c-si Cell Manufacturing

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Christal York
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Photovoltaic Industry c-si ell Manufacturing PSG tching 2

Damage tching Load ell leaning Sintering 9 dge Isolation 0

Texturing Damaged layer Removes particles from the surface of

then smooths it out. A Handling P.0 B ontrol P.2 Transfer P.

2 Photovoltaic Industry c-si ell Manufacturing PSG tching 2 hemical Delivery Diffusion Metallisation 3 Texturing 2 Saw Damage tching Load ell leaning Sintering 9 dge Isolation 0 Handling ell Sorting Unload ell leaning 2 Saw Damage tching 3 Texturing Damaged layer Removes particles from the surface of the Si-substrate. A Handling P.0 B ontrol P.2 Transfer P.2 ontrol P.3 hemical Products P. Removes any scratches from the surface of the Si-Substrate and then smooths it out. A Handling P.0 B ontrol P.2 Transfer P.2 ontrol P.3 hemical Products P. A Handling P.0 B ontrol P.2 orms a micro rough surface. Transfer P.2 ontrol P.3 hemical Products P.

3 Anti-Reflex oating Diffusion PSG tching Anti-Reflex oating n-layer Anti-Reflection oating p-layer Implementation of pn-junction with gas under high temperature. A Handling P.0 B ontrol P.2 Transfer P.2 D High Vacuum P.3 Removal of Phosphore-Silicat glass from Diffusion process. A Handling P.0 B ontrol P.2 Transfer P.2 ontrol P.3 hemical Products P. Deposition of Anti-Reflex coating. A Handling P.0 B ontrol P.2 Transfer P.2 Metallisation Sintering 9 dge Isolation Silver topside surface electrode Rear electrode Screen printing forms electrodes on the surface on both the front and the back. A Handling P.0 A Handling P.0 ontrol P.3 B ontrol P.2 B ontrol P.2 Transfer P.2 The silver electrode penetrates the anti-reflective coating and connects to the pn-layer. Transfer P.2 To prevent a short circuit a groove is cut using a Laser. A Handling P.0 B ontrol P.2 Transfer P.2 Laser 0 Handling ell Sorting 2 hemical Delivery A handling system is used to transport the cell. A Handling P.0 B ontrol P.2 Transfer P.2 D High Vacuum P.3 A Handling P.0 B ontrol P.2 To measure and sort cells by performance. Transfer P.2 ontrol P.3 hemicals are stored in tanks and delivered to the wet benches. A Handling P.0 B ontrol P.2 Transfer P.2 D High Vacuum P.3 ontrol P.3 hemical Products P. G Static ontrol P.

4 Photovoltaic Industry Module Manufacturing dge Trimmer rame Station Junction Box Installer Sun Simulator Lay Up 3 Stringer Store Unload Module ell Loading 2 Store Washing Load Glass Washing 2 Storage 3 Stringer Lead frame Solar cell Removes particles from the surface of the glass. A Handling P.0 B ontrol P.2 Transfer P.2 ontrol P.3 hemical Products P. lean glass store. A Handling P.0 B ontrol P.2 Transfer P.2 lectrical ribbons are soldering to cells and wired in series. A Handling P.0 B ontrol P.2 Transfer P.2 ontrol P.3

5 Module Transfer Lamination va & Backsheet Despenser Lay Up Lamination Module Transfer Sealant Glass Vacuum Lift and Transfer Sealant Glass A Handling P.0 B ontrol P.2 ells are layed-up on the glass. Transfer P.2 G Static ontrol P. Under vaccum cells, glass and a foil is encapsulated. A Handling P.0 B ontrol P.2 Transfer P.2 G Static ontrol P. The module is transfered to the next part of the process. A Handling P.0 B ontrol P.2 Transfer P.2 rame Station Sun Simulator rame An aluminum frame is formed around the panel and a junction box is installed. A Handling P.0 B ontrol P.2 Terminal Box Transfer P.2 able A sun simulator confirms the output performance and a final check for defects. A Handling P.0 B ontrol P.2 Transfer P.2

6 Photovoltaic Industry Thin ilm Manufacturing Laser Scribe 3 Bus Line Stock Washing Sputtering 9 Laminate & Seal Store 0 raming Washing 2 Sun Simulation Module Handling Laser Scribe 2 ell Transfer a-si Manufacturing Line 2 VD Sputtering PIN-Layer 3 Laser Scribe SI Manufacturing Line PIN-Layer Washing 2 Layer VD/Sputtering 3 Laser Scribe Laser Removes particles from the surface of the glass-substrate. A Handling P.0 B ontrol P.2 Transfer P.2 ontrol P.3 hemical Products P. The TO-layer is deposited on the glass substrate. A Handling P.0 B ontrol P.2 Transfer P.2 D High Vacuum P.3 A laser is used to selectively scribe the TO-Layer into individual cells. A Handling P.0 B ontrol P.2 Transfer P.2

7 PIN-Layer Deposition Laser Scribe 2 Laser p-layer i-layer n-layer Wet Deposition PIN-layer is deposited on the glass substrate. A Handling P.0 B ontrol P.2 Transfer P.2 D High Vacuum P.3 A laser is used to selectively scribe the PIN-layer into individual cells. A Handling P.0 B ontrol P.2 Transfer P.2 Layer-Deposition Laser Scribe 3 Metallic rear electrode n-layer i-layer p-layer Laser Metal Diffusion A rear contact is deposited on the glass substrate. A Handling P.0 B ontrol P.2 Transfer P.2 D High Vacuum P.3 A laser is used to selectively scribe the rear contact-layer into individual cells. A Handling P.0 B ontrol P.2 Transfer P.2 Bus Line Attachment 9 Lamination Lead Wire Sealant Glass Assembly of the electrical bus line. A Handling P.0 B ontrol P.2 Between a second glass subtrate on top the Thin film stack is encapsulated. A Handling P.0 B ontrol P.2 Transfer P.2 G Static ontrol P. 0 raming Module Handling 2 Sun Simulation rame Vacuum Lift and Transfer An aluminum frame is formed around the panel and a junction box is installed. A Handling P.0 B ontrol P.2 Terminal Box Transfer P.2 able The module is transfered to the next process step. A Handling P.0 B ontrol P.2 Transfer P.2 A sun simulator confirms the output performance and a final check for defects. A Handling P.0 B ontrol P.2 Transfer P.2 9

SM Products for the Photovoltaic Industry A Handling lectric Actuators Having both the

-MY Series LXP Low Speed & Low riction Low pressure, friction resistance and speed (less

Series MQ Smooth ylinder Series Y Low Speed (Less than 0mm/s) Low Speed High Speed High

High Speed (More than,000mm/s) High Power ylinder High Speed Rodless ylinder Series RH

3 Position ylinder Series RZQ 3 Position Rotary Table Series MSZ Position ylinder Series

8 SM Products for the Photovoltaic Industry A Handling lectric Actuators Having both the operational ability of an air cylinder and the speed controllability of an electric actuator. Integrated controller type. e-rodless lectric Actuator lectric Actuator (Guide Rod Type) Series -MY Series LXP Series -MY Series LXP Low Speed & Low riction Low pressure, friction resistance and speed (less than 0mm/s) with reduced friction to meet the demands of reduced lurching that occurs during start up. Low Speed ylinder Series X Low Speed Rotary Actuators Series RQ2X/MSQX Low riction ylinder Series MQ Smooth ylinder Series Y Low Speed (Less than 0mm/s) Low Speed High Speed High Speed Actuators (more than,000mm/s) with improved cycle time. High Speed (More than,000mm/s) High Power ylinder High Speed Rodless ylinder Series RH Series Y Low Speed RH Intermediate Stop Actuators with an intermediate stop mechanism. 3 Position ylinder Series RZQ 3 Position Rotary Table Series MSZ Position ylinder Series XSJ ylinder Series J Intermediate Stop Series RZQ Series MSZ Shock Absorbing In response to delicate workpieces transferred at high speed. Shock absorbing stroke end. Sine ylinder Series RH Sine Rodless ylinder Series RA/RB Shock Absorber Series RB/RJ Shock Absorbing Series RA 0

SM Products for the Photovoltaic Industry Handling Other

/G Series HY Water Resistant Guide ylinders Slide Table

Valves (IP/ nclosures) Series MXS Series MGP Port

Port Port Solenoid Valve Port Solenoid Valve Serial

Series SQ Series VQZ Series VQ Series SY Series VV00

Series VQ ittings & Tubing (Stainless Products) Series X

One-touch ittings S-ouplers / Stainless Type Antistatic

Stainless Type Series KQG Series KG Series K Series KKA

Series KKA Process Valves 2 Port Solenoid Valves 2 Port

Series VA lean Room Products Products for use in clean

Particle reducing products, assembled inside a clean

lean Air Module Series LLB lean Series Actuators Series

xhaust leaner Series AMP lean One-touch ittings Series

9 SM Products for the Photovoltaic Industry Handling Other application Water Resistant or use in areas where there is water spray. Hygienic ylinder Series HY Stainless ylinders Series J /G Series HY Water Resistant Guide ylinders Slide Table Guide ylinders Series MXS Series MGP Directional ontrol Valves (IP/ nclosures) Series MXS Series MGP Port Solenoid Valve Port Solenoid Valve Port Solenoid Valve Port Solenoid Valve Port Solenoid Valve Port Solenoid Valve Port Solenoid Valve Port Solenoid Valve Serial Transmission System Series SV Series VQ Series SV/SYJ Series SQ Series VQZ Series VQ Series SY Series VV00 Series X Series SV To reduce the number of wires. Series VQ ittings & Tubing (Stainless Products) Series X Series X SUS3 One-touch ittings SUS3 Insert ittings One-touch ittings S-ouplers / Stainless Type Antistatic One-touch ittings Antistatic Tubing Miniature ittings / Stainless Type Series KQG Series KG Series K Series KKA Series KA Series TA Series M/MS Series KQG Series KG Series KKA Process Valves 2 Port Solenoid Valves 2 Port Solenoid Valves Series VQ20/30 Series VA Series VQ Series VA lean Room Products Products for use in clean rooms. Particle reducing products, assembled inside a clean room and shipped in double packaging. lean Air Module Series LLB lean Series Actuators Series 0-//2-/3 lean Speed ontroller Series AS-PQ/PG lean xhaust leaner Series AMP lean One-touch ittings Series KPQ/KPG lean Air ilter Series SD lean Gas ilter Series S lean Regulator Series SRH Precision lean Regulator Series SRP lean Tubing Series TPH/TPS Series SD Series LLB Series SRH

SM Products for the Photovoltaic Industry B ontrol Sensors or monitoring

an detect vacuum pressure of lift and transfer lines.

Switch (Separate Sensor) Digital low Switch General Purpose luid Pressure

Integrated type Series IS0 Series PS Series P Series PS0 Series P2A

low ontrol quipment Speed ontroller Speed ontroller / Stainless Series AS

Regulator Manifold lectro-pneumatic Regulator Series AR Series ARM Series

conveyance is possible for uneven surfaces and/or with varying textures

yclone Pad (Made to Order) Operating Principle Air enters from supply

inside the pad and leading to the cyclone effect (vacuum).

resulting in the workpiece being lifted without contact.

Levitation Rail (Made to Order) Air layer Negative Pressure Supply Port

10 SM Products for the Photovoltaic Industry B ontrol Sensors or monitoring the flow of fluids, such as air, water oil, Di water chemicals, etc. an detect vacuum pressure of lift and transfer lines. Digital Pressure Switch (Integrated Sensor) Series ZS/IS Digital Pressure Switch (Separate Sensor) Digital low Switch General Purpose luid Pressure Sensor Digital low Sensor Air Digital low Sensor Water Digital low Sensor Integrated type Series IS0 Series PS Series P Series PS0 Series P2A Series P2W Series PMV Separte Sensor type Series PS Series P2A Series PM low ontrol quipment Speed ontroller Speed ontroller / Stainless Series AS Series ASG Series AS Series ASG Pressure ontrol quipment Regulator Regulator Manifold lectro-pneumatic Regulator Series AR Series ARM Series ITV Series ARM Series ITV Transfer Non-ontact Transfer Non-contact conveyance is possible for uneven surfaces and/or with varying textures (Solar cells). yclone Pad (Made to Order) Operating Principle Air enters from supply port and is blown out of the pad s nozzle to generate a whirlwind flow inside the pad and leading to the cyclone effect (vacuum). Supply air is discharged to the atmosphere from between the pad and the workpiece. A layer of air is generated between the yclone Pad and the workpiece, resulting in the workpiece being lifted without contact. To prevent bending and vibration of thin workpieces. Levitation Rail (Made to Order) Air layer Negative Pressure Supply Port Nozzle Whirlwind low Workpiece Series XT Glass rame Levitation Rail Levitation Rail example Note: rame not included. Layer of Air Low Vacuum Products for vacuum lift and transfer. Vacuum jectors Air Suction ilters Vacuum Pads Peek Pads Series Z Series Z Series ZP Series INO Series ZX Series Z Series ZP 2

SM Products for the Photovoltaic Industry D High Vacuum or

Valves for high vacuum chamber vent, supply & isolation.

Quick maintenance Angle Valve Stainless Sngle/Inline Valves

High Vacuum Straight Valve Transfer Gate Valve Door Valve

Series XLD Series XLAQ Series XM/XY Series XMD Series XVD

onstant temperature control of the heat source.

HRZ/HRW Thermo ontrollers Thermo ontroller Series H

11 SM Products for the Photovoltaic Industry D High Vacuum or use in 0 - Pa high vacuum applications. Valves for high vacuum chamber vent, supply & isolation. Vent Aluminum Angle Valves Two stage ontrol Angle Valve Quick maintenance Angle Valve Stainless Sngle/Inline Valves Two stage ontrol Angle Valve Gas Valve Smooth Vent Valve High Vacuum Straight Valve Transfer Gate Valve Door Valve Actuator Vacuum Rodless ylinder Bellow Actuator Series XL Series XLD Series XLAQ Series XM/XY Series XMD Series XVD Series XSA Series YV Series XGL Series XL Series XM ontrol onstant temperature control of the heat source. hillers Thermo ooler Series HRG/HRG Thermo ooler Series HRZ/HRW Thermo ontrollers Thermo ontroller Series H Thermostat Bath Series HB hemical Thermo ontroller Series HD x.) control of a laser oscillating device. Series HRZ Series HD Series H 3

12 SM Products for the Photovoltaic Industry hemical Products hemicals & Di Water High purity products for use with chemicals and Di water. Process Valves Air Operated hemical Valve Series LV Needle Valve Series LVN Pressure ontrol quipment lean Regulator (luororesin Type) Series SR/LVR Series LVQ Series SR low Sensors Digital ontrol Switch Series P2D Pumps Process Pumps Process Pumps Series PA Series PB Digital Switches ittings & Tubing luororesin ittings luororesin Tubing P Tubing lexible luororesin Tubing Series LQ Series TL Series TH Series TD Series P2D Sensors Series PA G Static ontrol Antistatic quipment To prevent an electrical charge due to conductance and to reduce problems caused by the build-up of static electricity. Actuators Antistatic ylinder Series M2-X0 ittings & Tubing Antistatic One-touch ittings Antistatic Tubing low ontrol quipment Antistatic Speed ontroller Vacuum Products Vacuum Pads Series KA Series TA Series AS-X20 Series ZP Series KA Series TA Ionizers orona effect used to neutralize ions and eliminate the build up of static electricity. Ionizer (Bar) Series IZS Ionizer (Nozzle) Series IZN Measuring Instruments Measures the electrical charge potential of the workpiece. lectrostatic Sensor/Monitor Series IZD/IZ Handheld lectrostatic Meter Series IZH Sensor Series IZS Monitor Series IZD/IZ Series IZN

SM Products for the Photovoltaic Industry SM and Advanced Pressure Technology (APTech) In spring 200, SM orporation Japan purchased

Based in Napa, alifornia, USA, AP-Tech was founded in the late 90 s by Rene Zakhour.

exceptional service and technical support almost identical values to those which SM has based its successful approach to business.

made exclusively for both the PV and Semiconductor Industries.

13 SM Products for the Photovoltaic Industry SM and Advanced Pressure Technology (APTech) In spring 200, SM orporation Japan purchased Advanced Pressure Technology better known as AP- Tech - from its directors. Based in Napa, alifornia, USA, AP-Tech was founded in the late 90 s by Rene Zakhour. Rene s objectives were to provide products with uncompromising quality, performance and reliability from a company offering exceptional service and technical support almost identical values to those which SM has based its successful approach to business. rom July 200, our uropean customers can now purchase through SM Pneumatik GmbH AP- Tech s excellent range of high quality products made exclusively for both the PV and Semiconductor Industries. These include a great range of High Purity Gas Regulators which are made, tested and packaged in ultra high clean room conditions, thereby ensuring excellent levels of quality (ISO 900 standard). If you d like more information of AP-Tech products ask your local representative for more information today. July 200

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