Large Size Vacuum Module:

Transcription

1 Large Size acuum Module: System/acuum Pump System Large suction flow rate, suitable when used with large size pads or multiple pads. Nozzle dia. ø1.0, ø1.3, ø1.5, ø1.8, ø2.0 acuum module suitable for handling workpieces of 0.5 to 5 kg. Z Z MJ M EP 937

2 Large Size acuum Module: System/acuum Pump System acuum module suitable for handling workpieces of 0.5 to 5 kg. Modular design/customized application function through selection of modular components. Modules for use with external vacuum supply (from pump or mainline) or as an air driven ejector system. Safe acuum self-holding function by means of double solenoid valves. Compact, Lightweight Manifolding possible acuum ejector type complete unit unit With digital vacuum switch acuum switch/ unit With vacuum switch Without vacuum switch Function plate (Option) Double solenoid alve unit ir operated pplication Example One pilot External vacuum supply type complete unit Transferring CRT Escorting printed matter Picking & placing thin plate 938 Picking & placing copper plates, utomatic labeling machine, Transferring veneers, utomatic screw fastening machine

3 Large Size acuum Module: Modular Components Introduction System System acuum Pump System Component equipment Characteristics P. 940 to 967 P. 968 to 983 unit 1-W alve unit 1- acuum pressure switch ZSE2-0R-15 ZSE unit 1-F Function plate 1-R Common specifications Nozzle dia. (mm) Maximum suction Type S flow rate (l/min. (NR)) Type L ir consumption (l/min (NR)) Maximum vacuum pressure Exhaust release ( exhaust) Component equipment Function Operation Power supply voltage Set pressure range Hysteresis Operating voltage Operating pressure range Filtration degree Material Manifold Unit Symbol ir supply port R1 R2 R3 acuum pad connection port ir supply port Pilot valve connection port connection port Common exhaust port External vacuum supply port Refer to pages 945 to 954 for further specifications of each unit S: -84 kpa L: -53 kpa uilt-in silencer, Manifold exhaust Individual exhaust port (Pilot type)/ (Pilot type) N.C./N.O. Solenoid valve (Double, Single)/ir operated valve 3, 5, 6, 12, 24 DC, 100, 110 C (50/60Hz) 101 to 0 kpa/ 101 to 10 kpa 3% or less 12 to 24 DC (Ripple ±10% or less ) / acuum to 100 kpa F Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 2 Rc 1 8 / Z Z MJ M EP Single unit Single unit Manifold Manifold 939

4 Large Size acuum Module: System How to Order For details about certified products conforming to international standards, visit us at Note for model selection Take function plates into consideration. (Refer to page 943.) unit Components self-holding acuum switch unit 1 unit nozzle dia. 20 S Maximum vacuum pressure exhaust 1 K1 Combination of supply valve and release valve Refer to Table (1). Pilot valve Solenoid valve rated voltage Electrical entry Light/Surge voltage suppressor Manual override 5 M Z E C Combination of vacuum switch/ valve and release valve acuum switch electrical entry Release flow rate adjusting needle Unit specifications (pplicable to Series ZSE4) L unit unit unit module nozzle diameter mm mm mm mm mm Solenoid valve rated voltage 1 20 L 1 K2 5 M Z E C 1 20 S 1 E C 1 20 L 1 F Maximum vacuum pressure S L exhaust Symbol Type alve Manifold 1 uilt-in silencer 2 (1) Port exhaust 3 (2) Common exhaust Note 1) When port exhaust is applied to the manifold, pilot exhaust is done by common exhaust. Thus, the exhaust port on the manifold base should be open while operating. Note 2) When the product is used for the manifold specification and common exhaust, the exhaust air of the operating ejector releases may enter the vacuum () port of the non-operating ejector and be released if there are an operating and non-operating ejector. Select either the built-in silencer or port exhaust for the ejector exhaust method. Nil 5 6 S R D1 D2 Supply valve N.C. acuum switch unit acuum switch unit Filter unit ir operated 24 DC 12 DC 6 DC 5 DC 3 DC 100 C ( Hz) 110 C ( Hz) Caution When using C, the DC solenoids are operated via a rectifier. Therefore, make sure to combine the connector assembly equipped with a rectifer with the exclusive solenoids. Using other combinations could lead to burned coils or other malfunctions kpa 53 kpa Combination of supply valve and release valve Refer to Table (1) on page 941 for details. Electrical entry DC: 1 W Nil (With indicator light: 1.05 W) C Y DC: 0.45 W (With indicator light: 0.5 W) Only 24 DC and 12 DC are applicable to 0.45 W. Electrical entry Nil ir operated For 24, 12, 6, 5, 3 DC L Lead wire length 0.3 m LN Without lead wire (pplicable to only DC) Plug LO Without connector connector M Lead wire length 0.3 m type MN Without lead wire (pplicable to only DC) MO Without connector G Grommet Lead wire length 0.3 m (pplicable to only DC) H type Lead wire length 0.6 m (pplicable to only DC) 100, 110 C (With rectifier) L Lead wire length 0.3 m Plug LO Without connector connector M Lead wire length 0.3 m type MO Without connector Refer to Table (2) on page 941 for part no. of lead wire with connector. Nil Nil L C CL CN Release flow rate adjusting needle Nil Without lock nut L With lock nut Unit specifications Nil With unit switching function (1) M SI unit only (2) Note 1) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, 1999). Note 2) Fixed unit: kpa Digital vacuum switch specifications (D1, D2, D3) Output pplicable Symbol specifications Lead wire length switch 25(L) NPN output Lead wire length 0.6 (3.0) m 26(L) nalog output Lead wire length 0.6 (3.0) m D1 D2 65(L) PNP output Lead wire length 0.6 (3.0) m 27(L) NPN output Lead wire length 0.6 (3.0) m 26(L) nalog output Lead wire length 0.6 (3.0) m D3 67(L) PNP output Lead wire length 0.6 (3.0) m acuum switch electrical entry (E) Grommet Lead wire length 0.6 m type Lead wire length 3.0 m Lead wire length 0.6 m Connector type Combination of vacuum switch/ Specifications D1 D2 D3 E Digital vacuum switch (ZSE4) + Filter vacuum switch LCD display LCD display with backlight LED display NPN output E55 F (ZSE2) + Filter PNP output Filter Select the digital vacuum switch output specification in accordance with the digital vacuum switch specifications (D1, D2 and D3). Manual override Non-locking push type Slotted locking type Lead wire length 3.0 m W/o lead wire Refer to page 941 for part no. of lead wire with connector. Light/Surge voltage suppressor Nil None With light/surge voltage suppressor Z (Possible only solenoid valve connector type.) S With surge voltage suppressor S is not available for C. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged.

5 Large Size acuum Module: System Z Table (1) Combination of Supply alve and Release alve Operation stop Table (2) How to Order alve Plug Connector ssembly DC alve unit function acuum adsorption 100 C (with rectifier) 110 C (with rectifier) acuum release alve unit components Supply valve Double SOL. (J ) N.C. (J3133) J10 J10 J10 Release valve N.C. (J3133) N.C. (J3133) Nil Symbol K1 K Double SOL. (J ) Lead wire length 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm Solenoid valve Double SOL. (J ) N.C (J3133) ZS ir operated (J3130) 10 Double SOL. (J ) ir operated ir operated K3 (J3130) (J3130) N.C. C1 (J3133) ir operated C2 (J3130) N.O. C3 (J3133) Double SOL. C4 (J ) Nil Without valve module 5 Solenoid valve Double SOL. (J ) Common with supply valve Nil N.C (J3133) Common with supply valve Common with supply valve Lead wire length 0.6 m 3 m 5 m ir operated (J3130) Table (3) acuum Switch/Lead Wire with Connector How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire connector and the 5 m lead wire connector separately. Example) CN... 1 pc. ZS pc. Common with supply valve Z MJ M EP How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) 120S1-K15M Z-EC... 1 pc. J pcs. 941

6 System/Combination of Supply alve and Release alve Combination Symbol: K1 Feature: Double solenoid supply valve allows for self-holding. Pilot pressure supply port () Pilot pressure exhaust port () Release pressure supply port () ir pressure supply port () How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop Note SOL.b OFF ON ON SOL.c OFF ON OFF ON OFF OFF Release valve SOL.c SOL.b Release valve Combination Symbol: K2 Feature: Single solenoid valve is provided for supply valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop SOL.c SOL.c ON OFF OFF ON OFF OFF Combination Symbol: K3 Feature: Operation can be controlled by an external pilot valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop Pilot air Pilot air ir operated a ir operated b Release valve ir operated a ir operated b ON OFF OFF ON OFF OFF acuum port () When power supply is cut off while the supply valve is ON, the operational state is held. Note When power supply is stopped, all operations will be stopped. Note The product is used under the environment in which solenoid valves cannot be used or when the centralized control is applied using external pilot air. Combination Symbol: C1 Feature: dsorption of workpieces (when energized) and release of vacuum (when de-energized) are switched by single solenoid valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release / ON OFF Combination Symbol: C2 Feature: dsorption of workpieces and release of vacuum are switched by external pilot valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release How to Operate Pilot air ir operated a / ir operated a ON OFF Combination Symbol: C3 Feature: dsorption of workpieces (when de-energized) and release of vacuum (when energized) are switched by single solenoid valve. Pilot valve operation Operation 1. dsorption 2. acuum release / OFF ON Release valve Release valve Release valve Combination Symbol: C4 Feature: dsorption of workpieces and release of vacuum are switched by double solenoid valve. SOL.b Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Caution When pipe connection is made to one port connection ( port) only, use a function plate (1-R1). Refer to page 943 for further information. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release / SOL.b ON OFF OFF ON Release valve Note When power supply is stopped, supply valve/ release valve will hold the operation. 942

7 Large Size acuum Module: System Function Plate/1-R function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to,, and ports respectively. Without Function Plate (Standard) pplicable system: system External vacum supply system 1 R Release pressure supply port Release pressure supply port Pilot pressure supply port (w/plug) 1 Pilot pressure exhaust port (Release) Pipe connection Pilot pressure supply port ir pressure supply port Pipe connection Pilot pressure exhaust port (open) ir pressure supply port Pipe connection Symbol Indication port port port 1 Common 2 / Common Individual Pilot pressure supply port () Pilot pressure exhaust port () Release pressure supply port () ir pressure supply port () With Function Plate/pplicable to System Only When 1/R1 ( ) is Selected Since, and ports are made common via the function plate, pipe only to the port. Release pressure supply port (w/plug) Pilot pressure supply port (w/plug) Pilot pressure exhaust port (open) ir pressure supply port When 1/R2 ( /) is Selected Supply air for generating vacuum and releasing vacuum respectively. How to Order Function Plate Unit (For System) Piping specifications How to order Indicate the model numbers of the vacuum module and the function plate. Example) 120S1-K15MZ-EC... 1 pc. 1-R pc. Circuit diagram SOL.b SOL.c Release valve Circuit diagram SOL.b SOL.c Release valve Circuit diagram Caution SOL.b SOL.c Release valve 1-R1 1-R2 acuum switch acuum port () acuum switch acuum switch Length of assembling screw varies when adding function plate. Order from the mounting thread parts list for unit combination on page 982. Order a plug (M-5P) separately in order to plug the and ports that are no longer used due to the addition of function plate. 943 Z Z MJ M EP

8 Construction!2 (1) How to Order alve ody ssembly 1 D K1 5 M Z L Combination of supply valve and release valve Pilot valve Solenoid valve rated voltage Refer to page 940 for detailed specifications of each code. Manual operation Release flow rate adjusting needle With light/surge voltage suppressor Electrical entry (2) How to Order ssembly 1 WD 10 S 1 Component Parts No. q w e r Note 1) t Description Manifold base Release flow rate adjusting needle Function plate Individual spacer Filter case J3130 J3233 J3133 Material luminum Stainless steel PT PT 5 M Z Note Refer to Note 2) Refer to page 962. Refer to page 962. (1-FC-PC) Polycarbonate (ssembly part no.: 1-FC-PC-S) Refer to page 953 Note 1) Precautions on handling the filter case 1. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Note 2) Turning the release flow rate adjusting needle 2 full turns from the fully closed position renders the needle valve fully open. Do not turn more than two times since turning excessively may cause the needle fall off. In order to prevent the needle from loosening and falling out, the release flow rate adjusting needle with lock nut is also available. Replacement Parts No. y u i o!0!1!2 Description Pilot valve assembly alve body assembly assembly element Filter element acuum switch Filter switch unit for replacement Material F F Part no. Refer to (5). Refer to (1). Refer to (2). Refer to (3). 1-FZ(30 μm) ZSE2-OR-15- ZSE F - -D How to Order Solenoid alves/ir Operated alves ir operated Solenoid valve Pilot valve Solenoid valve rated voltage Electrical entry Manual operation With light/surge voltage suppressor SZ 10 K1 C4 K3 Nozzle diameter 1.0 mm 1.3 mm 1.5 mm 1.8 mm 2.0 mm S L 1 F E L D exhaust Refer to page 953 for detailed specifications of each code Maximum vacuum pressure 84 kpa 53 kpa (3) How to Order Element Nozzle diameter 1.0 mm 1.3 mm 1.5 mm 1.8 mm 2.0 mm uilt-in silencer Port exhaust Common exhaust (4) acuum Switch + Suction Filter Unit Unit specifications Switch specifications (5) How to Order Pilot alves Combination Symbol Combination of vacuum switch and suction filter Components Double solenoid valve N.C. (J3233) Double solenoid valve N.O. (J3233) ir operated N.C (J3130) Single solenoid valve N.C. (J3133) Double solenoid valve N.O. (J3233) ir operated N.O (J3130) Model Refer to How to Order below. Supply: 1-J Release: 1-J3133- Refer to How to Order below. 1-J J3130 Refer to page 940 for detailed specifications of each code. Note) Pilot valve gasket is included. (1-G-1) 944

9 Large Size acuum Module: System Unit/1 Model/Max. acuum Pressure 84 kpa (S: Standard type) JIS Symbol Release pressure supply port() ir pressure supply port(p) acuum port (v) Model 1-W10S 1-W13S 1-W15S 1-W18S 1-W20S Nozzle dia. (mm) Nozzle dia. (mm) W 20 S 1 Maximum suction flow rate (l/min (NR)) Maximum suction flow rate (l/min (NR)) ir consumption (l/min (NR)) Model/Max. acuum Pressure 53 kpa (L: Large flow type) Model 1-W10L 1-W13L 1-W15L 1-W18L 1-W20L Common Specifications Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range Model ( exhaust method) Standard accessory ir consumption (l/min (NR)) Mass (With bracket) (kg) Mass (With bracket) (kg) MPa 0.2 to 0.55 MPa 0.45 MPa 5 to 50 C Code 1: uilt-in silencer For unit and manifold Code 2: Individual exhaust For unit and manifold racket (P ) How to Order: Code 1 and 2 are the suffixes in the ordering number to indicate the exhaust method. Note) Operation outside of the specified supply pressure and operating temperature range may cause a serious accident or damage. How to Order Z Z Nozzle diameter mm 1.3 mm mm mm mm exhaust 1 2 uilt-in silencer Individual exhaust Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) MJ M EP Maximum vacuum pressure S L 84 kpa 53 kpa 945

10 Characteristics (Representative value) Unit/Standard Type (S): Max. acuum Pressure 84 kpa 1-W10S1 1-W18S1 t 0.45 MPa acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Supply pressure (MPa) Suction flow (l /min (NR)) Supply pressure (MPa) Suction flow (l /min (NR)) 1-W13S1 1-W20S acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Supply pressure (MPa) Suction flow (l /min (NR)) Supply pressure (MPa) Suction flow (l /min (NR)) 1-W15S1 acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Supply pressure (MPa) Suction flow (l /min (NR)) 946

11 Large Size acuum Module: System Unit/Large Flow Type (L): Max. acuum Pressure 53 kpa t 0.45 MPa 1-W10L1 acuum pressure (kpa) Supply pressure (MPa) 1-W13L1 acuum pressure (kpa) Supply pressure (MPa) 1-W15L1 acuum pressure (kpa) ir consumption ir consumption acuum pressure ir consumption Suction flow acuum pressure Suction flow acuum pressure Suction flow Supply pressure (MPa) ir consumption (l /min (NR)) Suction flow (l /min (NR)) ir consumption (l /min (NR)) Suction flow (l /min (NR)) ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Suction flow (l /min (NR)) acuum pressure (kpa) Suction flow (l /min (NR)) acuum pressure (kpa) Suction flow (l /min (NR)) 1-W18L1 acuum pressure (kpa) W20L1 acuum pressure (kpa) acuum pressure acuum pressure ir consumption Supply pressure (MPa) ir consumption acuum pressure Suction flow Suction flow Supply pressure (MPa) ir consumption (l /min (NR)) Suction flow (l /min (NR)) ir consumption (l /min (NR)) Suction flow (l /min (NR)) Suction flow acuum pressure (kpa) Suction flow (l /min (NR)) acuum pressure (kpa) Suction flow (l /min (NR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, the vacuum pressure will also be changed. Normally this relationship is expressed in ejector standard use. In graph, Pmax is max. vacuum pressure and Qmax is maximum suction flow. The values are specified according to catalog use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition P1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0 (atmospheric pressure). ased on the above, when vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. In the case when ventirative or leaky work should be adsorbed, please note that vacuum pressure will not rise. 947 Z Z MJ M EP

12 exhaust Unit Nozzle Dia./ø1.0, ø1.3, ø1.5, ø1.8, ø2.0 acuum port Nozzle dia./ø1.0, ø1.3, ø1.5 mm 10 1-W ir pressure supply P port For port exhaust indication dapter 2 2 Circuit diagram EH. EH. Port exhaust Rc 1/8 exhaust port (EH.) 2 ir pressure supply port (P) Release pressure supply port () Rc 1/8 acuum port() 26.5 Rc 1/8 ir pressure supply port(p) racket Nozzle dia./ø1.8, ø2.0 mm 18 1-W 20 For port exhaust Rc 1/4 exhaust port (EH.) port (Release pressure supply port) Remove the plug from port at external release. racket dapter E indication dapter (Mounting hole) (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3 port exhaust) 1.2 Spacer 2 2 Rc 1/8 port (acuum port) Note) Dimensions for mounting bracket 2 Dimensions for mounting spacer Spacer is used to leave space for maintenance (for replacement of silencer etc.) on side mounting. racket part no.: P (Standard accessory) Spacer part no. : P Circuit diagram EH. EH. Port exhaust x 4, 6 (Mounting hole) ir pressure supply port (P) Release pressure supply port () Rc 1/8 acuum port() dapter E 2 x 3, 4 (Mounting hole) Spacer Rc 1/8 ir pressure supply port(p) Release pressure supply port () Remove the plug from port at external release. 109 (port exhaust) 114 (uilt-in silencer) 2 2 Rc 1/8 acuum port() racket racket

13 Large Size acuum Module: System acuum Pressure Switch Unit/Pressure Switch for acuum: ZSE2-0R- Quick response: 10 ms Compact size: 39H x 20W x 15D (except the connecting portion) Improved wiring: Connector style Uses a carrier diffusion semiconductor pressure sensor Pressure detector ( carrier diffusion semiconductor pressure sensor is used.) Sensor chip Specifications acuum pressure switch part no. Fluid Setting pressure range Hysteresis Temperature characteristics (ased on 25 C) Operating voltage Output Indicator light Current consumption Proof pressure (Max. operating pressure) Operating temperature range Wiring ZSE2 0R 15 L NPN Open collector 30 80m PNP Open collector 80m ZSE2-0R-15 ZSE2-0R-55 ir 101 to 0 kpa 3% F.S. or less (Fixed) ± 3% F.S. or less 12 to 24 DC (Ripple ±10% or less) NPN Open collector 30, 80 m PNP Open collector 80 m Lights up when ON 17 m or less (when 24 DC is ON) 0.5 MPa 5 to 50 C When using ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) Operation outside of the maximum operating pressure and operating temperature range may cause a serious accident or damage. ZSE2 connection Switch rown lack lue Main circuit of switch How to Order Load Output specifications Connection with PLC at negative COM terminal Switch With Connector/How to Order rown lack lue Main circuit of switch Piping specifications Nil Lead wire length 0.6 m Grommet type L Lead wire length 3 m C CL CN Connector type Lead wire length 0.6 m Lead wire length 3 m W/o lead wire Without lead wire (housing and 3 sockets)... ZS-10- With lead wire... ZS PLC input terminal Z Z MJ M EP Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Lead wire length Nil m 3 m 5 m Example) ZSE2-0R-15CN... 1 pc. ZS pc. * Refer to est Pneumatics No. 6 for detailed specifications of pressure switches. 949

14 acuum Pressure Switch Unit/Pressure Switch for acuum: ZSE2-0R- Guidelines for Use of acuum Pressure Switch Unit System circuit for work adsorption style When pads and switches are common to one vacuum source, sometimes there is a possibility, depending on the number of adsorption and non-adsorption applications at each point in time, that the switches will not work within the range of set pressures due to pressure variations from the vacuum source. In particular, when small diameter nozzles are used for adsorption, the switches are greatly influenced by pressure variations. In order to remedy this situation, the following circuit is recommended. acuum regulator acuum source Tank Throttle valve acuum pump style acuum line acuum pressure switch Pad Work djust the throttle valve to reduce the pressure fluctuation between absorption and nonabsorption. Stabilize the source pressure by providing a tank and a vacuum regulator. If a vacuum switch valve is inserted into individual lines and false absorption occurs, each valve should be turned OFF to minimize the influences on other pads. acuum Pressure Switch: ZSE2-0R- ZSE2-0R- ZSE2-0R- L Pressure setting trimmer L SET H Indicator light (Red) ZSE2-0R- C ZSE2-0R- CL ZSE2-0R- CN 2 x M2.5 x 41L Mounting thread 25 2 x M2.5 x 41L Mounting thread (3000) (3000) Pressure setting trimmer SET L H Indicator light (Red) 950 acuum supply port 3.3 acuum supply port 3.3

15 Large Size acuum Module: System How to Set acuum Pressure Pressure trimmer selects the ON pressure. Clockwise rotation increases high vacuum set point. Pressure setting trimmer Indicator light How to Use Connector 1. ttaching and detaching connectors When assembling the connector to the switch housing, push the connector straight onto the pins until the level locks into the housing slot. When removing the connector from the switch housing, push the lever down to unlock it from the slot and then withdraw the connector straight off of the pins. Hook + O\r Lead wire Socket Connector DC polarity indication Lever Pin Slot Housing SET 0.2 to 0.33 mm 2 Max. covering dia. ø1.7 mm High vacuum When using the switch to confirm correct absorption, the vacuum pressure is set to the minimum value to reliably absorb. If the value is set below the minimum, the switch will be turned ON even when adsorption has failed or is insufficient. If the pressure is set too high, the switch may not operate stably even though it may absorb correctly. Supply pressure Setting pressure tmospheric pressure Reliable adsorption Unstable adsorption No adsorption 2. Crimping of lead wires and sockets Strip 3.2 to 3.7 mm at the end of the lead wires, insert the ends of core wires evenly into the sockets, and then crimp with a crimping tool. When this is done, take care that the coverings of the lead wires do not enter the core wire crimping area. (Crimping tool: model no. DT ) Socket Covering Core wire retainer crimping area Hook Core wire Covering Lead wire 3. ttaching and detaching of socket to connector with lead wire ttaching Insert the sockets into the square holes of the connector (with +, 1, 2, indication), and continue to push the sockets all the way end. (When they are pushed in their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. Detaching To detach a socket from a connector, pull out the lead wire while pressing the socket's hook with a stick having a thin tip (about 1 mm). If the socket will be used again, first spread the hook outward. Connector Lead wire Hysteresis Hysteresis is the actual pressure variance from set pressure occuring when the output signal turns from ON to OFF. The set pressure is the pressure selected to switch from OFF to ON mode. High vacuum Setting pressure tmospheric pressure Hysteresis Precautions e sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for acuum Precautions. Mounting Warning 1. Do not give an excessive impact load. Do not drop, bump or apply excessive impact (1000 m/s 2 ) when handling. Even if the switch body is not damaged, the switch may suffer internal damage that will lead to malfunction. 2. Hold the product from the body side when handling. When raising and moving the product, do not raise it by holding the lead wire only, but hold the body. It may cause malfunction due to broken contacts. Z Z MJ M EP Socket Hook 951

16 acuum Pressure Switch Unit/Pressure Switch for acuum: ZSE Digital acuum Switch Specifications: Series ZSE4 Digital acuum Pressure Switch Part no. ZSE ZSE ZSE4E Display LCD LCD with backlight LED Pressure setting range 101 to 0 kpa 101 to 10 kpa Maximum operating pressure Operation indicator light (Lights up when ON) Response frequency Green 200 KPa 200 Hz (5 ms) OUT1: Green OUT2: Red Hysteresis Hysteresis mode ariable (3 digits or more) ariable (can be set from 0) Window comparator mode Fixed (3 digits) Fluid ir, Non-corrosive gas Temperature characteristics Repeatability Operating voltage Current consumption Pressure indication Self-diagnostic function Operating temperature range ±3% F.S. or less ±1% F.S. or less 12 to 24 DC (Ripple ±10% or less) 25 m or less 45 m or less 26, 27: 50 m or less 67: 60 m or less 31/2 digits (Letter height 8 mm) Over current (1), Over pressure, Data error, Confirmation of pressure at zero clear 0 to 50 C (With no condensation) Noise resistance 500 p-p, Pulse width: 1 m S, Start up: 1 ns Withstand voltage Insulation resistance ibration resistance Impact resistance 1000 C(50/60 Hz) for 1 min. between lead wires and body 2 MΩ (at 500 DC) between lead wires and body 2 hrs. each in, Y, Z directions at smaller of 10 to 500 Hz with amplitude 1.5 mm, or acceleration 980 m/s m/s 2 G in, Y, Z directions, 3 times each Note) Not available on analog output type. Output Specifications ZSE4 ZSE4 ZSE4E 25 (L) 26 (L) 65 (L) 26 (L) 27 (L) 67 (L) 1 output NPN open collector 30, 80 m or less nalog output (1 to 5 ) 1 output PNP open collector 80 m or less nalog output (1 to 5 ) 2 outputs NPN open collector 30, 80 m or less 2 outputs PNP open collector 80 m or less 952

17 Large Size acuum Module: System acuum Switch + Suction Filter Unit: 1-F Combination unit of vacuum pressure switch for vacuum pressure detection and suction filter to protect the unit from dust and contamination. Filter case Caution 1. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. How to Replace Elements Specification Unit no. 1-F - Operating pressure range acuum to 100 kpa Suction Operating temperature range 5 to 50 C filter Filtration degree 30 μm Filtration material F acuum pressure switch Refer to page 949 and 952 regarding vacuum switch. Standard option racket (P ) Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Combination of acuum Switch and Suction Filter Combination symbol acuum switch Weight (with bracket ) (kg) E ZSE D ZSE F 0.15 How to Order ZS 10 1 Nil F Select the digital vacuum switch output specification in accordance with the digital vacuum switch specifications (D1, D2 and D3). The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the built-in filter is likely to be clogged soon. The use with the ZF, ZF and ZFC series is recommended. 0.6 m 3 m 5 m E Combination of vacuum switch + suction filter Nil Specification D1 Digital LCD display D2 vacuum switch LCD display with backlight D3 E E55 F (ZSE4) + Filter acuum switch (ZSE2) + Filter Filter LED display NPN output PNP output How to order When requiring a switch with lead wire of 5 m, indicate separately the model numbers of a vacuum switch unit without a lead wire connector and the 5 m lead wire connector. Ex.) CN... 1 pc. ZS pcs. (1) Lead wire length for vacuum switch connector assembly Lead wire length L Nil L C CL CN Unit specifications Nil With unit switching function (1) M SI unit only (2) Note 1) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, 1999). Note 2) Fixed unit: kpa Digital vacuum switch specifications (D1, D2, D3) Symbol Output specifications Lead wire length pplicable switch 25 (L) NPN output Lead wire length 0.6 (3.0) m 26 (L) nalog output Lead wire length 0.6 (3.0) m D1 D2 65 (L) PNP output Lead wire length 0.6 (3.0) m 27 (L) NPN output Lead wire length 0.6 (3.0) m 26 (L) nalog output Lead wire length 0.6 (3.0) m D3 67 (L) PNP output Lead wire length 0.6 (3.0) m acuum switch electrical entry (E) Lead wire length 0.6 m Grommet type Connector type Lead wire length 3.0 m Lead wire length 0.6 m Lead wire length 3.0 m W/o lead wire Refer to Table (1) for part numbers for lead wire with connector. Z Z MJ M EP When an element becomes clogged, adsorption performance and response times are degraded. Stop operation and replace element. (Element no. 1-FZ). Please ensure that gasket is in slot before re-installation. O-ring Filter case (1-FC-PC) 1-FC-PC-S Filter gasket Filter element (1-FZ) Gasket slot acuum switch Filter block 953

18 acuum Switch + Suction Filter Unit: 1-F - Dimensions: 1-F - Circuit diagram 1-FE - Indicator light (Red) acuum pressure setting trimmer x Slitted hole (Mounting hole) x 4.5 Release pressure supply port () acuum pressure supply port() acuum switch acuum port L SET M x 4.6 (Mounting hole) 28 8 Thickness 1.2 Spacer is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. acuum switch Rc 1/8 acuum pressure supply port() Release pressure supply port () Remove tha plug from port at external release dapter F 30 Filter block 2 x 4.2 (Mounting hole) Rc1/8 acuum port () racket racket FD SMC PRESURRE SWITCH RESET SET ttachment D Digital pressure switch (73.3 for D2, D3 types) SMC Filter block D Note) 1 Dimensions for mounting bracket 2 Dimensions for mounting spacer racket part no. : P (Standard accessory) Spacer part no. : P

19 Large Size acuum Module: System Suction Filter: 1-F 1-F is to be used alone and cannot be combined with other units. Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Dimensions: 1-F Circuit diagram acuum release pressure port () Specification Model 1-F Operating pressure range acuum to 0.5 MPa Operating temperature range 5 to 50 C Filtration efficiency 30 μm Element F Mass (With bracket) 0.1 kg Note) If not operated within the specified range of pressure and temperature, trouble may be caused. (Mounting hole) Z Z MJ M EP Rc 1/8 Out port acuum release pressure port () Remove the plug from port at external release. Rc 1/8 IN port racket C racket C 1.2 Note) Dimensions for mounting bracket C racket C part no. : P (Standard accessory) 955

20 J SOL.b 2 RESET SET J SMC PRESSURE SWITCH RESET SET System Complete Unit Nozzle dia./ø1.0, ø1.3, ø K1 M -E 15 Release pressure supply port Pilot pressure supply port Pilot pressure exhaust port (open) ir pressure supply port For port exhaust Rc 1/8 exhaust port (EH.) L SET H exhaust acuum port Pilot pressure supply port () Pilot pressure exhaust port () Circuit diagram Release pressure supply port () ir pressure supply port () <Components> + alve + acuum Switch + Filter Indicator lilght (Red) acuum pressure setting trimmer indication SOL.b SOL.c Release valve acuum switch acuum port () 2 x Slotted holes (Mounting holes) Spacer Thickness 1.2 Spacer is used to leave space for maintenance (for replacement of filter element etc.) on side mounting Manual override 8 2 x 4.6 (Mounting hole) Manual override Release pressure supply port () Pilot pressure supply port () Interface Interface Pilot pressure exhaust port () Release flow adjusting needle Rc 1/8 port ir pressure supply port() Light alve unit acuum switch Filter block x ø4.2 (Mounting hole) 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3, port exhaust) Spacer dapter C racket racket K1 M -D - 15 : Release flow rate adjusting needle with lock nut Rc 1/8 acuum port () For port exhaust Rc 1/8 exhaust port (EH.) 9 (Needle fully open) 10.2 SMC PRESSURE SWITCH PRESS. 2.5~7kgf/cm 2 SOL.b 73.3 Digital pressure switch (D1) 76 (D2, D3) 85 SMC

21 J SOL.b J PRESS. 2.5~7kgf/cm 2 SMC PRESSURE SWITCH RESET SET RESET SET Large Size acuum Module: System Nozzle dia./ø1.8, ø K1 M -E Rc 1/4 exhaust port (EH.) Note) Dimensions for mounting bracket 2 Dimensions for mounting spacer racket part no. : P (Standard accessory) Spacer part no. : P : Release flow rate adjusting needle with lock nut PRESS. 2.5 to 7kgf/cm 2 L SET H 59.5 Z Z 9 (Needle fully open) Manual override Interface Interface 109 (port exhaust) 114 (uilt-in silencer) Dimensions not indicated are identical to the left drawing K1 M -D - Rc 1/4 exhaust port (EH.) For port exhaust MJ 75.3 SMC PRESSURE SWITCH 10.2 M EP SOL.b Digital pressure switch (D1) 76 (D2, D3) 85 SMC

22 J SOL.b J SOL.b exhaust System Nozzle dia./ø1.0, ø1.3, ø K1 M 15 Release pressure supply port Pilot pressure For port exhaust Rc 1/8 exhaust port (EH.) Pilot pressure exhaust port supply port ir pressure supply port acuum port with alve dapter indication Pilot pressure supply port () Pilot pressure exhaust port () Release pressure supply port () ir pressure supply port () 2 2 Circuit diagram SOL.c SOL.b Release valve acuum port () PRESS. 2.5 to 7kgf/cm Manual override 2 x ø 4.6 (Mounting hole) Spacer Manual override Release pressure supply port () Pilot pressure supply port () racket Interface Interface Pilot pressure exhaust port () Release flow adjusting needle Rc 1/8 ir pressure supply port() racket Light alve unit dapter C 2 x 3.4 (Mounting hole) 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3) 1.2 Spacer 2 acuum port () Thickness 1.2 Spacer is used to leave space for maintenance (for replacement of silencer etc.) on side mounting. Nozzle dia./ø1.8, ø K1 M - For port exhaust Rc 1/4 exhaust port (EH.) : Release flow rate adjusting needle with lock nut 9 (Needle fully open) PRESS. 2.5 to 7kgf/cm Note) Dimensions for mounting bracket 2 Dimensions for mounting spacer racket part no. : P (Standard accessory) Spacer part no. : P Manual override 109 (port exhaust) 114 (uilt-in silencer) Dimensions not indicated are identical to the top drawing. 958

23 Z Z MJ M EP 959

24 RESET SET SMC PRESSURE SWITCH RESET SET System exhaust acuum port without alve Nozzle dia./ø1.0, ø1.3, ø E 15 Rc 1/8 Exhaust port (EH.) For port exhaust ir pressure supply P port Indicator lilght (Red) acuum pressure setting trimmer indication Circuit diagram ir pressure supply port (P) Release pressure supply port () 2 x Slotted holes (Mounting holes) EH. Spacer EH. Port exhaust acuum switch acuum port () L SET H Thickness dapter E (Mounting hole) Spacer is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. acuum switch Rc 1/8 ir pressure supply port (P) Release pressure supply port () Remove tha plug from port at external release. 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3, port exhaust) Filter block 59 ~ = x 4.2 (Mounting hole) 2 2 Rc 1/8 acuum port () Spacer racket racket D - For port exhaust Rc1/8 Exhaust port (EH.) 10.2 SMC PRESSURE SWITCH 73.3 P 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3, port exhaust) 81 ttachment D Digital pressure switch Filter block D (73.3 for D2, D3 types) SMC 3 96 ~ =

25 SMC PRESSURE SWITCH RESET SET L Nozzle dia./ø1.8, ø E H RESET SET Large Size acuum Module: System Note) 1 Dimensions for mounting bracket 2 Dimensions for mounting spacer racket part no.: P (Standard accessory) Spacer part no.: P For port exhaust Rc 1/4 Exhaust port (EH.) Z Z SET (port exhaust) 114 (With built-in silencer) D - MJ For port exhaust Rc 1/4 Exhaust port (EH.) SMC PRESSURE SWITCH 10.2 M EP 75 ttachment D Digital pressure switch 109 (port exhaust) 114 (With built-in silencer) (73.3 for D2, D3 types) SMC 3 Filter block D 100 ~ = 600 Dimensions not indicated are identical to the top drawing. 961

26 System/Manifold Specifications How to Order Manifold Specifications Max. number of units Max. 6 stations Port Port size Common air pressure supply port () 1 8 (Rc, NPTF, G) Common pilot pressure supply port () Common release pressure supply port () Common exhaust port (EH) 1 8 (Rc, NPTF, G) Mass asic mass for one station is 0.28 kg. dditional mass per one station is 0.12 kg. (1) When using 3 or more stations with 120 manifold, utilize port as supply port on both sides. (2) When using 3 or more stations with manifold, utilize EH port as exhaust port on both sides. Manifold ir Supply Manifold Left Right Supply port location Port L (Left side) R (Right side) (oth sides) ir supply to port LNK plug attached to port Note) LNK plug is attached on all ports of valve unit. Individual Spacer Part no. 1-R1 Port Function Possible to set the air supply pressure individually Possible to set the pilot valve air supply pressure individually Possible to set the release valve supply pressure individually Possible to set the pilot valve exhaust individually Individual spacer is used when the connecting port of each unit is not common for the manifold connecting port. Mixed specifications of common and individual unit connecting ports for each unit is possible on manifolds with this individual spacer. <Manifold base> <Function plate> <Individual spacer> Z1 Stations Thread type Nil Rc F G Note ) T NPTF R Port location R Right side L Left side oth sides iewed from the front side of valve unit, confirm the port location on the right and/or left side. Symbol 1 2 Note ) The thread ridge shape is compatible with the G thread standard (JIS 0203), but other shapes are not conforming to ISO16030 and ISO1179. Example 1) Z106-R... 1 pc. (Manifold base only) 120S1-K15MZ-EC... 5 pcs. (Unit) 1-M pc. (lank plate) 1-R pc. (Individual spacer) 1 With reference from valve side, the third station from right side Caution when ordering manifold R Piping specifications 1 1 Symbol port port Common port Common Individual rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations If more than one spacer is required, specify all spacers. Example 2) ttached to the first and third stations 1-R1-1 1-R1-3 1-R1-3 The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted. When it is not added, the manifold base and ejector are shipped separately. 1 R1 R16 Refer to bout individual spacer.,, 1 rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations If more than one spacer is required, specify all spacers. Example) ttached to the first and third stations 1-R1-1 1-R1-3 bout individual spacers In the right table, ports with the symbol mean that they are manifold supply, while others are individual supply from the valve unit. Symbols in the right table are printed on the surface of individual spacers. Part no. Z1-R1 R1 -R2 R2 -R3 R3 -R4 R4 -R5 R5 -R6 R6 -R7 R7 -R8 R8 Symbol Part no. Z1-R9 -R10 -R11 -R12 -R13 -R14 -R15 -R16 R9 R10 R11 R12 R13 R14 R15 R16 Symbol <lanking plate> 1 Refer to Example 1). M1 962

27 Large Size acuum Module: System Manifold/System Circuit Example When not using individual spacer When using individual spacer 1 <System circuit example> Sol.a Sol.b Sol.c : ir pressure supply port : Pilot pressure supply port : Release pressure supply port : Pilot pressure exhaust port EH: Common exhaust port : acuum Port EH unit () acuum switch <System circuit example> Sol.a Sol.b Sol.c Individual Spacer 1-R1-1 : ir pressure supply port : Pilot pressure supply port : Release pressure supply port : Pilot pressure exhaust port EH: Common exhaust port : acuum Port EH 2 unit () acuum switch Z Z MJ M EP Sol.c Sol.c Sol.a Sol.b unit acuum switch Sol.a Sol.b EH unit acuum switch 1-R1-1 EH 963

28 J SOL.b J SOL.b SMC RESET PRESSURE SWITCH SET acuum port () acuum port () Common exhaust EH port Common vacuum pressure supply port Common pilot pressure supply port 4 stations manifold: Ordering number example Z104-1pc. (Manifold base) 1 2 1pc. (Port exhaust type) 1 1-EC 1pc. (Single unit) 1 1-K1 M 1 pc. (Single unit) 1 1-K1 M -D1-1pc. (Single unit) 1-R1-4 1pc. (Function plate) 1-R1-4 1pc. (Individual spacer) Common release pressure supply port Pitch ~ = Digital vacuum switch Individual spacer x 5.7 Function plate Mounting hole PRESS. 2.5~7kgf/cm 2 19 dapter PRESS. 2.5~7kgf/cm 2 case (uilt-in silencer) 4 L2 L1 : Release flow rate adjusting needle with lock nut 31 L SET H 9 (Needle fully open) 19 dapter D Individual spacer acuum pressure switch Pressure setting trimmer Manual override Non-locking push type (SOL.c) () (SOL.b) Pilot pressure exhaust port () Release pressure supply port () ~ 109 = Manual override Non-locking push type unit EH case (Common exhaust) Exhaust port Rc1/8 case (Port exhaust) ~ 59 = 600 Pilot pressure supply port () Rc1/8 ir pressure supply port () Release flow rate adjusting needle Release pressure supply port () Rc1/8 ir pressure supply port () 2 x Common release pressure supply port () /2 (Rc, NPTF, G) Common Exhaust Port (EH) 2 x Common pilot supply port () 1/8 (Rc, NPTF, G) Common air pressure supply port () 1 The common exhaust port (EH.) is also used as the pilot pressure exhaust ( port of the pilot valve. Use while the port is open to the atmosphere. 1 Stations Symbol L L (mm)

29 Large Size acuum Module: System Circuit diagram Z Individual spacer 1-R1-4 Function plate 1-R1-4 SOL. SOL.C SOL. EH unit acuum switch Z SOL.C SOL. SOL. Individual spacer 1-R1-2 MJ M EP Rc1/8 acuum port () SMC EH 35.5 (Pitch) 33 (Pitch) : ir pressure supply port : Pilot pressure supply port : Release pressure supply port : Pilot pressure exhaust port EH: Exhaust port : acuum Port 965

30 J PRESS. 2.5~7kgf/cm 2 J PRESS. 2.5~7kgf/cm 2 EH L H SMC PRESSURE SWITCH acuum port () acuum port () Common exhaust EH port Common vacuum pressure supply port Common pilot pressure supply port Common release pressure supply port 4 stations manifold: Ordering number example Z104-1pc. (Manifold base) 1 2 1pc. (Port exhaust type) 1 1-EC 1pc. (Single unit) 1 1-K1 M 1 pc. (Single unit) 1 1-K1 M -D1-1pc. (Single unit) 1-R1-4 1pc. (Function plate) 1-R1-4 1pc. (Individual spacer) 62 Individual spacer Function plate ~ = Digital pressure switch 4 x 5.7 Mounting hole 19 : Release flow rate adjusting needle with lock nut Pitch SOL.b SOL.b RESET SET dapter case (uilt-in silencer) 9 (Needle fully open) L2 L dapter D Individual spacer SET 4 acuum pressure switch Pressure setting trimmer case (Common exhaust) 80.8 Manual override Non-locking push type Pilot pressure supply port () Rc1/8 ir pressure supply port () (SOL.c) () (SOL.b) Pilot pressure exhaust port () Release pressure supply port () Release flow rate adjusting needle ~ = Manual override Non-locking push type unit Exhaust port (Rc1/4) case (Port exhaust) 2 x 1/2(Rc, NPTF, G) *1 Common release pressure Common Exhaust Port (EH) supply port () 2 x Release pressure supply port () Common pilot supply port () Rc1/8 1/8(Rc, NPTF, G) ir pressure supply port () Common air pressure supply port () 59 ~ = The common exhaust port (EH.) is also used as the pilot pressure exhaust () port of the pilot valve. Use while the port is open to the atmosphere. 1 L1 52 L2 71 Stations Symbol (mm)

31 Large Size acuum Module: System Circuit diagram Z Z Individual spacer (1-R1-4) Function plate (1-R1-4) SOL.C EH SOL. SOL. unit acuum switch SOL. SOL.C SOL. Individual spacer (1-R1-2) MJ SMC 12 M EP (Pitch) 33 (Pitch) EH Rc1/8 acuum port () : ir pressure supply port : Pilot pressure supply port : Release pressure supply port : Pilot pressure exhaust port EH: Common exhaust port : acuum Port 967

32 Large Size acuum Module: acuum Pump System alve unit Components acuum switch Caution Pilot valve DC: 1 W Nil (With indicator light: 1.05 W) C Y DC: 0.45 W (With indicator light: 0.5 W) Only 24 DC and 12 DC are applicable to 0.45 W. Suction filter When using C, the DC solenoids are operated via a rectifier. Therefore, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other malfunctions. 968 Note for model selection Take function plates into consideration. (Refer to page 971.) Combination of vacuum valve and release valve Refer to Table (1) in page 969 for details. 100 K1 5 M Z E Solenoid valve rated voltage Nil ir operated 5 24 DC 6 12 DC 6 DC S 5 DC R 3 DC D1 100 C ( Hz) D2 110 C ( Hz) Combination of supply switch valve and release valve Refer to Table (1). Pilot valve Electrical entry Nil ir operated For 24, 12, 6, 5, 3 DC L Lead wire length 0.3 m LN Without lead wire (pplicable to only DC) Plug LO Without connector connector M Lead wire length 0.3 m type MN Without lead wire (pplicable to only DC) MO G H Grommet type Without connector Lead wire length 0.3 m (pplicable to only DC) Lead wire length 0.6 m (pplicable to only DC) 100, 110 C (With rectifier) L Lead wire length 0.3 m Plug LO Without connector connector M Lead wire length 0.3 m type MO Without connector Refer to Table (2) on page 969 for lead wire with connector. How to Order Solenoid valve rated voltage Electrical entry Light/Surge voltage suppressor Nil None With light/surge voltage suppressor Z (Possible only solenoid valve connector type.) S With surge voltage suppressor DC voltage: e much careful about polarity, because it is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. C voltage: S is not available for C. Light/Surge voltage suppressor Manual override Combination of vacuum switch/ valve acuum switch electrical entry Symbol 25 (L) 26 (L) 65 (L) 27 (L) 26 (L) 67 (L) Manual override Nil Non-locking push type Locking slotted type Release flow rate adjusting needle Unit specifications (pplicable to Series ZSE4) L Release flow rate adjusting needle Nil Without lock nut L With lock nut Unit specifications Nil With unit switching function (1) M SI unit only (2) Note 1) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, 1999). Note 2) Fixed unit: kpa Digital vacuum switch specifications (D1, D2, D3) Output specifications NPN output nalog output PNP output NPN output nalog output PNP output Lead wire length Lead wire length 0.6 (3.0) m Lead wire length 0.6 (3.0) m Lead wire length 0.6 (3.0) m Lead wire length 0.6 (3.0) m Lead wire length 0.6 (3.0) m Lead wire length 0.6 (3.0) m acuum switch electrical entry (E) Nil Grommet Lead wire length 0.6 m L type Lead wire length 3.0 m C Lead wire length 0.6 m Connector CL Lead wire length 3.0 m type CN Without lead wire Refer to Table (3) on page 969 regarding lead wire with connector part no. Combination of vacuum switch/ Specifications D1 D2 D3 E E55 F Digital vacuum switch (ZSE4) + Filter vacuum switch (ZSE2) + Filter LCD display LCD display with backlight LED display NPN output PNP output Filter Select the digital vacuum switch output specification in accordance with the digital vacuum switch specifications (D1, D2 and D3). The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the built-in filter is likely to be clogged soon. The use with the ZF, ZF and ZFC series is recommended. pplicable switch D1 D2 D3

33 Large Size acuum Module: acuum Pump System Z Table (1) alve Unit/Combination of acuum Switch alve and Release alve Operation stop Table (2) How to Order alve Plug Connector ssembly DC alve unit function acuum adsorption 100 C (with rectifier) 110 C (with rectifier) acuum release alve unit components Supply valve Double SOL. (J ) N.C. (J3133) J10 J10 J10 Release valve N.C. (J3133) N.C. (J3133) Nil Symbol K1 K Double SOL. (J ) Lead wire length 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm Solenoid valve Double SOL. (J ) N.C (J3133) ZS ir operated (J3130) 10 Double SOL. (J ) ir operated ir operated K3 (J3130) (J3130) N.C. C1 (J3133) ir operated C2 (J3130) N.O. C3 (J3133) Double SOL. C4 (J ) Nil Without valve module 5 Solenoid valve Double SOL. (J ) Common with supply valve Nil N.C (J3133) Common with supply valve Common with supply valve Lead wire length 0.6 m 3 m 5 m ir operated (J3130) Table (3) acuum Switch/Lead Wire with Connector How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire with connector and the 5 m lead wire connector separately. Example) CN... 1 pc. ZS pc. Common with supply valve Z MJ M EP How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) 100-K15M Z-EC... 1 pc. J pcs. 969

34 acuum Pump System / Combination of supply valve and release valve Combination Symbol : K1 Feature : Double solenoid vacuum valve allows for self-holding. Pilot pressure supply port () Pilot pressure exhaust port () Release pressure supply port () SOL.c SOL.b Combination Symbol : C1 Feature: dsorption of workpieces (when energized) and release of vacuum (when de-energized) are switched by single solenoid valve. acuum pressure supply port () How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop Note SOL.b OFF ON ON SOL.c OFF ON OFF ON OFF OFF Combination Symbol : K2 Feature: Single solenoid valve is provided for vacuum valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop SOL.c Note SOL.c When power supply is ON OFF stopped, all operations OFF ON will be stopped. OFF OFF Combination Symbol : K3 Feature: Operation can be controlled by an external pilot valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop Pilot air Pilot air ir operated a ir operated b ir operated a ir operated b ON OFF OFF ON OFF OFF acuum port () When power supply is cut off while the supply valve is ON, the operational state is held. Note The product is used under the environment in which solenoid valves cannot be used or when the centralized control is applied using external pilot air. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release / ON OFF Combination Symbol : C2 Feature: dsorption of workpieces and release of vacuum are switched by an external pilot valve. How to Operate Pilot air Combination Symbol : C3 How to Operate Pilot valve / Note operation Operation ir operated a e careful for blowing off of workpieces or 1. dsorption 2. acuum release ON OFF displacement of adsorption position in case of small and/or lightweight workpieces. ir operated a Note e careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Feature: dsorption of workpieces (when de-energized) and release of vacuum (when energized) are switched by the single solenoid Pilot valve / operation Note Operation e careful for blowing off of workpieces or 1. dsorption 2. acuum release OFF ON displacement of adsorption position in case of small and/or lightweight workpieces. Combination Symbol : C4 Feature: dsorption of workpieces and release of vacuum are switched by double solenoid valve. SOL.b Caution When pipe connection is made to two port connections ( port, port) only, use a function plate (1-R3). Refer to page 971 for further information. How to Operate Pilot valve / operation Note Operation 1. dsorption 2. acuum release ON OFF SOL.b OFF ON When power supply is stopped vacuum valve/vacuum release valve will hold the operation. 970

35 Large Size acuum Module: acuum Pump System Function Plate : 1-R3 function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to,, and ports respectively. Without Function Plate (Standard) pplicable system: system External vacuum supply system With Function Plate/pplicable to acuum Pump System Only When 1-R3 (/ ) is Selected How to Order Function Plate Unit (For Pump System) 1 R 3 Release pressure supply port Pilot pressure supply port Since compressed air is necessary to operate pilot valve in vacuum pump system, supply air to port (or port). Release pressure supply port Pilot pressure supply port (w/plug) Pilot pressure exhaust port (open) acuum pressure supply port Pilot pressure exhaust port (open) acuum pressure supply port Pipe connection Pipe connection Pilot pressure supply port () Pilot pressure exhaust port () Release pressure supply port () Example of circuit diagram SOL.c SOL.b acuum pressure supply port () Example of circuit diagram SOL.c SOL.b acuum switch 1-R3 acuum switch acuum port () Z Z MJ M EP Piping specifications Symbol Symbol port / port 3 / Individual Common How to order Indicate the model numbers of the vacuum module and the function plate. Example) 100-K15MZ-E 1 1-R3 1 Caution Length of assembling screw varies when adding function plate. Order from the mounting thread parts list for unit combination on page 983. Order a plug (M-5P) separately in order to plug the and ports that are no longer used due to the addition of function plate. 971

36 alve Unit : 1- Specifications alve unit part no. Components Operating method Combination of supply valve and release valve port supply pressure port supply pressure port supply pressure Main valve effective area (mm 2 ) Main valve effective area (Cv) Maximum operating frequency Operating temperature range Standard accessory - racket 1- Pilot operated Pilot operated Refer to the combination of supply valve and release valve below. 0.1 to 0.6 MPa 0.05 to 0.6 MPa 0.25 to 0.6 MPa Hz 5 to 50 C Solenoid alve/specifications Solenoid Rated voltage Electrical entry 24, 12, 6, 5, 3 DC, 100, 110 C ( Hz) 100, 110 C-L/M plug connector (With rectifier) 3, 5, 6, 12, 24 DC-L/M plug connector, Grommet vailable, Not available (at grommet) Non-locking push type, Locking slotted type Light/Surge voltage suppressor Manual operation pplicable to plug connector; connector assembly with rectifier is attached. Combination of Supply alve and Release alve Combination symbol acuum switch valve Mass (kg) K1 Double SOL. (J ) N.C. (J3133) K2 K3 N.C. (J3133) ir operated J3130 N.C. (J3133) ir operated J C1 C2 C3 C4 N.C. (J3133) ir operated J3130 N.C. (J3133) Double SOL. (J ) Weight includes racket. (Solenoid valve: 24 DC, M plug connector type) How to Order Refer to page 968 for further part no. information. 1 K1 5 M Z L Combination of vacuum valve and release valve Pilot valve Solenoid valve rated voltage With light/surge voltage suppressor Electrical entry Manual override Release flow rate adjusting needle acuum Pressure Switch : ZSE Refer to page 952 for further specifications. Specifications Model Display Pressure setting range Maximum operating pressure Hyster Hysteresis mode esis Window comparator mode Temperature characteristics Operating voltage Current consumption Operating temperature range ZSE ZSE ZSE4E LCD LCD with backlight LED 101 to 0 kpa 101 to 10 kpa 200 KPa ariable (3 digits or more) ariable (can be set from 0) Fixed (3 digits) 25 m or less 45 m or less 0 to 50 C (No condensation) 26, 27: 50 m or less 67: 60 m or less 972

37 Large Size acuum Module: acuum Pump System acuum Pressure Switch : ZSE2-0R- Refer to page 949 for further specifications. Refer to page 953 for further specifications. Suction Filter : 1-F Specifications acuum pressure switch part no. Fluid Setting pressure range Hysteresis Temperature characteristics (25 C standard) Operating voltage Output Indicator light Current consumption Proof pressure (Max. operating pressure) Operating temperature range acuum Switch/Suction Filter Unit : 1-F - Specifications Specifications Unit no. Operating pressure range Operating temperature range Filtration efficiency Filter media acuum switch Standard option ZSE2-0R-15 ir 0 to 101 kpa NPN Open collector 30, 80 m PNP Open collector 80 m Lights up when ON 17 m or less (when 24 DC is ON) 0.5 MPa 1-F acuum to 0.5 MPa ZSE2-0R-55 When using the ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) Operation outside of the maximum operating pressure and operating temperature range may cause a serious accident or damage. Suction filter 1-F - acuum to 0.5 MPa F Refer to pages 949 and 952 regarding vacuum switch. racket Note) Operation outside of the operating pressure and operating temperature range may cause a serious accident or damage. Filter case Caution The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. Do not expose it to direct sunlight. Model Operating pressure range Operating temperature range Filtration efficiency Filter media Mass (with bracket) F 0.1 kg Note) Operation outside of the operating pressure and operating temperature range may cause a serious accident or damage. Z Z MJ M EP Refer to page 955 for further specifications. Filter case Caution The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. Do not expose it to direct sunlight. 973

38 Construction Components Parts No. Replacement Parts No. (1) Description Pilot valve assembly alve body assembly Filter element acuum switch Material F Note 1-FC-PC (ssembly part no.:1-fc-pc-s) Refer to How to Order below. Supply:1-J Release:1-J3133- Refer to How to Order below. Supply:1-J Release:1-J Part No. Refer to Table (1) Refer to Table (2) 1-FZ (30 μm) ZSE2-OR-15- ZSE F - -D How to Order Solenoid alves/ir Operated alves ir operated 1 Solenoid valve 1 1 Description Material Manifold base luminum Release flow rate adjusting needle Stainless steel Function plate PT Individual spacer PT Filter case Filter switch unit for replacement J3130 J3233 J3133 Pilot valve Solenoid valve rated voltage Polycarbonate Electrical entry 5 M Z Refer to Note 2) Refer to page 978. Refer to page 978. Note 1) Precautions on handling the filter case 1. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Note 2) Turning the release flow rate adjusting needle 4 full turns from the fully closed position renders the needle valve fully open. Do not turn more than four times since turning excessively may cause the needle fall off. In order to prevent the needle from loosening and falling out, a special product (-140) is available Manual override With light/surge voltage suppressor Table (1) How to Order Pilot alves Symbol K1 C4 K3 Components Double solenoid Single solenoid valve N.C. valve N.C. (J3233) (J3133) Double solenoid valve N.O. (J3233) ir operated N.C (J3130) Double solenoid valve N.O. (J3233) ir operated N.O (J3130) Model 1-J3130 Table (2) How to Order alve ody ssembly 1 D K1 5 M Z L Combination of supply valve and release valve Pilot valve Solenoid valve rated voltage Electrical entry With light/surge voltage suppressor Refer to page 968 for further symbol specifications. Table (3) acuum Switch + Suction Filter Unit 1 F D Unit specifications acuum switch specifications Combination of vacuum switch and suction filter Refer to page 953 for further symbol specifications. Manual override Release flow rate adjusting needle Nil Without lock nut L With lock nut Refer to page 968 for further symbol specifications. Note) Pilot valve gasket is included. (1-G-1) 974

39 J SMC PRESSURE SWITCH RESET SET Complete Unit Type K1 acuum valve: Double SOL. : Single SOL. (N.C.) Release pressure supply port () SOL.b 100-K1 M -E acuum pressure supply port () Manual override Release pressure supply port () Pilot pressure supply por () Release pressure supply port Pilot pressure supply port Pilot pressure exhaust port (open) acuum pressure supply port : Release flow rate adjusting needle with lock nut 9 (Needle fully open) 100-K1 M -D - Interface Interface Pilot pressure exhaust () Release flow adjusting needle Rc 1/8 acuum pressure supply port () acuum port 300 Light <Components> alve + acuum Switch + Filter Unit Pilot pressure supply port () Pilot pressure exhaust port () PRESS. 2.5~7kgf/cm 2 SOL.b Circuit diagram Indicator lilght (Red) acuum pressure setting trimmer alve unit Manual override dapter G Large Size acuum Module: acuum Pump System SOL.c x Slotted holes (Mounting holes) acuum switch Spacer acuum port () Thickness 1.2 Spacer is used to leave space for 2 x 4.6 maintenance (for replacement of filter (Mounting hole) element etc.) on side mounting. Filter block 2 x 4.2 (Mounting hole) 4 racket acuum switch 2 2 Spacer racket Rc 1/8 acuum port () Z Z MJ M EP Digital pressure switch (76 for D2, D3 types) 85 SMC Note) 1 Dimensions for mounting bracket 2 Dimensions for mounting spacer racket part no.: P (Standard accessory) Spacer part no. : P

40 acuum port acuum Pump System Release pressure supply port Pilot pressure Pilot pressure supply port exhaust port (open) acuum pressure supply port alve Unit Type K1 1-K1 M Type K2 1-K2 M Circuit diagram Pilot pressure supply port () Pilot pressure exhaust port () Release pressure supply port () SOL.c SOL.b ir pressure supply port () Supply acuum port () dapter Manual override 2 x 4.6 (Mounting hole) Rc 1/8 acuum port () Circuit diagram SOL.c valve Manual override Interface Interface Release flow adjusting needle Light alve unit dapter C 2 x 3.4 (Mounting hole) Spacer Rc 1/8 acuum pressure supply port () Release pressure supply port () Pilot pressure supply port () Pilot pressure exhaust port () 2 racket racket 1.2 Type K3 1-K3 M Circuit diagram Pilot air Pilot air : Release flow rate adjusting needle with lock nut 9 (Needle fully open) Note) 1 Dimensions for mounting bracket 2 Dimensions for mounting spacer Spacer is used to leave space for maintenance (for replacement of solenoid valve etc.) on side mounting of used on surface mounting. racket part no.: P (Standard accessory) Spacer part no. : P ir operated a ir operated b Manual override Dimensions not indicated are identical to type K2. 976

41 acuum Pump System Release pressure supply port Pilot pressure Pilot pressure supply port exhaust port (open) acuum pressure supply port acuum port alve Unit Large Size acuum Module: acuum Pump System Type C1 1-C1 Circuit diagram Pilot pressure supply port () Pilot pressure exhaust port () dapter Manual override Type C3 1-C3 Circuit diagram Z Z Release pressure supply port () ir pressure supply port () Supply acuum port () 2 x 4.6 (Mounting hole) valve Manual override lanking plate Release pressure supply port () Pilot pressure supply port () racket Interface C Interface D Rc 1/8 acuum pressure supply port () 300 Pilot pressure exhaust port () Release flow adjusting needle racket Light alve unit dapter C 2 x 3.4 (Mounting hole) 1.2 Spacer Rc 1/8 acuum port () Type C2 1-C2 Circuit diagram Pilot air : Release flow rate adjusting needle with lock nut ir operated a 9 (Needle fully open) Note) 1 Dimensions for mounting bracket 2 Dimensions for mounting spacer Spacer is used to leave space for maintenance (for replacement of solenoid valve etc.) on side mounting of used on surface mounting. racket part no.: P (Standard accessory) Spacer part no. : P Type C4 1-C4 Circuit diagram SOL.b MJ M EP Manual override Pilot valve Dimensions not indicated are identical to drawings above. 977

42 Manifold Specifications/acuum Pump System Specifications Max. number of units Port Common vacuum pressure supply port () Common pilot pressure supply port () Common release pressure supply port () Common exhaust port (EH) Mass 6 stations Port size 1 8 (Rc, NPTF, G) 1 2 (Rc, NPTF, G) asic mass for one station is kg. dditional mass per one station is 0.12 kg. Note) When using 3 or more stations with 100 manifold, utilize port as suction on both sides. How to Order Manifold Manifold acuum/ir Supply Manifold Port Supply port location L (Left side) R (Right side) (oth sides) acuum supply to port. ir supply to port. LNK plug attached to port. Note) LNK plug is attached on all ports of valve unit. Individual Spacer Part no. 1-R1 Port Left Right Function Possible to set the external vacuum pressure individually Possible to set the pilot valve air supply pressure individually Possible to set the release valve supply pressure individually Possible to set the pilot valve exhaust individually Individual spacer is used when the connecting port of each unit is not common for the manifold connecting port. Mixed specifications of common and individual unit connecting ports for each unit is possible on manifolds with this individual spacer. <Manifold base> <Function plate> <Individual spacer> Z R3 1 Stations Nil F T 6 Thread type Rc G Note) NPTF Port location R L Note ) The thread ridge shape is compatible with the G thread standard (JIS 0203), but other shapes are not conforming to ISO16030 and ISO1179. Example 1) Z106-R... 1 pc. (Manifold base only) 100-K15MZ-EC... 5 pcs. (Unit) 1-M pc. (lank plate) 1-R pc. (Individual spacer) 978 Right side Left side oth sides iewed from the front side of valve unit, confirm the port location on the right and/or left side. With reference from valve side, the third station from right side Caution when ordering manifold The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted. When it is not added, the manifold base and ejector are shipped separately. rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations If more than one spacer is required, specify all spacers. Example 2) ttached to the first and third stations 1-R3-1 1-R3-3 1-R3-2 Fill the number Part no. Z1-R1 R1 -R2 R2 -R3 R3 -R4 R4 -R5 R5 -R6 R6 -R7 R7 -R8 R8 1 Refer to (bout individual spacer.) 1 R1 R16 M1 Part no. Z1-R9 R9 -R10 R10 -R11 R11 -R12 R12 -R13 R13 -R14 R14 -R15 R15 -R16 R16 1 rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations If more than one spacer is required, specify all spacers. Example 3) ttached to the first and third stations 1-R1-1 <lanking plate> 1-R1-3 Refer to Example 1). bout individual spacers Manifold supply or valve unit supply can be selectable for each port. In the right table, ports with the symbol mean that they are manifold supply, while others are individual supply from the valve unit. Symbols in the right table are printed on the surface of individual spacers. Symbol Symbol

43 Large Size acuum Module: acuum Pump System Manifold/System Circuit Example When not using individual spacer When using individual spacer <System circuit example> Sol.a Sol.a Sol.c Sol.b Sol.c Sol.b : acuum pressure supply port : Pilot pressure supply port : Release pressure supply port : Pilot pressure exhaust port EH: Common exhaust port : acuum Port EH acuum switch acuum switch Individual Spacer R1 <System circuit example> Sol.a Sol.a Sol.c Sol.b Sol.c Sol.b Individual spacer 1-R1-1 acuum module 1 acuum module 2 : acuum pressure supply port : Pilot pressure supply port : Release pressure supply port : Pilot pressure exhaust port EH: Common exhaust port : acuum Port EH acuum switch acuum switch Z Z EH EH MJ M EP 979

44 J J L H SMC PRESSURE SWITCH RESET SET acuum Pump System acuum port acuum port Manifold Common exhaust EH port Common vacuum pressure supply port Common pilot pressure supply port Common release pressure supply port Individual spacer Function plate 5 3 Digital pressure switch 4 x 5.7 Mounting hole 19 : Release flow rate adjusting needle with lock nut 9 (Needle fully open) L2 L1 Pitch dapter D PRESS. 2.5~7kgf/cm 2 SOL.b PRESS. 2.5~7kgf/cm 2 SOL.b dapter Individual spacer SET 4 acuum pressure switch Pressure setting trimmer Pilot valve for release (SOL.c) Pilot valve for supply () Pilot valve for supply (SOL.b) Pilot pressure exhaust port () Release pressure supply port () EH Manual override Non-locking push type Manual override Non-locking push type Pilot pressure supply port () Rc 1/8 acuum pressure supply port () Release flow rate adjusting needle 2 x Common release pressure supply port () Release pressure supply port () Rc 1/8 acuum pressure supply port () /2 (Rc, NPTF, G) Common vacuum Port (EH) 2 x Common pilot supply port () 1/8 (Rc, NPTF, G) Common vacuum pressure supply port () 1 The common exhaust port (EH.) is also used as the pilot pressure exhaust () port of the pilot valve. Use while the port is open to the atmosphere. 1 Symbol Stations L L (mm)

45 Large Size acuum Module: acuum Pump System Circuit diagram Individual spacer (1-R1-4) EH Function plate (1-R3-4) SOL.C Z Z SOL. SOL. acuum switch valve acuum switch SOL. SOL.C SOL. acuum switch valve Individual spacer 1-R1-2 Rc 1/8 acuum port Individual spacer 1-R1-1 MJ M EP SMC EH (Pitch 33) (Pitch 33) 35.5 : acuum pressure supply port : Common pilot pressure supply port : Common release pressure supply port : Pilot valve exhaust port EH : Common exhaust port : acuum Port 981

46 System Mounting Thread Parts List for Unit Combination Manifold Specifications Components Without Manifold alve unit + unit + acuum switch/filter unit Components Components Components 982 alve unit + unit unit + acuum switch / Filter unit unit Mounting Thread Parts List for Unit Combination No. Combination specifications Mounting thread Quantity M2.5 x 0.45 x 33 6 M2.5 x 0.45 x M2.5 x 0.45 x 38 6 M2.5 x 0.45 x Notte) Standard (without options) With individual spacer With function plate With individual spacer + with function plate Individual, common and port exhaust style for nozzle size 10, 13 Common and port exhaust style for nozzle size 15 Individual exhaust style for nozzle size 15 Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 [For ZSE4 spec.] Caution Precautions M2 x 0.4 x 13 2 M2 x 0.4 x 23 2 M2 x 0.4 x 48 2 M2 x 0.4 x 53 2 M2.5 x 0.45 x 41 2 M2.5 x 0.45 x 17 2 M2.5 x 0.45 x 21 2 M2.5 x 0.45 x 66 4 M2.5 x 0.45 x 70 4 M2.5 x 0.45 x 82 4 For nozzle size 18, 20 [For ZSE4 spec.] M2.5 x 0.45 x 86 4 For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate M2.5 x 0.45 x 35 M2.5 x 0.45 x 39 M2.5 x 0.45 x 5 M2.5 x 0.45 x 8 M3 x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x For nozzle size 10, 13, 15 [For ZSE4 spec.] For nozzle size 18, 20 [For ZSE4 spec.] For nozzle size 10, 13, 15 + with function plate [For ZSE4 spec.] [For ZSE4 spec.] For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate When the ejector is compatible with silencer exhaust or port exhaust When the ejector is compatible with common exhaust M3 x 0.35 x 84 4 M3 x 0.35 x 88 4 M3 x 0.35 x 89 4 M3 x 0.35 x 93 4 M3 x 0.35 x 37 6 M3 x 0.35 x 41 6 M3 x 0.35 x 42 6 M3 x 0.35 x 46 6 M12 x 12 Unnecessary Note) Screw M12 x 12 screws (Hexagon socket head set screws) in until the head aligns with the manifold base surface. The manifold base not assembled with the unit does not include M12 x 12 screws (Hexagon socket head set screws). Please order them separately. e sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for acuum Precautions. Refer to the acuum Model Selection on page 825 for precautions on matching with vacuum circuit. 1

47 Large Size acuum Module: acuum Pump System acuum Pump System Mounting Thread Parts List for Unit Combination Manifold Specifications Components Without Manifold alve unit + acuum switch / Filter unit Z Z Components Components alve unit acuum switch / Filter unit Mounting Thread Parts List for Unit Combination No. Combination specifications Mounting thread Quantity Standard (Without options) M2.5 x 0.45 x With individual spacer M2.5 x 0.45 x 37 6 With function plate M2.5 x 0.45 x 38 6 With individual spacer + with function plate M2.5 x 0.45 x For vacuum switch and adapter M2.5 x 0.45 x Standard (Without options) Standard (Without options) M2.5 x 0.45 x 5 M2.5 x 0.45 x With individual spacer Standard (Without options) [For ZSE4 spec.] M2.5 x 0.45 x 8 M2.5 x 0.45 x Standard (Without options) M2.5 x 0.45 x Standard (Without options) M2.5 x 0.45 x 33 2 With function plate M2.5 x 0.45 x 38 2 Standard (Without options) M3 x 0.35 x With function plate M3 x 0.35 x 59 4 Standard (Without options) [For ZSE4 spec.] M3 x 0.35 x 70 4 With function plate [For ZSE4 spec.] M3 x 0.35 x Standard (Without options) M3 x 0.35 x 19 6 With function plate M3 x 0.35 x 24 6 Standard M12 x Note) Note) Screw M12 x 12 screws (Hexagon socket head set screws) in until the head aligns with the manifold base surface. The manifold base not assembled with the unit does not include M12 x 12 screws (Hexagon socket head set screws). Please order them separately. MJ M EP 983