Using the WaferSense Auto Gapping Sensor (AGS) On Novellus Vector

Transcription

1 Using the WaferSense Auto Gapping Sensor (AGS) On Novellus Vector Field Applications Engineering (503) ex: 4 CSsupport@CyberOptics.Com innovating measurement technology

2 Novellus Vector Tool Critical Measurements Gas Gases Shower Head Shower head Pedestal Parallel Pedestal Gap 2

3 Why Precision Gapping is Critical on Vector 1. The gap between the wafer and the showerhead plays a critical role in film deposition uniformity 2. Newer Dielectrics require tighter tolerances that are typically not reliably achieved with the legacy puck method 3. Depending on the application, non-uniform depositions can lead to reduced yields 4. An incorrect setup of gapping can cause severe damage or process problems 3

4 Legacy Vector Puck Hot Gapping Method Gases Shower head (raised) 1. Chamber cooled, vented, & opened 2. Pucks placed on hot-plate inside of chamber 3. Chamber closed, evacuated and heated to 400c 4. Showerhead adjusted such that it is positioned on all pucks 5. (Optional) Chamber cooled 6. Chamber vented and pucks removed 7. Tool restored to production capability and target wafers processed to test deposition uniformity Gap 8. If target wafers do not meet deposition uniformity standards then steps 1-7 repeated 4 Pucks Pedestal Shower head (lowered on Pucks) Parallel Parallel Pedestal

5 Limitations, Issues and/or Problems Associated With the Current Legacy AMAT Producer Heater/Suspector Gapping Event/Task Tool must be brought off-line even for minor checks Tool cooling (optional) Tool venting required Tool dismantling and opening required Multiple techs typically required Adverse Result Time and productivity lost regardless of reason for check Time and productivity lost, risk of particle generation Excessive time, increased maintenance overhead, impossible to do quick gap checks Time-consuming, contamination risk Staff time, productivity and efficiency lost, increased expense 5

6 Legacy Producer Gapping Method Limitations, Issues and/or Problems (Continued) Event/Task Chamber opened and hot gapping with pucks performed Reassemble tool 6 Adverse Result Extremely time consuming, chamber must be opened, pucks positioned, chamber lowered, vacuumed pulled, chamber heated to 400c, gaps set, chamber cooled, etc, etc, etc Hot gapping dangerous Repetitive trial-and-error multiple iteration process Requires more service techs and more time per tech No data logging to track trends and/or performance Potentially not precise enough for newer Dielectrics Tool is off-line thus less productive, MORE COSTLY, reduced tool ROI Time consuming and particle contamination risks associated with bring chamber back on-line with vacuum

7 Solution: WaferSense Automatic Gapping System (AGS) Intuitive software Wafer-like, wireless hardware 7

8 The AGS is Recommended and Fully Supported by Novellus as the Vector Gapping BKM Replaces the Legacy Puck Method 8

9 Benefits of Using AGS Instead of Legacy Vector Puck Method Event/Task Minor quality checks Hot Gapping Gapping under vacuum Multiple techs typically required AGS Benefit Over Old Method Place AGS in carrier ring for quick checks under vacuum Not required, checks possible with AGS at ambient temperature AGS is vacuum compatible and can be moved between platens Only 1 service tech typically required with AGS 9

10 Event/Task Gapping with AGS Benefits of Using AGS Instead of Legacy Vector Puck Method AGS Benefit Over Old Method Gapping time reduced for 10 hours to 4 or less (60% reduction) Safe since HOT gapping no longer required No more trial-and-error just send AGS in chamber adjust gap in real-time, under vacuum and in a fraction of the time Requires fewer technicians and less time Data logging to track trends and/or performance AGS accuracy has the precision necessary for newer Dielectrics With AGS improved tool availability, excellent repeatability, greater tool productivity and reduced Cost of Ownership 10

11 AGS Support on Vector a Cooperative Effort 1. AGS officially recommended by Novellus with comprehensive step-by-step procedure developed and distributed to the field by Novellus AGS used by Novellus FS AGS training available though Novellus Field Service Joint marketing support and press releases 11

12 AGS Novellus Vector Press Release April 17, 2008 For full article: 12

13 Using WaferSense AGS to Gap Novellus Vectors Refer to Novellus Procedure Change Order (PCO) VCTRP1707 for complete 17 Page step-by by-step procedure developed by Novellus Vector Engineering 13

14 What is Required for Gapping on a Novellus Vector? AGS15 Field Calibration Fixture AGS300 Note: A Field Calibration must be performed every single time Vector gapping will be performed in order to assure proper gap AGS300E1 Std Carrier Ring and/or AGS300E2 Ext Carrier Ring Refer to Novellus PCO CVTRP1707 for details 14

15 AGS Results as Reported by Novellus Engineering 15 Improves uniformity of newer dielectric With the current Puck gapping method the maintenance required to ensure showerhead-to-platen parallelism is a time-consuming and requires each showerhead to be adjusted and verified multiple times The old puck method typically takes 10 hours but by using AGS maintenance times is typically reduced to 4 hours (60% reduction) Improves showerhead-to-platen gap reliability The overall result of using AGS is improved tool availability, excellent repeatability, greater tool productivity and reduced Cost of Ownership

16 16 Customer AGS Vector Use-Case Testimonial As Reported by an Actual Novellus Vector Team After a Comprehensive AGS Evaluation in March/April ) We are extremely happy with the AGS and we plan to raise a cap-ex for 3 x AGS, 2 x calibration kit and probably 3 x Novellus Vector rings. 3.) Three AGS s would be the minimum needs and may also order a 4 th later this year 4.) We estimate that we can save at least 3500 man hours per year by purchasing the AGS and possibly double that, 3500 is only a rough conservative estimate. 5.) AGS savings equates to one less MT (Manufacturing Technician) per shift, currently we have 8 10 MT s per shift. 6.) When we combine AGS time savings with the increased tool availability and we are able to prove that AGS is a very cost effective purchase. 7.) AGS will become a POR (Process of Record)/ BKM (Best Known Method) way of maintaining the Novellus Vectors.

17 Proven WaferSense AGS Vector Benefits Summary Gapping on Vector QUICK and EASY Gapping with AGS is SAFE! Established Vector AGS procedure No need for time consuming trial and error HOT gapping Improves uniformity of newer dielectric Reduces Vector maintenance time by 60% Increases tool availability, repeatability, and productivity Reduced cost of ownership In most cases Novellus Vector owners report reducing gapping maintenance time from 10 hours to just 4 hours 17

18 WaferSense Sales & Support Resources Visit the web at: Technical Support: (503) ex: 4 WaferSense Sales: (503) ex: 1 Tool Free: (800) technically related questions to: CSSupport@CyberOptics.Com WaferSense sales related questions to: CSSales@CyberOptics.Com 18