A ustin. Cryopump Equipment. Scientific. Guide 2004

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1 Cryopump Equipment Guide 2004 A ustin Scientific

Austin Scientific Cryopumps Cryo-Plex 8 Pumping Speed Air 1500 l/s Water 4000 l/s Hydrogen 2500 l/s Argon 1200 l/s Throughput Argon 700 scc/min. Capacity Argon 1000 std. liters Hydrogen 18 std.

2 Austin Scientific Cryopumps Cryo-Plex 8 Pumping Speed Air 1500 l/s Water 4000 l/s Hydrogen 2500 l/s Argon 1200 l/s Throughput Argon 700 scc/min. Capacity Argon 1000 std. liters Hydrogen 18 std. liters (at 5 x 10-6 torr) Crossover 150 torr liters Cooldown Time 1.5 hours Inlet Flange 6 inch ANSI (11.0 inch O.D.) ISO NW inch CF Dimensions Height 20.7 inches Weight 45 pounds Cryo-Plex 8LP Pumping Speed Air 1500 l/s Water 4000 l/s Hydrogen 2200 l/s Argon 1200 l/s Throughput Argon 700 scc/min. Capacity Argon 1000 std. liters Hydrogen 12 std. liters (at 5 x 10-6 torr) Crossover 150 torr liters Cooldown Time 1.5 hours Inlet Flange 6 inch ANSI (11.0 inch O.D.) ISO NW inch CF Dimensions Height 7.03 inches Length 22.6 inches Weight 42 pounds Cryo-Plex 10 Pumping Speed Air 3000 l/s Water 9000 l/s Hydrogen 5000 l/s Argon 2500 l/s Throughput Argon 1500 scc/min. Capacity Argon 2000 std. liters Hydrogen 24 std. liters (at 5 x 10-6 torr) Crossover 300 torr liters Cooldown Time 1.0 hours Inlet Flange 10 inch ANSI (16.0 inch O.D.) ISO NW inch CF Dimensions Height 23.9 inches Weight 85 pounds 2

Austin Scientific Cryopumps Cryo-Plex 16 Pumping Speed Air 5000 l/s Water 16000 l/s Hydrogen 5000 l/s Argon 4200 l/s Throughput

liters (at 5 x 10-6 torr) Crossover 300 torr liters Cooldown Time 2.5 hours Inlet Flange 16 inch CVC (17.7 inch O.D.

3 Austin Scientific Cryopumps Cryo-Plex 16 Pumping Speed Air 5000 l/s Water l/s Hydrogen 5000 l/s Argon 4200 l/s Throughput Argon 500 scc/min. Capacity Argon 2500 std. liters Hydrogen 15 std. liters (at 5 x 10-6 torr) Crossover 300 torr liters Cooldown Time 2.5 hours Inlet Flange 16 inch CVC (17.7 inch O.D.) ISO NW inch CF Dimensions Height 24.0 inches Weight 160 pounds Custom Applications Call to inquire about your custom cryogenic applications. We have created a broad range of innovative and custom designs. 3

Cryo Coolers Model 350 CS Cold Head Performance (Refrigeration Capacity) * Weight Typical cool-down time to 20 K with no load 20 watts at 77 K; 5 watts at 20 K 22 lb. (10 kg.) 50 min. (60 Hz), 65 min.

4 Cryo Coolers Model 350 CS Cold Head Performance (Refrigeration Capacity) * Weight Typical cool-down time to 20 K with no load 20 watts at 77 K; 5 watts at 20 K 22 lb. (10 kg.) 50 min. (60 Hz), 65 min. (50 Hz). Each pound (.45 kg) mass at cold end increases cool-down time 25 min. Model 1020 CS Cold Head Performance (Refrigeration Capacity) * Weight Typical cool-down time to 20 K with no load 35 watts at 77 K; 12 watts at 20 K 30 lb. (13.5 kg.) 50 min. (60 Hz), 65 min. (50 Hz). Each pound (.45 kg) mass at cold end increases cool-down time 25 min. Model 1050 CS Cold Head Performance (Refrigeration Capacity) * Weight Typical cool-down time to 20 K with no load 65 watts at 77 K; 7 watts at 20 K 30 lb. (13.5 kg.) 40 min. (60 Hz), 50 min. (50 Hz). Each pound (.45 kg) mass at cold end increases cool-down time 25 min. *Loads applied simultaneously, with radiation shields in place. 4

P/N ASC P/N ASC Cryo-Plex 8 G 15KCA-CP8 15KCA-CP8 ASC Cryo-Plex 10 H 15KCA-CP10 15KCA-CP10 ASC Cryo-Plex 16 J 15KCAA-400 15KCAA-400 ASC Cryo-Plex 8LP I 15KCA-CP8LP 15KCA-CP8LP CTI

5 Cryopump Cryo-Absorbing Arrays A B C D E G H I J Mfgr. Pump Fig. Mfgr. P/N ASC P/N ASC Cryo-Plex 8 G 15KCA-CP8 15KCA-CP8 ASC Cryo-Plex 10 H 15KCA-CP10 15KCA-CP10 ASC Cryo-Plex 16 J 15KCAA KCAA-400 ASC Cryo-Plex 8LP I 15KCA-CP8LP 15KCA-CP8LP CTI Cryotorr - 8* A K010 15KCA-8 CTI Cryotorr - 10* B K010 15KCA-10 CTI Cryotorr - 100* E K003 15KCA-100 CTI Cryotorr - 8F* C K010 15KCA-8F CTI Cryotorr * J K003 15KCA-400 CTI On-Board - 8* A K008 15KCA-8 CTI On-Board - 10* B K003 15KCA-10 CTI On-Board - 400* J K004 15KCA-400 Note: All array kits include gasket set, fasteners, tool, gloves, o-ring and instructions. Contact Austin Scientific for pricing on models not listed. 5

M600 Helium Compressor M600 Features High and low voltage units available for use at both 50 Hz and 60 Hz Water flow meter provides user feed back to ensure adequate water supply Adsorber can be

6 M600 Helium Compressor M600 Features High and low voltage units available for use at both 50 Hz and 60 Hz Water flow meter provides user feed back to ensure adequate water supply Adsorber can be replaced from the front of the unit, permitting convenient rack or cabinet installation Both high and low side pressure gauges Compressor can be controlled remotely Electrical box is a field replaceable unit Quiet, low vbration Specifications Helium Flow (At 300 psi supply pressure, 100 psi return pressure) Minimum required water Flow Envelope Static Charge Weight Cold Head Drive Power Input (3 phase) Power Consumption 60 SCFM 1.5 Gallons/Minute 21 tall x wide x deep 220 psi 220 lbs Options available for driving a variety of cold heads High Voltage Unit: 380V, 415V +/- 50 Hz +/- 3% 480V +/- 60 Hz +/- 3% Low Voltage Unit: 200V +/- 50 Hz +/- 3% 200V, 230V +/- 60 Hz +/- 3% 8-9 kw 6

Austin Scientific Compressors Air or Water Cooled Model 125 Helium Throughput 12.5 SCFM Dimensions Length 19.

5 KW 190/210 VAC 10, 50 Hz, 1.5 KW 210/240 VAC 10, 50 Hz, 1.

Throughput 45 SCFM Dimensions Length 23.6 inches Width 23.6 inches Height 27.

7 Austin Scientific Compressors Air or Water Cooled Model 125 Helium Throughput 12.5 SCFM Dimensions Length 19.0 inches Width 19.5 inches Height 16.0 inches Weight 160 pounds Electrical Power 208/230 VAC 10, 60 Hz, 1.5 KW 190/210 VAC 10, 50 Hz, 1.5 KW 210/240 VAC 10, 50 Hz, 1.5 KW Largest compatible Cryopump CTI Cryo-torr 8* ASC Cryo-Plex 8 Cooling Air or Water Model 450 Helium Throughput 45 SCFM Dimensions Length 23.6 inches Width 23.6 inches Height 27.6 inches Weight 310 pounds Electrical Power 208/230 VAC 30, 50/60 Hz, 5 KW 460 VAC, Hz, 5 KW 380 VAC,30 50 Hz, 5 KW Air Cooled only Largest compatible Cryopump CTI Cryo-torr 500* ASC Cryo-Plex 16 Cooling Air or Water 7

Cryopump Compressor Adsorbers A B C D E F G H I J K Austin Scientific replacement adsorbers are fabricated using new dehydrated charcoal, glass, wool, felt pads and Aeroquip couplings.

P/N ASC P/N Replacement Model Interval CTI-Cryogenics 9600 A 8080300K001 AD-9600 3 years CTI-Cryogenics 8500/8510 A 8080275K001 AD-8500 3 years CTI-Cryogenics 8200 A 8080255K001 AD-8200 1 year

8 Cryopump Compressor Adsorbers A B C D E F G H I J K Austin Scientific replacement adsorbers are fabricated using new dehydrated charcoal, glass, wool, felt pads and Aeroquip couplings. All units are carefully cleaned, packed, leak checked, decontaminated and charged with % pure helium. Manufacturer Compressor Fig. Mfg. P/N ASC P/N Replacement Model Interval CTI-Cryogenics 9600 A K001 AD years CTI-Cryogenics 8500/8510 A K001 AD years CTI-Cryogenics 8200 A K001 AD year CTI-Cryogenics 8300 B K001 AD year CTI-Cryogenics 1020 C K001 AD year CTI-Cryogenics SC A K001 AD-SC 1 year CTI-Cryogenics MC D K001 AD-MC 1 year APD Cryogenics HC-2/4 F D AD-HC 1 year Air Products 1L02W/1R02W E C AD year Varian 202 E AD year Varian (Ebara) 313/323/2.1 G AD year Leybold RW3/RA3 H AD-RW3 2 years Leybold RW4000/6000 I AD years Austin Scientific 125W B AD-125W 1 year Austin Scientific 125A J AD-125A 1 year Austin Scientific 450 C AD years Austin Scientific 600 K 800?? AD years 8

Helium Lines and Fittings Helium Lines Austin Scientific helium lines and adapters are fabricated from stainless steel and

999% pure helium. Special configurations are also available. 1/2 in. Line with 1/2 in.

Couplings (Add -90 for elbow on one end) Helium Tee P/N T-MMF Helium Elbow P/N EL-MF Three Part Manifold P/N 80075 Cryopump

screws) Maintenace Manifold P/N 10134 Helium Bulkhead Union P/N BU-MM Helium Charge Line P/N 10346 10 ft.

9 Helium Lines and Fittings Helium Lines Austin Scientific helium lines and adapters are fabricated from stainless steel and equipped with Aeroquip couplings. All assemblies are carefully cleaned, leak checked, decontaminated and charged with % pure helium. Special configurations are also available. 1/2 in. Line with 1/2 in. Couplings Any length available Call for part no. (Add -90 for elbow on one end) 3/4 in. Line with 1/2 in. Couplings (Add -90 for elbow on one end) Helium Tee P/N T-MMF Helium Elbow P/N EL-MF Three Part Manifold P/N Cryopump Helium Fittings Item Description P/N A CT-8 Return B CT-8 Supply C CT-10 Supply (includes o-rings and screws) Maintenace Manifold P/N Helium Bulkhead Union P/N BU-MM Helium Charge Line P/N ft. SS Charge Line Helium Regulator P/N HR-580 Regulator Assy. Aeroquip Fittings Item Description P/N A Coupling, Female 5400-S5-8 B Dust Plug 5400-S8-8 C Coupling, Male 5400-S2-8 D Dust Cap 5400-S6-8 E Flat Gasket F O-ring

Power Supplies, Splitters and Cables Power Supplies P/N 10142 Drives one ASC or

P/N 10349 Drives one CTI OnBoard cryopump with RC network, 208-230 VAC input

P/N 10358 Drives one CTI OnBoard cryopump with coldhead drive input from 8500

VAC input Splitter Boxes P/N 10359, Three Cryo-Torr type output, input from ASC

P/N 10366, Three On-Board type outputs, input from CTI Model 9600.

10 Power Supplies, Splitters and Cables Power Supplies P/N Drives one ASC or CTI type cryopump with RC network, 115 VAC input. P/N Drives one CTI OnBoard cryopump with RC network, VAC input single phase. P/N Drives one CTI OnBoard cryopump with coldhead drive input from 8500 compressor or similar (adds OnBoard voltages for accessories, control), VAC input single phase. Splitter Boxes P/N 10359, Three Cryo-Torr type output, input from ASC Model 450 or CTI Model P/N 10366, Three On-Board type outputs, input from CTI Model Drive Cables P/N Length (Ft), Cryo-Torr type for CTI and ASC Cryopumps and Compressors. P/N Length (Ft), On-Board type for CTI On-Board Cryopumps and Compressors. P/N Length (Ft), Drives Cryo-Torr type pump from On-Board Compressor (8510). 10

Model 2100 Automatic Cryopump Control Features and Specifications Dual silicon diode temperature digital read out with three adjustable set points.

11 Model 2100 Automatic Cryopump Control Features and Specifications Dual silicon diode temperature digital read out with three adjustable set points. Thermocouple vacuum gauge digital readout with two adjustable set points. Programmable microprocessor based system for analysis and control. Stores parameters for last ten regenerations for review. Automatically provides power for roughing valve, purge gas valve, heaters, compressor relay coil and mechanical pump relay coil. Display: 32 character LCD for display of pressure, temperatures, set points and status. Output power: Roughing valve V Purge gas valve V Heaters (2) Watts, 120V (each) Compressor relay coil V Mechanical pump relay coil V Relay contacts: Cold relay - N.O. and N.C., 5 Amps External interlock: Provision for Hivac Valve position switch Input power: 120VAC or 240VAC 50/60 Hz (specify) Dimensions: Height 3.5 in., Width 19 in., Depth, 8 in. Standard Items Automatic Cryopump control unit Power cord 6 ft. Thermocouple cable 10 ft. Silicon diodode cable 10 ft. (single) Optional Items Single relay contactor in NEMA enclosure 30A, 3 Pole for compressor or mechanical pump control. P/N Thermocouple gauge tube P/N/ TGT-6000-NPT P/N/ TGT-6000-VCR Roughing valve P/N PAV-075-CP Purge gas valve P/N PGV-115 Purge gas heater P/N PGH-100 Blanket heater P/N BH-(size) RS-232 computer interface (factory installed) Dual diode cable 10 ft. P/N Extra cable length Model 310 and 320 Cryopump Monitors Features and Speecifications LCD meter with 1/2 inch digits Range to 320 Kelvin Calibrated for CTI type diode 10 ft. diode cable and connector included Can be panel mounted or stand alone Power: 120V or 240V, 50/60 Hz (specify) Model 320 (with high and low setpoints) Size: 5 1/2 in. W x 2 3/4 in. H x 6 3/4 in. L Model 310 (without setpoints) Size: 3 3/4 in. W x 1 7/8 in. H x 6 3/4 in. L 11

Replacement Parts & Accessories Roughing Valve 115 VAC P/N 10191 Purge Gas Valve 115 VAC P/N 10185 UHV Burst Disc 1.

BH-8 175 CT-8F BH-8F 190 CT-10 BH-10 240 CT-400 BH-16 230 CT-500 Mylar Kit (equal to CTI #8080005K007) P/N MK-500

Switch 50238 1020/8500/8510 Electrical Item P/N Phase Monitor 50097 1020 Comp. Switch 50084 8500 Comp.

Compressor Valve Plate Kit For CTI Model 1020 and 8500 (equal to CTI #8031085) includes gaskets, etc.

12 Replacement Parts & Accessories Roughing Valve 115 VAC P/N Purge Gas Valve 115 VAC P/N UHV Burst Disc 1.33 Mini CF P/N BD-133 Purge Gas Heater 115 VAC, 100W P/N Blanket Heater Pump P/N Watts CT-100 BH CT-8 BH CT-8F BH-8F 190 CT-10 BH CT-400 BH CT-500 Mylar Kit (equal to CTI # K007) P/N MK-500 SC/8300/8200 Switches Item P/N SC Comp. Switch SC Coldhead Switch Comp. Switch Comp. Switch /8500/8510 Electrical Item P/N Phase Monitor Comp. Switch Comp. Switch Comp. Switch Thermostat, Gas Thermostat, Water A. B. Compressor Valve Plate Kit For CTI Model 1020 and 8500 (equal to CTI # ) includes gaskets, etc. P/N Oil Injection Filter (used on all compressors) (equal to CTI # ) P/N Compressor Gauges Used On P/N A. MC and late SC B and early SC

13 13

14 Repair and Exchange Programs Repair This applies to equipment sent to our service centers in repairable condition and returned to the customer completely reconditioned. Pumps and compressors are overhauled and tested to exacting specifications. Additional charges may apply to replace missing parts or failed components such as drive motors, heat exchangers - customers will be advised prior to work being completed. Exchange Austin Scientific endeavor to maintain an exchange stock of the most common pumps and compressors to reduce equipment downtime to a minimum. If an exchange pump or compressor is available, we can ship within 24 hours. Some metal sealed, OnBoard and non-standard units may not be available for exchange. Complete Cryopumps Manufacturer Model Warranty CTI-Cryogenics Cryotorr -100* 6 months CTI-Cryogenics Cryotorr -8* 12 months CTI-Cryogenics Cryotorr -10* 12 months CTI-Cryogenics Cryotorr -400* 12 months CTI-Cryogenics Cryotorr -500* 12 months CTI-Cryogenics On-Board -8*, 10*, 400* 12 months Austin Scientific CryoPlex months Austin Scientific CryoPlex months Austin Scientific CryoPlex months Air Products/APD DE202, AP-8 6 months Refrigerator Assy. (less vacuum vessel & arrays) Manufacturer Model Used On Warranty CTI-Cryogenics 21 or 22 CT-100, CT-7 6 months CTI-Cryogenics 350CP CT-8/8F 12 months CTI-Cryogenics 1020CP CT months CTI-Cryogenics 1050CP CT-400/ months Leybold RGD 580/5100 RPK 5000/ months Compressors Manufacturer Model Warranty CTI-Cryogenics SCW 12 months CTI-Cryogenics months CTI-Cryogenics months CTI-Cryogenics 1020R/RW 12 months CTI-Cryogenics 8500/ months Austin Scientific 125A/125W 12 months Austin Scientific 450A/450W 12 months Leybold RW3 12 months Leybold RW months Leybold RW months As an example of the scope of work performed in our standard overhaul, a CTI cryopump is repaired as follows: Vacuum Side 1. Disassemble and clean parts to be reused. 2. Replace 15K condensing array with new assembly. 3. If 80K condensing array and 80K radiation shield are not in as new condition, replace with new or reconditioned parts. 4. Inspect and test silicone diode and hydrogen vapor bulb temperature indicator and repair or replace if required. 5. Reassemble in clean room conditions using new indium gasket set. 6. Upgrade to new style relief valve and install standpipe filter. 7. Leak check using helium mass spectrometer. Helium Circuit 1. Replace all elastomers and all components subject to wear, including top and bottom bushings, drive bearing, cam bearings, motor bearings, displacer seals and kap seals. 2. Inspect displacer regenerator and repack or replace as necessary. 3. Inspect all parts for damage and replace as required, including scotch yoke, valves, valve stems, rocker arms, crankshaft, etc. 4. Set valve timing and test inlet valve for perfect seal. 5. Inspect motor shaft for cracks, replace shaft if required and remagnetize motor. 6. Leak check using helium sniffer probe. 7. Perform cool down test and verify conformance to specifications. Record test results for permanent record. 14

15 Replacement Parts & Accessories CTI Cryo-Torr 100 * Cryopump Refer to Page 26 for Helium Fitting information Item Description CTI P/N ASC P/N Notes Item 1 80K Condensing Array K001 80KCA-100 Incl. O-Ring, Gloves, etc K Radiation Shield K Incl. I-CT100, O-Ring, etc K Condensing Array K Incl. I-CT100, O-Ring, etc. 3 4 Indium Gasket Set-Precut n/a I-CT % Pure Indium 4 4a Indium Sheet 3" x 5" x.005" n/a I-3x % Pure Indium 5 Pressure Relief Valve K New Improved Design 5 6 Silicon Diode Temp. Sensor K Inc. Block and Leads 6 7 Silicon Diode Retrofit Kit K Incl. Flange/Connector 6 8 Relief Valve Seal Kit n/a SK-RV 8 9 Purge Fitting Seal Kit n/a SK-RPF 9 15

16 Replacement Parts & Accessories CTI Cryo-Torr 8 * Cryopump Refer to Page 26 for Helium Fitting information Item Description CTI P/N ASC P/N Notes Item 1 80K Condensing Array K Incl. I-CT8, O-Ring, etc K Radiation Shield K004 80KRS-8F Incl. I-CT8, O-Ring, etc K Condensing Array K010 15KCA-8 Incl. I-CT8, O-Ring, etc. 3 4 Indium Gasket Set-Precut n/a I-CT % Pure Indium 4 4a Indium Sheet 3" x 5" x.005" n/a I-3x % Pure Indium 5 Pressure Relief Valve K New Improved Design 5 6 Regeneration Purge Fitting G PTA8 Complete Assy. 6 7 Hydrogen Vapor Bulb Assy K Complete Kit 7 7a Silicon Diode Temp. Sensor K Incl. Block & Leads 8 Silicon Diode Retrofit Kit K Incl. Flange/Connector 8 9 Inlet Flange O-Ring V 9 10 Relief Valve Seal Kit n/a SK-RV Purge Fitting Seal Kit n/a SK-RPF 11 16

17 Replacement Parts & Accessories CTI Cryo-Torr 8F * Cryopump Refer to Page 26 for Helium Fitting information Item Description CTI P/N ASC P/N Notes 1 80K Condensing Array K Ind. I-CT10, O-Ring, etc. 2 80K Radiation Shield K Ind. I-CT10, O-Ring, etc. 3 15K Condensing Array K010 15KCA-8F Ind. I-CT10, O-Ring, etc. 4 Indium Gasket Set-Precut n/a I-CT % Pure Indium 4a Indium Sheet 3" x 5" x.005" n/a I-3x % Pure Indium 5 Pressure Relief Valve K New Improved Design 6 Silicon Diode Temp. Sensor K Incl. Block & Leads 7 Silicon Diode Retrofit Kit K Incl. Flange/Connector 8 Inlet Flange O-Ring V 9 Relief Valve Seal Kit n/a SK-RV Purge Fitting Seal Kit n/a SK-RPF 17

18 Replacement Parts & Accessories CTI Cryo-Torr 10 * Cryopump Refer to Page 26 for Helium Fitting information Item Description CTI P/N ASC P/N Notes 1 80K Condensing Array K Incl. I-CT10, O-Ring, etc. 2 80K Radiation Shield K004 80KRS-10 Incl. I-CT10, O-Ring, etc. 3 15K Condensing Array K010 15KCA-10 Incl. I-CT10, O-Ring, etc. 4 Indium Gasket Set-Precut n/a I-CT % Pure Indium 4a Indium Sheet 3" x 5" x.005" n/a I-3x % Pure Indium 5 Pressure Relief Valve K New Improved Design 6 Regeneration Purge Fitting G PTA-10 Complete Assy. 7 Hydrogen Vapor Bulb Assy K Complete Kit 7a Silicon Diode Temp. Sensor K Incl. Block & Leads 8 Silicon Diode Retrofit Kit K Incl. Flange/Connector 9 Inlet Flange 0-Ring P V 10 Relief Valve Seal Kit n/a SK-RV 11 Purge Fitting Seal Kit n/a SK-RPF 18

19 Replacement Parts & Accessories CTI Cryo-Torr 400 * Cryopump Refer to Page 26 for Helium Fitting information Item Item Description CTI P/N ASC P/N Notes 1 80K Condensing Array K Incl. l-ct400, O-Ring, etc. 2 80K Radiation Shield K004 15KCA-400 Incl. l-ct400, O-Ring, etc. 3 15K Condensing Array K002 15KCA-400 Incl. l-ct400, O-Ring, etc. 4 15K Cryo-Adsorbing Array K003 15KCAA-400 Incl. l-ct400, O-Ring, etc. 5 Indium Gasket Set-Precut n/a l-ct % Pure Indium 5a Indium Sheet 3" x 5" x.005" n/a l-3x % Pure Indium 6 Pressure Relief Valve K New Improved Design 7 Regeneration Purge Fitting G PTA16 Complete Assy. 8 Hydrogen Vapor Bulb Assy K Complete Kit 8a Silicon Diode Temp. Sensor K Incl. Block & Leads 9 Silicon Diode Retrofit Kit K Incl. Flange/ Connector 10 Inlet Flange 0-Ring K V 11 Relief Valve Seal Kit n/a SK-RV 12 Purge Fitting Seal Kit n/a SK-RPF 19

20 CTI Cryo-Torr 7/100 * Drive Unit/ Displacer Assembly Item Description CTI P/N ASC P/N Qty/Pump Repair Kit (Items Marked*) n/a RK-CT7 1 1* Seal, No. 2 Displacer Expander Ring * Seal, No.1 Displacer Cap, No.1 Displacer Retaining Ring * Seal Assy., Yoke * Bushing n/a Yoke Shaft & Pins Yoke Block n/a Valve Spring Valve Spring * O-Ring, Valve B 2 13 Exhaust Valve Body Inlet Valve Body * Seal Assy., Inlet Valve * O-Ring B 1 17* Bushing n/a * O-Ring, Drive Rod Cap B 1 19* O-Ring, Plug B 2 20* Drive Bearing Crankshaft * Bearing, Cam * Retaining Ring Valve Operator Assy * O-Ring, Motor B 1 26* O-Ring, Motor Housing B 1 27* Front Bearing, Motor * O-Ring, Bearing n/a 2-020V 1 29* Rear Bearing, Motor n/a 2-020V 1 30* Key, Motor Shaft * O-Ring, Cylinder B 1 20

21 CTI Cryo-Torr 8/8F * Drive Unit/ Displacer Assembly Item Description CTI P/N ASC P/N Qty/Pump Repair Kit (Items Marked*) n/a RK-CT8 1 1* Seal, No.2 Displacer L Tool, Seal lnsertion L No.2 Displacer L Pin, No.2 Displacer Trunnion Pin L Washer, Spring Pin, No.1 Displacer L No. I Displacer L * Seal, No.1 Displacer L Dowel Pin

22 CTI Cryo-Torr 8/8F * Drive Unit/Displacer Assembly Item Description CTI P/N ASC P/N Qty/Pump 11 Collar Assy Cap, No.1 Displacer L Retaining Ring Gland Washer L * Kap-Seal, Gland L Gland, Scotch Yoke L O-Ring, Gland B 2 18* Bushing Valve Plate * 0-Ring, Crankcase B 1 21* 0-Ring, Vessel B 1 22 Scotch Yoke L Pin, Locating Bracket, Rocker Arm L Adjusting Bolt L Crankcase G Bushing, Rocker Arm n/a L Rocker Arm & Bushing Stop Nut Compression Spring P0001 L Valve Spring P0002 L Valve Stem L * 0-Ring, Valve B 2 34 Exhaust Valve Body L Inlet Valve Body L * Seal, Inlet Valve L * Bushing n/a * O-Ring, Plug B 1 40 Plug L Plug L Relief Valve * 0-Ring B 3 45 Guide Pin & Plug L * 0-Ring, Sight Glass B 1 47 Sight Glass L Retainer, Glass L * Retaining Ring * Drive Bearing Crankshaft L * Valve Bearing Key L Valve Eccentric L Motor Front Plate * 0-Ring B 1 57* Motor Bearing * 0-Ring, Motor B 2 59 Motor Housing SS Drive Motor Assy

23 CTI Cryo-Torr 10 * Drive Unit/ Displacer Assembly Item Description CTI P/N ASC P/N Qty/Pump Repair Kit (Items Marked*) n/a RK-CT10 1 1* Seal, No. 2 Displacer P Tool, Seal lnsertion P No. 2 Displacer n/a Pin, No. 2 Displacer n/a 5 n/a 7 Pin, No. 1 Displacer P No. I Displacer n/a * Seal, No.1 Displacer Dowel Pin Collar Assy Cap, No.1 Displacer

24 CTI Cryo-Torr 10 * Drive Unit/Displacer Assembly Item Description CTI P/N ASC P/N Qty/Pump 13 Retaining Ring Gland Washer L * Kap-Seal, Gland L Gland, Scotch Yoke L * O-Ring, Gland B 2 18* Bushing Valve Plate * 0-Ring, Crankcase B 1 21* 0-Ring, Vessel V 1 22 Scotch Yoke Pin, Locating Bracket, Rocker Arm L Adjusting Bolt L Crankcase G Bushing, Rocker Arm n/a L Rocker Arm & Bushing Stop Nut Compression Spring P001 L Valve Spring P002 L Valve Stem L * 0-Ring, Valve B 2 34 Exhaust Valve Body L Inlet Valve Body L * Seal, Inlet Valve L * Bushing n/a * O-Ring, Plug B 1 40 Plug L Plug L Relief Valve * 0-Ring B 3 45 Guide Pin & Plug L * 0-Ring, Sight Glass B 1 47 Sight Glass L Retainer, Glass L * Retaining Ring * Drive Bearing Crankshaft * Valve Bearing Key L Valve Eccentric L Motor Front Plate * 0-Ring B 1 57* Motor Bearing n/a * 0-Ring, Motor B 2 59 Motor Housing n/a n/a 60* Motor Bearing n/a Drive Motor Assy * O-Ring, Cylinder B 1 24

25 CTI Cryo-Torr 400/500 * Drive Unit/ Displacer Assembly Item Description CTI P/N ASC P/N Qty/Pump Repair Kit (Items Marked*) n/a RK-CT * Seal, No. 2 Displacer L Tool, Seal lnsertion L No. 2 Displacer Pin, No. 2 Displacer Pin, No. 1 Displacer P No. I Displacer n/a * Seal, No.1 Displacer Dowel Pin Collar Assy Cap, No.1 Displacer

26 CTI Cryo-Torr 400/500 * Drive Unit/Displacer Assembly Item Description CTI P/N ASC P/N Qty/Pump 13 Retaining Ring Gland Washer L * Kap-Seal, Gland L Gland, Scotch Yoke L * O-Ring, Gland B 2 18* Bushing Valve Plate * 0-Ring, Crankcase B 1 21* 0-Ring, Vessel V 1 22 Scotch Yoke Pin, Locating Bracket, Rocker Arm L Adjusting Bolt L Crankcase G Bushing, Rocker Arm n/a L Rocker Arm & Bushing Stop Nut Compression Spring P001 L Valve Spring P002 L Valve Stem L * 0-Ring, Valve B 2 34 Exhaust Valve Body L Inlet Valve Body L * Seal, Inlet Valve L * Bushing n/a * O-Ring, Plug B 1 40 Plug L Plug L Relief Valve * 0-Ring B 3 45 Guide Pin & Plug L * 0-Ring, Sight Glass B 1 47 Sight Glass L Retainer, Glass L * Retaining Ring * Drive Bearing Crankshaft * Valve Bearing Key L Valve Eccentric L Motor Front Plate * 0-Ring B 1 57* Motor Bearing * 0-Ring, Motor B 2 59 Motor Housing n/a n/a 1 60* Motor Bearing n/a Drive Motor Assy * O-Ring, Cylinder B 1 26

Austin Scientific - a wholly owned unit of Oxford Instruments - is recognized as the value leader in the manufacture and supply of quality cryogenic equipment and services.

27 Austin Scientific - a wholly owned unit of Oxford Instruments - is recognized as the value leader in the manufacture and supply of quality cryogenic equipment and services. Its line of cryopumps, helium compressors, helium lines, and adsorbers is used throughout the vacuum industry, by leading research laboratories and by MRI manufacturers and service groups. Additionally, Austin Scientific offers comprehensive refurbishment services for its own equipment as well as for that of most of its competitors. Austin's products and services are available through its global network of agents and dealers. Austin Scientific 4114 Todd Lane PO Box Austin, Texas fax mail@austinscientific.com Lauralwood Rd. Number 9 Santa Clara, California fax

CALIFORNIA Proposition 65 Warning:

PARTS MANUAL P1064 For Models: L1064D, L1064A, M1064D, M1064T1, M1064T2, M1064A, M1064H, NL1064D, NL1064T1, NL1064T2, NL1064H1, NL1064H2, M40C2, M55C2, & M65C2 CALIFORNIA Proposition 65 Warning: Diesel