Series variation. Speed control valve SC* For 2.5 to 450 cylinders. * Refer to page 854 for line type.

Transcription

1 Series variation Model / appearance Miniature speed Miniature in out control valve Direct piping / elbow type Model no. SM SM SDM SDM SRM SR SR Port size (Rc or R) S* For. to cylinders pplicable tube O.D. M M / / / / / / /. Effective sectional area (mm )..... Value in ( ) is for low speed or fine speed type. Free flow ontrolled flow Free flow ontrolled flow.. (.) * Refer to page for line type... (.).. Flow ( /min) NR.MPa (.) (.) pplicable cylinder bore size (mm). to to to to to to to Page SR to SR to Elbow type with pushin joint SWM SWM. (.). (.). (.). (.) () () (.) (.) to to SWM. (.). (.) () (.) to sensor SWM SWM SW. (.). (.). (.). (.). (.). (.) () () () (.) (.) () to to to SW. (.). (.) () () to SW SW.. to to SW. to SW SW to to SW to SW to SW to SW to SW to

2 S* Series Series variation Model / appearance Universal type with pushin joint Model no. SWUM SWUM SWUM SWUM SWUM SWU SWU Port size (Rc or R) pplicable tube O.D. M M / / / / / / /. Effective sectional area (mm ) Free flow ontrolled flow Free flow ontrolled flow. (.). (.). (.). (.). (.). (.). (.). (.). (.). (.). (.). (.). (.). (.) Value in ( ) is for low speed type. Flow ( /min) NR.MPa () () () () () () () (.) (.) (.) (.) (.) () () pplicable cylinder bore size (mm) to to to to to to to Page SWU. to SWU SWU SWU SWU to to to to SWU.. to SWU.. to SWU SWU.... to to sensor Medium bore size type Rc/ to Rc/ S S to to Large bore size type Rc/ to Rc S S S S to to to to S to S S to to

3 S* Series sensor Model / appearance Line type with pushin joint In out / line type with pushin joint Model no. SLH SLH SLH SLH SLH SLH SLH SLH SLH SLH SDH SDH SDH SDH SDH Port size (Rc or R) pplicable tube O.D. M M / / / / / / /.. Effective sectional area (mm ) (.) (.) (.).... Value in ( ) is for low speed or fine speed type. (.) (.) (.). (.). (.).. (.) (.). (.). (.) Flow ( /min) NR.MPa Free flow ontrolled flow Free flow ontrolled flow () () () () () () () () () () () () pplicable cylinder bore size (mm) to to to to to to to to to to to to to to to Page SDH to Needle valve SDH SDH SDH SLNH SLNH... to to to SLNH. SLNH. SLNH. SLNH. SLNH.

4 Pneumatic components (speed ) Safety precautions lways read this section before starting use. Refer to Intro for general precautions, and to " Safety precautions" in this section for details on each series. Use this product in accordance with the specifications range. onsult with KD when using the product for special applications. Use with exceeding the specifications range may result in insufficient performance, and safety can not be secured. This product could not use in special applications and environment. For example, use for special applications including nuclear energy, railway, aircraft, marine vessel, vehicle, medical equipment, equipment, or applications coming into contact with beverage or food, amusement equipment, emergency shutoff circuits, press machine, brake circuits, or for safeguard. onfirm that the product will withstand the working environment. This product cannot be used in environments where functional obstacles could occur. Such environments include high temperatures, a chemical atmosphere, or where chemicals, vibration, moisture, water drip, or gas are present; or where ozone is generated. Do not use the product in the place that the product could directly contact with coolant or spatter, etc., Understand compressed air features before designing a circuit. The same functions as mechanical, hydraulic, and electrical methods cannot be anticipated if instantaneous service interruption and holding are required during an emergency stop. Popout, air discharge, or leakage due to air compression and expansion could occur. This valve can not be used as a stop valve that has no leakage. Slight leakage is allowed in product specifications. Design & Selection UTION Install a "pressure switch" and "shutoff valve" on the device's compressed air supply side. The pressure switch will disable operation until set pressure is reached. The shutoff valve will exhaust compressed air in the pressure circuit, and will prevent accidents caused by operation of components by residual pressure. onfirm that PTFE can be used. The sealant contains PTFE (polytetrafluoroethylene resin) powder. heck that this poses no problem during use. Indicate the maintenance conditions in the device's instruction manual. The product's function can drop markedly with working status, working environment, and maintenance, and can prevent safety from being attained. With correct maintenance, the product functions can be used to the fullest. onsult with KD if ozone could occur in supplied air. (Ozone proof products are available.) Rubber parts deteriorate and life is shortened if ultra dry air is used. sensor

5 sensor Piping UTION Do not remove the package or seal cap on the piping port until just before piping the product. If the piping port cap is removed from the piping port before piping work is started, foreign matter could enter the component from the piping port and result in faults or faulty operation. When connecting pipes, wrap sealing tape in the opposite direction from threads starting mm inside from the end of piping threads. If sealing tape protrudes from pipe threads, it could be cut when screwed in. This could cause the tape to enter the components and lead to faults. M and M screws are sealed with the gasket. Handling pushin joints and tubes Refer to autions of joint and tube, and "Safety Precautions" (pages to ) for handling pushin joints and tubes. lways flush just before piping component. ny foreign matter that has entered during piping must be removed so it does not enter the component. When supplying compressed air for the first time after connecting pipes, do not apply high pressure suddenly. Piping connection could be dislocated or the piping tube fly off, leading to accidents. fter connecting piping, check pipe connections for air leaks before supplying compressed air. pply a leakage detection agent on pipe connections with a brush, and check leaks. Installation & djustment pply recommended tightening torque when connecting pipes. To prevent air leak and to protect thread. Tighten by hand at first so that threads are not damaged, then use a tool. Do not tighten while pressure is applied. (Recommended tightening torque) Port thread M M Rc/ Rc/ Rc/ Rc/ Rc/ Rc Tightening torque N m. to.. to. to to to to to to Pipe so that piping connections do not become dislocated due to device movement, vibration, or tension, etc. ontrol of actuator speed will be disabled if piping on the exhaust side of the circuit is disengaged. When using the chuck holding mechanism, the chuck will be released creating a hazardous state. Ensure spaces around the component for installation, removal, wiring, and piping work. Install an air just before the component in the circuit. heck that lock nuts are not loose. ctuator speed cannot be controlled if the lock nut is loose. heck the needle valve speed of rotation. The needle valve has dislocation prevention that could break if the needle is turned too far. heck the number of turns for the product used. onfirm the flow direction. If the product is installed in reverse, speed adjustment will not function and the actuator pop out, posing hazards. Fully close the needle, and open to adjust speed. If the needle is opened, the actuator could pop out suddenly and pose a hazard. Open the needle after confirming that it is fully closed. The needle closes when turned to the right and opens when turned to the left.

6 void use in applications involving continuous turning or swaying. s could be damaged. WRNING efore replacing tubing, stop the air flow and confirm that no pressure remains. During Use & Maintenance void using this product in places with high vibration or impact. sensor

7 Miniature speed SM/M and light weight for space saving piping. Low speed and fine speed type are also available. JIS symbol SMS SMF SML SM sensor Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Fluid temperature mbient temperature Port size Product weight g pplicable cylinder bore size mm Number of needle turn Flow /min (NR) Free flow Effective sectional area mm ontrolled Flow /min (NR) flow Effective sectional area mm Flow characteristics SMS SML SMF SM SMS SML SMF SM ompressed air... to (no freezing) Note to (no freezing) M M..... (). (.). (.). (.). to.. Note : Freezing could occur by adiabatic expansion depending on air quality (dew point). Note : Flow rate is the atmospheric pressure conversion value at pressure.mpa. Note : Value in ( ) is for fine speed type. Flow /min (NR) (Pressure.MPa). SM*. SM*... SM*. SM*F. Number of needle turn (time) Effective sectional area (mm ) How to order S M I F Port size Shape ontrol method Symbol Descriptions Port size M M x. M M x. Shape S L F to (). (.). (.) Straight Elbow Flat djustable ontrol method lank Meterout type I Meterin type D Flow characteristics D Flow characteristics lank O Standard type Low speed type (only M) F Fine speed type (only M) Note : For fine speed type, outside of lock nut is painted with blue. Note : Model no. of S*SI can not be selected. Install S*S with reversing IN and OUT side.

8 I I Internal structure and parts list SM/M Series Internal structure / dimensions No. Parts name Material Knob Lock nut Needle luminum alloy luminum alloy Stainless steel Needle guide luminum alloy heck bracket luminum alloy O ring Nitrile rubber Packing seal Hydrogen nitrile rubber ody luminum alloy Note: For fine speed type, material of needle guide is stainless steel. Dimensions S M S (straight) M S M L (elbow) M J Installation hole I H D J H Installation hole I K F G E D F G E sensor Model no. D E F G H I J K SMS. (max)..... M x. SMS (max.) M x. S M F (flat) M J K olt Model no. SML SML S D E F G H I J. (max.) M x.. (max) M x. M (adjustable) M J H plane G plane F E D H G F E D Miniature Model no. D E F G H I J K SMF. (max).... M x. M x. SMF (max.)..... M x. M x. Note: The bolt can be removed from the main body and installed from either side the or. Model no. SM SM D E F G H I J. (max).. M x.. M x. (max.).... M x.. M x.

9 Miniature inout speed SDM/M Series, light weight and thin body. supply and exhaust. JIS symbol SDM*S (Straight) SDM* (djustable) sensor Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Fluid temperature mbient temperature Port size pplicable cylinder bore size mm Number of needle turn Product weight g ontrol flow /min (NR) Effective sectional area mm SDMS. Flow characteristics M x. to. SDM. SDMS SDM SDMSF SDMF ompressed air... to (no freezing Note ) to (no freezing).. M x. to Note : Freezing could occur by adiabatic expansion depending on air quality (dew point). Note : Flow rate is the atmospheric pressure conversion value at pressure.mpa. How to order SD M S F Model no. Port size Shape Flow characteristics Symbol Descriptions Port size M M Shape S M x. M x. Straight djustable Flow characteristics. lank Standard type F Fine speed type (only M) Note : For fine speed type, outside of lock nut is painted with blue.... SDM*.. Flow (at pressure.mpa) /min (NR)... SDM*. SDM*F. Number of needle turn (time) Effective sectional area (mm )

10 Internal structure and parts list djustable type SDM/M Series Internal structure / dimensions No. Parts name Material Knob Needle Lock nut Needle guide heck bracket O ring Packing seal ody Steel ball olt O ring Gasket luminum alloy Stainless steel luminum alloy luminum alloy (Stainless steel for fine speed type) luminum alloy Nitrile rubber Hydrogen nitrile rubber luminum alloy Stainless steel rass Nitrile rubber Steel + nitrile rubber Note : For outside of handle, one side is painted with black. (For adjustable type, black indicates meter in side) Note : Same materials are used for straight type (without ). Note : rass parts are d with electroless nickeling. Dimensions SDMS (straight) SDM (adjustable). M x... MX M x.. SDM.. MX sensor Installation hole... M x.. SDMS (straight) SDM (adjustable) M x.... MX.. M x.. MX. Miniature inout type Installation hole... M x...

11 SDM/M Series pplications is stabilized by controlling with an inout speed. [E.g. ] In lowspeed control with a single rod air cylinder, the cylinder pops out immediately after the PUSH side operates if a meterout circuit is used. [E.g. ] t vertical installation, the cylinder pops out immediately after operation because of the load's weight. is stabilized by using a meter inout circuit. (Example ) Low speed drive (Example ) Popping out Meterout circuit W Popping out Meter inout circuit Stable speed W Stable speed sensor (Example of speed waveform) Popping out phenomenon Time (ause of popping out) When using the meterout circuit, flow on the exhaust side is restricted, so both sides reach the same pressure immediately after the valve is switched. The thrust equivalent to the difference in the piston's pressurized area or the thrust equivalent to the load's weight causes popping out. When the piston moves, exhaust pressure rises, speed decelerates, and the set speed is reached. If popping out is caused by this phenomenon, fluctuation in sudden thrust is suppressed by restricting the flow on the supply side, and popping out is resolved. Hazards can be prevented by suppressing popping out at beginning of movement after residual pressure is released. Reciprocating speed control is possible with a single acting cylinder. The flow rate of the air operated valve and drip prevention valve can be finely adjusted. Time

12 Direct piping elbow type SR Series Port size: M, Rc/ to Rc/ JIS symbol sensor Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Fluid temperature mbient temperature Port size Product weight g pplicable cylinder bore sizemm Number of needle turn Flow /min (NR) Free flow Effective sectional area mm ontrolled Flow /min (NR) flow Effective sectional area mm SR M SRM SR SR SR SR Note : Flow rate is the atmospheric pressure conversion value at pressure.mpa. Note : Freezing could occur by adiabatic expansion depending on air quality (dew point). Port size M to.. I Option Ozone specifications ( ) SR P Rc/ to.. room specifications (catalog No. S) Dust generation preventing structure for use in cleanrooms SR P* ompressed air... to (no freezing) Note to (no freezing) Symbol Port size M Option I lank Rc/ to.. M x. Rc/ Rc/ Rc/ Rc/ Meterin type Meterout type Rc/ to Descriptions Rc/ to

13 Flow characteristics SR Series Internal structure / dimensions Flow /min (NR) (Pressure. MPa) SRM Number of needle turn (time). Effective sectional area (mm ) Flow /min (NR)(Pressure.MPa) SR SR SR SR Number of needle turn (time) Effective sectional area (mm ) Internal structure and parts list SRM SR to Dimensions No. Parts name Knob Lock nut Gland nut Needle Rotary shaft O ring O ring Packing seal Rotor O ring Snap ring M gasket Sealant Material rass rass rass Stainless steel rass Nitrile rubber Nitrile rubber Hydrogen nitrile rubber Zinc alloy die casting (brass) Nitrile rubber PT resin Nitrile rubber + steel Fluorine resin * Material in ( ) is for SRM * ll the brass parts are d with electroless nickeling sensor F G max Model no. SRM SR SR SR SR D E H D E F G H M x. Rc/ Rc/ Rc/ Rc/ M x. R/ R/ R/ R/ Direct piping elbow type

14 Elbow type with pushin joint SW Series Port size: M, M, R/ to R/ JIS symbol sensor Specifications Descriptions SW SWM SWM SW SW SW SW pplicable tube outer diameter mm.. Working fluid ompressed air Max. working pressure MPa. Min. working pressure MPa. Withstanding pressure MPa. Fluid temperature to (no freezing Note ) mbient temperature to (no freezing) Port size M M R/ R/ R/ R/ Product weight g Number of needle turn (cycle) () and over () and over () and over and over and over and over Free flow ontrolled flow Flow /min.(nr) () () () () Effective sectional area mm. (.). (.). (.). (.).. Flow /min.(nr) (.) (.) () () Effective sectional area mm. (.). (.). (.). (.)... Note : Flow rate is the atmospheric pressure conversion value at pressure.mpa. Note : Value in ( ) is for low speed type. Note : Freezing could occur by adiabatic expansion depending on air quality (dew point). Flow characteristics Flow /min (NR)(Pressure.MPa) Flow /min (NR)(Pressure.MPa) Standard type (port size M, M) SWM SWM Number of needle turn (time) Standard type (port size / to /) SW SW Number of needle turn (time)..... Effective sectional area (mm ) Effective sectional area (mm ) Flow /min (NR)(Pressure.MPa) Flow /min (NR)(Pressure.MPa) SW SW SW SW SW Standard type (port size /) SW Number of needle turn (time) Low speed type SW O SW. SWM O SWM O Number of needle turn (time)... Effective sectional area (mm ) Effective sectional area (mm )

15 How to order SW M Model no. Port size I pplicable tube outer diameter Option Note on model no. selection Note : Options are indicated as alphabetic order. Note : "K" can be selected for only port size M, M. Note : "O" can be selected for applicable tube outer diameter "" ( ), "" ( ) for port size M, M and "" (R/). <Example of model number> SWMI Port size : M x. pplicable tube outer diameter : Option : Meterin Ozone specifications ( ) SW P Note Note Note room specifications (catalog No. S) Dust generation preventing structure for use in cleanrooms SW P* Symbol Port size Descriptions M M x. M M x. R/ R/ R/ R/ pplicable tube outer diameter. Option lank I K O P Meterout not available. SW Series How to order Port size M M Meterin (push ring color: black) Hexagon head lock nut Low speed type opper and PTFE free sensor Elbow type with pushin joint

16 SW Series Internal structure and parts list Port size: M, M Port size: /, / (only ) No. Parts name Material No. Parts name Material Knob rass Gasket Steel + nitrile rubber (only M) Lock nut rass Packing seal Nitrile rubber Gland nut rass huck Stainless steel Needle Stainless steel M,M rass huck holder Rotary shaft rass (M is stainless steel) R/ polyacetal O ring Nitrile rubber Outer ring rass O ring Nitrile rubber Push ring PT (flame resistance resin *) Packing seal Hydrogen nitrile rubber opper alloy Rotor PT (flame resistance resin *) hucking ring rass O ring Nitrile rubber hucking guide rass Release ring rass Sealant Fluorine resin * ll the brass parts are d with electroless nickeling * Equivalent to UL standards VO Port size: / to / sensor

17 Dimensions SWM * E SW Series Dimensions Opposite side of hexagon K d F Model no. SWM SWM SWM SWM SWM SW d (pplicable tube O. D.).. M M M x. M x. M x. M x. M x * (as same as low speed type/standard (SW)) F D G MX..... MIN..... D..... E F..... G..... K (tube insertion length)..... Opposite side of hexagon Opposite side of hexagon sensor M D E G Model no. M pplicable tube O. D. D E F G Opposite side of hexagon SW..... SW R/..... SW..... SW..... SW R/..... SW..... SW..... SW..... R/ SW..... SW..... SW..... R/ SW..... max Elbow type with pushin joint

18 pplicable tube outer diameter mm Max. working pressure Mpa Min. working pressure Mpa Withstanding pressure Mpa Fluid temperature mbient temperature Port size Product mass g Number of needle turn (cycle) Free flow Flow rate min (NR) Effective sectional area m ontrolled flow Flow rate min (NR) Effective sectional area m

19 L MODEL

20 Medium bore size type S Series Light weight enables disassembly while piped. Port size: Rc/ to Rc/ JIS symbol sensor Specifications Descriptions S S S S Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa ompressed air... Fluid temperature to (no freezing Note ) ( to for heat resistance / ozone specifications) mbient temperature to (no freezing) ( to for heat resistance / ozone specifications) Port size Product weight Rc g / / / / pplicable cylinder bore size mm to to to to Number of needle turn Free Flow /min (NR) flow Effective sectional area mm ontrolled Flow /min (NR) flow Effective sectional area mm Note : Flow rate is the atmospheric pressure conversion value at pressure.mpa. Note : Freezing could occur by adiabatic expansion depending on air quality (dew point). How to order S Port size X Option Symbol Port size Option lank room specifications (catalog No. S) Dust generation preventing structure for use in cleanrooms S P* X P Descriptions Rc/ Rc/ Rc/ Rc/ Meterin type No option Heat resistance ( or less)/ ozone specifications opper and PTFE free Flow /min(nr)(at pressure. MPa) Flow characteristics S S S S Number of needle turn (cycle) Effective sectional area (mm )

21 I Internal structure and parts list S Series Internal structure / dimensions / cautions ontrolled flow Free flow No. Parts name Material Needle E type snap ring Dial Needle guide Lock nut O ring Gasket ody Spring Valve seat rass Steel Zinc alloy die casting luminum alloy diecasting Zinc alloy die casting Nitrile rubber (fluoro rubber) Nitrile rubber (fluoro rubber) luminum alloy diecasting Stainless steel rass, nitrile rubber (brass, fluoro rubber) Note : Materials in ( ) are for heat resistance / ozone specifications Dimensions S K Installation hole *. (Penetrating) maxg sensor Port size : Rc/ : Rc/ : Rc/ : Rc/ F E D K H J Set screw M (depth ) S/ Set screw M (depth ) S/ Model no. D E F G H I J K S S Safety Precautions When using in low pressure range (.MPa or less), when piping, etc. before and after the product are restricted excessively, when cylinder speed is rapid, or when differential pressure is small, vibration and sound are easily generated. When tightening, do not tighten needle or lock nut section excessively. (Tightening torque approx. N m) Medium bore size type

22 Large bore size type S Series Port size: Rc/ to Rc JIS symbol sensor Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Fluid temperature mbient temperature Port size Product weight pplicable cylinder bore size Rc kg mm Number of needle turn Mounting attitude Free Flow /min (NR) flow Effective sectional area mm ontrolled Flow /min (NR) flow Effective sectional area mm S S S S S ompressed air to (no freezing) Note to (no freezing) / / /..... to to to to to The handle (nut) for flow control must be installed vertically facing upward or downward. Note : Flow rate is atmospheric pressure conversion value at pressure.mpa. Note : Freezing could occur by adiabatic expansion depending on air quality (dew point). How to order S Port size Symbol Port size Descriptions Rc/ Rc Rc / Rc / Rc Flow characteristics Flow m /min(nr)(pressure.mpa) S S S/ S Number of needle turn (cycle) Effective sectional area (mm )

23 Internal structure and parts list S Series Internal structure / dimensions / cautions Dimensions S Model no. S S Needle valve: clockwise Port size Rc* S D Port size Model no. Rc/ Rc S S S Safety Precautions D When connecting S Series, do not tighten the product with a torque more than right. When using in low pressure range (.MPa or less), when piping, etc. before and after the product are restricted excessively, when cylinder speed is rapid, or when differential pressure is small, vibration and sound are easily generated. When tightening, do not tighten needle or lock nut section excessively. (Tightening torque approx. N m) Rough adjustment (Needle valve: clockwise) No. D Port size Port thread Rc/ Rc Rc / Rc / Rc Parts name ap Spring O ring ody Valve seat Rod O ring Nut Nut The internal tooth washer ap nut Fine adjustment (Needle valve: clockwise) Port size Rc* Zinc alloy die casting Stainless steel Nitrile rubber Zinc alloy die casting rass rass Nitrile rubber arbon steel Zinc alloy die casting Stainless steel Steel Tightening torque N m Material D Rc / Rc / Rc sensor Large bore size type

24 Random installation attitude Line type with pushin joint SL Series In out speed Line type with pushin joint SD Series Port size:.,,,,, JIS symbol SL Series Overview Features SD Series The SL Series is an inline speed useful for remote or central actuator control. The SD Series is an integrated metering inout speed that controls both air intake and exhaust flow. Depending on the circuit, the actuator can be prevented from popping out, speed can be stabilized, and reciprocating singleacting cylinder speed can be controlled. The installation area rotates by, enabling installation and the installation method to be from base, side, or panel. n installation bracket is not required. sensor Example of base installation Example of wall surface installation Example of panel mount Wide range of choices Fiber tubing specifications and large bore types have been added to the diverse lineup, expanding the size of applicable tubing to. to diameter. Large flow rate with compact type The large flow rate achieved even with a compact body extends the selection range for cylinder size and speed control. Fine speed type available Low and fine speed and small bore size are easily controlled. Quick connection Pushin joints simplify tubing connection. Standard ozoneresistant materials Ozoneresistant materials are used as standard for check packing to prevent deterioration. Standard flameresistant resin: UL Standard VO or equivalent Refer to page for SL/SD Safety Precautions.

25 SL/SD Series Specifications Specifications line type SL Model no. SL SL SL SL pplicable tube outer diameter mm Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Fluid temperature mbient temperature Product weight g Number of needle turn Free flow Flow /min (NR) Effective sectional area mm ontrolled Flow /min (NR) flow Effective sectional area mm... [] [.] [] [.]./.. []. [.] ompressed air... to (no freezing Note ) to (no freezing). []. [.] [] In out speed line type SD Model no. SD SD SD SD pplicable tube outer diameter mm../ Working fluid ompressed air Max. working pressure Min. working pressure MPa MPa... Withstanding pressure MPa.. Fluid temperature to (no freezing Note ) mbient temperature to (no freezing) Product weight g. Number of needle turn [] Flow /min (NR) [] [] [] [] Effective sectional area mm [.] [.]. [.]. [.]. Note : Flow rate is the atmospheric pressure conversion value at pressure.mpa. Note : Value in ( ) is for fine speed type. Note : Freezing could occur by adiabatic expansion depending on air quality (dew point)..... sensor room specifications (catalog No. S) Dust generation preventing structure for use in cleanrooms SL P* Line type with pushin joint

26 SL/SD Series sensor How to order line type SL SD Model no. H In out speed line type ody size H Note on model no. selection Note : H cannot be used with SD. Use H. Note : There is no pushin joint compatible with Item () pplicable tube outer diameter.. Refer to page for line types with. diameter pushin joints. Flow characteristics pplicable tube outer diameter Flow characteristics Standard type SL, SL, SD, SD Flow /min. (NR) (pressure.mpa) Symbol ody size pplicable tube outer diameter H. H side: side:. H (Note ) H H H H H Descriptions M screw or equivalent / screw or equivalent / screw or equivalent / screw or equivalent side:. side: Flow characteristics lank Standard type F Fine speed type SL SD Number of needle turn (time) Standard type SD, SD Flow /min. (NR) (pressure.mpa) See the table at right for body size, applicable tube outer diameter, and flow characteristic combinations. SD SL H Number of needle turn (time) H H H H Effective sectional area (mm) Effective sectional area (mm) ombination of body size, applicable tube outer diameter and flow characteristics ody size H. H /. H (Note )./ H H H H H pplicable tube outer diameter Standard type SL, SL Flow /min. (NR) (pressure.mpa) Flow characteristics "Standard type " Flow characteristics "Fine speed type " not available Explanatory drawing of applicable tube outer diameter combinations (Only H/H) Valve side (Meterout) Free flow direction ontrolled flow direction ylinder side (Meterout) H H H H H Number of needle turn (time) Fine speed type Flow /min. (NR) (pressure.mpa) H/H Number of needle turn (time). H/H/H. Effective sectional area (mm) Effective sectional area (mm)

27 I I SL/SD Series Internal structure / dimensions Internal structure and parts list Dimensions SL Series F G E J No. Parts name Material Knob Needle Lock nut Guide ring O ring heck bracket heck packing seal ody case Stopper ring O ring Outer ring Push ring huck Holder Packing seal PT rass rass rass Nitrile rubber rass Hydrogen nitrile rubber PT PT Stainless steel Nitrile rubber rass PT Stainless steel rass Nitrile rubber * ll the brass parts are d with electroless nickeling * ll resin parts are flame resistance. (equivalent to UL standards V) Excluding applicable tube outer diameter.. Installation spacing dimensions for manifolds M Note F N D J SD Series F G M F E J H Note F N D K Outline drawing of outer tubing connection diameter E L. joint sensor Model no. SLH Note SLH Note SLH Note SLH SLH SLH SLH SLH SLH SLH SDH Note SDH Note SDH SDH SDH SDH SDH SDH SDH Piping tube outer diameter MIN MX. /../. / Note : onnection tubing is a joint dedicated to fiber tubing. Note : There is a slit at this location on the fine speed type. Note : F and F dimensions are oval. D E F F G H... I J..... K x n +. x n +. x n + x n +. x n + x n +. x n +. x n + x n +. x n + L M N (Installation hole dia.) (Tube insertion length)./. /....../... Line type with pushin joint

28 Needle valve Line type with pushin joint SLN Series Port size:,, JIS symbol Random installation attitude Features The installation area rotates by, enabling installation and the installation method to be from base, side, or panel. n installation bracket is not required. sensor Example of base installation Example of wall surface installation Example of panel mount Lowevaporation grease This series is suitable for oilsensitive environments and s. This product is also compatible with oilfree clean packaging "oilprohibited specifications." Linear flow characteristics flat dedicated needle for flow adjustment is used. Specifiable flow size The flow size has been simplified with four stages,,, and /min at. MPa to enable detailed flow adjustment. Quick connection Pushin joints simplify tubing connection. Standard flameresistant resin: UL Standard VO or equivalent SLN Series applications Flow characteristics of ionizer purge gas blow in clean room N purge circuit djustment of work unloading blow rate for disk former Flow control at tension control

29 Specifications Model no. SLN SLN SLN pplicable tube outer diameter mm or Working fluid Max. working pressure MPa Negative pressurekpa Withstanding pressure MPa Fluid temperature mbient temperature ompressed air / N gas.. to (no freezing note) to (no freezing) Product weight g. Number of needle turn (flow type: is rotations) Note: Freezing could occur by adiabatic expansion depending on air quality (dew point). How to order Needle valve line type SL Model no. N H ody size See the table at right for the body size, applicable tube outer diameter, and flow type combinations Flow characteristics Flow /min. (NR) Flow /min. (NR) pplicable tube outer diameter Flow type D Option Flow characteristics SLN Series Specifications / How to order Flow type symbol Maximum flow rate (.MPa) /min (NR) Effective sectional area mm.... Note: The flow is atmospheric pressure conversion at pressure.mpa. Symbol Descriptions ody size M screw or equivalent / screw or equivalent / screw or equivalent pplicable tube outer diameter H H H Flow type Refer to flow characteristics graph and specifications D Option lank Standard specifications P Oilprohibited specifications Flow type "" Flow type "" Number of needle turn (time).mpa.mpa.mpa.mpa ombination of body size, applicable tube outer diameter, and flow type ody size pplicable tube outer diameter H H H H Flow type not available.mpa.mpa.mpa.mpa Number of needle turn (time) Flow type "" Flow type "".MPa.MPa.MPa.MPa.MPa.MPa.MPa.MPa Number of needle turn (time) Number of needle turn (time) Flow /min. (NR) Flow /min. (NR) Needle valve, inline type with pushin joint sensor

30 I SLN Series Internal structure and parts list No. Parts name Material Knob Needle Lock nut Guide ring O ring heck bracket O ring ody case Stopper ring O ring Outer ring Push ring huck Holder Packing seal PT rass rass rass Nitrile rubber rass Nitrile rubber PT PT Stainless steel Nitrile rubber rass PT Stainless steel rass Nitrile rubber * ll the brass parts are d with electroless nickeling Dimensions SLN Series F G E J M N sensor F D Model no. SLNH SLNH SLNH SLNH Piping tube outer diameter MIN MX D... E.. Note: F and F dimensions are oval. * The speed is identified by dial color. : Knob "white" Needle valve : Knob "gray" * The joint push ring is blue for option P (oilprohibited specifications). F F... G I... J.. K x n +. x n +. x n + L... M N (Installation hole dia.) (Tube insertion length)....

31 SL/SD Series UTION Do not use this valve in circuits where ozone is generated intentionally. Ozone resistance is sufficient for naturally generated ambient ozone. Packing deteriorates if ozone levels are high. UTION Rotate the mounting hole section at no pressurized state. When installing on a panel, the stopper ring will interfere with the panel, so insert a flat washer between the mounting hole and panel. Stopper ring Plain washer Panel Tighten bolts in mounting holes within the torque below. Model no. Tightening torque SL (D) SL (D) //.N m.n m Tubing could dislocated if the product sways or twists, so fix it with bolts or Insulock ties, etc., when piping. Do not turn the dial forcibly when fully closing or opening it (. N.m or less). Do not use the lock nut to adjust the needle. Otherwise this could cause needle galling or damage. Design & Selection Installation & djustment This valve can not be used as a stop valve that has no leakage. Slight leakage is allowed in product specifications. Not all of the needle valve s resin parts are flameresistant. The flow path in the needle valve is not completely free of dust generation. final clean should be used in circuits where dust generation could be a problem. There is no direction for needle valve piping. onnect fiber tubing (. diameter joint) as follows ( to ): () Set the collar at the very back. ollar () ut the end of fiber tubing at a right angle. () Pass the collar through, and confirm that the fiber tube is correctly inserted while carrying out the work. () Insert fiber tubing to the last position. () Pull the collar forward to lock it. sensor When the option P (oil prohibited specifications) is selected, the adjustment dial may not turn easily because the use of oil is prohibited. Needle valve, inline type with pushin joint

32 SL/SD Series pplications Example of inout speed is stabilized by controlling with an inout speed. [E.g. ] In lowspeed control with a single rod air cylinder, the cylinder pops out immediately after the PUSH side operates if a meterout circuit is used. [E.g. ] t vertical installation, the cylinder pops out immediately after operation because of the load's weight. is stabilized by using a meter inout circuit. (Example ) Low speed drive (Example ) Popping out Meterout circuit W Popping out Meter inout circuit Stable speed W Stable speed (ause of popping out) When using the meterout circuit, flow on the exhaust side is restricted, so both sides reach the same pressure immediately after the valve is switched. The thrust equivalent to the difference in the piston's pressurized area or the thrust equivalent to the load's weight causes popping out. When the piston moves, exhaust pressure rises, speed decelerates, and the set speed is reached. If popping out is caused by this phenomenon, fluctuation in sudden thrust is suppressed by restricting the flow on the supply side, and popping out is resolved. sensor (Example of speed waveform) Popping out phenomenon Time Time Hazards can be prevented by suppressing popping out at beginning of movement after residual pressure is released. Reciprocating speed control is possible with a single acting cylinder.