High Purity Chemical Valve Compact Type. Space saving, compact type is available. Piping from 4 directions are possible.

Transcription

1 High Purity Chemical Valve Compact Type Series Space saving, compact type is available. Compact type is introduced as a new series to complement conventional Series with integral fittings. Select a series according to the flow rate and installation requirements. Mounting base dimensions conform to SEMI Standard, F-0. (Except for 0) ctuator section ody Piping from directions are possible. (Made to Order) H ody: New PF Dimension across inlet/ Diaphragm: PTFE ctuator section: outlet ports: Reduced by up to 9 % VX VX VX LV L X P Integral fittings construction HYPER FITTING Series is used. G M Integral clean one-touch fitting construction (Series KP is used.) Can select female thread (M x 0.8). Integral tubing (construction) (mm) Class Class Class Class

2 Diaphragm (PTFE) Special diaphragm construction ensures gentle opening and closing that prevents the formation of micro-bubbles. Minimal residual liquid Residual liquid is minimized by the tapered shape and integral fitting construction, allowing liquid to flow smoothly, achieving improved swept flow characteristics. ody (New PF) Compatible with chemicals such as acids, bases and ultra de-ionized water. Option Guide ring Eliminates lateral motion of the poppet which reduces internal leakage. Piston damper bsorbs piston momentum to minimize impact-induced particle generation. uffer Protects diaphragm from deformation and damage due to back pressure. Pilot port Integral clean one-touch fittings construction Can select female thread (M x 0.8). Integral fittings construction Offers quadruple seal construction. Nut lock mechanism. High flexural strength. Different tubing sizes can be selected. With flow rate adjustment With by-pass With flow rate adjustment & by-pass Variations Integral fittings Orifice diameter 8 0 Flow characteristics v x 0 - m (Cv). (0.09) 8. (0.). (.). (.9) 0 () Series pplicable tubing size Metric size Inch size /8 / / /8 / / Integral tubing (construction) Orifice diameter 8 0 Flow characteristics v x 0 - m (Cv) 8. (0.). (.). (.9) 0 () Series pplicable tubing size Metric size Inch size / /8 / / With reducer asic size --

3 Integral Fitting Type (Hyper Fittings) Series ody class pplicable tubing size Connecting tubing outside diameter Metric sizes Inch sizes ody class ø ø ø ø8 ø0 ø ø9 /8 / / /8 / / asic size Orifice dia. ø ø ø8 ø0 ø 0 S 0 0 ody class With reducer Valve type N.O. Double Note) Refer to Variations in the table below for valve type combinations. Variations Type asic type With flow rate adjustment With by-pass With flow rate adjustment & by-pass How to Order Port (OUT) different dia. size P Refer to the applicable tubing table to the left Valve type P N.O. Double Orifice diameter P Double P Double P Double Metric Inch N.O. Double Double Double Double Option None With flow rate adjustment With by-pass With flow rate adjustment & by-pass Note) Refer to Variations in the table below for option combinations. Options can not be combined each other. Material ody ctuator section Diaphragm End plate Note N PF PF PTFE PTFE mmonium hydroxide compatible Pilot port thread type ody class,,,,,,, pplication Ports & same size Thread type ø one-touch fitting ø one-touch fitting M x 0.8 Different diameter tubings can be selected within the same body class. Different diameter tubing can not be selected for the body size. 0 ø ø, /8 0 ø, /8, /, / 0 ø8, 8, 0 /, /8 0 ø0 0, /8, / 0 ø, 9 /, / VX VX VX LV L X P --

4 Series Standard Specifications Metric Inch Orifice diameter Flow v x 0 - m characteristics Cv Withstand pressure (MPa) Operating pressure (MPa) < flow> ack pressure (MPa) Valve leakage (cm /min) Pilot air pressure (MPa) Pilot port One-touch fitting size Threaded Fluid temperature ( C) mbient temperature ( C) Weight (kg) 0, /8 ø , /8, /, / ø , 8, 0 /, /8 ø , /8, / ø to or less 0 to or less 0 (with water pressure) 0. to 0. ø x ø tubing ø x ø tubing M x to 00 0 to 0 0, 9 /, / ø Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). Different diameter tubing can not be selected for the body size. With reducer ody class Metric sizes Inch sizes /8 / / /8 / / Note) Refer to page -- for information on changing tubing sizes. Specific Product Precautions e sure to read before handling. Refer to page -- for Safety Instructions and --9 to -- for High Purity Chemical Valve Precautions. -- Caution Piping. Connect tubing with special tools. Refer to pages -- through -- regarding tubing connection and special tools.. Tighten the nut to the end surface of the body. s a guide, refer to the proper tightening torques shown below. Tightening torque for piping ody class Torque (Nm) 0. to to.0.0 to.. to.0

5 Integral Fitting Type (Hyper Fittings) Series Construction Standard type type N.O. type Double type q e P q e P q e P VX t y r w VX u VX t y With reducer LV With flow rate adjustment i With by-pass L P i X P Parts list No. Description ctuator section ody Diaphragm End plate Insert bushing Nut Collar 8 Flow rate adjuster section Material PF PTFE PF PF PF --

6 Series Dimensions asic type L D K -øm (Q) -P one-touch fitting Sensor (reathing port) P H C N J E G (F) R -V P Pilot port threaded type Dimensions -S -S -S -S -S C D 9 E F 8 9 G H.... J. 8 K 0 L M N 9 P ø (/") ø ø ø ø Q R. (mm) V M x 0.8 M x 0.8 M x 0.8 M x 0.8 M x

7 Integral Fitting Type (Hyper Fittings) Series With flow rate adjustment (Max. S) P Dimensions (mm) S VX -S -S -S -S -S. 9. VX VX With by-pass LV (Max. T) L Dimensions -S -S -S -S T 8 (mm) U U P With flow rate adjustment & by-pass X P (Max. S) (Max. T) P Dimensions (mm) S T U U -S S. -S 0 -S

8 8 Tube Extensions Series How to Order 0 T 0 ody class ody class Orifice dia. ø ø8 ø0 ø Option None With flow rate adjustment Note) Refer to Variations in the table below for option combinations. 0 Valve type N.C N.O Double Note) Refer to Variations in the table below for valve type combinations. Material ody PF N PF ctuator section End plate Pilot port thread type Diaphragm PTFE PTFE Note mmonium hydroxide compatible ody class ø one-touch fitting M x 0.8 Metric sizes Inch sizes 0 9 ø ø0 ø ø9 / /8 / / ody class Variations 0-T 0-T 0-T 0-T Type Orifice diameter Valve type Metric Inch ø / ø8 0 /8 ø0 / ø 9 / asic type P P N.O. Double N.O. Double With flow rate adjustment P Double Double --0

9 High Purity Chemical Valve (Compact Type) Series 9 Standard Specifications Specific Product Precautions e sure to read before handling. Refer to page -- for Safety Instructions and --9 to -- for High Purity Chemical Valve Precautions. Construction Metric Inch Orifice diameter Flow v x 0 - m characteristics Cv Withstand pressure (MPa) Operating pressure (MPa) < flow> ack pressure (MPa) Valve leakage (cm /min) Pilot air pressure (MPa) Pilot port One-touch fitting size Threaded Fluid temperature ( C) mbient temperature ( C) Weight (kg) 0 / ø to or less 0 0 /8 ø8.. ø x ø tube 0 to or less 0 (with water pressure) 0. to 0. M x to 00 0 to 0 0 / ø / ø Standard type type N.O. type Double type VX VX VX LV q e P q e P q e P L r w X With flow rate adjustment t P P Parts list No. Description ctuator section ody Diaphragm End plate Flow rate adjuster section Material PF PTFE --

10 Series 0 Dimensions asic type (Q) reathing port P H C G P (Max. S) J E L D K -øm -P one-touch fitting N (F) T -U With flow rate adjustment Pilot port threaded type P Dimensions (mm) -T S -T -T -T 9. Dimensions (mm) C D E F G H J K L M N P Q T U -T ø. M to 0.8 -T ø M to 0.8 -T ø M to 0.8 -T ø 8. M to

11 Series Fittings and Special Tools Fittings Changing tubing sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. ody class Part composition Metric sizes Inch sizes Nut /8 / / /8 / / asic size Reducer type Yes Yes Changing the tubing size Example) Changing the tubing from an outside diameter of /" to /8" in body class. Prepare an insert bushing and nut for /8" O.D. tubing (-U0) and change the tubing size. (Refer to the section on how to order fitting parts.) Note) Tubing is sold separately. Insert bushing -0 Nut -N0 Component parts Insert Collar (Insert assembly) Yes No Yes Yes Insert bushing -0 Nut -N0 VX VX VX LV L How to order fitting parts U 0 ody class ody class /" -U0 (asic size) Type of part U N Tubing Type U is recommended when changing tubing sizes. Type of part Nut & Insert bushing Insert bushing Nut Tubing size /8", ø ø /8" ø /" ø /" ø ø8 ø0 /" /8" ø0 ø /8" /" ø /" /", ø9 Collar /8" -U0 (Reducer type) ody class Tubing -- X P

12 Series Special Tools How to order fitting jigs G J Insert pin material Resin Stainless steel S (J/K type ony) Option (L/M type only) Option None Type ody class N Insert pin/holder type Metric size Inch size Note ) Compatible pins and holders are included with all sizes. (with the parts case) Option With bracket Description Part No. J, K, racket assembly -GL J type K type L, M,,,,, L type M type (for short piping) Table Tubing size symbols Type J L ody class ø 0 0 ø Metric sizes ø ø8 08 ø0 0 0 ø ø9 9 9 ø /8" /" 0 0 Inch sizes /" /8" /" /" 9 9 " Replacement parts Insert pin holder assembly (with the parts case) Insert pin (Single) Holder (Single) Description -GP J - Type Insert pin material (J/K type only) S Part No. Resin Stainless steel -GP J - ody class (Refer to Table ) Type -GH J - 0 Type Insert pin/ Holder type N Metric size Inch size 0 Tubing size symbol (Refer to Table ) Insert pin material (J/K type only) S Resin Stainless steel Tubing size symbol (Refer to Table ) Note) Replacement part type J shows the parts for -GJ and -GK. Replacement part type L shows the parts for -GL and -GM. --

13 High Purity Chemical Valve (Compact Type) Series Special Tools Dimensions -GJ -GK ø -GJ ø SET POS. -GK 0 (adjustable) VX (Max. 0) VX VX LV -GM -GL L R SET POS. 0 -R SET POS. -GL -R 8 (Max. 9) (Max. 9) 8 0 -GM -R 8 X P --

14 SET POS. Series Fitting ssembly Procedure ssemble fittings following the procedure shown below. J type J type fitting assembly procedure y Tubing o Hook u Fitting nut y Tubing t Insert bushing! Holder assembly replacement screw e ase i Holder assembly q Lever pin r Insert pin assembly t Insert bushing!0 Insert pin assembly replacement screw Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. Place the insert bushing t on the insert pin assembly r. Cut the end of the tubing y at a right angle and pass it through the fitting nut u. fter placing the tubing y in the holder assembly i, push it onto the insert bushing t until it stops and clamp it with the hook o. Caution When the tubing y is curved, straighten it out before using it. The tubing y may slip if there is oil or dust, etc., on the holder assembly i. Remove the contamination using alcohol or another suitable cleaner. Press the insert bushing t into the tubing y by turning the lever assembly w. Packed state w Lever assembly To replace the insert pin assembly r and holder assembly i, use the insert pin assembly replacement screw!0 and the holder assembly replacement screws!, respectively. K type Holder assembly replacement screw Insert pin assembly replacement screw K type fitting assembly procedure For procedure to set and press fit the insert pin assembly, refer to L, M type fitting assembly procedures. For procedure to set the tubing, refer to J type procedure. Lever Refer to J type assembly procedure. Tubing Insert bushing Holding screw Tighten the fitting nut u until it reaches the prescribed position on the body (end face). s a guide, refer to the proper tightening torques shown below. End face Nut tightening torque for piping ody class 0. to 0. Torque (Nm). to.0 Note ) In case of body class, the nut should be tightened manually. ody Sectional view Standard size End face Reducer type Tubing Optimum position Minimum position Seal Insert bushing Precautions on installation e careful not to scratch or dent the seal of the insert bushing. (Refer to the illustration on the left.) When the insert bushing inserted, its tubing end should be closer to seal side than the minimum position. (Refer to the illustration on the left.) --

15 High Purity Chemical Valve (Compact Type) Series Fitting ssembly Procedure ssemble fittings following the procedure shown below. L type r Tubing t Fitting nut u Knob w Insert pin assembly e Insert bushing L/M type fitting assembly procedure Turn the lever q and move to SET POS. Place the insert bushing e on the insert pin assembly w. M type Space y Holder assembly r Tubing e Insert bushing SET POS.!0 Holder assembly replacement screw ( places) q Lever Cut the end of the tubing r at a right angle and pass it through the fitting nut t. fter placing the tubing r in the holder assembly y, push it onto the insert bushing e until it stops and clamp it with the knob u. s a guide when tightening the tubing r with the knob u, maintain a uniform gap on both sides of the holder. Caution When the tubing r is curved, straighten it out before using it. The tubing r may slip if there is oil or dust, etc. on the holder assembly y. Remove the contamination using alcohol or another suitable cleaner. Press the insert bushing e into the tubing r by turning the lever q. (Pressing in can be accomplished with or turns of the lever q.) VX VX VX LV! Clamp assembly ody! Handle (M type only) Sectional view o Insert pin assembly replacement screw End face Standard size End face Reducer type q Lever To replace the insert pin assembly w and holder assembly y, use the insert pin assembly replacement screw o and the holder assembly replacement screws!0, respectively. In case of M type for short piping, remove the handle!, slide the clamp assembly! to attain the specified length, then secure it again with the handle!. Tighten the fitting nut t to the prescribed position on the body (end face). s a guide, refer to the proper tightening torques shown below. Nut tightening torque for piping Torque (Nm) ody class 0. to to.0.0 to.. to.0. to.0. to.0.0 to.. to 9 to Note ) In case of body class, the nut should be tightened manually. L X P Optimum position Minimum position Tubing Seal Insert bushing Precautions on installation e careful not to scratch or dent the seal of the insert bushing. (Refer to the illustration on the left.) When the insert bushing inserted, its tubing end should be closer to seal side than the minimum position. (Refer to the illustration on the left.) --

16 pplicable Fluids Material and fluid compatibility check list for High Purity Chemical Valves Chemical Compatibility cetone mmonium hydroxide Isobutyl alcohol Isopropyl alcohol Note, ) Note ) Note, ) Note, ) Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration % or less, 0 C or less Ethyl acetate utyl acetate Nitric acid (except fuming nitric acid) Concentration 0% or less Note, ) Note, ) Note ) DI water Sodium hydroxide Concentration 0% or less Nitrogen gas Super pure water Toluene Note, ) Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) Phosphoric acid Concentration 80% or less Note ) Table symbols : Can be used : Can be used in certain conditions : Cannot be used The material and fluid compatibility check list provides reference values as a guide only. Note ) Since static electricity may be generated, implement suitable countermeasures. Note ) Use caution as permeation may occur. The permeated fluid may effect the parts of other materials. Compatibility is indicated for fluid temperatures of 00 C or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers. SMC is not responsible for its accuracy and any damage happened because of this data. --8

17 Series High Purity Chemical Valve, Compact Type Precautions e sure to read before handling. Design & Selection Warning. Confirm the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog.. Fluids Operate after confirming the compatibility of the product's component materials with fluids, using the check list on page Contact SMC regarding fluids other than those in the check list. Operate within the indicated fluid temperature range.. Maintenance space Ensure the necessary space for maintenance and inspections.. Fluid pressure range Keep the supplied fluid pressure within the operating pressure range shown in the catalog.. mbient environment Operate within the ambient operating temperature range. fter confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does not adhere to the product's exterior surfaces.. Liquid seals When circulating fluid Provide a relief valve in the system so that fluid does not get into the liquid seal circuit.. Countermeasures for static electricity Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures. Warning Mounting. If air leakage increases or equipment does not operate properly, stop operation. fter mounting, perform suitable function and leak tests to confirm that the mounting is correct.. Instruction manual Mount and operate the product after reading the manual carefully and understanding its contents. lso keep the manual where it can be referred to as necessary. Caution Piping. Preparation before piping efore piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.. Use the tightening torques shown below for the threaded pilot port. Operating port tightening torque Operating port M. Use pilot ports and sensor (breathing) ports as indicated below. N.O. Double In the case of and N.O. types, the port which does not receive operating pressure is released to atmosphere. When intake and exhaust directly from the valve is not desired due to problems with the ambient environment or scattering of dust, etc., install piping and perform intake and exhaust at a location which does not present a problem.. See page -- regarding tubing connections. Warning Torque (Nm) / turn with a tightening tool after first tightening by hand Port Pressure reathing Pressure P Port reathing Pressure Pressure Operating ir Supply Sensor (breathing) port reathing reathing reathing. Use clean air. Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction. VX VX VX LV L X P --9

18 Series High Purity Chemical Valve, Compact Type Precautions e sure to read before handling. 8 Installation and Removal of Tubing for Pilot Port Section Caution. Installation of tubing ) Using tube cutters TK-, or, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc. The tubing might be cut diagonally or flattened, making installation impossible or causing problems such as disconnection and leakage. ) Hold the tube and push it in slowly, inserting it securely all the way into the fitting. ) fter inserting the tubing, pull on it tightly to confirm that it will not come out. If it is not installed securely all the way into the fitting, problems such as leakage or disconnection of the tubing can occur. ) Grease is not used due to the series KP oil-free specifications. For this reason, greater insertion force is required when tubing is installed. In particular, polyurethane tubing may fold when inserted due to its softness. Hold the end of the tubing, and insert it all the way in slowly and securely. Refer to dimension M in the dimension drawings for guidance on the insertion depth of tubing.. Removal of tubing ) Push in the release button sufficiently, pressing the collar evenly around its circumference. ) Pull out the tubing while holding down the release button so that it does not pop out. If the release button is not pressed down sufficiently, there will be increased bite on the tubing and it will become more difficult to pull it out. ) When the removed tubing is to be used again, first cut off the section of the tubing which has been chewed. Using the chewed portion of the tube as it is can cause problems such as leakage or difficulty in removing the tubing. Precautions on Use of Other Tubing rands Caution. When using tubing brands other than SMC, confirm that the tubing outside diameter tolerances satisfy the following specifications. ) Polyolefin tubing ±0. mm ) Polyurethane tubing +0. mm 0. mm ) Nylon tubing ±0. mm ) Soft nylon tubing ±0. mm Do not use tubing if the outside diameter tolerance is not satisfied. It may not be possible to connect the tubing, or leakage or disconnection may occur after connection. Polyolefin tubing is recommended for use with clean room fittings. Note that while other types of tubing will satisfy performance standards for leakage and tubing pull-out strength, etc., the degree of cleanliness will deteriorate. Warning. Do not use in a location having an explosive atmosphere.. Do not operate in locations where vibration or impact occurs.. Do not use in locations where radiated heat will be received from nearby heat sources. Warning Operating Environment Maintenance. Maintenance should be performed in accordance with the procedures in the instruction manual. Incorrect handling can cause damage or malfunction of machinery and equipment, etc.. efore removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation.. Perform work after removing residual chemicals and carefully replacing them with DI water or air, etc.. Do not disassemble the product. Products which have been disassembled cannot be guaranteed. If disassembly is necessary, contact SMC.. In order to obtain optimum performance from valves, perform periodic inspections to confirm that there are no leaks from valves or fittings, etc. Caution. Removal of drainage Flush drainage from filters regularly. --0

19 Series High Purity Chemical Valve, Compact Type Precautions e sure to read before handling. 9 Warning. Operate within the ranges of the maximum operating pressure and back pressure. Caution. Please note that when the product is shipped from the factory, gases such as N and air may leak from the valve at a rate of cm /min (when pressurized).. When operated at a very low flow rate, the series with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate it after careful examination of the flow rate, pressure and piping conditions.. In the series, water hammering may occur depending on the fluid pressure conditions. In most cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the flow rate, pressure and piping conditions should be reviewed. Precautions on Usage Caution. To adjust the flow rate for the series with flow rate adjustment, open gradually starting from the fully closed condition. Opening is accomplished by turning the adjustment knob counter clockwise. dditionally, do not apply any unreasonable force to the adjustment handle when nearing a fully opened or closed state. This may result in deformation of the orifice sheet surface or damage to the threaded part of the adjustment handle. It is in the fully closed condition when the product is shipped from the factory.. fter a long period of nonuse, perform a test run before beginning regular operation.. Since the is packaged in a clean room use sufficient care in handling when opened.. In the case of the integral tubing type, be certain that the fittings are not applicable by heating up the tubing with a heat gun, for example. VX VX VX LV L X P --