Space saving, compact model available

Transcription

1 Compact Type High Purity ir Operated Chemical Liquid Valve Series RoHS LV Space saving, compact model available Compact type model is introduced as a new series to complement current series with integrated fittings. Select a series according to the flow rate and installation requirements. Mounting base dimensions conform to SEMI Standard, F ody (Except for the 10 and 60) LV New PF L1 Diaphragm PTFE L3 ctuator section PPS LH M Series Page 740 Material of actuator section: PVDF resin ody New PF PVDF Diaphragm PTFE ctuator section PVDF Choice of buffer materials FKM, EPDM ir operated Page 750 Manually operated Page 760 -F/FN Series 737

2 Compact Type High Purity ir Operated Chemical Liquid Valve Series Guide ring Piston bumper Eliminates lateral motion of the poppet which reduces internal leakage. bsorbs piston momentum to minimize impact-induced particle generation. Diaphragm (PTFE) uffer Special diaphragm construction ensures gentle opening and closing that prevents the formation of micro-bubbles. Protects diaphragm from deformation and damage due to back pressure. Minimal residual liquid Pilot port Residual liquid is minimized by the tapered shape and integrated fitting construction, allowing liquid to flow smoothly, achieving improved swept flow rate characteristics. Integral clean One-touch fitting construction Can select female thread (M5 x 0.8). Integrated fitting construction ody (New PF) Offers quadruple seal construction. Nut lock mechanism. High flexural strength. Different tubing sizes can be selected. Compatible with chemicals such as acids, bases and ultrapure water. Dimension Dimension across across inlet/outlet inlet/outlet ports: ports: Reduced Reduced by by up up to to 29 % % ctuator section Piping from 4 directions are possible. r ody e Integrated fitting construction q Hyper Fitting the L1 series is used. Class 2 w [mm] Class 4 (The KP series is used.) Can select female thread (M5 x 0.8) Options Suck ack With flow rate adjustment With bypass Class Integral clean One-touch fitting construction Tube extensions Class Page 742 With flow rate adjustment & bypass Variations [Integrated fittings] Page 740 Orifice diameter Flow rate characteristics Kv (Cv) 0.07 (0.09) 0.3 (0.35) 1.1 (1.3) 1.6 (1.9) 4.2 (5) pplicable tubing O.D. Model / Flow rate characteristics Kv (Cv) 0.3 (0.35) 1.1 (1.3) 1.6 (1.9) 4.2 (5) 1/4 3/8 1/2 3/ [Tube extensions] Page 747 Orifice diameter 3/16 With reducer pplicable tubing O.D. Model /4 3/8 1/2 3/4 asic size

3 Compact Type High Purity ir Operated Chemical Liquid Valve Series ir Operated F -FN Series F H - FN Series Page 750 Manually Operated Page 760 ody: PF ctuator section: PVDF uffer: FKM/EPDM (Selection) Japan s Export Trade Control Order Not applicable for list control Only the 50 and 60 apply to the list control. Pilot port can be selected from 4 directions. Type of fitting: Either L1, L3 or tube extensions can be selected. Inapplicable to the 60. LV Options: With flow rate adjustment, With bypass, With indicator, High back pressure (0.5 MPa) LV L1 L3 40-Z13-F1 With flow rate adjustment H40-Z13-F 40-Z13-F LH Variations [L1 integrated fittings] Pages 750, 760 Orifice diameter Flow rate characteristics Kv (Cv) 0.3 (0.35) 1.1 (1.3) 1.6 (1.9) 4.2 (5) 6.8 (8) M pplicable tubing O.D. Model /8 3/16 1/ Flow rate characteristics Kv (Cv) 0.3 (0.35) 1.1 (1.3) 1.6 (1.9) 4.2 (5) 6.8 (8) 1/2 3/ F/FN 40-F/FN 50-F/FN 60-F/FN With reducer asic size pplicable tubing O.D. Model /4 3/8 1/2 3/4 1 3/ F/FN 30-F/FN 40-F/FN 50-F/FN 60-F/FN [Tube extensions] Pages 757, 764 Orifice diameter Flow rate characteristics Kv (Cv) 0.3 (0.35) 1.1 (1.3) 1.6 (1.9) 4.2 (5) 6.8 (8) 20-F/FN [L3 integrated fittings] Pages 754, 762 Orifice diameter 3/8 pplicable tubing O.D. Model /4 3/8 1/2 20-F/FN 30-F/FN 40-F/FN 50-F/FN 60-F/FN 739

4 ir Operated Insert ushing, Integrated Fittings Series ody class Symbol ody class Orifice dia. 1 1 ø2 2 2 ø4 3 3 ø8 4 4 ø ø16 Symbol 03 3 x 2 v V 04 4 x 3 v V 06 6 x 4 v V 08 8 x 6 V x 8 v V x 10 v V x 16 v 03 1/8" x 0.086" v V 05 3/16" x 1/8" V 07 1/4" x 5/32" v V 11 3/8" x 1/4" v V 13 1/2" x 3/8" v V 19 3/4" x 5/8" v vasic size V With reducer Note) Refer to page 769 for details on the applicable tubing sizes S 03 Valve type 0 N.C. 1 N.O. 2 Double acting Note) Refer to Variations in the table below for valve type combinations. L1 integrated fittings pplicable tubing size Connecting tubing size ody class How to Order Material Option Nil None 1 With flow rate adjustment 2 With bypass 3 With flow rate adjustment & bypass Note) Refer to Variations in the table below for option combinations. Options can not be combined each other. Pilot port type Pilot port position Symbol ody class Type Symbol Position 1 ø4 One-touch fitting Nil q Nil 2, 3, 4, 5 ø6 One-touch fitting P2 w P3 e 2 1, 2, 3, 4, 5 M5 x 0.8 e P4 r Port (OUT) different diameter size Symbol pplication Nil Ports & same size Refer to the applicable tubing table to the left. Variations Type asic With flow rate adjustment With bypass With flow rate adjustment & bypass Symbol P N.C. P Valve type N.O. Double acting P N.C. Double acting P P N.C. Double acting P P N.C. Double acting Model Orifice diameter P P Metric Inch N.C. N.O. P P P P Double acting N.C. Double acting N.C. Double acting N.C. Double acting Symbol ody ctuator section Diaphragm End plate Note Nil PF PPS PTFE N PF PPS PTFE mmonium hydroxide compatible Different diameter tubings can be selected within the same body class. Different diameter tubing can not be selected for the body size ø2 3, 4 1/ ø4 ø8 3, 4, 6 6, 8, 10 1/8, 3/16, 1/4 1/4, 3/8 r w 40 ø10 10, 12 3/8, 1/2 Fluid flow direction 50 ø16 12, 19 1/2, 3/4 q

5 ir Operated Insert ushing, Integrated Fittings Series Standard Specifications Model Note) Metric 3, 4 3, 4, 6 6, 8, 10 10, 12 12, 19 Inch 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 Orifice diameter ø2 ø4 ø8 ø10 ø16 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 Operating pressure R flow 0 to to 0.3 [MPa] R flow 0 to to 0.1 ack pressure [MPa] 0.3 or less 0.2 or less Valve leakage [cm 3 /min] 0 (With water pressure) Pilot air pressure [MPa] 0.3 to 0.5 Pilot port One-touch fitting ø4 x ø3 tubing ø6 x ø4 tubing size Threaded M5 x 0.8 Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to 60 Weight [kg] Note) Refer to page 769 for details of the applicable tubing sizes. Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). Different diameter tubing cannot be selected for the body size 1. With reducer ody class Note) Refer to page 766 for information on changing tubing sizes /8 3/16 1/4 3/8 1/2 3/4 1 v v v 2 V V v V V v 3 V V v V v 4 V v V v 5 V v V v Precautions LV LV L1 L3 LH M e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. 741

6 Series Suck ack change of volume inside the suck back valve pulls in liquid at the end of the nozzle to prevent dripping. Pilot port with One-touch fittings djustment knob djusts the flow rate. P Lock nut Locks the adjustment knob position. Symbol P Pilot port threaded type djustment knob djusts the amount of suck back. Lock nut Locks the adjustment knob position. Suck back body Standard Specifications Model Note) Refer to page 769 for details on the applicable tubing sizes. How to Order 13U Note) 3, 4 1/8 Orifice diameter ø2 Flow rate Kv 0.07 characteristics Cv 0.09 Withstand pressure [MPa] 1 Operating pressure [MPa] 0 to 0.2 Maximum suck back volume [cm 3 ] 0.03 Pilot air pressure [MPa] 0.3 to 0.5 One-touch fitting ø4 x ø3 tubing Pilot port size Threaded M5 x 0.8 Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to 60 Weight [kg] U S 03 ody class Symbol ody class 1 1 Valve type 3 Suck back valve pplicable tubing size Note) Symbol Connecting tubing size 03 3 x 2, 1/8" x 0.086" 04 4 x 3 Note) Refer to page 769 for details on the applicable tubing sizes. Pilot port configuration Nil ø4 One-touch fitting 2 M5 x

7 ir Operated Insert ushing, Integrated Fittings Series Construction asic type N.C. N.O. Double acting q e P P q e P P q e P P LV LV t y r w u L1 L3 t y With reducer With flow rate adjustment i With bypass LH M P P i Component Parts No. Description Material 1 ctuator section PPS 2 ody PF 3 Diaphragm PTFE 4 End plate PPS 5 Insert bushing PF 6 Nut PF 7 Collar PF 8 Flow rate adjuster section PPS 743

8 Series asic type L D K 4 x øm () 2 x P One-touch fitting Vent hole P H C P N J G E (F) R 2 x V P P Pilot port threaded type [mm] Model C D E F G H J K L M N P R V 1l-Sl ø4 (5/32") M5 x 0.8 2l-Sl ø M5 x 0.8 3l-Sl ø M5 x 0.8 4l-Sl ø M5 x 0.8 5l-Sl ø M5 x

9 U ir Operated Insert ushing, Integrated Fittings Series With flow rate adjustment (Max.S) LV P P [mm] Model S 1l-Sl 14 2l-Sl l-Sl 26 4l-Sl 26 5l-Sl 29.5 LV L1 With bypass L3 LH (Max.T) M [mm] Model T U 2l-Sl l-Sl l-Sl l-Sl U P P With flow rate adjustment & bypass (Max.S) (Max.T) P P [mm] Model S T U 2l-Sl l-Sl l-Sl l-Sl

10 Series Suck back valve unit: Pilot port with One-touch fittings (Maximum stroke) x ø x ø4 (5/32") Pilot port 2 x M5 x 0.8 Vent hole /8 1/8 9.5 (41) (67) (73) 4.5 Pilot port threaded type 32 (52.6) Max.14 2 x ø5 M5 x 0.8 depth 5 Pilot port 23.5 M5 x 0.8 depth 5 Pilot port 1/8 1/8 9.5 (41) (67)

11 ir Operated Tube Extensions -T Series 2 0 T 06 ody class Symbol ody class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø ø16 Valve type 0 N.C. 1 N.O. 2 Double acting Note) Refer to Variations in the table below for valve type combinations. Symbol ody class ø6 v 10 ø10 v 12 ø12 v 19 ø19 v 07 1/4" v 11 3/8" v 13 1/2" v 19 3/4" v How to Order Pilot port position Symbol Position Nil q P2 w P3 e P4 r Pilot port type Symbol Type Nil ø6 One-touch fitting 2 M5 x 0.8 Option Nil None 1 With flow rate adjustment Note) Refer to Variations in the table below for option combinations. Material Symbol ody ctuator section Diaphragm End plate Note Nil PF PPS PTFE N PF PPS PTFE mmonium hydroxide compatible e r w Fluid flow direction q LV LV L1 L3 LH M Variations Model 20-T 30-T 40-T 50-T Type Symbol Orifice diameter Valve type Metric Inch ø4 6 1/4 ø8 10 3/8 ø /2 ø /4 asic N.C. P P P N.O. P N.C. N.O. Double acting Double acting With flow rate adjustment P P P N.C. Double acting N.C. Double acting 747

12 -T Series Standard Specifications Precautions e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. Model Metric Inch 1/4 3/8 1/2 3/4 Orifice diameter ø4 ø8 ø10 ø16 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 Operating pressure R flow 0 to to 0.3 [MPa] R flow 0 to to 0.1 ack pressure [MPa] 0.3 or less 0.2 or less Valve leakage [cm 3 /min] 0 (With water pressure) Pilot air pressure [MPa] 0.3 to 0.5 Pilot port One-touch fitting ø6 x ø4 tube size Threaded M5 x 0.8 Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to 60 Weight [kg] Construction asic type N.C. N.O. Double acting q P q P q P e P e P e P r w With flow rate adjustment t P P Component Parts No. Description Material 1 ctuator section PPS 2 ody PF 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 748

13 P ir Operated Tube Extensions -T Series asic type L D LV K 4 x øm () 2 x P One-touch fitting LV Vent hole P H L1 N C P E G L3 (F) T P P 2 x U J LH M With flow rate adjustment (Max.S) Pilot port threaded type P [mm] Model S 2l-Tl l-Tl 26 4l-Tl 26 5l-Tl 29.5 [mm] Model C D E F G H J K L M N P T U 2l-Tl ø M5 x 0.8 3l-Tl ø M5 x 0.8 4l-Tl ø M5 x 0.8 5l-Tl ø M5 x

14 ir Operated Insert ushing, Integrated Fittings -F/FN Series How to Order Valves 2 0 V 07 FN ody class Symbol ody class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø ø ø22 Valve type 0 N.C. 1 N.O. 2 Double acting Fitting type Symbol Model V L1 Option Nil None 1 With flow rate adjustment 2 With bypass 3 With flow rate adjustment & bypass 4 With indicator 5 High back pressure (0.5 MPa) tolerant 6 High back pressure with flow rate adjustment 7 High back pressure with bypass 8 High back pressure with flow rate adjustment & bypass 9 High back pressure with indicator 24 With bypass & indicator Note 1) With flow rate adjustment: Only available with N.C. valve and double acting valve, With indicator: Only available with N.C. valve, With bypass: Only available with N.C. valve and double acting valve. Note 2) "With bypass" type is not available for the 2l and 6l. Symbol pplicable tubing size Connecting tubing size ody class x 2 V 04 4 x 3 V 06 6 x 4 v V 08 8 x 6 V x 8 v V x 10 v V x 16 v V x 22 v 03 1/8" x 0.086" V 05 3/16" x 1/8" V 07 1/4" x 5/32" v V 11 3/8" x 1/4" v V 13 1/2" x 3/8" v V 19 3/4" x 5/8" v V 25 1" x 7/8" v v asic size V With reducer Port (OUT) different diameter size Symbol pplication Nil Ports & same size Refer to the applicable tubing Different diameter tubings can be table shown above. selected within the same body class. Material Pilot port position Symbol Position Nil q P2 w P3 e P4 r Note) P2 and P4 are not available for the 6l. Pilot port thread type Nil Rc1/8 N NPT1/8 Symbol ody ctuator section Diaphragm End plate Seal uffer F PF PVDF PTFE FKM FN PF PVDF PTFE EPDM e r w Fluid flow direction q 750

15 ir Operated Insert ushing, Integrated Fittings -F/FN Series Standard Specifications Model Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Orifice diameter ø4 ø8 ø10 ø16 ø22 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 R flow 0 to to to 0.4 Operating Standard R flow 0 to to 0.1 pressure [MPa] High back R flow 0 to 0.5 pressure R flow 0 to 0.4 N.C./N.O. 0.2 or less ack Standard 0.3 or less 0.2 or less Double acting 0.3 or less pressure [MPa] High back N.C./N.O./ 0.5 or less pressure Double acting Valve leakage [cm 3 /min] 0 (With water pressure) Pilot air pressure [MPa] 0.3 to 0.5 (High back pressure: 0.5 to 0.8) Pilot port size Rc1/8, NPT1/8 Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to 60 Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). V With reducer ody class /8 3/16 1/4 3/8 1/2 3/4 1 2 V V v V V v 3 V V v V v 4 V v V v 5 V v V v 6 V v V v Note) Refer to page 766 for information on changing tubing sizes. Precautions e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. LV LV L1 L3 LH M 751

16 -F/FN Series asic type, High back pressure L D D K 4 x øm 60 2 x P Vent hole P H C P N J E G (F) H N G 20 [mm] Model C D E F G H J K L M N P 2l-Vl-Fl l-Vl-Fl l-Vl-Fl l-Vl-Fl l-Vl-Fl Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/

17 ir Operated Insert ushing, Integrated Fittings -F/FN Series With flow rate adjustment, High back pressure with flow rate adjustment (Max.S) LV P [mm] Model S 2l-Vl-F l-Vl-F l-Vl-F l-Vl-F l-Vl-F1 38 P LV L1 With bypass, High back pressure with bypass L3 LH P M [mm] Model T U 3l-Vl-F l-Vl-F l-Vl-F U P (Max.T) With indicator, High back pressure with indicator [mm] Model W 20-Vl-F Vl-F Vl-F Vl-F Vl-F (W (When the valve is ON)) P P 753

18 ir Operated Flare, Integrated Fittings -F/FN Series How to Order Valves 2 0 Z 07 ody class Symbol ody class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø ø ø22 Valve type 0 N.C. 1 N.O. 2 Double acting Symbol Fitting type Symbol Model Z L3 pplicable tubing size Connecting tubing size ody class x 4 v 08 8 x 6 v x 8 v x 10 v x 16 v x 22 v 07 1/4" x 5/32" v 11 3/8" x 1/4" v 13 1/2" x 3/8" v 19 3/4" x 5/8" v 25 1" x 7/8" v FN Pilot port position Symbol Position Nil q P2 w P3 e P4 r Note) P2 and P4 are not available for the 6l. Pilot port thread type Nil Rc1/8 N NPT1/8 Option Nil None 1 With flow rate adjustment 4 With indicator 5 High back pressure (0.5 MPa) tolerant 6 High back pressure with flow rate adjustment 9 High back pressure with indicator Note) With flow rate adjustment: Only available with N.C. valve and double acting valve With indicator: Only available with N.C. valve Material Symbol ody ctuator section Diaphragm End plate Seal uffer F PF PVDF PTFE FKM FN PF PVDF PTFE EPDM e r w Fluid flow direction q Standard Specifications Model Metric 6 8, Inch 1/4 3/8 1/2 3/4 1 Orifice diameter ø4 ø8 ø10 ø16 ø22 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 R flow 0 to to to 0.4 Operating Standard R flow 0 to to 0.1 pressure [MPa] High back R flow 0 to 0.5 pressure R flow 0 to 0.4 N.C./N.O. 0.2 or less ack Standard 0.3 or less 0.2 or less Double acting 0.3 or less pressure [MPa] High back N.C./N.O./ 0.5 or less pressure Double acting Valve leakage [cm 3 /min] 0 (With water pressure) Pilot air pressure [MPa] 0.3 to 0.5 (High back pressure: 0.5 to 0.8) Pilot port size Rc1/8, NPT1/8 Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to 60 Precautions e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. 754

19 ir Operated Flare, Integrated Fittings -F/FN Series asic type, High back pressure L D D LV K 4 x øm 60 2 x P LV Vent hole P H C P L1 N G L3 (F) J E LH M H N G 20 [mm] Model C D E F G H J K L M N P 2l-Zl-Fl l-Zl-Fl l-Zl-Fl l-Zl-Fl l-Zl-Fl Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/

20 -F/FN Series With flow rate adjustment, High back pressure with flow rate adjustment (Max.S) P P [mm] Model S 2l-Zl-F l-Zl-F l-Zl-F l-Zl-F l-Zl-F1 38 With indicator, High back pressure with indicator [mm] Model W 20-Zl-F Zl-F Zl-F Zl-F Zl-F (W (When the valve is ON)) P P 756

21 ir Operated Tube Extensions -T-F/FN Series 2 0 T 07 ody class Symbol ody class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø ø ø22 Symbol Valve type 0 N.C. 1 N.O. 2 Double acting Fitting type Symbol Type T Tube extensions ody class ø6 v 10 ø10 v 12 ø12 v 19 ø19 v 25 ø25 v 07 1/4 v 11 3/8 v 13 1/2 v 19 3/4 v 25 1 v How to Order Valves FN Material Pilot port position Symbol Position Nil q P2 w P3 e P4 r Note) P2 and P4 are not available for the 6l. Pilot port thread type Nil Rc1/8 N NPT1/8 Option Nil None 1 With flow rate adjustment 4 With indicator 5 High back pressure (0.5 MPa) tolerant 6 High back pressure with flow rate adjustment 9 High back pressure with indicator Note) With flow rate adjustment: Only available with N.C. valve and double acting valve With indicator: Only available with N.C. valve Symbol ody ctuator section Diaphragm End plate Seal uffer F PF PVDF PTFE FKM FN PF PVDF PTFE EPDM e r w Fluid flow direction q LV LV L1 L3 LH M Standard Specifications Precautions e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. Model Metric Inch 1/4 3/8 1/2 3/4 1 Orifice diameter ø4 ø8 ø10 ø16 ø22 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 R flow 0 to to to 0.4 Operating Standard R flow 0 to to 0.1 pressure [MPa] High back pressure R flow 0 to 0.5 R flow 0 to 0.4 ack pressure 0.2 or less Double acting 0.3 or less [MPa] High back press. N.C./N.O./Double acting 0.5 or less Valve leakage [cm 3 /min] 0 (With water pressure) Pilot air pressure [MPa] 0.3 to 0.5 (High back pressure: 0.5 to 0.8) Pilot port size Rc1/8, NPT1/8 Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to

22 P -T-F/FN Series asic type, High back pressure L D D K 4 x øm 60 2 x P Vent hole P C H N J E G (F) H N G 20 [mm] Model C D E F G H J K L M N P 2l-Tl-Fl l-Tl-Fl l-Tl-Fl l-Tl-Fl l-Tl-Fl Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/8 Rc1/8 NPT1/

23 ir Operated Tube Extensions -T-F/FN Series With flow rate adjustment, High back pressure with flow rate adjustment (Max.S) LV P [mm] Model S 2l-Tl-F l-Tl-F l-Tl-F l-Tl-F l-Tl-F1 38 P LV L1 With indicator, High back pressure with indicator L3 LH [mm] Model W 20-Tl-F Tl-F Tl-F Tl-F Tl-F (W (When the valve is ON)) P P M 759

24 Manually Operated Insert ushing, Integrated Fittings H-F/FN Series ody class Symbol ody class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø ø ø22 Standard Specifications How to Order Valves H 2 0 V 07 FN Symbol Fitting type Symbol Model V L1 pplicable tubing size Connecting ody class tubing size x 2 V 04 4 x 3 V 06 6 x 4 v V 08 8 x 6 V x 8 v V x 10 v V x 16 v V x 22 v 03 1/8" x 0.086" V 05 3/16" x 1/8" V 07 1/4" x 5/32" v V 11 3/8" x 1/4" v V 13 1/2" x 3/8" v V 19 3/4" x 5/8" v V 25 1" x 7/8" v v asic size V With reducer Model H20 H30 H40 H50 H60 Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Orifice diameter ø4 ø8 ø10 ø16 ø22 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 Operating pressure [MPa] R flow 0 to 0.5 Valve leakage [cm 3 /min] 0 (With water pressure) Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to 60 Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). VWith reducer ody class /8 3/16 1/4 3/8 1/2 3/4 1 2 V V v V V v 3 V V v V v 4 V v V v 5 V v V v 6 V v V v Note) Refer to page 766 for information on changing tubing sizes. 760 Material Symbol ody ctuator section Diaphragm End plate Seal uffer F PF PVDF PTFE FKM FN PF PVDF PTFE EPDM Port (OUT) different diameter size Symbol pplication Nil Ports & same size Refer to the applicable Different diameter tubings can be tubing table to the left. selected within the same body class. Precautions e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. Handle Operation In order to prevent valve breakage due to excessive handle operation, the number of handle rotations is shown in the table below as a guide for handle operation when opening or closing the valve. Number of Handle Rotations (from fully open to fully closed) ody class Number of rotations 2 6 to to to 6 6

25 Manually Operated Insert ushing, Integrated Fittings H-F/FN Series L D D LV K Y 4 x øm H60 LV (Max.S) L1 Vent hole C P P L3 N (F) J E LH M N H20 [mm] Model C D E F J K L M N S Y H20-Vl-Fl H30-Vl-Fl H40-Vl-Fl H50-Vl-Fl H60-Vl-Fl

26 Manually Operated Flare, Integrated Fittings H-F/FN Series How to Order Valves H 2 0 Z 07 FN ody class Symbol ody class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø ø ø22 Fitting type Symbol Model Z L3 Material Symbol ody ctuator section Diaphragm End plate Seal uffer F PF PVDF PTFE FKM FN PF PVDF PTFE EPDM pplicable tubing size Symbol Connecting tubing size ody class x 4 v 08 8 x 6 v x 8 v x 10 v x 16 v x 22 v 07 1/4" x 5/32" v 11 3/8" x 1/4" v 13 1/2" x 3/8" v 19 3/4" x 5/8" v 25 1" x 7/8" v Standard Specifications Model H20 H30 H40 H50 H60 Metric 6 8, Inch 1/4 3/8 1/2 3/4 1 Orifice diameter ø4 ø8 ø10 ø16 ø22 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 Operating pressure [MPa] R flow 0 to 0.5 Valve leakage [cm 3 /min] 0 (With water pressure) Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to Precautions e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. Handle Operation In order to prevent valve breakage due to excessive handle operation, the number of handle rotations is shown in the table below as a guide for handle operation when opening or closing the valve. Number of Handle Rotations (from fully open to fully closed) ody class Number of rotations 2 6 to to to 6 6

27 Manually Operated Flare, Integrated Fittings H-F/FN Series L D D LV K Y 4 x øm H60 LV (Max.S) L1 Vent hole C P P L3 N (F) J E LH M N H20 [mm] Model C D E F J K L M N S Y H20-Zl-Fl H30-Zl-Fl H40-Zl-Fl H50-Zl-Fl H60-Zl-Fl

28 Manually Operated Tube Extensions H-T-F/FN Series How to Order Valves H 2 0 T 07 FN ody class Symbol ody class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø ø ø22 Fitting type Symbol Type T Tube extensions Material Symbol Symbol ody ctuator section Diaphragm End plate Seal uffer F PF PVDF PTFE FKM FN PF PVDF PTFE EPDM ody class ø6 v 10 ø10 v 12 ø12 v 19 ø19 v 25 ø25 v 07 1/4 v 11 3/8 v 13 1/2 v 19 3/4 v 25 1 v Standard Specifications Model H20 H30 H40 H50 H60 Metric Inch 1/4 3/8 1/2 3/4 1 Orifice diameter ø4 ø8 ø10 ø16 ø22 Flow rate Kv characteristics Cv Withstand pressure [MPa] 1 Operating pressure [MPa] R flow 0 to 0.5 Valve leakage [cm 3 /min] 0 (With water pressure) Fluid temperature [ C] 0 to 100 mbient temperature [ C] 0 to Precautions e sure to read this before handling the products. Refer to back page 50 for Safety Instructions, and pages 768 and 769 for Compact Type High Purity ir Operated Chemical Liquid Valve Precautions. Handle Operation In order to prevent valve breakage due to excessive handle operation, the number of handle rotations is shown in the table below as a guide for handle operation when opening or closing the valve. Number of Handle Rotations (from fully open to fully closed) ody class Number of rotations 2 6 to to to 6 6

29 Manually Operated Tube Extensions H-T-F/FN Series L D D LV K Y 4 x øm H60 LV (Max.S) L1 Vent hole C P P L3 N (F) J E LH M N H20 [mm] Model C D E F J K L M N S Y H20-Tl-Fl H30-Tl-Fl H40-Tl-Fl H50-Tl-Fl H60-Tl-Fl

30 Series Fittings and Special Tools Fittings Changing Tubing Sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. ody class /8 3/16 1/4 3/8 1/2 3/4 1 1 v v v 2 V V v V V v 3 V V v V v 4 V v V v 5 V v V v 6 V v V v Changing tubing sizes Example) Changing the tubing from an outside diameter of 1/4" to 1/8" in body class 2. Prepare an insert bushing and nut for tubing O.D. 1/8" (L1-2U03) and change the tubing size. (Refer to the section on how to order fitting parts.) Note) Tubing is sold separately. Part Composition Component parts Nut Insert Collar (Insert assembly) v asic size Yes Yes No V Reducer type Yes Yes Yes Caution 1. Connect tubing with special tools. Refer to the pamphlet High-Purity Fluoropolymer Fittings Hyper Fitting/Series L1, 2 Work Procedure Instructions (M-E05-1) for connecting tubing and special tools. (Downloadable from our website.) Insert bushing L1-207 Nut L1-2N07 Insert bushing L1-203 Nut L1-2N03 How to Order Fitting Parts 1/4" L1-2U07 (asic size) Tubing Collar 1/8" L1-2U03 (Reducer type) Tubing L1 1 U Type of part Symbol Type of part U Nut & Insert bushing Insert bushing N Nut ody class fittings Symbol ody class (fittings) * Type U is recommended when changing tubing sizes. Tubing size Note) Symbol Tubing size ody class (fittings) 03 1/8" x 0.086", 3 x x /8" x 0.086" 04 4 x /16" x 1/8" x /4" x 5/32" 06 6 x x x /4" x 5/32" 11 3/8" x 1/4" x x /8" x 1/4" /2" x 3/8" x /2" x 3/8" /4" x 5/8", 19 x /4" x 5/8", 19 x 16 6 Note) Refer to page 769 for details 25 1" x 7/8", 25 x 22 on the applicable tubing sizes.

31 Series pplicable Fluids High Purity ir Operated Chemical Liquid Valve Material and Fluid Compatibility Check List Chemical Compatibility cetone v Note 1) 2) mmonium hydroxide v Note 2) Isobutyl alcohol v Note 1) 2) Isopropyl alcohol v Note 1) 2) Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, Temperature 50 C or less Ethyl acetate Note 1) 2) v utyl acetate v Note 1) 2) Nitric acid (except fuming nitric acid) Concentration 10% or less v Note 2) DI water (deionized water) Sodium hydroxide (caustic soda) Concentration 50% or less v Nitrogen gas Ultrapure water Toluene v Note 1) 2) v v v v v v LV LV L1 L3 LH M Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) v Note 2) Phosphoric acid Concentration 80% or less v Table symbols : Can be used. v : Can be used under certain conditions. : Cannot be used. The material and fluid compatibility check list provides reference values as a guide only. Note 1) Since static electricity may be generated, implement suitable countermeasures. Note 2) Use caution as permeation may occur. The permeated fluid may effect the parts of other materials. Compatibility is indicated for fluid temperatures of 100 C or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers. SMC is not responsible for its accuracy and any damage happened because of this data. 767

32 Compact Type High Purity ir Operated Chemical Liquid Valve Precautions 1 e sure to read this before handling the products. Warning Design / Selection 1. Check the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog. 2. Fluids Operate after confirming the compatibility of the product's component materials with fluids, using the check list on page 767. Please contact SMC regarding fluids other than those in the check list. Operate within the indicated fluid temperature range. 3. Maintenance space Ensure the necessary space for maintenance and inspections. 4. Fluid pressure range Keep the supplied fluid pressure within the operating pressure range shown in the catalog. 5. mbient environment Install the product in an environment where there is no effect from radiant heat caused by heat sources, etc., and use within the ambient operating temperature range. fter confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does not adhere to the product's exterior surfaces. 6. Liquid seals When circulating fluid: Provide a relief valve in the system so that fluid does not get into the liquid seal circuit. 7. Countermeasures for static electricity Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures. Caution 2. Use the tightening torques shown below for the threaded pilot port. Tightening Torque for Operating Port Operating port M5 Piping Torque [N m] 1/6 turn with a tightening tool after first tightening by hand Rc, NPT1/8 0.8 to Use pilot ports and sensor (breathing) ports as indicated below. P port P port Sensor (breathing) port N.C. Pressure reathing reathing N.O. reathing Pressure reathing Double acting Pressure Pressure reathing In the case of N.C. and N.O. types, the port which does not receive operating pressure is released to atmosphere. When intake and exhaust directly from the valve is not desired due to problems with the ambient environment or scattering of dust, etc., install piping and perform intake and exhaust at a location which does not present a problem. 4. Connect tubing with special tools. Refer to the pamphlet High-Purity Fluoropolymer Fittings Hyper Fitting/Series L1, 2 Work Procedure Instructions (M- E05-1) or High Purity Fluoropolymer Fittings Hyper Fitting/ Flare Type Series L3 Fitting Procedure (M-E06-4) for connecting tubing and special tools. (Downloadable from our web site.) Warning Mounting 1. If air leakage increases or equipment does not operate properly, stop operation. fter mounting, perform suitable function and leak tests to confirm that the mounting is correct. 2. Operation Manual Mount and operate the product after reading the manual carefully and understanding its contents. lso, keep the manual where it can be referred to as necessary. Caution Piping 1. Preparation before piping efore piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body Tighten the nut until it touches the end surface of the body, and then tighten it an additional 1/8 turn. If the nut won t turn any further, then it means a sufficient tightening has occurred. Refer to the proper tightening torques shown below. Tightening Torque for Piping ody Torque [N m] class L1 L to to to to to to to to to to 23.0 Warning Operating ir Supply 1. Use clean air. Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction.

33 Compact Type High Purity ir Operated Chemical Liquid Valve Precautions 2 e sure to read this before handling the products. Installation and Removal of Tubing for Pilot Port Section Caution 1. Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc. The tubing might be cut diagonally or flattened, making installation impossible or causing problems such as disconnection and leakage. 2) Hold the tube and push it in slowly, inserting it securely all the way into the fitting. 3) fter inserting the tubing, pull on it tightly to confirm that it will not come out. If it is not installed securely all the way into the fitting, problems such as leakage or disconnection of the tubing can occur. 4) Grease is not used due to the KP series oil-free specification. For this reason, greater insertion force is required when tubing is installed. In particular, polyurethane tubing may fold when inserted due to its softness. Hold the end of the tubing, and insert it all the way in slowly and securely. Refer to dimension M in the dimension drawings for guidance on the insertion depth of tubing. 2. Removal of tubing 1) Push in the release button sufficiently, pressing the collar evenly around its circumference. 2) Pull out the tubing while holding down the release button so that it does not pop out. If the release button is not pressed down sufficiently, there will be increased bite on the tubing and it will become more difficult to pull it out. 3) When the removed tubing is to be used again, first cut off the section of the tubing which has been chewed. Using the chewed portion of the tube as it is can cause problems such as leakage or difficulty in removing the tubing. Precautions on Use of Other Tubing rands Caution 1. When using tubing brands other than SMC, confirm that the tubing outside diameter tolerances satisfy the following specifications. 1) Polyolefin tubing: Within ±0.1 mm 2) Polyurethane tubing: Within ±0.15 mm, Within 0.2 mm 3) Nylon tubing: Within ±0.1 mm 4) Soft nylon tubing: Within ±0.1 mm Do not use tubing if the outside diameter tolerance is not satisfied. It may not be possible to connect the tubing, or leakage or disconnection may occur after connection. Polyolefin tubing is recommended for use with clean room fittings. Note that while other types of tubing will satisfy performance standards for leakage and tubing pull-out strength, etc., the degree of cleanliness will deteriorate. Operating Environment Warning 1. Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. Warning 3. Do not use in locations where radiated heat will be received from nearby heat sources. 4. Do not use in environments which exceed the ambient temperature specifications of the product. Warning Maintenance 1. Maintenance should be performed in accordance with the procedures in the Operation Manual. Incorrect handling can cause damage or malfunction of machinery and equipment, etc. 2. efore removing equipment or compressed air supply/ exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation. 3. Perform work after removing residual chemicals and carefully replacing them with DI water or air, etc. 4. Do not disassemble the product. Products which have been disassembled cannot be guaranteed. If disassembly is necessary, please contact SMC. 5. In order to obtain optimum performance from valves, perform periodic inspections to confirm that there are no leaks from valves or fittings, etc. Caution 1. Removal of drainage Flush drainage from filters regularly. Caution 1. Refer to the applicable tubing sizes shown below for tubing to be used. pplicable Tubing Sizes Metric size Inch size Connection tubing size Operating Environment ø3 x ø2 3.0 ø4 x ø3 4.0 ø6 x ø4 6.0 ø8 x ø6 8.0 ø10 x ø Use of Tubing O.D. [mm] Internal thickness [mm] Standard size Tolerance Standard size Tolerance ± ±0.1 ø12 x ø ø19 x ø ø25 x ø ±0.15 1/8" x 0.086" /16" x 1/8" ±0.1 1/4" x 5/32" ±0.12 3/8" x 1/4" /2" x 3/8" /4" x 5/8" ±0.15 1" x 7/8" LV LV L1 L3 LH M