block is to be 5 stations or less. Note : Grease-free specifications are not available when the NRB5* and common exhaust block with APS are used. Grease is applied before these are assembled. Note : Consult with CKD if the common supply and the individual supply types are combined. Configurations End block L Common air supply block Common air supply block with APS Regulator block N N B Number of blocks Model no. 5-NE 5-NP- NRB5-APS- - C Installation method N N N N N N N C Installation method Blank DIN rail D Note Direct mount Installation position MNRJB5 Series Manifold specifications Quantity nic sensor N Sub-base with masking N 5 - NS- -MP End block R DIN rail Note N L = 5-NE mm Note : Select the DIN rail L dimensions from the L dimensions given on page 68. Accessories Blanking plug GWP-B GWP6-B Piece GWP8-B Piece Piece direct acting precision block manifold unit 69

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24 Precision Components preparation and pressure adjustment / unit Overview Superior performance in extremely low pressure and low pressure area, compact size, and this is also optimum for tension control and balancer etc. due to stabilized flow characteristics with small pressure drop. Modular design and separate type are selected per applications. Features () High precision pressure control () Stable flow characteristics with small pressure drop () Modular design Product introduction 6 Safety precautions 6 RP 66 RP 65 Applications 65 Separate type CONTENTS Precision () 656 nic sensor Precision unit 6

25 nic sensor Outstanding performance in extremely low pressure and low pressure ranges from. to. MPa. Realizing high performance, energy saving, and compact size. Realize precise pressure control in a pressure range of. to.m Pa. Pilot pressure control with a nozzle flapper enables highly precise, stable precise pressure control in a setting pressure range between. to. Mpa. Control performance is especially outstanding in extremely low to low pressure ranges between. and. MPa. The relief flow is high even with the *mm compact size. This energy saving type also has low air consumption. Precision High precision pressure control Pressure control within.5% of repeatability full scale and within.% of the sensitivity full scale is possible. Set extremely low pressures A pressure as low as.mpa can be set (RP-8-). High relief flow Energy saving with small air consumption Pressure control Extremely smooth pressure setting Secondary pressure and light weight design incorporates aluminum. Connect with the C Series and oil mist. mm, light weight 5g Modular type Highly reliable material for moving sections Ozone resistant material is used as a standard for the moving section's rubber material to prevent deterioration. Stable flow characteristics with small pressure drop Primary pressure.5mpa flow rate m /min. (ANR) Cylinder Pressure setting: Max..85MPa Long-life, high flow perfect for balancer applications. Realizing high performance, long service, and high exhaust flow. Realize precise pressure control in a pressure range of. to.85mpa. The RP Series incorporates pilot pressure control using a nozzle flapper similar to the Series. However, this *5mm compact high exhaust flow has high relief. Low sliding packing is used for moving parts, extending parts life. This type has outstanding durability and sufficient supply/discharge at optimum high frequency and high response required for devices such as balancers. High precision pressure control Pressure control within.5% of repeatability full scale and within.% of the sensitivity full scale is possible. aluminum body with high flow. Foreign matter entry prevention A mesh is installed as a standard on the IN side. Modular type Connect with the C and C Series and oil mist. Long service life Low sliding packing is adapted for moving sections, and strong grease is used for dry air. Stable flow characteristics with small pressure drop Balancer RP/ Series Cylinder bore size and corresponding speed (guide) nic sensor Nongrease specification fluid passage section High relief flow Precision unit High performance, energy saving, compact High performance, long service life, and high exhaust flow 6 6

26 nic sensor Pneumatic components ( unit precision type) Safety precautions Always read this section before starting use. Refer to Intro 67 for general precautions. Precision RP/ Series WARNING Use this product in accordance with the specifications range. Working fluid must be clean air from which solids, water and oil have been sufficiently removed using a dryer, and oil mist. Never supply oiled air. When secondary pressure, etc., is turned off, air on the secondary side will pass through the and be discharges from the EXH port. Thus, if secondary piping or inside of the load side is dirty, performance is adversely affected so characteristics will deteriorate. Keep the inside of pipes clean. CAUTION dryer Filter Oil mist Design & Selection Installation & Adjustment CAUTION Keep the pressure difference between the primary and secondary sides to. MPa and over. Note that, for RP-8-, if the set pressure is. MPa and over, keep the pressure difference at. MPa and over. (Precautions for RP) When using under conditioned with a small pressure difference between the primary and secondary sides, the secondary pressure could pulsate. In this case, decrease the pressure setting (high pressure low pressure). Another method is to set the primary pressure to an extremely high level or to somewhat lower the setting pressure, and restrict the secondary side line. Consult with CKD if the pulsation still does not cease. When using with low friction cylinder having constant leak, secondary pressure may pulsate depending on working conditions. In this case, restrict the secondary side line and decrease the pressure setting (high pressure low pressure) to attenuate pulsation. Consult with CKD if the pulsation still does not cease. (Precautions for RP) If the pressure difference between primary and secondary sides is large and secondary side piping is large, secondary pressure could pulse during low flow. In this case, set the primary side to the secondary side pressure +. to. MPa or restrict the secondary side line. Consult with CKD if the pulsation still does not cease. If the is repeatedly turned ON and OFF with the directional on the primary side, the set pressure may change greatly. Thus, the directional should be installed on the secondary side. Install a safety device where an output pressure exceeding the 's set pressure value could result in damage or faulty operation of secondary side devices. Do not operate the pressure adjustment knob while the primary side is released to the atmosphere as performance could deteriorate. Flush air pipes before connecting the. Check IN and OUT indications indicating the air inlet and outlet before connecting. Reverse connection could result in improper operation. If connected reversely, malfunction may be caused. Do not move or swing the product holding the adjustment knob on the. Check that sealing tape is not caught when piping. When using in parallel as shown below, do not use the OUT side as a closed circuit. If a closed circuit is required, set a check valve at the 's OUT side. Avoid installing this product where vibration and impact are present. 6

27 RP/ Series Install the so that the EXH is not plugged. When installing on a panel, completely loosen the pressure adjustment knob, and insert the body into the.5 diameter panel hole. Then, fix to the tightening panel with the panel mounting nut. Next, turn the pressure adjustment knob, and assemble it onto the body. (Precautions for RP) If the product is installed on the panel in a horizontal direction, the panel could be damaged by the product weight and vibration. Apply adequate torque when connecting pipes. To prevent air leakage and screw damage. First tighten the screw by hand, then use a tool, to prevent thread damage. (Recommended value) Port thread Tightening torque N m Rc/8 to 5 Rc/ 6 to 8 Rc/8 to 5 CAUTION Working air quality Use only compressed air. containing corrosive gases, fluids or chemicals could result in improper pressure adjustment due to body damage or rubber deterioration. Working environment Avoid using the in the following environment. Place where the ambient temperature exceeds -5 to 6 C. Where air freezes. Where water drip and cutting lubricant contact to the product. Highly humid places where dew condenses due to temperature fluctuations. Where sea breeze or salt water could come in contact. If there is atmosphere of corrosive gas and liquid and chemical material. Where the product is exposed to direct sun lay. With the precision RP, the setting pressure fluctuates by approx..kpa/ C. The pressure tends to drop when the temperature rises. During use & Maintenance Maintenance Pneumatic components must be disassembled and assembled by a qualified worker. Personnel involved in this step must have passed the Pneumatic Pressure Skill Test Class or higher. Read the relevant product instruction manual thoroughly and fully familiarize yourself with work before disassembling or assembling the component. Personnel must be fully familiar with component structure and operational principles and safety requirements. Be sure to turn power off, stop supplied compressed air, and check that there is no residual pressure before starting maintenance. Pressure adjustment knob Lock nut Panel mount nut Bleed port nic sensor Use constantly leaks from the bleed port. This is necessary for precise pressure control, so do not plug the hole. Check primary pressure before setting pressure. Do not set a pressure higher than primary pressure. Turn the pressure adjustment knob clockwise to increase secondary pressure, and counterclockwise to lower pressure. Pressure is set in the depressurizing direction (high pressure low pressure), so a highly precise setting can be made. After adjusting pressure, tighten the lock nut, and then fix the knob. The precise RP exhaust valve has a metal OUT EXH IN seal, so a small mount of secondary air will leak. Precision unit 65

28 Precision RP Series Port size: Rc/ JIS symbol nic sensor 66 Specifications Descriptions RP 8 RP 8 RP 8 7 Working fluid Max. working pressure Min. working pressure Withstanding pressure Ambient temperature, fluid temperature MPa MPa MPa C compressed air (refer to recommended air circuit on page 6). Setting pressure +. Note.5-5 to 6 (no freezing) Note Set pressure range MPa. to..5 to..5 to.7 Sensitivity Repeatability consumption Note /min.(anr) Within.% of full scale Within ±.5% of full scale. or less. or less Port size Pressure gauge port size Weight g Rc/ Rc/8 5 Note. Flow rate of the secondary side is to be zero. If the set pressure is.mpa and over, increase +.MPa in the set pressure. Note. The primary pressure is to be.7mpa. is released to atmosphere normally. Note. The range is -5 to 5 C when a digital pressure sensor is used. How to order RP 8 G9PB Model RP: Precision A B C A Port size B Setting pressure range 8 Rc/ 7 MAX..MPa MAX..MPa MAX..7MPa Discrete attachment model no. Model RP-8--G9P RP-8--G9P RP-8-7-G9P RP-8- -B 7 RP-8- -R room specifications (catalog No. CB-S) Dust generation preventing structure for use in cleanrooms RP P7 7 C Attachment (attached) Blank Without attachment G9P Pressure gauge (G9D-6-*) B L type bracket R Digital pressure sensor Note : A pressure gauge and a bracket are attached. Note : A pressure gauge as same pressure range as the is attached. Note : One R/8 plug is attached to the product. Discrete attachment model no. G9D-6-P G9D-6-P G9D-6-P B PPX-RN-6M

29 Internal structure and parts list ø ø.5 Panel cut dimension Panel thickness: MAX. 5mm * (6) (58) Operational explanation Attachment (L type bracket) RP Series Internal structure / Dimensions supplied from IN side is stopped its flow to OUT side by the 7 valve. Some supplied air passes through the orifice to flow into the pilot room. Lock nut If the pressure adjustment knob is rotated, the pressure adjustment spring is compressed, and the 5 pilot diaphragm and the flapper are pushed Panel mount nut down to close the nozzle. If the pressure in the pilot room rises, 6 main diaphragm is forced lower Pressure adjusting spring to open 7 valve, and to supply air to OUT side. The entered air is flowed 5 into the feedback room, and functions to the 5 pilot diaphragm. If the diaphragm is forced upward until reach the pressure of spring, the 5 pilot diaphragm and flapper is forced upward to open the nozzle, Flapper Feedback room and extremely small air is released to the atmosphere to reduce pressure in the pilot room. At the same time, OUT side pressure functions to the Nozzle Bleed port 6 main diaphragm to force upward, the 7 valve is closed and set pressure is maintained. Pilot room Orifice Exhaust valve is consumed and the pressure drops in OUT side, the pressure in feedback room also drops. The 5 pilot diaphragm and the flapper are 9 OUT IN forced lower to close the nozzle. 6 7 If the pressure in the pilot room rises, and the pressure functions to the 6 main diaphragm to open the 7 valve. This compensates pressure drops. If OUT side pressure increases higher than the set pressure, the pressure in feedback room also increases. The 5 pilot diaphragm and the EXH 8 flapper are forced upward to open the nozzle. This allows the pressure in the pilot room to decrease, and the 6 main diaphragm is forced upward to open the exhaust valve, and the surplus pressure is exhausted from No. Parts name Material EXH port in OUT side to the atmosphere. This pilot pressure control method with precise pressure control enables Pressure adjustment knob Polyacetal resin, stainless steel precise pressure control following extremely small pressure deviation Guard Pilot body assembly Body Pilot diaphragm Main diaphragm Valve Bottom rubber O ring O ring Bottom plug Spring Valve adaptor Aluminum alloy die-casting Aluminum alloy die-casting, etc. Aluminum alloy die-casting Hydrogen nitrile rubber Hydrogen nitrile rubber Hydrogen nitrile rubber, stainless steel Silicon rubber Nitrile rubber Hydrogen nitrile rubber Brass, electroless nickel plating Stainless steel Aluminum alloy Repair parts list.,.mpa Model no. RP PILOT ASSY RP DIAPHRAGM ASSY RP VALVE ASSY.7MPa Model no. RP PILOT ASSY 7 RP DIAPHRAGM ASSY 7 RP VALVE ASSY No. 6 7 No Part No. and cannot be used for. or. MPa. The RP-VALVE-ASSY is common to. and. MPa models. Dimensions Pressure gauge G9D-6- P P P L type bracket B R/8 ø.5 nic sensor Port size -Rc/(8) IN Pressure gauge port size -Rc/8 EXH OUT Attachment (Pressure gauge, digital pressure sensor) * Precision unit *: Dimension at setting pressure MPa *: Pressure gauge, digital pressure sensor and bracket are optional. *: Dimension when digital pressure sensor assembled. 7 67

30 RP Series Dimensions PPX-RN-6M Connector nic sensor Flow characteristics RP-8-7 Secondary pressure MPa Primary pressure.7mpa flow rate m /min. (ANR) Relief flow characteristics RP-8-7 Primary pressure.7mpa.8 Secondary pressure MPa Pressure characteristics RP-8-7 Secondary pressure MPa RP-8- Primary pressure.7mpa flow rate m /min. (ANR) PPX Note: Refer to page for details of digital pressure sensor PPX Series. Secondary pressure MPa Secondary flow /min Setting pressure.mpa Set point flow rate m /min. (ANR) RP-8- RP-8- Primary pressure.5mpa.5 Secondary pressure MPa.... RP-8- Secondary pressure MPa Primary pressure.5mpa flow rate m /min. (ANR).... flow rate m /min. (ANR) Secondary pressure MPa Secondary flow /min Setting pressure.mpa Set point R/8 NPT/8 RP-8- (Flow characteristics at low pressure) Primary pressure.5mpa flow rate m /min. (ANR) RP-8- Primary pressure.5mpa. Secondary pressure MPa Secondary pressure MPa Secondary pressure MPa.... flow rate m /min. (ANR) Secondary flow /min Setting pressure.5mpa Set point M5 female thread M female thread depth Primary pressure MPa Primary pressure MPa Primary pressure MPa 68

31 Pressure characteristics RP-8- Secondary pressure MPa Cylinder speed range of RP Cylinder speed mm/s Secondary flow /min Setting pressure.mpa Set point Primary pressure MPa Cylinder table of RP-8 Recommended usage range ø ø5 ø6 ø8 ø Max. * Effective sectional area mm Example of precise pressure control Secondary pressure MPa....8 Secondary flow /min Setting pressure.mpa T type bracket set B-W Set point Primary pressure MPa RP Series Pressure characteristics / Technical data Secondary pressure MPa This cylinder table shows available range according to air supply / exhaust flow rate of precision and required consumption flow rate at cylinder PUSH/PULL. Secondary flow /min Setting pressure.5mpa Set point Primary pressure MPa Recommended cylinder line (7% of maximum flow rate is recommended) * Max. cylinder line (Cylinder directly installed) Note: Using at a speed higher than maximum could cause relief faults. nic sensor 8 96 IN 5.5 F- M- MAX. DRAIN MAX. DRAIN OUT () * (98) Precision unit Filter F-W Oil mist M-W RP *. Dimension when digital pressure sensor assembled. * Consult with CKD if required for assembly. Applicable model Model Filter F-W Oil mist M-W Precision RP T type bracket set B-W ( pcs.) 69

32 Precision RP Series Port size: Rc/, Rc/8 JIS symbol nic Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Ambient temperature, fluid temperature C Set pressure range MPa Sensitivity Repeatability consumption /min.(anr) Port size Exhaust side port size Pressure gauge port size Weight g RP-8-8 Rc/ RP--8 compressed air (refer to recommended air circuit on page 6). Setting pressure +. Note.5-5 to 6 (no freezing) Note. to.85 Within.% of full scale Within ±.5% of full scale 5 or less Note Note. Flow rate of the secondary side is to be zero. Note. Conditions where the primary pressure is.7mpa and set pressure is.mpa. Consumed air is normally released to the atmosphere from the bleed port and EXH port. So, air consumption is the total of consumption volume released from the bleed port and EXH port. /min. (ANR) or less is released from EXH port. Note. The range is -5 to 5 C when a digital pressure sensor is used. How to order RP 8 8 G9PBE A B C Rc/8 Rc/8 7 Rc/8 sensor Model RP: Precision A Port size 8 Rc/ Rc/8 Discrete attachment model no. Attachment symbol G9P B E R B Setting pressure range C Attachment (attached) 8 MAX..85MPa Blank G9P B E R Without attachment Pressure gauge C type bracket Digital pressure sensor Note : If the port size Rc/ is required, use a piping adapter set (model no.: A-5). Note : Attachment is attached. Note : The piping adapter set and C bracket cannot be used together. Note : One R/8 plug is attached to the product. Discrete attachment model no. G9D-6-P B SLW-A PPX-RN-6M 65 room specifications (catalog No. CB-S) Dust generation preventing structure for use in cleanrooms RP P7

33 Internal structure and parts list No Flapper Nozzle Orifice 5 6 Parts name Pressure adjustment knob Guard Pilot body assembly Top body assembly Body Exhaust adaptor Pilot diaphragm Piston assembly O ring Exhaust valve supply valve O ring Bottom cap Dimensions Port size -Rc/(8) -Rc/8() ø.5 IN EXH Bleed port OUT Panel cut dimension Panel thickness: MAX. 5mm ø 79 * Lock nut Panel mount nut Pressure adjusting spring 7 Feedback room Pilot room 8 9 Material Polyacetal resin, stainless steel Aluminum alloy die-casting Aluminum alloy die-casting, etc. Aluminum alloy die-casting, etc. Aluminum alloy die-casting Aluminum alloy die-casting Hydrogen nitrile rubber Aluminum, stainless steel, etc. Nitrile rubber Brass, hydrogen nitrile rubber Brass, hydrogen nitrile rubber Nitrile rubber Brass (65)* (6) Operational explanation supplied from IN side is stopped its flow to OUT side by the air supply valve. Some supplied air passes through the orifice to flow into the pilot room. If the pressure adjustment knob is rotated, the pressure adjustment spring is compressed, and the 7 pilot diaphragm and the flapper are pushed down to close the nozzle. If the pressure in the pilot room rises, piston is forced lower to open! air supply valve, and to supply air to OUT side. The entered air is flowed into the feedback room, and functions to the 7 pilot diaphragm. If the diaphragm is forced upward until reach the pressure of spring, the 7 pilot diaphragm and flapper is forced upward to open the nozzle, and extremely small air is released to the atmosphere to reduce pressure in the pilot room. At the same time, OUT side pressure functions to the piston to force upward, the! air supply valve is closed and set pressure is maintained. is consumed and the pressure drops in OUT side, the pressure in feedback room also drops. The 7 pilot diaphragm and the flapper are forced lower to close the nozzle. If the pressure in the pilot room rises, and the pressure functions to the piston to open the! air supply valve. This compensates pressure drops. If OUT side pressure increases higher than the set pressure, the pressure in feedback room also increases. The 7 pilot diaphragm and the flapper are forced upward to open the nozzle. This allows the pressure in the pilot room to decrease, and the piston is forced upward to open the! exhaust valve, and the surplus pressure is exhausted from EXH port in OUT side to the atmosphere. This pilot pressure control method with precise pressure control enables precise pressure control following extremely small pressure deviation. Repair parts list No. Parts name Model no. Pilot body assembly RP-PILOT-ASSY 7 Pilot diaphragm Top body assembly RP-TOP-BODY-ASSY supply valve O ring RP-BTM-VALVE-ASSY Bottom cap Note: Part no. (8), (9) and () are contained in top body assembly (). 5 Attachment (C type bracket) RP Series Internal structure / Dimensions C type bracket B 7 Pressure gauge G9D-6-P ø.5 nic sensor Pressure gauge port size -Rc/8 Exhaust side port size Rc/8 IN 5 EXH OUT 7 Attachment (Pressure gauge, digital pressure sensor) Attachment () (9) SLW-A 58.5 R/8 Precision unit *: Dimension at setting pressure MPa *: Pressure gauge, digital pressure sensor, C type bracket and silencer are optionally attached. *: Dimension when digital pressure sensor assembled. R/8 ø5.5 65

34 RP Series Dimensions PPX-RN-6M Connector PPX nic sensor Note: Refer to page for details of digital pressure sensor PPX Series. Flow characteristics RP--8 Primary pressure.7mpa Secondary pressure MPa Relief flow characteristics RP--8 Primary pressure.7mpa Secondary pressure MPa Pressure characteristics flow rate m /min. (ANR) RP RP-*-8 Secondary pressure MPa flow rate m /min. (ANR) Secondary flow /min Set point.5 RP-8-8 Secondary pressure MPa Secondary pressure MPa R/8 NPT/ Primary pressure.7mpa flow rate m /min. (ANR) Primary pressure.7mpa flow rate m /min. (ANR) M5 female thread M female thread depth Primary pressure MPa 65

35 Cylinder speed range of RP Cylinder speed mm/s Recommended usage range Cylinder table of RP- ø6 ø8 ø ø5 ø ø5 ø6 ø8 ø ø ø5 Effective sectional area mm Max. * This cylinder table shows available range according to air supply / exhaust flow rate of precision and required consumption flow rate at cylinder PUSH/PULL. Recommended cylinder line (7% of maximum flow rate is recommended) * Max. cylinder line (Cylinder directly installed) RP Series Technical data Example of precise pressure control.5 7 IN 7 PRESS TURN Filter F-W PRESS TURN Oil mist M-W T type bracket B-W 5 (9) OUT Pressure gauge 6 Precision RP (9)* (7) *. Dimension when digital pressure sensor assembled. nic sensor Precision unit * Consult with CKD if required for assembly. Applicable model Model Filter F-W Oil mist M-W Precision RP T type bracket set B-W ( pcs.) 65

36 RP/ Series Major applications Liquid discharge control Pilot pressure control Tank Balance Extremely low pressure blow W nic sensor Quick pressure adjustment in tank Leak test Workpiece Tension control 65

37 MEMO nic sensor Precision unit 655

38 Precision Series Enabling high precision pressure control within. to.5 MPa range Port size: Rc/, Rc/8 JIS symbol Specifications Descriptions Working fluid Max. working pressure Withstanding pressure Fluid temperature (ambient temperature) Set pressure range Relief starting Constant bleeding rate Port size Product weight MPa MPa C MPa MPa /min. (ANR) Rc kg -C-C/C-L Compressed air..5 5 to 65. to.5 Setting pressure plus.5 or less /, /8.6 Ozone specifications ( 9) P nic sensor Flow characteristics Secondary pressure (MPa) How to order Primary pressure.5mpa C flow rate m /min. (ANR) Note on model no. selection Precision Note : "K", "P", "G" and "B" can be combined. Note : A pressure gauge, G59D-8-P MPa is attached. Refer to related components on page 66 for the specifications on pressure gauge. Note : A bracket, No. 65 is attached. Note : Consult with CKD if pressure gauge and bracket assembly products are required. Note 5: If NPT port is required, do not indicate nominal size C. (example) --L A Pressure characteristics Secondary pressure (MPa).5..5 C L For low pressure Port size flow rate (.m /min. ANR) Primary pressure (MPa) K B Option Symbol A Port size C C B Option Regulator Attachment Descriptions Rc/ Rc/8 Blank None K Plastic knob P Panel mount Blank None G Pressure gauge B Bracket 656

39 Internal structure and parts list No. 5 6 Parts name Body Guard Diaphragm assembly Valve assembly O ring O ring Repair parts list No. Parts name Diaphragm assembly Valve assembly Dimensions Gauge boat -RC/ Port size C: Rc/ C:RC/8 5 6 Material Zinc die casting Zinc die casting Brass, steel, nitrile rubber Stainless steel, brass, hydrogen nitrile rubber Nitrile rubber Nitrile rubber 57 8 Model no. -DIAPHRAGM-ASSY -VALVE-ASSY max 5 max8 Series Internal structure and parts list Functional explanation () Adjusting screw Adjusting screw to adjust secondary pressure is turned clockwise to increase pressure. () Relief valve Metal seal relief valve is used to obtain outstanding pressure characteristic. () Diaphragm The balance between the force of pressure adjusting spring and applied to diaphragm bottom (secondary pressure) are maintained. The valve stem is opened and closed to supply accurate and constant set pressure to the secondary side. () Valve combination If the balance between the diaphragm and the pressure adjusting spring turns to off-balance, compressed air on the primary side is supplied to the secondary side as much as required. (5) Gauge port Designed the gauge port in the position near to OUT side rather than the center, the secondary pressure is measured accurately. Two gauge ports are provided. nic sensor Precision unit Panel mount ø8 Safety precautions Note : Turn the pressure adjustment handle clockwise to increase the secondary pressure, and counterclockwise to lower the pressure. Note : Start setting after checking the primary pressure. Note : Flash the pipe before connecting the. Note : Prevent sealing tape from entering into the pipe. Note 5: When pressure adjustment problems, check if possible foreign matter adhesion or scratch, etc., on O ring valve stem assembly

40 Components preparation and pressure adjustment / unit Overview Components controlling air pressure and flow rate electrically. Features () High precision / quick response Controlling pressure, flow rate continuously according to applications. () Changes s lines Pressure setting for s in lines is enabled with using a remote computer control, etc. Thrust/speed, etc., of cylinder can be flexibly controlled. CONTENTS Product introduction 7 Series variation 76 Applications 78 Safety precautions 7 Digital electro Product introduction 7 Solenoid valve type medium flow (EVD-) 76 Solenoid valve type large flow (EVD-) 7 Solenoid valve type medium flow (EV) 76 Solenoid valve type vacuum (EVV) 77 Solenoid valve type small flow (EV) 765 solenoid valve type (EVS) 768 Thin electro Product introduction 776 Reduced wiring manifold type (MEVT) 778 Technical data 789 Manifold specification sheet 798 Proportional Proportional solenoid method (AP/AF/AF) 8 Controller (APC) 8 Interface Interface (PI) 88 nic sensor unit 7

41 Complying with FA and FMS with proportional control and atization. Realize highly advanced electronic control. nic sensor Pressure controls based on proportional control Proportional control technology is at the core of Proportional pressure controls. In simple terms, this technology attains an output and flow rate proportional to the input voltage (current), and input and output are linearly proportional. Using this technology expands applications of conventional ON-OFF control components to enable continuous analog control. Static diagram of proportional input to control Setting pressure (MPa) Input voltage (VDC) Proportional pressure controls for advanced use Proportional pressure controls enable the cylinder's speed, thrust, position, etc., to be freely controlled. Continuous high accuracy variable device control, remote pressure setting of lines, and use in FA and FMS are accurately realized. The features of this are well expressed in the flexible robot finger. Block diagram of control concept in machinery and equipment Control device Microcomputer controller Programmable controller Proportional pressure control The proportional pressure control includes an interface that connects with the host controller (programmable controller, etc.), the and proportional valve that conduct proportional control, and the pressure switch that also functions as the sensor. These can be used in combination or independently based on the purpose and application. Proportional pressure control Host controller Interface with other PLC Interface Control device solenoid valve Relay Motor driver Feedback signals Actuator Cylinder Solenoid Motor Proportional control Digital electro Proportional and controller Work (mechanisms) Sensors Auxiliary components Pressure switch Other sensors Pressure proportional applications Spot welding gun pressure control Grinder pressure control Tension control of paper, cloth or film, etc. Balancer and lifter pressure control Die cushion control for press brake pressure control Robot handling force control Fluid and powder flow control using pressure Flow rate proportional control applications Cylinder, motor speed control Cylinder positioning control Various applications using air flow rate control (e.g. : Temperature control of film, alminium foil, etc.) Semiconductor manufacture Paint and gas industry Chemistry / powder Food processing Transportation / precise Needs field Applicable field Control field Line-up Continuous Flexible Soft touch Detailed Minute Proportional pressure control with wide potential FA FMS Replacing human sense of automation Higher control Pulp / paper-making Textile industry - Proportional valve & controller Tensile control Pressure switch Pressurization control Tension control Blow control Remote control Interface Variable continuous control of air pressure Various continuous control air flow rate nic sensor unit Serial communication PLC Thin electro Read the safety precautions before starting use. 7 75

42 nic sensor Series variation Control method Solenoid valve type Proportional solenoid method Interface EVD- EVD- EV EVV EV EVS MEVT AP AF/AF APC PI Model name - Functions include pressure display and error display and direct memory. The -bit parallel model has been added to the input signal type. Functions include pressure display and error display and direct memory. The -bit parallel model has been added to the input signal type. Flow is large compared to the EVD-. Feedback control with semiconductor pressure sensor and electronic control circuit is used. This electro allows continuous and precise controlling air pressure by electric signals. Feedback control with semiconductor pressure sensor and electronic control circuit is used. This electro allows continuous and precise controlling vacuum by electric signal. Feedback control with semiconductor pressure sensor and electronic control circuit is used. This proportional pilot valve allows continuous and precise controlling air pressure by electric signals. er than conventional models. Body extending cable is used for this proportional pilot valve to achieve ultimate convenience and space saving. Reduced wiring thin shape. Ultimate space saving due to manifold. Thin type electro with higher accuracy and performance than conventional mechanism. Pressure control type with function. Enabling continuous variable control for thrust., cushion effect, etc. for cylinders. Flow rate control type with function. Enabling continuous variable control for thrust., cushion effect, etc. for cylinders. Amplifier to control current of proportional valve with tov of input signal. At the same time, dither is added to impressed current to achieve the max. performance of proportional valve with PWM method. Interface components to easily connect to proportional. Digital 8 bit and BCD input is converted to analog signals. Wiring method Termin.al box D sub-connector Serial transmission FA connector DIN terminal Port size Power voltage M5 Rc/ Rc/8 Push-in ø Push-in ø6 Non to 6 VDC VDC VAC VAC Input signal - VDC -5 VDC * * Input signal -madc Variable resistance input Parallel bit -. tokpa to kpa Max. effective sectional area (mm) AF AF Control pressure range to 5kPa to 9kPa to 6kPa and over Step response (Loadless).s or less.s or less.6s or less.8s or less s or less Maximum flow rate ( /min. (ANR)) Series variation ±. or less Linearity (%F.S.) ±.5 or less ±.5 or less ±.5 or less. or less Hysteresis (%F.S.).5 or less. or less : Appropriate : Sufficient Applications. or less 7 or less Pilot pressure control Tension Tension Blow of work Control of proportional Control of proportional Page nic sensor unit *: Interface (PI Series) and pressure controller (PPS Series; refer to page 5) are available only for to V input components (including APC). * : Controlled via controller (APC Series). (Available only for to V input.) 76 77

43 Basic functions Pneumatic proportional control components attain an output and flow rate proportional to the input voltage or current. The input voltage and output pressure/flow rate must be lineally proportional. To achieve this, the pressure and flow rate are varied with electric signals, and an electric controller enables variable continuous control. When used as a, the circuit is configured so signals from the host controller are converted to to VDC signals, etc., by the D/A converter (interface). These signals operate the proportional via the controller, controlling the thrust and speed of each actuator, etc. Highly accurate control is possible by feeding back the state with sensors as required. Host controller (PLC) interface Proportional valve controller Digital electro Proportional valve Pressure switch Examples of using proportional pressure controls Loads nic sensor Fluid discharge control Chemical drip prevention control Micro position control EV5 EVD Tank EV Series Index table Pump CKD air operated valve CKD automatic suck-valve Bellows EV Series Fluid pressure control Balancer tension control Grinding force control EV5 EVD Controller Large flow rate EV5 EVD Controller Cylinder APC Solenoid valve EV5 EVD pump Nozzle AP EVD Exhaust Power supply Setting signal Grindstone Motor 78

44 Examples of using proportional pressure controls Tension control using air brakes - Applications turbine speed control tape brake EVD EV5 turbine EVD EV5 Shock free cylinder operation cushion control flow control APC AF APC Switchover signal Solenoid valve AF APC Regulator Control circuit Power supply Power supply Exhaust AF Power supply APC control signal nic Applications for fluid pressure feeding Fixing such as lead frame, etc., Chip part assembly sensor PPS EV5 EVD EVD Lead frame Chip VDC Leakage inspection EVD FSM unit Resin 79

45 nic sensor - Pneumatic components(- ) Safety precautions Always read this section before starting use. Refer to Intro 67 for general precautions for components, and to " Safety precautions" in this section for detailed cautions pertaining to each series. CAUTION Response is affected by working pressure and load volume. If repeatability with stable responsiveness is required, install a in the proceeding stage. Take the following countermeasures to prevent malfunction caused by noise. Insert a line in the AC power supply line. Use a surge suppressor, such as a CR or diode on the load (solenoid valve, relay, etc.), to remove noise where it is generated. Separate wiring to proportional pressure controls from strong magnetic fields. Connect wiring to proportional pressure controls with a shield wire. Ground the shield wire on the power supply side. Note that the shielding wire for the serial transmission communication cable must be treated based on communication specifications. CAUTION Do not use the product where the product is exposed to direct-sunlight or may come in contact with water or oil. Sufficiently flush air pipes before connecting to proportional pressure controls. Prevent pipe from catching tips of sealing tape when piping. Mount the product as indicated in the individual precautions. When connecting pipes, wrap sealing tape in the opposite direction from threads starting mm inside from the end of piping threads. If sealing tape protrudes from pipe threads, it could be cut Design & Selection Installation & Adjustment When releasing secondary control pressure, such as an air blowing, to the atmosphere, pressure could fluctuate depending on piping conditions and flow conditions. Test under actual working conditions, or consult with CKD before using this method. When selecting dryer, air, oil mist or, select a device with a flow rate higher than that used by proportional pressure controls. This product has moving parts due to its operation and structure, and the accuracy, etc., can change over time. Before starting use, evaluate the part in the. Depending on the operation frequency, use this product as a periodic maintenance part, etc. when screwed in. This could cause the tape to enter the components and lead to faults. Correct pressure control is not possible if the exhaust port is plugged. Release this port to the atmosphere. Apply adequate torque when connecting pipes. To prevent air leakage and screw damage. First tighten the screw by hand to prevent threads, then use a tool. (Recommended tightening torque) Port thread M5 Rc/ Rc/8 Tightening torque N m to.5 6 to 8 to 5 During Use & Maintenance When using the CKD cable option M connector type, tighten with the appropriate torque. (EV, EVS Series) Recommended tightening torque. to.9 N m CAUTION Disassembling the could result in problems. Operation after disassembly cannot be guaranteed. Do not use with the cover and housing removed. An electronic board is assembled inside. Using the product with the cover or housing removed could result in unexpected accidents or trouble. 7

46 EVD Series EVD Series WARNING Understand compressed air features before designing a circuit. The same functions as mechanical, hydraulic, and electrical methods cannot be anticipated if instantaneous service interruption and holding are required during an emergency stop. Pop-out, air discharge, or leakage due to air compression and expansion could occur. Confirm that the product will withstand the working environment. This product cannot be used in an environment containing corrosive gas, chemical liquids, solvents, water or steam. If water, oil, or metal chips (spatter or cutting chips, etc.) could come in contact with the product, provide appropriate protection. A gauge pressure type pressure sensor is built-in. To protect the sensor, do not seal the product, and make sure that air can be introduced. This product cannot be used in a flammable environment. Care must be taken to the electrical circuit during emergency stop and cylinder operation, etc., during a service interruption. Install a "pressure switch" and "shut-off valve" on the device's compressed air supply side. The pressure switch uses disable operation if set pressure cannot be reached. The shut-off valve exhausts compressed air in the circuit, and prevents accidents caused by operation of the devices by residual pressure. If the is left standing with power off and primary pressure applied, secondary pressure could rise to the primary pressure level. Due to the structure, a small amount of air is consumed from the EXH port when secondary pressure is generated. Set the primary to or use a valve on the primary side to shut off the supply source when not using the. CAUTION Indicate the maintenance conditions in the device's instruction manual. The product's function can drop markedly with working status, working environment, and maintenance, and can prevent safety from being attained. With correct maintenance, the product functions can be used to the fullest. Use the constant voltage power supply. Check leakage current to prevent malfunction caused by leakage current from other fluid control components. When using a programmable controller, etc., leakage current could cause the electro to malfunction. For VDC.8mA or less Response is affected by working pressure and load volume. If repeatability with stable responsiveness is required, install a in the proceeding stage. Design & Selection Take the following countermeasures to prevent malfunction caused by noise. Insert a line in the AC power supply line. Use a surge suppressor, such as a CR or diode on the load (solenoid valve, relay, etc.), to remove noise where it is generated. Separate wiring to the EVD device from strong magnetic fields. Connect wiring to EVD device with a shield wire. Ground the shield wire on the power supply side. Keep the power supply cable as short as possible. Do not share power with an inverter or components causing motor noise, etc. Do not lay the power wire, signal wire, and other power cables in parallel. When the current input type is wired, the power ground and signal common are shared. When driving several EV units with one PLC and D/A unit, depending on the D/A unit circuit, wiring could prevent the correct signal from being input. Consult with the PLC maker. The current input type can be used with input signal to 5V, but as opposed to other voltage input types, input impedance is small (5Ω). Use an appropriate voltage generator. Poor air quality will worsen the characteristics and adversely affect the durability. The air quality must satisfy the clean dry air ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent. For the s source, always supply clean air, from which solids, moisture and oil have been sufficiently removed with a dryer, air and oil mist. Do not use lubricated air as it will adversely affect the characteristics. Regulator 5μm dryer Oil mist (Oil removing) (Pressure switch) (Recommended air circuit) When the secondary pressure is lowered with an input signal, etc., the secondary air passes through the product and is discharged from the EXH port. Contamination on the secondary piping and the inside of the load will have an adverse effect on the characteristics, etc. Thus, keep the inside of the piping as clean as possible. If power is turned OFF under pressure, secondary pressure is held. To discharge pressure, lower set pressure with an input signal and then turn OFF, or use a shut-off valve, etc. This holding state is not guaranteed for a long time. nic sensor unit 7

47 EVD Series nic sensor 7 CAUTION Primary pressure: For kpa pressure specifications, make sure that the pressure is not less than set secondary pressure + 5kPa. For 5 or 9kPa pressure specifications, make sure that the pressure is not less than set secondary pressure + kpa. Product life is shortened if primary pressure is not supplied for a long time while power is on. Do not use this way. When releasing secondary control pressure, such as an air blowing, to the atmosphere, pressure could fluctuate depending on piping conditions and flow conditions. Test under actual working conditions, or consult with CKD before using this method. When selecting dryer, air, oil mist or, select a device with a flow rate higher than that used by proportional pressure controls. DANGER Installation Use power voltage and output within the specified voltage. Using voltage exceeding the specified voltage could cause malfunctions, controller damage, electrical shock, or fire. Do not use a load exceeding the output rating. Failure to observe this could result in output damage or fire. WARNING Wiring Check the connector pin and cable conductor wire color when wiring. Incorrect connections could cause damage, problems, or malfunctions. Check the wire color against instructions and precautions before wiring. Check wiring insulation. Check that wires do not contact other circuits, that no ground faults occur, and that the insulator between terminals is not defective. Overload could damage the product. Use a stabilized DC power supply, within the specified rating, insulated from the AC power supply. Not insulating the power supply could cause electrical shock. If power is not stabilized, the peak value could exceed the rating and damage the product or reduce precision. Stop the control device and equipment and turn power off before wiring. Starting operation suddenly could cause unpredictable operation and hazards. Conduct an energized test with control devices and equipment stopped. Be sure to discharge any accumulated elec- Design & Selection Installation & Adjustment Working environment Do not use the product where the product is exposed to direct-sunlight or may come in contact with water or oil, etc. Consult with CKD on specifications when using outside designated specifications or for special applications. Drip-proof environment This product s protective structure is equivalent to IP. Do not install this product where water, salt, dust, or swarf is present or in a pressurized or depressurized environment. Use where the temperature changes greatly or where high humidity environment could cause damage through dew condensation. Even when pressure is set to MPa at %F.S. or less of maximum control pressure, secondary pressure is not completely released. If precise MPa is required, bleed the secondary side or install a -way valve on the secondary side to switch the secondary side to atmospheric pressure. trostatic discharge among personnel or tools before and during work. Connect and wire bending resistant material, such as robot wire material for movable sections. Do not use this product at levels exceeding the power voltage range. If voltage exceeding the specified range or AC power ( VAC) is applied, the controller could break or burn. Do not short-circuit the load. The product could break or burn. CAUTION Installation Mounting attitude There are no restrictions to the mounting direction or mounting attitude, but provide sufficient space around the product for operation, mounting, removal, wiring and piping work. Install an air just before the component in the circuit. Install so that the exhaust port is not blocked and provide sufficient space for exhaust. Pilot exhaust air Main exhaust air 5mm and over W

48 EVD Series The D-sub connector s rotating mechanism is not designed for use in moving applications. Use it at the top or side, not inclined. Fix any cables that could move in place. CAUTION Piping () () () Do not remove the port seal until just before piping the product. Removing the port seal from the piping port before piping work starts could let foreign matter enter from the piping port and cause faults or faulty operation. Flash the pipe carefully before installation. Prevent pipe from catching tips of sealing tape when piping. When connecting pipes, wrap sealing tape in the opposite direction from threads starting mm inside from the end of piping threads. If sealing tape protrudes from pipe threads, it could be cut when screwed in. This could cause the tape to enter the components and lead to faults. Wiring The optional shield cable connector is a shielded wire. Insulate wires not being used so that they do not contact other wires, including shielded wires. Unintended connection to the ground, etc., could cause malfunction or damage the product. Installation & Adjustment The D-sub connector has a 9 rotating mechanism. When fitting the D-sub connector, press it in by hand so that it faces the top or side. Press down securely with the hand when inserting the connector!! Correct pressure control will not be possible if plugged into the exhaust port. Always release to the atmosphere. Apply adequate torque when connecting pipes. To prevent air leakage and screw damage. First tighten the screw by hand to prevent threads, then use a tool. The electric components are assembled onto main body with two hooks on the housing side. Carefully handle so that excessive force is not applied. (Recommended tightening torque) Port thread Rc/ Rc/8 Tightening torque N m 6 to 8 to 5 When supplying compressed air for the first time after connecting pipes, do not apply high pressure suddenly. Before supplying compressed air after connecting pipes, check that there are no air leaks at any pipe connections. Apply a leakage detection agent on pipe connections with a brush, and check leaks. Lock the D-sub connector so that it will not be dislocated. Fix the fixed bed in place with a tool, etc., when releasing the screw lock. Tool Driver Fix with a tool before loosening the screw lock!! nic sensor unit Insert and fit the D-sub connector securely on the back. 7

49 EVD Series During Use & Maintenance nic sensor WARNING Do not supply other than compressed air. Use clean compressed air that does not contain corrosive gases. Use ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent clean dry air from which oil has been removed. Be sure to turn power off, stop supplied compressed air, and check that there is no residual pressure before starting maintenance. This is required to ensure safety. CAUTION Plan daily inspections and periodic inspections to ensure that maintenance is correctly controlled. If maintenance is not correctly controlled, the product's functions could drop markedly and lead to a shortened life, damage, malfunctions, faults, and accidents.. Control of supplied compressed air pressure Is the set pressure supplied? Does the pressure gauge indicate the set pressure during operation of the device? Minimum (MIN). Control of s Is the drain correctly discharged? Is the bowl or element dirty? Maximum (MAX). Control of compressed air leaks from piping connections Is the state of the connection, especially at movable sections, normal? Leaks in piping could cause incorrect operation.. Operational status control Are operations delayed? Is exhaust normal? If abnormal operation occurs, turn power and air pressure sources off immediately and stop use. Use this product within the working pressure range. This product does not start pressure control for two seconds or so after power is turned on to complete self-diagnostics. Provide a control circuit and program that ignores signals for at least two seconds after power is turned on. If the output setting value is changed, control devices could operate unintentionally. Stop devices before changing settings. Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. This product uses a compact solenoid valve as the actuator. The life may change according to the operation frequency by pressure switching and the working conditions, etc. The warranty term is set as one year or,, repeated operations, whichever is earlier, so use this as an inspection guideline. * The conditions for the,, operations listed in the warranty are as follows. When the input signal which causes the control pressure to rise from zero to the maximum control pressure is repeatedly applied in steps. The working air quality in this case shall be clean compressed air from the recommended air circuit. The secondary side load capacity shall be cm The case is made of resin. Do not use solvent, alcohol or any other cleaning agent to remove contamination, etc., or the resin case could be corroded or damaged. Wipe contaminations with a well wrung rag, etc., after soaked in weakened neutral detergent. 5. Control of actuator operation Is operation smooth? Is the end stop state normal? Is coupling with the load normal? 7

50 EV Series EV/EV/EVS Series WARNING If the is left standing with power off and primary pressure applied, secondary pressure could rise to the primary pressure level. Due to the structure, a small amount of air is consumed from the EXH port when secondary pressure is generated. CAUTION Poor air quality will worsen the characteristics and adversely affect the durability. The air quality must satisfy the clean dry air ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent. For the s source, always supply clean air, from which solids, moisture and oil have been sufficiently removed with a dryer, air and oil mist. Do not use lubricated air as it will adversely affect the characteristics. dryer 5μm Regulator Oil mist (Pressure switch) (Oil removing) (Recommended air circuit) When secondary pressure is lowered with an input signal, etc., secondary air passes through the EV and is discharged from the exhaust port (EXH port or R port). Contamination on the secondary piping and the inside of the load will have an adverse effect on the characteristics, etc. Thus, keep the inside of the piping as clean as possible. If power is turned OFF under pressure, secondary pressure is held. To discharge pressure, lower set pressure with an input signal and then turn OFF, or use a shut-off valve, etc. This holding state is not guaranteed for a long time. Primary pressure must be over " Setting secondary pressure + max. control pressure x.". If primary pressure is not supplied for a long time when secondary pressure is set within more than MPa to %F.S., product life is shortened. Avoid this use. Design & Selection Do not leave the product nonpressurized with power and input signals applied. Product life and properties could be reduced. If an input signal exceeding the specified range, as shown below, is applied the solenoid valve will operate excessively and can cause life or characteristics to degrade. Always use within the specified range. - V type Less than V Over V -5 V type Less than V Over 5V -ma type Less than ma Over ma When the current input type is wired, the power ground and signal common are shared. When operating several EV units with one PLC and D/A, depending on the D/A unit circuit, wiring could prevent the correct signal from being input. Consult with PLC maker. The current input type can be used with input signal to 5 V, but as opposed to other voltage input types, input impedance is small (5Ω). Use an appropriate voltage generator. With the EV Series, even if pressure is set to MPa, secondary pressure is not released and remains at less than 5kPa. If MPa is required, bleed the secondary side, or install a -way valve on the secondary side to switch to atmosphere, etc. The EV59 Series has two supply port s on the left and right of the unit. These are indicated as IN and IN. Always plug the that is not being used. The EV and EVS Series have small flow specifications, so leaks in secondary piping could cause vibration. Leaks in secondary piping prevents set pressure from being maintained when released into atmospheric pressure, including blowing, or if reverse pressure is applied to the secondary side such as when using a cylinder, such as a fine speed cylinder, with large leakage. Groaning may occur and life and properties could be reduced. Do not use in this way. Drip-proof environment The protective structure of this product can be confirmed in the specifications of each product. Do not use this product if a problem could occur in the applicable work environment. nic sensor unit 75

51 EV Series Mounting attitude There are no restrictions to the mounting direction or mounting attitude, but provide sufficient space for exhausting from the exhaust port. Installation & Adjustment During Use & Maintenance nic sensor CAUTION The optional shield cable connector is a -conductor shield wire. When not using the green special application wire (monitor output, etc.) with the EV Series or EV Series, insulate the wire so it does not contact the other wires (including the shielding wire). If the wire inadvertently contacts the ground, etc. The shielding wire on the main side of the EVS is connected to the green wire of the optional shielding cable connector, so connect the green wire and shielding wire to the power supply ground. Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. This product uses a compact solenoid valve as the actuator. The life may change according to the operation frequency by pressure switching and the working conditions, etc. The warranty term is set as one year or,, repeated operations, whichever is earlier, so use this as an inspection guideline. * The conditions for the,, operations listed in the warranty are as follows. When repeatedly, in a step, applying an input signal which causes the control pressure to rise from zero to the maximum control pressure. The working air quality in this case must be clean compressed air from the recommended air circuit. The secondary load capacity shall be cm for the EV Series and 5cm for the EV or EVS Series. 76

52 EV*V Series EV*V Series WARNING If the product is left with working pressure (vacuum source pressure) applied when power is not ON, the secondary pressure degree of vacuum could rise to the working pressure. If this poses a safety hazard, take measures using a valve on the secondary side, etc. CAUTION If poor quality air is supplied to the primary side (atmosphere side), characteristics could deteriorate and durability be adversely affected. When using this product in a dusty environment, etc., remove dust with a. As with secondary side load, if piping or the inside of the load is contaminated, characteristics and durability could be adversary affected. Blow air piping with compressed air to remove foreign matter before connecting. Install an air as shown in the recommended air circuit below if necessary. If power is turned off while the working pressure side is in a vacuum state, secondary pressure is held. To release secondary pressure to the atmospheric level, lower the input signal and then turn power off, or use a Design & Selection During Use & Maintenance shut-off valve, etc. This holding state is not guaranteed for a long time. Supply pressure is used to supply specified pressure to control pressure. Use the device within the working pressure range. If working pressure is not supplied for a long time when secondary pressure is set within more than MPa to % F.S., or if the product is left for a long time with working pressure at "control pressure + (- kpa)" or less, product life is shortened. Avoid this use. Set the input signal within the specifications. Applying a signal exceeding the range could reduce the life and properties. Do not use in this way. The current input type can be used with input signal to 5V, but as opposed to other voltage input types, input impedance is small (5Ω). When the current input type is wired, the power ground and signal common are shared. When operating several EV units with one PLC and D/A, depending on the D/A unit circuit, wiring could prevent the correct signal from being input. Consult with PLC maker. Even if pressure is set to MPa, secondary pressure is not released and remains as is within to -5kPa range. If MPa is required, install a -way valve on the secondary side to switch to atmosphere, etc. nic sensor CAUTION Correct pressure control is not possible if the IN port is plugged. Release this port to the atmosphere. When connecting a joint to the piping port (VAC, OUT, IN), use seal material (sealing tape, gel sealant) to prevent leaks. Check that seal material or piping screw swarf does not enter the port. When tightening the VAC port joint, use a wrench on the intake block (*7). When using the manifold and connecting several units with a module connection, atmosphere release ports (IN and IN) are shared. The optional shield cable connector is a -conductor shield wire. When not using the green special application wire (monitor output, etc.), insulate so that there is no contact with other wires (including the shield wire). Unintended connection to the ground, etc., could cause malfunction or damage the product. When using a hydraulic rotary type vacuum pump, be sure to prevent oil from entering by breaking the vacuum with a residual pressure discharge valve, etc., after the vacuum pump power is turned off. Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. This product uses a compact solenoid valve as the actuator. The life may change according to the operation frequency by pressure switching and the working conditions, etc. The warranty term is set as one year or,, repeated operations, whichever is earlier, so use this as an inspection guideline. * The conditions for the,, operations listed in the warranty are as follows. When repeatedly, in a step, applying an input signal which causes the control pressure to rise from zero to 9% of the maximum control pressure. The working air quality in this case must be clean compressed air from the recommended air circuit. The secondary load capacity shall be cm. unit 77

53 MEVT Series nic sensor 78 Thin electro- MEVT Series Circuit design WARNING Understand compressed air features before designing a circuit. The same functions as mechanical, hydraulic, and electrical methods cannot be anticipated if instantaneous service interruption and holding are required during an emergency stop. Pop-out, air discharge, or leakage due to air compression and expansion could occur. Confirm that the product will withstand the working environment. This product cannot be used in an environment containing corrosive gas, chemical liquids, solvents, water, vapor, or ozone. If water, oil, or metal chips (spatter or cutting chips, etc.) could come in contact with the product, provide appropriate protect. This product cannot be used in a flammable environment. Care must be taken to the electrical circuit during emergency stop and cylinder operation, etc., during a service interruption. Install a "pressure switch" and "shut-off valve" on the device's compressed air supply side. The pressure switch uses disable operation if set pressure cannot be reached. The shut-off valve exhausts compressed air in the circuit, and prevents accidents caused by operation of the devices by residual pressure. Shut-off valve Pressure switch Design & Selection CAUTION Indicate the maintenance conditions in the device's instruction manual. The product's function can drop markedly with working status, working environment, and maintenance, and can prevent safety from being attained. With correct maintenance, the product functions can be used to the fullest. Use the constant voltage power supply. Set the input signal within the specifications. Applying a signal exceeding the range could reduce the life and properties. Do not use in this way. Check leakage current to prevent malfunction caused by leakage current from other fluid control components. When using a programmable controller, etc., leakage current could cause the EVT to malfunction. For VDC.8mA or less Take the following countermeasures to prevent malfunction caused by noise. Insert a line in the AC power supply line. Use a surge suppressor, such as a CR or diode on the load (solenoid valve, relay, etc.), to remove noise where it is generated. Separate wiring to the MEVT device from strong magnetic fields. Use the designated wire material for the serial transmission line. If operation could be affected by noise, wire the power supply independently for each manifold when possible. Keep the power supply cable as short as possible. Do not share power with an inverter or components causing motor noise, etc. Do not lay the power wire, signal wire, and other power cables in parallel. Precautions for wiring When wiring the common gland and D-sub connector, the power supply gland and signal common are shared. When driving several EVT units with one PLC and D/A unit, depending on the D/A unit circuit, wiring could prevent the correct signal from being input. Consult with the PLC maker. When using a shield wire, connect it to the ground on the power supply side. This cannot be used with a cylinder having a large leakage rate, such as an air bearing cylinder. When using for blowing applications or when back pressure is applied on the secondary side, it is not be possible to maintain the set pressure. A large beating sound is generated and life is shortened. Avoid this use. Residual pressure of kpa or less (EVT) or kpa or less (EVT5) is generated even when the input signal is set to %. If MPa is required, install a three-way valve on the secondary side or release into to the atmosphere, etc. CAUTION Use a valve on the primary or secondary side when required. If the product is left with the supply pressure applied when power is not on, secondary pressure could rise to the primary pressure. If this could pose a safety hazard, take measures on the by using a valve on the primary side or secondary side, etc. Working environment Avoid using this product where it is subject to direct sunlight, water, or oil, etc. Consult with CKD on specifications when using outside designated specifications or for special applications. Ambient temperature Do not use this product in an environment hotter than 5 C or colder than 5 C. Vibration and shock Do not use this product where vibration exceeds 5m/s, or where impact exceeds m/s. Drip-proof environment This product s protective structure is equivalent to IP. Do not install this product where water, salt, dust, or swarf is present or in a pressurized or depressurized environment. Use where the temperature changes greatly or where high humidity environment could cause damage through dew condensation.

54 MEVT Series Installation WARNING Do not install the MEVT by supporting it with pipes. Fix the MEVT. Do not wash the MEVT with water or solvent, or paint the body. The MEVT is made of resin parts, and could be damaged. Paint could plug the exhaust port and result in malfunctions. CAUTION Secure sufficient space around the MEVT for installation, removal, wiring, and piping work. Install an air just before the component in the circuit. Response is affected by working pressure and load volume. If repeatability with stable responsiveness is required, install a in the proceeding stage. Mounting attitude The MEVT is mounted on a DIN rail. If the manifold's total weight exceeds kg, or when using the MEVT in an environment with vibration or impact, fix the DIN rails on the mounting surface at pitch of 5 to mm. Check that there are no problems with installation. There is no restriction for installation or mounting, but vibration could loosen set screws and drop the manifold. Mounting and removal method of MEVT Removing Loosen the four DIN rail set screw (two each on left/right). Installation. Catch the jaws into the DIN rail in the order of (), ().. Press the retainer in the direction of ().. While holding down so that there is no gap between blocks, tighten DIN set screws. (recommended tightening torque.6 to.8n m). Note: If retainer jaw are EVT not securely set, air could leak or the product could drop. Check that these jaws are Retainer secure. Installation & Adjustment Press Piping CAUTION Do not remove the MEVT packaging until just before piping. If the package is removed before connecting pipes, foreign matter could enter the EVT from the piping port and result in fault or malfunction. Always flush just before piping component. Check that foreign matter in pipes does not enter the EVT. Connect piping so that connections are not dislocated by movement, vibration, or tension. Release the exhaust port (R) to the atmosphere to that exhaust is proper. Do not restrict the EVT exhaust port (R) to a bore smaller the piping connection port. Valving element operation causes breathing at the EVT exhaust port (R), so foreign matter exhaust port (R) is facing upward. Install a silencer or pipe in the exhaust port (R) facing downward. The actuator does not function correctly if exhaust is not smooth. When using a manifold, exhaust could prevent the other EVT units from functioning correctly. When supplying compressed air for the first time after connecting pipes, do not apply high pressure suddenly. The pipe connection could dislocate causing the pipe tube to bounce and result in accidents. Note: If compressed air is supplied too slowly, the sealing mechanism in he EVT does not form a seal and result in air leaks. Before supplying compressed air after connecting pipes, check that there are no air leaks at any pipe connections. Apply a leakage detection agent on pipe connections with a brush, and check leaks. Observe the following precautions when using nylon tubes or urethane tubes for piping material. Use flame-resistant tubes where spatter could scatter. nic sensor unit DIN rail set screw 79

55 MEVT Series nic sensor Connecting port Applicable tube Use us assignment's tube. Soft nylon (F-5 Series) Urethane (U-95 Series) When using a commercially available tube, check external dimension accuracy, thickness, and hardness. Use a urethane tube with a hardness of 9 and over (rubber hardness meter). If a tube that does not satisfy the diameter accuracy or hardness is used, the chucking force may drop, the tube may dislocate, or may be difficult to insert. Outer diameter Outer Bore size mm mm diameter Nylon Urethane ø ø.5 ø ø6 ø ø Tolerance of outer diameter Soft and hard nylon ±.mm Urethane ø, ø6 +.mm -.5mm Quality of air WARNING Do not supply other than compressed air. Use clean compressed air that does not contain corrosive gases. The air quality must satisfy the clean dry air ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent. CAUTION Poor air quality will worsen the characteristics and adversely affect the durability. For the pressure source, supply clean air from which solids, moisture, and oil have been sufficiently removed with a dryer, air, and oil mist. 5μm Regulator Bending radius of tube The tube's bending radius must be larger than the minimum bending radius. (Otherwise, this could result in dislocation or leaks) Bore size ø ø6 During Use & Maintenance Minimum bending radius mm Nylon Urethane Minimum tube length As a guide, the output port (A) tube length should have a capacity of cc and over. (Otherwise this could result in vibration) Min. length mm Bore size Nylon Urethane ø ø6 8 8 Cut of tube Use a tube knife (AZ), and cut at a right angle to the axis. could leak if a tube cut at a slant is inserted. Tube connection state Provide a straight section as long as the O.D. of the tube being used from the end of the joint, and avoid piping with a sudden bending at the joint insertion port. Check that the tube's tensile strength in the lateral direction does not exceed N. Applicable blanking plug Use a CKD-designated blanking plug. Blanking plug GWP*-B Series When control pressure is lowered with an input signal, etc., secondary air pressure through the EVT and is discharged from the exhaust port (R). Contamination of secondary piping and the inside of the load side adversely affect characteristics, etc. Keep the inside of piping as clean as possible. The component must be disassembled and assembled by a qualified worker. The grade not less than Pneumatics technique certification grade is required. Read the relevant product instruction manual thoroughly and fully familiarize yourself with work before disassembling or assembling the component. During Use & Maintenance WARNING Be sure to turn power off, stop supplied compressed air, and check that there is no residual pressure before starting maintenance. This is required to ensure safety. dryer Oil mist (Pressure switch) (Oil removing) (Recommended air circuit) 7

56 MEVT Series CAUTION Correct maintenance Plan daily inspections and periodic inspections. If maintenance is not correctly controlled, the product's functions could drop markedly and lead to a shortened life, damage, malfunctions, faults, and accidents.. Control of supplied compressed air pressure Is the set pressure supplied? Does the pressure gauge indicate the set pressure during operation of the device? Minimum (MIN). Control of air Is the drain correctly discharged? Is the bowl or element dirty?. Control of compressed air leaks from piping connections Is the state of the connection, especially at movable sections, normal?. EVTOperational status control Are operations delayed? Is exhaust normal? 5. Control of actuator operation Is operation smooth? Is the end stop state normal? Is coupling with the load normal? CAUTION Check procedures before changing the push-in joint size. If installed not correctly, leakage could be occurred. Maximum (MAX) Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. This product uses a compact solenoid valve as the actuator. The life may change according to the operation frequency by pressure switching and the working conditions, etc. The warranty term is set as one year or,, repeated operations, whichever is earlier, so use this as an inspection guideline. * The conditions for the,, operations listed in the warranty are as follows. When the input signal which causes the control pressure to rise from zero to the maximum control pressure is repeatedly applied in steps. The working air quality in this case shall be clean compressed air from the recommended air circuit. The secondary side load capacity shall be 5cm. Other How to replace cartridge join () Stop pin extract with driver, etc., () Pull the joint out. * Check that the is not removed when replacing. () Insert the joint for replacement vertically until it reaches the back. () Insert the stopper pin. Pull on the joint to confirm that it is properly installed. CAUTION Disassembling the could result in problems. Operation after disassembly cannot be guaranteed. If power is turned OFF under pressure, control pressure is held. To discharge pressure, lower set pressure and turn power OFF, or use a shut-off valve, etc. This holding state is not guaranteed for a long time. Check that supply pressure does not drop to less than the "Setting secondary pressure + maximum control pressure x.", If supply pressure in not supplied for a long time when control pressure is set within more than MPa to % F.S., large bearing sound is generated and product life cut. Avoid using so. When using the EVT Series, if there are leaks in secondary piping, vibration could occur. Securely pipe the so that there are no leaks. Leaks will prevent set pressure from being held, large beating sound is generated and product life is shortened. Avoid using so. Cartridge type push-in joint model no. Model Parts name EVT ø straight ø6 straight Model no. G JOINT C G JOINT C6 nic sensor unit 7

57 AP, /AF, APC Series Proportional valve AP, /AF Series CAUTION This has a highly accurate metal spool structure, so poor quality air adversely affects characteristic and durability. Use an air to suppress the generation of drain, and a submicron air (.μm) to remove solid such as tar and carbon. dryer 5μm Regulator Sub-micron (Pressure switch) (.μm) (Recommended air circuit) Design & Selection Installation & Adjustment This can be used in prelubricated applications. If lubrication is required, use Turbin Oil Class (ISO VG). Lubrication is effective in lowering the effect of air quality and lengthens life. When using the pressure type (AP), design secondary load volume as cm and over to prevent secondary pressure from vibrating. Characteristic of flow control (AF, AF) indicate the effective sectional area for the valve. When designing the, the composite effective sectional area with piping and joints is applied and linearity changes. The effective sectional area of parts other than the valve should be designed with.-fold to -fold larger effective sectional area. Note that if the cylinder has a restricted connection port, the required speed may not be attained. nic sensor CAUTION Install the proportional valve so the spool is parallel. The proportional valve will become hot, so do not install it near devices, etc., affected by heat. APC Series Vibration is generated from the proportional valve body, so use vibration proofing when installing the valve near devices, etc., easily affected by vibration. WARNING When using AC power specifications, there is a risk of electrical shook if the AC power supply section is touched while power is on. Turn power off before starting wiring. Do not touch the charged sections with wet hands. Installation & Adjustment CAUTION The controller is damaged if power terminal and input signal terminal polarities are reversed. Do not input a setting signal from an external source while the potentiometer is connected. Do not excessively tighten terminal screws. The APC body becomes hot, so do not install it near device, etc., affected by heat. 7

58 PI Series PI Series WARNING Use a kω or lager external variable resistor for manual purposes. EV Series and input signal differ depending on the model no. Select the " to V" type input signal when using the PI Series. WARNING There is a risk of electrical shock if the AC power supply section is touched while power is ON. Turn power off before starting wiring. Do not touch the charged sections with wet hands. CAUTION Do not wire the output terminal over long distances. Do not excessively tighten terminal screws. Design & Selection Installation & Adjustment EV5*-** to VDC EV*-** to VDC EVS*-** to VDC EV*V-** to VDC Do not connect the external output power source except to the EV Series. (The controller cannot be connected) Do not use this product where there are vibration or impact. Twist the PI output wire when possible (Twist the two wires). Check polarity of a COM terminal. nic sensor unit 7

59 nic sensor EVD Series, high-function, digital control D-sub connector Digital indicator Operation key Port size : Rc/ Flow rate : 6, /min Pressure range:, 5, 9 kpa Flow path section: Non-grease specifications Digital electro- Modular design Large flow type Port size : Rc/, Rc/8 Flow rate : 7, 5 /min Pressure range:, 5, 9 kpa EVD Series EDV Series digital electro - realizing high functions and ease-of-use in a compact size with a variety of new functions including pressure display, error display and direct memory functions. User-friendly with outstanding installation performance Digital display shows the control state at a glance. The output pressure value is displayed digitally with three digits. The output state (switch output ON-OFF) is displayed in addition to the error display. Output display -digit LED display Parallel input type available as a standard Direct control from the PLC is possible. design is 5% smaller (CKD comparison) Highly universal D-sub connector allows connections in two directions The connection can be rotated 9 from the top to side allowing a top or side connection to be selected freely according to the usage state. Modular design Filters and s, such as the C Series, can be connected. Digital electro- variation Series Pressure range Analog Parallel Realizing high-functions with microcomputer Error display function Errors are displayed and notified with electrical signals. Zero/span adjustment function Zero and span can be adjusted according to the usage methods. Direct memory function Input signals from an external source are no longer required. Freely adjust the secondary pressure with the product's operation keys. Preset input function Up to 8 channels of pressure can be saved in the main unit and switched with external signals. Switch output function Switch outputs (built-in overcurrent protection) is possible by setting the upper/lower limit pressure. Attaining high-accuracy, high-response pressure control Linearity.% Hysteresis.5% Response time.sec Proportional value change function (Only EVD*) Highly accurate and stable control is possible by adjusting the proportional value upward (one stage) or proportional value downward (ten stages). Eco-friendly design Complies with RoHS Directives All substances, such as lead and hexavalent chromium, which can adversely affect the global environment, have been eliminated from the materials. Energy saving The automatic power OFF function can automatically turn OFF the digital display. Switch output Analog output Material indication Material names are indicated on the main components to facilitate sorting for recycling. Input signal Port size Output method Max. flow rate Flow path section material Analog Parallel Switch Analog output output 7 75 Grease free Fluorine grease Vaseline (custom order) nic sensor Digital electro- unit

60 nic sensor Specifications Descriptions Working fluid Max. working pressure Min. working pressure Withstanding Inlet side pressure Output side Control pressure range Note Power voltage Current consumption Input signal (Input impedance) Pre-set input Output signal Note Error output signal Direct memory setting Display method Pressure display Display range Display resolution Hysteresis Note Linearity Note Resolution Note Repeatability Note Temperature Zero point variation characteristics Span variation Maximum flow rate (ANR) Note Step response Note 5 Loadless vibration proof Ambient temperature Working fluid temperature Piping connection port size Installation direction Weight (body) Protective circuit EVD--*8* Analog type (* //) Digital electro- EVD- Series JIS symbol EVD--P8* Parallel type EVD-5-*8* Analog type (* //) EVD-5-P8* Parallel type EVD-9-*8* Analog type (* //) EVD-9-P8* Parallel type compressed air (ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent) 6kPa 7kPa kpa Control pressure + 5kPa Control pressure + kpa kpa 5kPa 5kPa 5kPa 75kPa 5kPa to kpa to 5kPa to 9kPa VDC % (safety power supply with ripple ratio % or less).5a or less (power supply rush current.6a or less when power turned ON) - VDC (6.7kΩ) -5 VDC (kω) -madc(5ω) bit - VDC (6.7kΩ) -5 VDC (kω) -madc(5ω) bit - VDC (6.7kΩ) -5 VDC (kω) -madc(5ω) bit 8 points None 8 points None 8 points None Output accuracy: ±6%F.S or less, analog output: -5 VDC (connected load impedance 5kΩ or more) Switch output: NPN or PNP open collector output, V or less 5mA or less, voltage drop.v or less, PLC and relay compatible NPN or PNP open collector output, V or less 5mA or less, voltage drop.v or less, PLC and relay compatible to kpa (Minimum setting width kpa/setting resolution kpa) 5 to 5kPa (Minimum setting width kpa/setting resolution kpa) 9 to 9kPa (Minimum setting width kpa/setting resolution kpa) to kpa 7-segment LED digits, display accuracy: ±%F.S. or less to 5kPa to 9kPa kpa kpa kpa 6 /min..5%f.s. or less ±.%F.S. or less.%f.s. or less.%f.s. or less.5%f.s./ C or less.7%f.s./ C or less /min..sec. or less 98m/s or less 5 to 5 C 5 to 5 C Rc/ Free 5 g Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection Note : There is a %F.S. or less residual pressure when the input signal is %. (EVD-: kpa, EVD-5: 5kPa, EVD-9: 9kPa) Note : Select the analog output or switch output. Note : The above characteristics apply in the control pressure to 9% range with a VDC power voltage and the working pressure set to maximum control pressure +5kPa (EVD-), or maximum control pressure +kpa (EVD-5, 9). Also, limited to a closed circuit in the secondary side, and the pressure may vary if used as air blow etc. Note : The characteristics where working pressure is maximum and control pressure is maximum are shown. Note 5: Working pressure: Max. working pressure and step rate: 5% F.S. % F.S. 5% F.S. 6% F.S. 5% F.S. % F.S. Secondary battery compliant device specifications (Catalog No. CC-97) EVD5/9 - [Input specifications, port diameter, output specifications] - [Option] - - EVD5/9 - [Input specifications, port diameter, output specifications] - [Option] - - P* P* 76 Contact your nearest CD sales office or dealer for details.

61 EVD- Series How to order / Internal structure drawing How to order EVD- 5 8 AN CB A Pressure specifications Symbol A Pressure specifications kpa 5 5kPa Descriptions B Input specifications 9 9kPa B Input specifications - VDC -5 VDC C Port diameter D Output specifications -madc P Parallel bit C D Port diameter 8 Rc/ Output specifications AN -5V analog, error (NPN) AP -5V analog, error (PNP) SN Switch (NPN), error (NPN) SP Switch (PNP), error (PNP) E Option E Option Cable option Blank None C Analog 9-conductor, cable m Discrete option (cable, bracket) model no. EVD- C F Power voltage C Analog 9-conductor, cable m P Parallel 5-conductor, cable m P Parallel 5-conductor, cable m Bracket option enclosed Blank None B B-type bracket, floor mounted type L L-type bracket, wall mounted type F Power voltage nic E Option Internal structure and parts list VDC *Contact your nearest CD sales office or dealer for details on UL compliant parts. sensor 9 No. Parts name Cover D sub-connector Housing Material PBT resin ABS resin 5 Controller board way valve Valve base Pilot chamber Body Pressure sensor Diaphragm Relief sheet Steel ball (exhaust valve) Valve Bottom rubber Bottom plug O ring Polyphenylene sulfide resin Polyphenylene sulfide resin Aluminum alloy die-casting Special nitrile rubber Aluminum alloy Stainless steel Special nitrile rubber, stainless steel Silicon rubber Brass, electroless nickel plating Fluoro rubber Digital electro- unit 77

62 EVD- Series Dimensions 8.6 D-sub connector 5-pin, plug -# OUNC (7) ø. Port R (Pilot air exhaust port) IN OUT Rc/ 8 Option external dimensions B-type bracket(-b): Floor mounted type 6 8 ø ø 56 - full R.. L-type bracket(-l): Wall mounted type full R nic 6 -M depth6 sensor ø5. EXH port *Refer to page 75 for details on the outline dimensions of the cable options.

63 I/O characteristics EVD Control pressure (kpa) Input signal (%) Monitor output (Only analog output type: Model AN/AP) EVD Analog output (VDC) Flow characteristics Relief characteristics Input signal (%) Input signal (%) EVD EVD 5 EVD 9 Working pressure 6kPa 6 Working pressure 7kPa 9 Working pressure kpa Flow [R/min. (ANR)] Flow [R/min. (ANR)] Flow [R/min. (ANR)] Control pressure (kpa) 5 EVD Control pressure (kpa) 6 8 Control pressure (kpa) 8 6 Working pressure 6kPa EVD- Series I/O characteristics / monitor output / flow characteristics / relief characteristics EVD 5 Control pressure (kpa) EVD 5 Analog output (VDC) Control pressure (kpa) 5 EVD 5 Control pressure (kpa) 5 Control pressure (kpa) 6 5 Working pressure 7kPa EVD 9 EVD Flow [R/min. (ANR)] Flow [R/min. (ANR)] Flow [R/min. (ANR)] Control pressure (kpa) EVD 9 Analog output (VDC) Control pressure (kpa) Control pressure (kpa) Control pressure (kpa) 5 Working pressure kpa nic sensor Digital electro- unit 79

64 nic sensor Specifications Descriptions Working fluid Max. working pressure Min. working pressure Withstanding Inlet side pressure Output side Control pressure range Note Power voltage Current consumption Input signal (Input impedance) Pre-set input Output signal Note Error output signal Direct memory setting Display method Pressure display Display range Display resolution Hysteresis Note Linearity Note Resolution Note Repeatability Note Temperature Zero point variation characteristics Span variation Maximum flow rate (ANR) Note Step response Note 5 Loadless vibration proof Ambient temperature Working fluid temperature Piping connection IN, OUT port port size EXH port Installation direction Weight (body) Protective circuit EVD--*8* EVD--** Analog type (* //) Digital electro- EVD- Series JIS symbol EVD--P8* EVD--P* Parallel type EVD-5-*8* EVD-5-** Analog type (* //) EVD-5-P8* EVD-5-P* Parallel type EVD-9-*8* EVD-9-** Analog type (* //) EVD-9-P8* EVD-9-P* Parallel type compressed air (ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent) 6kPa 7kPa kpa Control pressure + 5kPa Control pressure + kpa kpa 5kPa 5kPa 5kPa 75kPa 5kPa to kpa to 5kPa to 9kPa VDC % (safety power supply with ripple ratio % or less).5a or less (power supply rush current.6a or less when power turned ON) - VDC (6.7kΩ) -5 VDC (kω) -madc (5Ω) bit - VDC (6.7kΩ) -5 VDC (kω) -madc (5Ω) bit - VDC (6.7kΩ) -5 VDC (kω) -madc (5Ω) bit 8 points None 8 points None 8 points None Output accuracy: ±6%F.S or less, analog output: -5 VDC (connected load impedance 5kΩ or more) Switch output: NPN or PNP open collector output, V or less 5mA or less, voltage drop.v or less, PLC and relay compatible NPN or PNP open collector output, V or less 5mA or less, voltage drop.v or less, PLC and relay compatible to kpa (Minimum setting width kpa/setting resolution kpa) 5 to 5kPa (Minimum setting width kpa/setting resolution kpa) 9 to 9kPa (Minimum setting width kpa/setting resolution kpa) to kpa 7-segment LED digits, display accuracy: ±%F.S. or less to 5kPa to 9kPa kpa kpa kpa 7 /min..5%f.s. or less ±.%F.S. or less.%f.s. or less.%f.s. or less.5%f.s./ C or less.7%f.s./ C or less 5 /min..sec. or less 98m/s or less 5 to 5 C 5 to 5 C Port diameter option 8:Rc/, : Rc/8 Rc/8 Free 5g Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection Note : There is a %F.S. or less residual pressure when the input signal is %. (EVD-: kpa, EVD-5: 5kPa, EVD-9: 9kPa) Note : Select the analog output or switch output. Note : The above characteristics apply in the control pressure to 9% range with a VDC power voltage and the working pressure set to maximum control pressure +5kPa (EVD-), or maximum control pressure + kpa (EVD-5, 9). Also, limited toa closed circuit in the secondary side, and the pressure may vary if used as air blow etc. Note : The characteristics where working pressure is maximum and control pressure is maximum are shown. Note 5: Working pressure: Max. working pressure and step rate: 5% F.S. % F.S. 5% F.S. 6% F.S. 5% F.S. % F.S. 7

65 EVD- Series How to order / Internal structure drawing How to order EVD- 5 8 EVD- E A Pressure specifications C Option AN B Input specifications C Port diameter (IN,OUT) Option (cable, bracket) single part model Internal structure and parts list CB D Output specifications E Option F Power voltage Symbol Descriptions A kpa 5 5kPa 9 9kPa B - VDC -5 VDC -madc P Parallel bit C D E Pressure specifications Input specifications 8 Rc/ Rc/8 AN -5V analog, error (NPN) AP -5V analog, error (PNP) SN Switch (NPN), error (NPN) SP Switch (PNP), error (PNP) Option Cable option Blank None C Analog 9-conductor, cable m C Analog 9-conductor, cable m P Parallel 5-conductor, cable m P Parallel 5-conductor, cable m Bracket option enclosed Blank None B B-type bracket, floor mounted type L L-type bracket, wall mounted type F Port diameter (IN,OUT) Output specifications Power voltage VDC *Contact your nearest CD sales office or dealer for details on UL compliant parts. nic sensor No. Parts name Cover D sub-connector Housing Controller board Material PBT resin ABS resin 5 6 way valve Valve base Polyphenylene sulfide resin Pilot chamber Piston body assembly Body Pressure sensor Piston assembly Spring Top valve Bottom valve Bottom cap O ring Base Polyphenylene sulfide resin Aluminum alloy die-casting, etc. Aluminum alloy die-casting Aluminum alloy, stainless steel, etc. Stainless steel Brass, special nitrile rubber Brass, special nitrile rubber Brass Nitrile rubber Steel sheet Digital electro- unit 7

66 EVD- Series Dimensions 5. D-sub connector 5-pin, plug -# OUNC (optional) (Model no.: SlW-A) () ø. Port R (Pilot air exhaust port) IN OUT Option dimensions B-type bracket (-B): Floor mounted type L-type bracket (-L): Wall mounted type 8 ø full R ø ø.5 ø Rc/ -Rc/ Rc/8 8 EXH port nic -M5 depth sensor. *Refer to page 75 for details on the outline dimensions of the cable options

67 EVD- Series I/O characteristics / Monitor output I/O characteristics EVD- EVD-5 EVD-9 Control pressure (kpa) Input signal (%) Monitor output (Only analog output type: Model AN/AP) Control pressure (kpa) Input signal (%) Control pressure (kpa) Input signal (%) EVD- EVD-5 EVD Control pressure (kpa) 5 Control pressure (kpa) Control pressure (kpa) nic sensor Digital electro- unit Analog output (VDC) Analog output (VDC) Analog output (VDC) 7

68 EVD- Series Flow characteristics EVD--*8 EVD--* Working pressure 6kPa Working pressure 6kPa Control pressure (kpa) 8 6 Control pressure (kpa) Flow [R/min. (ANR)] 6 8 Flow [R/min. (ANR)] EVD-5-*8 Control pressure (kpa) 6 5 Working pressure 7kPa EVD-5-* Control pressure (kpa) 6 5 Working pressure 7kPa Flow [R/min. (ANR)] Flow [R/min. (ANR)] nic sensor EVD-9-*8 Working pressure 78kPa Flow [R/min. (ANR)] Control pressure (kpa) EVD-9-* Working pressure 78kPa Flow [R/min. (ANR)] Control pressure (kpa) Relief characteristics EVD- Control pressure (kpa) 8 6 Working pressure 6kPa EVD-5 Control pressure (kpa) 6 5 Working pressure 7kPa EVD Control pressure (kpa) Working pressure kpa Flow [R/min. (ANR)] Flow [R/min. (ANR)] Flow [R/min. (ANR)] 7

69 Cable optional dimensions EVD-C, EVD-C D-sub socket pin No (ø) (ø6) Isolator color Brown Orange Yellow Red Gray White Name Input type EVD-P, EVD-P 8.5 Pre-set input signal Bit Bit Bit Vacant 5 Power supply + +VDC 6 Vacant Vacant Vacant Vacant Note: The No. pin common is the common for the preset input (pin No. to ). Common - VDC Input signal -5 VDC - Vacant madc EVD Series Cable optional dimensions Shield wire *Connect the shielding wire to the power - ( V). 9-AWG6 Vacant Monitor output Output -5 VDC Green Switch output NPN or PNP output Blue Error output NPN or PNP output Shield wire *Connect the shielding wire to the power - ( V). 5 Black Power supply - (V) nic sensor 8.9. (ø) (ø6.5) 5-AWG6 D-sub socket pin No. Isolator color Name Input type Brown Orange Yellow Parallel input signal Purple Bit Bit Bit Bit 5 Red Power supply + +VDC 6 Light blue 7 Pink 8 White (with black line) Parallel input signal 9 Red (with black line) Bit 5 Bit 6 Bit 7 Bit 8 Gray Common White Note: The No. pin common is the common for the parallel input signal (pin No., to, 6 to 9,, ). Bit 9 Green (with black line) Parallel input signal Bit Monitor output Output -5 VDC Green Switch output NPN or PNP output Blue Error output NPN or PNP output 5 Black Power supply - (V) Digital electro- unit 75

70 EVD Series Wiring methods Example of internal circuit and load connection Analog input type EVD-*-*AN-*-*, EVD-*-*AN-*, EVD-*-*AN-* EVD-*-*AN-*-*, EVD-*-*AN-*, EVD-*-*AN-* (Analog input, analog output + error output type NPN output) EVD-*-*AP-*-*, EVD-*-*AP-*, EVD-*-*AP-* EVD-*-*AP-*-*, EVD-*-*AP-*, EVD-*-*AP-* (Analog input, analog output + error output type PNP output) Main circuit Pin 5 (power +) Pin (analog input) Pin (preset bit ) Pin (preset bit ) Pin (preset bit ) Pin (common) Signal generator + Main circuit Output short-circuit protection circuit Pin 5 (power +) Pin (monitor output) Pin (error output) Pin (analog input) Pin (preset bit ) max5ma Signal generator + Pin (monitor output) Pin (preset bit ) Load Load Output short-circuit protection circuit Pin (error output) Pin 5 (power -) Load max5ma Load Pin (preset bit ) Pin (common) Pin 5 (power -) nic EVD-*-*SN-*-*, EVD-*-*SN-*, EVD-*-*SN-* EVD-*-*SN-*-*, EVD-*-*SN-*, EVD-*-*SN-* (Analog input, switch output + error output type NPN output) EVD-*-*SP-*-*, EVD-*-*SP-*, EVD-*-*SP-* EVD-*-*SP-*-*, EVD-*-*SP-*, EVD-*-*SP-* (Analog input, switch output + error output type PNP output) sensor Pin 5 (power +) Pin 5 (power +) Pin (analog input) Pin (preset bit ) Pin (preset bit ) Signal generator Output short-circuit protection circuit Pin (switch output) Pin (error output) max5ma max5ma Main circuit Pin (preset bit ) Pin (common) + Main circuit Pin (analog input) Pin (preset bit ) Signal generator + Output short-circuit protection circuit Pin (switch output) Pin (error output) Pin 5 (power -) Load max5ma Load max5ma Pin (preset bit ) Pin (preset bit ) Pin (common) Pin 5 (power -) Load Load Connector pin layout (product side) (Analog input type) () () () () (5) The analog input type does not have the (), (6), (7), (8), (9) or () pins. (6) (7) (8) (9) () () () () () (5) 76

71 EVD Series Technical data Example of internal circuit and load connection Parallel input type EVD-*-P*AN-*-* EVD-*-P*AN-*-* (Parallel input, analog output + error output type NPN output) EVD-*-P*AP-*-* EVD-*-P*AP-*-* (Parallel input, analog output + error output type PNP output) Main circuit Pin 5 (power +) Pin (MSB bit ) Pin (bit 9) Pin 9 (bit 8) Pin 8 (bit 7) Pin 7 (bit 6) Pin 6 (bit 5) Pin (bit ) Pin (bit ) Pin (bit ) Pin (LSB bit ) Pin (common) Pin (monitor output) + Main circuit Output short-circuit protection circuit Pin 5 (power +) Pin (monitor output) Pin (error output) Pin (MSB bit ) Pin (bit 9) Pin 9 (bit 8) Pin 8 (bit 7) Pin 7 (bit 6) Pin 6 (bit 5) Pin (bit ) Pin (bit ) Pin (bit ) Pin (LSB bit ) max5ma Load Load + Output short-circuit protection circuit Pin (error output) Pin 5 (power -) Load max5ma Load Pin (common) Pin 5 (power -) EVD-*-P*SN-*-* EVD-*-P*SN-*-* (Parallel input, switch output + error output type NPN output) EVD-*-P*SP-*-* EVD-*-P*SP-*-* (Parallel input, switch output + error output type PNP output) nic Pin 5 (power +) Pin 5 (power +) sensor Pin (MSB bit ) Pin (bit 9) Pin 9 (bit 8) Pin 8 (bit 7) Pin 7 (bit 6) Pin 6 (bit 5) Pin (bit ) Pin (bit ) Pin (bit ) Pin (LSB bit ) Output short-circuit protection circuit Pin (switch output) Pin (error output) max5ma max5ma Main circuit Output short-circuit protection circuit Pin (common) Pin (switch output) Pin (error output) Pin 5 (power -) Load max5ma Load max5ma + Main circuit Pin (MSB bit ) Pin (bit 9) Pin 9 (bit 8) Pin 8 (bit 7) Pin 7 (bit 6) Pin 6 (bit 5) Pin (bit ) Pin (bit ) Pin (bit ) Pin (LSB bit ) Pin (common) Pin 5 (power -) Load Load + Connector pin layout (product side) (Parallel input type) () () () () (5) (6) (7) (8) (9) () () () () () (5) Digital electro- unit 77

72 EVD Series Input method Relation of parallel type input signal and control pressure The parallel type input signal has bits, and when converted into a decimal is O-. Input signal = EVD setting pressure (kpa)/maximum control pressure x The maximum control pressure is kpa for EVD- 5kPa for EVD-5 9kPa for EVD-9. Example: When setting kpa with EVD-5 (kpa) / 5 (kpa) = When converted and set in 6, then 5 (kpa)6 /. =. (kpa) When 6 (decimal) is converted into a binary, the result is. sets the input signal ON, and sets the input signal OFF. (Refer to table below). D-sub socket pin No. Cable option isolator color Type of input Binary [For 6 (decimal)] Green (with black line) Bit MSB White Bit 9 Red (with black line) White (with black line) Pink Light blue Purple Yellow Orange Brown Bit 8 Bit 7 Bit 6 Bit 5 Bit Bit Bit Bit LSB Input signal ON OFF OFF ON ON OFF OFF ON ON OFF nic sensor Relation of preset memory and input signals D-sub socket pin No. No. Cable option isolator color Yellow Orange Brown Pre-set memory Type of input Bit Bit Bit OFF OFF OFF OFF OFF ON P P OFF ON OFF P Input signal OFF ON ON ON OFF OFF ON OFF ON P P5 P6 ON ON OFF P7 ON ON ON P8 78

73 MEMO nic sensor Digital electro- unit 79

74 EVD Series Names and functions of display and operation section Output display (red) * If there are conditions of +/-, upper/lower limit, key Key "F" is displayed when confirming the function setting. "-" lights when switch output is on. (Only when using switch output specifications.) * Blinks when overcurrent is detected. "E" lights when error output is on. * Blinks when overcurrent is detected. and are indicated. Use to enter each setting mode. Use to set values, etc., when setting data. -digit LED display (green) Displays the pressue display and function setting details during RUN mode (pressure display). * The setting mode No. and setting details are displayed when displaying details of function settings. The value, etc., is displayed when data is set. The error code No. is displayed when an error is output. (Pressure display) (Setting details display) Key Setting mode No. Setting descriptions (Error output) Code No. Setting details are sequentially displayed during RUN mode (pressure display). Use to select the setting when setting data. Use to count up the value, etc., when setting data. Function list Screen display Use to select the digit of the value, etc., when setting data. Name Display content (RUN MODE) Setting details (setting mode) Pressure Display Secondary pressure is confirmed with the -digit numerical display LED. Unit: kpa Setting method nic sensor Screen F Screen F Input signal selection Zero/span adjustment The selected input signal type and current target value (pressure conversion value) are confirmed. *When pre-set input (8-point) is selected, the currently selected preset No. and setting value are displayed. The validity of the zero/span adjustment and the setting value are confirmed. When "valid," the F.on - zero point adjustment value (L) and span point adjustment value (H) are alternately displayed. * The default setting is set with the full scale ( ). For analog input: Analog input, preset memory input, or direct memory input is selected. For pre-set input/direct memory input, input the setting for this mode. For parallel input: Parallel input or direct memory input is selected. For direct memory input, input the setting for this mode. Select whether to use with the full scale or with the zero and span adjusted. When zero/span adjustment is selected, the adjustment value for this mode can be set randomly. P.75 P.75 Screen F Screen F Automatic power off Switch output * Only switch output specifications The validity of the automatic power off function is confirmed. * The default setting is invalid ( ). The switch output validity and setting value are confirmed. When "Mode valid" is selected, the F. - - tolerable range setting value (L) - + tolerable range setting value (H) are alternately displayed. When "Mode valid" is selected, F. - minimum setting value (L) - maximum setting value (H) is alternately displayed. * The default setting is invalid ( ). The validity of the automatic power off function is selected. Note: The automatic power off time is about one minute and cannot be changed. Switch output validity is selected. When valid, mode or is selected. +/- tolerable values and maximum/minimum values are set randomly. Note: The hysteresis width cannot be set. P.75 P.75 Screen F5 * Only EVD-* Proportional change The validity of proportional value changes and the set level are confirmed. When "Proportional Value Up" is selected, F5.H is displayed. When "Proportional Value Down" is selected, the F.5L - setting value is alternately display. * The default setting is the standard value ( ). Select whether to use the standard value or whether to change the proportional value. The proportional value level is set in this mode only when "Proportional Value Down" is selected. ( stages) P

75 Operation RUN MODE dislay content list F (input signal selection) screen F display descriptions The input signal type and target value are alternately displayed. Input signal type symbol (Analog input type) EVD-*-**-*-*,EVD-*-**-*-*,EVD-*-**-*-* Input signal type symbol to Target (pressure conversion) Descriptions Analog - VDC input * Analog -5 VDC input * Analog -madc input * Pre-set memory input The selected preset No. is displayed. Direct memory input * [F/A], [F/A], or [F/A] display one based on the model. F (zero/span adjustment) screen F display descriptions (Digital input type) EVD-*-P**-*-* Input signal type symbol The validity of the zero/span adjustment and the setting value are confirmed. Note: This function is invalid if preset memory input or direct memory input is selected for F mode. Invalid Valid F (auto power off ) screen F display descriptions The validity of the automatic power off function is confirmed. Invalid Valid Zero Set value point (%) adjustment Span Set value point (%) adjustment F (switch output function) screen F dislay description (applicable model: EVD-**-**SN, EVD-**-**SP) The switch output validity and setting value are confirmed. Note: This is invalid with analog output specifications. ( ) is displayed on the screen but cannot be used. Control pressure % % (Invalid) % % Input signal Descriptions Parallel bit input Direct memory input % Zero point (L) setting range to5% % (Valid) % % Input signal EVD Series Operation Span point (H) setting range to% nic sensor Invalid Mode Mode - tolerance Set value (%) Lower limit side Set value (%) + tolerance Set value (%) Upper limit side Set value (%) H (+ tolerance) Input signal set point L (- tolerance) Output OFF (Mode ) ON ON ON OFF OFF H (upper limit side) L (lower limit side) Output ON (Mode ) ON ON OFF OFF OFF Digital electro- unit 75

76 EVD Series nic sensor RUN MODE dislay content list F5 (proportional value change) screen F5 display descriptions Applicable model: EVD--***-*-*,EVD--***-*-* Note) This screen is no displayed for EVD-*5 or EVD-*9. The validity of the proportional value and the set level are confirmed. When invalid When valid <Effect of increasing propotional value> The effect differs with piping and load capacity conditions, but control is done at higher accuracy. Hunting occures easily, requiring care during use. Control pressure Invalid Increased proportional value Standard setting Input signal Decreased proportional value Before adjustment (standard setting) When the proportional value is increased (H) When the proportional value is decreased (H) : control is applied with standard values (default value) : "Proportional value up" or "proportional value down" is selected. The set level is selected from ten stages only when "proportional value down" is selected. Increased proportional value setting Pressure reduction Pressure increase Input signal <Effect of decreasing propotional value> If vibration occures during blow applications or during a leakage test, stabe control is ensured by decreasing the proportional value as shown below. Control pressure Time Control pressure Setting level Control pressure After adjustment (Decreased proportional value setting) Time 75

77 EVD Series Operation How to set setting mode CAUTION Release the key lock before changing setting details. (Refer to page 756.) F (input signal selection function) Hold down the SET key for two seconds or longer with the screen F displayed. F setting mode is entered. Changing the analog input signal selection Note: Anlog input specifications cannot be changed. seconds or longer When analog input is selected *Default setting After setting, exits setting mode and returns to screen F. seconds or longer When preset memory input is selected Enters preset memory input setting mode (see below) seconds or longer When direct memory input is selected Enters the direct memory input setting mode (see below) seconds or longer Exits input signal selection setting mode, and returns to screen F. Changing parallel input signal selection seconds or longer When parallel input is selected *Default setting After setting, exits setting mode and returns to screen F. seconds or longer When direct memory input is selected Enters the direct memory input setting mode (see below) seconds or longer Exits input signal selection setting mode, and returns to screen F. Using preset memory input setting mode * Hold down the SET key for two seconds or longer with screen F preset memory input set. nic sensor seconds or longer Input the targer value. key: Moves digit key: Counts up value seconds or longer Moves to the next No. after setting. seconds or longer seconds or longer After setting, exits setting mode, and returns to screen F. Exit preset memory input setting mode and returns to screen F. Input the targer value. key: Moves digit key: Counts up value Using direct memory input setting mode * Hold down the SET key for two seconds or longer with screen F direct memory input set. seconds or longer Input the targer value. key: Moves digit key: Counts up value After setting, exits setting mode, and returns to screen F. Digital electro- unit 75

78 EVD Series How to set setting mode CAUTION Release the key lock before changing setting details. (Refer to page 756.) F (zero/span adjustment function) Hold down the SET key for two seconds or longer with the screen F displayed. F setting mode is entered. Exits zero/span adjustment setting mode and returns to screen F. seconds or longer To use with full scale *Default setting After setting, exits setting mode and returns to screen F. seconds or longer To use with adjusted zero/span seconds or longer Input the setting value. key: Moves digit key: Counts up value seconds or longer Input the setting value. key: Moves digit key: Counts up value seconds or longer After setting, exits setting mode and returns to screen F. * This function cannot be used when present memory input or direct memory input is selected with F (input signal selection function). Only the full scale can be used. F (automatic power OFF function) Hold down the SET key for two seconds or longer with the screen F displayed. F setting mode is entered. seconds or longer To disable automatic power off function *Default setting After setting, exits setting mode and returns to screen F. seconds or longer To enable automatic power off function After setting, exits setting mode and returns to screen F. seconds or longer nic sensor Exits automatic power off mode, and returns to screen F. * If any key is pressed during automatic power off, the display is turned on. * The automatoc power off time is set to about one minute and cannot be changed. F (switch output function) Hold down the SET key for two seconds or longer with the screen F displayed. F setting mode is entered. (Applicable model: EVD-**-**SN,EVD-**-**SP) Note: This is not vald with analog output specifications. ( ) is displayed on the screen but cannot be used. seconds or longer To disable switch output *Default setting After setting, exits setting mode and returns to screen F. seconds or longer To enable switch output mode After setting, exits setting mode and returns to screen F. seconds or longer Input the setting value. key: Moves digit seconds or longer Input the setting value. key: Moves digit seconds or longer key: Counts up value key: Counts up value To enable switch output mode After setting, exits setting mode and returns to screen F. seconds or longer seconds or longer seconds or longer Exits switch output setting mode, and returns to screen F. Input the setting value. key: Moves digit key: Counts up value Input the setting value. key: Moves digit key: Counts up value 75

79 EVD Series Operation How to set setting mode CAUTION Release the key lock before changing setting details. (Refer to page 756.) F5 (Proportional value change function) Hold down the SET key for two seconds or longer with the screen F5 displayed. F5 setting mode is entered. Applicable model: EVD--***-*-*,EVD--***-*-* Note) This screen is no displayed for EVD-*5 or EVD-*9. seconds or longer To disable the proportional value change function *Default setting After setting, exits setting mode and returns to screen F5. seconds or longer To use with increased proportional values After setting, exits setting mode and returns to screen F5. seconds or longer To use with decreased proportional values Exits proportional value change mode and returns to screen F5. seconds or longer Select the setting level. key: Setting level up + key: Setting level down seconds or longer Select the setting level. key: Setting level up + key: Setting level down seconds or longer After setting, exits setting mode and returns to screen F5. After setting, exits setting mode and returns to screen F5. After setting, exits setting mode and returns to screen F5. nic sensor *When used with a decreased proportional value, operation takes place with the set level displayed on the even when the set level is selected. When the set level is decided, press the "SET key" for two seconds or longer to enter the value. Digital electro- unit 755

80 EVD Series Key lock This function prevents incorrect operation. Release the key lock before changing settings. Operating the key lock Releasing the key lock nic sensor Hold down simultaneously for two seconds or longer * The key is locked when power is turned on or turned on again. Each setting range Function F: Input signal selection Pre-set memory input F: Input signal selection Direct memory input F: Zero/span adjustment F: Switch output Mode F: Switch output Mode F5: Proportional value change function Proportional value up F5: Proportional value change function Proportional value down Settin display screen Setting details Setting specifications Set the target value (pressure). Set the target value (pressure). Set the zero point adjustment value. Set the span point adjustment value. Set the - tolorable value. Set the + tolorable value. Set the minimum value. Set the maximum value. The level cannot be set. Set the level. Hold down simultaneously for two seconds or longer Note Range: * / to *5 / to 5 *9 / to 9 Setting min. unit: kpa Note Range: * / to *5 / to 5 *9 / to 9 Setting min. unit: kpa Range: to 5 Setting level: % Note Range: to Setting min. unit: % Range: - to -5 Setting min. unit: -% Range: to 5 Setting min. unit: % Note Range: to 9 Setting min. unit: % Note Range: to Setting min. unit: % Range: to Setting min. unit: Note : If set to a pressure of % F.S. or less, it may not be possible to control pressure due to the effect of residual pressure. Note : The setting range may be limited depending on the setting value. F: The switch output function is limited to the switch to the switch output type. It cannot be used with the analog output type. Applicable model: EVD-**-**SN, EVD-**-**SP F5: The proportional value change function is limited to the pressure range kpa type. Applicable model: EVD--*** Note 756

81 EVD Series Operation Default mode settings (Initialization) Screen display Screen F Screen F Screen F Screen F Screen F5 Name Setting display Setting details Input signal selection Zero/span adjustment Auto power off Switch output *Only switch output specifications Proportional value change * Only EVD-* Analog type A.A.A Parallel type Analog/parallel input Full scale (Zero/span adjustment invalid) Auto power off invalid Switch output invalid Standard setting (Proportional value change invalid) <Initializing> Hold down simultaneously for three seconds or longer In initialization Complete Error code Error display Cause Countermeasures The power voltage is not within the rating. Detected at 9.5 VDC Detection accuracy ±% The input signal exceeded the rating range. Detected at % or more input. Detection accuracy ±% An error occurred during EEPROM reading or writing. Check the product's specifications, set the power voltage within the rated range, then turn power on again. Check the product's input signal type, set the input signal within the rated range, then turn power on again. Contact your CKD branch or dealer. nic sensor An error occurred during memory reading or writing. Secondary pressure did not reach the set value for five seconds or more consecutively. % F.S. or less of the set value was not attained. ( Detection accuracy ±6%F.S. ) The switch output's overcurrent protection circuit has functioned. When the above errors occur, the error displays and error output turn on. Contact your CKD branch or dealer. Check primary pressure provide pressure within the rating range, then turn power on again. Check that ther are no leaks from pipes, joints, or other devices. Correctly connect, then turn power on again. If the error is not resolved, contact your CKD branch or dealer. Check whether load current exceeds the rating. Correctly connecct, then turn power on again. Digital electro- unit 757

82 EVD Series nic sensor Glossary Max. working pressure Maximum value of primary side pressure which can satisfy the specifications. Differs according to the pressure specifications. Min. working pressure The primary pressure value required to control up to the full scale pressure. Differs according to the pressure specifications. Withstanding pressure Pressure value under which the electro will not break even if temporarily applied. The supply side and output side guaranteed values are given separately to limit the withstand pressure of the pressure sensor mounted on the secondary side. Control pressure range Indicates the pressure which can be controlled. Depending on the product, a residual pressure may be generated. With the EVD, % F.S. or less residual pressure is generated when the input signal is % F.S. Note: This is different from the guaranteed accuracy range. Refer to the hysteresis and linearity items below. Hysteresis (measurement circuit ) The difference (D) of the rise curve and lower curve when the input signal is reciprocated once between % and %, indicated as a percentage of the full scale (FS). (Hysteresis) = Maximum value of D / FS control pressure x [%] Note: The guaranteed accuracy range will differ according to the product. For EVD, % to 9% F.S. is the guaranteed range. Linearity (measurement circuit ) The difference (D) from the reference line connecting the input signal (X) % F.S. and (X) % F.S. when the input signal is reciprocated once between % F.S. to % F.S., indicated as a percentage of the full scale (FS). (Linearity) = Maximum value of D / FS control pressure x [%] Note: The guaranteed accuracy range will differ according to the product. For EVD, X=% F.S., X=9% F.S. is the guaranteed range. (Straight line connecting center value %F.S. and 9%F.S.) Hysteresis When characteristic curve is lowering Characteristic curve center value When characteristic curve is rising % X X % Resolution (measurement circuit ) The minimum value of the input signal generated when the control pressure changes, indicated as a percentage of the full scale (F.S.). The value is indicated as the difference with the input signal obtained after the input signal is pressurized from % F.S. to 5% F.S. and held for seconds or longer, then gradually increased until the control pressure starts to rise again. This is applied in the same way for input signal 5% F.S. and 85% F.S. Repeatability (measurement circuit ) The maximum value of the control pressure variation when the same setting value is repeatedly applied is indicated as a percentage of the full scale (F.S.). The value is calculated with the variation of the control pressure (D) when the input signals % F.S. and 5% F.S. are repeated applied. (Repeatability) = D / FS control pressure x [%] Temperature characteristics Indicates the fluctuation of the control temperature according to changes in the ambient temperature (reference temperature 5 C) converted per C. The characteristics are indicated for the zero point and span width. D D Linearity Maximum flow rate (measurement circuit ) Indicates flow rate possible at control pressure % F.S.. Relief characteristics (measurement circuit ) Indicates the relation of the control pressure and exhaust flow rate when a back pressure is applied on the secondary side from an external source in the pressure control state. The relief flow rate when the back pressure is gradually increased is measured. Step response (measurement circuit ) Indicates the time for the control pressure to reach the set pressure in respect to a stepped input signal. The time for the control pressure to reach the setting value ±5% F.S. range after the input signal is applied is measured. 5% 95% % Input signal Set control pressure % Step response time (Response time) = Time to reach within ±5% of final value 758

83 EVD Series Glossary CKD measurement circuit (Measurement circuit ) P Sample Outline ø6 (inner diameter ø) tube Outline ø6 (inner diameter ø) tube (Measurement circuit ) Signal generator X X-Y recorder Y Pressure detector Signal generator P Metering valve Differential pressure detector (flow rate) X Sample P Laminar flow type flow meter X-Y recorder Y nic sensor Pressure detector (P) (Measurement circuit ) Signal generator Pressure detector Y X-Y recorder P P' P X Inlet side IN EXH Sample OUT Metering valve Back pressure side Differential pressure detector (flow rate) Digital electro- unit 759

84 nic sensor JIS symbol Overview In this electro EV Series, feedback control with semiconductor pressure sensor and electronic control circuit is used. Using electric signals, continuous and precise air pressure control are achieved. Features and light weight module design Non-bleeding High-relief High precision / high speed response Manifold type available Embedding type option Various input signal Easy wiring Pressure monitor available Equivalent to protective structure IP6 Common exhaust EXH IN OUT IN OUT IN EXH (solenoid valve type medium flow) EV Series High precision air pressure proportional enabling ultimate space saving of device. Specifications Descriptions Working fluid Max. working pressure Min. working pressure Withstanding (Inlet side) pressure (Output side) Control pressure range Power voltage Current consumption Input signal (Input impedance) Monitor output Hysteresis Linearity Resolution Repeatability Temperature (Zero point variation) characteristics (Span variation) Maximum flow rate (ANR) Step (Loadless) response Note ( load) vibration proof Ambient temperature Protective structure Port size Weight (body) EV5 EV59 compressed air (ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent).7mpa Control pressure +.5MPa.5MPa.75MPa to.9mpa VDC % (safety power supply with ripple ratio % or less).a or less (power supply rush current.6a when power turned ON) - VDC (kω) -5 VDC (kω) -ma DC or -5 VDC (5Ω) Note kω variable resistance or - VDC (kω) -5 VDC (none for kω variable resistance input) %F.S. or less Note ±.5%F.S. or less Note.5%F.S. or less Note.5%F.S. or less Note.5%F.S./ C or less.7%f.s./ C or less 8 /min..6s or less.6s or less 98m/s or less (JIS C668--6) 5 to 5 C IP6 or equivalent, IP67(cable connector) Note Rc/ g g Note : When used with signal voltage -5 VDC, - ma of current flows into inside of EV from the signal source. Confirm specifications of the signal source before starting use. Note : The above characters apply for a control pressure of to% when power voltage is VDC, and working pressure range is.5 to.7mpa. Also, limited toa closed circuit in the secondary side, and the pressure may vary if used as air blow etc. Note : Working pressure: Max. working pressure and step rate: 5%F.S. %F.S. 5%F.S. 6%F.S. 5%F.S. %F.S. Note : Protective structure IP6 is applied only when installed with facing connector upward. room specifications (catalog No. CB-S) Dust generation preventing structure for use in cleanrooms EV5 P7 EV59 P7 76

85 How to order EV 5 A Control pressure B Body type 8 CEB C Input signal D Port size Internal structure and parts list EV5 9 IN E Option Note Note Note OUT EV Series How to order / Internal structure and parts list Symbol Descriptions A Control pressure 5 -.9MPa B Body type Discrete 9 Discrete manifold C Input signal - VDC -5 VDC -ma DC or -5 VDC kω variable resistance or - VDC D Port size 8 Rc/ E Option Cable option Blank None C m attached C m attached Exhaust option Blank Rc/ port E ø8 push-in joint E With silencer Bracket option Blank None B C type bracket attached B B type bracket attached Note : Piping adaptor can be used for Rc/8 or larger, but B type, C type bracket can not be used (refer to other peripheral devices on page 79). Note : Model no. for option is EV- option symbol. Note : The bracket option B cannot be used when using the EV59 (manifold type). EV59 9 IN IN nic sensor OUT No. Parts name Material No. Parts name Material O ring Bottom valve Body Disk Diaphragm Valve base Pressure sensor Fluoro rubber Brass, special nitrile rubber Aluminum alloy die-casting Aluminum alloy Special nitrile rubber Polyphenylene sulfide resin (Diffusion semiconductor) 8 9 Housing way valve Rod Top valve E type snap ring Plate cover ABS resin Stainless steel Brass, special nitrile rubber Steel ABS resin unit 76

86 nic sensor EV Series Dimensions EV5 PUSH OPEN M, pin connector/plug Zero/span adjustment window IN OUT EXH 5 -Rc/ Refer to "cable option" on page 76 for how to wire. Refer to pages 76 to 76 for optional dimensions. Monitor output EV5/59 Monitor output voltage (VDC) 5 I/O characteristics EV IN PUSH OPEN OUT 5 IN Rc/ ø6 ø8 (Non rotating) M, pin connector/plug Zero/span adjustment window Mount nut (Panel mount) 6 Panel cut Input signal -VDC Input signal -5VDC Input signal -ma DC or -5 VDC Input signal kω variable resistance or - VDC Control pressure (MPa) EV5*.5. EV5*.5. EV5*.5. 6 EV5* 9.5 EXH 7 Control pressure (MPa).. Control pressure (MPa).. Control pressure (MPa).. Control pressure (MPa) Input signal (VDC) 5 Input signal (VDC) 8 6 (madc) 5 Input signal (VDC) 6 8 Input signal (kω) (VDC) 76

87 EV Series Flow characteristics / Optional dimensions Flow characteristics EV5 EV59 Working pressure:.7mpa Working pressure:.7mpa Control pressure (MPa) FlowR/min. (ANR) Option dimensions EV Series common option FlowR/min. (ANR) Embedding type option Standard (blank) Dedicated silencer: **-E ø8 push-in: **-E Side view Rear view Side view Rear view Side view Rear view Control pressure (MPa) 6 6 Rc / nic sensor Bracket option B type bracket (-B): Floor installation type C type bracket ( B): Wall installation type -ø t t. 5 unit 76

88 EV Series nic sensor Cable option 8.5 ø6.8 Other peripheral devices Example of up grading A-*-W B-W Isolator * Pin No. Applications color A-8//5-W A-8-W/-W/5-W-BW Piping adaptor set Piping adaptor set D--8//5-W-(BW) A-8//5-W-(BW) Distributor L type piping adapter 5±5 -.mm Shield wire F-W EV59 -C* shield/cable/connector Power supply + Black Common Red Green White Input signal Type of input signal -V -5V -ma kω VR -5V (-V) V Monitor output -5V VR input terminal V VR input terminal V -V -5V -ma -5V VR output terminal (-V) If a cable connector is not used, following recommended cable sockets can be used. Anyway, use a shield wire cable. Set screw type ELWKA CORRENS (HIRSHMAN) Axial type (solder) XSC-D OMRON L type (solder) XSC-D OMRON J-W B-W A-*-W T type bracket Port T type bracket Port O ring Packing seal Packing seal or "O" ring Circuit Joiner Joiner 76

89 (solenoid valve type small flow) EV Series High precision air pressure proportional enabling ultimate space saving of device. JIS symbol Overview In this electric EV Series, feedback control with semiconductor pressure sensor and electronic control circuit is used. Using electric signals, continuous and precise air pressure controlling is achieved. Features and light weight Non-bleeding High precision / high speed response Various input signal Easy wiring Pressure monitor available Equivalent to protective structure IP6 Two s of piping port Common exhaust How to order EV A Control pressure B M5 Input signal C Port size C D Cable option Specifications Descriptions Working fluid Max. working pressure Min. working pressure Withstanding (Inlet side) pressure (Output side) Control pressure range Power voltage Current consumption Input signal (Input impedance) Monitor output Hysteresis Linearity Resolution Repeatability Temperature Zero point variation characteristics Span variation Maximum flow rate (ANR) Step response (Loadless) Note (5cm load) vibration proof Ambient temperature Protective structure Port size Weight (body) EV EV5 compressed air (ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent) kpa.7mpa Control pressure + max. control pressure x. kpa.5mpa 5kPa.75MPa to 98kPa to.9mpa VDC % (safety power supply with ripple ratio % or less).a or less (power supply rush current.6a when power turned ON) - VDC (kω) -5 VDC (kω) -ma DC or -5 VDC (5Ω) Note kω variable resistance or - VDC (kω) -5 VDC (none for kω variable resistance input) %F.S. or less Note ±.5%F.S. or less Note.5%F.S. or less Note.5%F.S. or less Note.5%F.S./ C or less.7%f.s./ C or less /min. 6 /min..s or less.5s or less 98m/s or less (JIS C668--6) 5 to 5 C IP6 or equivalent, IP67(cable connector) Note M5 8g Note : When used with signal voltage -5 VDC, - ma of current flows into inside of EV from the signal source. Confirm specifications of the signal source before starting use. Note : The above characters apply for a control pressure of to % when power voltage is VDC, and working pressure range is: EV/ to kpa EV5/.5 to.7 MPa. Limited to a closed circuit in the secondary side, the pressure may fluctuate if used air blow, etc. Note : Working pressure: Max. working pressure and step rate: 5%F.S. %F.S. 5%F.S. 6%F.S. 5%F.S. %F.S. Note : Protective structure IP6 is applied only when installed with facing connector upward. Symbol Descriptions A Control pressure -98kPa 5 -.9MPa B Input signal - VDC -5 VDC -ma DC or -5 VDC kω variable resistance or - VDC (Integrated VDC power supply connection) C Port size M5 M5 D Cable option Blank None C m attached C m attached Note Model no. for option is EV- option symbol. room specifications (Catalog No. CB-S) Dust generation preventing structure for use in cleanrooms EV P7 765 nic sensor unit

90 nic sensor EV Series Dimensions Refer to "cable option" on page 767 for how to wire. Monitor output EV Monitor output voltage (VDC) I/O characteristics 5 PUSH 5 OPEN A Control pressure (kpa) M, pin connector/plug Zero/span adjustment window Set screw hole -M depth M5 EV5 Input signal - VDC Input signal -5 VDC Input signal -ma DC or -5 VDC Input signal kω variable resistance or - VDC Control pressure (MPa) EV5 EV Control pressure (MPa) EV5 EV.5 Control pressure (MPa) View A 7.5 Monitor output voltage (VDC) 8.5 EV5 * There are two P/A/R port s on either side. Use the enclosed plug on the idle port. The R port must be released into the atmosphere. 5 EV Control pressure(mpa) Control pressure (MPa) EV5 EV 6 8 Input signal (VDC) 5 Input signal (VDC) 8 6 (madc) 5 Input signal (VDC) 6 8 Input signal (kω) (VDC) 766

91 Flow characteristics EV Control pressure (kpa) 8 6 Cable option 8.5 ø6.8 Working pressure: KPa Flow /min. (ANR) 5±5 -.mm Shield wire EV5 Control pressure (MPa) C* shield/cable/connector Isolator * Pin No. Applications color Red Green Black nic sensor unit White Working pressure:.7mpa 6 8 Flow /min. (ANR) Power supply + Common Input signal -V -V EV Series Flow characteristics Type of input signal -ma -5V -5V V Monitor output -5V If a cable connector is not used, following recommended cable sockets can be used. Anyway, use a shield wire cable. Set screw type ELWKA CORRENS (HIRSHMAN) Axial type (solder) XSC-D OMRON L type (solder) XSC-D OMRON V -5V -ma -5V kωvr (-V) VR input terminal VR input terminal V VR output terminal (-V) 767

92 nic sensor Overview For electro EVS Series, feedback control with semiconductor pressure sensor and electronic control circuit is used to enable continuous and precise controlling s with electric signals. er than EV, body extending cable is used to achieve ultimate convenience and space saving. Features () Downsized Redesigned the internal structure, the volume is reduced by approx. 5% comparing to CKD conventional model (EV Series). (Excluding cable outlet) () Light weight Minimized body, the weight is reduced by approx. % comparing to CKD conventional model (EV Series). () Space saving Footprint is reduced by % comparing to CKD conventional model (EV Series). This enables installation in a narrow space, or in a raw, and contributes to reduce the device size. () Non-bleeding Oar poppet structure and PWM control are used to elimin.ate constant bleeding. This can be used not only for energy saving, also for the case that air source has no surplus. (5) /quick response Precision, high speed response of EV Series is completely succeeded. New model can be directly replaced from old one if the input signal type is matched (when monitor output signal is not used). (6) Easy wiring A body extending cable connector is used to reduce man-hours for wiring, installation and maintenance. Shield type is used for cable connector. Example of use Chemical liquids discharge control (compact solenoid valve type) EVS Series JIS symbol Specifications Descriptions EVS EVS5 Working fluid compressed air (ISO 857- Class.. or equivalent or JIS B 89- Class.. or equivalent) Max. working pressure kpa.7mpa Min. working pressure Control pressure + max. control pressure x. Withstanding pressure Inlet side Output side kpa 5kPa.5MPa.75MPa Control pressure range Power voltage Current consumption to 98kPa to.9mpa Input signal (input impedance) How to wire Insulation resistance Withstand voltage Hysteresis Linearity Resolution Repeatability Temperature characteristics Maximum flow rate (ANR) Step response Note Ambient temperature Fluid temperature Lubrication Mounting attitude Protective structure Main dimensions Port size Weight (body) Note Note Note Note Zero point variation Span variation Note Loadless 5cm load VDC % (safety power supply with ripple ratio % or less).a or less (power supply rush current.6a when power turned ON) - VDC (6.6kΩ) -5 VDC (.kω) ma or -5 VDC (5Ω) Shield cable connector or applicable connectors and shield wire MΩ (5 VDC mega) and over 5 VAC for one minute %F.S. or less ±.5%F.S. or less.5%f.s. or less.5%f.s. or less.5%f.s./ C or less.7%f.s./ C or less /min. 6 /min..s or less.5s or less 5 to 5 C 5 to 5 C Not available Free IP6 (without protective structure ) WD5H5 M5 g Note : The above apply for a to % control pressure at VDC power voltage, with working pressure between maximum control pressure x. (EVS: kpa, EVS5:.5MPa) and maximum working pressure. Limited to a closed circuit in the secondary side, the pressure may fluctuate if used air blow, etc. Note : Working pressure: Maximum working pressure, Control pressure: Maximum control pressure Note : Working pressure: Maximum working pressure, step amount 5%F.S. %F.S. 5%F.S. 6%F.S. 5%F.S. %F.S. room specifications (catalog No. CB-S) Dust generation preventing structure for use in cleanrooms EVS P7 Fine position control Pilot (for chemical liquid) Bellows Tank 768

93 How to order EVS M5 C Model no. A Control pressure range B Input control signal C Port size D Cable option Note on selection guide Note: Model no. for option is EV - Cable option symbol. Dimensions Symbol Descriptions A Control pressure range to 98kPa 5 to.9mpa B Input control signal to VDC to 5 VDC to ma DC or to 5 VDC (Input impedance 5Ω) C Port size M5 M5 D Cable option Blank None C m (axial) C m (axial) 67 5 EVS Series How to order / Dimensions supplying port R -M5 depth M, pin connector/plug 7.5 M5 depth 7 nic sensor M depth 7 unit P Exhaust port A Output port 8 769

94 EVS Series I/O characteristics Input signal - VDC.5 EVS5 Input signal -5 VDC.5 EVS5 Input signal -ma DC or -5 VDC.5 EVS5... Control pressure... (MPa) 6 Input signal (VDC) EVS 8 Control pressure... (MPa) Input signal (VDC) EVS 5 Control pressure... (MPa) EVS 8 6 (madc) 5 Input signal (VDC) Cable option nic sensor 8.5 ø6.8 -.mm 5±5 Shield wire -C* shield/cable/connector * Pin No. Isolator color Red Green Black White Applications Power supply + Common Input signal -V -V Type of input signal -5V V Vacant If a cable connector is not used, following recommended cable sockets can be used. Anyway, use a shield wire cable. Set screw type ELWKA CORRENS (HIRSHMAN) Axial type (solder) XSC-D OMRON L type (solder) XSC-D OMRON V -5V -ma -5V -ma -5V 77

95 (solenoid valve type vacuum) EVV Series JIS symbol How to order Overview For electro EVV Series, feedback control with semiconductor pressure sensor and electronic control circuit is used to enable continuous and precise vacuum control with electric signals. Features / light weight Enabling module Non-bleeding High-relief /quick response Manifold type available Various input signal Easy wiring Pressure monitor available Equivalent to protective structure IP6 EV V 8 C A Body type B Input signal Note on selection guide C Port size Note : Model no. for option is EV- option symbol. Note : However, combination of optional "intake block " and " T type bracket" is not available. Note : The bracket option B cannot be used when using the EV9V (manifold type). Specifications Descriptions EVV EV9V Working fluid Working pressure range (using air circuit recommended on page 76) -96kPa to -.kpa Withstanding pressure Inlet side Output side 96kPa 96kPa Assured pressure range Note 5 Power voltage Current consumption -. to -9.kPa ( to 9%F.S.) VDC±% (safety power supply with ripple ratio % or less).a or less (power supply rush current.6a when power turned ON) Input signal - VDC -5 VDC -ma DC or -5 VDC kω variable resistance or (Input impedance) Monitor output Hysteresis Linearity Resolution (kω) (kω) (5Ω) Note - VDC (kω) Repeatability Temperature Zero point variation characteristics Span variation Maximum flow rate (ANR) Step response Loadless Note load vibration proof Ambient temperature Protective structure Port size Weight (body) -5 VDC (none for kω variable resistance input) %F.S. or less Note ±.5%F.S. Note.5%F.S. or less Note.5%F.S. or less Note.5%F.S./ C or less.7%f.s./ C or less 5 /min. /min..6sec or less.sec or less 98m/s or less (JIS C668--6) 5 to 5 C IP6 or equivalent (body) IP67(cable connector) Note Rc/ g g Note : When used with signal voltage -5VDC, -ma of current flows into inside of EV from the signal source. Confirm specifications of the signal source before starting use. Note : The above characters apply for a control pressure of to 9% when power voltage is VDC, working pressure is -96. to -. kpa. Limited to a closed circuit in the secondary side, the pressure may fluctuate if used air blow, etc. Note : Working pressure: -kpa, step rate: 5%F.S. 9%F.S. 5%F.S. 6%F.S. 5%F.S. %F.S. Note : Main body protective structure IP6 is limited to cable connector top vertical installation. Above characteristics are values where used in working pressure range. If used exceeding working pressure range, please consult with CKD. Note 5: There is a to 5 kpa residual pressure when the input signal is %. Refer to the input/output characteristics graph (page 77). Symbol Descriptions A Body type D Option Note Note room specifications (catalog No. CB-S) Dust generation preventing structure for use in cleanrooms EVV P7 EV9V P7 9 Discrete Discrete manifold B Input signal - VDC -5 VDC -ma DC or -5 VDC kω variable resistance or - VDC (Integrated VDC power supply connection) C Port size 8 Rc/ D Option Cable option Blank C None m attached m attached C Intake option Blank Intake block K Intake block Bracket option Blank None B B type bracket T T type bracket 77 nic sensor unit

96 EVV Series Internal structure and parts list EVV EV9V IN OUT IN IN OUT nic sensor No. Parts name O ring Material Fluoro rubber No. 8 Parts name Housing Material ABS resin Bottom valve Body Disk Brass, special nitrile rubber Aluminum alloy die-casting Aluminum alloy 9 way valve Rod Top valve Stainless steel Brass, special nitrile rubber Diaphragm Valve base Pressure sensor Special nitrile rubber Polyphenylene sulfide resin Diffusion semiconductor E type snap ring Plate cover Steel ABS resin 77

97 Dimensions EVV 9 EVV Series Dimensions M, pin connector plug Zero/span adjustment window -Rc/ 5.5 PUSH OPEN IN OUT VAC.5 7 EV9V Rc/ 9.5 ø6 Zero/span adjustment window M, pin connector plug ø8 (Non rotating) -Rc/ (Panel cut) nic sensor PUSH OPEN IN OUT 5 IN 6 5 VAC.5 7 Rc/ (Lower outlet) Piping method (Atmosphere) IN VAC OUT Rc/ 9 Workpiece unit pump EV*V * Refer to the cautions (recommended circuit) on page 77 for details. 77

98 nic sensor EVV Series I/O characteristics Input signal - VDC Control pressure (kpa) Input signal -madc or -5 VDC Control pressure (kpa) Flow characteristics EVV Control pressure (kpa) Monitor output EVV, EV9V Input signal (VDC) Input signal (madc) Input signal (VDC) Working pressure-kpa Flow /min. (ANR) Input signal -5 VDC Control pressure (kpa) Input signal kω variable resistance or - VDC Control pressure (kpa) EV9V Control pressure (kpa) Input signal (VDC) Input signal (kω) (VDC) Working pressure-kpa Flow /mi.n (ANR) 5 Monitor output (VDC) Control pressure (kpa) 77

99 EVV Series Option status Option status Optional embedded intake Standard (blank) -K Bracket option 6 5 Floor installation type: **-B (B type bracket) Intake block Intake block Rc / 6 5 (Lower outlet) Rc / Rear side installation type: **-T (T type bracket) -ø nic 6 t. * An O ring and a gasket are included. Note: Refer to page 9 for dimensions of T type bracket. sensor Cable option 8.5 ø6.8 5±5 -.mm Shield wire -C* shield/cable/connector Isolator * Pin No. Applications color Red Green Black White Power supply + Common Input signal Type of input signal -V -5V -ma kωvr -5V (-V) V Monitor output -5V VR input terminal V VR input terminal V -V -5V -ma -5V VR output terminal (-V) If a cable connector is not used, following recommended cable sockets can be used. Anyway, use a shield wire cable. Set screw type ELWKA CORRENS (HIRSHMAN) Axial type (solder) XSC-D OMRON L type (solder) XSC-D OMRON unit 775

100 MEVT Series MEVT Series nic sensor Advancing to ultra-precise micro ranges Manifold type thin electro compatible with PC control and reduced wiring. Perfect for pressure control and fine speed cylinder control, etc., in semiconductor fields and precise processing fields, etc. DIN rail two-face mounting Operation indicator Serial transmission mm thin and 8g light With this high integration type, up to manifold stations can be used. Network-compatible A serial transmission, common gland and D-sub connector wiring block are available. -color display of operation status The -color operation indicator (PAT. PEND) indicates the green zone when pressure is at set pressure and the red zone when pressure is not within the setting or when an error has occurred. Easy piping and wiring work Piping and wiring have been centralized on the front, improving workability and reducing space. installation direction (PAT.PEND) This can be installed either on the bottom or on the back. The surface for installation and work can be selected freely. mm Serial transmission type Common gland type D sub-connector type Bottom installation Rear side installation Output port Input port Exhaust port Wiring connector nic sensor /quick response Output port push-in joint Micro thin electro Applications Painting MEVT Control PC Fluid pressure is controlled at high accuracy and high speed response using electrical signals. Repeatability is.%f.s. and response time is. sec. (with no load) * Refer to specifications Environmental-friendly product The material name is indicated on main components, making easy to sort parts for recycling. Microcapsule Manifold dispenser Other applications Fluid precise constant discharge IC chip bondind PCB cream soldering PCB coating UV adhesive, etc. CMP grinder Thin electro unit